Chip frame cleaning system with conveying water retaining component

Abstract

The present application provides a chip frame cleaning system with a conveying and water-blocking component, which relates to the field of semiconductor processing. A chip frame cleaning system with a conveying and water-blocking component comprises a front cleaning rack, a middle cleaning rack and a rear cleaning rack: the bottoms of the middle cleaning rack and the rear cleaning rack are fixedly connected with a fixed box, and the inner cavity of the fixed box is fixedly connected with a cylinder barrel on all sides; the fixed box is respectively provided with an adjustment component and an anti-blocking component on all sides; the inner cavity of the cylinder barrel is provided with a supply component, and the other side of the supply component is respectively provided with a cleaning component and a convection component. The chip frame cleaning system with a conveying and water-blocking component adopts a combination of blocking and anti-blocking and convection water absorption, and replaces the cleaning roller with bristles to perform a rotating cleaning operation on the chip frame and the wafer under the premise of using a cleaning agent as a medium, thereby achieving an efficient cleaning effect of the chip frame.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and in particular to a chip frame cleaning system having a conveying water retaining component. Background Art

[0002] A chip, also known as a microcircuit, microchip, or integrated circuit, refers to a silicon wafer containing an integrated circuit. It is very small and is often part of a computer or other electronic device. Before the chip is packaged, several groups of chips are placed on a whole chip frame for easy cleaning. After cleaning, they are cut into independent chips.

[0003] In the prior art (publication number CN109148336A, patent name is patent application for chip cleaning device), the problem that the corrugated plate in the prior art contains stains that affect the wafer processing environment and quality is solved. In the process of implementing the technical solution, it is found that there are at least the following problems in the prior art.

[0004] During the cleaning of the chip frame, a cleaning roller with bristles is mostly used to rotate and clean the chip frame and the wafer. If the brush is hard, the substrate of the chip frame and the wafer core will be scratched and damaged. If the brush is soft, the substrate of the chip frame and the wafer core will not be effectively cleaned, and the bristles may fall off and remain on the chip frame. Summary of the invention

[0005] The present application aims to at least solve the problem in the prior art that it is not possible to use a combination of blocking and convection water absorption to achieve efficient cleaning of chip frames using a cleaning agent as a medium. To this end, the present application proposes a chip frame cleaning system with a water conveying and water retaining component.

[0006] According to an embodiment of the present application, a chip frame cleaning system with a conveying water retaining member comprises a front cleaning rack, a middle cleaning rack and a rear cleaning rack: the bottoms of the middle cleaning rack and the rear cleaning rack are fixedly connected to a fixed box, and the four sides of the inner cavity of the fixed box are fixedly connected to a cylinder barrel;

[0007] The fixed box is respectively provided with an adjustment component and an anti-blocking component on all sides, the adjustment component includes a double-headed motor, the double-headed motor is fixed at the center of the inner cavity of the fixed box, and the two output shafts of the double-headed motor are embedded with electric push rods, the piston rods of the two groups of electric push rods are fixedly connected with locking heads, and the outer side of the locking head is provided with a locking seat that rotates with the fixed box, the surfaces of the two groups of locking seats are fixedly connected with main synchronous wheels, and the side of the main synchronous wheel away from the locking seat is connected to the slave synchronous wheel through a synchronous belt transmission, and the two groups of The inner cavity of the slave synchronous wheel is fixedly connected with a rotating rod, and the anti-blocking assembly includes a T-shaped slide rail, two groups of the T-shaped slide rails are fixed around the edges of the middle cleaning rack and the rear cleaning rack, and both ends of the rotating rod are fixedly connected with positive and negative threaded rods, the surface walls of the two groups of positive and negative threaded rods are threadedly connected with threaded sleeves, and the top of the threaded sleeves is fixedly connected with a connecting frame, both sides of the top of the two groups of connecting frames are fixedly connected with T-shaped slide seats, and the top of the T-shaped slide seats is fixedly connected with a blocking plate, and the bottoms of the two groups of threaded sleeves are fixedly connected with moving wheels;

[0008] The inner cavity of the cylinder barrel is provided with a supply assembly, and the supply assembly includes a cam, two groups of the cams are fixed on the two output shafts of the double-headed motor, and push rods are slidably connected on both sides of the cam, and the two groups of push rods are fixedly connected to a piston that slides with the cylinder barrel on the side away from the cam, and the outer surface of the push rod is sleeved with a return spring that is fixedly matched with the cylinder barrel and the piston, the exhaust ports of the two groups of cylinder barrels are connected with supply pipes, and the supply pipes are provided with exhaust valves, the ends of the two groups of supply pipes away from the cylinder barrels are connected with a storage tank that is fixedly matched with the fixed box, and a cleaning assembly and a convection assembly are respectively provided on the other side of the supply assembly, and the cleaning assembly includes a manifold rack, and the manifold rack is connected to the first exhaust port of the storage tank, and the head end of the manifold rack is connected to Solenoid valve, the manifold frame is connected to the upper and lower ends of the front cleaning frame, the middle cleaning frame and the rear cleaning frame with a rotating end, and the inner cavity of the rotating end is rotatably connected to the connecting end, one end of the connecting end is connected to a hollow tube, and the other end of the hollow tube is fixedly connected to a driving motor, the outer surface of the hollow tube is sheathed with a water-absorbing sponge, and injection micropores are opened around the hollow tube and the water-absorbing sponge, the convection component includes an angle tube, the angle tube is connected to the manifold frame, and the end of the angle tube away from the manifold frame is respectively connected to a circular main pipe and a square main pipe, the circular main pipe and the square main pipe are distributed in a staggered state, and the circular main pipe and the square main pipe are respectively connected to a curved nozzle and a double-headed nozzle, and the curved nozzle and the double-headed nozzle are located on the same horizontal plane.

[0009] Preferably, both sides of the bottom of the two groups of blocking plates are fixedly connected with slide rails used in conjunction with the T-shaped slide rails, and slide rail grooves slidably matched with the slide rails are provided around the edges of the middle cleaning rack and the rear cleaning rack.

[0010] Preferably, a cover plate is hingedly connected to the top of the pre-cleaning rack, and a support rod is movably connected to the side of the cover plate away from the pre-cleaning rack, and a positioning seat used in conjunction with the support rod is fixedly connected to the center of the pre-cleaning rack.

[0011] Preferably, a reflux hole is opened on one side of the bottom of the front cleaning rack and the middle cleaning rack, and a filter is arranged in the reflux hole. The bottom end of the reflux hole is connected to a reflux pipe, and the inner end of the reflux pipe is connected to a collection box.

[0012] Preferably, an electric heating plate is fixedly connected to the top of the inner cavity of the rear cleaning rack, and an electric heater is fixedly connected to the top of the electric heating plate, and the number of the electric heating plates and the electric heater is three groups and they are on the same plane.

[0013] The beneficial effect of the present application is that before cleaning the chip frame, the double-headed motor of the adjustment component first provides a unified driving source, and the two groups of electric push rods adjust the stroke of the clamping position between the two groups of locking heads and the locking seats, and then the two groups of main synchronous wheels and the slave synchronous wheels cooperate to drive the two groups of rotating rods to rotate synchronously, and at the same time, the two groups of rotating rods drive the blocking plates on the two groups of connecting frames through the two groups of positive and negative threaded rods and threaded sleeves of the anti-blocking component to block and protect the middle cleaning rack and the rear cleaning rack, thereby achieving the splash-proof effect of the cleaning agent in the middle cleaning rack and preventing the loss of the drying heat of the rear cleaning rack, killing two birds with one stone. During the cleaning of the chip frame, the supply component is first The two groups of cams, push rods and pistons generate a pressurized supply in the cylinder barrel, which is transported to the storage tank by the supply pipe for temporary storage. Next, one channel of pressurized gas in the storage tank is supplied into the hollow tube by the manifold rack of the cleaning component through the rotating end and the connecting end, and then the hollow tube and the spray micropores on the absorbent sponge are used to absorb and spray clean the chip frame passing through. Then, another channel of pressurized gas in the storage tank is supplied into the circular main pipe and the square main pipe by the corner pipe of the convection component, and then the staggered curved nozzles and double-headed nozzles are used to perform convection impact on the cleaning agent in the central cleaning rack, and the chip frame passing through the central cleaning rack is cleaned by convection impact, thereby achieving an efficient cleaning effect on the chip frame.

[0014] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 Schematic diagram of the three-dimensional structure of a chip frame cleaning system with a conveying water retaining member according to an embodiment of the present application

[0017] Figure 2 It is a partial side view of the three-dimensional structure of a chip frame cleaning system with a conveying and water-blocking component according to an embodiment of the present application;

[0018] Figure 3 It is a partial rear view of the three-dimensional structure of a chip frame cleaning system with a conveying and water-blocking component according to an embodiment of the present application;

[0019] Figure 4 It is a partial internal view of the three-dimensional structure of a chip frame cleaning system with a conveying and water-blocking component according to an embodiment of the present application;

[0020] Figure 5 It is a partial bottom view of the three-dimensional structure of a chip frame cleaning system with a conveying and water-blocking component according to an embodiment of the present application;

[0021] Figure 6 is a bottom view of the cylinder barrel, the adjustment assembly, the anti-blocking assembly and the supply assembly structure according to an embodiment of the present application;

[0022] Figure 7 is a top view of the cylinder barrel, the adjustment assembly, the anti-blocking assembly and the supply assembly structure according to an embodiment of the present application;

[0023] Figure 8 is a top cross-sectional view of the cylinder barrel, the adjustment assembly and the supply assembly structure according to an embodiment of the present application;

[0024] Fig. 9 It is a partial front view of the structure of the regulating component and the supply component according to the embodiment of the present application;

[0025] Fig.10 is a partial side view of the adjustment component and the anti-blocking component structure according to an embodiment of the present application;

[0026] Fig.11 is a partial bottom view of the anti-blocking assembly structure according to an embodiment of the present application;

[0027] Fig.12 is a rear view of the supply assembly, cleaning assembly and convection assembly structure according to an embodiment of the present application;

[0028] Fig.13 is a side view of the cleaning component and the convection component structure according to an embodiment of the present application;

[0029] Fig.14 is a partial exploded view of the cleaning assembly structure according to an embodiment of the present application;

[0030] Fig.15 It is a front view of the supply component and the auxiliary component structure according to an embodiment of the present application;

[0031] Fig.16 is a rear view of the supply component and the auxiliary component structure according to an embodiment of the present application;

[0032] Fig.17 This is a front view of the structure of the front cleaning rack, the middle cleaning rack, the rear cleaning rack, the fixed box and the collection box according to the embodiment of the present application;

[0033] Fig.18 It is a partial side view of the front cleaning rack and collection box structure according to an embodiment of the present application.

[0034] Icons: 1. Front cleaning rack; 2. Middle cleaning rack; 3. Rear cleaning rack; 4. Fixed box; 5. Cylinder barrel; 6. Adjustment assembly; 61. Double-head motor; 62. Electric push rod; 63. Locking head; 64. Locking seat; 65. Main synchronous wheel; 66. Slave synchronous wheel; 67. Rotating rod; 7. Anti-blocking assembly; 71. T-type slide rail; 72. Positive and negative threaded rod; 73. Threaded sleeve; 74. Connecting frame; 75. T-type slide seat; 76. Sealing plate; 77. Moving wheel; 8. Supply assembly; 81. Cam; 82. Push rod; 83. Piston; 84. Return spring; 85. Supply pipe; 86. Storage tank; 9. Cleaning assembly; 91. Manifold rack; 92. Solenoid valve; 9 3. Rotating end; 94. Connecting end; 95. Hollow tube; 96. Absorbent sponge; 97. Spray micropore; 10. Convection assembly; 101. Angle tube; 102. Round main pipe; 103. Square main pipe; 104. Curved nozzle; 105. Double-head nozzle; 11. Auxiliary assembly; 111. Spray seat; 112. Jet seat; 113. Electric control valve; 114. Water tower; 115. Long telescopic tube; 116. Short telescopic tube; 117. Pressurized tube; 12. Slide rail; 13. Slide rail groove; 14. Cover plate; 15. Reflux hole; 16. Filter screen; 17. Reflux pipe; 18. Collection box; 19. Electric heating plate; 20. Electric heater; 21. Pre-cleaning rack. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.

[0036] In order to make the purpose, technical solutions and advantages of the implementation methods of this application clearer, the technical solutions in the implementation methods of this application will be clearly and completely described below in conjunction with the drawings in the implementation methods of this application. Obviously, the described implementation methods are part of the implementation methods of this application, not all of the implementation methods. Based on the implementation methods in this application, all other implementation methods obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0037] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0038] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0039] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0040] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0041] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0042] like Figure 1-Figure 18 As shown, according to an embodiment of the present application, a chip frame cleaning system with a conveying and water-blocking component comprises a front cleaning rack 1, a middle cleaning rack 2 and a rear cleaning rack 3: a pre-cleaning rack 21 is arranged at the loading position of the front cleaning rack 1, which is used for pre-cleaning of the chip frame; the inner cavities of the front cleaning rack 1, the middle cleaning rack 2 and the rear cleaning rack 3 are all connected with conveyor belts in a transmission manner, and the number of conveyor belts is three, and three chip frames are grouped as a group for efficient transmission; a limiting strip is arranged between each conveyor belt to limit and guide each chip frame; and the front cleaning rack 1 and the middle cleaning rack 2 are interconnected, which is beneficial for the cleaning agent in the middle cleaning rack 2 to flow into the front cleaning rack 1, and the chip frame passing through the front cleaning rack 1 is immersed and cleaned; the rear cleaning rack 3 and the middle cleaning rack 2 are separated by a partition, and only a transmission channel higher than the cleaning agent liquid level is left to prevent the cleaning agent in the front cleaning rack 1 and the middle cleaning rack 2 from flowing into the rear cleaning rack 3;

[0043] A cover plate 14 is hingedly connected to the top of the front washing rack 1 through a hinge, and a support rod is movably connected to the side of the cover plate 14 away from the front washing rack 1. A positioning seat used in conjunction with the support rod is fixedly connected to the center of the front washing rack 1, which is convenient for manually blocking the front washing rack 1 and also convenient for observing the cleaning agent level in the front washing rack 1. Liquid level sensors for detecting changes in the cleaning agent level are provided in both the front washing rack 1 and the middle washing rack 2.

[0044] A reflux hole 15 is provided on one side of the bottom of the front cleaning rack 1 and the middle cleaning rack 2 to reflux the cleaning agent waste liquid generated after the cleaning in the front cleaning rack 1 and the middle cleaning rack 2, and a filter screen 16 is provided in the reflux hole 15 to filter the impurity particles in the reflux cleaning agent waste liquid to prevent the pipeline from being blocked. The bottom end of the reflux hole 15 is connected to a reflux pipe 17, and the inner end of the reflux pipe 17 is connected to a collection box 18 to collect and temporarily store the refluxed cleaning agent waste liquid, which is conducive to subsequent recycling work;

[0045] The top of the inner cavity of the post-cleaning rack 3 is fixedly connected with an electric heating plate 19, and the top of the electric heating plate 19 is fixedly connected with an electric heater 20, and the number of the electric heating plate 19 and the electric heater 20 is three groups and they are on the same plane, and the chip frame passing through the post-cleaning rack 3 is dried, and the subsequent drying process is omitted, making the processing of the chip frame more convenient and efficient;

[0046] The bottom of the middle cleaning rack 2 and the rear cleaning rack 3 are fixedly connected with a fixed box 4, and the inner cavity of the fixed box 4 is fixedly connected with a cylinder barrel 5 around, and the air inlet of the cylinder barrel 5 is connected with an air intake pipe, and the air intake pipe is provided with an air intake valve, and the fixed box 4 is respectively provided with an adjustment component 6 and a blocking component 7 used in conjunction with the middle cleaning rack 2 and the rear cleaning rack 3 around, to block and block the middle cleaning rack 2 and the rear cleaning rack 3, so as to prevent the cleaning agent in the middle cleaning rack 2 and the heat in the rear cleaning rack 3 from splashing and dissipating;

[0047] The inner cavity of the cylinder barrel 5 is provided with a supply assembly 8, and the other side of the supply assembly 8 is respectively provided with a cleaning assembly 9 and a convection assembly 10 used in conjunction with the middle cleaning rack 2 and the rear cleaning rack 3 to enhance the cleaning effect of the chip frame.

[0048] like Figures 6 to 14 As shown, the adjustment component 6 includes a double-headed motor 61, which is fixed at the center of the inner cavity of the fixed box 4. The double-headed motor 61 provides a unified driving source, and the two output shafts of the double-headed motor 61 are embedded with electric push rods 62. The piston rods of the two groups of electric push rods 62 are fixedly connected with locking heads 63, and the outer side of the locking head 63 is provided with a locking seat 64 that rotates with the fixed box 4. The two groups of electric push rods 62 are used to adjust the stroke of the clamping position between the two groups of locking heads 63 and the locking seats 64. The surfaces of the two groups of locking seats 64 are fixedly connected with main synchronous wheels 65, and the side of the main synchronous wheels 65 away from the locking seat 64 is connected to the slave synchronous wheels 66 through a synchronous belt transmission. The inner cavities of the two groups of slave synchronous wheels 66 are fixedly connected with rotating rods 67, and then the two groups of rotating rods 67 are driven to rotate synchronously with the transmission cooperation of the two groups of main synchronous wheels 65 and the slave synchronous wheels 66.

[0049] The anti-blocking assembly 7 includes a T-shaped slide rail 71, two groups of T-shaped slide rails 71 are fixed around the edges of the middle cleaning rack 2 and the rear cleaning rack 3, and both ends of the rotating rod 67 are fixedly connected with positive and negative threaded rods 72 that rotate with the fixed box 4, the surface walls of the two groups of positive and negative threaded rods 72 are threadedly connected with threaded sleeves 73, and the top of the threaded sleeve 73 is fixedly connected with a connecting frame 74, and both sides of the top of the two groups of connecting frames 74 are fixedly connected with T-shaped slide seats 75 that slide with the T-shaped slide rail 71, and the T-shaped slide seats The top of 75 is fixedly connected with a blocking plate 76 used in conjunction with the middle cleaning rack 2 and the rear cleaning rack 3, and the bottoms of the two sets of threaded sleeves 73 are fixedly connected with moving wheels 77. The two sets of rotating rods 67 drive the blocking plates 76 on the two sets of connecting racks 74 through the two sets of positive and negative threaded rods 72 and the threaded sleeves 73 to block and protect the middle cleaning rack 2 and the rear cleaning rack 3, thereby achieving the effect of preventing the splashing of the cleaning agent in the middle cleaning rack 2 and preventing the drying heat of the rear cleaning rack 3 from being lost, thus achieving two goals at one stroke;

[0050] Both sides of the bottom of the two groups of blocking plates 76 are fixedly connected with sliding rails 12 used in conjunction with the T-shaped sliding rails 71, and sliding rail grooves 13 that slide in conjunction with the sliding rails 12 are opened around the edges of the middle cleaning rack 2 and the rear cleaning rack 3, which play a role of sliding limit for the two groups of blocking plates 76 to prevent the two groups of blocking plates 76 from detaching from the edges of the middle cleaning rack 2 and the rear cleaning rack 3, thereby improving the displacement stability of the two groups of blocking plates 76.

[0051] The supply assembly 8 includes a cam 81, two groups of cams 81 are fixed on the two output shafts of the double-headed motor 61, and push rods 82 are slidably connected to both sides of the cam 81, and the two groups of push rods 82 are fixedly connected to the side away from the cam 81 with a piston 83 that slides with the cylinder barrel 5, and the outer surface of the push rod 82 is sleeved with a return spring 84 that is fixedly matched with the cylinder barrel 5 and the piston 83. During the cleaning of the chip frame, the two groups of cams 81, the push rod 82 and the piston 83 first generate a pressurized supply in the cylinder barrel 5, the exhaust ports of the two groups of cylinder barrels 5 are connected to the supply pipe 85, and the supply pipe 85 is provided with an exhaust valve, and the two groups of supply pipes 85 are connected to the storage tank 86 that is fixedly matched with the fixed box 4 at one end away from the cylinder barrel 5, and the supply pipe 85 transports the supply to the storage tank 86 for temporary storage.

[0052] The cleaning assembly 9 includes a manifold frame 91, which is connected to the first exhaust port of the storage tank 86, and the head end of the manifold frame 91 is connected to a solenoid valve 92. The upper and lower ends of the manifold frame 91 near the front cleaning frame 1, the middle cleaning frame 2 and the rear cleaning frame 3 are connected to a rotating end 93, and the inner cavity of the rotating end 93 is rotatably connected to a connecting end 94. The rotating end 93 and the connecting end 94 are also in a mutually connected state while being rotatably connected, which not only meets the rotation of the hollow tube 95, but also facilitates the supply of pressurized gas into the hollow tube 95;

[0053] One end of the connecting end 94 is connected to a hollow tube 95, and a path of pressurized gas in the storage tank 86 is supplied into the hollow tube 95 through the manifold frame 91 through the rotating end 93 and the connecting end 94, and the other end of the hollow tube 95 is fixedly connected to a driving motor, and the outer surface of the hollow tube 95 is sleeved with a water-absorbing sponge 96, and the reserved gap between the water-absorbing sponges 96 distributed up and down is only enough for the chip frame to pass through, and the cleaning agent in the front cleaning rack 1 and the middle cleaning rack 2 is absorbed and blocked, and the hollow tube 95 and the water-absorbing sponge 96 are provided with injection micropores 97 around them, and the chip frame passing through is then absorbed and sprayed for cleaning by the injection micropores 97 on the hollow tube 95 and the water-absorbing sponge 96.

[0054] The convection component 10 includes an angle tube 101, which is connected to the manifold rack 91, and one end of the angle tube 101 away from the manifold rack 91 is respectively connected to a circular main pipe 102 and a square main pipe 103, the circular main pipe 102 and the square main pipe 103 are distributed in a staggered state, and another path of pressurized gas in the storage tank 86 is supplied to the circular main pipe 102 and the square main pipe 103 by the angle tube 101, and the circular main pipe 102 and the square main pipe 103 are respectively connected to a curved nozzle 104 and a double-headed nozzle 105, the curved nozzle 104 and the double-headed nozzle 105 are located on the same horizontal plane, and then the staggered curved nozzles 104 and the double-headed nozzles 105 perform convection impact on the cleaning agent in the central cleaning rack 2, and perform convection impact cleaning on the chip frame passing through the central cleaning rack 2, so as to achieve an efficient cleaning effect of the chip frame.

[0055] like Fig.15 and Fig.16 As shown, during the cleaning of the chip frame with a cleaning agent, the cleaning agent is mostly injected into the cleaning rack manually, and the cleaning agent cannot be sprayed evenly on the chip frame, and then the chip frame is immersed in cleaning. At the same time, it also cannot play a turbulent role on the chip frame in a drying state, resulting in heat accumulation in a certain corner, resulting in insufficient drying of the chip frame. The two groups of blocking plates 76 are provided with auxiliary components 11 used in conjunction with the middle cleaning rack 2 and the rear cleaning rack 3. The auxiliary components 11 include a spray seat 111 and an air jet seat 112, and the chip frames flowing through the middle cleaning rack 2 and the rear cleaning rack 3 are sprayed with cleaning agents and turbulent flow treatments;

[0056] Two groups of spray seats 111 and jet seats 112 are respectively embedded in the center of the blocking plate 76, and the top of the spray seat 111 is connected to an electric control valve 113, which is used to electrically open and close the spray cleaning agent from the spray seat 111. The tops of the two groups of electric control valves 113 are connected to a water tower 114, which provides a cleaning agent source. At the same time, clean water can also be added to the water tower 114 for cleaning and flushing;

[0057] The two groups of spray seats 111 and the air jet seats 112 are connected with a long telescopic tube 115, and the other end of one group of the air jet seats 112 and the spray seat 111 is connected with a short telescopic tube 116 used in conjunction with the long telescopic tube 115, and one end of the two groups of short telescopic tubes 116 away from the air jet seats 112 and the spray seat 111 is connected with a pressurizing tube 117 used in conjunction with the second exhaust port of the storage tank 86, and the pressurized gas in the storage tank 86 is sequentially discharged by the two groups of pressurizing tubes 117, the short telescopic tube 116 and the long telescopic tube 116. The pipe 115 applies pressure to the two groups of spray seats 111 and jet seats 112, forcing the spray seats 111 and jet seats 112 to spray the cleaning agent and the pressurized airflow into the middle cleaning rack 2 and the rear cleaning rack 3 respectively. The cleaning agent in the middle cleaning rack 2 then flows into the front cleaning rack 1, so that the cleaning agent is evenly sprayed on the chip frame, and then the chip frame is immersed in cleaning. At the same time, it also plays a disturbing role on the chip frame in the drying state to prevent heat from gathering in a certain corner, thereby enhancing the drying effect of the chip frame.

[0058] Specifically, the working principle of the chip frame cleaning system with a conveying water retaining member is as follows: first, the two sets of electric push rods 62 are controlled to open and drive the two sets of locking heads 63 to move outward to the clamping position of the locking seat 64, so that the two sets of locking heads 63 and the locking seat 64 are clamped and connected as one, and then the double-headed motor 61 is controlled to open and drive the two sets of main synchronous wheels 65 to rotate forward synchronously through the two sets of locking heads 63 and the locking seat 64 connected as one, and the two sets of main synchronous wheels 65 drive the two sets of rotating rods 67 on the synchronous wheels 66 to rotate synchronously through the two sets of synchronous belts, and the two sets of rotating rods 67 drive the two sets of positive and negative threaded rods 72 to rotate synchronously, and the two sets of positive and negative threaded rods 72 drive the two sets of threaded sleeves 73 to move inward synchronously;

[0059] The two sets of moving wheels 77 play a role in moving the two sets of threaded sleeves 73, and the two sets of threaded sleeves 73 drive the two sets of connecting frames 74 to move inwards accordingly, and the slide rails 12 and the slide rail grooves 13 play a role in sliding and limiting the blocking plates 76, so that the two sets of connecting frames 74 drive the blocking plates 76 on the two sets of T-shaped slide seats 75 to move inwards in the two sets of T-shaped slide rails 71 to a closed state, blocking the space above the middle cleaning rack 2 and the rear cleaning rack 3. After the two sets of blocking plates 76 are closed in place, the double-headed motor 61 is controlled to pause first, and then the two sets of electric push rods 62 are controlled to close and drive the two sets of locking heads 63 to separate from the locking seats 64 to the initial position;

[0060] Then the double-headed motor 61 is controlled again to drive the two cams 81 to rotate at high speed. At this time, the two locking heads 63 on the two electric push rods 62 are in an idling state. When the reset spring 84 provides elastic buffering and reset compensation to the piston 83 on the push rod 82, the two cams 81 drive the two pistons 83 through the two push rods 82 to be in the return suction state in the two cylinder barrels 5, the suction valves on the two suction pipes are opened, and the exhaust valves on the two supply pipes 85 are closed, so that the outside air is sucked into the two cylinder barrels 5. On the contrary, the two pistons 83 pressurize the gas sucked into the two cylinder barrels 5 and supply it to the storage tank 86 through the two supply pipes 85 for temporary storage.

[0061] During the closing of the two sets of blocking plates 76, the two sets of blocking plates 76 also drive the two sets of spray seats 111 and the jet seats 112 to move inward to the positions of the middle cleaning rack 2 and the rear cleaning rack 3 simultaneously. At the same time, the two sets of spray seats 111 and the jet seats 112 moving inward contract the two sets of long telescopic tubes 115 and stretch the two sets of short telescopic tubes 116. Then, the two sets of electric control valves 113 are controlled to open, so that the cleaning agents pre-filled in the two sets of water towers 114 flow into the two sets of spray seats 111, and the pressurized gas in the storage tank 86 is discharged. The cleaning agent is first supplied into two sets of stretched short telescopic tubes 116 through two sets of pressurized pipes 117, and then supplied into two sets of spray seats 111 through two sets of contracted long telescopic tubes 115 and merged with the inflowing cleaning agent. The cleaning agent carrying pressure is sprayed into the middle cleaning rack 2 through the two sets of spray seats 111. Since the middle cleaning rack 2 and the front cleaning rack 1 are interconnected, the cleaning agent in the middle cleaning rack 2 flows into the front cleaning rack 1 to immerse the chip frame for cleaning, and another path of pressurized gas is sprayed into the rear cleaning rack 3 by the two sets of spray seats 112;

[0062] Under the limiting and guiding action of the limit bar, the chip frames are first loaded into the hollow tube 95 and the water-absorbing sponge 96 of the front cleaning rack 1 in groups of three, and the driving motor drives the water-absorbing sponges 96 distributed up and down to rotate toward each other through the hollow tube 95, and the chip frames in groups of three are first squeezed into the three groups of conveyor belts of the front cleaning rack 1, and then squeezed into the three groups of conveyor belts of the middle cleaning rack 2 and the rear cleaning rack 3 for orderly transportation, and the positions of the front cleaning rack 1, the middle cleaning rack 2 and the rear cleaning rack 3 are During the period when the chip frame is squeezed into the conveying state by the three groups of hollow tubes 95 and the water-absorbing sponge 96, the water-absorbing sponge 96 absorbs water from the chip frame and also blocks the cleaning agent inside the chip frame. At the same time, the solenoid valve 92 is controlled to be opened, and the pressurized gas in the storage tank 86 is supplied to the rotating end 93 through the manifold frame 91, and then supplied to the hollow tube 95 through the connecting end 94, and then sprayed from the spray micropores 97 on the hollow tube 95 and the water-absorbing sponge 96 to the surface of the chip frame in the squeezed conveying state, and spray-cleaned;

[0063] At the same time, the pressurized gas supplied into the manifold rack 91 is supplied into the staggered circular main pipes 102 and square main pipes 103 through the corner pipes 101, and then the curved nozzles 104 and double-headed nozzles 105 on the circular main pipes 102 and the square main pipes 103 pressurize the cleaning agent in the middle cleaning rack 2 with a two-way jet airflow, forcing the cleaning agent in the middle cleaning rack 2 to impact and clean the chip frames passing through back and forth. After the chip frames are immersion cleaned and convection cleaned, when they are transported to the rear cleaning rack 3, the three groups of electric heaters 20 are controlled to start in advance and the three groups of electric heating plates 19 are powered on for heating, and then the three groups of electric heating plates 19 are powered on for heating. Under the action of the pressurized airflow sprayed by the two groups of jet seats 112 to the rear cleaning rack 3, the heat generated in the three groups of electric heating plates 19 is evenly distributed in the rear cleaning rack 3, and the chip frame flowing through the rear cleaning rack 3 is evenly dried. After the chip frame completes the cleaning and drying work and is unloaded, the valves on the two groups of reflux pipes 17 are opened, and the front cleaning rack 1 and the middle cleaning rack 2 are filtered by the filter screen 16 in the reflux hole 15, and then flow into the collection box 18 through the two groups of reflux pipes 17 for collection, and finally the cleaning agent waste liquid collected in the collection box 18 is uniformly recovered.

[0064] It should be noted that the specific models and specifications of the double-headed motor 61, the electric push rod 62 and the electric heater 20 need to be selected and determined according to the actual specifications of the device, etc. The specific selection calculation method adopts the existing technology in this field, so it will not be described in detail.

[0065] The power supply and principles of the double-headed motor 61, the electric push rod 62, the electric heater 20 and the valve are clear to those skilled in the art and will not be described in detail herein.

[0066] The above are only embodiments of the present application and are not intended to limit the scope of protection of the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0067] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A chip frame cleaning system with a conveying and water-blocking component, characterized in that: It comprises a front cleaning rack (1), a middle cleaning rack (2) and a rear cleaning rack (3); the bottoms of the middle cleaning rack (2) and the rear cleaning rack (3) are fixedly connected to a fixed box (4), and the inner cavity of the fixed box (4) is fixedly connected to a cylinder barrel (5) on all sides; The fixed box (4) is respectively provided with an adjustment component (6) and an anti-blocking component (7) on all four sides. The adjustment component (6) comprises a double-headed motor (61). The double-headed motor (61) is fixed at the center of the inner cavity of the fixed box (4). Two output shafts of the double-headed motor (61) are embedded with electric push rods (62). The piston rods of the two groups of electric push rods (62) are fixedly connected with locking heads (63). The outer side of the locking head (63) is provided with a locking seat (64) that is rotatably matched with the fixed box (4). The surfaces of the two groups of locking seats (64) are fixedly connected with main synchronous wheels (65). The side of the main synchronous wheel (65) away from the locking seat (64) is connected with a slave synchronous wheel (66) through a synchronous belt transmission. A rotating rod (67) is fixedly connected to the inner cavity of the synchronous wheel (66), the anti-blocking component (7) comprises a T-shaped slide rail (71), two groups of the T-shaped slide rails (71) are fixed around the edges of the middle cleaning rack (2) and the rear cleaning rack (3), and both ends of the rotating rod (67) are fixedly connected to positive and negative threaded rods (72), the surface walls of the two groups of positive and negative threaded rods (72) are threadedly connected to threaded sleeves (73), and the top of the threaded sleeves (73) is fixedly connected to a connecting frame (74), both sides of the top of the two groups of the connecting frames (74) are fixedly connected to T-shaped slide seats (75), and the top of the T-shaped slide seats (75) is fixedly connected to a blocking plate (76), and the bottoms of the two groups of the threaded sleeves (73) are fixedly connected to moving wheels (77); The inner cavity of the cylinder barrel (5) is provided with a supply assembly (8), and the supply assembly (8) includes a cam (81). Two groups of the cams (81) are fixed on two output shafts of the double-headed motor (61), and push rods (82) are slidably connected to both sides of the cams (81). The two groups of push rods (82) are fixedly connected to a piston (83) that is slidably matched with the cylinder barrel (5) on the side away from the cam (81), and the outer surface of the push rod (82) is sleeved with a return spring (84) that is fixedly matched with the cylinder barrel (5) and the piston (83). The two groups of the cylinder barrel (5) are provided with a plurality of push rods (82). The exhaust port of the cylinder (5) is connected to a supply pipe (85), and an exhaust valve is arranged on the supply pipe (85). One end of the two groups of supply pipes (85) away from the cylinder barrel (5) is connected to a storage tank (86) fixedly matched with the fixed box (4), and the other side of the supply assembly (8) is respectively provided with a cleaning assembly (9) and a convection assembly (10), and the cleaning assembly (9) includes a manifold frame (91), and the manifold frame (91) is connected to the first exhaust port of the storage tank (86), and the head end of the manifold frame (91) is connected to a solenoid valve (92), and the manifold The upper and lower ends of the rack (91) close to the front cleaning rack (1), the middle cleaning rack (2) and the rear cleaning rack (3) are both connected with a rotating end (93), and the inner cavity of the rotating end (93) is rotatably connected with a connecting end (94), one end of the connecting end (94) is connected with a hollow tube (95), and the other end of the hollow tube (95) is fixedly connected with a driving motor, the outer surface of the hollow tube (95) is covered with a water-absorbing sponge (96), and the hollow tube (95) and the water-absorbing sponge (96) are both provided with injection micropores (97) around them, and the convection group The component (10) comprises an angle tube (101), wherein the angle tube (101) is connected to a manifold frame (91), and one end of the angle tube (101) away from the manifold frame (91) is respectively connected to a circular main pipe (102) and a square main pipe (103), wherein the circular main pipe (102) and the square main pipe (103) are distributed in a staggered state, and the circular main pipe (102) and the square main pipe (103) are respectively connected to a curved nozzle (104) and a double-headed nozzle (105), and the curved nozzle (104) and the double-headed nozzle (105) are located on the same horizontal plane.

2. A chip frame cleaning system with a conveying and water-blocking member according to claim 1, characterized in that: Both sides of the bottom of the two groups of blocking plates (76) are fixedly connected with slide rails (12) used in conjunction with the T-shaped slide rails (71), and the edges of the middle cleaning rack (2) and the rear cleaning rack (3) are all provided with slide rail grooves (13) that are slidably matched with the slide rails (12).

3. A chip frame cleaning system with a conveying and water-blocking member according to claim 2, characterized in that: A cover plate (14) is hingedly connected to the top of the pre-cleaning rack (1), and a support rod is movably connected to the side of the cover plate (14) away from the pre-cleaning rack (1), and a positioning seat used in conjunction with the support rod is fixedly connected to the center of the pre-cleaning rack (1).

4. A chip frame cleaning system with a conveying and water-blocking member according to claim 3, characterized in that: A reflux hole (15) is provided on one side of the bottom of the front cleaning rack (1) and the middle cleaning rack (2), and a filter screen (16) is arranged in the reflux hole (15); the bottom end of the reflux hole (15) is connected to a reflux pipe (17), and the inner end of the reflux pipe (17) is connected to a collection box (18).

5. The chip frame cleaning system with a conveying and water-blocking member according to claim 4, characterized in that: The top of the inner cavity of the rear cleaning rack (3) is fixedly connected to an electric heating plate (19), and the top of the electric heating plate (19) is fixedly connected to an electric heater (20), and the number of the electric heating plates (19) and the electric heater (20) is three groups and they are located on the same plane.

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