Fluid heating and filtering device

Abstract

The present invention provides a fluid heating and filtering device, comprising: a frame, a first heating part and a second heating part, the first heating part and the second heating part are both installed in the frame, the frame is connected to a liquid inlet, the fluid medium flows into the first heating part or the second heating part through the liquid inlet through a control liquid path, and then flows out of the first heating part and the second heating part and flows into the filtering device through the control liquid path; the control liquid path includes a liquid inlet channel and a liquid outlet channel, the liquid inlet channel is connected to the liquid inlet and connected to the liquid inlet ends of the first heating part and the second heating part, the liquid outlet ends of the first heating part and the second heating part are gathered in the liquid outlet channel, and the liquid outlet channel passes through the frame through the liquid outlet; a back plate is vertically fixed in the frame, and the first heating part and the second heating part are respectively fixed to both sides of the length direction of the back plate. The present invention is used to solve the problem that the single-channel heating device existing in the prior art has low heating efficiency and is difficult to meet the wafer cleaning requirements.

Description

Technical Field

[0001] The invention relates to the field of semiconductor cleaning equipment, and in particular to a fluid heating and filtering device. Background Art

[0002] In the semiconductor cleaning process, the temperature field of the fluid near the wafer has a significant impact on the actual process effect. Therefore, it is necessary to control the temperature of the fluid medium used for wafer cleaning to ensure that the semiconductor process is carried out within the appropriate temperature range. When adjusting the temperature of the cleaning medium used for wafer cleaning, a fluid heating device is required.

[0003] The fluid heating device used in the prior art is usually a single-channel heating device, that is, the cleaning medium enters the heating device from the inlet and is heated before being used for wafer cleaning. The existing fluid heating device has the following problems: first, the amount of fluid that can be accommodated and heated by the single-channel heating device is limited, and a large amount of fluid is required during the wafer cleaning process. The fluid heating speed and fluid supply efficiency of the single-channel heating device are difficult to meet the needs of wafer cleaning. It is necessary to use multiple groups of fluid heating devices at the same time to supply the heating fluid required for wafer cleaning. Therefore, the fluid heating device of the existing single-channel heating device is difficult to meet the needs of wafer cleaning.

[0004] In view of this, it is necessary to improve the fluid heating device in the prior art to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to disclose a fluid heating and filtering device to solve the problem in the prior art that the amount of fluid that can be accommodated and heated by a single-channel heating device is limited, and the heating speed and fluid supply efficiency are difficult to meet the needs of wafer cleaning.

[0006] To achieve the above-mentioned object, the present invention provides a fluid heating and filtering device, comprising: a frame, a first heating part and a second heating part, wherein the first heating part and the second heating part are both installed in the frame, the frame is connected to a liquid inlet, and a fluid medium flows into the first heating part or the second heating part through the liquid inlet through a control liquid path, and then flows out of the first heating part and the second heating part and flows into the filtering device through the control liquid path;

[0007] The control liquid circuit includes a liquid inlet channel and a liquid outlet channel, the liquid inlet channel is connected to the liquid inlet and connected to the liquid inlet ends of the first heating part and the second heating part, the liquid outlet ends of the first heating part and the second heating part are gathered in the liquid outlet channel, and the liquid outlet channel passes through the frame through the liquid outlet;

[0008] A back plate is vertically fixed in the frame, and the first heating part and the second heating part are respectively fixed to two sides of the back plate in the length direction.

[0009] As a further improvement of the present invention, the frame has a bottom plate, the liquid inlet channel is connected to the bottom plate, the liquid inlet channel is provided with a first manual switch valve and a first pneumatic regulating valve, the liquid inlet channel has a first three-way joint, the first three-way joint is respectively connected to the first pneumatic regulating valve, the liquid inlet end of the first heating part and the liquid inlet end of the second heating part, a first flow valve is connected between the liquid inlet end of the first heating part and the first three-way joint, and a second flow valve is connected between the liquid inlet end of the second heating part and the first three-way joint;

[0010] The liquid outlet ends of the first heating part and the second heating part are both formed at the top. The liquid outlet ends of the first heating part and the second heating part are collected to the third connecting pipe through the first connecting pipe and the second connecting pipe, and then flow into the filtering device through the liquid outlet channel.

[0011] As a further improvement of the present invention, the first heating part and the second heating part each include three heating devices arranged in sequence from top to bottom, the heating device having a cylinder, the cylinder being installed on the back plate through a bracket, the cylinder being connected with a plurality of heating rods along the length direction, the cylinder having a liquid inlet hole and a liquid outlet hole, the first three-way joint being connected to the liquid inlet end of the heating device located at the bottom of the first heating part and the second heating part, and the first connecting pipe and the second connecting pipe being connected to the liquid outlet end of the heating device located at the top of the first heating part and the second heating part.

[0012] As a further improvement of the present invention, the third connecting pipe is connected to the filtering device through a liquid pump, and the third connecting pipe and the liquid pump are connected through a second three-way joint, and the second three-way joint is connected with a first temperature solenoid valve for detecting the temperature of the fluid flowing out of the third connecting pipe and a first flow solenoid valve for detecting the flow rate of the fluid flowing out of the third connecting pipe, the first temperature solenoid valve and the first flow solenoid valve are converged and connected to the liquid outlet pipe, and the liquid outlet pipe passes through the side wall of the frame.

[0013] As a further improvement of the present invention, the filtering device is connected to a liquid outlet system at one end away from the liquid pump, and the liquid outlet system includes a second manual switch valve and a second first pneumatic regulating valve. After passing through the second manual switch valve and the second first pneumatic regulating valve, the fluid passes through the frame through the liquid outlet.

[0014] As a further improvement of the present invention, it also includes: a nitrogen purge system, the nitrogen purge system includes an air inlet and an air flow pipe body, the air inlet is penetrated through the side wall of the frame, the air flow pipe body is connected with the air inlet, and the air flow pipe body has two outlets, and the two outlets are respectively connected to the filter device and the liquid outlet pipe.

[0015] As a further improvement of the present invention, the airflow pipe body includes a first regulating valve body and a second regulating valve body, the first regulating valve body and the second regulating valve body are connected to the inner wall of the frame, the first regulating valve body is connected to the air inlet through an airflow duct, and the second regulating valve body is connected to the filtering device and the liquid outlet pipe after being connected to the first regulating valve body.

[0016] As a further improvement of the present invention, a mounting opening is provided on a side wall of the rack, and an exhaust fan is connected to the mounting opening.

[0017] As a further improvement of the present invention, a baffle is connected to a side wall of the frame close to the first heating part and the second heating part at the installation opening.

[0018] As a further improvement of the present invention, needle valves are arranged at the third connecting pipe, the first connecting pipe and the second connecting pipe.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows: first, through the design of the first heating part, the second heating part and the control liquid circuit, the fluid is controlled to enter the first heating part or the second heating part through the liquid inlet channel constituting the control liquid circuit, and the fluid can achieve different heating temperatures when entering the first heating part or the second heating part, and then the fluid heated by the first heating part or the second heating part passes through the liquid outlet channel and is filtered by the filter device and then enters the next device, such as the wafer cleaning device, from the liquid outlet to meet the wafer cleaning needs. Through this scheme, when two types of media at different temperatures are required for wafer cleaning, the fluid can be allowed to enter the first heating part and the second heating part successively through the liquid inlet channel, and then the fluid heated to two temperatures in the first heating part and the second heating part can be used successively, which has higher efficiency than the prior art that requires the preparation of two groups of fluid heating devices and is more suitable for wafer cleaning needs.

[0020] Secondly, through the design of the first temperature solenoid valve and the first flow solenoid valve, when the fluid heated by the first heating part or the second heating part flows through the pump body, the first temperature solenoid valve and the first flow solenoid valve can detect the temperature and flow of the fluid. When the temperature of the fluid is higher than the set value or the flow of the fluid is greater than the set value, the fluid is directly discharged from the control liquid path through the liquid outlet pipe. Through the above method, it is ensured that the fluid has a stable flow rate and flow and is at an appropriate temperature when entering the next equipment, thereby ensuring the normal progress of wafer cleaning.

[0021] Finally, through the nitrogen purging system, when the control liquid circuit is drained, nitrogen is input through the air inlet, the nitrogen passes through the first regulating valve body and then the second regulating valve body, and enters the filter device and the liquid outlet pipe through the branched air flow pipeline, so that the nitrogen enters the control liquid circuit for pressurization, so as to control the residual liquid in the liquid circuit to be discharged, thereby avoiding the problem of contamination of the fluid in the subsequent control liquid circuit. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the structure of the fluid heating and filtering device as a whole in the present invention;

[0023] Figure 2 This is a schematic diagram of the specific structure of the first heating unit and the second heating unit in the present invention;

[0024] Figure 3 This is a schematic diagram of the specific structure of the control liquid circuit in the present invention;

[0025] Figure 4 for Figure 3 Enlarged view of part A in the middle;

[0026] Figure 5 This is a schematic diagram of the specific structure of the nitrogen purge system in the present invention;

[0027] Figure 6 It is a schematic diagram of the structure of the heating device in the present invention. DETAILED DESCRIPTION

[0028] The present invention is described in detail below in conjunction with the various embodiments shown in the accompanying drawings, but it should be noted that these embodiments are not limitations of the present invention, and any equivalent transformations or substitutions in functions, methods, or structures made by ordinary technicians in the field based on these embodiments are all within the scope of protection of the present invention.

[0029] Please refer to Figures 1 to 6A fluid heating and filtering device designed for the present application, compared with the existing fluid heating device, has a first heating part 12, a second heating part 13 and a control liquid circuit 2, and the liquid inlet channel 21 constituting the control liquid circuit 2 controls the fluid to enter the first heating part 12 or the second heating part 13, and the fluid enters the first heating part 12 or the second heating part 13. Compared with the single-channel heating device in the prior art, the fluid can enter the first heating part 12 and the second heating part 13 at the same time through the liquid inlet channel 21, or only the first heating part 12 or the second heating part 13 is used to heat the fluid, and then the fluid heated in the first heating part 12 and the second heating part 13 is used. The fluid heated by the first heating part 12 or the second heating part 13 is filtered by the filtering device 3 during the process of passing through the liquid outlet channel 22, and finally enters the next device, such as the wafer cleaning device, from the liquid outlet 16 for wafer cleaning needs. Through this solution, the fluid can be controlled to flow into the first heating part 12 and the second heating part 13 according to the flow rate by controlling the liquid inlet channel 21, that is, using a single-path heating part for heating, or flow into the first heating part 12 and the second heating part 13 at the same time, that is, using a dual-path heating part to heat the fluid at the same time, so as to meet the normal amount of heating fluid demand and the large amount of fluid heating demand. The overall structure is compact, suitable for the heating demand of large flow fluid during wafer cleaning, and has higher heating efficiency.

[0030] Ginseng Figures 1 to 6 As shown, in this embodiment, the fluid heating and filtering device (hereinafter referred to as the heating and filtering device) includes a frame 1, a first heating part 12 and a second heating part 13, the first heating part 12 and the second heating part 13 are both installed in the frame 1, the frame 1 is connected to the liquid inlet 11, the fluid medium flows into the first heating part 12 or the second heating part 13 through the control liquid path 2 through the liquid inlet 11, and then flows out of the first heating part 12 and the second heating part 13 and flows into the filtering device 3 through the control liquid path 2; the control liquid path 2 includes an inlet channel 21 and an outlet channel 22, the inlet channel 21 is connected to the liquid inlet 11 and is connected to the liquid inlet ends of the first heating part 12 and the second heating part 13, the liquid outlet ends of the first heating part 12 and the second heating part 13 are gathered to the outlet channel 22, and the outlet channel 22 passes through the frame 1 through the outlet 16; the back plate 14 is vertically fixed in the frame 1, and the first heating part 12 and the second heating part 13 are respectively fixed to both sides of the length direction of the back plate 14.

[0031] Ginseng Figures 2 to 4 As shown, the frame 1 has a bottom plate 15, and the liquid inlet channel 21 is connected to the bottom plate 15. The liquid inlet channel 21 is provided with a first manual switch valve 211 and a first pneumatic regulating valve 212. The liquid inlet channel 21 has a first three-way joint 213, and the first three-way joint 213 is respectively connected to the first pneumatic regulating valve 212 and the liquid inlet end B of the first heating part 12 (such as Figure 2 and Figure 4As shown) and the liquid inlet end C of the second heating portion 13 (as shown Figure 4 The first heating part 12 and the second heating part 13 are connected as shown in the figure, a first flow valve 214 is connected between the liquid inlet end B of the first heating part 12 and the first three-way joint 213, and a second flow valve 215 is connected between the liquid inlet end C of the second heating part 13 and the first three-way joint 213; the liquid outlet ends of the first heating part 12 and the second heating part 13 are both formed at the top, and the liquid outlet ends of the first heating part 12 and the second heating part 13 are collected to the third connecting pipe 133 through the first connecting pipe 131 and the second connecting pipe 132, and then flow into the filtering device 3 through the liquid outlet channel 22.

[0032] A back plate 14 is arranged on both sides of the frame 1 perpendicular to the width direction, and the first heating part 12 and the second heating part 13 are arranged on both sides of the length direction of the back plate 14. The frame 1 also has a bottom plate 15, and the control liquid circuit 2 is installed as a whole on the bottom plate 15. The liquid inlet 11 and the liquid outlet 16 of the control liquid circuit 2 pass through one side of the frame 1 in the width direction. When the amount of heated fluid is small, that is, when a single-channel heating unit is used to heat the fluid, the fluid is introduced into the liquid inlet channel 21 from the liquid inlet 11. The following takes the use of the first heating unit 12 as an example. At this time, the first manual switch valve 211 and the first pneumatic regulating valve 212 are both in the open state, the first flow valve 214 is in the open state, and the second flow valve 215 is closed. The fluid passes through the first manual switch valve 211 and the first pneumatic regulating valve 212, and then passes through the first flow valve 214 and the liquid inlet end B of the first heating unit 12 to flow into the first heating unit 12. When the liquid volume that the first heating unit 12 can accommodate is reached, the first flow valve 214 is closed to stop the introduction of liquid into the first heating unit 12. The fluid that has passed through the first heating unit 12 flows through the first connecting pipe 131, and then is filtered through the third connecting pipe 133 and the filter device 3 and output through the liquid outlet 16.

[0033] When the second heating part 13 is used for single-channel fluid heating, the second flow valve 215 is opened, the first flow valve 214 is closed, and the fluid flows through the first pneumatic regulating valve 212, passes through the first three-way joint 213 and the second flow valve 215, and then flows into the second heating part 13 from the liquid inlet end C. The fluid heated by the second heating part 13 flows through the second connecting pipe 132, and then is filtered by the third connecting pipe 133 and the filter device 3 and output through the liquid outlet 16. When the amount of fluid to be heated is large, the first heating part 12 and the second heating part 13 are used simultaneously for dual-channel heating, that is, the first flow valve 214 and the second flow valve 215 are opened simultaneously to pass fluid into the first heating part 12 and the second heating part 13 to meet the needs of large-scale fluid heating. The opening and closing of the liquid inlet channel 21 is controlled by the opening and closing of the first manual switch valve 211, the fluid flow in the liquid inlet channel 21 is controlled by the first pneumatic regulating valve 212, and the fluid flow entering the first heating part 12 and the second heating part 13 is controlled by controlling the opening and closing of the first flow valve 214 and the second flow valve 215 and the opening and closing degree. Through the above scheme, the purpose of controlling the opening and closing of the first flow valve 214 and the second flow valve 215 can control the purpose of the fluid entering the first heating part 12 or the second heating part 13, thereby achieving the heating demand for the fluid of general flow, and opening the first flow valve 214 and the second flow valve 215 at the same time can make the fluid enter the first heating part 12 and the second heating part 13 at the same time for heating, and the amount of fluid heated at the same time is doubled compared with single-channel heating, so as to adapt to the heating demand of large flow fluid.

[0034] Ginseng Figures 2 to 6 As shown, the first heating part 12 and the second heating part 13 each include three heating devices 121 arranged in sequence from top to bottom, the heating device 121 includes a cylinder 122, the cylinder 122 is installed on the back plate 14 through a bracket (not marked), the cylinder 122 is plugged with a plurality of heating rods 123 along the length direction, the cylinder 122 has a liquid inlet hole 1221 and a liquid outlet hole 1222, and the first three-way joint 213 is connected to the liquid inlet end of the heating device 121 located at the bottom of the first heating part 12 and the second heating part 13 (see Figure 4As shown in B and C, the first connecting pipe 131 and the second connecting pipe 132 are connected to the liquid outlet end of the heating device 121 located at the top of the first heating part 12 and the second heating part 13. The third connecting pipe 133 is connected to the filtering device 3 through the liquid pump 221, and the third connecting pipe 133 and the liquid pump 221 are connected through the second three-way joint 222. The second three-way joint 222 is connected with a first temperature solenoid valve 223 for detecting the temperature of the fluid flowing out of the third connecting pipe 133 and a first flow solenoid valve 224 for detecting the flow rate of the fluid flowing out of the third connecting pipe 133. The first temperature solenoid valve 223 and the first flow solenoid valve 224 are collected and connected to the liquid outlet pipe 225, and the liquid outlet pipe 225 passes through the side wall of the frame 1. A needle valve 1331 is set at the third connecting pipe 133 and the first connecting pipe 131 and the second connecting pipe 132.

[0035] Ginseng Figure 3 As shown, the end of the filter device 3 away from the liquid pump 221 is connected to the liquid outlet system 226, and the liquid outlet system 226 includes a second manual switch valve 2261 and a second pneumatic regulating valve 2262. The fluid passes through the second manual switch valve 2261 and the second pneumatic regulating valve 2262 and then passes through the liquid outlet 16 to exit the frame 1.

[0036] Taking the first heating part 12 as an example, the first heating part 12 has three heating devices 121 from top to bottom, and the three heating devices 121 are installed on the same side of the length direction of the back plate 14. The liquid outlet 1222 of the heating device 121 located at the bottom is connected to the liquid inlet 1221 of the adjacent heating device 121 above it through a pipe (not marked), and each pipe (not marked) is respectively connected to one or two temperature sensors 124. It should be noted that in this embodiment, each pipe (not marked) is connected to two temperature sensors 124, and the liquid flows through a temperature sensor 124 when it flows into the first heating part 12 through the liquid inlet end B and flows out of the first heating part 12 through the first connecting pipe 131. In this embodiment, the liquid inlet 1221 of the cylinder 122 of each heating device 121 is located below the liquid outlet 1222. When the fluid enters through the liquid inlet end B of the first heating part 12 (i.e., the liquid inlet hole 1221 of the heating device 121 at the bottom of the first heating part 12), the temperature sensor 124 connected to the liquid inlet end B measures the temperature of the inflowing fluid for the first time and records the temperature t1. The fluid contacts the six heating rods 123 in the cylinder 122 for the first heating, and then flows through the pipeline (unmarked) to the cylinder 122 of the second heating device 121 for the second heating. The temperature sensor 124 connected to the pipeline (unmarked) measures the temperature of the fluid heated by the first heating device 121 and records the temperature t2, and obtains the temperature difference t2-t1=Δt1 between the two temperature sensors 124. It should be noted that in this embodiment, the preset value Δt is set. If Δt1 is less than the preset Δt, taking Δt set to 10°C and the measured Δt1 as 9°C as an example, it indicates that the fluid flow rate flowing into the first heating device 121 is too large, and the first flow valve 214 is adjusted to reduce the fluid flow rate flowing into the first heating part 12. If Δt1 is greater than the preset Δt, for example, Δt1 is 11° C. and Δt is 10° C., it indicates that the fluid flow rate flowing into the first heating device 121 is too small, and the first flow valve 214 is adjusted to increase the fluid flow rate flowing into the first heating part 12 .

[0037] After the fluid is heated by the second heating device 121, it flows through the pipeline (not marked) to the cylinder 122 of the third heating device 121 for the third heating. The temperature sensor 124 connected to the pipeline (not marked) measures the temperature of the fluid heated by the second heating device 121 and records the temperature t3. t3-t2=Δt2. The comparison criteria of Δt2 and the preset Δt are consistent with the above, and will not be repeated here. After the fluid is heated by the third heating device 121, it flows out from the first connecting pipe 131. The temperature sensor 124 connected to the first connecting pipe 131 measures the temperature of the fluid heated by the third heating device 121 and records the temperature t4. t4-t3=Δt3. In summary, the temperature rise of the fluid after being heated by the three heating devices 121 should be three times the preset Δt, that is, 3Δt. The comparison criteria of Δt3 and the preset Δt are consistent with the above, and will not be repeated here. Still taking the preset Δt of 10°C as an example, when the flow rate is moderate, the temperature of the fluid after being heated by the three heating devices 121 is increased by 30°C. Through the setting of the above-mentioned temperature sensor 124, the temperature of the fluid is accurately measured so that the heated fluid is suitable for subsequent steps. The fluid flows into the third connecting pipe 133 through the first connecting pipe 131, and then flows out from the liquid outlet 16 after being filtered by the filter device 3. The three heating devices 121 of the second heating part 13 are connected to the other side of the back plate 14. The specific structure and principle are consistent with those of the first heating part 12, and will not be repeated here. In addition, by connecting the needle valve 1331 to the third connecting pipe 133, the flow in the third connecting pipe 133 can be accurately controlled, thereby ensuring the stability of the flow of the third connecting pipe 133.

[0038] After the liquid flowing out of the third connecting pipe 133 passes through the second three-way connector 222, the first flow solenoid valve 224 and the first temperature solenoid valve 223 detect the temperature and flow of the fluid. If the first temperature solenoid valve 223 detects that the temperature of the fluid is too high or the first flow solenoid valve 224 detects that the flow of the fluid is too large, the first temperature solenoid valve 223 or the first flow solenoid valve 224 is opened to discharge the fluid through the liquid outlet pipe 225. Through the setting of the first temperature solenoid valve 223 and the first flow solenoid valve 224, the flow and temperature of the liquid flowing out of the third connecting pipe 133 can be detected. When the set upper limit is exceeded, the liquid is directly discharged without passing through the liquid pump 221 and the filter device 3, thereby avoiding excessive liquid temperature and flow entering the next device and causing production losses. The liquid with normal temperature and flow enters the filter device 3 through the liquid pump 221, and is filtered and purified by the filter device 3 and discharged into the next production equipment through the liquid outlet system 226 and the liquid outlet 16. Specifically, the second manual switch valve 2261 is opened and closed to control whether the liquid is discharged from the liquid outlet 16, and the opening of the second pneumatic regulating valve 2262 is used to control the liquid flow of the liquid outlet 16, and the second pneumatic regulating valve 2262 can also be used to control the discharge and closing of the liquid outlet 16. Since there may be a water pressure difference or a liquid level difference between the water equipment used in the subsequent process and the fluid heating and filtering device, there is a problem of unsmooth liquid supply or even no liquid supply, so the liquid pump 221 is added to ensure the stability of liquid supply.

[0039] Ginseng Figures 3 to 5 As shown, the heating and filtering device also includes a nitrogen purge system 4, which includes an air inlet 41 and an airflow pipe body 42. The air inlet 41 is arranged on the side wall of the frame 1, and the airflow pipe body 42 is connected to the air inlet 41. The airflow pipe body 42 has two outlets, and the two outlets are respectively connected to the filtering device 3 and the liquid outlet pipe 225. The airflow pipe body 42 includes a first regulating valve body 421 and a second regulating valve body 422. The first regulating valve body 421 and the second regulating valve body 422 are connected to the inner wall of the frame 1. The first regulating valve body 421 is connected to the air inlet 41 through the airflow pipeline 423, and the second regulating valve body 422 is connected to the filtering device 3 and the liquid outlet pipe 225 after being connected to the first regulating valve body 421. When the drainage of the control liquid circuit 2 is completed, nitrogen is input through the air inlet 41, and the nitrogen passes through the first regulating valve body 421 and then the second regulating valve body 422, and enters the filter device 3 and the liquid outlet pipe 225 through the branched air flow pipeline 423, so that the nitrogen enters the control liquid circuit 2 for pressurization, so as to control the discharge of residual liquid in the liquid circuit 2, thereby avoiding subsequent tasks from causing contamination to the fluid in the control liquid circuit 2.

[0040] Ginseng Figure 1As shown, the side wall of the rack 1 is provided with an installation opening 17, and the installation opening 17 is connected to an exhaust fan 171. The side wall of the rack 1 is close to the first heating part 12 and the second heating part 13, and is connected to a baffle 172 at the installation opening 17. The first heating part 12 and the second heating part 13 will generate a lot of heat during operation. The exhaust fan 171 can be set to discharge the high-temperature gas in the rack 1 to maintain the rack 1 at a suitable temperature. The design of the baffle 172 can shield the installation opening 17 to prevent the components in the rack 1 from interfering with the outside world when in operation.

[0041] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the present invention. They are not intended to limit the scope of protection of the present invention. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the present invention should be included in the scope of protection of the present invention.

[0042] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0043] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A fluid heating and filtering device, characterized in that: include: A frame, a first heating part and a second heating part, wherein the first heating part and the second heating part are both installed in the frame, the frame is connected to a liquid inlet, and the fluid medium flows into the first heating part or the second heating part through the liquid inlet through a control liquid path, and then flows out of the first heating part and the second heating part through the control liquid path and flows into the filtering device; The control liquid circuit includes a liquid inlet channel and a liquid outlet channel, the liquid inlet channel is connected to the liquid inlet and connected to the liquid inlet ends of the first heating part and the second heating part, the liquid outlet ends of the first heating part and the second heating part are gathered in the liquid outlet channel, and the liquid outlet channel passes through the frame through the liquid outlet; A back plate is vertically fixed in the frame, and the first heating part and the second heating part are respectively fixed to two sides of the back plate in the length direction; The frame has a bottom plate, the liquid inlet channel is connected to the bottom plate, the liquid inlet channel is provided with a first manual switch valve and a first pneumatic regulating valve, the liquid inlet channel has a first three-way joint, the first three-way joint is respectively connected with the first pneumatic regulating valve, the liquid inlet end of the first heating part and the liquid inlet end of the second heating part, a first flow valve is connected between the liquid inlet end of the first heating part and the first three-way joint, and a second flow valve is connected between the liquid inlet end of the second heating part and the first three-way joint; The liquid outlet ends of the first heating part and the second heating part are both formed at the top, and the liquid outlet ends of the first heating part and the second heating part are collected to the third connecting pipe through the first connecting pipe and the second connecting pipe, and then flow into the filtering device through the liquid outlet channel; The first heating part and the second heating part each include three heating devices arranged in sequence from top to bottom, the heating device having a cylinder, the cylinder being mounted on the back plate through a bracket, the cylinder being plugged with a plurality of heating rods along the length direction, the cylinder having a liquid inlet and a liquid outlet, the first three-way joint being connected to the liquid inlet of the heating device located at the bottom of the first heating part and the second heating part, and the first connecting pipe and the second connecting pipe being connected to the liquid outlet of the heating device located at the top of the first heating part and the second heating part; The third connecting pipe is connected to the filtering device through a liquid pump, and the third connecting pipe and the liquid pump are connected through a second three-way joint, and the second three-way joint is connected with a first temperature solenoid valve for detecting the temperature of the fluid flowing out of the third connecting pipe and a first flow solenoid valve for detecting the flow rate of the fluid flowing out of the third connecting pipe, and the first temperature solenoid valve and the first flow solenoid valve are collected and connected to the liquid outlet pipe, and the liquid outlet pipe passes through the side wall of the frame; It also includes: a nitrogen purge system, the nitrogen purge system includes an air inlet and an air flow pipe body, the air inlet is penetrated through the side wall of the frame, the air flow pipe body is connected with the air inlet, and the air flow pipe body has two outlets, and the two outlets are respectively connected to the filter device and the liquid outlet pipe.

2. The fluid heating and filtering device according to claim 1, characterized in that: The end of the filter device away from the liquid pump is connected to the liquid outlet system, and the liquid outlet system includes a second manual switch valve and a second pneumatic regulating valve. After passing through the second manual switch valve and the second pneumatic regulating valve, the fluid passes through the frame through the liquid outlet.

3. The fluid heating and filtering device according to claim 2, characterized in that: The airflow pipe body includes a first regulating valve body and a second regulating valve body, the first regulating valve body and the second regulating valve body are connected to the inner wall of the frame, the first regulating valve body is connected to the air inlet through an airflow duct, and the second regulating valve body is connected to the filtering device and the liquid outlet pipe after being connected to the first regulating valve body.

4. The fluid heating and filtering device according to claim 1, characterized in that: The side wall of the frame is provided with an installation opening, and the installation opening is connected with an exhaust fan.

5. The fluid heating and filtering device according to claim 2, characterized in that: The side wall of the frame is close to the first heating part and the second heating part and is connected to a baffle at the installation opening.

6. The fluid heating and filtering device according to claim 2, characterized in that: Needle valves are arranged at the third connecting pipe, the first connecting pipe and the second connecting pipe.

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