A composite current collector magnetron sputtering copper coating roller equipment

Abstract

The present invention relates to the field of magnetron sputtering copper plating technology. The present invention discloses a composite current collector magnetron sputtering copper plating coating roller device, including a bracket, a coating roller mechanism and a second bearing. A first fixing frame and a second fixing frame are fixed to the inner top of the bracket. The first connecting shaft passes through the first fixing frame and the second fixing frame, and the second circular gear is meshed and connected to the top of the first circular gear. In the composite current collector magnetron sputtering copper plating coating roller device, after the coolant is introduced into the annular liquid inlet channel, the coolant flows into the cooling pipe along the square liquid delivery pipe, and the coolant flows between the cooling pipe and the inner wall of the coating roller. The coating roller has a good heat dissipation effect, and the cooling pipes are spirally distributed on the cooling cylinder at equal intervals. The coolant temperature in each cooling pipe is not much different, which ensures a uniform cooling effect and avoids the problem of uneven heat dissipation caused by the higher temperature of the coolant flowing to the back.

Description

Technical Field

[0001] The invention relates to the technical field of magnetron sputtering copper plating, in particular to a composite current collector magnetron sputtering copper plating film coating roller device. Background Art

[0002] Magnetron sputtering is The general sputtering method can be used to prepare metals, semiconductors, insulators and other materials, and has the advantages of simple equipment, easy control, large coating area and strong adhesion. It was developed in the 1970s. It also achieves high speed, low temperature and low damage. Because high-speed sputtering is carried out under low pressure, the gas ionization rate must be effectively increased. Magnetron sputtering is achieved by Surface introduction , using magnetic field of To improve Density is used to increase the sputtering rate. Magnetron sputtering technology can be used on vacuum winding coating equipment. The current collector refers to the positive and negative electrodes of the lithium battery, which are used to gather lithium ions, electrons or charges. Generally, the positive electrode current collector is formed by coating the positive electrode material on both surfaces of the aluminum foil, such as the ternary positive electrode material, etc. The negative electrode current collector is generally formed by coating the negative electrode material on both sides of the copper foil, such as graphite, silicon and other materials.

[0003] During the operation of the existing composite current collector magnetron sputtering copper plating coating roller equipment, the surface temperature of the coating roller will become higher and higher. The heat dissipation effect of the coating roller is poor, and it is difficult for the coating roller to take away the heat generated by the magnetron sputtering of the flexible substrate. The substrate is deformed by the heat, resulting in quality defects, which affects the quality of the coating. In view of the above problems, the existing equipment needs to be improved. Summary of the invention

[0004] The purpose of the present invention is to provide a composite current collector magnetron sputtering copper plating coating roller equipment to solve the problem raised in the above background technology that the surface temperature of the coating roller on the existing composite current collector magnetron sputtering copper plating coating roller equipment will become higher and higher during operation, the heat dissipation effect of the coating roller is poor, the coating roller is difficult to take away the heat generated by the magnetron sputtering of the flexible substrate, the substrate is deformed by heat, and quality defects are formed, thereby affecting the quality of the coating.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a composite current collector magnetron sputtering copper plating coating roller device, comprising a bracket, a coating roller mechanism and a second bearing, the bracket is provided with a through hole, the coating roller mechanism is rotatably connected in the through hole through a first bearing, the coating roller mechanism comprises a coating roller, a rotating drum is fixed to one side of the coating roller, the rotating drum is rotatably connected in the through hole through the first bearing, and a first circular gear is fixed to the outer side of the rotating drum.

[0006] A uniform cooling mechanism is fixed to the inner top of the bracket, and the uniform cooling mechanism includes a motor, an output end of the motor is connected to the first bevel gear through a rotating shaft, one side of the first bevel gear is connected to the second circular gear through a first connecting shaft, a first fixing frame and a second fixing frame are fixed to the inner top of the bracket, the first connecting shaft passes through the first fixing frame and the second fixing frame, and the second circular gear is meshingly connected to the top of the first circular gear.

[0007] Preferably, an air hole is opened on one side of the coating roller, and a ventilation duct is fixed to the other side of the coating roller, and the inner ring of the second bearing is fixed to the outside of the ventilation duct.

[0008] By adopting the above technical solution, the air holes and the ventilation pipes can be used for ventilation.

[0009] Preferably, a support frame is fixed to the inner top of the bracket, the first bevel gear is rotatably connected to one side of the support frame, and the first connecting shaft is rotatably connected to the other side of the support frame.

[0010] By adopting the above technical solution, the rotation of the first bevel gear can drive the first connecting shaft to rotate.

[0011] Preferably, the bottom of the first bevel gear is meshedly connected with the second bevel gear, and the bottom of the second bevel gear is connected to the incomplete toothed disc via a second connecting shaft, and the second connecting shaft is rotatably connected to the bottom of the support frame and the first fixing frame.

[0012] By adopting the above technical solution, the rotation of the first bevel gear can drive the second bevel gear, the second connecting shaft and the incomplete toothed disc to rotate.

[0013] Preferably, a screw is rotatably connected to the first fixing frame, and a third circular gear is fixed to one end of the screw, the third circular gear is meshingly connected to the bottom of the incomplete toothed disc, and one side of the third circular gear is connected to the fourth circular gear through a connecting rod.

[0014] By adopting the above technical solution, when the incomplete toothed disc rotates continuously, the third circular gear, the connecting rod, the fourth circular gear and the lead screw rotate forward and reversely.

[0015] Preferably, a sleeve is threadedly connected to the outer side of the screw rod, and the sleeve is rotatably connected to the second fixing frame, and the sleeve passes through the second fixing frame and is connected to the support plate.

[0016] By adopting the above technical solution, the forward and reverse rotation of the screw rod can drive the sleeve and the support plate to move back and forth left and right.

[0017] Preferably, an annular liquid outlet channel is fixed on one side of the support plate, and an annular liquid inlet channel is fixed on one side of the annular liquid outlet channel, and electric liquid valves are fixed on the bottom of the annular liquid outlet channel and the bottom of the annular liquid inlet channel.

[0018] By adopting the above technical solution, the annular liquid inlet channel can be used to take in the coolant, and the annular liquid inlet channel can be used to discharge the coolant.

[0019] Preferably, sealing rings are rotatably connected in the annular liquid outlet channel and the annular liquid inlet channel, and a square liquid infusion pipe is fixed on the sealing ring in the annular liquid inlet channel, a square liquid outlet pipe is fixed on the sealing ring in the annular liquid outlet channel, a cooling cylinder is movably connected in the coating roller, and the square liquid infusion pipe and the square liquid outlet pipe are both fixed in the cooling cylinder.

[0020] By adopting the above technical solution, when the square liquid infusion pipeline and the square liquid outlet pipeline rotate together with the coating roller, the two sealing rings rotate in the annular liquid inlet channel and the annular liquid outlet channel respectively.

[0021] Preferably, a spiral cooling mechanism is fixed in the cooling cylinder, and the spiral cooling mechanism includes a cooling pipe, and a water channel is opened on the outside of the cooling pipe. The cooling pipe is threaded, and the cooling pipes are evenly spaced in the cooling cylinder, and the head end of each cooling pipe is connected to the square infusion pipe, and the end of each cooling pipe is connected to the square liquid outlet pipe.

[0022] By adopting the above technical solution, the coolant can cool and dissipate heat for the coated roller when flowing in the water channel, and then the coolant can flow away through the square liquid outlet pipe.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] 1. The composite current collector magnetron sputtering copper coating roller equipment uses the device for magnetron sputtering copper plating and is applied to the composite current collector industry of power lithium batteries. The current collector is a lithium battery component used to gather lithium ions, electrons or charges at the positive and negative electrodes of lithium batteries. Generally, the positive current collector is formed by coating the positive electrode material on both surfaces of aluminum foil, such as ternary positive electrode materials, etc. The negative current collector is generally formed by coating the negative electrode material on both sides of copper foil, such as graphite, silicon and other materials. In order to improve battery safety and energy density, it is now proposed The concept of composite current collector is to replace the copper foil and aluminum foil in the traditional current collector with composite copper foil and composite aluminum foil respectively, and coat the positive and negative electrode materials. The biggest advantage of composite current collector is safety, not easy to short circuit, cause fire, burn, etc., secondly, it can reduce weight. The focus of composite current collector is the use of composite copper foil and composite aluminum foil. The thickness of traditional copper foil or aluminum foil is about 6-8μm, and the thickness of composite copper foil is only about 6μm, generally with a structure of 1μm copper + 4μm polyester film + 1μm copper.

[0025] 2. The composite current collector magnetron sputtering copper plating roller equipment can achieve the purpose of good heat dissipation effect through the coordinated use of the coating roller, annular liquid inlet channel, square liquid delivery pipe, cooling cylinder and cooling pipe. After the coolant is introduced into the annular liquid inlet channel, the coolant flows into the cooling pipe along the square liquid delivery pipe, and the coolant flows between the cooling pipe and the inner wall of the coating roller. The coating roller has a good heat dissipation effect, and the cooling pipes are spirally distributed on the cooling cylinder at equal intervals. The coolant temperature in each cooling pipe is not much different, which ensures uniform cooling effect and avoids the problem of uneven heat dissipation caused by the higher temperature of the coolant flowing to the back.

[0026] 3. The composite current collector magnetron sputtering copper coating roller equipment is configured to cooperate with each other through the coating roller, the first circular gear, the first bevel gear, the first connecting shaft, the second circular gear, the second bevel gear, the second connecting shaft, the screw, the third circular gear, the connecting rod, the fourth circular gear, the sleeve, the support plate, the annular liquid outlet channel, the annular liquid inlet channel, the square liquid delivery pipeline, the cooling cylinder, the cooling pipeline and the square liquid outlet pipeline. use , which can achieve the purpose of uniform and efficient heat dissipation. The rotation of the first bevel gear can drive the first connecting shaft and the second circular gear to rotate, thereby driving the first circular gear and the coating roller to rotate. At the same time, the second bevel gear, the second connecting shaft and the incomplete toothed disc rotate. The third circular gear, the connecting rod and the fourth circular gear can drive the screw to rotate forward and reversely. The sleeve, the supporting plate, the annular liquid outlet channel, the annular liquid inlet channel, the square liquid infusion pipeline, the cooling cylinder, the cooling pipeline and the square liquid outlet pipeline move back and forth as a whole, so that the coolant can more fully contact the inner wall of the coating roller, making the cooling and heat dissipation effect more comprehensive, uniform and efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] FIG1 is a schematic diagram of a three-dimensional structure of the present invention;

[0028] FIG2 is a schematic diagram of a front cross-sectional structure of the present invention;

[0029] FIG3 is a schematic diagram of the connection structure of the support, the coating roller, the rotating drum, the first circular gear, the air hole, the first connecting shaft, the second circular gear, the square infusion pipeline and the square outlet pipeline of the present invention;

[0030] FIG4 is a schematic diagram of the connection structure of the first bearing, the coating roller, the rotating drum, the first circular gear, the ventilation duct and the second bearing of the present invention;

[0031] FIG5 is a schematic diagram of the connection structure of the coating roller, the first circular gear and the ventilation duct of the present invention;

[0032] FIG6 is a schematic diagram of the connection structure between the first bevel gear and the second bevel gear of the present invention;

[0033] FIG7 is a schematic diagram of the connection structure between the annular liquid outlet channel and the electric liquid valve of the present invention;

[0034] FIG8 is a bottom-up schematic diagram of the three-dimensional structure of the sealing ring, the square liquid delivery pipe, the spiral cooling mechanism and the square liquid outlet pipe connected to each other according to the present invention;

[0035] FIG9 is a top view of a three-dimensional structure diagram of the connection of the sealing ring, the square liquid delivery pipe, the spiral cooling mechanism and the square liquid outlet pipe of the present invention;

[0036] FIG. 10 is a schematic diagram of the structure of the spiral cooling mechanism of the present invention.

[0037] In the figure: 1, bracket; 2, through hole; 3, first bearing; 4, coating roller mechanism; 401, coating roller; 402, rotating drum; 403, first circular gear; 404, air hole; 405, ventilation duct; 5, second bearing; 6, uniform cooling mechanism; 601, motor; 602, rotating shaft; 603, supporting frame; 604, first bevel gear; 605, first connecting shaft; 606, first fixing frame; 607, second fixing frame; 608, second circular gear; 609, second bevel gear ; 610, second connecting shaft; 611, incomplete gear disc; 612, screw rod; 613, third circular gear; 614, connecting rod; 615, fourth circular gear; 616, sleeve; 617, support plate; 618, annular liquid outlet channel; 619, annular liquid inlet channel; 620, electric liquid valve; 621, sealing ring; 622, square liquid infusion pipeline; 623, cooling cylinder; 624, spiral cooling mechanism; 6241, cooling pipeline; 6242, waterway; 625, square liquid outlet pipeline. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technical personnel in this field without creative work are within the scope of protection of the present invention.

[0039] Please refer to Figures 1 to 10. The present invention provides a technical solution: a composite current collector magnetron sputtering copper plating coating roller device, including a bracket 1, a coating roller mechanism 4 and a second bearing 5. The bracket 1 is provided with a through hole 2. The coating roller mechanism 4 is rotatably connected in the through hole 2 through a first bearing 3. The coating roller mechanism 4 includes a coating roller 401. A rotating drum 402 is fixed to one side of the coating roller 401. The rotating drum 402 is rotatably connected in the through hole 2 through the first bearing 3. A first circular gear 403 is fixed to the outer side of the rotating drum 402.

[0040] A uniform cooling mechanism 6 is fixed to the inner top of the bracket 1, and the uniform cooling mechanism 6 includes a motor 601. The output end of the motor 601 is connected to the first bevel gear 604 through a rotating shaft 602. One side of the first bevel gear 604 is connected to the second circular gear 608 through a first connecting shaft 605. A first fixing frame 606 and a second fixing frame 607 are fixed to the inner top of the bracket 1. The first connecting shaft 605 penetrates the first fixing frame 606 and the second fixing frame 607. The second circular gear 608 is meshed and connected to the top of the first circular gear 403.

[0041] In this embodiment, as shown in Figures 1, 2, 3, 4 and 5, an air hole 404 is opened on one side of the coating roller 401, and a ventilation duct 405 is fixed to the other side of the coating roller 401, and the inner ring of the second bearing 5 is fixed to the outside of the ventilation duct 405. The ventilation duct 405 and the air hole 404 can play a ventilation role, and the second bearing 5 can assist the coating roller 401 to rotate.

[0042] In this embodiment, as shown in Figure 2, a support frame 603 is fixed to the inner top of the bracket 1, the first bevel gear 604 is rotatably connected to one side of the support frame 603, and the first connecting shaft 605 is rotatably connected to the other side of the support frame 603. The rotating shaft 602 can rotate under the action of the motor 601, thereby driving the first bevel gear 604 to rotate, thereby driving the first connecting shaft 605 and the second circular gear 608 to rotate, thereby driving the coating roller 401 and the first circular gear 403 to rotate, and the support frame 603 plays a role of supporting, limiting, isolating and protecting the first bevel gear 604.

[0043] In this embodiment, as shown in Figures 1, 2 and 6, the bottom of the first bevel gear 604 is meshedly connected with the second bevel gear 609, and the bottom of the second bevel gear 609 is connected to the incomplete toothed disk 611 through the second connecting shaft 610, and the second connecting shaft 610 is rotatably connected to the bottom of the support frame 603 and the first fixed frame 606. The rotation of the first bevel gear 604 can drive the second bevel gear 609 to rotate, thereby driving the second connecting shaft 610 and the incomplete toothed disk 611 to rotate, and the support frame 603 has the function of isolating and protecting the second bevel gear 609, and has the function of limiting the second connecting shaft 610.

[0044] In this embodiment, as shown in Figures 1 and 2, a screw rod 612 is rotatably connected to the first fixed frame 606, and a third circular gear 613 is fixed to one end of the screw rod 612. The third circular gear 613 is meshed and connected to the bottom of the incomplete toothed disc 611, and one side of the third circular gear 613 is connected to the fourth circular gear 615 through a connecting rod 614. When the incomplete toothed disc 611 rotates and meshes with the third circular gear 613, the third circular gear 613 rotates with the rotation of the incomplete toothed disc 611. At this time, the third circular gear 613 serves as a driving force. The wheel drives the screw rod 612, the connecting rod 614 and the fourth circular gear 615 to rotate as a whole. When the incomplete toothed disc 611 rotates and meshes with the fourth circular gear 615, the fourth circular gear 615 rotates with the rotation of the incomplete toothed disc 611. The fourth circular gear 615 acts as a driving wheel to drive the screw rod 612, the connecting rod 614 and the fourth circular gear 615 to rotate as a whole. Since the rotation direction of the third circular gear 613 when acting as a driving wheel is opposite to the rotation direction of the fourth circular gear 615 when acting as a driving wheel, the screw rod 612 can be rotated forward and reversed.

[0045] In this embodiment, as shown in Figures 1 and 2, the outer side of the screw rod 612 is threadedly connected to a sleeve 616, and the sleeve 616 is rotatably connected to the second fixed frame 607. The sleeve 616 passes through the second fixed frame 607 and is connected to the support plate 617. When the screw rod 612 rotates forward and reverse, the sleeve 616 can move back and forth left and right under the limiting action of the screw rod 612 and the second fixed frame 607, thereby driving the support plate 617 to move back and forth left and right.

[0046] In this embodiment, as shown in Figures 1, 2 and 7, an annular liquid outlet channel 618 is fixed to one side of the support plate 617, and an annular liquid inlet channel 619 is fixed to one side of the annular liquid outlet channel 618. The bottom of the annular liquid outlet channel 618 and the bottom of the annular liquid inlet channel 619 are both fixed with electric liquid valves 620. When the support plate 617 moves back and forth left and right, it can drive the annular liquid outlet channel 618 and the annular liquid inlet channel 619 to move back and forth left and right as a whole. The annular liquid inlet channel 619 is used to inlet liquid, and the annular liquid outlet channel 618 is used to discharge liquid. Opening the electric liquid valve 620 on the annular liquid inlet channel 619 can allow coolant to flow into the annular liquid inlet channel 619, and opening the electric liquid valve 620 on the annular liquid outlet channel 618 can discharge the coolant in the annular liquid outlet channel 618.

[0047] In this embodiment, as shown in Figures 2, 3, 8 and 9, a sealing ring 621 is rotatably connected in the annular liquid outlet channel 618 and the annular liquid inlet channel 619, and a square liquid infusion pipe 622 is fixed on the sealing ring 621 in the annular liquid inlet channel 619, and a square liquid outlet pipe 625 is fixed on the sealing ring 621 in the annular liquid outlet channel 618, and a cooling cylinder 623 is movably connected in the coating roller 401, and the square liquid infusion pipe 622 and the square liquid outlet pipe 625 are fixed in the cooling cylinder 623, and the annular Slideways are provided on the inner side walls of the liquid outlet channel 618 and the inner side walls of the annular liquid inlet channel 619. When the annular liquid outlet channel 618 and the annular liquid inlet channel 619 rotate together with the support plate 617, the square liquid infusion pipe 622 slides in the slideway on the annular liquid inlet channel 619, and the square liquid outlet pipe 625 slides in the slideway on the annular liquid outlet channel 618. The sealing ring 621 can be used to seal the corresponding slideways to ensure that both the annular liquid inlet channel 619 and the annular liquid outlet channel 618 are filled with coolant.

[0048] In this embodiment, as shown in Figures 2, 8, 9 and 10, a spiral cooling mechanism 624 is fixed in the cooling cylinder 623, and the spiral cooling mechanism 624 includes a cooling pipe 6241, and a water channel 6242 is opened on the outside of the cooling pipe 6241, the cooling pipe 6241 is threaded, and the cooling pipes 6241 are evenly spaced in the cooling cylinder 623, and the head end of each cooling pipe 6241 is connected to the square infusion pipe 622, and the end of each cooling pipe 6241 is connected to the square liquid outlet pipe 625. After the coolant flows along the square infusion pipe 622 into the cooling pipe 6241, the coolant will contact the inner wall of the coating roller 401 when flowing through the water channel 6242, so as to facilitate cooling and heat dissipation of the coating roller 401. After the coolant flows through the cooling pipe 6241, it will flow away through the square liquid outlet pipe 625.

[0049] The use method and advantages of the present invention: The composite current collector magnetron sputtering copper coating roller equipment has the following working process:

[0050] As shown in Figures 1 to 10: First, install the bracket 1 and the second bearing 5 at the desired location, connect the two electric hydraulic valves 620 to the external pipeline, and the rotation of the rotating shaft 602 drives the first bevel gear 604, the first connecting shaft 605 and the second circular gear 608 to rotate, thereby driving the first circular gear 403 and the coating roller 401 to rotate. The first bearing 3 and the second bearing 5 can assist the coating roller 401 to rotate, open the two electric hydraulic valves 620, and pass the coolant into the annular liquid inlet channel 619. The coolant enters the cooling pipeline 6241 through the square liquid infusion pipeline 622. When the coolant flows in the waterway 6242, it will contact the inner wall of the coating roller 401, which is convenient for cooling and heat dissipation of the coating roller 401. After that, the coolant will be discharged through the square liquid outlet pipeline 625 and the annular liquid outlet channel 618. The rotation of the first bevel gear 604 drives the second bevel gear 609 to rotate, thereby driving the first bevel gear 604 to rotate. The two connecting shafts 610 and the incomplete toothed disc 611 rotate. When the incomplete toothed disc 611 is meshed and connected with the third circular gear 613, the third circular gear 613 acts as a driving wheel to drive the connecting rod 614 and the fourth circular gear 615 to rotate. When the incomplete toothed disc 611 is meshed and connected with the fourth circular gear 615, the fourth circular gear 615 acts as a driving wheel to drive the connecting rod 614 and the third circular gear 613 to rotate. The third circular gear 613, the connecting rod 614 and the fourth circular gear 615 rotate back and forth as a whole, thereby driving the screw rod 612 to rotate forward and reverse. The sleeve 616, the support plate 617, the annular liquid outlet channel 618, the annular liquid inlet channel 619, the square liquid infusion pipeline 622, the cooling cylinder 623, the cooling pipeline 6241 and the square liquid outlet pipeline 625 move back and forth left and right, so that the coolant can fully contact the inner wall of the coating roller 401, making the cooling and heat dissipation effect more comprehensive, uniform and efficient.

[0051] In summary, the composite current collector magnetron sputtering copper plating roller equipment achieves the purpose of good heat dissipation effect and uniform and efficient heat dissipation, and meets people's use needs.

[0052] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A composite current collector magnetron sputtering copper plating roller device, comprising a bracket (1), a coating roller mechanism (4) and a second bearing (5), characterized in that: The bracket (1) is provided with a through hole (2), the coating roller mechanism (4) is rotatably connected in the through hole (2) via a first bearing (3), the coating roller mechanism (4) comprises a coating roller (401), a rotating drum (402) is fixed on one side of the coating roller (401), the rotating drum (402) is rotatably connected in the through hole (2) via a first bearing (3), and a first circular gear (403) is fixed on the outer side of the rotating drum (402); A uniform cooling mechanism (6) is fixed to the inner top of the support (1), and the uniform cooling mechanism (6) comprises a motor (601) and an incomplete gear wheel (611). The output end of the motor (601) is connected to the first bevel gear (604) via a rotating shaft (602), and one side of the first bevel gear (604) is connected to the second circular gear (608) via a first connecting shaft (605). A first fixing frame (606) and a second fixing frame (607) are fixed to the inner top of the support (1), and the first connecting shaft (605) passes through the first fixing frame (606) and the second fixing frame (607). The second circular gear (608) is meshed and connected to the first circular gear. The first fixing frame (606) is rotatably connected to a lead screw (612), and one end of the lead screw (612) is fixed to a third circular gear (613), the incomplete toothed disc (611) is meshedly connected to the top of the third circular gear (613), and one side of the third circular gear (613) is connected to a fourth circular gear (615) via a connecting rod (614), the outer side of the lead screw (612) is threadedly connected to a sleeve (616), and the sleeve (616) is rotatably connected to the second fixing frame (607), the sleeve (616) passes through the second fixing frame (607) and is connected to a support plate (617), and one side of the support plate (617) is fixed to the support plate (617). An annular liquid outlet channel (618) is fixed, and an annular liquid inlet channel (619) is fixed on one side of the annular liquid outlet channel (618). An electric liquid valve (620) is fixed at the bottom of the annular liquid outlet channel (618) and the bottom of the annular liquid inlet channel (619). A sealing ring (621) is rotatably connected in the annular liquid outlet channel (618) and the annular liquid inlet channel (619). A square liquid infusion pipeline (622) is fixed on the sealing ring (621) in the annular liquid inlet channel (619). A square liquid outlet pipeline (625) is fixed on the sealing ring (621) in the annular liquid outlet channel (618). A cooling cylinder (623) is movably connected in the coating roller (401). ), the square infusion pipe (622) and the square liquid outlet pipe (625) are both fixed in the cooling cylinder (623), a spiral cooling mechanism (624) is fixed in the cooling cylinder (623), and the spiral cooling mechanism (624) includes a cooling pipe (6241), and a water channel (6242) is provided on the outside of the cooling pipe (6241), the cooling pipe (6241) is in a threaded shape, and the cooling pipes (6241) are evenly spaced in the cooling cylinder (623), and the head end of each cooling pipe (6241) is connected to the square infusion pipe (622), and the end end of each cooling pipe (6241) is connected to the square liquid outlet pipe (625).

2. The composite current collector magnetron sputtering copper coating roller device according to claim 1, characterized in that: An air hole (404) is provided on one side of the coating roller (401), and a ventilation duct (405) is fixed on the other side of the coating roller (401), and the inner ring of the second bearing (5) is fixed on the outside of the ventilation duct (405).

3. The composite current collector magnetron sputtering copper coating roller device according to claim 1, characterized in that: A support frame (603) is fixed to the inner top of the bracket (1); the first bevel gear (604) is rotatably connected to one side of the support frame (603); and the first connecting shaft (605) is rotatably connected to the other side of the support frame (603).

4. The composite current collector magnetron sputtering copper coating roller device according to claim 1, characterized in that: The bottom of the first bevel gear (604) is meshedly connected with a second bevel gear (609), and the bottom of the second bevel gear (609) is connected to an incomplete toothed disc (611) via a second connecting shaft (610), and the second connecting shaft (610) is rotatably connected to the bottom of the support frame (603) and the first fixing frame (606).

Images