Nanoimprinting device with stable driving mechanism

Abstract

The present invention discloses a nanoimprinting device with a stable driving mechanism, which relates to the field of nanoimprinting technology, including a main body, a mounting plate, a template and a substrate, wherein two mounting plates are provided, the template and the substrate are mounted on opposite side surfaces of the mounting plates, the two mounting plates are connected by a parallel mechanism and a driving mechanism, the parallel mechanism allows the template and the substrate to always maintain a parallel state, the driving mechanism controls the template and the substrate to approach each other, and a misalignment detection mechanism is installed on the mounting plate, and the misalignment detection mechanism is used to detect whether the template and the substrate are misaligned before contact. The present invention utilizes the parallelogram principle to keep the template and the substrate in a relatively parallel state during the imprinting process, and cooperates with the magnetic field generated by the electromagnet to continuously adjust the relative position of the template and the substrate before imprinting to ensure accurate imprinting.

Description

Technical Field

[0001] The present invention relates to the field of nanoimprint technology, in particular to a nanoimprint device with a stable driving mechanism. Background Art

[0002] Nanoimprint technology is a process technology used to manufacture nanoscale structures. It directly transfers pre-designed patterns and structures to the target material through physical imprinting, thereby achieving pattern transfer of nanoscale features. In nanoimprint technology, the control of the positive force and time required in the physical imprinting process is also the key to achieving nanoimprint technology.

[0003] Driving accuracy is a key factor that directly affects the quality and consistency of the structure after imprinting. During the nanoimprinting process, it is necessary to ensure that the direction in which the pressure applied by the template is perpendicular to the substrate surface. On this premise, it is necessary to ensure that the template and the substrate are parallel to each other, so as to ensure that the pressure exerted on the substrate by each area of ​​the template during imprinting is the same. Summary of the invention

[0004] The object of the present invention is to provide a nanoimprinting device with a stable driving mechanism to solve the problems raised in the above-mentioned background technology.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a nanoimprint device with a stable driving mechanism, comprising a main body, a mounting plate, a template and a substrate, wherein two mounting plates are provided, the template and the substrate are mounted on opposite side surfaces of the mounting plates, the two mounting plates are connected by a parallel mechanism and a driving mechanism, the parallel mechanism allows the template and the substrate to always maintain a parallel state, and the driving mechanism controls the template and the substrate to approach each other;

[0006] A misalignment detection mechanism is installed on the mounting plate, and the misalignment detection mechanism is used to detect whether the template and the substrate are misaligned before contacting each other. A fine-tuning mechanism is provided on the mounting plate, and the fine-tuning mechanism is used to adjust the relative position of the template and the substrate.

[0007] Before stamping, the template and substrate need to be installed on the corresponding mounting plates respectively. After the installation is completed, ensure that the positions of the template and the substrate correspond to each other. The misalignment detection mechanism is used to monitor whether the template and the substrate correspond to each other after the installation is completed. The misalignment detection mechanism can be an optical detection element for detection. The optical detection element includes a transmitting element and a receiving element. The transmitting element and the receiving element are respectively installed around the template and the substrate, and the point position where the transmitting element is installed around the template is the same as the point position where the receiving element is installed around the substrate. Before stamping, it is necessary to adjust the relative position between the upper and lower mounting plates to ensure that the light emitted by each group of transmitting elements can accurately irradiate the receiving element, and the position where the light received on each receiving element is the same, for example: the light emitted by each group of transmitting elements corresponds to the central area of ​​each group of receiving elements;

[0008] After the template and substrate have completed the corresponding adjustment, the imprinting work can be carried out. The driving mechanism controls the template and substrate to approach each other, wherein the template and the substrate are connected by a parallel mechanism to keep the template and the substrate parallel to each other during the process of approaching each other, thereby realizing that the template exerts pressure on the substrate perpendicular to the substrate surface, wherein the driving mechanism is a cylinder, and the cylinder is respectively installed on both sides of the template and the substrate, and the cylinder is extended and retracted to realize the merging and separation of the template and the substrate.

[0009] Further, the misalignment detection mechanism includes an electromagnet disposed on the mounting plate, and the electromagnet is mounted on a surface of one side opposite to the mounting plate;

[0010] The electromagnets generate repulsive or attractive forces to bring the two mounting plates closer to or away from each other.

[0011] The misalignment detection mechanism is an electromagnet, wherein an electric control component is installed inside the main body, and the electric control component is electrically connected to the electromagnet. The electromagnet is started during imprinting, and the two groups of electromagnets on the mounting plate generate a magnetic field after being energized. When the adjacent sides of the two electromagnets corresponding to the upper and lower mounting plates generate the same polarity, the upper and lower electromagnets are separated from each other under the effect of repulsion of the same poles. Since the electromagnets are installed on the upper and lower mounting plates, they act on the mounting plates, and the effect of repulsion of the same poles is generated by the electromagnets, and the upper and lower mounting plates are separated from each other. The electromagnets corresponding to the upper and lower groups of positions are used to replace the driving mechanism to generate the effect of separation of the template and the substrate.

[0012] On the contrary, when the adjacent sides of the two electromagnets corresponding to the upper and lower mounting plates produce opposite polarities, the two electromagnets corresponding to each other attract each other, and the force generated by the magnetic field finally acts on the mounting plate to realize the imprinting work between the template and the substrate, wherein the separation distance between the template and the substrate, as well as the pressure between the template and the substrate during the imprinting process, are changed by changing the magnitude of the current passing through the electromagnet coil;

[0013] By setting the electromagnets with corresponding mounting positions on the upper and lower mounting plates, when the adjacent sides of the upper and lower sets of electromagnets produce opposite polarities, under the action of the magnetic field, the upper and lower sets of electromagnets approach each other under the action of the magnetic field suction force, and when the vertical distance between the upper and lower mounting plates remains unchanged, the upper and lower sets of electromagnets attract each other. Since the mounting plate is provided with a fine-tuning mechanism, the fine-tuning mechanism is used to adjust the positions of the template and the substrate to correspond to each other, and the upper and lower templates and the substrate are horizontally offset relative to the mounting plate until the electromagnets corresponding to the upper and lower relative positions are on the same central axis, wherein the distance between the two adjacent electromagnets on the same mounting plate is much larger than the maximum offset length of the fine-tuning mechanism;

[0014] A plurality of groups of electromagnets are arranged on the mounting plate, and two groups of control circuits are arranged, wherein one group of control circuits is electrically connected to a plurality of electromagnets, and the control circuits output a stable current to allow the electromagnets to generate a stable magnetic field. Secondly, the side of the template and the substrate that is in contact with the mounting plate is made of magnetic metal, and the magnetic field generated by the electromagnets can be used to achieve the mutual fixation between the template and the substrate and the mounting plate. Another group of control circuits controls the electromagnets located around the template and the substrate to work, and the electromagnets around the upper and lower mounting plates generate a force of like repulsion or opposite attraction, so as to achieve the mutual separation and approach between the template and the substrate.

[0015] Furthermore, the mounting plate is composed of a fixed plate and a movable plate, the fixed plate is connected to the parallel mechanism, and the movable plate is slidably connected to the fixed plate;

[0016] A slider is slidably arranged between the fixed plate and the movable plate, and the slide grooves in the fixed plate and the movable plate for the slider to move are perpendicular to each other, and the fixed plate and the movable plate cooperate with the slide groove slider to form a fine adjustment mechanism;

[0017] The fixed plate is connected to the parallel mechanism, and the movable plate is connected to the fixed plate through a slider, wherein an electromagnet is installed on one side surface of the movable plate, and the side surface on which the electromagnet is installed is also the mounting surface of the template and the substrate. When the corresponding electromagnets on the upper and lower mounting plates generate mutually attractive magnetic fields, the positions of the template and the substrate are fine-tuned through the magnetic field to ensure that the positions of the template and the substrate correspond to each other before imprinting to avoid deviations.

[0018] Further, at least two groups of electromagnets are arranged on the movable plate, each group has two electromagnets, and several groups of electromagnets are distributed around the template and the substrate, and each group of two electromagnets are symmetrically arranged about the plane where the central axis of the movable plate is located, and one side of the electromagnet is slidably connected with the movable plate, and a slide groove of a power supply magnet is provided on the movable plate, and a magnet is arranged on one side of the slide groove near the edge of the movable plate, and an adjustment spring is arranged between the electromagnet and the movable plate;

[0019] After power is supplied, the regulating spring is in a contracted state and drives the connected electromagnet to be stored in the slide slot;

[0020] A groove is provided on one side of the electromagnet, and protruding strips matching the groove are provided on the outer sides of the template and the substrate;

[0021] Each group of two electromagnets is symmetrically arranged about the plane where the central axis of the movable plate is located, and the connecting lines of each group of two electromagnets are perpendicular to each other. Before imprinting, the template and the substrate need to be installed, and the template and the substrate are installed on their respective movable plates. Taking the installation of the template as an example, before installation, protruding strips are arranged around the outer sides of the template and the substrate, wherein the protruding strips match the grooves on the outer wall of the electromagnet, and the grooves on the fixed electromagnets are used as guide grooves. The protruding strips on both sides of the template are matched with the grooves on the outer side of the electromagnet in a sliding manner, and the template and the electromagnet are pre-installed in a sliding manner. During the sliding period of the template, until the template contacts the electromagnet at one end of the sliding direction, it indicates that the template is installed in place;

[0022] The electromagnet on one side of the template is connected to the movable plate through an adjusting spring, and the adjusting spring is electrically connected to the main body. The template is installed on the movable plate in a sliding manner, wherein the adjusting spring connected to the movable belt electromagnet is in an energized state, and the adjusting spring after energization is in a contracted state. Under the control of the energized adjusting spring, the electromagnet connected to the energized adjusting spring is stored in the slide groove in the movable plate. When the template is pre-installed in place, the adjusting spring connected to the electromagnet is powered off, and the adjusting spring stretches naturally. The electromagnet adjusts the spring from the slide groove, and at the same time controls the electromagnets around the movable plate to start, and the electromagnet generates a magnetic field. The electromagnets around the template all generate suction. Since the electromagnets on three sides of the template are fixedly arranged relative to the movable plate, and only the electromagnet on one side is slidably connected to the movable plate, the electromagnet fixes the template under the left and right magnetic field, and at the same time, the electromagnets slidably connected to the movable plate begin to approach the template until the template is connected to the electromagnets on all sides. At this time, the central axis of several electromagnets on the outside of the template coincides with the central axis of the template.

[0023] The vertical cross-section of the long strip protruding on the outside of the template is a right-angled trapezoid. When the stamping work is completed, the adjusting spring connected to the movable electromagnet is energized. After the energization, the adjusting spring begins to shrink. Under the guidance of the trapezoidal inclined surface, the groove on the surface of the movable electromagnet is separated from the long strip on the outside of the template. Then, under the action of the shrinking adjusting spring, the movable electromagnet is stored in the slide slot, and then the template can be taken out. At the same time, a small magnet is provided at one end of the slide slot near the edge of the movable plate. In the non-stamping state, the magnet generates suction to the iron core in the electromagnet to reset the electromagnet. At the same time, since the magnet is small in size and is located in the slide slot, the adjusting spring naturally stretches after the power is turned off, and the electromagnet is separated from the magnet. Then, the electromagnet is energized to generate a magnetic field, and the traction effect of the metal strip on the outside of the template on the electromagnet is greater than the traction effect of the magnet on the electromagnet.

[0024] The height of the electromagnet protruding from the movable plate is smaller than the thickness of the template and the substrate itself.

[0025] Furthermore, the parallel mechanism comprises two main boards, the main boards are fixedly connected to the main body, and the main boards are movably connected to the mounting plate via two parallel connecting rods;

[0026] By setting up the parallel mechanism, it is ensured that the template and the substrate always remain parallel to each other during movement, so when the two are imprinted, the pressure exerted by each area of ​​the template on each area of ​​the substrate surface is the same.

[0027] Furthermore, the driving mechanism comprises a sleeve rod, and the upper and lower ends of the sleeve rod are slidably connected to the two mounting plates;

[0028] By setting the sleeve rod, it is ensured that the positions of the central axes of the template and the substrate are always in an overlapping state, thereby avoiding horizontal offset between the template and the substrate.

[0029] Furthermore, the driving mechanism further comprises a threaded sleeve, a threaded rod and a driving motor, wherein the driving motor is connected to the threaded rod via a coupling, the threaded sleeve is connected to the sleeve rod, and the threaded sleeve and the threaded rod are meshedly connected;

[0030] The parallel mechanism can be stably driven by the cooperation between the threaded sleeve, the threaded rod and the driving motor.

[0031] Furthermore, the driving mechanism further comprises a driving rod, and two ends of the driving rod are respectively connected to the main body and the sleeve rod;

[0032] By setting the driving rod, the parallel mechanism can be driven quickly.

[0033] Furthermore, a connecting spring is provided between the driving rod and the sleeve rod;

[0034] By setting up a connecting spring, the driving rod can be prevented from being extended excessively, which would cause the template and substrate to be damaged due to excessive pressure. At the same time, in conjunction with the electromagnet, when the driving rod controls the template and substrate to fit together, the pressure between the template and the substrate is precisely controlled by changing the current flowing through the coil.

[0035] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0036] By utilizing the parallelogram principle, the template and the substrate are always kept in a relatively parallel state during the imprinting process. When the parallel mechanism and the driving mechanism control the template and the substrate for imprinting, the pressure generated by each area of ​​the template on each area of ​​the substrate surface is the same. At the same time, the template and the substrate are fixed to their respective mounting plates in conjunction with the magnetic field generated by the electromagnet, and the electromagnets around are distributed about the central axis of the template and the substrate, and the electromagnets on the upper and lower mounting plates correspond to each other. Before imprinting, the electromagnets on the upper and lower mounting plates are used to generate opposite magnetic poles, and then the relative position of the template and the substrate is continuously adjusted under the effect of the mutual anisotropy of the magnetic poles to ensure high precision of imprinting. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0038] Figure 1 is a schematic diagram of the three-dimensional structure of the second embodiment of the present invention;

[0039] Figure 2 is a schematic diagram of the three-dimensional structure of the second embodiment of the present invention;

[0040] Figure 3 is a schematic diagram of the main structure of the second embodiment of the present invention;

[0041] Figure 4 It is a schematic diagram of the overall cross-sectional structure of the present invention from top view;

[0042] Figure 5 It is a schematic diagram of the front view of the fully sectional structure of the movable electromagnet of the present invention;

[0043] Figure 6 It is a schematic diagram of the full cross-section structure of the inner slide groove of the mounting plate of the present invention.

[0044] In the figure: 1, main body; 2, mounting plate; 201, fixed plate; 202, movable plate; 3, template; 4, substrate; 5, main board; 6, sleeve rod; 601, driving rod; 602, connecting spring; 7, electromagnet; 701, magnet; 702, adjusting spring. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] See also Figure 1-Figure 6 The present invention provides a technical solution: a nanoimprint device with a stable driving mechanism, comprising a main body 1, a mounting plate 2, a template 3 and a substrate 4, wherein two mounting plates 2 are provided, and the template 3 and the substrate 4 are mounted on opposite side surfaces of the mounting plate 2, and the two mounting plates 2 are connected by a parallel mechanism and a driving mechanism, and the parallel mechanism allows the template 3 and the substrate 4 to always maintain a parallel state;

[0047] The parallel mechanism comprises two main boards 5, the main boards 5 are fixedly connected to the main body 1, and the main boards 5 are movably connected to the mounting plate 2 via two parallel connecting rods;

[0048] The driving mechanism controls the template 3 and the substrate 4 to approach each other. The driving mechanism includes a sleeve rod 6 , and the upper and lower ends of the sleeve rod 6 are slidably connected to the two mounting plates 2 .

[0049] Embodiment 1: The driving mechanism further includes a threaded sleeve, a threaded rod and a driving motor. The driving motor is connected to the threaded rod through a coupling. The threaded sleeve is connected to the sleeve rod 6. The threaded sleeve and the threaded rod are meshedly connected.

[0050] Embodiment 2: The driving mechanism further includes a driving rod 601 , both ends of which are connected to the main body 1 and the sleeve rod 6 , respectively, and a connecting spring 602 is provided between the driving rod 601 and the sleeve rod 6 .

[0051] A misalignment detection mechanism is installed on the mounting plate 2, and the misalignment detection mechanism is used to detect whether the template 3 and the substrate 4 are misaligned before contact. A fine-tuning mechanism is provided on the mounting plate 2, and the fine-tuning mechanism is used to adjust the relative position of the template 3 and the substrate 4;

[0052] The mounting plate 2 is composed of a fixed plate 201 and a movable plate 202, wherein the fixed plate 201 is connected to the parallel mechanism, and the movable plate 202 is slidably connected to the fixed plate 201;

[0053] A slider is slidably arranged between the fixed plate 201 and the movable plate 202. The slide grooves in the fixed plate 201 and the movable plate 202 for the slider to move are perpendicular to each other. The fixed plate 201 and the movable plate 202 cooperate with the slide groove slider to form a fine adjustment mechanism.

[0054] The misalignment detection mechanism includes an electromagnet 7 disposed on the mounting plate 2, and the electromagnet 7 is mounted on the opposite side surface of the mounting plate 2;

[0055] The electromagnets 7 generate repulsive or attractive forces to achieve the two mounting plates 2 approaching or separating from each other;

[0056] The movable plate 202 is provided with at least two groups of electromagnets 7, each group has two electromagnets 7, and several groups of electromagnets 7 are distributed around the template 3 and the substrate 4. Each group of two electromagnets 7 is symmetrically arranged about the plane where the central axis of the movable plate 202 is located. One side of the electromagnet 7 is slidably connected with the movable plate 202. A slide groove for the power supply magnet 7 is provided on the movable plate 202. A magnet 701 is provided on one side of the slide groove near the edge of the movable plate 202. An adjustment spring 702 is provided between the electromagnet 7 and the movable plate 202.

[0057] After being energized, the regulating spring 702 is in a contracted state, and drives the connected electromagnet 7 to be stored in the slide groove;

[0058] A groove is provided on one side of the electromagnet 7, and protruding strips matching the groove are provided on the outer sides of the template 3 and the substrate 4;

[0059] The parallel mechanism comprises two main boards 5, the main boards 5 are fixedly connected to the main body 1, and the main boards 5 are movably connected to the mounting plate 2 via two parallel connecting rods;

[0060] By utilizing the parallelogram principle, the template 3 and the substrate 4 are always kept in a relatively parallel state during the imprinting process. When the parallel mechanism and the driving mechanism control the template 3 and the substrate 4 for imprinting, the pressure generated by each area of ​​the template 3 on each area of ​​the surface of the substrate 4 is the same. At the same time, in conjunction with the magnetic field generated by the electromagnet 7, the template 3 and the substrate 4 are respectively fixed to their respective mounting plates 2, and the electromagnets 7 on all sides are respectively distributed about the central axis of the template 3 and the substrate 4, and the electromagnets 7 on the upper and lower mounting plates 2 correspond to each other. Before imprinting, the electromagnets 7 on the upper and lower mounting plates 2 are used to generate opposite magnetic poles, and then under the effect of the mutual anisotropy of the magnetic poles, the relative position of the template 3 and the substrate 4 is continuously adjusted to ensure high precision of imprinting.

[0061] Working principle of the present invention:

[0062] Before stamping, the template 3 and the substrate 4 need to be installed on the corresponding mounting plates 2 respectively, and after the installation is completed, the positions of the template 3 and the substrate 4 must be ensured to correspond to each other, wherein the misalignment detection mechanism is used to monitor whether the template 3 and the substrate 4 correspond to each other after the installation is completed, and the misalignment detection mechanism can be an optical detection element for detection, and the optical detection element includes a transmitting element and a receiving element, wherein the transmitting element and the receiving element are respectively installed around the template 3 and the substrate 4, and the point position where the transmitting element is installed around the template 3 is the same as the point position where the receiving element is installed around the substrate 4. Before stamping, it is necessary to adjust the relative position between the upper and lower mounting plates 2 to ensure that the light emitted by each group of transmitting elements can be accurately irradiated on the receiving element, and the position where the light received on each receiving element is irradiated is the same, for example: the light emitted by each group of transmitting elements corresponds to the central area of ​​each group of receiving elements;

[0063] After the template 3 and the substrate 4 have completed the corresponding adjustment, the imprinting work can be carried out. The driving mechanism controls the template 3 and the substrate 4 to approach each other, wherein the template 3 and the substrate 4 are connected by a parallel mechanism to keep the template 3 and the substrate 4 parallel to each other during the process of approaching each other, thereby realizing that the template 3 exerts pressure on the substrate 4 perpendicular to the surface of the substrate 4, wherein the driving mechanism is a cylinder, and the cylinder is respectively installed on both sides of the template 3 and the substrate 4, and the cylinder is extended and retracted to realize the merging and separation of the template 3 and the substrate 4;

[0064] The misalignment detection mechanism is an electromagnet 7, wherein an electric control component is installed inside the main body 1, and the electric control component is electrically connected to the electromagnet 7. During the imprinting period, the electromagnet 7 is started, and the two groups of electromagnets 7 on the mounting plate 2 generate a magnetic field after being energized. When the adjacent sides of the two electromagnets 7 corresponding to the upper and lower mounting plates 2 generate the same polarity, the upper and lower electromagnets 7 are separated from each other under the effect of like poles repelling each other. Since the electromagnet 7 is installed on the upper and lower mounting plates 2, it acts on the mounting plates 2, and the effect of like poles repelling each other is generated by the electromagnet 7, and the upper and lower mounting plates 2 are separated from each other. Through the electromagnets 7 corresponding to the upper and lower groups of positions, the effect of separating the template 3 and the substrate 4 from each other is achieved by replacing the driving mechanism;

[0065] On the contrary, when the adjacent sides of the two electromagnets 7 corresponding to the positions of the upper and lower mounting plates 2 generate opposite polarities, the two electromagnets 7 corresponding to each other attract each other, and the force generated by the magnetic field finally acts on the mounting plate 2, so as to realize the imprinting work between the template 3 and the substrate 4, wherein the separation distance between the template 3 and the substrate 4 and the pressure between the template 3 and the substrate 4 during the imprinting are changed by changing the magnitude of the current passing through the coil of the electromagnet 7;

[0066] By setting the electromagnets 7 with corresponding mounting positions on the upper and lower mounting plates 2, when the adjacent sides of the upper and lower groups of electromagnets 7 produce opposite polarities, under the action of the magnetic field, the upper and lower groups of electromagnets 7 approach each other under the action of the magnetic field suction force, and when the vertical distance between the upper and lower mounting plates 2 remains unchanged, the upper and lower groups of electromagnets 7 attract each other. Since a fine-tuning mechanism is provided on the mounting plate 2, the fine-tuning mechanism is used to adjust the positions of the template 3 and the substrate 4 to correspond to each other, and the upper and lower templates 3 and the substrate 4 are horizontally offset relative to the mounting plate 2 until the electromagnets 7 corresponding to the upper and lower relative positions are on the same central axis, wherein the distance between two adjacent electromagnets 7 on the same mounting plate 2 is much larger than the maximum offset length of the fine-tuning mechanism;

[0067] A plurality of groups of electromagnets 7 are arranged on the mounting plate 2, and two groups of control circuits are arranged, wherein one group of control circuits is electrically connected to a plurality of electromagnets 7, and the control circuit outputs a stable current, so that the electromagnets 7 generate a stable magnetic field. Secondly, the side of the template 3 and the substrate 4 that are in contact with the mounting plate 2 is made of magnetic metal, so that the magnetic field generated by the electromagnets 7 can be used to achieve the mutual fixation between the template 3 and the substrate 4 and the mounting plate 2. Another group of control circuits controls the electromagnets 7 located around the template 3 and the substrate 4 to work, and the electromagnets 7 around the upper and lower mounting plates 2 generate a force of like-pole repulsion or opposite-pole attraction, so that the template 3 and the substrate 4 can be separated and brought close to each other.

[0068] The fixed plate 201 is connected to the parallel mechanism, and the movable plate 202 is connected to the fixed plate 201 through a slider, wherein an electromagnet 7 is installed on one side surface of the movable plate 202, and the side surface on which the electromagnet 7 is installed is also the installation surface of the template 3 and the substrate 4. When the corresponding electromagnets 7 on the upper and lower installation plates 2 generate mutually attractive magnetic fields, the positions of the template 3 and the substrate 4 are finely adjusted through the magnetic field to ensure that the positions of the template 3 and the substrate 4 correspond to each other before imprinting to avoid deviation;

[0069] Each group of two electromagnets 7 is symmetrically arranged on the plane where the central axis of the movable plate 202 is located, and the connecting lines of each group of two electromagnets 7 are perpendicular to each other. Before imprinting, the template 3 and the substrate 4 need to be installed. The template 3 and the substrate 4 are installed on their respective movable plates 202. Taking the installation of the template 3 as an example, before installation, protruding strips are arranged around the outer sides of the template 3 and the substrate 4, wherein the protruding strips match the grooves on the outer wall of the electromagnet 7, and the grooves on the fixed electromagnet 7 are used as guide grooves. The protruding strips on both sides of the template 3 are matched with the grooves on the outer side of the electromagnet 7 in a sliding manner, and the template 3 and the electromagnet 7 are pre-installed in a sliding manner. During the sliding period of the template 3, until the template 3 contacts the electromagnet 7 at one end of the sliding direction, it indicates that the template 3 is installed in place;

[0070] The electromagnet 7 on one side of the template 3 is connected to the movable plate 202 through an adjusting spring 702, and the adjusting spring 702 is electrically connected to the main body 1. The template 3 is installed on the movable plate 202 in a sliding manner, and the adjusting spring 702 connected to the movable belt electromagnet 7 is in a powered state. After being powered on, the adjusting spring 702 is in a contracted state. Under the control of the powered adjusting spring 702, the electromagnet 7 connected to the powered adjusting spring 702 is received in the slide groove in the movable plate 202. When the template 3 is pre-installed in place, the adjusting spring 702 connected to the electromagnet 7 is powered off, and the adjusting spring 702 naturally stretches, and the electromagnet 7 The spring 702 is adjusted in the slide groove, and the electromagnets 7 around the movable plate 202 are controlled to start at the same time. The electromagnets 7 generate a magnetic field, and the electromagnets 7 around the template 3 all generate suction. Since the electromagnets 7 on three sides of the template 3 are fixed relative to the movable plate 202, only the electromagnets 7 on one side are slidably connected to the movable plate 202, the electromagnets 7 fix the template 3 under the magnetic field. At the same time, the electromagnets 7 slidably connected to the movable plate 202 begin to approach the template 3 until the template 3 is connected to the electromagnets 7 on all sides. At this time, the central axis of several electromagnets 7 on the outside of the template 3 coincides with the central axis of the template 3.

[0071] The vertical cross-section of the long strip protruding on the outside of the template 3 is a right-angled trapezoid. When the stamping work is completed, the adjusting spring 702 connected to the movable electromagnet 7 is energized. The adjusting spring 702 begins to shrink after being energized. Under the guidance of the trapezoidal inclined surface, the groove on the surface of the movable electromagnet 7 is separated from the long strip on the outside of the template 3. Then, under the action of the contraction adjusting spring 702, the movable electromagnet 7 is stored in the slide slot, and then the template 3 can be taken out. At the same time, a small magnet 701 is provided at one end of the slide slot near the edge of the movable plate 202. In the non-stamping state, the magnet 701 generates suction to the iron core in the electromagnet 7 to reset the electromagnet 7. At the same time, since the magnet 701 is small in size and is located in the slide slot, the adjusting spring 702 naturally stretches after it is not energized, and the electromagnet 7 is separated from the magnet 701. Then, the electromagnet 7 is energized to generate a magnetic field. The traction effect of the metal strip on the outside of the template 3 on the electromagnet 7 is greater than the traction effect of the magnet 701 on the electromagnet 7.

[0072] The parallel mechanism is set to ensure that the template 3 and the substrate 4 always remain parallel to each other during the movement. Therefore, when the two are imprinted, the pressure generated by each area of ​​the template 3 on each area of ​​the surface of the substrate 4 is the same. The sleeve rod 6 is set to ensure that the positions of the central axes of the template 3 and the substrate 4 are always in a coincidence state, avoiding horizontal offset between the template 3 and the substrate 4.

[0073] By setting the driving rod 601, the parallel mechanism can be driven quickly. By setting the connecting spring 602, the driving rod 601 can be prevented from being stretched excessively, which would cause the template 3 and the substrate 4 to be damaged due to excessive pressure. At the same time, in conjunction with the electromagnet 7, when the driving rod 601 controls the template 3 and the substrate 4 to fit together, the pressure between the template 3 and the substrate 4 is precisely controlled by changing the current flowing through the coil.

[0074] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0075] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A nanoimprint device with a stable driving mechanism, comprising a main body (1), a mounting plate (2), a template (3) and a substrate (4), characterized in that: Two mounting plates (2) are provided, and the template (3) and the substrate (4) are mounted on opposite side surfaces of the mounting plates (2). The two mounting plates (2) are connected via a parallel mechanism and a driving mechanism. The parallel mechanism allows the template (3) and the substrate (4) to always remain in a parallel state, and the driving mechanism controls the template (3) and the substrate (4) to approach each other. A misalignment detection mechanism is installed on the mounting plate (2), the misalignment detection mechanism is used to detect whether the template (3) and the substrate (4) are misaligned before they come into contact, and a fine-tuning mechanism is provided on the mounting plate (2), the fine-tuning mechanism is used to adjust the relative position of the template (3) and the substrate (4); The parallel mechanism comprises two main boards (5), the main boards (5) are fixedly connected to the main body (1), and the main boards (5) are movably connected to the mounting plate (2) via two parallel connecting rods; The driving mechanism comprises a sleeve rod (6), wherein upper and lower ends of the sleeve rod (6) are slidably connected to two mounting plates (2); The misalignment detection mechanism comprises an electromagnet (7) arranged on the mounting plate (2), wherein the electromagnet (7) is mounted on a surface on one side opposite to the mounting plate (2); The electromagnets (7) generate repulsive or attractive forces to achieve the two mounting plates (2) approaching or separating from each other; The mounting plate (2) is composed of a fixed plate (201) and a movable plate (202), the fixed plate (201) is connected to the parallel mechanism, and the movable plate (202) is slidably connected to the fixed plate (201); A slider is slidably arranged between the fixed plate (201) and the movable plate (202); the sliding grooves in the fixed plate (201) and the movable plate (202) for the slider to move are perpendicular to each other; the fixed plate (201) and the movable plate (202) cooperate with the sliding groove slider to form a fine adjustment mechanism.

2. A nanoimprinting device with a stable driving mechanism according to claim 1, characterized in that: At least two groups of electromagnets (7) are arranged on the movable plate (202), each group having two electromagnets (7). Several groups of electromagnets (7) are distributed around the template (3) and the substrate (4). Each group of two electromagnets (7) are symmetrically arranged about the plane where the central axis of the movable plate (202) is located. The electromagnets (7) on one side are slidably connected to the movable plate (202), and the electromagnets (7) on the other three sides are fixedly connected to the movable plate (202). A slide groove for the power supply magnet (7) is provided on the movable plate (202), and a magnet (701) is arranged on one side of the slide groove close to the edge of the movable plate (202). An adjustment spring (702) is arranged between the electromagnet (7) and the movable plate (202); After power is supplied, the regulating spring (702) is in a contracted state and drives the connected electromagnet (7) to be stored in the slide groove; A groove is provided on one side of the electromagnet (7), and protruding strips matching the groove are provided on the outer sides of the template (3) and the substrate (4).

3. The nanoimprinting device with a stable driving mechanism according to claim 1, characterized in that: The driving mechanism further comprises a threaded sleeve, a threaded rod and a driving motor, wherein the driving motor is connected to the threaded rod via a coupling, the threaded sleeve is connected to the sleeve rod (6), and the threaded sleeve and the threaded rod are meshingly connected.

4. The nanoimprinting device with a stable driving mechanism according to claim 1, characterized in that: The driving mechanism further comprises a driving rod (601), and two ends of the driving rod (601) are respectively connected to the main body (1) and the sleeve rod (6).

5. The nanoimprinting device with a stable driving mechanism according to claim 4, characterized in that: A connecting spring (602) is provided between the driving rod (601) and the sleeve rod (6).

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