A high purity aluminum target defect detection device

Abstract

The present invention relates to the technical field of high-purity aluminum target material detection, and discloses a high-purity aluminum target material defect detection device, including a high-purity aluminum target material placement platform, a top plate and a defect detection mechanism, wherein support plates are arranged at both ends of the top of the high-purity aluminum target material placement platform; the top plate is located above the high-purity aluminum target material placement platform, a hydraulic device is installed at the middle of the top of the top plate, a hydraulic column is connected through the bottom of the hydraulic device, and a pressure plate is fixed at the bottom of the hydraulic column; a transverse support plate is welded and distributed at the inner lower end of the defect detection mechanism, and the transverse support plate is welded to both sides of the high-purity aluminum target material placement platform, and a telescopic adjustment mechanism is connected to the inner ends of the defect detection mechanism, and a positioning clamping mechanism is connected to the inner ends of the telescopic adjustment mechanism. The high-purity aluminum target material defect detection device is convenient for stably clamping and positioning the high-purity aluminum target material after adjustment, and is suitable for various forms such as flat aluminum target material and rotating aluminum target material, and is convenient for detecting the tensile strength, compressive strength and bending resistance of the high-purity aluminum target material.

Description

Technical Field

[0001] The invention relates to the technical field of high-purity aluminum target material detection, and in particular to a high-purity aluminum target material defect detection device. Background Art

[0002] High-purity aluminum target is an important material used in sputtering targets in the vacuum coating industry. It is made of high-purity aluminum after a series of fine processing and has a specific size and shape. This material is installed on the vacuum coating machine and forms a thin film through sputtering technology. When testing the performance of high-purity aluminum targets, the main focus is on its mechanical properties, such as tensile strength, compressive strength, bending strength, etc., and the corresponding mechanical properties testing equipment needs to be used.

[0003] The existing technology uses manual observation to detect defects in high-purity aluminum targets, which makes it difficult to detect defects in high-purity aluminum targets with high accuracy. Some detection equipment cannot be applied to various forms of high-purity aluminum targets, and the production quality of high-purity aluminum targets is low. Therefore, it is necessary to design a corresponding technical solution to solve this problem. Summary of the invention

[0004] 1. Technical issues to be resolved

[0005] In view of the shortcomings of the prior art, the present invention provides a high-purity aluminum target defect detection device, which solves the technical problems that it is difficult to detect the defects of high-purity aluminum targets with high precision by manual observation and detection, some detection equipment cannot be applied to various forms of high-purity aluminum targets, and the production quality of high-purity aluminum targets is low.

[0006] (II) Technical solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions: a high-purity aluminum target defect detection device, comprising a high-purity aluminum target placement platform, a top plate and a defect detection mechanism, wherein support legs are fixedly provided at the bottom corners of the high-purity aluminum target placement platform, and support plates are provided at both ends of the top of the high-purity aluminum target placement platform;

[0008] The top plate is located above the high-purity aluminum target placement platform, and brackets are fixedly provided at the front and rear ends of the top plate and the high-purity aluminum target placement platform. A hydraulic device is installed at the middle of the top of the top plate, and a hydraulic column is connected through the bottom of the hydraulic device, and a pressure plate is fixedly provided at the bottom of the hydraulic column;

[0009] A transverse support plate is welded to the inner lower end of the defect detection mechanism, and the transverse support plate is welded to both sides of the high-purity aluminum target placement platform. The inner two ends of the defect detection mechanism are connected with a telescopic adjustment mechanism, and the inner end of the telescopic adjustment mechanism is connected with a positioning clamping mechanism.

[0010] Preferably, cavities are provided at both ends of the top of the high-purity aluminum target placement platform, a storage groove is provided above the cavity, the support plate and the storage groove have the same specifications, an electric hydraulic rod is fixedly distributed on the bottom of the support plate, the bottom of the electric hydraulic rod is penetrated by an electric hydraulic device, the electric hydraulic device is installed on the bottom of the high-purity aluminum target placement platform, a limiting cylinder is fixedly distributed on the inner bottom of the cavity, the electric hydraulic rod is penetrated by the inside of the limiting cylinder, and an arc groove is provided in the middle of the upper end surface of the support plate and the lower end surface of the pressure plate; the arranged cavity is used for lifting and adjusting the electric hydraulic rod, the storage groove is used for accurately storing the support plate, and after the support plate is stored, it is located at the same horizontal plane as the top of the high-purity aluminum target placement platform, the electric hydraulic device is used for automatically controlling the lifting and lowering adjustment of the electric hydraulic rod and the support plate, and the limiting cylinder is used for stably limiting the support of the electric hydraulic rod for telescopic adjustment.

[0011] Preferably, the positioning and clamping mechanism includes a positioning plate, an upper clamping plate, a lower clamping plate and a positioning column. The positioning plate is a longitudinal plate-shaped structure. The positioning column is fixedly arranged in the middle of the outer end of the positioning plate. The upper clamping plate and the lower clamping plate are respectively arranged at the upper and lower parts of the positioning plate. The inner sides of the upper clamping plate and the lower clamping plate are both groove structures. The arranged positioning plate is used to support the upper clamping plate, the lower clamping plate and the positioning column. The positioning column is used to connect to the outer end structure. The upper clamping plate and the lower clamping plate are used to clamp and lock the high-purity aluminum target. The groove structure is suitable for high-purity aluminum targets in tubular form.

[0012] The top of described sliding groove is used for limiting the sliding position of the upper clamping plate, and the limit bar is limited in the slot and assists the sliding of the upper clamping plate. The upper clamping plate is fixedly provided with a limit strip on the inner side of the upper clamping plate, and a fixing plate 1 is fixedly provided with an inner upper end of the positioning plate. The bottom of described fixing plate 1 is provided with a slot hole, and the limiting strip is limited and slidably connected to the slot hole. The top of described positioning plate is welded to the outer end of

[0013] Preferably, a push rod three is fixedly provided at the bottom of the lower clamping plate, a fixing plate two is fixedly provided at the inner lower end of the positioning plate, the bottom of the push rod three passes through the fixing plate two and is connected to an electric push rod device three, the electric push rod device three is fixed to the bottom of the fixing plate two, the outside of the push rod three passes through and is connected to a limiting support plate, the limiting support plate is located above the fixing plate two and is fixed to the inner wall of the positioning plate; the electric push rod device three and the push rod three are arranged to automatically control the lifting and lowering adjustment position of the lower clamping plate so as to clamp the high-purity aluminum target material, the fixing plate two is used to stably support the lower clamping plate and enhance the clamping strength, and the limiting support plate is used to stabilize the extension and retraction of the auxiliary push rod three.

[0014] Preferably, extension blocks are welded on both ends of the outer side of the lower clamping plate, a limiting frame is fixedly distributed on the inner lower end of the positioning plate, a limiting groove is arranged inside the limiting frame, a limiting slider is slidably connected inside the limiting groove, and the extension block is fixedly arranged on the inner end of the limiting slider; the extension block and the limiting slider are limited inside the limiting groove of the limiting frame, so that the lower clamping plate is more stable when it is used to lift and adjust.

[0015] Preferably, sliding grooves are provided at both ends of the interior of the defect detection mechanism, inner grooves are provided at the front and rear ends of the sliding grooves, a slider is slidably connected to the interior of the sliding groove, an inner plate is fixedly provided at the front and rear ends of the slider, the height of the inner plate is greater than the height of the slider, and the inner plate is embedded in the inner groove; the sliding grooves and inner grooves are provided for safety limit sliding blocks and inner plate lifting and sliding adjustment to prevent the slider from slipping out of the outside when sliding.

[0016] Preferably, the telescopic adjustment mechanism includes an electric push rod device 2, a push rod 2 and a limit cylinder 2, the inner end of the electric push rod device 2 is welded with a mounting gasket, the mounting gasket is installed on the outer end of the slider, the limit cylinder 2 is fixedly arranged on the inner end of the slider, the push rod 2 passes through the limit cylinder 2 and is connected to the electric push rod device 2, and the inner end of the push rod 2 is fixedly provided with an end plate; the limit cylinder 2 is provided for limiting the support of the push rod 2 for sliding adjustment, and the electric push rod device 2 and the push rod 2 are used to automatically control the left and right movement position of the end plate.

[0017] A limiting cylinder three is fixedly provided in the middle of the end plate, a docking column is penetrated and connected inside the limiting cylinder three, a positioning bolt is penetrated and connected with a thread on the top of the end plate, an electromagnet is fixedly provided on the inner end of the docking column, the electromagnet is connected to the outer end of the positioning column, and the positioning column is a metal structure; the limiting cylinder three is used to fix and install the docking column, and the electromagnet is used to adsorb and fix the metal structure positioning column with high strength, and can be automatically controlled to disconnect.

[0018] Preferably, fixing blocks are fixedly provided at the upper and lower parts of the positioning column, through holes are provided at the outer ends of the fixing blocks, hooks are hung at the through holes, ropes are connected to the outer ends of the hooks, storage holes are provided in the middle of the defect detection mechanism, a retractable and winding device is provided at the outer ends of the storage holes, the rope passes through the storage holes and is connected to the retractable and winding device, and the retractable and winding device is fixedly provided on the outer side wall of the defect detection mechanism; the fixed block is used to hang the hook for stretching operation, the rope is used to pull and detect the tensile strength of the high-purity aluminum target, the storage hole is used to pass through the adjustment rope, and the retractable and winding device is used to automatically control the retractable and adjustable rope.

[0019] Preferably, the outer end of the telescopic adjustment mechanism is connected to a lifting adjustment mechanism, and the lifting adjustment mechanism is located at the front and rear ends of the outer side of the defect detection mechanism. The lifting adjustment mechanism includes a driving motor, a support plate 1, a screw, a support plate 2, a connecting plate 1, a connecting plate 2 and a connecting sleeve. The support plate 1 is fixedly arranged on the outer top of the defect detection mechanism, and the support plate 2 is fixedly arranged near the bottom of the outer side of the defect detection mechanism. The lower end of the support plate 1 is fixedly provided with an upper bearing, and the upper end of the support plate 2 is fixedly provided with a lower bearing. The driving motor is fixedly arranged on the upper end of the support plate 1, and the screw is rotatably connected between the upper bearing and the lower bearing, and the upper end of the screw The end is connected to the output end of the driving motor, the connecting plate 1 and the connecting plate 2 are L-shaped plate structures and are respectively fixed on the upper and lower ends of the outer side of the slider, the connecting sleeve is fixed through the connecting plate 1 and the connecting plate 2, and the lead screw is connected to the inside of the connecting sleeve through a thread; the driving motor is arranged to drive and control the rotation of the lead screw, the support plate 1 and the support plate 2 are used to support the lead screw, the upper bearing and the lower bearing are used to stably support the rotation of the lead screw, the connecting plate 1 and the connecting plate 2 with the L-shaped plate structure are used to be fixedly connected to the upper and lower ends of the outer side of the slider to drive it to slide, and the connecting sleeve is used to fix the connecting plate 1 and the connecting plate 2 to control its lifting and lowering adjustment.

[0020] (III) Beneficial effects

[0021] Compared with the prior art, the present invention has the following beneficial effects: by arranging support plates at both ends of the top of the high-purity aluminum target placement platform, it is convenient to automatically control the lifting and lowering of the height of the support plates so as to support the high-purity aluminum target for defect detection; by arranging a hydraulic mechanism above the high-purity aluminum target placement platform, it is convenient to automatically control the pressing of the high-purity aluminum target; by arranging a telescopic adjustment mechanism and a positioning clamping mechanism on both sides of the high-purity aluminum target placement platform, the high-purity aluminum target can be adjusted and stably clamped and positioned, which is suitable for various forms such as flat aluminum targets and rotating aluminum targets, and is convenient for detecting the tensile strength, compressive strength and bending resistance of the high-purity aluminum target, and is convenient for detecting defects, thereby improving the production quality of the high-purity aluminum target. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1It is a schematic diagram of the overall upper three-dimensional structure of the present invention;

[0023] Figure 2 It is a schematic diagram of the overall bottom three-dimensional structure of the present invention;

[0024] Figure 3 It is a schematic diagram of the lifting mechanism of the present invention;

[0025] Figure 4 It is a schematic diagram of the defect detection mechanism of the present invention;

[0026] Figure 5 It is the upper left schematic diagram of the positioning and clamping mechanism of the present invention;

[0027] Figure 6 For the present invention Figure 5 The enlarged structural diagram at A in the middle;

[0028] Figure 7 It is a schematic diagram of the right side structure of the positioning and clamping mechanism of the present invention;

[0029] Figure 8 It is a schematic diagram of the lower left structure of the positioning and clamping mechanism of the present invention;

[0030] Fig. 9 It is a schematic diagram of the left side of the defect detection mechanism adjustment structure of the present invention;

[0031] Fig.10 It is a schematic diagram of the right side of the defect detection mechanism adjustment structure of the present invention.

[0032] In the figure, 1. high-purity aluminum target placement platform; 11. support plate; 111. electric hydraulic device; 112. electric hydraulic rod; 113. limit cylinder; 114. cavity; 115. storage groove; 116. arc groove; 12. support leg; 2. top plate; 21. bracket; 22. hydraulic device; 221. hydraulic column; 222. pressure plate; 3. defect detection mechanism; 30. horizontal support plate; 31. positioning clamping mechanism; 311. positioning plate; 312. upper clamping plate; 3121. fixed plate 1; 3122. mounting plate; 3123. electric push rod device 1; 3124. push rod 1; 3125. fixed plate 3; 3126. limit strip; 3120. slide groove; 313. lower clamping plate; 3131. fixed plate 2; 3132. electric push rod device 3; 3133. push rod 3; 3134. Limit support plate; 3135, limit frame; 3136, limit groove; 3137, limit slider; 3138, extension block; 314, positioning column; 32, electric push rod device 2; 321, push rod 2; 322, limit cylinder 2; 323, end plate; 324, installation gasket; 33, sliding groove; 331, inner groove; 332, slider; 333, inner plate; 34, docking column; 341, limit cylinder 3; 342, electromagnet; 35, fixing block; 351, hook; 352, rope; 353, storage hole; 354, winding and retracting device; 36, lifting and lowering adjustment mechanism; 361, driving motor; 362, support plate one; 363, lead screw; 3631, upper bearing; 3632, lower bearing; 364, support plate two; 365, connecting plate one; 366, connecting plate two; 367, connecting sleeve. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] See also Figure 1-Figure 10 The embodiment of the present invention provides a technical solution: a high-purity aluminum target defect detection device, comprising a high-purity aluminum target placement platform 1, a top plate 2 and a defect detection mechanism 3, support legs 12 are fixedly provided at the bottom corners of the high-purity aluminum target placement platform 1, and support plates 11 are provided at both ends of the top of the high-purity aluminum target placement platform 1;

[0035] The top plate 2 is located above the high-purity aluminum target placement platform 1, and brackets 21 are fixedly provided at the front and rear ends of the top plate 2 and the high-purity aluminum target placement platform 1. A hydraulic device 22 is installed at the middle of the top of the top plate 2, and a hydraulic column 221 is connected through the bottom of the hydraulic device 22, and a pressure plate 222 is fixedly provided at the bottom of the hydraulic column 221;

[0036] A transverse support plate 30 is welded to the inner lower end of the defect detection mechanism 3, and the transverse support plate 30 is welded to both sides of the high-purity aluminum target placement platform 1. The inner two ends of the defect detection mechanism 3 are connected with a telescopic adjustment mechanism, and the inner end of the telescopic adjustment mechanism is connected with a positioning clamping mechanism 31.

[0037] By setting the support plates 11 at both ends of the top of the high-purity aluminum target placement platform 1, it is convenient to automatically control the lifting and lowering adjustment of the height of the support plates 11 so as to support the high-purity aluminum target for defect detection. By setting the hydraulic mechanism above the high-purity aluminum target placement platform, it is convenient to automatically control the pressing of the high-purity aluminum target. By setting the telescopic adjustment mechanism and the positioning clamping mechanism 31 on both sides of the high-purity aluminum target placement platform 1, the high-purity aluminum target can be adjusted and stably clamped and positioned, which is suitable for various forms such as flat aluminum targets and rotating aluminum targets, and is convenient for detecting the tensile strength, compressive strength and bending resistance of the high-purity aluminum target, and is convenient for detecting defects, thereby improving the production quality of the high-purity aluminum target.

[0038] Further improved, cavities 114 are provided at both ends of the top of the high-purity aluminum target placement platform 1, and a storage groove 115 is provided above the cavity 114. The support plate 11 has the same specifications as the storage groove 115. An electric hydraulic rod 112 is fixedly distributed at the bottom of the support plate 11, and an electric hydraulic device 111 is connected to the bottom of the electric hydraulic rod 112. The electric hydraulic device 111 is installed at the bottom of the high-purity aluminum target placement platform 1, and a limiting cylinder 113 is fixedly distributed at the inner bottom of the cavity 114. The electric hydraulic rod 112 is connected to the inside of the limiting cylinder 113, and an arc groove 116 is provided in the middle of the upper end surface of the support plate 11 and the lower end surface of the pressing plate 222;

[0039] The cavity 114 is provided for lifting and adjusting the electric hydraulic rod 112, and the storage groove 115 is used to accurately store the support plate 11. After the support plate 11 is stored, it is located at the same horizontal plane as the top of the high-purity aluminum target placement platform 1. The electric hydraulic device 111 is used for automatically controlling the lifting and lowering adjustment of the electric hydraulic rod 112 and the support plate 11, and the limit cylinder 113 is used for stable limit support of the electric hydraulic rod 112 for telescopic adjustment.

[0040] Further improved, the positioning clamping mechanism 31 includes a positioning plate 311, an upper clamping plate 312, a lower clamping plate 313 and a positioning column 314, the positioning plate 311 is a longitudinal plate-shaped structure, the positioning column 314 is fixedly arranged at the middle of the outer end of the positioning plate 311, the upper clamping plate 312 and the lower clamping plate 313 are respectively arranged at the upper and lower parts of the positioning plate 311, and the inner sides of the upper clamping plate 312 and the lower clamping plate 313 are both groove structures;

[0041] The positioning plate 311 is used to support the upper clamping plate 312, the lower clamping plate 313 and the positioning column 314. The positioning column 314 is used to connect with the outer end structure. The upper clamping plate 312 and the lower clamping plate 313 are used to clamp and lock the high-purity aluminum target. The groove structure is suitable for high-purity aluminum targets in tubular form.

[0042] Further improved, a slide groove 3120 is provided at the upper end of the positioning plate 311, and an upper clamping plate 312 is slidably connected inside the slide groove 3120, and a limiting strip 3126 is fixedly provided at the upper end of the upper clamping plate 312, and a fixing plate 1 3121 is fixedly provided at the inner upper end of the positioning plate 311, and a slot hole is provided at the bottom of the fixing plate 1 3121, and the limiting strip 3126 is limitedly slidably connected to the slot hole, and a mounting plate 3122 is welded to the outer end of the top of the positioning plate 311, and a push rod 1 3124 is fixedly provided at the outer end of the upper clamping plate 312, and an electric push rod device 1 3123 is connected to the outer end of the push rod 1 3124, and a fixing plate 3 3125 is fixedly provided at the middle of the electric push rod device 1 3123, and the fixing plate 3 3125 is fixedly provided at the bottom of the mounting plate 3122;

[0043] The sliding groove 3120 is provided to limit the sliding adjustment position of the upper clamping plate 312, the limiting bar 3126 is limited inside the slot to assist the sliding of the upper clamping plate 312, the electric push rod device 1 3123 and the push rod 1 3124 are used to automatically control the inward and outward movement adjustment of the upper clamping plate 312, the fixing plate 1 3121 is used to stably support the upper clamping plate 312 and enhance the clamping strength, and the mounting plate 3122 and the fixing plate 3125 are used to support the electric push rod device 1 3123 with high strength.

[0044] Further improved, a push rod 3133 is fixedly provided at the bottom of the lower clamping plate 313, a fixing plate 2131 is fixedly provided at the inner lower end of the positioning plate 311, the bottom of the push rod 3133 passes through the fixing plate 2131 and is connected to an electric push rod device 3132, the electric push rod device 3132 is fixedly provided at the bottom of the fixing plate 2131, the outside of the push rod 3133 passes through and is connected to a limited support plate 3134, the limited support plate 3134 is located above the fixing plate 2131 and is fixedly provided to the inner wall of the positioning plate 311;

[0045] The electric push rod device three 3132 and push rod three 3133 are used to automatically control the lifting and lowering adjustment position of the lower clamping plate 313 so as to clamp the high-purity aluminum target. The fixed plate two 3131 is used to stably support the lower clamping plate 313 to enhance the clamping strength. The limiting support plate 3134 is used to stabilize the extension and retraction of the auxiliary push rod three 3133.

[0046] Further improved, the two ends of the outer side of the lower clamping plate 313 are welded with extension blocks 3138, the inner lower end of the positioning plate 311 is fixed with a limit frame 3135, the inner part of the limit frame 3135 is provided with a limit groove 3136, the inner part of the limit groove 3136 is slidably connected to the limit slider 3137, and the extension block 3138 is fixedly arranged at the inner end of the limit slider 3137;

[0047] The extending block 3138 and the limiting sliding block 3137 are limited in the limiting groove 3136 of the limiting frame 3135, so that the lower clamping plate 313 is more stable when being adjusted in lifting.

[0048] As a further improvement, the defect detection mechanism 3 has sliding grooves 33 at both ends thereof, inner grooves 331 are formed at the front and rear ends of the sliding grooves 33, a slider 332 is slidably connected to the inside of the sliding grooves 33, inner plates 333 are fixedly provided at the front and rear ends of the slider 332, the height of the inner plates 333 is greater than the height of the slider 332, and the inner plates 333 are embedded in the inner grooves 331;

[0049] The sliding groove 33 and the inner groove 331 are provided to safely limit the lifting and sliding adjustment of the slider 332 and the inner plate 333 to prevent the slider 332 from slipping out when sliding.

[0050] Further improved, the telescopic adjustment mechanism includes an electric push rod device 2 32, a push rod 2 321 and a limiting cylinder 2 322, the inner end of the electric push rod device 2 32 is welded with a mounting gasket 324, the mounting gasket 324 is mounted on the outer end of the slider 332, the limiting cylinder 2 322 is fixedly arranged on the inner end of the slider 332, the push rod 2 321 passes through the limiting cylinder 2 322 and is connected to the electric push rod device 2 32, and the inner end of the push rod 2 321 is fixedly provided with an end plate 323;

[0051] The second limiting cylinder 322 is provided to limit the sliding adjustment of the second push rod 321, and the second electric push rod device 32 and the second push rod 321 are used to automatically control the left and right movement position of the end plate 323.

[0052] A limiting cylinder 341 is fixedly provided in the middle of the end plate 323, and a docking column 34 is connected through the inside of the limiting cylinder 341. A positioning bolt is connected through the top of the end plate 323 by a thread. An electromagnet 342 is fixedly provided at the inner end of the docking column 34, and the electromagnet 342 is connected to the outer end of the positioning column 314. The positioning column 314 is a metal structure.

[0053] The limiting cylinder 341 is provided to fix the docking column 34, and the electromagnet 342 is used to adsorb and fix the positioning column 314 of the metal structure with high strength, and the disconnection can be automatically controlled.

[0054] Further improved, the upper and lower parts of the positioning column 314 are fixed with fixing blocks 35, the outer ends of the fixing blocks 35 are provided with through holes, hooks 351 are hung at the through holes, the outer ends of the hooks 351 are connected with ropes 352, and the middle of the defect detection mechanism 3 is provided with storage holes 353, the outer ends of the storage holes 353 are provided with retractable winding devices 354, the ropes 352 pass through the storage holes 353 and are connected to the retractable winding devices 354, and the retractable winding devices 354 are fixed to the outer side wall of the defect detection mechanism 3;

[0055] The fixed block 35 is used to hang the hook 351 for stretching operation, the rope 352 is used for pulling to detect the tensile strength of the high-purity aluminum target, the storage hole 353 is used to pass the adjustment rope 352, and the retractable winding device 354 is used to automatically control the retractable adjustment of the rope 352.

[0056] Specifically, the outer end of the telescopic adjustment mechanism is connected to a lifting adjustment mechanism 36, and the lifting adjustment mechanism 36 is located at the front and rear ends of the outer side of the defect detection mechanism 3. The lifting adjustment mechanism 36 includes a driving motor 361, a support plate 1 362, a screw 363, a support plate 2 364, a connecting plate 1 365, a connecting plate 2 366 and a connecting sleeve 367. The support plate 1 362 is fixedly arranged at the outer top of the defect detection mechanism 3, the support plate 2 364 is fixedly arranged near the bottom of the outer side of the defect detection mechanism 3, and the lower end of the support plate 1 362 is fixedly provided with an upper bearing 3631. A lower bearing 3632 is fixedly arranged at the upper end of the second support plate 364, a driving motor 361 is fixedly arranged at the upper end of the first support plate 362, a lead screw 363 is rotatably connected between the upper bearing 3631 and the lower bearing 3632, and the upper end of the lead screw 363 is connected to the output end of the driving motor 361, a connecting plate 1 365 and a connecting plate 2 366 are L-shaped plate structures and are fixedly arranged at the upper and lower ends of the outer side of the slider 332, a connecting sleeve 367 is fixedly arranged through the connecting plate 1 365 and the connecting plate 2 366, and the lead screw 363 is connected to the inside of the connecting sleeve 367 through a thread;

[0057] The drive motor 361 is arranged to drive and control the rotation of the lead screw 363, the support plate 1 362 and the support plate 2 364 are used to support the lead screw 363, the upper bearing 3631 and the lower bearing 3632 are used to stably support the rotation of the lead screw 363, the connecting plate 1 365 and the connecting plate 2 366 of the L-shaped plate structure are used to be fixedly connected to the upper and lower ends of the outer side of the slider 332 to drive it to slide, and the connecting sleeve 367 is used to fix the connecting plate 1 365 and the connecting plate 2 366 to control their lifting and lowering adjustment.

[0058] Working principle: When testing the compressive performance:

[0059] The plate-shaped high-purity aluminum target can be directly placed on the high-purity aluminum target placement platform 1 at any angle, and the tubular high-purity aluminum target can be placed vertically on the high-purity aluminum target placement platform 1;

[0060] The hydraulic device 22 is started to automatically control the hydraulic column 221 to descend, so that the pressing plate 222 is pressed on the high-purity aluminum target material to test the compressive strength;

[0061] When testing the bending resistance:

[0062] The electric hydraulic device 111 is started to automatically control the electric hydraulic rod 112 to rise, lift up the support plate 11, and place the plate-shaped or tubular high-purity aluminum target material on the support plate 11;

[0063] The electric push rod device 3123 is started to automatically control the push rod 3124 to extend and retract, so that the upper clamping plate 312 is located inside the slide groove 3120 to slide and adjust the clamping area, and then the height of the positioning clamping mechanism 31 is adjusted through the lifting and lowering adjustment mechanism 36, so that the extended upper clamping plate 312 clamps the high-purity aluminum target and positions it above the support plate 11;

[0064] The hydraulic device 22 is started to automatically control the hydraulic column 221 to descend, so that the pressing plate 222 is pressed in the middle of the high-purity aluminum target material to test the bending strength;

[0065] When testing tensile properties:

[0066] Start the electric hydraulic device 111 to automatically control the electric hydraulic rod 112 to rise and lift up the support plate 11, and place the high-purity aluminum target material in a plate-like or tubular shape on the support plate 11;

[0067] Then, the driving motor 361 of the lifting adjustment mechanism 36 is started to automatically control the screw 363 to rotate, so that the connecting sleeve 367 is adjusted up and down through the action of the thread, and then the slider 332 and the inner plate 333 are driven to lift and slide inside the sliding groove 33 and the inner groove 331 through the connecting plate 1 365 and the connecting plate 2 366, so as to facilitate the adjustment of the detection height of the plate-shaped or tubular high-purity aluminum target;

[0068] Then start the electric push rod device 2 32 to automatically control the extension and retraction of the push rod 2 321, so that the end plate 323 moves left and right to adjust the detection position of the plate-shaped or tubular high-purity aluminum target;

[0069] When the positioning plate 311 of the positioning clamping mechanism 31 contacts the plate-shaped or tubular high-purity aluminum target, the electric push rod device 3123 is started to automatically control the push rod 3124 to extend and retract, so that the upper clamping plate 312 is located inside the slide groove 3120 to slide and adjust the clamping area, thereby achieving a higher strength clamping;

[0070] At the same time, the electric push rod device 3132 is started to automatically control the push rod 3133 to extend and retract, so that the lower clamping plate 313 moves upward to directly clamp and fix the high-purity aluminum target material in a plate-like or tubular shape;

[0071] At this time, the power supply of the electromagnet 342 is disconnected, so that the docking column 34 and the positioning column 314 are separated, and then the electric push rod device 2 32 is started to automatically control the push rod 2 321 to extend and retract, so that the end plate 323 moves to the right;

[0072] The retractable winding device 354 is started to automatically control the reeling of the rope 352, and the fixed block 35 is stretched through the hook 351, so that the tensile properties of the plate-shaped or tubular high-purity aluminum target material can be detected.

[0073] The high-purity aluminum target placement platform 1 of the present invention, the support plate 11, the electric hydraulic device 111, the electric hydraulic rod 112, the limit cylinder 113, the cavity 114, the storage groove 115, the arc groove 116, the support leg 12, the top plate 2, the bracket 21, the hydraulic device 22, the hydraulic column 221, the pressure plate 222, the defect detection mechanism 3, the horizontal support plate 30, the positioning clamping mechanism 31, the positioning plate 311, the upper clamping plate 312, the fixing plate 3121, the mounting plate 3122, the electric push rod device 3123, the push rod 3124, the fixing plate 3125, the limit strip 3126, the slide groove 3120, the lower clamping plate 313 , fixed plate 2 3131, electric push rod device 3 3132, push rod 3 3133, limit support plate 3134, limit frame 3135, limit groove 3136, limit slider 3137, extension block 3138, positioning column 314, electric push rod device 2 32, push rod 2 321, limit cylinder 2 322, end plate 323, installation gasket 324, sliding groove 33, inner groove 331, slider 332, inner plate 333, docking column 34, limit cylinder 341, electromagnet 342, fixed block 35, hook 351, rope 352, storage hole 353, retracting and winding device 354, lifting and lowering adjustment mechanism 36, drive Motor 361, support plate 1 362, lead screw 363, upper bearing 3631, lower bearing 3632, support plate 2 364, connecting plate 1 365, connecting plate 2 366, connecting sleeve 367, all components are universal standard parts or components known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods. The problem solved by the present invention is that it is difficult to detect the defects of high-purity aluminum target with high precision by manual observation and detection, and some detection equipment cannot be applied to various forms of high-purity aluminum target, and the production quality of high-purity aluminum target is low. The present invention combines the above components to The support plates arranged at both ends of the top of the high-purity aluminum target placement platform can facilitate automatic control of the height of the support plates so as to support the high-purity aluminum target for defect detection. The hydraulic mechanism arranged above the high-purity aluminum target placement platform can facilitate automatic control of pressing the high-purity aluminum target. The telescopic adjustment mechanism and the positioning clamping mechanism arranged on both sides of the high-purity aluminum target placement platform can adjust the high-purity aluminum target and stably clamp it in place. The high-purity aluminum target is suitable for various forms such as flat aluminum targets and rotating aluminum targets, and is convenient for detecting the tensile strength, compressive strength and bending resistance of the high-purity aluminum target, and is convenient for detecting defects, thereby improving the production quality of the high-purity aluminum target.

[0074] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the attached claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any figure mark in the claims should not be regarded as limiting the claims involved.

[0075] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A high-purity aluminum target defect detection device, comprising a high-purity aluminum target placement platform (1), a top plate (2) and a defect detection mechanism (3), characterized in that: Support legs (12) are fixedly provided at the bottom corners of the high-purity aluminum target placement platform (1), and support plates (11) are provided at both ends of the top of the high-purity aluminum target placement platform (1); The top plate (2) is located above the high-purity aluminum target placement platform (1), and brackets (21) are fixedly provided at the front and rear ends of the top plate (2) and the high-purity aluminum target placement platform (1). A hydraulic device (22) is installed in the middle of the top of the top plate (2), and a hydraulic column (221) is connected through the bottom of the hydraulic device (22), and a pressure plate (222) is fixedly provided at the bottom of the hydraulic column (221); A transverse support plate (30) is welded to the inner lower end of the defect detection mechanism (3), and the transverse support plate (30) is welded to both sides of the high-purity aluminum target placement platform (1). The inner two ends of the defect detection mechanism (3) are connected to a telescopic adjustment mechanism, and the inner end of the telescopic adjustment mechanism is connected to a positioning clamping mechanism (31); The positioning clamping mechanism (31) comprises a positioning plate (311), an upper clamping plate (312), a lower clamping plate (313) and a positioning column (314); the positioning plate (311) is a longitudinal plate-shaped structure; the positioning column (314) is fixedly arranged at the middle of the outer end of the positioning plate (311); the upper clamping plate (312) and the lower clamping plate (313) are arranged at the upper and lower parts of the positioning plate (311), respectively; and the inner sides of the upper clamping plate (312) and the lower clamping plate (313) are both groove structures; The upper end of the positioning plate (311) is provided with a slide groove (3120), the interior of the slide groove (3120 is slidably connected to an upper clamping plate (312), the upper end of the upper clamping plate (312) is fixedly provided with a limit bar (3126), the inner upper end of the positioning plate (311) is fixedly provided with a fixing plate 1 (3121), the bottom of the fixing plate 1 (3121) is provided with a slot hole, and the limit bar (3126) is slidably connected to the slot hole in a limited manner. A mounting plate (3122) is welded to the outer end of the top of the positioning plate (311), a push rod 1 (3124) is fixedly provided at the outer end of the upper clamping plate (312), an electric push rod device 1 (3123) is connected to the outer end of the push rod 1 (3124), a fixing plate 3 (3125) is fixedly provided in the middle of the electric push rod device 1 (3123), and the fixing plate 3 (3125) is fixedly provided at the bottom of the mounting plate (3122); A push rod three (3133) is fixedly provided at the bottom of the lower clamping plate (313), a fixing plate two (3131) is fixedly provided at the inner lower end of the positioning plate (311), the bottom of the push rod three (3133) passes through the fixing plate two (3131) and is connected to an electric push rod device three (3132), the electric push rod device three (3132) is fixedly provided at the bottom of the fixing plate two (3131), the outside of the push rod three (3133) passes through and is connected to a limiting support plate (3134), the limiting support plate (3134) is located above the fixing plate two (3131) and is fixedly provided on the inner wall of the positioning plate (311); Extension blocks (3138) are welded to the two outer ends of the lower clamping plate (313); a limit frame (3135) is fixedly disposed at the inner lower end of the positioning plate (311); a limit slot (3136) is provided inside the limit frame (3135); a limit slider (3137) is slidably connected inside the limit slot (3136); and the extension block (3138) is fixedly disposed at the inner end of the limit slider (3137); The defect detection mechanism (3) has sliding grooves (33) at both ends thereof, the front and rear ends of the sliding groove (33) both have inner grooves (331), the interior of the sliding groove (33) is slidably connected to a slider (332), the front and rear ends of the slider (332) are fixedly provided with inner plates (333), the height of the inner plates (333) is greater than the height of the slider (332), and the inner plates (333) are embedded in the interior of the inner groove (331); The telescopic adjustment mechanism comprises a second electric push rod device (32), a second push rod (321) and a second limiting cylinder (322); a mounting gasket (324) is welded to the inner end of the second electric push rod device (32); the mounting gasket (324) is mounted on the outer end of the slider (332); the second limiting cylinder (322) is fixed to the inner end of the slider (332); the second push rod (321) passes through the second limiting cylinder (322) and is connected to the second electric push rod device (32); and an end plate (323) is fixed to the inner end of the second push rod (321); A limiting cylinder three (341) is fixedly provided in the middle of the end plate (323), a docking column (34) is penetrated and connected inside the limiting cylinder three (341), a positioning bolt is penetrated and connected to the top of the end plate (323) via a thread, an electromagnet (342) is fixedly provided at the inner end of the docking column (34), and the electromagnet (342) is connected to the outer end of the positioning column (314), and the positioning column (314) is a metal structure.

2. A high purity aluminum target defect detection device according to claim 1, characterized in that: Both ends of the top of the high-purity aluminum target placement platform (1) are provided with cavities (114), a storage groove (115) is provided above the cavity (114), the support plate (11) and the storage groove (115) have the same specifications, an electric hydraulic rod (112) is fixedly distributed at the bottom of the support plate (11), an electric hydraulic device (111) is connected through the bottom of the electric hydraulic rod (112), and the electric hydraulic device (111) is installed at the bottom of the high-purity aluminum target placement platform (1), a limiting cylinder (113) is fixedly distributed at the inner bottom of the cavity (114), the electric hydraulic rod (112) is connected through the inside of the limiting cylinder (113), and an arc groove (116) is provided in the middle of the upper end surface of the support plate (11) and the lower end surface of the pressure plate (222).

3. A high purity aluminum target defect detection device according to claim 1, characterized in that: A fixing block (35) is fixedly provided above and below the positioning column (314); a through hole is provided at the outer end of the fixing block (35); a hook (351) is hung at the through hole; a rope (352) is connected to the outer end of the hook (351); a storage hole (353) is provided in the middle of the defect detection mechanism (3); a retractable winding device (354) is provided at the outer end of the storage hole (353); the rope (352) passes through the storage hole (353) and is connected to the retractable winding device (354); the retractable winding device (354) is fixedly provided on the outer side wall of the defect detection mechanism (3).

4. A high purity aluminum target defect detection device according to claim 3, characterized in that: The outer end of the telescopic adjustment mechanism is connected to a lifting adjustment mechanism (36), and the lifting adjustment mechanism (36) is located at the front and rear ends of the outer side of the defect detection mechanism (3). The lifting adjustment mechanism (36) comprises a driving motor (361), a support plate 1 (362), a lead screw (363), a support plate 2 (364), a connecting plate 1 (365), a connecting plate 2 (366) and a connecting sleeve (367). The support plate 1 (362) is fixedly arranged at the outer top of the defect detection mechanism (3), the support plate 2 (364) is fixedly arranged at the outer side of the defect detection mechanism (3) and close to the bottom, the lower end of the support plate 1 (362) is fixedly provided with an upper bearing (3631), and the support plate 2 A lower bearing (3632) is fixedly provided at the upper end of the support plate (364); the drive motor (361) is fixedly provided at the upper end of the support plate (362); the lead screw (363) is rotatably connected between the upper bearing (3631) and the lower bearing (3632); and the upper end of the lead screw (363) is connected to the output end of the drive motor (361); the connecting plate (365) and the connecting plate (366) are L-shaped plate structures and are respectively fixedly provided at the upper and lower ends of the outer side of the slider (332); the connecting sleeve (367) is fixedly provided through the connecting plate (365) and the connecting plate (366); and the lead screw (363) is connected to the inside of the connecting sleeve (367) through a thread.

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