A method and system for automatic sampling and analysis of high-purity chemicals for semiconductors

Abstract

The present application relates to an automatic sampling and analysis method and system for high-purity chemicals for semiconductors. The collection time of a sampling target is set as a target time zone and divided into n target time sub-zones. Basic data, automatic sampling data and environmental data of the sampling target are collected in the n target time sub-zones, and basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients of the collected sampling targets are calculated in turn. A comprehensive optimization index of the sampling target is calculated based on the basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients. Finally, the comprehensive optimization indexes of the sampling targets in the n target time sub-zones are compared with the set comprehensive optimization index target values ​​in turn to determine whether the sampling targets in the n target time sub-zones meet the standards. The data of the sampling targets in each target time sub-zone are collected, and the influence of the sampling process and environmental factors on the analysis results is increased, thereby improving the accuracy and reliability of the analysis results.

Description

Technical Field

[0001] The invention relates to an automatic sampling and analysis method and system for high-purity chemicals for semiconductors, belonging to the technical field of automatic chemical sampling. Background Art

[0002] With the rapid development of the semiconductor industry, the quality control of high-purity chemicals has become a key factor affecting product quality. However, the existing sampling and analysis systems for high-purity chemicals used in semiconductors often have problems such as low automation, low sampling and analysis accuracy, and insufficient consideration of environmental factors, which leads to unstable sampling results and cannot meet the high quality requirements of the semiconductor industry for high-purity chemicals.

[0003] In the existing sampling and analysis systems, there is often a lack of accurate division and control of sampling time, which makes the sampling results unable to accurately reflect the quality changes of high-purity chemicals in different time periods. At the same time, the collection and analysis of sampling data often rely on manual operations, which is not only inefficient, but also easily affected by human factors, resulting in inaccurate analysis results.

[0004] In addition, when considering environmental factors, existing sampling and analysis systems often only consider a single environmental factor, such as temperature or humidity, and fail to fully consider the comprehensive impact of multiple environmental factors on the quality of high-purity chemicals. This limitation makes it impossible for existing sampling and analysis systems to accurately evaluate the quality changes of high-purity chemicals, thereby affecting the quality and stability of semiconductor products. Therefore, it is particularly important to develop an automatic sampling and analysis system for high-purity chemicals for semiconductors that can overcome the defects of existing technologies. Summary of the invention

[0005] The object of the present invention is to provide an automatic sampling and analysis method and system for high-purity chemicals for semiconductors, which can accurately evaluate the quality changes of high-purity chemicals in different time periods and provide stable and reliable high-purity chemicals, thereby improving the quality and stability of semiconductor products.

[0006] To achieve the above object, the present invention provides the following technical solution: a method for automatic sampling and analysis of high-purity chemicals for semiconductors, comprising:

[0007] Set the sampling time of the sampling target as the target time area, and divide the target time area into n target time sub-areas i, where i is the arrangement sequence number of the target time sub-area, i∈(1,2,3…n-1,n);

[0008] Sequentially collecting basic data, automatic sampling data and environmental data of the sampling targets in n target time sub-areas i;

[0009] Establishing a basic data mathematical model, an automatic sampling data mathematical model and an environmental data mathematical model, and respectively using the basic data mathematical model, the automatic sampling data mathematical model and the environmental data mathematical model to calculate the basic characteristic value, the automatic sampling efficiency coefficient and the environmental impact coefficient of the sampling target in the n target time sub-areas i;

[0010] Establishing a comprehensive analysis mathematical model, and calculating the comprehensive optimization index of the sampling target in the n target time sub-areas i according to the obtained basic characteristic value, the automatic sampling efficiency coefficient and the environmental impact coefficient;

[0011] A comprehensive optimization index target value is set, and according to the comprehensive optimization index target value, it is judged in turn whether the comprehensive optimization index of the sampling target in the n target time sub-areas i meets the standard, and the judgment result is output.

[0012] Furthermore, the basic data includes the purity percentage F of the sampling target. p , impurity content F m , particle size F g and density F d , the automatic sampling data includes the sampling accuracy S p , sampling volume S m , sampling time S t and leakage times S l , the environmental data includes temperature R m 、Humidity R h , air pressure R p and air particle content R g .

[0013] Furthermore, the basic data mathematical model is: Among them, HF i is the basic characteristic value of the i-th target time sub-region, Fp i is the purity percentage of the i-th target time sub-region, Fm i is the impurity content of the i-th target time sub-region, Fg i is the granularity of the i-th target time sub-region, Fd i is the density of the i-th target time sub-region, and μ1 is other influencing factors affecting the sampling target.

[0014] Furthermore, the automatic sampling data mathematical model is: Among them, HS i is the automatic sampling efficiency coefficient of the i-th target time sub-region, Sp i is the sampling accuracy of the i-th target time sub-region, Sm iis the sampling amount of the i-th target time sub-region, St i is the sampling time of the i-th target time sub-region, Sl i is the number of leakages in the i-th target time sub-region, Δt is the time difference between the i-th target time sub-region and the i-1-th target time sub-region, and μ2 is other influencing factors affecting the automatic sampling efficiency coefficient.

[0015] Furthermore, the environmental data mathematical model is: Among them, HR i is the environmental impact coefficient of the i-th target time sub-area, Rm i is the temperature of the i-th target time sub-region, Rh i is the humidity of the i-th target time sub-area, Rp i is the air pressure of the i-th target time sub-region, Rg i is the air particulate matter content in the i-th target time sub-area, and μ3 is other influencing factors affecting the environmental impact coefficient.

[0016] Furthermore, the comprehensive analysis mathematical model is: Among them, η i is the comprehensive optimization index of the target in the i-th target time sub-area, HF i is the basic characteristic value of the i-th target time sub-region, HS i is the automatic sampling efficiency coefficient of the i-th target time sub-region, HR i is the environmental impact coefficient of the i-th target time sub-area, and λ is other influencing factors affecting the comprehensive optimization index.

[0017] Furthermore, the comprehensive optimization index target value is marked as η str , when η str <η i When η, the output target sampling analysis result is good; when η str >η i When the target sampling analysis result is poor, an alarm signal is issued.

[0018] The present invention also provides an automatic sampling and analysis system for high-purity chemicals for semiconductors, which comprises:

[0019] A sampling time division module is used to divide the set target time area into n target time sub-areas, and mark the n target time sub-areas as i, where i is the arrangement sequence number of the target time sub-areas, i∈(1,2,3…n-1,n);

[0020] A sampling data acquisition module, used for collecting basic data, automatic sampling data and environmental data of the sampling target in the n target time sub-areas i;

[0021] The sampling data analysis module includes a basic data analysis unit having a basic data mathematical model, an automatic sampling data analysis unit having an automatic sampling data mathematical model, and an environmental data analysis unit having an environmental data mathematical model, to obtain basic data, automatic sampling data, and environmental data of the sampling targets in the n target time sub-areas i, and calculate basic characteristic values, automatic sampling efficiency coefficients, and environmental impact coefficients of the sampling targets in the n target time sub-areas i;

[0022] A comprehensive analysis module, comprising a comprehensive analysis unit having a comprehensive analysis mathematical model, wherein the comprehensive analysis unit obtains basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients of the n target time sub-regions i, and sequentially calculates the comprehensive optimization indexes of the sampling targets in the n target time sub-regions i;

[0023] The control module obtains the comprehensive optimization index, and determines whether the comprehensive optimization index of the sampling target within the n target time sub-areas i meets the standard according to the set comprehensive optimization index target value, and outputs the judgment result.

[0024] Furthermore, the sampling data acquisition module includes a spectrometer, a laser particle size analyzer, a densitometer, a sensor, a recording device, a counter, an environmental monitoring device, a thermometer and a hygrometer, a barometer and a particle counter which are signal-connected to the sampling data analysis module.

[0025] Furthermore, the control module also includes an alarm unit, and the alarm unit is an audible and visual alarm.

[0026] The beneficial effects of the present invention are as follows: the present application sets the collection time of the sampling target to the target time area and divides it into n target time sub-areas, collects the basic data, automatic sampling data and environmental data of the sampling target in the n target time sub-areas in turn, and calculates the basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients of the sampling targets collected in the n target time sub-areas in turn, and calculates the comprehensive optimization index of the sampling targets in the n target time sub-areas according to the basic characteristic values, the automatic sampling efficiency coefficients and the environmental impact coefficients, and finally compares the comprehensive optimization index of the sampling targets in the n target time sub-areas with the set comprehensive optimization index target values ​​in turn to determine whether the sampling targets in the n target time sub-areas meet the standards, and by finely capturing the data changes of the sampling targets in each target time sub-area, the properties and states of high-purity chemicals are more accurately reflected. In addition, the influence of the sampling process and environmental factors on the analysis results is fully considered, thereby improving the accuracy and reliability of the analysis.

[0027] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 The present invention is a flow chart of an automatic sampling and analysis method for high-purity chemicals for semiconductors.

[0029] Figure 2 The present invention is a schematic diagram of the structure of an automatic sampling and analysis system for high-purity chemicals for semiconductors. DETAILED DESCRIPTION

[0030] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0031] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] Please refer to Figure 1 The present invention shows an automatic sampling and analysis method for high-purity chemicals for semiconductors (hereinafter referred to as "analysis method"). In this embodiment, the analysis method is used to detect high-purity chemicals for semiconductors. Of course, the analysis method can also be used for other chemical drug detection. The analysis method includes:

[0034] S1: Set the sampling time of the sampling target as the target time area, and divide the target time area into n target time sub-areas i, where i is the arrangement sequence of the target time sub-area, i∈(1,2,3…n-1,n). The number of target time sub-areas can be divided according to demand and is not specifically limited here.

[0035] S2: Sequentially collect basic data, automatic sampling data and environmental data of sampling targets in n target time sub-areas i.

[0036] S3: Establish basic data mathematical models, automatic sampling data mathematical models and environmental data mathematical models, and use the basic data mathematical models, automatic sampling data mathematical models and environmental data mathematical models to calculate the basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients of the sampling targets in n target time sub-areas i.

[0037] S4: Establish a comprehensive analysis mathematical model, and calculate the comprehensive optimization index of the sampling targets within the n target time sub-areas i according to the obtained basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients.

[0038] S5: Set a comprehensive optimization index target value, and judge in turn whether the comprehensive optimization index of the sampling targets in the n target time sub-areas i meets the standard according to the comprehensive optimization index target value, and output the judgment result.

[0039] Basic data includes the purity percentage F of the sampling target p , impurity content F m , particle size F g and density F d , automatic sampling data including sampling accuracy S p , sampling volume S m , sampling time S tand leakage times S l , environmental data including temperature R m 、Humidity R h , air pressure R p and air particulate matter content R g .

[0040] The basic data mathematical model is: Among them, HF i is the basic eigenvalue of the i-th target time sub-region, Fp i is the purity percentage of the i-th target time sub-region, Fm i is the impurity content of the i-th target time sub-region, Fg i is the granularity of the i-th target time sub-region, Fd i is the density of the i-th target time sub-region, and μ1 is other influencing factors that affect the sampling target.

[0041] The percentage of impurities and other substances is obtained through the purity percentage of the target time sub-area, and a comprehensive analysis is performed in combination with the total amount of impurities, average particle size and density change rate, which fully considers the intrinsic properties of high-purity chemicals and thus improves the accuracy and reliability of the analysis.

[0042] The mathematical model of automatic sampling data is: Among them, HS i is the automatic sampling efficiency coefficient of the i-th target time sub-region, Sp i is the sampling accuracy of the i-th target time sub-region, Sm i is the sampling amount of the i-th target time sub-region, St i is the sampling time of the i-th target time sub-region, Sl i is the number of leakages in the i-th target time sub-region, Δt is the time difference between the i-th target time sub-region and the i-1-th target time sub-region, and μ2 is other influencing factors affecting the automatic sampling efficiency coefficient.

[0043] On the basis of considering the properties of the sample itself, the sampling efficiency can be expressed by the average precision, sampling volume and time difference, the average leakage time, sampling volume and leakage number of a single target time sub-area can be obtained, and the relationship between sampling and leakage can be expressed by the sampling volume and leakage number, and these are calculated comprehensively. The sampling method is comprehensively optimized according to the weights of different factors affecting the efficiency of sampling to achieve the best sampling efficiency and leakage control.

[0044] The mathematical model of environmental data is: Among them, HR i is the environmental impact coefficient of the i-th target time sub-area, Rm i is the temperature of the i-th target time sub-region, Rhi is the humidity of the i-th target time sub-area, Rp i is the air pressure of the i-th target time sub-area, Rg i is the air particulate matter content in the i-th target time sub-area, and μ3 is other influencing factors affecting the environmental impact coefficient.

[0045] Based on the properties of the sample itself and the sampling efficiency, it is obtained by combining the temperature change rate, humidity change rate, average air pressure, and average particulate matter content for comprehensive analysis. It also fully considers the impact of the sampling process and environmental factors on the analysis results. Comprehensive analysis can help determine the mutual influence and effect between different meteorological factors, so as to more comprehensively evaluate the impact of environmental changes on sampling efficiency and accuracy. According to the changing trends of different environmental factors, sampling strategies and control measures can be adjusted in time to adapt to changes in environmental conditions and improve sampling efficiency and accuracy.

[0046] The comprehensive analysis mathematical model is: Among them, η i is the comprehensive optimization index of the target in the i-th target time sub-region, HF i is the basic eigenvalue of the i-th target time sub-region, HS i is the automatic sampling efficiency coefficient of the i-th target time sub-region, HR i is the environmental impact coefficient of the i-th target time sub-area, and λ is other influencing factors affecting the comprehensive optimization index.

[0047] By comprehensively calculating and averaging the automatic sampling efficiency coefficient, environmental impact coefficient and characteristic value of each target time sub-area, and by comprehensively calculating and averaging multiple indicators, a unified comprehensive optimization index can be obtained, which is helpful to standardize and compare different target time sub-areas. At the same time, target time sub-areas with low sampling efficiency can be identified, and the sampling plan can be optimized in a targeted manner, thereby improving the overall sampling efficiency.

[0048] The target value of the comprehensive optimization index is marked as η str , when η str <η i When η, the output target sampling analysis result is good; when η str >η i When the target sampling analysis result is poor, an alarm signal is issued.

[0049] Please refer to Figure 2 The present invention also provides an automatic sampling and analysis system for high-purity chemicals for semiconductors (hereinafter referred to as "analysis system"), which includes a sampling time division module 1, a sampling data acquisition module 2, a sampling data analysis module 3, a comprehensive analysis module 4 and a control module 5.

[0050] The sampling time division module 1 is used to divide the set target time area into n target time sub-areas, and mark the n target time sub-areas as i, where i is the arrangement sequence number of the target time sub-areas, i∈(1,2,3…n-1,n).

[0051] The sampling data acquisition module 2 is used to collect basic data, automatic sampling data and environmental data of the sampling target in n target time sub-areas i.

[0052] The sampling data analysis module 3 includes a basic data analysis unit with a basic data mathematical model, an automatic sampling data analysis unit with an automatic sampling data mathematical model, and an environmental data analysis unit with an environmental data mathematical model, which obtains the basic data, automatic sampling data and environmental data of the sampling targets in the n target time sub-areas i, and calculates the basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients of the sampling targets in the n target time sub-areas i.

[0053] The comprehensive analysis module 4 includes a comprehensive analysis unit with a comprehensive analysis mathematical model. The comprehensive analysis unit obtains the basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients of the n target time sub-areas i, and calculates the comprehensive optimization indexes of the sampling targets in the n target time sub-areas i in turn.

[0054] The control module 5 obtains the comprehensive optimization index, and determines whether the comprehensive optimization index of the sampling target within the n target time sub-areas i meets the standard according to the set comprehensive optimization index target value, and outputs the judgment result.

[0055] The sampling data acquisition module 2 includes a spectrum analyzer, a laser particle size analyzer, a density meter, a sensor, a recording device, a counter, an environmental monitoring device, a thermometer and a hygrometer, a barometer and a particle counter which are signal-connected to the sampling data analysis module 3 .

[0056] The collection of basic data is mainly carried out through detection equipment, for example, the purity percentage and impurity content are determined by spectral analysis or mass spectrometry, the particle size is measured by a laser particle size analyzer, the density is measured by a density meter or a combination of a balance and a liquid density meter, and the density value is calculated by measuring the mass and volume of the sample. The collection of automatic sampling data is mainly through the sampling system's own sensors and recording equipment. For example, the sampling accuracy is evaluated by comparing the sampling volume preset by the system with the actual sample volume obtained. The sampling volume and sampling time are automatically recorded by the counter inside the system. The statistics of the number of leaks are calculated by monitoring whether there is a leak during the sampling process and counting accordingly. The collection of environmental data is carried out through environmental monitoring equipment. For example, temperature and humidity are monitored by a thermometer and hygrometer, air pressure is measured by a barometer, and the content of air particles is measured by a particle counter. This is a prior art and will not be described in detail here.

[0057] The control module 5 also includes an alarm unit, which is an audible and visual alarm. When the target sampling analysis result is poor, the control module 5 controls the alarm unit to alarm to remind the staff.

[0058] The beneficial effects of the present invention are as follows: the present application sets the collection time of the sampling target to the target time area and divides it into n target time sub-areas, collects the basic data, automatic sampling data and environmental data of the sampling target in the n target time sub-areas in turn, and calculates the basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients of the sampling targets collected in the n target time sub-areas in turn, and calculates the comprehensive optimization index of the sampling targets in the n target time sub-areas according to the basic characteristic values, the automatic sampling efficiency coefficients and the environmental impact coefficients, and finally compares the comprehensive optimization index of the sampling targets in the n target time sub-areas with the set comprehensive optimization index target values ​​in turn to determine whether the sampling targets in the n target time sub-areas meet the standards, and by finely capturing the data changes of the sampling targets in each target time sub-area, the properties and states of high-purity chemicals are more accurately reflected. In addition, the influence of the sampling process and environmental factors on the analysis results is fully considered, thereby improving the accuracy and reliability of the analysis.

[0059] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0060] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A method for automatic sampling and analysis of high-purity chemicals for semiconductors, characterized in that: include: Set the sampling time of the sampling target as the target time area, and divide the target time area into n target time sub-areas i, where i is the arrangement sequence number of the target time sub-area, i∈(1,2,3…n-1,n); Sequentially collecting basic data, automatic sampling data and environmental data of the sampling targets in n target time sub-areas i; Establishing a basic data mathematical model, an automatic sampling data mathematical model and an environmental data mathematical model, and respectively using the basic data mathematical model, the automatic sampling data mathematical model and the environmental data mathematical model to calculate the basic characteristic value, the automatic sampling efficiency coefficient and the environmental impact coefficient of the sampling target in the n target time sub-areas i; Establishing a comprehensive analysis mathematical model, and calculating the comprehensive optimization index of the sampling target in the n target time sub-areas i according to the obtained basic characteristic value, the automatic sampling efficiency coefficient and the environmental impact coefficient; Setting a comprehensive optimization index target value, judging in turn according to the comprehensive optimization index target value whether the comprehensive optimization indexes of the sampling targets in the n target time sub-regions i meet the standard, and outputting the judgment result; The basic data includes the purity percentage F of the sampling target p , impurity content F m , particle size F g and density F d , the automatic sampling data includes the sampling accuracy S p , sampling volume S m , sampling time S t and leakage times S l , the environmental data includes temperature R m 、Humidity R h , air pressure R p and air particulate matter content R g ; The basic data mathematical model is: Among them, HF i is the basic characteristic value of the i-th target time sub-region, Fp i is the purity percentage of the i-th target time sub-region, Fm i is the impurity content of the i-th target time sub-region, Fg i is the granularity of the i-th target time sub-region, Fd i is the density of the i-th target time sub-region, μ1 is other influencing factors affecting the sampling target; The automatic sampling data mathematical model is: Among them, HS i is the automatic sampling efficiency coefficient of the i-th target time sub-region, Sp i is the sampling accuracy of the i-th target time sub-region, Sm i is the sampling amount of the i-th target time sub-region, St i is the sampling time of the i-th target time sub-region, Sl i is the number of leakages in the i-th target time sub-region, Δt is the time difference between the i-th target time sub-region and the i-1-th target time sub-region, and μ2 is other influencing factors affecting the automatic sampling efficiency coefficient.

2. The automatic sampling and analysis method for high-purity chemicals for semiconductors according to claim 1, characterized in that: The environmental data mathematical model is: Among them, HR i is the environmental impact coefficient of the i-th target time sub-area, Rm i is the temperature of the i-th target time sub-region, Rh i is the humidity of the i-th target time sub-area, Rp i is the air pressure of the i-th target time sub-region, Rg i is the air particulate matter content in the i-th target time sub-area, and μ3 is other influencing factors affecting the environmental impact coefficient.

3. The automatic sampling and analysis method for high-purity chemicals for semiconductors according to claim 2, characterized in that: The comprehensive analysis mathematical model is: Among them, η i is the comprehensive optimization index of the target in the i-th target time sub-area, HF i is the basic characteristic value of the i-th target time sub-region, HS i is the automatic sampling efficiency coefficient of the i-th target time sub-region, HR i is the environmental impact coefficient of the i-th target time sub-area, and λ is other influencing factors affecting the comprehensive optimization index.

4. The automatic sampling and analysis method for high-purity chemicals for semiconductors according to claim 3, characterized in that: The comprehensive optimization index target value is marked as η str , when η str <η i When η, the output target sampling analysis result is good; when η str >η i When the target sampling analysis result is poor, an alarm signal is issued.

5. An automatic sampling and analysis system for high-purity chemicals for semiconductors, characterized in that: The method for automatic sampling and analysis of high-purity chemicals for semiconductors according to any one of claims 1 to 4 comprises: A sampling time division module is used to divide the set target time area into n target time sub-areas, and mark the n target time sub-areas as i, where i is the arrangement sequence number of the target time sub-areas, i∈(1,2,3…n-1,n); A sampling data acquisition module, used for collecting basic data, automatic sampling data and environmental data of the sampling target in the n target time sub-areas i; The sampling data analysis module includes a basic data analysis unit having a basic data mathematical model, an automatic sampling data analysis unit having an automatic sampling data mathematical model, and an environmental data analysis unit having an environmental data mathematical model, which obtains basic data, automatic sampling data, and environmental data of the sampling targets in the n target time sub-areas i, and calculates basic characteristic values, automatic sampling efficiency coefficients, and environmental impact coefficients of the sampling targets in the n target time sub-areas i; A comprehensive analysis module, comprising a comprehensive analysis unit having a comprehensive analysis mathematical model, wherein the comprehensive analysis unit obtains basic characteristic values, automatic sampling efficiency coefficients and environmental impact coefficients of the n target time sub-regions i, and sequentially calculates the comprehensive optimization indexes of the sampling targets in the n target time sub-regions i; The control module obtains the comprehensive optimization index, and determines whether the comprehensive optimization index of the sampling target within the n target time sub-areas i meets the standard according to the set comprehensive optimization index target value, and outputs the judgment result.

6. The automatic sampling and analysis system for high-purity chemicals for semiconductors as claimed in claim 5, characterized in that: The sampling data acquisition module includes a spectrum analyzer, a laser particle size analyzer, a densitometer, a sensor, a recording device, a counter, an environmental monitoring device, a thermometer and a hygrometer, a barometer and a particle counter which are signal-connected to the sampling data analysis module.

7. The automatic sampling and analysis system for high-purity chemicals for semiconductors as claimed in claim 6, characterized in that: The control module also includes an alarm unit, which is an audible and visual alarm.

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