COS test equipment and COS test method

Abstract

The present invention relates to the field of laser technology, and in particular to a COS testing device and a COS testing method. The COS testing device provided by the present invention comprises a test bench and a fixing mechanism; wherein the fixing mechanism comprises a heat sink, a fixing assembly and an elastic telescopic member, and the heat sink is provided with a water hole and a mounting hole. After the COS test is completed, since an elastic telescopic member is provided in the mounting hole on the heat sink, and the elastic telescopic member is in a compressed state to generate elastic force, the tension of the water film between the COS and the heat sink can be overcome by the adsorption force of the suction nozzle, and the COS can be removed smoothly. Due to the elastic restoring force of the elastic telescopic member, the COS can be removed without setting an air hole on the heat sink, thereby avoiding the problem of laser chip contamination caused by liquid splashing onto the laser chip of the COS due to air blowing; at the same time, since there is no air blowing, there will be no problem of uneven liquid flow rate of liquid cooling caused by air flow, which affects the heat dissipation of the chip.

Description

Technical Field

[0001] The present invention relates to the field of laser technology, and in particular to a COS testing device and a COS testing method. Background Art

[0002] Semiconductor lasers have the advantages of small size, light weight, long life, low power consumption, good reliability and small size, and are widely used in laser processing of precision mechanical parts, printing industry, medicine and other technical fields.

[0003] The main component of a semiconductor laser is COS (Chip on Substrate), that is, the laser chip is directly packaged on a heat sink, and the laser chip needs to be inspected behind the COS, including physical defects, power, divergence angle, and polarization direction.

[0004] Existing testing equipment includes testing mechanisms such as a robotic arm, a testing table, and an integrating sphere. A copper block is provided on the testing table. The COS is taken out from the loading area by a robotic arm and placed on the copper block. When testing the performance, the laser chip needs to be powered on, which will generate a lot of heat. Therefore, water is sprayed on the copper block, and the water is filled between the copper block and the heat sink to dissipate heat. However, after the test is completed, the COS needs to be removed from the copper block. However, due to the formation of a water film between the heat sink and the copper block, tension is formed; resulting in the inability to remove the COS from the copper block. In order to solve the above problem, in some technologies, a blowing hole is provided in the copper block, and air is blown between the copper block and the heat sink through the blowing hole. The water film between the heat sink and the copper block is destroyed by blowing. Although the above method can solve the problem that the COS is not easy to remove, blowing will cause water vapor to contaminate the chip on the one hand, and the air flow will cause the liquid flow rate of the liquid cooling to be uneven on the other hand, affecting the heat dissipation of the chip. Summary of the invention

[0005] (I) The technical problem to be solved by the present invention is: In the existing COS testing equipment, a water hole and an air blowing hole are set between the copper block and the heat sink of the test bench. The air blowing through the air blowing hole easily splashes the liquid between the heat sink and the copper block onto the chip, causing chip contamination. At the same time, the air flow causes the liquid flow rate of the liquid cooling to be uneven, affecting the heat dissipation of the chip.

[0006] (II) Technical solution

[0007] In order to solve the above technical problems, an embodiment of the present invention provides a COS test device, including a test bench and a fixing mechanism;

[0008] The fixing mechanism comprises a fixing assembly, a heat sink and an elastic telescopic member, the heat sink is arranged on the test bench, and the fixing assembly is used to fix the COS to be tested on the heat sink;

[0009] The heat sink block has an upper surface and a lower surface which are arranged opposite to each other, the lower surface of the heat sink block is arranged on the upper surface of the test bench, and water holes and mounting holes are arranged on the heat sink block at intervals, and the water holes are used to transport water to the upper surface of the heat sink block;

[0010] One end of the elastic telescopic member passes through the mounting hole and abuts against the test bench, and the other end extends out of the upper surface of the heat sink block, and the elastic telescopic member can be telescoped up and down.

[0011] According to one embodiment of the present invention, the fixing assembly includes a first clamping jaw, a second clamping jaw and a first driving member;

[0012] The first clamping jaw and the second clamping jaw are arranged opposite to each other to form a clamping area; the heat dissipation block is located in the clamping area formed by the first clamping jaw and the second clamping jaw, and the first driving member is used to drive the first clamping jaw and the second clamping jaw to move toward or away from each other;

[0013] The upper edges of the first clamping jaw and the second clamping jaw that are opposite to each other are higher than the upper surface of the heat dissipation block.

[0014] According to one embodiment of the present invention, the COS testing equipment also includes a workbench and a water outlet mechanism arranged on the workbench, the water outlet mechanism includes a water storage container and a second driving member, the water storage container has a water outlet, the water outlet is connected to the water hole, and the second driving member is used to drive the liquid in the water storage container to pass into the water hole through the water outlet.

[0015] According to an embodiment of the present invention, the test bench is provided with an upwardly protruding mounting platform, and the heat sink block and the fixing assembly are both arranged on the mounting platform.

[0016] According to one embodiment of the present invention, a downwardly recessed water collecting trough is provided on the upper surface of the mounting platform near the heat sink, and a water collecting hole with an upper opening is provided on the mounting platform, and one end of the water collecting trough extends to the upper end of the water collecting hole.

[0017] According to one embodiment of the present invention, the COS testing device further comprises a temperature sensing line and a temperature sensing chip. The temperature sensing chip is arranged at one end of the elastic telescopic member extending out of the mounting hole. The temperature sensing chip is electrically connected to one end of the temperature sensing line through the elastic telescopic member.

[0018] According to one embodiment of the present invention, the COS testing device also includes a cooling plate and a refrigerator electrically connected to the cooling plate; the cooling plate is arranged at the bottom of the heat sink, and the end of the temperature sensing line away from the elastic telescopic part is electrically connected to the refrigerator, and the refrigerator is used to control the cooling plate to cool or heat the heat sink.

[0019] According to one embodiment of the present invention, a long groove is provided on the lower surface of the heat sink, and the mounting hole is located correspondingly on the upper side of the groove, the lower end of the elastic telescopic member passes through the mounting hole and abuts against the upper surface of the mounting platform, and the temperature sensing line is located in the groove.

[0020] According to one embodiment of the present invention, the test bench further comprises a workbench and a third driving member disposed on the workbench and driving the test bench to rotate, wherein the test bench is provided with a plurality of the fixing mechanisms disposed at equal intervals along the rotation circumference of the test bench;

[0021] The workbench is at least provided with a loading station, a reading station, a detection station and a unloading station in sequence;

[0022] The third driving member drives the test bench to rotate, so as to drive each of the fixing mechanisms to rotate cyclically in the order of the loading station, the reading station, the detection station and the unloading station.

[0023] According to one embodiment of the present invention, the COS device further comprises a loading mechanism disposed at the loading station, a reading mechanism disposed at the reading station, a testing mechanism disposed at the detection station, a power-on mechanism disposed at the detection station, and a unloading mechanism disposed at the unloading station;

[0024] The feeding mechanism is used to place the COS to be detected on the upper surface of the heat dissipation block of the fixing mechanism located at the feeding mechanism;

[0025] The reading mechanism is used to read the COS information rotated to the detection station;

[0026] The power-on mechanism is used to power on the COS that is rotated to the test station, and the test mechanism is used to detect the performance of the COS after power-on;

[0027] The unloading mechanism is arranged at the unloading station and is used for removing the COS rotated to the unloading station.

[0028] According to one embodiment of the present invention, the workbench is provided with a loading area, the loading area is provided with a loading tray, and the loading tray is used to place the COS to be tested;

[0029] The feeding mechanism is arranged in the feeding area, and comprises a first X-direction moving component, a first Y-direction moving component, a first Z-direction moving component and a first suction nozzle;

[0030] The loading tray is arranged on the first X-direction moving assembly, and the first X-direction moving assembly is used to drive the loading tray to move along the X direction;

[0031] The first Y-direction moving component can drive the first suction nozzle to move to the loading station along the Y direction, and is located on the upper side of the heat dissipation block of the fixing mechanism rotated to the loading station;

[0032] The first Z-direction moving component can drive the first suction nozzle to move along the Z direction.

[0033] According to one embodiment of the present invention, the workbench is provided with a material unloading area, the material unloading area is provided with a material unloading tray, and the material unloading tray is used to place the tested COS;

[0034] The unloading mechanism is arranged in the unloading area, and comprises a second X-direction moving component, a second Y-direction moving component, a second Z-direction moving component and a second suction nozzle;

[0035] The unloading tray is arranged on the second X-direction moving assembly, and the second X-direction moving assembly is used to drive the unloading tray to move along the X direction;

[0036] The second Y-direction moving component can drive the second suction nozzle to move along the Y direction to the unloading station, and is located on the upper side of the heat dissipation block of the fixing mechanism rotated to the unloading station;

[0037] The second Z-direction moving component is disposed in the unloading area, and the second Z-direction moving component can drive the second suction nozzle to move along the Z direction.

[0038] According to one embodiment of the present invention, it further comprises an integrating sphere, a divergence angle tester and a polarization tester. A moving part capable of moving along the X direction is provided on the workbench, and the integrating sphere is placed on the moving part.

[0039] According to an embodiment of the present invention, the power-on mechanism includes a probe, a power supply and a lifting mechanism, the probe is connected to the power supply, the probe is installed on the lifting mechanism, and the lifting mechanism is used to drive the probe to rise or fall.

[0040] Another embodiment of the present invention further provides a COS testing method, using the COS testing device described in any of the above embodiments, including:

[0041] The loading process is to supply water to the upper surface of the heat sink through the water hole; the COS to be tested is placed on the upper surface of the heat sink, the COS presses one end of the elastic telescopic member extending from the upper surface of the heat sink into the mounting hole, and the COS is fixed to the heat sink through the fixing assembly;

[0042] In the blanking process, after the COS test is completed, the fixing assembly releases the COS, and the COS that has completed the test is removed from the heat sink block. The elastic telescopic member is reset and extends from the mounting hole to the upper side of the upper surface of the heat sink block.

[0043] According to one embodiment of the present invention, the fixing assembly includes a first clamping jaw, a second clamping jaw and a first driving member;

[0044] The process of fixing the COS on the heat sink block by the fixing assembly in the loading process includes:

[0045] The first driving mechanism drives the first clamping jaw and the second clamping jaw to move toward each other, and the COS and the heat sink are clamped between the first clamping jaw and the second clamping jaw to fix the COS on the heat sink;

[0046] The fixing assembly releases the COS in the blanking process, including:

[0047] The first driving mechanism drives the first clamping jaw and the second clamping jaw to move away from each other to release the detected COS.

[0048] Beneficial effects of the present invention: The COS testing device provided by the present invention comprises a test bench and a fixing mechanism; wherein the fixing mechanism comprises a heat sink, a fixing assembly and an elastic telescopic member, and the heat sink is provided with a water hole and a mounting hole. When testing the COS, water is passed between the heat sink and the heat sink of the COS through the water hole, and the COS to be tested is placed on the heat sink of the test bench. Since one end of the elastic telescopic member extends out of the upper surface of the mounting hole, when placing the COS, the COS presses the elastic telescopic member into the mounting hole, and the hot COS is pressed on the upper surface of the heat sink, and the COS to be tested is fixed on the heat sink through the fixing assembly, and a water film is formed between the COS and the heat sink, thereby dissipating heat for the COS. After the test is completed, the fixing assembly releases the COS, and since the elastic telescopic member 114 is in a compressed state, an upward elastic restoring force is applied to the COS, the elastic restoring force of the elastic telescopic member 114 cooperates with the suction force of the suction nozzle to overcome the tension of the water film between the COS and the surface of the heat sink, and the COS can be removed smoothly. Due to the elastic restoring force of the elastic telescopic part, the COS can be removed without setting an air blowing hole on the heat sink, thereby avoiding the problem of laser chip contamination caused by liquid splashing onto the laser chip of the COS due to air blowing; at the same time, since there is no air blowing, there will be no problem of uneven liquid flow rate of liquid cooling caused by airflow, which will affect the heat dissipation of the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0050] Figure 1 A three-dimensional diagram of a COS test device provided by one embodiment of the present invention;

[0051] Figure 2 for Figure 1 A magnified view of part A;

[0052] Figure 3 for Figure 2 A top view of a COS testing device provided by one embodiment of the present invention;

[0053] Figure 4 Schematic diagram of the side view with COS partially removed;

[0054] Figure 5 for Figure 4 A magnified view of part B;

[0055] Figure 6 for Figure 4 Enlarged view of part C;

[0056] Figure 7 It is a structural schematic diagram of the material unloading mechanism;

[0057] Figure 8 for Figure 7 A magnified view of the D portion;

[0058] Fig. 9 It is a structural schematic diagram of the feeding mechanism;

[0059] Fig.10 for Fig. 9 A magnified view of part E;

[0060] Fig.11 Schematic diagram of the structure of the heat sink.

[0061] Icons: 1- workbench; 11- test bench; 111- heat sink; 1111- water hole; 1112- mounting hole; 112- first clamping jaw; 113- second clamping jaw; 114- elastic expansion member; 115- probe; 116- mounting table;

[0062] 12-loading area; 121-loading tray; 13-unloading area; 131-unloading tray;

[0063] 14-feeding mechanism; 141-first X-direction fixed seat; 1411-first X-direction guide rail; 1412-first X-direction slider, 1413-first X-direction driving member; 142-first support column; 1421-first Y-direction guide rail; 1422-first Y-direction driving member; 143-first Z-direction fixed seat; 1431-first Z-direction guide rail; 1432-first Z-direction slider; 1433-first Y-direction slider; 1434-first Z-direction driving member; 144-first suction nozzle;

[0064] 15-feeding mechanism; 151-second X-direction fixed seat; 1511-second X-direction guide rail; 1512-second X-direction slider; 1513-second X-direction driving member; 152-second supporting column; 1521-second Y-direction guide rail; 1522-second Y-direction driving member; 153-second Z-direction fixed seat; 1531-second Z-direction guide rail; 1532-second Z-direction slider; 1533-second Y-direction slider; 1534-second Z-direction driving member; 154-second suction nozzle;

[0065] 16-integrating sphere; 17-divergence angle tester; 18-polarization tester; 19-reading mechanism;

[0066] 2-COS; 21-heat sink; 22-laser chip. DETAILED DESCRIPTION

[0067] In order to more clearly understand the above-mentioned purposes, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. In the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present invention.

[0068] like Figures 1 to 11 As shown, the present invention provides a COS test device, which includes a test bench 11 and a fixing mechanism; the fixing mechanism includes a fixing component, a heat sink 111 and an elastic telescopic member 114, the heat sink 111 is arranged on the test bench 11, and the fixing component is used to fix the COS2 to be tested on the heat sink 111; the heat sink 111 has an upper surface and a lower surface arranged opposite to each other, the lower surface of the heat sink 111 is arranged on the upper surface of the test bench 11, and the heat sink 111 is provided with water holes 1111 and mounting holes 1112 at intervals, and the water holes 1111 are used to transport water to the upper surface of the heat sink 111; as shown Fig.11 As shown, one end of the elastic telescopic member 114 passes through the mounting hole 1112 and abuts against the test bench 11 , and the other end extends out of the upper surface of the heat sink 111 , and the elastic telescopic member 114 can be telescoped up and down.

[0069] The COS test equipment provided by the present invention comprises a test bench 11 and a fixing mechanism, such as Figure 5As shown, the COS2 includes a heat sink 21 and a laser chip 22 which are packaged as a whole. When the COS testing device provided by the present invention is used, water is first passed between the heat sink 21 and the heat sink 111 of COS2 through the water hole 1111, and the COS2 to be tested is placed on the heat sink 111 of the test bench 11. Since one end of the elastic telescopic member 114 extends out of the upper surface of the mounting hole 1112, when COS2 is placed, the heat sink 21 is pressed onto the upper surface of the heat sink 111 to press the elastic telescopic member 114 into the mounting hole 1112. COS2 is fixed to the heat sink 111 through a fixing assembly, so that a water film is formed between the heat sink 21 and the heat sink 111. In this way, the contact area between the heat sink 21 as a whole and the heat sink 111 is larger, which can better dissipate the heat of the laser chip 22 on the heat sink 21, thereby dissipating the heat for COS2. After the test is completed, the fixing assembly releases the COS2. Since the elastic expansion member 114 is in a compressed state, it applies an elastic restoring force from bottom to top to the COS2. The elastic restoring force of the elastic expansion member 114 cooperates with the suction force of the suction nozzle to overcome the tension of the water film between the heat sink 21 and the surface of the heat sink 111, and the COS2 can be removed smoothly. Due to the elastic restoring force of the elastic expansion member 114, it is not necessary to set a blowing hole on the heat sink 111 to achieve the removal of the COS2, avoiding the contamination of the laser chip 22 caused by liquid splashing onto the laser chip 22 of the COS2 due to blowing. At the same time, since there is no blowing, there will be no problem of uneven liquid flow rate of liquid cooling caused by airflow, which affects the heat dissipation of the laser chip 22.

[0070] Among them, in this embodiment, the COS testing equipment also includes a power-on mechanism and a testing mechanism. In this embodiment, after COS2 is placed on the heat sink 111 and fixed by a fixing component, the power-on mechanism powers on COS2, and then the performance of COS2 is tested by the testing mechanism.

[0071] like Figures 1 to 3 As shown, the testing mechanism includes an integrating sphere 16, a divergence angle tester 17 and a polarization tester 18. A moving part that can move along the X direction is provided on the workbench 1, and the integrating sphere 16 is placed on the moving part. The power of the laser chip 22 of COS2 is measured by the integrating sphere 16, the divergence angle of the laser chip 22 is measured by the divergence angle tester 17, and the polarization direction of the laser chip 22 is measured by the polarization tester 18. In this embodiment, a power meter or other methods can also be used to measure the output power of the laser chip 22.

[0072] like Figure 1 and Figure 2As shown, according to an embodiment of the present invention, the power-on mechanism includes a probe 115, a power supply and a lifting mechanism, wherein the probe 115 is connected to the power supply, the probe 115 is installed on the lifting mechanism, and the lifting mechanism is used to drive the probe 115 to rise or fall; wherein the probe 115 is connected to a solenoid valve, which is connected to a controller, and the solenoid valve can be controlled by the controller to be turned on or off, thereby controlling the probe 115 to be powered on or off; at the same time, the lifting mechanism is also electrically connected to the controller, and the lifting mechanism is controlled by the controller to rise or fall, thereby controlling the probe 115 to rise or fall. When the laser chip 22 is powered on, the solenoid valve is powered on to electrically connect the power supply to the probe 115, and then the lifting mechanism is controlled to descend by the controller, and the probe 115 is descended to a preset position to be electrically connected to the laser chip 22, and the laser chip 22 is powered on. After the test is completed, the solenoid valve is controlled to be disconnected, the probe 115 is powered off, and then the lifting mechanism is controlled to rise, at which time the probe 115 is separated from the laser chip 22 on COS2.

[0073] According to one embodiment of the present invention, Figure 2 , Figure 3 , Figure 5 and Figure 6 As shown, the fixing assembly includes a first clamping jaw 112, a second clamping jaw 113 and a first driving member, the first clamping jaw 112 and the second clamping jaw 113 are relatively arranged to form a clamping area; the heat dissipation block 111 is located in the clamping area, and the first driving member is used to drive the first clamping jaw 112 and the second clamping jaw 113 to move toward or away from each other, and the relative upper side edges of the first clamping jaw 112 and the second clamping jaw 113 are higher than the upper surface of the heat dissipation block 111. In this embodiment, the fixing assembly includes a first clamp 112, a second clamp 113 and a first driving member. The first driving member can drive the first clamp 112 and the second clamp 113 to move toward or away from each other. When it is necessary to fix COS2, the first driving member is used to drive the first clamp 112 and the second clamp 113 to move toward each other, and the first clamp 112 and the second clamp 113 are used to clamp the heat sink 21 located on the heat sink 111; when the performance test of the laser chip 22 is completed, the first driving member is used to drive the first clamp 112 and the second clamp 113 to move away from each other, and at this time, the first clamp 112 and the second clamp 113 release the heat sink 21.

[0074] In this embodiment, the first driving member may be a cylinder, and the first clamping jaw 112 and the second clamping jaw 113 are both connected to a cylinder, and the cylinder is used to push the first clamping jaw 112 and the second clamping jaw 113 to move. Specifically, the surfaces of the first clamping jaw 112 and the second clamping jaw 113 facing inward are a planar structure, the heat dissipation block 111 is a rectangular block, the heat sink 21 is also a rectangular block structure, and the width of the heat sink 21 is the same as the width of the heat dissipation block 111, the upper edges of the first clamping jaw 112 and the second clamping jaw 113 relative to each other are higher than the upper surface of the heat dissipation block 111, and the lower edges of the first clamping jaw 112 and the second clamping jaw 113 relative to each other are lower than the upper surface of the heat dissipation block 111. When fixing COS2, a portion of the inner surface of the first clamp 112 is attached to the side wall of one side of the heat sink 21, and the other portion is attached to the side wall of the same side of the heat sink 111. A portion of the inner surface of the second clamp 113 is attached to the other side wall opposite to the heat sink 21, and the other portion of the second clamp 113 is attached to the other side wall opposite to the heat sink 111. The first clamp 112 and the second clamp 113 fix the heat sink 21 to the heat sink 111.

[0075] According to an embodiment of the present invention, the COS testing device further comprises a workbench 1 and a water outlet mechanism disposed on the workbench 1, the water outlet mechanism comprising a water storage container and a second driving member, the water storage container having a water outlet, the water outlet being in communication with the water through hole 1111, the second driving member being used to drive the liquid in the water storage container to pass through the water outlet into the water through hole 1111. In this embodiment, the water outlet mechanism comprises a water storage container, a receiving cavity is formed in the water storage container, a coolant is stored in the receiving cavity, and the coolant is usually water; the water storage container has a water outlet, the water outlet is in communication with the water through hole 1111, the second driving member drives the coolant in the receiving cavity to pass through the water outlet into the water through hole 1111, and then passes through the water through hole 1111 into the space between the heat sink 21 and the heat dissipation block 111 to form a water film.

[0076] In this embodiment, the water storage container can be a structure similar to a needle tube, and the second driving member is a compression cylinder, through which compressed air is introduced into the water storage container, thereby pressing the liquid in the water storage container through the water outlet into the water hole 1111. Preferably, in this embodiment, the cylinder is connected to a solenoid valve, and the stroke of the cylinder is controlled by the solenoid valve, thereby achieving quantitative water flow.

[0077] According to one embodiment of the present invention, Figure 4As shown, the test bench 11 is provided with an upwardly protruding mounting platform 116, and the heat sink 111 and the fixing assembly are both provided on the mounting platform 116. The mounting platform 116 is in a rectangular block shape, and a downwardly recessed water collecting trough is provided on the upper surface of the mounting platform 116 near the heat sink 111, and a water collecting hole with an upper end opening is provided on the mounting platform 116, and one end of the water collecting trough extends to the upper end of the water collecting hole.

[0078] In this embodiment, a water collecting trough is provided on the mounting platform 116, wherein the water collecting trough can be provided with one or more, and the edge of one end of the water collecting trough can be close to the edge of the heat sink 111. If the amount of water between the heat sink 111 and COS2 exceeds, when COS2 is pressed onto the heat sink 111, the excess water will flow down from the edge between the two to the upper surface of the mounting platform 116. Since the water collecting trough is provided, the water flowing down falls into the water collecting trough, and then flows into the water collecting hole through the water collecting trough. The upper end of the water collecting hole is open, and the lower end can be connected to a water pipe. The other end of the water pipe can be connected to a water storage container to return the overflow water to the water storage container. In this embodiment, the upper surface of the mounting platform 116 around the water collecting trough can be tilted downward from the periphery to the direction of the water collecting trough opening area, so that it is more convenient for the overflow water to flow into the water collecting trough.

[0079] According to one embodiment of the present invention, the COS test equipment further includes a temperature sensing line and a temperature sensing chip, wherein the temperature sensing chip is arranged at one end of the elastic telescopic member 114 extending out of the mounting hole 1112, and the temperature sensing chip is electrically connected to one end of the temperature sensing line through the elastic telescopic member 114. In the prior art, a temperature sensing line is used to detect the temperature of the heat sink 111. However, in the prior art, the temperature of the heat sink 21 is indirectly measured through the heat sink 111, and there is a measurement error, resulting in inaccurate measurement results. In the COS test equipment provided in this embodiment, the elastic telescopic member 114 is a metal column, and the temperature sensing chip is arranged at one end of the elastic telescopic member 114 extending out of the mounting hole 1112, and one end of the temperature sensing line is electrically connected to the elastic telescopic member 114, thereby energizing the temperature sensing chip in the elastic telescopic member 114. Since the end of the elastic telescopic member 114 extending out is directly in contact with the heat sink, the temperature of the heat sink 21 can be directly measured through the temperature sensing chip, thereby improving the temperature sensing accuracy.

[0080] According to another embodiment of the present invention, the COS test device further includes a cooling plate and a refrigerator electrically connected to the cooling plate; the cooling plate is arranged at the bottom of the heat sink 111, and the end of the temperature sensing line away from the elastic expansion member 114 is electrically connected to the refrigerator, and the refrigerator is used to control the cooling plate to cool or heat the heat sink 111. In this embodiment, the cooling plate is electrically connected to the refrigerator, and the temperature sensing chip is also electrically connected to the refrigerator through the temperature sensing line. The refrigerator receives the temperature signal of the heat sink 21 detected by the temperature sensing chip, and controls the refrigerator to cool or heat according to the detected temperature signal to adjust the temperature of the heat sink 111.

[0081] In this embodiment, a metal layer is provided at the end of the elastic telescopic part 114 extending out of the mounting hole 1112. The metal layer is a gold-plated layer. The gold-plated layer can prevent the end of the elastic telescopic part 114 extending out of the mounting hole 1112 from coming into contact with water and being corroded. At the same time, the gold-plated layer has a better heat dissipation effect and can better dissipate the heat of the temperature sensing chip located in the elastic telescopic part 114.

[0082] Preferably, in this embodiment, the diameter of the end of the elastic telescopic member 114 with the gold-plated layer is 1-5mm; preferably, the diameter of the end of the elastic telescopic member 114 with the gold-plated layer is 3mm; the length of the end of the elastic telescopic member 114 extending out of the mounting hole 1112 is 1-4mm, and preferably, the length of the end of the elastic telescopic member 114 extending out of the mounting hole 1112 is 2mm, wherein the length of the elastic telescopic member 114 extending out of the mounting hole 1112 can be determined according to the required restoring force of the elastic telescopic member 114. Optionally, in this embodiment, the elastic telescopic member 114 can be an elastic probe.

[0083] According to an embodiment of the present invention, the lower surface of the heat sink 111 is provided with a long strip-shaped groove, and the mounting hole 1112 is correspondingly located on the upper side of the groove, the lower end of the elastic telescopic member 114 passes through the mounting hole 1112 and abuts against the upper surface of the mounting platform 116, and the temperature sensing line is located in the groove. In this embodiment, a groove is provided on the upper surface of the heat sink hole, and the temperature sensing line can be embedded in the groove to prevent the heat sink 111 from failing to fit the upper surface of the mounting platform 116; of course, in this embodiment, a groove can also be provided on the upper surface of the mounting platform 116, in which case the lower end of the elastic telescopic member 114 passes through the mounting hole 1112 and abuts against the bottom surface of the groove, and the temperature sensing line can also be placed in the groove, so that the heat sink 111 can fit the upper surface of the mounting platform 116.

[0084] According to one embodiment of the present invention, Figures 1 to 3As shown, the COS test equipment further includes a workbench 1 and a third driving member disposed on the workbench 1 and driving the testbench 11 to rotate. The testbench 11 is provided with a plurality of the fixing mechanisms which are arranged at equal intervals along the rotational circumference of the testbench 11, and the workbench 1 is provided with at least a loading station, a reading station, a detection station and a unloading station in sequence; wherein the third driving member drives the testbench 11 to rotate, so as to drive each of the fixing mechanisms to cyclically rotate in the order of the loading station, the reading station, the detection station and the unloading station. In this embodiment, the third driving member can drive the test bench 11 to rotate, and then each fixed mechanism will cyclically rotate in the order of the loading station, the reading station, the detection station and the unloading station, so that each fixed mechanism will pass through the loading station, the reading station, the detection station and the unloading station in turn, so that multiple fixed mechanisms can synchronously perform loading, reading, detection and unloading operations. For example, four fixed mechanisms are provided on the test bench 11, the first mechanism is located at the loading station for loading operations, and the second fixed mechanism is located at the reading station, and the COS2 information is read by the reading mechanism 19, the third fixed mechanism is at the detection station, and the performance of COS2 is detected by the detection mechanism, and the fourth fixed mechanism is located at the unloading station, and the COS2 that has been tested is removed from the fixed mechanism by the unloading mechanism 15; the four fixed mechanisms are in different stations at the same time, and each operates independently. At the same time, each station will perform corresponding operations at the loading station, the reading station, the detection station and the unloading station in turn as the test bench 11 rotates, thereby greatly shortening the test time and improving the test efficiency.

[0085] According to one embodiment of the present invention, Figure 2 and Figure 4 As shown, the test bench 11 is provided with four fixing mechanisms, which are arranged opposite to each other in pairs, and the COS2 device also includes a loading mechanism 14 arranged at the loading station, a reading mechanism 19 arranged at the reading station, a testing mechanism arranged at the detection station, a power-on mechanism arranged at the detection station and a unloading mechanism 15 arranged at the unloading station; the loading mechanism 14 is used to place the COS2 to be tested on the upper surface of the heat dissipation block 111 of the fixing mechanism located at the loading mechanism 14; the reading mechanism 19 is used to read the information of the COS2 rotated to the detection station; the power-on mechanism is used to power on the COS2 rotated to the testing station, and the testing mechanism is used to detect the performance of the COS2 after power-on; the unloading mechanism 15 is arranged at the unloading station, and is used to remove the COS2 rotated to the unloading station.

[0086] According to one embodiment of the present invention, Figure 1 and Figure 3As shown, a loading area 12 is provided on the workbench 1 , and a loading tray 121 is provided in the loading area 12 . The loading tray 121 is used for placing the COS2 to be tested.

[0087] like Fig. 9 and Fig.10 As shown, the loading mechanism 14 is arranged in the loading area 12, and includes a first X-direction moving component, a first Y-direction moving component, a first Z-direction moving component and a first suction nozzle 144; the loading tray 121 is arranged on the first X-direction moving component, and the first X-direction moving component is used to drive the loading tray 121 to move along the X direction; the first Y-direction moving component can drive the first suction nozzle 144 to move along the Y direction to the loading station, and is located on the upper side of the heat dissipation block 111 of the fixing mechanism rotated to the loading station; the first Z-direction moving component can drive the first suction nozzle 144 to move along the Z direction.

[0088] In this embodiment, the COS2 to be tested is placed in the loading area 12 on the workbench 1. When the COS testing equipment is working, the initial position of the first suction nozzle 144 is away from the position of the loading tray 121. At this time, the first Y-direction moving component is driven to move along the Y direction to the position of the loading tray 121, and then the loading tray 121 is driven to move along the X direction to the lower side of the first suction nozzle 144 through the first X-direction moving component. At this time, the first Z-direction moving component drives the first suction nozzle 144 to move downward along the Z direction, and the first suction nozzle 144 contacts the COS2 on the loading tray 121. The first suction nozzle 144 forms a negative pressure through the negative pressure device to absorb a COS2; then the first Z-direction moving component drives the first suction nozzle 144 to move upward along the Z direction to the initial height, and the first Y-direction moving component continues to move along the Y direction to the loading station, and is located on the upper side of the heat dissipation block 111 of the fixing mechanism that is rotated to the loading station, and then the first Z The first suction nozzle 144 is driven by the first Z-direction moving component to move downward along the Z direction until COS2 contacts the heat sink 21 on the fixing mechanism. At this time, the first suction nozzle 144 releases the COS2, and COS2 falls on the heat sink 111. The first Z-direction moving component drives the first suction nozzle 144 to move upward along the Z direction, and then the first Y-direction moving component drives the first suction nozzle 144 to move to the initial position; at the same time, the fixing mechanism at the loading station fixes the COS2 placed on the heat sink 111; specifically, the first driving member drives the first clamp 112 and the second clamp 113 to clamp the COS2, so as to load and fix COS2, and then repeat the above steps to load each heat sink 111 moved to the loading station.

[0089] According to one embodiment of the present invention, Fig. 9 and Fig.10As shown, the first X-direction moving component includes a first X-direction fixed seat 141, a first X-direction guide rail 1411, a first X-direction slider 1412 and a first X-direction driving member 1413. The first X-direction fixed seat 141 is provided with the first X-direction guide rail 1411, the first X-direction slider 1412 is slidably matched with the first X-direction guide rail 1411, the loading tray 121 is fixed on the first X-direction slider 1412, and the first X-direction driving member 1413 is used to drive the first X-direction slider 1412 to slide along the first X-direction guide rail 1411. The first Y-direction moving assembly includes a first support column 142, a first Y-direction guide rail 1421, a first Y-direction slider 1433 and a first Y-direction driving member 1422. The first Y-direction guide rail 1421 is fixed to the first support column 142, the first Y-direction slider 1433 is slidably matched with the first Y-direction guide rail 1421, and the first Y-direction driving member 1422 drives the first Y-direction slider 1433 to slide along the first Y-direction guide rail 1421; the first Z-direction moving assembly includes a first Z-direction fixed seat 143, a first Z-direction guide Rail 1431, a first Z-direction slider 1432 and a first Z-direction driving member 1434. The first Z-direction fixed seat 143 is provided with the first Z-direction guide rail 1431. The first Y-direction slider 1433 is connected to the first Z-direction fixed seat 143. The first Z-direction slider 1432 is slidably matched with the first Z-direction guide rail 1431. The first Z-direction driving member 1434 is used to drive the first Z-direction slider 1432 to slide along the first Z-direction guide rail 1431. The first suction nozzle 144 is fixed on the first Z-direction slider 1432.

[0090] The specific process of placing the COS2 to be tested on the fixing mechanism at the loading station using the loading mechanism 14 provided in this embodiment is as follows.

[0091] When the COS testing equipment is working, the initial position of the first suction nozzle 144 is away from the position of the loading tray 121, and the first Y-direction driving member 1422 drives the first Y-direction slider 1433 to move along the first Y-direction guide rail 1421 to the position of the loading tray 121. The first X-direction driving member 1413 drives the first X-direction slider 1412 to move along the first X-direction guide rail 1411, driving the loading tray 121 located on the first X-direction slider 1412 to move synchronously until the loading tray 121 is located under the first suction nozzle 144; at this time, the first Z-direction driving member drives the first Z-direction slider 1432 to move downward along the first Z-direction guide rail 1431 until the first suction nozzle 144 contacts the upper surface of COS2 on the loading tray 121, and the first suction nozzle 144 absorbs a COS2.

[0092] Then, the first Z-direction driving member 1434 drives the first Z-direction slider 1432 to move upward along the first Z-direction guide rail 1431, thereby driving the first suction nozzle 144 to move to an initial height along the Z direction. The first Y-direction driving member 1422 drives the first Y-direction slider 1433 to continue to move along the first Y-direction guide rail 1421 until the first suction nozzle 144 moves to the loading station and is located on the upper side of the heat dissipation block 111 of the fixing mechanism that rotates to the loading station.

[0093] The first Z-axis driving member 1434 drives the first Z-axis slider 1432 to move downward along the first Z-axis guide rail 1431, driving the first suction nozzle 144 to move downward synchronously until the COS2 on the first suction nozzle 144 contacts the heat sink 111 on the fixing mechanism. At this time, the first suction nozzle 144 releases the COS2, and COS2 falls on the heat sink 111. The first Z-axis driving member drives the first Z-axis slider 1432 to move upward along the first Z-axis guide rail 1431 to an initial height. The first Y-axis driving member 1422 drives the first Y-axis slider 1433 to move along the first Y-axis guide rail 1421 until the first suction nozzle 144 moves to the initial position, completing a COS2 loading operation.

[0094] In this embodiment, the first X-axis driving member 1413, the first Y-axis driving member 1422, and the first Z-axis driving member 1434 can be cylinders or stepper motors, and the first suction nozzle 144 is connected to a vacuum generating device, and a negative pressure is formed at the first suction nozzle 144 through the vacuum generating device, and COS2 is adsorbed through the first suction nozzle 144.

[0095] According to one embodiment of the present invention, Figure 7 and Figure 8 As shown, the workbench 1 is provided with a material unloading area 13, and the material unloading area 13 is provided with a material unloading tray 131, and the material unloading tray 131 is used to place the tested COS2; the material unloading mechanism 15 includes a second X-direction moving component, a second Y-direction moving component, a second Z-direction moving component and a second suction nozzle 154. The second X-direction moving component is arranged on the material unloading area 13, and the material unloading tray 131 is arranged on the second X-direction moving component, and the second X-direction moving component is used to drive the material unloading tray 131 to move along the X direction; the second Y-direction moving component is arranged on the material unloading area 13, and the second Y-direction moving component can drive the second suction nozzle 154 to move along the Y direction to the material unloading station, and is located on the upper side of the heat dissipation block 111 rotated to the material unloading station; the second Z-direction moving component is arranged on the material loading area 12, and the second Y-direction moving component can drive the second suction nozzle 154 to move along the Z direction.

[0096] The working process of removing the tested COS2 by the unloading mechanism 15 in this embodiment is as follows. First, the second driving member of the fixing mechanism located at the unloading station is controlled to drive the first clamp 112 and the second clamp 113 to move away from each other, and loosen the COS2 fixed on the heat sink 111; then the second Y-axis moving component moves along the Y-axis to the unloading station, and the second suction nozzle 154 is located on the upper side of the heat sink 111 rotated to the unloading station; the second Z-axis moving component drives the second suction nozzle 154 to move downward along the Z-direction until the second suction nozzle 154 contacts the upper surface of the tested COS2 on the heat sink 111; at this time, the second suction nozzle 154 is started, and the second suction nozzle 154 absorbs the COS2 on the heat sink 111, and then the second Z-axis moving component drives the second suction nozzle 154 to move upward along the Z-direction to the initial The second Y-axis driving component drives the second suction nozzle 154 to move in the reverse direction along the Y-axis until the second suction nozzle 154 moves to the position of the unloading tray 131, and then the second X-axis driving component drives the unloading tray 131 to move to the lower side of the second suction nozzle 154, and the second Z-axis moving component drives the second suction nozzle 154 to move downward until the COS2 adsorbed on the second suction nozzle 154 contacts the unloading tray 131, and the second suction nozzle 154 disconnects the negative pressure adsorption state, and the COS2 on the second suction nozzle 154 falls on the unloading tray 131, and then the second Z-axis moving component drives the second suction nozzle 154 to move upward to the initial height, and the second Y-axis moving component drives the second suction nozzle 154 to continue to move in the reverse direction to the initial position, completing a COS2 unloading operation.

[0097] According to one embodiment of the present invention, Figure 7 and Figure 8As shown, the second X-direction moving assembly includes a second X-direction fixed seat 151, a second X-direction guide rail 1511, a second X-direction slider 1512 and a second X-direction driving member 1513. The second X-direction fixed seat 151 is provided with the second X-direction guide rail 1511. The second X-direction slider 1512 is slidably matched with the second X-direction guide rail 1511. The unloading tray 131 is fixed on the second X-direction slider 1512. The second X-direction driving member 1513 is used to drive the second X-direction slider 1512 to move along the second X-direction guide rail 1511 slides; the second Y-direction moving assembly includes a second support column 152, a second Y-direction guide rail 1521, a second Y-direction slider 1533 and a second Y-direction driving member 1522, the second Y-direction guide rail 1521 is fixed on the second support column 152, the second support column 152 can support the second Y-direction guide rail 1521, and at the same time, because the second Y-direction slider 1533 is connected to the second Z-direction fixed seat 153, the second support column 152 can also serve as a supporting structure of the second Z-direction fixed seat 153. The second Y-direction slider 1533 is slidably matched with the second Y-direction guide rail 1521, and the second Y-direction driving member 1522 is used to drive the second Y-direction slider 1533 to slide along the second Y-direction guide rail 1521; the second Z-direction moving assembly includes a second Z-direction fixed seat 153, a second Z-direction guide rail 1531, a second Z-direction slider 1532 and a second Z-direction driving member 1534, the second Z-direction fixed seat 153 is provided with the second Z-direction guide rail 1531, and the second Y-direction slider 1533 is connected to the second Z-direction fixed seat 153; the second Z-direction slider 1532 is slidably matched with the second Z-direction guide rail 1531, and the second Z-direction driving member 1534 is used to drive the second Z-direction slider 1532 to slide along the second Z-direction guide rail 1531, and the second suction nozzle 154 is fixed on the second Z-direction slider 1532.

[0098] The specific process of using the unloading mechanism provided in this embodiment to remove the tested COS2 and place it on the unloading tray 131 is as follows.

[0099] First, the second driving member of the fixing mechanism located at the unloading station is controlled to drive the first clamping jaw 112 and the second clamping jaw 113 to move away from each other, thereby releasing the COS2 fixed on the heat sink 111 .

[0100] The second Y-axis driving member 1522 drives the second Y-axis slider 1533 to move along the second Y-axis guide rail 1521 to the unloading station, and the second suction nozzle 154 is located on the upper side of the heat sink 111 rotated to the unloading station; then the second Z-axis driving member 1534 drives the second Z-axis slider 1532 to move downward along the second Z-axis guide rail 1531 until the second suction nozzle 154 contacts the upper surface of the tested COS2 on the heat sink 111; at this time, the second suction nozzle 154 is started, and the second suction nozzle 154 absorbs the COS2 on the heat sink 111, and then the second Z-axis driving member 1534 drives the second Z-axis slider 1532 to move upward along the second Z-axis guide rail 1531 until the second suction nozzle 154 moves upward along the Z direction to the initial height.

[0101] Then, the second Y-axis driving member 1522 drives the second Y-axis slider 1533 to move in the opposite direction along the second Y-axis guide rail 1521 until the second suction nozzle 154 moves to the position of the unloading tray 131, and the second X-axis driving member 1513 drives the second X-axis slider 1512 to move along the second X-axis guide rail 1511, driving the unloading tray 131 located on the second X-axis slider 1512 to move synchronously until the unloading tray 131 is located at the lower side of the second suction nozzle 154; at this time, the second Z-axis driving member 1534 drives the second Z-axis slider 1532 to move downward along the second Z-axis guide rail 1531 until the second suction nozzle 154 contacts with the unloading tray 131, the second suction nozzle 154 disconnects the negative pressure adsorption state, and the COS2 on the second suction nozzle 154 falls on the unloading tray 131. The second Z-axis driving member 1534 drives the second Z-axis slider 1532 to move upward along the second Z-guide rail 1531 until the second suction nozzle 154 moves to an initial height, and then the second Y-axis driving member 1522 drives the second Y-axis slider 1533 to move in the opposite direction along the second Y-guide rail 1521 until the second suction nozzle 154 moves to an initial position, thereby completing a COS2 unloading operation.

[0102] Another aspect of the present invention is to provide a COS testing method using the COS testing device described in any of the above embodiments. The COS testing method includes a loading process and a unloading process. The loading process includes supplying water to the upper surface of the heat sink 111 through the water hole 1111; placing the COS2 to be tested on the upper surface of the heat sink 111, and pressing the end of the elastic telescopic member 114 extending out of the upper surface of the heat sink 111 into the mounting hole 1112, and fixing the COS2 on the heat sink 111 through the fixing assembly; the unloading process includes, after the COS2 test is completed, the fixing assembly releases the COS2, removes the tested COS2 from the heat sink 111, and resets the elastic telescopic member 114, and extends from the mounting hole 1112 to the upper side of the upper surface of the heat sink 111.

[0103] The COS testing method provided by the present invention is that in the loading process, the COS2 to be tested is placed on the upper surface of the heat sink 111, and COS2 presses one end of the elastic telescopic member 114 extending out of the upper surface of the heat sink 111 into the mounting hole 1112. In the unloading process, when COS2 is removed by adsorption through the second suction nozzle 154, since the elastic telescopic member 114 is in a compressed state, an upward elastic restoring force is applied to COS2. The elastic restoring force of the elastic telescopic member 114 cooperates with the suction force of the second suction nozzle 154 to overcome the tension of the water film between COS2 and the surface of the heat sink 111, and COS2 can be removed smoothly. Due to the elastic restoring force of the elastic telescopic member 114, there is no need to set up an additional blowing hole, and there is no need to add a blowing operation process, so COS2 can be removed, which is more efficient for COS2 testing, and also solves the problem of uneven liquid flow rate of liquid cooling caused by setting the blowing hole, which affects the heat dissipation of the chip.

[0104] According to another embodiment of the present invention, the fixing assembly includes a first clamp 112, a second clamp 113 and a first driving member; fixing the COS2 on the heat sink 111 by the fixing assembly in the loading process includes: a first driving mechanism drives the first clamp 112 and the second clamp 113 to move toward each other, and the COS2 and the heat sink 111 are clamped between the first clamp 112 and the second clamp 113 to fix the COS2 on the heat sink 111; releasing the COS2 by the fixing assembly in the unloading process includes: the first driving mechanism drives the first clamp 112 and the second clamp 113 to move away from each other to release the COS2 after detection. In this embodiment, fixing the COS2 by the first clamp 112 and the second clamp 113 is more secure for fixing the COS2.

[0105] According to one embodiment of the present invention, the COS testing method further includes a reading process and a detection process, that is, the COS testing method includes a loading process, a reading process, a detection process and a unloading process performed in sequence.

[0106] The loading process includes: supplying water to the upper surface of the heat sink 111 through the water hole 1111; placing the COS2 to be tested on the upper surface of the heat sink 111, and pressing the end of the elastic telescopic member 114 extending out of the upper surface of the heat sink 111 into the mounting hole 1112 of the COS2, and fixing the COS2 on the heat sink 111 through the fixing assembly. The fixing assembly includes a first clamping jaw 112, a second clamping jaw 113 and a first driving member, and fixing the COS2 on the heat sink 111 through the fixing assembly includes: a first driving mechanism drives the first clamping jaw 112 and the second clamping jaw 113 to move toward each other, and the COS2 and the heat sink 111 are clamped between the first clamping jaw 112 and the second clamping jaw 113 to fix the COS2 on the heat sink 111. In the blanking process, the fixing assembly releases the COS2, which includes: the first driving mechanism drives the first clamping jaw 112 and the second clamping jaw 113 to move away from each other to release the COS2 after detection.

[0107] In the loading process, the loading mechanism 14 is used to place the COS2 to be tested on the upper surface of the heat sink 111. The specific steps of using the loading mechanism 14 to place the COS2 on the upper surface of the heat sink 111 refer to the above-mentioned COS testing equipment. The specific working process of the loading mechanism 14 will not be repeated here.

[0108] After the COS2 to be tested is fixed on the heat sink 111 at the loading station by the loading mechanism 14, the test bench 11 is driven to rotate 90° by the third driving member, and the fixing mechanism with the COS2 to be tested is rotated to the reading station to perform the reading process. The reading process includes reading the information on the COS2 by the reading mechanism 19. In this embodiment, the reading mechanism 19 includes a camera, which reads the barcode on the COS2 and obtains the laser chip 22 information of the COS2.

[0109] After the COS2 information to be tested is read by the reading mechanism 19, the test table 11 is driven to rotate 90° by the third driving member, and the fixing mechanism after reading the information is rotated to the test station to perform the test process. The test process includes driving the lifting device to drive the probe 115 to move downward to contact the laser chip 22, and then energizing the probe 115, the probe 115 powers on the laser chip 22, and then testing the power, divergence angle and polarization angle of the laser chip 22 through the integrating sphere 16, the divergence angle tester 17 and the polarization tester 18.

[0110] After the COS2 performance test is completed, the third driving member drives the test bench 11 to rotate 90°, and the fixing mechanism rotates to the unloading station to carry out the unloading process. After the performance test, COS2 moves to the unloading station, and the first driving mechanism drives the first clamp 112 and the second clamp 113 to move away from each other to loosen the COS2 after the test; then the unloading mechanism 15 removes the COS2 after the test from the heat sink 111 at the unloading station and puts it into the unloading tray 131. In this embodiment, the specific steps of using the unloading mechanism 15 to remove the COS2 located at the unloading station refer to the specific working process of the unloading mechanism 15 in the above-mentioned COS testing equipment, which will not be repeated here.

[0111] In the description of the present invention, it should be noted that the terms "upper" and "lower" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0112] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the inside of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0113] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A COS testing device, characterized in that: It includes a test bench (11) and a fixing mechanism; The fixing mechanism comprises a fixing component, a heat sink (111) and an elastic telescopic member (114); the heat sink (111) is arranged on the test bench (11); and the fixing component is used to fix the COS (2) to be tested on the heat sink (111); The heat dissipation block (111) comprises an upper surface and a lower surface which are arranged opposite to each other, the lower surface of the heat dissipation block (111) is arranged on the upper surface of the test bench (11), and water holes (1111) and mounting holes (1112) are arranged on the heat dissipation block (111) at intervals, and the water holes (1111) are used to transport water to the upper surface of the heat dissipation block (111); One end of the elastic telescopic member (114) passes through the mounting hole (1112) to abut against the test bench (11), and the other end extends out of the upper surface of the heat dissipation block (111), and the elastic telescopic member (114) can be telescoped up and down.

2. The COS test device according to claim 1, characterized in that: The fixing assembly comprises a first clamping jaw (112), a second clamping jaw (113) and a first driving member; The first clamping jaw (112) and the second clamping jaw (113) are arranged opposite to each other to form a clamping area; the heat dissipation block (111) is located in the clamping area formed by the first clamping jaw (112) and the second clamping jaw (113); the first driving member is used to drive the first clamping jaw (112) and the second clamping jaw (113) to move towards or away from each other; The upper edges of the first clamping jaw (112) and the second clamping jaw (113) that are opposite to each other are higher than the upper surface of the heat dissipation block (111).

3. The COS test device according to claim 1, characterized in that: The COS testing device further comprises a workbench (1), and a water outlet mechanism arranged on the workbench (1), the water outlet mechanism comprising a water storage container and a second driving member, the water storage container having a water outlet, the water outlet being in communication with the water through hole (1111), and the second driving member being used for driving liquid in the water storage container to flow into the water through hole (1111) through the water outlet.

4. The COS test device according to claim 1, characterized in that: The test bench (11) is provided with a mounting platform (116) protruding upward, and the heat sink block (111) and the fixing assembly are both arranged on the mounting platform.

5. The COS test device according to claim 4, characterized in that: A downwardly recessed water collecting groove is provided on the upper surface of the mounting platform (116) near the heat dissipation block (111), and a water collecting hole with an upper opening is provided on the mounting platform (116), and one end of the water collecting groove extends to the upper end of the water collecting hole.

6. The COS test device according to claim 5, characterized in that: The COS testing device further comprises a temperature sensing line and a temperature sensing chip, wherein the temperature sensing chip is arranged at one end of the elastic telescopic component (114) extending out of the mounting hole (1112), and the temperature sensing chip is electrically connected to one end of the temperature sensing line via the elastic telescopic component (114).

7. The COS testing device according to claim 6, characterized in that: The COS test device further comprises a cooling plate and a refrigerator electrically connected to the cooling plate; the cooling plate is arranged at the bottom of the heat sink (111), one end of the temperature sensing line away from the elastic expansion member (114) is electrically connected to the refrigerator, and the refrigerator is used to control the cooling plate to cool or heat the heat sink (111).

8. The COS testing device according to claim 7, characterized in that: The lower surface of the heat dissipation block (111) is provided with a long strip-shaped groove, and the mounting hole (1112) is correspondingly located on the upper side of the groove; the lower end of the elastic telescopic member (114) passes through the mounting hole (1112) and abuts against the upper surface of the mounting platform (116); and the temperature sensing line is located in the groove.

9. The COS testing device according to claim 1, characterized in that: It also comprises a workbench (1) and a third driving member arranged on the workbench (1) and driving the test bench (11) to rotate, wherein the test bench (11) is provided with a plurality of the fixing mechanisms arranged at equal intervals along the rotational circumference of the test bench (11); The workbench (1) is at least provided with a loading station, a reading station, a detection station and an unloading station in sequence; The third driving member drives the test bench (11) to rotate, so as to drive each of the fixing mechanisms to rotate cyclically in the order of the loading station, the reading station, the detection station and the unloading station.

10. The COS testing device according to claim 9, characterized in that: The COS (2) device further comprises a loading mechanism (14) arranged at the loading station, a reading mechanism (19) arranged at the reading station, a testing mechanism arranged at the detection station, a power-on mechanism arranged at the detection station, and a unloading mechanism (15) arranged at the unloading station; The loading mechanism (14) is used to place the COS (2) to be detected onto the upper surface of the heat dissipation block (111) of the fixing mechanism located at the loading mechanism; The reading mechanism (19) is used to read the information of the COS (2) rotated to the detection station; The power-on mechanism is used to power on the COS (2) that is rotated to the testing station, and the testing mechanism is used to detect the performance of the COS (2) after power-on; The unloading mechanism (15) is arranged at the unloading station and is used to remove the COS (2) rotated to the unloading station.

11. The COS testing device according to claim 10, characterized in that: The workbench (1) is provided with a loading area (12), the loading area (12) is provided with a loading tray (121), and the loading tray (121) is used to place the COS (2) to be tested; The loading mechanism (14) is arranged in the loading area (12), and comprises a first X-direction moving component, a first Y-direction moving component, a first Z-direction moving component and a first suction nozzle (144); The loading tray (121) is arranged on the first X-direction moving component, and the first X-direction moving component is used to drive the loading tray (121) to move along the X direction; The first Y-direction moving component can drive the first suction nozzle (144) to move along the Y direction to the loading station, and is located on the upper side of the heat dissipation block (111) of the fixing mechanism that rotates to the loading station; The first Z-direction moving component can drive the first suction nozzle (144) to move along the Z direction.

12. The COS testing device according to claim 10, characterized in that: The workbench (1) is provided with a material unloading area (13), the material unloading area (13) is provided with a material unloading tray (131), and the material unloading tray (131) is used to place the tested COS (2); The unloading mechanism (15) is arranged in the unloading area (13), and comprises a second X-direction moving component, a second Y-direction moving component, a second Z-direction moving component and a second suction nozzle (154); The unloading tray (131) is arranged on the second X-direction moving component, and the second X-direction moving component is used to drive the unloading tray (131) to move along the X direction; The second Y-direction moving component can drive the second suction nozzle (154) to move along the Y direction to the unloading station, and is located on the upper side of the heat dissipation block (111) of the fixing mechanism that rotates to the unloading station; The second Z-direction moving component is arranged in the unloading area (13), and the second Z-direction moving component can drive the second suction nozzle (154) to move along the Z direction.

13. The COS testing device according to any one of claims 10 to 12, characterized in that: It also comprises an integrating sphere (16), a divergence angle tester (17) and a polarization tester (18); a moving part capable of moving along the X direction is provided on the workbench (1); and the integrating sphere (16) is placed on the moving part.

14. The COS testing device according to any one of claims 10 to 12, characterized in that: The power-on mechanism comprises a probe (115), a power source and a lifting mechanism, the probe (115) is connected to the power source, the probe (115) is mounted on the lifting mechanism, and the lifting mechanism is used to drive the probe (115) to rise or fall.

15. A COS testing method, using the COS testing device as claimed in claim 1, characterized in that: include, A loading step, supplying water to the upper surface of the heat sink (111) through the water hole (1111); placing the COS (2) to be tested on the upper surface of the heat sink (111), pressing one end of the COS (2) extending the elastic telescopic member (114) out of the upper surface of the heat sink (111) into the mounting hole (1112), and fixing the COS (2) on the heat sink (111) through the fixing assembly; In the material removal process, after the COS (2) test is completed, the fixing assembly releases the COS (2), the COS (2) after the test is removed from the heat sink (111), the elastic telescopic member (114) is reset, and extends from the mounting hole (1112) to the upper side of the upper surface of the heat sink (111).

16. The COS testing method according to claim 15, characterized in that: The fixing assembly comprises a first clamping jaw (112), a second clamping jaw (113) and a first driving member; In the loading process, fixing the COS (2) on the heat dissipation block (111) by means of the fixing assembly comprises: The first driving mechanism drives the first clamping jaw (112) and the second clamping jaw (113) to move toward each other, and the COS (2) and the heat sink (111) are clamped between the first clamping jaw (112) and the second clamping jaw (113) to fix the COS (2) on the heat sink (111); The fixing assembly in the blanking process releases the COS (2) including: The first driving mechanism drives the first clamping jaw (112) and the second clamping jaw (113) to move away from each other to release the COS (2) after detection.

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