Positioning mechanism, grabbing system, wafer transfer box and grabbing method thereof

Abstract

The embodiment of the present invention relates to a logistics conveying equipment in the field of semiconductor manufacturing, and in particular to a positioning mechanism, a gripping system, a wafer transfer box and a gripping method thereof. The positioning mechanism is arranged on a gripping platform for gripping a wafer transfer box FOUP, and the positioning mechanism is used to position the FOUP at the target position when the gripping platform is descending; the positioning mechanism is also used to output an electrical signal to the main control module of the gripping system in real time when positioning the FOUP, so that the main control module can judge whether the positioning mechanism has completed the positioning of the FOUP according to the received electrical signal, and the main control module can control whether the gripping platform grips the FOUP according to the judgment result. Compared with the prior art, the clamping accuracy of the gripping platform when gripping the FOUP can be guaranteed, and the gripping failure of the gripping platform can be effectively avoided, and after the gripping of the FOUP is completed, the phenomenon of the FOUP falling out of the gripping platform can be prevented.

Description

Technical Field

[0001] The embodiments of the present invention relate to a logistics conveying device in the field of semiconductor manufacturing, and more particularly to a positioning mechanism, a gripping system, a wafer transfer box and a gripping method thereof. Background Art

[0002] In the semiconductor industry, the use of an automated material handling system AMHS to clamp wafer transfer boxes FOUP has a direct impact on the reliability, stability and efficiency of logistics transportation. In the prior art, in the FOUP transportation scheme, most of the methods used are to clamp and transport the FOUP. However, the invention found that in the process of clamping the FOUP, since the clamping of the FOUP only has positioning feedback in terms of the mechanical structure, it often causes the grasping platform to fail to clamp the FOUP, or in the process of clamping and transporting the FOUP, the FOUP will fall off the grasping platform. This phenomenon occurs because the grasping platform fails to accurately position the FOUP when clamping the FOUP, resulting in deviations in the grasping platform when clamping the FOUP. Summary of the invention

[0003] In order to solve the above problems or at least partially solve the above technical problems, some embodiments of the present invention design a positioning mechanism, a grasping system, a wafer transfer box and a grasping method thereof, which can enable the grasping platform to accurately position the FOUP when grasping the FOUP, thereby ensuring the clamping accuracy of the grasping platform when grasping the FOUP and effectively avoiding the phenomenon of clamping failure.

[0004] In order to achieve the above-mentioned object, some embodiments of the present invention provide a positioning mechanism, which is arranged on a grabbing platform for grabbing a wafer transport box FOUP, and the positioning mechanism is used to position the FOUP at a target position when the grabbing platform descends;

[0005] The positioning mechanism is also used to output an electrical signal to the main control module of the grabbing system in real time when positioning the FOUP, so that the main control module is used to determine whether the positioning mechanism has completed the positioning of the FOUP according to the received electrical signal, and the main control module is used to control whether the grabbing platform grabs the FOUP according to the determination result;

[0006] Wherein, the positioning mechanism comprises:

[0007] A positioning device, disposed on the grabbing platform, for positioning the FOUP at a target position when the grabbing platform is descending;

[0008] The detection module is arranged on the grabbing platform, and is used for detecting the state of the positioning device when the positioning device is positioning the FOUP, and outputting at least one electrical signal to the main control module according to the detected state.

[0009] In addition, some embodiments of the present invention further provide a grasping system, including:

[0010] The grabbing platform can rise or fall in the vertical direction and is used to grab or release the wafer transfer box FOUP at the target position when descending;

[0011] A driving mechanism, connected to the grabbing platform, and used to drive the grabbing platform to rise or fall;

[0012] A positioning mechanism as described above;

[0013] The main control module is communicatively connected with the positioning mechanism, the grabbing platform and the driving mechanism respectively;

[0014] When the driving mechanism drives the grabbing platform to descend and enables the positioning mechanism to position the FOUP at the target position, the main control module is used to obtain the electrical signal output by the positioning mechanism in real time, and judge whether the positioning mechanism has completed the positioning of the FOUP according to the obtained electrical signal;

[0015] The main control module is also used to control the driving mechanism to stop driving the grabbing platform to continue to descend after determining that the positioning mechanism has completed the positioning of the FOUP, and control the grabbing platform to grab the FOUP at the target position.

[0016] In addition, some embodiments of the present invention also design a wafer transfer box, which is provided with a positioning interface, and the positioning interface is used to cooperate with the positioning mechanism as described above, so that the positioning mechanism is used to position the wafer transfer box at the target position when the grabbing platform descends.

[0017] In addition, some embodiments of the present invention further provide a method for grabbing a wafer transfer box, the method comprising the following steps:

[0018] When the grabbing platform descends, the positioning mechanism disposed on the grabbing platform positions the wafer transfer box FOUP at the target position, and the electrical signal output by the positioning mechanism is obtained in real time;

[0019] determining, based on the obtained electrical signal, whether the positioning mechanism has completed positioning of the FOUP;

[0020] If it is determined that the positioning mechanism has completed positioning of the FOUP, the grabbing platform is stopped from being driven to continue to descend, and the grabbing platform is controlled to grab the FOUP at the target position;

[0021] Wherein, the positioning mechanism comprises: a positioning device and a detection module arranged on the grabbing platform;

[0022] The positioning device is used to position the FOUP at the target position when the grabbing platform descends;

[0023] The detection module is used to detect the state of the positioning device when the positioning device is positioning the FOUP, and output at least one electrical signal according to the detected state.

[0024] Compared with the prior art, the embodiments of the present invention have a positioning mechanism on the grasping platform, and the positioning mechanism can position the FOUP at the target position when the grasping platform descends, and when the positioning mechanism is positioning the FOUP, it can also output an electrical signal to the main control module of the grasping system in real time, so that the main control module can judge whether the positioning mechanism has completed the positioning of the FOUP according to the received electrical signal, and can control whether the grasping platform grasps the FOUP according to the judgment result, thereby ensuring the clamping accuracy of the grasping platform when grasping the FOUP, effectively avoiding the phenomenon of grasping failure of the grasping platform, and preventing the FOUP from escaping from the grasping platform after the grasping of the FOUP is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the implementation methods of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the prior art descriptions. Obviously, the drawings described below are only used to illustrate some implementation methods of the present application. For ordinary technicians in this field, without paying creative work, they can also obtain other technical features, connection relationships and even method steps not mentioned in the drawings based on these drawings.

[0026] Figure 1 This is an isometric schematic diagram of a positioning device and a friction assembly in some embodiments of the present invention;

[0027] Figure 2 An exploded schematic diagram of a positioning device in some embodiments of the present invention;

[0028] Figure 3 This is a schematic diagram of the assembly of the positioning device when the contact piece is pressed and moves to a preset position in some embodiments of the present invention;

[0029] Figure 4This is a schematic diagram of the assembly of the positioning device when the contact piece is rebounded to the initial position by the elastic component in some embodiments of the present invention;

[0030] Figure 5 This is an axonometric diagram of the assembly of the detection module and the support frame in some embodiments of the present invention;

[0031] Figure 6 This is an isometric diagram of the positioning device positioning a wafer transfer box FOUP when the grabbing platform grabs the FOUP in some embodiments of the present invention;

[0032] Figure 7 for Figure 6 A schematic diagram of the main view;

[0033] Figure 8 This is a schematic diagram of a state in which the device under test is not detected by the first detection element but is detected by the second detection element in some embodiments of the present invention;

[0034] Fig. 9 This is a schematic diagram of the state of the device under test when it is detected by the first detection element and the second detection element in some embodiments of the present invention;

[0035] Fig.10 This is a schematic diagram of a state in which the device under test is detected by the first detection element but not detected by the second detection element in some embodiments of the present invention;

[0036] Fig.11 This is an axonometric diagram of a gripping system in some embodiments of the present invention;

[0037] Fig.12 A system module block diagram of a grabbing system in some embodiments of the present invention;

[0038] Fig.13 It is a schematic flow chart of a first method for grabbing a wafer transfer box in some embodiments of the present invention;

[0039] Fig.14 The figure is a flow chart of a second method for grabbing a wafer transfer box in some embodiments of the present invention.

[0040] Among them, 1 is the grabbing platform; 11 is the platform body; 111 is the lower surface; and 112 is the upper surface.

[0041] 2 is a positioning mechanism; 21 is a positioning device; 211 is a positioning shaft; 212 is a positioning assembly; 2121 is a bearing seat; 21211 is a sleeve; 21212 is a flange; 2122 is a positioning seat; 21221 is an annular support plate; 21222 is an annular abutment portion; 21223 is an annular connection portion; 21224 is a first accommodating groove; 213 is a contact member; 2131 is a second accommodating groove; 2132 is a positioning protrusion; 214 is an elastic assembly; 2141 is a bracket; 21411 is an upper fixed side; 21412 is a lower fixed side; 21413 is an upper clamping groove; 21414 is a lower clamping groove; 2142 is a first spring; 2143 is a second spring; 215 is a clamping member; 216 is a piece to be tested.

[0042] 3 is a support frame; 31 is a first frame body; 32 is a second frame body.

[0043] 4 is the main control module.

[0044] 5 is a driving mechanism; 51 is a hoisting device; 52 is a transmission belt. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of this application.

[0046] Embodiment 1

[0047] The first embodiment of the present invention provides a positioning mechanism, such as Figures 6 to 10 As shown, the positioning mechanism 2 is disposed on a grabbing platform 1 for grabbing a wafer transfer box FOUP 100. The positioning mechanism 2 is used to position the FOUP 100 at a target position when the grabbing platform 1 descends.

[0048] In addition, combined Figure 4 As shown, the positioning mechanism 2 is also used to output an electrical signal to the main control module 4 of the grasping system in real time when positioning the FOUP 100, so that the main control module 4 can determine whether the positioning mechanism 2 has completed the positioning of the FOUP 100 based on the received electrical signal, and the main control module 4 can control whether the grasping platform 1 grasps the FOUP 100 based on the judgment result.

[0049] It is not difficult to see from the above content that since the positioning mechanism 2 is provided on the grasping platform 1, and the positioning mechanism 2 can position the FOUP 100 at the target position when the grasping platform 1 descends, and when the positioning mechanism 2 is positioning the FOUP 100, it can also output an electrical signal to the main control module 4 of the grasping system in real time, so that the main control module 4 can determine whether the positioning mechanism 2 has completed the positioning of the FOUP 100 according to the received electrical signal, and can control whether the grasping platform 1 grasps the FOUP 100 according to the judgment result, thereby ensuring the clamping accuracy of the grasping platform 1 when grasping the FOUP 100, effectively avoiding the grasping failure of the grasping platform 1, and preventing the FOUP 100 from escaping from the grasping platform 1 after completing the grasping of the FOUP 100.

[0050] Specifically, in some embodiments, Figure 6 As shown, the positioning mechanism 2 includes: a positioning device 21 and a detection module 22. The positioning device 21 and the detection module 22 are both arranged on the grasping platform 1, and are combined with Fig.12 As shown, the positioning device 21 is used to position the FOUP 100 at the target position when the grabbing platform 1 is descending. Figure 6 As shown, the detection module 22 is used to detect the state of the positioning device 21 when the positioning device 21 is positioning the FOUP 100, and output at least one electrical signal to the main control module 4 according to the detected state. Fig.12 As shown, the detection module 22 can output one or two electrical signals to the main control module 4 when positioning the FOUP 100, that is, in the process of positioning the FOUP 100, the detection module 22 continuously outputs the first electrical signal to the main control module 4, and when the positioning of the FOUP 100 is completed, the detection module 22 continuously outputs the first electrical signal to the main control module 4 while continuously outputting the second electrical signal to the main control module 4, so that the main control module 4 will determine that the FOUP 100 is positioned by the positioning mechanism 2 only when the first electrical signal and the second electrical signal output by the positioning mechanism 2 are obtained at the same time, and at this time, the grasping platform 1 can be controlled to grasp the FOUP 100 at the target position.

[0051] Furthermore, in order to enable the positioning device 21 to position the FOUP 100 at the target position when the grabbing platform 1 descends, as shown in FIG. Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the positioning device 21 includes: a positioning shaft 211 , a positioning assembly 212 , a contact member 213 , an elastic assembly 214 , a clamping member 215 and a test piece 216 .

[0052] Among them, combined Figure 7As shown, the positioning shaft 211 is disposed in the platform body 11 of the grabbing platform 1 along the lifting direction of the grabbing platform 1, so that the positioning shaft 211 can slide along its own axis direction. The positioning assembly 212 is sleeved on the positioning shaft 211 and fixed to the lower surface 111 of the platform body 11, so that the positioning assembly 212 can slide relative to the positioning shaft 211 along the axis direction of the positioning shaft 211. In addition, as Figure 7 , Figures 2 to 4 As shown, the contact member 213 is disposed at one end of the positioning shaft 211 away from the lower surface 111 of the platform body 11, and the contact member 213 is movable relative to the positioning assembly 212 through the positioning shaft 211, so that the contact member 213 can resist the FOUP 100 when the grabbing platform 1 grabs the FOUP 100. The elastic assembly 214 is also sleeved on the positioning shaft 211, and the elastic assembly 214 is also used to be compressed or rebounded along the length direction of the positioning shaft 211, and is located between the positioning assembly 212 and the contact member 213.

[0053] Finally, if Figures 2 to 4 As shown, the clamping member 215 and the test piece 216 are also arranged on the positioning shaft 211, wherein the clamping member 215 can be a spring and is located above the positioning assembly 212, while the test piece 216 is arranged away from the contact member 213. Figure 5 , Figure 6 , Figures 8 to 10 As shown, the piece to be tested 216 is also used for real-time detection of the positioning shaft 211 by the detection module 22 when it slides, so that the detection module 22 can output at least one electrical signal to the main control module 4 according to the measured position of the piece to be tested 216. In application, when the contact member 213 is pressed against the FOUP 100 during the descent of the grabbing platform 1, combined with Figure 3 and Figure 7 As shown, the contact member 213 can move toward the lower surface 111 of the platform body 11 by means of the sliding fit between the positioning shaft 211 and the positioning assembly 212, and the elastic assembly 214 can be continuously compressed under the extrusion of the contact member 213. On the contrary, when the contact member 213 is in the process of rising of the grabbing platform 1, combined with Figure 4 As shown in FIG. 1 , at this time, the contact member 213 no longer abuts against the FOUP 100, thereby releasing the pressure state of the contact member 213, and the elastic component 214 can rebound at this time, and drive the contact member 213 to move in a direction away from the lower surface 111 of the platform body 11. When the contact member 213 moves in a direction away from the lower surface 111 of the platform body 11 to the initial position, as shown in FIG. Figure 4 As shown, the clamping member 215 on the positioning shaft 211 can abut against the positioning assembly 212. At this time, the positioning shaft 211 and the positioning assembly 212 are relatively fixed to each other, so that the positioning mechanism 2 can meet the positioning requirements for subsequent FOUP 100.

[0054] Specifically, in some embodiments, Figure 1 and Figure 2 As shown, the positioning assembly 212 includes: a bearing seat 2121 and a positioning seat 2122. Figure 3 and Figure 4 As shown, the bearing seat 2121 is sleeved on the positioning shaft 211 and can slide relative to the positioning shaft 211, while the positioning seat 2122 is coaxially fixed to the bearing seat 2121 and is detachably connected to the lower surface 111 of the platform body 11. For example, the positioning seat 2122 and the platform body 11 can be locked and fixed by bolts. Of course, in other embodiments, the positioning seat 2122 and the platform body 11 can also be detachably connected by other methods. In this embodiment, the connection method between the positioning seat 2122 and the platform body 11 is not specifically limited. When applied, combined with Figure 3 and Figure 4 As shown, the bearing seat 2121 can guide the relative sliding between the positioning shaft 211 and the positioning seat 2122, and can prevent the positioning shaft 211 from directly contacting the positioning seat 2122 when sliding. The positioning seat 2122 can limit the movement of the contact member 213 when the contact member 213 moves toward the lower surface 111 of the platform body 11 with the help of the positioning shaft 211. In addition, in some embodiments, such as Figure 3 and Figure 4 As shown, the elastic component 214 can be abutted against the positioning seat 2122 on one side along the axial direction of the positioning shaft 211, and the elastic component 214 can be abutted against the contact piece 213 on the other side along the axial direction of the positioning shaft 211, so that the elastic component 214 can be compressed by the force exerted on it by the contact piece 213 and the positioning seat 2122 when the contact piece 213 moves toward the direction close to the lower surface 111 of the platform body 11.

[0055] Furthermore, in order to allow the bearing seat 2121 and the positioning seat 2122 to be coaxially fixed along the axial direction of the positioning shaft 211, in some embodiments, such as Figures 2 to 4 As shown, the bearing seat 2121 includes: a sleeve 21211 and a flange portion 21212. The sleeve 21211 is sleeved on the positioning shaft 211 and can slide relative to the positioning shaft 211. The sleeve 21211 has an inner side (not shown in the figure) that slides with the positioning shaft 211 and an outer side (not shown in the figure) that is opposite to the inner side. The flange portion 21212 is formed by a portion of the outer side of the sleeve 21211 protruding in a direction away from the inner side.

[0056] Secondly, the structure of the corresponding sleeve 21211, such as Figure 2 , Figure 3 and Figure 4As shown, the positioning seat 2122 includes: an annular support plate 21221, an annular abutment portion 21222 and an annular connection portion 21223. The annular support plate 21221 is sleeved on the sleeve body 21211 and is detachably connected to the flange portion 21212. Secondly, the annular abutment portion 21222 is formed by the annular support plate 21221 protruding partly toward the contact member 213 along its circumference, and when the contact member 213 slides to a preset position in the direction close to the lower surface 111 of the platform body 11, the annular abutment portion 21222 can directly abut the contact member 213. Finally, combined with Figure 2 , Figure 3 Combination Figure 4 As shown, the annular connecting portion 21223 is connected to the annular abutting portion 21222 around the circumference of the annular abutting portion 21222, and is detachably connected to the platform body 11. It is worth noting that since the annular abutting portion 21222 is formed by the annular supporting plate 21221 around its circumference, with a portion protruding toward the direction of the contact member 213, the annular abutting portion 21222 can enclose an installation space (not shown in the figure) on the annular supporting plate 21221 where the elastic component 214 can be installed.

[0057] In addition, in order to enable the elastic component 214 to be compressed or rebounded under the movement of the contact member 213, in other embodiments, such as Figure 2 , Figure 3 and Figure 4 As shown, the elastic component 214 includes: a bracket 2141, a first spring 2142 and a second spring 2143. The bracket 2141 is sleeved on the positioning shaft 211 along the axial direction of the positioning shaft 211, and the bracket 2141 has an upper fixed side 21411 opposite to the positioning seat 2122 and a lower fixed side 21412 opposite to the contact member 213 along the axial direction of the positioning shaft 211. The first spring 2142 is sleeved on the positioning shaft 211 along the axial direction of the positioning shaft 211, and is clamped with the upper fixed side 21411 of the bracket 2141. The second spring 2143 is sleeved on the positioning shaft 211 along the axial direction of the positioning shaft 211, and is clamped with the lower fixed side 21412 of the bracket 2141. Furthermore, in order to enable the upper fixing side 21411 and the lower fixing side 21412 of the bracket 2141 to respectively clamp the first spring 2142 and the second spring 2143, in some embodiments, as shown in FIG. Figure 2 As shown, an upper fixing side 21411 of the bracket 2141 is provided with an upper slot 21413 in a direction close to the lower fixing side 21412 , and at the same time, a lower fixing side 21412 of the bracket 2141 is provided with a lower slot 21414 in a direction close to the upper fixing side 21411 .

[0058] And, corresponding to the structural characteristics of the elastic component 214, such as Figure 3As shown, the length of the sleeve 21211 can be appropriately increased so that a portion of the sleeve 21211 can pass through the lower surface of the annular support plate 21221 of the positioning seat 2122, so that a first accommodating groove 21224 can be formed between the sleeve 21211 and the annular abutting portion 21222. At the same time, the inner diameter of the first spring 2142 can be appropriately enlarged corresponding to the first accommodating groove 21224 and the sleeve 21211, so that a portion of the first spring 2142 can be sleeved on the sleeve 21211 of the bearing seat 2121. It is not difficult to see that the first accommodating groove 21224 can accommodate the first spring 2142 when the first spring 2142 is compressed. Similarly, corresponding to the first accommodating groove 21224, a second accommodating groove 2131 may be provided on a side of the contact member 213 relative to the positioning seat 2122, and at the same time, a portion of the bottom of the second accommodating groove 2131 protrudes toward the positioning seat 2122 to form a positioning protrusion 2132, so that a portion of the second spring 2143 may be sleeved on the positioning protrusion 2132. It is not difficult to see that the second accommodating groove 2131 can accommodate the second spring 2143 when the second spring 2143 is compressed.

[0059] In addition, in order to enable the detection module 22 to output at least one electrical signal to the main control module 4 according to the measured position of the device under test 216, in some embodiments, such as Figure 8 , Fig. 9 , Fig.10 and Fig.12 As shown, the detection module 22 includes: a first detection element 221 and a second detection element 222. The first detection element 221 and the second detection element 222 are sequentially arranged along the axis direction parallel to the positioning shaft 211, and the first detection element 221 and the second detection element 222 are used to detect the test piece 216 respectively when the positioning shaft 211 slides along its own axis direction. In addition, in order to achieve the fixing of the first detection element 221 and the second detection element 222 on the platform body 11, in some embodiments, the first detection element 221 and the second detection element 222 are combined with Figure 5 As shown, a support frame 3 can be provided on the upper surface 112 of the platform body 11 of the grabbing platform 1, and the support frame 3 includes: a first frame body 31, a second frame body 32 provided on the first frame body 31, wherein ... Figure 5 As shown, the first frame 31 is used to install and fix the first detection element 221, and the second frame 32 is used to install and fix the second detection element 222, and the first detection element 221 can output a first electrical signal when the device to be tested 216 is not detected, and the second detection element 222 can output a second electrical signal when the device to be tested 216 is detected. It is not difficult to find that in some embodiments, the electrical signal output by the detection module 22 includes: a first electrical signal output by the first detection element 221 and a second electrical signal output by the second detection element 222.

[0060] Therefore, when the grabbing platform 1 descends and the contact member 213 abuts against the FOUP 100 and is pressed, the contact member 213 can move toward the lower surface 111 of the platform body 11 by means of the sliding fit between the positioning shaft 211 and the positioning assembly 212. When the contact member 213 moves toward the lower surface 111 of the platform body 11 to a preset position, Figure 3 As shown, the test piece 216 disposed on the positioning shaft 211 can be directly detected by the second detection element 222, but cannot be detected by the first detection element 221. Figure 8 In the state shown, the main control module 4 can simultaneously receive the first electrical signal output by the first detection element 221 and the second electrical signal output by the second detection element 222. When the pressure on the contact member 213 is released, the contact member 213 can move in a direction away from the lower surface 111 of the platform body 11 under the rebound effect of the elastic component 214, and when the contact member 213 moves in a direction away from the lower surface 111 of the platform body 11 to the initial position, as shown in FIG. Figure 4 As shown, the test piece 216 disposed on the positioning shaft 211 can be directly detected by the first detection element 221, but cannot be detected by the second detection element 222. Fig.10 In the state shown, the main control module 4 cannot receive the first electrical signal or the second electrical signal. In addition, it is worth noting that when the contact member 213 is pressed against the FOUP 100 and is subjected to the pressure of the FOUP 100, the contact member 213 is moving toward the lower surface 111 of the platform body 11, that is, when the contact member 213 has left the initial position but has not yet moved to the preset position, and is in the middle position between the preset position and the initial position, the DUT 216 cannot be detected by the first detection element 221 and the second detection element 222, as shown in FIG. Fig. 9 In the state shown, the main control module 4 can only receive the first electrical signal output by the first detection element 221, but cannot receive the second electrical signal.

[0061] It is not difficult to see that, since the contact member 213 is in motion, the test piece 216 can only move between the first detection element 221 and the second detection element 222, so that the main control module 4 can determine whether the positioning mechanism 2 has completed the positioning of the FOUP 100 according to the number of electrical signals received, and can effectively control whether the grasping platform 1 grasps the FOUP 100 at the target position according to the judgment result.

[0062] Furthermore, it should be noted that, in order to enable the first detection element 221 and the second detection element 222 to effectively detect the DUT 216, in some embodiments, as Figures 8 to 10As shown, the first detection element 221 and the second detection element 222 are both opposite-beam photoelectric switches, specifically, as shown in FIG. Figures 8 to 10 , Fig.12 As shown, the first detection element 221 includes: a first light receiving end 2211, a first light emitting end 2212, and a first controller 2213 electrically connected to the first light receiving end 2211 and the first light emitting end 2212, wherein the first controller 2213 is also electrically connected to the main control module 4, and the first light receiving end 2211 and the first light emitting end 2212 are arranged opposite to each other, so that the first light receiving end 2211 can receive the light signal emitted by the first light emitting end 2212, and a first gap 2214 can be formed between the first light receiving end 2211 and the first light emitting end 2212, and the first gap 2214 can be entered by the test piece 216 when the test piece 216 moves along the axial direction of the positioning shaft 211. Similarly, as Figures 8 to 10 , Fig.12 As shown, the second detection element 222 includes: a second light receiving end 2221, a second light emitting end 2222 and a second controller 2223, wherein the second controller 2223 is also electrically connected to the main control module 4, and the second light receiving end 2221 and the second light emitting end 2222 are arranged opposite to each other, so that the second light receiving end 2221 can receive the light signal emitted by the second light emitting end 2222, and a second gap 2224 can be formed between the second light receiving end 2221 and the second light emitting end 2222, and the second gap 2224 can also allow the test piece 216 to enter when the test piece 216 moves along the axial direction of the positioning shaft 211.

[0063] Therefore, when the contact member 213 is in the initial position, as shown in FIG. Fig.10 As shown, at this time, the device under test 216 is just in the first gap 2214 of the first detection element 221, so that the device under test 216 can block the light signal emitted by the first light emitting end 2212, so that the first light receiving end 2211 cannot receive the light signal, which means that the first detection element 221 has detected the device under test 216 at this time, so that the first controller 2213 of the first detection element 221 will not output the first electrical signal to the main control module 4 at this time. At this time, since there is no device under test 216 in the second gap 2224 of the second detection element 222, the light signal emitted by the second light emitting end 2222 can be directly received by the second light receiving end 2221, which means that the second detection element 222 has not detected the device under test 216 at this time, so that the second controller 2223 of the second detection element 222 will not output the second electrical signal to the main control module 4 either.

[0064] Anyway, when the contact member 213 moves to the preset position, Figure 8As shown, at this time, the device under test 216 is just in the second gap 2224 of the second detection element 222, so that the device under test 216 can block the light signal emitted by the second light emitting end 2222, so that the second light receiving end 2221 cannot receive the light signal, which means that the second detection element 222 detects the device under test 216 at this time, so that the second controller 2223 of the second detection element 222 can output the second electrical signal to the main control module 4. At this time, since there is no device under test 216 in the first gap 2214 of the first detection element 221, the light signal emitted by the first light emitting end 2212 can be directly received by the first light receiving end 2211, which means that the first detection element 221 does not detect the device under test 216 at this time, so that the first controller 2213 of the first detection element 221 can also output the first electrical signal to the main control module 4.

[0065] Alternatively, when the contact member 213 moves to a position intermediate between the initial position and the preset position, the device to be tested 216 is now exactly between the first detection element 221 and the second detection element 222, so that the light signal emitted by the first light emitting end 2212 can be received by the first light receiving end 2211, and the light signal emitted by the second light emitting end 2222 can be received by the second light receiving end 2221, that is, at this time, neither the first detection element 221 nor the second detection element 222 detects the device to be tested 216, so that the first controller 2213 of the first detection element 221 can output a first electrical signal to the main control module 4, while the second controller 2223 of the second detection element 222 will not output a second electrical signal to the main control module 4.

[0066] It should be noted that the first detection element 221 and the second detection element 222 mentioned above are only described by taking the beam-type photoelectric switch as an example, and corresponding to the beam-type photoelectric switch, the test piece 216 can be a light-proof shielding member, so that it can block the light signal emitted by the first light emitting end 2212 when it moves to the first gap 2214 of the first detection element 221, or block the light signal emitted by the second light emitting end 2222 when it moves to the second gap 2224 of the second detection element 222. Of course, in other embodiments, the first detection element 221 and the second detection element 222 can also be other sensing elements, for example, the first detection element 221 and the second detection element 222 can also use Hall elements, and corresponding to the Hall elements, the test piece 216 can also be a metal component that can be sensed by the Hall element, and in this embodiment, the types of the first detection element 221, the second detection element 222 and the test piece 216 are specifically limited.

[0067] In addition, as a preferred solution, in some other embodiments, Figure 1 and Figure 6As shown, the positioning mechanism 2 further includes: a friction component 23, which is disposed on the upper surface 112 of the platform body 11, and at the same time, the friction component 23 is also in contact with the positioning shaft 211, so that the friction component 23 can limit the radial direction of the positioning shaft 211 when the positioning shaft 211 slides along its own axial direction. Specifically, in some embodiments, such as Figure 5 As shown, the friction assembly 23 includes: a fixing frame 231 disposed on the upper surface 112 of the platform body 11, and a friction block 232 disposed on the fixing frame 231, and the friction block 232 can always abut against the outer surface of the positioning shaft 211, so that through the abutment between the friction block 232 and the positioning shaft 211, a certain friction resistance can be applied to the positioning shaft 211 when the positioning shaft 211 moves along its own axis direction, thereby preventing the positioning shaft 211 from rotating radially when it moves along its own axis direction, thereby further improving the accuracy of the positioning mechanism 2 when positioning the FOUP 100. It should be noted that, in some embodiments, the friction block 232 can be a flexible friction member, such as a rubber member, a silicone member, etc., of course, it can also be other components with friction characteristics, and in this embodiment, the type of the friction block 232 is not specifically limited.

[0068] Embodiment 2

[0069] A second embodiment of the present invention relates to a gripping system, such as Figure 6 and Fig.11 As shown, the grasping system includes: a grasping platform 1, a driving mechanism 5, and a positioning mechanism 2 as described in the first embodiment.

[0070] The grabbing platform 1 can rise or fall in the vertical direction, and is used to grab or release the wafer transfer box FOUP 100 at the target position when it falls. The driving mechanism 5 is connected to the grabbing platform 1 and is used to drive the grabbing platform 1 to rise or fall. Fig.12 As shown, the main control module 4 is communicatively connected with the positioning mechanism 2 , the grasping platform 1 and the driving mechanism 5 respectively.

[0071] When the driving mechanism 5 drives the grasping platform 1 to descend and causes the positioning mechanism 2 to position the FOUP 100 at the target position, the main control module 4 is used to obtain the electrical signal output by the positioning mechanism 2 in real time, and can determine whether the positioning mechanism 2 has completed the positioning of the FOUP 100 based on the obtained electrical signal. The main control module 4 is also used to control the driving mechanism 5 to stop driving the grasping platform 1 to continue descending after determining that the positioning mechanism 2 has completed the positioning of the FOUP 100, and control the grasping platform 1 to grasp the FOUP 100 at the target position.

[0072] It is not difficult to see from the above content that since the positioning mechanism 2 is provided on the grasping platform 1, and the positioning mechanism 2 can position the FOUP 100 at the target position when the grasping platform 1 descends, and when the positioning mechanism 2 is positioning the FOUP 100, it can also output an electrical signal to the main control module 4 of the grasping system in real time, so that the main control module 4 can determine whether the positioning mechanism 2 has completed the positioning of the FOUP 100 according to the received electrical signal, and after determining that the positioning mechanism 2 has completed the positioning of the FOUP 100, it can control the grasping platform 1 to grasp the FOUP 100 at the target position, thereby ensuring the clamping accuracy of the grasping platform 1 when grasping the FOUP 100, effectively avoiding the grasping failure of the grasping platform 1, and preventing the FOUP from escaping from the grasping platform after the grasping of the FOUP is completed.

[0073] Specifically, in some embodiments, Fig.11 As shown, the grabbing platform 1 includes: a platform body 11, a clamping mechanism 12 arranged on the platform body 11, and the driving mechanism 5 includes: a hoisting device 51, and a plurality of transmission belts 52 connected to the platform body 11, wherein the hoisting device 51 is used to reel in or release each transmission belt 52, and at the same time, combined with Fig.12 As shown, the hoisting device 51 and the clamping mechanism 12 are also connected to the main control module 4. Through the control of the hoisting device 51 by the main control module 4, the hoisting device 51 can release or reel in the transmission belts 52 to drive the grasping platform 1 to rise or fall. In addition, when the grasping platform 1 descends to a predetermined position and the positioning mechanism 2 completes the positioning of the FOUP 100, the main control module 4 controls the clamping mechanism 12 so that the clamping mechanism 12 can clamp the FOUP 100.

[0074] Embodiment 3

[0075] Embodiment 3 of the present invention relates to a wafer transfer box, such as Fig.12 As shown, the wafer transfer box FOUP 100 is provided with a positioning interface (not shown in the figure), and the positioning interface is used to cooperate with the positioning mechanism 2 as described in the first embodiment, so that the positioning mechanism 2 is used to position the FOUP 100 at the target position when the grabbing platform 1 descends.

[0076] It is not difficult to see from the above content that, with the help of the positioning interface (not marked in the figure) provided on the FOUP 100, when the grasping platform 1 is descending, the positioning interface can cooperate with the contact member 213 on the positioning mechanism 2 on the grasping platform 1, so that the positioning mechanism 2 can realize the positioning of the FOUP 100, so that when the grasping platform 1 grasps the FOUP 100, the grasping accuracy of the grasping platform 1 for the FOUP 100 can be further improved.

[0077] Specifically, in some embodiments, the shape of the positioning interface should be compatible with the shape of the contact member 213, combined with Figure 7 As shown, the contact member 213 can be inserted into the positioning interface, and the contact member 213 and the FOUP 100 can be relatively fixed to each other, thereby ensuring the grasping accuracy of the grasping platform 1 when grasping the FOUP 100. In addition, it should be noted that in some embodiments, the contact member 213 can be a flexible component, so that the contact member 213 can flexibly contact with the FOUP 100 after being inserted into the positioning interface 1001, thereby ensuring the positioning performance of the contact member 213 on the FOUP 100, and preventing the FOUP 100 from being damaged by the contact member 213 when contacting with the contact member 213, thereby improving the protection performance of the FOUP 100.

[0078] Embodiment 4

[0079] A fourth embodiment of the present invention relates to a method for grabbing a wafer transfer box, such as Fig.13 As shown, the crawling method includes the following steps:

[0080] Step 1310, when the grabbing platform descends, the positioning mechanism 2 disposed on the grabbing platform 1 positions the wafer transfer box FOUP 100 at the target position, and the electrical signal output by the positioning mechanism 2 is obtained in real time.

[0081] Step 1320: Determine whether the positioning mechanism 2 has completed the positioning of the FOUP 100 based on the obtained electrical signal.

[0082] Step 1330: If it is determined that the positioning mechanism 2 has completed the positioning of the FOUP 100, the grabbing platform 1 is stopped from being driven to continue to descend, and the grabbing platform 1 is controlled to grab the FOUP 100 at the target position.

[0083] In step 1340 , if it is determined that the positioning mechanism 2 has not completed the positioning of the FOUP 100 , the grabbing platform 1 is driven to continue to descend, and the process returns to step 1310 .

[0084] It is not difficult to see from the above content that since the positioning mechanism 2 is provided on the grasping platform 1, and the positioning mechanism 2 can position the FOUP 100 at the target position when the grasping platform descends, and when the positioning mechanism 2 is positioning the FOUP 100, the electrical signal output by the positioning mechanism 2 can be obtained in real time, and it can be determined whether the FOUP 100 is positioned by the positioning mechanism 2 according to the received electrical signal. Once it is determined that the positioning mechanism 2 has completed the positioning of the FOUP 100, the grasping platform 1 can be stopped from being driven to continue to descend, and the grasping platform 1 can be controlled to grasp the FOUP 100 at the target position, thereby ensuring the clamping accuracy of the grasping platform 1 when grasping the FOUP 100, effectively avoiding the grasping failure of the grasping platform 1, and preventing the FOUP 100 from escaping from the grasping platform 1 after the grasping of the FOUP 100 is completed.

[0085] Specifically, in some embodiments, Figure 6 As shown, the positioning mechanism 2 includes: a positioning device 21 and a detection module 22 set on the grabbing platform 1. The positioning device 21 is used to position the FOUP 100 at the target position when the grabbing platform 1 descends, and the detection module 22 is used to detect the state of the positioning device 21 when the positioning device 21 locates the FOUP 100, and output at least one electrical signal according to the detected state. For example, the electrical signal includes: the first electrical signal and the second electrical signal output by the detection module 22 when the positioning device 21 completes the positioning of the FOUP 100, and also includes: the first electrical signal output by the detection module 22 when the positioning device 21 fails to complete the positioning of the FOUP 100. In addition, the second electrical signal output by the detection module 22 is related to the descending stroke of the grabbing platform 1 after the detection module 22 outputs the first electrical signal.

[0086] For example, the structures of the positioning device 21 and the detection module 22 may be the same as those of the positioning device 21 and the detection module 22 mentioned in the first embodiment. Therefore, when the grabbing platform 1 descends and the contact member 213 abuts against the FOUP 100 and is pressed, the contact member 213 can move toward the direction close to the lower surface 111 of the platform body 11 by means of the sliding fit between the positioning shaft 211 and the positioning assembly 212. When the contact member 213 moves toward the direction close to the lower surface 111 of the platform body 11 to a preset position, such as Figure 8In the state shown, the test piece 216 disposed on the positioning shaft 211 can be directly detected by the second detection element 222, but cannot be detected by the first detection element 221, so that the first detection element 221 can output a first electrical signal, and the second detection element 222 can also output a second electrical signal. When the pressure on the contact member 213 is released, the contact member 213 can move in a direction away from the lower surface 111 of the platform body 11 under the rebound effect of the elastic component 214, and when the contact member 213 moves in a direction away from the lower surface 111 of the platform body 11 to the initial position, as shown in FIG. Fig.10 In the state shown, the test piece 216 disposed on the positioning shaft 211 can be directly detected by the first detection element 221, but cannot be detected by the second detection element 222, so that the first detection element 221 at this time will not output the first electrical signal, and the second detection element 222 will not output the second electrical signal. In addition, it is worth noting that when the contact member 213 is against the FOUP 100 and is subjected to the pressure of the FOUP 100, so that the contact member 213 is in the process of moving toward the lower surface 111 of the platform body 11, that is, at this time, the contact member 213 has left the initial position, but has not yet moved to the preset position, and is in the middle position between the preset position and the initial position, at this time, the test piece 216 cannot be detected by the first detection element 221, nor can it be detected by the second detection element 222, as shown in FIG. Fig. 9 In the state shown, only the first detection element 221 outputs the first electrical signal.

[0087] It is not difficult to find that based on the above-mentioned detection method of the first detection element 221 and the second detection element 222 on the DUT 216, and the output method of the first detection element 221 to the first electrical signal and the output method of the second detection element 222 to the second electrical signal, therefore, in the step of judging whether the positioning mechanism 2 has completed the positioning of the FOUP 100 according to the obtained electrical signal, that is, step 1320 specifically includes:

[0088] When both the first and second electrical signals output by the detection module 22 are obtained, it is determined that the positioning mechanism 2 has completed the positioning of the FOUP 100. When only the first electrical signal output by the detection module 22 is obtained, it is determined that the positioning mechanism 2 has not completed the positioning of the FOUP 100.

[0089] In addition, it is not difficult to see from the above content that, when the contact member 213 is in the initial position, the test piece 216 disposed on the positioning shaft 211 can be directly detected by the first detection element 221, but cannot be detected by the second detection element 222, that is, the first detection element 221 at this time will not output the first electrical signal, and the second detection element 222 will not output the second electrical signal. Based on this characteristic, as a preferred solution, in other embodiments, such as Figure 5As shown, when the grabbing platform descends, the positioning mechanism 2 disposed on the grabbing platform 1 positions the wafer transfer box FOUP 100 at the target position, that is, before step 1310, as shown in FIG. Fig.14 As shown, the crawling method also includes the following steps:

[0090] Step 1301, determine whether there is a FOUP 100 at the target location.

[0091] Step 1302: If it is determined that there is no FOUP 100 at the target position, the driving of the grabbing platform 1 to continue to descend is stopped, and a prompt message is generated and issued.

[0092] Step 1303 , if it is determined that there is a FOUP 100 at the target location, the grabbing platform 1 is driven to continue to descend, and step 1310 is continued.

[0093] Furthermore, in the step of determining whether there is a FOUP at the target location, that is, step 1301 specifically includes:

[0094] The descending stroke of the grabbing platform 1 is acquired in real time.

[0095] When the obtained descending stroke of the grabbing platform 1 reaches the preset stroke, if the first electrical signal output by the detection module 22 is not obtained, it is determined that there is no FOUP 100 at the target position.

[0096] When the obtained descending stroke of the grabbing platform 1 reaches the preset stroke, if the first electrical signal output by the detection module 22 is obtained, it is determined that the FOUP 100 exists at the target position.

[0097] Since the travel of the grabbing platform 1 when descending is generally a certain value, that is, if there is a FOUP 100 at the target position, each time the grabbing platform 1 descends to the preset travel, the first detection element 221 of the detection module 22 cannot detect the DUT 216, which should be as follows Fig. 9 The state shown causes the first detection element 221 to output the first electrical signal. Therefore, in order to accurately calculate the descending stroke of the grabbing platform 1, for example, a distance measurement module can be set to measure the descending stroke of the grabbing platform 1 in real time, and the preset stroke of the grabbing platform 1 when descending is set to the stroke when the contact member 213 of the positioning device 21 abuts against the FOUP 100 and the piece to be tested 216 moves to the middle position between the initial position and the preset position. At this time, it can be ensured that only the first detection element 221 will output the first electrical signal, and the second detection element 222 will not output the second electrical signal. Therefore, when the grabbing platform 1 descends to the preset stroke, it can be determined whether there is a FOUP 100 at the target position by whether the first electrical signal is obtained.

[0098] It is not difficult to see from the above content that this embodiment is an embodiment of the method for grabbing a wafer transfer box corresponding to the third embodiment, and this embodiment can be implemented in conjunction with the third embodiment. The relevant technical details mentioned in the third embodiment are still valid in this embodiment, and in order to reduce repetition, they are not repeated here. Accordingly, the relevant technical details mentioned in this embodiment can also be applied in the third embodiment.

[0099] Finally, it should be noted that those skilled in the art can understand that in order to enable readers to better understand the present application, the embodiments of the present application provide many technical details. However, even without these technical details and various changes and modifications based on the above-mentioned embodiments, the technical solutions claimed for protection by the claims of the present application can be basically realized. Therefore, in practical applications, various changes can be made to the above-mentioned embodiments in form and detail without departing from the spirit and scope of the present application.

Claims

1. A positioning mechanism, characterized in that: The positioning mechanism is arranged on a grabbing platform for grabbing a wafer transfer box FOUP, and the positioning mechanism is used to position the FOUP at a target position when the grabbing platform is descending; The positioning mechanism is also used to output an electrical signal to the main control module of the grabbing system in real time when positioning the FOUP, so that the main control module is used to determine whether the positioning mechanism has completed the positioning of the FOUP according to the received electrical signal, and the main control module is used to control whether the grabbing platform grabs the FOUP according to the determination result; Wherein, the positioning mechanism comprises: A positioning device, disposed on the grabbing platform, for positioning the FOUP at a target position when the grabbing platform is descending; a detection module, disposed on the grabbing platform, for detecting a state of the positioning device when the positioning device is positioning the FOUP, and outputting at least one electrical signal to the main control module according to the detected state; The positioning device comprises: A positioning shaft is provided along the lifting direction of the grabbing platform, penetrates the platform body of the grabbing platform, and can slide along its own axis direction; A positioning assembly, which is sleeved on the positioning shaft and fixed to the lower surface of the platform body, and is slidable relative to the positioning shaft along the axial direction of the positioning shaft; A contact member is disposed at an end of the positioning shaft away from the lower surface of the platform body and is movable relative to the positioning assembly through the positioning shaft; the contact member is used to abut against the FOUP when the grabbing platform grabs the FOUP; An elastic component, sleeved on the positioning shaft and located between the positioning component and the contact, and used for being compressible or rebounding along the length direction of the positioning shaft; A clamping member, arranged on the positioning shaft and located above the positioning assembly; A piece to be tested is arranged on the positioning shaft and away from the contact piece, so as to be detected by the detection module in real time when the positioning shaft slides; Wherein, when the contact member is pressed and moves toward the direction close to the lower surface of the platform body, the elastic component is compressed; When the contact piece is released from pressure, the elastic component rebounds and drives the contact piece to move in the direction away from the lower surface of the platform body. The clamping piece is used to abut against the positioning component when the contact piece moves in the direction away from the lower surface of the platform body to the initial position, so that the positioning shaft and the positioning component are relatively fixed.

2. The positioning mechanism according to claim 1, characterized in that: The positioning component comprises: A bearing seat is sleeved on the positioning shaft and is slidable relative to the positioning shaft; A positioning seat, coaxially fixed with the bearing seat and detachably connected to the lower surface of the platform body; The elastic component abuts against the positioning seat on one side along the axial direction of the positioning shaft, and the elastic component abuts against the contact piece on the other side along the axial direction of the positioning shaft.

3. The positioning mechanism according to claim 2, characterized in that: The bearing seat comprises: A sleeve body is sleeved on the positioning shaft and is slidable relative to the positioning shaft; the sleeve body has an inner side that is slidably matched with the positioning shaft and an outer side that is opposite to the inner side; A flange portion, formed by a portion of the outer side of the sleeve protruding in a direction away from the inner side; The positioning seat comprises: An annular support plate, sleeved on the sleeve body and detachably connected to the flange portion; An annular abutment portion is formed by the annular support plate partially protruding toward the contact member along its circumference, and is used to abut against the contact member when the contact member slides toward the lower surface of the platform body to a preset position; An annular connecting portion is connected to the annular abutting portion around the circumference of the annular abutting portion and is detachably connected to the platform body.

4. The positioning mechanism according to claim 3, characterized in that: The elastic component comprises: A bracket is sleeved on the positioning shaft along the axial direction of the positioning shaft; the bracket has an upper fixed side opposite to the positioning seat and a lower fixed side opposite to the contact member along the axial direction of the positioning shaft; A first spring is sleeved on the positioning shaft along the axial direction of the positioning shaft and is clamped with the upper fixed side of the bracket; The second spring is sleeved on the positioning shaft along the axial direction of the positioning shaft and is clamped with the lower fixed side of the bracket.

5. The positioning mechanism according to claim 4, characterized in that: The annular abutting portion is also separated from the sleeve to form a first accommodating groove, the first accommodating groove is used to receive the first spring when the first spring is compressed, and the first spring is also partially sleeved on the sleeve; The contact member is provided with a second accommodating groove on one side relative to the positioning seat, and the second accommodating groove is used to accommodate the second spring when the second spring is compressed. A portion of the bottom of the second accommodating groove protrudes toward the positioning seat to form a positioning protrusion that is partially sleeved by the second spring.

6. The positioning mechanism according to claim 1, characterized in that: The detection module comprises: The first detection element and the second detection element are sequentially arranged along the axial direction parallel to the positioning shaft, and are used to respectively detect the piece to be tested when the positioning shaft slides along its own axial direction; wherein the electrical signal includes: a first electrical signal output when the first detection element does not detect the piece to be tested, and a second electrical signal output when the second detection element detects the piece to be tested; Wherein, when the tested piece is used for the elastic component to rebound and drive the contact piece to move in a direction away from the lower surface of the platform body to the initial position, it is detected by the first detection element and is not detected by the second detection element; The test piece is also used for being detected by the second detection element and not being detected by the first detection element when the contact piece is pressed and moves to a preset position in a direction close to the lower surface of the platform body; The test piece is also used for not being detected by the first detection element and the second detection element when the contact piece is pressed and moves toward the lower surface of the platform body to an intermediate position between the preset position and the initial position.

7. The positioning mechanism according to any one of claims 1 to 6, characterized in that: The positioning mechanism also includes: The friction component is arranged on the upper surface of the platform body and abuts against the outer surface of the positioning shaft, and is used for limiting the radial direction of the positioning shaft when the positioning shaft slides along its own axial direction.

8. A gripping system, characterized in that: include: The grabbing platform can rise or fall in the vertical direction and is used to grab or release the wafer transfer box FOUP at the target position when descending; A driving mechanism, connected to the grabbing platform, and used to drive the grabbing platform to rise or fall; The positioning mechanism according to any one of claims 1 to 7; The main control module is communicatively connected with the positioning mechanism, the grabbing platform and the driving mechanism respectively; When the driving mechanism drives the grabbing platform to descend and enables the positioning mechanism to position the FOUP at the target position, the main control module is used to obtain the electrical signal output by the positioning mechanism in real time, and judge whether the positioning mechanism has completed the positioning of the FOUP according to the obtained electrical signal; The main control module is also used to control the driving mechanism to stop driving the grabbing platform to continue to descend after determining that the positioning mechanism has completed the positioning of the FOUP, and control the grabbing platform to grab the FOUP at the target position.

9. A wafer transfer box, characterized in that: The wafer transfer box FOUP is provided with a positioning interface, and the positioning interface is used to cooperate with the positioning mechanism described in any one of claims 1-7, so that the positioning mechanism is used to position the FOUP at the target position when the grabbing platform descends.

10. A method for grabbing a wafer transfer box, characterized in that: The crawling method comprises the following steps: When the grabbing platform descends, the positioning mechanism disposed on the grabbing platform positions the wafer transfer box FOUP at the target position, and the electrical signal output by the positioning mechanism is obtained in real time; determining, based on the obtained electrical signal, whether the positioning mechanism has completed positioning of the FOUP; If it is determined that the positioning mechanism has completed positioning of the FOUP, the grabbing platform is stopped from being driven to continue to descend, and the grabbing platform is controlled to grab the FOUP at the target position; Wherein, the positioning mechanism comprises: a positioning device and a detection module arranged on the grabbing platform; The positioning device is used to position the FOUP at the target position when the grabbing platform descends; The detection module is used to detect the state of the positioning device when the positioning device is positioning the FOUP, and output at least one electrical signal according to the detected state.

11. The method for grabbing a wafer transfer box according to claim 10, characterized in that: The electrical signal includes: a first electrical signal and a second electrical signal output by the detection module when the positioning device completes positioning of the FOUP, and also includes: a first electrical signal output by the detection module when the positioning device does not complete positioning of the FOUP; The second electrical signal output by the detection module is related to the descending stroke of the grabbing platform after the detection module outputs the first electrical signal.

12. The method for grabbing a wafer transfer box according to claim 11, characterized in that: The step of judging whether the positioning mechanism has completed positioning the FOUP according to the obtained electrical signal specifically includes: When the first electrical signal and the second electrical signal output by the detection module are simultaneously obtained, it is determined that the positioning mechanism has completed positioning of the FOUP; When only the first electrical signal output by the detection module is obtained, it is determined that the positioning mechanism has not completed the positioning of the FOUP.

13. The method for grabbing a wafer transfer box according to claim 11, characterized in that: When the grabbing platform descends, so that the positioning mechanism disposed on the grabbing platform positions the wafer transfer box FOUP at the target position, the grabbing method further includes the following steps: Determine whether the FOUP exists at the target location; If it is determined that the FOUP does not exist at the target location, the grabbing platform is stopped from being driven to continue to descend, and a prompt message is generated and issued; If it is determined that the FOUP exists at the target position, the grabbing platform is driven to continue to descend.

14. The method for grabbing a wafer transfer box according to claim 13, characterized in that: The step of determining whether the target location contains the FOUP specifically includes: Acquire the descending stroke of the grabbing platform in real time; When the obtained descending stroke of the grabbing platform reaches the preset stroke, if the first electrical signal output by the detection module is not obtained, it is determined that the FOUP does not exist at the target position; When the obtained descending stroke of the grabbing platform reaches the preset stroke, if the first electrical signal output by the detection module is obtained, it is determined that the FOUP exists at the target position.

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