An eccentric machining device for removing seed edge defects

Abstract

The application discloses a kind of eccentric processing devices for removing seed crystal edge defects, more particularly to remove seed crystal edge defect technical field including equipment box and positioning assembly, the inside fixed mounting of the equipment box has output motor, the top of the adjusting mechanism is fixedly installed with clamping mechanism, the clamping mechanism side is movably installed with polishing mechanism.The eccentric processing device for removing seed crystal edge defects is centered by the clamping mechanism, and the positioning assembly and adjusting mechanism are clamped, and the displacement distance of the polishing mechanism is limited by the limiting mechanism, so that the polishing mechanism can stop when it is displaced to the remaining outer wall, and the crystal ingot is eccentrically rotated, and the polishing mechanism is always displaced towards the center of the crystal ingot to be retained and will stop extruding when it contacts the outer wall of the position to be retained.The device can retain the high-quality area of the crystal ingot and effectively remove the edge defects, greatly saving the cost of crystal ingot scrap due to edge defects.

Description

Technical Field

[0001] This invention relates to the field of seed crystal edge defect removal technology, specifically to an eccentric processing device for removing seed crystal edge defects. Background Technology

[0002] Third-generation semiconductor materials possess advantages such as high thermal conductivity, high breakdown field strength, and high saturated electron drift velocity, meeting the requirements of modern electronic technology for harsh conditions such as high temperature, high power, high voltage, high frequency, and radiation resistance. Third-generation semiconductor materials have significant application prospects in fields such as defense, aviation, aerospace, oil exploration, and optical storage. In many strategic industries such as broadband communications, solar energy, automobile manufacturing, semiconductor lighting, and smart grids, third-generation semiconductor materials can reduce energy loss by more than 50% and can reduce equipment size by up to 75%, marking a milestone in human technological development.

[0003] Currently, the main method for machining the outer diameter of crystal ingots involves vacuum adsorption of the ingot, centering the ingot with a probe, and then grinding the outer diameter with a grinding wheel. This method is fast and effective, but it has a fatal flaw: it cannot eccentrically retain the high-quality area. This leads to the diameter being too small when removing edge defects, or even if the diameter meets the requirements, the edge defects cannot be completely removed. Therefore, in the outer cylindrical grinding process, preserving the high-quality area of ​​the ingot and removing edge defects are the primary functions of the outer cylindrical grinding process. Summary of the Invention

[0004] The purpose of this invention is to provide an eccentric processing apparatus for removing defects at the edge of seed crystals, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an eccentric processing device for removing edge defects of seed crystals, comprising an equipment box and a positioning component. An output motor is fixedly installed inside the equipment box. The output shaft of the output motor is fixedly connected to an adjustment mechanism via a coupling. A clamping mechanism is fixedly installed on the top of the adjustment mechanism. A crystal ingot is fixedly installed on the top of the clamping mechanism. A grinding mechanism is movably installed on one side of the clamping mechanism. A linkage mechanism is provided on the top of the output motor. The output shaft of the output motor is fixedly connected to the bottom of the grinding mechanism via the linkage mechanism. A reversing mechanism is fixedly installed inside the linkage mechanism. A tensioning mechanism is fixedly installed on the top of the equipment box. A limit mechanism is fixedly installed on one side of the tensioning mechanism. The positioning component includes a transparent disk with a positioning hole at its center. The clamping mechanism includes a clamping disk, the inside of which is provided with several sliding grooves, and grippers are slidably installed inside the sliding grooves. Cylinders are fixedly installed at the bottom of two sets of grippers, and synchronous connecting rods are rotatably installed at the bottom of the grippers. A second movable block is rotatably installed at the bottom of the clamping disk, and one end of several synchronous connecting rods is rotatably installed at the bottom of the second movable block. The adjusting mechanism includes a mounting plate, a first screw is rotatably mounted inside the mounting plate, a U-shaped block is threadedly connected to the outer wall of the first screw, a slide rod is rotatably mounted inside the mounting plate, a first limiting protrusion is provided on the outer wall of the slide rod, a first adjusting bevel gear is rotatably mounted inside the U-shaped block, the slide rod is slidably mounted inside the first adjusting bevel gear, a second adjusting bevel gear is meshed with one side of the first adjusting bevel gear, a second screw is fixedly connected to one side of the second adjusting bevel gear, a first movable block is threadedly connected to the outer wall of the second screw, a connecting plate is fixedly connected to the top of the first movable block, and the connecting plate is fixedly mounted at the bottom of the clamping mechanism.

[0006] Preferably, the adjusting mechanism further includes a third screw and a transmission belt assembly, the transmission belt assembly connecting the first screw and the third screw, so that there is a power transmission relationship between the first screw and the third screw, the third screw being threadedly connected inside the U-shaped block, and the third screw being rotatably mounted inside the mounting plate.

[0007] Preferably, the adjustment mechanism further includes two sets of first adjustment knobs, which are respectively fixedly connected to one side of the first screw and the slide rod, and are rotatably mounted on the outer wall of the mounting plate.

[0008] Preferably, the transparent disc is made of PP or PFA, and the thickness of the transparent disc is 1-3mm.

[0009] Preferably, the grinding mechanism includes a first mounting frame and a timing belt assembly. A rotating shaft is rotatably mounted on the side of the first mounting frame away from the crystal ingot, and a grinding wheel is rotatably mounted on the side of the rotating shaft close to the crystal ingot. The timing belt assembly connects the rotating shaft and the grinding wheel, so that there is a power transmission relationship between the rotating shaft and the grinding wheel.

[0010] Preferably, the linkage mechanism includes a first bevel gear, which is fixedly installed on the outer wall of the output shaft of the output motor. A second bevel gear is meshed with one side of the first bevel gear. A reversing mechanism is fixedly connected to one side of the second bevel gear. A third bevel gear is fixedly connected to one side of the reversing mechanism. A fourth bevel gear is meshed with one side of the third bevel gear. The fourth bevel gear is fixedly installed at the bottom of the rotating shaft.

[0011] Preferably, the reversing mechanism includes a second mounting bracket, a first geared disc is rotatably mounted on the top of the second mounting bracket, a second geared disc is meshed with the inside of the first geared disc, a first gear is meshed with one side of the second geared disc, a second gear is meshed with one side of the first gear, a first connecting rod is fixedly connected to one side of the first geared disc, the first connecting rod is fixedly mounted on one side of the second bevel gear, a second connecting rod is fixedly mounted on one side of the second gear, a third connecting rod is slidably mounted inside the second connecting rod, and a plurality of second limiting protrusions are provided on the outer wall of the third connecting rod.

[0012] Preferably, the tensioning mechanism includes a first tensioning frame, which is sleeved on the outer wall of the rotating shaft. A second tensioning frame is slidably installed inside the first tensioning frame. The second tensioning frame is fixedly installed on the top of the equipment box. A through-shaft type lead screw motor is threadedly connected to the outer wall of the first tensioning frame. A tension spring is fixedly connected to one side of the through-shaft type lead screw motor. The other end of the tension spring is fixedly connected to one side of the second tensioning frame. Limiting rods are fixedly installed on both the left and right sides of the second tensioning frame. The through-shaft type lead screw motor is slidably installed on the outer wall of the limiting rod.

[0013] Preferably, the limiting mechanism includes a first mounting block and a second mounting block. The first mounting block is fixedly mounted on one side of the first tensioning frame, and the second mounting block is fixedly mounted on the top of the equipment box. A limiting groove is formed inside the first mounting block, and an adjusting screw is rotatably mounted inside the second mounting block. A limiting post is threadedly connected to the outer wall of the adjusting screw, and the limiting post is slidably mounted inside the limiting groove. A scale line is provided on one side of the first mounting block, and an observation pointer is fixedly mounted on the top of the limiting post. An observation window is formed inside the observation pointer and is located on one side of the scale line. A second adjusting knob is rotatably mounted on one side of the second mounting block, and the second adjusting knob is fixedly connected to one side of the adjusting screw.

[0014] To address the aforementioned technical problems, this invention also proposes an eccentric processing method for removing seed crystal edge defects, used in the aforementioned eccentric processing apparatus for removing seed crystal edge defects, comprising the following steps: Compared with the prior art, the beneficial effects of the present invention are: the eccentric processing device for removing seed crystal edge defects; 1. The ingot is centered and clamped by a clamping mechanism. The position to be retained is marked by a positioning component. The position of the clamping mechanism is adjusted by an adjustment mechanism so that the center of the position to be retained on the ingot is on the same vertical line as the center of the clamping mechanism. The output motor drives the adjustment mechanism, clamping mechanism and ingot to rotate. At the same time, the linkage mechanism and the reversing mechanism work together to drive the grinding mechanism to rotate in the opposite direction to the ingot on the same axis to grind the outer wall of the ingot. During this process, the tensioning mechanism keeps the grinding mechanism moving towards the center of the retained part, and the limiting mechanism limits the displacement distance of the grinding mechanism so that the grinding mechanism can stop when it moves to the outer wall of the retained part. In summary, the ingot rotates eccentrically, and the grinding mechanism always moves towards the center of the position to be retained on the ingot and stops squeezing when it contacts the outer wall of the position to be retained. This equipment can retain the high-quality area of ​​the ingot and effectively remove edge defects, which greatly saves the cost of scrapping the ingot due to edge defects. 2. The cylinders are used to move the two sets of grippers toward the center of the clamping plate. During this process, the gripping plate, the second movable block, the synchronous connecting rod, and the grippers work together to move several grippers synchronously toward the inside of the clamping plate, clamping the crystal ingot on the vertical central axis of the clamping mechanism. The transparent plate is then placed against the surface of the crystal ingot. After moving back and forth for comparison, the part that needs to be retained is determined. The center of the part that needs to be retained is marked on the surface of the crystal ingot through the positioning hole. The distance between the center of the part that needs to be retained and the center of the crystal ingot on the X and Y axes is measured by measuring means. Based on the above data, the two sets of first adjustment knobs are rotated to move the clamping mechanism at the top of the adjustment mechanism, so that the center of the retained part and the center of the mounting plate are on the same vertical line, thus accurately completing the centering clamping. In the above process, rotating the first screw causes the first movable block to move laterally under the cooperation between the first screw and the U-shaped block. Rotating the slide rod drives the first adjusting bevel gear to rotate, and under the cooperation between the first adjusting bevel gear, the second adjusting bevel gear, the second screw, and the first movable block, the first movable block is moved longitudinally. Finally, the connecting plate changes the position of the clamping mechanism at the top of the adjusting mechanism. Specifically, the first limiting protrusion allows the U-shaped block to move laterally on the outer wall of the slide rod without affecting the rotation of the second adjusting bevel gear driven by the slide rod. The cooperation between the first screw, the transmission belt assembly, and the third screw makes the lateral displacement of the U-shaped block more stable.

[0015] 3. The output motor drives the adjustment mechanism and clamping mechanism to rotate. During this process, the cooperation between the first bevel gear, the second bevel gear, the third bevel gear and the fourth bevel gear drives the rotating shaft to rotate at the same speed as the adjustment mechanism. The cooperation between the rotating shaft and the synchronous belt assembly drives the grinding wheel to rotate at the same speed as the crystal ingot. During this process, the cooperation between the first gear plate, the second gear plate, the first gear and the second gear makes the rotation direction between the first connecting rod and the second connecting rod opposite. Finally, the grinding wheel and the crystal ingot rotate in the same direction at the same speed. During the grinding process, the relative movement direction of the crystal ingot and the grinding wheel is opposite, which helps to disperse stress concentration points and reduce scratches and damage to the surface of the crystal ingot during the grinding process.

[0016] 4. Through the cooperation of the first tensioning frame, the second tensioning frame, the through-shaft screw motor, and the tension spring, a tension force is provided to the grinding mechanism towards the crystal ingot, so that the grinding wheel squeezes the surface of the crystal ingot for grinding. During this process, the tension is monitored in real time by the tension sensor, and the tension of the tension spring is changed by changing the position of the through-shaft screw motor on the outer wall of the first tensioning frame, thereby controlling the tension towards the crystal ingot and adjusting the pressure of the grinding wheel on the crystal ingot; During this process, the through-shaft lead screw motor is restricted by the limit rod, so that the through-shaft lead screw motor can only move on the outer wall of the first tensioning frame instead of rotating, ensuring that the through-shaft lead screw motor will only adjust its position on the outer wall of the first tensioning frame when it starts.

[0017] 5. By setting the fit between the first mounting block, the limiting groove, and the limiting post through the grinding wheel pressing, the displacement distance of the second tensioning frame is limited, and the displacement distance of the grinding wheel is ultimately limited. By adjusting the fit between the screw and the limiting post, the limiting mechanism can change the specific limitation of the second tensioning frame, and the displacement distance of the grinding wheel is limited to the outer wall of the position where the ingot needs to be retained. During this process, the coordination between the scale lines, the observation pointer, and the observation window allows the staff to accurately adjust the limiting distance of the limiting mechanism, and the second adjustment knob facilitates the user's rotation of the adjustment screw. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the present invention; Figure 3 This is a schematic diagram of the adjustment mechanism of the present invention; Figure 4 For the present invention Figure 3 Enlarged view of point A in the middle; Figure 5 This is a schematic diagram of the clamping mechanism of the present invention; Figure 6 This is a schematic diagram of the positioning component of the present invention; Figure 7 This is a schematic diagram of the linkage mechanism of the present invention; Figure 8 This is a schematic diagram of the reversing mechanism of the present invention; Figure 9 This is a schematic diagram of the grinding mechanism of the present invention; Figure 10 This is a schematic diagram of the tensioning mechanism of the present invention; Figure 11 This is a schematic diagram of the limiting mechanism of the present invention.

[0019] In the diagram: 1. Equipment box; 2. Output motor; 3. Adjustment mechanism; 301. Mounting plate; 302. First screw; 303. U-shaped block; 304. Slide rod; 305. First limiting protrusion; 306. First adjusting bevel gear; 307. Second adjusting bevel gear; 308. Second screw; 309. First movable block; 310. Connecting plate; 311. Transmission belt assembly; 312. Third screw; 313. First adjusting knob; 4. Clamping mechanism; 401. Clamping plate; 402. Slide groove; 403. Gripper; 404. Cylinder; 405. Synchronous connecting rod; 406. Second movable block; 5. Positioning assembly; 501. Transparent plate; 502. Positioning hole; 6. Linkage mechanism; 601. First bevel gear; 602. Second bevel gear; 603. Third bevel gear; 604. Fourth bevel gear; 7. Reversing mechanism; 701. Second mounting bracket 702. First gear; 703. Second gear; 704. First gear; 705. Second gear; 706. First connecting rod; 707. Second connecting rod; 708. Third connecting rod; 709. Second limiting protrusion; 8. Grinding mechanism; 801. First mounting bracket; 802. Rotating shaft; 803. Grinding wheel; 804. Synchronous belt assembly; 9. Tensioning mechanism; 901. First tensioning bracket; 902. Second tensioning bracket ; 903, Through-shaft type lead screw motor; 904, Tension spring; 905, Tension sensor; 906, Limit rod; 10, Limiting mechanism; 1001, First mounting block; 1002, Limiting groove; 1003, Limiting post; 1004, Second mounting block; 1005, Adjusting screw; 1006, Observation pointer; 1007, Observation window; 1008, Scale line; 1009, Second adjusting knob; 11, Crystal ingot. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Please see Figure 1-6 The present invention provides a technical solution: an eccentric processing device for removing edge defects of seed crystals, including an equipment box 1 and a positioning component 5. An output motor 2 is fixedly installed inside the equipment box 1. The output shaft of the output motor 2 is fixedly connected to an adjustment mechanism 3 through a coupling. A clamping mechanism 4 is fixedly installed on the top of the adjustment mechanism 3. A crystal ingot 11 is fixedly installed on the top of the clamping mechanism 4. A grinding mechanism 8 is movably installed on one side of the clamping mechanism 4. A linkage mechanism 6 is provided on the top of the output motor 2. The output shaft of the output motor 2 is fixedly connected to the bottom of the grinding mechanism 8 through the linkage mechanism 6. A reversing mechanism 7 is fixedly installed inside the linkage mechanism 6. A tensioning mechanism 9 is fixedly installed on the top of the equipment box 1. A limit mechanism 10 is fixedly installed on one side of the tensioning mechanism 9. The positioning component 5 includes a transparent disk 501. A positioning hole 502 is opened at the center of the transparent disk 501. The clamping mechanism 4 includes a clamping disk 401. The clamping disk 401 has several sliding grooves 402 inside. The clamping claws 403 are slidably installed inside the sliding grooves 402. The bottom of two sets of clamping claws 403 are fixedly installed with cylinders 404. The bottom of the clamping claws 403 is rotatably installed with synchronous connecting rods 405. The bottom of the clamping disk 401 is rotatably installed with a second movable block 406. One end of the several synchronous connecting rods 405 is rotatably installed with the bottom of the second movable block 406. The adjusting mechanism 3 includes a mounting plate 301. A first screw 302 is rotatably mounted inside the mounting plate 301. A U-shaped block 303 is threadedly connected to the outer wall of the first screw 302. A slide rod 304 is rotatably mounted inside the mounting plate 301. A first limiting protrusion 305 is provided on the outer wall of the slide rod 304. A first adjusting bevel gear 306 is rotatably mounted inside the U-shaped block 303. The slide rod 304 is slidably mounted inside the first adjusting bevel gear 306. A second adjusting bevel gear 307 is meshed with one side of the first adjusting bevel gear 306. A second screw 308 is fixedly connected to one side of the second adjusting bevel gear 307. A first movable block 309 is threadedly connected to the outer wall of the second screw 308. A connecting plate 310 is fixedly connected to the top of the first movable block 309. The connecting plate 310 is fixedly mounted at the bottom of the clamping mechanism 4.

[0022] The adjusting mechanism 3 also includes a third screw 312 and a transmission belt assembly 311. The transmission belt assembly 311 connects the first screw 302 and the third screw 312, so that there is a power transmission relationship between the first screw 302 and the third screw 312. The third screw 312 is threadedly connected inside the U-shaped block 303 and is rotatably installed inside the mounting plate 301. The adjustment mechanism 3 also includes two sets of first adjustment knobs 313. The two sets of first adjustment knobs 313 are respectively fixedly connected to one side of the first screw 302 and the slide bar 304. The two sets of first adjustment knobs 313 are rotatably mounted on the outer wall of the mounting plate 301. The transparent disc 501 is made of PP or PFA and has a thickness of 1-3mm.

[0023] The specific implementation method is as follows: the crystal ingot 11 is placed on the top of the clamping mechanism 4, and the cylinder 404 is activated to move the two sets of grippers 403 toward the center of the clamping disk 401. During this process, through the cooperation between the clamping disk 401, the second movable block 406, the synchronous connecting rod 405, and the grippers 403, several grippers 403 are moved synchronously toward the inside of the clamping disk 401, clamping the crystal ingot 11 on the vertical central axis of the clamping mechanism 4. Then, the transparent disk 501 is attached to the surface of the crystal ingot 11. After moving back and forth for comparison, the part that needs to be retained is determined. The center of the part that needs to be retained is marked on the surface of the crystal ingot 11 through the positioning hole 502. The distance between the center of the part that needs to be retained and the center of the crystal ingot 11 on the X and Y axes is measured by measuring means. Then, according to the above data, the two sets of first adjustment knobs 313 are rotated to move the clamping mechanism 4 on the top of the adjustment mechanism 3, so that the center of the retained part and the center of the mounting disk 301 are on the same vertical line. In the above process, the first screw 302 is rotated, and the first movable block 309 is displaced laterally under the cooperation between the first screw 302 and the U-shaped block 303. The slide bar 304 rotates the first adjusting bevel gear 306, and the first movable block 309 is displaced longitudinally under the cooperation between the first adjusting bevel gear 306, the second adjusting bevel gear 307, the second screw 308, and the first movable block 309. Finally, the connecting plate 310 changes the position of the clamping mechanism 4 at the top of the adjusting mechanism 3. Specifically, the first limiting protrusion 305 allows the U-shaped block 303 to move laterally on the outer wall of the slide bar 304 without affecting the rotation of the second adjusting bevel gear 307 driven by the slide bar 304. The cooperation between the first screw 302, the transmission belt group 311, and the third screw 312 makes the lateral displacement of the U-shaped block 303 more stable.

[0024] Please see Figure 1-8 The present invention provides a technical solution: an eccentric processing device for removing edge defects of seed crystals. The grinding mechanism 8 includes a first mounting frame 801 and a synchronous belt assembly 804. A rotating shaft 802 is rotatably mounted on the side of the first mounting frame 801 away from the crystal ingot 11. A grinding wheel 803 is rotatably mounted on the side of the rotating shaft 802 close to the crystal ingot 11. The synchronous belt assembly 804 connects the rotating shaft 802 and the grinding wheel 803, so that there is a power transmission relationship between the rotating shaft 802 and the grinding wheel 803. The linkage mechanism 6 includes a first bevel gear 601, which is fixedly installed on the outer wall of the output shaft of the output motor 2. A second bevel gear 602 is meshed with one side of the first bevel gear 601. A reversing mechanism 7 is fixedly connected to one side of the second bevel gear 602. A third bevel gear 603 is fixedly connected to one side of the reversing mechanism 7. A fourth bevel gear 604 is meshed with one side of the third bevel gear 603. The fourth bevel gear 604 is fixedly installed at the bottom of the rotating shaft 802. The reversing mechanism 7 includes a second mounting bracket 701, on the top of which a first gear 702 is rotatably mounted. A second gear 703 is meshed with the inside of the first gear 702. A first gear 704 is meshed with one side of the second gear 703. A second gear 705 is meshed with one side of the first gear 704. A first connecting rod 706 is fixedly connected to one side of the first gear 702. The first connecting rod 706 is fixedly mounted on one side of the second bevel gear 602. A second connecting rod 707 is fixedly mounted on one side of the second gear 705. A third connecting rod 708 is slidably mounted inside the second connecting rod 707. A plurality of second limiting protrusions 709 are provided on the outer wall of the third connecting rod 708.

[0025] The specific implementation method is as follows: The output motor 2 drives the adjustment mechanism 3 and the clamping mechanism 4 to rotate. During this process, the cooperation between the first bevel gear 601, the second bevel gear 602, the third bevel gear 603, and the fourth bevel gear 604 drives the rotating shaft 802 to rotate at the same speed as the adjustment mechanism 3. The cooperation between the rotating shaft 802 and the synchronous belt assembly 804 drives the grinding wheel 803 to rotate at the same speed as the crystal ingot 11. During this process, the cooperation between the first gear disc 702, the second gear disc 703, the first gear 704, and the second gear 705 makes the rotation directions between the first connecting rod 706 and the second connecting rod 707 opposite, and finally makes the grinding wheel 803 and the crystal ingot 11 rotate in the same direction at the same speed.

[0026] Please see Figure 9-11 The present invention provides a technical solution: an eccentric processing device for removing edge defects of seed crystals, wherein the tensioning mechanism 9 includes a first tensioning frame 901, the first tensioning frame 901 is sleeved and installed on the outer wall of the rotating shaft 802, a second tensioning frame 902 is slidably installed inside the first tensioning frame 901, the second tensioning frame 902 is fixedly installed on the top of the equipment box 1, a through-shaft type lead screw motor 903 is threadedly connected to the outer wall of the first tensioning frame 901, a tension spring 904 is fixedly connected to one side of the through-shaft type lead screw motor 903, the other end of the tension spring 904 is fixedly connected to one side of the second tensioning frame 902, and limit rods 906 are fixedly installed on both the left and right sides of the second tensioning frame 902, and the through-shaft type lead screw motor 903 is slidably installed on the outer wall of the limit rod 906; The limiting mechanism 10 includes a first mounting block 1001 and a second mounting block 1004. The first mounting block 1001 is fixedly mounted on one side of the first tensioning bracket 901, and the second mounting block 1004 is fixedly mounted on the top of the equipment box 1. A limiting groove 1002 is formed inside the first mounting block 1001, and an adjusting screw 1005 is rotatably mounted inside the second mounting block 1004. A limiting post 1003 is threadedly connected to the outer wall of the adjusting screw 1005, and the limiting post 1003 is slidably mounted inside the limiting groove 1002. A scale line 1008 is provided on one side of the first mounting block 1001, and an observation pointer 1006 is fixedly mounted on the top of the limiting post 1003. An observation window 1007 is formed inside the observation pointer 1006 and is located on one side of the scale line 1008. A second adjusting knob 1009 is rotatably mounted on one side of the second mounting block 1004 and is fixedly connected to one side of the adjusting screw 1005.

[0027] The specific implementation method is as follows: through the cooperation between the first tensioning frame 901, the second tensioning frame 902, the through-shaft lead screw motor 903, and the tension spring 904, a tension force is provided to the grinding mechanism 8 towards the crystal ingot 11, so that the grinding wheel 803 presses the surface of the crystal ingot 11 for grinding. During this process, the tension is monitored in real time by the tension sensor 905, and the tension of the tension spring 904 is changed by changing the position of the through-shaft lead screw motor 903 on the outer wall of the first tensioning frame 901, thereby controlling the tension towards the crystal ingot 11 and adjusting the pressure of the grinding wheel 803 on the crystal ingot 11. During this process, the through-shaft lead screw motor 903 is restricted by the limit rod 906, so that the through-shaft lead screw motor 903 can only move on the outer wall of the first tensioning frame 901 instead of rotating, ensuring that the through-shaft lead screw motor 903 will only adjust its position on the outer wall of the first tensioning frame 901 when it starts. The grinding wheel 803 presses against the first mounting block 1001, the limiting groove 1002, and the limiting post 1003 to limit the displacement distance of the second tensioning frame 902, thus limiting the displacement distance of the grinding wheel 803. By adjusting the fit between the screw 1005 and the limiting post 1003, the limiting mechanism 10 can change the specific limitation of the second tensioning frame 902, thus limiting the displacement distance of the grinding wheel 803 to the outer wall of the position where the ingot 11 needs to be retained. During this process, the cooperation between the scale line 1008, the observation pointer 1006, and the observation window 1007 allows the staff to accurately adjust the limiting distance of the limiting mechanism 10, and the second adjustment knob 1009 facilitates the user to rotate the adjustment screw 1005.

[0028] Working principle: When using the eccentric processing device for removing edge defects of seed crystals, the ingot 11 is placed on top of the clamping mechanism 4. The cylinder 404 is activated, and the two sets of jaws 403 move towards the center of the clamping disk 401. During this process, through the cooperation between the clamping disk 401, the second movable block 406, the synchronous connecting rod 405, and the jaws 403, several jaws 403 move synchronously towards the inside of the clamping disk 401, clamping the ingot 11 on the vertical central axis of the clamping mechanism 4. Then, the transparent disk 501 is attached to the surface of the ingot 11. After moving back and forth for comparison, the part that needs to be retained is determined. The center of the part that needs to be retained is marked on the surface of the ingot 11 through the positioning hole 502. The distance between the center of the part that needs to be retained and the center of the ingot 11 on the X and Y axes is measured by measuring means. Then, according to the above data, the two sets of first adjustment knobs 313 are rotated to move the clamping mechanism 4 on top of the adjustment mechanism 3, so that the center of the retained part and the center of the mounting disk 301 are on the same vertical line. In the above process, the first screw 302 is rotated, and the first movable block 309 is displaced laterally under the cooperation between the first screw 302 and the U-shaped block 303. The slide bar 304 drives the first adjusting bevel gear 306 to rotate. Under the cooperation between the first adjusting bevel gear 306, the second adjusting bevel gear 307, the second screw 308, and the first movable block 309, the first movable block 309 is displaced longitudinally. Finally, the connecting plate 310 changes the position of the clamping mechanism 4 at the top of the adjusting mechanism 3. Specifically, the first limiting protrusion 305 allows the U-shaped block 303 to move laterally on the outer wall of the slide bar 304 without affecting the rotation of the second adjusting bevel gear 307 driven by the slide bar 304. The cooperation between the first screw 302, the transmission belt group 311, and the third screw 312 makes the lateral displacement of the U-shaped block 303 more stable. The output motor 2 drives the adjustment mechanism 3 and the clamping mechanism 4 to rotate. During this process, the cooperation between the first bevel gear 601, the second bevel gear 602, the third bevel gear 603, and the fourth bevel gear 604 drives the rotating shaft 802 to rotate at the same speed as the adjustment mechanism 3. The cooperation between the rotating shaft 802 and the synchronous belt assembly 804 drives the grinding wheel 803 to rotate at the same speed as the crystal ingot 11. During this process, the cooperation between the first gear disc 702, the second gear disc 703, the first gear 704, and the second gear 705 makes the rotation directions between the first connecting rod 706 and the second connecting rod 707 opposite, and finally makes the grinding wheel 803 and the crystal ingot 11 rotate in the same direction at the same speed. The first tensioning frame 901, the second tensioning frame 902, the through-shaft lead screw motor 903, and the tension spring 904 work together to provide a tension force towards the crystal ingot 11 for the grinding mechanism 8, so that the grinding wheel 803 presses against the surface of the crystal ingot 11 for grinding. During this process, the tension force is monitored in real time by the tension sensor 905, and the tension of the tension spring 904 is changed by changing the position of the through-shaft lead screw motor 903 on the outer wall of the first tensioning frame 901, thereby controlling the tension force towards the crystal ingot 11 and adjusting the pressure of the grinding wheel 803 on the crystal ingot 11. During this process, the through-shaft lead screw motor 903 is restricted by the limit rod 906, so that the through-shaft lead screw motor 903 can only move on the outer wall of the first tensioning frame 901 instead of rotating, ensuring that the through-shaft lead screw motor 903 will only adjust its position on the outer wall of the first tensioning frame 901 when it starts. The grinding wheel 803 presses against the first mounting block 1001, the limiting groove 1002, and the limiting post 1003 to limit the displacement distance of the second tensioning frame 902, thus limiting the displacement distance of the grinding wheel 803. By adjusting the fit between the screw 1005 and the limiting post 1003, the limiting mechanism 10 can change the specific limitation of the second tensioning frame 902, thus limiting the displacement distance of the grinding wheel 803 to the outer wall of the position where the ingot 11 needs to be retained. During this process, the cooperation between the scale line 1008, the observation pointer 1006, and the observation window 1007 allows the staff to accurately adjust the limiting distance of the limiting mechanism 10, and the second adjustment knob 1009 facilitates the user to rotate the adjustment screw 1005.

[0029] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An eccentric processing device for removing edge defects of seed crystals, comprising an equipment box (1) and a positioning component (5), wherein an output motor (2) is fixedly installed inside the equipment box (1), the output shaft of the output motor (2) is fixedly connected to an adjustment mechanism (3) via a coupling, a clamping mechanism (4) is fixedly installed on the top of the adjustment mechanism (3), an ingot (11) is fixedly installed on the top of the clamping mechanism (4), a grinding mechanism (8) is movably installed on one side of the clamping mechanism (4), a linkage mechanism (6) is provided on the top of the output motor (2), the output shaft of the output motor (2) is fixedly connected to the bottom of the grinding mechanism (8) via the linkage mechanism (6), a reversing mechanism (7) is fixedly installed inside the linkage mechanism (6), a tensioning mechanism (9) is fixedly installed on the top of the equipment box (1), and a limiting mechanism (10) is fixedly installed on one side of the tensioning mechanism (9), characterized in that: The positioning component (5) includes a transparent disk (501), and a positioning hole (502) is provided at the center of the transparent disk (501). The clamping mechanism (4) includes a clamping disk (401), the inside of which is provided with several sliding grooves (402), and the inside of the sliding grooves (402) is provided with slidably mounted claws (403). The bottom of two sets of claws (403) is fixedly mounted with cylinders (404), and the bottom of the claws (403) is rotatably mounted with synchronous connecting rods (405). The bottom of the clamping disk (401) is rotatably mounted with a second movable block (406), and one end of several synchronous connecting rods (405) is rotatably mounted on the bottom of the second movable block (406). The adjustment mechanism (3) includes a mounting plate (301), a first screw (302) is rotatably mounted inside the mounting plate (301), a U-shaped block (303) is threadedly connected to the outer wall of the first screw (302), a slide rod (304) is rotatably mounted inside the mounting plate (301), a first limiting protrusion (305) is provided on the outer wall of the slide rod (304), a first adjusting bevel gear (306) is rotatably mounted inside the U-shaped block (303), the slide rod (304) is slidably mounted inside the first adjusting bevel gear (306), a second adjusting bevel gear (307) is meshed with one side of the first adjusting bevel gear (306), a second screw (308) is fixedly connected to one side of the second adjusting bevel gear (307), a first movable block (309) is threadedly connected to the outer wall of the second screw (308), a connecting plate (310) is fixedly connected to the top of the first movable block (309), and the connecting plate (310) is fixedly mounted at the bottom of the clamping mechanism (4).

2. The eccentric processing apparatus for removing seed crystal edge defects according to claim 1, characterized in that, The adjustment mechanism (3) further includes a third screw (312) and a transmission belt assembly (311). The transmission belt assembly (311) connects the first screw (302) and the third screw (312), so that there is a power transmission relationship between the first screw (302) and the third screw (312). The third screw (312) is threadedly connected inside the U-shaped block (303) and is rotatably installed inside the mounting plate (301).

3. The eccentric processing apparatus for removing seed crystal edge defects according to claim 1, characterized in that, The adjustment mechanism (3) further includes two sets of first adjustment knobs (313), which are respectively fixedly connected to one side of the first screw (302) and the slide (304), and are rotatably mounted on the outer wall of the mounting plate (301).

4. The eccentric processing apparatus for removing seed crystal edge defects according to claim 1, characterized in that, The transparent disk (501) is made of PP or PFA, and the thickness of the transparent disk (501) is 1-3mm.

5. The eccentric processing apparatus for removing seed crystal edge defects according to claim 1, characterized in that, The grinding mechanism (8) includes a first mounting frame (801) and a timing belt assembly (804). A rotating shaft (802) is rotatably mounted on the side of the first mounting frame (801) away from the ingot (11). A grinding wheel (803) is rotatably mounted on the side of the rotating shaft (802) close to the ingot (11). The timing belt assembly (804) connects the rotating shaft (802) and the grinding wheel (803), so that there is a power transmission relationship between the rotating shaft (802) and the grinding wheel (803).

6. The eccentric processing apparatus for removing seed crystal edge defects according to claim 1, characterized in that, The linkage mechanism (6) includes a first bevel gear (601), which is fixedly installed on the outer wall of the output shaft of the output motor (2). A second bevel gear (602) is meshed with one side of the first bevel gear (601). A reversing mechanism (7) is fixedly connected to one side of the second bevel gear (602). A third bevel gear (603) is fixedly connected to one side of the reversing mechanism (7). A fourth bevel gear (604) is meshed with one side of the third bevel gear (603). The fourth bevel gear (604) is fixedly installed at the bottom of the rotating shaft (802).

7. The eccentric processing apparatus for removing seed crystal edge defects according to claim 1, characterized in that, The reversing mechanism (7) includes a second mounting bracket (701), on which a first gear (702) is rotatably mounted. A second gear (703) is meshed inside the first gear (702). A first gear (704) is meshed on one side of the second gear (703). A second gear (705) is meshed on one side of the first gear (704). A first connecting rod (706) is fixedly connected to one side of the first gear (702). The first connecting rod (706) is fixedly mounted on one side of the second bevel gear (602). A second connecting rod (707) is fixedly mounted on one side of the second gear (705). A third connecting rod (708) is slidably mounted inside the second connecting rod (707). A plurality of second limiting protrusions (709) are provided on the outer wall of the third connecting rod (708).

8. The eccentric processing apparatus for removing seed crystal edge defects according to claim 1, characterized in that, The tensioning mechanism (9) includes a first tensioning frame (901), which is sleeved on the outer wall of the rotating shaft (802). A second tensioning frame (902) is slidably installed inside the first tensioning frame (901). The second tensioning frame (902) is fixedly installed on the top of the equipment box (1). A through-shaft type screw motor (903) is threadedly connected to the outer wall of the first tensioning frame (901). A tension spring (904) is fixedly connected to one side of the through-shaft type screw motor (903). The other end of the tension spring (904) is fixedly connected to one side of the second tensioning frame (902). Limiting rods (906) are fixedly installed on both the left and right sides of the second tensioning frame (902). The through-shaft type screw motor (903) is slidably installed on the outer wall of the limiting rod (906).

9. The eccentric processing apparatus for removing seed crystal edge defects according to claim 1, characterized in that, The limiting mechanism (10) includes a first mounting block (1001) and a second mounting block (1004). The first mounting block (1001) is fixedly mounted on one side of the first tensioning frame (901), and the second mounting block (1004) is fixedly mounted on the top of the equipment box (1). A limiting groove (1002) is formed inside the first mounting block (1001), and an adjusting screw (1005) is rotatably mounted inside the second mounting block (1004). A limiting post (1003) is threadedly connected to the outer wall of the adjusting screw (1005). The first mounting block (1001) is slidably installed inside the limiting groove (1002). A scale line (1008) is provided on one side of the first mounting block (1001). An observation pointer (1006) is fixedly installed on the top of the limiting post (1003). An observation window (1007) is opened inside the observation pointer (1006). The observation window (1007) is located on one side of the scale line (1008). A second adjustment knob (1009) is rotatably installed on one side of the second mounting block (1004). The second adjustment knob (1009) is fixedly connected to one side of the adjustment screw (1005).

10. An eccentric processing method for removing seed crystal edge defects, used in the eccentric processing apparatus for removing seed crystal edge defects as described in any one of claims 1-9, characterized in that, The process includes the following steps: Step 1: Place the crystal ingot (11) on top of the clamping mechanism (4), and start the cylinder (404) to move the two sets of jaws (403) toward the center of the clamping plate (401). During this process, through the cooperation between the clamping plate (401), the second movable block (406), the synchronous connecting rod (405), and the jaws (403), several jaws (403) move synchronously toward the inside of the clamping plate (401), clamping the crystal ingot (11) on the vertical central axis of the clamping mechanism (4). Then, attach the transparent plate (501) to the plate. After moving back and forth to compare, determine the part that needs to be retained. Mark the center of the part that needs to be retained on the surface of the crystal ingot (11) through the positioning hole (502). Measure the distance between the center of the part that needs to be retained and the center of the crystal ingot (11) on the X and Y axes. Then, based on the measured distance, rotate the two sets of first adjustment knobs (313) to move the clamping mechanism (4) on the top of the adjustment mechanism (3), so that the center of the retained part and the center of the mounting plate (301) are on the same vertical line. In the above process, rotating the first screw (302) causes the first movable block (309) to move laterally under the cooperation between the first screw (302) and the U-shaped block (303). Rotating the slide rod (304) drives the first adjusting bevel gear (306) to rotate. Under the cooperation between the first adjusting bevel gear (306), the second adjusting bevel gear (307), the second screw (308), and the first movable block (309), the first movable block (309) moves longitudinally. Finally, the connecting plate (310) changes the position of the clamping mechanism (4) at the top of the adjusting mechanism (3). Specifically, the first limiting protrusion (305) allows the U-shaped block (303) to move laterally on the outer wall of the slide rod (304) without affecting the slide rod (304) driving the second adjusting bevel gear (307) to rotate. Through the cooperation between the first screw (302), the transmission belt group (311), and the third screw (312), the U-shaped block (303) moves more stably during lateral displacement. Step 2: The output motor (2) drives the adjustment mechanism (3) and the clamping mechanism (4) to rotate. During this process, the first bevel gear (601), the second bevel gear (602), the third bevel gear (603), and the fourth bevel gear (604) work together to drive the rotating shaft (802) to rotate at the same speed as the adjustment mechanism (3). The rotating shaft (802) and the synchronous belt assembly (804) work together to drive the grinding wheel (803) to rotate at the same speed as the crystal ingot (11). During this process, the first gear plate (702), the second gear plate (703), the first gear (704), and the second gear (705) work together to make the rotation directions of the first connecting rod (706) and the second connecting rod (707) opposite, and finally make the grinding wheel (803) and the crystal ingot (11) rotate in the same direction at the same speed. Step 3: Through the cooperation between the first tensioning frame (901), the second tensioning frame (902), the through-shaft screw motor (903), and the tension spring (904), a tension force is provided to the grinding mechanism (8) towards the ingot (11), so that the grinding wheel (803) squeezes the surface of the ingot (11) for grinding. During this process, the tension is monitored in real time by the tension sensor (905), and the tension of the tension spring (904) is changed by changing the position of the through-shaft screw motor (903) on the outer wall of the first tensioning frame (901), thereby controlling the tension towards the ingot (11 and adjusting the pressure of the grinding wheel (803) on the ingot (11). During this process, the through-shaft screw motor (903) is restricted by the limiting rod (906), so that the through-shaft screw motor (903) can only move on the outer wall of the first tensioning frame (901) instead of rotating, ensuring that the through-shaft screw motor (903) will only adjust its position on the outer wall of the first tensioning frame (901) when it starts. Step 4: The grinding wheel (803) presses against the first mounting block (1001), the limiting groove (1002), and the limiting post (1003) to restrict the displacement distance of the second tensioning frame (902), thus limiting the displacement distance of the grinding wheel (803). By adjusting the fit between the screw (1005) and the limiting post (1003), the limiting mechanism (10) can change the specific restriction of the second tensioning frame (902), thus limiting the displacement distance of the grinding wheel (803) to the outer wall of the position that the ingot (11) needs to retain. During this process, the coordination between the scale line (1008), the observation pointer (1006), and the observation window (1007) allows the staff to accurately adjust the limiting distance of the limiting mechanism (10), and the second adjustment knob (1009) facilitates the user to rotate the adjustment screw (1005).

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