Microfluidic Chip

Abstract

The present application provides a microfluidic chip, which includes a driving substrate and a detection substrate. The driving substrate includes a switch electrode. When the droplet to be analyzed moves, it can overlap with the switch electrode in the thickness direction of the microfluidic chip. The detection substrate includes a semiconductor, a first electrode, a second electrode, a protective layer and a light control element. The first electrode and the second electrode are respectively connected to the semiconductor. The semiconductor overlaps with the switch electrode, the light control element is electrically connected to the second electrode, and the first electrode is electrically connected to the power supply. The switch electrode is used to form a basic electric field, and the droplet to be analyzed is used to convert the basic electric field at its own position into a control electric field. The control electric field is used to conduct the first electrode and the second electrode that overlap with the droplet to be analyzed, and the light control element transmits ambient light or emits light after being energized. The position of the droplet to be analyzed is determined by observing whether the light control element transmits light or emits light, so that the microfluidic chip can detect the position of the droplet to be analyzed in real time.

Description

Technical Field

[0001] The present application relates to the field of microfluidics technology, and in particular to a microfluidics chip. Background Art

[0002] Microfluidics integrates the fundamental operational elements of biological, chemical, and medical analysis, including sample preparation, reaction, separation, and detection, onto a micron-scale chip, automating the entire analytical process. As the primary platform for implementing microfluidics, microfluidic chips offer advantages such as high throughput, rapid speed, low power consumption, and minimal material consumption.

[0003] A droplet to be analyzed is placed into a microfluidic chip, which can drive the droplet to move within it. Furthermore, researchers would like the microfluidic chip to be able to detect the position of the droplet in real time, allowing for further manipulation or processing of the droplet. However, existing microfluidic chips are unable to detect the position of the droplet in real time.

[0004] Therefore, how to solve the problem that the microfluidic chip in the prior art cannot detect the position of the droplet to be analyzed in real time is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0005] In view of the above-mentioned deficiencies in the prior art, the purpose of the present application is to provide a microfluidic chip, which aims to solve the problem that the microfluidic chip in the prior art cannot detect the position of the droplet to be analyzed in real time.

[0006] To address the aforementioned technical issues, embodiments of the present application provide a microfluidic chip comprising a drive substrate and a detection substrate disposed opposite and spaced apart from each other. Droplets to be analyzed are accommodated between the drive substrate and the detection substrate, and the drive substrate is configured to drive the droplets to be analyzed to move along the surface of the drive substrate. The drive substrate includes a plurality of switch electrodes spaced apart from each other, and when the droplets to be analyzed move, they can overlap with the switch electrodes in the thickness direction of the microfluidic chip.

[0007] The detection substrate includes a first substrate, multiple semiconductors, multiple first electrodes, multiple second electrodes, a protective layer, and at least one light-control element. The first substrate is opposite to the drive substrate and spaced apart. The multiple semiconductors, multiple first electrodes, and multiple second electrodes are arranged on the surface of the first substrate facing away from the drive substrate. The multiple semiconductors are spaced apart from each other. One first electrode and one second electrode are respectively connected to one semiconductor. The protective layer covers the multiple semiconductors, multiple first electrodes, and multiple second electrodes to the first substrate. The light-control element is arranged on the surface of the protective layer facing away from the first substrate. The orthographic projection of one semiconductor in the thickness direction of the microfluidic chip coincides with the orthographic projection of one switch electrode in the thickness direction of the microfluidic chip. One light-control element is electrically connected to at least one second electrode, and each first electrode is electrically connected to a power supply.

[0008] The switch electrode is used to form a base electric field. When the droplet to be analyzed moves to overlap the switch electrode in the thickness direction of the microfluidic chip, the droplet to be analyzed is used to convert the base electric field at its position into a control electric field. The control electric field is used to connect the first electrode and the second electrode that overlap the droplet to be analyzed. When the light control element is energized, it transmits ambient light or emits light.

[0009] To summarize, the droplets to be analyzed in the microfluidic chip provided in the embodiment of the present application can control the ambient light or luminescence of the light-control element that coincides with itself. Therefore, the microfluidic chip of the present application can determine the position of the droplets to be analyzed by observing whether the light-control element is transparent or luminous, thereby enabling the microfluidic chip to detect the position of the droplets to be analyzed in real time.

[0010] In one possible embodiment, there are multiple light-control elements, one light-control element is electrically connected to one second electrode, and the orthographic projection of one light-control element in the thickness direction of the microfluidic chip coincides with the orthographic projection of one semiconductor in the thickness direction of the microfluidic chip.

[0011] In another possible embodiment, a semiconductor, a switching electrode that overlaps in the thickness direction of the microfluidic chip, and a first electrode and a second electrode connected to the semiconductor form a transistor. The second electrodes of multiple transistors are electrically connected to a single light-controlled element, and the first electrodes of the multiple transistors electrically connected to the single light-controlled element have different potentials.

[0012] In an exemplary embodiment, the drive substrate further includes a plurality of mutually spaced drive electrodes, each of which is spaced apart from the switch electrode. The detection substrate further includes a common electrode, which is disposed on a surface of the first substrate facing away from the semiconductor. The common electrode and the drive electrode are configured to form a drive electric field. The drive electric field is configured to drive the droplets to be analyzed. The common electrode is provided with a plurality of perforations, wherein the orthographic projection of one of the perforations in the thickness direction of the microfluidic chip coincides with the orthographic projection of one of the switch electrodes in the thickness direction of the microfluidic chip.

[0013] To address the above technical issues, embodiments of the present application further provide a microfluidic chip comprising a drive substrate and a detection substrate disposed opposite and spaced apart from each other. Droplets to be analyzed are accommodated between the drive substrate and the detection substrate, and the drive substrate is configured to drive the droplets to be analyzed to move on the surface of the drive substrate. Auxiliary droplets are also accommodated between the drive substrate and the detection substrate, and the drive substrate is configured to drive the auxiliary droplets to move on the surface of the drive substrate. The auxiliary droplets move in lockstep with the droplets to be analyzed.

[0014] The driving substrate includes a plurality of switch electrodes spaced apart from each other, and the auxiliary droplet can overlap with the switch electrodes in the thickness direction of the microfluidic chip when moving.

[0015] The detection substrate includes a first substrate, multiple semiconductors, multiple first electrodes, multiple second electrodes, a protective layer, and at least one light-control element. The first substrate is opposite to the drive substrate and spaced apart. The multiple semiconductors, multiple first electrodes, and multiple second electrodes are arranged on the surface of the first substrate facing away from the drive substrate. The multiple semiconductors are spaced apart from each other. One first electrode and one second electrode are respectively connected to one semiconductor. The protective layer covers the multiple semiconductors, multiple first electrodes, and multiple second electrodes to the first substrate. The light-control element is arranged on the surface of the protective layer facing away from the first substrate. The orthographic projection of one semiconductor in the thickness direction of the microfluidic chip coincides with the orthographic projection of one switch electrode in the thickness direction of the microfluidic chip. One light-control element is electrically connected to at least one second electrode, and each first electrode is electrically connected to a power supply.

[0016] Among them, the switching electrode is used to form a basic electric field. When the auxiliary droplet moves to coincide with the switching electrode in the thickness direction of the microfluidic chip, the auxiliary droplet is used to convert the basic electric field at its own position into a control electric field. The control electric field is used to connect the first pole and the second pole that coincide with the auxiliary droplet. After the light control element is energized, it transmits ambient light or emits light.

[0017] In summary, the auxiliary droplet in the microfluidic chip provided in the embodiments of the present application can control the ambient light or luminescence of the light-control element that coincides with it. Therefore, the position of the auxiliary droplet can be determined by observing whether the light-control element transmits light or emits light. Because the droplet to be analyzed moves in sync with the auxiliary droplet, determining the position of the auxiliary droplet can also determine the position of the droplet to be analyzed, enabling the microfluidic chip to detect the position of the droplet to be analyzed in real time.

[0018] In one possible embodiment, there are multiple light-control elements, one light-control element is electrically connected to one second electrode, and the orthographic projection of one light-control element in the thickness direction of the microfluidic chip coincides with the orthographic projection of one semiconductor in the thickness direction of the microfluidic chip.

[0019] In another possible embodiment, a semiconductor, a switching electrode that overlaps in the thickness direction of the microfluidic chip, and a first electrode and a second electrode connected to the semiconductor form a transistor. The second electrodes of multiple transistors are electrically connected to a single light-controlled element, and the first electrodes of the multiple transistors electrically connected to the single light-controlled element have different potentials.

[0020] In order to solve the above technical problems, an embodiment of the present application also provides a microfluidic chip, which includes a first auxiliary substrate and a second auxiliary substrate that are arranged relative to each other and spaced apart, and droplets to be analyzed are accommodated between the first auxiliary substrate and the second auxiliary substrate, and the first auxiliary substrate is used to drive the droplets to be analyzed to move on the surface of the first auxiliary substrate. The microfluidic chip also includes a driving substrate and a detection substrate, the driving substrate is arranged on the surface of the second auxiliary substrate facing away from the first auxiliary substrate, the detection substrate is arranged on the side of the driving substrate facing away from the second auxiliary substrate, and the detection substrate is spaced apart from the driving substrate, and auxiliary droplets are accommodated between the driving substrate and the detection substrate. The driving substrate is used to drive the auxiliary droplets to move on the surface of the driving substrate, and the auxiliary droplets move synchronously with the droplets to be analyzed.

[0021] The driving substrate includes a plurality of switch electrodes spaced apart from each other, and the auxiliary droplet can overlap with the switch electrodes in the thickness direction of the microfluidic chip when moving.

[0022] The detection substrate includes a first substrate, multiple semiconductors, multiple first electrodes, multiple second electrodes, a protective layer, and at least one light-control element. The first substrate is opposite to the drive substrate and spaced apart. The multiple semiconductors, multiple first electrodes, and multiple second electrodes are arranged on the surface of the first substrate facing away from the drive substrate. The multiple semiconductors are spaced apart from each other, and one first electrode and one second electrode are respectively connected to one semiconductor. The protective layer covers the multiple semiconductors, multiple first electrodes, and multiple second electrodes to the first substrate. The light-control element is arranged on the surface of the protective layer facing away from the first substrate. The orthographic projection of one semiconductor in the thickness direction of the microfluidic chip coincides with the orthographic projection of one switch electrode in the thickness direction of the microfluidic chip. One light-control element is electrically connected to at least one second electrode, and each first electrode is electrically connected to a power supply.

[0023] The switch electrode is used to form a base electric field. When the auxiliary droplet moves to overlap with the switch electrode in the thickness direction of the microfluidic chip, the auxiliary droplet is used to convert the base electric field at its position into a control electric field. The control electric field is used to connect the first electrode and the second electrode that overlap with the auxiliary droplet, so that the light control element emits light or transmits ambient light when powered.

[0024] In summary, the auxiliary droplet in the microfluidic chip provided in the embodiments of the present application can control the ambient light or luminescence of the light-control element that coincides with it. Therefore, the position of the auxiliary droplet can be determined by observing whether the light-control element is transparent or luminous. Because the droplet to be analyzed moves synchronously with the auxiliary droplet, the position of the droplet to be analyzed can also be determined after determining the position of the auxiliary droplet, enabling the microfluidic chip to detect the position of the droplet to be analyzed in real time.

[0025] In one possible embodiment, there are multiple light-control elements, one light-control element is electrically connected to one second electrode, and the orthographic projection of one light-control element in the thickness direction of the microfluidic chip coincides with the orthographic projection of one semiconductor in the thickness direction of the microfluidic chip.

[0026] In another possible embodiment, a semiconductor, a switching electrode that overlaps in the thickness direction of the microfluidic chip, and a first electrode and a second electrode connected to the semiconductor form a transistor. The second electrodes of multiple transistors are electrically connected to a single light-controlled element, and the first electrodes of the multiple transistors electrically connected to the single light-controlled element have different potentials. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0028] Figure 1 This is a schematic diagram of the layer structure of the microfluidic chip disclosed in the first embodiment of this application;

[0029] Figure 2 This is a schematic diagram of the layer structure of the microfluidic chip disclosed in the second embodiment of this application;

[0030] Figure 3 Schematic diagram of the top view of the microfluidic chip disclosed in the third embodiment of the present application;

[0031] Figure 4 for Figure 3 The schematic cross-sectional view of the microfluidic chip shown along direction II;

[0032] Figure 5 Schematic diagram of the top view of the microfluidic chip disclosed in the fourth embodiment of the present application;

[0033] Figure 6 for Figure 5 The cross-sectional schematic diagram of the microfluidic chip shown is along the II-II direction.

[0034] Description of reference numerals:

[0035] 1-microfluidic chip; 1a-accommodation space; 2-droplet to be analyzed; 2a-first sub-droplet; 2b-second sub-droplet; 10-driving substrate; 11-second substrate; 12-driving circuit layer; 13-driving electrode; 13a-first driving electrode; 13b-second driving electrode; 14-switch electrode; 14a-first switch electrode; 14b-second switch electrode; 15-first dielectric layer; 16-first hydrophobic layer; 17-auxiliary electrode; 20-detection substrate; 21-first substrate; 22-common electrode; 22a-perforation; 23-second dielectric layer; 24-second hydrophobic layer; 25-insulation layer Edge; 26-semiconductor; 27-first electrode; 27a-first conductive end; 27b-second conductive end; 27c-third conductive end; 28-second electrode; 29-protective layer; 29a-via; 31-light control element; 32-light-shielding layer; 40-auxiliary droplet; 50-first auxiliary substrate; 51-support layer; 52-control circuit layer; 53-control electrode; 54-first insulating layer; 55-first hydrophobic layer; 60-second auxiliary substrate; 61-common electrode; 62-second insulating layer; 63-second hydrophobic layer; 311-first electrode; 312-electrochromic body; 313-second electrode. DETAILED DESCRIPTION

[0036] To facilitate understanding of the present application, a more comprehensive description of the present application will be provided below with reference to the accompanying drawings. The accompanying drawings illustrate preferred embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of the present application.

[0037] The following descriptions of the embodiments are made with reference to the accompanying drawings to illustrate specific embodiments that may be implemented in accordance with the present application. The serial numbers assigned to the components herein, such as "first," "second," etc., are merely used to distinguish the objects being described and do not have any sequential or technical meaning. References to "connection" and "coupling" in this application include both direct and indirect connections (couplings) unless otherwise specified. Directional terms mentioned in this application, such as "upper," "lower," "front," "back," "left," "right," "inner," "outer," and "side," are merely referenced to the directions in the accompanying drawings. Therefore, the directional terms used are intended to better and more clearly illustrate and understand this application, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting this application.

[0038] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections; they can refer to direct connections, indirect connections through an intermediate medium, or internal connections between two components. A person of ordinary skill in the art will understand the specific meanings of the above terms in this application based on the specific circumstances. It should be noted that the terms "first," "second," and so on, in the specification, claims, and accompanying drawings of this application are used to distinguish between different objects, not to describe a specific order. Furthermore, the terms "include," "may include," "comprise," or "may include" as used in this application indicate the presence of the corresponding functions, operations, components, etc. disclosed, and do not limit the presence or absence of one or more additional functions, operations, components, etc. Furthermore, the terms "include" or "comprising" indicate the presence of the corresponding features, numbers, steps, operations, elements, components, or combinations thereof disclosed in the specification, and do not exclude the presence or addition of one or more other features, numbers, steps, operations, elements, components, or combinations thereof, and are intended to cover non-exclusive inclusions. It should also be understood that "at least one" described herein means one or more, such as one, two or three, etc., and "plurality" means at least two, such as two or three, etc., unless otherwise clearly defined.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0040] Microfluidic chips are used in drug screening, microbial identification, and medical equipment. They have the advantages of high throughput, fast speed, low power consumption, and low material consumption. Microfluidic chips can also drive the droplets to be analyzed to move within the microfluidic chip. Figure 1 , Figure 1 This is a schematic diagram of the layer structure of the microfluidic chip disclosed in the first embodiment of this application. The microfluidic chip 1 includes a drive substrate 10 and a detection substrate 20. The drive substrate 10 and the detection substrate 20 are arranged opposite each other and spaced apart. The drive substrate 10 and the detection substrate 20 enclose a housing space 1a for accommodating a droplet 2 to be analyzed. The drive substrate 10 is used to drive the droplet 2 to be analyzed to move within the housing space 1a, and the detection substrate 20 is used to detect the position of the droplet 2 to be analyzed.

[0041] For the convenience of description, Figure 1 As shown, the width direction of the microfluidic chip 1 is defined as the X-axis direction, the length direction of the microfluidic chip 1 is defined as the Y-axis direction, and the height direction of the microfluidic chip 1 is defined as the Z-axis direction, that is, the direction in which the driving substrate 10 points to the detection substrate 20, that is, the direction in which the driving substrate 10 and the detection substrate 20 are spaced apart and stacked. Specifically, the detection substrate 20 is arranged above the driving substrate 10 and is spaced a preset distance from the driving substrate 10. Among them, the X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other, and the Z-axis direction is also the thickness direction of the microfluidic chip 1.

[0042] In the embodiment of the present application, the driving substrate 10 includes a second substrate 11, a driving circuit layer 12, a driving electrode 13, a switch electrode 14, a first dielectric layer 15, and a first hydrophobic layer 16. The driving circuit layer 12 is arranged on the surface of the second substrate 11 facing the Z-axis direction, that is, the driving circuit layer 12 is arranged on the side of the second substrate 11 facing the detection substrate 20. The driving electrode 13 and the switch electrode 14 are both arranged on the surface of the driving circuit layer 12 facing away from the second substrate 11, and the driving electrode 13 and the switch electrode 14 are arranged spaced apart from each other. The first dielectric layer 15 is arranged on the surface of the driving circuit layer 12 facing away from the second substrate 11, and the first dielectric layer 15 covers the driving electrode 13 and the switch electrode 14. The first dielectric layer 15 is also located around the driving electrode 13 and the switch electrode 14, that is, the first dielectric layer 15 covers the driving electrode 13 and the switch electrode 14 to the surface of the driving circuit layer 12 facing away from the second substrate 11. The first hydrophobic layer 16 is disposed on the surface of the first dielectric layer 15 facing away from the drive circuit layer 12, that is, the first hydrophobic layer 16 is disposed on the surface of the first dielectric layer 15 facing the detection substrate 20. The droplets 2 to be analyzed are located on the surface of the first hydrophobic layer 16 facing away from the first dielectric layer 15. The first dielectric layer 15 is used to insulate the drive electrode 13 from the switch electrode 14, the drive electrode 13 from the first hydrophobic layer 16, and the switch electrode 14 from the first hydrophobic layer 16.

[0043] It should be noted that the second substrate 11, the driving circuit layer 12, the driving electrode 13, the switch electrode 14, the first dielectric layer 15 and the first hydrophobic layer 16 can all be made of transparent materials, so that the driving substrate 10 can pass through the ambient light, wherein the ambient light is emitted from the side of the driving substrate 10 facing away from the detection substrate 20 to the side of the detection substrate 20 facing away from the driving substrate 10.

[0044] In an exemplary embodiment, Figure 1 The number of drive electrodes 13 in the embodiment is two. In practice, the number of drive electrodes 13 may be greater than two, that is, the number of drive electrodes 13 may be multiple. The multiple drive electrodes 13 are spaced apart from each other. Each drive electrode 13 is in contact with the drive circuit layer 12, so that each drive electrode 13 is electrically connected to the drive circuit layer 12. The drive circuit layer 12 is used to supply power to the drive electrodes 13. The drive circuit layer 12 is configured with a thin film transistor with a switching function for each drive electrode 13.

[0045] In an exemplary embodiment, Figure 1The number of switch electrodes 14 in the embodiment is two. In practice, the number of switch electrodes 14 can be greater than two, that is, the number of switch electrodes 14 can be multiple. The multiple switch electrodes 14 are spaced apart from each other, and each switch electrode 14 is adjacent to each drive electrode 13. Each switch electrode 14 is in contact with the drive circuit layer 12, so that each switch electrode 14 is electrically connected to the drive circuit layer 12. The drive circuit layer 12 is used to supply power to the switch electrodes 14.

[0046] It should be noted that the potentials provided by the drive circuit layer 12 to the multiple drive electrodes 13 at the same time can be different. For example, at the same time, the drive circuit layer 12 can provide a high potential to one of the multiple drive electrodes 13 and provide a low potential to the remaining drive electrodes 13. The potential provided by the drive circuit layer 12 to the multiple switch electrodes 14 at the same time is the same, that is, the potential of each switch electrode 14 is the same.

[0047] In the present application, a driving electric field is formed between the driving electrode 13 and the detection substrate 20, and the driving electric field is used to change the surface tension of the droplet 2 to be analyzed, thereby changing the contact angle (i.e., wetting angle) of the droplet 2 to be analyzed on the first hydrophobic layer 16, so that the droplet 2 to be analyzed can move within the accommodating space 1a. For example, the driving electrode 13 includes a first driving electrode 13a and a second driving electrode 13b, and the droplet 2 to be analyzed includes a first sub-droplet 2a and a second sub-droplet 2b. The first sub-droplet 2a is Figure 1 The portion of the droplet 2 to be analyzed facing the X-axis direction, and the second sub-droplet 2b is the portion of the droplet 2 to be analyzed facing away from the X-axis direction. The first drive electrode 13a and the second drive electrode 13b are adjacent to each other and spaced apart. The orthographic projection of the first sub-droplet 2a in the Z-axis direction at least partially overlaps with the orthographic projection of the first drive electrode 13a in the Z-axis direction, and the orthographic projection of the second sub-droplet 2b in the Z-axis direction at least partially overlaps with the orthographic projection of the second drive electrode 13b in the Z-axis direction. The X-axis direction is opposite to the direction away from the X-axis.

[0048] The driving electric field formed between the driving electrode 13 and the detection substrate 20 drives the droplet 2 to move as follows: when the first driving electrode 13a forms a driving electric field with the detection substrate 20, the surface tension of the first sub-droplet 2a decreases, and the contact angle of the first sub-droplet 2a on the first hydrophobic layer 16 increases, that is, the first sub-droplet 2a moves in the X-axis direction, and the first sub-droplet 2a drives the second sub-droplet 2b to move in the X-axis direction, so that the droplet 2 to be analyzed moves in the X-axis direction as a whole. When the second driving electrode 13b forms a driving electric field with the detection substrate 20, the surface tension of the second sub-droplet 2b decreases, and the contact angle of the second sub-droplet 2b on the first hydrophobic layer 16 increases, that is, the second sub-droplet 2b moves away from the X-axis direction, and the second sub-droplet 2b drives the first sub-droplet 2a to move away from the X-axis direction, so that the droplet 2 to be analyzed moves away from the X-axis direction as a whole.

[0049] In an exemplary embodiment, the driving circuit layer 12 supplies power to the switch electrode 14 , so that the switch electrode 14 forms a basic electric field. The basic electric field will be described in detail below.

[0050] In this application implementation, please refer to Figure 1 , the detection substrate 20 is arranged on the side of the driving substrate 10 facing the Z-axis direction. The detection substrate 20 includes a first substrate 21, a common electrode 22, a second dielectric layer 23, a second hydrophobic layer 24, an insulating member 25, a semiconductor 26, a first pole 27, a second pole 28, a protective layer 29, a light control element 31 and a light shielding layer 32. The first substrate 21 is opposite to and spaced from the first hydrophobic layer 16 of the driving substrate 10, and the common electrode 22 is arranged on the surface of the first substrate 21 facing away from the Z-axis direction, that is, the common electrode 22 is arranged on the surface of the first substrate 21 facing the first hydrophobic layer 16 of the driving substrate 10. The common electrode 22 is provided with a through-hole 22a, and the through-hole 22a passes through the common electrode 22 along the Z-axis direction. The second dielectric layer 23 is arranged in the through-hole 22a of the common electrode 22 and on the surface of the common electrode 22 facing away from the first substrate 21. The second hydrophobic layer 24 is disposed on the surface of the second dielectric layer 23 facing away from the first substrate 21, that is, the second hydrophobic layer 24 is disposed on the side of the second dielectric layer 23 facing the first hydrophobic layer 16. The second dielectric layer 23 is used to insulate the common electrode 22 from the second hydrophobic layer 24, and a driving electric field is formed between the common electrode 22 and the driving electrode 13.

[0051] In an exemplary embodiment, Figure 1The number of through-holes 22a in the embodiment is two. In practice, the number of through-holes 22a can be greater than two, that is, the number of through-holes 22a can also be multiple. The multiple through-holes 22a are spaced apart from each other, and the orthographic projection of one through-hole 22a in the Z-axis direction coincides with the orthographic projection of one switch electrode 14 in the Z-axis direction. The orthographic projection of the drive electrode 13 in the Z-axis direction coincides with the orthographic projection of the common electrode 22 in the Z-axis direction.

[0052] In an exemplary embodiment, the first hydrophobic layer 16 and the second hydrophobic layer 24 enclose the accommodating space 1 a , and the droplet 2 to be analyzed is in contact with the first hydrophobic layer 16 and the second hydrophobic layer 24 , respectively.

[0053] In one embodiment, the contact angle of the droplet 2 to be analyzed on the first hydrophobic layer 16 is greater than 90 degrees, for example, 91 degrees, 100 degrees, 109 degrees, 120 degrees, 124 degrees, 140 degrees, 145 degrees, 155 degrees, 160 degrees, or other values, which are not specifically limited in this application. That is, the first hydrophobic layer 16 acts hydrophobically to the droplet 2 to be analyzed, reducing the contact area between the droplet 2 to be analyzed and the first hydrophobic layer 16, thereby facilitating the movement of the droplet 2 to be analyzed in the first hydrophobic layer 16 and maintaining the shape of the droplet 2 to be analyzed.

[0054] In one embodiment, the contact angle of the droplet 2 to be analyzed on the second hydrophobic layer 24 is greater than 90 degrees, for example, 93 degrees, 100 degrees, 107 degrees, 110 degrees, 116 degrees, 120 degrees, 125 degrees, 130 degrees, 140 degrees, 153 degrees, 160 degrees, or other values, which are not specifically limited in this application. In other words, the second hydrophobic layer 24 acts hydrophobically to the droplet 2 to be analyzed, reducing the contact area between the droplet 2 to be analyzed and the second hydrophobic layer 24, thereby facilitating the movement of the droplet 2 to be analyzed within the second hydrophobic layer 24 and maintaining the shape of the droplet 2 to be analyzed.

[0055] In this application implementation, please refer to Figure 1The insulating member 25 is disposed on the surface of the first substrate 21 facing the Z-axis direction, that is, the insulating member 25 is disposed on the surface of the first substrate 21 facing away from the drive substrate 10, that is, the common electrode 22 and the insulating member 25 are respectively disposed on opposite surfaces of the first substrate 21. The semiconductor 26, the first electrode 27, and the second electrode 28 are all disposed on the surface of the insulating member 25 facing away from the first substrate 21. The first electrode 27 and the second electrode 28 are respectively located at opposite ends of the semiconductor 26, and the first electrode 27 and the second electrode 28 are spaced apart. The protective layer 29 is disposed on the surface of the first substrate 21 facing the Z-axis direction, and the protective layer 29 covers the insulating member 25, the semiconductor 26, the first electrode 27, and the second electrode 28. That is, the protective layer 29 is disposed on the surface of the first substrate 21 facing away from the drive substrate 10, and the protective layer 29 covers the insulating member 25, the semiconductor 26, the first electrode 27, and the second electrode 28. The protective layer 29 has a via 29a formed therein. The via 29a extends through the protective layer 29 along the Z-axis, and the second electrode 28 is exposed through the via 29a. The light control element 31 is disposed within the via 29a and on the surface of the protective layer 29 facing away from the first substrate 21. The light shielding layer 32 is disposed on the surface of the protective layer 29 facing away from the first substrate 21.

[0056] It should be noted that the first base 21 , the common electrode 22 , the second dielectric layer 23 , the second hydrophobic layer 24 , the insulating member 25 and the protective layer 29 may all be made of transparent materials, so that the detection substrate 20 can transmit ambient light.

[0057] In an exemplary embodiment, Figure 1 The number of insulating members 25, semiconductors 26, first electrodes 27, and second electrodes 28 in the figure is 2. In practice, the number of insulating members 25, semiconductors 26, first electrodes 27, and second electrodes 28 can be greater than 2. That is, there are multiple insulating members 25, multiple semiconductors 26, multiple first electrodes 27, and multiple second electrodes 28. The orthographic projection of one insulating member 25 in the Z-axis direction coincides with the orthographic projection of one switch electrode 14 in the Z-axis direction, and the orthographic projection of one semiconductor 26 in the Z-axis direction coincides with the orthographic projection of one switch electrode 14 in the Z-axis direction. An insulating member 25, its orthographic projection in the Z-axis direction, and its orthographic projection coincide with a switch electrode 14, along with a semiconductor 26, a first electrode 27, and a second electrode 28 disposed thereon, constitute a transistor. The transistor can be an N-type MOS transistor or a P-type MOS transistor. The switch electrode 14 serves as the transistor's gate, and the first electrode 27 and second electrode 28 serve as the transistor's source and drain, respectively. Each first electrode 27 is electrically connected to a power source (not shown). The basic electric field formed by the switch electrode 14 cannot make the first electrode 27 and the second electrode 28 conductive.

[0058] In an exemplary embodiment, the number of the via holes 29 a is also multiple, and the multiple via holes 29 a are spaced apart from each other. The number of the via holes 29 a is the same as the number of the second poles 28 , so that each second pole 28 is exposed through a via hole 29 a.

[0059] In an exemplary embodiment, see Figure 1 The number of the light-control elements 31 is also multiple, and the multiple light-control elements 31 are spaced apart from each other. The number of the light-control elements 31 is the same as the number of the second electrodes 28, so that each light-control element 31 is electrically connected to a second electrode 28. The orthographic projection of a light-control element 31 in the Z-axis direction coincides with the orthographic projection of an insulating member 25 in the Z-axis direction. The light-control element 31 includes a first electrode 311, an electrochromic body 312, and a second electrode 313. The first electrode 311 is disposed in the via hole 29a and on the surface of the protective layer 29 facing away from the first substrate 21. The electrochromic body 312 is disposed in the via hole 29a and on the surface of the first electrode 311 facing away from the protective layer 29. The second electrode 313 is disposed on the surface of the electrochromic body 312 facing away from the first electrode 311. The first electrode 311 is electrically connected to the second electrode 28 and the electrochromic body 312 respectively. The electrochromic body 312 is also electrically connected to the second electrode 313. The electrochromic body 312 is configured to transmit ambient light after being energized.

[0060] In an exemplary embodiment, the light shielding layer 32 is connected to the peripheral side surface of each light control element 31 . The light shielding layer 32 is used to block the ambient light passing through the microfluidic chip 1 , making the ambient light passing through the electrochromic body 312 more obvious.

[0061] In a possible implementation, the electrochromic body 312 may also be replaced by a liquid crystal layer.

[0062] In one embodiment, the droplet 2 to be analyzed has a dielectric constant of a certain value, and the dielectric constant of the droplet 2 to be analyzed is greater than the dielectric constant of air. The capacitance at the location of the droplet 2 to be analyzed is greater than the capacitance at other locations, enabling the droplet 2 to be analyzed to change the strength of the basic electric field formed by the switch electrode 14. For example, an N-type MOS transistor, a first switch electrode 14a, and a second switch electrode 14b are used. The drive circuit layer 12 provides a low voltage to the first switch electrode 14a and the second switch electrode 14b. When the droplet 2 to be analyzed moves above the first switch electrode 14a, it converts the basic electric field formed by the first switch electrode 14a into a control electric field, where the strength of the control electric field is greater than that of the basic electric field. The control electric field connects the first electrode 27 and the second electrode 28 above the first switch electrode 14a, electrically connecting the light-controlled element 31 above the first switch electrode 14a to a power source. The light-controlled element 31 is transparent to ambient light. When there are no droplets 2 to be analyzed above the second switch electrode 14b, the base electric field generated by the second switch electrode 14b is insufficient to electrically connect the first electrode 27 and the second electrode 28 above the second switch electrode 14b. This disconnects the first electrode 27 and the second electrode 28 above the second switch electrode 14b, and the light-control element 31 above the second switch electrode 14b becomes opaque. When the droplet 2 to be analyzed moves from above the first switch electrode 14a to above the second switch electrode 14b, the control electric field at the location of the first switch electrode 14a returns to the base electric field, disconnecting the first electrode 27 and the second electrode 28 above the first switch electrode 14a. The light-control element 31 above the first switch electrode 14a becomes opaque. The droplet 2 to be analyzed converts the base electric field generated by the second switch electrode 14b into a control electric field, thereby electrically connecting the first electrode 27 and the second electrode 28 above the second switch electrode 14b. The light-control element 31 above the second switch electrode 14b is electrically connected to a power source and is transparent to ambient light.

[0063] In another embodiment, the droplet 2 to be analyzed can reduce the intensity of the basic electric field formed by the switch electrode 14. This example uses a P-type MOS transistor with a first switch electrode 14a and a second switch electrode 14b. The drive circuit layer 12 provides a high voltage to the first and second switch electrodes 14a, 14b. When the droplet 2 to be analyzed moves above the first switch electrode 14a, it converts the basic electric field formed by the first switch electrode 14a into a control electric field, where the intensity of the control electric field is less than that of the basic electric field. This control electric field electrically connects the first electrode 27 and the second electrode 28 above the first switch electrode 14a, allowing the light-controlled element 31 above the first switch electrode 14a to transmit ambient light. At this point, there is no droplet 2 to be analyzed above the second switch electrode 14b. The intensity of the basic electric field formed by the second switch electrode 14b is insufficient to electrically connect the first electrode 27 and the second electrode 28 above the second switch electrode 14b, making the light-controlled element 31 above the second switch electrode 14b opaque. When the droplet 2 to be analyzed moves from above the first switch electrode 14a to above the second switch electrode 14b, the control electric field at the location of the first switch electrode 14a returns to the base electric field, disconnecting the first electrode 27 and the second electrode 28 above the first switch electrode 14a. The light-controlled element 31 above the first switch electrode 14a becomes opaque. At this point, the droplet 2 to be analyzed converts the base electric field formed by the second switch electrode 14b into a control electric field, thereby establishing electrical connection between the first electrode 27 and the second electrode 28 above the second switch electrode 14b. The light-controlled element 31 above the second switch electrode 14b becomes transparent to ambient light.

[0064] It can be understood that when the droplet 2 to be analyzed moves to a certain position, the light-control element 31 above the position can transmit ambient light, and then the position of the droplet 2 to be analyzed can be determined by observing whether the light-control element 31 transmits ambient light, thereby realizing the real-time detection of the position of the droplet 2 to be analyzed by the microfluidic chip 1.

[0065] It should be noted that if the droplet 2 to be analyzed is an insulating droplet, the dielectric constant of the droplet 2 to be analyzed is greater than that of air or a vacuum. In this case, the potential of the switch electrode 14 can be maintained below the threshold voltage (Vth) of the transistor, disconnecting the first electrode 27 from the second electrode 28. When the droplet 2 to be analyzed coincides with the switch electrode, the potential of the switch electrode 14 remains above the threshold voltage (Vth) due to the influence of the droplet 2 to be analyzed, connecting the first electrode 27 and the second electrode 28. This increases the current change between the first electrode 27 and the second electrode 28, which helps improve the sensitivity of the light-control element 31.

[0066] It should be noted that the common electrode 22 is provided with a through hole 22 a, and the through hole 22 a coincides with the switch electrode 14 in the Z-axis direction, so as to prevent the common electrode 22 from shielding the basic electric field formed by the switch electrode 14 and the control electric field converted by the droplet 2 to be analyzed.

[0067] In other embodiments, the light control element 31 may also be replaced by a light emitting element, that is, the position of the droplet 2 to be analyzed is determined by judging whether the light emitting element is emitting light.

[0068] In one possible embodiment, multiple marking patterns can be disposed beneath the second substrate 11, with the orthographic projection of a marking pattern in the Z-axis direction coinciding with the orthographic projection of a light control element 31 in the Z-axis direction. Each marking pattern has a different shape, so that light passing through the marking pattern and the light control element 31 above it reveals the shape of the marking pattern, further improving the recognition of ambient light. The multiple marking patterns can be in the shape of different letters or natural numbers.

[0069] In an exemplary embodiment, the insulating member 25 may be made of silicon nitride (SiNx) or silicon oxide (SiOx), and the semiconductor material may be amorphous silicon (A-Si), indium gallium zinc oxide (IGZO), or low-temperature polysilicon (LTPS). Both the first electrode 27 and the second electrode 28 may be made of copper (Cu), molybdenum (Mo), or aluminum (Al). The protective layer may be made of silicon nitride (SiNx), silicon oxide (SiOx), or an organic insulating material. The light shielding layer 32 may be made of black polyimide (PI).

[0070] In a possible implementation, the detection substrate 20 may not include the insulating member 25 , and the semiconductor 26 , the first electrode 27 , and the second electrode 28 are directly disposed on the surface of the first base 21 facing the Z-axis direction.

[0071] In summary, the microfluidic chip 1 disclosed in the embodiment of the present application includes a drive substrate 10 and a detection substrate 20 that are arranged relative to each other and spaced apart. A droplet 2 to be analyzed is accommodated between the drive substrate 10 and the detection substrate 20. The drive substrate 10 is used to drive the droplet 2 to be analyzed to move on the surface of the drive substrate 10. The drive substrate 10 includes a plurality of switch electrodes 14 that are spaced apart from each other. When the droplet 2 to be analyzed moves, the droplet 2 to be analyzed can overlap with the switch electrodes 14 in the thickness direction of the microfluidic chip. The detection substrate 20 includes a first base 21, a plurality of semiconductors 26, a plurality of first electrodes 27, a plurality of second electrodes 28, a protective layer 29, and at least one light control element 31. The first substrate 21 is disposed opposite and spaced from the drive substrate 10. A plurality of semiconductors 26, a plurality of first electrodes 27, and a plurality of second electrodes 28 are disposed on the surface of the first substrate 21 facing away from the drive substrate 10. The plurality of semiconductors 26 are spaced apart from each other, and each first electrode 27 and each second electrode 28 is connected to each semiconductor 26. The protective layer 29 covers the plurality of semiconductors 26, the plurality of first electrodes 27, and the plurality of second electrodes 28 on the first substrate 21. The light control element 31 is disposed on the surface of the protective layer 29 facing away from the first substrate 21. The orthographic projection of one semiconductor 26 in the thickness direction of the microfluidic chip coincides with the orthographic projection of one switch electrode 14 in the thickness direction of the microfluidic chip. One light control element 31 is electrically connected to at least one second electrode 28, and each first electrode 27 is electrically connected to a power source. The switch electrode 14 is used to form a base electric field. The droplet 2 to be analyzed is used to convert the base electric field at its own position into a control electric field. The control electric field is used to connect the first electrode 27 and the second electrode 28, which overlap the droplet 2 to be analyzed. The light-control element 31 can transmit ambient light or emit light when energized. Therefore, the microfluidic chip 1 of the present application can determine the position of the droplet 2 to be analyzed by observing whether the light-control element 31 transmits light or emits light, enabling the microfluidic chip 1 to detect the position of the droplet 2 to be analyzed in real time.

[0072] See also Figure 2 , Figure 2 This is a schematic diagram of the layer structure of the microfluidic chip disclosed in the second embodiment of this application. The microfluidic chip of the second embodiment differs from the microfluidic chip of the first embodiment in that a single optical control element 31 of the microfluidic chip of the second embodiment can be electrically connected to multiple second electrodes 28. For a description of the structural similarities between the microfluidic chip of the second embodiment and the microfluidic chip of the first embodiment, please refer to the relevant description of the microfluidic chip of the first embodiment and will not be repeated here.

[0073] In the embodiment of the present application, a light-control element 31 is disposed within the plurality of vias 29 a of the protective layer 29 and on the surface of the protective layer 29 facing away from the first substrate 21. Specifically, a first electrode 311 of the light-control element 31 is disposed within the plurality of vias 29 a of the protective layer 29 and on the surface of the protective layer 29 facing away from the first substrate 21. An electrochromic body 312 of the light-control element 31 is disposed within the plurality of vias 29 a of the protective layer 29 and on the surface of the protective layer 29 facing away from the first electrode 311.

[0074] In the embodiment of the present application, the power supply provides different potentials to the multiple first electrodes 27, that is, the multiple first electrodes 27 have different potentials. The multiple first electrodes 27 having different potentials means that the second electrodes 28 of the multiple transistors are electrically connected to the single light-control element 31, and the first electrodes 27 of the multiple transistors electrically connected to the single light-control element 31 have different potentials.

[0075] See also Figure 2 For example, there are three first electrodes 27, each comprising a first conductive end 27a, a second conductive end 27b, and a third conductive end 27c. The potential of the first conductive end 27a is greater than that of the second conductive end 27b, and the potential of the second conductive end 27b is greater than that of the third conductive end 27c. When the droplet 2 to be analyzed is located below the first conductive end 27a, below the second conductive end 27b, or below the third conductive end 27c, the light control element 31 is electrically connected to a power source, allowing ambient light to pass through the light control element 31. Because the potential of the first conductive end 27a is greater than the potential of the second conductive end 27b, the potential of the light-control element 31 when the droplet 2 to be analyzed is below the first conductive end 27a is greater than the potential of the light-control element 31 when the droplet 2 to be analyzed is below the second conductive end 27b. As a result, the brightness of the ambient light transmitted by the light-control element 31 when the droplet 2 to be analyzed is below the first conductive end 27a is greater than the brightness of the ambient light transmitted by the light-control element 31 when the droplet 2 to be analyzed is below the second conductive end 27b. Because the potential of the second conductive end 27b is greater than the potential of the third conductive end 27c, the potential of the light-control element 31 when the droplet 2 to be analyzed is below the second conductive end 27b is greater than the potential of the light-control element 31 when the droplet 2 to be analyzed is below the third conductive end 27c. As a result, the brightness of the ambient light transmitted by the light-control element 31 when the droplet 2 to be analyzed is below the second conductive end 27b is greater than the brightness of the ambient light transmitted by the light-control element 31 when the droplet 2 to be analyzed is below the third conductive end 27c. That is, the potential of the light-control element 31 is proportional to the brightness of the ambient light passing through the light-control element 31 .

[0076] As can be understood, setting the potentials of the first electrodes 27 of the multiple transistors to different values ​​and electrically connecting a single light-control element 31 to the second electrodes 28 of the multiple transistors results in different potentials of the light-control element 31 when the droplet 2 to be analyzed is located below different first electrodes 27, and thus, the brightness of the light-control element 31 also varies. Therefore, the position of the droplet 2 to be analyzed can be determined by observing the brightness of different light-control elements 31. Compared to setting the potentials of the first electrodes 27 to the same value and electrically connecting a single light-control element 31 to a single second electrode 28, setting the potentials of the first electrodes 27 of the multiple transistors to different values ​​and electrically connecting a single light-control element 31 to the second electrodes 28 of the multiple transistors can reduce the number of light-control elements 31, thereby saving costs.

[0077] It should be noted that the microfluidic chip of the second embodiment may include one or more light-control elements 31. When there is one light-control element 31, one light-control element 31 is electrically connected to all second electrodes 28. When there are multiple light-control elements 31, one light-control element 31 is electrically connected to at least two (or more) of the second electrodes 28.

[0078] See also Figure 3 and Figure 4 , Figure 3 Schematic diagram of the top view of the microfluidic chip disclosed in the third embodiment of this application, Figure 4 for Figure 3 The microfluidic chip shown is a schematic cross-sectional view along direction II. The microfluidic chip of the third embodiment differs from the microfluidic chip of the first embodiment in that the accommodating space 1a of the microfluidic chip 1 further accommodates auxiliary droplets 40. For a description of the structural similarities between the microfluidic chip of the third embodiment and the microfluidic chip of the first embodiment, please refer to the relevant description of the microfluidic chip of the first embodiment and will not be repeated here.

[0079] In this application, please refer to Figure 4 The driving substrate 10 includes a second substrate 11, a driving circuit layer 12, a driving electrode 13, a switch electrode 14, a first dielectric layer 15, a first hydrophobic layer 16, and an auxiliary electrode 17. The driving circuit layer 12 is disposed on the surface of the second substrate 11 facing the detection substrate 20. The driving electrode 13, the switch electrode 14, and the auxiliary electrode 17 are all disposed on the surface of the driving circuit layer 12 facing away from the second substrate 11. The first dielectric layer 15 is disposed on the surface of the driving circuit layer 12 facing away from the second substrate 11, and the first dielectric layer 15 covers the driving electrode 13, the switch electrode 14, and the auxiliary electrode 17. That is, the first dielectric layer 15 covers the first dielectric layer 15, the first hydrophobic layer 16, and the auxiliary electrode 17 to the driving circuit layer 12. The first hydrophobic layer 16 is disposed on the surface of the first dielectric layer 15 facing away from the driving circuit layer 12.

[0080] In this application, please refer to Figure 3 , Figure 3 The dotted lines in the figure show the positions of the driving electrodes 13 and the auxiliary electrodes 17. The larger dotted area represents the driving electrode 13, and the smaller dotted area represents the auxiliary electrode 17. There are multiple driving electrodes 13, and the multiple driving electrodes 13 are spaced apart from each other and arranged in an array. There are multiple auxiliary electrodes 17, and the multiple auxiliary electrodes 17 are spaced apart from each other and arranged in an array. The number of auxiliary electrodes 17 can be the same as the number of driving electrodes 13. One auxiliary electrode 17 is located adjacent to one driving electrode 13, and the auxiliary electrode 17 is spaced apart from the driving electrode 13. Figure 4 The auxiliary electrodes 17 are arranged closer to the switch electrodes 14 than the drive electrodes 13. Each auxiliary electrode 17 is in contact with the drive circuit layer 12, so that each auxiliary electrode 17 is electrically connected to the drive circuit layer 12. The drive circuit layer 12 is used to supply power to the auxiliary electrodes 17. The drive circuit layer 12 is configured with a thin film transistor with a switching function for each auxiliary electrode 17.

[0081] In an exemplary embodiment, see Figure 4 The accommodating space 1a of the microfluidic chip 1 accommodates a droplet 2 to be analyzed and an auxiliary droplet 40. The droplet 2 to be analyzed is an environmental element, and the auxiliary droplet 40 is a component of the microfluidic chip 1. The drive electrode 13 is used to drive the droplet 2 to be analyzed to move along the surface of the drive substrate 10 within the accommodating space 1a, and the auxiliary electrode 17 is used to drive the auxiliary droplet 40 to move within the accommodating space 1a. The principle of the auxiliary electrode 17 driving the auxiliary droplet 40 to move is similar to the principle of the drive electrode 13 driving the droplet 2 to be analyzed, and will not be repeated here.

[0082] In this application, when the droplet 2 to be analyzed moves in the accommodating space 1a, the droplet 2 to be analyzed will not overlap with the switch electrode 14 in the Z-axis direction. When the auxiliary droplet 40 moves in the accommodating space 1a, the auxiliary droplet 40 will overlap with the switch electrode 14 in the Z-axis direction.

[0083] Understandably, the dielectric constant of some droplets 2 to be analyzed is very close to that of air, resulting in the intensity of the control electric field being very close to that of the base electric field. This can lead to situations where the control electric field cannot achieve electrical conduction between the first electrode 27 and the second electrode 28. Therefore, an auxiliary droplet 40, whose dielectric constant is much greater than that of air, is provided. This auxiliary droplet 40 is used to convert the base electric field formed by the switch electrode 14 beneath it into a control electric field. This control electric field achieves electrical conduction between the first electrode 27 and the second electrode 28 above the auxiliary droplet 40, thereby enabling the light-control element 31 above the auxiliary droplet 40 to transmit ambient light when energized. Therefore, when the auxiliary droplet 40 moves to a certain position, the light-control element 31 above that position can transmit ambient light. The position of the auxiliary droplet 40 can be determined by observing whether the light-control element 31 transmits ambient light. When the auxiliary droplet 40 is not located above the switch electrode 14, the auxiliary droplet 40 cannot convert the base electric field formed by that switch electrode 14 into a control electric field.

[0084] It should be noted that the droplet 2 to be analyzed and the auxiliary droplet 40 move in sync. Moving in sync means that when the driving electrode 13 drives the droplet 2 to be analyzed to move, the auxiliary electrode 17 also drives the auxiliary droplet 40 to move, and the movement path of the droplet 2 to be analyzed is parallel to the movement path of the auxiliary droplet 40. The droplet 2 to be analyzed and the auxiliary droplet 40 maintain a relatively close distance, but the droplet 2 to be analyzed is not soluble in the auxiliary droplet 40.

[0085] It can be understood that since the droplet 2 to be analyzed moves in sync with the auxiliary droplet 40, the position of the auxiliary droplet 40 is determined by observing whether the light control element 31 transmits ambient light, and thus the position of the droplet 2 to be analyzed can also be determined, thereby enabling the microfluidic chip 1 to detect the position of the droplet 2 to be analyzed in real time.

[0086] It should also be noted that in the microfluidic chip of the third embodiment, one light-control element 31 can be electrically connected to one second electrode 28, or one light-control element 31 can be electrically connected to multiple second electrodes 28. A detailed description of how one light-control element 31 can be electrically connected to one second electrode 28 is provided in the microfluidic chip of the first embodiment, and will not be repeated here. A detailed description of how one light-control element 31 can be electrically connected to multiple second electrodes 28 is provided in the microfluidic chip of the second embodiment, and will not be repeated here.

[0087] In summary, the microfluidic chip 1 disclosed in the embodiment of the present application includes a drive substrate 10 and a detection substrate 20 that are arranged relative to each other and spaced apart. A droplet 2 to be analyzed is accommodated between the drive substrate 10 and the detection substrate 20. The drive substrate 10 is used to drive the droplet 2 to be analyzed to move on the surface of the drive substrate 10. An auxiliary droplet 40 is also accommodated between the drive substrate 10 and the detection substrate 20. The drive substrate 10 is used to drive the auxiliary droplet 40 to move on the surface of the drive substrate 10, and the droplet 2 to be analyzed moves in sync with the auxiliary droplet 40. The drive substrate 10 includes a plurality of switch electrodes 14 that are spaced apart from each other. When the auxiliary droplet 40 moves, the auxiliary droplet 40 can overlap with the switch electrode 14 in the thickness direction of the microfluidic chip. The detection substrate 20 includes a first substrate 21, multiple semiconductors 26, multiple first poles 27, multiple second poles 28, a protective layer 29 and at least one light control element 31. The first substrate 21 is opposite to the driving substrate 10 and is arranged at intervals. The multiple semiconductors 26, multiple first poles 27 and multiple second poles 28 are arranged on the surface of the first substrate 21 facing away from the driving substrate 10. The multiple semiconductors 26 are spaced apart from each other. One first pole 27 and one second pole 28 are respectively connected to one semiconductor 26. The protective layer 29 covers the multiple semiconductors 26, multiple first poles 27 and multiple second poles 28 to the first substrate 21. The light control element 31 is arranged on the surface of the protective layer 29 facing away from the first substrate 21. The orthographic projection of one semiconductor 26 in the thickness direction of the microfluidic chip coincides with the orthographic projection of one switch electrode 14 in the thickness direction of the microfluidic chip. One light control element 31 is electrically connected to at least one second pole 28, and each first pole 27 is electrically connected to a power supply. The switch electrode 14 is used to form a basic electric field, and the auxiliary droplet 40 is used to convert the basic electric field at its own position into a control electric field. The control electric field is used to conduct the first electrode 27 and the second electrode 28 that overlap with the auxiliary droplet 40. The light-control element 31 can transmit ambient light or emit light after being energized. Therefore, the microfluidic chip 1 of the present application can determine the position of the auxiliary droplet 40 by observing whether the light-control element 31 transmits light or emits light. Because the droplet 2 to be analyzed moves in sync with the auxiliary droplet 40, the position of the droplet 2 to be analyzed can also be determined after determining the position of the auxiliary droplet 40, enabling the microfluidic chip 1 to detect the position of the droplet 2 to be analyzed in real time.

[0088] See also Figure 5 and Figure 6 , Figure 5 Schematic diagram of the top view of the microfluidic chip disclosed in the fourth embodiment of this application, Figure 6 for Figure 5The microfluidic chip shown is a cross-sectional schematic diagram along the II-II direction. The microfluidic chip of the fourth embodiment differs from the microfluidic chip of the first embodiment in that the microfluidic chip of the fourth embodiment further includes a first auxiliary substrate 50 and a second auxiliary substrate 60. For a description of the structural similarities between the microfluidic chip of the fourth embodiment and the microfluidic chip of the first embodiment, please refer to the relevant description of the microfluidic chip of the first embodiment and will not be repeated here.

[0089] In this application, please refer to Figure 6 The second auxiliary substrate 60 is disposed on the surface of the drive substrate 10 that faces away from the detection substrate 20. The first auxiliary substrate 50 is disposed on the side of the second auxiliary substrate 60 that faces away from the drive substrate 10, with the first auxiliary substrate 50 and the second auxiliary substrate 60 spaced apart. A droplet 2 to be analyzed is accommodated between the first auxiliary substrate 50 and the second auxiliary substrate 60. A predetermined electric field is formed between the first auxiliary substrate 50 and the second auxiliary substrate 60, and is used to drive the droplet 2 to be analyzed to move on the surface of the first auxiliary substrate 50.

[0090] In an exemplary embodiment, the first auxiliary substrate 50 includes a support layer 51, a control circuit layer 52, a control electrode 53, a first insulating layer 54, and a first hydrophobic layer 55. The control circuit layer 52 is disposed on the surface of the support layer 51 facing the Z-axis direction, that is, the control circuit layer 52 is disposed on the surface of the support layer 51 facing the second auxiliary substrate 60, and the control electrode 53 is disposed on the surface of the control circuit layer 52 facing away from the support layer 51. The first insulating layer 54 is disposed on the surface of the control electrode 53 facing away from the control circuit layer 52, and the first hydrophobic layer 55 is disposed on the surface of the first insulating layer 54 facing away from the control circuit layer 52. The first insulating layer 54 is used to insulate the control electrode 53 from the first hydrophobic layer 55.

[0091] In an exemplary embodiment, the second auxiliary substrate 60 includes a common electrode 61, a second insulating layer 62, and a second hydrophobic layer 63. The common electrode 61 is disposed on the surface of the second substrate 11 facing away from the Z-axis direction, that is, the common electrode 61 is disposed on the surface of the second substrate 11 facing the first auxiliary substrate 50. The second insulating layer 62 is disposed on the surface of the common electrode 61 facing away from the second substrate 11. The second hydrophobic layer 63 is disposed on the surface of the second insulating layer 62 facing away from the common electrode 61. The second insulating layer 62 is used to insulate the common electrode 61 from the second hydrophobic layer 63.

[0092] In this application implementation, please refer to Figure 5 , Figure 5The dotted line schematic diagram shows the positions of the driving electrode 13 and the common electrode 61. There are multiple driving electrodes 13, and the multiple driving electrodes 13 are spaced apart from each other and arranged in an array. There are multiple common electrodes 61, and the multiple common electrodes 61 are spaced apart from each other and arranged in an array. The number of common electrodes 61 may be the same as the number of driving electrodes 13. The positive projection of an auxiliary electrode 17 in the Z-axis direction coincides with the positive projection of a driving electrode 13 in the Z-axis direction. Each common electrode 61 is in contact with the control circuit layer 52, so that each common electrode 61 is electrically connected to the control circuit layer 52, and the control circuit layer 52 is used to supply power to the common electrode 61. The control electrode 53 and the common electrode 61 form a preset electric field. Among them, the control circuit layer 52 is configured with a thin film transistor with a switching function for each control electrode 53.

[0093] It should be noted that the principle of the control electrode 53 driving the to-be-analyzed droplet 2 to move can be referred to the principle of the driving electrode 13 driving the to-be-analyzed droplet 2 to move in the first embodiment, which will not be described in detail here.

[0094] In an exemplary embodiment, the liquid droplet 2 to be analyzed is in contact with the first hydrophobic layer 55 and the second hydrophobic layer 63 respectively.

[0095] In one embodiment, the contact angle of the droplet 2 to be analyzed on the first hydrophobic layer 55 is greater than 90 degrees, that is, the first hydrophobic layer 55 is hydrophobic to the droplet 2 to be analyzed, which reduces the contact area between the droplet 2 to be analyzed and the first hydrophobic layer 55, which is conducive to the movement of the droplet 2 to be analyzed in the first hydrophobic layer 55 and maintaining the shape of the droplet 2 to be analyzed.

[0096] In one embodiment, the contact angle of the droplet 2 to be analyzed on the second hydrophobic layer 63 is greater than 90 degrees, that is, the second hydrophobic layer 63 is hydrophobic to the droplet 2 to be analyzed, which reduces the contact area between the droplet 2 to be analyzed and the second hydrophobic layer 63, which is conducive to the movement of the droplet 2 to be analyzed in the second hydrophobic layer 63 and maintaining the shape of the droplet 2 to be analyzed.

[0097] In the embodiment of the present application, the driving substrate 10 and the detection substrate 20 of the microfluidic chip of the fourth embodiment are structurally the same as the driving substrate 10 and the detection substrate 20 of the microfluidic chip of the first embodiment. The difference is that the accommodating space 1a of the microfluidic chip of the fourth embodiment does not accommodate the droplets 2 to be analyzed, but accommodates auxiliary droplets 40.

[0098] Specifically, the auxiliary droplet 40 is accommodated between the first hydrophobic layer 16 and the second hydrophobic layer 24. A driving electric field is formed between the driving electrode 13 and the common electrode 22, and this driving electric field is used to drive the auxiliary droplet 40 to move. The principle of the driving electrode 13 driving the auxiliary droplet 40 to move is similar to the principle of the driving electrode 13 driving the droplet 2 to be analyzed in the first embodiment, and will not be repeated here.

[0099] In one embodiment, the contact angle of the auxiliary droplet 40 on the first hydrophobic layer 16 is greater than 90 degrees, that is, the first hydrophobic layer 16 is hydrophobic to the auxiliary droplet 40, which reduces the contact area between the auxiliary droplet 40 and the first hydrophobic layer 16, which is conducive to the movement of the auxiliary droplet 40 in the first hydrophobic layer 16 and maintaining the shape of the auxiliary droplet 40.

[0100] In one embodiment, the contact angle of the auxiliary droplet 40 on the second hydrophobic layer 24 is greater than 90 degrees, that is, the second hydrophobic layer 24 is hydrophobic to the auxiliary droplet 40, which reduces the contact area between the auxiliary droplet 40 and the second hydrophobic layer 24, which is conducive to the movement of the auxiliary droplet 40 in the second hydrophobic layer 24 and maintaining the shape of the auxiliary droplet 40.

[0101] In the exemplary embodiment, when the auxiliary droplet 40 moves to overlap the switch electrode 14, it converts the basic electric field formed by the switch electrode 14 into a control electric field. This control electric field causes the first electrode 27 and the second electrode 28 to conduct electricity, thereby allowing the light-control element 31 to transmit ambient light when energized. A detailed description of how the auxiliary droplet 40 converts the basic electric field formed by the switch electrode 14 into a control electric field is provided in the first embodiment, and will not be repeated here.

[0102] It can be understood that when the auxiliary droplet 40 moves to a certain position, the light control element 31 above the position transmits ambient light, and the position of the auxiliary droplet 40 can be determined by observing whether the light control element 31 transmits light.

[0103] In the embodiment of the present application, the droplet 2 to be analyzed moves synchronously with the auxiliary droplet 40. Synchronous movement means that when the control electrode 53 drives the droplet 2 to be analyzed to move, the drive electrode 13 also drives the auxiliary droplet 40 to move, and the orthographic projection of the droplet 2 to be analyzed in the Z-axis direction always coincides with the orthographic projection of the auxiliary droplet 40 in the Z-axis direction.

[0104] It can be understood that since the orthographic projection of the droplet 2 to be analyzed in the Z-axis direction always coincides with the orthographic projection of the auxiliary droplet 40 in the Z-axis direction, the microfluidic chip 1 can detect the position of the auxiliary droplet 40 in real time, that is, the position of the droplet 2 to be analyzed in real time.

[0105] It should also be noted that in the microfluidic chip of the fourth embodiment, one light-control element 31 can be electrically connected to one second electrode 28, or one light-control element 31 can be electrically connected to multiple second electrodes 28. A detailed description of how one light-control element 31 can be electrically connected to one second electrode 28 is provided in the microfluidic chip of the first embodiment, and will not be repeated here. A detailed description of how one light-control element 31 can be electrically connected to multiple second electrodes 28 is provided in the microfluidic chip of the second embodiment, and will not be repeated here.

[0106] In summary, the microfluidic chip 1 disclosed in the embodiment of the present application includes a driving substrate 10, a detection substrate 20, a first auxiliary substrate 50, and a second auxiliary substrate 60. The driving substrate 10 and the detection substrate 20 are opposite and spaced apart. The second auxiliary substrate 60 is arranged on the surface of the driving substrate 10 that is opposite to the detection substrate 20. The first auxiliary substrate 50 is arranged on the side of the second auxiliary substrate 60 that is opposite to the driving substrate 10, and the first auxiliary substrate 50 and the second auxiliary substrate 60 are spaced apart. A droplet 2 to be analyzed is accommodated between the first auxiliary substrate 50 and the second auxiliary substrate 60. The first auxiliary substrate 50 is used to drive the droplet 2 to be analyzed to move on the surface of the first auxiliary substrate 50. An auxiliary droplet 40 is accommodated between the driving substrate 10 and the detection substrate 20. The driving substrate 10 is used to drive the auxiliary droplet 40 to move on the surface of the driving substrate 10. The droplet 2 to be analyzed moves synchronously with the auxiliary droplet 40. The driving substrate 10 includes a plurality of switch electrodes 14 spaced apart from each other. When the auxiliary droplet 40 moves, the auxiliary droplet 40 can overlap with the switch electrodes 14 in the thickness direction of the microfluidic chip. The detection substrate 20 includes a first substrate 21, multiple semiconductors 26, multiple first poles 27, multiple second poles 28, a protective layer 29 and at least one light control element 31. The first substrate 21 is opposite to the driving substrate 10 and is arranged at intervals. The multiple semiconductors 26, multiple first poles 27 and multiple second poles 28 are arranged on the surface of the first substrate 21 facing away from the driving substrate 10. The multiple semiconductors 26 are spaced apart from each other. One first pole 27 and one second pole 28 are respectively connected to one semiconductor 26. The protective layer 29 covers the multiple semiconductors 26, multiple first poles 27 and multiple second poles 28 to the first substrate 21. The light control element 31 is arranged on the surface of the protective layer 29 facing away from the first substrate 21. The orthographic projection of one semiconductor 26 in the thickness direction of the microfluidic chip coincides with the orthographic projection of one switch electrode 14 in the thickness direction of the microfluidic chip. One light control element 31 is electrically connected to at least one second pole 28, and each first pole 27 is electrically connected to a power supply. The switch electrode 14 is used to form a base electric field, and the auxiliary droplet 40 is used to convert the base electric field at its own position into a control electric field. The control electric field is used to connect the first electrode 27 and the second electrode 28, which overlap with the auxiliary droplet 40. When energized, the light-control element 31 can transmit ambient light or emit light. Therefore, the microfluidic chip of the present application can determine the position of the auxiliary droplet 40 by observing whether the light-control element 31 transmits light. Because the droplet 2 to be analyzed moves synchronously with the auxiliary droplet 40, the position of the droplet 2 to be analyzed can also be determined, enabling the microfluidic chip 1 to detect the position of the droplet 2 to be analyzed in real time.

[0107] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0108] It should be understood that the application of this application is not limited to the above examples. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the scope of protection of the claims appended to this application. Those skilled in the art will understand that implementing all or part of the processes of the above embodiments and making equivalent changes in accordance with the claims of this application still fall within the scope of this application.

Claims

1. A microfluidic chip, comprising a driving substrate and a detection substrate arranged opposite to each other and spaced apart, wherein a droplet to be analyzed is accommodated between the driving substrate and the detection substrate, and the driving substrate is used to drive the droplet to be analyzed to move on the surface of the driving substrate, characterized in that: The driving substrate comprises a plurality of switch electrodes spaced apart from each other, and the droplet to be analyzed can overlap with the switch electrodes in the thickness direction of the microfluidic chip when moving; The detection substrate comprises a first substrate, a plurality of semiconductors, a plurality of first electrodes, a plurality of second electrodes, a protective layer and at least one light control element, the first substrate is opposite to the driving substrate and is arranged at intervals, a plurality of the semiconductors, a plurality of the first electrodes and a plurality of the second electrodes are arranged on the surface of the first substrate facing away from the driving substrate, a plurality of the semiconductors are spaced apart from each other, a first electrode and a second electrode are respectively connected to a semiconductor, the protective layer covers a plurality of the semiconductors, a plurality of the first electrodes and a plurality of the second electrodes to the first substrate, the light control element is arranged on the surface of the protective layer facing away from the first substrate, an orthographic projection of a semiconductor in the thickness direction of the microfluidic chip coincides with an orthographic projection of a switch electrode in the thickness direction of the microfluidic chip, a light control element is electrically connected to at least one of the second electrodes, and each of the first electrodes is electrically connected to a power supply; The switch electrode is used to form a basic electric field, the dielectric constant of the droplet to be analyzed is greater than the dielectric constant of air, and when the droplet to be analyzed moves to coincide with the switch electrode in the thickness direction of the microfluidic chip, the droplet to be analyzed is used to convert the basic electric field at its own position into a control electric field, and the control electric field is used to conduct the first electrode and the second electrode that coincide with the droplet to be analyzed; The driving substrate and the detecting substrate are light-transmissive, and the light-control element transmits ambient light after being powered on; or, the light-control element emits light after being powered on.

2. The microfluidic chip according to claim 1, characterized in that: There are multiple light-control elements, one of which is electrically connected to one of the second electrodes, and the orthographic projection of one of the light-control elements in the thickness direction of the microfluidic chip coincides with the orthographic projection of one of the semiconductors in the thickness direction of the microfluidic chip.

3. The microfluidic chip according to claim 1, characterized in that: One of the semiconductors, one of the switch electrodes overlapping in the thickness direction of the microfluidic chip, and one of the first electrodes and one of the second electrodes connected to the semiconductor constitute a transistor; The second electrodes of the plurality of transistors are electrically connected to one light-control element, and the potentials of the first electrodes of the plurality of transistors electrically connected to one light-control element are all different.

4. The fluidic chip according to any one of claims 1 to 3, characterized in that: The driving substrate further comprises a plurality of driving electrodes spaced apart from each other, wherein the driving electrodes are spaced apart from the switch electrodes; The detection substrate further comprises a common electrode, which is disposed on a surface of the first substrate facing away from the semiconductor, and the common electrode and the driving electrode are used to form a driving electric field, and the driving electric field is used to drive the droplet to be analyzed to move; The common electrode is provided with a plurality of through holes, and the orthographic projection of one of the through holes in the thickness direction of the microfluidic chip coincides with the orthographic projection of one of the switch electrodes in the thickness direction of the microfluidic chip.

5. A microfluidic chip, comprising a driving substrate and a detection substrate arranged opposite to each other and spaced apart, wherein a droplet to be analyzed is accommodated between the driving substrate and the detection substrate, and the driving substrate is used to drive the droplet to be analyzed to move on the surface of the driving substrate, characterized in that: An auxiliary droplet is also accommodated between the driving substrate and the detection substrate, and the driving substrate is used to drive the auxiliary droplet to move on the surface of the driving substrate, and the auxiliary droplet moves in step with the droplet to be analyzed; The driving substrate comprises a plurality of switch electrodes spaced apart from each other, and the auxiliary droplet can overlap with the switch electrodes in the thickness direction of the microfluidic chip when moving; The detection substrate comprises a first substrate, a plurality of semiconductors, a plurality of first electrodes, a plurality of second electrodes, a protective layer and at least one light control element, the first substrate is opposite to the driving substrate and is arranged at intervals, a plurality of the semiconductors, a plurality of the first electrodes and a plurality of the second electrodes are arranged on the surface of the first substrate facing away from the driving substrate, a plurality of the semiconductors are spaced apart from each other, a first electrode and a second electrode are respectively connected to a semiconductor, the protective layer covers a plurality of the semiconductors, a plurality of the first electrodes and a plurality of the second electrodes to the first substrate, the light control element is arranged on the surface of the protective layer facing away from the first substrate, an orthographic projection of a semiconductor in the thickness direction of the microfluidic chip coincides with an orthographic projection of a switch electrode in the thickness direction of the microfluidic chip, a light control element is electrically connected to at least one of the second electrodes, and each of the first electrodes is electrically connected to a power supply; Wherein, the switch electrode is used to form a basic electric field, the dielectric constant of the auxiliary droplet is much larger than the dielectric constant of air, and when the auxiliary droplet moves to coincide with the switch electrode in the thickness direction of the microfluidic chip, the auxiliary droplet is used to convert the basic electric field at its own position into a control electric field, and the control electric field is used to conduct the first electrode and the second electrode that coincide with the auxiliary droplet; The driving substrate and the detecting substrate are light-transmissive, and the light-control element transmits ambient light after being powered on; or, the light-control element emits light after being powered on.

6. The microfluidic chip according to claim 5, characterized in that: There are multiple light-control elements, one of which is electrically connected to one of the second electrodes, and the orthographic projection of one of the light-control elements in the thickness direction of the microfluidic chip coincides with the orthographic projection of one of the semiconductors in the thickness direction of the microfluidic chip.

7. The microfluidic chip according to claim 5, characterized in that: One of the semiconductors, one of the switch electrodes overlapping in the thickness direction of the microfluidic chip, and one of the first electrodes and one of the second electrodes connected to the semiconductor constitute a transistor; The second electrodes of the plurality of transistors are electrically connected to one light-control element, and the potentials of the first electrodes of the plurality of transistors electrically connected to one light-control element are all different.

8. A microfluidic chip, comprising a first auxiliary substrate and a second auxiliary substrate arranged opposite to each other and spaced apart, wherein a droplet to be analyzed is accommodated between the first auxiliary substrate and the second auxiliary substrate, and the first auxiliary substrate is used to drive the droplet to be analyzed to move on the surface of the first auxiliary substrate, characterized in that: The microfluidic chip further comprises a driving substrate and a detection substrate, wherein the driving substrate is arranged on a surface of the second auxiliary substrate facing away from the first auxiliary substrate, the detection substrate is arranged on a side of the driving substrate facing away from the second auxiliary substrate, and the detection substrate is spaced apart from the driving substrate, an auxiliary droplet is accommodated between the driving substrate and the detection substrate, and the driving substrate is used to drive the auxiliary droplet to move on the surface of the driving substrate, and the auxiliary droplet moves synchronously with the droplet to be analyzed; The driving substrate comprises a plurality of switch electrodes spaced apart from each other, and the auxiliary droplet can overlap with the switch electrodes in the thickness direction of the microfluidic chip when moving; The detection substrate comprises a first substrate, a plurality of semiconductors, a plurality of first electrodes, a plurality of second electrodes, a protective layer and at least one light control element, the first substrate is opposite to the driving substrate and is arranged at intervals, a plurality of the semiconductors, a plurality of the first electrodes and a plurality of the second electrodes are arranged on the surface of the first substrate facing away from the driving substrate, a plurality of the semiconductors are spaced apart from each other, a first electrode and a second electrode are respectively connected to a semiconductor, the protective layer covers a plurality of the semiconductors, a plurality of the first electrodes and a plurality of the second electrodes to the first substrate, the light control element is arranged on the surface of the protective layer facing away from the first substrate, an orthographic projection of a semiconductor in the thickness direction of the microfluidic chip coincides with an orthographic projection of a switch electrode in the thickness direction of the microfluidic chip, a light control element is electrically connected to at least one of the second electrodes, and each of the first electrodes is electrically connected to a power supply; Wherein, the switch electrode is used to form a basic electric field, the dielectric constant of the auxiliary droplet is much larger than the dielectric constant of air, and when the auxiliary droplet moves to coincide with the switch electrode in the thickness direction of the microfluidic chip, the auxiliary droplet is used to convert the basic electric field at its own position into a control electric field, and the control electric field is used to conduct the first electrode and the second electrode that coincide with the auxiliary droplet; The driving substrate and the detecting substrate are light-transmissive, and the light-control element transmits ambient light after being powered on; or, the light-control element emits light after being powered on.

9. The microfluidic chip according to claim 8, characterized in that: There are multiple light-control elements, one of which is electrically connected to one of the second electrodes, and the orthographic projection of one of the light-control elements in the thickness direction of the microfluidic chip coincides with the orthographic projection of one of the semiconductors in the thickness direction of the microfluidic chip.

10. The microfluidic chip according to claim 9, characterized in that: One of the semiconductors, one of the switch electrodes overlapping in the thickness direction of the microfluidic chip, and one of the first electrodes and one of the second electrodes connected to the semiconductor constitute a transistor; The second electrodes of the plurality of transistors are electrically connected to one light-control element, and the potentials of the first electrodes of the plurality of transistors electrically connected to one light-control element are all different.

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