A method for quickly installing filament of a tungsten filament scanning electron microscope

Abstract

The present invention discloses a method for quickly installing a filament of a tungsten filament scanning electron microscope, which belongs to the technical field and solves the technical problem of low installation efficiency and long time consumption of the existing tungsten filament installation method of the scanning electron microscope. The above method comprises: step 1, first placing the base plate on the workbench, and then placing the frustum base on the base plate; step 2, placing the outer shell on the frustum base; the outer shell and the center sleeve are both hollow cylindrical structures with openings at both ends; step 3, inserting the center sleeve into the cavity of the outer shell; step 4, installing the lamp foot positioning core into the center sleeve; step 5, installing the filament holder with the tungsten filament installed on the lamp foot positioning core; step 6, covering the top of the outer shell with a limiting sleeve, and checking whether the filament tip of the tungsten filament is at the center of the limiting through hole of the limiting sleeve and whether the filament tip is flush with the top surface of the limiting sleeve. The present invention greatly shortens the filament replacement time, and unskilled workers can accurately complete the filament replacement work in a maximum of five minutes.

Description

Technical Field

[0001] The invention relates to the technical field of scanning electron microscopes, and in particular to a method for quickly installing a filament of a tungsten filament scanning electron microscope. Background Art

[0002] A tungsten filament scanning electron microscope (SEM) is an analytical instrument that uses electron beam imaging technology to observe sample surface morphology, particle size, and microstructure. Its main principle is to scan the sample surface with an electron beam emitted by an electron gun. The intensity and position of the electron beam are controlled by voltage. When the electron beam impinges on the sample surface, it generates secondary electrons, which are sputtered and collected by a detector, where they are converted into electrical signals. After processing, the electrical signals are converted into images, achieving visualization. The electron beam emission is the core component of the SEM, and the installation and replacement of the tungsten filament are crucial factors affecting the SEM's observation results.

[0003] Currently, when replacing a blown filament, visual inspection is primarily used to check whether the filament is centered in the lamp holder. If it is not, repeated adjustments must be made to re-center it. Visual inspection is sometimes inaccurate, and proper filament installation directly impacts the lifespan of the filament and the effectiveness of observation and analysis. This is time-consuming, labor-intensive, and difficult to perform. Existing tungsten filament installation methods cannot precisely align the filament center with the center of the lamp holder. Summary of the Invention

[0004] In view of the above analysis, the present invention aims to provide a method for quickly installing a tungsten filament filament of a scanning electron microscope, so as to solve the technical problems of low installation efficiency and inaccuracy of the existing tungsten filament installation method of the scanning electron microscope.

[0005] The purpose of the present invention is mainly achieved through the following technical solutions:

[0006] The present invention provides a method for quickly installing a filament of a tungsten filament scanning electron microscope, the method comprising the following steps:

[0007] Step 1: When installing the tungsten filament for the first time, first place the base plate on the workbench, then place the frustum base on the base plate, with the center axis of the frustum base aligning with the center axis of the base plate;

[0008] Step 2: Place the outer shell on the frustum base, with the central axis of the outer shell coinciding with the central axis of the base plate and the frustum base; both the outer shell and the center sleeve are hollow cylindrical structures with openings at both ends;

[0009] Step 3: Insert the center sleeve into the cavity of the shell, with the center axis of the center sleeve coinciding with the center axis of the shell;

[0010] Step 4: Install the lamp foot positioning core into the center sleeve, and ensure that the center axis of the lamp foot positioning core coincides with the center axis of the center sleeve;

[0011] Step 5: Install the filament holder with the tungsten filament onto the lamp foot positioning core, so that the central axis of the filament holder coincides with the central axis of the lamp foot positioning core;

[0012] Step 6. Cover the top of the housing with a limiting sleeve. There is a circular limiting hole in the center of the limiting sleeve. Check whether the tip of the tungsten filament is in the center of the limiting hole and whether the tip of the filament is flush with the top surface of the limiting sleeve.

[0013] Furthermore, in step 1, the center sleeve positioning hole of the frustum base is aligned with the base positioning platform on the base plate, and the base positioning platform is embedded in the center sleeve positioning hole.

[0014] Furthermore, in step 2, one end of the outer shell with the groove faces upward; the outer wall of the bottom of the outer shell fits with the inner wall of the annular boss on the frustum base.

[0015] Furthermore, in step 3, the bottom surface of the center sleeve is embedded in the center sleeve positioning hole, and the bottom surface of the center sleeve contacts the base positioning platform at the bottom of the center sleeve positioning hole, and the base positioning platform is used to support and position the center sleeve.

[0016] Furthermore, in step 3, a pair of first angle lines symmetrical about the center are provided on the outer shell, and a pair of second angle lines symmetrical about the center are provided on the central sleeve;

[0017] The two first angle lines on the outer shell are aligned with the two second angle lines on the center sleeve.

[0018] Furthermore, in step 4, the lamp pin positioning core is cylindrical, and the outer wall of the lamp pin positioning core fits with the inner wall of the center sleeve.

[0019] Furthermore, in step 5, the first filament column and the second filament column fixed with the tungsten filament are inserted into the filament holder, and then the filament holder is fixed on the lamp pin positioning core.

[0020] Furthermore, in step 6, if the filament tip of the tungsten filament is not at the center of the limiting through hole or the filament tip and the top surface of the limiting sleeve are not on the same plane, a new tungsten filament and a new filament holder are used, and the above step 5 is repeated.

[0021] Furthermore, in step 6, a pair of symmetrical positioning pin holes are provided on the housing; the positioning pin holes include a first positioning pin hole and a second positioning pin hole, a first positioning pin is provided in the first positioning pin hole, and a second positioning pin is provided in the second positioning pin hole; the first positioning pin and the second positioning pin both pass through the housing and can abut against the wall outside the center sleeve;

[0022] If the filament tip of the tungsten filament is at the center of the limiting through hole and the filament tip and the top surface of the limiting sleeve are on the same plane, tighten the first positioning pin and the second positioning pin at the same time, and use the first positioning pin and the second positioning pin to fix the center sleeve and position it.

[0023] Furthermore, the above-mentioned method for quickly installing the filament of a tungsten filament scanning electron microscope further includes step 7;

[0024] Step 7: Install the positioned tungsten filament into the scanning electron microscope.

[0025] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0026] (1) By adopting the quick filament installation method of the present invention, since the central axes of the outer shell 3, the center sleeve 4 and the lamp foot positioning core 5 always coincide with each other, it can ensure that the filament tip of the tungsten filament on the lamp foot positioning core 5 is always in the center of the limiting through hole 71, that is, it can ensure that the filament tip of the tungsten filament is in the center position of the electron microscope lampshade and the electron microscope lamp holder 8, thereby ensuring that the tungsten filament is accurately positioned.

[0027] (2) The present invention ensures that the tungsten filament is always exposed 1 mm from the lampshade by setting the tip of the filament to be always flush with the top surface of the limiting sleeve 7, thereby ensuring the installation accuracy of the tungsten filament, thereby ensuring that the tungsten filament of the scanning electron microscope can work stably in the best working state, and at the same time ensuring the best magnification observation and analysis effect of the scanning electron microscope.

[0028] (3) The rapid filament installation method of the present invention greatly shortens the filament replacement time. An unskilled worker can accurately complete the filament installation and replacement work in a maximum of five minutes, which greatly improves the filament replacement efficiency.

[0029] (4) The present invention can ensure the consistency of each filament replacement, while extending the service life of the filament by 10 to 20 times, greatly reducing the procurement cost of the filament, and optimizing the working state of the scanning electron microscope.

[0030] In the present invention, the above-mentioned technical solutions can be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages will become apparent from the description or be understood through practice of the present invention. The objectives and other advantages of the present invention can be achieved and obtained through the embodiments of the description and the contents particularly pointed out in the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings are only for the purpose of illustrating particular embodiments and are not to be considered limiting of the present invention. Like reference symbols denote like parts throughout the drawings.

[0032] Figure 1This is a schematic diagram of the structure of the filament quick installation tool for the tungsten filament scanning electron microscope;

[0033] Figure 2 This is a schematic diagram of the filament quick installation tool for the tungsten filament scanning electron microscope;

[0034] Figure 3 The present invention is a structural schematic diagram of using the filament quick installation tool of the present invention to install a tungsten filament on the electron microscope lamp holder of a scanning electron microscope.

[0035] Reference numerals:

[0036] 1-base plate; 2-base; 3-housing; 4-center sleeve; 5-lamp foot positioning core; 6-filament holder; 7-limiting sleeve; 11-base positioning platform; 21-center sleeve positioning hole; 31-locating pin; 32-first angle line; 41-second angle line; 51-filament column socket; 61-filament column; 71-limiting through hole; 8-electron microscope lamp holder; 9-positioning screw. DETAILED DESCRIPTION

[0037] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0038] In one aspect, the present invention provides a method for quickly installing a filament of a tungsten filament scanning electron microscope, the method comprising the following steps:

[0039] Step 1: Place the base plate 1 on the workbench, and then place the frustum base 2 on the base plate 1;

[0040] In the above step 1, the center sleeve positioning hole 21 of the frustum base 2 corresponds to the position of the base positioning platform 11 on the base plate 1, the base positioning platform 11 is embedded in the center sleeve positioning hole 21, and the center axis of the frustum base 2 coincides with the center axis of the base plate 1.

[0041] Step 2: Place the housing 3 on the truncated cone base 2, with the end of the housing 3 with the groove facing upwards. The outer wall of the bottom of the housing 3 fits in with the inner wall of the annular boss on the truncated cone base 2, and the central axis of the housing 3 coincides with the central axis of the base assembly.

[0042] Step 3: Install the center sleeve 4 into the cavity of the housing 3. The bottom surface of the center sleeve 4 is embedded in the center sleeve positioning hole 21 and contacts the base positioning platform 11 at the bottom of the center sleeve positioning hole 21. The base positioning platform 11 is used to support and position the center sleeve 4.

[0043] In step 3 above, align the two first angle lines 32 on the outer shell 3 with the two second angle lines 41 on the center sleeve 4 so that the central axis of the outer shell 3 coincides with the central axis of the center sleeve 4;

[0044] Step 4: Insert the lamp pin positioning core 5 into the center hole of the center sleeve 4, so that the outer wall of the lamp pin positioning core 5 fits with the inner wall of the center sleeve 4; the center axis of the lamp pin positioning core 5 coincides with the center axis of the center sleeve 4;

[0045] Step 5: Insert the first filament column and the second filament column fixed with tungsten filaments into the filament holder 6, and fix the filament holder 6 on the lamp foot positioning core 5;

[0046] In the above step 5, the tungsten filament is fixed on the first filament post and the second filament post. The first filament post passes through the third filament post socket and is fixed in the first filament post socket. The second filament post passes through the fourth filament post socket and is fixed in the second filament post socket.

[0047] Step 6: Cover the housing 3 with the limiting sleeve 7 and check whether the tip of the tungsten filament is at the center of the limiting through hole 71;

[0048] It should be noted that the housing is provided with a pair of first positioning pin holes and second positioning pin holes symmetrical about the center, the first positioning pin hole is provided with a first positioning pin, and the second positioning pin hole is provided with a second positioning pin; the first positioning pin and the second positioning pin both pass through the housing and can abut against the wall outside the center sleeve;

[0049] In step 6, if the filament tip of the tungsten filament is not located at the center of the limiting through hole 71 or the filament tip and the top surface of the limiting sleeve 7 are not in the same plane, a new tungsten filament is used and step 5 is repeated.

[0050] If the filament tip of the tungsten filament is at the center of the limiting through hole 71 and the filament tip is on the same plane as the top surface of the limiting sleeve 7, tighten the first positioning pin 31 and the second positioning pin at the same time, and use the first positioning pin 31 and the second positioning pin to fix the center sleeve 4 and position it.

[0051] Step 7: Install the positioned tungsten filament into the scanning electron microscope;

[0052] It should be noted that when installing the positioned tungsten filament onto the microscope lamp holder 8 of the scanning electron microscope, it is necessary to install part of the structure in the filament quick installation tooling onto the microscope lamp holder together with the tungsten filament, and then remove part of the structure in the above-mentioned filament quick installation tooling.

[0053] The specific process is as follows: remove the base assembly and the limit assembly from the filament quick installation tooling with the tungsten filament positioned, that is, remove the base plate 1, the frustum base 2 and the limit sleeve 7; then move the outer shell 3 together with the center sleeve 4, the lamp foot positioning core 5 and the filament holder 6 into the electron microscope lamp holder 8 of the scanning electron microscope, cover it with the lampshade, and complete the rapid replacement and installation of the tungsten filament.

[0054] In the above step 7, first, when the housing 3 together with the center sleeve 4, the lamp foot positioning core 5 and the filament holder 6 are installed in the electron microscope lamp holder 8, the four positioning screws 9 on the scanning electron microscope are first used to penetrate the four rectangular grooves on the housing 3 in the radial direction. The four positioning screws 9 extend through one end of the housing 3 to the bottom surface of the filament holder 6 and slightly contact the bottom surface of the filament holder 6; secondly, the four positioning screws 9 are tightened to leave the filament holder together with the tungsten filament on the electron microscope lamp holder 8 (as shown in FIG. Figure 3 As shown), remove the outer shell 3, the center sleeve 4 and the lamp pin positioning core 5 (because the outer shell and the center sleeve are fixed together by the positioning pin 31, the two are removed together, and then the lamp pin positioning core is removed. When removing the outer shell, the center sleeve and the lamp pin positioning core, they can be removed manually without the help of other tools). At this time, the first filament column and the second filament column on the filament holder 6 are separated from the first filament socket and the second filament socket on the lamp pin positioning core 5; finally, cover the lampshade, and the tungsten filament is exposed 1mm from the lampshade, completing the quick replacement of the tungsten filament. After the tungsten filament is replaced, no additional adjustment is required, and the scanning electron microscope can be put into use.

[0055] Step 8. Place the removed outer shell 3 and center sleeve 4 on the conical base 2. Since the outer shell 3 and the center sleeve 4 are fixed by the first positioning pin 31 and the second positioning pin, the relative positions of the two will not change (that is, the two lines of the first angle line 32 of the outer shell correspond to and are aligned with the two lines of the second angle line 41 of the center sleeve); then insert the lamp foot positioning core 5 into the center sleeve 4.

[0056] Step 9. When it is necessary to reposition and install a new tungsten filament, install the filament holder 6 with the tungsten filament onto the lamp foot positioning core 5, and then repeat steps 6 to 8.

[0057] Compared with the prior art, (1) the quick filament installation method of the present invention ensures that the central axes of the outer shell 3, the center sleeve 4 and the lamp foot positioning core 5 always coincide with each other, thereby ensuring that the filament tip of the tungsten filament on the lamp foot positioning core 5 is always in the center of the limiting through hole 71, that is, ensuring that the filament tip of the tungsten filament is in the center position of the electron microscope lampshade and the electron microscope lamp holder 8, thereby ensuring that the tungsten filament is accurately positioned.

[0058] (2) The present invention ensures that the tungsten filament is always exposed 1 mm from the lampshade by setting the tip of the filament to be always flush with the top surface of the limiting sleeve 7, thereby ensuring the installation accuracy of the tungsten filament, thereby ensuring that the tungsten filament of the scanning electron microscope can work stably in the best working state, and at the same time ensuring the best magnification observation and analysis effect of the scanning electron microscope.

[0059] (3) The rapid filament installation method of the present invention greatly shortens the filament replacement time. An unskilled worker can accurately complete the filament installation and replacement work in a maximum of five minutes, which greatly improves the filament replacement efficiency.

[0060] (4) The present invention can ensure the consistency of each filament replacement, while extending the service life of the filament by 10 to 20 times, greatly reducing the procurement cost of the filament, and optimizing the working state of the scanning electron microscope.

[0061] On the other hand, the present invention provides a tungsten filament scanning electron microscope filament quick installation tool, such as Figure 1 As shown, from bottom to top, it includes a base assembly, a mounting assembly and a limit assembly; wherein, the mounting assembly includes a shell 3, a center sleeve 4, a lamp foot positioning core 5 and a filament holder 6 arranged coaxially; the shell 3 and the center sleeve 4 are both hollow cylindrical structures with openings at both ends, the center sleeve 4 is sleeved in the shell 3, and the lamp foot positioning core 5 is arranged in the center sleeve 4; the tungsten filament is installed on the filament holder 6, and the filament holder 6 is arranged on the lamp foot positioning core 5; a limit through hole 71 is provided at the center of the limit assembly, and the limit assembly is arranged on the top of the mounting assembly; the tungsten filament passes through the limit through hole 71 and is flush with the top surface of the limit assembly.

[0062] Specifically, the base assembly of the present invention is arranged on a workbench, and the installation assembly is arranged on the base assembly, and the base assembly is used to support and fix the installation assembly; the installation assembly includes an outer shell 3, a center sleeve 4, a lamp pin positioning core 5 and a filament holder 6, wherein the outer shell 3, the center sleeve 4, the lamp pin positioning core 5, the filament holder 6 are coaxially arranged with the base assembly and the limit assembly; the outer shell 3 and the center sleeve 4 are both hollow cylindrical structures with a certain thickness and open at both ends, the center sleeve 4 is sleeved in the outer shell 3, the outer diameter of the center sleeve 4 is equal to the inner diameter of the outer shell 3, and the top surface height of the center sleeve 4 is less than the top surface height of the outer shell 3; the lamp pin positioning core 5 is cylindrical, and the lamp pin positioning core 5 is sleeved in the center sleeve 4, the outer diameter of the lamp pin positioning core 5 is equal to the inner diameter of the center sleeve 4, the top surface of the lamp pin positioning core 5 is used to fix the filament holder 6, and the filament holder 6 is used to fix the tungsten filament. After the tungsten filament is fixed on the filament holder 6, use the limiting assembly to cover the mounting assembly, and the filament tip of the tungsten filament passes through the above-mentioned limiting through hole 71; after the limiting assembly is installed, check whether the filament tip of the tungsten filament is in the center of the limiting through hole 71 and check whether the filament tip is flush with the top surface of the limiting assembly. If the filament tip of the tungsten filament is in the center of the limiting through hole 71 and the filament tip of the tungsten filament is flush with the top surface of the limiting assembly, remove the limiting assembly and the base assembly, and install the mounting assembly with the tungsten filament into the tungsten filament scanning electron microscope, and the tungsten filament replacement is completed. If the filament tip of the tungsten filament is not in the center of the limiting through hole 71, or the filament tip of the tungsten filament is not flush with the top surface of the limiting assembly (that is, the filament tip of the tungsten filament is higher or lower than the top surface of the limiting assembly), remove the limiting assembly and replace the next set of new tungsten filaments on the top surface of the lamp foot positioning core 5 until the filament tip of the tungsten filament is in the center of the limiting through hole 71 and the filament tip of the tungsten filament is flush with the top surface of the limiting assembly.

[0063] It should be emphasized that the above-mentioned limiting through hole 71 of the present invention is a circular hole. Since the base assembly, mounting assembly, shell 3, center sleeve 4, lamp foot positioning core 5, filament holder 6 and limiting assembly are all arranged with the same central axis, the filament tip of a tungsten filament of qualified quality can and must be located at the center of the limiting through hole 71. If the filament tip of the tungsten filament is not located at the center of the limiting through hole 71, it means that the quality of the tungsten filament is unqualified. Therefore, the present invention can also quickly check the filament quality of the tungsten filament.

[0064] In the prior art, most people visually inspect the filament to see if it's centered in the lamp holder. This observation varies from person to person, leading to varying installation results. If the installed tungsten filament isn't centered, when power is applied, the electron beam emitted by the tungsten filament will be affected by the nearby edge of the lampshade and deviate from the center. This creates a voltage difference between the electron beam and the edge of the lampshade hole, causing discharge and potentially burning the filament. Compared to the prior art, the present invention has the following advantages:

[0065] (1) The quick filament installation tool of the present invention can ensure accurate positioning of the tungsten filament. By arranging the housing 3, center sleeve 4, lamp foot positioning core 5, filament holder 6, base assembly and limit assembly coaxially (i.e., they include the same central axis), the present invention can ensure that the filament tip of the tungsten filament is also on the central axis, that is, the filament is always in the center of the lampshade and lamp holder.

[0066] (2) The filament quick installation tool of the present invention can shorten the filament replacement time and increase the service life of the filament. In the prior art, it usually takes a skilled worker at least two hours to replace the filament, and the results are not necessarily consistent each time. An unskilled worker may not be able to install it in place in a day, which is extremely inefficient and the life of the filament cannot be guaranteed. However, using the filament quick installation tool of the present invention, an unskilled worker can accurately complete the filament installation work in a maximum of five minutes, greatly shortening the filament replacement time and extending the service life of the filament.

[0067] (3) The present invention sets the filament tip of the tungsten filament flush with the top surface of the limit assembly, thereby ensuring that the filament tip is exposed to the same height above the lampshade hole plane each time the tungsten filament is installed in the tungsten filament scanning electron microscope, and ensuring that the filament tip is exposed to a fixed height of 1 mm above the lampshade hole plane, thereby avoiding the edge of the herringbone filament being too close to the edge of the lampshade hole due to excessive exposure of the filament, causing discharge and burning of the filament. At the same time, it can avoid the electron beam being weakened due to the filament not being exposed, and a part of the electron beam will hit the inner wall of the lampshade hole, reducing the excitation effect. The deficiency can only be compensated by increasing the filament current, which makes the filament very easy to burn out due to excessive current, shortening the service life. Therefore, the present invention can extend the service life of the filament by 10 to 20 times.

[0068] (4) The use of the filament quick installation tool of the present invention can ensure the consistency of each filament replacement, which can not only ensure that the tungsten filament of the scanning electron microscope works stably in the best working state, but also ensure the best magnification observation and analysis effect of the scanning electron microscope.

[0069] In order to support and position the installation component, the base component of the present invention includes a base plate 1; the base plate 1 includes a columnar mounting platform, and a base positioning platform 11 is protruded at the center of the base plate 1, and the base positioning platform 11 is integrally formed with the columnar mounting platform.

[0070] Specifically, the center of the columnar mounting platform is located on a base positioning platform 11. The columnar mounting platform and base positioning platform 11 are coaxially arranged and integrally formed. The outer diameter of base positioning platform 11 is equal to that of center sleeve 4. When center sleeve 4 is installed within housing 3, its bottom surface contacts base positioning platform 11, providing positioning and support for center sleeve 4.

[0071] Compared with the prior art, the present invention utilizes the base positioning platform 11 to support and position the center sleeve 4, ensuring that the center axis of the center sleeve 4 and the center axis of the base plate 1 are on the same vertical line (ie, arranged coaxially).

[0072] In order to fix and position the shell 3, the base assembly of the present invention also includes a frustum base 2; the frustum base 2 is arranged above the base plate 1; a center sleeve positioning hole 21 is provided at the center of the frustum base 2; the outer diameter of the base positioning platform 11 is equal to the outer diameter of the center sleeve positioning hole 21, and the base positioning platform 11 is nested in part of the center sleeve positioning hole 21.

[0073] Specifically, if Figure 1 and Figure 2 As shown, a center sleeve positioning hole 21 is provided at the center of the frustum base 2 of the present invention. The outer diameter of the center sleeve positioning hole 21 is equal to the outer diameter of the base positioning platform 11 and the outer diameter of the center sleeve 4. The bottom of the center sleeve 4 is embedded in the upper half of the center sleeve positioning hole 21, and the base positioning platform 11 is embedded in the lower half of the center sleeve positioning hole 21. The top surface of the base positioning platform 11 is in contact with the bottom surface of the center sleeve 4.

[0074] Compared with the prior art, the present invention can fix and position the center sleeve 4 by providing a truncated cone base 2 and providing a center sleeve positioning hole 21 at the center of the truncated cone base 2, ensuring that the center axis of the center sleeve 4 coincides with the center axis of the base plate 1.

[0075] In order to further fix and position the shell 3, the shell 3 of the present invention is arranged on the top surface of the conical base 2; an annular boss is provided along the outer edge of the top surface of the conical base 2, and the inner diameter of the annular boss is equal to the outer diameter of the shell 3.

[0076] Specifically, an annular boss is provided along the outer edge of the top surface of the conical base 2. The inner diameter of this boss is equal to the outer diameter of the housing 3. The bottom of the housing 3 is nestled within this boss, securing the bottom of the housing 3 and preventing any slight movement during filament replacement that could affect accurate filament installation. Furthermore, the central axis of the boss coincides with the central axis of the housing 3, ensuring that the tip of the replaced tungsten filament remains aligned with this central axis.

[0077] In order to further improve the installation accuracy of the tungsten filament, the shell 3 of the present invention is provided with a pair of first angle lines 32 symmetrical about the center, and the center sleeve 4 is provided with a pair of second angle lines 41 symmetrical about the center; when the center sleeve 4 is installed in the shell 3, the first angle line 32 is aligned with the second angle line 41.

[0078] Specifically, a pair of centrally symmetrical first angle lines 32 are provided on the outer wall of the shell 3, and a pair of second angle lines 41 that are also centrally symmetrical are provided on the top surface of the center sleeve 4. When the center sleeve 4 is sleeved in the shell 3, the bottom of the center sleeve 4 is embedded in the center sleeve positioning hole 21, and the top surface of the center sleeve 4 is lower than the top surface of the shell 3. Aligning the two lines of the first angle lines 32 with the two lines of the second angle lines 41 can ensure that the shell 3 and the center sleeve 4 have a high degree of concentricity, thereby ensuring that the tungsten filament can be on the center axis.

[0079] In order to facilitate the replacement of the tungsten filament, the lamp pin positioning core 5 of the present invention is provided with a filament column insertion hole 51 ; the filament holder 6 is disc-shaped and is provided with a filament column 61 , which is disposed in the filament column insertion hole 51 .

[0080] Specifically, a first filament post socket and a second filament post socket are provided on the lamp pin positioning core 5, and a third filament post socket and a fourth filament post socket are provided on the filament holder 6, wherein the positions of the first filament post socket and the third filament post socket correspond, and the positions of the second filament post socket and the fourth filament post socket correspond, and the filament post 61 includes a first filament post and a second filament post, and the tungsten filament is fixed on the first filament post and the second filament post, the first filament post passes through the third filament post socket and is fixed in the first filament post socket, and the second filament post passes through the fourth filament post socket and is fixed in the second filament post socket.

[0081] It should be noted that the present invention fixes the tungsten filament through the filament holder 6 and uses the lamp foot positioning core 5 to fix the filament holder 6. When the tungsten filament needs to be replaced, the old, damaged or unqualified tungsten filament is replaced together with the filament holder 6 and replaced with a new filament holder 6 and tungsten filament of qualified quality.

[0082] It should be noted that the housing 3 of the present invention is provided with a pair of symmetrical positioning pin holes about the center; positioning pins are provided in the positioning pin holes, and the positioning pins pass through the housing 3 and can abut against the outer wall of the center sleeve 4.

[0083] Specifically, a first locating pin hole and a second locating pin hole are provided on the housing 3; wherein the first locating pin hole and the second locating pin hole are symmetrical about the central axis of the housing 3, a first locating pin 31 is provided in the first locating pin hole, and a second locating pin is provided in the second locating pin hole. The first locating pin 31 and the second locating pin both penetrate the cylindrical wall of the housing 3 and abut against the outer wall of the center sleeve 4 sleeved in the housing 3. After the tungsten filament is replaced, that is, the filament tip of the tungsten filament is at the center of the limiting through hole 71 and the filament tip and the top surface of the limiting sleeve 7 are in the same plane, the first locating pin 31 and the second locating pin are tightened simultaneously. The first locating pin 31 and the second locating pin penetrate one end of the housing 3 and abut against the outer wall of the center sleeve 4. The center sleeve 4 is limited in both the axial and circumferential directions, that is, the center sleeve 4 is fixed to the housing 3. At this time, the limiting sleeve 7 is removed, and the housing 3, together with the center sleeve 4, the lamp foot positioning core 5 and the filament holder 6, is moved into the lamp holder of the tungsten filament scanning electron microscope. The lampshade is then covered to complete the rapid replacement and installation of the tungsten filament.

[0084] It should be emphasized that the structure of the filament quick installation tool of the present invention matches the structure of the interlayer of the electron microscope lamp holder 8 of the scanning electron microscope and the dimensions are consistent. The two fit together smoothly. After the new tungsten filament is installed on the filament holder 6, the outer shell 3, the center sleeve 4, the lamp foot positioning core 5 and the filament holder 6 are assembled together into the scanning electron microscope. The electron microscope lamp holder 8 of the scanning electron microscope includes a plurality of positioning screws 9, and the plurality of positioning screws 9 correspond to the positions of the plurality of grooves with upward openings set on the outer shell 3 and are equal in number.

[0085] Specifically, the top surface of the shell 3 of the present invention is provided with four rectangular grooves with openings facing upward, and the microscope lamp holder 8 of the scanning electron microscope is provided with four positioning screws 9. After the tungsten filament is installed, the shell 3 together with the center sleeve 4, the lamp foot positioning core 5 and the filament holder 6 are moved into the microscope lamp holder 8. The four positioning screws 9 on the scanning electron microscope can pass through the four rectangular grooves, and the penetrating parts of the four positioning screws 9 can be located between the filament holder 6 and the lamp foot positioning core 5 and contact the filament holder 6. Tighten the four positioning screws 9, and the first filament column and the second filament column on the filament holder 6 are separated from the lamp foot positioning core 5. At this time, cover the lampshade, and the tungsten filament is exposed 1mm from the lampshade. After the tungsten filament is replaced, remove the shell 3, the center sleeve 4 and the lamp foot positioning core 5 to complete the quick replacement and installation of the tungsten filament without the need for additional adjustment.

[0086] Compared with the prior art, firstly, the filament quick installation tool of the tungsten filament scanning electron microscope of the present invention is customized according to the structure of the electron microscope lamp holder 8 of the scanning electron microscope. The structures of the two match, the sizes of the two are consistent, and the two can fit together smoothly. The filament quick installation tool of the present invention can be used to quickly replace the tungsten filament.

[0087] Secondly, the structure of the filament quick installation tool of the present invention is simple, and the central axes of the shell 3, the center sleeve 4 and the lamp foot positioning core 5 coincide, that is, the center coaxiality of the three is high. The filament center coaxiality requirement of the scanning electron microscope can be achieved by inserting the filament holder 6 with a tungsten filament into the lamp foot positioning core 5, and there is no need to adjust the front, back, left and right positions of the filament holder 6.

[0088] Furthermore, the lamp foot positioning core 5 and the center sleeve 4 of the present invention are installed with a tight fit, and do not require fastening screws for tightening, and will not loosen; the center sleeve 4 and the outer shell 3 are fixedly connected by a first positioning pin 31 and a second positioning pin, and the two are coaxially arranged and stable and firm. By coaxially arranging the lamp foot positioning core 5, the center sleeve 4 and the outer shell 3, it is ensured that the filament tip of the tungsten filament is always in the center of the limiting through hole 71, and it is ensured that the filament tip of the tungsten filament and the top surface of the limiting sleeve 7 are in the same plane. Therefore, the height of the filament quick installation tooling of the present invention ensures the height of the filament tip in the electron microscope lamp holder 8.

[0089] In addition, the present invention can quickly check the filament quality of the tungsten filament by inserting the first filament post and the second filament post fixed with the tungsten filament into the respective filament post holes on the filament holder 6 and the lamp foot positioning core 5, including checking whether the filament is centered and whether the height of the filament tip meets the requirements, without touching the filament and causing damage to it.

[0090] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with this technical field within the technical scope disclosed by the present invention should be covered by the scope of protection of the present invention.

Claims

1. A method for quickly installing a tungsten filament scanning electron microscope filament, characterized in that: The following steps are involved: Step 1: When installing the tungsten filament for the first time, first place the base plate on the workbench, and then place the frustum base on the base plate, with the central axis of the frustum base coinciding with the central axis of the base plate; Step 2: Place the outer shell on the frustum base, with the central axis of the outer shell coinciding with the central axis of the base plate and the frustum base; the outer shell and the central sleeve are both hollow cylindrical structures with openings at both ends; Step 3: insert the center sleeve into the cavity of the shell, with the center axis of the center sleeve coinciding with the center axis of the shell; Step 4: Install the lamp foot positioning core into the center sleeve, and ensure that the center axis of the lamp foot positioning core coincides with the center axis of the center sleeve; Step 5: Install the filament holder with the tungsten filament onto the lamp foot positioning core, so that the central axis of the filament holder coincides with the central axis of the lamp foot positioning core; Step 6. Cover the top of the housing with a limiting sleeve. There is a circular limiting hole in the center of the limiting sleeve. Check whether the tip of the tungsten filament is in the center of the limiting hole and whether the tip of the filament is flush with the top surface of the limiting sleeve.

2. The method for quickly installing a filament of a tungsten filament scanning electron microscope according to claim 1, characterized in that: In step 1, the center sleeve positioning hole of the frustum base is aligned with the base positioning platform on the base plate, and the base positioning platform is embedded in the center sleeve positioning hole.

3. The method for quickly installing a tungsten filament scanning electron microscope according to claim 2, wherein: In step 2, the end of the housing with the groove facing upward; the outer wall of the bottom of the housing fits with the inner wall of the annular boss on the frustum base.

4. The method for quickly installing a filament of a tungsten filament scanning electron microscope according to claim 3, characterized in that: In step 3, the bottom surface of the center sleeve is embedded in the center sleeve positioning hole, and the bottom surface of the center sleeve is in contact with the base positioning platform at the bottom of the center sleeve positioning hole, and the base positioning platform is used to support and position the center sleeve.

5. The method for quickly installing a filament of a tungsten filament scanning electron microscope according to claim 4, characterized in that: In step 3, the outer shell is provided with a pair of first angle lines symmetrical about the center, and the central sleeve is provided with a pair of second angle lines symmetrical about the center; The two first angle lines on the shell are aligned with the two second angle lines on the center sleeve.

6. The method for quickly installing a filament of a tungsten filament scanning electron microscope according to claim 1, characterized in that: In step 4, the lamp pin positioning core is cylindrical, and the outer wall of the lamp pin positioning core fits with the inner wall of the center sleeve.

7. The method for quickly installing a filament of a tungsten filament scanning electron microscope according to claim 1, characterized in that: In step 5, the first filament column and the second filament column fixed with the tungsten filament are inserted into the filament holder, and then the filament holder is fixed on the lamp pin positioning core.

8. The method for quickly installing a tungsten filament scanning electron microscope according to claim 1, wherein: In step 6, if the filament tip of the tungsten filament is not at the center of the limiting through hole or the filament tip and the top surface of the limiting sleeve are not on the same plane, use a new tungsten filament and a new filament holder and repeat step 5.

9. The method for quickly installing a filament of a tungsten filament scanning electron microscope according to claim 8, characterized in that: In step 6, a pair of first and second positioning pin holes are provided on the housing, which are symmetrical about the center. A first positioning pin is provided in the first positioning pin hole, and a second positioning pin is provided in the second positioning pin hole. Both the first and second positioning pins pass through the housing and can abut against the wall outside the center sleeve. If the filament tip of the tungsten filament is at the center of the limiting through hole and the filament tip and the top surface of the limiting sleeve are on the same plane, tighten the first positioning pin and the second positioning pin at the same time, and use the first positioning pin and the second positioning pin to fix the center sleeve and position it.

10. The method for quickly installing a filament of a tungsten filament scanning electron microscope according to any one of claims 1 to 9, characterized in that: Also includes step 7; Step 7: Install the positioned tungsten filament into the scanning electron microscope.

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