Chip suction head and optical detection device

Abstract

The present invention discloses a chip suction head and an optical detection device, and relates to the field of chip detection technology. It includes a box body 1, a box body 2, a rebound mechanism, a suction head device and a suction head distribution mechanism, wherein the box body 2 is vertically provided with a plurality of straight tube grooves, the box body 1 is provided with an inner cavity, and the box body 1 is also provided with a plurality of air circulation grooves, each of which connects the inner cavity and the corresponding straight tube groove, and the suction head distribution mechanism is installed at the inner cavity to control the air circulation of each air circulation groove. The present invention can concentrate a plurality of suction ports onto a platform through the arrangement of the suction head device and the suction head distribution mechanism, and realize the individual control of each suction port through the internal air path channel, and at the same time ensure the accuracy and stability of the suction port through the rebound mechanism, and reduce a large amount of air pipe interlacing and confusion on the premise of meeting the adsorption requirements, thereby improving the overall appearance and detection flexibility.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and in particular to a chip suction head and an optical detection device. Background Art

[0002] During the optical inspection of chips, batch inspection is usually used to improve inspection efficiency. Either the chips are placed in a centralized inspection box or automated equipment is used to increase the inspection speed. The second method is to improve chip protection and facilitate picking, and most chips are moved by adsorption picking.

[0003] For example, the chip suction assembly with application number 200810133983.0 discloses a chip suction head using vacuum suction. Most chip suction heads on the market and the above-mentioned suction heads use one suction head corresponding to one vacuum air pipe to achieve precise control.

[0004] However, when batch picking of chips is required, the above method will result in a large number of air tubes, which means that each air tube needs to be controlled individually, and during the movement of the chips, the intersection of many air tubes affects the visual experience. Under the condition of space limitation, the flexibility of detection is also limited to a certain extent, and a large amount of available space is occupied within a certain space, and the space utilization rate is low. Therefore, the present invention provides a new solution. Summary of the invention

[0005] The object of the present invention is to provide a chip suction head and an optical detection device to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solution: a chip suction head, comprising: a chip suction head mechanism, the chip suction head mechanism comprising:

[0007] Box body 1, box body 2, rebound mechanism, suction head device and suction head dispensing mechanism;

[0008] The box body 2 is vertically provided with a plurality of straight tube grooves, the box body 1 is provided with an inner cavity, and the box body 1 is also provided with a plurality of air circulation grooves, each of which is connected with the inner cavity and the corresponding straight tube groove;

[0009] The suction head distribution mechanism is installed at the inner cavity to control the air circulation of each air circulation slot. The suction head device is installed at the straight tube slot. Each air circulation slot controls the corresponding suction head device to perform adsorption action. The rebound mechanism is installed below the second box body to improve the adsorption effect of the suction head device.

[0010] Further to this solution, a thread is provided at the top of the straight tube groove, and the suction head device includes a screw joint, which is screwed to the thread of the straight tube groove, a suction straw is fixed to the bottom end of the screw joint, a stop block is fixed to the bottom end of the suction straw, and a silicone suction head is located below the stop block.

[0011] Further to this solution, the rebound mechanism includes a transverse plate, which is located below the second box body and above the stop block, wherein a return spring is also arranged between the transverse plate and the bottom of the second box body.

[0012] Furthermore, regarding this solution, limiting grooves are provided on both sides of the two bottom ends of the box body, and limiting rods are slidably disposed on the inner walls of the limiting grooves. The limiting rods are respectively inserted into the two ends of the horizontal plate, and screws for fixing the limiting rods are also provided at both ends of the horizontal plate. The limiting grooves allow the limiting rods to move vertically upward within a certain range.

[0013] Further to this scheme, the suction head dispensing mechanism includes a valve housing, holes are provided at both ends of the valve housing, valve posts are slidably arranged on the inner walls of the holes at both ends, a gap is left between the two valve posts, a connecting piece connecting the two valve posts is provided at the gap, a connecting hole is provided on the surface of the valve housing, the connecting hole corresponds to the position of the air circulation groove, a yield groove is provided on the surface of the valve post to connect the inner cavity with the air circulation groove, an air circulation hole is provided on one side of the inner cavity, and a vacuum duct connected to the air circulation hole is provided on the outside of the box body.

[0014] Further to this solution, a connecting spring is arranged between one end of the valve column in the axial position and the inner wall of the inner cavity, wherein a telescopic rod is rotatably installed on the inner wall of one end of the inner cavity, and the other end of the telescopic rod is connected to the valve column, and a motor 2 is installed on the outside of the box body 1, and the output end of the motor 2 is fixed to one end of the rotating shaft of the telescopic rod.

[0015] Further regarding this solution, a connecting piece is arranged between the connecting spring and the valve column, and the connecting piece includes an abutment plate which rotates on one side of the valve column, and an annular groove is arranged on the surface of the valve column near the abutment plate, and a limiting clamping ring which slides in the annular groove is fixed on one side of the abutment plate to maintain the limit, wherein a circle of balls is also arranged at one end of the valve column, and one side of the abutment plate rolls on the balls.

[0016] Furthermore, regarding this solution, a gear rod is provided inside the inner cavity, which is maintained on one side with the moving direction of the valve column, and the bottom of one end of the gear rod is connected to the abutment plate through a connecting rod, wherein a gear is also rotatably installed on one side of the inner cavity, and the gear is meshed and connected with the gear rod, and a motor is installed outside the box body, and the output end of the motor is fixed to one end of the gear rotating shaft, and a connecting tube is fixed in the middle of the two gear rods.

[0017] Further regarding this solution, the connecting piece includes a connecting tube fixed between the two valve columns, and the surfaces of both ends of the connecting tube are provided with convex rings, and an annular groove is formed between the convex ring and the valve column, wherein a clamping arc piece sliding in the two annular grooves is fixed at the bottom end of the connecting tube, and a gap is provided between the clamping arc piece and the connecting tube to ensure air circulation at both ends of the connecting tube.

[0018] An optical detection device adopts any of the above-mentioned chip suction heads, comprising: a frame, a carrier plate, a chip placement plate, an XY slide and a detection device, wherein the chip suction head mechanism is installed on the XY slide; a plurality of carrier plates are installed on the frame, and at least two chip placement plates are placed on the carrier plate, wherein the detection device is arranged between the two chip placement plates to perform optical detection on the chip, and the XY slide is horizontally mounted above the chip placement plate to pick up the chip.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] The chip suction head and optical detection device can concentrate multiple suction ports on one platform through the settings of the suction head device and the suction head distribution mechanism, and realize individual control of each suction port through the internal air path. At the same time, the accuracy and stability of the suction port are guaranteed through the rebound mechanism, and a large amount of air pipe interlacing and confusion are reduced on the premise of meeting the adsorption requirements, thereby improving the overall appearance and detection flexibility, and cooperating with common robotic arms or slides to realize precise control and detection of chips.

[0021] In addition, the device has a relatively high degree of integration. Compared with traditional chip tips and optical detection devices, it occupies a relatively smaller area and can realize batch chip detection in a limited space, which can significantly improve the chip detection speed while reducing site costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 It is a schematic diagram of the chip suction head mechanism structure of the present invention;

[0024] Figure 3 It is a schematic diagram of the cross-sectional structure of the chip suction head mechanism of the present invention;

[0025] Figure 4 It is a schematic diagram of the structure of the pipette tip dispensing mechanism of the present invention;

[0026] Figure 5 For the present invention Figure 4 The enlarged structural diagram of part a in the middle;

[0027] Figure 6 For the present invention Figure 4 The enlarged structural diagram of part B is shown in the figure.

[0028] In the figure: 1, frame; 2, carrier plate; 3, chip placement plate; 4, XY slide; 5, detection device; 6, chip suction head mechanism; 7, box body 1; 701, air circulation groove; 702, inner cavity; 703, air circulation hole; 8, box body 2; 801, straight pipe groove; 9, vacuum duct; 10, motor 1; 11, motor 2; 12, rebound mechanism; 121, horizontal plate; 122, limit rod; 123, screw; 124, limit groove; 13, suction head device; 131, suction tube; 132, screw joint ; 133, sealing rubber ring; 134, reset spring; 135, abutment block; 136, silicone suction tip; 14, suction tip distribution mechanism; 141, valve column; 1411, connecting pipe; 1412, convex ring; 1413, give way groove; 142, valve shell; 1421, connecting hole; 143, connecting pipe; 1431, clamping arc piece; 144, gear rod; 145, gear; 146, connecting spring; 147, telescopic rod; 15, abutment piece; 151, limit clamp ring; 16, ball; 17, connecting rod. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] like Figure 1 As shown, the present invention provides an optical detection device, including a chip suction head mechanism 6, a frame 1, a carrier plate 2, a chip placement plate 3, an XY slide 4 and a detection device 5. The chip suction head mechanism 6 is installed on the XY slide 4, and the chip suction head mechanism 6 is driven by the XY slide 4 to perform multi-point movement. A plurality of carrier plates 2 are provided, and the plurality of carrier plates 2 are installed on the frame 1. At least two chip placement plates 3 are installed on each carrier plate 2. The XY slide 4 is horizontally mounted on the two chip placement plates 3. The detection device 5 is installed between the two chip placement plates 3. When performing optical detection, the chip is picked up from the chip placement plate 3 by the XY slide 4, and is placed on another chip placement plate 3 after being detected by the detection device 5 in turn, and the unqualified chip is put back to its original position.

[0031] like Figure 2 and Figure 3As shown, the chip suction head mechanism 6 includes a box body 1 7, a box body 2 8, a rebound mechanism 12, a suction head device 13 and a suction head distribution mechanism 14. The box body 1 7 is installed on the top of the box body 2 8. An inner cavity 702 is opened inside the box body 1 7. The suction head distribution mechanism 14 is installed in the inner cavity 702. A plurality of straight tube grooves 801 are vertically opened in the box body 2 8. An air circulation groove 701 is opened at the top of each straight tube groove 801 for connecting each straight tube groove 801 with the inner cavity 702. The suction head device 13 is installed at the straight tube groove 801. Each suction head device 13 can be controlled simultaneously or the corresponding suction head device 13 can be controlled separately through the suction head distribution mechanism 14. A rebound mechanism 12 is arranged below the box body 2 8. The rebound mechanism 12 can be used to improve the adsorption effect of the suction head device 13 on the chip.

[0032] like Figure 3 As shown, the suction head device 13 is provided with multiple ones and the number corresponds to the straight tube groove 801. The suction head device 13 includes a screw joint 132. A thread is provided at the top of the straight tube groove 801. The screw joint 132 is screwed to the thread. The straight tube groove 801 is provided with a circle of concave ring near the screw joint 132. A sealing rubber ring 133 is arranged on the surface of the screw joint 132 to fill the concave ring to ensure the sealing performance. A suction pipe 131 is fixed at the bottom end of the screw joint 132, and a stop block 135 is fixed at the bottom end of the suction pipe 131. The bottom end of the stop block 135 is a silicone suction head 136. The silicone suction head 136 is corrugated and can have a large deformation in the vertical direction when the chip is pressed and adsorbed. The device directly contacts the chip through the silicone suction head 136.

[0033] like Figure 3 As shown, the rebound mechanism 12 includes a horizontal plate 121, and holes for the straw 131 to pass through are opened on the horizontal plate 121 at the position corresponding to each silicone suction head 136, and the diameter of the hole is not greater than the diameter of the block 135. Corresponding annular grooves are opened at the bottom of the box body 8 and the top of the horizontal plate 121 at the position corresponding to each straw 131. A plurality of reset springs 134 are arranged between the box body 8 and the horizontal plate 121. The reset spring 134 is installed between the box body 8 and the horizontal plate 121, and the top and bottom of the reset spring 134 are inserted into the upper and lower annular At the groove, the annular groove is used to limit the reset spring 134. During the specific use of the device, the chips are arranged on the placement plate through the chip placement plate 3. During detection, the chips in the same row will be adsorbed. To ensure the adsorption effect and avoid the gap between the silicone suction head 136 and the chip that affects the adsorption effect, the entire chip suction head mechanism 6 will perform a downward pressing effect during adsorption. During the downward pressing process, the silicone suction head 136 will increase the tightness between the chip, and the reset spring 134 will also give the silicone suction head 136 a certain pressure to improve the adsorption effect.

[0034] like Figure 3As shown, limiting rods 122 are inserted at both ends of the horizontal plate 121, and screws 123 are screwed at both ends of the horizontal plate 121 for fixing the limiting rods 122. Limiting grooves 124 are provided on both sides of the box body 8, and a portion of the limiting groove 124 is protruded on one side. A protrusion is provided near the top position of the limiting rod 122 to prevent the limiting rod 122 from escaping from the limiting groove 124. The setting of the limiting groove 124 allows the horizontal plate 121 to move a certain distance vertically upward, and at the same time, to a certain extent, it also avoids the possibility of chip damage caused by excessive pressing force during the chip pressing process.

[0035] like Figure 4 As shown, the bottom of the inner cavity 702 is a columnar cavity, and a valve column 141 slides on the inner wall of the cavity. Two valve columns 141 are provided, and a gap is provided between the two valve columns 141. A connecting piece is provided in the gap to connect the two valve columns 141. A column cavity with a diameter larger than the cavity is also provided in the middle of the cavity. A valve shell 142 is provided on the inner wall of the column cavity. The valve shell 142 is wrapped around the surface of the valve column 141, and a plurality of connecting holes 1421 connected to the air circulation groove 701 are provided on the surface of the valve shell 142 to ensure the connection between the inner cavity 702 and the air circulation groove 701.

[0036] like Figure 4 As shown, in order to ensure that the device can adsorb multiple chips at the same time, that is, to ensure that the vacuum pump works to allow the device to perform the adsorption action, since the inner cavity 702 is connected to the vacuum pump, each air circulation groove 701 needs to be connected to the inside of the inner cavity 702, so a yield groove 1413 is opened on the surface of the valve column 141, which allows a gap between the air circulation groove 701 and the valve column 141 and then connects with the inner cavity 702. At this time, the air circulation of each air circulation groove 701 can be controlled at the same time, which means that each suction head device 13 can be controlled at the same time.

[0037] like Figure 4 As shown, in order to ensure that the device can switch from simultaneously adsorbing and releasing multiple chips to adsorbing and releasing each chip individually, the valve column 141 needs to be rotated so that there is no gap between the curved surface of the valve column 141 and the air circulation groove 701, and the gap between the two valve columns 141 can be moved laterally to any air circulation groove 701 (or connecting hole 1421), and it is necessary to ensure that the valve column 141 can rotate and translate laterally.

[0038] like Figure 4 and Figure 5As shown, a gap is provided between the two valve posts 141 and the two ends of the inner cavity 702 to ensure that the valve posts 141 have sufficient space to move in the axial direction. A connecting spring 146 is also provided between the valve posts 141 and the two ends of the inner cavity 702 to improve the smoothness of the valve posts 141 during the lateral movement and reduce the sense of obstruction caused by the friction with the cavity wall. An abutment sheet 15 is also rotated between the connecting spring 146 and the valve posts 141. An annular groove is provided on the surface of one end of the valve posts 141 close to the abutment sheet 15. A limiting clamping ring 151 is also fixed on one side of the abutment sheet 15. The limiting clamping ring 151 Sliding on the inner wall of the annular groove and limiting the limit clamp 151, a circle of balls 16 are also arranged at one end of the valve column 141, and the abutment sheet 15 reduces the friction during the rotation process through the balls 16. A telescopic rod 147 is rotatably installed on the inner wall of one end of the inner cavity 702. The telescopic rod 147 is fixed to the valve column 141 after passing through the abutment sheet 15. A motor 2 11 is installed on the outside of the box body 1 7, and the output end of the motor 2 11 is fixed to one end of the telescopic rod 147. In order to ensure that the telescopic rod 147 can drive the valve column 141 to rotate, the telescopic rod 147 is a rod body with a non-circular cross section;

[0039] A connecting rod 17 is also fixed at the abutment piece 15, and a gear rod 144 is fixed on the top of the connecting rod 17, which is consistent with the lateral movement direction of the valve column 141. A gear 145 is rotatably installed on one side of the inner cavity 702. The gear 145 is meshed and connected with the gear rod 144 to drive the gear rod 144 to move horizontally. At the same time, due to the connection of the connecting rod 17, the valve column 141 can be displaced horizontally upward, and a connecting pipe 143 is fixed in the middle of the two gear rods 144.

[0040] like Figure 6 As shown, the connecting piece includes a connecting tube 1411 fixed between two valve columns 141, convex rings 1412 are provided at both ends of the connecting tube 1411, and a gap is provided between the convex ring 1412 and one end of the valve column 141, and a clamping arc piece 1431 is fixed at the bottom end of the connecting tube 143, the clamping arc piece 1431 is clamped in the gap and rotatably connected with the convex ring 1412, and a gap is left between the clamping arc piece 1431 and the connecting tube 1411 to ensure air circulation, and this connection method will not affect the position of the connecting tube 143 during use during the rotation of the valve column 141.

[0041] In summary, the valve column 141 can rotate and move laterally with the support of the above structure, such as Figure 3As shown, an air circulation hole 703 is opened at the inner cavity 702, and a vacuum conduit 9 connected to the air circulation hole 703 is installed on the outside of the box body 1 7. The device is allowed to pick up the chip by vacuuming. When the device adsorbs a row of chips at the same time, it is ensured that the yield groove 1413 of the valve column 141 is directly opposite to the air circulation groove 701 (or the connecting hole 1421). At this time, each air circulation groove 701 is connected to the inner cavity 702. When the vacuum pump is vacuuming, each suction head device 13 can generate suction to pick up the chips at the same time; and when the device controls the corresponding suction head device 13, the valve column 14 is rotated by the driving motor 2 11. 1 makes the valve column 141 block the air circulation groove 701, and only one air circulation groove 701 is exposed. At this time, the vacuum pump is still performing vacuuming action, and each chip is still adsorbed. A motor 10 is installed outside the box body 7, and the output end of the motor 10 is connected to the rotating shaft of the gear 145. The motor 10 controls the gear 145 to rotate, so as to control the valve column 141 to move horizontally. During the movement, the gap between the two valve columns 141 can be driven to face any air circulation groove 701. At this time, the vacuum pump only needs to stop performing vacuuming action or reverse air supply to make the corresponding suction head device 13 release the chip. In this way, each chip can be accurately picked up and released.

[0042] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is limited by the attached embodiments and their equivalents.

Claims

1. A chip suction head, characterized in that: include: A chip suction head mechanism (6), wherein the chip suction head mechanism (6) comprises: Box body 1 (7), box body 2 (8), a rebound mechanism (12), a suction tip device (13) and a suction tip dispensing mechanism (14); The box body 2 (8) is vertically provided with a plurality of straight tube grooves (801), the box body 1 (7) is provided with an inner cavity (702), and the box body 1 (7) is also provided with a plurality of air circulation grooves (701), each of which is connected to the inner cavity (702) and the corresponding straight tube groove (801); The suction head distribution mechanism (14) is installed at the inner cavity (702) to control the air circulation of each air circulation slot (701); the suction head device (13) is installed at the straight tube slot (801); each air circulation slot (701) controls the corresponding suction head device (13) to perform an adsorption action; the rebound mechanism (12) is installed below the second box body (8) to improve the adsorption effect of the suction head device (13); The tip dispensing mechanism (14) comprises a valve housing (142), wherein holes are provided at both ends of the valve housing (142), valve posts (141) are slidably arranged on the inner walls of the holes at both ends, a gap is left between the two valve posts (141), a connecting piece for connecting the two valve posts (141) is provided at the gap, a connecting hole (1421) is provided on the surface of the valve housing (142), the connecting hole (1421) corresponds to the position of the air circulation groove (701), a clearance groove (1413) is provided on the surface of the valve post (141) to connect the inner cavity (702) and the air circulation groove (701), an air circulation hole (703) is provided on one side of the inner cavity (702), and a box body (7) is provided on the outside. A vacuum conduit (9) connected to the air circulation hole (703) is provided, a connecting spring (146) is provided between one end of the valve column (141) at an axial position and the inner wall of the inner cavity (702), wherein a telescopic rod (147) is rotatably installed on the inner wall of one end of the inner cavity (702), and the other end of the telescopic rod (147) is connected to the valve column (141), a motor 2 (11) is installed outside the box body 1 (7), and the output end of the motor 2 (11) is fixed to one end of the rotating shaft of the telescopic rod (147), and a motor 1 (10) is also installed outside the box body 1 (7), and the output end of the motor 1 (10) is fixed to one end of the rotating shaft of the gear (145), and the two gear rods (144) are connected. A connecting tube (143) is fixed to the inner part of the valve column (141), a connecting piece is arranged between the connecting spring (146) and the valve column (141), the connecting piece comprises an abutting piece (15) which rotates on one side of the valve column (141), a ring groove is arranged on the surface of the valve column (141) close to the abutting piece (15), a limiting clamping ring (151) which slides in the ring groove is fixed on one side of the abutting piece (15) to maintain the limit position, wherein a circle of balls (16) is also arranged at one end of the valve column (141), one side of the abutting piece (15) rolls on the balls (16), a gear rod (144) which is consistent with the moving direction of the valve column (141) is arranged inside the inner cavity (702), and the bottom of one end of the gear rod (144) is connected to the inner cavity (702) by a connecting rod. (17) is connected to the abutment sheet (15), wherein a gear (145) is rotatably mounted on one side of the inner cavity (702), and the gear (145) is meshingly connected to the gear rod (144), and the connecting member includes a connecting tube (1411) fixed between the two valve columns (141), and the surfaces of both ends of the connecting tube (1411) are provided with convex rings (1412), and an annular groove is formed between the convex ring (1412) and the valve column (141), wherein a clamping arc sheet (1431) sliding in the two annular grooves is fixed at the bottom end of the connecting tube (143), and a gap is provided between the clamping arc sheet (1431) and the connecting tube (1411) to ensure air circulation at both ends of the connecting tube (143).

2. A chip suction head according to claim 1, characterized in that: The top of the straight tube groove (801) is provided with a thread, and the suction head device (13) comprises a screw joint (132), wherein the screw joint (132) is screwed to the thread of the straight tube groove (801), a suction tube (131) is fixed to the bottom end of the screw joint (132), a stopper (135) is fixed to the bottom end of the suction tube (131), and a silicone suction head (136) is located below the stopper (135).

3. A chip suction head according to claim 2, characterized in that: The rebound mechanism (12) comprises a horizontal plate (121), the horizontal plate (121) being located below the second box body (8) and above the stop block (135), wherein a return spring (134) is also provided between the horizontal plate (121) and the bottom of the second box body (8).

4. A chip suction head according to claim 3, characterized in that: Limiting grooves (124) are provided on both sides of the bottom end of the second box body (8), and limiting rods (122) are slidably arranged on the inner wall of the limiting grooves (124). The limiting rods (122) are respectively plugged into the two ends of the horizontal plate (121), and screws (123) for fixing the limiting rods (122) are also provided at the two ends of the horizontal plate (121). The limiting grooves (124) allow the limiting rods (122) to move in the vertical direction.

5. An optical detection device, using the chip tip according to any one of claims 1 to 4, characterized in that: include: A frame (1), a carrier plate (2), a chip placement plate (3), an XY slide table (4) and a detection device (5), wherein a chip suction head mechanism (6) is installed on the XY slide table (4); A plurality of carrier plates (2) are mounted on the frame (1), and at least two chip placement plates (3) are placed on the carrier plates (2), wherein a detection device (5) is arranged between the two chip placement plates (3) to perform optical detection on the chip, and the XY slide table (4) is horizontally mounted above the chip placement plates (3) to perform a chip picking action.

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