An electrical connection assembly for semiconductor equipment

Abstract

The present invention discloses an electrical connection assembly for semiconductor equipment, comprising a housing, a first insulator, a second insulator, an isolation assembly, a plurality of power cables and a cooling medium disturbance mechanism, wherein the first insulator and the second insulator are respectively mounted at both ends of the housing, and the first insulator and the second insulator are respectively provided with a plurality of first fixing holes and a plurality of second fixing holes, each second fixing hole matches a first fixing hole, and a plurality of power cables are arranged in the housing, and each power cable sequentially passes through a first fixing hole of the first insulator, an isolation assembly and a second fixing hole of the second insulator, so that the plurality of power cables are arranged at intervals from each other, and the two ends of the power cable are respectively fixedly connected with terminal sockets, and the cooling medium disturbance mechanism is used to drive the insulating cooling medium to flow continuously in the inner cavity of the housing to assist in heat dissipation. The electrical connection assembly of the present invention can realize fast and stable electrical connection of semiconductor equipment or electrical modules in semiconductor equipment.

Description

Technical Field

[0001] The present invention belongs to the technical field of electrical connection modules, and in particular relates to an electrical connection component for semiconductor equipment. Background Art

[0002] Electrical connection components for semiconductor devices are generally connection modules between semiconductor device components, which can realize rapid connection between multiple semiconductor device components.

[0003] The electrical connection components for semiconductor equipment generally include multiple electrical transmission lines, which are all installed in a protective housing. Terminals are installed at both ends of the electrical transmission lines, and the equipment is connected through the terminals. However, when multiple electrical transmission lines are located in a protective housing, they are generally fitted together. When the temperature of one of the electrical transmission lines rises, it will affect other electrical transmission lines close to this electrical transmission line, causing the temperature of other electrical transmission lines to also rise, thereby affecting the working performance of other electrical transmission lines. Moreover, the electrical transmission lines are all installed in the housing, and the electromagnetics released by the electrical transmission lines will interfere with each other, causing the output waveform of the equipment to be distorted and harmonics to increase at specific frequencies, affecting the stability and accuracy of the equipment's operation, and causing a series of problems such as communication interference and system failures.

[0004] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0005] The object of the present invention is to provide an electrical connection assembly for semiconductor devices, which can solve the technical problems raised in the above background technology.

[0006] In order to achieve the above object, a technical solution provided by a specific embodiment of the present invention is as follows:

[0007] An electrical connection assembly for semiconductor equipment, comprising:

[0008] case;

[0009] A first insulator and a second insulator, wherein the first insulator and the second insulator are respectively mounted at two ends of the housing, the first insulator is provided with a plurality of first fixing holes, the second insulator is provided with a plurality of second fixing holes, each of the second fixing holes matches a first fixing hole, the second insulator is provided with an elastic pin matching a transfer terminal, the second fixing hole includes a first mounting hole matching the elastic pin, the second insulator is further provided with a second mounting hole and a third mounting hole, the third mounting hole is provided between the first mounting hole and the second mounting hole, the transfer terminal is mounted in the second mounting hole, the elastic pin sequentially penetrates the first mounting hole and the third mounting hole and is connected to the transfer terminal, and the aperture of the third mounting hole, the aperture of the second mounting hole and the aperture of the first mounting hole are increased sequentially;

[0010] An isolation assembly, which is installed in the shell and located between the first insulator and the second insulator, and is used to divide the inner cavity of the shell into a plurality of independent spaces along the axial direction, and the plurality of independent spaces are insulated and isolated from each other;

[0011] A plurality of power cables, wherein the plurality of power cables are arranged in the housing, and each power cable passes through a first fixing hole on the first insulator, the isolation assembly, and a second fixing hole on the second insulator in sequence, so that the plurality of power cables are spaced apart from each other in the radial direction of the housing, and the two ends of the power cables are respectively fixedly connected with a terminal socket and a transfer terminal, and the power cables are sleeved with a heat-conductive insulating sleeve;

[0012] An insulating cooling medium is filled in a sealed cavity formed by the first insulator, the second insulator and the inner cavity of the shell;

[0013] A cooling medium disturbance mechanism is connected to the shell and can disturb the insulating cooling medium under the drive of a driving mechanism so that the insulating cooling medium flows in the sealed cavity.

[0014] In one or more embodiments of the present invention, a plurality of protrusions are fixedly connected to both ends of the shell, a first groove matching the protrusions is formed on the first insulator, and a second groove matching the protrusions is formed on the second insulator.

[0015] In one or more embodiments of the present invention, the isolation assembly includes a plurality of isolation bodies arranged at intervals along the axial direction, the isolation bodies are provided with a third groove matching the protrusion, the isolation bodies are provided with a plurality of first through holes and at least one air flow hole, each first through hole matches a first fixing hole, the air flow holes are used to connect adjacent independent spaces, and each power cable passes through a first fixing hole on the first insulator, a first through hole on each isolation body, and a second fixing hole on the second insulator in sequence.

[0016] In one or more embodiments of the present invention, the elastic pin is threadedly connected to the adapter terminal.

[0017] In one or more embodiments of the present invention, the elastic needle includes an elastic needle housing, a blind hole is provided at one end of the elastic needle housing, an elastic needle cover body matching the blind hole is threadedly connected to the elastic needle housing, a connecting column is slidably connected to the elastic needle cover body, a connecting cap matching the blind hole is slidably connected to the elastic needle housing, one end of the connecting column is in contact with the connecting cap, a spring is installed between the elastic needle cover body and the bottom wall of the blind hole, a threaded column is fixedly connected to one end of the elastic needle housing away from the elastic needle cover body, a threaded hole matching the threaded column is provided at one end of the adapter terminal, the adapter terminal is threadedly connected to the elastic needle through the threaded hole, and a fourth fixing hole for connecting to a power cable is provided at one end of the adapter terminal away from the threaded hole.

[0018] In one or more embodiments of the present invention, the first fixing hole includes a fourth mounting hole, a fifth mounting hole matching the terminal socket is formed at one end of the first insulator located at the fourth mounting hole, a third fixing hole connected to the power cable is formed at one end of the terminal socket, an insertion hole is formed at one end of the terminal socket away from the third fixing hole, and a first straight knurling is fixedly connected to the outer wall of the terminal socket for preventing the terminal socket from rotating.

[0019] In one or more embodiments of the present invention, an air cooling mechanism is provided on the shell, and the air cooling mechanism is used to air cool the surface of the electrical connection component. The air cooling mechanism includes a plurality of ventilation ducts fixedly connected to the outer wall of the shell. An airflow pressurizing mechanism is provided in the air cooling mechanism, and the airflow pressurizing mechanism is used to promote the air flow in the ventilation duct. The airflow pressurizing mechanism includes a booster fan rotatably connected to the ventilation duct, each booster fan blade is fixedly connected to a first magnetic block, and the cooling medium disturbance mechanism includes a first annular groove and a swing block movably matched with the first annular groove. The first annular groove is formed on the inner wall of the shell, the swing block is immersed in the insulating cooling medium, a second magnetic block is fixedly connected to the swing block, and the magnetic force between the second magnetic block and the first magnetic block can drive the swing block to move along the inner wall of the shell, thereby promoting the flow of the insulating cooling medium, and a third magnetic block and a fourth magnetic block are fixedly connected to the two side walls of the first annular groove respectively, the third magnetic block and the fourth magnetic block are arranged opposite to each other, the second magnetic block is arranged between the third magnetic block and the fourth magnetic block, and the second magnetic block forms a repulsive magnetic force with the third magnetic block and the fourth magnetic block.

[0020] In one or more embodiments of the present invention, a first fixing sleeve is fixedly connected to the inner wall of the third fixing hole, a first driving member is installed inside the first fixing sleeve, and the first driving member realizes disconnection between the power cable and the terminal socket by means of thermal expansion and contraction.

[0021] In one or more embodiments of the present invention, a second fixing sleeve is fixedly connected to the inner wall of the fourth fixing hole, a second driving member is installed inside the second fixing sleeve, and the second driving member realizes disconnection between the power cable and the adapter terminal by means of thermal expansion and contraction.

[0022] In one or more embodiments of the present invention, a plurality of sleeves are installed on the power cable, a placement groove is provided on a side wall of the sleeve close to the power cable, a third driving member is installed in the placement groove, and the third driving member applies bending force to the power cable by means of thermal expansion and contraction, thereby achieving disconnection between the power cable and the adapter terminal or terminal socket, and clamps for sleeveing ​​the sleeve on the power cable are fixedly connected to the two side walls of the sleeve, and a plurality of fifth fixing holes are provided on the contact surface between the clamp and the power cable, and a ball is rotatably connected in the fifth fixing hole.

[0023] Compared with the prior art, the electrical connection assembly for semiconductor equipment of the present invention has the following advantages:

[0024] 1) The power cable can be isolated by the shell, the first insulator, the third insulator and the isolator, so as to achieve temperature isolation of the power cable. The electromagnetic generated by the power cable during the working process is reduced as much as possible by sleeved insulating sleeves on the power cable, and the electromagnetic interference between the power cables is avoided as much as possible. When the electromagnetic passes through the isolator, a certain amount of electromagnetic can also be reduced, so as to avoid the electromagnetic interference released by the power cable during the working process, so as to avoid the normal operation of the equipment affected by the electromagnetic.

[0025] 2) By setting a cooling medium disturbance mechanism, the original heat dissipation structure of the equipment is used to drive the cooling medium disturbance mechanism, disturb the insulating cooling medium in the inner cavity of the shell, realize the continuous flow of the insulating cooling medium, and make the heat distribution of the insulating cooling medium in the inner cavity of the shell uniform, which is beneficial to the active heat dissipation of the power cable;

[0026] 3) When a power cable is damaged, a single power cable can be replaced to reduce the cost of using electrical connection components for semiconductor equipment;

[0027] 4) Electrical connection components for semiconductor equipment can achieve rapid installation between equipment components. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A schematic diagram of the structure of an electrical connection assembly for semiconductor equipment in one embodiment of the present invention Figure 1 ;

[0030] Figure 2 A schematic diagram of the structure of an electrical connection assembly for semiconductor equipment in one embodiment of the present invention Figure 2 ;

[0031] Figure 3 An explosion of an electrical connection assembly for semiconductor equipment in one embodiment of the present invention Figure 1 ;

[0032] Figure 4 An explosion of an electrical connection assembly for semiconductor equipment in one embodiment of the present invention Figure 2 ;

[0033] Figure 5 is a schematic structural diagram of a second insulator in one embodiment of the present invention;

[0034] Figure 6 is a cross-sectional view of a second insulator in one embodiment of the present invention;

[0035] Figure 7 It is a schematic structural diagram of a transfer terminal in one embodiment of the present invention;

[0036] Figure 8 It is a schematic diagram of the structure of an elastic needle in one embodiment of the present invention;

[0037] Fig. 9 is a cross-sectional view of an elastic needle in one embodiment of the present invention;

[0038] Fig.10 It is a cross-sectional view of a second insulator installed with a transfer terminal and an elastic pin in one embodiment of the present invention;

[0039] Fig.11 It is a schematic structural diagram of a first insulator in one embodiment of the present invention;

[0040] Fig.12 is a cross-sectional view of a first insulator in one embodiment of the present invention;

[0041] Fig.13 It is a structural schematic diagram of a terminal socket in one embodiment of the present invention;

[0042] Fig.14 A cross-sectional view of a first insulator with a terminal socket installed in one embodiment of the present invention;

[0043] Fig.15 It is a schematic diagram of the structure of a housing in one embodiment of the present invention;

[0044] Fig.16 is a cross-sectional view of a housing in one embodiment of the present invention;

[0045] Fig.17 A schematic diagram of the structure of an electrical connection assembly for semiconductor equipment in one embodiment of the present invention Figure 3 ;

[0046] Fig.18 It is a front view of an electrical connection assembly for semiconductor equipment according to one embodiment of the present invention;

[0047] Fig.19 A cross-sectional view of an electrical connection assembly for a semiconductor device according to an embodiment of the present invention;

[0048] Fig. 20 for Fig.19 Schematic diagram of the structure at A in the middle;

[0049] Fig.21 for Fig.19 Schematic diagram of the structure at B in the middle;

[0050] Fig. 22 for Fig.19 Schematic diagram of the structure at C in the middle;

[0051] Fig.23 The structure of the sleeve plate in one embodiment of the present invention is shown in FIG. Figure 1 ;

[0052] Fig.24 A cross-sectional view of a sleeve plate in one embodiment of the present invention;

[0053] Fig.25 The structure of the sleeve plate in one embodiment of the present invention is shown in FIG. Figure 2 ;

[0054] Fig.26 A schematic diagram of the structure of an electrical connection assembly for semiconductor equipment in one embodiment of the present invention Figure 4 .

[0055] Description of main reference numerals:

[0056] 1. Shell; 101. Bump; 102. Second annular groove; 103. Third annular groove; 104. First annular groove; 2. First insulator; 201. First groove; 202. First fixing hole; 2021. Fourth mounting hole; 2022. Fifth mounting hole; 203. First identification; 3. Third insulator; 301. Second through hole; 302. Fourth groove; 4. Isolator; 401. First through hole; 402. Third groove; 5. Second insulator; 501. Second groove; 502. Second fixing hole; 5021. First mounting hole; 5022. Third mounting hole; 5023. Second mounting hole; 503. Second identification; 6. Power cable; 7. Insulating sleeve; 8. Terminal socket; 801. Jack; 802. Third fixing hole; 803. First straight knurling; 9. Adapter terminal; 901, threaded hole; 902, fourth fixing hole; 903, second straight knurling; 10, elastic pin; 1001, elastic pin housing; 10011, blind hole; 10012, threaded column; 1002, elastic pin cover; 1003, connecting column; 1004, connecting cap; 1005, spring; 11, ventilation duct; 12, booster fan; 1201, first magnetic block; 13, swing block; 1301, second magnetic block; 14, anti-magnetic sleeve; 15, third magnetic block; 16, fourth magnetic block; 17, first fixing sleeve; 18, first driving member; 19, second fixing sleeve; 20, second driving member; 21, air guide plate; 22, sleeve plate; 2201, placement slot; 23, third driving member; 24, clamp; 2401, fifth fixing hole; 25, ball bearing; 26, air outlet. DETAILED DESCRIPTION

[0057] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0058] like Figure 1~Figure 4 As shown, an electrical connection assembly for semiconductor equipment in one embodiment of the present invention includes a housing 1, a first insulator 2 and a second insulator 5, wherein the first insulator 2 is mounted at one end of the housing 1, and the second insulator 5 is mounted at the end of the housing 1 away from the first insulator 2. A power cable 6 is also mounted between the first insulator 2 and the second insulator 5, and an isolation assembly is arranged on the power cable 6. The isolation assembly is used to isolate the electromagnetic generated by the power cable 6 during the work process, to avoid the electromagnetic interference generated by multiple power cables 6 as much as possible, and to avoid a series of negative effects such as the output waveform distortion and harmonic increase of the electromagnetic influence equipment to a large extent.

[0059] like Figure 1 to Figure 4 As shown, a terminal socket 8 and a transfer terminal 9 are fixedly connected at both ends of the power cable 6, respectively. The transfer terminal 9 is plugged into the second insulator 5, and the terminal socket 8 is plugged into the first insulator 2. An elastic pin 10 matching the transfer terminal 9 is installed on the second insulator 5. A third insulator 3 is also installed between the isolation component and the first insulator 2. A second through hole 301 matching the first fixing hole 202 is opened on the third insulator 3. The third insulator 3 cooperates with the first insulator 2 to further fix the terminal socket 8, so that the terminal socket 8 is not easy to shake, thereby improving the stability of the semiconductor device electrical connection component connecting the device.

[0060] like Figure 1 to Figure 14 As shown, a plurality of first fixing holes 202 are provided on the first insulator 2, and the terminal socket 8 is installed in the first fixing hole 202. The first fixing hole 202 includes a fifth mounting hole 2022 matching the terminal socket 8, and the fifth mounting hole 2022 matches the insertion amount of the terminal socket 8 inserted into the first fixing hole 202. A fourth mounting hole 2021 is provided at one end of the first insulator 2 located at the fifth mounting hole 2022, the outer diameter of the fourth mounting hole 2021 is greater than the outer diameter of the fifth mounting hole 2022, and the fourth mounting hole 2021 is located at one end of the fifth mounting hole 2022 away from the insertion direction of the terminal socket 8. The power cable of the device or the connection end of the device is inserted into the fourth mounting hole 2021 and contacts the terminal socket 8, thereby realizing the connection between the device and the electrical connection module.

[0061] Furthermore, Figure 1 to Figure 14 As shown, a plug hole 801 is provided on the terminal socket 8, and a third fixing hole 802 is provided at one end of the terminal socket 8 away from the plug hole 801. The plug hole 801 is plugged and connected with the connection end of the device or the power cable of the device. The power cable 6 is inserted into the third fixing hole 802 and welded with the inner wall of the third fixing hole 802 to complete the fixation of the power cable 6 and the terminal socket 8. A first straight knurling 803 is also fixedly connected to the outer wall of the terminal socket 8. The first straight knurling 803 can make the terminal socket 8 more stable when installing the terminal socket 8, and avoid the terminal socket 8 from rotating easily after the installation is completed as much as possible. Avoid the torque generated at the connection between the terminal socket 8 and the power cable 6 due to the rotation of the terminal socket 8, that is, avoid the disconnection of the welding point between the terminal socket 8 and the power cable 6 as much as possible, which affects the stability of the connection between the terminal socket 8 and the power cable 6, and avoid affecting the stability of the electrical connection between the devices as much as possible.

[0062] like Figures 1 to 10As shown, the second insulator 5 is provided with a plurality of second fixing holes 502 matching the first fixing holes 202, and the adapter terminal 9 can be installed in the second fixing holes 502. The second fixing hole 502 includes a first mounting hole 5021, and the second insulator 5 is provided with a second mounting hole 5023 at one end of the first mounting hole 5021, and the second insulator 5 is provided with a third mounting hole 5022 between the second mounting hole 5023 and the third mounting hole 5022. The apertures of the third mounting hole, the second mounting hole, and the first mounting hole increase in sequence, thereby forming an I-shaped structure, which can achieve integrated installation. The adapter terminal is inserted into the second mounting hole 5023. A threaded hole 901 is provided at one end of the adapter terminal 9, and a fourth fixing hole 902 is provided at one end of the adapter terminal 9 away from the threaded hole 901, and an end of the power cable 6 away from the terminal socket 8 is inserted into the fourth fixing hole 902 and welded to the fourth fixing hole 902. An elastic pin 10 matching the adapter terminal 9 is installed on the second insulator 5 . The elastic pin 10 passes through the first mounting hole 5021 and the third mounting hole 5022 and is threadedly connected to the adapter terminal 9 .

[0063] A second straight knurling 903 is fixedly connected to the adapter terminal 9 , and the second straight knurling 903 has the same function as the first straight knurling 803 .

[0064] like Figure 7 to Figure 9 As shown, the elastic needle 10 includes an elastic needle housing 1001, a blind hole 10011 is provided in the elastic needle housing 1001, an elastic needle cover 1002 is threadedly connected to the elastic needle housing 1001, and the elastic needle cover 1002 can completely block the blind hole 10011. A connecting column 1003 is provided on the elastic needle cover 1002, and the connecting column 1003 penetrates the elastic needle cover 1002 and is slidably connected to the elastic needle cover 1002. A connecting cap 1004 is slidably connected to the inner wall of the blind hole 10011, and a spring 1005 is installed between the connecting cap 1004 and the bottom wall of the blind hole 10011. The spring 1005 and the connecting cap 1004 cooperate to always push the connecting column 1003 toward the end away from the elastic needle housing 1001. Generally, the length of the connecting column 1003 outside the elastic needle cover 1002 is generally 2.8 cm, and the upper and lower errors do not exceed 0.25 cm. When the connecting column 1003 is connected to other sockets or device connection ends, the force spring 1005 of the connecting column 1003 contracts to reduce the force generated during contact, so as to minimize the situation where the socket, elastic needle 10 or the connection end of the device is damaged due to excessive insertion force. A threaded column 10012 is fixedly connected to the end of the elastic needle housing 1001 away from the elastic needle cover 1002, and the threaded column 10012 is threadedly connected to the threaded hole 901.

[0065] like Figure 5 , Fig.11As shown, the second insulator 5 is provided with a second mark 503, and the first insulator 2 is provided with a first mark 203, and the second mark 503 and the first mark 203 both play a marking role. During the installation process, it is easy to accurately insert the power cable 6 into the first fixing hole 202 and the second fixing hole 502, and it is not easy to insert the first fixing hole 202 and the second fixing hole 502 into the wrong hole position, which is convenient for improving the installation speed.

[0066] In actual use, the number of first fixing holes 202 is generally 24. The first fixing holes 202 are marked from 1 to 23, and also include a GND mark. Holes 1 to 2 are generally inserted with 208V power supply lines, with a maximum current of 17A, and the cable specifications are generally 2.5mm 2 Holes 3 to 10 are usually used to insert 208V power cables, with a maximum current of 11A. The cable specification is generally 1.5mm 2 Holes 11 to 23 are usually used to insert 48V power cables, with a maximum current of 8A. The cable specification is generally 1.0mm 2 The GND hole is used to insert the ground wire, and the cable specification is generally 1.5mm 2 .

[0067] In actual use, except for special requirements, the welding of power cable 6 and transfer terminal 9 does not indicate tolerances and refers to ISO-2768-m standard. In addition, a Ø4×15 heat shrink tubing (not shown in the figure) is required at the welding point between hole positions 1 to 10 and transfer terminal 9. After the power cable 6 and transfer terminal 9 are welded, tin is not allowed to accumulate on the surface of the parts, and the welding points need to be flat. During welding, the copper wire in the power cable 6 leaks about 4 cm, and the upper and lower errors do not exceed 0.5 cm, that is, the length of the copper wire inserted into the fourth fixing hole 902 is 3.5 to 4.5 cm. After the copper wire is inserted into the fourth fixing hole 902, the welding operation is performed.

[0068] like Figure 1 to Figure 3 As shown, the isolation assembly includes a plurality of isolation bodies 4, which divide the inner cavity of the housing 1 into a plurality of independent spaces along the axial direction, and each independent space is insulated and isolated from each other. When the power cable 6 releases electromagnetic in operation, the isolation body 4 can isolate the electromagnetic in each independent space and achieve a certain weakening, so as to avoid mutual interference of electromagnetic in the independent spaces as much as possible, and realize electromagnetic shielding. Among them, the isolation body 4 is provided with a first through hole 401 matching the first fixing hole 202, and the power cable 6 passes through the first through hole 401 to connect with the first insulator 2.

[0069] Among them, at least one air flow hole (not shown in the figure) should be provided on the isolating body 4, and the air flow hole is used to connect independent adjacent spaces.

[0070] like Figure 1 to Figure 3As shown, an insulating sleeve 7 is sleeved on the power cable 6 between adjacent isolators 4. The insulating sleeve 7 uses modified polypropylene as the main raw material, has excellent electrical insulation performance and high voltage resistance, and can effectively prevent electrical breakdown and short circuit failure of the power cable 6, ensuring the safe operation of the power line. The insulating sleeve 7 can also isolate the power cable 6 from external electromagnetic interference, reduce energy loss and signal attenuation, improve the transmission efficiency of the power cable 6, and further achieve electromagnetic shielding. By using isolators and insulating sleeves 7 to isolate each electrical channel, it is more effective to prevent multiple cables from entangled and generating electric and thermal coupling.

[0071] like Figures 1 to 16 As shown, multiple protrusions 101 are fixedly connected to both ends of the housing 1, and the multiple protrusions 101 play a role of limiting. Specifically, the isolating body 4 is provided with a third groove 402 matching the protrusion 101, the third insulator 3 is provided with a fourth groove 302 matching the protrusion 101, the first insulator 2 is provided with a first groove 201 matching the protrusion 101, and the second insulator 5 is provided with a second groove 501 matching the protrusion 101. During installation, the third groove 402, the fourth groove 302, the first groove 201 or the second groove 501 needs to be aligned with the protrusion 101 before the third insulator 3, the isolating body 4, the second insulator 5 or the first insulator 2 can be pushed into the housing 1 for installation.

[0072] like Figures 1 to 16 As shown, a second annular groove 102 and a third annular groove 103 are further provided at both ends of the housing 1, and the second annular groove 102 and the third annular groove 103 play a role in limiting the second insulator 5 and the first insulator 2. The first insulator 2 or the second insulator 5 can only be installed on the second annular groove 102 and the third annular groove 103, and cannot be further pushed into the housing 1.

[0073] In this embodiment, the assembly sequence of the electrical connection assembly for semiconductor equipment is as follows: the terminal sockets 8 and the transfer terminals 9 are welded to the two sides of the power cable 6, and then the end with the terminal socket 8 is pressed into the first fixing hole 202 of the first insulator 2, and the third insulator 3 is inserted from the end of the power cable 6 away from the first insulator 2, and it is ensured that the hole position of the third insulator 3 matches the hole position of the first insulator 2, and then the insulating sleeve 7 is sleeved on the power cable 6. Then, the isolator 4 is installed at the end of the insulating sleeve 7 away from the third insulator 3, and similarly, it is necessary to ensure that the hole position of the isolator 4 matches the hole position of the first insulator 2. According to the length of the power cable 6, the number of insulating sleeves 7 and isolators 4 to be installed can be selected. After the insulating sleeve 7 and the isolator 4 are installed, the installed assembly is pressed into the isolator 4 from one end of the housing 1, and the second insulator 5 is pressed in from the end away from the first insulator 2, and the positioning of the hole position is facilitated by the cooperation of the protrusion 101 and the second groove 501. Finally, the elastic pin 10 is inserted into the second groove 501 and threadedly connected with the adapter terminal 9 to complete the installation.

[0074] In this embodiment, the assembly method of the electrical connection assembly for semiconductor equipment can realize the replacement of the power cable 6 when the power cable 6 is damaged. By setting the isolator 4 and the insulating sleeve 7, electromagnetic shielding is achieved to a certain extent. In addition, the power cable 6 is installed by means of holes, and there is a certain gap between the power cables 6 and the power cables 6. When one of the power cables 6 is at high temperature, the impact on other power cables 6 can be reduced, and the impact on the electrical transmission of other electrical transmission lines can be avoided as much as possible, which can also extend the service life of the electrical connection assembly for semiconductor equipment to a certain extent. By setting an elastic elastic needle 10 with elasticity, when the elastic needle 10 contacts with other components, some impact forces generated during the plug-in process can be absorbed, reducing the possibility of the elastic needle 10 causing damage to the plug-in end, thereby extending the service life of the plug-in end and the elastic needle 10 of the device.

[0075] In addition, the first insulator 2, the third insulator 3, the separator 4 and the second insulator 5 can be installed inside the shell 1 by pressing. If the shell 1 is not made of metal or hard material, the shell 1 is deformed or twisted, and the first insulator 2, the third insulator 3, the separator 4 and the second insulator 5 in the shell 1 are not easy to change with the twisting of the shell 1, so that the power cable 6 can still maintain a certain gap at a certain twisting angle, and avoid the contact between the power cables 6 and the power cables 6 due to the twisting of the shell 1 as much as possible.

[0076] In this embodiment, the shell 1 is tubular, and the first insulator 2, the third insulator 3, the separator 4 and the second insulator 5 are all matched with the shell 1, that is, the outer wall of the first insulator 2, the outer wall of the third insulator 3, the outer wall of the separator 4 and the outer wall of the second insulator 5 are all in contact with the inner wall of the shell 1, and compression can be achieved.

[0077] In another embodiment, in order to solve the problem that the space inside the housing 1 is relatively sealed, it is not convenient for the power cable 6 inside the housing 1 to dissipate heat. Figure 17 to Figure 22 As shown, the first insulator 2, the second insulator 5, the terminal socket 8 and the adapter terminal 9 cooperate to form a sealed cavity in the shell 1, and the cavity is filled with an insulating cooling medium. Generally, the first insulator 2 and the second insulator 5 are installed inside the shell 1 by interference fit, and then the first insulator 2, the second insulator 5 and the shell 1 are further sealed by packaging glue or other fixing methods. The terminal socket 8 and the adapter terminal 9 are matched with the first insulator 2 and the second insulator 5 respectively. Similarly, after the installation is completed, further sealing is completed by packaging glue. The cavity formed by the first insulator 2, the second insulator 5 and the shell 1 is sealed, and the interior of the cavity can be filled with a cooling medium. The cooling medium can greatly reduce the temperature of the power cable 6 in the shell 1, and avoid the high temperature of the shell 1 as much as possible. The cooling medium can contact the electricity and will not be conductive.

[0078] Of course, the encapsulation glue is required to seal the housing 1, the first insulator 2 and the second insulator 5, and the encapsulation glue cannot have a conductive function, and the encapsulation glue is also required to have a strong high temperature resistance. Such encapsulation glue is common knowledge and will not be described in detail here.

[0079] Among them, there are many holes in the electrical connection assembly for semiconductor equipment. When sealing, if the hole of the electrical connection assembly for semiconductor equipment is not needed, the hole can be sealed by a sealing plug. That is, the sealing plug is installed on the first fixing hole 202 and the second fixing hole 502, so that the housing 1, the first insulator 2 and the second insulator 5 form a sealed cavity.

[0080] Specifically, the insulating cooling medium in this embodiment is generally oil, specifically, shale oil, which is a mineral oil obtained by distillation and refining of natural petroleum. It is a mixture of pure, stable, low-viscosity, good insulation and good cooling liquid natural hydrocarbons obtained by acid-base refining of lubricating fractions in petroleum. An oil filling port (not shown in the figure) is installed on the shell 1, and oil can be filled into the cavity through the oil filling port. After the oil filling is completed, the oil filling port is closed. When the electrical connection component for semiconductor equipment is completely damaged or needs to be repaired, the cooling medium in the cavity can be filtered and reused, which is conducive to reducing the use cost of the electrical connection component for semiconductor equipment. Moreover, when the electrical connection component for semiconductor equipment is in use, the electromagnetic waves generated by it can be reflected and refracted by the oil, thereby changing its propagation direction or speed, thereby affecting the distribution and intensity of the magnetic field. In particular, when the electromagnetic wave encounters a magnetic field, its propagation path will change, which can reduce the influence range or intensity of the magnetic field to a certain extent.

[0081] To further improve the heat dissipation efficiency of electrical connection components for semiconductor equipment and make the temperature distribution of the insulating cooling medium in the cavity more uniform. Figures 17 to 20 As shown, a wind cooling mechanism is also connected to the housing 1, and the wind cooling mechanism includes a plurality of ventilation ducts 11 fixedly connected to the outer wall of the housing 1. The length of the ventilation duct 11 can be greater than the length of the housing 1, less than the length of the housing 1 or equal to the length of the housing 1 as required. An airflow pressurization mechanism is installed in the ventilation duct 11, and the airflow pressurization mechanism is used to promote the air flow in the ventilation duct. The airflow pressurization mechanism includes a plurality of pressurization fans 12 installed in the ventilation duct 11, and the installation position of the pressurization fan 12 in each ventilation duct 11 is different. In actual use, the electrical connection assembly for semiconductor equipment is generally installed between two electrical equipment, and the electrical equipment generally has a heat dissipation fan. The wind generated by the heat dissipation of the heat dissipation fan enters from one end of the ventilation duct 11 and is discharged from the other end of the ventilation duct 11. The heat dissipation wind can take away the temperature of the surface of the housing 1 in the process of passing through the ventilation duct 11, so as to realize the heat dissipation of the electrical connection assembly for semiconductor equipment. The pressurization fan 12 in the ventilation duct 11 can further enhance the wind in the ventilation duct 11, realize the effect of pressurization, and increase the flow rate of the air in the ventilation duct 11, thereby improving the cooling efficiency of the electrical connection assembly for semiconductor equipment.

[0082] Generally, the cooling fan of the electrical equipment is relatively large, resulting in a relatively large coverage area of ​​the blown cooling air. This will also cause the cooling air to not only enter the interior of the ventilation duct 11, but also blow on the surface of the ventilation duct 11, thereby achieving heat dissipation on the surface of the ventilation duct 11. In other words, the provision of the ventilation duct 11 does not affect the normal heat dissipation of the electrical connection assembly for the semiconductor device. Using the cooling fan of the electrical equipment to dissipate heat from the channel electrical connection module can save the energy generated by the heat dissipation of the channel electrical connection module, which is beneficial to energy saving and environmental protection.

[0083] Further, such as Figures 17 to 20 As shown, a cooling medium disturbance mechanism is also provided in the housing 1, and the cooling medium disturbance mechanism includes a swing block 13 rotatably connected to the inner wall of the housing 1, and the swing block 13 matches the supercharger fan 12. The swing block 13 is annular and protrudes from the inner wall of the housing 1. The swing block 13 drives the cooling medium in the housing 1 to flow during the rotation of the supercharger fan 12, thereby making the temperature distribution in the housing 1 more uniform.

[0084] Specifically, Fig. 20 As shown, a first annular groove 104 matching the swing block 13 is provided on the inner wall of the housing 1, and the swing block 13 is rotatably connected to the inner wall of the first annular groove 104. The boost fan 12 has a plurality of blades, and a plurality of first magnetic blocks 1201 are installed on the blades of the boost fan 12, and a second magnetic block 1301 matching the first magnetic block 1201 is installed on the swing block 13. The first magnetic block 1201 can be mutually adsorbed with the second magnetic block 1301. That is, during the rotation of the boost fan 12, a certain traction force is generated between the first magnetic block 1201 and the second magnetic block 1301 through magnetic attraction, and the swing block 13 is pulled by the boost fan 12, so that the swing block 13 rotates. That is, the rotation of the swing block 13 in the housing 1 is realized by the wind blown out by the cooling fan of the electrical equipment, and the cooling medium in the cavity flows during the rotation of the swing block 13, so that the temperature distribution in the cavity is more uniform, avoiding the overheating of one or several power cables 6, and ensuring the stable operation of the electrical connection components. That is, the cooling medium disturbance mechanism is driven by the airflow boost mechanism. In particular, as the speed of the boost fan increases, the moving speed of the swing block 13 also increases. Thus, when it is necessary to quickly cool down the electrical connection component, the heat on the surface and inside of the electrical connection component can be quickly transferred by increasing the speed of the boost fan, further eliminating the situation where the surface of the electrical connection component has been cooled down but the inside is still overheated.

[0085] like Fig. 20As shown, the third magnetic block 15 and the fourth magnetic block 16 are fixedly connected to the two side walls of the first annular groove 104, respectively. The third magnetic block 15 is a positive magnet, and the fourth magnetic block 16 is a negative magnet. One side wall of the second magnetic block 1301 close to the third magnetic block 15 is a positive pole, and the other side wall is a negative pole. Through the cooperation of the third magnetic block 15, the fourth magnetic block 16 and the second magnetic block 1301, the swing block 13 can be shaken within a certain range, so that the swing block 13 produces a slight swing, and the cooling medium produces a micro-motion, so as to avoid as much as possible the situation that the connection between the electrical connection component for semiconductor equipment and the electrical equipment is loosened due to the excessive swing of the cooling medium. Moreover, through the cooperation of the third magnetic block 15, the fourth magnetic block 16 and the second magnetic block 1301, the swing block 13 not only rotates in the same direction during the rotation process, but can swing back and forth within a certain rotation range, further improving the active heat dissipation efficiency.

[0086] like Fig. 20 As shown, an anti-magnetic sleeve 14 is also sleeved on the swing block 13. The anti-magnetic sleeve 14 is generally a laminated structure of coated paper and aluminum foil, has elasticity, and can adapt to the swing of the swing block 13. The anti-magnetic sleeve 14 can wrap the third magnetic block 15, the fourth magnetic block 16 and the swing block 13, reducing or even avoiding the influence of the third magnetic block 15, the fourth magnetic block 16 and the swing block 13 on the work done by the power cable 6.

[0087] like Figure 21-22 As shown, a first fixing sleeve 17 is fixedly connected to the inner wall of the third fixing hole 802. The first fixing sleeve 17 is a tubular shape with one side closed, and a first driving member 18 is installed inside the first fixing sleeve 17. The first driving member 18 is a thermal expansion and contraction material, and the material of the first driving member 18 can be replaced according to the actual use needs. In this embodiment, the first driving member 18 is a synthetic resin, specifically ASA resin plus PVC resin, which will expand due to temperature changes at a high temperature of 70 to 80°C. The first fixing sleeve 17 is made of a material that is not easy to conduct heat or is not conductive, specifically a metal alloy, preferably Invar. When the first driving member 18 expands, the force generated by its expansion will push the power cable 6, and exert a force between the terminal socket 8 and the power cable 6 to make them repel each other. As the temperature rises, the terminal socket 8 and the power cable 6 are separated, so that the electrical connection assembly for the semiconductor device loses the function of connecting the electrical device. It ensures the safety of the equipment during use to a large extent, avoids short circuits in electrical connection components of semiconductor equipment caused by high temperature, and eventually prevents fires, greatly improving the safety of electrical connection components of semiconductor equipment during use.

[0088] like Figure 21-22As shown, a second fixing sleeve 19 is fixedly connected to the inner wall of the fourth fixing hole 902. The second fixing sleeve 19 is made of the same material and shape as the first fixing sleeve 17. A second driving member 20 is installed inside the second fixing sleeve 19. The second driving member 20 is also made of a material that expands and contracts with heat. The material of the second driving member 20 can be replaced according to the actual use needs, so that the expansion coefficient and reaction temperature of the second driving member 20 can achieve the function of disconnecting the power cable 6 and the adapter terminal 9. The difference is that the materials of the second driving member 20 and the first driving member 18 are different. According to the installation of electrical equipment, different thermal expansion and contraction materials can be selected for the first driving member 18 and the second driving member 20 to ensure the safety of the use of the electrical connection assembly for semiconductor equipment.

[0089] In this embodiment, by setting up a ventilation duct 11, and using the cooling fan of the electrical equipment to blow the cooling air into the ventilation duct 11, the heat dissipation of the electrical connection components for semiconductor equipment is achieved, and a booster fan 12 is installed inside the ventilation duct 11 to further improve the heat dissipation efficiency of the electrical connection components for semiconductor equipment. The booster fan 12 drives the swing block 13 inside the shell 1 to rotate during the rotation process, so that the swing block 13 makes the temperature distribution of the cooling medium in the cavity more uniform during the rotation process, which is beneficial to prolonging the service life of the electrical connection components for semiconductor equipment. Through the flow of the cooling medium, it can also be beneficial to the heat dissipation of the electrical connection components for semiconductor equipment. The third magnetic block 15 and the fourth magnetic block 16 are provided to allow the swing block 13 to swing back and forth within a certain range, which can make the temperature distribution of the cooling medium in the cavity more uniform, which is beneficial to the active heat dissipation of the electrical connection components for semiconductor equipment.

[0090] In another embodiment, during actual use, not only the connection between the terminal socket 8, the transfer terminal 9 and the power cable 6 may short-circuit and heat up, but the power cable 6 may also catch fire due to high temperature. To avoid this problem, Figure 23 to Figure 25 As shown, a detachable sleeve 22 is installed on the power cable 6. The sleeve 22 is semi-arc-shaped and does not affect the heat dissipation of the power cable 6 when installed on the power cable 6. A placement groove 2201 is provided on the contact surface between the sleeve 22 and the power cable 6, and a third driving member 23 is installed on the inner wall of the placement groove 2201. The third driving member 23 and the first driving member 18 and the second driving member 20 are all made of materials that expand with heat and contract with cold. The third driving member 23 is in direct contact with the power cable 6. When the third driving member 23 is heated to a threshold value, its expansion will push the power cable 6, and the straight power cable 6 will be bent. A pulling force is applied to both ends of the power cable 6, so that the two ends of the power cable 6 lose connection with the terminal socket 8 or the adapter terminal 9, thereby causing the electrical connection assembly for the semiconductor device to lose connection with the electrical device.

[0091] like Figure 23 to Figure 25 As shown, the two ends of the sleeve plate 22 are respectively fixedly connected with clamps 24, and the sleeve plate 22 is detachably mounted on the power cable 6 or the insulating sleeve 7 through the clamps 24. And the clamps 24 can make the sleeve plate 22 adapt to power cables 6 or insulating sleeves 7 of different specifications.

[0092] Specifically, a plurality of fifth fixing holes 2401 are provided on the contact surface between the clamp 24 and the power cable 6, and a ball 25 is rotatably connected in the fifth fixing hole 2401. By providing the ball 25, the clamp 24 and the power cable 6 can be movably connected. When the third driving member 23 pushes the power cable 6, the power cable 6 will extend outward through the clamp 24, thereby pulling the two ends of the power cable 6, and the power cable 6 loses connection with the terminal socket 8 or the adapter terminal 9. In order to improve the accuracy of the air outlet 26 detection, multiple air outlets 26 can be provided on the power cable 6, so as to improve the accuracy of the air outlet 26 disconnecting the power cable 6, the adapter terminal 9 or the terminal socket 8.

[0093] In another embodiment, if Fig.26 As shown, an air outlet 26 is provided in the middle of the ventilation duct 11, and an air guide plate 21 matching the air outlet 26 is fixedly connected to the outer wall of the housing 1. In the actual use process, in order to use the wind generated by the heat dissipation fan to dissipate the heat for the electrical connection assembly of the semiconductor device, the heat dissipation fans of the two electrical devices can be relatively heat dissipated or the heat dissipation fan of one of the electrical devices blows towards the other heat dissipation fan. This will transfer the hot air to the other electrical device, causing the temperature of the other electrical device to rise, affecting the normal use of the electrical device. And through the cooperation of the air outlet 26 and the air guide plate 21, if the heat dissipation fans of the two electrical devices are arranged relative to each other, the air outlet 26 and the air guide plate 21 can be arranged in the middle of the ventilation duct 11, and the wind generated by them can be transported upward after the air guide plate 21, so as to avoid the situation where the hot air affects the other electrical device as much as possible. If only one heat dissipation fan of the electrical device blows towards the other heat dissipation fan, the air outlet 26 can be set on one side, and the wind generated by the heat dissipation fan is transported upward after passing through most of the electrical connection assemblies for the semiconductor device through the air guide plate 21, so as to minimize the impact of the wind generated by the heat dissipation fan on other electrical devices.

[0094] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0095] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An electrical connection assembly for semiconductor equipment, characterized in that: include: case; A first insulator and a second insulator, wherein the first insulator and the second insulator are respectively mounted at two ends of the housing, the first insulator is provided with a plurality of first fixing holes, the second insulator is provided with a plurality of second fixing holes, each of the second fixing holes matches a first fixing hole, the second insulator is provided with an elastic pin matching a transfer terminal, the second fixing hole includes a first mounting hole matching the elastic pin, the second insulator is further provided with a second mounting hole and a third mounting hole, the third mounting hole is provided between the first mounting hole and the second mounting hole, the transfer terminal is mounted in the second mounting hole, the elastic pin sequentially penetrates the first mounting hole and the third mounting hole and is connected to the transfer terminal, and the aperture of the third mounting hole, the aperture of the second mounting hole and the aperture of the first mounting hole are increased sequentially; An isolation assembly, which is installed in the shell and located between the first insulator and the second insulator, and is used to divide the inner cavity of the shell into a plurality of independent spaces along the axial direction, and the plurality of independent spaces are insulated and isolated from each other; A plurality of power cables, wherein the plurality of power cables are arranged in the housing, and each power cable passes through a first fixing hole on the first insulator, the isolation assembly, and a second fixing hole on the second insulator in sequence, so that the plurality of power cables are spaced apart from each other in the radial direction of the housing, and the two ends of the power cables are respectively fixedly connected with a terminal socket and a transfer terminal, and the power cables are sleeved with a heat-conductive insulating sleeve; An insulating cooling medium is filled in a sealed cavity formed by the first insulator, the second insulator and the inner cavity of the shell; A cooling medium disturbance mechanism is connected to the shell and can disturb the insulating cooling medium under the drive of a driving mechanism so that the insulating cooling medium flows in the sealed cavity.

2. An electrical connection assembly for semiconductor equipment according to claim 1, characterized in that: Both ends of the shell are fixedly connected with a plurality of protrusions, the first insulator is provided with a first groove matching the protrusions, and the second insulator is provided with a second groove matching the protrusions.

3. An electrical connection assembly for semiconductor equipment according to claim 2, characterized in that: The isolation assembly comprises a plurality of isolation bodies spaced apart in the axial direction, the isolation bodies are provided with a third groove matching the protrusion, the isolation bodies are provided with a plurality of first through holes and at least one air flow hole, each first through hole matches a first fixing hole, and the air flow holes are used to connect adjacent independent spaces; Each power cable sequentially passes through a first fixing hole on the first insulator, a first through hole on each isolator, and a second fixing hole on the second insulator.

4. The electrical connection assembly for semiconductor equipment according to claim 1, characterized in that: The elastic pin is threadedly connected to the adapter terminal.

5. The electrical connection assembly for semiconductor equipment according to claim 1, characterized in that: The elastic needle comprises an elastic needle housing, one end of which is provided with a blind hole, an elastic needle cover body matching the blind hole is threadedly connected to the elastic needle housing, and a connecting column is slidably connected to the elastic needle cover body; A connecting cap matching the blind hole is slidably connected to the elastic needle housing, one end of the connecting column contacts the connecting cap, and a spring is installed between the elastic needle cover and the bottom wall of the blind hole; One end of the elastic needle housing away from the elastic needle cover is fixedly connected with a threaded column; A threaded hole matching the threaded column is formed at one end of the adapter terminal, the adapter terminal is threadedly connected to the elastic pin through the threaded hole, and a fourth fixing hole for connecting to a power cable is formed at one end of the adapter terminal away from the threaded hole.

6. The electrical connection assembly for semiconductor equipment according to claim 1, characterized in that: The first fixing hole includes a fourth mounting hole, and the first insulator is provided with a fifth mounting hole matching the terminal socket at one end of the fourth mounting hole; A third fixing hole connected to the power cable is formed at one end of the terminal socket, and a plug hole is formed at one end of the terminal socket away from the third fixing hole; A first straight knurling pattern for preventing the terminal socket from rotating is fixedly connected to the outer wall of the terminal socket.

7. The electrical connection assembly for semiconductor equipment according to claim 1, characterized in that: The shell is provided with an air cooling mechanism, which is used to air cool the surface of the electrical connection assembly, and the air cooling mechanism includes a plurality of ventilation ducts fixedly connected to the outer wall of the shell; The air cooling mechanism is provided with an airflow boosting mechanism, which is used to promote the air flow in the ventilation duct, and the airflow boosting mechanism includes a boosting fan rotatably connected to the ventilation duct, and each boosting fan blade is fixedly connected to a first magnetic block; The cooling medium disturbance mechanism comprises a first annular groove and a swing block movably matched with the first annular groove, wherein the first annular groove is provided on the inner wall of the shell, the swing block is immersed in the insulating cooling medium, a second magnetic block is fixedly connected to the swing block, and the magnetic force between the second magnetic block and the first magnetic block can drive the swing block to move along the inner wall of the shell, thereby promoting the flow of the insulating cooling medium; The third magnetic block and the fourth magnetic block are fixedly connected to the two side walls of the first annular groove respectively, the third magnetic block and the fourth magnetic block are arranged opposite to each other, the second magnetic block is arranged between the third magnetic block and the fourth magnetic block, and the second magnetic block forms a repulsive magnetic force with the third magnetic block and the fourth magnetic block.

8. An electrical connection assembly for semiconductor equipment according to claim 6, characterized in that: The inner wall of the third fixing hole is fixedly connected with a first fixing sleeve, and a first driving member is installed inside the first fixing sleeve. The first driving member realizes disconnection between the power cable and the terminal socket by means of thermal expansion and contraction.

9. The electrical connection assembly for semiconductor equipment according to claim 5, characterized in that: A second fixing sleeve is fixedly connected to the inner wall of the fourth fixing hole, a second driving member is installed inside the second fixing sleeve, and the second driving member realizes disconnection between the power cable and the adapter terminal by means of thermal expansion and contraction.

10. The electrical connection assembly for semiconductor equipment according to claim 1, characterized in that: A plurality of sleeves are installed on the power cable, a placement groove is provided on a side wall of the sleeve close to the power cable, and a third driving member is installed in the placement groove; The third driving member applies a bending force to the power cable by means of thermal expansion and contraction, thereby disconnecting the power cable from the transfer terminal or the terminal socket; Clamps for sleeve-connecting the sleeve onto the power cable are fixedly connected to both side walls of the sleeve, and a plurality of fifth fixing holes are provided on the contact surface between the clamp and the power cable, wherein balls are rotatably connected in the fifth fixing holes.

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