High-speed micro-gap polishing on-line measurement and control method and measurement and control system thereof

Abstract

The application belongs to the field of hydrodynamic pressure polishing, and discloses a high-speed micro-gap polishing online measurement and control method and a measurement and control system thereof, which comprises the following steps: step 1, mounting a workpiece on a workpiece disc of a lifting force suspension polishing device, and installing a gap measurement and control device on one side of the lifting force suspension polishing device, wherein a high-speed camera in the gap measurement and control device faces the work disc of the lifting force suspension polishing device from the side; step 2, starting the suspension polishing device and the gap measurement and control device, polishing the workpiece by the suspension polishing device, and detecting the gap between the workpiece and the airfoil polishing disc by the gap measurement and control device at the same time; and step 3, polishing is completed, the motor is turned off, and the workpiece is taken out after the motor stops rotating. The high-speed micro-gap polishing online measurement and control method can measure the size of the polishing gap in real time during the polishing process, and adjust the polishing gap, thereby improving the polishing efficiency and quality.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of hydrodynamic pressure polishing, in particular to a high-speed micro-gap polishing online measurement and control method and a measuring and control system thereof. BACKGROUND

[0002] Hydrodynamic pressure polishing technology is a surface treatment technology that uses fluid dynamics to improve the surface of a workpiece. It is mainly used to improve the smoothness of the material surface, reduce surface roughness and micro defects, and achieve higher surface quality and performance. It is widely used in the field of polishing. For example, the Chinese patent with publication number CN115042069A discloses a lift suspension polishing device based on adaptive gap, which includes a motor, a driving shaft, a set of transmission shafts, a set of polishing discs, a set of workpiece discs, a polishing area, a support plate and a support platform. The center of the support plate is provided with a driving shaft, a set of transmission shafts are arranged around the driving shaft, a motor is arranged on the upper part of the driving shaft, the motor is connected with the driving shaft through a shaft coupling, a set of polishing discs are arranged at the bottom of the driving shaft, the polishing discs are located in the polishing area, the bottom of each transmission shaft is provided with a workpiece disc, the bottom of the workpiece disc is provided with an area for attaching a workpiece to be polished, the workpiece disc is located above the polishing disc, the cross section of the polishing disc is in the shape of a wing, so that the workpiece to be polished and the polishing disc can be polished with a micro gap. The driving shaft drives the transmission shafts to rotate through a transmission mechanism. The support plate is fixed on the support platform. The device has the characteristics of simple structure, ingenious design, low engineering cost, good structural reliability and high adaptability.

[0003] In hydrodynamic pressure polishing, the polishing gap is one of the most critical technologies. The hydrodynamic pressure on the workpiece is directly affected by the polishing gap. For example, in float polishing, the size of the polishing gap cannot be controlled during the experiment. To obtain the relationship between the polishing gap and the workpiece pressure, many experiments need to be conducted, which increases the difficulty of the experiment. In liquid pressure suspension polishing, the size of the polishing gap cannot be accurately controlled, which will cause a large deviation between the experimental results and the theoretical values, affecting the polishing accuracy. In measuring the polishing gap, since the polishing environment is in an opaque polishing liquid, most of the polishing liquid is a milky white turbid liquid, so the laser sensor and the grating displacement sensor cannot measure in this environment. The pull rope displacement sensor is not suitable for measuring due to the small gap. The eddy current sensor cannot measure due to the non-metallic polishing disc. The commonly used distance measuring sensors on the market have some inconveniences. Therefore, a wing-shaped hydrodynamic pressure device capable of online measurement of the polishing gap is designed. The wing speed can be controlled, the polishing gap can be measured, the pressure on the workpiece can be measured, and the wing speed can be further controlled through the feedback of the polishing gap size. This is what is needed in the current hydrodynamic pressure polishing. SUMMARY

[0004] The present application aims to provide a high-speed micro-gap polishing online measurement and control method and a measurement and control system thereof to solve the problems in the background art.

[0005] To achieve the above object, the present application provides the following technical solutions.

[0006] A high-speed micro-gap polishing online measurement and control method, comprising:

[0007] Step 1, mounting a workpiece on a workpiece disc of a lift suspension polishing device, installing a gap measurement and control device on one side of the lift suspension polishing device, and making a high-speed camera in the gap measurement and control device face the work disc of the lift suspension polishing device from the side;

[0008] Step 2, starting the suspension polishing device and the gap measurement and control device, polishing the workpiece by the suspension polishing device, and detecting the gap between the workpiece and the airfoil polishing disc by the gap measurement and control device;

[0009] When the gap is greater than the preset normal range of the gap and is maintained for t1 time, the control system controls the motor in the lift suspension polishing device to increase the rotating speed until the gap falls into the normal range of the gap;

[0010] When the gap is less than the preset normal range of the gap and is maintained for t2 time, the control system controls the motor in the lift suspension polishing device to decrease the rotating speed until the gap falls into the normal range of the gap;

[0011] Step 3, polishing is completed, the motor is turned off, and the workpiece is taken out after the motor stops rotating.

[0012] Further, in the step 2, the motor has an initial rotating speed, the motor increases or decreases the rotating speed by several times each time, and the gap falls into the normal range of the gap after one or more times of speed regulation.

[0013] Further, the gap measurement and control device comprises a high-speed camera, a rotating platform and a lifting platform, the high-speed camera detects the gap between the airfoil polishing disc and the workpiece, the rotating platform rotates the high-speed camera, and the lifting platform lifts the high-speed camera.

[0014] Further, the rotating platform is arranged on the lifting platform, and the high-speed camera is arranged on the rotating platform.

[0015] Further, in the step 2, the high-speed camera is calibrated by a checkerboard before the gap is measured.

[0016] Further, the lift suspension polishing device comprises a motor, a main shaft, a transmission shaft, a transmission assembly, a workpiece disc, an airfoil polishing disc and a nozzle, the motor is in transmission cooperation with the main shaft, the airfoil polishing disc is arranged on the main shaft, the main shaft is in transmission cooperation with the transmission shaft through the transmission assembly, the workpiece disc is arranged on the transmission shaft, the workpiece disc and the airfoil polishing disc are arranged oppositely and have opposite rotation directions, and the nozzle supplies abrasive between the workpiece disc and the airfoil polishing disc.

[0017] The application further provides a high-speed micro-gap polishing online measurement and control system for realizing the high-speed micro-gap polishing online measurement and control method.

[0018] The high-speed data acquisition system comprises a high-speed camera, and the high-speed camera detects the gap between the workpiece and the airfoil polishing disc.

[0019] The host computer receives and processes the data collected by the high-speed data acquisition system and transmits instructions to the control system.

[0020] The control system controls the operation of the motor of the lift suspension polishing device.

[0021] Further, the high-speed data acquisition system further comprises a pressure sensor arranged on the workpiece and used for detecting the pressure of the workpiece.

[0022] Compared with the prior art, the application has the following beneficial effects:

[0023] 1) The previous method is to determine the polishing gap size before polishing, and real-time detection cannot be achieved. The high-speed micro-gap polishing online measurement and control method can measure the polishing gap size in real time during polishing and adjust the polishing gap, thereby improving the polishing efficiency and quality.

[0024] 2) The high-speed micro-gap polishing online measurement and control system only needs to control the speed of the motor to change the size of the polishing gap. Through data feedback, the speed of the motor is automatically fine-tuned after analysis, which can improve the accuracy of fine-tuning of the polishing gap. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 The application provides a high-speed micro-gap polishing online measurement and control method flowchart.

[0026] Figure 2 The application provides a high-speed micro-gap polishing online measurement and control method flowchart.

[0027] Figure 3Figure 2 is a structural schematic diagram of the lift-suspended polishing device and the gap measuring and controlling device in the high-speed micro-gap polishing on-line measuring and controlling method according to the present application, in which the lift-suspended polishing device is in an exploded state.

[0028] Figure 4 Figure 3 is a structural schematic diagram of the lift-suspended polishing device and the gap measuring and controlling device in the high-speed micro-gap polishing on-line measuring and controlling method according to the present application, in which the lift-suspended polishing device is shown in part.

[0029] Figure 5 Figure 4 is a circuit relationship schematic diagram of the high-speed micro-gap polishing on-line measuring and controlling system according to the present application.

[0030] Figure 6 Figure 5 is a schematic diagram of the motor speed variation process in the polishing process, in which the given motor speed is too small at the beginning of the polishing.

[0031] Figure 7 Figure 6 is a schematic diagram of the motor speed variation process in the polishing process, in which the given motor speed is too large at the beginning of the polishing.

[0032] Figure 8 Figure 7 is a schematic diagram of the motor speed variation process in the polishing process, in which the pressure is unstable occasionally in the experimental process, which causes the airfoil to slightly drop and the polishing gap to increase.

[0033] Figure 9 Figure 8 is a schematic diagram of the motor speed variation process in the polishing process, in which the pressure is unstable occasionally in the experimental process, which causes the airfoil to slightly rise and the polishing gap to decrease.

[0034] Figure 10 Figure 9 is a schematic diagram of the motor speed variation process in the polishing process, in which the gap is larger than 10s in the experimental process, the motor speed is increased to stabilize the gap in the experimental requirement range.

[0035] Figure 11 Figure 10 is a schematic diagram of the motor speed variation process in the polishing process, in which the gap is smaller than 10s in the experimental process, the motor speed is decreased to stabilize the gap in the experimental requirement range.

[0036] Figure 1: lift-suspended polishing device 1, motor 100, main shaft 101, transmission shaft 102, workpiece disc 103, airfoil polishing disc 104, nozzle 105, abrasive inlet pipeline 106, coupling 107, helical gear 108, high-speed camera 2, rotating platform 3, lifting platform 4, high-speed data acquisition system 5, upper computer 6, control system 7, pressure sensor 8, gap h between the workpiece and the airfoil polishing disc. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative effort belong to the scope of protection of the present application.

[0038] Please refer to Figures 1-4 A high-speed micro-gap polishing online measurement and control method, comprising:

[0039] Step 1, install the workpiece on the workpiece disc 103 of the lift suspension polishing device 1, install a gap measurement and control device on one side of the lift suspension polishing device 1, and the high-speed camera 2 in the gap measurement and control device faces the work disc of the lift suspension polishing device 1 from the side;

[0040] Step 2, calibrate the high-speed camera 2 with a checkerboard before measuring the gap, and place the checkerboard at the polishing gap. Since the size marks on the checkerboard are extremely accurate, such as when it is known that 1mm occupies how many pixel points in the camera shooting at this shooting distance, the length of one pixel point L = 1mm / pixel point number. After calibration, the gap picture during processing can be taken, and the size H of the gap can be calculated according to the pixel size on the picture. Then turn on the suspension polishing device 1 and the gap measurement and control device, and polish the workpiece through the suspension polishing device 1, and at the same time detect the gap between the workpiece and the airfoil polishing disc 104 through the gap measurement and control device.

[0041] When the gap is greater than the preset normal range of the gap and is maintained for t1 time, the control system 7 controls the motor 100 in the lift suspension polishing device 1 to increase the rotating speed until the gap falls within the normal range of the gap.

[0042] When the gap is less than the preset normal range of the gap and is maintained for t2 time, the control system 7 controls the motor 100 in the lift suspension polishing device 1 to decrease the rotating speed until the gap falls within the normal range of the gap.

[0043] Wherein, the motor 100 has an initial rotating speed, and the rotating speed of the motor 100 is increased or decreased by 50 rad / min each time, and the gap falls within the normal range of the gap after one or more times of speed regulation. Wherein, t1 and t2 are preferably 5-15 seconds, preferably 10 seconds, and in addition, can be set according to actual needs.

[0044] Step 3, after polishing is completed, the motor 100 is turned off, and the workpiece is taken out after the motor 100 stops rotating.

[0045] Please refer to Figures 2-4The lift suspension polishing device 1 comprises a workbench, a support frame, a support plate, a motor 100, a main shaft 101, a transmission shaft 102, a transmission assembly, a workpiece disc 103, a wing-shaped polishing disc 104, a nozzle 105 and the like. The support frame is arranged on the workbench, the support plate is arranged on the support frame, the motor 100 is installed on the support plate, the motor 100 is connected with the main shaft 101 through a shaft coupling 107, the wing-shaped polishing disc 104 is arranged at the lower end of the main shaft 101, three transmission shafts 102 are also installed on the support plate, the three transmission shafts 102 are evenly arranged around the main shaft 101, the transmission assembly is located between the support plate and the support frame, and the transmission assembly comprises four bevel gears 108. One bevel gear 108 is installed on the main shaft 101, and the other three bevel gears 108 are installed on the three transmission shafts 102 respectively. The bevel gear 108 on the main shaft 101 is engaged with the other three bevel gears 108 respectively. The workpiece disc 103 is arranged at the lower end of each transmission shaft 102, and a workpiece is installed at the bottom of the workpiece disc 103. The workpiece disc 103 and the wing-shaped polishing disc 104 are located below the table top of the support frame, the workpiece disc 103 is located above the wing-shaped polishing disc 104, the workpiece disc 103 and the wing-shaped polishing disc 104 rotate in opposite directions, and the nozzle 105 is arranged opposite to the bottom of the table top of the support frame and opposite to the workpiece disc 103 and the wing-shaped polishing disc 104 to supply abrasive materials. The nozzle 105 is also connected with an abrasive inlet pipeline 106, and the abrasive inlet pipeline 106 is connected with a feeding device.

[0046] The motor 100 is in transmission cooperation with the main shaft 101, the wing-shaped polishing disc 104 is arranged on the main shaft 101, the main shaft 101 is in transmission cooperation with the transmission shaft 102 through the transmission assembly, the workpiece disc 103 is arranged on the transmission shaft 102, the workpiece disc 103 and the wing-shaped polishing disc 104 are arranged opposite to each other and rotate in opposite directions, and the nozzle 105 is arranged.

[0047] The working condition in the wing-shaped liquid pressure polishing process will be described below. As shown in FIG. 1, the wing-shaped polishing disc 104 is arranged on the main shaft 101, the workpiece disc 103 is arranged on the transmission shaft 102, the workpiece disc 103 and the wing-shaped polishing disc 104 are arranged opposite to each other and rotate in opposite directions, and the nozzle 105 is arranged. Figures 2-4As shown, the installation mode of the main shaft 101 and the airfoil polishing disc 104 is that the main shaft 101 directly drives the rotation of the airfoil polishing disc 104. The selected airfoil polishing disc 104 is an airfoil, and the main shaft 101 drives the airfoil polishing disc 104 and the workpiece disc 103 to rotate at a high speed, and the speed ratio of the workpiece disc 103 to the airfoil polishing disc 104 is -1. The whole working principle is that the main shaft 101 drives the airfoil polishing disc 104 to rotate at a high speed, and the workpiece disc 103 also rotates in the opposite direction at the same speed. Due to the special cross-sectional shape of the airfoil polishing disc 104, the airfoil polishing disc 104 will generate lift when rotating at a high speed in the air environment, and will overcome its own weight to rise upward and slowly approach the workpiece disc 103. At this time, the nozzle 105 sprays polishing liquid between the airfoil polishing disc 104 and the workpiece disc 103. In the process of approaching the workpiece disc 103, the liquid dynamic pressure between the airfoil polishing disc 104 and the workpiece disc 103 will be generated. The closer the distance, the greater the liquid dynamic pressure. The lift direction of the airfoil polishing disc 104 is upward, and the self-gravity and the liquid dynamic pressure reaction force are downward. At a certain distance, a balance state is reached. The airfoil polishing disc 104 will be in this position to polish the workpiece disc 103. According to research, when the balance state is reached, due to vibration and other factors, the gap between the airfoil polishing disc 104 and the workpiece disc 103 will be in a fluctuating range. This will directly affect the liquid dynamic pressure received by the workpiece disc 103, and make the liquid dynamic pressure be in a fluctuating range. If it is not controlled, it will directly affect the polishing effect of the workpiece.

[0048] The results and working principles of the lift suspension polishing device 1 targeted by the present application can refer to patent CN115042069A.

[0049] Please refer to Figures 2-4 , the gap measuring and controlling device includes a high-speed camera 2, a rotating platform 3 and a lifting platform 4. The high-speed camera 2 is opposite to the gap between the workpiece and the airfoil polishing disc 104, and detects the gap between the airfoil polishing disc 104 and the workpiece. The rotating platform 3 rotates the high-speed camera 2, and the lifting platform 4 lifts the high-speed camera 2. Specifically, the rotating platform 3 is arranged on the lifting platform 4, and the high-speed camera 2 is arranged on the rotating platform 3. The rotating platform 3 and the lifting platform 4 are realized by using conventional rotating mechanism and lifting mechanism, for example, hollow rotating platform and scissor-type lifting machine. The lifting platform 4 can adjust the height of the high-speed camera 2 in the vertical direction, so that the high-speed camera 2 reaches the predetermined position. The rotating platform 3 can finely adjust the angle of the high-speed camera 2 in the horizontal plane, so that the polishing gap to be measured is as much as possible in the field of view of the high-speed camera 2.

[0050] Please refer to Figure 5The high-speed micro-gap polishing on-line measurement and control system is used for realizing the high-speed micro-gap polishing on-line measurement and control method, and comprises a high-speed data acquisition system 5, an upper computer 6 and a control system 7. The high-speed data acquisition system 5 comprises a high-speed camera 2 and a pressure sensor 8, the high-speed camera 2 is used for detecting the gap between the workpiece and the airfoil polishing disc 104, and the pressure sensor 8 is arranged on the workpiece and used for detecting the pressure of the workpiece. The upper computer 6 comprises a display and a PC industrial computer, the upper computer 6 receives and processes the data collected by the high-speed data acquisition system 5 and transmits instructions to the control system 7. The control system 7 controls the working of the motor 100 of the lift suspension polishing device 1. The high-speed data acquisition system 5 and the control system 7 constitute a lower computer.

[0051] The high-speed camera 2 and the pressure sensor 8 are electrically connected with the upper computer 6 respectively, the upper computer 6 is electrically connected with the control system 7, and the control system 7 is electrically connected with the motor 100.

[0052] The pressure sensor 8 is preferably a flexible thin film pressure sensor and is attached to the surface of the workpiece disc 103. In this way, the workpiece disc 103, the workpiece and the flexible thin film pressure sensor receive the same pressure during polishing. The pressure data obtained by the flexible thin film pressure sensor is the pressure received by the workpiece.

[0053] The lift of the airfoil polishing disc 104 and the hydrodynamic pressure are both affected by the rotating speed of the airfoil polishing disc 104, and the lift and the hydrodynamic pressure of the airfoil polishing disc 104 increase with the increase of the rotating speed. During polishing, the polishing gap measured by the high-speed camera 2 is transmitted to the upper computer 6. Before the upper computer 6 obtains the polishing gap data, an initial rotating speed of the motor 100 is given to make the airfoil polishing disc 104 stably rise. The high-speed camera 2 continuously shoots and transmits data to the upper computer every 1 second. After the upper computer obtains the data, the current data is compared with the average of the previous five data. If the difference between the current data and the average of the previous five data is within ±10 um, the upper computer gives a command to the motor 100 to control the rotating speed of the motor 100. If the polishing gap is larger than the expected gap size, the rotating speed of the motor 100 is increased slowly, the lift of the airfoil polishing disc 104 is increased, the balance state is broken, and the polishing gap is reduced. According to the fluid dynamic pressure lubrication theory, when the polishing gap is reduced to a certain value, the hydrodynamic pressure is exponentially increased, and the airfoil polishing disc 104 reaches the balance state again. Similarly, if the polishing gap is smaller than the expected gap size, the rotating speed of the motor 100 is slowly reduced to make the polishing gap reach the expected size.

[0054] As shown in FIG. 1, the lift suspension polishing device 1 comprises a workpiece disc 103, a workpiece 102, an airfoil polishing disc 104, a motor 100 and a polishing liquid supply device 101. Figure 6As shown, if the initial speed of motor 100 is insufficient at the start of polishing, and the airfoil polishing disk 104 does not rise sufficiently (i.e., the polishing gap is too large), the motor 100 will automatically increase its speed by 50 rad / min each time. After the speed increases, the airfoil polishing disk 104 will move closer to the workpiece disk 103, reducing the polishing gap. This process may be repeated once or multiple times until the polishing gap reaches the required size.

[0055] Similarly, such as Figure 7 As shown, if the given motor speed of 100 is too high when polishing begins, it will result in the polishing gap being too small. At this time, the motor speed will be reduced to achieve the required gap size for polishing.

[0056] like Figure 8 , Figure 9 As shown, during the experiment, there are occasional moments of unstable pressure, which can cause the airfoil polishing disk 104 to drop or rise slightly, and the polishing gap will increase or decrease. However, for gap changes that last for a short period of time, the host computer program will not control the adjustment, and the polishing gap may return to its original size after one or two seconds.

[0057] If it appears Figure 10 , Figure 11 If the time step of the gap change is too long, the program will adjust the motor speed by 100. The adjustment process is similar to... Figure 6 , Figure 7 The logic is similar; the rotation speed is increased or decreased by 50 rad / min each time until the polishing gap stabilizes at the required size.

[0058] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-speed micro-gap polishing online measurement and control method, characterized in that, The application relates to a lift-suspension polishing device and a polishing method thereof. Step 1, a workpiece is installed on a workpiece disc (103) of a lift-suspension polishing device (1), a gap measuring and controlling device is installed on one side of the lift-suspension polishing device (1), and a high-speed camera (2) in the gap measuring and controlling device faces the work disc of the lift-suspension polishing device (1) from the side; Step 2, the lift-suspension polishing device (1) and the gap measuring and controlling device are started, the workpiece is polished by the lift-suspension polishing device (1), and the gap between the workpiece and the airfoil polishing disc (104) is detected by the gap measuring and controlling device; When the gap is greater than the preset normal range of the gap and is maintained for t1 time, a control system (7) controls a motor (100) in the lift-suspension polishing device (1) to increase the rotating speed until the gap falls into the normal range of the gap; When the gap is smaller than the preset normal range of the gap and is maintained for t2 time, the control system (7) controls the motor (100) in the lift-suspension polishing device (1) to decrease the rotating speed until the gap falls into the normal range of the gap; Step 3, polishing is finished, the motor (100) is turned off, and the workpiece is taken out after the motor (100) stops rotating; The lift-suspension polishing device (1) comprises a workbench, a support frame, a support plate, the motor (100), a main shaft (101), three transmission shafts (102), a transmission assembly, the workpiece disc (103), the airfoil polishing disc (104) and nozzles (105), the support frame is arranged on the workbench, the support plate is arranged on the support frame, the motor (100) is arranged on the support plate, the motor (100) is connected with the main shaft (101) through a coupling (107), the lower end of the main shaft (101) is provided with the airfoil polishing disc (104), three transmission shafts (102) are further arranged on the support plate and are evenly arranged in a ring around the main shaft (101), the transmission assembly is arranged between the support plate and the support frame and comprises four bevel gears (108), one bevel gear (108) is arranged on the main shaft (101), and the other three bevel gears (108) are arranged on the three transmission shafts (102), the bevel gear (108) on the main shaft (101) is meshed with the other three bevel gears (108), and the lower end of each transmission shaft (102) is provided with the workpiece disc (103); the bottom of the workpiece disc (103) is provided with a workpiece, the workpiece disc (103) and the airfoil polishing disc (104) are arranged at the lower end of the table top of the support frame, the workpiece disc (103) is arranged above the airfoil polishing disc (104), the workpiece disc (103) and the airfoil polishing disc (104) rotate in opposite directions, the nozzles (105) are arranged at the bottom of the table top of the support frame in opposition and face the workpiece disc (103) and the airfoil polishing disc (104) to supply abrasive materials, and the nozzles (105) are further connected with an abrasive material inlet pipeline (106) which is connected with a feeding device.

2. The method according to claim 1, wherein, In step 2, the motor (100) has an initial rotating speed, the rotating speed of the motor (100) is increased or decreased by a certain rotating speed each time, and the gap falls into the normal range of the gap after one or more times of speed regulation.

3. The method of claim 1, wherein the method is characterized by: The gap measurement and control device comprises a high-speed camera (2), a rotating platform (3) and a lifting platform (4), the high-speed camera (2) detects the gap between the airfoil polishing disc (104) and the workpiece, the rotating platform (3) rotates the high-speed camera (2), and the lifting platform (4) lifts the high-speed camera (2).

4. The method according to claim 3, wherein, The rotating platform (3) is arranged on the lifting platform (4), and the high-speed camera (2) is arranged on the rotating platform (3).

5. The method of claim 3, wherein the method is characterized by: In step 2, the high-speed camera (2) is calibrated by a checkerboard before the gap is measured.

6. A high-speed micro-gap polishing online measurement and control system for implementing the high-speed micro-gap polishing online measurement and control method according to any one of claims 1-5, characterized in that, The device further comprises a high-speed data acquisition system (5), a host computer (6) and a control system (7). The high-speed data acquisition system (5) comprises the high-speed camera (2), which detects the gap between the workpiece and the airfoil polishing disc (104). The host computer (6) receives and processes the data collected by the high-speed data acquisition system (5) and transmits instructions to the control system (7). The control system (7) controls the operation of the motor (100) of the lifting suspension polishing device (1).

7. The high-speed micro-gap polishing on-line measurement and control system according to claim 6, characterized in that, The high-speed data acquisition system (5) further comprises a pressure sensor (8) arranged on the workpiece to detect the pressure of the workpiece.

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