Multi-degree-of-freedom alignment device

Abstract

This invention discloses a multi-degree-of-freedom alignment device, comprising a main body, an X-axis drive unit and a Z-axis drive unit for driving Z-axis movement within the main body, a Y-axis drive unit movably connected within the main body, the Y-axis drive unit including a gantry slidably connected to the main body, and a first working component slidably connected to at least one side of the gantry along the Y direction; a second working component is provided below the main body, and a micro-motion device connected to the main body is provided on the second working component. This multi-degree-of-freedom alignment device includes an XY motion platform with a movement and positioning execution structure, an XY micro-motion structure with a movement and positioning wafer structure, and a lifting structure for adjusting product height. It achieves a compact combination of dual gantry structures, significantly reduces the mass of high-frequency moving parts, reduces equipment vibration, and further improves the alignment accuracy of the equipment.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, specifically to a multi-degree-of-freedom alignment device that integrates the actuator head motion structure and the wafer motion structure in a compact, integrated design. Background Technology

[0002] In the semiconductor and semiconductor assembly field, there are design requirements for the alignment of the actuator movement structure, wafer or material movement structure, and substrate movement structure.

[0003] Existing alignment devices mainly adopt a dual-gantry / dual-platform (bridge) structure. One gantry is responsible for the movement and positioning of the wafer platform, and has the ability to move along the large platform. The wafer platform also has the ability to move perpendicular to the large platform. The other gantry is responsible for the movement and positioning of the execution head platform, and also has the ability to move along the large platform. The execution platform also has the ability to move perpendicular to the large platform.

[0004] The existing double gantry structure has the following drawbacks: ① The gantry size is large, resulting in a large equipment size. In actual alignment production, only a single alignment device can be added, leading to low efficiency; ② The moving parts are heavy, resulting in large vibrations, long response time, and low precision during operation. Summary of the Invention

[0005] The purpose of this invention is to provide a compact, integrated, multi-degree-of-freedom alignment device to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A multi-degree-of-freedom alignment device, characterized in that the multi-degree-of-freedom alignment device includes a multi-degree-of-freedom alignment device body, a Z-direction driving part for driving the multi-degree-of-freedom alignment device body to move in the Z direction is provided on one side of the multi-degree-of-freedom alignment device body, and an X-direction driving part and a Y-direction driving part are provided inside the multi-degree-of-freedom alignment device body, the Y-direction driving part being slidably connected to the multi-degree-of-freedom alignment device body along the X direction through the X-direction driving part;

[0008] The Y-direction drive unit includes a gantry frame that is slidably connected to the main body of the multi-degree-of-freedom alignment device, and a first working component is slidably connected to one side of the gantry frame along the Y direction.

[0009] A second working component is provided below the main body of the multi-degree-of-freedom alignment device. The second working component is provided with a micro-motion device connected to the main body of the multi-degree-of-freedom alignment device. The second working component is located below the first working component.

[0010] As a further aspect of the present invention: the X-axis driving unit includes a first linear guide rail disposed inside the main body of the multi-degree-of-freedom alignment device and a base plate slidably connected to the first linear guide rail.

[0011] As a further aspect of the present invention: the main body of the multi-degree-of-freedom alignment device includes an open frame, with a cover plate connected to the upper end and the front end of the frame, and a first linear motor for driving the substrate to move linearly on the first linear guide rail is provided on the inner wall of the frame, and a drag chain support plate is provided on the inner wall of the main body of the multi-degree-of-freedom alignment device, with a first drag chain provided on the drag chain support plate.

[0012] As a further aspect of the present invention: the Y-axis driving unit includes a gantry frame connected to the substrate, the gantry frame having a cooling channel inside, a fixed connection part being provided at one end of the gantry frame, one end of the gantry frame being fixedly connected to the substrate on one side through the fixed connection part, and the end of the gantry frame away from the fixed connection part being movably connected to the substrate on the other side.

[0013] As a further embodiment of the present invention: both sides of the gantry frame are provided with a second linear guide rail, a first working component connecting plate slidably connected to the second linear guide rail, and a second linear motor for driving the first working component connecting plate to slide. The first working component is fixedly connected to the first working component connecting plate, and a counterweight is fixedly connected to the first working component connecting plate on the other side. The upper end of the first working component connecting plate connected to the first working component is provided with a cable interface plate. The upper end of the gantry frame is provided with a drag chain bearing plate, and a second drag chain is provided on the drag chain bearing plate.

[0014] As a further aspect of the present invention: the second working component includes a worktable, which is connected to the main body of the multi-degree-of-freedom alignment device via a micro-motion device. The micro-motion device is provided in four groups and is located at the four corners of the worktable. The four micro-motion devices are divided into two groups to form an X-direction micro-motion component and a Y-direction micro-motion component.

[0015] As a further aspect of the present invention: a micro-motion feedback device is provided on one side of the micro-motion device, the micro-motion device includes a voice coil motor and a slide table, the slide table includes an upper slide table, a middle slide table, and a lower slide table, the stator of the voice coil motor and the upper slide table are fixedly connected to the main body of the multi-degree-of-freedom alignment device to form a fixed part, the mover of the voice coil motor is connected to the middle slide table to drive the lower slide table to move, and the lower slide table is fixedly connected to the worktable to form a target point.

[0016] A multi-degree-of-freedom alignment device includes a support plate and a multi-degree-of-freedom alignment device assembly disposed on the upper end of the support plate. The support plate has at least one gantry assembly, and each gantry assembly has a multi-degree-of-freedom alignment device assembly. The multi-degree-of-freedom alignment device assembly is slidably connected to the gantry assembly in the Z and Y directions. A bottom camera is disposed on the upper end of the support plate, and a base plate frame and a feeding device are also disposed on the upper end of the support plate. A height measuring component and a camera component, which cooperate with the bottom camera, are disposed on one side of the multi-degree-of-freedom alignment device assembly.

[0017] As a further aspect of the present invention: the support plate is provided with three parallel gantry components, and each of the three gantry components is provided with a multi-degree-of-freedom alignment device component, which is slidably connected to the gantry component in the Z direction through a Z-direction driving part.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] 1. The multi-degree-of-freedom alignment device of this application includes an XY motion platform with a moving and positioning execution structure, an XY micro-motion structure with a moving and positioning wafer structure, and a lifting structure for adjusting the product height. This achieves a compact combination of the dual gantry structure, significantly reduces the mass of the high-frequency motion parts, reduces equipment vibration, and further improves the execution accuracy.

[0020] 2. This application integrates the execution head assembly and the wafer assembly in a compact manner, which not only ensures the complete realization of the alignment function, but also allows for the addition of multiple multi-degree-of-freedom alignment devices, thereby directly and significantly improving production efficiency and reducing production costs. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the multi-degree-of-freedom alignment device in this embodiment;

[0022] Figure 2 This is a top view of the multi-degree-of-freedom alignment device in this embodiment;

[0023] Figure 3 This is a schematic diagram of the X-axis drive section of the multi-degree-of-freedom alignment device in this embodiment;

[0024] Figure 4 , Figure 5 This is a schematic diagram of the Y-axis drive section of the multi-degree-of-freedom alignment device in this embodiment;

[0025] Figure 6 , Figure 7 This is a schematic diagram of the gantry structure of the Y-axis drive unit in this embodiment;

[0026] Figure 8 This is a schematic diagram of the structure of the second working component in this embodiment;

[0027] Figure 9 This is a schematic diagram of the connection structure of the second working component in this embodiment;

[0028] Figure 10 This is a schematic diagram of the micro-motion component arrangement in this embodiment;

[0029] Figure 11 This is a schematic diagram of the micro-motion component structure in this embodiment;

[0030] In the picture:

[0031] 10-stand, 20-support plate, 30-substrate frame, 40-gantry assembly, 50-bottom camera, 60-parts tray, 70-feeding device, 80-multi-degree-of-freedom alignment device assembly;

[0032] 801-X-direction drive unit, 802-Y-direction drive unit, 803-second working component, 804-multi-degree-of-freedom alignment device body, 805-cover plate, 806-Z-direction drive unit, 807-altitude measuring component, 808-camera component, 809-first working component;

[0033] 8011-Frame, 8012-First linear guide rail, 8013-First linear motor, 8014-Drag chain support plate, 8015-First drag chain, 8016-Base plate;

[0034] 8021-Gantry frame, 8022-Second linear guide rail, 8023-Fixed connection part, 8024-Second linear motor, 8025-Counterweight block, 8026-Drag chain load-bearing plate, 8027-Second drag chain, 8028-Cable interface board, 8029-First working component connection plate;

[0035] 8031-Workbench, 8032-Micro-motion device, 8033-Voice coil motor, 8034-Micro-motion feedback device. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] Please see Figure 1-11In this embodiment of the invention, a multi-degree-of-freedom alignment device includes a multi-degree-of-freedom alignment device assembly 80, which includes a multi-degree-of-freedom alignment device body 804. The multi-degree-of-freedom alignment device body 804 includes a frame 8011 with an open structure. The upper end and the front end of the frame 8011 are both connected to a cover plate 805. The multi-degree-of-freedom alignment device body 804 is provided with an X-direction driving part 801, a Y-direction driving part 802, and a Z-direction driving part 806 for driving the multi-degree-of-freedom alignment device body 804 to move in the Z direction. The Y-direction driving part 802 is slidably connected to the multi-degree-of-freedom alignment device body 804 in the X direction through the X-direction driving part 801.

[0038] The X-axis drive unit 801 includes a first linear guide rail 8012 disposed inside the multi-degree-of-freedom alignment device body 804 and a base plate 8017 slidably connected to the first linear guide rail 8012. The inner wall of the multi-degree-of-freedom alignment device body 804 is provided with a first linear motor 8013 for driving the base plate 8017 to move linearly along the first linear guide rail 8012. The inner wall of the multi-degree-of-freedom alignment device body 804 is provided with a drag chain support plate 8014, and a first drag chain 8015 is provided on the drag chain support plate 8014. The first drag chain 8015 is the drag chain of the X-axis drive unit 801.

[0039] The Y-axis drive unit 802 includes a gantry 8021 connected to the substrate 8017. In this embodiment, the gantry 8021 has a double-layer structure, and a cooling channel is provided inside the double-layer structure. By introducing coolant or cooling gas into the cooling channel, the gantry 8021 can be cooled to prevent deformation due to excessive temperature and reduce the impact of heat generated by the linear motor 8024 on the thermal expansion of the gantry 8021. A fixed connection part 8023 is provided at one end of the gantry 8021. One end of the gantry 8021 is fixedly connected to the substrate 8017 on one side via a fixed connection part 8023. The end of the gantry 8021 away from the fixed connection part 8023 is movably connected to the substrate 8017 on the other side. In this embodiment, a sliding connection is used, which is fixed at one end and movably connected at the other end. When the gantry expands or contracts in the length direction, the length change is absorbed by the sliding connection to prevent the substrate 8017 from deforming due to the length change of the gantry 8021. This can further eliminate the influence of thermal expansion on the gantry.

[0040] The gantry 8021 has a second linear guide rail 8022 on both sides, a first working component connecting plate 8029 slidably connected to the second linear guide rail 8022, and a second linear motor 8024 driving the first working component connecting plate 8029 to slide. The first working component 809 is fixedly connected to one of the first working component connecting plates 8029, and a counterweight 8025 is fixedly connected to the other first working component connecting plate 8029. The counterweight 8025 balances the weight of the first working component 809, ensuring the smooth operation of the gantry 8021 and improving its accuracy. The first working component connecting plate 8029 has a cable interface plate 8028 at its upper end, and the gantry 8021 has a drag chain bearing plate 8026 at its upper end. The drag chain bearing plate 8026 has a second drag chain 8027. The drag chain weighing plate 8016 is fixedly connected to the gantry 8021, and the second drag chain 8027 is the drag chain of the working device on the second linear guide rail 8022.

[0041] The second working component 803 includes a worktable 8031, which is connected to the main body 804 of the multi-degree-of-freedom alignment device via micro-motion devices 8032. Four groups of micro-motion devices 8032 are located at the four corners of the worktable 8031. These four micro-motion devices are divided into two groups, forming an X-direction micro-motion assembly and a Y-direction micro-motion assembly. Each micro-motion device 8032 includes a voice coil motor 8033 and a slide. The slide includes an upper slide, a middle slide, and a lower slide. The stator of the voice coil motor and the upper slide are fixedly connected to the main body 804 of the multi-degree-of-freedom alignment device to form a fixed part. The mover of the voice coil motor is connected to the middle slide to drive the lower slide. The lower slide is fixedly connected to the worktable 8031 ​​to form a target point. In this embodiment, as shown... Figure 11 As shown, the micro-motion device 8032 uses a slide table and a voice coil motor 8033. The operating principle of the micro-motion device 8032 is as follows, taking the control of the second working component by micro-motion devices 8032a and 8032c along the first direction as an example: the stator of the voice coil motor and the upper part of the slide table are connected to the X drive unit 801 as a fixed point; the lower part of the slide table is connected to the worktable 8031 ​​to control the movement of the second working component as a target point; the mover of the voice coil motor 8033 is connected to the middle part of the slide table, through... The cross guide rails apply force, and the middle layer of the slide pushes the lower layer of the slide to move; the micro-motion devices 8032a and 8032c are fixedly connected to the lower layer of the slide and the worktable 8031 ​​to transmit force to the lower layer of the connected micro-motion devices 8032b and 8032d, and all the lower layers of the slide move along the first direction; similarly, by controlling the micro-motion devices 8032b and 8032d, the second working component moves along the second direction. In addition, a micro-motion feedback device 8034 is provided to detect and provide feedback on micro-motion.

[0042] A multi-degree-of-freedom alignment device includes a platform 10 and a support plate 20 disposed on the platform 10. A multi-degree-of-freedom alignment device assembly 80 is disposed above the support plate 20. Two parallel tracks are disposed on the support plate 20, and a gantry assembly 40 is disposed on the tracks. The multi-degree-of-freedom alignment device assembly 80 is connected to the gantry assembly 40 and is slidably connected to the support plate 20 through the gantry assembly 40. The multi-degree-of-freedom alignment device assembly 80 and the gantry assembly 40 are slidably connected in the Z and Y directions. A base plate frame 30 and a feeding device 70 are disposed at the upper end of the support plate 20. A bottom camera 50 is disposed at the upper end of the support plate 20. A height measuring assembly 807 and a camera assembly 808 that cooperate with the bottom camera 50 are disposed on one side of the multi-degree-of-freedom alignment device assembly 80.

[0043] In use, the substrate with solder pads is placed on the substrate holder, and then the die film with the chip is placed on the component tray on the worktable 8031 ​​by the loading device. In this embodiment, the first working component is a high-frequency actuator, which is mounted on the first working component connecting plate 8029. The cable of the high-frequency actuator is connected via the cable interface plate 8028, thereby enabling chip processing. In addition, the high-frequency actuator is also equipped with a flexible connection device, that is, the high-frequency actuator can move relative to the first working component connecting plate 8029 in the Y direction via the flexible connection device. During operation, the multi-degree-of-freedom alignment device is first moved above the substrate holder 30 by the gantry assembly 40, and then... Then, the Z-drive unit 806 lowers the first working component 809 to the working height, and then the X-drive unit 801 is activated. The X-drive unit 801 drives the Y-drive unit 802 to move along the X direction. After moving to the required position, the main body of the multi-degree-of-freedom alignment device remains in a fixed position. Then, the Y-drive unit 802 is activated, and the second linear motor on the Y-drive unit 802 drives the first working component connecting plate 8029 to move. When the high-frequency execution head on the first working component connecting plate 8029 moves to the first execution position, the positions of the high-frequency execution head, the chip on the wafer on the worktable 8031, and the substrate are aligned. Then, the high-frequency execution head is activated, and the action is performed by the high-frequency execution head to start the current chip operation. The chip operation at the current position can be completed. Then, the Y-axis drive unit drives the first working component 809 to start moving at a constant speed. Before moving to the next station, the flexible connecting device in the high-frequency execution head starts to move in the opposite direction to the first working component 809. When it reaches the second station, the movement of the first working component 809 is counteracted by the reverse movement of the high-frequency execution head, so that the high-frequency execution head is relatively stationary relative to the multi-degree-of-freedom alignment device body. At this time, the high-frequency execution head and the second station to be executed on the substrate below are at the same horizontal position, that is, the high-frequency execution head is directly above the second station on the substrate. If the chip on the crystal film is exactly between the two, the chip is executed onto the substrate by the high-frequency execution head. If it is not between the two, the micro-motion device 8032 is used to make a micro-adjustment to the crystal film, and the corresponding chip is adjusted to the corresponding position between the high-frequency execution head and the substrate. Then the chip is executed. The above steps are repeated to execute the chip sequentially.

[0044] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0045] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A multi-degree-of-freedom alignment device, comprising a multi-degree-of-freedom alignment device assembly (80), characterized in that, The multi-degree-of-freedom alignment device assembly (80) includes a multi-degree-of-freedom alignment device body (804). A Z-direction driving part (806) for driving the multi-degree-of-freedom alignment device body (804) to move in the Z direction is provided on one side. An X-direction driving part (801) and a Y-direction driving part (802) are provided inside the multi-degree-of-freedom alignment device body (804). The Y-direction driving part (802) is slidably connected to the multi-degree-of-freedom alignment device body (804) in the X direction through the X-direction driving part (801). The Y-direction drive unit (802) includes a gantry frame (8021) that is slidably connected to the main body (804) of the multi-degree-of-freedom alignment device. A first working component (809) is slidably connected to one side of the gantry frame (8021) along the Y direction. The second working component (803) is provided below the main body (804) of the multi-degree-of-freedom alignment device. The second working component (803) is provided with a micro-motion device (8032) connected to the main body (804) of the multi-degree-of-freedom alignment device. The second working component (803) is located below the first working component (809).

2. The multi-degree-of-freedom alignment device according to claim 1, characterized in that, The X-axis drive unit (801) includes a first linear guide rail (8012) disposed inside the body (804) of the multi-degree-of-freedom alignment device and a base plate (8017) slidably connected to the first linear guide rail (8012).

3. The multi-degree-of-freedom alignment device according to claim 2, characterized in that, The main body (804) of the multi-degree-of-freedom alignment device includes an open frame (8011), with a cover plate (805) connected to the upper end and the front end of the frame (8011). The inner wall of the frame (8011) is provided with a first linear motor (8013) for driving the substrate (8017) to move linearly on the first linear guide rail (8012). The inner wall of the main body (804) of the multi-degree-of-freedom alignment device is provided with a drag chain support plate (8014), and a first drag chain (8015) is provided on the drag chain support plate (8014).

4. The multi-degree-of-freedom alignment device according to claim 2, characterized in that, The Y-axis drive unit (802) includes a gantry (8021) connected to the substrate (8017). The gantry (8021) has a cooling channel inside. One end of the gantry (8021) is provided with a fixed connection part (8023). One end of the gantry (8021) is fixedly connected to the substrate (8017) on one side through the fixed connection part (8023). The end of the gantry (8021) away from the fixed connection part (8023) is movably connected to the substrate (8017) on the other side.

5. A multi-degree-of-freedom alignment device according to claim 4, characterized in that, The gantry (8021) is provided with a second linear guide rail (8022) on both sides, a first working component connecting plate (8029) slidably connected to the second linear guide rail (8022), and a second linear motor (8024) for driving the first working component connecting plate (8029) to slide. The first working component (809) is fixedly connected to the first working component connecting plate (8029). A counterweight (8025) is fixedly connected to the first working component connecting plate (8029) on the other side. A cable interface plate (8028) is provided on the upper end of the first working component connecting plate (8029) connected to the first working component (809). A drag chain bearing plate (8026) is provided on the upper end of the gantry (8021). A second drag chain (8027) is provided on the drag chain bearing plate (8026).

6. The multi-degree-of-freedom alignment device according to claim 1, characterized in that, The second working component (803) includes a worktable (8031), which is connected to the main body (804) of the multi-degree-of-freedom alignment device via micro-motion devices (8032). The micro-motion devices (8032) are provided in four groups and are located at the four corners of the worktable (8031). The four micro-motion devices (8032) are divided into two groups to form an X-direction micro-motion component and a Y-direction micro-motion component.

7. A multi-degree-of-freedom alignment device according to claim 6, characterized in that, The micro-motion device (8032) is provided with a micro-motion feedback device (8034) on one side. The micro-motion device (8032) includes a voice coil motor (8033) and a slide table. The slide table includes an upper slide table, a middle slide table, and a lower slide table. The stator of the voice coil motor (8033) and the upper slide table are fixedly connected to the main body (804) of the multi-degree-of-freedom alignment device to form a fixed part. The mover of the voice coil motor is connected to the middle slide table to drive the lower slide table to move. The lower slide table is fixedly connected to the worktable (8031) to form a target point.

8. A multi-degree-of-freedom alignment device using any one of claims 1-7, characterized in that, The device includes a support plate (20) and a multi-degree-of-freedom alignment device assembly (80) disposed on the upper end of the support plate (20). The support plate (20) is provided with at least one gantry assembly (40), and each gantry assembly (40) is provided with a multi-degree-of-freedom alignment device assembly (80). The multi-degree-of-freedom alignment device assembly (80) is slidably connected to the gantry assembly (40) in the Z and Y directions. The upper end of the support plate (20) is provided with a bottom camera (90). The upper end of the support plate (20) is provided with a base plate frame (30) and a feeding device (70). The multi-degree-of-freedom alignment device assembly (80) is provided with a height measuring component (807) and a camera component (808) that cooperate with the bottom camera (90) on one side.

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