A MEMS hydrogen sensor and its temperature compensation method

Abstract

The invention relates to the technical field of hydrogen sensors, and discloses a MEMS hydrogen sensor and a temperature compensation method thereof. The MEMS hydrogen sensor comprises a substrate, on which a sensitive film, an electrode, a controller module, a first temperature detection module and a first humidity detection module are arranged. The first temperature detection module and the first humidity detection module transmit the detected gas temperature and gas humidity to the controller module. The controller module stores a first mathematical model and a second mathematical model. The temperature and humidity detected by the first temperature detection module and the first humidity detection module are substituted into the first mathematical model to obtain a compensated sensitivity, and the compensated sensitivity is substituted into the second mathematical model to calculate a corrected hydrogen concentration value. The invention also takes into account the influence of temperature and humidity on the sensitivity of the sensor, and improves the accuracy and stability of the detection result of the MEMS hydrogen sensor in a complex environment.

Description

Technical Field

[0001] The present invention relates to the technical field of hydrogen sensors, and in particular to a MEMS hydrogen sensor and a temperature compensation method thereof. Background Art

[0002] With the continuous development of science and technology, hydrogen, as a clean and efficient energy source, has been widely used in the energy field, automotive field, chemical field, and electronic field. However, hydrogen is flammable and explosive, and its molecules are small and easy to leak, so the detection of hydrogen is very important. MEMS hydrogen sensors have the advantages of small size, low power consumption, and fast response speed. Therefore, using MEMS hydrogen sensors for hydrogen detection is an important method of hydrogen detection.

[0003] At present, the existing MEMS hydrogen sensors are mainly designed based on the principles of metal oxide semiconductor, electrochemistry, catalytic combustion, etc. These hydrogen sensors have good performance within a certain temperature range, but when the temperature changes, the sensitivity and other performance of the MEMS hydrogen sensors will be greatly affected.

[0004] In order to solve the impact of temperature on MEMS hydrogen sensors, the commonly used methods include integrating temperature sensors into sensors, establishing a digital model between temperature and sensor sensitivity through a large number of experiments, and performing temperature compensation through algorithms. However, these methods usually do not consider the impact of humidity, making the performance of MEMS hydrogen sensors in complex environments not stable and accurate enough.

[0005] To this end, the applicant proposes a MEMS hydrogen sensor and a temperature compensation method thereof, which can simultaneously consider the effects of temperature and humidity on the sensitivity of the sensor and improve the stability of the MEMS hydrogen sensor under different environmental conditions. Summary of the invention

[0006] The purpose of the present invention is to provide a MEMS hydrogen sensor and a temperature compensation method thereof, aiming to improve the problem that the existing MEMS hydrogen sensor and its temperature compensation method usually only consider the influence of temperature on the sensor sensitivity, but do not consider the influence of humidity on the sensor sensitivity, resulting in the performance of the MEMS hydrogen sensor in a complex environment is not stable and accurate enough.

[0007] The present invention is achieved in that:

[0008] According to one aspect of the present invention, the present invention provides a MEMS hydrogen sensor, including a substrate, on which a sensitive film and an electrode are arranged, the sensitive film and the electrode are electrically connected, and a controller module, a first temperature detection module and a first humidity detection module are also arranged on the substrate, and the electrode, the first temperature detection module and the first humidity detection module are all electrically connected to the controller module; the first temperature detection module and the first humidity detection module transmit the detected gas temperature and gas humidity in contact with the sensitive film to the controller module, and the controller module stores a first mathematical model between temperature, humidity and sensor sensitivity and a second mathematical model between hydrogen concentration and sensitivity, and the temperature and humidity detected by the first temperature detection module and the first humidity detection module are substituted into the first mathematical model to calculate the compensated sensitivity, and the compensated sensitivity is substituted into the second mathematical model to calculate the corrected hydrogen concentration value.

[0009] Furthermore, the controller module is also electrically connected to a heating module, a second temperature detection module and a second humidity detection module. The heating module is arranged between the sensor air inlet and the sensitive membrane, the detection structures of the first temperature detection module and the first humidity detection module are located between the heating module and the sensitive membrane, and the detection structures of the second temperature detection module and the second humidity detection module are located between the sensor air inlet and the heating module, and on the side of the heating module away from the sensitive membrane.

[0010] According to a second aspect of the present invention, the present invention provides a temperature compensation method for a MEMS hydrogen sensor, which is used for the above-mentioned MEMS hydrogen sensor and comprises the following steps:

[0011] S100, performing multiple experiments under conditions of different temperature and humidity combinations to obtain experimental data corresponding to multiple different temperature and humidity combinations;

[0012] S200, establishing a first mathematical model between temperature, humidity and sensor sensitivity by using the least squares method according to the obtained experimental data; the first mathematical model is S=f(T, H), where S represents the sensitivity of the sensor, T represents the temperature detected by the first temperature detection module, H represents the humidity detected by the first humidity detection module, and f is a function of T and H;

[0013] S300, storing the first mathematical model in the controller module, and storing the second mathematical model between hydrogen concentration and sensitivity in the controller module;

[0014] S400, substituting the temperature and humidity detected by the first temperature detection module and the first humidity detection module into a first mathematical model to calculate a compensated sensitivity S;

[0015] S500: Substitute the compensated sensitivity into the second mathematical model to calculate a corrected hydrogen concentration value.

[0016] Furthermore, the first mathematical model S=f(T,H) is specifically in the following form:

[0017] S=aT²+bT+cH²+dH+eTH+g, where a, b, c, d, e, and g are constants.

[0018] Furthermore, the output of the MEMS hydrogen sensor is V, and the second mathematical model of the sensor sensitivity S and the hydrogen concentration C is: V=I×S×C, where I is a proportional constant. Substituting the compensated sensitivity S into the formula, a corrected hydrogen concentration value C=V÷(I×S) is obtained.

[0019] Furthermore, the controller module is also electrically connected to a heating module, a second temperature detection module and a second humidity detection module, the heating module is arranged between the sensor air inlet and the sensitive membrane, the detection structures of the first temperature detection module and the first humidity detection module are located between the heating module and the sensitive membrane, and the detection structures of the second temperature detection module and the second humidity detection module are located between the sensor air inlet and the heating module, and on the side of the heating module away from the sensitive membrane; the controller module stores a minimum intake air temperature threshold value Tmin, and when the second temperature detection module detects that the intake air temperature value reaches or is lower than Tmin, the controller module controls the heating module to heat the intake air and heats it to a temperature greater than or equal to Tmin.

[0020] Furthermore, the heating power of the heating module is W and the heating power is adjustable, the intake air flow is Q, and the real-time intake air temperature value detected by the second temperature detection module is T. When T<Tmin, the heating power P of the heating module satisfies the following formula:

[0021] η×W=R 1 ×R 2 ×[c 1 ×ρ 1 ×Q×(1-C)+c 1 ×ρ 2 ×Q×C]×(Tmin+M-T)

[0022] or

[0023] k×η×W=R 1 ×R 2 ×[c 1 ×ρ 1 ×Q×(1-C)+c 1 ×ρ 2 ×Q×C]×(Tmin-T)

[0024] In the above formula, η is the electric-thermal conversion efficiency of the heating module, R 1 is the temperature regulation coefficient, R 2 is the humidity adjustment coefficient, c 1 is the specific heat capacity of air, ρ 1 is the dry air density at 0 degrees Celsius under standard atmospheric pressure, c 2 is the specific heat capacity of hydrogen, ρ 2 is the dry hydrogen density at 0 degrees Celsius under standard atmospheric pressure, C is the hydrogen concentration, M is the adjustment compensation temperature, and k is the adjustment compensation coefficient.

[0025] Furthermore, the initial M is 1-2°C, and the first temperature detection module detects the temperature T of the gas after being heated by the heating module. 0 is passed to the controller module, which converts T 0 Compare with Tmin:

[0026] When T 0 When ≥Tmin, maintain the initial M value;

[0027] When T 0 <Tmin, and |T 0 -Tmin|÷(Tmin-T)×100%≤N 1 %, M increases L based on the previous value 1 ℃;

[0028] When T 0 <Tmin, and N 1 %<|T 0 -Tmin|÷(Tmin-T)×100%≤N 2 %, M increases L based on the previous value 2 ℃;

[0029] When T 0 <Tmin, and N 2 %<|T 0 -Tmin|÷(Tmin-T)×100%, M increases by L based on the previous value 3 ℃;

[0030] Among them, N 1 <N 2 , L 1 <L 2 <L 3 .

[0031] Furthermore, 20≤N 1 ≤25,40≤N 2 ≤55; 1≤L 1 ≤2,3≤L 2 ≤5, 6≤L3 ≤10.

[0032] Furthermore, the initial k is 1.05-1.1, and the first temperature detection module detects the temperature T of the gas after being heated by the heating module. 0 is passed to the controller module, which converts T 0 Compare with Tmin:

[0033] When T 0 When ≥Tmin, keep the initial k value;

[0034] When T 0 <Tmin, and |T 0 -Tmin|÷(Tmin-T)×100%≤N 3 %, k increases by J based on the previous value 1 ;

[0035] When T 0 <Tmin, and N 3 %<|T 0 -Tmin|÷(Tmin-T)×100%≤N 4 %, k increases by J based on the previous value 2 ;

[0036] When T 0 <Tmin, and N 4 %<|T 0 -Tmin|÷(Tmin-T)×100%, k is increased by J based on the previous value 3 ;

[0037] Among them, N 3 <N 4 , and 20≤N 3 ≤25,40≤N 4 ≤55; J 1 <J 2 <J 3 , and 0.02≤J 1 ≤0.04,0.04<J 2 ≤0.07,0.07<J 3 ≤0.1.

[0038] Compared with the prior art, the present invention has the following beneficial effects:

[0039] 1. The MEMS hydrogen sensor provided by the present invention has a first temperature detection module and a first humidity detection module that can detect the temperature and humidity of the gas in contact with the sensitive membrane, and also has a controller module that can receive the detection results of the first temperature detection module and the first humidity detection module and apply them to calculate and correct the sensitivity of the sensor, so that the MEMS hydrogen sensor can take into account the influence of gas temperature and gas humidity on the sensitivity of the sensor.

[0040] 2. The temperature compensation method of the MEMS hydrogen sensor provided by the present invention not only takes into account the influence of temperature on the sensor sensitivity, but also takes into account the influence of humidity on the sensor sensitivity, thereby improving the accuracy and stability of the detection results of the MEMS hydrogen sensor in complex environments.

[0041] 3. The MEMS hydrogen sensor provided by the present invention has a heating module, and the controller module stores the minimum intake temperature threshold Tmin. When the intake temperature reaches or is lower than Tmin, the controller module controls the heating module to heat the intake air and heats it to be greater than or equal to Tmin. This not only narrows the temperature and humidity range of the detected gas, but also reduces the number of experiments conducted to establish the first mathematical model, and can also prevent the sensor reaction rate from decreasing due to the significant slowing of molecular thermal motion caused by the excessively low intake temperature, and the appearance of condensed water that affects the service life of the sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 is a block diagram of the electrical control structure of the MEMS hydrogen sensor provided in Example 1 of the present invention;

[0043] Figure 2 It is a method flow chart of the temperature compensation method of the MEMS hydrogen sensor provided in Example 2 of the present invention. DETAILED DESCRIPTION

[0044] The following is a further description with reference to the accompanying drawings and specific embodiments:

[0045] Example 1

[0046] like Figure 1As shown, this embodiment provides a MEMS hydrogen sensor, including a substrate and a packaging shell, the substrate is located in the packaging shell, and the packaging shell has an air inlet and an exhaust hole. A sensitive film, an electrode, a controller module, a first temperature detection module, a first humidity detection module, a heating module, a second temperature detection module and a second humidity detection module are also provided in the packaging shell. The sensitive film is a layer of film sensitive to hydrogen, such as a metal oxide film. The sensitive film is electrically connected to the electrode, and the electrode is electrically connected to the controller module. The electrode can be used to measure the change of the electrical properties of the sensitive film and transmit it to the controller module. The controller module can use an MCU chip, and the heating module can use an electric heating wire, an electric heating film, etc. The first temperature detection module, the first humidity detection module heating module, the second temperature detection module and the second humidity detection module are all electrically connected to the controller module.

[0047] The heating module is arranged between the air inlet of the sensor and the sensitive film, the detection structure of the first temperature detection module and the first humidity detection module, namely the temperature sensitive element and the humidity sensitive element, is located between the heating module and the sensitive film, and the detection structure of the second temperature detection module and the second humidity detection module is located between the air inlet of the sensor and the heating module, and is located on the side of the heating module away from the sensitive film. Thus, when the heating module is started, the second temperature detection module and the second humidity detection module detect the temperature and humidity of the gas before heating, and the first temperature detection module and the first humidity detection module detect the temperature and humidity of the gas after heating.

[0048] The first temperature detection module and the first humidity detection module transmit the detected gas temperature and gas humidity in contact with the sensitive membrane to the controller module, and the controller module stores a first mathematical model between temperature, humidity and sensor sensitivity and a second mathematical model between hydrogen concentration and sensitivity. The temperature and humidity detected by the first temperature detection module and the first humidity detection module are substituted into the first mathematical model to calculate the compensated sensitivity, and the compensated sensitivity is substituted into the second mathematical model to calculate the corrected hydrogen concentration value.

[0049] The controller module stores the minimum threshold value Tmin of the intake air temperature. When the second temperature detection module detects that the intake air temperature reaches or is lower than Tmin, the controller module controls the heating module to heat the intake air to a temperature greater than or equal to Tmin. This not only narrows the temperature and humidity range of the detected gas, but also reduces the number of experiments conducted to establish the first mathematical model. It can also prevent the problem of a decrease in the sensor reaction rate due to a significant slowdown in molecular thermal motion caused by too low an intake temperature, and the appearance of condensed water that affects the service life of the sensor.

[0050] Example 2

[0051] This embodiment provides a temperature compensation method for a MEMS hydrogen sensor, which is used for the MEMS hydrogen sensor provided in Embodiment 1. Figure 2 As shown, the following steps are included:

[0052] S100, performing multiple experiments under conditions of different temperature and humidity combinations to obtain multiple experimental data corresponding to different temperature and humidity combinations.

[0053] S200, using the least squares method to fit the obtained experimental data to establish a first mathematical model between temperature, humidity and sensor sensitivity. The first mathematical model is S=f(T,H), where S represents the sensitivity of the sensor, T represents the temperature detected by the first temperature detection module, H represents the humidity detected by the first humidity detection module, and f is a function of T and H. Specifically,

[0054] The first mathematical model S=f(T,H) is specifically expressed as follows:

[0055] S=aT²+bT+cH²+dH+eTH+g

[0056] Among them, a, b, c, d, e, and g are constants determined through experiments.

[0057] S300, storing the first mathematical model in the controller module, and storing the second mathematical model between hydrogen concentration and sensitivity in the controller module. Assuming the output of the MEMS hydrogen sensor is V, the second mathematical model of the sensor sensitivity S and the hydrogen concentration C is: V=I×S×C, where I is a proportional constant.

[0058] S400: Substitute the temperature and humidity detected by the first temperature detection module and the first humidity detection module into a first mathematical model to calculate a compensated sensitivity S.

[0059] S500, substituting the compensated sensitivity into the second mathematical model to calculate a corrected hydrogen concentration value, the corrected hydrogen concentration value C=V÷(I×S).

[0060] The controller module stores the minimum intake air temperature threshold value Tmin. In step S400, if the intake air temperature value detected by the second temperature detection module reaches or is lower than Tmin, the controller module needs to control the start of the heating module to heat the intake air through the heating module until the intake air temperature is greater than or equal to Tmin. In order to achieve flexible heating and improve heating capacity, the heating power of the heating module should be adjustable.

[0061] Assume that the real-time heating power of the heating module is W, and the intake air flow is Q. The intake air flow Q can be obtained in many ways, such as detecting the air pressure of the environment where the MEMS hydrogen sensor is located through an atmospheric pressure sensor, and obtaining the operating parameters of an induced draft fan connected to an external device. The real-time intake air temperature value detected by the second temperature detection module is T. When T<Tmin, the heating power P of the heating module satisfies any one of the following two formulas:

[0062] η×W=R 1 ×R 2 ×[c 1 ×ρ 1 ×Q×(1-C)+c 1 ×ρ 2 ×Q×C]×(Tmin+M-T)

[0063] or

[0064] k×η×W=R 1 ×R 2 ×[c 1 ×ρ 1 ×Q×(1-C)+c 1 ×ρ 2 ×Q×C]×(Tmin-T)

[0065] In the above two formulas, η is the electric-thermal conversion efficiency of the heating module, R 1 is the temperature regulation coefficient, R 2 is the humidity adjustment coefficient. At different temperatures and humidities, the density of air and hydrogen is different, so it is necessary to set the temperature adjustment coefficient R 1 and humidity adjustment factor R 2 Carry out data correction and adjustment, the temperature adjustment coefficient R under different temperature and pressure combinations 1 and humidity adjustment factor R 2 After being confirmed through experiments, it is stored in the controller module in advance and can be directly called when needed.

[0066] In the above two formulas, c 1 is the specific heat capacity of air, ρ 1 is the dry air density at 0 degrees Celsius under standard atmospheric pressure, c 2 is the specific heat capacity of hydrogen, ρ 2 is the dry hydrogen density at 0 degrees Celsius under standard atmospheric pressure, C is the hydrogen concentration, M is the adjustment compensation temperature, and k is the adjustment compensation coefficient. It is impossible for all the heat generated by the heating module to be transferred to the incoming gas, so it is necessary to set the adjustment compensation temperature M or the adjustment compensation coefficient k.

[0067] In some exemplary embodiments, the formula η×W=R is used. 1 ×R2 ×[c 1 ×ρ 1 ×Q×(1-C)+c 1 ×ρ 2 ×Q×C]×(Tmin+M-T), the initial M is selected between 1-2℃, the first temperature detection module detects the temperature T of the gas after being heated by the heating module 0 Pass it to the controller module, and the controller module will 0 Compare with Tmin:

[0068] When T 0 When ≥Tmin, the requirement of heating the incoming gas to a temperature greater than or equal to Tmin is met, and the initial M value is maintained at this time.

[0069] When T 0 <Tmin, and |T 0 -Tmin|÷(Tmin-T)×100%≤N 1 %, M increases L based on the previous value 1 ℃, changes every 1 second or 2 seconds. 20≤N 1 ≤25, specific, N 1 It can be 20, 21, 22, 23, 24, 25, etc. 1≤L 1 ≤2, specific L 1 It can be 1, 1.2, 1.5, 1.8, 2, etc.

[0070] When T 0 <Tmin, and N 1 %<|T 0 -Tmin|÷(Tmin-T)×100%≤N 2 %, M increases L based on the previous value 2 ℃, changes every 1 or 2 seconds. 40≤N 2 ≤55, specific, N 2 It can be 40, 43, 45, 50, 52.5, 55, etc. 3≤L 2 ≤5, specific L 2 It can be 3, 3.2, 4, 4.5, 5, etc.

[0071] When T 0 <Tmin, and N 2 %<|T 0 -Tmin|÷(Tmin-T)×100%, M increases by L based on the previous value 3 ℃, changes every 1 or 2 seconds. 6≤L 3 ≤10, specific L 3It can be 6, 6.2, 7, 8, 8.5, 9, 9.25, 9.75, 10, etc.

[0072] In some exemplary embodiments, the formula k×η×W=R is used. 1 ×R 2 ×[c 1 ×ρ 1 ×Q×(1-C)+c 1 ×ρ 2 ×Q×C]×(Tmin-T), the initial k is selected between 1.05-1.1, and the first temperature detection module detects the gas temperature T after being heated by the heating module. 0 Pass it to the controller module, and the controller module will 0 Compare with Tmin:

[0073] When T 0 When ≥Tmin, the requirement of heating the incoming gas to a temperature greater than or equal to Tmin is met, and the initial k value is maintained.

[0074] When T 0 <Tmin, and |T 0 -Tmin|÷(Tmin-T)×100%≤N 3 %, k increases by J based on the previous value 1 , changes every 1 or 2 seconds. 20≤N 3 ≤25, specific, N 3 It can be 20, 21, 22, 23, 24, 25, etc. 0.02≤J 1 ≤0.04, specific J 1 It can be 0.02, 0.03, 0.035, 0.04, etc.

[0075] When T 0 <Tmin, and N 3 %<|T 0 -Tmin|÷(Tmin-T)×100%≤N 4 %, k increases by J based on the previous value 2 , changes every 1 or 2 seconds. 40≤N 4 ≤55, specific, N 4 It can be 40, 43, 45, 50, 52.5, 55, etc. 0.04<J 2 ≤0.07, specific J 2 It can be 0.041, 0.045, 0.05, 0.055, 0.06, 0.063, 0.07, etc.

[0076] When T 0 <Tmin, and N 4%<|T 0 -Tmin|÷(Tmin-T)×100%, k is increased by J based on the previous value 3 , changes every 1 or 2 seconds. 0.07<J 3 ≤0.1, specific J 3 It can be 0.071, 0.075, 0.08, 0.086, 0.09, 0.095, 0.1, etc.

[0077] Working principle of the present invention: The MEMS hydrogen sensor provided by the present invention is provided with a first temperature detection module and a first humidity detection module. The first temperature detection module and the first humidity detection module transmit the detected gas temperature and gas humidity in contact with the sensitive film to the controller module. The controller module stores a first mathematical model between temperature, humidity and sensor sensitivity and a second mathematical model between hydrogen concentration and sensitivity. The temperature and humidity detected by the first temperature detection module and the first humidity detection module are substituted into the first mathematical model to calculate the compensated sensitivity. The compensated sensitivity is substituted into the second mathematical model to calculate the corrected hydrogen concentration value. Therefore, the MEMS hydrogen sensor provided by the present invention has a first temperature detection module and a first humidity detection module that can detect the temperature and humidity of the gas in contact with the sensitive film, and also has a controller module that can receive the detection results of the first temperature detection module and the first humidity detection module and apply them to calculate and correct the sensor sensitivity, so that the MEMS hydrogen sensor can take into account the influence of gas temperature and gas humidity on sensor sensitivity. The temperature compensation method of the MEMS hydrogen sensor provided by the present invention not only takes into account the influence of temperature on the sensor sensitivity, but also takes into account the influence of humidity on the sensor sensitivity, thereby improving the accuracy and stability of the detection results of the MEMS hydrogen sensor in complex environments.

[0078] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A temperature compensation method for a MEMS hydrogen sensor, characterized in that: The MEMS hydrogen sensor comprises a substrate, on which a sensitive film and an electrode are arranged, and the sensitive film and the electrode are electrically connected. It is characterized in that a controller module, a first temperature detection module and a first humidity detection module are also arranged on the substrate, and the electrode, the first temperature detection module and the first humidity detection module are all electrically connected to the controller module; the first temperature detection module and the first humidity detection module transmit the detected gas temperature and gas humidity in contact with the sensitive film to the controller module, and the controller module stores a first mathematical model between temperature, humidity and sensor sensitivity and a second mathematical model between hydrogen concentration and sensitivity, and substitutes the temperature and humidity detected by the first temperature detection module and the first humidity detection module into the first mathematical model to calculate the compensated sensitivity, and substitutes the compensated sensitivity into the second mathematical model to calculate the corrected hydrogen concentration value; The controller module is also electrically connected to a heating module, a second temperature detection module and a second humidity detection module, the heating module is arranged between the air inlet of the sensor and the sensitive film, the detection structures of the first temperature detection module and the first humidity detection module are located between the heating module and the sensitive film, and the detection structures of the second temperature detection module and the second humidity detection module are located between the air inlet of the sensor and the heating module, and are located on a side of the heating module away from the sensitive film; When the heating module is started, the second temperature detection module and the second humidity detection module detect the temperature and humidity of the gas before heating, and the first temperature detection module and the first humidity detection module detect the temperature and humidity of the gas after heating; The controller module stores a minimum intake air temperature threshold value Tmin. When the second temperature detection module detects that the intake air temperature value reaches or is lower than Tmin, the controller module controls the heating module to heat the intake air to a temperature greater than or equal to Tmin. The steps include: S100, performing multiple experiments under conditions of different temperature and humidity combinations to obtain experimental data corresponding to multiple different temperature and humidity combinations; S200, using the least squares method to fit the obtained experimental data to establish a first mathematical model between temperature, humidity and sensor sensitivity; the first mathematical model is S=f(T, H), and the specific form of the first mathematical model S=f(T, H) is the following formula: S=aT²+bT+cH²+dH+eTH+g, where a, b, c, d, e, g are constants; Wherein, S represents the sensitivity of the sensor, T represents the temperature detected by the first temperature detection module, H represents the humidity detected by the first humidity detection module, and f is a function of T and H; S300, storing the first mathematical model in the controller module, and storing the second mathematical model between hydrogen concentration and sensitivity in the controller module; S400, substituting the temperature and humidity detected by the first temperature detection module and the first humidity detection module into a first mathematical model to calculate a compensated sensitivity S; S500, substituting the compensated sensitivity into the second mathematical model to calculate a corrected hydrogen concentration value; The output of the MEMS hydrogen sensor is V, and the second mathematical model of the sensor sensitivity S and the hydrogen concentration C is: V=I×S×C, where I is a proportional constant. Substituting the compensated sensitivity S into the formula, the corrected hydrogen concentration value C=V÷(I×S) is obtained; The heating power of the heating module is W and the heating power is adjustable, the intake air flow is Q, and the real-time intake air temperature value detected by the second temperature detection module is T. When T<Tmin, the heating power W of the heating module satisfies the following formula: η×W=R1×R2×[c1×ρ1×Q×(1-C)+c1×ρ2×Q×C]×(Tmin+M-T) or k×η×W=R1×R2×[c1×ρ1×Q×(1-C)+c1×ρ2×Q×C]×(Tmin-T) In the above formula, η is the electric-thermal conversion efficiency of the heating module, R1 is the temperature adjustment coefficient, R2 is the humidity adjustment coefficient, c1 is the specific heat capacity of air, ρ1 is the dry air density of air at 0 degrees Celsius under standard atmospheric pressure, c2 is the specific heat capacity of hydrogen, ρ2 is the dry hydrogen density of hydrogen at 0 degrees Celsius under standard atmospheric pressure, C is the hydrogen concentration, M is the adjustment compensation temperature, and k is the adjustment compensation coefficient; the initial M is 1-2°C, the first temperature detection module transmits the detected gas temperature T0 after heating by the heating module to the controller module, and the controller module compares T0 with Tmin: When T0 ≥ Tmin, keep the initial M value; When T0<Tmin, and |T0-Tmin|÷(Tmin-T)×100%≤N1%, M increases by L1℃ on the basis of the previous value; when T0<Tmin, and N1%<|T0-Tmin|÷(Tmin-T)×100%≤N2%, M increases by L2℃ on the basis of the previous value; when T0<Tmin, and N2%<|T0-Tmin|÷(Tmin-T)×100%, M increases by L3℃ on the basis of the previous value; Among them, N1<N2, L1<L2<L3.

2. A temperature compensation method for a MEMS hydrogen sensor according to claim 1, characterized in that: 20≤N1≤25, 40≤N2≤55; 1≤L1≤2, 3≤L2≤5, 6≤L3≤10.

3. The temperature compensation method of a MEMS hydrogen sensor according to claim 1, characterized in that: Initially k is 1.05-1.1, the first temperature detection module transmits the detected gas temperature T0 after being heated by the heating module to the controller module, and the controller module compares T0 with Tmin: When T0 ≥ Tmin, keep the initial k value; When T0<Tmin, and |T0-Tmin|÷(Tmin-T)×100%≤N3%, k is increased by J1 on the basis of the previous value; When T0<Tmin, and N3%<|T0-Tmin|÷(Tmin-T)×100%≤N4%, k is increased by J2 on the basis of the previous value; When T0<Tmin, and N4%<|T0-Tmin|÷(Tmin-T)×100%, k increases by J3 on the basis of the previous value; Among them, N3<N4, and 20≤N3≤25, 40≤N4≤55; J1<J2<J3, and 0.02≤J1≤0.04, 0.04<J2≤0.07, 0.07<J3≤0.1.

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