Gray scale adjustment device based on phase change material display

Abstract

The present invention provides a grayscale adjustment device based on phase change material display, comprising: an optical filter structure for filtering out other light rays except the visible light part; an FP cavity structure that generates color based on phase change material, located under the optical filter structure, and the FP cavity structure is used to generate the color to be displayed; a lithium tantalate single crystal wafer detector structure, located under the FP cavity structure, and the lithium tantalate single crystal wafer detector structure is used to convert the heat generated by the FP cavity structure into current, compare the current corresponding to the FP cavity structure with the current corresponding to the standard grayscale, and regulate the state of the phase change material in the FP cavity structure according to the comparison result, so that the current corresponding to the FP cavity structure is equal to the current corresponding to the standard grayscale, thereby regulating the display grayscale of the color. The present invention realizes precise regulation of the display grayscale.

Description

Technical Field

[0001] The present invention relates to the technical field of phase change material displays, and particularly to a gray scale adjustment device based on phase change material displays. Background Art

[0002] In recent years, reflective displays composed of phase change materials have received extensive attention due to advantages such as low power consumption, high resolution, and fast switching speed. However, current reflective displays based on phase change materials all regulate the gray scale by applying current or heating to control the ratio of crystallization and amorphous of the phase change materials. However, due to the instability of the crystallization process of the phase change materials, it is impossible to accurately control the ratio of their crystallization or amorphous, which in turn leads to the inability of reflective displays composed of phase change materials to effectively regulate their gray scale in real time, thus hindering the further development of reflective displays.

[0003] In existing phase change material display technologies, there is no specific quantifiable regulation method for gray scale regulation of reflective display structures based on phase change materials, and only a few states can be regulated. Therefore, there are problems such as few adjustable gray scales and non-repeatability, which will greatly hinder their further applications. Therefore, designing a structure that can accurately regulate the gray scale of phase change displays has great practical significance. Summary of the Invention

[0004] The present invention provides a gray scale adjustment device based on phase change material displays to solve the defects in the prior art that reflective displays based on phase change materials cannot effectively regulate their gray scale in real time, and have few adjustable gray scales and non-repeatability, and to achieve accurate regulation of the display gray scale.

[0005] The present invention provides a gray scale adjustment device based on phase change material displays, including:

[0006] An optical filter structure for filtering out light other than the visible light part;

[0007] An FP cavity structure that generates color based on phase change materials, located below the optical filter structure, and the FP cavity structure is used to generate the color to be displayed;

[0008] A lithium tantalate single crystal wafer detector structure, located below the FP cavity structure, and the lithium tantalate single crystal wafer detector structure is used to convert the heat generated by the absorption of light by the FP cavity structure into current, compare the current generated by the FP cavity structure with the current corresponding to the heat generated by the absorption of light at the standard gray scale, and regulate the state of the phase change materials in the FP cavity structure according to the comparison result, so that the current converted from the heat generated by the absorption of light by the FP cavity structure is equal to the current corresponding to the standard gray scale, and further regulate the display gray scale of the color.

[0009] A grayscale adjustment device based on phase change material display provided by the present invention, wherein the optical filter structure is a broadband absorber, including a dielectric layer and a metal layer.

[0010] A grayscale adjustment device based on phase change material display provided by the present invention, wherein the optical filter structure includes a first metal layer, a lossy phase change layer or a second metal layer, and a third metal layer arranged in sequence from bottom to top.

[0011] A grayscale adjustment device based on phase change material display provided by the present invention, wherein the FP cavity structure includes a fourth metal layer, a phase change layer, and a fifth metal layer or a dielectric layer arranged in sequence from bottom to top;

[0012] Apply a voltage to the electrode layer of the phase change layer to change the crystal structure of the phase change layer and regulate the peak value and position of the FP cavity structure.

[0013] A grayscale adjustment device based on phase change material display provided by the present invention, wherein the FP cavity structure includes a sixth metal layer, a first phase change layer, a first dielectric layer, a second phase change layer, a second dielectric layer, and a covering layer arranged in sequence from bottom to top;

[0014] Apply a voltage to the sixth metal layer to control the crystallization state of the first phase change layer and the second phase change layer.

[0015] A grayscale adjustment device based on phase change material display provided by the present invention, wherein the sixth metal layer is W, and the phase change materials used in the first phase change layer and the second phase change layer are one or more of alloys such as Sb2Se3, GeTe, SbTe, SnSb, AgSbTe, InSbTe, and GeSb, wherein the percentage of each atom is adjustable, the first dielectric layer and the second dielectric layer are low-K dielectrics such as TIO2 and Ta2O5, and the covering layer is a low-K dielectric such as MGF2 and ZnS.

[0016] A grayscale adjustment device based on phase change material display provided by the present invention, wherein there is a seventh metal layer between the lithium tantalate single crystal wafer detector structure and the FP cavity structure.

[0017] A grayscale adjustment device based on phase change material display provided by the present invention, wherein the thickness of the sixth metal layer is less than 100 nm, the thickness of the phase change material used in the first phase change layer is less than 200 nm, the thickness of the first dielectric layer is less than 1 micron, the thickness of the phase change material used in the second phase change layer is less than 500 nm, the thickness of the second dielectric layer is less than 1 micron, the thickness of the covering layer is less than 1 micron, the thickness of the seventh metal layer is greater than 100 nm, and the thickness of the lithium tantalate single crystal wafer detector structure is not limited to 75 microns.

[0018] A grayscale adjustment device based on phase change material display provided by the present invention, the thickness of the phase change material used in the first phase change layer and the phase change material used in the second phase change layer is less than 300 nm.

[0019] A grayscale adjustment device based on phase change material display provided by the present invention, the FP cavity structure includes a plurality of phase change layers, each phase change layer includes a phase change material layer and electrode layers on both sides of the phase change material layer, and the electrode layers between adjacent two phase change material layers are shared.

[0020] The grayscale adjustment device based on phase change material display provided by the present invention combines a light filter structure, an FP cavity structure that generates colors based on phase change materials, and a lithium tantalate single crystal wafer detector structure, and introduces the current output by the lithium tantalate single crystal wafer according to the pyroelectric effect to provide negative feedback, further regulating the state of the phase change material, and then regulating the display grayscale, so as to convert the grayscale value regulation into the quantification of the current magnitude, realizing the precise regulation of the grayscale of the reflective display based on phase change materials, and meeting the requirements of the reflective display market based on phase change materials for grayscale regulation. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0022] Figure 1 is one of the schematic diagrams of the structure of the grayscale adjustment device based on phase change material display provided by the present invention;

[0023] Figure 2 is the schematic diagram of the light filter structure in the grayscale adjustment device based on phase change material display provided by the present invention;

[0024] Figure 3 is the spectral schematic diagram of the light filter structure in the grayscale adjustment device based on phase change material display provided by the present invention;

[0025] Figure 4 is the schematic diagram of the FP cavity structure that generates colors based on phase change materials in the grayscale adjustment device based on phase change material display provided by the present invention;

[0026] Figure 5 is the schematic diagram of the FP cavity structure that generates blue based on phase change materials in the grayscale adjustment device based on phase change material display provided by the present invention;

[0027] Figure 6It is a schematic spectrum diagram of the FP cavity structure that generates blue based on phase change materials in the gray scale adjustment device based on phase change material display provided by the present invention;

[0028] Figure 7 It is a schematic spectrum diagram when both layers of phase change materials in the FP cavity structure that generates blue based on phase change materials in the gray scale adjustment device based on phase change material display provided by the present invention are in the amorphous state;

[0029] Figure 8 It is a schematic spectrum diagram when the bottom layer of phase change material in the FP cavity structure that generates blue based on phase change materials in the gray scale adjustment device based on phase change material display provided by the present invention is in the crystalline state and the upper layer of phase change material is in the amorphous state;

[0030] Figure 9 It is a schematic spectrum diagram when both layers of phase change materials in the FP cavity structure that generates blue based on phase change materials in the gray scale adjustment device based on phase change material display provided by the present invention are in the crystalline state.

[0031] Reference numerals:

[0032] 101: The first metal layer in the optical filter structure; 102: The lossy phase change layer or the second metal layer in the optical filter structure; 103: The third metal layer in the optical filter structure; 201: The fourth metal layer in the FP cavity structure that generates red, green, blue, and yellow four primary colors based on phase change materials; 202: The phase change layer in the FP cavity structure that generates red, green, blue, and yellow four primary colors based on phase change materials; 203: The fifth metal layer or dielectric layer in the FP cavity structure that generates red, green, blue, and yellow four primary colors based on phase change materials; N: The cover layer in the FP cavity structure that generates red, green, blue, and yellow four primary colors based on phase change materials; 301: The lithium tantalate single crystal wafer detector structure in the gray scale adjustment device based on phase change material display; 302: The seventh metal layer in the gray scale adjustment device based on phase change material display; 601: The sixth metal layer in the FP cavity structure that generates blue based on phase change materials; 602: The first phase change layer in the FP cavity structure that generates blue based on phase change materials; 603: The first dielectric layer in the FP cavity structure that generates blue based on phase change materials; 604: The second phase change layer in the FP cavity structure that generates blue based on phase change materials; 605: The second dielectric layer in the FP cavity structure that generates blue based on phase change materials; 606: The cover layer in the FP cavity structure that generates blue based on phase change materials; 607: The seventh metal layer under the FP cavity structure that generates blue based on phase change materials; 608: The lithium tantalate single crystal wafer detector structure under the FP cavity structure that generates blue based on phase change materials. Detailed implementation manners

[0033] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below with reference to the accompanying drawings in the present invention. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present invention without any creative efforts shall fall within the protection scope of the present invention.

[0034] The following will be combined with Figure 1 Describe a grayscale adjustment device based on phase change material display, including:

[0035] An optical filter structure for filtering out other light rays except the visible light part;

[0036] An FP (Fabry - Perot, resonant cavity) structure that generates color based on phase change material, located below the optical filter structure, and the FP cavity structure is used to generate the color to be displayed;

[0037] A lithium tantalate single - crystal wafer detector structure 301, located below the FP cavity structure, and the lithium tantalate single - crystal wafer detector structure 301 is used to convert the heat generated by the FP cavity structure into current, compare the current corresponding to the FP cavity structure with the current corresponding to the standard grayscale, so as to regulate the state of the phase change material in the FP cavity structure according to the comparison result, make the current corresponding to the FP cavity structure equal to the current corresponding to the standard grayscale, and further regulate the display grayscale of the color.

[0038] The grayscale adjustment device based on phase change material display is sequentially provided with an optical filter structure, an FP cavity structure that generates color based on phase change material, and a lithium tantalate single - crystal wafer detector structure 301 from top to bottom.

[0039] When the three are combined, the optical filter structure filters out other light rays except the visible light part, excluding the influence of other light rays on the lithium tantalate single - crystal wafer detector structure below. When light passes through the optical filter structure and shines on the FP cavity structure that generates color based on phase change material, the corresponding color can be generated. By applying current, heat is generated, and then the state of the phase change material changes. When the application of current ends, the lithium tantalate single - crystal wafer detector structure 301 below can generate current according to the heat generated in the FP cavity structure that generates color based on phase change material, and then compare it with the current corresponding to the standard grayscale to provide negative feedback, adjust the magnitude of the applied current, further regulate the state of the phase change material, and then regulate its grayscale.

[0040] The FP cavity structure that generates color based on phase change materials can adopt a metal-phase change material-metal structure, or other structures, but it must contain phase change materials to regulate the generation of color. At the same time, the metal that can generate heat needs to be at the bottom layer of this structure. The single-crystal tantalum lithium niobate detector structure 301 provides negative feedback according to the change in heat generation of the FP cavity structure above, and then controls the current applied to the metal to regulate its gray scale. Compared with the traditional gray scale adjustment structure based on phase change material display, this design can accurately regulate its gray scale.

[0041] The single-crystal tantalum lithium niobate detector structure 301 is mainly composed of a single-crystal tantalum lithium niobate wafer, with electrodes on the top and bottom, and can output a current value according to the change in heat generation in the FP cavity structure that generates color based on phase change materials.

[0042] Compared with the existing structure for regulating its gray scale, this structure has the advantage of converting gray scale regulation into current quantization regulation. Using a brand-new display structure design concept, a display structure that can accurately regulate the gray scale of phase change materials has been successfully developed. This technical strategy overcomes the inherent limitations of the existing structure and has great significance for technological progress, providing new possibilities for the further development of phase change display technology.

[0043] In this embodiment, by combining the optical filter structure, the FP cavity structure that generates color based on phase change materials, and the single-crystal tantalum lithium niobate detector structure, and introducing the current output by the single-crystal tantalum lithium niobate according to the pyroelectric effect to provide negative feedback, the state of the phase change material is further regulated, and then the display gray scale is regulated, so as to convert the gray scale value regulation into current magnitude for quantization processing, realizing accurate regulation of the gray scale of the reflective display based on phase change materials and meeting the requirements for gray scale regulation in the reflective display market based on phase change materials, etc.

[0044] Based on the above embodiment, in this embodiment, the optical filter structure is a broadband absorber, including a dielectric layer and a metal layer.

[0045] The optical filter structure includes dielectric materials and metals, etc., and only needs to achieve full transmission of visible light, and the rest of the light is absorbed or reflected.

[0046] The optical filter structure can be a broadband absorption cavity structure. A thin film composed of a dielectric and a metal forms a broadband absorber, which mainly absorbs light other than visible light, so that the transmittance of visible light reaches more than 90%, and the transmittance of light in other wavelength bands is less than 10%, so as to exclude the interference of light other than visible light on the current detected by the single-crystal tantalum lithium niobate detector.

[0047] Based on the above embodiment, as Figure 2As shown, in this embodiment, the optical filter structure includes a first metal layer 101, a lossy phase change layer or a second metal layer 102, and a third metal layer 103 arranged in sequence from bottom to top.

[0048] The spectral schematic diagram of the optical filter structure is as Figure 3 shown.

[0049] Based on the above embodiment, as Figure 4 shown, in this embodiment, the FP cavity structure includes a fourth metal layer 201, a phase change layer 202, and a fifth metal layer or a dielectric layer 203 arranged in sequence from bottom to top;

[0050] Apply a voltage to the electrode layer of the phase change layer 202 to change the crystal structure of the phase change layer 202 and regulate the peak value and position of the FP cavity structure.

[0051] The FP cavity structure that generates color based on the phase change material includes a Metal-Dielectric-Metal (MDM) cavity, or is composed of multiple cavities of the same type or different types. The uppermost layer of the FP cavity structure can be a cover layer N.

[0052] The design of this cavity should achieve a state change of the phase change material without causing a large shift in the color peak position, but only changing in the corresponding wavelength band, that is, changing the displayed gray level. By applying a voltage to the metal layer, the crystal structure of the phase change material can be changed, thereby realizing the adjustment of the peak value and position of this cavity.

[0053] Based on the above embodiment, as Figure 5 shown, in this embodiment, the FP cavity structure includes a sixth metal layer 601, a first phase change layer 602, a first dielectric layer 603, a second phase change layer 604, a second dielectric layer 605, and a cover layer 606 arranged in sequence from bottom to top;

[0054] Apply a voltage to the sixth metal layer 601 to control the crystallization states of the first phase change layer 602 and the second phase change layer 604.

[0055] The phase change materials of the first phase change layer 602 and the second phase change layer 604 can include the following chalcogenide compounds and their alloys, including but not limited to characteristic phase change materials with low loss and high refractive index such as SbSe and SbS. In addition, the atomic percentages in the above chemical formulas can be variable. The phase change material can further contain at least one dopant, such as C and N.

[0056] The phase change materials of the first phase change layer 602 and the second phase change layer 604 can be switched between the crystalline state and the amorphous state under electrical stimulation or laser stimulation, thereby changing the transmittance and reflectivity of the phase change layer. The first phase change layer 602 and the second phase change layer 604 can control the crystallization state of the phase change material by applying a voltage to the sixth metal layer 601W.

[0057] Specifically, applying a medium-strength pulsed voltage or a laser pulse to the sixth metal layer 601 causes the temperature of the phase change material to rise above the crystallization temperature and below the melting temperature under the action of the current or the laser pulse, and maintain for a certain period of time. At this time, the lattice is arranged orderly to form a crystalline state, realizing the transformation from the amorphous state to the crystalline state.

[0058] Applying a short and strong voltage or a laser pulse to the sixth metal layer 601 causes the temperature of the phase change material to rise above the melting temperature, destroying the long-range order of the crystalline state. The very short falling edge of the pulse causes the phase change material to be rapidly cooled below the crystallization temperature, fixing the phase change material in the amorphous state and realizing the transformation from the crystalline state to the amorphous state. The gray level of the phase change material is regulated by the changes in the transmittance and reflectivity when the phase change materials of the first phase change layer 602 and the second phase change layer 604 are mutually transformed between the amorphous state and the crystalline state.

[0059] The transmittance of the phase change layer varies greatly in different states. The phase change material is stable in the crystalline state and the amorphous state. Therefore, the voltage or laser can be removed when the phase change material is in a stable state, so the power consumption of the entire display device during the display process is very low.

[0060] Based on the above embodiments, in this embodiment, the sixth metal layer 601 is W, the phase change material used in the first phase change layer 602 and the second phase change layer 604 is Sb2Se3, the first dielectric layer 603 and the second dielectric layer 605 are TIO2, and the covering layer 606 is MGF2.

[0061] The FP cavity structure that generates color based on the phase change material can be a narrowband absorber cavity structure. The phase change material in this structure is Sb2Se3, the metal layer is W, and the dielectric material is TIO2. Among them, Sb2Se3 has low loss and high refractive index in the visible light range, and W is a metal with high reflectivity.

[0062] Based on the above embodiments, as Figure 1 shown, in this embodiment, there is a seventh metal layer 302 between the lithium tantalate single crystal wafer detector structure 301 and the FP cavity structure.

[0063] The seventh metal layer is a conductive layer and can be a high-reflectivity metal W.

[0064] Based on the above embodiments, in this embodiment, the thickness of the sixth metal layer 601 is 20 nm, the thickness of the phase change material used in the first phase change layer 602 is 35 nm, the thickness of the first dielectric layer 603 is 152 nm, the thickness of the phase change material used in the second phase change layer 604 is 11 nm, the thickness of the second dielectric layer 605 is 90 nm, the thickness of the cover layer 606 is 135 nm, the thickness of the seventh metal layer 607 is 100 nm, and the thickness of the lithium tantalate single crystal wafer detector structure 608 is 75 microns.

[0065] Figure 6 is Figure 5 the reflection spectrum diagram corresponding to the structure in. Figure 7 is Figure 5 the reflection spectrum diagram corresponding to the structure in, where the phase change materials of the first phase change layer 602 and the second phase change layer 604 are both in the amorphous state, and the heat generation part corresponds to the area of the part of region 1 opposite to the area between this reflection curve and the X-axis. The energy corresponding to this part of the light is absorbed and converted into heat, and the lithium tantalate single crystal wafer outputs corresponding energy according to the amount of heat generated.

[0066] Figure 8 is Figure 5 the reflection spectrum diagram corresponding to the structure in, where the phase change material of the first phase change layer 602 is in the crystalline state and the phase change material of the second phase change layer 604 is in the amorphous state, and the heat generation part corresponds to the area of the part of region 1 opposite to the area between this reflection curve and the X-axis. The energy corresponding to this part of the light is absorbed and converted into heat, and the lithium tantalate single crystal wafer outputs corresponding energy according to the amount of heat generated.

[0067] Figure 9 is Figure 5 the reflection spectrum diagram corresponding to the structure in, where the phase change materials of the first phase change layer 602 and the second phase change layer 604 are both in the crystalline state, and the heat generation part corresponds to the area of the part of region 1 opposite to the area between this reflection curve and the X-axis. The energy corresponding to this part of the light is absorbed and converted into heat, and the lithium tantalate single crystal wafer outputs corresponding energy according to the amount of heat generated.

[0068] By applying different voltages or adjusting the laser power, the phase change material layer is changed from the amorphous state to partially crystallized to fully crystallized, and the area of the absorption part of this structure is adjusted. Each part of the area corresponds to a different absorption curve, thus corresponding to different heat generations. For different amounts of heat, the lithium tantalate single crystal wafer will generate different currents, and the degree of crystallization corresponds to the gray scale, that is, each gray scale corresponds to a current value.

[0069] When an external current is applied to crystallize the phase change material, the magnitude of the output current is compared with the magnitude of the standard gray-scale corresponding current, so as to provide negative feedback to adjust the input voltage value for driving the phase change of the phase change material, further change its crystallization ratio, and thus adjust the ratio of the reflected light to adjust the gray scale of the display device to reach the target gray scale.

[0070] Based on the above embodiments, in this embodiment, the thicknesses of the phase change materials used in the first phase change layer 602 and the second phase change layer 604 are less than 300 nm.

[0071] Since an increase in the thickness of the phase change material will cause a decrease in the color saturation generated by the FP cavity, and the temperature required for the crystallization of the phase change material is also higher, a more appropriate thickness is within 300 nm. The phase change material of the phase change layer can be driven by laser or voltage. When driven by voltage, a voltage is applied to the transparent electrodes on both sides of the phase change layer to cause the phase change of the phase change material.

[0072] Based on the above embodiments, in this embodiment, the FP cavity structure includes a plurality of phase change layers 202, and each phase change layer 202 includes a phase change material layer and electrode layers on both sides of the phase change material layer, and the electrode layers between adjacent two phase change material layers are shared.

[0073] There can be multiple phase change layers 202, and each phase change layer 202 is composed of a phase change material layer and electrode layers located on both sides of the phase change material layer. Optionally, the electrode layers between adjacent phase change material layers can be shared.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A grayscale adjustment device based on phase change material display, characterized in that: include: An optical filter structure is used to filter out light other than visible light; A FP cavity structure for generating colors based on phase change materials, located below the optical filter structure, and the FP cavity structure is used to generate colors to be displayed; A lithium tantalate single-chip detector structure is located below the FP cavity structure. The lithium tantalate single-chip detector structure is used to convert the heat generated by the FP cavity structure when absorbing light into current, and compare the current corresponding to the FP cavity structure with the current converted from the heat generated by absorbing light at a standard grayscale, so as to regulate the state of the phase change material in the FP cavity structure according to the comparison result, so that the current converted from the heat generated after the FP cavity structure absorbs light is equal to the current corresponding to the standard grayscale, thereby regulating the display grayscale of the color.

2. The grayscale adjustment device based on phase change material display according to claim 1, characterized in that: The optical filter structure is a broadband absorber, comprising a dielectric layer and a metal layer.

3. The grayscale adjustment device based on phase change material display according to claim 1, characterized in that: The optical filter structure includes a first metal layer, a phase change layer or a second metal layer, and a third metal layer which are sequentially arranged from bottom to top.

4. The grayscale adjustment device based on phase change material display according to claim 1, characterized in that: The FP cavity structure includes a fourth metal layer, a phase change layer, and a fifth metal layer or a dielectric layer arranged sequentially from bottom to top; A voltage is applied to the electrode layer of the phase change layer to change the crystal structure of the phase change layer and adjust the peak value and position of the FP cavity structure.

5. The grayscale adjustment device based on phase change material display according to claim 1, characterized in that: The FP cavity structure includes a sixth metal layer, a first phase change layer, a first dielectric layer, a second phase change layer, a second dielectric layer and a cover layer arranged sequentially from bottom to top; A voltage is applied to the sixth metal layer to control the crystallization states of the first phase change layer and the second phase change layer.

6. The grayscale adjustment device based on phase change material display according to claim 5, characterized in that: The sixth metal layer is W; The phase change material used in the first phase change layer is one or more of Sb2Se3, Sb2S3, GeTe, SbTe, SnSb, AgSbTe, InSbTe and GeSb alloy, wherein the percentage of each atom is adjustable; The phase change material used in the second phase change layer is one or more of Sb2Se3, Sb2S3, GeTe, SbTe, SnSb, AgSbTe, InSbTe and GeSb alloy, wherein the percentage of each atom is adjustable; The first dielectric layer includes a dielectric having a K value less than a first preset threshold value among TiO2 and Ta2O5; The second dielectric layer includes a dielectric having a K value less than a first preset threshold value among TiO2 and Ta2O5; The covering layer is a medium of MgF2 and ZnS whose K value is less than a second preset threshold.

7. The grayscale adjustment device based on phase change material display according to claim 6, characterized in that: A seventh metal layer exists between the lithium tantalate single-crystal detector structure and the FP cavity structure.

8. The grayscale adjustment device based on phase change material display according to claim 7, characterized in that: The thickness of the sixth metal layer is less than 100nm, the thickness of the phase change material used in the first phase change layer is less than 200nm, the thickness of the first dielectric layer is less than 1 micron, the thickness of the phase change material used in the second phase change layer is less than 500nm, the thickness of the second dielectric layer is less than 1 micron, the thickness of the covering layer is less than 1 micron, the thickness of the seventh metal layer is greater than 100nm, and the thickness of the lithium tantalate single crystal detector structure is 75 microns.

9. The grayscale adjustment device based on phase change material display according to claim 5, characterized in that: The thickness of the phase change material used in the first phase change layer and the phase change material used in the second phase change layer is less than 300 nm.

10. The grayscale adjustment device based on phase change material display according to claim 4, characterized in that: The FP cavity structure includes a plurality of phase change layers, each phase change layer includes a phase change material layer and electrode layers on both sides of the phase change material layer, and the electrode layers between two adjacent phase change material layers are shared.

Images