Unlockable inchworm-type rotating motor, redundant drive mechanism and unlocking method

Abstract

The present disclosure provides an unlockable inchworm type rotating motor, a redundant driving mechanism and an unlocking method, and relates to the technical field of inchworm type rotating motors. The present disclosure includes: a wall; a rotatable output shaft; a driving module directly or indirectly arranged on the wall to drive the output shaft to rotate; an unlocking device for disengaging the driving module from the output shaft in an unlocked state; the unlocking device includes: a fixedly arranged unlocking member, an unlocking unit directly or indirectly arranged on one of the wall and the unlocking member, wherein there is a gap between the unlocking member and the output shaft, and the unlocking unit has an unlocking surface, which is configured to be able to move in the radial direction of the output shaft to at least partially abut against the other of the wall and the unlocking member; the wall is configured to: when the unlocking surface abuts against the other of the wall and the unlocking member, the unlocking unit further moves in the radial direction of the output shaft and applies force to the other of the wall and the unlocking member to enable the wall-carrying driving module to be disengaged from the output shaft.

Description

Technical Field

[0001] The present specification relates to the technical field of inchworm-type rotating motors, and in particular to an unlockable inchworm-type rotating motor, a redundant drive mechanism, and an unlocking method. Background Art

[0002] The driving method of the inchworm-type rotating motor is mainly achieved by the two sets of driving feet inside it to perform the "clamp-drive-relax" action on the output shaft, and when this type of motor is manufactured, it is necessary to ensure that a certain pre-pressure is applied to the driving feet inside it. Therefore, when the motor is not powered on, the driving feet are in a clamped state with respect to the output shaft of the motor, causing the output shaft of the motor to self-lock, and often this self-locking force is greater than its driving force. Therefore, even if the motor system has a redundant design, the redundant motor cannot be unlocked. Summary of the invention

[0003] One or more embodiments of the present specification provide an unlockable inchworm-type rotating motor for solving the problem of self-locking of the inchworm-type rotating motor, which comprises a wall; a rotatable output shaft; a driving module directly or indirectly arranged on the wall for driving the output shaft to rotate; an unlocking device for disengaging the driving module from the output shaft in an unlocked state; the unlocking device comprises: a fixed unlocking member, an unlocking unit directly or indirectly arranged on one of the wall and the unlocking member, wherein a gap is provided between the unlocking member and the output shaft, the unlocking unit has an unlocking surface, and the unlocking surface is configured to be able to move in a radial direction of the output shaft to at least partially abut against the other of the wall and the unlocking member; the wall is configured such that when the unlocking surface abuts against the other of the wall and the unlocking member, the unlocking unit further moves in a radial direction of the output shaft and applies force to the other of the wall and the unlocking member so as to enable the wall and the driving module to be disengaged from the output shaft.

[0004] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, the unlocking unit is arranged on the wall, and the unlocking surface is configured to be able to move in the radial direction of the output shaft to at least partially abut against the unlocking member; the wall is configured so that: when the unlocking surface abuts against the unlocking member, the unlocking unit further moves in the radial direction of the output shaft and applies force to the unlocking member so that the wall and the driving module can be separated from the output shaft.

[0005] According to some embodiments of the present specification, the unlockable inchworm-type rotating motor includes an unlocking bearing, which includes an inner ring, an outer ring, and bearing balls arranged between the inner ring and the outer ring; wherein the inner ring is sleeved on the output shaft, and the outer ring forms the unlocking member.

[0006] According to the unlockable inchworm-type rotating electrical machine described in some embodiments of this specification, the unlocking member is a fixed block structure; or, the unlocking member is at least a part of a ring structure fixedly disposed around the output shaft.

[0007] According to the unlockable inchworm-type rotating motor described in some embodiments of this specification, the unlocking unit adopts piezoelectric material, and the unlocking unit is configured as follows: under the excitation of a first electrical signal, it is in the unlocking state, it deforms in the radial direction of the output shaft, so that the unlocking surface moves toward the unlocking member.

[0008] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, the unlocking unit is configured such that: when the first electrical signal excitation is not implemented, it is disengaged from the unlocking member, or is in a critical position about to contact the unlocking member, or is in contact with the unlocking member but does not cause the wall to deform to a position where the driving module is disengaged from the output shaft.

[0009] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, the unlocking device includes two unlocking units, and the two unlocking units are respectively arranged on both sides of a certain radial direction of the output shaft; or, the unlocking device includes more than two unlocking units, and the more than two unlocking units are arranged around the output shaft in a circumferential direction.

[0010] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, the driving module includes a first driving unit and a second driving unit arranged on the wall, and the first driving unit and the second driving unit are made of piezoelectric material; the first driving unit and the second driving unit respectively include: a first module arranged on the wall and a second module arranged on the first module, the first module is configured to deform along the radial direction of the output shaft toward the center of the output shaft under the excitation of a second electrical signal, and the second module is configured to deform along the tangential direction of the output shaft under the excitation of a third electrical signal; the first driving unit and the second driving unit are arranged in a direction parallel to the axial direction of the output shaft.

[0011] According to some embodiments of the present specification, the unlockable inchworm-type rotating motor comprises a plurality of drive modules, wherein the plurality of drive modules are arranged around the output shaft, and each of the drive modules is correspondingly arranged with at least one unlocking unit.

[0012] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, each drive module is correspondingly arranged with one unlocking device, and one unlocking device is located between the first drive unit and the second drive unit of the drive module; or, each drive module is correspondingly arranged with two unlocking devices, and the two unlocking devices are located on both sides of the drive module along the axial direction of the output shaft.

[0013] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, the wall includes: a first mounting portion for mounting the drive module; and a second mounting portion for mounting the unlocking device; wherein the first mounting portion has a first deformation portion on at least one side along the axial direction of the output shaft, and the second mounting portion has a second deformation portion on at least one side along the axial direction of the output shaft.

[0014] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, the wall includes a first wall portion and a second wall portion, the thickness of the first wall portion is greater than the thickness of the second wall portion, and the second wall portion can be pivoted toward the output shaft or away from the output shaft relative to the first wall portion around a pivot axis located in the radial plane of the output shaft; the first mounting portion and the second mounting portion are located on the first wall portion, and the first deformation portion and the second deformation portion are located on the second wall portion.

[0015] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, a groove is provided at the second wall portion; or a groove is provided between the first wall portion and the second wall portion; or a groove is provided on a portion of the first wall portion to form the second wall portion; wherein the groove comprises: a first portion extending inside the wall along the radial direction of the output shaft, and a second portion extending inside the wall along the axial direction of the output shaft.

[0016] According to the unlockable inchworm-type rotating motor described in some embodiments of the present specification, the output shaft is provided with: an unlocking bearing shoulder, an unlocking bearing retaining ring groove, and an unlocking bearing retaining ring arranged in the unlocking bearing retaining ring groove; the unlocking bearing is arranged between the unlocking bearing shoulder and the unlocking bearing retaining ring; the unlocking bearing is configured to be: fixed on the output shaft, or able to slide between the unlocking bearing shoulder and the unlocking bearing retaining ring along the axial direction of the output shaft.

[0017] According to some embodiments of the present specification, the unlockable inchworm-type rotating motor comprises: a fixed guide bearing arranged at one end of the output shaft and a movable guide bearing arranged at the other end of the output shaft.

[0018] One or more embodiments of the present specification provide an unlocking method for an unlockable inchworm-type rotating motor, which is applicable to any of the unlockable inchworm-type rotating motors described above, and the unlocking method comprises: continuously applying a first electrical signal to the unlocking unit to cause the unlocking unit to extend, abut against the wall and the other of the unlocking members, and further extend to push the wall to expand outward, so that the wall and the driving module are separated from the output shaft.

[0019] One or more embodiments of the present specification provide an unlocking method for an unlockable inchworm-type rotating motor, which is applicable to any of the unlockable inchworm-type rotating motors described above, and the unlocking method comprises: when the drive module is in a self-locking state, continuously applying a first electrical signal to the unlocking unit to cause the unlocking unit to extend, abut against the wall and the other of the unlocking members, and further extend to push the wall to expand outward, so that the wall and the drive module are separated from the output shaft.

[0020] According to some embodiments of the present specification, the unlocking method is characterized in that it also includes: applying a fourth electrical signal to stimulate the plurality of drive modules, so that one or more of the plurality of drive modules shrink along the radial direction of the output shaft, so that one or more of the plurality of drive modules detach from the output shaft.

[0021] One or more embodiments of the present specification provide a redundant drive mechanism, comprising: a power shaft and two or more unlockable inchworm-type rotating motors transmission-connected to the power shaft, wherein the unlockable inchworm-type rotating motor is any one of the unlockable inchworm-type rotating motors described above.

[0022] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) the unlocking device is used to separate the drive module of the inchworm-type rotary motor from the output shaft to achieve unlocking; (2) the unlocking device is realized by the cooperation between the unlocking unit and the unlocking member, and the unlocking member will not interfere with the free rotation of the output shaft; (3) the unlocking member adopts an unlocking bearing, and after unlocking, the output shaft only needs to overcome the rolling friction of the unlocking bearing, and the output shaft can rotate freely; (4) the unlocking unit adopts piezoelectric material, which stretches or compresses under the action of an electric field, with high speed, high energy efficiency and high positioning accuracy; (5) the deformation part formed by the thick wall part and the thin wall part makes the wall easy to deform, which is suitable for separating the drive module from the output shaft to meet the unlocking requirement; (6) the stiffness of the wall is further adjusted by grooving, so that the wall is easy to deform, which is suitable for separating the drive module from the output shaft to meet the unlocking requirement; (7) while applying an electric signal excitation to the unlocking unit, an electric signal excitation is also applied to the drive module to shorten the undamaged drive module, thereby reducing the risk of "scratching".

[0023] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] This specification will be further explained by way of exemplary embodiments, which will be described in detail by way of the accompanying drawings. The same numbers in the drawings represent the same structures or steps.

[0025] Figure 1 It is a schematic diagram of the principle of an inchworm-type rotating motor shown in some embodiments of this specification.

[0026] Figure 2 is a schematic diagram of an unlockable inchworm-type rotary motor according to some embodiments of the present specification.

[0027] Figure 3 It is a schematic cross-sectional view of an unlockable inchworm-type rotating motor according to some embodiments of the present specification, which shows the unlocking device of some embodiments.

[0028] Figure 4 yes Figure 3 A partial enlarged schematic diagram of the middle part.

[0029] Figure 5 It is a cross-sectional schematic diagram of an unlockable inchworm-type rotating motor shown in some embodiments of the present specification, which shows the related structures of the drive module, guide bearing, and wall of some embodiments.

[0030] Figure 6 yes Figure 5 A partial enlarged schematic diagram of the upper part.

[0031] Figure 7 yes Figure 5 A partial enlarged schematic diagram of the middle part.

[0032] Figure 8 yes Figure 5 A partial enlarged schematic diagram of the lower part.

[0033] Fig. 9 It is a schematic diagram of an unlocking component in a block structure of an unlockable inchworm-type rotating motor shown in some embodiments of the present specification.

[0034] Fig.10 It is a schematic diagram of an unlocking unit, a first driving unit and a second driving unit of an unlockable inchworm-type rotating motor shown in some embodiments of the present specification.

[0035] Fig.11It is a schematic diagram of the deformation directions of the unlocking unit, the first driving unit and the second driving unit of the unlockable inchworm-type rotating motor shown in some embodiments of the present specification.

[0036] Fig.12 Schematic diagram of a piezoelectric ceramic stack polarized in the d33 parameter direction of an unlockable inchworm-type rotary motor according to some embodiments of the present specification.

[0037] Fig.13 Schematic diagram of a piezoelectric ceramic stack polarized in the d15 parameter direction of an unlockable inchworm-type rotary motor according to some embodiments of the present specification.

[0038] Markings in the figure: 100 first piezoelectric drive unit; 200 second piezoelectric drive unit; 101 forward module; 102 tangential module; 1 wall; 11 first mounting portion; 12 second mounting portion; 13 first deformation portion; 14 second deformation portion; 15 groove; 2 output shaft; 21 unlocking bearing shoulder; 22 unlocking bearing retaining ring groove; 23 unlocking bearing retaining ring; 24 fixed guide bearing shoulder; 25 floating guide bearing shoulder; 26 floating guide bearing retaining ring; 3 driving module; 31 first driving unit; 32 second driving unit; 301 first module; 302 second module; 4 unlocking device; 41 unlocking bearing; 411 inner ring; 412 outer ring; 413 bearing ball; 42 unlocking unit; a left wall; b right wall; c upper end plate; c1 fixed guide bearing boss; d lower end plate; d1 floating guide bearing boss; 51 Fixed guide bearing; 52 Floating guide bearing; 6 Locking nut. DETAILED DESCRIPTION

[0039] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the contents described below are some examples or embodiments of this specification. For ordinary technicians in this field, without paying creative work, the technical solutions or means disclosed in this specification can also be applied to other scenarios based on these technical contents.

[0040] Unless otherwise specified, technical terms used in this specification to describe components, elements, etc. do not refer to the singular, but may also include the plural. Generally speaking, terms such as "include", "comprise", etc. only indicate that the steps, elements, or components that have been clearly identified are included, and these steps, elements, and components do not constitute an exclusive list, such as the method or device described may also include other steps or components.

[0041] With the continuous development of precision motion technology, especially in the fields of semiconductor, optics, aerospace and other fields involving the application of equipment in vacuum environment, the requirements for the volume, accuracy and ultimate vacuum degree of the end effector in the equipment are becoming more and more stringent. -1 Pa ~10 -5 Pa) and ultra-high vacuum (e.g. 10 -5 Pa ~10 - 8 It is very difficult to build and maintain an environment with a pressure of 200 Pa, and as the volume of the cavity increases, the difficulty of building and maintaining the environment increases exponentially. Therefore, the smaller the internal structure of the cavity, the better, so that the size of the cavity can be reduced accordingly, making it easier to achieve a higher level of vacuum. As for accuracy, in some precision motion fields such as optics and semiconductors, artificial vacuum is built to obtain higher accuracy of the end effector. The fundamental reason is that temperature changes in the atmospheric environment, heat generated by the end effector itself during operation, airflow, light, etc. will cause inaccurate movement of the end effector.

[0042] Therefore, piezoelectric actuators that use the inverse piezoelectric effect to generate power sources came into being. Piezoelectric actuators mainly include piezoelectric motors. Piezoelectric motors include linear motors and rotary motors. Exemplarily, the driving method of a piezoelectric rotary motor, such as an inchworm-type piezoelectric rotary motor, is mainly achieved by at least two groups of drive units inside it, such as a piezoelectric ceramic drive unit, performing a "clamp-drive-relax" action on the output shaft, and when manufacturing this type of motor, it is necessary to ensure that a certain pre-pressure is applied to the piezoelectric ceramic drive unit inside it. Therefore, when the inchworm-type piezoelectric rotary motor is not powered on, the drive unit is in a clamped state with respect to the output shaft, resulting in self-locking of the output shaft of the inchworm-type piezoelectric rotary motor.

[0043] In some embodiments, see Figure 1 As shown, the inchworm-type piezoelectric rotary motor includes a first piezoelectric drive unit 100 and a second piezoelectric drive unit 200. In some embodiments, the first piezoelectric drive unit 100 and the second piezoelectric drive unit 200 are piezoelectric ceramic drive units. In some embodiments, the first piezoelectric drive unit 100 and the second piezoelectric drive unit 200 both include a forward module 101 and a tangential module 102. The forward module 101 undergoes forward deformation under voltage excitation, that is, deformation occurs in the radial direction of the output shaft; the tangential module 102 undergoes tangential deformation under voltage excitation, that is, deformation occurs in the tangential direction of the outer edge of the output shaft.

[0044] See also Figure 1 As shown, Figure 1The working principle of the inchworm-type piezoelectric rotary motor in some embodiments is shown, wherein the forward module 101 is deformed in the direction from the upper left to the lower right under voltage excitation, such as elongation or shortening, and in some embodiments, it remains a rectangular body after deformation; the tangential module 102 is deformed in the direction from the lower left to the upper right under voltage excitation, such as the right end face is translated toward the lower left or toward the upper left, and in some embodiments, it is deformed from a rectangular body into a parallelogram body.

[0045] Continue to see Figure 1 As shown, in some embodiments, the working principle of the inchworm-type piezoelectric rotary motor includes the following steps.

[0046] S100: The forward module 101 and the tangential module 102 of the first piezoelectric driving unit 100 and the second piezoelectric driving unit 200 are in an initial state where no electric signal excitation is implemented; a fifth electric signal excitation is implemented on the forward module 101 of the first piezoelectric driving unit 100, and a sixth electric signal excitation is implemented on the forward module 101 of the second piezoelectric driving unit 200, and the fifth electric signal and the sixth electric signal can be in the same phase, the same frequency, and the opposite direction, so that the forward module 101 of the first piezoelectric driving unit 100 is extended in the radial direction and the tangential module 102 of the first piezoelectric driving unit 100 is against the output shaft; the forward module 101 of the second piezoelectric driving unit 200 is shortened in the radial direction and the tangential module 102 of the second piezoelectric driving unit 200 is separated from the output shaft.

[0047] S200: The forward module 101 of the first piezoelectric drive unit 100 and the forward module 101 of the second piezoelectric drive unit 200 are maintained. The tangential module 102 of the first piezoelectric drive unit 100 is excited by the seventh electrical signal, and the tangential module 102 of the second piezoelectric drive unit 200 is excited by the eighth electrical signal. The seventh electrical signal and the eighth electrical signal can be in the same phase, frequency and opposite direction, so that the tangential module 102 of the first piezoelectric drive unit 100 is extended along the tangential direction of the first direction (for example, the clockwise direction around the output shaft), and the output shaft is "rubbed" to generate clockwise rotation under the action of friction; the tangential module 102 of the second piezoelectric drive unit 200 is extended along the tangential direction of the second direction (for example, the counterclockwise direction around the output shaft), so as to prepare for the next inchworm movement.

[0048] S300: The tangential module 102 of the first piezoelectric driving unit 100 and the tangential module 102 of the second piezoelectric driving unit 200 are maintained. The forward module 101 of the first piezoelectric driving unit 100 is stimulated by the ninth electrical signal, and the forward module 101 of the second piezoelectric driving unit 200 is stimulated by the tenth electrical signal. The ninth electrical signal may be in phase, frequency, and opposite direction with the fifth electrical signal in S100, and the tenth electrical signal may be in phase, frequency, and opposite direction with the sixth electrical signal in S100, so that the forward module 101 of the first piezoelectric driving unit 100 is shortened in the radial direction and the tangential module 102 of the first piezoelectric driving unit 100 is separated from the output shaft; the forward module 101 of the second piezoelectric driving unit 200 is extended in the radial direction and the tangential module 102 of the second piezoelectric driving unit 200 is against the output shaft.

[0049] S400 : The forward module 101 of the first piezoelectric driving unit 100 and the forward module 101 of the second piezoelectric driving unit 200 are maintained. The tangential module 102 of the first piezoelectric drive unit 100 is excited by an eleventh electrical signal, and the tangential module 102 of the second piezoelectric drive unit 200 is excited by a twelfth electrical signal. The eleventh electrical signal may be in phase, frequency, and opposite direction with the twelfth electrical signal. Specifically, the eleventh electrical signal may be in phase, frequency, and opposite direction with the seventh electrical signal in S200, and the twelfth electrical signal may be in phase, frequency, and opposite direction with the eighth electrical signal in S200, so that the tangential module 102 of the first piezoelectric drive unit 100 is extended in a tangential direction in the second direction (for example, counterclockwise around the output shaft) to prepare for the next inchworm movement; the tangential module 102 of the second piezoelectric drive unit 200 is extended in a tangential direction in the first direction (for example, clockwise around the output shaft), and the output shaft is "rubbed" to produce clockwise rotation under the action of friction.

[0050] S500: The tangential module 102 of the first piezoelectric driving unit 100 and the tangential module 102 of the second piezoelectric driving unit 200 are maintained. The forward module 101 of the first piezoelectric driving unit 100 is stimulated by a fifth electrical signal, and the forward module 101 of the second piezoelectric driving unit 200 is stimulated by a sixth electrical signal, so that the forward module 101 of the first piezoelectric driving unit 100 is extended in the radial direction and the tangential module 102 of the first piezoelectric driving unit 100 is against the output shaft; the forward module 101 of the second piezoelectric driving unit 200 is shortened in the radial direction and the tangential module 102 of the second piezoelectric driving unit 200 is separated from the output shaft.

[0051] S200 to S500 may be cycled to make the output shaft continuously rotate along a first direction, for example, a clockwise direction, so as to realize an inchworm-like 360° rotation of the piezoelectric rotary motor.

[0052] In some embodiments, the fifth electrical signal, the sixth electrical signal, the seventh electrical signal, the eighth electrical signal, the ninth electrical signal, the tenth electrical signal, the eleventh electrical signal, and the twelfth electrical signal may be voltage signals or current signals.

[0053] In some embodiments, the working principle of the inchworm-type piezoelectric rotary motor is mainly to adjust whether the two tangential modules provide force to the output shaft through the forward module, and then rotate the output shaft through the force in the tangential direction provided by the tangential module to the output shaft, and the force in the tangential direction is friction force, such as static friction force. In some embodiments, when manufacturing the inchworm-type piezoelectric rotary motor, it is necessary to ensure that a certain pre-pressure is applied to the piezoelectric drive unit inside it, such as the first piezoelectric drive unit 100 or the second piezoelectric drive unit 200. Therefore, when the inchworm-type piezoelectric rotary motor is not powered on, the piezoelectric drive unit is in a clamped state relative to the output shaft, resulting in the self-locking of the output shaft of the inchworm-type piezoelectric rotary motor (i.e., there is a self-locking force). The static friction force applied by the piezoelectric drive unit to the output shaft in the positive direction, i.e., the radial direction of the output shaft, is often greater than the static friction force in the tangential direction applied to the output shaft by the deformation of the piezoelectric drive unit after power-on (which is also the driving force for driving the output shaft to rotate). Therefore, when one piezoelectric drive unit is damaged and continuously applies static friction to the output shaft in the positive direction, the driving force applied by the other piezoelectric drive unit to the output shaft in the tangential direction cannot take effect, and the output shaft cannot rotate. Therefore, the inchworm-type piezoelectric rotary motor is self-locking when it is not powered on or damaged. In other words, it has a self-locking characteristic.

[0054] In some embodiments, such as in application fields where a vacuum environment needs to be ensured, once the motor is damaged, the entire device will not be able to operate, and replacing the motor requires destroying the vacuum environment, resulting in a sharp increase in costs; in other embodiments, such as in the aerospace field, once the motor is damaged, it is impossible to enter the flying aircraft or the equipment in space in time for maintenance due to limited conditions. Therefore, as an optional solution, a redundant drive mechanism can be arranged. In some embodiments, a redundant drive mechanism refers to two or more motors that can be connected to the same power shaft through a transmission structure, so that two or more motors can drive the power shaft to operate separately and independently. Exemplarily, under normal circumstances, the power shaft is driven by a rotating motor, and when the rotating motor is damaged, another redundant rotating motor is enabled to drive the power shaft.

[0055] Therefore, the prerequisite for arranging a redundant drive mechanism is that the two motors cannot interfere with each other. In other words, when any one of the motors fails, the output shaft of the motor connected to the power shaft should be open rather than locked. However, as mentioned above, the inchworm-type piezoelectric rotary motor has a self-locking characteristic, and it is impossible to arrange a redundant drive mechanism. Specifically, if a redundant inchworm-type piezoelectric rotary motor is arranged, it is necessary to overcome the self-locking of the damaged inchworm-type piezoelectric rotary motor. However, it has been explained above that the driving force of the inchworm-type piezoelectric rotary motor is likely to be less than its self-locking force. Therefore, the redundant inchworm-type piezoelectric rotary motor may not be able to overcome the self-locking of the damaged inchworm-type piezoelectric rotary motor, and its redundant function cannot be achieved.

[0056] The existing general rotary motors that use brushes and commutators to convert electrical energy into mechanical energy are large in size and are not suitable for use in small spaces. However, due to its structural characteristics, the inchworm-type piezoelectric rotary motor is small in size and can better solve the space problem. However, the existing inchworm-type piezoelectric rotary motor has a self-locking characteristic and cannot be arranged with a redundant drive mechanism like the aforementioned general rotary motors. Therefore, it is urgent to design an inchworm-type piezoelectric rotary motor that can be unlocked from a self-locking state without destroying the ground vacuum environment or without the operator entering an environment such as space.

[0057] Figure 2 is a schematic diagram of an unlockable inchworm-type rotary motor shown in some embodiments of this specification, Figure 3 1 is a cross-sectional schematic diagram of an unlockable inchworm-type rotating motor shown in some embodiments of this specification. Figure 2 , Figure 3 As shown, some embodiments of this specification provide an unlockable inchworm type rotary motor, such as an unlockable inchworm type piezoelectric rotary motor. Although the embodiments of this specification are mainly exemplified by the unlockable inchworm type piezoelectric rotary motor, the unlocking device used to achieve unlocking can also be applied to inchworm type rotary motors other than inchworm type piezoelectric rotary motors and non-inchworm type piezoelectric rotary motors.

[0058] In some embodiments, the unlockable inchworm-type piezoelectric rotary motor includes: a wall 1, a rotatable output shaft 2, a driving module 3 directly or indirectly arranged on the wall 1 to drive the output shaft 2 to rotate, and an unlocking device 4 for disengaging the driving module 3 from the output shaft 2 in an unlocked state.

[0059] The unlocking device 4 includes: a fixed unlocking member, an unlocking unit 42 directly or indirectly arranged on one of the wall 1 and the unlocking member, wherein there is a gap between the unlocking member and the output shaft 2, and the unlocking unit 42 has an unlocking surface, which is configured to be able to move along the radial direction of the output shaft 2 to at least partially abut against the other of the wall 1 and the unlocking member. In some embodiments, the unlocking surface can be an end face or a part of the end face of the unlocking unit 42, and in other embodiments, the unlocking surface can be a side face of the end of the unlocking unit 42. In some embodiments, the unlocking surface can be a plane or a curved surface. The specific shape of the unlocking unit 42 and the specific shape of the unlocking surface can be selected according to actual needs, so that the unlocking surface can abut against the other of the wall 1 and the unlocking member, and is suitable for applying force to the other of the wall 1 and the unlocking member.

[0060] The wall 1 is configured such that when the unlocking surface of the unlocking unit 42 abuts against the other of the wall 1 and the unlocking member, the unlocking unit 42 further moves in the radial direction of the output shaft 2 and applies force to the other of the wall 1 and the unlocking member, so that the wall 1 and the drive module 3 can be separated from the output shaft 2 (for example, the wall 1 and the drive module 3 are separated from the output shaft 2 by the reaction force exerted on the unlocking unit 42). Exemplarily, the unlocking unit 42 further applies force to the other of the wall 1 and the unlocking member to increase the distance between the wall 1 and the output shaft 2, thereby separating the drive module 3 on the wall 1 from the output shaft 2. In some embodiments, the movement of the unlocking unit 42 refers to its elongation or shortening due to its deformation. In other embodiments, the movement of the unlocking unit 42 may also refer to its overall translation.

[0061] In some embodiments, the two ends of the unlocking unit 42 are respectively against the wall 1 and the unlocking member, wherein the unlocking member is fixedly arranged, the position of the unlocking member relative to the output shaft 2 is fixed, and does not interfere with the free rotation of the output shaft 2. Exemplarily, in some embodiments, the unlocking member can be positioned on the output shaft 2 and rotatably connected to the output shaft 2, so that the surface of the unlocking member in contact with the unlocking surface of the unlocking unit 42 and the output shaft 2 maintain a constant distance, while not affecting the rotation of the output shaft 2. Exemplarily, in other embodiments, the unlocking member can also be fixed on the housing, for example, fixed on the upper end plate or the lower end plate of the housing. Since the position of the output shaft 2 inside the housing is fixed, the position of the unlocking member inside the housing is also fixed, so that the surface of the unlocking member in contact with the unlocking surface of the unlocking unit 42 and the output shaft 2 maintains a constant distance, and there is no contact relationship between the unlocking member and the output shaft 2, so it does not affect the rotation of the output shaft 2.

[0062] Through the arrangement of the aforementioned unlocking device 4, the inchworm-type piezoelectric rotary motor in some embodiments can be released from the self-locking state and enter the unlocking state through the unlocking device 4 according to actual needs (for example, when it is damaged and the driving module 3 cannot be separated from the output shaft 2), thereby allowing the inchworm-type piezoelectric rotary motor to be arranged with a redundant mechanism, so that the redundant inchworm-type piezoelectric rotary motor can drive the power shaft without being affected by the damaged inchworm-type piezoelectric rotary motor, further improving the system reliability and reducing the maintenance cost.

[0063] In some embodiments, the unlocking unit 42 is extended due to deformation, so that the wall 1 is away from the unlocking member, thereby moving the wall 1 away from the output shaft 2. In some embodiments, the unlocking unit 42 can be fixed on the wall 1 and apply force to the unlocking member, or fixed on the unlocking member and apply force to the wall 1.

[0064] See also Figure 3 , Figure 4 As shown, in some embodiments, the unlockable inchworm-type piezoelectric rotary motor includes an unlocking bearing 41, which includes an inner ring 411, an outer ring 412, and a bearing ball 413 located between the inner ring 411 and the outer ring 412, wherein the inner ring 411 of the unlocking bearing 41 is connected to the output shaft 2, the outer ring 412 of the unlocking bearing 41 forms the aforementioned unlocking member, and the outer ring 412 of the unlocking bearing 41 cooperates with the unlocking surface of the unlocking unit 42. In some embodiments, the unlocking surface of the unlocking unit 42 can be completely against the outer ring 412 of the unlocking bearing 41, and in other embodiments, the unlocking surface of the unlocking unit 42 can be partially against the outer ring 412 of the unlocking bearing 41. In some embodiments, the unlocking bearing 41 is a deep groove ball bearing.

[0065] To install the unlocking bearing 41, see Figure 4 As shown, in some embodiments, the output shaft 2 is provided with: an unlocking bearing shoulder 21, an unlocking bearing retaining ring groove 22, and an unlocking bearing retaining ring 23 disposed in the unlocking bearing retaining ring groove 22. The unlocking bearing 41 is disposed between the unlocking bearing shoulder 21 and the unlocking bearing retaining ring 23.

[0066] The unlocking bearing shoulder 21 is a step structure on the output shaft 2. The output shaft 2 forms a step structure by changing its outer diameter, which is used to limit the unlocking bearing 41 in one axial direction of the output shaft 2. In some embodiments, the unlocking bearing retaining ring groove 22 is opened on the surface of the output shaft 2 along the radial direction. The inner diameter of the unlocking bearing retaining ring 23 is smaller than the outer diameter of the output shaft 2. When the unlocking bearing retaining ring 23 is installed in the unlocking bearing retaining ring groove 22, it limits the unlocking bearing 41 in another axial direction of the output shaft 2. In some specific embodiments, the unlocking bearing retaining ring 23 is sleeved on the output shaft 2 by deforming it, and when it passes through the unlocking bearing retaining ring groove 22, the deformation is restored and it falls into the unlocking bearing retaining ring groove 22. In some specific embodiments, the unlocking bearing 41 is sleeved on the output shaft 2 so that it contacts the unlocking bearing shoulder 21, and then the unlocking bearing retaining ring 23 is installed.

[0067] In some embodiments, the unlocking bearing 41 is configured to be able to slide between the unlocking bearing shoulder 41 and the unlocking bearing retaining ring 23 along the axial direction of the output shaft 2. The unlocking bearing 41 does not guide or limit the axial position of the output shaft 2, and does not need to be precisely positioned or fixed. It only needs to meet smooth rolling, so it is allowed to slide within a certain range.

[0068] In other embodiments, the unlocking bearing 41 is configured to be fixed on the output shaft 2. Exemplarily, the unlocking bearing 41 is fixed on the output shaft 2 in an interference fit manner.

[0069] In one or more embodiments of the present specification, when the unlocking surface of the unlocking unit 42 abuts against the outer ring of the unlocking bearing 41, the unlocking unit 42 further moves along the radial direction of the output shaft 2 and applies force to the wall 1 so that the wall 1 and the drive module 3 are separated from the output shaft 2. The wall 1 is configured to be able to be separated from the output shaft 2 with the drive module 3 by the force provided by the unlocking unit 42, for example, the wall 1 is configured so that a part of it can be displaced away from the output shaft 2, or is configured to be able to expand in a direction away from the output shaft 2 by deformation, so as to separate the drive module 3 from the output shaft 2.

[0070] In some embodiments, the unlocking unit 42 is made of piezoelectric material, such as piezoelectric ceramic material, and the unlocking unit 42 is configured as follows: under the first electrical signal excitation, such as the first voltage excitation, it is in an unlocked state, and it deforms in the radial direction of the output shaft 2, so that the unlocking surface moves toward the unlocking member, such as the outer ring 412 of the unlocking bearing 41. When the first electrical signal excitation, such as the first voltage excitation, is not implemented, it is separated from the unlocking member, such as the unlocking bearing 41, or is in a critical position about to contact the unlocking member, such as the unlocking bearing 41, or is in contact with the unlocking member, such as the unlocking bearing 41, but does not deform the wall 1 to the position where the drive module 3 is separated from the output shaft 2. It should be noted that not implementing the first electrical signal excitation can specifically refer to not applying any electrical signal, or applying other electrical signals different from the first electrical signal, such as an electrical signal in the opposite direction of the first electrical signal.

[0071] Specifically, the unlocking unit 42 is deformed by electrical signal excitation, such as voltage excitation, and its length in the radial direction of the output shaft 2 is extended, for example, Figure 3 , Figure 4 The length in the horizontal direction of the unlocking bearing 41 is extended to increase the distance between the unlocking bearing 41 and the wall 1. Since the unlocking bearing 41 is rigid and its rigidity is configured to be greater than the rigidity of the wall 1, the wall 1 is expanded / pushed away from the output shaft 2 relative to the unlocking bearing 41, and the drive module 3 installed on the wall 1 is also pushed away from the output shaft 2, so that the drive module 3 is separated from the output shaft 2 and the self-locking state of the motor is eliminated. On the other hand, due to the arrangement of the unlocking bearing 41, the huge static friction force of the unlocking unit 42 acting on the output shaft 2 is converted into a smaller rolling friction force of the unlocking bearing 41, so that the extension of the unlocking unit 42 will not affect the rotation of the output shaft 2.

[0072] In other words, through the cooperation of the unlocking bearing 41 and the unlocking unit 42, the static friction force between the drive module 3 and the output shaft 2 that the aforementioned redundant motor originally needed to overcome is converted into a rolling friction force that needs to be overcome by the unlocking bearing 41. The value of the rolling friction force is several orders of magnitude smaller than the value of the static friction force. Therefore, unlocking can be achieved when the drive module 3 is damaged or fails.

[0073] In some embodiments, the unlocking unit 42 uses high-voltage piezoelectric ceramics, such as lead zirconate titanate-based piezoelectric ceramics. In some embodiments, the driving module 3 may include the aforementioned first piezoelectric driving unit 100 and the aforementioned second piezoelectric driving unit 200. Compared with the low-voltage piezoelectric ceramics, such as barium titanate-based piezoelectric ceramics, used in the driving module 3 in some embodiments, the high-voltage piezoelectric ceramics used in the unlocking unit 42 can generate a greater output force and elongation displacement by applying high-voltage excitation to them under the premise of the same polarization direction and the same size.

[0074] In some embodiments, the unlocking unit 42 is a piezoelectric ceramic stack such as a high-voltage piezoelectric ceramic stack. Exemplarily, the unlocking unit 42 includes a plurality of piezoelectric sheets, and the plurality of piezoelectric sheets are bonded by an adhesive, or the plurality of piezoelectric sheets are bonded in a molten state to form the aforementioned stack. In some embodiments, the unlocking unit 42 is a piezoelectric ceramic stack polarized in the d33 parameter direction. In some embodiments, the unlocking unit 42 is fixedly connected to the wall 1 by bonding. Exemplarily, see Fig.12 As shown, Fig.12 The piezoelectric ceramic stack is polarized using the d33 parameter direction. Fig.12 After the piezoelectric ceramic stack is polarized along the positive direction of the z-axis (polarization direction P), Fig.12 When an external electric field E is applied along the positive direction of the z-axis, the piezoelectric ceramic can deform along the z-axis. This mode in which the electric field direction is parallel to the vibration direction is called the longitudinal vibration mode (i.e., d33 mode).

[0075] In the initial state, the unlocking unit 42, such as the high-voltage piezoelectric ceramic unlocking unit, and the surface of the outer ring 412 of the unlocking bearing 41 are in a critical state between contact and non-contact, or there is only a very small interaction force between the two, so as not to affect the operation of the drive module 3.

[0076] In one or more embodiments of this specification, see Figure 3 , Figure 4 As shown, the unlocking device 4 includes two unlocking units 42, and the two unlocking units 42 are respectively arranged on both sides of a certain radial direction of the output shaft 2. In other embodiments, the unlocking device includes more than two unlocking units, and the more than two unlocking units are arranged around the output shaft in the radial direction. For example, the unlocking device includes three unlocking units, and the three unlocking units are arranged around the output shaft at 120°. For example, the unlocking device includes four unlocking units, and the four unlocking units are arranged around the output shaft at 90°.

[0077] See also Figure 5 , Fig.10 , Fig.11As shown, in one or more embodiments of the present specification, the driving module 3 includes a first driving unit 31 and a second driving unit 32 disposed on the wall 1; the first driving unit 31 and the second driving unit 32 respectively include: a first module 301 disposed on the wall 1 and a second module 302 disposed on the first module 301, the first module 301 deforms along the radial direction of the output shaft 2 toward the center of the output shaft under the second electrical signal excitation, such as the second voltage excitation, and the second module 302 deforms along the tangential direction of the output shaft 2 under the third electrical signal excitation, such as the third voltage excitation. Exemplarily, the second electrical signal can be similar to the fifth electrical signal and the tenth electrical signal mentioned above, and the second electrical signal is used to extend the first module 301. Exemplarily, the second electrical signal can also be similar to the sixth electrical signal and the ninth electrical signal mentioned above, and the second electrical signal is used to shorten the first module 301. Exemplarily, the third electrical signal can be similar to the seventh signal, the eighth signal, the eleventh signal, and the twelfth signal mentioned above, and the third signal is used to extend the second module 302 in the tangential direction around the clockwise or counterclockwise direction of the output shaft.

[0078] The first driving unit 31 and the second driving unit 32 are similar to the aforementioned first piezoelectric driving unit 100 and the second piezoelectric driving unit 200, and the first module 301 and the second module 302 are similar to the aforementioned forward module 101 and the tangential module 102. The working principle of the driving module 3 is also similar to the aforementioned steps S100 to S500, so it is not repeated here.

[0079] In some embodiments, the first module 301 is a piezoelectric ceramic stack polarized in the d33 parameter direction, commonly known as a "positive plate", which provides a clamping action toward the center of the output shaft 2 under electrical signal excitation, such as voltage excitation; the second module 302 is a piezoelectric ceramic stack polarized in the d15 parameter direction, commonly known as a "tangential plate", which provides an actuating action of tangential movement along the outer edge of the output shaft 2 under electrical signal excitation, such as voltage excitation. For example, see Fig.13 As shown, Fig.13 The piezoelectric ceramic stack is polarized in the d15 direction. Fig.13 After the piezoelectric ceramic stack is polarized along the positive direction of the z-axis (polarization direction P), Fig.13 When an external electric field E is applied along the positive direction of the x-axis, the piezoelectric ceramic produces shear deformation around the y-axis. This mode in which the electric field direction, polarization direction and the axis direction around which the piezoelectric ceramic stack is deformed are perpendicular to each other is called the torsional vibration mode (i.e., d15 mode).

[0080] In some embodiments, the first module 301 and the second module 302 use a piezoelectric ceramic stack, such as a low-voltage piezoelectric ceramic stack. Exemplarily, the first module 301 and the second module 302 include a plurality of piezoelectric sheets, and the plurality of piezoelectric sheets are bonded by an adhesive, or the plurality of piezoelectric sheets are bonded in a molten state to form the aforementioned stack. In some embodiments, the first module 301 and the second module 302 are fixedly connected to the wall 1 by bonding.

[0081] For the first module 301 and the second module 302, there are gaps of a certain width between the piezoelectric sheets to varying degrees. When the piezoelectric sheets are deformed, these gaps will consume part of the deformation. In other words, the deformation of the piezoelectric sheets will first fill these gaps, and then the piezoelectric ceramic stack will show elongation or shortening deformation. Therefore, in some embodiments, a certain pre-pressure is provided to the piezoelectric ceramic stack through the wall 1, and the pre-pressure can significantly reduce the gaps between the piezoelectric sheets, improve the deformation efficiency, and significantly improve the use effect and life.

[0082] In some embodiments, the straight line where the first drive unit 31 and the second drive unit 32 of the same drive module 3 are located is arranged along a direction parallel to the output shaft 2. Exemplarily, the first module 301 of the first drive unit 31 and the first module 301 of the second drive unit 32 of one drive module 3 are arranged along a first straight line, and the first straight line is parallel to the axial direction of the output shaft 2, or parallel to a busbar of the output shaft 2. Exemplarily, the first module 301 of the first drive unit 31 and the first module 301 of the second drive unit 32 of another drive module 3 are arranged along a second straight line, and the second straight line is parallel to the axial direction of the output shaft 2, or parallel to another busbar of the output shaft 2.

[0083] In one or more embodiments of the present specification, a plurality of drive modules 3 are included, and the plurality of drive modules 3 are arranged around the output shaft 2, and each drive module 3 is correspondingly arranged with at least one unlocking unit 42. For example, see Figure 3 , Figure 5 As shown, it includes two drive modules 3, which are respectively located on both sides of the output shaft 2, and each drive module 3 is correspondingly provided with at least one unlocking unit 42. Figure 3 , Figure 5 As shown, each driving module 3 is provided with an unlocking device 4 on the upper and lower sides, and each unlocking device 4 is provided with an unlocking unit 42 on the left and right sides of the output shaft, that is, two unlocking units 42 are correspondingly provided on the upper and lower sides of the driving module 3 on each side.

[0084] In other embodiments, each driving module is correspondingly arranged with an unlocking device, which is located between the first driving unit and the second driving unit of the driving module. In other words, the first driving unit and the second driving unit of the driving module are located on both sides of the unlocking device in the axial direction.

[0085] The position and quantity of the unlocking device can be selected according to actual needs so that it can enable all the drive modules to be separated from the output shaft after electrical signal excitation, such as voltage excitation.

[0086] See also Figure 7 In one or more embodiments of the present specification, the wall 1 includes: a first mounting portion 11 for mounting the driving module 3, and a second mounting portion 12 for mounting the unlocking device 4. The first mounting portion 11 has a first deformable portion 13 on at least one side of the two sides in the axial direction of the output shaft 2, and the second mounting portion 12 has a second deformable portion 14 on at least one side of the two sides in the axial direction of the output shaft 2.

[0087] In some embodiments, the inchworm-type piezoelectric rotary motor includes a rotor and a stator, wherein the rotor is an output shaft 2 and the stator, such as a stator housing, provides a wall 1 .

[0088] In some embodiments, the first deformation portion 13 and the second deformation portion 14 are used to provide deformation so that the wall 1 can carry the driving module 3 away from the output shaft 2. In some embodiments, the wall 1 uses a flexible material or a partially flexible material to form the first deformation portion 11 and / or the second deformation portion 12. In other embodiments, the wall 1 uses a flexible structure such as a flexible hinge structure to form the first deformation portion 11 and / or the second deformation portion 12. Among them, the flexible hinge structure refers to a structure arranged on the wall 1 so that it still has a certain flexibility and allows a certain deformation despite the use of a hard material such as a metal or alloy material. Specifically, the flexible hinge structure is similar to a hinge structure, which allows a part of the wall 1 to pivot to a certain extent relative to another part of the wall 1.

[0089] Exemplarily, the wall 1 includes a first wall portion and a second wall portion, the thickness of the first wall portion is greater than the thickness of the second wall portion, and the second wall portion can pivot relative to the first wall portion around a pivot axis located in the radial plane of the output shaft 2, for example, it can pivot toward the direction of the output shaft 2 or pivot away from the direction of the output shaft 2. In some embodiments, the pivot axis is located in the plane where the wall 1 is located, and the pivoting of the second wall portion relative to the first wall portion is an integral rotation. In other embodiments, there may be an angle between the pivot axis and the plane where the wall 1 is located, and the pivoting of the second wall portion relative to the first wall portion may include an integral rotation and torsion. The first mounting portion 11 and the second mounting portion 12 are located on the first wall portion, and the first deformation portion 13 and the second deformation portion 14 are located on the second wall portion. Specifically, since the wall 1 has a thickness change, its thinner portion is more likely to deform than its thicker portion, that is, the second wall portion is more likely to pivot relative to the first wall portion, forming the aforementioned flexible hinge structure. It should be noted that the above-mentioned pivoting is intended to illustrate the possible motion relationship or deformation relationship between the first wall portion and the second wall portion. In some embodiments, there is actually no physical pivot axis. In some embodiments, the pivoting between the first wall portion and the second wall portion cannot be accurately simulated as a pivoting around the pivot axis at a microscopic level. Specifically, the macroscopic pivoting motion between the first wall portion and the second wall portion can be achieved by microscopic irregular deformation.

[0090] See also Figure 7 As shown, the wall thickness of the first mounting portion 11 is greater than the wall thickness of the parts on both sides of the first mounting portion 11 (for example, the first deformation portion 13). The wall thickness of the second mounting portion 12 is greater than the wall thickness of the parts on both sides of the second mounting portion 12 (for example, the first deformation portion 13 or the second deformation portion 14). In addition, Figure 7 It can also be seen that the wall thickness of the first mounting portion 11 is greater than the wall thickness of the second mounting portion 12 , so as to facilitate pivoting between the second mounting portion 12 and the first mounting portion 11 .

[0091] In some embodiments, a first deformable portion 13 is disposed on each side of the first mounting portion 11, and a second deformable portion 14 is disposed on each side of the second mounting portion 12. In other embodiments, a first deformable portion 13 is disposed on each side of the first mounting portion 11, a second deformable portion 14 is disposed on one side of the second mounting portion 12, and the other side of the second mounting portion 12 shares the first deformable portion 13 with the first mounting portion 11.

[0092] For example, see Figure 3 , Figure 7 As shown, the unlocking unit 42 causes the second mounting portion 12 to move in the direction of the unlocking unit 42 under the stimulation of an electrical signal, such as a voltage. Figure 7 The first deformation portion 13 on one side of the second mounting portion 12 undergoes a certain deformation to move toward the left side of the second mounting portion 12. Figure 7The first mounting portion 11 is pulled to the left side of the second deformable portion 14, and the second mounting portion 12 and the first mounting portion 11 are further driven to move toward the left side of the second deformable portion 14. Figure 7 The drive module 3 is displaced to the left in the output shaft 2, thereby disengaging from the output shaft 2 to achieve unlocking.

[0093] In one or more embodiments of the present specification, a groove 15 is formed at the second wall portion, for example, a groove 15 is formed at one side of the second wall portion. Figure 7 As shown, a groove 15 is provided at the second deformable portion 14 on the upper side of the second mounting portion 12, and a groove 15 is also provided at the second deformable portion 14 on the lower side of the second mounting portion 12. The groove 15 further reduces the rigidity of one side of the second wall portion, making it easier to deform and displace in response to the force provided by the unlocking unit 42.

[0094] In some embodiments, a groove 15 is provided between the first wall portion and the second wall portion. For example, grooves 15 are provided on both upper and lower sides of the first mounting portion 11. The grooves 15 further reduce the rigidity of the connection between the first wall portion and the second wall portion, making it easier to deform and displace in response to the force provided by the unlocking unit 42.

[0095] In some other embodiments, the wall 1 is a plane in an unprocessed state, and a thinner second wall portion is formed by opening a groove 15 in a portion of the thicker first wall portion (eg, the upper end or the lower end of the first wall portion).

[0096] Specifically, in some embodiments, the wall 1 is arranged in thickness to reduce its rigidity, making it easy to deform and move. In other embodiments, the wall 1 is grooved to reduce its rigidity, making it easy to deform and move. In other embodiments, the wall 1 has both a thickness arrangement and a groove.

[0097] In one or more embodiments of this specification, see Figure 7 As shown, the groove 15 has: a first portion (eg, Figure 7 ), and a second portion extending in the axial direction of the output shaft 2 inside the wall 1 (e.g. Figure 7 The first and second parts provide a space for deformation. In some embodiments, the groove 15 is L-shaped or T-shaped. Exemplarily, as mentioned above, in some embodiments, the wall 1 provides a pre-pressure to the first drive unit 31 and the second drive unit 32. Under the pre-pressure, the first mounting portion 11 on which the first drive unit 31 and the second drive unit 32 are mounted protrudes outward relative to other parts of the wall 1, for example, toward Figure 7The left side of the groove 15 is convex, and the first and second parts of the groove 15 provide space for such deformation. On the other hand, the first and second parts of the groove 15 also provide space for the wall 1 to deform due to the force exerted on the wall 1 by the unlocking unit 42 after being stimulated by an electrical signal, such as voltage.

[0098] In one or more embodiments of this specification, see Figures 3 to 9 As shown, the inchworm type piezoelectric rotary motor comprises: a stator housing, and a rotor rotatably arranged inside the stator housing, wherein the stator housing provides a wall 1, and the rotor is an output shaft 2. Figure 2 As shown, the stator housing includes: a left side wall a, a right side wall b, an upper end plate c and a lower end plate d, and the front and rear ends of the stator housing are open to facilitate processing of the left side wall a and the right side wall b, such as wire cutting.

[0099] The left side wall a, the right side wall b, the upper end plate c and the lower end plate d are enclosed to form a rectangular frame with an open front end and a rear end. In other embodiments, the left side wall a and the right side wall b may also have an arc-shaped outer surface. In some embodiments, a front cover plate and a rear cover plate fixed to the rectangular frame are also included, and the front cover plate and the rear cover plate close the rectangular frame.

[0100] The stator housing provides a mounting frame for the inchworm-type piezoelectric rotary motor to its internal structure and external structure. Among them, the left side wall a and the right side wall b provide a flexible hinge mechanism, which provides installation and positioning for the drive module 3 and the unlocking device 4, and provides pre-pressure for the first drive unit 31 and the second drive unit 32 in the drive module 3, so as to ensure the stable output performance of the piezoelectric ceramic. The upper end plate c, the lower end plate d, the front cover plate, and the rear cover plate provide mounting interfaces for the left side wall a and the right side wall b, cover the outer surface, provide a certain protection capability, can protect the internal structure of the motor, and have a certain dustproof effect.

[0101] In some embodiments, the unlocking device 4 is arranged in the gap between the driving module 3 and the upper end plate c and the lower end plate d, which has a high degree of integration, a small size and is convenient for use in a small space.

[0102] In some embodiments, the drive module 3 and the unlocking device 4 are integrated on the wall 1. For example, the drive module 3 and the unlocking device 4 are installed by directly forming a first mounting portion 11 and a second mounting portion 12 on the wall 1, so no additional mounting components are required, further reducing the overall volume of the motor in the radial direction.

[0103] It should be noted that Figure 3 , Figure 5 , Figure 6 , Figure 8 , Fig. 9The dashed lines in the figure are mainly used to roughly illustrate that a solid structure can be understood as having two integrally connected parts or having a structure formed by a fixed connection between two parts, for example Figure 3 As shown, the integrally formed stator housing may include a left side wall a and an upper end plate c. Figure 3 The dotted line in the upper left center is used to roughly illustrate and separate the left side wall a and the upper end plate c, but is not used to define the starting and ending positions of the left side wall a and the upper end plate c. Figure 5 , Figure 6 , Figure 8 , Fig. 9 Similar dotted lines are also marked, and no further description is given for this.

[0104] In one or more embodiments of the present specification, the inchworm type piezoelectric rotary motor includes: a fixed guide bearing 51 provided at one end of the output shaft 2 and a movable guide bearing 52 provided at the other end of the output shaft 2. Figure 5 In some embodiments, the fixed guide bearing 51 is disposed at the upper end plate c, and the movable guide bearing 52 is disposed at the lower end plate d. In some embodiments, the fixed guide bearing 51 guides and positions the output shaft 2, and the movable guide bearing 52 guides the output shaft 2, but allows the movable guide bearing 52 to move within a certain range. In some embodiments, the fixed guide bearing 51 and the movable guide bearing 52 are deep groove ball bearings.

[0105] See also Figure 6 As shown, in some embodiments, the output shaft 2 has a fixed guide bearing shoulder 24, and a locking nut 6 is provided on the output shaft 2. The locking nut 6 is threadedly matched with the output shaft 2 and can adjust its position relative to the output shaft 2. In some embodiments, the inner ring of the fixed guide bearing 51 is arranged between the fixed guide bearing shoulder 24 and the locking nut 6.

[0106] Continue to see Figure 6 As shown, in some embodiments, the upper end plate c has a fixed guide bearing boss c1, and also includes an upper cover plate fixedly connected to the upper end plate c. In some embodiments, the upper cover plate is fixed to the upper end plate c at Figure 6 The upper cover plate is annular and surrounds the outer portion of the locking nut 6. In some embodiments, the outer ring of the fixed guide bearing 51 is disposed between the fixed guide bearing boss c1 and the upper cover plate.

[0107] The inner and outer rings of the fixed guide bearing 51 are limited by the fixed guide bearing shoulder 24, the position-adjustable locking nut 6, the fixed guide bearing boss c1 and the upper cover plate, thereby achieving the positioning of the fixed guide bearing 51 and ensuring the position of the output shaft 2 relative to the stator housing.

[0108] See also Figure 8As shown, in some embodiments, the output shaft 2 has a movable guide bearing shoulder 25, and the output shaft 2 is also fixed with a movable guide bearing retaining ring 26. In some embodiments, the inner ring of the movable guide bearing 52 is arranged between the movable guide bearing shoulder 25 and the movable guide bearing retaining ring 26.

[0109] Continue to see Figure 8 As shown, in some embodiments, the lower end plate d has a movable guide bearing boss d1. In some embodiments, the movable guide bearing boss d1 implements an upper limit on the movable guide bearing 52, but allows the movable guide bearing 52 to move in the axial direction. Based on the movable arrangement of the movable guide bearing 52, the movable guide bearing 52 and the output shaft 2, and the movable guide bearing 52 and the stator housing, such as the lower end plate d of the stator housing, can move relative to each other to compensate for the length change of the output shaft 2 caused by thermal deformation or manufacturing and installation errors.

[0110] See also Fig. 9 As shown, in some embodiments, the unlocking member of the unlockable inchworm-type piezoelectric rotary motor is a fixedly arranged block structure 43, the position of the block structure 43 relative to the output shaft 2 is fixed, and does not interfere with the free rotation of the output shaft 2. Exemplarily, the block structure 43 is fixed on the upper end plate c and the lower end plate d of the stator housing. Since the position of the output shaft 2 relative to the stator housing is fixed, the position of the block structure 43 inside the stator housing is also fixed, so that the surface of the block structure 43 in contact with the unlocking surface of the unlocking unit 42 (that is, the surface of the block structure 43 facing the wall 1) and the output shaft 2 maintain a constant distance, and at the same time, there is no contact relationship between the block structure 43 and the output shaft 2, so it does not affect the rotation of the output shaft 2.

[0111] In some embodiments, the unlocking unit 42 is elongated due to deformation, so that the wall 1 is away from the block structure 43, thereby making the wall 1 away from the output shaft 2. In some embodiments, the unlocking unit 42 can be fixed on the wall 1 and apply force to the block structure 43, or it can be fixed on the block structure 43 and apply force to the wall 1. In this embodiment, the principle of the unlocking unit 42 to make the wall 1 away from the block structure 43 is the same as that of the unlocking unit 42 described above, so it is not repeated.

[0112] In some embodiments, the block structure can be a plate, a strip, or any other shape, which can provide a support surface facing the wall 1 for providing support for the unlocking unit 42, for example, providing support for the unlocking surface of the unlocking unit 42, and the distance between the support surface and the axis of the output shaft 2 can be kept constant.

[0113] In some embodiments, each unlocking unit 42 is correspondingly provided with a block structure 43, that is, a support surface is correspondingly provided. In other embodiments, some unlocking units 42 may share a block structure 43, for example, the unlocking surfaces of two unlocking units 42 are against the support surface of the same block structure 43.

[0114] In some embodiments, the unlocking unit 42 can be fixed on the wall 1, and the unlocking surface of the unlocking unit 42 applies force toward the supporting surface of the block structure 43. In other embodiments, the unlocking unit 42 can be fixed on the block structure 43, and the unlocking surface of the unlocking unit 42 applies force toward the wall 1.

[0115] In some embodiments, the unlocking member of the unlockable inchworm-type piezoelectric rotary motor is a ring structure or a part of the ring structure fixedly arranged around the output shaft 2. Exemplarily, the ring structure is fixed on the upper end plate c and the lower end plate d of the stator housing, the outer wall of the ring structure is fixed relative to the position of the output shaft 2, and there is a gap between the inner wall of the ring structure and the output shaft 2, so it does not interfere with the free rotation of the output shaft 2. The cooperation between the unlocking unit 42 and the ring structure is similar to the cooperation between the unlocking unit 42 and the block structure 43, so it will not be repeated.

[0116] In one or more embodiments of the present specification, an unlocking method for an unlockable inchworm-type piezoelectric rotary motor is provided, which can be used when the drive module 3 cannot be separated from the output shaft 2 and self-locks due to a malfunction or other reasons, or when unlocking is required due to other needs. The unlocking method includes: continuously applying a first electrical signal excitation, such as a first voltage excitation, to the unlocking unit 42, so that the unlocking unit 42 stretches, abuts against an unlocking component, such as an outer ring 412 of the unlocking bearing 41, and further stretches to push the wall 1 to expand outward (for example, the reaction force received after abutting against the unlocking component pushes the wall 1 to expand outward); the wall 1 and the drive module 3 are separated from the output shaft 2.

[0117] In some embodiments, the unlocking method further includes: applying a fourth electrical signal excitation, such as a fourth voltage excitation, to the plurality of drive modules 3 to shrink one or more of the plurality of drive modules 3, so that one or more of the plurality of drive modules 3 are separated from the output shaft 2, further reducing the risk of "scratching" caused by contact between the drive module 3 and the output shaft 2. Exemplarily, the fourth electrical signal may be similar to the aforementioned sixth electrical signal and ninth electrical signal, and the fourth electrical signal is used to shrink the first module 301 of the first drive unit 31 in the drive module 3 and the first module 301 of the second drive unit 32 in the drive module 3.

[0118] It should be noted that, in some cases, all the drive modules 3 are damaged and cannot be contracted by applying electrical signal excitation, such as voltage excitation. At this time, the unlocking of the output shaft 2 is completely dependent on the operation of the unlocking unit 42. Since the deformation of the unlocking unit 42 is very small, the output shaft 2 may vibrate during operation, so there may be a situation where the drive module 3 and the output shaft 2 "scratches". The output shaft 2 is difficult to drive (it is necessary to overcome the friction when "scratching" occurs), but normal driving can still be achieved. In most cases, not all drive modules 3 are damaged, or there is an undamaged first module 301 in the first drive unit 31 or the second drive unit 32 in a certain drive module 3. At this time, by applying electrical signal excitation, such as voltage excitation, to the undamaged first module 301, the undamaged drive module 3 can be contracted, thereby reducing the risk of "scratching" as much as possible.

[0119] In one or more embodiments of the present specification, a redundant drive mechanism is further provided, comprising: a power shaft and two or more unlockable inchworm-type piezoelectric rotary motors drivingly connected to the power shaft. In some embodiments, when one of the unlockable inchworm-type piezoelectric rotary motors is damaged, the above-mentioned unlocking method is implemented on the damaged unlockable inchworm-type piezoelectric rotary motor, and the redundant unlockable inchworm-type piezoelectric rotary motor is enabled.

[0120] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this specification. Such modifications, improvements and corrections are taught in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this specification.

Claims

1. An unlockable inchworm type rotating motor, characterized in that: include: wall; a rotatable output shaft; A driving module directly or indirectly disposed on the wall for driving the output shaft to rotate; An unlocking device for disengaging the drive module from the output shaft in an unlocked state; The unlocking device comprises: a fixedly arranged unlocking member, an unlocking unit directly or indirectly arranged on one of the wall and the unlocking member, wherein a gap is provided between the unlocking member and the output shaft, and the unlocking unit is provided with an unlocking surface, wherein the unlocking surface is configured to be movable in a radial direction of the output shaft to at least partially abut against the other of the wall and the unlocking member; The wall is configured such that: when the unlocking surface abuts against the other of the wall and the unlocking member, the unlocking unit further moves in the radial direction of the output shaft and applies force to the other of the wall and the unlocking member to enable the wall and the driving module to be separated from the output shaft; A constant distance is maintained between the surface of the unlocking member that contacts the unlocking surface of the unlocking unit and the output shaft; The unlocking unit is arranged on the wall, and the unlocking surface is configured to be movable in a radial direction of the output shaft to at least partially abut against the unlocking member; Also included is an unlocking bearing, the unlocking bearing comprising an inner ring, an outer ring, and bearing balls disposed between the inner ring and the outer ring; Wherein, the inner ring is sleeved on the output shaft, and the outer ring forms the unlocking component.

2. The unlockable inchworm type rotating electric machine according to claim 1, characterized in that: The wall is configured such that when the unlocking surface abuts against the unlocking member, the unlocking unit further moves along the radial direction of the output shaft and applies force to the unlocking member so that the wall and the driving module can be separated from the output shaft.

3. The unlockable inchworm type rotating electric machine according to claim 2, characterized in that: The unlocking member is a fixed block structure; Alternatively, the unlocking member is at least a part of a ring structure fixedly disposed around the output shaft.

4. The unlockable inchworm type rotating electric machine according to claim 2, characterized in that: The unlocking unit is made of piezoelectric material and is configured such that: under the stimulation of a first electrical signal, the unlocking unit is in the unlocking state and deforms in the radial direction of the output shaft, so that the unlocking surface moves toward the unlocking member.

5. The unlockable inchworm type rotating electric machine according to claim 4, characterized in that: The unlocking unit is configured such that, when the first electrical signal excitation is not implemented, it is disengaged from the unlocking member, or is in a critical position about to contact the unlocking member, or is in contact with the unlocking member but does not deform the wall to a position where the driving module is disengaged from the output shaft.

6. The unlockable inchworm type rotating electric machine according to claim 2, characterized in that: The unlocking device comprises two unlocking units, and the two unlocking units are respectively arranged on both sides of a certain radial direction of the output shaft; Alternatively, the unlocking device includes more than two unlocking units, and the more than two unlocking units are arranged around the output shaft in a circumferential direction.

7. The unlockable inchworm type rotating electric machine according to claim 2, characterized in that: The driving module comprises a first driving unit and a second driving unit arranged on the wall, wherein the first driving unit and the second driving unit are made of piezoelectric material; The first driving unit and the second driving unit respectively include: a first module disposed on the wall and a second module disposed on the first module, the first module being configured to deform along the radial direction of the output shaft toward the center of the output shaft under the excitation of a second electrical signal, and the second module being configured to deform along the tangential direction of the output shaft under the excitation of a third electrical signal; The first driving unit and the second driving unit are arranged in a direction parallel to the axial direction of the output shaft.

8. The unlockable inchworm type rotating electrical machine according to claim 7, characterized in that: It comprises a plurality of driving modules, which are arranged around the output shaft, and each of the driving modules is correspondingly arranged with at least one unlocking unit.

9. The unlockable inchworm type rotating electric machine according to claim 8, characterized in that: Each of the driving modules is correspondingly provided with one unlocking device, and one unlocking device is located between the first driving unit and the second driving unit of the driving module; Alternatively, each of the driving modules is correspondingly arranged with two unlocking devices, and the two unlocking devices are located on both sides of the driving module along the axial direction of the output shaft.

10. The unlockable inchworm type rotating electric machine according to claim 2, characterized in that: The wall comprises: A first mounting portion for mounting the drive module; a second mounting portion for mounting the unlocking device; The first mounting portion includes a first deformation portion on at least one of two sides in the axial direction of the output shaft, and the second mounting portion includes a second deformation portion on at least one of two sides in the axial direction of the output shaft; The wall comprises a first wall portion and a second wall portion, the thickness of the first wall portion is greater than the thickness of the second wall portion, and the second wall portion is capable of pivoting relative to the first wall portion about a pivot axis located in a radial plane of the output shaft toward the output shaft or pivoting away from the output shaft; The first mounting portion and the second mounting portion are located on the first wall portion, and the first deformation portion and the second deformation portion are located on the second wall portion.

11. The unlockable inchworm type rotating electric machine according to claim 10, characterized in that: A groove is formed at the second wall portion; or a groove is formed between the first wall portion and the second wall portion; or a groove is formed in a part of the first wall portion to form the second wall portion; The groove includes: a first portion extending in the radial direction of the output shaft inside the wall, and a second portion extending in the axial direction of the output shaft inside the wall.

12. The unlockable inchworm type rotating electric machine according to claim 1, characterized in that: The output shaft is provided with: an unlocking bearing shoulder, an unlocking bearing retaining ring groove, and an unlocking bearing retaining ring arranged in the unlocking bearing retaining ring groove; The unlocking bearing is arranged between the unlocking bearing shoulder and the unlocking bearing retaining ring; The unlocking bearing is configured to be fixed on the output shaft, or to be able to slide between the unlocking bearing shoulder and the unlocking bearing retaining ring along the axial direction of the output shaft.

13. A method for unlocking an unlockable inchworm-type rotating motor, characterized in that: The unlockable inchworm type rotating electric machine according to any one of claims 1 to 12, wherein the unlocking method comprises: The first electrical signal is continuously applied to the unlocking unit to excite the unlocking unit, so that the unlocking unit stretches, abuts against the other of the wall and the unlocking member, and further stretches to push the wall to expand outward and separate the wall and the driving module from the output shaft.

14. The unlocking method according to claim 13, characterized in that: Also includes: A fourth electrical signal is applied to the plurality of driving modules to excite them, so that one or more of the plurality of driving modules shrink along the radial direction of the output shaft, so that one or more of the plurality of driving modules are separated from the output shaft.

15. A redundant drive mechanism, characterized in that: include: A power shaft and two or more unlockable inchworm-type rotating motors drivingly connected to the power shaft, wherein the unlockable inchworm-type rotating motor is the unlockable inchworm-type rotating motor according to any one of claims 1 to 12.

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