A particle position measurement system and a particle position measurement method

Abstract

The present invention discloses a particle position measurement system and a particle position measurement method. Among them, the particle position measurement system includes: a light source, a particle providing unit, an imaging detection unit, and a control unit; the light source is used to emit a detection light beam; the particle providing unit is used to emit test particles and control the test particles to pass through the detection light beam to scatter the detection light beam to form an actual scattered light beam; the imaging detection unit is used to generate an actual scattered image according to the actual scattered light beam; the control unit is communicatively connected to the imaging detection unit, and is used to receive the actual scattered image and determine the coordinate information of the test particles when the detection light beam forms the actual scattered light beam according to the actual scattered image and the scattered image database, and determine the emission performance of the particle providing unit according to the coordinate information. The technical solution of the present invention realizes the function of determining the influence of the performance parameters of the particle providing unit on the position of the test particles passing through the scattered light beam.

Description

Technical Field

[0001] The present invention relates to the technical field of optical measurement and image analysis, and particularly to a particle position measurement system and a particle position measurement method. Background Art

[0002] Spot recognition technology is a technology that uses an optical imaging system to detect, analyze, and identify spots formed by the scattered light of an object. In scientific research and engineering fields, spot recognition technology is often used to perform optical measurements on particles, and these parameters are crucial for understanding the optical, chemical, and physical properties of substances.

[0003] In the prior art, an optical path and a gas path are often used to build a photosensitive area, and the light scattering signals of particles in the photosensitive area are collected to measure the size and refractive index of spherical particles. However, most of these technologies focus on the measurement of particle size and cannot provide information about the position where the particles pass through the photosensitive area, and thus cannot reflect the influence of the gas flow rate of the gas transporting the particles in the particle providing unit, the shape and size of the outlet of the particle providing unit on the position where the particles pass through the photosensitive area. Summary of the Invention

[0004] The present invention provides a particle position measurement system and a particle position measurement method to solve the problem in the prior art that the particle providing unit cannot provide information about the position where the particles pass through the photosensitive area, and thus cannot reflect the emission performance of the particle providing unit.

[0005] According to one aspect of the present invention, a particle position measurement system is provided, which includes: a light source, a particle providing unit, an imaging detection unit, and a control unit;

[0006] The light source is used to emit a detection beam;

[0007] The particle providing unit is used to emit test particles and control the test particles to pass through the detection beam to scatter the detection beam to form an actual scattered beam;

[0008] The imaging detection unit is used to generate an actual scattered image according to the actual scattered beam;

[0009] The control unit is communicatively connected to the imaging detection unit, and is used to receive the actual scattered image, determine the coordinate information of the test particles when the detection beam forms the actual scattered beam according to the actual scattered image and the scattered image database, and determine the emission performance of the particle providing unit according to the coordinate information.

[0010] Optionally, the particle position measurement system further includes a coordinate reference unit;

[0011] The coordinate reference unit includes reference particles;

[0012] The control unit is connected to the coordinate reference unit and is configured to output a fixed coordinate signal to the coordinate reference unit, so that the coordinate reference unit controls the reference particles to scatter the detection beam at the fixed coordinate to form a reference scattered beam;

[0013] The imaging detection unit is further configured to generate a reference scattered image based on the reference scattered beam;

[0014] The control unit is further configured to receive the reference scattered image and determine a scattered image database based on the reference scattered image, the fixed coordinate signal, and the reference particle information.

[0015] Optionally, the particle providing unit includes an aerosol generator and a nozzle;

[0016] The outlet of the aerosol generator is communicated with the nozzle and is configured to provide test particles and emit the test particles through the nozzle;

[0017] The control unit is configured to determine the constraint performance of the nozzle on the movement direction of the test particles according to the coordinate information.

[0018] Optionally, the particle position measurement system further includes a beam shaping unit;

[0019] The beam shaping unit is arranged on the propagation path of the detection beam and is configured to shape the detection beam so that the maximum size of the light spot of the detection beam on the plane meets a preset size requirement;

[0020] The preset size requirement D satisfies d ≤ D < 2*d, where d represents the maximum size of the test particles.

[0021] Optionally, the particle position measurement system further includes a spherical mirror;

[0022] The spherical mirror is arranged on the propagation path of the actual scattered beam and is configured to reflect the actual scattered beam into the imaging detection unit.

[0023] Optionally, the particle position measurement system further includes a condenser lens;

[0024] The condenser lens is arranged on the propagation path after the reflection of the actual scattered beam and is configured to receive the actual scattered beam, converge the actual scattered beam, and then transmit it to the imaging detection unit.

[0025] Optionally, the particle position measurement system further includes an optical trap;

[0026] The optical trap is arranged on the propagation path of the detection beam and is configured to absorb the detection beam that is not scattered by the test particles.

[0027] According to another aspect of the present invention, there is provided a particle position measurement method, which is applied in a particle position measurement system. The particle position measurement method includes:

[0028] Receive the actual scattering image;

[0029] Determine the coordinate information of the test particle when the detection beam forms the actual scattering beam according to the actual scattering image and the scattering image database;

[0030] Determine the emission performance of the particle supply unit according to the coordinate information.

[0031] Optionally, the particle position measurement system further includes a coordinate reference unit; the coordinate reference unit includes a reference particle;

[0032] Before determining the coordinate information of the test particle when the detection beam forms the actual scattering beam according to the actual scattering image and the scattering image database, it further includes:

[0033] Output a fixed coordinate signal to the coordinate reference unit, so that the coordinate reference unit controls the reference particle to scatter the detection beam at the fixed coordinate to form a reference scattering beam;

[0034] Receive the reference scattering image generated according to the reference scattering beam;

[0035] Determine the scattering image database according to the reference scattering image, the fixed coordinate signal and the reference particle information.

[0036] Optionally, the particle supply unit includes a gas nozzle;

[0037] Determining the emission performance of the particle supply unit according to the coordinate information includes:

[0038] Determine the constraint performance of the gas nozzle on the movement direction of the test particle according to the coordinate information.

[0039] In the technical solution of the present invention, by setting a light source, a particle supply unit, an imaging detection unit and a control unit in the particle position measurement system, the control unit receives the actual scattering image of the preset particle passing through the detection beam and determines the coordinate information of the test particle when the detection beam forms the actual scattering beam according to the actual scattering image and the scattering image database, and determines the emission ability of the particle supply unit according to the coordinate information, thereby realizing the function of determining the influence of the performance parameters of the particle supply unit on the position of the test particle passing through the scattering beam.

[0040] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. Brief Description of the Drawings

[0041] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for description in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0042] Figure 1 It is a schematic three-dimensional structure diagram of the first particle position measurement system provided according to an embodiment of the present invention;

[0043] Figure 2 It is a schematic front view structure diagram of the first particle position measurement system provided according to an embodiment of the present invention;

[0044] Figure 3 It is a schematic three-dimensional structure diagram of the second particle position measurement system provided according to an embodiment of the present invention;

[0045] Figure 4 It is a schematic diagram of coordinate division of a photosensitive region provided according to an embodiment of the present invention;

[0046] Figure 5 It is a flowchart of the first particle position measurement method provided according to an embodiment of the present invention;

[0047] Figure 6 It is a flowchart of the second particle position measurement method provided according to an embodiment of the present invention;

[0048] Figure 7 It is a flowchart of the third particle position measurement method provided according to an embodiment of the present invention. Detailed implementation manners

[0049] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0050] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above drawings are used to distinguish similar objects, and do not necessarily need to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present invention described here can be implemented in an order other than those illustrated or described here.

[0051] Figure 1Schematic three-dimensional structure diagram of the first particle position measurement system provided according to an embodiment of the present invention Figure 2 Schematic front view structure diagram of the first particle position measurement system provided according to an embodiment of the present invention. As Figure 1 and Figure 2 shown, the particle position measurement system includes:

[0052] A light source 1, a particle providing unit 2, an imaging detection unit 3, and a control unit 4;

[0053] The light source 1 is used to emit a detection beam 10;

[0054] The particle providing unit 2 is used to emit test particles 5 and control the test particles 5 to pass through the detection beam 10 to scatter the detection beam 10 to form an actual scattered beam 11;

[0055] The imaging detection unit 3 is used to generate an actual scattered image according to the actual scattered beam 11;

[0056] The control unit 4 is communicatively connected to the imaging detection unit 3, and is used to receive the actual scattered image and determine the coordinate information of the test particles 5 when the detection beam 10 forms the actual scattered beam 11 according to the actual scattered image and the scattered image database, and determine the emission performance of the particle providing unit 2 according to the coordinate information.

[0057] Among them, the light source 1 can be used to provide a continuous and stable detection beam 10, and the detection beam 10 is used to irradiate the test particles 5 and scatter to form an actual scattered beam 11. In some embodiments, the light source 1 can be a laser, which is used to output a continuous and stable laser beam. This laser beam is more conducive to shaping a detection beam 10 with a uniform illuminance distribution than an ordinary white light source and has better consistency with the characteristics of the actual scattered beam 11. Among them, the particle providing unit 2 can be used to emit test particles 5. The realization of the particle providing unit 2 emitting test particles 5 can utilize the gas in the particle providing unit 2 to drive the test particles 5 to move along the gas path of the particle providing unit 2. To achieve the purpose of controlling the test particles 5 to pass through the detection beam 10, it is necessary to make the gas path intersect with the detection beam 10. Then, during the movement of the test particles 5 along the gas path, they will reach the detection beam 10 and cause the detection beam 10 to scatter to form an actual scattered beam 11. In some embodiments, the intersection area of the detection beam 10 and the gas path of the particle providing unit 2 can be called a photosensitive area 6. When the test particles 5 reach the photosensitive area 6, the detection beam 10 scatters to form an actual scattered beam 11. It can be understood that the test particles 5 emitted by the particle providing unit 2 can be one or more. Each test particle 5 reaching the photosensitive area 6 will cause the detection beam 10 to scatter. Figure 1 Only the state when one test particle 5 reaches the detection beam 10 is exemplified herein. The embodiments of the present invention do not make specific limitations on the number of test particles 5.

[0058] Among them, the imaging detection unit 3 can be used to receive an optical signal, convert the optical signal into an electrical signal, and convert the electrical signal into an image. The imaging detection unit 3 receives the actual scattered light beam 11 and generates an actual scattered image according to the actual scattered light beam 11. The actual scattered image can be a scattered spot image when the test particle 5 reaches the detection light beam 10. It can be understood that when the flow rate in the gas path of the particle supply unit 2 is the same, the same test particle 5 passes through different positions of the detection light beam 10, and the propagation path of the actual scattered light beam 11 is different, thereby making the actual scattered images different, that is, the scattered spot images are different.

[0059] Among them, the control unit 4 is communicatively connected to the imaging detection unit 3. The imaging detection unit 3 transmits the actual scattered image to the control unit 4. The control unit 4 compares the actual scattered image with the scattered image database to determine the coordinate information corresponding to each spot image in the actual scattered image. Among them, since the actual scattered image includes at least one spot image corresponding to the test particle 5, the control unit 4 determines at least the coordinate information of one test particle 5 passing through the detection light beam 10 and undergoing scattering. The scattered image database may include the correspondence between the size of the test particle 5, the spot image of the test particle 5, and the coordinate information of the test particle 5. When the control unit 4 knows the size of the test particle 5 and the actual scattered image corresponding to the test particle 5, the coordinate information of the test particle 5 can be determined. When the particle supply unit 2 includes a certain amount of test particles 5, the coordinate information of the test particles 5 in the photosensitive area 6 can further reflect the emission performance of the particle supply unit 2.

[0060] Exemplarily, the detection light beam 10 of the light source 1 is set to be emitted along the x direction, the particle supply unit 2 is set to emit the test particle 5 along the z direction, the detection light beam 10 and the gas path of the particle supply unit 2 intersect to form a photosensitive area 6. The test particle 5 passes through the photosensitive area 6, the detection light beam 10 is scattered to form an actual scattered light beam 11 and propagates to the imaging detection unit 3. The imaging detection unit 3 generates an actual scattered image according to the actual scattered light beam 11. The control unit 4 obtains the actual scattered image and determines the coordinate information of each test particle 5 passing through the photosensitive area 6 according to the actual scattered image and the scattered image database. According to the coordinate information of each test particle 5 passing through the photosensitive area 6, the divergence of the test particle 5 in the photosensitive area 6 and the position of the whole test particle 5 in the photosensitive area 6 after the action of the particle supply unit 2 can be determined, thereby determining the emission performance of the particle supply unit 2.

[0061] It can be understood that the gas flow rate in the particle supply unit 2, the shape and size of the outlet of the particle supply unit 2 can all affect the position where the test particle 5 enters the photosensitive area 6. The particle position measurement system can reflect the influence of the gas flow rate in the particle supply unit 2, the shape and size of the outlet of the particle supply unit 2 on the movement path of the test particle 5 through the coordinate information of the test particle 5 entering the photosensitive area 6. In the embodiment of the present invention, measuring the emission performance of the particle supply unit 2 can be further applied to the design of high-precision particle counters. The outlet shapes and sizes of different high-precision particle counters are different, and the particle sample flows emitted by the high-precision particle counters are different. When the particle sample flow is more concentrated, the emission range of the particles is more concentrated, and thus the particle counting is more accurate. It can also be applied in the field of precision gas welding. Since a fixed wrapping gas needs to be ejected during precision gas welding, at this time, a suitable particle supply unit 2 can be selected according to the emission performance of the particle supply unit 2.

[0062] In the technical solution of the embodiment of the present invention, by setting a light source, a particle supply unit, an imaging detection unit, and a control unit in the particle position measurement system, the control unit receives the actual scattering image of the preset particle passing through the detection beam, determines the coordinate information of the test particle when the detection beam forms the actual scattering beam according to the actual scattering image and the scattering image database, and determines the emission ability of the particle supply unit according to the coordinate information, thereby realizing the function of determining the influence of the performance parameters of the particle supply unit on the position of the test particle passing through the scattering beam.

[0063] Optionally, Figure 3 is a schematic three-dimensional structure diagram of the second particle position measurement system provided by the embodiment of the present invention. As Figure 3 shown, the particle position measurement system further includes a coordinate reference unit 7;

[0064] The coordinate reference unit 7 includes a reference particle 70;

[0065] The control unit 4 is connected to the coordinate reference unit 7 and is used to output a fixed coordinate signal to the coordinate reference unit 7, so that the coordinate reference unit 7 controls the reference particle 70 to scatter the detection beam 10 at a fixed coordinate to form a reference scattering beam 12;

[0066] The imaging detection unit 3 is further used to generate a reference scattering image according to the reference scattering beam 12;

[0067] The control unit 4 is further used to receive the reference scattering image, and determine the scattering image database according to the reference scattering image, the fixed coordinate signal, and the information of the reference particle 70.

[0068] Among them, the coordinate reference unit 7 includes a reference particle 70, and the coordinate reference unit 7 can be composed of an aerosol generator and a delivery pipe 71 ( Figure 3Only the position of the delivery tube 71 is illustrated (in the figure), and the aerosol generator can be used to provide reference particles 70 of a preset size. The delivery tube 71 can be used to input the reference particles 70 into the photosensitive area 6 at fixed coordinates, so that the reference particles 70 scatter the detection beam 10 into a reference scattered beam 12 at the fixed coordinates. It can be understood that the control unit 4 is connected to the coordinate reference unit 7, and the control unit 4 can control the coordinates of the reference particles 70 delivered by the delivery tube 71 incident on the photosensitive area 6, that is, the control unit 4 can control the movement of the delivery tube 71 on the photosensitive area 6, thereby changing the position of the reference particles 70 incident on the photosensitive area 6. To ensure the accuracy of establishing the scattering image database, for the same size of reference particles 70, a fixed coordinate signal corresponds to the delivery tube 71 delivering one reference particle 70, ensuring that there is a reference scattering image corresponding to one reference particle 70 at each fixed coordinate.

[0069] Among them, the imaging detection unit 3 generates a reference scattering image according to the reference scattered beam 12. There is a scattering spot corresponding to one reference particle 70 on the reference scattering image. The control unit 4 receives the reference scattering image and, according to the fixed coordinate signal and the information of the reference particle 70, makes the three correspond one by one, so that under the same reference particle 70 information, different fixed coordinates have different reference scattering images. The information of the reference particle 70 can be the size information of the reference particle 70. For example, when the reference particle 70 is a spherical particle, the information of the reference particle 70 can be the diameter information of the reference particle 70.

[0070] Exemplarily, Figure 4 is a schematic diagram of coordinate division of a photosensitive area according to an embodiment of the present invention. It is set that the size of the photosensitive area 6 in the x direction is 7 mm, and the size in the y direction is 1 mm. The reference particle 70 is a spherical particle with a diameter of 10 μm. The control unit 4 is set to divide 70,000 coordinate blocks according to the diameter of the reference particle 70 and the photosensitive area 6. The control unit 4 sequentially outputs fixed coordinate signals to the coordinate reference unit 7. The coordinate reference unit 7 sequentially outputs reference particles 70 according to the 70,000 coordinate blocks. The imaging detection unit 3 sequentially obtains the reference scattering images corresponding to the 70,000 coordinate blocks. The control unit 4 then determines the scattering image database according to the reference scattering images, fixed coordinate signals, and reference particle 70 information. The scattering image database can also be established according to other size particles. When the information of the preset particle is the same as that of the scattered particle, the coordinate information of the preset particle can be determined according to the comparison result between the actual scattering image and the reference scattering image in the scattering image database.

[0071] In the technical solution of the embodiment of the present invention, by setting a coordinate reference unit, a scattering image database is established through the coordinate reference unit, the control unit, and the imaging detection unit. Furthermore, when a preset particle randomly enters the photosensitive area, the preset particle can determine its coordinate information according to the scattering image database. Establishing the scattering image database by actual calibration ensures the accuracy of obtaining the coordinate information of the preset particle, and further improves the accuracy of determining the emission ability (airflow constraint ability) of the particle providing unit.

[0072] Optionally, continue to refer to Figure 1 As shown, the particle providing unit 2 includes an aerosol generator and a nozzle 21;

[0073] The outlet of the aerosol generator is connected to the nozzle 21, which is used to provide test particles 5 and emit the test particles 5 through the nozzle 21;

[0074] The control unit 4 is used to determine the constraint performance of the nozzle 21 on the movement direction of the test particles 5 according to the coordinate information.

[0075] Among them, the aerosol generator can be a device that converts a liquid substance into gaseous fine particles, and the size of the preset particles generated by the aerosol generator can be controlled according to requirements. The aerosol generator is connected to the nozzle 21 to transport the preset particles generated by the aerosol generator into the nozzle 21. For example Figure 1 as shown in, the nozzle 21 can be a flat nozzle. The preset particles are emitted through the nozzle 21, and the shape of the nozzle opening of the nozzle 21 can play a role in constraining the preset particles.

[0076] Specifically, since the shape of the nozzle 21 has different constraint performances on the movement direction of the test particles 5, when the shape of the nozzle 21 is in a certain position, the control unit 4 can determine the coordinate information of the preset particles entering the photosensitive area 6, and determine the constraint performance of the nozzle 21 on the movement direction of the test particles 5 according to the coordinate information. For example, when the constraint performance of the nozzle 21 on the movement direction of the test particles 5 is strong, the positions of the test particles 5 entering the photosensitive area 6 are relatively concentrated; when the constraint performance of the nozzle 21 on the movement direction of the test particles 5 is weak, the positions of the test particles 5 entering the photosensitive area 6 are relatively dispersed.

[0077] In the technical solution of the embodiment of the present invention, by setting an aerosol generator and a nozzle in the particle providing unit, connecting the outlet of the aerosol generator to the nozzle, so that the particles are emitted through the nozzle, and further enabling the coordinate information of the preset particles to reflect the constraint performance of the nozzle on the movement direction of the test particles.

[0078] Optionally, continue to refer to Figure 1 and Figure 4 As shown, the particle position measurement system further includes a beam shaping unit 8;

[0079] The beam shaping unit 8 is arranged on the propagation path of the detection beam 10 and is used to shape the detection beam 10 so that the maximum size of the light spot of the detection beam 10 on the plane meets the preset size requirement;

[0080] The preset size requirement D satisfies d ≤ D < 2 * d, where d represents the maximum size of the test particle 5.

[0081] Among them, the beam shaping unit 8 can be used to shape the detection beam 10. Among them, the plane can be the plane composed of the y direction and the z direction, and the maximum size D of the light spot of the detection beam 10 on this plane needs to satisfy d ≤ D < 2 * d. Since the test particle 5 exits along the z direction, such a setting makes it so that when the test particle 5 enters the detection beam 10, only one test particle 5 causes the detection beam 10 to scatter at the same coordinate information at a time, preventing the influence of only one test particle 5 on the actually formed scattered beam 11 each time when multiple test particles 5 with the same coordinate information all pass through the detection beam 10, enabling the actual scattered image obtained by the imaging detection unit 3 to be the scattered light spot of a single test particle 5 at the same coordinate information, preventing the influence on the accuracy of the scattered light spot when multiple test particles 5 enter the detection beam 10 at the same coordinate information simultaneously, and further affecting the determination of the emission performance of the particle providing unit 2.

[0082] It can be understood that the coordinate information in the embodiments of the present invention is two-dimensional coordinate information. In order to balance the accuracy and efficiency of data acquisition, the coordinate information is set as two-dimensional coordinate information, and the beam shaping unit 8 is used to shape the maximum size D of the light spot of the detection beam 10 on the plane to d ≤ D < 2 * d, so that when the actually formed scattered beam 11 is formed each time, only one test particle 5 passes through the detection beam 10 at the same coordinate information.

[0083] In some embodiments, the beam shaping unit 8 may include an aspherical lens 81 and a plano-convex cylindrical lens 82. The aspherical lens 81 and the plano-convex cylindrical lens 82 are arranged in sequence on the propagation path of the detection beam 10, and their function is to shape the detection beam 10 into a converging light with high illuminance and continuous stability, and the light spot size D of this converging light satisfies d ≤ D < 2 * d.

[0084] The technical solution of the embodiments of the present invention, by setting a beam shaping unit in the particle position measurement system and shaping the maximum size of the light spot of the detection beam into a preset size, enables the actual scattered image obtained by the imaging detection unit to be the scattered light spot of a single test particle at the same coordinate information, preventing the influence on the accuracy of the scattered light spot when multiple test particles enter the detection beam at the same coordinate information simultaneously, and further affecting the determination of the emission performance of the particle providing unit.

[0085] Optionally, continue to refer to Figure 1As shown, the particle position measurement system further includes a spherical mirror 9;

[0086] The spherical mirror 9 is arranged on the propagation path of the actual scattered light beam 11 for reflecting the actual scattered light beam 11 into the imaging detection unit 3.

[0087] Wherein, the spherical mirror 9 can be used to collect the actual scattered light beam 11 and reflect the actual scattered light beam 11 into the imaging detection unit 3 to improve the quality of the actual scattering image generated by the imaging detection unit 3.

[0088] Specifically, since the scattering of the test particle 5 when passing through the detection light beam 10 is in an irregular direction, the spherical mirror 9 is arranged to reflect part of the actual scattered light beam 11 into the imaging detection unit 3. The more actual scattered light beams 11 are collected, the more accurate the actual scattering image is, improving the measurement accuracy of the particle position measurement system.

[0089] Optionally, continue to refer to Figure 2 As shown, the particle position measurement system further includes a condenser lens 91;

[0090] The condenser lens 91 is arranged on the propagation path after the reflection of the actual scattered light beam 11 for receiving the actual scattered light beam 11 and converging the actual scattered light beam 11 and then transmitting it into the imaging detection unit 3.

[0091] Wherein, the condenser lens 91 can be used to converge the actual scattered light beam 11 into the imaging detection unit 3. In order to collect as many actual scattered light beams 11 as possible, a spherical mirror 9 with a larger receiving range can be arranged. Since the reflection of the spherical mirror 9 is fixed and the detection position and receiving surface of the imaging detection unit 3 are fixed, the condenser lens 91 is arranged on the propagation path after the reflection of the actual scattered light beam 11, so that all the collected actual scattered light beams 11 can enter the imaging detection unit 3, reducing light loss and improving the imaging quality of the imaging detection unit 3.

[0092] Optionally, continue to refer to Figure 1 As shown, the particle position measurement system further includes an optical trap 92;

[0093] The optical trap 92 is arranged on the propagation path of the detection light beam 10 for absorbing the detection light beam 10 that is not scattered by the test particle 5.

[0094] Wherein, the function of the optical trap 92 is to absorb the detection light beam 10. Since it is necessary to ensure no stray light interference during the operation of the particle position measurement system, the optical trap 92 is arranged on the propagation path of the detection light beam 10 and on the side of the test particle 5 away from the light source 1, so that the detection light beam 10 that is not scattered by the test particle 5 enters the optical trap 92, absorbing the detection light beam 10 to the greatest extent and ensuring the detection accuracy of the particle position measurement system.

[0095] Based on the same inventive concept, Figure 5 which is a flowchart of the first particle position measurement method provided by an embodiment of the present invention. An embodiment of the present invention also provides a particle position measurement method, which is applied in a particle position measurement system. Combining Figure 5 and Figure 1 as shown, the particle position measurement method includes:

[0096] S10. Receive the actual scattering image.

[0097] Among them, the actual scattering image can be the scattering spot image when the test particle 5 reaches the detection beam 10. When the flow rate in the gas path in the particle providing unit 2 is the same, the same test particle 5 passes through different positions of the detection beam 10, and the propagation paths of the actual scattered beams 11 are different, thereby making the actual scattering images different, that is, the scattering spot images are different.

[0098] S11. Determine the coordinate information of the test particle when the detection beam forms the actual scattered beam according to the actual scattering image and the scattering image database.

[0099] Among them, the control unit 4 compares the actual scattering image with the scattering image database to determine the coordinate information corresponding to each spot image in the actual scattering image. Among them, since the actual scattering image includes at least one spot image corresponding to the test particle 5, the control unit 4 determines at least the coordinate information of the test particle 5 passing through the detection beam 10 and undergoing scattering. The scattering image database may include the size of the test particle 5 and the correspondence between the spot image of the test particle 5 and the coordinate information of the test particle 5. The control unit 4 knows the size of the test particle 5 and the actual scattering image corresponding to the test particle 5, and thus can determine the coordinate information of the test particle 5.

[0100] S12. Determine the outgoing performance of the particle providing unit according to the coordinate information.

[0101] Among them, the outgoing performance can be the gas flow rate in the particle providing unit 2, the shape and size of the outlet of the particle providing unit 2. The gas flow rate in the particle providing unit 2, the shape and size of the outlet of the particle providing unit 2 can all affect the position where the test particle 5 enters the photosensitive area 6. The particle position measurement system can reflect the influence of the gas flow rate in the particle providing unit 2, the shape and size of the outlet of the particle providing unit 2 on the movement path of the test particle 5 through the coordinate information of the test particle 5 entering the photosensitive area 6.

[0102] Exemplarily, it is set that the detection beam 10 exits along the x direction, and the test particle 5 exits along the z direction. The detection beam 10 intersects with the gas path of the particle providing unit 2 to form a photosensitive area 6. The test particle 5 passes through the photosensitive area 6, and the detection beam 10 is scattered to form an actual scattered beam 11 and propagates to the imaging detection unit 3. An actual scattered image is obtained, and based on the actual scattered image and the scattered image database, the coordinate information of each test particle 5 passing through the photosensitive area 6 is determined. Based on the coordinate information of each test particle 5 passing through the photosensitive area 6, the divergence situation of the test particle 5 in the photosensitive area 6 after the action of the particle providing unit 2 and the position of the test particle 5 as a whole in the photosensitive area 6 can be determined, and then the emission performance of the particle providing unit 2 can be determined.

[0103] The technical solution of the embodiment of the present invention realizes the function of determining the influence of the performance parameters of the particle providing unit on the position of the test particle passing through the scattered beam by obtaining the actual scattered image of the preset particle passing through the detection beam, determining the coordinate information of the test particle when the detection beam forms the actual scattered beam based on the actual scattered image and the scattered image database, and determining the emission ability of the particle providing unit according to the coordinate information.

[0104] Based on the above embodiment, Figure 6 is a flowchart of the second particle position measurement method provided according to the embodiment of the present invention. Combining Figure 3 and Figure 6 as shown, the particle position measurement system further includes a coordinate reference unit 7; the coordinate reference unit 7 includes a reference particle 70;

[0105] The particle position measurement method includes:

[0106] S20. Receive the actual scattered image.

[0107] S21. Output a fixed coordinate signal to the coordinate reference unit to enable the coordinate reference unit to control the reference particle to scatter the detection beam at a fixed coordinate to form a reference scattered beam.

[0108] Among them, outputting a fixed coordinate signal to the coordinate reference unit 7 to control the coordinate of the reference particle 70 incident on the photosensitive area 6, that is, the control unit 4 can control and change the incident coordinate of the reference particle 70 on the photosensitive area 6, and then change the position of the reference particle 70 incident on the photosensitive area 6.

[0109] S22. Receive the reference scattered image generated according to the reference scattered beam.

[0110] Among them, the control unit 4 receives the reference scattered image generated by the imaging detection unit 3, and there is a scattered light spot corresponding to a reference particle 70 on the reference scattered image.

[0111] S23. Determine the scattering image database based on the reference scattering image, the fixed coordinate signal, and the reference particle information.

[0112] Among them, the control unit 4 receives the reference scattering image and, according to the fixed coordinate signal and the reference particle 70 information, makes a one-to-one correspondence among the three, so that under the same reference particle 70 information, different fixed coordinates have different reference scattering images. The reference particle 70 information can be the size information of the reference particle 70. For example, when the reference particle 70 is a spherical particle, the reference particle 70 information can be the diameter information of the reference particle 70. To ensure the accuracy of establishing the scattering image database, reference particles 70 of the same size are limited to one reference particle 70 being conveyed by a delivery tube 71 corresponding to one fixed coordinate signal, ensuring that there is a reference scattering image corresponding to a reference particle 70 at each fixed coordinate.

[0113] S24. Determine the coordinate information of the test particle when the detection beam forms the actual scattering beam based on the actual scattering image and the scattering image database.

[0114] S25. Determine the emission performance of the particle providing unit according to the coordinate information.

[0115] The technical solution of the embodiment of the present invention outputs a fixed coordinate signal to the coordinate reference unit, and then obtains a reference scattering image generated according to the reference scattering beam. The scattering image database is determined based on the reference scattering image, the fixed coordinate signal, and the reference particle information, so that when the preset particles randomly enter the photosensitive area, the preset particles can determine the coordinate information according to the scattering image database. Establishing the scattering image database by actual calibration ensures the accuracy of obtaining the coordinate information of the preset particles, and further improves the accuracy of determining the emission ability of the particle providing unit.

[0116] Based on the above embodiments, Figure 7 is a flowchart of the third particle position measurement method provided by the embodiment of the present invention. Combining Figure 1 and Figure 7 as shown, the particle providing unit 2 includes a gas nozzle 21;

[0117] This particle position measurement method includes:

[0118] S30. Receive the actual scattering image.

[0119] S31. Determine the coordinate information of the test particle when the detection beam forms the actual scattering beam based on the actual scattering image and the scattering image database.

[0120] S32. Determine the constraint performance of the gas nozzle on the movement direction of the test particle according to the coordinate information.

[0121] Among them, the gas nozzle 21 can be used to convey the test particle 5, for example Figure 1As shown, the nozzle 21 can be a flat nozzle. The preset particles are emitted through the nozzle 21, and the shape of the nozzle opening of the nozzle 21 can play a role in constraining the preset particles.

[0122] Specifically, since the shape of the nozzle 21 has different constraint performances on the movement direction of the test particles 5, when the shape of the nozzle 21 is in a certain position, the coordinate information of the preset particles incident on the photosensitive area 6 can be determined by the control unit 4, and the constraint performance of the nozzle 21 on the movement direction of the test particles 5 can be determined according to the coordinate information. For example, when the constraint performance of the nozzle 21 on the movement direction of the test particles 5 is strong, the positions where the test particles 5 enter the photosensitive area 6 are relatively concentrated; when the constraint performance of the nozzle 21 on the movement direction of the test particles 5 is weak, the positions where the test particles 5 enter the photosensitive area 6 are relatively dispersed.

[0123] The technical solution of the embodiment of the present invention is to set the test particles to be emitted through the nozzle, so that the coordinate information of the preset particles can reflect the constraint performance of the nozzle on the movement direction of the test particles, and thus can characterize the parameter performance of the nozzle. In the specific application process, a suitable application scenario can be selected according to the constraint performance of the nozzle.

[0124] The technical solution of the embodiment of the present invention is to set a light source, a particle providing unit, an imaging detection unit and a control unit in the particle position measurement system. The control unit receives the actual scattering image of the preset particles passing through the detection beam, determines the coordinate information of the test particles when the detection beam forms the actual scattering beam according to the actual scattering image and the scattering image database, and determines the emission ability of the particle providing unit according to the coordinate information, thereby realizing the function of determining the influence of the performance parameters of the particle providing unit on the position of the test particles passing through the scattering beam.

[0125] It should be understood that the various forms of the processes shown above can be reordered, added or deleted steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved. This is not limited herein.

[0126] The above specific embodiments do not constitute a limitation to the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub - combinations and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A particle position measurement system, characterized in that Comprising: A light source, a particle providing unit, an imaging detection unit, and a control unit; The light source is configured to emit a detection light beam; The particle providing unit is configured to emit test particles and control the test particles to pass through the detection light beam to scatter the detection light beam to form an actual scattered light beam; The imaging detection unit is configured to generate an actual scattered image according to the actual scattered light beam; The control unit is communicatively connected to the imaging detection unit, and is configured to receive the actual scattered image and determine the coordinate information of the test particles when the detection light beam forms the actual scattered light beam according to the actual scattered image and a scattered image database, and determine the emission performance of the particle providing unit according to the coordinate information; The particle position measurement system further includes a coordinate reference unit; The coordinate reference unit includes reference particles; The control unit is connected to the coordinate reference unit and is configured to output a fixed coordinate signal to the coordinate reference unit, so that the coordinate reference unit controls the reference particles to scatter the detection light beam at a fixed coordinate to form a reference scattered light beam; the imaging detection unit is further configured to generate a reference scattered image according to the reference scattered light beam; The control unit is further configured to receive the reference scattered image, and determine the scattered image database according to the reference scattered image, the fixed coordinate signal, and reference particle information; The coordinate reference unit is composed of an aerosol generator and a delivery pipe; the aerosol generator is configured to provide the reference particles of a preset size; the control unit is further configured to divide coordinate blocks according to the size of the photosensitive area and control the delivery pipe to move in the photosensitive area to change the coordinates of the reference particles incident on the photosensitive area; the delivery pipe is configured to input the reference particles into the photosensitive area at fixed coordinates; The particle position measurement system further includes a beam shaping unit; The beam shaping unit is disposed on the propagation path of the detection light beam and is configured to shape the detection light beam so that the maximum size of the light spot of the detection light beam on a plane meets a preset size requirement; The preset size requirement D satisfies d ≤ D < 2*d, where d represents the maximum size of the test particles.

2. The particle position measurement system according to claim 1, characterized in that, The particle providing unit includes an aerosol generator and a nozzle; The outlet of the aerosol generator is communicated with the nozzle and is configured to provide the test particles and emit the test particles through the nozzle; The control unit is configured to determine the constraint performance of the nozzle on the movement direction of the test particles according to the coordinate information.

3. The particle position measurement system according to claim 1, characterized in that, The particle position measurement system further includes a spherical mirror; The spherical mirror is disposed on the propagation path of the actual scattered light beam and is configured to reflect the actual scattered light beam into the imaging detection unit; 4. The particle position measurement system according to claim 3, wherein The particle position measurement system further includes a condenser lens; The condenser lens is disposed on the propagation path after the actual scattered light beam is reflected and is configured to receive the actual scattered light beam, converge the actual scattered light beam, and then transmit it to the imaging detection unit; 5. The particle position measurement system according to claim 1, characterized in that, The particle position measurement system further includes an optical trap; The optical trap is disposed on the propagation path of the detection light beam and is configured to absorb the detection light beam that is not scattered by the test particles.

6. A method for measuring the position of particles, characterized in that, Applied in the particle position measurement system according to any one of claims 1-5, the particle position measurement method includes: Receiving an actual scattering image; Determining the coordinate information of the test particle when the detection beam forms an actual scattering beam according to the actual scattering image and the scattering image database; Determining the emission performance of the particle supply unit according to the coordinate information; The particle position measurement system further includes a coordinate reference unit; the coordinate reference unit includes a reference particle; Before determining the coordinate information of the test particle when the detection beam forms an actual scattering beam according to the actual scattering image and the scattering image database, it further includes: Outputting a fixed coordinate signal to the coordinate reference unit, so that the coordinate reference unit controls the reference particle to scatter the detection beam at a fixed coordinate to form a reference scattering beam; Receiving a reference scattering image generated according to the reference scattering beam; Determining the scattering image database according to the reference scattering image, the fixed coordinate signal and the reference particle information.

7. The particle position measurement method according to claim 6, wherein The particle supply unit includes a gas nozzle; determining the emission performance of the particle supply unit according to the coordinate information includes: Determining the constraint performance of the gas nozzle on the movement direction of the test particle according to the coordinate information.

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