Optical scanning device based on MEMS micromirror
Through the coordination of the control line and the elastic pull belt, the problem of inaccurate deflection of the second MEMS micromirror and inability to adjust the angle of the first MEMS micromirror in the MEMS optical scanning probe is solved, and the concentrated projection of the tissue on the opposite side of the light is achieved, which improves the Scan clarity and simplify structural design.
Patent Information
- Application Number
- CN202411398532.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-09
- Publication Date
- 2024-12-10
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
When the existing MEMS optical scanning probe controls the swing of the second MEMS micromirror, it is difficult to ensure that it is accurately flattened or deflected, and the angle of the first MEMS micromirror cannot be independently controlled, resulting in the light not being able to effectively illuminate the side wards, and the scanning is carried out. Inadequate clarity.
The angle adjustment is adjusted by dragging the second MEMS micromirror with a control line, and the angle of the first MEMS micromirror is assisted by adjusting the elastic belt and connecting rod structure to ensure that light is concentrated on the side tissue and improve scanning clarity. Spend.
Through the coordination of the control line and the elastic pull belt, the precise deflection of the second MEMS micromirror and the angle adjustment of the first MEMS micromirror are achieved, which improves the scanning clarity of the lateral tissue and avoids uncertainty during heating of metal ligaments , saves circuits and simplifies structure.
Smart Images
Figure CN119097283A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of optical scanning technology, and in particular to an optical scanning device based on a MEMS micromirror. Background Art
[0002] The main development project of the patent application unit is to combine scanning micromirrors with optical coherence tomography technology to develop endoscope imaging systems. In order to solve the limitations of this type of endoscope, reduce costs, reduce the complexity of the probe structure and reduce the diameter of the probe, and realize a MEMS optical probe that can switch between forward scanning and side scanning or side-forward scanning, a Chinese patent with application number 201410067366.0 discloses a MEMS optical scanning probe with switchable working modes, including a housing and a main body base assembled therein; a lens assembly is arranged in the groove on the upper side of the main body base, and a first MEMS micromirror is arranged in the groove on the inclined surface; a second MEMS micromirror is arranged in the groove on the lower side of the main body base; a light beam is incident on the first MEMS micromirror through the optical fiber via the lens assembly, and then reflected to the second MEMS micromirror through the first MEMS micromirror; an external circuit controls the voltage on the second MEMS micromirror to be turned on and off.
[0003] Although the above patent solves the above problems, in order to make the second MEMS micromirror swing relative to the first MEMS micromirror, it is necessary to pass current into the bimetallic driving arm to make the bimetallic driving arm heat up and bend, thereby driving the second MEMS micromirror to swing. This control method is difficult to ensure the accurate flattening or deflection of the second MEMS micromirror. Secondly, it can only control the adjustment angle of the second MEMS micromirror, but cannot control the adjustment angle of the first MEMS micromirror. When scanning the ward, the light cannot be better irradiated to the side ward, which needs to be improved. Summary of the invention
[0004] In order to solve the above problems, the present invention provides the following technical solutions:
[0005] An optical scanning device based on a MEMS micromirror comprises an inner shell, a base is arranged in the inner shell, an assembly groove is provided on the top of the base, two ends of the assembly groove pass through two ends of the base, a lens assembly is fixed in the assembly groove, a lens is installed at the front end of the lens assembly, a notch is provided at the front end of the base, the notch is located below the lens, a first MEMS micromirror is hinged in the notch, the first MEMS micromirror is located below the lens, a metal ligament is connected to the front end of the base, and a second MEMS micromirror is connected to the front end of the base through the metal ligament, the second MEMS micromirror extends on the front side of the first MEMS micromirror, a control line is connected to the bottom of the front side of the second MEMS micromirror, the control line passes backward from the front end of the base to the rear side of the base, and the control line is manipulated by the rear side of the base to control the second MEMS micromirror to deflect up and down relative to the first MEMS micromirror;
[0006] The outer layer of the inner shell is covered with an outer shell, and a second mirror window is provided on the front side of the outer shell; when the second MEMS micromirror deflects up and down relative to the first MEMS micromirror, the second MEMS micromirror also changes its angle relative to the rear side of the second mirror window;
[0007] The two sides of the second MEMS micromirror are hinged with connecting rods, and the other ends of the two connecting rods are hinged on the two sides of the first MEMS micromirror. When the second MEMS micromirror deflects up and down relative to the first MEMS micromirror, the two connecting rods can also lead the first MEMS micromirror to deflect up and down relative to the lens;
[0008] A first mirror window is provided above the housing, and when the connecting rod drives the first MEMS micromirror to deflect up and down relative to the lens, the first MEMS micromirror changes its angle relative to the bottom of the first mirror window.
[0009] Further preferably, a light beam line is connected inside the lens assembly, and the light beam line extends backward.
[0010] Further preferably, the outer shell is cylindrical, and the second mirror window is arranged on the outer shell according to the cylindrical contour of the outer shell.
[0011] Further preferably, the second mirror window is spherical and arranged on the front end of the housing.
[0012] Further preferably, the rear end of the outer shell is filled with a locking sleeve, the inner wall surface of the locking sleeve is tightly locked on the outer wall surface of the inner shell, and a gap is formed between the outer shell and the inner shell, and the gap extends forward to communicate with the front and back of the chamber where the lens, the first MEMS micromirror, and the second MEMS micromirror are located.
[0013] Further preferably, a slope is provided at the front end of the base, and the slot is provided on the slope along the inclination angle of the slope, so that the first MEMS micromirror is located in the slot and also at the inclination angle, and an inclined hole gradually inclined downward is provided from one end of the slope backward, and an elastic pull strap is provided in the inclined hole, and the rear end of the elastic pull strap is connected to the rear end of the inclined hole, and the front end of the elastic pull strap is connected to the inclined top end of the first MEMS micromirror, and the connecting rod is hinged on the inclined bottom end of the first MEMS micromirror, and when the connecting rod deflects upward with the inclined bottom end of the first MEMS micromirror, the inclined top end of the first MEMS micromirror leaves the slot, and the inclined top end of the first MEMS micromirror carries the elastic pull strap and elastically stretches forward along the inclined hole, and at the same time drags the first MEMS micromirror forward from the bottom of the lens.
[0014] Further preferably, a wire hole is opened at the bottom of the inner shell from front to back, and the control wire passes through the wire hole. A positioning hole is opened at the rear end of the base, and the rear end of the wire hole is connected to the positioning hole. An operating rod is provided in the positioning hole, and the rear end of the control wire enters the positioning hole and is connected to the operating rod.
[0015] Further preferably, the positioning hole is filled with a spring, the rear end of the operating rod passes through to the rear end of the base, a limiting plate is fixed to the rear end of the positioning hole, the spring is sleeved on the operating rod, and the rear end of the spring is pressed against the limiting plate.
[0016] Compared with the prior art, the present invention has the following beneficial effects:
[0017] 1. The present invention controls the angle deflection of the second MEMS micromirror through a control line, so that the light is reflected onto the lateral tissue in a concentrated projection manner, so that the scanning clarity of the lateral tissue is further improved. The operating rod is released, the drag force on the control line disappears, the spring releases the length, and the operating rod is returned to the positioning hole. The drag force on the control line disappears, and the metal ligament changes from a downward bending to an upward recovery shape, and rotates upward with the second MEMS micromirror. When the second MEMS micromirror rotates to the angle shown in the figure, it just covers the front side of the first MEMS micromirror, and completely blocks the light path on the front side of the first MEMS micromirror. At this time, the light irradiated by the lens onto the lens irradiates the first MEMS micromirror, is reflected forward by the first MEMS micromirror to the second MEMS micromirror, and is reflected again to the first MEMS micromirror after being blocked by the second MEMS micromirror. The light is reflected upward by the first MEMS micromirror to the first mirror window, and is completely irradiated to the patient tissue in the lateral direction through the first mirror window, completing a clearer scan of the lateral tissue. What is different from the prior art is that the power used to make the second MEMS micromirror deflect up and down is the control line. Therefore, there is no need to set up a separate circuit to heat the metal ligament to bend in order to control the up and down deflection of the second MEMS micromirror as in the prior art. Firstly, it saves circuits, and secondly, the control line is used to drag the second MEMS micromirror to adjust the deflection angle of the second MEMS micromirror, which solves the problem in the prior art that when the metal ligament is heated, it cannot be guaranteed whether it can be bent or flattened.
[0018] 2. Use the control line to control the deflection of the second MEMS micromirror to adjust the angle of the first MEMS micromirror. At the same time, the elastic drawstring is stretched forward and upward along the inclined hole, so that the reflection surface of the first MEMS micromirror and the corresponding surface of the first mirror window are nearly parallel, so that the light emitted by the lens is more effectively reflected to the first mirror window after being received by the first MEMS micromirror, and finally irradiated to the side tissue more effectively by the first mirror window, so that the scanning clarity of the side tissue is further improved. It is not only used to adjust the angle of the second MEMS micromirror, but also by forcefully dragging the downward deflection angle of the second MEMS micromirror, it can also adjust the angle of the first MEMS micromirror relative to the first mirror window. When scanning the side tissue, the downward deflection of the second MEMS micromirror only plays the role of assisting in dragging the first MEMS micromirror. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 A schematic diagram of an optical scanning device based on a MEMS micromirror provided in an embodiment of the present invention from a rear side perspective;
[0020] Figure 2 An optical scanning device based on a MEMS micromirror provided in an embodiment of the present invention comprises Figure 1 The plan view from the rear side is shown;
[0021] Figure 3 An optical scanning device based on a MEMS micromirror provided in an embodiment of the present invention comprises Figure 2 The plane diagram of the section A is shown below;
[0022] Figure 4 A schematic diagram of an optical scanning device based on a MEMS micromirror provided in an embodiment of the present invention with its housing removed;
[0023] Figure 5 A schematic diagram of only the outer shell of an optical scanning device based on a MEMS micromirror provided in an embodiment of the present invention;
[0024] Figure 6 A schematic diagram of the three-dimensional structure of a MEMS micromirror-based optical scanning device provided in an embodiment of the present invention after being cut open.
[0025] In the figure: 1. inner shell; 2. base; 3. assembly groove; 4. lens assembly; 5. lens; 6. notch; 7. first MEMS micromirror; 8. metal ligament; 9. second MEMS micromirror; 10. control line; 11. connecting rod; 12. outer shell; 13. first mirror window; 14. second mirror window; 15. beam line; 16. locking sleeve; 17. gap; 18. inclined hole; 19. elastic pull strap; 20. wire hole; 21. positioning hole; 22. operating rod; 23. spring; 24. limiting plate. DETAILED DESCRIPTION
[0026] The above and other embodiments and advantages of the present invention are described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments.
[0027] In one embodiment, if Figure 1-Figure 6 As shown:
[0028] The present embodiment provides an optical scanning device based on a MEMS micromirror, comprising an inner shell 1, a base 2 is arranged in the inner shell 1, an assembly groove 3 is provided on the top of the base 2, two ends of the assembly groove 3 pass through two ends of the base 2, a lens assembly 4 is fixed in the assembly groove 3, a light beam 15 is connected in the lens assembly 4, the light beam 15 extends backward and is connected to a scanning terminal device, a lens 5 is installed at the front end of the lens assembly 4, the terminal device (such as a gastroscope) provides a light source to the light beam 15, and the light source emits a lighting effect through the lens 5, and a notch 6 is provided at the front end of the base 2, and the notch 6 is located below the lens 5. A first MEMS micromirror 7 is hinged in the notch 6, and the first MEMS micromirror 7 is located below the lens 5. A metal ligament 8 is connected to the front end of the base 2, and a second MEMS micromirror 9 is connected to the front end of the base 2 through the metal ligament 8. The second MEMS micromirror 9 extends in front of the first MEMS micromirror 7. A control line 10 is connected to the bottom of the front side of the second MEMS micromirror 9. The control line 10 runs backward from the front end of the base 2 to the rear side of the base 2. The control line 10 is manipulated by the rear side of the base 2 to control the second MEMS micromirror 9 to deflect up and down relative to the first MEMS micromirror 7;
[0029] The outer layer of the inner shell 1 is covered with an outer shell 12, and a second mirror window 14 is provided on the front side of the outer shell 12; when the second MEMS micromirror 9 deflects up and down relative to the first MEMS micromirror 7, the second MEMS micromirror 9 also changes its angle relative to the rear side of the second mirror window 14;
[0030] The second MEMS micromirror 9 is hinged with connecting rods 11 on both sides, and the other ends of the two connecting rods 11 are hinged on both sides of the first MEMS micromirror 7. When the second MEMS micromirror 9 deflects up and down relative to the first MEMS micromirror 7, the first MEMS micromirror 7 can also be deflected up and down relative to the lens 5 through the two connecting rods 11.
[0031] A first mirror window 13 is provided above the housing 12 . When the connecting rod 11 leads the first MEMS micromirror 7 to deflect up and down relative to the lens 5 , the first MEMS micromirror 7 changes its angle relative to the bottom of the first mirror window 13 .
[0032] A wire hole 20 is provided at the bottom of the inner shell 1 from front to back, and the control wire 10 runs through the wire hole 20. A positioning hole 21 is provided at the rear end of the base 2. The rear end of the wire hole 20 passes through and connects to the positioning hole 21. An operating rod 22 is provided in the positioning hole 21. The rear end of the control wire 10 enters the positioning hole 21 and is connected to the operating rod 22. A spring 23 is filled in the positioning hole 21. The rear end of the operating rod 22 runs through to the outside of the rear end of the base 2. A limiting plate 24 is fixed to the rear end of the positioning hole 21. The spring 23 is sleeved on the operating rod 22, and the rear end of the spring 23 presses against the limiting plate 24.
[0033] Unlike the prior art, in the present invention, if one wants to adjust the angle of the second MEMS micromirror 9 relative to the first MEMS micromirror 7, one only needs to hold the operating rod 22 and forcefully drag the control line 10 outward along the positioning hole 21. Holding the operating rod 22 and forcefully dragging the control line 10 backward, the spring 23 is compressed and shortened and stores elastic force. The metal ligament 8 is forcefully dragged by the front end of the control line 10, and the metal ligament 8 bends downward and deflects the second MEMS micromirror 9 downward, thereby adjusting the second MEMS micromirror 9 to a flattened angle. At this time, the light emitted by the lens 5 is irradiated onto the first MEMS micromirror 7, and part of the light is reflected by the first MEMS micromirror 7 to the first mirror window 13 for scanning the patient's side tissue, and another part of the light is irradiated forward by the first MEMS micromirror 7 to the second mirror window 14. This part of the light penetrates the second mirror window 14 and irradiates the patient's tissue in front to complete the scanning, thereby achieving the purpose of both the side and front groups being scanned by light. In order to reflect the light onto the side tissue in a concentrated projection manner so as to further improve the scanning clarity of the side tissue, the operating rod 22 is released, the drag force on the control line 10 disappears, the spring 23 releases its length, the operating rod 22 is returned to the positioning hole 21, the drag force on the control line 10 disappears, the metal ligament 8 changes from bending downward to restoring its shape upward, and rotates upward with the second MEMS micromirror 9, and the second MEMS micromirror 9 rotates to the position as shown in FIG. Figure 4 When the angle is as shown, it just covers the front side of the first MEMS micromirror 7, and completely blocks the light path on the front side of the first MEMS micromirror 7. At this time, the light irradiated by the lens 5 onto the lens 5 is irradiated onto the first MEMS micromirror 7, and is reflected forward by the first MEMS micromirror 7 to the second MEMS micromirror 9, and is reflected again to the first MEMS micromirror 7 after being reflected and blocked by the second MEMS micromirror 9. The light is reflected upward by the first MEMS micromirror 7 to the first mirror window 13, and is completely irradiated onto the patient's tissue in the lateral direction through the first mirror window 13, completing a clearer scan of the lateral tissue. What is different from the prior art is that the power used to make the second MEMS micromirror 9 deflect up and down is the control line 10. Therefore, there is no need to set up a separate circuit to heat the metal ligament 8 to bend in order to control the up and down deflection of the second MEMS micromirror 9 as in the prior art. Firstly, it saves circuits, and secondly, the control line 10 is used to drag the second MEMS micromirror 9 to adjust the deflection angle of the second MEMS micromirror 9, which solves the problem in the prior art that when the metal ligament is heated, it cannot be guaranteed whether it can be bent or flattened.
[0034] In another embodiment, if Figure 3 , Figure 6As shown, a slope is provided at the front end of the base 2, and a slot 6 is provided on the slope along the inclination angle of the slope, so that the first MEMS micromirror 7 is located in the slot 6 and also at the inclination angle. An inclined hole 18 which is gradually inclined downward is provided from one end of the slope backward, and an elastic drawstring 19 is provided in the inclined hole 18. The rear end of the elastic drawstring 19 is connected to the rear end of the inclined hole 18, and the front end of the elastic drawstring 19 is connected to the inclined top end of the first MEMS micromirror 7. The connecting rod 11 is hinged on the inclined bottom end of the first MEMS micromirror 7. When the connecting rod 11 deflects upward with the inclined bottom end of the first MEMS micromirror 7, the inclined top end of the first MEMS micromirror 7 leaves the slot 6, and the inclined top end of the first MEMS micromirror 7 is elastically stretched forward along the inclined hole 18 with the elastic drawstring 19, and at the same time, the first MEMS micromirror 7 is dragged forward from the bottom of the lens 5. For example, by dragging the operating rod 22 backward, the front end of the operating rod 22 not only pulls down the second MEMS micromirror 9 with force, so that the second MEMS micromirror 9 deflects downward to a certain angle or flattens, but also the second MEMS micromirror 9 drags the two connecting rods 11 in the forward and downward direction while deflecting downward. The two connecting rods 11 deflect downward and use the rear end to bring the rear end of the first MEMS micromirror 7 to deflect upward. At the same time, the ends of the two connecting rods 11 also drag forward and use the rear end to drag the first MEMS micromirror 7 forward. At the same time, the elastic drawstring 19 is stretched forward and upward along the inclined hole 18. The purpose is to use this dragging relationship to drag the effective reflection surface of the first MEMS micromirror 7 forward as much as possible, and at the same time make the reflection surface of the first MEMS micromirror 7 and the corresponding surface of the first mirror window 13 close to parallel, so that the light emitted by the lens 5 is more effectively reflected to the first mirror window 13 after being received by the first MEMS micromirror 7, and finally the first mirror window 13 is more effectively irradiated to the lateral tissue, so that the scanning clarity of the lateral tissue is further improved. It can be seen that this dragging structure is not only used to adjust the angle of the second MEMS micromirror 9, but also can adjust the angle of the first MEMS micromirror 7 relative to the first mirror window 13 by forcefully dragging the downward deflection angle of the second MEMS micromirror 9. When only for lateral tissue scanning, the downward deflection of the second MEMS micromirror 9 only plays a role in assisting the dragging of the first MEMS micromirror 7, thereby further expanding the deflection effect of the second MEMS micromirror 9.
[0035] The rear end of the outer shell 12 is filled with a locking sleeve 16, and the inner wall surface of the locking sleeve 16 is tightly locked on the outer wall surface of the inner shell 1. A gap 17 is formed between the outer shell 12 and the inner shell 1. The gap 17 extends forward to communicate with the front and back of the chamber where the lens 5, the first MEMS micromirror 7, and the second MEMS micromirror 9 are located. The setting of the gap 17 allows these micromirrors to have a better light projection space, which is conducive to irradiation and improves the resolution when scanning and imaging.
[0036] The shell 12 is cylindrical, and the second mirror window 14 is arranged on the shell 12 according to the cylindrical contour of the shell 12. The second mirror window 14 is spherical and arranged on the front end of the shell 12. When the device (actually a probe) is pushed along the human organ, it not only moves smoothly, but also uses the spherical surface to contact the front tissue without causing discomfort.
[0037] The above orientation designations do not represent the specific orientations of the components in this implementation scheme. This implementation scheme is only for the convenience of describing the scheme, and the orientations are described relatively with reference to the figures. In essence, the specific orientations of the components are described according to their actual installation and actual use as well as the customary orientations of technicians in this field. This is hereby explained.
[0038] The specific implementation methods described above further describe the invention purpose, technical solutions, and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the protection scope of the present invention. It is particularly pointed out that for those skilled in the art, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. An optical scanning device based on MEMS micromirror, It is characterized in that The invention comprises an inner shell (1), wherein a base (2) is arranged in the inner shell (1), an assembly groove (3) is provided at the top of the base (2), two ends of the assembly groove (3) pass through two ends of the base (2), a lens assembly (4) is fixed in the assembly groove (3), a lens (5) is installed at the front end of the lens assembly (4), a notch (6) is provided at the front end of the base (2), the notch (6) is located below the lens (5), a first MEMS micromirror (7) is hinged in the notch (6), and the first MEMS micromirror (7) is located between the lens (5) and the inner shell (1). (5), the front end of the base (2) is connected to a metal ligament (8), and a second MEMS micromirror (9) is connected to the front end of the base (2) through the metal ligament (8), the second MEMS micromirror (9) extends in front of the first MEMS micromirror (7), the front bottom of the second MEMS micromirror (9) is connected to a control line (10), the control line (10) runs backward from the front end of the base (2) to the rear side of the base (2), and the control line (10) can be controlled by manipulating the rear side of the base (2). The second MEMS micromirror (9) deflects up and down relative to the first MEMS micromirror (7); the outer layer of the inner shell (1) is covered with an outer shell (12), and the front side of the outer shell (12) is provided with a second mirror window (14); when the second MEMS micromirror (9) deflects up and down relative to the first MEMS micromirror (7), the second MEMS micromirror (9) also changes its angle with respect to the rear side of the second mirror window (14); connecting rods (11) are hinged on both sides of the second MEMS micromirror (9), and the other ends of the two connecting rods (11) are hinged on the first MEMS micromirror (9). On both sides of a MEMS micromirror (7), when the second MEMS micromirror (9) deflects up and down relative to the first MEMS micromirror (7), the first MEMS micromirror (7) can also be deflected up and down relative to the lens (5) by the two connecting rods (11); a first mirror window (13) is provided above the housing (12); when the connecting rod (11) deflects the first MEMS micromirror (7) up and down relative to the lens (5), the first MEMS micromirror (7) changes its angle relative to the bottom of the first mirror window (13).
2. The optical scanning device based on MEMS micromirror according to claim 1, It is characterized in that A light beam line (15) is connected inside the lens assembly (4), and the light beam line (15) extends backwards.
3. The optical scanning device based on MEMS micromirror according to claim 2, It is characterized in that The housing (12) is cylindrical, and the second mirror window (14) is arranged on the housing (12) according to the cylindrical profile of the housing (12).
4. The optical scanning device based on MEMS micromirror according to claim 3, It is characterized in that The second mirror window (14) is spherical and is arranged on the front end of the housing (12).
5. The optical scanning device based on MEMS micromirror according to claim 4, It is characterized in that The rear end of the outer shell (12) is filled with a locking sleeve (16), the inner wall surface of the locking sleeve (16) is tightly locked on the outer wall surface of the inner shell (1), a gap (17) is formed between the outer shell (12) and the inner shell (1), and the gap (17) extends forward to communicate with the front and back of the chamber where the lens (5), the first MEMS micromirror (7), and the second MEMS micromirror (9) are located.
6. The optical scanning device based on MEMS micromirror according to claim 5, It is characterized in that The front end of the base (2) is provided with an inclined surface, and the notch (6) is provided on the inclined surface along the inclination angle of the inclined surface, so that the first MEMS micromirror (7) is located in the notch (6) and is also located at the inclination angle. An inclined hole (18) which is gradually inclined downward is provided from one end of the inclined surface to the rear, and an elastic drawstring (19) is provided in the inclined hole (18). The rear end of the elastic drawstring (19) is connected to the rear end of the inclined hole (18), and the front end of the elastic drawstring (19) is connected to the inclined end of the first MEMS micromirror (7). At the top, the connecting rod (11) is hinged on the inclined bottom end of the first MEMS micromirror (7). When the connecting rod (11) deflects upward with the inclined bottom end of the first MEMS micromirror (7), the inclined top end of the first MEMS micromirror (7) leaves the slot (6), and the inclined top end of the first MEMS micromirror (7) elastically stretches forward along the inclined hole (18) with the elastic drawstring (19), and at the same time drags the first MEMS micromirror (7) forward from the bottom of the lens (5).
7. The optical scanning device based on MEMS micromirror according to claim 6, It is characterized in that The bottom of the inner shell (1) is provided with a wire hole (20) from front to back, and the control wire (10) passes through the wire hole (20). The rear end of the base (2) is provided with a positioning hole (21), and the rear end of the wire hole (20) is connected to the positioning hole (21). An operating rod (22) is provided in the positioning hole (21), and the rear end of the control wire (10) enters the positioning hole (21) and is connected to the operating rod (22).
8. The optical scanning device based on MEMS micromirror according to claim 7, It is characterized in that The positioning hole (21) is filled with a spring (23), the rear end of the operating rod (22) passes through the rear end of the base (2), a limiting plate (24) is fixed to the rear end of the positioning hole (21), the spring (23) is sleeved on the operating rod (22), and the rear end of the spring (23) is pressed against the limiting plate (24).