Solar panel passivation control process and equipment thereof

Abstract

The invention discloses a solar panel passivation control process and equipment thereof, and the solar panel passivation control process comprises the following passivation steps: placing a solar panel to be passivated in a reaction box, introducing trimethylaluminum into the reaction box, and continuously introducing ozone into the reaction box for reaction after the trimethylaluminum is introduced; after the reaction is performed for a specified time, vacuumizing the reaction box; after vacuumizing is completed, trimethylaluminum and ozone are sequentially introduced into the reaction box, and the step S1 and the step S2 are repeated for multiple times till the reaction is completed. According to the preparation technology, the passivation reaction can be more sufficient, and the passivation effect is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of solar panels, and more particularly to a solar panel passivation control process and equipment thereof. Background Art

[0002] Solar cells are semiconductor devices that convert sunlight directly into electrical energy. As they are green and environmentally friendly products that do not cause environmental pollution and utilize renewable resources, solar cells have broad development prospects in today's energy shortage situation.

[0003] Back passivation is to sequentially generate aluminum oxide and silicon nitride films on the back of the silicon wafer to prepare a passivation layer to form a back passivated battery, which can reduce the recombination of carriers on the back of the battery, increase the carrier life, and thus improve the conversion efficiency of the battery. However, when performing back passivation, TMA and ozone are directly introduced into the reaction box, but this method will make the reaction incomplete and the passivation effect poor.

[0004] Therefore, it is an urgent problem for those skilled in the art to develop a solar panel passivation control process and equipment that can fully react and have good passivation effect. Summary of the invention

[0005] In view of this, the present invention provides a solar panel passivation control process and equipment that can fully react and have good passivation effect.

[0006] In order to achieve the above object, the present invention adopts the following technical solution:

[0007] A solar panel passivation control process includes the following passivation steps:

[0008] S1, first placing the solar panel to be passivated in a reaction box, first introducing trimethylaluminum into the reaction box, and then continuing to introduce ozone into the reaction box for reaction after the trimethylaluminum is introduced;

[0009] S2, after the specified reaction time, the reaction box is evacuated;

[0010] S3, after the vacuuming is completed, trimethylaluminum and ozone are introduced into the reaction box in sequence, and steps S1 and S2 are repeated multiple times until the reaction is complete.

[0011] The beneficial effect of adopting the above technical solution is that the invention repeatedly ventilates and vacuumizes the gas in the reaction box, thereby improving the passivation effect.

[0012] Preferably, in step S1, the time for introducing trimethylaluminum is 5 s, and the time for introducing ozone is 10 s.

[0013] Preferably, when the reaction box is evacuated in step S2, the evacuation is performed intermittently.

[0014] Preferably, when the reaction box is evacuated, first extract for 5 seconds, stop for 5 seconds, then extract for 10 seconds, stop for 5 seconds, then extract for 20 seconds, stop for 5 seconds, then extract for 40 seconds, stop for 5 seconds, and the extraction time increases successively until the gas in the reaction box is completely extracted and then stops. Intermittent vacuuming can make the gas in the reaction box circulate and improve the passivation effect.

[0015] Preferably, a pressure sensor is provided in the reaction box, and during vacuuming, when the pressure sensor detects that the pressure in the reaction box reaches a set pressure value, vacuuming is stopped. The provision of the pressure sensor can improve the accuracy of vacuuming.

[0016] Preferably, the temperature in the reaction box is set at 200°C-400°C.

[0017] A solar panel passivation device includes: a first ventilation pipe, a second ventilation pipe and a vacuum pump, wherein the first ventilation pipe, the second ventilation pipe and the vacuum pump are all connected to the interior of a reaction box; the first ventilation pipe is connected to a trimethylaluminum gas storage bottle, and the second ventilation pipe is connected to an ozone gas storage bottle.

[0018] Preferably, the reaction box is provided with a first air inlet nozzle and a second air inlet nozzle; the first air inlet nozzle is connected to the first ventilation pipe, and the second air inlet nozzle is connected to the second ventilation pipe. The first air inlet nozzle and the second air inlet nozzle facilitate the introduction of gas into the reaction box.

[0019] Preferably, a vacuum pumping plate is provided inside the reaction box, the vacuum pumping plate is connected to the vacuum pump, and the surface of the vacuum pumping plate is in an arc shape that is concave toward the inside; the surface of the vacuum pumping plate is provided with pumping holes.

[0020] Preferably, the position of the suction hole on the surface of the vacuum suction plate is rotatably connected with a suction nozzle, and the rotation of the suction nozzle facilitates the adjustment of the angle of the suction nozzle.

[0021] It can be seen from the above technical solution that, compared with the prior art, the present invention discloses a solar panel passivation control process and equipment thereof, the beneficial effect of which is that the present invention increases the fluidity of the gas in the reaction box and improves the passivation effect by multiple ventilation and vacuuming and repeated extraction during vacuuming. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0023] Figure 1 This is a schematic diagram of the internal structure of the passivation device provided by the present invention.

[0024] Among them, in the figure,

[0025] 1-reaction box; 2-first air inlet nozzle; 3-second air inlet nozzle; 4-vacuum exhaust plate; 5-exhaust nozzle. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] The embodiment of the present invention discloses a solar panel passivation control process, which includes the following passivation steps:

[0028] S1, first place the solar panel to be passivated in a reaction box 1, first introduce trimethylaluminum into the reaction box 1, and then continue to introduce ozone into the reaction box 1 for reaction after the trimethylaluminum is introduced;

[0029] S2, after the specified reaction time, the reaction box 1 is evacuated;

[0030] S3, after the vacuuming is completed, trimethylaluminum and ozone are introduced into the reaction box 1 in sequence, and steps S1 and S2 are repeated multiple times until the reaction is complete.

[0031] In order to further optimize the above technical solution, in step S1, the introduction time of trimethylaluminum is 5 s, and the introduction time of ozone is 10 s.

[0032] In order to further optimize the above technical solution, when the reaction box 1 is evacuated in step S2, the extraction is performed intermittently.

[0033] In order to further optimize the above technical solution, when evacuating the reaction box 1, first extract for 5 seconds, stop for 5 seconds, then extract for 10 seconds, stop for 5 seconds, then extract for 20 seconds, stop for 5 seconds, then extract for 40 seconds, stop for 5 seconds, and the extraction time increases successively until the gas in the reaction box 1 is completely extracted and then stops.

[0034] In order to further optimize the above technical solution, a pressure sensor is provided in the reaction box 1. When the pressure sensor detects that the pressure in the reaction box 1 reaches the pressure setting value during vacuuming, the vacuuming is stopped. The pressure sensor detects the real-time pressure in the reaction box 1 and can accurately determine whether the vacuuming process is completed.

[0035] In order to further optimize the above technical solution, the temperature in the reaction box 1 is set at 200°C-400°C.

[0036] A solar panel passivation device comprises: a first ventilation pipe, a second ventilation pipe and a vacuum pump, wherein the first ventilation pipe, the second ventilation pipe and the vacuum pump are all connected to the interior of a reaction box 1; the first ventilation pipe is connected to a trimethylaluminum gas storage bottle, and the second ventilation pipe is connected to an ozone gas storage bottle.

[0037] In order to further optimize the above technical solution, a first air inlet nozzle 2 and a second air inlet nozzle 3 are provided in the reaction box 1; the first air inlet nozzle 2 is connected to the first ventilation pipe, and the second air inlet nozzle 3 is connected to the second ventilation pipe.

[0038] In order to further optimize the above technical solution, a vacuum pumping plate 4 is arranged inside the reaction box 1. The vacuum pumping plate 4 is connected to the vacuum pump. The surface of the vacuum pumping plate 4 is in an arc shape that is concave toward the inside. The surface of the vacuum pumping plate 4 is provided with pumping holes.

[0039] In order to further optimize the above technical solution, the position of the surface exhaust hole of the vacuum exhaust plate 4 is rotatably connected with an exhaust nozzle 5. The exhaust nozzle 5 is spherical, which is convenient for rotation and swinging its angle.

[0040] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0041] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A solar panel passivation control process, characterized in that: The passivation steps include: S1, first placing the solar panel to be passivated in a reaction box (1), first introducing trimethylaluminum into the reaction box (1), and then continuing to introduce ozone into the reaction box (1) for reaction after the trimethylaluminum has been introduced; S2, after a specified reaction time, evacuating the reaction box (1); S3, after the vacuuming is completed, trimethylaluminum and ozone are introduced into the reaction box (1) in sequence, and steps S1 and S2 are repeated multiple times until the reaction is complete.

2. A solar panel passivation control process according to claim 1, characterized in that: In step S1, the time for introducing trimethylaluminum is 5 s, and the time for introducing ozone is 10 s.

3. A solar panel passivation control process according to claim 1, characterized in that: When the reaction box (1) is evacuated in step S2, the evacuation is performed intermittently.

4. A solar panel passivation control process according to claim 3, characterized in that: When evacuating the reaction box (1), first evacuate for 5 seconds, stop for 5 seconds, then evacuate for 10 seconds, stop for 5 seconds, then evacuate for 20 seconds, stop for 5 seconds, then evacuate for 40 seconds, stop for 5 seconds, and the evacuation time increases successively until the evacuation of the gas in the reaction box (1) is completed and then the evacuation is stopped.

5. A solar panel passivation control process according to claim 4, characterized in that: A pressure sensor is provided in the reaction box (1). During vacuuming, when the pressure sensor detects that the pressure in the reaction box (1) reaches a set pressure value, vacuuming is stopped.

6. A solar panel passivation control process according to claim 1, characterized in that: The temperature in the reaction box (1) is set at 200°C-400°C.

7. A solar panel passivation device, characterized in that: include: A first ventilation pipe, a second ventilation pipe and a vacuum pump, wherein the first ventilation pipe, the second ventilation pipe and the vacuum pump are all connected to the interior of the reaction box (1); the first ventilation pipe is connected to a trimethylaluminum gas storage bottle, and the second ventilation pipe is connected to an ozone gas storage bottle.

8. A solar panel passivation device according to claim 7, characterized in that: A first air inlet nozzle (2) and a second air inlet nozzle (3) are arranged in the reaction box (1); the first air inlet nozzle (2) is connected to the first ventilation pipe, and the second air inlet nozzle (3) is connected to the second ventilation pipe.

9. A solar panel passivation device according to claim 8, characterized in that: A vacuum pumping plate (4) is arranged inside the reaction box (1), the vacuum pumping plate (4) is connected to the vacuum pump, the surface of the vacuum pumping plate (4) is in an arc shape that is concave toward the inside; and the surface of the vacuum pumping plate (4) is provided with pumping holes.

10. A solar panel passivation device according to claim 9, characterized in that: The position of the suction holes on the surface of the vacuum suction plate (4) is rotatably connected to a suction nozzle (5).

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