Special gas system testing equipment

Abstract

The invention discloses special gas system test equipment, which comprises at least one first test cabinet and at least one second test cabinet, and is characterized in that the first test cabinet and the second test cabinet are respectively provided with a corresponding helium mass spectrometer leak detector; the first test cabinet and the second test cabinet have the same configuration, and the first test cabinet or the second test cabinet is provided with a particle meter, a moisture meter and an oxygen meter. According to the invention, five tests are realized, and the condition that a test instrument or a test pipeline joint is continuously switched manually is avoided; at least one first test cabinet and at least one second test cabinet are arranged, according to the design scheme, one first test cabinet and one second test cabinet are standby, the other first test cabinet and the other second test cabinet are used and can be switched mutually, two moisture testers, two oxygen testers, two particle testers, two helium test mass spectrometers and the like are arranged and can conduct testing work at the same time, and if one side is damaged, the other side can be seamlessly connected, and normal production testing is completed.

Description

Technical Field

[0001] The invention relates to a test device for a special gas system, in particular to a test device for a special gas system, and belongs to the technical field of special gas equipment detection. Background Art

[0002] With the rapid development of semiconductor, photovoltaic and other industries, semiconductor factories are being newly built or expanded in large numbers, and the demand for various special gas conveying equipment is also increasing. However, on the one hand, the process has more stringent requirements on gas purity, and on the other hand, many process gases are toxic, harmful or flammable and explosive media, so it is necessary to detect the tightness of the pipeline of the conveying equipment and the purity of the environment inside the pipe. There are basically five items for the detection of special gas systems, especially for conveying equipment, namely moisture detection, oxygen detection, particle detection, helium detection and pressure maintenance test.

[0003] Most of the existing practices are manual operations. After the conveying equipment is assembled, workers will use instruments to gradually test the equipment management. When one item is completed, the instrument will be replaced for the next test. The steps are cumbersome, time-consuming and laborious. There are also automatic testing machines for testing operations, but the existing testing equipment has a relatively single function, and the number of equipment that can be tested at one time is limited. Although it has accelerated efficiency to a certain extent, in today's rapid technological development and iteration, the function and efficiency of this type of testing equipment are not satisfactory; especially the pressure holding test and helium test are actually completed by manpower, but the manual operation may cause secondary contamination of the equipment pipeline during the test switching process, resulting in subsequent unqualified tests and re-testing. This is time-consuming and labor-intensive, which leads to a lot of invisible cost increases; and the standby switching situation is not taken into account. If an instrument is damaged, the production test can only be stopped and the instrument can be repaired. This wastes a lot of time and seriously slows down the delivery progress; and the current test equipment does not have integrated control, and operators need to walk back and forth to test, which is not conducive to improving operational efficiency. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a special gas system testing device, which solves the problems of low detection efficiency and easy contamination risk of existing special gas system equipment.

[0005] The technical problem to be solved by the present invention is achieved by adopting the following technical solutions:

[0006] The present invention provides a special gas system testing device, comprising at least one first testing cabinet and at least one second testing cabinet, wherein:

[0007] The first test cabinet and the second test cabinet are both provided with corresponding helium mass spectrometer leak detectors;

[0008] The first test cabinet has the same configuration as the second test cabinet, wherein:

[0009] The first test cabinet or the second test cabinet is provided with a particle meter, a moisture meter and an oxygen meter.

[0010] As a preferred technical solution of the present invention, a vacuum pump, a vacuum tank and a purifier are also provided in the first test cabinet or the second test cabinet.

[0011] As a preferred technical solution of the present invention, a test disk is further provided in the first test cabinet or the second test cabinet.

[0012] As a preferred technical solution of the present invention, the test disk includes valves, pipelines and instruments.

[0013] As a preferred technical solution of the present invention, a printer is also provided in the first test cabinet or the second test cabinet.

[0014] As a preferred technical solution of the present invention, a helium spray gun is further provided in the first test cabinet or the second test cabinet.

[0015] As a preferred technical solution of the present invention, a barcode scanner is further provided in the first test cabinet or the second test cabinet.

[0016] As a preferred technical solution of the present invention, the test includes the following steps:

[0017] Step S1, after the gas source, the equipment to be tested and the exhaust pipeline are connected, the power signal is connected, and the software is imported, the manual valve in the system is opened, the system can be started, and the instrument parameters are set; when the test instrument is under maintenance, the test instrument is continuously purged; when the pressure in the vacuum tank is lower than the set value, the vacuum pump PUMP starts, and when it is higher, it stops; press the start test button on the operation control box to start the test process;

[0018] Step S2, perform PN2 long blowing: the pneumatic valves P1A and V1A are opened, the gas source enters and exits from MIV, passes through the purifier and the equipment to be tested S1-S3, and flows out from NV1, and is set to last for 10 minutes;

[0019] Step S3, positive pressure maintenance: after the long blow is completed, first close V1A and then close P1A, and perform positive pressure maintenance on the devices S1 to S3 to be tested for 3 minutes; the positive pressure is monitored by the pressure transmitter PT3A;

[0020] Step S4, negative pressure maintenance: after the positive pressure maintenance is completed, turn on B1A and TINA, and use the vacuum pump PUMP to pump the device under test into negative pressure, and the negative pressure maintenance lasts for 3 minutes; the negative pressure is monitored by the vacuum pressure gauge VG2;

[0021] Step S5, perform helium inspection: after the negative pressure is maintained, the vacuum pump PUMP continues to pump for a period of time. After reaching the set value of the vacuum pressure gauge VG2, B1A and TINA are closed, and H1A, H1AA, and HINA are opened. The helium leak detector continues to pump negative pressure. After reaching the set value, a helium spray gun is used to spray each interface of the inspected equipment for helium inspection.

[0022] Step S6, positive pressure maintenance: After the helium test is completed, positive pressure maintenance is performed. At this time, H1A, H1AA, and HINA are closed, and PIA is opened. When the pressure in the tested equipment S1-S3 reaches the set value, PIA is closed and the pressure is maintained for 24 hours;

[0023] Step S7, pulse inching: after the positive pressure is maintained, PIA and V1 are turned on, and nitrogen passes through the detected equipment S1-S3, performs nitrogen pulse purging, and flows out from NV1;

[0024] Step S8, PN2 purge: After the pulse inching is completed, the pneumatic valves P1A and V1A are opened, the gas source enters and exits from MIV, passes through the purifier and the equipment to be tested S1~S3, and flows out from NV1;

[0025] Step S9, water, oxygen, and particle test: After the PN2 purge is completed, turn on T1A, W1AA, W1A, O1AA, O1A, R1AA, R1A, and three test instruments in parallel for testing. The exhaust gas flows out from HMV, OMV, and RMV.

[0026] Step S10, pressurizing: After the test is completed, close T1A, W1AA, W1A, O1AA, O1A, R1AA, R1A, open PIA to pressurize the device under test, and remove it after completion.

[0027] Preferably, HIBB is the standby side and W1BA is the backup side.

[0028] The beneficial effects of the present invention are as follows: the present invention realizes five tests, namely, moisture test, oxygen test, particle test, pressure holding test and helium detection test, which are automatically completed one by one, avoiding the situation of manually switching test instruments or test pipe joints, and eliminating the problem of contamination rework caused by misoperation; at least one of the first test cabinet and the second test cabinet is set, and the design scheme is a mode of one backup and one use, which can be switched with each other. There are two sets of moisture tester, oxygen tester, particle tester, helium detection mass spectrometer, etc., which can carry out testing work at the same time. If one side is damaged, the other side can be seamlessly connected to complete normal production testing; up to 30 sets of equipment can be automatically tested at one time, and the test efficiency is improved by 6 times compared with the ability of the old three-item test equipment to test up to 5 sets at the same time; the equipment is equipped with an operation control box, which can perform a single special corresponding operation on the equipment under test, such as test start, test termination, etc. The operation control box is equipped with a code scanning gun, a helium detection spray gun, a nitrogen gas circuit dial, etc. The nitrogen gas circuit board can be used to open the pneumatic valve of the equipment to be tested on site, so that the pipeline of the equipment to be tested can be connected. The barcode scanner records the information of the equipment to be tested, and the helium inspection gun is used to spray helium for helium inspection. It saves the operator's time to operate the equipment back and forth, and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is one of the structural schematic diagrams of the present invention;

[0031] Figure 2 This is the second structural schematic diagram of the present invention;

[0032] Figure 3 This is the third structural schematic diagram of the present invention;

[0033] Figure 4 This is the fourth structural schematic diagram of the present invention;

[0034] Figure 5 This is one of the pipeline connection schematic diagrams of the present invention;

[0035] Figure 6 for Figure 5 or Fig.10 One of the partial schematic diagrams;

[0036] Figure 7 for Figure 5 or Fig.10 One of the partial schematic diagrams;

[0037] Figure 8 for Figure 5 or Fig.10 One of the partial schematic diagrams;

[0038] Fig. 9 for Figure 5 or Fig.10One of the partial schematic diagrams;

[0039] Fig.10 This is the second schematic diagram of pipeline connection of the present invention;

[0040] In the figure: 1, first test cabinet; 2, second test cabinet; 3, helium mass spectrometer leak detector; 21, vacuum pump; 22, vacuum tank; 23, purifier; 24, particle analyzer; 25, oxygen analyzer; 26, moisture analyzer; 27, printer. DETAILED DESCRIPTION

[0041] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0042] Example

[0043] like Figure 1-10 As shown, this embodiment provides a special gas system testing device, including at least one first test cabinet 1 and at least one second test cabinet 2, wherein the first test cabinet 1 and the second test cabinet 2 are both provided with corresponding helium mass spectrometer leak detectors 3;

[0044] The first test cabinet 1 and the second test cabinet 2 have the same configuration. In this embodiment, a particle meter 24 , a moisture meter 25 and an oxygen meter 26 are provided on the first test cabinet 1 or the second test cabinet 2 .

[0045] A vacuum pump 21 , a vacuum tank 22 and a purifier 23 are also provided in the first test cabinet 1 or the second test cabinet 2 .

[0046] A test panel is also provided in the first test cabinet 1 or the second test cabinet 2, and the test panel includes valves, pipes and instruments.

[0047] A printer 27 is also provided in the first test cabinet 1 or the second test cabinet 2 .

[0048] A helium spray gun is also provided in the first test cabinet 1 or the second test cabinet 2, and a barcode scanning gun is also provided in the first test cabinet 1 or the second test cabinet 2; the barcode scanning gun records the information of the device to be tested, and the helium inspection gun is used to spray helium for helium inspection.

[0049] Furthermore, the test includes the following steps:

[0050] Step S1, after the gas source, the equipment to be tested and the exhaust pipeline are connected, the power signal is connected, and the software is imported, the manual valve in the system is opened, the system can be started, and the instrument parameters are set; when the test instrument is under maintenance, the test instrument is continuously purged; when the pressure in the vacuum tank is lower than the set value, the vacuum pump PUMP starts, and when it is higher, it stops; press the start test button on the operation control box to start the test process;

[0051] Step S2, perform PN2 long blowing: the pneumatic valves P1A and V1A are opened, the gas source enters and exits from MIV, passes through the purifier and the equipment to be tested S1-S3, and flows out from NV1, and is set to last for 10 minutes;

[0052] Step S3, positive pressure maintenance: after the long blow is completed, first close V1A and then close P1A, and perform positive pressure maintenance on the devices S1 to S3 to be tested for 3 minutes; the positive pressure is monitored by the pressure transmitter PT3A;

[0053] Step S4, negative pressure maintenance: after the positive pressure maintenance is completed, turn on B1A and TINA, and use the vacuum pump PUMP to pump the device under test into negative pressure, and the negative pressure maintenance lasts for 3 minutes; the negative pressure is monitored by the vacuum pressure gauge VG2;

[0054] Step S5, perform helium inspection: after the negative pressure is maintained, the vacuum pump PUMP continues to pump for a period of time. After reaching the set value of the vacuum pressure gauge VG2, B1A and TINA are closed, and H1A, H1AA, and HINA are opened. The helium leak detector continues to pump negative pressure. After reaching the set value, a helium spray gun is used to spray each interface of the inspected equipment for helium inspection.

[0055] Step S6, positive pressure maintenance: After the helium test is completed, positive pressure maintenance is performed. At this time, H1A, H1AA, and HINA are closed, and PIA is opened. When the pressure in the tested equipment S1-S3 reaches the set value, PIA is closed and the pressure is maintained for 24 hours;

[0056] Step S7, pulse inching: after the positive pressure is maintained, PIA and V1 are turned on, and nitrogen passes through the detected equipment S1-S3, performs nitrogen pulse purging, and flows out from NV1;

[0057] Step S8, PN2 purge: After the pulse inching is completed, the pneumatic valves P1A and V1A are opened, the gas source enters and exits from MIV, passes through the purifier and the equipment to be tested S1~S3, and flows out from NV1;

[0058] Step S9, water, oxygen, and particle test: After the PN2 purge is completed, turn on T1A, W1AA, W1A, O1AA, O1A, R1AA, R1A, and three test instruments in parallel for testing. The exhaust gas flows out from HMV, OMV, and RMV.

[0059] Step S10, pressurizing: after the test is completed, close T1A, W1AA, W1A, O1AA, O1A, R1AA, R1A, open PIA to pressurize the tested device, and remove it after completion;.

[0060] Specifically, the present invention realizes five tests, namely, moisture test, oxygen test, particle test, pressure holding test and helium detection test, which are automatically completed one by one, avoiding the situation of manually switching test instruments or test pipe joints, and eliminating the problem of contamination rework caused by misoperation; at least one first test cabinet and one second test cabinet are set, and the design scheme is a mode of one backup and one use, which can be switched with each other. There are two sets of moisture tester, oxygen tester, particle tester, helium detection mass spectrometer, etc., which can carry out testing work at the same time. If one side is damaged, the other side can be seamlessly connected to complete normal production testing; up to 30 sets of equipment can be automatically tested at one time, compared with the old three-item test equipment that can test up to 5 sets at the same time, the test efficiency is improved by 6 times; this equipment is equipped with an operation control box, which can perform a single special corresponding operation on the equipment under test, such as test start, test termination, etc. The operation control box is equipped with a barcode scanner, a helium detection spray gun, a nitrogen gas circuit dial, etc. The nitrogen gas circuit board can be used to open the pneumatic valve of the equipment to be tested on site, so that the pipeline of the equipment to be tested can be connected. The barcode scanner records the information of the equipment to be tested, and the helium inspection gun is used to spray helium for helium inspection. It saves the operator's time to operate the equipment back and forth, and improves work efficiency.

[0061] The basic principles, main features and advantages of the present invention are shown and described above. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A special gas system testing equipment, characterized in that: The invention comprises at least one first test cabinet (1) and at least one second test cabinet (2), wherein: The first test cabinet (1) and the second test cabinet (2) are both provided with corresponding helium mass spectrometer leak detectors (3); The first test cabinet (1) and the second test cabinet (2) have the same configuration, wherein: The first test cabinet (1) or the second test cabinet (2) is provided with a particle meter (24), a moisture meter (25) and an oxygen meter (26).

2. A special gas system testing equipment according to claim 1, characterized in that: A vacuum pump (21), a vacuum tank (22) and a purifier (23) are also provided in the first test cabinet (1) or the second test cabinet (2).

3. A special gas system testing equipment according to claim 1, characterized in that: A test disk is also provided in the first test cabinet (1) or the second test cabinet (2).

4. A special gas system testing equipment according to claim 3, characterized in that: The test panel includes valves, pipelines and instruments.

5. A special gas system testing equipment according to claim 1, characterized in that: A printer (27) is also provided in the first test cabinet (1) or the second test cabinet (2).

6. A special gas system testing equipment according to claim 1, characterized in that: A helium spray gun is also provided in the first test cabinet (1) or the second test cabinet (2).

7. A special gas system testing equipment according to claim 1, characterized in that: A barcode scanning gun is also provided in the first test cabinet (1) or the second test cabinet (2).

8. A special gas system testing equipment according to claim 1, characterized in that: The test includes the following steps: Step S1, after the gas source, the equipment to be tested and the exhaust pipeline are connected, the power signal is connected, and the software is imported, the manual valve in the system is opened, the system can be started, and the instrument parameters are set; when the test instrument is under maintenance, the test instrument is continuously purged; when the pressure in the vacuum tank is lower than the set value, the vacuum pump PUMP starts, and when it is higher, it stops; press the start test button on the operation control box to start the test process; Step S2, perform PN2 long blowing: pneumatic valves P1A and V1A are opened, the gas source enters and exits from MIV, passes through the purifier and the equipment to be tested S1-S3, and flows out from NV1, and is set to last for 10 minutes; Step S3, positive pressure maintenance: after the long blow is completed, first close V1A and then close P1A, and perform positive pressure maintenance on the devices S1 to S3 to be tested for 3 minutes; the positive pressure is monitored by the pressure transmitter PT3A; Step S4, negative pressure maintenance: after the positive pressure maintenance is completed, turn on B1A and TINA, and use the vacuum pump PUMP to pump the device under test into negative pressure, and the negative pressure maintenance lasts for 3 minutes; the negative pressure is monitored by the vacuum pressure gauge VG2; Step S5, perform helium inspection: after the negative pressure is maintained, the vacuum pump PUMP continues to pump for a period of time. After reaching the set value of the vacuum pressure gauge VG2, B1A and TINA are closed, and H1A, H1AA, and HINA are opened. The helium leak detector continues to pump negative pressure. After reaching the set value, a helium spray gun is used to spray each interface of the inspected equipment for helium inspection. Step S6, positive pressure maintenance: After the helium test is completed, positive pressure maintenance is performed. At this time, H1A, H1AA, and HINA are closed, and PIA is opened. When the pressure in the tested equipment S1-S3 reaches the set value, PIA is closed and the pressure is maintained for 24 hours; Step S7, pulse inching: after the positive pressure maintenance is completed, PIA and V1 are turned on, and nitrogen passes through the detected equipment S1~S3, performs nitrogen pulse purging, and flows out from NV1; Step S8, PN2 purge: After the pulse inching is completed, the pneumatic valves P1A and V1A are opened, the gas source enters and exits from MIV, passes through the purifier and the equipment to be tested S1~S3, and flows out from NV1; Step S9, water, oxygen, and particle test: After the PN2 purge is completed, turn on T1A, W1AA, W1A, O1AA, O1A, R1AA, R1A, and three test instruments in parallel for testing. The exhaust gas flows out from HMV, OMV, and RMV. Step S10, charging: After the test is completed, close T1A, W1AA, W1A, O1AA, O1A, R1AA, R1A, open PIA to charge the tested device, and remove it after completion.

9. A special gas system testing equipment according to claim 8, characterized in that: HIBB is the standby side and W1BA is the backup side.

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