Polishing head with viscoelastic fluid-polishing solution dielectrophoresis composite effect

Abstract

The invention discloses a polishing head with a viscoelastic fluid-polishing solution dielectrophoresis composite effect, which is characterized in that an insulating layer is arranged on the inner side of flexible polishing cloth, and a viscoelastic fluid is filled between the insulating layer and an amplification table; and a positive electrode and a negative electrode which can generate a non-uniform electric field after being matched for use are arranged in the insulating layer. When the polishing head works, a non-uniform electric field is generated, so that a polishing solution generates a dielectrophoresis effect, abrasive particles in the polishing solution are effectively prevented from flowing out of a machining area under the centrifugal force action of the polishing disc, the number of the abrasive particles is increased, the residence time of the abrasive particles in the machining area is prolonged, and the polishing efficiency and the polishing solution distribution uniformity are improved; the flexible deformation of the viscoelastic fluid enables the load of a processing area to be uniformly dispersed, so that the surface uniformity of a processed workpiece is improved, the problems of low surface type fitting capability and poor surface uniformity of a tool in curved surface polishing are solved, and meanwhile, the viscoelastic fluid responds to the vibration frequency to increase the viscosity and convert the viscosity into an elastic solid to provide the pressure required during polishing, so that the polishing efficiency is improved. And efficient removal of materials is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of precision machining, in particular to a polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect. Background Art

[0002] Polishing is the last process of high-precision and high-quality surface processing of parts. After polishing, the performance and service life of the product can be improved. Therefore, the high-efficiency, high-precision and high-quality polishing technology of the surface of parts, especially large-sized surfaces, has always been the research focus in the field of ultra-precision machining. At present, the polishing methods for obtaining high-quality and high-precision parts processing surfaces mainly include magnetorheological polishing, shear thickening fluid polishing, abrasive flow polishing, abrasive water jet polishing, ion beam polishing, airbag polishing, computer-controlled elastic small polishing head polishing technology, etc. Among them, the computer-controlled elastic small polishing head polishing technology can realize the surface shape control of large-sized workpieces, and can make full use of the advantages of high computer repetition accuracy and fast execution speed. It is widely used in polishing large-sized surfaces of parts. However, the realization of this technology mainly depends on the fit between the elastic polishing head and the workpiece surface and the uniformity of the polishing liquid distribution in the working area; the traditional elastic polishing head still has the problem of poor surface fit ability, which affects the load distribution in the processing area; at the same time, the polishing liquid in the processing area is affected by the centrifugal force generated by the high-speed rotation of the elastic small grinding head, and the distribution is uneven and cannot be fully utilized.

[0003] How to solve the problem of the fit between the small grinding head and the part processing surface in the traditional computer-controlled elastic small grinding head polishing technology, improve the load distribution in the processing area, and improve the distribution uniformity and utilization rate of the polishing liquid in the processing area has become an urgent problem to be solved. Summary of the invention

[0004] In order to overcome the deficiencies in the prior art, the present invention provides a polishing head with a viscoelastic fluid-polishing liquid dielectrophoresis composite effect. The polishing head can generate a non-uniform electric field when working, causing the polishing liquid to produce a dielectrophoresis effect, effectively slowing down the abrasive particles in the polishing liquid from flowing out of the processing area under the centrifugal force of the polishing disk, increasing the residence time of the abrasive particles in the processing area and the number of abrasive particles, improving the polishing efficiency and the uniformity of the distribution of the polishing liquid, and the flexible deformation of the viscoelastic fluid therein makes the load in the processing area evenly dispersed, thereby improving the uniformity of the workpiece surface after processing, solving the problems of low tool face fitting ability and poor surface uniformity in curved surface polishing, and at the same time, the viscoelastic fluid will respond to the vibration frequency to increase viscosity and transform into an elastic solid, providing the pressure required for polishing and ensuring efficient material removal.

[0005] The technical solution of the present invention is as follows:

[0006] A polishing head with a viscoelastic fluid-polishing liquid dielectrophoresis composite effect comprises a connecting shaft, on which a conductive slip ring is sleeved; a cylindrical polishing head main body bracket is provided at the lower end of the connecting shaft, and a connecting base is coaxially provided in the polishing head main body bracket; the connecting base is in a stepped shaft shape with a larger upper portion and a smaller lower portion, and its larger end is fixedly connected to the polishing head main body bracket, and its smaller end is connected to a hollow vibration amplifier; the hollow vibration amplifier comprises a hollow tube and an amplifier platform provided at the lower end of the hollow tube, the hollow tube and the amplifier platform form a stepped structure, a vibration motor is provided in the hollow tube, and the vibration motor is electrically connected to the output end of the conductive slip ring; a flexible polishing cloth is provided at the lower end of the polishing head main body bracket, and an insulating layer is provided on the inner side of the flexible polishing cloth; a viscoelastic fluid is filled between the insulating layer and the amplifier platform; a positive electrode and a negative electrode are provided in the insulating layer, and the positive electrode and the negative electrode are electrically connected to the two output ends of the conductive slip ring respectively, and the positive electrode and the negative electrode can generate a non-uniform electric field when used in combination.

[0007] Compared with the prior art, the polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect of the present invention adopts a specific structure, and under the synergistic effect of the shear thickening effect of the viscoelastic fluid and the dielectrophoresis effect of the polishing liquid, the polishing accuracy and polishing efficiency are improved, and significant progress is achieved, as follows:

[0008] 1) The insulating layer inside the flexible polishing cloth is provided with positive and negative electrodes that can generate a non-uniform electric field. During operation, the non-uniform electric field polarizes the abrasive particles in the polishing liquid. Under the action of the dielectrophoretic force, the abrasive particles in the polishing liquid are effectively slowed down from flowing out of the processing area due to the centrifugal force of the polishing disk, increasing the residence time and number of abrasive particles in the processing area, thereby improving the polishing efficiency and the uniformity of the polishing liquid distribution;

[0009] 2) A viscoelastic fluid is filled between the insulating layer and the hollow vibration amplifier. During polishing, the flexible deformation of the viscoelastic fluid makes the load in the processing area evenly dispersed, thereby improving the surface uniformity of the workpiece after processing and solving the problems of low tool surface fitting ability and poor surface uniformity in curved surface polishing. At the same time, the vibration motor transmits the vibration to the viscoelastic fluid through the hollow vibration amplifier. The viscoelastic fluid responds to the vibration frequency and increases in viscosity to be converted into an elastic solid (i.e., a shear thickening effect occurs), providing the pressure required for polishing and ensuring efficient material removal.

[0010] Furthermore, in the aforementioned polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect, the lower side of the amplifier platform is provided with vibration conduction sheets in groups. The provision of the vibration conduction sheets can increase the contact area between the hollow vibration amplifier and the viscoelastic fluid, thereby enhancing the shear thickening effect of the viscoelastic fluid.

[0011] Furthermore, in the aforementioned polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect, a polishing cloth control-shaped bracket is provided between the insulating layer and the amplifier platform. The polishing cloth control-shaped bracket can control the deformation size of the flexible polishing cloth during the operation of the polishing head to ensure the polishing effect. Further, the polishing cloth control-shaped bracket includes a connecting ring and a connecting plate, the connecting ring and the connecting plate are connected as a whole by connecting spokes, and the connecting ring is fixedly connected to the lower end of the main bracket of the polishing head; the flexible polishing cloth is provided with a fixed support plate outside, and the fixed support plate is fixedly connected to the connecting plate, so that the flexible polishing cloth forms an annular convex peak structure. By adding a fixed support plate, the flexible polishing cloth forms an annular convex peak structure, avoiding the phenomenon of insufficient polishing pressure caused by excessive contact area between the flexible polishing cloth and the workpiece, thereby ensuring the accuracy and efficiency of polishing. Further, in the aforementioned polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect, the flexible polishing cloth and the polishing cloth control-shaped bracket are pressed and fixed by a polishing cloth annular fixing sleeve. The flexible polishing cloth is fixed by using the polishing cloth annular fixing sleeve, which ensures that the polishing cloth is firmly fixed and facilitates the installation or replacement of the polishing cloth.

[0012] Furthermore, in the aforementioned polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect, the connecting spokes are provided with channel holes for the viscoelastic fluid to flow. When the flexible polishing cloth squeezes the connecting spokes during operation, the viscoelastic fluid can flow through the channel holes, which plays a role in pressure relief, thereby preventing the connecting spokes from being subjected to excessive pressure and causing damage.

[0013] Furthermore, in the aforementioned polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect, the positive electrode and the negative electrode have different widths. Using positive and negative electrodes of different widths to generate a non-uniform electric field has the advantage of being easy to implement.

[0014] Furthermore, in the aforementioned polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect, the positive electrode is provided with a toothed structure. The toothed structure is provided on the surface of the positive electrode to give it an irregular surface, thereby increasing the non-uniformity of the electric field and thereby effectively improving the dielectrophoresis effect of the polishing liquid.

[0015] Furthermore, in the aforementioned polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect, a boss is provided on the positive electrode. The boss is provided on the surface of the positive electrode so that it has an irregular surface, thereby increasing the non-uniformity of the electric field, and can also effectively improve the dielectrophoresis effect of the polishing liquid, thereby increasing the residence time of the abrasive particles in the polishing area.

[0016] Furthermore, in the aforementioned polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect, the connection base is connected to the hollow vibration amplifier through a coupling. The connection base can transmit torque to the hollow vibration amplifier through the coupling, while allowing a slight deviation between the two axes to avoid damage to the polishing head. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of a polishing head having a viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to the present invention;

[0018] Figure 2 It is a working schematic diagram of the polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect of the present invention;

[0019] Figure 3 It is a schematic diagram of the distribution structure of electrodes in the insulating layer of the polishing head having the viscoelastic fluid-polishing liquid dielectrophoresis composite effect of the present invention;

[0020] Figure 4 It is a schematic diagram of the polishing cloth-controlled bracket structure of the polishing head having the viscoelastic fluid-polishing liquid dielectrophoresis composite effect of the present invention;

[0021] Figure 5 It is a schematic structural diagram of a hollow vibration amplifier of a polishing head having a viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to the present invention;

[0022] Figure 6 It is a simulation result diagram of the relationship between the amplitude of the hollow vibration amplifier of the present invention and its total length and the diameter of the vibration table.

[0023] The markings in the accompanying drawings are: 1-connecting shaft; 2-conductive slip ring; 3-connecting base; 4-polishing head main body bracket; 5-coupling; 6-vibration motor; 7-hollow vibration amplifier; 701-vibration conduction plate; 8-polishing cloth control bracket; 801-connecting ring; 802-connecting plate; 803-connecting spokes; 8031-circulation hole; 9-polishing cloth annular fixing sleeve; 10-flexible polishing cloth; 11-positive electrode; 12-negative electrode; 13-insulating layer; 14-viscoelastic fluid; 15-workpiece; 16-polishing liquid; 17-injection port; 18-fixed support plate; 19-sealing ring; 20-polishing disk. DETAILED DESCRIPTION

[0024] The present invention is further described below in conjunction with the accompanying drawings and embodiments, but they are not intended to serve as the basis of the present invention.

[0025] Example (see Figure 1-6 ):

[0026] In the embodiment, the polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect of the present invention comprises a connecting shaft 1, on which a conductive slip ring 2 is sleeved; a cylindrical polishing head main body bracket 4 is provided at the lower end of the connecting shaft 1, and a connecting base 3 is coaxially provided inside the polishing head main body bracket 4; the connecting base 3 is in the shape of a stepped shaft with a larger upper portion and a smaller lower portion, and its larger end is fixedly connected to the polishing head main body bracket 4, and its smaller end is connected to a hollow vibration amplifier 7; the hollow vibration amplifier 7 comprises a hollow tube and an amplifier platform provided at the lower end of the hollow tube, and the hollow tube and the amplifier are connected to the hollow tube. The platform forms a stepped structure, a vibration motor 6 is arranged in the hollow tube, and the vibration motor 6 is electrically connected to the output end of the conductive slip ring 2; a flexible polishing cloth 10 is arranged at the lower end of the polishing head main body bracket 4, and an insulating layer 13 is arranged on the inner side of the flexible polishing cloth; a viscoelastic fluid 14 is filled between the insulating layer 13 and the amplifier platform; a positive electrode 11 and a negative electrode 12 are arranged in the insulating layer 13, and the positive electrode 11 and the negative electrode 12 are electrically connected to the two output ends of the conductive slip ring 2 respectively, and the positive electrode 11 and the negative electrode 12 are used together to generate a non-uniform electric field.

[0027] During operation, the flexible deformation of the viscoelastic fluid 14 enables the polishing head to better fit the workpiece surface, so that the load in the processing area is evenly distributed; the vibration motor 6 transmits the vibration to the viscoelastic fluid 14 through the hollow vibration amplifier 7, and the vibration causes the viscoelastic fluid 14 to produce a shear thickening effect, changing from a fluid state to an elastic solid, providing the pressure required for polishing. At the same time, the non-uniform electric field between the positive electrode 11 and the negative electrode 12 polarizes the abrasive particles in the polishing liquid 16, and under the action of the electric field force, the abrasive particles move toward the electrode with a large electric field strength and gather near the electrode, thereby effectively slowing down the abrasive particles in the polishing liquid 16 from flowing out of the processing area under the centrifugal force of the polishing disk 20, increasing the residence time and number of abrasive particles in the processing area, and improving the polishing efficiency and the uniformity of the distribution of the polishing liquid 16.

[0028] In the embodiment, the lower side of the amplifier platform is provided with a group of vibration conductive sheets 701. The provision of the vibration conductive sheets 701 can increase the contact area between the hollow vibration amplifier 7 and the viscoelastic fluid 14, thereby enhancing the shear thickening effect of the viscoelastic fluid 14.

[0029] In the embodiment, a polishing cloth control-shaped bracket 8 is provided between the insulating layer 13 and the amplification platform. The polishing cloth control-shaped bracket 8 can control the deformation of the flexible polishing cloth 10 during the operation of the polishing head to ensure the polishing effect.

[0030] In the embodiment, the polishing cloth control bracket 8 includes a connecting ring 801 and a connecting plate 802, the connecting ring 801 and the connecting plate 802 are connected as a whole through connecting spokes 803, and the connecting ring 801 is fixedly connected to the lower end of the polishing head main body bracket 4; the flexible polishing cloth 10 is provided with a fixed support plate 18, and the fixed support plate 18 is fixedly connected to the connecting plate 802 through a set screw, so that the flexible polishing cloth 10 forms a ring-shaped convex peak structure. By adding the fixed support plate 18, the flexible polishing cloth 10 forms a ring-shaped convex peak structure, avoiding the phenomenon of insufficient polishing pressure caused by excessive contact area between the flexible polishing cloth 10 and the workpiece 15, and ensuring the accuracy and efficiency of polishing.

[0031] In the embodiment, the flexible polishing cloth 10 is pressed and fixed to the polishing cloth control bracket 8 by the polishing cloth annular fixing sleeve 9. The flexible polishing cloth 10 is fixed by the polishing cloth annular fixing sleeve 9, which ensures that the polishing cloth is firmly fixed and facilitates the installation or replacement of the polishing cloth.

[0032] In the embodiment, the connecting spokes 803 are provided with channel holes 8031 ​​for viscoelastic fluid to flow. When the flexible polishing cloth 10 squeezes the connecting spokes 803 during operation, the viscoelastic fluid can flow through the channel holes 8031, which relieves pressure and prevents the connecting spokes 803 from being damaged by excessive pressure.

[0033] In the embodiment, the positive electrode 11 and the negative electrode 12 have different widths, and the width ratio is 1: 2. When the width ratio of the positive electrode to the negative electrode is 1: 2, the generated non-uniform electric field strength can produce a strong polishing liquid dielectrophoresis effect.

[0034] In the embodiment, a tooth-shaped structure is provided on the positive electrode 11. The tooth-shaped structure is provided on the surface of the positive electrode so that it has an irregular surface, thereby increasing the non-uniformity of the electric field, thereby effectively improving the dielectrophoresis effect of the polishing liquid.

[0035] In the embodiment, a boss is provided on the positive electrode 11. The boss is provided on the surface of the positive electrode to make it have an irregular surface, thereby increasing the non-uniformity of the electric field, and can also effectively improve the dielectrophoresis effect of the polishing liquid, thereby increasing the residence time of the abrasive particles in the polishing area.

[0036] In the embodiment, the connection base 3 is connected to the hollow vibration amplifier 7 via a coupling 5. The connection base 3 can better transmit torque to the hollow vibration amplifier 7 via the coupling 5, while allowing a slight deviation between the two shafts to avoid damage to the polishing head.

[0037] In the embodiment, the vibration motor 6 is interference fit with the inner wall of the hollow tube of the hollow vibration amplifier 7 and is fixed by a set screw. The vibration motor 6 and the hollow vibration amplifier 7 can be combined with each other through this fixing structure, which has high reliability and is easy to implement.

[0038] In the embodiment, the total length of the hollow vibration amplifier 7 is 75 mm; the diameter length of the amplifier platform is 45 mm. Figure 6 As shown in the figure, the scatter points are simulation data, the curve is the data fitting curve, and the goodness of fit is 0.98. Among them, the ordinate represents the amplitude of the amplifier, and the abscissa represents the total length of the amplifier and the diameter of the amplifier platform. When the total length of the amplifier is in the range of 0-60 mm, the diameter of the amplifier platform remains unchanged at 10 mm, and the amplitude does not change much at this time; when the total length of the amplifier is in the range of 60-80 mm, the diameter of the amplifier platform remains unchanged at 45 mm, and the amplitude changes greatly at this time. The amplitude continues to increase and reaches the maximum value at 75 mm, at which time the amplitude value reaches -0.025 (the negative sign in the figure represents the direction of vibration), which means that the amplitude is amplified by 2.5 times.

[0039] In the embodiment, a sealing ring 19 is provided between the outer peripheral surface of the amplifier platform and the polishing cloth control-shaped bracket 8. The provision of the sealing ring 19 can prevent the viscoelastic fluid 14 from leaking out during the vibration process, thereby improving the reliability of the polishing head.

[0040] During processing, the workpiece 15 is fixed on the polishing disc 20, the connecting shaft 1 is installed on the rotating shaft of the machine tool and in contact with the workpiece 15, and then the polishing liquid 16 is injected into the polishing processing area from the injection port 17. When the power is turned on, the polishing disc 20 and the polishing head start to rotate, the positive electrode 11 and the negative electrode 12 generate a non-uniform electric field, and the vibration motor 6 starts to vibrate at a medium frequency, wherein the abrasive particles in the polishing liquid 16 are polarized to produce a dielectrophoresis effect, and the hollow vibration amplifier 7 vibrates and shears the viscoelastic fluid 14, so that the viscoelastic fluid 14 produces a shear thickening effect, so that the load in the processing area is evenly dispersed, and the uniformity of the surface of the workpiece after processing is improved. At the same time, the accuracy and efficiency of polishing can also be greatly improved. In the embodiment, the ZLaF75 meniscus lens is used as the processing object, and a polishing disc 20 made of non-woven fabric material is used, and the polishing liquid 16 is a CeO2 aqueous solution with a concentration of 5 wt% (wherein CeO2 particles with a mass percentage concentration of 5 wt% and a particle size of 1 μm are added, and the rest is composed of deionized water). The polishing head has a downward pressure of 1 mm, a polishing disc 20 has a rotation speed of 40 r / min, a polishing head has a rotation speed of 400 r / min, a vibration motor has a vibration frequency of 100 Hz, and a dielectrophoresis voltage amplitude of 3000 V (i.e., the voltage between the positive electrode 11 and the negative electrode 12). According to the above parameters, the meniscus lens is polished for 10 minutes. After polishing, the surface parameters are Ra0.37nm, RMS 0.73nm, PV 7.20 nm, and the surface is uniform and flat. Compared with traditional polishing tools, under the same processing time, under the synergistic effect of the shear thickening effect of the viscoelastic fluid and the dielectrophoresis effect of the polishing liquid, the roughness is reduced by 75% and the surface accuracy is improved by 63%. In summary, polishing using the polishing head with the viscoelastic fluid-polishing liquid dielectrophoresis composite effect of the present invention can improve the efficiency and accuracy of polishing, and at the same time make the surface of the polished workpiece 15 more uniform and flat.

[0041] The above general description of the invention involved in this application and the description of its specific implementation methods should not be understood as limiting the technical solutions of the invention. Based on the disclosure of this application, those skilled in the art can, without violating the constituent elements of the invention involved, add, reduce or combine the disclosed technical features in the above general description or / and specific implementation methods (including examples) to form other technical solutions within the scope of protection of this application.

Claims

1. A polishing head having a viscoelastic fluid-polishing liquid dielectrophoresis composite effect, characterized in that: The invention comprises a connecting shaft (1), wherein a conductive slip ring (2) is sleeved on the connecting shaft (1); a polishing head main body bracket (4) in the form of a cylinder is provided at the lower end of the connecting shaft (1), and a connecting base (3) is coaxially provided inside the polishing head main body bracket (4); the connecting base (3) is in the form of a stepped shaft with a larger upper portion and a smaller lower portion, wherein the larger end of the connecting base (3) is fixedly connected to the polishing head main body bracket (4), and the smaller end of the connecting base (3) is connected to a hollow vibration amplifier (7); the hollow vibration amplifier (7) comprises a hollow tube and an amplifier platform provided at the lower end of the hollow tube, wherein the hollow tube and the amplifier platform form a stepped structure, and a vibration motor is provided inside the hollow tube. (6), the vibration motor (6) is electrically connected to the output end of the conductive slip ring (2); a flexible polishing cloth (10) is provided at the lower end of the polishing head main body bracket (4), and an insulating layer (13) is provided on the inner side of the flexible polishing cloth; a viscoelastic fluid (14) is filled between the insulating layer (13) and the amplifier stage; a positive electrode (11) and a negative electrode (12) are provided in the insulating layer (13), and the positive electrode (11) and the negative electrode (12) are electrically connected to the two output ends of the conductive slip ring (2) respectively, and the positive electrode (11) and the negative electrode (12) can generate a non-uniform electric field when used in combination.

2. The polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 1, characterized in that: Vibration conduction sheets (701) are arranged in groups on the lower side of the amplification platform.

3. The polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 1, characterized in that: A polishing cloth-controlled bracket (8) is provided between the insulating layer (13) and the amplification platform.

4. The polishing head having viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 3, characterized in that: The polishing cloth-shaped support (8) comprises a connecting ring (801) and a connecting plate (802), wherein the connecting ring (801) and the connecting plate (802) are connected as a whole via connecting spokes (803), and the connecting ring (801) is fixedly connected to the lower end of the polishing head main body support (4); the flexible polishing cloth (10) is provided with a fixed support plate (18) outside, and the fixed support plate (18) is fixedly connected to the connecting plate (802), so that the flexible polishing cloth (10) forms an annular convex peak structure.

5. The polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 3, characterized in that: The flexible polishing cloth (10) and the polishing cloth-shaped support (8) are pressed and fixed together by a polishing cloth annular fixing sleeve (9).

6. The polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 1, characterized in that: The connecting spokes (803) are provided with channel holes (8031) for the viscoelastic fluid to flow.

7. The polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 1, characterized in that: The positive electrode (11) and the negative electrode (12) have different widths.

8. The polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 1, characterized in that: The positive electrode (11) is provided with a tooth-shaped structure.

9. The polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 1, characterized in that: A boss is provided on the positive electrode (11).

10. The polishing head with viscoelastic fluid-polishing liquid dielectrophoresis composite effect according to claim 1, characterized in that: The connection base (3) is connected to the hollow vibration amplifier (7) via a coupling (5).

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