A double-sided polishing machine for fine processing of large-diameter optical components

Abstract

The invention discloses a double-sided polishing machine for fine processing of large-caliber optical elements, including a polishing mechanism and a speed regulating mechanism, wherein the polishing mechanism includes an upper polishing mechanism and a lower polishing mechanism, the upper polishing mechanism and the lower polishing mechanism are used in combination for double-sided polishing of a workpiece, the speed regulating mechanism is arranged between the upper polishing mechanism and the lower polishing mechanism, and a plurality of workpiece rings are arranged in the speed regulating mechanism. The invention can adjust the rotation and revolution of a workpiece in the workpiece ring through the coordinated use of the speed regulating mechanism and the workpiece ring, and can adjust the direction and speed of the rotation and revolution of the workpiece at the same time, and because the speed regulating inner gear ring and the speed regulating inner gear can be driven in reverse and act on the workpiece ring at the same time, the speed of the rotation and revolution of the workpiece ring can be faster, and the polishing efficiency of the workpiece will also be higher, and the workpiece ring and the workpiece inside thereof can perform multiple movements at the same time, which is conducive to eliminating processing problems such as stepping on the edge and warping of the optical element during the polishing process.

Description

Technical Field

[0001] The invention relates to the technical field of optical element processing, in particular to a double-sided polishing machine for fine processing of large-caliber optical elements. Background Art

[0002] Polishing machine (bed), also known as grinding machine, is often used for mechanical grinding, polishing and waxing. Its working principle is: the motor drives the sponge or wool polishing disk installed on the polishing machine to rotate at high speed. Due to the joint action of the polishing disk and the polishing agent and the friction with the surface to be polished, the paint surface pollution, oxide layer and shallow marks can be removed.

[0003] Prior art publication number CN108789117B discloses a meter-level large-caliber optical element high-efficiency polishing machine and polishing method, the polishing machine includes an agitator, a small water basin, a marble plate, a large water basin, a frame, a workpiece ring fixing part, front and rear hand wheels, a workpiece ring, a workpiece ring driver, upper and lower hand wheels, a small impeller pump, a large impeller pump, a liquid injection barrel, a supporting wheel, a workpiece ring support, a motor, a polishing pad and a turntable bearing.

[0004] The above-mentioned polishing machine uses a workpiece ring to fix the optical element, and clamps the optical element through the workpiece ring support. Due to the limitation of the workpiece ring support, the optical element can only rotate in the workpiece ring, and the optical element cannot rotate synchronously in the same direction or in the opposite direction with the marble disk (i.e., the polishing disk). When the optical element can only rotate on the surface of the marble disk, the linear velocity of its bottom surface will gradually increase from the center to the outside, and the linear velocity will be the largest at the edge of the bottom surface of the optical element. This will cause the bottom edge of the optical element to rub against the surface of the marble disk more frequently at a fixed rotation speed, and the edge is prone to processing problems such as stepping on the edge and warping. At the same time, the above-mentioned polishing machine can only process one surface of the optical element at a time, and cannot process the upper and lower surfaces of the optical element at the same time, resulting in low processing efficiency. Summary of the invention

[0005] The object of the present invention is to provide a double-sided polishing machine for fine machining of large-diameter optical elements to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A double-sided polishing machine for fine processing of large-diameter optical elements, comprising

[0008] A polishing mechanism, the polishing mechanism comprising an upper polishing mechanism and a lower polishing mechanism, the upper polishing mechanism and the lower polishing mechanism are used in conjunction with each other for double-sided polishing of large-diameter optical elements;

[0009] A speed regulating mechanism, the speed regulating mechanism is arranged between the upper polishing mechanism and the lower polishing mechanism, a plurality of workpiece rings are arranged in the speed regulating mechanism, the workpiece rings are used to clamp large-diameter optical elements, and the speed regulating mechanism is used to adjust the direction and speed of the workpiece rings and the large-diameter optical elements clamped therein;

[0010] A suspension mechanism, which is disposed between the speed regulating mechanism and the lower polishing mechanism and is used to suspend the workpiece ring and leave a space between the workpiece ring and the lower polishing mechanism;

[0011] An anti-splash mechanism, which is arranged at the periphery of the polishing mechanism to prevent the polishing liquid and polishing waste liquid from splashing out;

[0012] A workbench is used to install the polishing mechanism, the speed regulating mechanism, the suspension mechanism and the anti-splash mechanism. A cabinet is fixed at the bottom of the workbench, and a gantry is fixed above the workbench.

[0013] As a further solution of the present invention: a first water tank is provided at the center of the top of the workbench, a second water tank is provided at the center of the bottom of the first water tank, a first annular groove is provided in the first water tank, a second annular groove is provided in the second water tank, the first water tank and the second water tank are both filled with polishing liquid, a sealing plate is provided on the top of the workbench corresponding to the periphery of the first water tank, the sealing plate is used to encapsulate the parts installed in the water tank, the lower polishing mechanism is installed in the second water tank, the lower polishing mechanism is used to polish the lower surface of the large-aperture optical element, the speed regulating mechanism is installed in the first water tank, and the speed regulating mechanism is provided above the lower polishing mechanism.

[0014] As a further scheme of the present invention: the lower polishing mechanism includes a lower polishing disc, a lower rotating table and a lower rotating table driving motor, a ring-shaped lower rotating table mounting step is fixed to the bottom of the lower rotating table, the bottom end of the lower rotating table mounting step is rotatably connected to the second annular groove through a second bearing, the outer periphery of the lower rotating table mounting step is sleeved and fixed with a lower rotating table outer gear ring, a plurality of lower rotating table outer gears are arranged around the lower rotating table outer gear ring, and the plurality of lower rotating table outer gears are rotatably connected in the second water tank through a rotating shaft, and the plurality of lower rotating table outer gears are meshed and connected with the lower rotating table outer gear ring, the lower polishing disc is fixed above the lower rotating table through a plurality of connecting columns, and through holes are provided at the centers of the lower polishing disc and the inner walls of the lower rotating table, the two through holes have the same specifications, and through holes are reserved for installing other components.

[0015] As a further solution of the present invention: the lower turntable drive motor is installed on one side of the chassis corresponding to the multiple lower turntable outer gears, and one end of the output shaft of the multiple lower turntable drive motors is respectively connected and fixed to one end of the lower turntable outer gear shaft on the corresponding side;

[0016] Or the lower turntable driving motor is installed on one side of the chassis corresponding to one of the multiple lower turntable external gears, one end of the lower turntable driving motor output shaft is connected and fixed to one end of the rotating shaft of the lower turntable external gear on the corresponding side, and it is connected to the rotating shafts of other lower turntable external gears through a belt-pulley and / or chain-sprocket structure.

[0017] As a further scheme of the present invention: the upper polishing mechanism comprises a first electric push rod, an upper polishing plate and an upper rotating table, the first electric push rod is installed on the gantry, and one end of the first electric push rod slides through the gantry and extends to the bottom of the gantry, the bottom end of the first electric push rod is fixed with an upper mounting plate, the lower end of the upper mounting plate is fixed with a lower mounting plate by a bracket, the bottom of the lower mounting plate is rotatably connected with the upper rotating table, and the upper polishing plate is fixed with the bracket below the upper rotating table, the upper polishing plate has the same specifications as the lower polishing plate, and a through hole is also provided at the center of the inner wall of the upper polishing plate, a gap is left between the upper polishing plate and the upper rotating table, the upper polishing plate and the lower polishing plate are arranged opposite to each other, and an upper rotating table driving motor is installed at the middle position of the top of the lower mounting plate, and one end of the output shaft of the upper rotating table driving motor is connected and fixed to one end of the rotating shaft of the upper rotating table.

[0018] As a further solution of the present invention: the speed regulating mechanism includes a speed regulating inner gear ring, a speed regulating inner gear, an inner gear driving motor and an inner gear driving motor, the bottom of the speed regulating inner gear ring is fixed with an annular inner gear ring mounting step, the bottom end of the inner gear ring mounting step is rotatably connected in the first annular groove through a first bearing, the outer periphery of the inner gear ring mounting step is sleeved and fixed with a speed regulating outer gear ring, a plurality of inner gear ring outer gears are arranged around the speed regulating outer gear ring, the plurality of inner gear ring outer gears are all meshed with the speed regulating outer gear ring for transmission, and a plurality of The inner gear ring and the outer gear are both rotatably connected in the first water tank via a rotating shaft, the speed regulating inner gear is rotatably connected in the first water tank via a rotating shaft, and the speed regulating inner gear is arranged at the center of the speed regulating inner gear ring, the gap between the speed regulating inner gear and the speed regulating inner gear ring is set as a polishing area, a plurality of workpiece rings are meshingly connected in the polishing area, the upper polishing plate and the lower polishing plate are both arranged in the polishing area, and the ring diameters of the upper polishing plate and the lower polishing plate are both smaller than the ring diameter of the polishing area.

[0019] As a further solution of the present invention: the internal gear drive motor is installed on one side of the chassis corresponding to the speed regulating internal gear, one end of the output shaft of the internal gear drive motor is fixedly connected to one end of the rotating shaft of the speed regulating internal gear, and the internal gear ring drive motors are installed on one side of the chassis corresponding to the multiple internal gear ring external gears, and one end of the output shafts of the multiple internal gear ring drive motors are respectively connected and fixed to one end of the rotating shaft of the internal gear ring external gear on the corresponding side;

[0020] Or the internal gear drive motor is installed on the side of the chassis corresponding to the speed regulating internal gear, and one end of the internal gear drive motor output shaft is fixedly connected to one end of the speed regulating internal gear shaft, and the internal gear ring drive motor is installed on the side of the chassis corresponding to one of the multiple internal gear ring external gears, and one end of the internal gear ring drive motor output shaft is fixedly connected to one end of the internal gear ring external gear shaft on the corresponding side, and it is connected to the rotating shafts of other internal gear ring external gears through a belt-pulley and / or chain-sprocket structure transmission connection.

[0021] As a further solution of the present invention: the suspension mechanism includes a first small annular plate, a first large annular plate, a second small annular plate, a second large annular plate and a plurality of third electric push rods, the first small annular plate and the first large annular plate are combined to form a group of support mechanisms, and the first small annular plate is arranged at the center of the first large annular plate, the second small annular plate and the second large annular plate are combined to form another group of support mechanisms, and the second small annular plate is arranged at the center of the second large annular plate, the first small annular plate and the first large annular plate are combined to form a group of support mechanisms arranged on the workbench, the second small annular plate and the second large annular plate are combined to form another group of support mechanisms arranged inside the chassis, and a plurality of the third electric push rods are installed on one side of the chassis corresponding to the suspension mechanism, and one end of the movable ends of the plurality of the third electric push rods are connected and fixed to the second large annular plate.

[0022] As a further solution of the present invention: the first small annular plate and the second small annular plate, as well as the first large annular plate and the second large annular plate are connected and fixed by a plurality of connecting rods, and the second small annular plate and the second large annular plate are fixed by a bracket, the connecting rod slides through the workbench and the inner wall of the chassis and a sealing ring is arranged at the connection, the first small annular plate moves through the through holes at the center of the lower rotating table and the lower polishing disk, and is movably mounted on the periphery of the speed regulating internal gear, the first large annular plate is movably arranged on the periphery of the lower rotating table and the lower polishing disk, and the first large annular plate is located inside the speed regulating internal gear ring, and the inner diameter of the first large annular plate is larger than the diameter of the lower rotating table and the lower polishing disk.

[0023] As a further solution of the present invention: the anti-splash mechanism includes a plurality of second electric push rods, protective shields and enclosures, the enclosures are detachably connected to the periphery of the first water tank, the enclosures are annular structures, and a slot is provided on the top of the enclosure ring, the protective shield is a truncated cone structure with an open top, and the interior is hollow, the bottom end of the protective shield is slidably inserted into the slot, and a plurality of second electric push rods are installed above the workbench through the gantry, one end of the movable ends of a plurality of second electric push rods slides through the gantry, and the ends of the movable ends of a plurality of second electric push rods are connected and fixed to the protective shield.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] In the present invention, the upper polishing mechanism and the lower polishing mechanism are used in combination to form a double-sided polishing structure of the device. The upper and lower surfaces of the workpiece can be polished at the same time by the combination of the upper and lower polishing discs and the corresponding motors. Furthermore, the workpiece ring can realize multiple motion modes in the polishing area by the speed regulating mechanism, and the workpiece in the workpiece ring can be double-sided polished by the upper and lower polishing discs. Furthermore, the rotation and revolution of the workpiece in the workpiece ring can be adjusted by the combination of the speed regulating mechanism and the workpiece ring, and the direction and speed of the rotation and revolution of the workpiece can be adjusted at the same time. Moreover, because the speed regulating inner gear ring and the speed regulating inner gear can be driven in reverse and act on the workpiece ring at the same time, the speed of the rotation and revolution of the workpiece ring can be faster, and correspondingly, the polishing efficiency of the workpiece will be higher. The workpiece ring and the workpiece inside it can perform multiple motions at the same time. The combination of these motion modes is conducive to eliminating the processing problems such as edge stepping and warping that are easy to occur in the polishing process of optical elements. The optical elements processed by the device have a higher rate of excellent products and better quality.

[0026] In the present invention, the upper and lower groups of supporting structures in the suspension mechanism can be used together to lift the workpiece ring located in the polishing area upward, so that the lower surface of the workpiece ring is away from the lower polishing plate, and a gap is formed between the workpiece ring and the lower polishing plate. This gap allows the polishing liquid used in the polishing process to flow freely between the workpiece and the lower polishing plate. The debris generated in the polishing process will be mixed in the polishing liquid to form polishing liquid waste liquid. The polishing liquid waste liquid can be extracted from the workpiece by an external pump, so that the debris in the waste liquid no longer affects the polishing of the workpiece, and the polishing accuracy can be further improved. Furthermore, the workpiece ring can be lifted upward by controlling the third electric push rod, and the distance between the workpiece ring and the lower polishing plate can be controlled and adjusted by the third electric push rod to meet the processing needs of optical elements of different specifications. At the same time, the first small annular plate and the first large annular plate are both annular structures, which can provide support for the suspension of the workpiece ring and will not interfere with the rotation of the workpiece ring.

[0027] In the present invention, when the upper polishing disc is against the workpiece and starts to work, the shield is lowered by the second electric push rod and the bottom end of the shield is inserted into the slot. The shield and the enclosure are used in conjunction with each other to seal the upper and lower polishing mechanisms to prevent the polishing liquid from splashing during the polishing process, and also to prevent the polishing waste liquid from overflowing. The polishing waste liquid is mixed with crushed materials. As the polishing liquid dries, the waste materials will form dust and float in the air, polluting the environment and damaging human health. The splash-proof mechanism can block the splashing polishing liquid and waste liquid to protect the environment and users. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0029] Figure 1 It is a structural schematic diagram of the present invention.

[0030] Figure 2 It is a structural schematic diagram of the workbench in the present invention.

[0031] Figure 3 It is an exploded view of the internal structure of the workbench in the present invention.

[0032] Figure 4 It is a cross-sectional view of the internal structure of the workbench in the present invention.

[0033] Figure 5 It is a schematic diagram of the structure of the water tank on the top of the workbench in the present invention.

[0034] Figure 6 It is a structural schematic diagram of the suspension mechanism in the present invention.

[0035] Figure 7 This is a first viewing angle diagram of the suspension mechanism of the present invention installed on the workbench.

[0036] Figure 8 This is a second viewing angle diagram of the suspension mechanism of the present invention installed on the workbench.

[0037] Fig. 9 It is a structural schematic diagram of the lower polishing mechanism in the present invention.

[0038] Fig.10 This is a first viewing angle diagram of the lower polishing mechanism of the present invention installed on the workbench.

[0039] Fig.11 This is a second viewing angle diagram of the lower polishing mechanism of the present invention installed on the workbench.

[0040] Fig.12 It is a structural schematic diagram of the speed regulating mechanism in the present invention.

[0041] Fig.13 This is a first viewing angle diagram of the speed regulating mechanism of the present invention installed on the workbench.

[0042] Fig.14 This is a second viewing angle diagram of the speed regulating mechanism of the present invention installed on the workbench.

[0043] Fig.15 It is a structural schematic diagram of the upper polishing mechanism in the present invention.

[0044] Fig.16 It is a front view of the upper polishing mechanism in the present invention.

[0045] Fig.17 It is a schematic structural diagram of the anti-splash mechanism in the present invention.

[0046] Reference numerals:

[0047] 1- Chassis;

[0048] 2-working table, 21-first water tank, 22-first annular groove, 23-second water tank, 24-second annular groove;

[0049] 3-Gantry;

[0050] 4-upper polishing mechanism, 41-first electric push rod, 42-upper mounting plate, 43-lower mounting plate, 44-upper polishing plate, 45-upper rotating table driving motor, 46-upper rotating table;

[0051] 5-anti-splash mechanism, 51-second electric push rod, 52-shield, 53-enclosure, 54-slot;

[0052] 6-Seal the board;

[0053] 7-speed regulating mechanism, 71-speed regulating inner gear ring, 72-inner gear ring outer gear, 73-speed regulating outer gear ring, 74-inner gear ring mounting step, 75-speed regulating inner gear, 76-polishing area, 77-inner gear driving motor, 78-inner gear ring driving motor;

[0054] 8-lower polishing mechanism, 81-lower polishing plate, 82-connecting column, 83-lower rotating table, 84-lower rotating table mounting step, 85-lower rotating table outer gear ring, 86-lower rotating table outer gear, 87-through hole, 88-lower rotating table driving motor;

[0055] 9-suspension mechanism, 91-first small annular plate, 92-first large annular plate, 93-connecting rod, 94-second large annular plate, 95-second small annular plate, 96-third electric push rod;

[0056] 10-first bearing, 11-second bearing, 12-sealing ring, 13-workpiece ring. DETAILED DESCRIPTION

[0057] The following embodiments will be described in detail with reference to the accompanying drawings. In the drawings or descriptions, similar or identical parts use the same reference numerals, and in actual applications, the shape, thickness or height of each component may be enlarged or reduced. The embodiments listed in the present invention are only used to illustrate the present invention and are not used to limit the scope of the present invention. Any obvious modifications or changes made to the present invention do not depart from the spirit and scope of the present invention.

[0058] Example 1: Please refer to Figure 1 In an embodiment of the present invention, a double-sided polishing machine for fine processing of large-diameter optical elements includes a chassis 1, a workbench 2 and a gantry 3. The workbench 2 is arranged on the top of the chassis 1, and the gantry 3 is fixed above the chassis 1 and arranged directly opposite the workbench 2. An upper polishing mechanism 4 is installed above the workbench 2 through the gantry 3, and an anti-splash mechanism 5 is arranged above the workbench 2 corresponding to the periphery of the upper polishing mechanism 4. The upper polishing mechanism 4 is used to polish the upper surface of the large-diameter optical element, and the anti-splash mechanism 5 is covered on the workbench 2 to prevent the polishing liquid from splashing.

[0059] See also Figure 5 A first water tank 21 is provided at the center of the top of the workbench 2, a second water tank 23 is provided at the center of the bottom of the first water tank 21, a first annular groove 22 is provided in the first water tank 21, a second annular groove 24 is provided in the second water tank 23, polishing liquid is contained in both the first water tank 21 and the second water tank 23, and the workpiece is immersed in the polishing liquid in the first water tank 21 and the second water tank 23.

[0060] See also Figure 2 , Figure 3 , Figure 4 A sealing plate 6 is provided on the top of the workbench 2 corresponding to the periphery of the first water tank 21, and the sealing plate 6 is used to encapsulate the parts installed in the water tank. A lower polishing mechanism 8 is installed in the second water tank 23, and the lower polishing mechanism 8 is used to polish the lower surface of the large-diameter optical element. A speed regulating mechanism 7 is installed in the first water tank 21, and a workpiece ring 13 is provided in the speed regulating mechanism 7. The workpiece ring 13 is used to clamp the large-diameter optical element. The workpiece ring 13 is an annular structure and teeth are provided at the outer ring. The teeth are used for meshing transmission. The speed regulating mechanism 7 is used to adjust the direction and speed of the workpiece ring 13. The speed regulating mechanism 7 is arranged above the lower polishing mechanism 8, and a suspension mechanism 9 is provided between the speed regulating mechanism 7 and the lower polishing mechanism 8. The suspension mechanism 9 is used to suspend the workpiece ring 13, so that there is a space between the workpiece ring 13 and the lower polishing mechanism 8.

[0061] See also Figure 3 , Figure 4 , Fig. 9 , Fig.10 , Fig.11 The lower polishing mechanism 8 includes a lower polishing disc 81, a lower rotating table 83 and a lower rotating table driving motor 88. A ring-shaped lower rotating table mounting step 84 is fixed to the bottom of the lower rotating table 83. The bottom end of the lower rotating table mounting step 84 is rotatably connected to the second annular groove 24 through a second bearing 11. A lower rotating table outer gear ring 85 is sleeved and fixed on the outer periphery of the lower rotating table mounting step 84. A plurality of lower rotating table outer gears 86 are arranged around the lower rotating table outer gear ring 85. The plurality of lower rotating table outer gears 86 are all meshed and connected with the lower rotating table outer gear ring 85, and the plurality of lower rotating table outer gears 86 are rotatably connected in the second water tank 23 through a rotating shaft, the lower polishing plate 81 is fixed above the lower rotating table 83 through a plurality of connecting columns 82, and a through hole 87 is provided at the center of the inner wall of the lower polishing plate 81 and the lower rotating table 83, and the two through holes 87 have the same specifications, and the through hole 87 is reserved for installing other parts, and a lower rotating table driving motor 88 is installed on one side of the chassis 1 corresponding to the plurality of lower rotating table external gears 86, and one end of the output shaft of the plurality of lower rotating table driving motors 88 is respectively connected and fixed to one end of the rotating shaft of the lower rotating table external gear 86 on the corresponding side;

[0062] In this embodiment, four lower rotating table outer gears 86 are preferably provided, which are respectively located at the four corners of the lower rotating table outer gear ring 85. The four gears cooperate with the gear ring to ensure that the gear ring rotates more smoothly. Four lower rotating table drive motors 88 are preferably provided. The four motors are respectively connected to the four outer gears. Then, through the cooperation of the gears and the gear ring, the four motors can simultaneously drive and rotate the lower rotating table 83 and the lower polishing plate 81 above it, so that the lower polishing plate 81 rotates faster and has higher polishing efficiency.

[0063] In other embodiments, only one lower rotating table driving motor 88 may be provided, and the one lower rotating table driving motor 88 is connected to the rotating shaft of one of the multiple lower rotating table external gears 86, and the rotating shafts of the remaining lower rotating table external gears 86 are connected through a transmission structure such as a belt-pulley or a chain-sprocket. One of the lower rotating table external gears 86 is driven by the motor, and the remaining lower rotating table external gears 86 are driven to rotate synchronously through the transmission structure.

[0064] In addition, in the other embodiments mentioned above, only one lower turntable drive motor 88 is provided, and the one lower turntable drive motor 88 is only connected to the rotating shaft of one outer gear among the multiple lower turntable outer gears 86, and the rotating shafts of the remaining lower turntable outer gears 86 are no longer connected through the transmission structure. These remaining lower turntable outer gears 86 are only meshed with the lower turntable outer gear ring 85 for transmission, and are only used to maintain the stability of the lower turntable outer gear ring 85 during rotation.

[0065] See also Fig.15 , Fig.16The upper polishing mechanism 4 includes a first electric push rod 41, an upper polishing disc 44 and an upper rotating table 46. The first electric push rod 41 is installed on the gantry 3, and one end of the first electric push rod 41 slides through the gantry 3 and extends to the bottom of the gantry 3. An upper mounting disc 42 is fixed to the bottom end of the first electric push rod 41, and a lower mounting disc 43 is fixed to the bottom of the upper mounting disc 42 through a bracket. The bottom of the lower mounting disc 43 is rotatably connected to the upper rotating table 46, and an upper polishing disc 44 is fixed to the bottom of the upper rotating table 46 through a bracket. The upper polishing disc 44 has the same specifications as the lower polishing disc 81, and a through hole 87 is also provided at the center of the inner wall of the upper polishing disc 44, leaving a gap between the upper polishing disc 44 and the upper rotating table 46. The upper polishing disc 44 and the lower polishing disc 81 are arranged opposite to each other, and the upper rotating table driving motor 45 is installed in the middle position of the top of the lower mounting disc 43. One end of the output shaft of the upper rotating table driving motor 45 is connected and fixed to one end of the rotating shaft of the upper rotating table 46. In this embodiment, the upper polishing mechanism 4 and the lower polishing mechanism 8 are used in combination to form a double-sided polishing structure of the device. The upper and lower surfaces of the large-diameter optical element can be polished and polished at the same time through the coordinated use of the upper and lower polishing discs and the corresponding motors. In addition, a polishing liquid spraying structure (not shown in the figure) is also provided in the upper polishing mechanism 4. The spraying method and spraying device of the polishing liquid can adopt existing mature technologies and devices, which will not be repeated here.

[0066] Example 2: Based on Example 1, please refer to Figure 3 , Fig.12 , Fig.13 , Fig.14The speed regulating mechanism 7 includes a speed regulating inner gear ring 71, a speed regulating inner gear 75, an inner gear driving motor 77 and an inner gear driving motor 78. An annular inner gear ring mounting step 74 is fixed to the bottom of the speed regulating inner gear ring 71. The bottom end of the inner gear ring mounting step 74 is rotatably connected to the first annular groove 22 through a first bearing 10. A speed regulating outer gear ring 73 is sleeved and fixed on the outer periphery of the inner gear ring mounting step 74. A plurality of inner gear ring outer gears 72 are arranged around the speed regulating outer gear ring 73. The plurality of inner gear ring outer gears 72 are all meshed with the speed regulating outer gear ring 73 for transmission, and the plurality of inner gear ring outer gears 72 are rotatably connected to the first water tank 21 through a rotating shaft. The speed regulating inner gear 75 is rotatably connected to the first water tank 21 through a rotating shaft, and the speed regulating inner gear 75 is arranged inside the speed regulating inner gear ring 71 At the center of the case 1, the gap between the speed regulating internal gear 75 and the speed regulating internal gear ring 71 is set as a polishing area 76, and a plurality of workpiece rings 13 are meshed and connected in the polishing area 76. The upper polishing disc 44 and the lower polishing disc 81 are both set in the polishing area 76, and the ring diameters of the upper polishing disc 44 and the lower polishing disc 81 are both smaller than the ring diameter of the polishing area 76. An internal gear drive motor 77 is installed on one side of the case 1 corresponding to the speed regulating internal gear 75, and one end of the output shaft of the internal gear drive motor 77 is fixedly connected to one end of the rotating shaft of the speed regulating internal gear 75. An internal gear drive motor 78 is installed on one side of the case 1 corresponding to the plurality of internal gear ring external gears 72, and one end of the output shaft of the plurality of internal gear ring drive motors 78 is respectively connected and fixed to one end of the rotating shaft of the internal gear ring external gear 72 on the corresponding side;

[0067] In this embodiment, four inner gear rings and outer gears 72 are preferably provided, which are respectively located at the four corners of the speed regulating outer gear ring 73. The four gears cooperate with the gear ring to ensure the stability of the speed regulating inner gear ring 71 during rotation. Four inner gear ring drive motors 78 are preferably provided, and the four inner gear ring drive motors 78 are respectively connected to the four inner gear ring and outer gears 72, and then the speed regulating inner gear ring 71 is driven and rotated at the same time through the cooperation of the gears and the gear ring. The speed regulating inner gear ring 71 rotates faster, and correspondingly, the speed of the workpiece ring 13 meshed in the speed regulating inner gear ring 71 will also be faster, thereby increasing the speed of the rotation and revolution of the workpiece ring 13, and thereby increasing the speed of the rotation and revolution of the large-aperture optical element clamped in the workpiece ring 13.

[0068] In other embodiments, only one inner gear ring drive motor 78 may be provided, and the inner gear ring drive motor 78 is connected to the rotating shaft of one of the multiple inner gear ring external gears 72, and the rotating shafts of the remaining inner gear ring external gears 72 may be connected through a transmission structure such as a belt-pulley or a chain-sprocket, and the motor drives one inner gear ring external gear 72 to rotate, and then the transmission structure drives the remaining inner gear ring external gears 72 to rotate synchronously;

[0069] In addition, in the other embodiments described above, only one inner gear ring drive motor 78 is provided, and the inner gear ring drive motor 78 is only connected to the rotating shaft of one of the multiple inner gear ring outer gears 72, and the rotating shafts of the remaining inner gear ring outer gears 72 are no longer connected through the transmission structure, and the remaining inner gear ring outer gears 72 are only meshed with the speed regulating outer gear ring 73 for transmission, and are only used to maintain the stability of the speed regulating outer gear ring 73 and the speed regulating inner gear ring 71 when they rotate;

[0070] In this embodiment, the direction and speed of the workpiece ring 13 can be adjusted by the coordinated use of various components in the speed regulating mechanism 7. The specific situations are as follows:

[0071] In the first category, the upper polishing plate 44 and the lower polishing plate 81 rotate while the workpiece ring 13 remains stationary, and the workpiece ring 13 remains stationary in the polishing area 76 by the use of the inner ring gear drive motor 78 and the inner gear drive motor 77 and related components, and the large-diameter optical element clamped in the workpiece ring 13 is double-sided polished only by rotating the upper and lower polishing plates;

[0072] The second type is that the workpiece ring 13 rotates while the upper and lower polishing plates are stationary, and the speed regulating inner gear ring 71 and the speed regulating inner gear 75 are rotated respectively by the inner gear ring driving motor 78 and the inner gear driving motor 77. When the speed regulating inner gear ring 71 and the speed regulating inner gear 75 rotate in the same direction but at different speeds, the workpiece ring 13 will rapidly revolve in the polishing area 76 and slowly rotate at the same time. When the speed regulating inner gear ring 71 and the speed regulating inner gear 75 rotate in different directions and at different speeds, the workpiece ring 13 will rapidly rotate at the same time and slowly revolve in the polishing area 76.

[0073] The third type is that the workpiece ring 13 rotates simultaneously with the upper and lower polishing discs. At this time, the revolution direction of the workpiece ring 13 can be the same as or different from the rotation direction of the upper and lower polishing discs, and the workpiece ring 13 can also rotate on its own when it revolves. For example, the upper and lower polishing discs rotate in the same direction at the same time, and the speed regulating inner gear ring 71 and the speed regulating inner gear 75 are rotated respectively by the inner gear ring driving motor 78 and the inner gear driving motor 77, and the rotation direction of the speed regulating inner gear ring 71 and the speed regulating inner gear 75 is opposite to the rotation direction of the upper and lower polishing discs. At this time, the workpiece ring 13 meshed between the speed regulating inner gear ring 71 and the speed regulating inner gear 75 3 will revolve in the polishing area 76 and the revolving direction is consistent with the rotation direction of the upper and lower polishing plates. If the revolving direction of the workpiece ring 13 needs to be opposite to that of the polishing plates, it is only necessary to make the rotation directions of the speed regulating inner gear ring 71 and the speed regulating inner gear 75 consistent with the rotation directions of the upper and lower polishing plates. On this basis, if it is necessary to make the workpiece ring 13 self-rotate while revolving, it is only necessary to control the speeds of the speed regulating inner gear ring 71 and the speed regulating inner gear 75 so that the speeds of the two are inconsistent. The greater the speed difference between the speed regulating inner gear ring 71 and the speed regulating inner gear 75, the faster the self-rotation speed of the workpiece ring 13.

[0074] In this embodiment, the speed regulating mechanism 7 can be used to enable the workpiece ring 13 to realize a variety of movement modes in the polishing area 76, and the upper and lower polishing discs can be used to perform double-sided polishing on the large-aperture optical elements in the workpiece ring 13. There are many specific usage methods. The three major categories described above are only an overall summary of the movement modes of the workpiece ring 13. There are different combined movement modes under each major category, which will not be repeated here. In summary, the speed regulating mechanism 7 and the workpiece ring 13 can be used to adjust the rotation and revolution of the optical elements in the workpiece ring 13, and the direction and speed of the rotation and revolution of the optical elements can be adjusted at the same time. Because the speed regulating internal gear ring 71 and the speed regulating internal gear 75 can be driven in reverse and act on the workpiece ring 13 at the same time, the speed of rotation and revolution of the workpiece ring 13 can be faster, and correspondingly, the polishing efficiency of the optical elements will be higher. The workpiece ring 13 and the optical elements inside it can perform multiple movements at the same time. The combination of these movement modes is conducive to eliminating processing problems such as edge stepping and warping of optical elements that are prone to occur during the polishing process. The use of this device to process optical elements has a higher rate of excellent products and better quality.

[0075] Example 3: Based on Examples 1 and 2, please refer to Figure 3 , Figure 6 , Figure 7 , Figure 8 The suspension mechanism 9 includes a first small annular plate 91, a first large annular plate 92, a second small annular plate 95, a second large annular plate 94 and a plurality of third electric push rods 96. The first small annular plate 91 and the first large annular plate 92 are combined to form a group of support mechanisms, and the first small annular plate 91 is arranged at the center of the first large annular plate 92. The second small annular plate 95 and the second large annular plate 94 are combined to form another group of support mechanisms, and the second small annular plate 95 is arranged at the center of the second large annular plate 94. The two groups of support structures can be used together to lift the workpiece ring 13 located in the polishing area 76 upward, so that the lower surface of the workpiece ring 13 is away from the lower polishing disk 81, and a gap is formed between the workpiece ring 13 and the lower polishing disk 81. This gap allows the polishing liquid used in the polishing process to flow freely between the workpiece and the lower polishing disk 81. The debris generated during the polishing process will be mixed in the polishing liquid to form a polishing liquid waste liquid. The polishing liquid waste liquid can be pumped away from the workpiece by an external pump, so that the debris in the waste liquid no longer affects the workpiece polishing, which can further improve the polishing accuracy.

[0076] In this embodiment, the first small annular plate 91 and the second small annular plate 95 and the first large annular plate 92 and the second large annular plate 94 are connected and fixed by a plurality of connecting rods 93, and the second small annular plate 95 and the second large annular plate 94 are fixed by a bracket, so that the entire suspension mechanism 9 becomes a whole, the first small annular plate 91 and the first large annular plate 92 are combined to form a group of supporting mechanisms arranged on the workbench 2, the second small annular plate 95 and the second large annular plate 94 are combined to form another group of supporting mechanisms arranged inside the chassis 1, the connecting rod 93 between the two groups of supporting mechanisms slides through the workbench 2 and the inner wall of the chassis 1, and a sealing ring 12 is provided at the joint between the connecting rod 93 and the inner wall of the workbench 2 and the chassis 1;

[0077] The first small annular plate 91 moves through the through hole 87 at the center of the lower rotating table 83 and the lower polishing disk 81, and is movably sleeved on the periphery of the speed regulating internal gear 75. The first large annular plate 92 is movably arranged on the periphery of the lower rotating table 83 and the lower polishing disk 81, and the first large annular plate 92 is located inside the speed regulating internal gear ring 71. The inner diameter of the first large annular plate 92 is larger than the diameters of the lower rotating table 83 and the lower polishing disk 81. A plurality of third electric push rods 96 are installed on one side of the chassis 1 corresponding to the suspension mechanism 9. One end of the movable ends of the plurality of third electric push rods 96 are connected and fixed to the second large annular plate 94. The two supporting mechanisms can be pushed upward or pulled downward by the third electric push rods 96. When in use, the workpiece ring 13 is placed It is placed above a group of supporting mechanisms formed by the combination of the first small annular plate 91 and the first large annular plate 92, and the bottom of the workpiece ring 13 is against the upper surfaces of the first small annular plate 91 and the first large annular plate 92. At the same time, the workpiece ring 13 is meshed between the gear rings. The workpiece ring 13 can be lifted upward by controlling the third electric push rod 96. The distance between the workpiece ring 13 and the lower polishing disk 81 can be controlled and adjusted by the third electric push rod 96 to meet the processing needs of optical elements of different specifications. At the same time, the first small annular plate 91 and the first large annular plate 92 are both annular structures, which can provide support for the suspension of the workpiece ring 13 and will not interfere with the rotation of the workpiece ring 13. The minimum height difference between the suspension mechanism 9 and the lower polishing disk 81 is 0.

[0078] Example 4: Based on Examples 1, 2, and 3, please refer to Fig.17The anti-splash mechanism 5 includes a plurality of second electric push rods 51, a protective cover 52 and a fence 53. The fence 53 is detachably connected to the periphery of the first water tank 21. The fence 53 is an annular structure, and a slot 54 is provided on the top of the ring of the enclosure 53. The protective cover 52 is a truncated cone structure with an open top and a hollow interior. The bottom end of the protective cover 52 is slidably inserted into the slot 54. The plurality of second electric push rods 51 are all installed above the workbench 2 through the gantry 3. One end of the movable end of the plurality of second electric push rods 51 slides through the gantry 3, and the ends of the movable ends of the plurality of second electric push rods 51 are all connected and fixed to the protective cover 52. The second electric push rod 51 can raise and lower the shield 52. In this embodiment, when the upper polishing disc 44 is against the workpiece and starts to work, the shield 52 is lowered by the second electric push rod 51 and the bottom end of the shield 52 is inserted into the slot 54. The shield 52 is used in conjunction with the enclosure 53 to seal the upper and lower polishing mechanisms to prevent splashing of polishing liquid during polishing, and also to prevent overflow of polishing waste liquid. The polishing waste liquid is mixed with debris. As the polishing liquid dries, the waste will form dust that floats in the air, polluting the environment and damaging human health. The anti-splash mechanism 5 can block the splashing polishing liquid and waste liquid to protect the environment and users.

[0079] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0080] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A double-sided polishing machine for finishing large-diameter optical components. It is characterized in that include A polishing mechanism, the polishing mechanism comprising an upper polishing mechanism (4) and a lower polishing mechanism (8), the upper polishing mechanism (4) and the lower polishing mechanism (8) being used in conjunction with each other for double-sided polishing of large-diameter optical elements; A speed regulating mechanism (7), the speed regulating mechanism (7) comprising a speed regulating internal gear ring (71), a speed regulating internal gear (75), an internal gear drive motor (77) and an internal gear drive motor (78); the speed regulating mechanism (7) is arranged between the upper polishing mechanism (4) and the lower polishing mechanism (8); a plurality of workpiece rings (13) are arranged in the speed regulating mechanism (7); the workpiece rings (13) are used to clamp large-aperture optical elements; the speed regulating mechanism (7) is used to adjust the direction and rotation speed of the workpiece rings (13) and the large-aperture optical elements clamped therein; a suspension mechanism (9), the suspension mechanism (9) being arranged between the speed regulating mechanism (7) and the lower polishing mechanism (8), and being used for suspending the workpiece ring (13) and leaving a space between the workpiece ring (13) and the lower polishing mechanism (8); An anti-splash mechanism (5), the anti-splash mechanism (5) being arranged correspondingly on the periphery of the polishing mechanism and used to prevent the polishing liquid and polishing waste liquid from splashing out; A workbench (2), the workbench (2) being used to install the polishing mechanism, the speed regulating mechanism (7), the suspension mechanism (9) and the anti-splash mechanism (5), the bottom of the workbench (2) being fixed with a cabinet (1), and the top of the workbench (2) being fixed with a gantry (3); A first water tank (21) is provided at the center of the top of the workbench (2), a second water tank (23) is provided at the center of the bottom of the first water tank (21), a first annular groove (22) is provided in the first water tank (21), a second annular groove (24) is provided in the second water tank (23), polishing liquid is contained in both the first water tank (21) and the second water tank (23), a sealing plate (6) is provided at the top of the workbench (2) corresponding to the periphery of the first water tank (21), the sealing plate (6) is used to seal the parts installed in the water tank, the second water tank (23) is provided with the lower polishing mechanism (8), the lower polishing mechanism (8) is used to polish the lower surface of a large-aperture optical element, the first water tank (21) is provided with the speed regulating mechanism (7), and the speed regulating mechanism (7) is provided above the lower polishing mechanism (8); The lower polishing mechanism (8) comprises a lower polishing disc (81), a lower rotating table (83) and a lower rotating table driving motor (88); a ring-shaped lower rotating table mounting step (84) is fixed to the bottom of the lower rotating table (83); the bottom end of the lower rotating table mounting step (84) is rotatably connected to the second annular groove (24) via a second bearing (11); a lower rotating table outer gear ring (85) is sleeved and fixed to the outer periphery of the lower rotating table mounting step (84); and a plurality of lower rotating table outer gears (86) are arranged around the lower rotating table outer gear ring (85). , and the plurality of lower rotating table outer gears (86) are all rotatably connected in the second water tank (23) via a rotating shaft, the plurality of lower rotating table outer gears (86) are all meshingly connected with the lower rotating table outer gear ring (85), the lower polishing plate (81) is fixed above the lower rotating table (83) via a plurality of connecting columns (82), and the lower polishing plate (81) and the lower rotating table (83) are provided with through holes (87) at the center of the inner walls, the two through holes (87) are of the same specification, and a through hole (87) is reserved for installing other components; The upper polishing mechanism (4) comprises a first electric push rod (41), an upper polishing disc (44) and an upper rotating table (46); the first electric push rod (41) is mounted on the gantry (3), and one end of the first electric push rod (41) slides through the gantry (3) and extends to the bottom of the gantry (3); an upper mounting disc (42) is fixed to the bottom end of the first electric push rod (41); a lower mounting disc (43) is fixed to the bottom of the upper mounting disc (42) via a bracket; the bottom of the lower mounting disc (43) is rotatably connected to the upper rotating table (46); the upper rotating table (46) ) is fixed to the lower side of the upper mounting plate (43) by a bracket, the upper polishing plate (44) having the same specifications as the lower polishing plate (81), and a through hole (87) is also provided at the center of the inner wall of the upper polishing plate (44), a gap is left between the upper polishing plate (44) and the upper rotating table (46), the upper polishing plate (44) and the lower polishing plate (81) are arranged opposite to each other, an upper rotating table driving motor (45) is installed at the middle position of the top of the lower mounting plate (43), and one end of the output shaft of the upper rotating table driving motor (45) is connected and fixed to one end of the rotating shaft of the upper rotating table (46); The suspension mechanism (9) comprises a first small annular plate (91), a first large annular plate (92), a second small annular plate (95), a second large annular plate (94) and a plurality of third electric push rods (96); the first small annular plate (91) and the first large annular plate (92) are combined to form a group of support mechanisms, and the first small annular plate (91) is arranged at the center of the first large annular plate (92); the second small annular plate (95) and the second large annular plate (94) are combined to form another group of support mechanisms, and the second small annular plate (95) is arranged at the center of the first large annular plate (92); At the center of the second large annular plate (94), the first small annular plate (91) and the first large annular plate (92) are combined to form a group of support mechanisms arranged on the workbench (2), the second small annular plate (95) and the second large annular plate (94) are combined to form another group of support mechanisms arranged inside the chassis (1), and a plurality of third electric push rods (96) are installed on one side of the chassis (1) corresponding to the suspension mechanism (9), and one end of the movable ends of the plurality of third electric push rods (96) are all connected and fixed to the second large annular plate (94); The first small annular plate (91) and the second small annular plate (95) as well as the first large annular plate (92) and the second large annular plate (94) are connected and fixed by a plurality of connecting rods (93), and the second small annular plate (95) and the second large annular plate (94) are fixed by a bracket. The connecting rods (93) slide through the inner wall of the workbench (2) and the chassis (1), and a sealing ring (12) is provided at the connection. The first small annular plate (91) movably passes through the through hole (87) at the center of the lower rotating table (83) and the lower polishing plate (81), and is movably sleeved on the periphery of the speed regulating internal gear (75). The first large annular plate (92) is movably provided on the periphery of the lower rotating table (83) and the lower polishing plate (81), and the first large annular plate (92) is located inside the speed regulating internal gear ring (71). The inner diameter of the first large annular plate (92) is larger than the diameters of the lower rotating table (83) and the lower polishing plate (81).

2. The double-sided polishing machine for fine processing of large-diameter optical elements according to claim 1, It is characterized in that The lower rotating table driving motor (88) is installed on one side of the chassis (1) corresponding to the plurality of lower rotating table external gears (86), and one end of the output shaft of the plurality of lower rotating table driving motors (88) is respectively connected and fixed to one end of the rotating shaft of the lower rotating table external gear (86) on the corresponding side; or The lower turntable drive motor (88) is installed on a side of the chassis (1) corresponding to one of the plurality of lower turntable external gears (86); one end of the output shaft of the lower turntable drive motor (88) is connected and fixed to one end of the rotating shaft of the lower turntable external gear (86) on the corresponding side, and the output shaft is connected to the rotating shaft of the other lower turntable external gears (86) via a belt-pulley and / or chain-sprocket structure.

3. The double-sided polishing machine for fine processing of large-diameter optical elements according to claim 2, It is characterized in that An annular inner gear ring mounting step (74) is fixed at the bottom of the speed regulating inner gear ring (71); the bottom end of the inner gear ring mounting step (74) is rotatably connected to the first annular groove (22) via a first bearing (10); a speed regulating outer gear ring (73) is sleeved and fixed to the outer periphery of the inner gear ring mounting step (74); a plurality of inner gear ring outer gears (72) are arranged around the speed regulating outer gear ring (73); the plurality of inner gear ring outer gears (72) are all meshed with the speed regulating outer gear ring (73) for transmission; and the plurality of inner gear ring outer gears (72) are all rotatably connected to the first water tank (21) via a rotating shaft; The speed regulating internal gear (75) is rotatably connected in the first water tank (21) via a rotating shaft, and the speed regulating internal gear (75) is arranged at the center of the speed regulating internal gear ring (71), and the gap between the speed regulating internal gear (75) and the speed regulating internal gear ring (71) is set as a polishing area (76), and a plurality of workpiece rings (13) are meshingly connected in the polishing area (76), and the upper polishing plate (44) and the lower polishing plate (81) are both arranged in the polishing area (76), and the ring diameters of the upper polishing plate (44) and the lower polishing plate (81) are both smaller than the ring diameter of the polishing area (76).

4. The double-sided polishing machine for fine processing of large-diameter optical elements according to claim 3, It is characterized in that The inner gear drive motor (77) is installed on a side of the chassis (1) corresponding to the speed regulating inner gear (75), one end of the output shaft of the inner gear drive motor (77) is fixedly connected to one end of the rotating shaft of the speed regulating inner gear (75), and the inner gear drive motor (78) is installed on a side of the chassis (1) corresponding to the plurality of inner gear ring outer gears (72), one end of the output shaft of the plurality of inner gear ring drive motors (78) is respectively fixedly connected to one end of the rotating shaft of the inner gear ring outer gear (72) on the corresponding side; or The inner gear drive motor (77) is installed on a side of the chassis (1) corresponding to the speed regulating inner gear (75), and one end of the output shaft of the inner gear drive motor (77) is fixedly connected to one end of the rotating shaft of the speed regulating inner gear (75). The inner gear drive motor (78) is installed on a side of the chassis (1) corresponding to one of the plurality of inner gear ring outer gears (72), and one end of the output shaft of the inner gear ring drive motor (78) is fixedly connected to one end of the rotating shaft of the inner gear ring outer gear (72) on the corresponding side, and the inner gear drive motor (78) is connected to the rotating shafts of the other inner gear ring outer gears (72) through a belt-pulley and / or chain-sprocket structure.

5. The double-sided polishing machine for finishing large-diameter optical elements according to claim 1 or 4, It is characterized in that The anti-splash mechanism (5) comprises a plurality of second electric push rods (51), a protective cover (52) and a fence (53); the fence (53) is detachably connected to the periphery of the first water tank (21); the fence (53) is an annular structure, and a slot (54) is provided at the top of the annular structure of the fence (53); the protective cover (52) is a truncated cone structure with an open top and a hollow interior; the bottom end of the protective cover (52) is slidably inserted into the slot (54); the plurality of second electric push rods (51) are all installed above the workbench (2) through the gantry (3); one end of the movable end of the plurality of second electric push rods (51) slides through the gantry (3), and the ends of the movable ends of the plurality of second electric push rods (51) are all connected and fixed to the protective cover (52).

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