Precise rotary motion platform

Abstract

The precise rotary motion platform comprises a base, a rotary table set, a rotary shaft, a deformable set and a driving assembly, the rotary table set comprises a first rotary table and a second rotary table which are arranged in a stacked and spaced mode, the first rotary table and the second rotary table are both annular, the first rotary table is fixedly connected with the base, and the second rotary table is used for bearing a to-be-carried object; the rotating shaft is arranged at the center axis of the turntable group, the deformable group comprises at least one first deformable part and at least one second deformable part, the first deformable part is connected with the first turntable and the rotating shaft, the second deformable part is connected with the second turntable and the rotating shaft, and the driving assembly is used for driving the second turntable to rotate. According to the precise rotary motion platform, on the premise that high-precision positioning is guaranteed, the rotary motion stroke is increased, and the application range is widened.

Description

Technical Field

[0001] The present invention relates to the technical field of precision motion positioning, and in particular to a precision rotary motion platform. Background Art

[0002] Precision rotational motion is a typical requirement in many high-precision positioning fields and can be applied to synchrotron radiation optics, semiconductor engineering, space laser alignment communications, etc.

[0003] The traditional precision turntable based on the worm gear has a complex structure, is difficult to operate, and has low positioning accuracy. The flexible mechanism has the advantages of no friction, no assembly, and no lubrication, and has a higher positioning accuracy.

[0004] However, since the high-precision positioning of the flexible mechanism relies on the tiny elastic deformation of the material to produce tiny displacement or rotation, the movement range of the device is limited, thus limiting its application in a wider range of fields. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a precision rotary motion platform, which can increase the rotary motion stroke while ensuring high-precision positioning, thereby expanding the scope of application.

[0006] An embodiment of the present application provides a precision rotating motion platform, including a base, a turntable group, a rotating shaft, a deformable group and a driving component. The turntable group includes a first turntable and a second turntable which are stacked and spaced apart. The first turntable and the second turntable are both annular. The first turntable is fixedly connected to the base, and the second turntable is used to carry the object to be carried. The rotating shaft is arranged at the central axis of the turntable group. The deformable group includes at least one first deformable member and at least one second deformable member. The first deformable member connects the first turntable and the rotating shaft, and the second deformable member connects the second turntable and the rotating shaft. The driving component is used to drive the second turntable to rotate.

[0007] According to the precision rotary motion platform of the embodiment of the present application, by providing a first turntable and a second turntable connected by a rotating shaft, and a first deformable member and a second deformable member respectively used to connect the first turntable and the rotating shaft and the second turntable and the rotating shaft, when the second turntable rotates under the drive of the driving component, the number of components that can be deformed is increased, thereby generating a larger displacement through deformation, thereby increasing the rotational motion stroke and expanding the scope of application.

[0008] In a possible implementation of the present application, the deformable group also includes at least one third deformable member, at least one fourth deformable member and at least one fifth deformable member, the third deformable member is arranged between the rotating shaft and the turntable group, and is fixedly connected to the base; the rotating shaft includes a first shaft segment and a second shaft segment arranged in a stacked and spaced manner, the first deformable member connects the first turntable and the first shaft segment, the second deformable member connects the second turntable and the second shaft segment; the fourth deformable member connects the first shaft segment and the third deformable member, and the fifth deformable member connects the second shaft segment and the third deformable member. In a possible implementation of the present application, there are two first turntables, the second turntable is arranged between the two first turntables, and the two first turntables are connected by at least one fixing member; there are two first shaft sections, the second shaft section is arranged between the two first shaft sections; there are at least two first deformable members, the first turntable is connected to the first shaft section by at least one first deformable member; there are at least two fourth deformable members, and each first shaft section is connected to the third deformable member by at least one first deformable member.

[0009] In a possible implementation of the present application, the turntable group, the rotating shaft and the deformable group are an integrally formed structure.

[0010] In a possible implementation of the present application, the turntable assembly further includes a loading platform, which is connected to the second turntable via an adapter, and the loading platform is used to carry objects to be loaded.

[0011] In a possible implementation of the present application, the driving assembly includes a driving member and a driving arm, the driving arm is fixedly connected to the second turntable, and the driving member drives the driving arm to rotate around the rotation axis.

[0012] In a possible implementation of the present application, the driving member is a linear motor, and the output end of the linear motor is arranged on one side of the driving arm so that the driving arm rotates under the push of the output end; the driving assembly also includes an elastic member, one end of the elastic member is connected to the base, and the other end is connected to the driving arm, and when the driving arm rotates under the push of the output end, the elastic member has a pre-tightening force.

[0013] In a possible implementation of the present application, the driving assembly also includes a high-precision driver, which is connected to the driving arm; the driving member has a first position and a second position, in the first position, the output end of the driving member can abut against the driving arm, and in the second position, the output end of the driving member can abut against the high-precision driver.

[0014] In a possible implementation of the present application, the drive assembly also includes a drive seat, the drive seat is connected to the base, and the drive member is detachably fixedly connected to the drive seat to switch between a first position and a second position; one end of the elastic member is connected to the base through the drive seat.

[0015] In a possible implementation of the present application, a sensor assembly is also included, which includes a displacement measuring component and a reading component. The displacement measuring component is connected to the driving arm, and the reading component is connected to the base and is close to the displacement measuring component to read the displacement of the driving arm measured by the displacement measuring component.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 is a structural schematic diagram of a precision rotary motion platform according to an embodiment of the present invention at one angle; Figure 2 2 is a front view of a precision rotary motion platform according to an embodiment of the present invention. Figure 3 is a structural schematic diagram of an embodiment of a precision rotary motion platform according to an embodiment of the present invention; Figure 4 is a structural schematic diagram of another angle of the precision rotary motion platform according to an embodiment of the present invention; Figure 5 is a schematic diagram of the cooperation between a deformable group and a rotating shaft in a precision rotating motion platform according to an embodiment of the present invention; Figure 6 is a schematic diagram of the cooperation between the turntable assembly and the driving arm in the precision rotary motion platform according to an embodiment of the present invention; Figure 7 is a structural schematic diagram of another angle of the precision rotary motion platform according to an embodiment of the present invention; Figure 8 is a schematic diagram of a driving assembly of a precision rotary motion platform according to an embodiment of the present invention; Fig. 9 Schematic diagram of a turntable assembly and a sensor assembly of a precision rotary motion platform according to an embodiment of the present invention.

[0018] Reference numerals: Precision rotary motion platform 100, Base 10, Turntable assembly 20, first turntable 21, second turntable 22, loading platform 23, fixing member 24, adapter 25, Rotating shaft 30, first shaft section 31, second shaft section 32, The deformable group 40, the first deformable member 41, the second deformable member 42, the third deformable member 43, the fourth deformable member 44, the fifth deformable member 45, Driving assembly 50, driving member 51, driving arm 52, elastic member 53, high-precision driver 54, driving seat 55, long hole 551, limiting member 56, Sensor assembly 60 , displacement measuring component 61 , reading component 62 , displacement measuring seat 63 , and reading seat 64 . DETAILED DESCRIPTION

[0019] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0020] In the description of the present invention, it should be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating positions or positional relationships, are based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] The precision rotary motion platform 100 according to an embodiment of the present application will be described below with reference to the accompanying drawings.

[0022] Reference Figure 1 and Figure 2A precision rotary motion platform 100 provided in an embodiment of the present application includes a base 10, a turntable group 20, a rotating shaft 30, a deformable group 40 and a driving assembly 50. The turntable group 20 includes a first turntable 21 and a second turntable 22 which are stacked and spaced apart. The first turntable 21 and the second turntable 22 are both annular. The first turntable 21 is fixedly connected to the base 10, and the second turntable 22 is used to carry the object to be carried. The rotating shaft 30 is arranged at the central axis of the turntable group 20. The deformable group 40 includes at least one first deformable member 41 and at least one second deformable member 42. The first deformable member 41 connects the first turntable 21 and the rotating shaft 30, and the second deformable member 42 connects the second turntable 22 and the rotating shaft 30. The driving assembly 50 is used to drive the second turntable 22 to rotate.

[0023] Specifically, refer to Figure 1 The precision rotary motion platform 100 in the embodiment of the present invention includes a base 10, and the base 10 is used to support a turntable group 20, a rotating shaft 30, a deformable group 40 and a driving component 50, etc.

[0024] Reference Figure 2 The turntable group 20 includes a first turntable 21 and a second turntable 22 which are stacked and spaced apart, that is, the first turntable 21 and the second turntable 22 are not directly connected. For example, the first turntable 21 and the second turntable 22 can be stacked along the thickness direction of the base 10. The first turntable 21 and the second turntable 22 can be arranged in sequence from bottom to top, or from top to bottom. The first turntable 21 and the second turntable 22 are both annular, and the first turntable 21 and the second turntable 22 can be one or both of a circular ring, a square ring, and an irregular ring. The first turntable 21 is fixedly connected to the base 10. For example, the first turntable 21 and the base 10 can be fixedly connected by welding, threaded connection, snap connection or connecting member. The second turntable 22 is used to carry the object to be carried. For example, the second turntable 22 can have a bearing portion, and the object to be carried is carried by the bearing portion, or the object to be carried can be carried by connecting other structural members, etc.

[0025] The rotating shaft 30 is disposed at the central axis of the turntable assembly 20 and can serve as the rotation center of the turntable assembly 20 .

[0026] It should be noted that the rotating shaft 30 is located at the central axis of the turntable assembly 20 , but is not directly connected to the base 10 , and the rotating shaft 30 can be slightly deformed.

[0027] Reference Figure 1 and Figure 2The deformable group 40 includes at least one first deformable member 41 and at least one second deformable member 42. The first deformable member 41 connects the first turntable 21 and the rotating shaft 30, and the second deformable member 42 connects the second turntable 22 and the rotating shaft 30. Since the first turntable 21 is fixedly connected to the base 10, and the rotating shaft 30 is connected to the first turntable 21, the first turntable 21 provides support for the rotating shaft 30 through the first deformable member 41, and the rotating shaft 30 provides support for the second turntable 22 through the second deformable member 42.

[0028] Exemplarily, the first deformable member 41 and the second deformable member 42 may be one or more than two; preferably, there are more than two first deformable members 41 and the second deformable members 42, and they are respectively distributed along the inner circumferences of the first turntable 21 and the second turntable 22; further, the two or more first deformable members 41 and the second deformable members 42 are evenly distributed along the inner circumferences of the first turntable 21 and the second turntable 22; further, the first deformable member 41 and the second deformable member 42 are arranged in a stacked and spaced manner corresponding to the first turntable 21 and the second turntable 22, which can save space and arrange neatly.

[0029] It is understandable that the two ends of the first deformable member 41 can be fixedly connected to the first turntable 21 and the rotating shaft 30, for example, by welding, threading, snap-fitting or connecting with a connecting member, or can be integrally formed. The two ends of the second deformable member 42 can be fixedly connected to the second turntable 22 and the rotating shaft 30, for example, by welding, threading, snap-fitting or connecting with a connecting member, or can be integrally formed.

[0030] The driving assembly 50 is used to drive the second turntable 22 to rotate and provide rotational power for the rotating motion platform. The driving assembly 50 drives the second turntable 22 to rotate, and the second turntable 22 transmits the rotational power to the second deformable member 42, which is then transferred to the rotating shaft 30, and then to the first deformable member 41, and finally to the first turntable 21. Compared with the prior art in which the driving assembly 50 is directly connected to the first turntable 21, the rotational power only passes through the first deformable member 41, and the deformable structure is increased from the existing first deformable member 41 to the first deformable member 41, the second deformable member 42 and the rotating shaft 30, so that a larger displacement can be generated, the rotational motion stroke is increased, and the application range is expanded.

[0031] Therefore, refer to Figure 1 and Figure 2According to the precision rotary motion platform 100 of the embodiment of the present application, by providing a first turntable 21 and a second turntable 22 connected by a rotating shaft 30, and a first deformable member 41 and a second deformable member 42 respectively used to connect the first turntable 21 and the rotating shaft 30, and the second turntable 22 and the rotating shaft 30, when the second turntable 22 rotates under the drive of the driving component 50, more components can be deformed, thereby generating a larger displacement through deformation, thereby increasing the rotational motion stroke and expanding the scope of application.

[0032] It is understandable that the driving assembly 50 may be rotationally driven or linearly driven, etc. When the driving assembly 50 drives the second turntable 22 to rotate, it may be connected to or abutted against the second turntable 22 .

[0033] In some embodiments of the present application, reference Figure 1 and Figure 5 The deformable group 40 also includes at least one third deformable member 43, at least one fourth deformable member 44 and at least one fifth deformable member 45. Exemplarily, the third deformable member 43, the fourth deformable member 44 and the fifth deformable member 45 can be one or more than two. Preferably, there are more than two third deformable members 43, the fourth deformable member 44 and the fifth deformable member 45, and they are respectively distributed along the circumference of the rotating shaft 30, the inner circumference of the first turntable 21 and the inner circumference of the second turntable 22; further, the more than two third deformable members 43, the fourth deformable member 44 and the fifth deformable member 45 are respectively evenly distributed along the circumference of the rotating shaft 30, the inner circumference of the first turntable 21 and the inner circumference of the second turntable 22; further, the fourth deformable member 44 and the fifth deformable member 45 are respectively arranged in a stacked and spaced manner corresponding to the first turntable 21 and the second turntable 22, which can save space and arrange neatly.

[0034] The third deformable member 43 is disposed between the rotating shaft 30 and the turntable assembly 20. Specifically, the third deformable member can be disposed at any position between the rotating shaft 30 and the turntable assembly 20. Preferably, the third deformable member 43 is disposed close to the rotating assembly to further increase the motion stroke. The third deformable member 43 is fixedly connected to the base 10 to provide support.

[0035] The rotating shaft 30 includes a first shaft section 31 and a second shaft section 32 which are stacked and spaced apart, that is, the first shaft section 31 and the second shaft section 32 are not directly connected. Specifically, the first shaft section 31 and the second shaft section 32 are arranged along the central axis direction. The first deformable member 41 connects the first turntable 21 and the first shaft section 31, and the second deformable member 42 connects the second turntable 22 and the second shaft section 32; the fourth deformable member 44 connects the first shaft section 31 and the third deformable member 43, and the fifth deformable member 45 connects the second shaft section 32 and the third deformable member 43. In this way, the first turntable 21 provides support for the first shaft section 31 through the first deformable member 41, the third deformable member 43 provides support for the second shaft section 32 through the fifth deformable member 45, and provides support for the second turntable 22 through the second deformable member 42. At the same time, the third deformable member 43 can also provide support for the first shaft section 31 through the fourth deformable member 44.

[0036] By setting the rotating axis 30 as the first shaft section 31 and the second shaft section 32, and providing the third deformable member 43, the fourth deformable member 44 and the fifth deformable member 45, when the second turntable 22 rotates, the rotational force acts on the second deformable member 42, the second shaft section 32, the fifth deformable member 45, the third deformable member 43, the fourth deformable member 44, the first shaft section 31, the first deformable member 41 and the first turntable 21 in sequence, thereby further increasing the number of structures that can be deformed and the deformation displacement that can be generated, thereby further improving the movement stroke.

[0037] It is understandable that the first deformable member, the second deformable member 42 , the fourth deformable member 44 and the fifth deformable member 45 are all metal sheets, and after being stacked, they are still in sheet shape along the thickness direction of the base 10 . The third deformable member 43 is a metal block so as to be connected to the base 10 .

[0038] In some embodiments of the present application, reference Figure 1 and Figure 2 There are two first turntables 21, and the second turntable 22 is arranged between the two first turntables 21, and the two first turntables 21 are connected by at least one fixing member 24; in this way, the first turntables 21 are respectively arranged on the upper and lower sides of the second turntable 22, and the first turntables 21 are connected to the base 10, which improves the stability and rigidity of the rotation of the second turntable 22, thereby improving the stability and rigidity of the overall platform. At the same time, the load capacity of the turntable group 20 in vertical applications can be improved, and the axial drift of the turntable group 20 during movement can be reduced. Among them, the fixing member 24 can be fixedly connected to the first turntable 21. The fixing member 24 can be one or more than two. Preferably, there are more than two fixing members 24, and they are evenly distributed along the periphery of the first turntable 21.

[0039] There are two first shaft sections 31 , and the second shaft section 32 is disposed between the two first shaft sections 31 . The two first shaft sections 31 correspond to the two first turntables 21 respectively, and the second shaft section 32 corresponds to the second turntable 22 .

[0040] There are at least two first deformable parts 41, and the first turntable 21 is connected to the first shaft segment 31 through at least one first deformable part 41, that is, the first turntable 21 located below the second turntable 22 is connected to the first shaft segment 31 located below the second shaft segment 32 through at least one first deformable part 41, and the first turntable 21 located above the second turntable 22 is connected to the first shaft segment 31 located above the second shaft segment 32 through at least one first deformable part 41.

[0041] There are at least two fourth deformable members 44, and each first shaft segment 31 is connected to the third deformable member 43 through at least one first deformable member 41, that is, the first shaft segment 31 located below the second shaft segment 32 and the third deformable member 43 are connected through at least one fourth deformable member 44, and the first shaft segment 31 located above the second shaft segment 32 and the third deformable member 43 are connected through at least one fourth deformable member 44.

[0042] In some embodiments, the fixing member 24 may be U-shaped, with both ends of the opening being connected to the two first turntables 21 respectively.

[0043] In some embodiments of the present application, reference Figure 1 and Figure 2 The turntable group 20, the rotating shaft 30 and the deformable group 40 are an integrated structure. Specifically, the turntable group 20, the rotating shaft 30 and the deformable group 40 are formed by a wire processing process, and a threading hole structure is designed in the structure to facilitate wire processing. The integrated structure avoids problems such as mismatch of the rotation center and vibration of the installation gap caused by multi-structure assembly.

[0044] In some embodiments of the present application, reference Figure 3 The turntable assembly 20 further includes a loading platform 23, which is connected to the second turntable 22 via an adapter 25, and the loading platform 23 is used to carry objects to be loaded.

[0045] Specifically, the stage 23 is stacked and spaced apart from the turntable assembly 20. The stage 23 is connected to the second turntable 22 via one or more adapters 25; preferably, there are more than two adapters 25; further, the more than two adapters 25 are evenly distributed along the outer periphery of the second turntable 22. The adapter 25 is fixedly connected to the stage 23 and the second turntable 22, so that the stage 23 can rotate with the second turntable 22. The loading surface of the stage 23 is perpendicular to the rotation axis 30.

[0046] By providing the stage 23, larger objects can be carried, for example, a reflector, a crystal, a clamp, a template, etc. can be carried.

[0047] In some embodiments, the adapter 25 may be Z-shaped, with two ends connected to the first turntable 21 and the stage 23 respectively.

[0048] In some embodiments of the present application, reference Figure 1 and Figure 6 The driving assembly 50 includes a driving member 51 and a driving arm 52 . The driving arm 52 is fixedly connected to the second turntable 22 . The driving member 51 drives the driving arm 52 to rotate around the rotating shaft 30 .

[0049] By providing the driving arm 52 , it is convenient for the driving member 51 to drive the second turntable 22 to rotate.

[0050] The driving arm 52 and the second turntable 22 may be fixedly connected, for example, by welding, threading, snap-fitting, or connecting via a connecting member, etc.; they may also be integrally formed.

[0051] In some embodiments of the present application, reference Figure 1 , Figure 4 , Figure 7 and Figure 8 The driving member 51 is a linear motor, and the output end of the linear motor is arranged on one side of the driving arm 52, so that the driving arm 52 rotates under the push of the output end; the driving component 50 also includes an elastic member 53, one end of the elastic member 53 is connected to the base 10, and the other end is connected to the driving arm 52, and when the driving arm 52 rotates under the push of the output end, the elastic member 53 has a pre-tightening force.

[0052] Specifically, the output end of the linear motor is not connected to the driving arm 52. When the driving arm 52 is driven to rotate, the output end abuts against one side of the driving arm 52 to drive the driving arm 52 to rotate. This is because the output end of the linear motor moves in a linear manner, while the driving arm 52 moves in a rotational manner. When the output end drives the driving arm 52 to rotate, the abutment position of the output end on the driving arm 52 will change. Therefore, the two are not connected, and only abut when the output end drives the driving arm 52 to rotate. Since the linear motor is not connected to the driving arm 52 and the linear motor is arranged on one side of the driving arm 52, the linear motor can only apply thrust to the driving arm 52, that is, the driving arm 52 can only rotate in one direction. Therefore, in order to enable the driving arm 52 to rotate in the opposite direction, an elastic member 53 is provided with two ends respectively connected to the base 10 and the driving arm 52, and the elastic member 53 has a pre-tightening force when the driving arm 52 rotates in one direction. In this way, when the driving force of the driving member 51 disappears, the driving arm 52 will rotate in the opposite direction under the action of the pre-tightening force, thereby realizing the positive direction rotation of the driving arm 52.

[0053] It should be noted that when the driving arm 52 rotates under the push of the output end, the elastic member 53 can be in an extended state or a compressed state; if the elastic member 53 and the linear motor are located on the same side of the driving arm 52, the elastic member 53 is in an extended state; if the elastic member 53 and the linear motor are located on opposite sides of the driving arm 52, the elastic member 53 is in a compressed state.

[0054] It is understandable that the elastic member 53 may be a spring, etc. The linear motor may be a piezoelectric actuator, and its displacement resolution is sub-nanometer level.

[0055] In some embodiments of the present application, reference Figure 1 and Figure 4 The driving component 50 also includes a high-precision driver 54, which is connected to the driving arm 52; the driving member 51 has a first position and a second position. In the first position, the output end of the driving member 51 can abut against the driving arm 52, and in the second position, the output end of the driving member 51 can abut against the high-precision driver 54.

[0056] By providing the high-precision driver 54 , the precision rotary motion platform 100 can position the displacement of the object to be carried with higher precision requirements, further expanding the application scope of the motion platform of the present application.

[0057] When the driving member 51 is in the first position, its output end can abut against the driving arm 52. By driving the driving arm 52 to rotate through the driving member 51, the displacement of the object to be loaded with a larger stroke can be positioned; when the driving member 51 is in the second position, its output end can abut against the high-precision driver 54. The high-precision driver 54 applies power to the driving member 51, so that the high-precision driver 54 and the driving arm 52 rotate, so that the displacement of the object to be loaded with higher precision requirements can be positioned.

[0058] In some embodiments, the high-precision actuator 54 is a piezoelectric ceramic with a displacement resolution of 1 nm-1000 nm.

[0059] The high-precision driver 54 may be disposed at an end of the driving arm 52 away from the turntable assembly 20 , or may be disposed above or below the driving arm 52 .

[0060] In some embodiments of the present application, reference Figure 1 and Figure 4 The driving assembly 50 also includes a driving seat 55, which is connected to the base 10, and the driving member 51 is detachably fixedly connected to the driving seat 55 to switch between the first position and the second position; one end of the elastic member 53 is connected to the base 10 through the driving seat 55.

[0061] By setting up the driving seat 55, it is convenient to connect the driving member 51 to the base 10. The driving member 51 and the driving seat 55 are detachably fixedly connected, which is convenient for switching between the first position and the second position; one end of the elastic member 53 is connected to the base 10 through the driving seat 55, so that the two ends of the elastic member 53 are at the same height.

[0062] The driving seat 55 can be fixed on the base 10. For example, the driving seat 55 and the base 10 can be welded, threaded, snap-fitted, or connected via a connecting member; or they can be integrally formed with the base 10.

[0063] The driving member 51 and the driving seat 55 can be detachably fixedly connected by means of threaded connection, snap connection or connection by a connecting member. In the present application, the base 10 is provided with a long hole 551, and the driving member 51 is passed through the long hole 551 and is fixed by a limiting member 56. The long hole 551 extends in the vertical direction, and the high-precision driver 54 is provided above the driving arm 52. When the driving member 51 is at the lower end of the long hole 551, it can abut against the driving arm 52, and when the driving member 51 is above the long hole 551, it can abut against the high-precision driver 54.

[0064] In some embodiments of the present application, reference Figure 1 and Fig. 9 , also includes a sensor assembly 60, the sensor assembly 60 includes a displacement measuring component 61 and a reading component 62, the displacement measuring component 61 is connected to the driving arm 52, the reading component 62 is connected to the base 10 and is close to the displacement measuring component 61 to read the displacement of the driving arm 52 measured by the displacement measuring component 61.

[0065] By setting the sensor assembly 60, the rotational displacement of the object to be carried can be obtained. The displacement measuring member 61 rotates synchronously with the driving arm 52, and the rotational displacement of the displacement measuring member 61 is the same as the rotational displacement of the driving arm 52. The reading member 62 can obtain the rotational displacement of the driving arm 52 by reading the displacement number of the displacement measuring member 61, thereby obtaining the rotational displacement of the object to be carried, and the rotation amount can be obtained after conversion.

[0066] In some embodiments, reference Figure 1 and Fig. 9 The sensor assembly 60 also includes a displacement measuring seat 63 and a reading seat 64. The displacement measuring seat 63 is connected to the driving arm 52. The end of the displacement measuring seat 63 away from the turntable assembly 20 is an arc-shaped surface. The displacement measuring member 61 is a grating ruler, and the grating ruler is arranged on the arc-shaped surface. The reading member 62 is a reading head, which is installed on the reading seat 64 and is close to the displacement measuring member 61. When the turntable assembly 20 rotates, the driving arm 52 rotates to drive the grating ruler to rotate, and generates relative displacement with the reading head, so that the reading head can read the displacement, and the rotation amount can be obtained after conversion. In the description of this specification, the description with reference to the terms "embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0067] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A precision rotary motion platform, characterized in that: include: Base (10); A turntable group (20), the turntable group (20) comprising a first turntable (21) and a second turntable (22) which are stacked and spaced apart, the first turntable (21) and the second turntable (22) both being annular, the first turntable (21) being fixedly connected to the base (10), and the second turntable (22) being used for carrying objects to be carried; A rotating shaft (30), the rotating shaft (30) being arranged at the central axis of the turntable assembly (20); a deformable group (40), the deformable group (40) comprising at least one first deformable member (41) and at least one second deformable member (42), the first deformable member (41) connecting the first turntable (21) and the rotation axis (30), and the second deformable member (42) connecting the second turntable (22) and the rotation axis (30); A driving assembly (50), wherein the driving assembly (50) is used to drive the second turntable (22) to rotate.

2. The precision rotary motion platform according to claim 1, characterized in that: The deformable group (40) further comprises at least one third deformable member (43), at least one fourth deformable member (44) and at least one fifth deformable member (45); the third deformable member (43) is arranged between the rotating shaft (30) and the turntable group (20), and is fixedly connected to the base (10); The rotating shaft (30) comprises a first shaft section (31) and a second shaft section (32) which are stacked and spaced apart from each other; the first deformable member (41) connects the first turntable (21) and the first shaft section (31); the second deformable member (42) connects the second turntable (22) and the second shaft section (32); the fourth deformable member (44) connects the first shaft section (31) and the third deformable member (43); and the fifth deformable member (45) connects the second shaft section (32) and the third deformable member (43).

3. The precision rotary motion platform according to claim 2, characterized in that: There are two first turntables (21), the second turntable (22) is arranged between the two first turntables (21), and the two first turntables (21) are connected via at least one fixing member (24); There are two first shaft segments (31), and the second shaft segment (32) is arranged between the two first shaft segments (31); There are at least two of the first deformable members (41), and the first turntable (21) and the first shaft section (31) are connected via at least one of the first deformable members (41); There are at least two fourth deformable members (44), and each of the first shaft segments (31) is connected to the third deformable member (43) via at least one of the first deformable members (41).

4. The precision rotary motion platform according to claim 1, characterized in that: The turntable group (20), the rotating shaft (30) and the deformable group (40) are an integrally formed structure.

5. The precision rotary motion platform according to claim 1, characterized in that: The turntable assembly (20) further comprises an object carrier (23), wherein the object carrier (23) is connected to the second turntable (22) via an adapter (25), and the object carrier (23) is used for carrying objects to be carried.

6. The precision rotary motion platform according to claim 1, characterized in that: The driving assembly (50) comprises a driving member (51) and a driving arm (52); the driving arm (52) is fixedly connected to the second turntable (22); and the driving member (51) drives the driving arm (52) to rotate around the rotating shaft (30).

7. The precision rotary motion platform according to claim 6, characterized in that: The driving member (51) is a linear motor, and the output end of the linear motor is arranged on one side of the driving arm (52), so that the driving arm (52) rotates under the push of the output end; The driving assembly (50) further comprises an elastic member (53), one end of the elastic member (53) being connected to the base (10), and the other end being connected to the driving arm (52), and when the driving arm (52) rotates under the push of the output end, the elastic member (53) has a pre-tightening force.

8. The precision rotary motion platform according to claim 7, characterized in that: The driving assembly (50) further comprises a high-precision driver (54), wherein the high-precision driver (54) is connected to the driving arm (52); The driving member (51) has a first position and a second position. In the first position, the output end of the driving member (51) can abut against the driving arm (52). In the second position, the output end of the driving member (51) can abut against the high-precision driver (54).

9. The precision rotary motion platform according to claim 7, characterized in that: The driving assembly (50) further comprises a driving seat, the driving seat being connected to the base (10), and the driving member (51) being detachably fixedly connected to the driving seat so as to switch between the first position and the second position; One end of the elastic member (53) is connected to the base (10) via the driving seat.

10. The precision rotary motion platform according to claim 6, characterized in that: The device further comprises a sensor assembly (60), wherein the sensor assembly (60) comprises a displacement measuring member (61) and a reading member (62), wherein the displacement measuring member (61) is connected to the driving arm (52), and the reading member (62) is connected to the base (10) and is close to the displacement measuring member (61) so as to read the displacement of the driving arm (52) measured by the displacement measuring member (61).

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