A substrate hanging mechanism in a vacuum evaporation chamber of a vacuum evaporation machine

Abstract

The present invention discloses a substrate hanging mechanism in an evaporation chamber of a vacuum evaporation machine, and relates to the field of vacuum evaporation equipment, comprising: an evaporation machine casing and a cover hingedly assembled on the side of the evaporation machine casing to play a sealing role, a suspension plate concentrically assembled inside the evaporation machine casing, and the suspension plate is located above the inner part of the evaporation machine casing. The present invention can fix the substrate under the first adsorption suspension component for single-sided evaporation treatment through the cooperation of a first adsorption suspension component, a second adsorption suspension component and a switching unit, and then transfer the substrate to the bottom of the second adsorption suspension component under the control of the switching unit, and the substrate can be turned over during the transfer process, that is, double-sided evaporation treatment can be performed without stopping the evaporation machine, and all structures on the suspension plate can be removed at the same time under the action of the quick-disassembly assembly unit, so as to facilitate the inspection and maintenance of the first adsorption suspension component and the second adsorption suspension component.

Description

Technical Field

[0001] The invention relates to the field of vacuum evaporation equipment, in particular to a substrate hanging mechanism in an evaporation cavity of a vacuum evaporation machine. Background Art

[0002] The top of the evaporation chamber of the vacuum evaporation machine is equipped with a substrate limiting structure, which allows the substrate to be suspended on the top of the evaporation chamber. The substrates that need to be evaporated generally include lenses, wafers, metal plates, plastic plates, etc.

[0003] It is recorded in the Chinese public document CN117230412B (a dual-source co-evaporation vacuum evaporation machine) that two wafers are pressed against the upper and lower surfaces of the support block respectively, so that the wafers and the surfaces of the support block are fitted with each other, and the sides of the wafers are pressed between the side support blocks on the left and right sides, and the wafers squeeze the limiting block. At this time, the reset spring on the side of the limiting block is compressed, and the elastic deformation of the reset spring can limit and fix the wafer to ensure the stability of the wafer; when the wafer coating on the lower surface of the support block is completed, the connecting screw in the middle of the fixed column is rotated, and the rotation of the connecting screw can make the pressing block in the storage The air cavity moves internally, and the airflow inside its air storage cavity is squeezed out through the connecting pipe and the corresponding branch pipe into the driving cavity inside the corresponding accommodating column by the movement of the pressure block. The inflation inside the driving cavity can push the stopper and the transmission rod to rotate inside the accommodating column. The transmission rod rotates so that the support block to which it is fixed can drive the wafers on the upper and lower surfaces to flip, so that the wafer on the upper surface of the support block rotates downward, and the wafer after coating on the lower surface of the support block rotates upward. Therefore, after one of the wafers is coated, it can be flipped to coat the other wafer, thereby improving the overall evaporation processing efficiency.

[0004] The substrate limiting structure recorded in the above-mentioned public document can realize the assembly of two substrates on the same supporting block in a back-to-back manner. After the end surface of one of the substrates is evaporated, the positions of the two substrates can be swapped directly through the supporting block, and the other substrate can be evaporated. However, the substrate limiting structure is only suitable for single-sided vapor deposition. If the substrate needs to be double-sided vapor deposited, the above-mentioned limiting structure is not convenient to use, and the two substrates distributed in a back-to-back manner need to be disassembled at the same time and then turned over and installed. Summary of the invention

[0005] The object of the present invention is to provide a substrate hanging mechanism in a vacuum evaporation chamber of a vacuum evaporation machine to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solutions: a substrate hanging mechanism in an evaporation chamber of a vacuum evaporation machine, comprising: an evaporation machine casing and a cover hingedly mounted on the side of the evaporation machine casing to play a sealing role, a suspension plate is concentrically mounted inside the evaporation machine casing, the suspension plate is located above the inside of the evaporation machine casing, a plurality of dumbbell-shaped grooves are opened inside the evaporation machine casing, the dumbbell-shaped grooves include a first accommodating portion, a second accommodating portion and a connecting portion, the first accommodating portion is located on a side of the second accommodating portion away from the center of the suspension plate, and the connecting portion is located between the first accommodating portion and the second accommodating portion, a first adsorption suspension component is arranged inside the first accommodating portion, and a second adsorption suspension component is arranged inside the second accommodating portion;

[0007] It also includes: a switching unit, used to perform a flip-over and switching evaporation treatment on the evaporated substrate, wherein the switching unit is arranged between the dumbbell-shaped groove and the suspension plate;

[0008] The quick-release assembly unit is convenient for separating the suspension plate from the vapor deposition machine casing and for inspecting and maintaining the switching unit, the first adsorption suspension component and the second adsorption suspension component. The quick-release assembly unit is arranged between the vapor deposition machine casing and the suspension plate.

[0009] Preferably, the first adsorption suspension component includes an air cylinder which is concentrically slidably inserted into the first accommodating portion, and the end of the air cylinder away from the top of the vapor deposition machine casing is fixedly equipped with a first suspension plate, and a first spring is fixedly equipped between the upper end surface of the first suspension plate and the first accommodating portion, a special-shaped column is fixedly provided at the top center of the suspension plate, and the outer surface of the special-shaped column is fixedly fitted with a first air disk, the first air disk is hollow, and a first hose is fixedly connected and equipped between the end of each air cylinder close to the top of the vapor deposition machine casing and the first air disk, wherein an air hole is opened in the center of the first suspension plate, which is connected with the air cylinder through the air hole.

[0010] Preferably, the second adsorption suspension component includes a second suspension plate concentrically placed inside the second accommodating portion, and the outer surface of the special-shaped column is also fixedly mounted with a second air disk, the second air disk is also hollow, and a second hose is fixedly connected to the second air disk at one end of each second suspension plate close to the top of the vapor deposition machine casing, and a silicone rubber suction cup is fixedly provided on one end surface of the first suspension plate and the second suspension plate close to the bottom of the vapor deposition machine casing, and the silicone rubber suction cup is respectively connected to the air cylinder and the second hose, and two ventilation pipes are fixedly installed inside the special-shaped column, and the two ventilation pipes are respectively fixedly connected to the first air disk and the second air disk, and a negative pressure suction component is also provided on the top of the two special-shaped columns, and the second suspension plate can swing toward the direction of the first suspension plate.

[0011] Preferably, the negative pressure suction component includes a rotating sealing column concentrically mounted on the top of the evaporator casing, and the special-shaped column slides through the rotating sealing column, the top fixing frame of the rotating sealing column is equipped with two hard tubes equidistantly distributed around the circumference, the hard tube is in the shape of a right-angle elbow, and the bending port of the hard tube faces the special-shaped column, the two ventilation pipes are slidably inserted into the bending port of the hard tube, the upper end of the ventilation pipe is fixedly provided with a second sealing plug gasket, and the second sealing plug gasket is abutted against the inside of the hard tube, and two negative pressure suction pumps equidistantly distributed around the circumference are also fixedly provided on the top of the evaporator casing, one end of each of the hard tubes away from the rotating sealing column is respectively connected to the suction end of the two negative pressure suction pumps, and the outside of each of the hard tubes is also equipped with an electromagnetic control valve, and the air pressure states in the two ventilation pipes are respectively controlled by the action of the two negative pressure suction pumps and the electromagnetic control valve.

[0012] Preferably, the lower end surfaces of the first suspension plate and the second suspension plate are in the same horizontal plane, and the lower end surfaces of both are lower than the lower end surface of the suspension plate, that is, to ensure that the outer edge of the adsorbed and suspended substrate is not blocked.

[0013] Preferably, the switching unit includes a rotating shaft rotatably mounted on the top of the vapor deposition machine casing, and a transmission gear is fixedly mounted on the outer surface of the rotating shaft, a plurality of teeth equidistantly distributed around the circumference are fixedly mounted on the outer surface of the upper end of the rotating sealing column, and a transmission belt is installed for transmission between the plurality of teeth and the transmission gear, a positioning pin is also fixedly mounted on the inner top of the vapor deposition machine casing, a plurality of limiting frames equidistantly distributed around the circumference are fixed on the upper end fixing frame of the suspension plate, and a helical gear ring is slidably mounted inside the plurality of limiting frames, a positioning recess block is fixedly mounted on the upper end surface of the helical gear ring, and the bottom of the positioning pin is slidably embedded in the groove of the positioning recess block, a flipping component is arranged between the helical gear ring and a plurality of the second suspension plates, and the positioning recess block is restricted by the positioning pin, so that the state of the helical gear ring remains unchanged when the suspension plate is rotated, wherein the rotating shaft can be driven by a stepping motor and can also be twisted by a wrench.

[0014] Preferably, the flip component includes a positioning shaft rotatably arranged in the connecting part, and the two ends of the positioning shaft are respectively facing the first accommodating part and the second accommodating part, the outer surface of the positioning shaft is fixedly sleeved with a worm, and the end of the second suspension plate close to the first accommodating part is fixedly mounted with a worm gear, and the worm gear is assembled with the worm gear, the upper end surface of the suspension plate is fixedly mounted with a retaining frame, and the number of the retaining frames is consistent with the number of the dumbbell-shaped grooves, and the first transmission shaft and the second transmission shaft are rotatably arranged inside each of the retaining frames, the outer surfaces of the first transmission shaft and the second transmission shaft are respectively fixedly sleeved with a second bevel gear and a first bevel gear, and the first bevel gear transmission is meshed between the second bevel gear and the bevel gear ring, and a synchronous toothed belt is assembled between the second transmission shaft and the positioning shaft through a synchronous gear transmission, an optical axis is fixedly arranged at the axis of the worm gear, and the optical axis is rotatably embedded in the interior of the suspension plate, wherein the size of the first bevel gear is larger than the gear of the second bevel gear to avoid the two contacting the bevel gear ring at the same time, thereby causing jamming.

[0015] Preferably, the quick-disassembly assembly unit includes a straight groove opened inside the special-shaped column, and the special-shaped column and the straight groove are vertically distributed, a sliding disk is radially slidably installed inside the rotating sealing column, and the sliding disk is fixedly provided with a triangular block sliding through the rotating sealing column at one end close to the ventilation pipe, and the triangular block is movably embedded in the straight groove, a second spring is provided between the end of the sliding disk away from the triangular block and the rotating sealing column, and a traction rope is also fixedly provided at the end of the sliding disk away from the triangular block, and the other end of the traction rope slides through the rotating Sealing column, the trajectory of the traction rope is ninety degrees, and the end of the traction rope away from the sliding plate is located at the upper end of the rotating sealing column, the exposed end of the traction rope is fixedly provided with a ball block, and the lower port of the rotating sealing column is provided with a beveled edge portion, the outer surface of the special-shaped column is fixedly covered with a tray, and the upper end surface of the tray is fixedly provided with a first sealing plug pad, the first sealing plug pad is abutted against the beveled edge portion, wherein the inclined surface of the triangular clamp block is located below, that is, when the special-shaped column moves upward toward the inside of the rotating sealing column, the special-shaped column can be pushed into the inside of the rotating sealing column through the inclined surface of the triangular clamp block.

[0016] A substrate hanging mechanism in a vacuum evaporation chamber of a vacuum evaporation machine, further comprising a negative pressure control method, the method comprising the following steps:

[0017] S1. Determine preset values ​​of internal temperature parameters of the first hose and the second hose;

[0018] S2, establishing a corresponding relationship between the operation action of the negative pressure suction pump and the preset value of the internal temperature parameter;

[0019] S3, measuring the real-time temperature data values ​​of the internal parameters of the first hose and the second hose by a temperature sensor;

[0020] S4. When the real-time temperature data value reaches the preset value of the internal temperature parameter, the negative pressure suction pump performs a corresponding operation;

[0021] The preset value of the internal temperature parameter in step S1 includes: setting a critical air pressure value corresponding to each operation action, each critical air pressure value is smaller than the air pressure inside the casing of the vapor deposition machine, establishing a fitting relationship between the air pressure and the temperature, and calculating the temperature value corresponding to each critical air pressure value according to the fitting relationship as a preset value of the corresponding operation action;

[0022] The operation steps in step S2 include: inflating the negative pressure suction pump, exhausting the negative pressure suction pump, and shutting down the negative pressure suction pump.

[0023] Preferably, the fitting relationship is an exponential function, and the fitting relationship is:

[0024] ;

[0025] P is air pressure, T is temperature, and a and b are fitting parameters.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] The present invention can fix the substrate under the first adsorption suspension component for single-sided vapor deposition through the cooperation of the first adsorption suspension component, the second adsorption suspension component and the switching unit, and then transfer the substrate to the bottom of the second adsorption suspension component under the control of the switching unit, and the substrate can be turned over during the transfer process, that is, double-sided vapor deposition can be performed without stopping the vapor deposition machine, and all structures on the suspension plate can be removed at the same time under the action of the quick-disassembly assembly unit, so as to facilitate the inspection and maintenance of the first adsorption suspension component and the second adsorption suspension component. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0029] Figure 2 This is a schematic diagram of the dumbbell-shaped groove position distribution structure of the present invention;

[0030] Figure 3 It is a schematic diagram of the upper structure of the suspension plate of the present invention;

[0031] Figure 4 This is a schematic diagram of the position distribution structure of the rotary sealing column of the present invention;

[0032] Figure 5 For the present invention Figure 4 Enlarged view of point A in the middle;

[0033] Figure 6 It is a schematic diagram of the electromagnetic control method and the hard tube structure of the present invention;

[0034] Figure 7 For the present invention Figure 6 Enlarged view of point B in the middle.

[0035] In the figure: 1, evaporator housing; 2, cover; 3, suspension plate; 4, dumbbell-shaped groove; 5, first suspension plate; 6, second suspension plate; 7, silicone rubber suction cup; 8, air cylinder; 9, special-shaped column; 10, vent pipe; 11, second air disc; 12, first air disc; 13, first hose; 14, second hose; 15, oblique gear ring; 16, limit frame; 17, positioning concave block; 18, positioning pin; 19, rotating sealing column; 20, transmission gear; 21. Transmission belt; 22. Hard pipe; 23. Solenoid control valve; 24. Negative pressure suction pump; 25. Worm gear; 26. Worm; 27. Retaining frame; 28. First bevel gear; 29. ​​Second bevel gear; 30. First spring; 31. Straight groove; 32. Triangular block; 33. Sliding plate; 34. Second spring; 35. Traction rope; 36. Ball block; 37. Tray; 38. First sealing gasket; 39. Bevel edge; 40. Second sealing gasket. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] Example 1: Please refer to Figure 1-Figure 5 , a substrate hanging mechanism in the evaporation chamber of a vacuum evaporation machine shown in the figure comprises: an evaporation machine casing 1 and a cover 2 hingedly assembled on the side of the evaporation machine casing 1 to play a sealing role, a suspension plate 3 is concentrically assembled inside the evaporation machine casing 1, and the suspension plate 3 is located above the inside of the evaporation machine casing 1. A plurality of dumbbell-shaped grooves 4 are opened inside the evaporation machine casing 1. The dumbbell-shaped grooves 4 include a first accommodating portion, a second accommodating portion and a connecting portion. The first accommodating portion is located on a side of the second accommodating portion away from the center of the suspension plate 3, and the connecting portion is located between the first accommodating portion and the second accommodating portion. A first adsorption suspension component is arranged inside the first accommodating portion, and a second adsorption suspension component is arranged inside the second accommodating portion.

[0038] It also includes: a switching unit, which is used to turn over and switch the evaporation treatment on the evaporation-deposited substrate, and the switching unit is arranged between the dumbbell-shaped groove 4 and the suspension plate 3;

[0039] The quick-release assembly unit facilitates separation of the suspension plate 3 from the vapor deposition machine casing 1 and inspection and maintenance of the switching unit, the first adsorption suspension component and the second adsorption suspension component. The quick-release assembly unit is arranged between the vapor deposition machine casing 1 and the suspension plate 3.

[0040] The first adsorption suspension component includes an air cylinder 8 which is concentrically slidably inserted inside the first accommodating portion, and the end of the air cylinder 8 away from the top of the vapor deposition machine casing 1 is fixedly equipped with a first suspension plate 5, and a first spring 30 is fixedly equipped between the upper end surface of the first suspension plate 5 and the first accommodating portion, a special-shaped column 9 is fixedly provided at the top center of the suspension plate 3, and the outer surface of the special-shaped column 9 is fixedly fitted with a first air disk 12, the first air disk 12 is hollow, and a first hose 13 is fixedly connected and equipped between the end of each air cylinder 8 close to the top of the vapor deposition machine casing 1 and the first air disk 12, wherein an air hole is opened in the center of the first suspension plate 5, and is connected with the air cylinder 8 through the air hole.

[0041] The second adsorption suspension component includes a second suspension plate 6 concentrically placed inside the second accommodating portion, and a second air disk 11 is fixedly mounted on the outer surface of the special-shaped column 9, and the second air disk 11 is also hollow, and a second hose 14 is fixedly connected between the end of each second suspension plate 6 close to the top of the vapor deposition machine casing 1 and the second air disk 11, and a silicone rubber suction cup 7 is fixedly arranged on the end surface of the first suspension plate 5 and the second suspension plate 6 close to the bottom of the vapor deposition machine casing 1, and the silicone rubber suction cup 7 is respectively connected to the air cylinder 8 and the second hose 14, and two ventilation pipes 10 are fixedly installed inside the special-shaped column 9, and the two ventilation pipes 10 are respectively fixedly connected to the first air disk 12 and the second air disk 11, and a negative pressure suction component is also arranged on the top of the two special-shaped columns 9, and the second suspension plate 6 can swing toward the direction of the first suspension plate 5.

[0042] The negative pressure suction component includes a rotating sealing column 19 which is coaxially rotatably mounted on the top of the vapor deposition machine housing 1, and the special-shaped column 9 slides through the rotating sealing column 19. The top fixing frame of the rotating sealing column 19 is equipped with two hard tubes 22 which are equidistantly distributed in a circle. The hard tubes 22 are in the shape of right-angle elbows, and the bending ports of the hard tubes 22 face the special-shaped column 9. The two ventilation pipes 10 are both slidably inserted into the bending ports of the hard tubes 22, and the upper ends of the ventilation pipes 10 are fixedly provided with second sealing plugs. 40, and the second sealing plug gasket 40 is against the inside of the hard tube 22, and two negative pressure suction pumps 24 equidistantly distributed in a circle are fixedly arranged on the top of the vapor deposition machine casing 1, and one end of each hard tube 22 away from the rotating sealing column 19 is respectively connected to the suction ends of the two negative pressure suction pumps 24, and an electromagnetic control valve 23 is also installed on the outside of each hard tube 22. The air pressure states in the two ventilation pipes 10 are controlled respectively through the action of the two negative pressure suction pumps 24 and the electromagnetic control valve 23.

[0043] The lower end surfaces of the first suspension plate 5 and the second suspension plate 6 are in the same horizontal plane, and the lower end surfaces of the two are lower than the lower end surface of the suspension plate 3, which ensures that the outer edge of the substrate being adsorbed and suspended will not be blocked.

[0044] The switching unit includes a rotating shaft rotatably mounted on the top of the vapor deposition machine casing 1, and a transmission gear 20 is fixedly mounted on the outer surface of the rotating shaft, a plurality of teeth equidistantly distributed around the circumference are fixedly mounted on the outer surface of the upper end of the rotating sealing column 19, and a transmission belt 21 is mounted between the plurality of teeth and the transmission gear 20 for transmission, a positioning pin 18 is also fixedly mounted on the inner top of the vapor deposition machine casing 1, a plurality of limiting frames 16 equidistantly distributed around the circumference are fixedly mounted on the upper end fixing frame of the suspension plate 3, and a helical gear ring 15 is slidably mounted inside the plurality of limiting frames 16, a positioning recess 17 is fixedly mounted on the upper end surface of the helical gear ring 15, and the bottom of the positioning pin 18 is slidably embedded in the groove of the positioning recess 17, a flipping component is arranged between the helical gear ring 15 and the plurality of second suspension plates 6, and the positioning recess 17 is restricted by the positioning pin 18, so that when the suspension plate 3 is rotated, the state of the helical gear ring 15 remains unchanged, wherein the rotating shaft can be driven by a stepping motor and can also be twisted by a wrench.

[0045] The flipping component includes a positioning shaft rotatably arranged in the connecting portion, and the two ends of the positioning shaft are respectively facing the first accommodating portion and the second accommodating portion, a worm 26 is fixedly mounted on the outer surface of the positioning shaft, a worm wheel 25 is fixedly mounted on one end of the second suspension plate 6 close to the first accommodating portion, and the worm wheel 25 is transmission-assembled with the worm 26, a retaining frame 27 is fixedly mounted on the upper end surface of the suspension plate 3, and the number of retaining frames 27 is consistent with the number of dumbbell-shaped grooves 4, a first transmission shaft and a second transmission shaft are rotationally arranged inside each retaining frame 27, a second bevel gear 29 and a first bevel gear 28 are respectively fixedly mounted on the outer surfaces of the first transmission shaft and the second transmission shaft, and the first bevel gear 28 is transmission-engaged between the second bevel gear 29 and the bevel gear ring 15, a synchronous toothed belt is transmission-assembled between the second transmission shaft and the positioning shaft through a synchronous gear, an optical axis is fixedly mounted at the axis of the worm wheel 25, and the optical axis is rotationally embedded in the interior of the suspension plate 3, wherein the size of the first bevel gear 28 is larger than the gear of the second bevel gear 29 to avoid the two being in contact with the bevel gear ring 15 at the same time, thereby causing jamming.

[0046] How this solution works:

[0047] Before the evaporation machine is operated, the two electromagnetic control valves 23 are both in a closed state, that is, the air inside the air cylinder 8 and the silicone rubber suction cup 7 cannot circulate. At this time, the substrate to be evaporated is assembled below the first suspension plate 5. During the assembly process, the staff only needs to press the substrate to the bottom of the silicone rubber suction cup 7 below the first suspension plate 5. During the pressing process, the substrate can close the lower port of the silicone rubber suction cup 7 and squeeze out a part of the air inside the silicone rubber suction cup 7. At this time, negative pressure is formed between the silicone rubber suction cup 7, the air cylinder 8 and the first hose 13, and the substrate can be adsorbed and suspended below the first suspension plate 5. After the substrates are assembled, the staff can start the negative pressure suction pump 24 connected to the first hose 13 in advance, and control the air pressure in the space between the negative pressure suction pump 24 and the electromagnetic control valve 23 to be lower than the air pressure inside the silicone rubber suction cup 7, and then open the electromagnetic control valve 23 to allow the negative pressure suction pump 24 to be directly connected to the first hose 13. At this time, the substrate below the first suspension plate 5 can be adsorbed more firmly;

[0048] At this time, the evaporation operation can be carried out. After the evaporation at the lower end of the substrate is completed, the staff can use the rotating shaft and the transmission gear 20 to drive the rotating sealing column 19 to deflect and move the angle. Since the positioning pin 18 restricts the positioning recess 17, when the rotating sealing column 19 deflects with the suspension plate 3 through the special-shaped column 9, it can drive the first bevel gear 28 and the second bevel gear 29 to rotate, causing the worm 26 to deflect with the worm wheel 25, and the second suspension plate 6 can be swung toward the first suspension plate 5 to cover the second suspension plate 6 and the first suspension plate 5 to clamp the substrate. The disk 7 fits tightly against the surface of the substrate where evaporation is completed. At this time, another negative pressure suction pump 24 and the electromagnetic control valve 23 are controlled to work, so that the silicone rubber suction cup 7 under the second suspension plate 6 can limit the negative pressure adsorption of the substrate, and then the air pressure inside the air cylinder 8 is gradually restored to be consistent with the air pressure inside the evaporation machine casing 1, that is, the silicone rubber suction cup 7 under the first suspension plate 5 no longer limits the adsorption of the substrate. At this time, the rotating shaft can be triggered to perform a reset operation, and the second suspension plate 6 that has adsorbed the substrate can be reset at the same time. After the reset is completed, the end face of the substrate that has not been evaporated can also be turned downward, thereby achieving the effect of changing the surface for evaporation.

[0049] It is worth noting that the method of suspending the substrate in this scheme is not the clamping limitation commonly used in the prior art. Since the clamping devices are mostly made of metal materials, in order to ensure the stability of the substrate clamping, the clamping device will usually exceed the evaporation surface of the substrate, which is easy to block the steam particles and cause uneven coating of the substrate. Moreover, during the preheating process of the substrate, the metal clamping device is in direct contact with the substrate, which is also easy to cause the contact point between the substrate and the metal clamping device to be too cold or too hot. The overall uneven heating of the substrate is also easy to affect the uniformity of the coating.

[0050] Example 2: Please refer to Figure 6 and Figure 7 , this embodiment is a further description of embodiment 1, the quick-release assembly unit includes a straight groove 31 opened in the special-shaped column 9, and the special-shaped column 9 and the straight groove 31 are vertically distributed, the interior of the rotating sealing column 19 is radially slidably equipped with a sliding plate 33, and the sliding plate 33 is fixedly provided with a triangular block 32 that slides through the rotating sealing column 19 at one end close to the ventilation pipe 10, and the triangular block 32 is movably embedded in the straight groove 31, and a second spring 34 is provided between the end of the sliding plate 33 away from the triangular block 32 and the rotating sealing column 19, and a traction rope 35 is also fixedly provided at the end of the sliding plate 33 away from the triangular block 32, and the other end of the traction rope 35 slides through the rotating The trajectory of the sealing column 19 and the traction rope 35 is ninety degrees, and the end of the traction rope 35 away from the sliding plate 33 is located at the upper end of the rotating sealing column 19, and the exposed end of the traction rope 35 is fixedly provided with a ball block 36. The lower port of the rotating sealing column 19 is provided with a bevel portion 39. The outer surface of the special-shaped column 9 is fixedly covered with a tray 37, and the upper end surface of the tray 37 is fixedly provided with a first sealing plug gasket 38, and the first sealing plug gasket 38 is abutted against the bevel portion 39, wherein the inclined surface of the triangular clamp block 32 is located at the bottom, that is, when the special-shaped column 9 moves upward toward the inside of the rotating sealing column 19, the special-shaped column 9 can be pushed into the inside of the rotating sealing column 19 through the inclined surface of the triangular clamp block 32.

[0051] In this embodiment: In this scheme, taking into account the narrow space inside the vapor deposition machine casing 1, if the structure on the suspension plate 3 needs to be inspected, maintained or replaced, the operation is extremely inconvenient. For this reason, in this scheme, the suspension plate 3 can be quickly disassembled, that is, the traction rope 35 can be directly pulled by the ball block 36, so that the triangular clamp block 32 can be retracted from the inside of the straight groove 31 to the inside of the rotating sealing column 19, and no longer restricts the special-shaped column 9. At this time, the staff can separate the special-shaped column 9 from the inside of the rotating sealing column 19, and can take out the entire structure on the suspension plate 3 from the vapor deposition machine casing 1 for inspection, maintenance or replacement of accessories.

[0052] When reassembling the suspension plate 3 to the interior of the vapor deposition machine casing 1, the staff only needs to insert the special-shaped column 9 into the interior of the rotating sealing column 19, let the triangular clamp block 32 re-insert into the interior of the straight groove 31, and restrict the special-shaped column 9 again. During the reassembly process, the first sealing plug gasket 38 will be squeezed against the bevel portion 39, and the second sealing plug gasket 40 will be squeezed against the internal structure of the hard tube 22 to ensure the sealing between the hard tube 22 and the ventilation pipe 10, the special-shaped column 9 and the rotating sealing column 19.

[0053] Example 3: Please refer to Figure 1-Figure 4This embodiment is a further description of the first embodiment, a substrate hanging mechanism in a vacuum evaporation chamber of a vacuum evaporation machine, and a negative pressure control method of the substrate hanging mechanism in a vacuum evaporation chamber of the vacuum evaporation machine comprises the following steps:

[0054] S1, determining preset values ​​of internal temperature parameters of the first hose 13 and the second hose 14;

[0055] S2, establishing a corresponding relationship between the operation action of the negative pressure suction pump 24 and the preset value of the internal temperature parameter;

[0056] S3, measuring the real-time temperature data values ​​of the internal parameters of the first hose 13 and the second hose 14 by means of a temperature sensor;

[0057] S4, when the real-time temperature data value reaches the preset value of the internal temperature parameter, the negative pressure suction pump 24 performs a corresponding operation;

[0058] The preset value of the internal temperature parameter in step S1 includes: setting the critical value of air pressure corresponding to each operation action respectively, each critical value of air pressure is less than the air pressure inside the housing 1 of the vapor deposition machine, establishing a fitting relationship between air pressure and temperature, and calculating the temperature value corresponding to each critical value of air pressure according to the fitting relationship as the preset value of the corresponding operation action;

[0059] The operation steps in step S2 include: inflating the negative pressure suction pump 24, exhausting the negative pressure suction pump 24, and shutting down the negative pressure suction pump 24.

[0060] Among them, the fitting relationship is an exponential function, and the fitting relationship is:

[0061] ;

[0062] P is air pressure, T is temperature, and a and b are fitting parameters.

[0063] In this embodiment: the fitting relationship is:

[0064] ;

[0065] In the present scheme, it is taken into consideration that the internal temperature of the vapor deposition machine casing 1 will rise when it is working, which will affect the negative pressure adsorption strength of the first hose 13 and the second hose 14 on the substrate. That is, in the present scheme, the two negative pressure suction pumps 24 can give the silicone rubber suction cup 7 at the bottom of the first hose 13 or the second hose 14 to adhere to the substrate, thereby ensuring that the air pressure inside the first hose 13 or the second hose 14 is continuously lower than the internal extrusion of the vapor deposition machine casing 1, that is, ensuring effective negative pressure absorption and suspension of the substrate, and the three operating steps are used in conjunction with the process of switching the substrate between the two silicone rubber suction cups 7.

[0066] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0067] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A substrate hanging mechanism in a vacuum evaporation chamber of a vacuum evaporation machine, characterized in that: include: A vapor deposition machine casing (1) and a cover (2) hingedly mounted on the side of the vapor deposition machine casing (1) for sealing, a suspension plate (3) being coaxially mounted inside the vapor deposition machine casing (1), the suspension plate (3) being located above the inside of the vapor deposition machine casing (1), a plurality of dumbbell-shaped grooves (4) being provided inside the vapor deposition machine casing (1), the dumbbell-shaped grooves (4) comprising a first accommodating portion, a second accommodating portion and a connecting portion, the first accommodating portion being located on a side of the second accommodating portion away from the center of the suspension plate (3), and the connecting portion being located between the first accommodating portion and the second accommodating portion, a first adsorption suspension component being provided inside the first accommodating portion, and a second adsorption suspension component being provided inside the second accommodating portion; Also includes: A switching unit, used for flipping and switching the vapor deposition process on the vapor-deposited substrate, the switching unit being arranged between the dumbbell-shaped groove (4) and the suspension plate (3); A quick-release assembly unit is provided to facilitate separation of the suspension plate (3) from the vapor deposition machine casing (1) and to inspect and maintain the switching unit, the first adsorption suspension component and the second adsorption suspension component, the quick-release assembly unit being arranged between the vapor deposition machine casing (1) and the suspension plate (3); The first adsorption suspension component comprises an air cylinder (8) which is coaxially slidably inserted into the first accommodating portion, and the end of the air cylinder (8) away from the top of the vapor deposition machine casing (1) is fixedly equipped with a first suspension plate (5), and a first spring (30) is fixedly equipped between the upper end surface of the first suspension plate (5) and the first accommodating portion, a special-shaped column (9) is fixedly arranged at the top center of the suspension plate (3), and the outer surface of the special-shaped column (9) is fixedly covered with a first air disk (12), the first air disk (12) is hollow, and a first hose (13) is fixedly connected and equipped between the end of each air cylinder (8) close to the top of the vapor deposition machine casing (1) and the first air disk (12); The second adsorption suspension component comprises a second suspension plate (6) concentrically placed inside the second accommodating portion, the outer surface of the special-shaped column (9) is also fixedly mounted with a second gas disk (11), the second gas disk (11) is also hollow, and a second hose (14) is fixedly arranged between one end of each second suspension plate (6) close to the top of the vapor deposition machine casing (1) and the second gas disk (11), the first suspension plate (5) and the second suspension plate (6) are fixedly arranged on one end surface close to the bottom of the vapor deposition machine casing (1) with a silicone rubber suction cup (7), and the silicone rubber suction cup (7) is respectively connected to the gas cylinder (8) and the second hose (14), the interior of the special-shaped column (9) is fixedly equipped with two ventilation pipes (10), the two ventilation pipes (10) are respectively fixedly connected to the first gas disk (12) and the second gas disk (11), and negative pressure suction components are also arranged on the tops of the two special-shaped columns (9).

2. The substrate hanging mechanism in the evaporation chamber of a vacuum evaporation machine according to claim 1, characterized in that: The negative pressure suction component comprises a rotating sealing column (19) coaxially rotatably mounted on the top of the vapor deposition machine housing (1), and the special-shaped column (9) slides through the rotating sealing column (19), and the top fixing frame of the rotating sealing column (19) is equipped with two hard tubes (22) equidistantly distributed around the circumference, the hard tubes (22) are in the shape of right-angle elbows, and the bending ends of the hard tubes (22) face the special-shaped column (9), and the two ventilation tubes (10) are both slidably inserted into the bending ends of the hard tubes (22). The upper end of the ventilation pipe (10) is fixedly provided with a second sealing plug gasket (40), and the second sealing plug gasket (40) is against the inside of the hard pipe (22). The top of the vapor deposition machine housing (1) is also fixedly provided with two negative pressure suction pumps (24) distributed equidistantly in a circle. One end of each of the hard pipes (22) away from the rotating sealing column (19) is respectively connected to the suction ends of the two negative pressure suction pumps (24). The outside of each of the hard pipes (22) is also equipped with an electromagnetic control valve (23).

3. The substrate hanging mechanism in the evaporation chamber of a vacuum evaporation machine according to claim 2, characterized in that: The lower end surfaces of the first suspension plate (5) and the second suspension plate (6) are located in the same horizontal plane, and the lower end surfaces of both are lower than the lower end surface of the suspension plate (3).

4. The substrate hanging mechanism in the evaporation chamber of a vacuum evaporation machine according to claim 2, characterized in that: The switching unit comprises a rotating shaft rotatably mounted on the top of the vapor deposition machine casing (1), and a transmission gear (20) is fixedly mounted on the outer surface of the rotating shaft, a plurality of teeth equidistantly distributed around the circumference are fixedly mounted on the outer surface of the upper end of the rotating sealing column (19), and a transmission belt (21) is mounted between the plurality of teeth and the transmission gear (20), a positioning pin (18) is fixedly mounted on the inner top of the vapor deposition machine casing (1), a plurality of limit frames (16) equidistantly distributed around the circumference are fixedly mounted on the upper end fixing frame of the suspension plate (3), and a bevel gear ring (15) is slidably mounted inside the plurality of limit frames (16), a positioning recess (17) is fixedly mounted on the upper end surface of the bevel gear ring (15), and the bottom of the positioning pin (18) is slidably embedded in the groove of the positioning recess (17), and a flip component is arranged between the bevel gear ring (15) and the plurality of second suspension plates (6).

5. The substrate hanging mechanism in the evaporation chamber of a vacuum evaporation machine according to claim 4, characterized in that: The flip component comprises a positioning shaft rotatably arranged in the connecting portion, and the two ends of the positioning shaft are respectively facing the first accommodating portion and the second accommodating portion, the outer surface of the positioning shaft is fixedly sleeved with a worm (26), one end of the second suspension plate (6) close to the first accommodating portion is fixedly mounted with a worm gear (25), and the worm gear (25) is transmission-assembled with the worm gear (26), the upper end surface of the suspension plate (3) is fixedly mounted with a retaining frame (27), and the number of the retaining frames (27) is consistent with the number of the dumbbell-shaped grooves (4), each The retaining frame (27) is internally rotatably provided with a first transmission shaft and a second transmission shaft, and the outer surfaces of the first transmission shaft and the second transmission shaft are respectively fixedly provided with a second bevel gear (29) and a first bevel gear (28), and the first bevel gear (28) is transmission-engaged between the second bevel gear (29) and the bevel gear ring (15), and a synchronous toothed belt is assembled between the second transmission shaft and the positioning shaft via a synchronous gear transmission, and an optical axis is fixedly provided at the axis of the worm gear (25), and the optical axis is rotationally embedded in the interior of the suspension plate (3).

6. The substrate hanging mechanism in the evaporation chamber of a vacuum evaporation machine according to claim 2, characterized in that: The quick-disassembly assembly unit comprises a straight groove (31) provided inside the special-shaped column (9), and the special-shaped column (9) and the straight groove (31) are arranged vertically. A sliding plate (33) is radially slidably mounted inside the rotating sealing column (19), and a triangular clamping block (32) slidingly penetrating the rotating sealing column (19) is fixedly arranged at one end of the sliding plate (33) close to the ventilation pipe (10), and the triangular clamping block (32) is movably embedded in the straight groove (31). A second spring (34) is arranged between one end of the sliding plate (33) away from the triangular clamping block (32) and the rotating sealing column (19), and the sliding plate (33) away from the triangular clamping block (32) is arranged. A traction rope (35) is fixedly provided at one end thereof, and the other end of the traction rope (35) slides through the rotating sealing column (19), the trajectory of the traction rope (35) is ninety degrees, and the end of the traction rope (35) away from the sliding plate (33) is located at the upper end of the rotating sealing column (19), a ball block (36) is fixedly provided at the exposed end of the traction rope (35), a beveled edge portion (39) is provided inside the lower end port of the rotating sealing column (19), a tray (37) is fixedly sleeved on the outer surface of the special-shaped column (9), and a first sealing plug pad (38) is fixedly provided on the upper end surface of the tray (37), and the first sealing plug pad (38) abuts against the beveled edge portion (39).

7. A negative pressure control method for a substrate hanging mechanism in a vacuum evaporation chamber of a vacuum evaporation machine according to any one of claims 2 to 6, characterized in that: The negative pressure control method comprises the following steps: S1. Determine preset values ​​of internal temperature parameters of the first hose (13) and the second hose (14); S2, establishing a corresponding relationship between the operating action of the negative pressure suction pump (24) and the preset value of the internal temperature parameter; S3, measuring real-time temperature data values ​​of internal parameters of the first hose (13) and the second hose (14) by means of a temperature sensor; S4, when the real-time temperature data value reaches the preset value of the internal temperature parameter, the negative pressure suction pump (24) performs a corresponding operation; The preset value of the internal temperature parameter in step S1 comprises: respectively setting a critical air pressure value corresponding to each operation action, each critical air pressure value being smaller than the air pressure inside the housing (1) of the vapor deposition machine, establishing a fitting relationship between the air pressure and the temperature, and calculating the temperature value corresponding to each critical air pressure value according to the fitting relationship as a preset value for the corresponding operation action; The operation steps in step S2 include: inflating the negative pressure suction pump (24), exhausting the negative pressure suction pump (24), and shutting down the negative pressure suction pump (24).

8. The negative pressure control method of a substrate hanging mechanism in a vacuum evaporation chamber of a vacuum evaporation machine according to claim 7, characterized in that: The fitting relationship is an exponential function, and the fitting relationship is: ; P is air pressure, T is temperature, and a and b are fitting parameters.

Images