Standard device and calibration method for automatic calibration of X-ray 3D online detection system

Abstract

The invention discloses a standard device and a calibration method for automatic calibration of an X-ray 3D online detection system. The standard device comprises: a fixture and a plurality of calibration parts, wherein the calibration parts are detachably mounted on the fixture; a laser sensor height position calibration part comprises a metal base plate and a metal step mounted on the metal base plate; a CCD pixel grayscale calibration part is a standard white plate configured as a target grayscale value; a CCD resolution calibration part comprises a glass plate and a circular frame etched on the glass plate; an X-ray axial compensation calibration part comprises a PVC plate and a steel ball fixed in the center of the PVC plate; a flat panel detector FPD offset calibration part comprises a PVC plate and a plurality of steel balls fixed near the center of the PVC plate; a Z-axis direction dimension calibration part comprises a carbon fiber plate and a tungsten sheet stacked on the carbon fiber plate; and online automatic calibration can be performed on a detection device for functional parameters of a detection system.

Description

Technical Field

[0001] The invention belongs to the technical field of integrated circuits and electronic manufacturing, and in particular relates to a standard device and a calibration method for automatic calibration of an X-ray 3D online detection system. Background Art

[0002] X-ray 3D online detection equipment (hereinafter referred to as detection equipment) is widely used in industrial non-destructive testing and medical imaging. The X-ray 3D online detection system (hereinafter referred to as the detection system) is a detection program running on the X-ray 3D online detection equipment. In order to ensure the data accuracy of the detection results of the detection equipment, it is necessary to calibrate the functional parameters of the detection system based on the detection equipment.

[0003] Currently, the functional parameters are calibrated mainly based on the compensation values ​​set manually. There is no standard device or automatic calibration method that can perform online automatic calibration on the functional parameters of the detection system on the detection equipment. Summary of the invention

[0004] The object of the present invention is to provide a standard device, a calibration method and an electronic device for automatic calibration of an X-ray 3D online detection system, which can perform online automatic calibration on the detection device for the functional parameters of the detection system.

[0005] The first aspect of the present invention discloses a standard device for automatic calibration of an X-ray 3D online detection system, comprising:

[0006] A fixture and a plurality of calibration pieces, wherein the calibration pieces are detachably mounted on the fixture;

[0007] The calibration part is one of a laser sensor height position calibration part, a CCD pixel grayscale calibration part, a CCD resolution calibration part, an X-ray axial compensation calibration part, a flat panel detector FPD offset calibration part, a Z-axis direction size calibration part, and a large-size position accuracy compensation calibration part;

[0008] The laser sensor height position calibration component includes a metal base plate and a metal step mounted on the metal base plate; the CCD pixel grayscale calibration component is a standard white plate configured as a target grayscale value; the CCD resolution calibration component includes a glass plate and a circular frame etched on the glass plate; the X-ray axial compensation calibration component includes a PVC plate and a steel ball fixed in the center of the PVC plate; the flat panel detector FPD bias calibration component includes a PVC plate and a plurality of steel balls fixed near the center of the PVC plate; the Z-axis direction dimension calibration component includes a carbon fiber plate and a tungsten sheet stacked on the carbon fiber plate; the large-size position accuracy compensation calibration component includes a calibration plate made of metal and cylindrical holes arrayed on the calibration plate.

[0009] In some embodiments, the laser sensor height position calibration component is in the shape of a tower, and the metal step is formed by stacking a plurality of metal blocks of different sizes, and the metal blocks are connected by pins.

[0010] In some embodiments, the CCD resolution calibration component includes three groups of circular frames, and the sizes of the three groups of circular frames are different from each other.

[0011] In some embodiments, the PVC plate of the flat panel detector (FPD) offset calibration component is a quadrilateral, and two steel balls are disposed on each diagonal line of the quadrilateral.

[0012] In some embodiments, the surface thickness uniformity of the tungsten sheet in the Z-axis dimension calibration component is no greater than 3 μm, and the surface roughness is no greater than 0.8 μm.

[0013] In some embodiments, the calibration plate of the large-size position accuracy compensation calibration component is a stainless steel plate, and the surface flatness of the stainless steel plate is not greater than 10 μm and the surface roughness is not greater than 0.8 μm.

[0014] In some embodiments, the fixture is provided with a plurality of mounting holes, and the laser sensor height position calibration component, the CCD pixel grayscale calibration component, the CCD resolution calibration component, the X-ray axial compensation calibration component, the flat panel detector FPD offset calibration component, and the Z-axis direction dimension calibration component are mounted on the fixture in an array through the mounting holes, or the large-size position accuracy compensation calibration component is mounted on the fixture through one of the mounting holes.

[0015] A second aspect of the present invention discloses a calibration method for an X-ray 3D online detection system, comprising:

[0016] Transmitting any of the above-mentioned standard devices to the detection area of ​​the detection equipment, adjusting the position of the standard device so that the target calibration part is in the target area, and the target calibration part is one of a laser sensor height position calibration part, a CCD pixel grayscale calibration part, a CCD resolution calibration part, an X-ray axial compensation calibration part, a flat panel detector FPD offset calibration part, a Z-axis direction size calibration part, and a large-size position accuracy compensation calibration part;

[0017] An X-ray 3D online detection system detects the target calibration part to obtain detection data;

[0018] The detection data is analyzed, and the X-ray 3D online detection system is automatically calibrated according to the analysis results.

[0019] In some embodiments, analyzing the detection data and automatically calibrating the X-ray 3D online detection system according to the analysis results includes:

[0020] When the target calibration piece is a laser sensor height position calibration piece, the detection data is a step height value obtained by the laser sensor detecting and identifying the metal step position, and the compensation value of the laser sensor height measurement is calibrated according to the difference between the step height value and the step height traceability value;

[0021] When the target calibration piece is a CCD pixel grayscale calibration piece, the detection data is a CCD detection image, based on the CCD detection image, the grayscale value of the standard white plate is measured, and the compensation value of the CCD pixel grayscale is calibrated according to the difference between the grayscale value and the grayscale traceability value;

[0022] When the target calibration piece is a CCD resolution calibration piece, the detection data is a CCD detection image, a circular frame in the CCD detection image is identified, a circular frame size value is obtained, and a compensation value of the CCD resolution is calibrated according to a difference between the circular frame size value and a circular frame traceability value;

[0023] When the target calibration piece is an X-ray axial compensation calibration piece, the detection data is a scanned image, based on which the position deviation of the collinearity of the X-ray light tube, the detector, and the steel ball axis is measured, and the compensation value of the X-ray axial compensation is calibrated according to the difference between the position deviation and the position deviation traceability value;

[0024] When the target calibration piece is a flat panel detector (FPD) bias calibration piece, the detection data is a scanned image, based on which the center distance between the steel balls is measured, and the compensation value of the flat panel detector (FPD) bias is calibrated according to the difference between the center distance and the traceability value of the center distance;

[0025] When the target calibration piece is a Z-axis dimension calibration piece, the detection data is a scanned image, based on the scanned image, the height value of the tungsten sheet is measured, and the compensation value of the Z-axis dimension is calibrated according to the difference between the height value and the tungsten sheet height traceability value;

[0026] When the target calibration part is a large-size position accuracy compensation calibration part, the detection data is a scanned image. Based on the scanned image, the spacing value between the centers of the cylindrical holes is measured, and the compensation value of the large-size position accuracy is calibrated according to the difference between the spacing value and the spacing traceability value.

[0027] The third aspect of the present invention discloses an electronic device, comprising a memory storing executable program code and a processor coupled to the memory; the processor calls the executable program code stored in the memory to execute a calibration method for an X-ray 3D online detection system as described in any one of the above items.

[0028] The beneficial effect of the present invention is that a variety of calibration parts are designed to calibrate the functional detection parameters of the detection system such as the height position of the laser sensor, CCD pixel grayscale, CCD resolution, X-ray axial compensation, flat panel detector FPD offset, Z-axis direction size and large size position accuracy compensation. After the calibration parts are installed on the fixture, they are transmitted to the detection area of ​​the online detection equipment, and the corresponding functional detection parameters are calibrated according to the difference between the analysis result and the traceability value of the calibration parts by imaging analysis of each calibration part, so as to realize the online automatic calibration of the online detection equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings herein show specific examples of the technical solutions described in the present invention, and together with the specific implementation methods, constitute a part of the specification, and are used to explain the technical solutions, principles and effects of the present invention.

[0030] Unless otherwise specified or defined, the same figure marks in different drawings represent the same or similar technical features, and the same or similar technical features may also be represented by different figure marks.

[0031] Figure 1 is a schematic diagram of a standard device according to an embodiment of the present invention;

[0032] Figure 2 is a schematic diagram of another standard device;

[0033] Figure 3 It is a schematic diagram of the laser sensor height position calibration component;

[0034] Figure 4 This is a schematic diagram of the CCD resolution calibration component;

[0035] Figure 5 This is a schematic diagram of the X-ray axial compensation calibration component;

[0036] Figure 6 This is a schematic diagram of the flat panel detector FPD bias calibration component;

[0037] Figure 7 Schematic diagram of the Z-axis dimension calibration part.

[0038] Description of reference numerals:

[0039] 10. Laser sensor height position calibration parts, 11. Metal base plate, 12. Metal steps, 20. CCD pixel grayscale calibration parts, 30. CCD resolution calibration parts, 31. Glass plate, 32. Rectangular frame, 40. X-ray axial compensation calibration parts, 41. Calibration plate, 42. Steel ball, 50. Flat panel detector FPD bias calibration parts, 51. Calibration plate, 52. Steel ball, 60. Z-axis dimension calibration parts, 61. Calibration plate, 62. Tungsten sheet, 70. Large size position accuracy compensation calibration parts, 71. Calibration plate, 72. Cylindrical hole, 80. Fixture. DETAILED DESCRIPTION

[0040] Unless otherwise specified or defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art. In combination with the technical solution of the present invention in a realistic scenario, all technical and scientific terms used herein may also have meanings corresponding to the purpose of implementing the technical solution of the present invention. The "first, second..." used herein is only used to distinguish the names and does not represent a specific quantity or order. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0041] It should be noted that when a component is considered to be "fixed to" another component, it can be directly fixed to the other component or there can be a central component; when an component is considered to be "connected to" another component, it can be directly connected to the other component or there can be a central component at the same time; when an component is considered to be "installed on" another component, it can be directly installed on the other component or there can be a central component at the same time. When an component is considered to be "set on" another component, it can be directly set on the other component or there can be a central component at the same time.

[0042] Unless otherwise specified or defined, the "said" and "the" used in this document refer to the technical features or technical contents mentioned or described before the corresponding position, and the technical features or technical contents may be the same as or similar to the technical features or technical contents mentioned therein. In addition, the terms "including" and "having" and any variations thereof used in this document are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units inherent to these processes, methods, products or devices.

[0043] To ensure the safety of X-ray detection, the interior of the X-ray host detection equipment is an isolated and closed space. The detection process is as follows: the test piece flows in from the docking storage table on the left end, and is transferred to the detection area in the host through the sample transfer mechanism. The host observes the test piece through the CCD camera and adjusts the moving position of the test piece, stops the test piece in the test area, turns on the detection system, and after the detection is completed, turns off the X-ray source, and then transfers the test piece from the host to the sample docking table on the right end.

[0044] In order to realize the online automatic calibration of the functional parameters of the detection system, the standard device is transmitted to the host instead of the detection part, and the calibration process can be realized in a similar way to the detection process. The standard device of the present invention detachably fixes several calibration parts on the fixture, which are used to calibrate the corresponding functional detection parameters. After the standard device is transmitted to the detection area of ​​the online detection equipment, it can perform imaging analysis on each calibration part, and calibrate the corresponding functional detection parameters according to the difference between the analysis result and the traceability value of the calibration part. It can adapt to the online calibration of the online detection equipment and realize online automatic calibration.

[0045] The embodiment of the present invention provides a standard device that can be applied to the application fields of integrated circuit and electronic manufacturing industries: including automatic calibration of detection systems in chips, integrated circuit manufacturing, PCB printed circuit boards, PCBA packaging and testing, etc.

[0046] Specifically, Figure 1 and Figure 2 As shown, the present embodiment designs a variety of calibration components according to the functional detection parameters of the detection system: a laser sensor height position calibration component 10, used to calibrate the compensation value of the laser sensor height position; a CCD pixel grayscale calibration component 20, used to calibrate the compensation value of the CCD pixel grayscale; a CCD resolution calibration component 30, used to calibrate the CCD resolution compensation value; an X-ray axial compensation calibration component 40, used to calibrate the X-ray axial compensation value; a flat panel detector FPD bias calibration component 50, used to calibrate the flat panel detector FPD bias compensation value; a Z-axis direction size calibration component 60, used to calibrate the Z-axis direction size compensation value; and a large-size position accuracy compensation calibration component 70, used to calibrate the large-size position accuracy compensation value.

[0047] Specifically, the fixture 80 is provided with a plurality of mounting holes. There are two ways to form a standard device with a calibration piece: 1. Figure 1 As shown, the laser sensor height position calibration component 10, CCD pixel grayscale calibration component 20, CCD resolution calibration component 30, X-ray axial compensation calibration component 40, flat panel detector FPD offset calibration component 50, and Z-axis direction dimension calibration component 60 are installed on the fixture 80 through the mounting hole array. Obviously, according to the requirements of the detection equipment, multiple of these calibration components can be selected and installed together on the fixture 80. Figure 2 As shown, a large-size position accuracy compensation calibration piece 70 is mounted on a fixture 80 through a mounting hole. The fixing structure of the calibration piece is not limited, for example, the calibration piece is fixed to the mounting hole by bolt connection. Therefore, by concentrating multiple calibration pieces on one fixture to form a calibration piece group, multiple functional parameters of the detection system can be calibrated at the same time, improving the calibration efficiency and saving the cost of standard device production.

[0048] Among them, Figure 3 As shown, the laser sensor height position calibration part 10 mainly includes a metal base plate 11 and a metal step 12 mounted on the metal base plate. The metal step 12 is formed by a step of a certain height. In this embodiment, the metal step 12 is formed by stacking a plurality of metal blocks of different length, width and height. The size of the metal block is traced by a three-coordinate measuring machine or other high-precision measuring equipment. The length, width and height dimensions are respectively: 30mm×30mm×4mm, 20mm×20mm×3mm and 10mm×10mm×2mm, or the width dimension of the metal block is determined according to the CCD camera of the detection equipment, and is usually set to a width dimension not exceeding one FV (field of view) size. The material of the metal block is 45# steel. The metal blocks are connected by pins to form a tower-shaped laser sensor height position calibration part 10. The three metal blocks are stacked to form three layers of steps, and the flatness of the step surface of each step is not greater than 1μm, and the surface roughness of the step surface is not greater than Ra 0.8μm.

[0049] During calibration, the height of the step is measured by a laser sensor, and the detection system compares the measured height with the actual height (i.e., the traceability value), corrects the compensation value of the laser sensor height position, and realizes automatic calibration of the laser sensor height position.

[0050] The CCD pixel grayscale calibration part 20 is composed of a standard whiteboard of a certain size. In this embodiment, the grayscale value (i.e., the target grayscale value) of the standard whiteboard is designed to be 250±5 or 240±5 according to the configuration of the CCD of the detection equipment. The size of the standard whiteboard is: length 60mm×width 60mm×thickness 5mm, and the surface of the standard whiteboard should be uniform and diffusely reflective. The grayscale value of the standard whiteboard is traced back to the colorimetric reference through the standard whiteboard. The CCD of the detection equipment measures the grayscale value of the standard whiteboard and feeds it back to the detection system. The detection system compares the measured value with the traceability value of the grayscale of the standard whiteboard, and automatically corrects the resolution of the CCD to the grayscale value of the standard whiteboard, thereby realizing the grayscale value calibration of the CCD.

[0051] like Figure 4As shown, the CCD resolution calibration component 30 includes a glass plate 31 and a circular frame 32 etched on the glass plate. When the CCD resolution is calibrated 30, the circular frame 32 is patterned by photolithography. In this embodiment, the size of the glass plate 31 is: length 60mm×width 60mm×thickness 2mm. According to the configuration of the CCD of the detection equipment, the circular frame 32 is designed into three groups, and the sizes of the three groups of circular frames 32 are different from each other, namely: length 30mm×width 30mm, length 20mm×width 20mm, length 10mm×width 10mm. It should be noted that the length and width of the circular frame 32 can be adjusted according to the configuration of the CCD of the detection equipment. The CCD resolution feeds back the measurement results of the circular frame 32 to the detection system, compares the measured size of the circular frame 32 with the traceability value of the circular frame 32, and automatically corrects the CCD resolution value. That is, the resolution calibration of the CCD is achieved by tracing the size of the circular frame 32 to the length reference.

[0052] like Figure 5 As shown, the X-ray axial compensation calibration part 40 is used to calibrate the axis position of the X-ray tube, detector and the measured object of the detection equipment to ensure that the center points of the three are always collinear during the measurement process. It mainly consists of a calibration plate 41 and a steel ball 42 fixed in the center of the calibration plate 41. In this embodiment, the calibration plate 41 is a PVC plate with a length of 60mm×width of 60mm×thickness of 3mm. A steel ball 42 with a diameter of 1mm is installed in the center of the PVC plate. The roundness of the steel ball 42 should be below 0.5μm. The diameter and roundness of the steel ball 42 are given corresponding traceability values ​​by a length measuring instrument and a roundness meter. The steel ball 42 on the calibration plate 41 is scanned and imaged to identify the collinear deviation of the X-ray tube, steel ball and detector center point. By adjusting the collinear deviation value of the three, the imaging position is continuously corrected to achieve X-ray axial compensation and improve the accuracy of scanning imaging.

[0053] like Figure 6 As shown, the flat panel detector FPD offset calibration component 50 is used to calibrate the FPD offset of the flat panel detector in the online detection equipment to ensure the imaging quality of the flat panel detector. It includes a calibration plate 51 and a plurality of steel balls 52 fixed near the center of the calibration plate 51. In this embodiment, the calibration plate 51 is a PVC plate with a length of 60mm×width of 60mm×thickness of 3mm. Two steel balls 52 with a diameter of 1mm are installed on each diagonal of the calibration plate 51. The diagonal distance of the steel balls 52 is 25mm, but the diagonal distance value can be adjusted accordingly with the configuration of the flat panel detector. The roundness of the steel ball 52 should be less than 0.5μm, and the diameter and roundness of the steel ball 52 are given corresponding traceability values ​​by the length measuring instrument and the roundness meter. The detection system scans and images the steel ball 52 on the calibration plate 51, identifies the offset of the flat panel detector, adjusts the FPD angle deviation value to no more than 0.05 degrees, realizes the calibration of the flat panel detector FPD offset, and improves the accuracy of scanning imaging.

[0054] like Figure 7 As shown, the Z-axis dimension calibration part 60 is used to accurately calibrate the Z-axis dimension of the detection system to ensure the accuracy of the Z-axis slice reconstruction image. The Z-axis dimension calibration part 60 includes a calibration plate 61 and a tungsten sheet 62 stacked on the calibration plate 61. In this embodiment, the calibration plate 61 is a carbon fiber plate with a length of 60mm×width of 60mm×thickness of 3mm, and a tungsten sheet 62 with a thickness of 25μm is stacked and embedded in the center of the carbon fiber plate to form a height difference of 25μm between the upper and lower tungsten sheets. The surface thickness uniformity of the tungsten sheet 62 is not greater than 3μm, and the surface roughness is not greater than Ra0.8μm. The thickness value of the tungsten sheet 62 is given by the length measuring instrument. The detection system scans and images the tungsten sheet 62 on the calibration plate 61, identifies the stacked tungsten sheets 62 in the image, and calculates the height difference between the tungsten sheets 62. By adjusting the height deviation value, the Z-axis dimension calibration of the detection system is achieved, and the accuracy of the scanning imaging is improved.

[0055] like Figure 2 As shown, the large-size position accuracy compensation calibration part 70 is used to perform position accuracy compensation calibration on the full-size coverage position of the X-ray detection area to ensure the dimensional accuracy of the imaging reconstruction image of the detection system. The large-size position accuracy compensation calibration part 70 includes a calibration plate 71 made of metal and a cylindrical hole 72 arrayed on the calibration plate 71, and the position accuracy calibration is performed through the center position coordinates of the cylindrical hole 72. In this embodiment, the calibration plate 71 is a stainless steel plate made of stainless steel material with a length of 610mm×width of 510mm×thickness of 3mm, and an array of cylindrical holes 72 with a diameter of 2mm are processed in the stainless steel plate. The surface flatness of the stainless steel plate is not greater than 10μm, the surface roughness is not greater than Ra0.8μm, and the diameter deviation of the cylindrical hole 72 is not greater than 0.05mm. The center position coordinates of the cylindrical hole 72 on the stainless steel plate are given corresponding traceability values ​​by a three-coordinate measuring machine. The detection system scans and images the position of the cylindrical hole 72 on the calibration plate 71, identifies and calculates the coordinate value of the center position of the cylindrical hole 72, and realizes large-size position accuracy compensation calibration of the detection system by adjusting the coordinate value of the center position of the cylindrical hole 72, thereby improving the accuracy of scanning imaging.

[0056] In summary, the calibration parts in the standard device of this embodiment can be one of: laser sensor height position calibration part 10, CCD pixel gray calibration part 20, CCD resolution calibration part 30, X-ray axial compensator 40, flat panel detector FPD offset calibration part 50, Z-axis direction dimension calibration part 60, and large size position accuracy compensation calibration part 70, which correspond to the calibration of each functional detection parameter respectively. The calibration parts are installed in an array on the fixture to form a calibration part group, which can be combined to realize the automatic calibration of the detection system and ensure the detection accuracy of the detection equipment.

[0057] Based on the above-mentioned standard device, the present invention also provides a calibration method for an X-ray 3D online detection system, comprising: transferring any of the above-mentioned standard devices to the detection area of ​​the detection equipment through a fixture, and then adjusting the position of the standard device so that the target calibration part is in the target area, wherein the target calibration part is one of a laser sensor height position calibration part, a CCD pixel grayscale calibration part, a CCD resolution calibration part, an X-ray axial compensation calibration part, a flat panel detector FPD offset calibration part, a Z-axis direction dimension calibration part, and a large-size position accuracy compensation calibration part; then detecting the target calibration part to obtain detection data; finally analyzing the detection data, and automatically calibrating the X-ray 3D online detection system according to the analysis results. The target area varies according to the target calibration part, for example: when the target calibration part is a laser sensor height position calibration part, the target area is the laser sensor height measurement area; when the target calibration part is a CCD pixel grayscale calibration part, the target area is the CCD imaging detection area.

[0058] In some embodiments, analyzing the detection data and automatically calibrating the X-ray 3D online detection system according to the analysis results includes:

[0059] When the target calibration piece is a laser sensor height position calibration piece, the detection data is the step height value obtained by the laser sensor detecting and identifying the metal step position, and the compensation value of the laser sensor height measurement is calibrated according to the difference between the step height value and the step height traceability value;

[0060] Specifically, in order to ensure the accurate positioning of the sample under test during the detection process of the X-ray 3D online detection equipment, the online detection system is equipped with a laser sensor for obtaining the height position information of the sample under test. Therefore, it is necessary to calibrate the height position of the laser sensor to ensure that the laser sensor accurately obtains the height information value of the sample under test. After the standard is transmitted to the detection area of ​​the online detection equipment, the position is adjusted so that the laser sensor height position calibration part is in the laser sensor height measurement area. The laser sensor measures the step height value of the laser sensor height position calibration part, calculates the difference between the measurement result and the traceability value of the step height, automatically compensates for the deviation value of the laser sensor height measurement, and realizes automatic calibration of the laser sensor height measurement through multiple measurements and calculations.

[0061] When the target calibration piece is a CCD pixel grayscale calibration piece, the detection data is a CCD detection image. Based on the CCD detection image, the grayscale value of the standard white plate is measured, and the compensation value of the CCD pixel grayscale is calibrated according to the difference between the grayscale value and the grayscale traceability value.

[0062] Specifically, CCD pixel grayscale calibration is used to ensure the grayscale value resolution capability of CCD pixel acquisition. After the standard device is transferred to the detection area, the position is adjusted so that the CCD pixel grayscale calibration part is in the CCD imaging detection area. The CCD acquires the calibration part image, obtains the CCD detection image, measures the grayscale value of the standard white plate in the CCD detection image through the CCD imaging software, calculates the difference between the measured value and the white plate grayscale traceability value, automatically compensates for its deviation value, and measures and calculates compensation multiple times to achieve automatic calibration of CCD pixel grayscale.

[0063] When the target calibration piece is a CCD resolution calibration piece, the detection data is a CCD detection image, the circular frame in the CCD detection image is identified, the circular frame size value is obtained, and the compensation value of the CCD resolution is calibrated according to the difference between the circular frame size value and the circular frame traceability value;

[0064] Specifically, the CCD resolution calibration part is used to ensure the CCD resolution. After the standard device is transferred to the detection area, the position is adjusted so that the CCD resolution calibration part is in the CCD imaging detection area. The CCD collects the calibration part image, obtains the CCD detection image, and measures the circular frame size value in the CCD detection image through the CCD imaging software, calculates the difference between the circular frame traceability value, automatically compensates its deviation value, and measures and calculates compensation multiple times to achieve automatic calibration of the CCD resolution.

[0065] When the target calibration part is an X-ray axial compensation calibration part, the detection data is a scanned image. Based on the scanned image, the position deviation of the collinearity of the X-ray light tube, the detector, and the steel ball axis is measured, and the compensation value of the X-ray axial compensation is calibrated according to the difference between the position deviation and the position deviation traceability value;

[0066] Specifically, the X-ray axial compensation calibration component is used to calibrate the axis positions of the X-ray tube, detector, and measured object to ensure that the center points of the three are always collinear during the measurement process.

[0067] After the standard is transferred to the detection area of ​​the online detection equipment, the position is adjusted so that the X-ray axial compensation calibration part is in the X-ray imaging detection area. The X-ray online detection equipment obtains the scanned image of the standard steel ball, measures the collinear position deviation of the X-ray tube, detector, and steel ball axis through the imaging software, calculates the center of the 3D imaging sphere of the calibration module and calculates the collinear position deviation value of the X-ray tube, detector, and axis of the measured object, automatically compensates for the deviation value, and measures and calculates the compensation multiple times to realize the automatic calibration of X-ray axial compensation.

[0068] When the target calibration piece is a flat panel detector (FPD) offset calibration piece, the detection data is a scanned image. Based on the scanned image, the center distance between the steel balls is measured, and the compensation value of the flat panel detector (FPD) offset is calibrated according to the difference between the center distance and the traceability value of the center distance.

[0069] Specifically, the flat panel detector FPD offset calibration component is used to calibrate the flat panel detector FPD offset to ensure the imaging quality of the flat panel detector.

[0070] After the standard device is transferred to the detection area of ​​the online detection equipment, the position is adjusted so that the flat panel detector FPD offset calibration part is in the X-ray imaging detection area. The X-ray online detection equipment scans and obtains the image of the standard steel balls on the diagonal of the calibration plate, measures the spherical center spacing between the standard steel balls on the diagonal of the calibration plate through the imaging software, calculates the difference between the spherical center spacing traceability value, automatically compensates for its deviation value, and measures and calculates compensation multiple times to achieve automatic calibration of the flat panel detector FPD offset.

[0071] When the target calibration part is a Z-axis dimension calibration part, the detection data is a scanned image. Based on the scanned image, the height value of the tungsten sheet is measured, and the compensation value of the Z-axis dimension is calibrated according to the difference between the height value and the tungsten sheet height traceability value;

[0072] Specifically, the Z-axis dimension calibration piece is used to calibrate the Z-axis dimension accuracy to ensure the accuracy of the Z-axis slice reconstruction image.

[0073] After the standard is transferred to the detection area of ​​the online detection equipment, the position is adjusted so that the Z-direction dimension calibrator is in the X-ray imaging detection area. The X-ray online detection equipment scans and obtains the image of the Z-direction dimension calibration part. The imaging software measures the imaging Z-direction height of the calibration part tungsten sheet and calculates the height value of the step. It is compared with the tungsten sheet height traceability value, and its deviation value is automatically compensated. Multiple measurements and calculations are performed to achieve automatic calibration of the Z-axis dimension.

[0074] When the target calibration part is a large-size position accuracy compensation calibration part, the detection data is a scanned image. Based on the scanned image, the spacing value between the centers of the cylindrical holes is measured, and the compensation value of the large-size position accuracy is calibrated according to the difference between the spacing value and the spacing traceability value.

[0075] Large-size position accuracy compensation calibration parts are used to compensate for the position accuracy of the full-size coverage of the X-ray detection area to ensure the dimensional accuracy of the reconstructed image.

[0076] After the standard is transferred to the detection area of ​​the online detection equipment, the position is adjusted so that the large-size position accuracy compensation calibration part is in the X-ray imaging detection area. The X-ray online detection equipment scans the images of each cylindrical hole on the calibration part to obtain a scanned image. Through the measurement function of the imaging software, the cylindrical holes imaged by the calibration part are measured and the center spacing values ​​between the cylindrical holes at different positions are calculated. The difference between the measured center spacing value of the two cylindrical holes and the actual spacing traceability value is calculated, and the deviation value is automatically compensated. The compensation is calculated and measured multiple times to achieve automatic calibration of large-size position accuracy compensation.

[0077] In summary, by designing the standard, calibration can be performed as easily as the detection process, and calibration parts corresponding to each functional detection parameter can be installed on the standard. After the standard is transferred to the detection area of ​​the online detection equipment, the detection system performs imaging analysis on each calibration part, and calibrates the corresponding functional detection parameters according to the difference between the analysis result and the traceability value of the calibration part. It can adapt to the online detection operation process of the online detection equipment and realize online automatic calibration.

[0078] Based on the above-mentioned calibration method of the X-ray 3D online detection system, an embodiment of the present invention also provides an electronic device, including a memory storing executable program code and a processor coupled to the memory; the processor calls the executable program code stored in the memory to execute any one of the above-mentioned calibration methods of the X-ray 3D online detection system.

[0079] The purpose of the above embodiments is to exemplarily reproduce and deduce the technical solution of the present invention, and to fully describe the technical solution, purpose and effect of the present invention. Its purpose is to make the public understand the disclosed content of the present invention more thoroughly and comprehensively, and it does not limit the protection scope of the present invention.

[0080] The above embodiments are not exhaustive enumerations of the present invention, and there may be multiple other implementations not listed. Any replacement and improvement made without violating the concept of the present invention shall fall within the protection scope of the present invention.

Claims

1. A calibration method for an X-ray 3D online detection system, characterized in that: include: The standard device is transferred to the detection area of ​​the detection equipment, and the position of the standard device is adjusted so that the target calibration part is in the target area, and the target calibration part is one of a laser sensor height position calibration part, a CCD pixel grayscale calibration part, a CCD resolution calibration part, an X-ray axial compensation calibration part, a flat panel detector FPD offset calibration part, and a Z-axis direction dimension calibration part; Detecting the target calibration part to obtain detection data; Analyze the detection data and automatically calibrate the X-ray 3D online detection system according to the analysis results; The standard device includes a fixture, and a plurality of mounting holes are provided on the fixture. The laser sensor height position calibration component, the CCD pixel gray scale calibration component, the CCD resolution calibration component, the X-ray axial compensation calibration component, the flat panel detector FPD offset calibration component and the Z-axis direction dimension calibration component are detachably mounted on the fixture in an array through the mounting holes; The laser sensor height position calibration component includes a metal base plate and a metal step mounted on the metal base plate; the CCD pixel grayscale calibration component is a standard white plate configured as a target grayscale value; the CCD resolution calibration component includes a glass plate and a circular frame etched on the glass plate; the X-ray axial compensation calibration component includes a PVC plate and a steel ball fixed in the center of the PVC plate; the flat panel detector FPD bias calibration component includes a PVC plate and a plurality of steel balls fixed near the center of the PVC plate; the Z-axis direction dimension calibration component includes a carbon fiber plate and a tungsten sheet stacked on the carbon fiber plate; The surface thickness uniformity of the tungsten sheet in the Z-axis dimension calibration piece is not greater than 3 μm, and the surface roughness is not greater than 0.8 μm; When the target calibration piece is a laser sensor height position calibration piece, the detection data is a step height value obtained by the laser sensor detecting and identifying the metal step position, and the compensation value of the laser sensor height measurement is calibrated according to the difference between the step height value and the step height traceability value; When the target calibration piece is a CCD pixel grayscale calibration piece, the detection data is a CCD detection image, based on the CCD detection image, the grayscale value of the standard white plate is measured, and the compensation value of the CCD pixel grayscale is calibrated according to the difference between the grayscale value and the grayscale traceability value; When the target calibration piece is a CCD resolution calibration piece, the detection data is a CCD detection image, a circular frame in the CCD detection image is identified, a circular frame size value is obtained, and a compensation value of the CCD resolution is calibrated according to a difference between the circular frame size value and a circular frame traceability value; When the target calibration piece is an X-ray axial compensation calibration piece, the detection data is a scanned image, based on which the position deviation of the collinearity of the X-ray light tube, the detector, and the steel ball axis is measured, and the compensation value of the X-ray axial compensation is calibrated according to the difference between the position deviation and the position deviation traceability value; When the target calibration piece is a flat panel detector (FPD) bias calibration piece, the detection data is a scanned image, based on which the center distance between the steel balls is measured, and the compensation value of the flat panel detector (FPD) bias is calibrated according to the difference between the center distance and the traceability value of the center distance; When the target calibration part is a Z-axis dimension calibration part, the detection data is a scanned image. Based on the scanned image, the height value of the tungsten sheet is measured, and the compensation value of the Z-axis dimension is calibrated according to the difference between the height value and the tungsten sheet height traceability value.

2. The calibration method according to claim 1, characterized in that: The laser sensor height position calibration component is in the shape of a tower, and the metal ladder is formed by stacking a plurality of metal blocks of different sizes, and the metal blocks are connected by pins.

3. The calibration method according to claim 1, characterized in that: The CCD resolution calibration component includes three groups of circular frames, and the sizes of the three groups of circular frames are different from each other.

4. The calibration method according to claim 1, characterized in that: The PVC plate of the flat panel detector FPD offset calibration piece is a quadrilateral, and two steel balls are arranged on each diagonal line of the quadrilateral.

5. An electronic device, characterized in that: It includes a memory storing executable program code and a processor coupled to the memory; the processor calls the executable program code stored in the memory to execute the calibration method of the X-ray 3D online detection system according to any one of claims 1 to 4.

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