Thermocouple temperature measurement displacement device for measuring phase change temperature of thin film material

Abstract

The invention discloses a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material, which belongs to the field of semiconductor thin film thermal performance detection and comprises a cavity, a temperature measurement device and a displacement device, the displacement device is arranged below the cavity, the temperature measuring device is arranged on the bottom side in the cavity, a sample table is further arranged in the cavity, a heating and cooling device is installed at the top end, close to the cavity, of the displacement device, and the temperature measuring device is composed of a thermocouple, a thermocouple fixing sleeve, a thermocouple clamp and a thermocouple vertical displacement platform. One end of the thermocouple is mounted on the thermocouple fixing sleeve, and one side, far away from the thermocouple, of the thermocouple fixing sleeve is fixed on the thermocouple vertical displacement platform through a thermocouple clamp; by using the temperature measuring device, the problem that an existing temperature measuring mode is large in error is solved.

Description

Technical Field

[0001] The invention relates to the field of semiconductor film thermal performance detection, in particular to a thermocouple temperature measurement displacement device for measuring the phase change temperature of a film material. Background Art

[0002] Phase transition temperature is a key parameter for predicting the microstructure and material performance of thin film materials. Existing optical power analysis thin film material phase transition temperature measurement instruments measure the phase transition temperature of thin films by measuring the change in reflected light power during the phase transition of thin films. Existing thin film material phase transition temperature measurement instruments measure the phase transition temperature of thin films in a vacuum environment, and the temperature measuring element is a thermocouple. Since heat is only transferred through contact and radiation under vacuum conditions, the thermocouple needs to be in full contact with the sample for temperature measurement. There are two main contact methods between the thermocouple and the sample in existing instruments: (1) direct pressure-free contact between the thermocouple probe and the surface of the thin film sample; (2) direct pressure contact between the thermocouple probe and the lower surface of the film substrate.

[0003] The measurement of these two types of measuring instruments is not accurate. Either the temperature measured is not the surface temperature of the sample film, or it is easy to loosen during the measurement process.

[0004] In view of the shortcomings of the existing technical solutions, the present application proposes a thermocouple temperature measurement displacement device for measuring the phase change temperature of thin film materials. Summary of the invention

[0005] The purpose of the present invention is to provide a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material, which solves the problem that the existing temperature measurement method has large errors and is easy to loosen during the measurement process.

[0006] To achieve the above-mentioned purpose, the present invention provides a thermocouple temperature measurement and displacement device for measuring the phase change temperature of a thin film material, comprising a base, a cavity, a temperature measurement device and a displacement device; the cavity is installed on the upper surface of the base, the displacement device is arranged below the cavity, the temperature measurement device is arranged on the inner bottom side of the cavity, a sample stage is also arranged inside the cavity, a heating and cooling device is installed near the top of the cavity of the displacement device, the temperature measurement device is composed of a thermocouple, a thermocouple fixing sleeve, a thermocouple clamp, a thermocouple vertical displacement platform and a vertical displacement controller, one end of the thermocouple is installed on the thermocouple fixing sleeve, the side of the thermocouple fixing sleeve away from the thermocouple is fixed on the thermocouple vertical displacement platform through the thermocouple clamp, and the vertical displacement controller is connected to the thermocouple vertical displacement platform.

[0007] Preferably, a sealing interface is provided on the outer side of the cavity, the vertical displacement controller is installed on the sealing interface, and the thermocouple vertical displacement platform controls the vertical movement of the thermocouple fixture through the vertical displacement controller, thereby driving the thermocouple to move vertically.

[0008] Preferably, the cavity includes a quick-closing door, a cavity shell, a main observation window, and a side observation window; the quick-closing door is arranged on one side of the cavity shell, the main observation window is arranged on the cavity shell and is arranged perpendicular to the quick-closing door, and the side observation window is also arranged on the cavity shell, at 45° to the main observation window and 135° to the quick-closing door.

[0009] Preferably, an observation window is also provided at the center position of the quick-closing door.

[0010] Preferably, the sample stage is arranged directly above the heating and cooling device.

[0011] Preferably, one end of the thermocouple away from the thermocouple fixing sleeve is arranged at the exact center of the sample stage.

[0012] Preferably, the displacement device is arranged inside the base.

[0013] Therefore, the thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material using the above structure of the present invention has the following advantages:

[0014] 1. When measuring any sample, it can ensure that the upper surface of the sample to be tested is at the same horizontal height. The thermocouple vertical displacement platform can ensure the contact pressure and state between the thermocouple probe head and the surface of the thin film sample by accurately controlling the vertical movement distance of the thermocouple;

[0015] 2. The thermocouple temperature measurement displacement device for measuring the phase change temperature of thin film materials can accurately control the vertical movement distance of the thermocouple to achieve automatic contact measurement;

[0016] 3. The sample stage fixes the film sample to be tested, ensuring that the sample will not shake during the measurement, and achieving non-displacement fixation of the sample to be tested at the same height;

[0017] 4. The heating and cooling device for high-temperature measurement of phase change temperature can be moved up and down, so that the sample position remains unchanged, ensuring the measurement accuracy of the sample and reducing human errors;

[0018] 5. The heating and cooling device can reduce the cooling time, improve the experimental efficiency, and also play a role in providing a uniform temperature field;

[0019] 6. Ensure the repeatability and operational stability of thermocouple measurement of the surface temperature of thin film samples, and improve the measurement accuracy of the phase change temperature of thin film materials;

[0020] 7. The thermocouple can be quickly replaced, which is convenient and efficient;

[0021] 8. The multi-window design makes it easier to observe the samples and devices in the chamber;

[0022] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the internal structure of a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to the present invention;

[0024] Figure 2 It is an overall schematic diagram of a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to the present invention;

[0025] Figure 3 This is a structural diagram of a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to the present invention;

[0026] Reference numerals

[0027] 1. Temperature measuring device; 11. Thermocouple; 12. Thermocouple fixing sleeve; 13. Thermocouple fixture; 14. Thermocouple vertical displacement platform; 15. Vertical displacement controller; 2. Cavity; 21. Quick closing door; 22. Cavity shell; 23. Main observation window; 24. Side observation window; 3. Sample stage; 4. Heating and cooling device; 5. Displacement device; 6. Base; 7. Sealing interface. DETAILED DESCRIPTION

[0028] Example

[0029] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are directions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0030] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0032] like Figure 1-3 As shown, a thermocouple temperature measurement and displacement device for measuring the phase change temperature of a thin film material of the present invention comprises a base 6, a cavity 2, a temperature measurement device 1 and a displacement device 5; the cavity 2 is mounted on the upper surface of the base 6, the displacement device 5 is arranged below the cavity 2, the temperature measurement device 1 is arranged on the inner bottom side of the cavity 2, a sample stage 3 is also arranged inside the cavity 2, a heating and cooling device 4 is installed near the top of the cavity 2 of the displacement device 5, the temperature measurement device 1 is composed of a thermocouple 11, a thermocouple fixing sleeve 12, a thermocouple clamp 13 and a thermocouple vertical displacement platform 14, one end of the thermocouple 11 is mounted on the thermocouple fixing sleeve 12, the side of the thermocouple fixing sleeve 12 away from the thermocouple 11 is fixed on the thermocouple vertical displacement platform 14 through the thermocouple clamp 13, and a vertical displacement controller 15 is connected to the thermocouple vertical displacement platform 14. The outer side of the cavity 2 is provided with a sealing interface 7, on which a vertical displacement controller 15 is installed. The thermocouple vertical displacement platform 14 controls the vertical movement of the thermocouple fixture 13 through the vertical displacement controller 15, thereby driving the thermocouple 11 to move vertically. The cavity 2 includes a quick-closing door 21, a cavity shell 22, a main observation window 23, and a side observation window 24; the quick-closing door 21 is arranged on one side of the cavity shell 22, the main observation window 23 is arranged on the cavity shell 22, and is arranged vertically with the quick-closing door 21, and the side observation window 24 is also arranged on the cavity shell 22, and is 45° with the main observation window 23, and is 135° with the quick-closing door 21. An observation window is also arranged at the center of the quick-closing door 21. The sample stage 3 is arranged directly above the heating and cooling device 4. The end of the thermocouple 11 away from the thermocouple fixing sleeve 12 is arranged at the center of the sample stage 3. The displacement device 5 is arranged inside the base 6.

[0033] In the specific implementation, the thermocouple 11 is installed on the thermocouple fixing sleeve 12. The thermocouple fixing sleeve 12 is fixed on the thermocouple vertical displacement platform 14 by the thermocouple clamp 13, and can move up and down with the thermocouple vertical displacement platform 14. The sample stage 3 is connected to the cavity 2 by a support rod, and the sample stage 3 is located above the heating and cooling device 4. The probe head of the thermocouple 11 vertically contacts the surface of the thin film sample to be tested on the sample stage 3, and the thin film sample to be tested can be fixed by the sample stage 3 and keep the vertical height position unchanged. Before the experiment starts, the required moving displacement distance is set to control the movement of the thermocouple vertical displacement platform 14, thereby driving the thermocouple 11 to move in the vertical direction. After each experiment, the thermocouple vertical displacement platform 14 will return to the initial position under the control of the program, which is convenient for the next experiment. During this process, the thermocouple 11 is controlled to move up and down in the Z-axis direction through the thermocouple vertical displacement platform 14, and the contact between the probe head of the thermocouple 11 and the surface of the thin film sample to be tested is accurately controlled. During this process, the internal situation of the cavity 2 can be observed through the main observation window 23 and the side observation window 24 on the cavity 2.

[0034] Therefore, the present invention adopts a thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material with the above structure. The contact pressure and state between the thermocouple probe head and the surface of the thin film sample can be ensured by accurately controlling the vertical movement distance of the thermocouple, thereby realizing automatic contact measurement; and the non-displacement fixation of the sample to be measured at the same height is realized to ensure the measurement accuracy of the sample and reduce human errors; at the same time, the use of a structure integrating a heating and cooling device can reduce the cooling time and improve the experimental efficiency, and the multi-window design makes it more convenient to observe the conditions of the sample to be measured and the device in the cavity.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A thermocouple temperature displacement device for measuring the phase change temperature of thin film materials. Features: It includes a base, a cavity, a temperature measuring device and a displacement device; the cavity is installed on the upper surface of the base, the displacement device is arranged below the cavity, the temperature measuring device is arranged on the inner bottom side of the cavity, a sample stage is also arranged inside the cavity, a heating and cooling device is installed near the top of the cavity of the displacement device, the temperature measuring device is composed of a thermocouple, a thermocouple fixing sleeve, a thermocouple clamp, a thermocouple vertical displacement platform and a vertical displacement controller, one end of the thermocouple is installed on the thermocouple fixing sleeve, the side of the thermocouple fixing sleeve away from the thermocouple is fixed on the thermocouple vertical displacement platform through the thermocouple clamp, and the vertical displacement controller is connected to the thermocouple vertical displacement platform.

2. A thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to claim 1, Features: A sealing interface is provided on the outer side of the cavity, and the vertical displacement controller is installed on the sealing interface. The thermocouple vertical displacement platform controls the vertical movement of the thermocouple fixture through the vertical displacement controller, thereby driving the thermocouple to move vertically.

3. A thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to claim 2, Features: The cavity includes a quick-closing door, a cavity shell, a main observation window, and a side observation window; the quick-closing door is arranged on one side of the cavity shell, the main observation window is arranged on the cavity shell and is arranged perpendicular to the quick-closing door, and the side observation window is also arranged on the cavity shell, at 45° to the main observation window and 135° to the quick-closing door.

4. A thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to claim 3, Features: An observation window is also provided at the center of the quick-closing door.

5. A thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to claim 4, Features: The sample stage is arranged directly above the heating and cooling device.

6. A thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to claim 5, Features: One end of the thermocouple away from the thermocouple fixing sleeve is arranged at the exact center of the sample stage.

7. A thermocouple temperature measurement displacement device for measuring the phase change temperature of a thin film material according to claim 6, Features: The displacement device is arranged inside the base.

Images