Preparation method of filter film and filter film assembly

By fixing the structure of the filter film to be solid using a cryoprotective layer on the substrate and performing unified baking treatment, the problem of long preparation time of color filter films in the prior art is solved, and the preparation efficiency and functionality are improved.

CN119148464APending Publication Date: 2024-12-17SHANGHAI INTEGRATED CIRCUIT EQUIPMENT & MATERIALS INDUSTRY INNOVATION CENTER CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202310713647.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-06-15
Publication Date
2024-12-17

AI Technical Summary

Technical Problem

In the prior art, the process of preparing color filter films requires excessive time, especially since each color filter film needs to be independently baked and solidified, resulting in low preparation efficiency.

Method used

After the structure of the filter film to be solid is prepared on the substrate, the shape of the filter film is fixed using a cryoprotective layer, and the solid treatment is completed in a unified baking process, avoiding the step of independently baking of each color filter film.

Benefits of technology

This method significantly saves the time of filter film preparation, improves the preparation efficiency, and adapts to the combination of filter films of multiple colors, reducing the preparation cost and improving the functionality of the filter film.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119148464A_ABST
    Figure CN119148464A_ABST
Patent Text Reader

Abstract

The invention discloses a preparation method of a filter film and a filter film assembly, which are applied to the field of photoetching preparation, and the preparation method comprises the following steps: preparing a to-be-cured filter film structure on a substrate; the to-be-cured filter film structure is a filter film which is subjected to molding treatment and is not subjected to curing treatment; a freezing protection layer is arranged on the exposed surface of the to-be-cured filter film structure, so that the shape of the to-be-cured filter film structure is fixed, the to-be-cured filter film structure serves as a to-be-treated filter film, and the to-be-treated filter film is baked to serve as a filter film. When the filter film is prepared, the to-be-cured filter film structure is fixed by arranging the freezing protection layer after developing in a traditional technological process, the to-be-treated filter film is uniformly baked after the to-be-treated filter film is prepared, and the baking is performed relative to the condition that each to-be-cured filter film structure is prepared; the time for preparing the filter film can be saved, and the preparation efficiency is improved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The invention relates to the field of photolithography preparation, and in particular to a preparation method of a filter film and a filter film component. Background Art

[0002] In the preparation process of the filter film, it is necessary to prepare an anti-reflective light shielding layer on the substrate before preparing the filter film on the substrate. The preparation process of the filter film requires the molded filter film to be solidified so that the filter film maintains a fixed shape. However, in the prior art, the molded filter film is solidified by a baking pattern method, and the baking process takes a long time, which reduces the preparation efficiency of the filter film. In particular, in the process of preparing a color filter film, the time required is doubled. Summary of the invention

[0003] In view of this, an object of the present invention is to provide a method for preparing a color filter film and a color filter film assembly, which solves the problem that too much time is consumed in the process of preparing a color filter film in the prior art.

[0004] In order to solve the above technical problems, the present invention provides a method for preparing a filter film, comprising:

[0005] Preparing a filter film structure to be solidified on a substrate; the filter film structure to be solidified is a filter film that has been subjected to a molding process but has not been solidified;

[0006] A freezing protection layer is provided on the exposed surface of the optical filter film structure to be fixed, so that the shape of the optical filter film structure to be fixed is used as the optical filter film to be processed;

[0007] The filter film to be processed is baked to obtain a filter film.

[0008] Optionally, the step of preparing a filter film structure to be solidified on a substrate; and providing a freezing protection layer on an exposed surface of the filter film structure to be solidified comprises:

[0009] Preparing a filter film structure to be solidified with a target color on the substrate;

[0010] The freezing protection layer is provided on the exposed surface of the to-be-fixed filter film structure of the target color, so as to fix the shape of the to-be-fixed filter film structure of the target color;

[0011] The next color of the filter film structure to be solidified is used as the target color of the filter film structure to be solidified, and the steps of preparing the target color of the filter film structure to be solidified on the substrate to setting the freezing protection layer on the exposed surface of the target color of the filter film structure to be solidified are cyclically performed until the shapes of the filter film structures to be solidified of all colors are fixed as the filter films to be processed.

[0012] Optionally, the step of preparing a filter film structure to be solidified on a substrate; and providing a freezing protection layer on an exposed surface of the filter film structure to be solidified comprises:

[0013] Preparing a first color filter film structure to be solidified on the substrate;

[0014] The freezing protection layer is disposed on the exposed surface of the to-be-fixed filter film structure of the first color, so that the shape of the to-be-fixed filter film structure of the first color is fixed as the to-be-treated filter film of the first color;

[0015] Preparing a second color filter film structure to be cured on the substrate prepared with the first color filter film to be processed;

[0016] The freezing protection layer is disposed on the exposed surface of the second color filter film structure to be solidified, so that the shape of the second color filter film structure to be solidified is fixed as the second color filter film to be processed;

[0017] Preparing a third color filter film structure to be solidified on the substrate prepared with the first color filter film to be processed and the second color filter film to be processed;

[0018] The freezing protection layer is arranged on the exposed surface of the third color filter film structure to be solidified to fix the shape of the third color filter film structure to be solidified, and the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed are used as the filter film to be processed; the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed are respectively the filter films to be processed of the three primary colors of red, green and blue.

[0019] Optionally, the step of preparing a filter film structure to be solidified on a substrate includes:

[0020] Disposing a filter film layer to be processed on the substrate;

[0021] The filter film layer to be processed is sequentially exposed and developed to obtain the filter film structure to be solidified.

[0022] Optionally, after baking the to-be-processed optical filter film to prepare the optical filter film, the method further includes:

[0023] A smooth protective layer is arranged on the surface of the filter film to make the surface of the filter film smooth.

[0024] Optionally, before arranging the filter film layer to be processed on the substrate, the method further includes:

[0025] An anti-reflective light-shielding layer is prepared on a transparent glass substrate as the substrate.

[0026] The present invention also provides a filter film assembly, which is prepared by the above-mentioned filter film preparation method, comprising:

[0027] Substrates and filter films;

[0028] The filter film is arranged on one side of the substrate;

[0029] The filter film is formed by a filter film structure to be fixed and a freezing protective layer arranged on the exposed surface of the filter film structure to be fixed, and is subjected to a baking process. The freezing protective layer is used to fix the shape of the filter film structure to be fixed.

[0030] Optionally, the filter film is a filter film of multiple colors.

[0031] Optionally, the filter films of multiple colors are filter films including the three primary colors of red, green and blue.

[0032] Optionally, a smooth protective layer is provided on the surface of the filter film; the smooth protective layer is used to make the surface of the filter film smooth.

[0033] It can be seen that the preparation method of the filter film provided by the present invention includes preparing a filter film structure to be solidified on a substrate, and the filter film structure to be solidified is a filter film that has been subjected to a molding process but not subjected to a solidification process. A freezing protection layer is set on the exposed surface of the filter film structure to be solidified so that the shape of the filter film structure to be solidified is fixed as a filter film to be processed, and the filter film to be processed is baked as a filter film. When preparing the filter film according to the present invention, the filter film structure to be solidified is fixed by setting a freezing protection layer after development in the traditional process flow. After the filter film to be processed is prepared, the filter films to be processed are uniformly baked. Compared with baking each filter film structure to be solidified, the time required for preparing the filter film can be saved, thereby improving the preparation efficiency.

[0034] In addition, the present invention also provides a filter film assembly, which also has the above-mentioned beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0036] Figure 1 A flow chart of a method for preparing a filter film provided by an embodiment of the present invention;

[0037] Figure 2 A flow chart of another method for preparing a filter film provided by an embodiment of the present invention;

[0038] Figure 3 A flow chart of another method for preparing a filter film provided by an embodiment of the present invention;

[0039] Figure 4 A schematic structural diagram of a filter film assembly provided by an embodiment of the present invention;

[0040] Figure 4 In the figure, the reference numerals are described as follows:

[0041] 10-Substrate;

[0042] 20-filter film, 21-filter film structure to be solidified, 22-freezing protective layer. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] In the preparation process of the filter film, it is necessary to prepare an anti-reflection shading layer on the substrate before preparing the filter film on the substrate. The preparation process of the filter film requires a solidification treatment of the formed filter film to keep the filter film in a fixed shape. In the prior art, the solidification of the formed filter film is carried out by baking the pattern, and the baking process generally takes 10 minutes. When preparing filter film components of different colors, a baking solidification treatment is required for each filter film of a color, which increases the preparation time of the filter film by multiples.

[0045] When preparing the filter film, the filter film structure to be solidified is fixed by setting a freezing protection layer after development in the traditional process flow. After the filter film to be processed is prepared, the filter film to be processed is uniformly baked. Compared with baking each filter film structure to be solidified after it is prepared, the time required for preparing the filter film can be saved, and the preparation efficiency is improved.

[0046] Embodiment 1:

[0047] Please refer to Figure 1 , Figure 1 A flow chart of a method for preparing a filter film provided by an embodiment of the present invention. The method may include:

[0048] S101: preparing a filter film structure to be solidified on a substrate; the filter film structure to be solidified is a filter film that has been subjected to a molding process but has not been subjected to a solidification process.

[0049] It should be noted that the execution subject in this embodiment can be a filter film preparation device. In this embodiment, the filter film structure to be fixed prepared in the substrate is a filter film that has been formed, that is, the shape of the filter film structure to be fixed is the shape formed by the preparation, but because there is a fluid state structure in the filter film structure to be fixed, it will cause the filter film structure to be fixed to deform and collapse over a long period of time, so the shape of the filter film structure to be fixed needs to be fixed.

[0050] In this embodiment, the substrate may be a pre-treated substrate. For example, an anti-reflective shading layer may be prepared in the substrate, and the shading layer may be arranged in a matrix. This embodiment does not limit the specific number of filter film structures to be solidified prepared on the substrate, and it can be set according to the actual preparation process. This embodiment does not limit the color types of filter film structures to be solidified prepared on the substrate. In order to meet actual needs, filter film structures to be solidified in multiple colors may be prepared on the substrate. This embodiment does not limit the specific method of preparing filter film structures to be solidified in multiple colors on the substrate. For example, a solidification treatment may be performed once after each filter film structure to be solidified of one color is prepared, or a solidification treatment may be performed after all filter film structures to be solidified of all colors are prepared.

[0051] S102: a freezing protection layer is provided on the exposed surface of the optical filter film structure to be solidified, so as to fix the shape of the optical filter film structure to be solidified as the optical filter film to be processed.

[0052] In this embodiment, one side of the filter film structure to be fixed is in contact with the substrate, so it is only necessary to set a freezing protection layer on the exposed surface of the filter film structure to be fixed to ensure that the shape of the filter film structure to be fixed is fixed. It should be noted that the freezing protection layer in this embodiment is a protective layer that limits the deformation of the filter film structure to be fixed, and does not change the internal components of the filter film structure to be fixed, nor does it change the physical form of the internal components of the filter film structure to be fixed. When the filter film structure to be fixed is in a flowable fluid state, the filter film structure to be fixed in the fluid state is limited by the freezing protection layer in this embodiment, and the internal state of the filter film structure to be fixed is not changed. This embodiment does not limit the specific method of setting the freezing protection layer on the exposed surface of the filter film structure to be fixed. For example, the freezing protection layer can be coated on the exposed surface of the filter film structure to be fixed, or a formed freezing protection layer can be set on the exposed surface of the filter film structure to be fixed. When a freezing protective layer is coated on the exposed surface of the filter film structure to be solidified, the solidification conditions of the freezing protective layer are easier than those of the filter film structure to be solidified. For example, the freezing protective layer can be automatically solidified in a natural environment.

[0053] Furthermore, in order to ensure the applicability of the prepared filter film layer and better adapt to the requirements of the existing technology for the filter film, the above-mentioned preparation of the filter film structure to be solidified on the substrate; and setting a freezing protection layer on the exposed surface of the filter film structure to be solidified may include the following steps. Figure 2 , Figure 2 A flow chart of another method for preparing a filter film provided by an embodiment of the present invention.

[0054] S201: preparing a filter film structure to be solidified with a target color on a substrate.

[0055] In this embodiment, by preparing a to-be-solidified filter film of a target color on a substrate, a filter film of a specific color to be prepared can be disposed on the substrate, thereby improving the functional applicability of the filter film.

[0056] S202: a freezing protection layer is provided on the exposed surface of the light filter film structure to be solidified of the target color, so as to fix the shape of the light filter film structure to be solidified of the target color.

[0057] In this embodiment, after a freezing protection layer is provided on the exposed surface of the to-be-solidified filter film structure of the target color, the preparation of a to-be-processed filter film of the target color is completed.

[0058] S203: The next color of the filter film structure to be solidified is used as the target color of the filter film structure to be solidified, and the steps of preparing the target color of the filter film structure to be solidified on the substrate to setting a freezing protective layer on the exposed surface of the target color of the filter film structure to be solidified are cyclically performed until the shapes of the filter film structures to be solidified of all colors are fixed as the filter films to be processed.

[0059] In this embodiment, by using the next color of the filter film structure to be solidified as the target color of the filter film structure to be solidified, and cyclically executing the steps of preparing the filter film to be processed on the substrate, it is possible to prepare filter films to be processed in multiple colors on the substrate, thereby improving the functional applicability of the filter film. This embodiment does not limit the specific color type of the specific filter film to be processed prepared on the substrate. Accordingly, this embodiment also does not limit the specific number of color types of the filter film to be processed prepared on the substrate. For example, the specific number of color types of the filter film to be processed prepared on the substrate may be 2, or the specific number of color types of the filter film to be processed prepared on the substrate may be 3. This embodiment does not limit the specific number of single color filter films to be processed prepared on the substrate. For example, the specific number of single color filter films to be processed prepared on the substrate may be set according to actual working conditions.

[0060] Furthermore, in order to reduce the preparation cost of the filter film while ensuring the practical applicability of the filter film, the above-mentioned preparation of the filter film structure to be solidified on the substrate; and setting a cryoprotective layer on the exposed surface of the filter film structure to be solidified may include the following steps. Figure 3 , Figure 3 The present invention provides a flowchart of another method for preparing a filter film according to an embodiment of the present invention.

[0061] S301: preparing a first color filter film structure to be solidified on a substrate.

[0062] S302: a freezing protection layer is provided on the exposed surface of the first color filter film structure to be solidified, so as to fix the shape of the first color filter film structure to be solidified as the first color filter film to be processed.

[0063] In this embodiment, a preselected first color filter film structure to be solidified is prepared on a substrate, and a freezing protection layer is provided to fix the shape of the first color filter film structure to be solidified, thereby forming a first color filter film to be processed.

[0064] S303: preparing a second color filter film structure to be cured on the substrate having the first color filter film to be processed.

[0065] S304: a freezing protection layer is provided on the exposed surface of the second color filter film structure to be solidified, so as to fix the shape of the second color filter film structure to be solidified as the second color filter film to be processed.

[0066] In this embodiment, a second color filter film to be processed is continuously prepared on the substrate on which the first color filter film to be processed is prepared, so as to form a substrate on which two colors of filter films to be processed are prepared.

[0067] S305: preparing a third color filter film structure to be solidified on the substrate having the first color filter film to be processed and the second color filter film to be processed.

[0068] In this embodiment, a third color of filter film structure to be solidified is prepared on a substrate having two colors of filter films to be processed, namely, a first color and a second color, so as to form three colors of filter films to be processed on the substrate.

[0069] S306: a freezing protection layer is provided on the exposed surface of the third color filter film structure to be solidified, so that the shape of the third color filter film structure to be solidified is fixed, and the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed are used as the filter film to be processed; the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed are the filter films to be processed of the three primary colors of red, green and blue respectively.

[0070] In this embodiment, by setting the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed as the filter films to be processed of the three primary colors of red, green and blue, respectively, it is ensured that by adjusting the light output of the filter films of the three primary colors of red, green and blue, light beams of all colors can be combined and emitted, and the functionality of the filter films is improved on the basis of ensuring low-cost preparation. This embodiment does not limit the corresponding relationship between the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed and the three primary colors of red, green and blue, that is, this embodiment does not limit the preparation order of the red filter film to be processed, the green filter film to be processed and the blue filter film to be processed.

[0071] S103: baking the filter film to be processed to obtain a filter film.

[0072] In this embodiment, the prepared filter membranes to be processed are uniformly baked to obtain the filter membranes.

[0073] The preparation method of the filter film provided by the embodiment of the present invention includes preparing a filter film structure to be solidified on a substrate, wherein the filter film structure to be solidified is a filter film that has been subjected to a molding process but not subjected to a solidification process. A freezing protection layer is set on the exposed surface of the filter film structure to be solidified so that the shape of the filter film structure to be solidified is fixed as the filter film to be processed, and the filter film to be processed is baked as the filter film. When preparing the filter film according to the present invention, the filter film structure to be solidified is fixed by setting a freezing protection layer after development in a traditional process flow. After the filter film to be processed is prepared, the filter films to be processed are uniformly baked. Compared with baking each filter film structure to be solidified, the time required for preparing the filter film can be saved, thereby improving the preparation efficiency. In addition, the embodiments of the present invention can ensure the applicability of the prepared filter film layer by cyclically preparing filter films to be processed of multiple colors on the substrate, and better adapt to the requirements of the existing technology for filter films; by cyclically preparing the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed on the substrate, and setting the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed as one of the three primary colors of red, green and blue filter films to be processed respectively, so as to ensure that the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed simultaneously include the three primary colors of red, green and blue filter films to be processed, which can reduce the preparation cost of the filter film while ensuring the practical applicability of the filter film.

[0074] Embodiment 2:

[0075] The method for preparing the filter film provided in this embodiment may include:

[0076] Disposing a filter film layer to be processed on a substrate;

[0077] The filter film layer to be processed is sequentially exposed and developed to obtain a filter film structure to be solidified;

[0078] A freezing protection layer is provided on the exposed surface of the filter film structure to be solidified, so that the shape of the filter film structure to be solidified is fixed as the filter film to be processed;

[0079] The filter film to be processed is baked to be used as the filter film.

[0080] It should be noted that in this embodiment, a filter film layer to be processed is provided on the substrate so that the filter film layer to be processed can be subsequently subjected to a molding process to form the filter film structure to be solidified. In this embodiment, the filter film layer to be processed is subjected to an exposure process and a development process in sequence to mold the filter film layer to be processed and form the filter film structure to be solidified, thereby ensuring the molding efficiency of the filter film layer to be processed.

[0081] Furthermore, in order to ensure the surface flatness of the filter film and improve the quality of the device, a freezing protection layer is provided on the exposed surface of the filter film structure to be solidified so that the shape of the filter film structure to be solidified is fixed. After the filter film is used, the following may also be included:

[0082] A smooth protective layer is arranged on the surface of the filter film to make the surface of the filter film smooth.

[0083] It should be noted that in this embodiment, by providing a smooth protective layer on the surface of the filter film, the uneven structure on the surface of the filter film can be filled, the flatness of the filter film can be improved, and the installation of the prepared filter film and the external structure can be facilitated, thereby improving the overall quality of the device.

[0084] Furthermore, in order to ensure that the filter film prepared in the substrate can filter the light beam, before setting the filter film layer to be processed on the above substrate, it can also include: preparing an anti-reflective shading layer on a transparent glass substrate as a substrate.

[0085] It should be noted that in this embodiment, an anti-reflective shading layer is prepared on a transparent glass substrate as a substrate, which can reduce the reflection of the light beam and ensure that the light beam can reach the position where the filter film is set, so that the filter film can achieve a filtering effect.

[0086] The preparation method of the filter film provided by the embodiment of the present invention includes setting a filter film layer to be processed on a substrate, sequentially exposing and developing the filter film layer to be processed to obtain a filter film structure to be solidified, setting a freezing protection layer on the exposed surface of the filter film structure to be solidified so that the shape of the filter film structure to be solidified is fixed as the filter film to be processed, and baking the filter film to be processed as the filter film. When preparing the filter film according to the present invention, the filter film structure to be solidified is fixed by setting a freezing protection layer after development in the traditional process flow, and the filter film to be processed is uniformly baked after the filter film to be processed is prepared. Compared with baking each filter film structure to be solidified, the time required for preparing the filter film can be saved and the preparation efficiency is improved. By setting the filter film layer to be processed on the substrate and sequentially exposing and developing the filter film layer to be processed to obtain the filter film structure to be solidified, the molding efficiency of the filter film layer to be processed can be guaranteed. In addition, this embodiment can improve the flatness of the surface of the filter film by setting a smooth protective layer on the surface of the filter film, facilitate the connection of the prepared filter film with the external structure, and improve the quality of the overall device; by preparing an anti-reflective shading layer on the transparent glass substrate as a substrate, it can reduce the reflection of the light beam and ensure that the light beam can reach the position where the filter film is set, so that the filter film can achieve a filtering effect.

[0087] To make the preparation method of the filter film provided by the present invention easier to understand, the preparation method of the filter film may specifically include the following steps:

[0088] Step S21: disposing a first color filter film layer to be processed on the substrate;

[0089] Step S22: sequentially performing exposure and development processing on the first color filter film layer to be processed to obtain a first color filter film structure to be solidified;

[0090] Step S23: a freezing protection layer is provided on the exposed surface of the first color filter film structure to be solidified, so as to fix the shape of the first color filter film structure to be solidified as the first color filter film to be processed;

[0091] Step S24: disposing a second color filter film layer to be processed on the substrate prepared with the first color filter film to be processed;

[0092] Step S25: sequentially performing exposure and development processing on the second color filter film layer to be processed to obtain a second color filter film structure to be solidified;

[0093] Step S26: a freezing protection layer is provided on the exposed surface of the second color filter film structure to be solidified, so as to fix the shape of the second color filter film structure to be solidified, and serve as the second color filter film to be processed;

[0094] Step S27: Arranging a third color filter film layer on the substrate on which the first color filter film and the second color filter film are prepared;

[0095] Step S28: sequentially performing exposure and development processing on the third color filter film layer to be processed to obtain a third color filter film structure to be solidified;

[0096] Step S29: a freezing protection layer is provided on the exposed surface of the third color filter film structure to be solidified, so that the shape of the third color filter film structure to be solidified is fixed, and the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed are used as the filter film to be processed; the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed are the filter films to be processed of the three primary colors of red, green and blue respectively;

[0097] Step S30: baking the filter film to be processed to obtain the filter film;

[0098] Step S31: a smooth protective layer is provided on the surface of the filter film to make the surface of the filter film smooth.

[0099] The following is an introduction to the filter membrane assembly provided in an embodiment of the present invention. The filter membrane assembly described below is prepared by the filter membrane preparation method described above, and can be referenced to the filter membrane preparation method described above.

[0100] Please refer to Figure 4 , Figure 4 A schematic structural diagram of a filter film assembly provided in an embodiment of the present invention may include the following structure:

[0101] Substrate 10 and filter film 20;

[0102] The filter film 20 is disposed on one side of the substrate 10;

[0103] The filter film 20 is formed by a filter film structure 21 to be fixed and a freeze protection layer 22 disposed on the exposed surface of the filter film structure 21 to be fixed, and is subjected to a baking process. The freeze protection layer 22 is used to fix the shape of the filter film structure 21 to be fixed.

[0104] It should be noted that, in this embodiment, the filter film 20 can be attached to one side of the substrate 10. This embodiment does not limit the type and quantity of the filter film 20 disposed on the surface of one side of the substrate 10. Accordingly, this embodiment does not limit the specific material of the cryoprotective layer 22. The cryoprotective layer 22 only needs to be able to fix the shape of the filter film structure 21 to be fixed and not damage the filter film structure 21 to be fixed. It should be further noted that, in this embodiment, the cryoprotective layer 22 can be a formed structure, or the cryoprotective layer 22 can also be an unformed structure, for example, it can be coated on the exposed surface of the filter film structure 21 to be fixed by coating. If the cryoprotective layer 22 is an unformed structure, the difficulty of fixing the shape of the cryoprotective layer 22 is lower than the difficulty of fixing the filter film structure 21 to be fixed, so as to ensure the improvement of the preparation efficiency of the filter film. For example, in this embodiment, after the cryoprotective layer 22 is coated on the exposed surface of the filter film structure 21 to be fixed, it can be automatically formed and fixed. In this embodiment, after the cryoprotective layer 22 is prepared on all exposed surfaces of the filter film structures 21 to be solidified, the filter film is baked to obtain the filter film 20 .

[0105] Furthermore, in order to improve the functionality of the light filter film 20 , the light filter film 20 may be a light filter film 20 of multiple colors.

[0106] This embodiment does not limit the specific number of color types in the filter film 20. For example, the specific number of color types in the filter film 20 may be 1, or the specific number of color types in the filter film 20 may be 2, or the specific number of color types in the filter film 20 may be 3.

[0107] Furthermore, in order to reduce the manufacturing cost of the filter film 20 while ensuring the functionality of the filter film 20 , the filter film 20 of multiple colors may be a filter film 20 including the three primary colors of red, green and blue.

[0108] It should be noted that by setting the filter film 20 of multiple colors to include the filter film 20 of the three primary colors of red, green and blue, the output light beam of any color can be controlled by superimposing and combining the filter films 20 of the three primary colors of red, green and blue, thereby reducing the preparation cost of preparing the multi-color filter film 20.

[0109] Furthermore, in order to improve the flatness of the surface of the prepared filter film 20 device and improve the quality of the filter film 20 device, the surface of the filter film 20 may be provided with a smooth protective layer, and the smooth protective layer is used to make the surface of the filter film 20 flat.

[0110] In this embodiment, by preparing a smooth protective layer on the surface of the filter film 20, the flatness of the filter film surface can be improved, and the filter film can be protected at the same time, thereby improving the quality of the filter film assembly.

[0111] The filter film assembly provided by the embodiment of the present invention comprises a substrate 10 and a filter film 20, wherein the filter film 20 is arranged on one side of the substrate 10, and the filter film 20 is formed by a filter film structure 21 to be solidified and a freeze protective layer 22 arranged on the exposed surface of the filter film structure 21 to be solidified, and the freeze protective layer 22 is used to fix the shape of the filter film structure 21 to be solidified. When preparing the filter film according to the present invention, the filter film structure to be solidified is fixed by setting a freeze protective layer after development in the traditional process flow, and after the filter film to be processed is prepared, the filter film to be processed is uniformly baked, which can save the time required for preparing the filter film and improve the efficiency of preparation compared to baking each filter film structure to be solidified. In addition, this embodiment can reduce the preparation cost of the filter film 20 while ensuring the functionality of the filter film 20 by setting the filter film 20 as a filter film 20 of the three primary colors of red, green and blue; and can improve the flatness of the filter film surface by preparing a smooth protective layer on the surface of the filter film 20, while protecting the filter film, thereby improving the quality of the filter film assembly.

[0112] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0113] Finally, it should be noted that, in this article, relationships such as first and second, etc. are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0114] The above is a detailed introduction to the preparation method of a filter film and a filter film assembly provided by the present invention. Specific examples are used in this article to illustrate the principle and implementation method of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A method for preparing a filter film, characterized in that: include: Preparing a filter film structure to be solidified on a substrate; the filter film structure to be solidified is a filter film that has been subjected to a molding process but has not been solidified; A freezing protection layer is provided on the exposed surface of the optical filter film structure to be fixed, so that the shape of the optical filter film structure to be fixed is used as the optical filter film to be processed; The filter film to be processed is baked to obtain a filter film.

2. The method for preparing the filter film according to claim 1, characterized in that: The method of preparing a filter film structure to be solidified on a substrate and providing a freezing protection layer on an exposed surface of the filter film structure to be solidified comprises: Preparing a filter film structure to be solidified with a target color on the substrate; The freezing protection layer is provided on the exposed surface of the to-be-fixed filter film structure of the target color, so as to fix the shape of the to-be-fixed filter film structure of the target color; The next color of the filter film structure to be solidified is used as the target color of the filter film structure to be solidified, and the steps of preparing the target color of the filter film structure to be solidified on the substrate to setting the freezing protection layer on the exposed surface of the target color of the filter film structure to be solidified are cyclically performed until the shapes of the filter film structures to be solidified of all colors are fixed as the filter films to be processed.

3. The method for preparing the filter film according to claim 2, characterized in that: The method of preparing a filter film structure to be solidified on a substrate and providing a freezing protection layer on an exposed surface of the filter film structure to be solidified comprises: Preparing a first color filter film structure to be solidified on the substrate; The freezing protection layer is disposed on the exposed surface of the to-be-fixed filter film structure of the first color, so that the shape of the to-be-fixed filter film structure of the first color is fixed as the to-be-treated filter film of the first color; Preparing a second color filter film structure to be cured on the substrate prepared with the first color filter film to be processed; The freezing protection layer is disposed on the exposed surface of the second color filter film structure to be solidified, so that the shape of the second color filter film structure to be solidified is fixed as the second color filter film to be processed; Preparing a third color filter film structure to be solidified on the substrate prepared with the first color filter film to be processed and the second color filter film to be processed; The freezing protection layer is arranged on the exposed surface of the third color filter film structure to be solidified to fix the shape of the third color filter film structure to be solidified, and the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed are used as the filter film to be processed; the first color filter film to be processed, the second color filter film to be processed and the third color filter film to be processed are respectively the filter films to be processed of the three primary colors of red, green and blue.

4. The method for preparing the filter film according to claim 1, characterized in that: The method of preparing a filter film structure to be solidified on a substrate comprises: Disposing a filter film layer to be processed on the substrate; The filter film layer to be processed is sequentially exposed and developed to obtain the filter film structure to be solidified.

5. The method for preparing the filter film according to claim 1, characterized in that: After baking the filter film to be processed to prepare the filter film, the method further includes: A smooth protective layer is arranged on the surface of the filter film to make the surface of the filter film smooth.

6. The method for preparing the filter film according to claim 4, characterized in that: Before arranging the filter film layer to be processed on the substrate, the method further includes: An anti-reflective light-shielding layer is prepared on a transparent glass substrate as the substrate.

7. A filter film assembly, prepared by the method for preparing the filter film according to claims 1 to 6, characterized in that: include: Substrates and filter films; The filter film is arranged on one side of the substrate; The filter film is formed by a filter film structure to be fixed and a freezing protective layer arranged on the exposed surface of the filter film structure to be fixed, and is subjected to a baking process. The freezing protective layer is used to fix the shape of the filter film structure to be fixed.

8. The filter film assembly according to claim 7, characterized in that: The filter films are filter films of various colors.

9. The filter film assembly according to claim 8, characterized in that: The filter films of multiple colors are filter films including the three primary colors of red, green and blue.

10. The filter film assembly according to claim 9, characterized in that: A smooth protective layer is provided on the surface of the filter film; the smooth protective layer is used to make the surface of the filter film smooth.