A fully automatic measurement and adjustment integrated tuning device for multi-cell ellipsoid resonant cavity

Abstract

The present invention discloses a fully automatic integrated tuning device for measuring and tuning a multi-cell ellipsoid resonant cavity, and belongs to the technical field of coaxiality measurement and tuning. The device of the present invention comprises a main support system, a multi-cell ellipsoid resonant cavity to be measured, a coaxiality measuring device, a tuning clamp assembly and a control system; the multi-cell ellipsoid resonant cavity to be measured can slide along the slide rail of the main support system; the coaxiality measuring device is equipped with a number of measuring sensors for real-time monitoring of the coaxiality of the multi-cell ellipsoid resonant cavity to be measured; the tuning clamp assembly is controlled by a control system, and the clamp and the tension and pressure plate are automatically adjusted by a motor to perform real-time tuning of the multi-cell ellipsoid resonant cavity to be measured. The device of the present invention can realize integrated measurement and tuning operations without manual intervention, which significantly improves the efficiency and accuracy of coaxiality measurement and tuning.

Description

Technical Field

[0001] The invention belongs to the technical field of coaxiality measurement and tuning, and in particular relates to a fully automatic measurement and tuning integrated tuning device for a multi-cell ellipsoid resonant cavity. Background Art

[0002] Coaxiality is an important parameter to measure whether the various parts of a device are kept near a central axis. It involves the design and manufacturing accuracy of shaft parts. In high-precision systems, coaxiality needs to be measured and corrected.

[0003] The polyhedral ellipsoid resonator is a device widely used in accelerators to achieve high acceleration gradients. The polyhedral ellipsoid resonator is a thin-walled structure formed by stamping parts and electron beam welding. It is connected by multiple resonant cavity units. Therefore, there are inevitable deformations during the processing, such as unit tilt, eccentricity, and unit length deviation, which affect the frequency and axial electric field flatness of the ellipsoid cavity, thereby reducing its operating electric field gradient. After the polyhedral ellipsoid resonator is processed and formed, it must be tuned. Its significance is to ensure that the polyhedral ellipsoid resonator has a flat axial electric field distribution so that it can work under high acceleration gradients. Therefore, the measurement and tuning of the coaxiality of the polyhedral ellipsoid resonator is a key technology in the manufacturing process.

[0004] There are two main coaxiality tuning methods in the prior art, one is manual tuning and the other is semi-automatic tuning. For manual tuning, the multi-cell ellipsoid resonator is first suspended vertically or fixed horizontally, and each ellipsoid resonator cell is stretched or compressed in turn using parallel clamps. The advantage of this method is that it is easy to operate, does not require complex devices and fixtures, and can tune multi-cell ellipsoid resonators of different sizes. However, the disadvantages of this method are still obvious, mainly that the tuning accuracy is not high, the tuning time is long, and measurement and tuning cannot be performed simultaneously; the other is semi-automatic tuning. Although the semi-automatic device improves the tuning efficiency by introducing software and partial automation technology, it still has the limitation of being unable to perform measurement and tuning simultaneously.

[0005] In addition, the coaxiality test and tuning of the polyhedral ellipsoid resonator are still carried out separately, that is, the coaxiality and other parameters of the polyhedral ellipsoid resonator are tested first, and then the tuning process is performed. After the tuning is completed, it may be necessary to measure the coaxiality a second time. If the measurement result does not reach the target state, it is necessary to tune a second time, and so on and so forth until the target state is reached. This process is relatively cumbersome and time-consuming.

[0006] Due to the high quality factor requirements of the ellipsoidal resonant cavity, the size and state of the cavity need to be adjusted very finely. How to quickly and conveniently measure and tune, improve the tuning efficiency and accuracy, and thus improve the performance of the ellipsoidal resonant cavity, is a technical problem that needs to be solved in this field. Summary of the invention

[0007] The purpose of the present invention is to overcome the defects of the above-mentioned prior art and provide a fully automatic measurement and tuning integrated tuning device for a multi-cell ellipsoidal resonant cavity, which can realize real-time rapid measurement, can tune while measuring, has a simple mechanical structure and requires less human intervention.

[0008] The technical problem proposed by the present invention is solved in this way:

[0009] A fully automatic measurement and tuning integrated tuning device for a multi-cell ellipsoid resonant cavity, comprising a main support system 1, a multi-cell ellipsoid resonant cavity to be measured 2, a coaxiality measuring device 3, a tuning clamping plate assembly 4 and a control system;

[0010] The main support system 1 includes a frame structure 101, a first slide rail 102, a power supply device 103 and a second slide rail 104; the first slide rail 102 is fixedly installed on the central axis of the upper surface of the frame structure 101, and two second slide rails 104 are symmetrically fixed on both sides of the first slide rail 102 and parallel to the first slide rail 102; the power supply device 103 is fixed on the side of the frame structure 101;

[0011] The multi-cell ellipsoid resonant cavity 2 to be tested can slide along the first slide rail 102;

[0012] The coaxiality measuring device 3 includes a fixed bracket, a measuring ring 303 and a measuring sensor 304; the fixed bracket is fixedly mounted on the frame structure 101, and the measuring ring 303 is fixedly mounted on the fixed bracket; a plurality of measuring sensors 304 are evenly distributed on the inner side of the measuring ring 303;

[0013] The tuning clamping plate assembly 4 includes two tuning clamping plate sub-assemblies with the same structure and symmetrical arrangement; the tuning clamping plate sub-assemblies are respectively located on both sides of the coaxiality measuring device 3, and include a fixed clamping plate 401, an upper track groove 402, a lower track groove 403, a tension and pressure plate 404, a first stepping motor 405 and a slide rod 406; the fixed clamping plate 401 is in a hollow rectangular shape, and circular holes are opened at the four corners; four screws 408 pass through the circular holes of the two fixed clamping plates 401 respectively, and four second stepping motors 407 are respectively located at the ends of the four screws 408, which are used to adjust the relative distance between the four corners of the two fixed clamping plates 401; the bottom of the fixed clamping plate 401 is equipped with a bottom slider 409, and the bottom slider A driving motor is provided on the block 409, and the driving motor drives the bottom slider 409 to slide or be fixed along the second slide rail 104; the upper track groove 402 and the lower track groove 403 are respectively installed on the upper and lower inner parts of the fixed clamping plate 401; the two tension and pressure plates 404 are located between the upper track groove 402 and the lower track groove 403, and the two tension and pressure plates 404 are in a circular hollow rectangular shape when closed; the ends of the upper track groove 402 and the lower track groove 403 are respectively provided with a first stepping motor 405, and the slide rod 406 passes through the tension and pressure plate 404 and the first stepping motor 405, and the left and right tension and pressure plates 404 are driven to open and close through the first stepping motor 405 and the slide rod 406;

[0014] The control system is used to control the movement of the multi-cell ellipsoid resonant cavity 2 to be measured, receive the collected data of the measurement sensor 304, complete the coaxiality solution, and automatically control the movement of the bottom slider 409, the first stepper motor 405 and the second stepper motor 407 according to the coaxiality solution result.

[0015] Furthermore, in the main support system 1, the frame structure 101 is a frame structure of an aluminum alloy profile.

[0016] Furthermore, the multi-cell ellipsoid resonant cavity 2 to be tested includes an input port 203, a plurality of unit cavities 201 and an output port 204 cascaded in sequence, and also includes a support bracket and a sliding base 207; both ends of the unit cavity 201 are provided with reinforcing ribs 202, and adjacent unit cavities 201 are cascaded through the reinforcing ribs 202; the unit cavities 201 and the supporting brackets correspond one to one, and the supporting brackets include a soft supporting body 205 and a supporting seat 206; the bottom of the supporting seat 206 is fixedly connected to the sliding base 207, and the top is fixedly connected to the soft supporting body 205, which is used to support the unit cavity 201; the sliding base 207 is in contact with the first slide rail 102 of the main support system 1, so that the multi-cell ellipsoid resonant cavity 2 to be tested can slide along the first slide rail 102.

[0017] Furthermore, in the coaxiality measuring device 3, the fixed bracket includes a support rod 301 and a support plane 302; the two support rods 301 are fixedly installed on both sides of the frame structure 101 of the main support system 1, and the two support planes 302 are fixedly installed on the support rods 301. The support rods 301 and the support planes 302 work together to fix the measuring ring 303 on the frame structure 101 of the main support system 1.

[0018] Furthermore, the center of the measuring ring 303 and the axis of the multi-cell ellipsoid resonant cavity 2 to be measured are located on the same horizontal line.

[0019] Furthermore, the inner diameter of the measuring ring 303 is larger than the outer diameter of the unit cavity 201 , and the spacing between the tension and compression plates 404 in the open state is larger than the outer diameter of the unit cavity 201 .

[0020] Furthermore, the measuring sensors 304 point to the center of the measuring circle 303 , and the angle between adjacent measuring sensors 304 is 45° or 30°.

[0021] Furthermore, the measuring sensor 304 is a laser ranging sensor.

[0022] The beneficial effects of the present invention are:

[0023] The fully automatic measurement and tuning integrated tuning device of the multi-cell ellipsoid resonant cavity described in the present invention can simultaneously measure and tune the unit cavities of the same multi-cell ellipsoid resonant cavity through the tuning clamping plate component and the coaxiality measuring component surrounded in the middle according to the program setting of the control system, so as to achieve the purpose of simultaneous measurement and tuning; the device described in the present invention can realize the simultaneous implementation of tuning and measurement, and can monitor the tuning effect in real time to improve the tuning accuracy; the entire process of the device described in the present invention does not require human control, and can realize the full process automation of measurement and tuning of the multi-cell ellipsoid resonant cavity; the device described in the present invention realizes the function of fast and real-time tuning of the ellipsoid resonant cavity, so that it meets the physical parameter requirements and ensures the performance and effect of the ellipsoid resonant cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the fully automatic measurement and adjustment integrated tuning device of the multi-cell ellipsoid resonant cavity of the present invention;

[0025] Figure 2 It is a structural schematic diagram of the main support system in the device of the present invention;

[0026] Figure 3 It is a schematic diagram of the structure of the multi-cell ellipsoid resonant cavity to be tested in the device of the present invention;

[0027] Figure 4It is a schematic diagram of the structure in which the multi-cell ellipsoid resonant cavity to be measured and the coaxiality measuring device in the device of the present invention are placed on the main support system;

[0028] Figure 5 It is a structural schematic diagram of the coaxiality measuring device in the device of the present invention;

[0029] Figure 6 It is a schematic diagram of the structure of the tuning clamp assembly and the multi-cell ellipsoid resonant cavity to be measured in the device of the present invention;

[0030] Figure 7 It is a schematic diagram of the overall structure of the tuning clamp assembly in the device of the present invention;

[0031] Figure 8 It is a schematic diagram of the inner structure when the tension and pressure plate of the tuning clamp assembly in the device of the present invention is in an open state;

[0032] Fig. 9 It is a schematic diagram of the inner structure when the tension and pressure plates in the tuning clamp assembly of the device described in the present invention are in a closed state.

[0033] The reference numerals involved in the accompanying drawings are as follows: 1 is the main support system, 2 is the multi-cell ellipsoid resonant cavity to be measured, 3 is the coaxiality measuring device, 4 is the tuning clamp assembly, 101 is the frame structure, 102 is the first slide rail, 103 is the power supply equipment, 104 is the second slide rail, 201 is the unit cavity, 202 is the reinforcing rib, 203 is the input port, 204 is the output port, 205 is the soft support body, 206 is the support seat, 207 is the sliding base, 301 is the support rod, 302 is the support plane, 303 is the measuring ring, 304 is the measuring sensor, 401 is the fixing clamp, 402 is the upper track groove, 403 is the lower track groove, 404 is the tension and compression plate, 405 is the first stepping motor, 406 is the slide rod, 407 is the second stepping motor, 408 is the screw, and 409 is the bottom slider. DETAILED DESCRIPTION

[0034] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0035] This embodiment provides a fully automatic measurement and adjustment integrated tuning device for a multi-cell ellipsoid resonant cavity, and its overall structural schematic diagram is shown in FIG. Figure 1 As shown, it includes a main support system 1, a multi-cell ellipsoid resonant cavity to be measured 2, a coaxiality measuring device 3, a tuning clamping plate assembly 4 and a control system.

[0036] The structural diagram of the main support system 1 is as follows Figure 2As shown, it includes a frame structure 101, a first slide rail 102, a power supply device 103 and a second slide rail 104; the frame structure 101 is a frame structure of an aluminum alloy profile; the first slide rail 102 is fixedly installed on the central axis of the upper surface of the frame structure 101, and the two second slide rails 104 are symmetrically fixed on both sides of the first slide rail 102 and are parallel to the first slide rail 102; the power supply device 103 is fixed on the side of the frame structure 101 to provide power energy for the fully automatic measurement and adjustment integrated tuning device.

[0037] The structural diagram of the multi-cell ellipsoid resonator 2 to be tested is as follows: Figure 3 As shown, it includes an input port 203, a plurality of unit cavities 201 and an output port 204 cascaded in sequence, and also includes a support bracket and a sliding base 207; both ends of the unit cavity 201 are provided with reinforcing ribs 202, and adjacent unit cavities 201 are cascaded through the reinforcing ribs 202; the unit cavity 201 and the support bracket correspond one-to-one to ensure the stability of the multi-cell ellipsoid resonant cavity, and the support bracket includes a soft support body 205 and a support seat 206; the bottom of the support seat 206 is fixedly connected to the sliding base 207, and the top is fixedly connected to the soft support body 205, which is used to support the unit cavity 201; the sliding base 207 is in contact with the first slide rail 102 of the main support system 1, so that the multi-cell ellipsoid resonant cavity 2 to be tested can slide along the first slide rail 102.

[0038] The schematic diagram of the structure of the multi-cell ellipsoid resonant cavity 2 to be measured and the coaxiality measuring device 3 placed on the main support system 1 is shown in Figure 4 As shown, the structural schematic diagram of the coaxiality measuring device 3 is as shown Figure 5 As shown, it includes a support rod 301, a support plane 302, a measuring ring 303 and a plurality of measuring sensors 304; two support rods 301 are fixedly installed on both sides of the frame structure 101 of the main support system 1, and two support planes 302 are fixedly installed on the support rods 301. The support rods 301 and the support planes 302 work together to fix the measuring ring 303 on the frame structure 101 of the main support system 1; the center of the measuring ring 303 is kept on the same horizontal line as the axis of the multi-cell ellipsoid resonant cavity 2 to be measured, Ensure the accuracy of the test; the inner diameter of the measuring ring 303 is larger than the outer diameter of the unit cavity 201, so as to ensure that the multi-cell ellipsoid resonant cavity 2 to be tested can pass through the measuring ring 303 smoothly, so that the measuring sensor 304 can test each unit cavity 201 of the multi-cell ellipsoid resonant cavity 2 to be tested; a plurality of measuring sensors 304 are evenly distributed on the measuring ring 303, and the measuring sensors 304 point to the center of the measuring ring 303. Through system correction and compensation, the tangent plane of the multi-cell ellipsoid resonant cavity can be measured with high precision at one time.

[0039] To ensure the accuracy and precision of the measurement, the more the number of measurement sensors 304, the better. Figure 5The angle of the measuring sensor shown is 45°, and can also be 30° or smaller. The smaller the angle, the higher the test accuracy. To ensure that the multi-cell ellipsoid resonant cavity can pass through the measuring ring 303, a gap is provided directly below the measuring ring 303. At the same time, the measuring sensor 304 cannot be placed in the gap.

[0040] The measuring sensor 304 is generally a contact sensor or a non-contact sensor. The data interface of the sensor is connected to a data acquisition card on the control system through a cable, and scanning measurement is performed through program control.

[0041] The structural diagram of the tuning clamp assembly 4 and the multi-cell ellipsoid resonant cavity 2 to be measured is shown in Figure 6 As shown, the structural schematic diagram of the tuning clamp assembly 4 is as shown Figure 7 As shown, it includes two tuning clamp sub-assemblies with the same structure and symmetrical arrangement; the tuning clamp sub-assemblies are respectively located on both sides of the coaxiality measuring device 3, including a fixed clamp 401, an upper track groove 402, a lower track groove 403, a tension and pressure plate 404, a first stepper motor 405 and a slide rod 406; the fixed clamp 401 is in a hollow rectangular shape, with round holes at the four corners; four screws 408 pass through the round holes of the two fixed clamps 401 respectively, and four second stepper motors 407 are respectively located at the ends of the four screws 408 for adjusting the relative distance between the four corners of the two fixed clamps 401; the bottom of the fixed clamp 401 is equipped with a bottom slider 409, and the bottom slider 409 is provided with a driving motor, which is connected to the fixed clamp 401 by a second stepper motor 407. The overdrive motor drives the bottom slider 409 to form displacement or locking fixation, thereby realizing the sliding or fixing of the tuning clamp assembly 4 along the second slide rail 104; the upper track groove 402 and the lower track groove 403 are respectively installed on the upper and lower inner parts of the fixed clamp plate 401; the two tension and pressure plates 404 are located between the upper track groove 402 and the lower track groove 403, and the two tension and pressure plates 404 are in a circular hollow rectangular shape when closed; the ends of the upper track groove 402 and the lower track groove 403 are respectively provided with a first stepper motor 405, and the slide rod 406 passes through the tension and pressure plate 404 and the first stepper motor 405, and the left and right tension and pressure plates 404 are driven to open and close through the first stepper motor 405 and the slide rod 406.

[0042] Figure 8 It is a schematic diagram of the inner structure when the tension and compression plates 404 in the tuning clamp assembly 4 are in an open state; in this state, the spacing between the tension and compression plates 404 in the open state is greater than the outer diameter of the unit cavity 201, so that the multi-cell ellipsoid resonant cavity 2 to be tested can smoothly pass through the tuning clamp assembly 4, thereby realizing the tuning of different unit cavities 201. Fig. 9 It is a schematic diagram of the inner structure when the tension and compression plate 404 in the tuning clamp assembly 4 is in a closed state. In this state, the multi-cell ellipsoid resonant cavity 2 to be measured is in a clamped state, so that the clamped unit cavity 201 in the multi-cell ellipsoid resonant cavity 2 to be measured is tuned.

[0043] In order to achieve the clamping of the multi-cell ellipsoid resonator 2 to be measured, it is necessary to fix one tuning clamp subassembly to compact the other tuning clamp subassembly, so a second slide rail 104 and a bottom slider 409 are provided for coordination. During tuning, the four second stepping motors 407 and four screws 408 corresponding to the fixed clamp 401 work independently to adjust different eccentricity conditions, thereby achieving tuning of multi-directional eccentricity conditions.

[0044] The control system is used to control the movement of the multi-cell ellipsoid resonator 2 to be measured, receive the collected data of the measurement sensor 304, complete the coaxiality solution, and automatically control the movement of the bottom slider 409, the first stepper motor 405 and the second stepper motor 407 according to the coaxiality solution result. In this embodiment, the control system collects sensor data and combines the preset tuning algorithm to adjust the state of the multi-cell ellipsoid resonator in real time to achieve synchronous operation of measurement and tuning. The whole process does not require manual intervention, ensuring efficient and accurate tuning results.

[0045] There are two fixed clamps 401 on the tuning clamp assembly 4, which are respectively located on both sides of the coaxiality measuring device 3. On each fixed clamp 401, a tension and compression plate 404 is placed on the side facing the coaxiality measuring device 3. The tension and compression plate 404 is fixed by the track groove on the fixed clamp 401. The tension and compression plate 404 located on the track groove on the same fixed clamp 401 is composed of two parts: when the two parts are separated, the gap formed can allow the multi-cell ellipsoid resonant cavity 2 to be measured to move freely without being affected; when the two parts are close together, the multi-cell ellipsoid resonant cavity 2 to be measured can be tensioned and compressed.

[0046] The movement of the fixed clamping plate 401 and the tension and pressure plate 404 on the tuning clamping plate assembly 4 can be controlled by a corresponding stepping motor, and can be accurately moved to the corresponding position through the program setting of the control system to ensure the tuning accuracy.

[0047] Through the tuning clamp assembly 4 and the coaxiality measuring device 3 enclosed in the middle, the unit cavity 201 of the same multi-cell ellipsoid resonator 2 to be measured can be measured and tuned at the same time, and the purpose of measuring and tuning can be achieved. The multi-cell ellipsoid resonator 2 to be measured can move along the slide rail on the main support system 1 under the control of the control system. Under the control of the control system, when the multi-cell ellipsoid resonator 2 to be measured moves from one side of the measuring ring 303 to the other side, the coaxiality of the entire multi-cell ellipsoid resonator 2 to be measured can be quickly measured. The device is designed to be fully automated and does not require manual intervention, which significantly improves the efficiency and accuracy of tuning and can effectively reduce the time of multiple measurements and adjustments during the tuning process.

[0048] Compared with the prior art, the fully automatic integrated tuning device described in this embodiment can measure and tune the multi-cell ellipsoid resonant cavity at the same time, can measure and tune the coaxiality of the same unit cavity, monitor the tuning status at any time, can know the tuning effect in time, and achieve the tuning effect simply and quickly. The whole process is controlled by the control system software without human intervention, and the whole process is automated.

[0049] In summary, the device described in this embodiment provides an efficient, accurate and automated fully automatic measurement and tuning integrated tuning solution for the polyhedral ellipsoid resonant cavity, which significantly improves the tuning efficiency and performance of the polyhedral ellipsoid resonant cavity.

[0050] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For technicians in the technical field to which the present invention belongs, some simple deductions, deformations or substitutions can be made based on the ideas of the present invention. All simple, equivalent changes and modifications made according to the claims and description of the present invention application fall within the scope of protection of the claims of the present invention patent. The contents not described in detail in the present invention are all conventional technical contents.

Claims

1. A fully automatic measurement and adjustment integrated tuning device for a multi-cell ellipsoidal resonant cavity, characterized in that: It comprises a main support system (1), a multi-cell ellipsoid resonant cavity to be measured (2), a coaxiality measuring device (3), a tuning clamping plate assembly (4) and a control system; The main support system (1) comprises a frame structure (101), a first slide rail (102), a power supply device (103) and a second slide rail (104); the first slide rail (102) is fixedly mounted on the central axis of the upper surface of the frame structure (101); two second slide rails (104) are symmetrically fixed on both sides of the first slide rail (102) and are parallel to the first slide rail (102); the power supply device (103) is fixed on the side of the frame structure (101); The multi-cell ellipsoid resonant cavity (2) to be tested can slide along the first slide rail (102); The coaxiality measuring device (3) comprises a fixed bracket, a measuring ring (303) and a measuring sensor (304); the fixed bracket is fixedly mounted on the frame structure (101), and the measuring ring (303) is fixedly mounted on the fixed bracket; a plurality of measuring sensors (304) are evenly distributed on the inner side of the measuring ring (303); The tuning clamping plate assembly (4) comprises two tuning clamping plate subassemblies with the same structure and arranged symmetrically; the tuning clamping plate subassemblies are respectively located on both sides of the coaxiality measuring device (3), and comprise a fixed clamping plate (401), an upper track groove (402), a lower track groove (403), a tension and pressure plate (404), a first stepper motor (405) and a slide bar (406); the fixed clamping plate (401) is in a hollow rectangular shape, and has round holes at four corners; four screws (408) respectively pass through the round holes of the two fixed clamping plates (401), and four second stepper motors (407) are respectively located at the ends of the four screws (408) for adjusting the relative distance between the four corners of the two fixed clamping plates (401); a bottom slider (409) is installed at the bottom of the fixed clamping plate (401), and the bottom slider (409) is provided at the bottom of the fixed clamping plate (401). 09) is provided with a driving motor, which drives the bottom slider (409) to slide or fix along the second slide rail (104); the upper track groove (402) and the lower track groove (403) are respectively installed on the upper and lower inner parts of the fixed clamping plate (401); the two tension and pressure plates (404) are located between the upper track groove (402) and the lower track groove (403), and the two tension and pressure plates (404) are in a circular hollow rectangular shape when closed; the ends of the upper track groove (402) and the lower track groove (403) are respectively provided with a first stepper motor (405), and the slide bar (406) passes through the tension and pressure plate (404) and the first stepper motor (405), and the left and right tension and pressure plates (404) are driven to open and close through the first stepper motor (405) and the slide bar (406); The control system is used to control the movement of the multi-cell ellipsoid resonant cavity (2) to be measured, receive data collected by the measurement sensor (304), complete the coaxiality solution, and automatically control the movement of the bottom slider (409), the first stepper motor (405) and the second stepper motor (407) according to the coaxiality solution result.

2. The fully automatic measurement and adjustment integrated tuning device of the multi-cell ellipsoid resonant cavity according to claim 1 is characterized in that: In the main support system (1), the frame structure (101) is a frame structure of aluminum alloy profiles.

3. The fully automatic measurement and adjustment integrated tuning device of the multi-cell ellipsoid resonant cavity according to claim 1 is characterized in that: The multi-cell ellipsoid resonant cavity (2) to be tested comprises an input port (203), a plurality of unit cavities (201) and an output port (204) which are cascaded in sequence, and also comprises a support bracket and a sliding base (207); both ends of the unit cavity (201) are provided with reinforcing ribs (202), and adjacent unit cavities (201) are cascaded via the reinforcing ribs (202); the unit cavities (201) and the support brackets correspond one to one, and the support brackets comprise a soft support body (205) and a support seat (206); The bottom of the support seat (206) is fixedly connected to the sliding base (207), and the top is fixedly connected to the soft support body (205), and is used to support the unit cavity (201); the sliding base (207) is in contact with the first slide rail (102) of the main support system (1), so that the multi-cell ellipsoid resonant cavity (2) to be tested can slide along the first slide rail (102).

4. The fully automatic measurement and adjustment integrated tuning device of a multi-cell ellipsoidal resonant cavity according to claim 1 is characterized in that: In the coaxiality measuring device (3), the fixed support comprises a support rod (301) and a support plane (302); the two support rods (301) are fixedly mounted on both sides of a frame structure (101) of a main support system (1), and the two support planes (302) are fixedly mounted on the support rods (301); the support rods (301) and the support planes (302) work together to fix a measuring ring (303) on the frame structure (101) of the main support system (1).

5. The fully automatic measurement and adjustment integrated tuning device of a multi-cell ellipsoid resonant cavity according to claim 1 is characterized in that: The center of the measuring ring (303) and the axis of the multi-cell ellipsoid resonant cavity (2) to be measured are located on the same horizontal line.

6. The fully automatic measurement and adjustment integrated tuning device of a multi-cell ellipsoid resonant cavity according to claim 3 is characterized in that: The inner diameter of the measuring ring (303) is larger than the outer diameter of the unit cavity (201), and the spacing between the tension and compression plates (404) in the open state is larger than the outer diameter of the unit cavity (201).

7. The fully automatic measurement and adjustment integrated tuning device of a multi-cell ellipsoid resonant cavity according to claim 1 is characterized in that: The measuring sensors (304) point toward the center of the measuring circle (303), and the angle between adjacent measuring sensors (304) is 45° or 30°.

8. The fully automatic measurement and adjustment integrated tuning device of a multi-cell ellipsoid resonant cavity according to claim 1 is characterized in that: The measuring sensor (304) is a laser distance measuring sensor.

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