Detection equipment

Abstract

Detection equipment comprises a machine table, a detection device, a transfer device, a first conveying device, a second conveying device and a third conveying device, wherein the detection device and the transfer device are arranged in a detection area of the machine table; the first conveying device, the second conveying device and the third conveying device stretch across the detection area and a material picking area of the machine table; a first feeding position, a first discharging position and a second discharging position are defined in the material picking area, and a detection position, a first transferring position and a second transferring position are defined in the detection area; the first conveying device is used for conveying a detected piece from a first feeding position to a detection position, the detection device is used for detecting the detected piece at the detection position, the transferring device is used for sorting and transferring the detected piece to a first transferring position or a second transferring position, and the second conveying device is used for transferring the detected piece from the first transferring position to a first discharging position. The third conveying device is used for transferring the tested piece from the second transferring position to the second discharging position. The feeding station and the discharging station are arranged on the same direction side or the same area position of the equipment, so that the number of operators and the working intensity can be effectively reduced, and the detection working efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of automation equipment, and in particular to a detection device. Background Art

[0002] Taking small-sized product materials such as wafers and electronic components as an example, the product materials need to be inspected during the manufacturing process to eliminate defective products. At present, in the inspection process of small-sized product materials, operators are usually required to use trays to transport multiple product materials to be inspected to the loading position of the inspection equipment at one time, and then sort the good and defective products in the product materials to different trays according to the inspection results, and finally complete the one-time unloading of multiple good products and multiple defective products. This inspection process often requires a single person to perform reciprocating operations between multiple different positions of the inspection equipment, or requires multiple people to cooperate in the operation, which is not only time-consuming and labor-intensive, but also seriously affects the efficiency of batch inspection operations. Summary of the invention

[0003] The main technical problem solved by the present application is to provide a detection device that can improve the efficiency and automation of detection operations.

[0004] In one embodiment, a detection device is provided, comprising a machine platform and a detection device, a transfer device and a plurality of conveying devices arranged on the machine platform, wherein the machine platform has a picking area and a detection area arranged side by side in a first horizontal direction, the detection device and the transfer device are arranged in the detection area, the conveying device is arranged across the detection area and the picking area along the first horizontal direction, and a plurality of the conveying devices are arranged side by side in a second horizontal direction perpendicular to the first horizontal direction; wherein:

[0005] The plurality of conveying devices include a first conveying device, a second conveying device and a third conveying device, the picking area is defined with a first loading position, a first unloading position and a second unloading position arranged side by side in the second horizontal direction, and the detection area is defined with a detection position, a first transfer position and a second transfer position arranged side by side in the second horizontal direction;

[0006] The first conveying device is used to convey the test piece received from the first loading position to the detection position; the detection device can be controlled to move to the detection position to detect the test piece;

[0007] The transfer device is controllably movable between the detection position, the first transfer position and the second transfer position, and is used to transfer the tested piece with a qualified detection result to the first transfer position, and is used to transfer the tested piece with an unqualified detection result to the second transfer position;

[0008] The second conveying device is used to convey the tested piece received from the first transfer position to the first unloading position, and the third conveying device is used to convey the tested piece received from the second transfer position to the second unloading position.

[0009] The detection equipment according to the above embodiment includes a machine, a detection device and a transfer device arranged in the detection area of ​​the machine, and a first conveying device, a second conveying device and a third conveying device arranged across the detection area and the picking area of ​​the machine; the picking area is defined with a first loading position, a first unloading position and a second unloading position, and the detection area is defined with a detection position, a first transfer position and a second transfer position; the first conveying device is used to transport the test piece from the first loading position to the detection position, the detection device is used to detect the test piece at the detection position, the transfer device is used to sort and transfer the test piece to the first transfer position or the second transfer position, the second conveying device is used to transfer the test piece from the first transfer position to the first unloading position, and the third conveying device is used to transfer the test piece from the second transfer position to the second unloading position.

[0010] By setting the loading station and the unloading station on the same side of the equipment or in the same area, the operator can complete the loading of the tested parts and the unloading of good and defective products at the same position, thereby effectively reducing the number of operators and reducing the workload of the operators; at the same time, through the mutual cooperation between the various functional devices, the processes of conveying, transferring, testing, and sorting good and defective products of the tested parts can be automatically completed inside the equipment, thereby reducing manual intervention and effectively improving the efficiency and accuracy of the detection operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 The figure is a schematic diagram of the outer contour structure of a detection device according to an embodiment.

[0012] Figure 2 A schematic diagram of the partition layout of various functional devices in a detection device according to an embodiment.

[0013] Figure 3 The figure is a schematic diagram of the layout relationship between the functional bits of a detection device according to an embodiment.

[0014] Figure 4 The figure is a schematic diagram of the layout of the functional locations of a detection device in a device space according to an embodiment.

[0015] Figure 5 A schematic diagram of the structural relationship between various functional devices in a detection device according to an embodiment.

[0016] Figure 6 The figure is a schematic diagram of the structural relationship of relevant functional devices in the detection area of ​​a detection device according to an embodiment.

[0017] Figure 7A schematic diagram of the structural relationship of relevant functional devices in a material picking area of ​​a detection device according to an embodiment.

[0018] Figure 8 The figure is a schematic diagram of the structure of a transfer device and a detection device in a detection device according to an embodiment.

[0019] Fig. 9 The figure is a schematic diagram of the structure of a sorting device and a positioning device in a detection device according to an embodiment.

[0020] Fig.10 A schematic diagram of the structural layout of multiple conveying devices in a detection device according to an embodiment.

[0021] Fig.11 The figure is a schematic diagram of the structure of a conveying device in a detection device according to an embodiment.

[0022] Fig.12 The figure is a schematic diagram of the coordination relationship between the sorting device and the transfer device in a detection device according to an embodiment.

[0023] Fig.13 The present invention is a schematic diagram of the structural layout of a disc separating device and a disc replenishing device in a detection device according to an embodiment.

[0024] Fig.14 Schematic diagram of the structure of a carrier plate assembly in a detection device according to an embodiment (I).

[0025] Fig.15 for Fig.14 Schematic diagram of the structural breakdown of the carrier assembly in FIG.

[0026] Fig.16 for Fig.14 Schematic diagram of the planar structure of the carrier plate assembly.

[0027] Fig.17 for Fig.14 Schematic diagram of the cross-sectional structure of the positioning module of the carrier assembly.

[0028] Fig.18 Schematic diagram of the structure of a carrier plate assembly in a detection device according to an embodiment (II).

[0029] Fig.19 This is a schematic structural diagram of a silo device in a detection device according to an embodiment (I).

[0030] Fig. 20 This is a schematic structural diagram of a silo device in a detection device according to an embodiment (II).

[0031] Fig.21 for Fig.19 A schematic diagram of the structure of the tray assembly in the silo device. DETAILED DESCRIPTION

[0032] The present application is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0033] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0034] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0035] See also Figures 1 to 21 The embodiment of the present application provides a detection device that allows operators to load the test pieces, unload good and bad products, and perform other operations on the same side of the equipment or in the same area, which is conducive to single-person operation; at the same time, the detection device can automatically complete the transfer, detection, sorting and other processes of the test pieces, thereby effectively reducing manual intervention and improving detection efficiency.

[0036] The following mainly describes the structural architecture, working principle, etc. of the detection equipment by taking the detection of wafers as an example; technical personnel in this field should know that after completing the wafer cutting operation, the wafers are usually placed in batches in trays to complete various steps of the packaging process. During the packaging process, defective wafers need to be removed, including but not limited to defective products such as solder balls, dirt, and surface defects.

[0037] However, it should be noted that wafer inspection is only a specific manifestation of the application of the inspection equipment; the inspection equipment can also be used to inspect other small product workpieces such as optical lenses and electronic components. For example, multiple small products can be loaded on a tray, and the trays or product workpieces can be transferred in the inspection equipment to realize batch inspection of product workpieces and automatic sorting of good and defective products. The inspection equipment can also be used to inspect some product workpieces that do not rely on trays, such as large product workpieces such as display panels that can be loaded and unloaded directly from the inspection equipment.

[0038] It is understandable that, according to actual application requirements (such as detection requirements, type of device under test, etc.), the structural architecture, working mode, etc. of the detection equipment can be adaptively adjusted to meet the application requirements.

[0039] In one embodiment, see Figures 1 to 5 The detection equipment includes a machine 100, a detection device 200, a transfer device 300, multiple conveying devices 400, a tray separation device 500a, a tray replenishment device 500b, a sorting device 500c, multiple silo devices 600 and other functional devices (such as a control system, etc.) that exist as needed, which are described in detail below.

[0040] See also Figure 2 and Figure 5 , the machine 100 is mainly used as a structural installation carrier for other functional devices of the detection equipment. The machine 100 can be understood as a workbench of the detection equipment. The relevant functional devices can be set on the machine 100 and adjust their spatial positions relative to the machine 100 to realize the transportation, detection, sorting, etc. of the wafers. By dividing or separating the spatial area of ​​the machine 100, a picking area 100a and a detection area 100b arranged side by side in the first horizontal direction can be formed on the machine 100; wherein, the picking area 100a may include an area for operators to perform manual operations (such as loading and unloading operations of wafers), and the detection area 100b may include an area for the detection equipment to perform automatic operations such as detection and sorting; when the detection equipment is in normal use, the first horizontal direction can be understood as the front and rear direction close to and away from the operator, and the picking area 100a is close to the operator and is located in front of the detection area 100b.

[0041] In order to describe the detection device more clearly and in detail, based on the structural layout of the relevant functional devices on the machine 100, the working principle of the detection device, etc., a plurality of functional positions are defined in the space area corresponding to the picking area 100a and the detection area 100b (see Figure 3 and Figure 4), the multiple functional positions include a first loading position P1, a first unloading position P2, a second unloading position P3, a second loading position P4, a detection position P5, a first transfer position P6, a second transfer position P7, a third transfer position P8 and a fourth transfer position P9.

[0042] It is understandable that these functional positions may refer to predetermined spatial areas or spatial positions, and these functional positions are only used to distinguish the relationship between the described objects (such as spatial position relationship, mutual coordination relationship, etc.), and do not indicate or imply that the described objects must be structurally laid out according to specific functional positions. Figure 3 The bold solid line with double arrows in the middle may indicate the approximate movement path or direction of the relevant functional device.

[0043] See also Figure 3 and Figure 4 , the first loading position P1, the first unloading position P2 and the second unloading position P3 are arranged side by side along the second horizontal direction in the picking area 100a, the second unloading position P3 is located in the picking area 100a and is located on one side (for example, the front side or the rear side) of the second unloading position P3 in the first horizontal direction; the detection position P5, the first shifting position P6 and the second shifting position P7 are arranged side by side along the second horizontal direction in the detection area 100b, the third shifting position P8 and the fourth shifting position P9 are arranged side by side along the second horizontal direction in the detection area 100b, and the third shifting position P8 and the first shifting position P6 are arranged side by side along the first horizontal direction, and the fourth shifting position P9 and the second shifting position P7 are arranged side by side along the first horizontal direction; when the detection equipment is in normal use, the second horizontal direction can be understood as the left-right direction perpendicular to the first horizontal direction.

[0044] See also Figure 1 , Figure 2 , Figure 5 , Figure 7 Combined with Figure 3 and Figure 4 The silo device 600 is disposed on the upper side of the machine 100 in the vertical direction, and is mainly used for storing trays. For example, the operator can stack multiple trays in the vertical direction and store them in the silo device 600 to realize batch manual loading operations of wafers through the trays; for another example, the operator can take out multiple trays stacked in the silo device 600 to realize batch manual unloading operations of wafers.

[0045] The multiple silo devices 600 include a first silo device 600a, a second silo device 600b, a third silo device 600c and a fourth silo device 600d; wherein the first silo device 600a is arranged at the first upper material position P1, and is mainly used to store multiple trays loaded with wafers to be tested; the second silo device 600b is arranged at the first lower material position P2, and is mainly used to store multiple trays loaded with wafers with qualified test results; the third silo device 600c is arranged at the second lower material position P3, and is mainly used to store multiple trays loaded with wafers with unqualified test results; the fourth silo device 600d is arranged at the second upper material position P4, and is mainly used to store one or more empty trays.

[0046] To facilitate distinction and description, wafers (or test pieces) with qualified inspection results are defined as OK products, wafers (or test pieces) with unqualified inspection results are defined as NG products, the tray loaded with wafers (or test pieces) to be inspected is defined as a loading tray, the tray loaded with OK products or used to load OK products is defined as an OK tray, and the tray loaded with NG products or used to load NG products is defined as an NG tray.

[0047] See also Figure 5 and Figure 7 Combined with Figure 3 and Figure 4 , multiple conveying devices 400 are arranged side by side along the second horizontal direction at the lower side of the machine 100 in the vertical direction, and each conveying device 400 is arranged across the picking area 100a and the detection area 100b along the first horizontal direction, and is mainly used to realize the position transfer of the wafer by conveying the corresponding material tray to provide support for automatic loading, automatic unloading, automatic detection, etc. of the wafer. The multiple conveying devices 400 include a first conveying device 400a, a second conveying device 400b, and a third conveying device 400c.

[0048] The first conveying device 400a is configured to controllably move along the first horizontal direction between the first loading position P1 and the detection position P5, so that the first conveying device 400a can receive the loading tray located at the bottom of the first silo device 600a at the first loading position P1, and convey the loading tray to the detection position P5. For example, the operator can pre-store multiple loading trays in the first silo device 600a, and convey the multiple loading trays to the detection position P5 one by one by the first conveying device 400a, so as to realize batch automatic loading and transportation of wafers to be tested.

[0049] The second conveying device 400b is configured to controllably move along the first horizontal direction between the first shifting position P6 and the first unloading position P2, so that the second conveying device 400b can convey the OK product trays received from the first shifting position P6 to the first unloading position P2, and stack the OK product trays one by one in the second bin device 600b from bottom to top. Thus, by using the second conveying device 400b to stack and store the OK product trays one by one in the second bin device 600b, it is convenient for the operator to timely take out multiple OK product trays from the second bin device 600b, so as to perform a one-time manual unloading operation on the OK products.

[0050] The third conveying device 400c is configured to move controllably along the first horizontal direction between the second shifting position P7 and the second unloading position P3, so that the third conveying device 400c can convey the NG material tray received from the second shifting position P7 to the second unloading position P3, and stack the NG material trays one by one in the third silo device 600c from bottom to top; thereby, the operator can take out multiple NG material trays from the third silo device 600c in a timely manner and complete the manual unloading operation of NG products at one time.

[0051] At the same time, the third conveying device 400c is also configured to move controllably along the first horizontal direction between the second shifting position P7 and the second loading position P4, so as to facilitate the transfer of empty trays between the second shifting position P7 and the second loading position P4, so as to replenish the trays to the detection equipment or recover the trays in the detection equipment; for example, the operator can store the empty trays in the fourth silo device 600d in advance, and convey the empty trays to the second shifting position P7 by the third conveying device 400c, so as to replenish the trays to the detection equipment; for another example, the third conveying device 400c receives the empty trays at the second shifting position P7, and then conveys the empty trays to the second loading position P4 and stores them in the fourth silo device 600d, so as to realize the recovery of the empty trays.

[0052] See also Figure 2 , Figure 5 and Figure 6 Combined with Figure 3 and Figure 4 The detection device 200 is arranged on the upper side of the machine 100 in the vertical direction, and the detection device 200 is configured to move controllably in the detection area 100b, so as to detect the wafers to be tested in the loading tray when the detection device 200 moves to or stays at the detection position P5 (for example, by means of the movement coordination relationship between the detection device 200 and the first conveying device 400a, the wafers to be tested are detected one by one).

[0053] It should be noted that the detection device 200 can adopt different structures or functional configurations according to the detection items, detection requirements, types of the tested parts, etc. For example, the detection device 200 can include a detection camera to achieve imaging detection of the wafer surface. The detection device 200 is not described in detail here, that is, the specific structure and detection principle of the detection device 200 do not constitute a limitation on the detection equipment.

[0054] See also Figure 2 , Figure 5 , Figure 6 and Figure 8 Combined with Figure 3 and Figure 4 , the transfer device 300 is arranged on the upper side of the machine 100 in the vertical direction and is located in the detection area 100b; the transfer device 300 is arranged to move controllably between the detection position P5, the first transfer position P6 and the second transfer position P7 along the second horizontal direction, so that the transfer device 300 can transfer the tray between different functional positions or different functional devices; for example, after the detection device 200 completes the detection operation of all the wafers to be tested in the same loading tray, the loading tray can be taken out from the first conveying device 400a by the transfer device 300, and then transferred to the first transfer position P6; for another example, at the second transfer position P7, an empty tray is taken out from the third conveying device 400c or an NG tray is placed on the third conveying device 400c; for another example, at the first transfer position P6, an OK tray is transferred and placed on the second conveying device 400b.

[0055] It should be noted that since the transfer device 300 and the detection device 200 are arranged on the same side of the machine 100, motion interference may occur when the transfer device 300 and the detection device 200 move to the detection position P5 at the same time; in view of this, in some embodiments, the transfer device 300 and the detection device 200 can move to the detection position P5 alternatively to avoid motion interference between the two.

[0056] See also Figure 2 , Figure 5 , Figure 6 and Fig. 9 Combined with Figure 3 and Figure 4, the tray separating device 500a and the tray replenishing device 500b are arranged on the lower side of the machine 100 in the vertical direction and are located in the detection area 100b, and the sorting device 500c is arranged on the upper side of the machine 100 in the vertical direction and is located in the detection area 100b; wherein, the tray separating device 500a is arranged to be controllably moved along the first horizontal direction between the first shift position P6 and the third shift position P8, the tray replenishing device 500b is arranged to be controllably moved along the first horizontal direction between the second shift position P7 and the fourth shift position P9, and the sorting device 500c is arranged to be controllably moved along the second horizontal direction between the third shift position P8 and the fourth shift position P9.

[0057] The tray dividing device 500a is mainly used to transfer the loading tray, OK material tray, etc. between the first shifting position P6 and the third shifting position P8; for example, the transferring device 300 transfers the loading tray that has completed the inspection at the first shifting position P6 and places it on the tray dividing device 500a, and transfers the loading tray to the third shifting position P8 by the tray dividing device 500a; for another example, the tray dividing device 500a transfers the fully loaded OK material tray from the third shifting position P8 to the first shifting position P6, so that the OK material tray can be transferred and placed on the second conveying device 400b by the transferring device 300.

[0058] The replenishing tray device 500b is mainly used for transferring NG material trays, replenishing trays, etc. between the second shifting position P7 and the fourth shifting position P9; illustratively, the replenishing tray device 500b has an NG tray placement position and a replenishing tray placement position arranged side by side, and the empty tray transported by the third conveying device 400c can be transferred and placed on the NG tray placement position by the transferring device 300, so that the empty tray can be used as an NG material tray for loading NG products; or, the first loading tray that has completed the detection and removal of NG products and only has OK products left can be transferred from the tray dividing device 500a to the replenishing tray placement position by the transferring device 300, so that the loading tray can be used as a replenishing tray; or, the replenishing tray (i.e., the empty tray) after all the OK products have been taken away can be transferred from the replenishing tray device 500b to the third conveying device 400c by the transferring device 300.

[0059] The sorting device 500c is mainly used to transfer OK products and NG products between the third transfer position P8 and the fourth transfer position P9, so as to realize the automatic sorting of OK products and NG products according to the detection results of the detection device 200, such as taking NG products out of the loading tray and placing them in the NG material tray, and taking OK products out of the replenishing tray and placing them in the OK material tray.

[0060] The sorting device 500c can adopt different structures or functional configurations according to the type of the tested object, for example, the sorting device 500c can be constructed by combining a PPU module, a negative pressure suction nozzle, etc., so as to suck and release the wafer through the negative pressure suction nozzle to avoid damage to the wafer, and the PPU module can effectively improve the flexibility, accuracy and stability of the negative pressure suction nozzle or the sorting device. The sorting device 500c can also adopt other suitable structures, for example, the sorting device 500c includes a manipulator structure to achieve the sorting operation of the tested object by grabbing and releasing the tested object ( Fig. 9 The bold dashed line with double arrows in the middle represents the approximate direction in which the sorting device 500c moves with the tested objects.) All these will not be elaborated here.

[0061] It should be noted that, since the tray separating device 500a and the second conveying device 400b are arranged on the same side of the machine 100, and the moving positions of both include the first shift position P6, the tray separating device 500a and the second conveying device 400b may interfere with each other in movement at the first shift position P6; therefore, in some embodiments, the tray separating device 500a and the second conveying device 400b can selectively move to the first shift position P6; based on the same needs, the third conveying device 400c and the tray replenishing device 500b can selectively move to the second shift position P7.

[0062] Based on the structural architecture of the above-mentioned detection equipment, the coordination relationship between the functional devices, etc., in some embodiments, the detection equipment can roughly follow or adopt the following process steps to automatically complete the loading, detection, sorting, unloading and other processes of the wafer, which are described in detail below.

[0063] The general process of inspection, sorting, and unloading of OK products is as follows.

[0064] 1. Before the detection equipment starts working, the operator can stack multiple loading trays in the first silo device 600a, and stack an empty tray or multiple empty trays in the fourth silo device 600d, thereby completing the manual loading operation of the wafers to be tested and the empty trays.

[0065] 2. After manual loading is completed, the first conveying device 400a receives the loading tray located at the bottom of the first silo device 600a at the first loading position P1, and transports the loading tray to the detection position P5, so that the detection device 200 moved to the detection position P5 can detect all wafers in the loading tray (for example, detect one by one), so that the wafers in the loading tray can be divided into OK products with qualified detection results and NG products with unqualified detection results according to the detection information of the detection device 200.

[0066] 3. After the inspection operation is completed, the transfer device 300 moves to the inspection position P5, takes out the loading tray from the first conveying device 400a, and then moves to the first transfer position P6 with the loading tray to place the loading tray on the tray separation device 500a.

[0067] 4. The tray dividing device 500a transfers the loading tray from the first shifting position P6 to the third shifting position P8. The sorting device 500c takes out the NG products from the loading tray at the third shifting position P8 and places them in the NG material tray carried by the replenishing tray device 500b at the fourth shifting position P9. Then, the OK products are taken out from the replenishing tray carried by the replenishing tray device 500b, and the OK products are transferred to the third shifting position P8 and placed in the loading tray. Repeat this action to ensure that all the wafers in the loading tray are OK products, thereby completing the automatic sorting operation of the wafers.

[0068] 5. After the loading tray is filled with OK products, the loading tray is transferred to the second conveying device 400b at the first transfer position P6 by the transfer device 300 (it can be understood that the loading tray at this time is equivalent to the OK material tray), and then the OK material tray is transported to the first unloading position P2 by the second conveying device 400b and placed in the second silo device 600b, thereby completing the automatic unloading of OK products; repeat the above actions, and after the second silo device 600b has stacked and stored multiple OK material trays, the operator can take out the OK material tray from the second silo device 600b in a timely manner to complete the manual unloading operation of OK products.

[0069] Among them, the general process of NG product unloading is as follows.

[0070] 1. When the detection equipment starts working, the NG tray placement position of the tray replenishing device 500b is empty; the third conveying device 400c receives the empty tray located at the bottom of the fourth silo device 600d at the second loading position P4, and transports the empty tray to the second transfer position P7; then the empty tray is transferred from the third conveying device 400c to the NG tray placement position of the tray replenishing device 500b by the transfer device 300 (it can be understood that the empty tray at this time is equivalent to the NG material tray), thereby completing the tray replenishing operation at the NG tray placement position.

[0071] It should be noted that, since the tray-repairing device 500b and the third conveying device 400c are located at the same side of the machine 100, the third conveying device 400c and the tray-repairing device 500b can selectively move to the second transfer position P7 to avoid motion interference between the two.

[0072] 2. After the inspection operation is completed, the NG products in the loading tray are transferred and placed in the NG material tray by the sorting device 500c. After the NG material tray is full of NG products, the fully loaded NG material tray is transferred from the replenishing tray device 500b to the third conveying device 400c by the transferring device 300; then the fully loaded NG material tray is conveyed to the second unloading position P3 by the third conveying device 400c and placed in the third silo device 600c, thereby completing the automatic unloading of NG products.

[0073] 3. Repeat the above actions. After a plurality of NG material trays are stacked and stored in the third silo device 600c, the operator can take out the NG material trays from the third silo device 600c in a timely manner to complete the manual unloading operation of the NG products.

[0074] Among them, the general process of the OK product replenishment process is as follows.

[0075] 1. When the inspection equipment starts working, the replenishment tray placement position of the replenishment tray device 500b is vacant; after the inspection equipment completes the inspection of the wafers in the first loading tray and the sorting device 500c takes out all the NG products in the first loading tray, it means that all the remaining wafers in the first loading tray are OK products; at this time, the first loading tray is transferred to the replenishment tray placement position of the replenishment tray device 500b by the transfer device 300 (it can be understood that the loading tray at this time is equivalent to a replenishment tray placed on the replenishment tray device 500b), thereby completing the replenishment operation of the replenishment tray placement position.

[0076] 2. The inspection equipment continues to inspect the wafers in the next loading tray. After the sorting device 500c takes out the NG products in the loading tray, the sorting device 500c takes out the OK products in the replenishing tray and places them in the loading tray, so as to replenish the loading tray from which the NG products have been taken out with OK products. Subsequently, the loading tray filled with OK products (i.e., the OK tray) is transferred to the second conveying device 400b by the transferring device 300.

[0077] 3. When all the OK products in the replenishment tray are taken away, it will become an empty tray. At this time, the empty tray is transferred to the third conveying device 400c by the transfer device 300, and then the empty tray is transferred and stored in the fourth silo device 600d by the third conveying device 400c, thus completing the automatic recovery of the empty tray.

[0078] 4. Repeat the above steps to automatically refill the OK products during the inspection process.

[0079] Based on this, by arranging the relevant functional devices of the detection equipment in different areas, the detection device 200, the transfer device 300, the tray dividing device 500a, the sorting device 500c, the tray replenishing device 500b and the like involved in the detection and sorting processes are arranged in the detection area 100b away from the operators, and the material tray conveying and transferring operation is completed between the detection area 100b and the picking area 100a by the conveying device 400.

[0080] Firstly, relying on the coordination of relevant functional devices, the processes of batch loading, testing, sorting of OK and NG products, batch unloading of OK and NG products, etc. of the tested parts can be automatically completed. The operator only needs to add the tested parts to the testing equipment and remove the testing equipment for the products that have been tested and sorted in the picking area 100a on the side away from the testing area 100b in the first horizontal direction. This can not only effectively improve the testing efficiency, reduce manual intervention, and improve the accuracy of testing, but also does not require the cooperation of multiple people, which can effectively reduce the number of operators and reduce labor costs.

[0081] Secondly, by using the silo device 600 to pre-store the test pieces to be tested and to collect and store the test pieces that have been tested and sorted, it is convenient for operators to replenish batches of test pieces to the testing equipment at one time and complete the manual unloading operation of the test pieces at one time, which is beneficial to improving the working efficiency of the testing equipment and reducing the workload of the operators. At the same time, by arranging the relevant functional devices in upper and lower layers through the machine 100, it is also beneficial to enhance the overall structural compactness of the testing equipment.

[0082] Thirdly, by utilizing the cooperation between the third conveying device 400c and the third silo device 600c as well as the cooperation between the third conveying device 400c and the fourth silo device 600d, the unloading and storage of NG products as well as the replenishment and recycling of the trays can be realized, which can not only realize the full utilization of the third conveying device 400c, but also help to reduce the number of configurations of related functional devices.

[0083] In some embodiments, the tray dividing device 500a, the sorting device 500c, the tray replenishing device 500b, the fourth silo device 600d, etc. may also be omitted, so that the testing equipment can load, test, sort, classify, and unload the tested parts one by one.

[0084] Specifically, the silo device 600 can be configured to be a structure capable of accommodating the test pieces. The operator stacks a plurality of test pieces in the first silo device 600a in advance, and the test pieces are transported one by one to the inspection position P5 by the first conveying device 400a. After the inspection device 200 completes the inspection of the test pieces, the transfer device 300 transfers the test pieces with qualified inspection results to the second conveying device 400b, and transfers the test pieces with unqualified inspection results to the third conveying device 400c, thereby achieving Automatic sorting and classification of the test pieces; then, the test pieces with qualified test results are transported and stored in the second silo device 600b by the second conveying device 400b, and the test pieces with unqualified test results are transported and stored in the third silo device 600c; after a plurality of stacked test pieces are stored in the second silo device 600b and the third silo device 600c, the operator can manually unload the test pieces with qualified test results and the test pieces with unqualified test results in batches in a timely manner.

[0085] In other embodiments, the relevant functional devices of the detection equipment can also be arranged on the same side of the machine 100, such as the upper side of the machine 100, to form detection equipment of different structural forms. Part or all of the silo device 600 can also be omitted to reduce the structural complexity and configuration cost of the detection equipment, thereby relying on the operator to load and unload the test pieces or the material trays loaded with the test pieces one by one; all these will not be repeated here.

[0086] In one embodiment, see Figure 1 The detection equipment also includes a casing 110, and the machine platform 100 and various functional devices provided on the machine platform 100 are arranged inside the casing 110; wherein, the casing 110 has an operation window 110a, and the operation window 110a connects the picking area 100a with the outside of the casing 110. For example, the operation window 110a can be set through the casing wall of the casing 110 on the side facing the operator in the first horizontal direction.

[0087] Therefore, the main functional devices of the detection equipment can be encapsulated inside the detection equipment using the casing 110, so that the detection, sorting of OK products and NG products and other processes can be automatically completed inside the detection equipment, avoiding these automatic operation processes from being interfered with by the external environment or the operator; and the operator can complete the corresponding manual operation in the picking area 100a through the operation window 110a without opening the door panel of the equipment, etc., which makes the operation more convenient.

[0088] In one embodiment, see Figure 1 and Figure 2The machine 100 has multiple working areas, each of which is divided into a detection area 100b and a picking area 100a arranged side by side along the first horizontal direction, and each working area is arranged with a transfer device 300, a conveying device 400, a tray dividing device 500a, a sorting device 500c, a tray replenishing device 500b and a silo device 600, etc.; wherein, the detection device 200 is configured to be controllably movable within the detection areas 100b of different working areas, so that the detection device 200 can move to different detection positions P5, for example, the detection device 200 moves between the detection positions P5 of two adjacent detection areas 100b along the second horizontal direction.

[0089] For example, see Figure 2 The machine 100 has two operating areas. To facilitate the distinction of the structural layout of related functional devices, the two operating areas are defined as 1# operating area and 2# operating area respectively. Of course, the operating areas can also be set to three or more operating areas.

[0090] In this way, by setting up multiple work areas and multiple groups of functional devices, multi-station working conditions can be constructed in the detection equipment, so that operators can perform multi-station manual operations on the same detection equipment, effectively improving the detection efficiency and utilization rate of the detection equipment; at the same time, different work areas can share the same detection device 200 to detect the test pieces, so that during the interval time when the detection device 200 needs to stop detection for sorting the test pieces in one of the work areas, the test pieces in other work areas can be detected with the help of the detection device 200, thereby effectively improving the utilization rate of the detection device 200.

[0091] In one embodiment, see Figure 2 , Figure 5 and Figure 7 Combined with Figure 3 and Figure 4 The number of the first silo devices 600a and the second silo devices 600b are both set to be multiple, that is, the number of the first loading positions P1 and the first loading positions P2 are both set to be multiple, for example, two first loading positions P1 are arranged side by side along the first horizontal direction, and two second loading positions P2 are arranged side by side along the first horizontal direction; each first loading position P1 and the first loading position P2 is provided with a corresponding first silo device 600a and a second silo device 600b.

[0092] Therefore, by setting up multiple first silo devices 600a, a larger number of loading trays (or test pieces) can be replenished and stored in the testing equipment at one time, while by using multiple second silo devices 600b, a larger number of OK material trays (or test pieces with qualified test results) can be recovered and stored, thereby effectively reducing the number of times that operators manually load and unload the test pieces and reducing the operator's work intensity.

[0093] In some embodiments, the number of the third silo device 600c and the corresponding second material discharge position P3 can also be set to multiple, so as to recover and store a larger number of NG material trays; it will not be elaborated here.

[0094] In one embodiment, see Figure 2 , Figure 5 , Figure 6 and Fig. 9 The detection device further includes a plurality of positioning devices, including a first positioning device 500d and a second positioning device 500e; wherein the first positioning device 500d is disposed on the upper side of the machine table 100 in the vertical direction and is located in the space between the first transfer position P6 and the third transfer position P8, and is mainly used to obtain the position information of the tested parts on the tray separation device 500a (for example, the position of NG products on the upper tray) during the process of the tray separation device 500a transferring the loading tray from the first transfer position P6 to the third transfer position P8. The second positioning device 500e is arranged on the upper side of the machine 100 in the vertical direction and is located in the space between the second shift position P7 and the fourth shift position P9. It is mainly used to obtain the position information of the measured part on the replenishing device 500b (for example, the coordinate information of the OK material in the replenishing tray, the coordinate information of the vacant position in the NG material tray, etc.) during the process of the replenishing device 500b transferring the replenishing tray or the NG material tray from the second shift position P7 to the fourth shift position P9.

[0095] By associating the first positioning device 500d, the tray dividing device 500a and the sorting device 500c (for example, information association), not only can the tray dividing device 500a adjust the relative position of the loading tray and the sorting device 500a at the third shift position P7 in response to the position information obtained by the first positioning device 500d (for example, so that the NG products to be taken out are relative to the negative pressure suction nozzle of the sorting device 500a), but the tray dividing device 500c can also accurately take out NG products from the loading tray in response to the position information obtained by the first positioning device 500d.

[0096] Based on the same principle, the replenishing tray device 500b can adjust the relative position of the NG material tray (or replenishing tray) and the sorting device 500a at the fourth shift position P9 in response to the position information obtained by the second positioning device 500e, and the sorting device 500c can accurately place NG products in the NG material tray or accurately take out OK products from the replenishing tray in response to the position information obtained by the second positioning device 500e.

[0097] Therefore, the first positioning device 500d and the second positioning device 500e can provide support for the detection equipment to accurately sort and classify OK products and NG products.

[0098] In some embodiments, the first positioning device 500d and the second positioning device 500e may include positioning cameras to obtain the position information of the measured object by taking photos or videos.

[0099] In some embodiments, the positioning device may be omitted, and related components that play a positioning role may be set on the sorting device 500c. By giving the sorting device 500c more freedom of movement, accurate sorting of OK products and NG products can be achieved.

[0100] In one embodiment, see Figure 6 , Figures 13 to 16 The disc separation device 500a and the disc replenishment device 500b both include a first translation module 510 and a disc carrier assembly 520; wherein, the first translation module 510 may include a linear motor or a linear drive device using a cylinder, a motor, etc. as a power source, the body of the first translation module 510 is arranged on the machine 100, and the power end of the first translation module 510 is coupled to the disc carrier assembly 520, which is mainly used to drive the disc carrier assembly 520 to move linearly along a first horizontal direction (for example, linearly move between the first shift position P6 and the third shift position P8, or linearly move between the second shift position P7 and the fourth shift position P9).

[0101] The tray carrier assembly 520 is mainly used for carrying trays (such as loading trays, NG trays, OK trays, replenishing trays, etc.), and the tray carrier assembly 520 has one or more tray placement areas, and the tray placement areas are provided with multi-layer tray grooves 520a whose outline dimensions decrease layer by layer from top to bottom in the vertical direction, that is, the outline dimensions of the multi-layer tray grooves 520a decrease layer by layer from shallow to deep in the vertical direction; in this way, by utilizing the difference in outline dimensions of the tray grooves 520a, the tray carrier assembly 520 can carry and accommodate trays of different sizes, so that the tray dividing device 500a and the tray replenishing device 500b can be compatible with products of different specifications, enriching the application scenarios of the detection equipment.

[0102] It can be understood that each layer of the tray slot 520a is equivalent to a tray placement position; for example, the tray loading assembly 520 of the tray dividing device 500a has a tray placement area, and each layer of the tray slot 520a in the tray placement area is equivalent to a loading tray or an OK tray placement position; for another example, the tray replenishing device 500a has two tray placement areas arranged side by side, and each layer of the tray slot 520a in one tray placement area is equivalent to an NG tray placement position, and each layer of the tray slot 520a in the other tray placement area is equivalent to a replenishing tray placement position.

[0103] In one embodiment, see Figures 14 to 17The tray assembly 520 includes a positioning module 521, a support tray 522 and a carrying tray 523; wherein the carrying tray 523 is stacked on one side of the support tray 522 in the vertical direction (for example, the upper side of the support tray 522), and the tray slot 520a is arranged on the side of the carrying tray 530 away from the support tray 522; at the same time, the carrying tray 523 is also provided with a reference avoidance opening 520b, a positioning avoidance opening 520c and a plurality of matching avoidance openings 520d, the reference avoidance opening 520b and the matching avoidance opening 520d are arranged on two opposite sides of the tray slot 520a in the horizontal direction, and the plurality of matching avoidance openings 520d are connected with the multi-layer tray slots 520a in a one-to-one correspondence.

[0104] Understandably, see Fig.16 The matching avoidance opening 520d is connected and arranged on the side of the corresponding material tray groove 520a, and based on the structural relationship of the multi-layer material tray groove 520a, the multiple matching avoidance openings 520d are arranged from outside to inside in the horizontal direction relative to the geometric center of the supporting plate 530.

[0105] The reference avoidance opening 520b and the positioning avoidance opening 520c are respectively arranged to penetrate the carrier plate 523 in the vertical direction, and the reference avoidance opening 520b and the positioning avoidance opening 520c are respectively connected to the multi-layer material tray slot 520a. Exemplarily, the positioning avoidance opening 520c is arranged to penetrate the carrier plate 523 in the vertical direction at the corner of the material tray slot 520a, and the positioning avoidance opening 520c can be a strip opening structure with a certain length in the horizontal direction.

[0106] The power end of the first translation module 510 is coupled to the support plate 522, the main body of the positioning module 521 is fixed to the support plate 522, and the power end of the positioning module 521 is arranged to penetrate the positioning avoidance opening 520c in the vertical direction; the positioning module 521 can adopt a linear drive structure with a cylinder, a motor, etc. as the power source as needed.

[0107] Thus, by arranging the reference avoidance opening 520b and the matching avoidance opening 520d on opposite sides of the tray slot 520a, the tray slot 520a can avoid the clamping claw structure of the transfer device 300, so as to clamp or release the tray; for example, the transfer device 300 has two clamping claws that can move closer to or farther away from each other. When the transfer device 300 transfers the tray to the tray assembly 520, one clamping claw of the transfer device 300 can be inserted into the reference avoidance opening 520b, and the other clamping claw can be inserted into the matching avoidance opening 520d, and then the two clamping claws are driven away from each other, so that the tray can be placed in a corresponding tray slot 520a. Conversely, when clamping the tray carried by the tray assembly 520, the two clamping claws are driven closer to each other to finally take the tray out of the tray slot 520a.

[0108] It should be noted that when the transfer device 300 releases the tray, based on the contour size relationship between the tray slot 520a and the tray, the tray can be adaptively received and stored in the tray slot 520a of the corresponding size.

[0109] Correspondingly, the positioning module 521 can lock the tray in the corresponding tray slot 520a (or unlock the tray), so that after the tray is locked in the tray slot 520a, the tray separation device 500a or the tray replenishment assembly 500b can stably transport and transfer the tray.

[0110] Specifically, when the transfer device 300 places the material tray in the corresponding material tray slot 520a, the power end of the positioning module 521 can move along the positioning avoidance opening 520c toward the geometric center of the material tray slot 520a (or the supporting tray 523), thereby positioning the material tray or locking it in the material tray slot 520a by supporting the material tray; conversely, when the power end of the positioning module 521 moves along the positioning avoidance opening 520c away from the geometric center of the material tray slot 520a, the material tray is unlocked so that the material tray can be taken out later by the transfer device 300.

[0111] For other embodiments, see Fig.18 , the carrier assembly 520 can also omit the positioning module 521 or omit the positioning module 521 and the supporting plate 522. Correspondingly, the supporting plate 523 can omit the matching avoidance opening 520d and the positioning avoidance opening 520c; at this time, the reference avoidance opening 520b is set on the two opposite sides of the supporting plate 523 in a horizontal direction (for example, the first horizontal direction), and the supporting plate 523 is directly assembled or coupled to the power end of the first translation module 510; in this way, through the matching relationship between the outline dimensions of the tray slot 520a and the corresponding tray, the tray can also be relatively stably accommodated and placed in the corresponding tray slot 520a; and the two clamps of the transfer device 300 can be avoided by the reference avoidance opening 520b, so as to provide support for the transfer device 300 to clamp and release the tray.

[0112] In one embodiment, see Fig.17 The positioning module 521 includes a linear driving member 521a, a positioning push member 521b and an elastic return member 521c; wherein the linear driving member 521a may include a cylinder, the body of the linear driving member 521a is arranged on the support plate 522, the power end of the linear driving member 521a is coupled to the positioning push member 521b, and the positioning push member 521b is arranged to penetrate the positioning avoidance opening 520c in the vertical direction; the elastic return member 521c may be a spring or other elastic member, the elastic return member 521c is arranged on the side of the positioning push member 521b away from the linear driving member 521a, and the positioning push member 521b is located on the side closer to the geometric center of the tray slot 520a than the elastic return member 521c.

[0113] Therefore, when the linear driving member 521a drives the positioning and pushing member 521b to move along the positioning avoidance opening 520c away from the center of the material tray slot 520a, the positioning and pushing member 521b can be separated from the material tray to automatically unlock the material tray (at this time, the elastic return member 521c can store elastic potential energy due to compression and contraction); when the linear driving member 521a drives the positioning and pushing member 521b to move along the positioning avoidance opening 520c close to the center of the material tray slot 520a, so that the positioning and pushing member 521b pushes against the material tray and locks the material tray, the elastic return member 521c releases the elastic potential energy and provides the positioning and pushing member 521b with an elastic pre-tightening force that causes it to move close to the geometric center of the material tray slot 520a, thereby enabling the positioning and pushing member 521b to firmly lock the material tray in the material tray slot 520a.

[0114] Of course, by configuring the structure and function of the linear drive component 521a, it is also possible to rely solely on the linear drive component 521a to drive the positioning push component 521b to unlock the material tray, and rely on the elastic effect generated by the elastic reset component 521c to prompt the positioning push component 521b to resist the material tray, thereby utilizing the elastic resistance relationship between the positioning push component 521b and the material tray to form a positioning lock for the material tray.

[0115] In other embodiments, the positioning module 521 may also omit the elastic return member 521c, and use the linear drive member 521a to drive the material tray to move closer to and away from the material tray to form a positioning lock or unlocking of the material tray.

[0116] In one embodiment, see Fig.15 The support plate 522 is provided with a first positioning structure 522a, and the carrying plate 523 is provided with a second positioning structure 523a; wherein, the first positioning structure 522a may include a plurality of protruding structures provided on the surface of the support plate 522 facing the carrying plate 523, and the plurality of protruding structures are arranged at the edge of the support plate 522 around the material tray placement area; the second positioning structure 523a may include a plurality of sleeve hole structures provided along the vertical direction through the carrying plate 523, and the sleeve hole structures correspond one-to-one to the protruding structures (for example, the sleeve hole structure may be a circular sleeve or a waist-shaped sleeve that matches the shape of the protruding structure).

[0117] Therefore, by utilizing the structural relationship in which the second positioning structure 522a can be inserted into the corresponding second positioning structure 523a or the detachable matching relationship between the two, the carrier plate 523 can be restricted and fixed on the support plate 522. Not only can the carrier plate assembly 520 be assembled conveniently and quickly, but the carrier plate 523 can also be disassembled and replaced as needed, so as to provide support for the plate dividing device 500a and the plate replenishing device 500b to carry material plates or test pieces of more sizes.

[0118] Of course, the first positioning structure 522a and the second positioning structure 523b can also be swapped, that is, the first positioning structure 522a is disposed on the carrier plate 523, and the second positioning structure 523b is disposed on the support plate 522; no further details are given here.

[0119] In one embodiment, see Figure 6 and Fig.13 The disk-dividing device 500a and the disk-replenishing device 500b further include a second translation module 530, which is coupled between the disk-carrying assembly 520 and the power end of the first translation module 510 and is mainly used to drive the disk-carrying assembly 520 to move linearly along the second horizontal direction relative to the first translation module 510. The second translation module 523 can be configured with reference to the first translation module 523.

[0120] Taking the tray separation device 500a configured with the second translation module 530 as an example, the second translation module 530 can drive the carrier assembly 520 to move to or stay at a position deviating from the first shift position P6, so as to avoid the second conveying device 400b, so that the second conveying device 400b can receive the material tray or the measured parts at the first shift position P6; at the same time, by utilizing the cooperation of the first translation module 510 and the second translation module 530, it is possible to respond to the position information obtained by the first positioning device 500d, so as to adjust the position of the carrier assembly 520 relative to the sorting device 500c in two dimensions within the horizontal plane, thereby realizing the adjustment of the coordinate position of the measured parts in the material tray, so that the sorting device 500c can accurately absorb NG products in the material tray or place OK products in the material tray.

[0121] In one embodiment, see Figure 2 , Figure 5 , Figure 7 and Fig.12 Combined with Figure 3 and Figure 4 The testing device further includes a flipping device 700, which is arranged on the upper side of the machine 100 in the vertical direction and is located in the picking area 100a. Correspondingly, the multiple functional positions also include a flipping position P10 located in the testing area 100b. The flipping position P10 and the testing position P5 are arranged side by side along the second horizontal direction. For example, the flipping position P10 is located between the testing position P5 and the first transfer position P6. The flipping device 700 is configured to controllably move from the picking area 100a to the flipping position P10 along the first horizontal direction, so as to cooperate with the transfer device 300 to flip the tested piece 180 degrees at the flipping position P10, so as to provide support for the testing device 200 to perform double-sided testing on the tested piece.

[0122] For example, when the detection device 200 completes the front detection operation on the test piece, the transfer device 300 takes the test piece out of the first conveying device 400a at the detection position P5, and then transfers the test piece to the flipping position P10 and places it on the flipping device 700; after the flipping device 700 flips the test piece 180 degrees, the transfer device 300 transfers the flipped test piece to the detection position P5 and places it on the first conveying device 400a, and then the detection device 200 can detect the back side of the test piece, thereby realizing a comprehensive detection of the test piece to ensure the accuracy of the detection result, and then accurately sorting OK products and NG products.

[0123] For some examples, see Fig.12 The flipping device 700 includes a first opening and closing module group 710, a rotation drive module group 720, a third translation module group 730 and two first clamping jaws 740 arranged opposite to each other; wherein, the first opening and closing module group 710 can be a driving structure constructed by a combination of a cylinder and related supporting components (hereinafter referred to as a cylinder driving structure), or a linear motor or a driving structure constructed by a combination of a motor, a linkage mechanism, etc. (hereinafter referred to as a motor driving structure). The power end of the first opening and closing module group 710 is coupled to the first clamping jaw 740, which is mainly used to drive the two first clamping jaws 740 to approach and move away from each other (for example, approach or move away from each other in the vertical direction), so as to clamp the measured object or the material tray from the opposite sides of the measured object or the material tray in the vertical direction when the two first clamping jaws 740 approach each other, or release the measured object or the material tray when the two first clamping jaws 740 move away from each other.

[0124] The power end of the rotary drive module 720 is coupled to the main body of the first opening and closing module 710, and is mainly used to drive the first opening and closing module 710 to drive the two first clamps 740 to rotate in a period of 180 degrees, thereby realizing the flipping of the test piece or the material tray; the rotary drive module 720 may include a rotary cylinder and related components, and may also include a motor and related components, which will not be elaborated here.

[0125] The third translation module 730 can refer to the first translation module 510 and adopt a suitable linear drive device, such as a linear motor or a linear drive device with a cylinder or a motor as a power source. The body of the third translation module 730 is arranged on the machine 100 (for example, fixed in the picking area 100a), and the power end of the third translation module 730 is coupled to the body of the rotation drive module 720; the third translation module 730 can drive the rotation drive module 720 to drive the first opening and closing module 710 and the first clamp 740 to move linearly along the first horizontal direction, so that the first clamp 740 can move along the first horizontal direction to the flip position P10 or move out of the flip position P10.

[0126] In one embodiment, see Figure 8 and Fig.12 The transfer device 300 includes a second opening and closing module group 310, a fourth translation module group 320, a first lifting module group 330 and two second clamping jaws 340 arranged opposite to each other; wherein, the second opening and closing module group 310 adopts a cylinder drive structure or a motor drive structure with reference to the first opening and closing module group 310, and the power end of the second opening and closing module group 310 is coupled to the second clamping jaws 340, which is mainly used to drive the two second clamping jaws 340 to approach and move away from each other (for example, approach or move away from each other in the horizontal direction), so as to clamp the measured object from the opposite sides of the measured object or the material tray in the horizontal direction when the two second clamping jaws 340 approach each other, or release the measured object or the material tray when the two second clamping jaws 340 move away from each other.

[0127] The power end of the first lifting module 330 is coupled to the body of the second opening and closing module 310, and is mainly used to drive the second opening and closing module 310 to drive the two second clamping jaws 340 to move linearly in the vertical direction, so that the two second clamping jaws 340 can approach and move away from the corresponding functional device in the same functional position in the vertical direction. For example, when the detection position P5 moves downward and approaches the first conveying device 400a, it can clamp the tested part or the loading tray carried by the third conveying device 400a. The first lifting module 330 can use a linear drive device with a cylinder or a motor as the power source, which will not be described in detail here.

[0128] The body of the fourth translation module 320 is arranged on the machine 100, and the power end of the fourth translation module 320 is coupled to the body of the first lifting module 330. The fourth translation module 320 can drive the first lifting module 330 to drive the second opening and closing module 310 and the second clamping jaw 340 to move linearly along the second horizontal direction, so that the transfer device 300 can move between the detection position P5, the first transfer position P6 and the second transfer position P7 to realize the transfer of the tested part or the tray.

[0129] In another embodiment, for some test pieces that do not rely on a tray, the second clamp 340 can be replaced by a negative pressure suction nozzle so that the transfer device 300 can absorb and release the test piece by negative pressure adsorption, thereby achieving the transfer of the test piece, which will not be elaborated here.

[0130] In one embodiment, see Figure 8The fourth translation module 320 adopts a multi-mover linear motor structure arranged along the second horizontal direction across the detection position P5, the first transfer position P6 and the second transfer position P7. The main body of the first lifting module 330 can be coupled with one mover of the linear motor, and the detection device 200 is coupled with the other mover of the linear motor; in this way, the detection device 200 and the transfer device 300 share the fourth translation module 320, which can not only integrate the detection device 200 and the transfer device 300 in structure, which is beneficial to simplify the structure of the detection equipment or the configuration number of functional devices, but also ensure that the two can move to the corresponding functional positions and avoid motion interference between the two at the detection position P5.

[0131] It can be understood that in the embodiment in which the detection equipment is configured with multiple working areas, the fourth translation module 320 is arranged along the second horizontal direction across multiple detection areas 100b, and the main body of the first lifting module 330 of the transfer device 300 in different working areas can be coupled and connected with the movers of the multi-motor linear motor respectively, so that the fourth translation module 320 can be more fully utilized and support can be provided for the detection device 200 to move between the detection positions P5 in different working areas.

[0132] In other embodiments, the fourth translation module 320 may also adopt other suitable linear driving devices, or the detection device 200 may be configured with a linear driving device independent of the transfer device 300 ; all of these will not be elaborated herein.

[0133] Based on the cooperation between the flipping device 700 and the transfer device 300, in some embodiments, please refer to Figure 8 , Fig.12 Combined with Figure 3 and Figure 4 The inspection equipment can generally follow or adopt the following process steps to automatically complete the double-sided inspection operation of the test piece (such as wafer). However, it should be pointed out that other process steps in the double-sided inspection operation (such as automatic loading of wafers to be tested, automatic sorting of NG products and OK products, automatic unloading of NG products and OK products, replenishment of OK products, etc.) can all refer to the single-sided inspection operation in the aforementioned embodiment. The following mainly introduces the process related to the flipping process.

[0134] 1. After completing the single-sided inspection (for example, front-side inspection) of all wafers on the loading tray, the third conveying device 400c conveys an empty tray to the second transfer position P7, and the transfer device 300 transfers the empty tray to the inspection position P5 (for example, by grabbing the empty tray with the help of the second clamp 340), and covers and snaps the empty tray onto the loading tray so that the wafers that have completed the front-side inspection are located between the empty tray and the loading tray; then the transfer device grabs the snapped empty tray and the loading tray and transfers them to the flipping position P10.

[0135] 2. The first clamp 740 of the flipping device 700 moves to the flipping position P10, and clamps the engaged empty tray and the loading tray from the transfer device 300, so that the two and the wafers between them are separated from the transfer device 300; then the engaged empty tray and the loading tray are flipped 180 degrees, so that all the wafers in the loading tray are transferred to the empty tray, thereby realizing the flipping of the front and back sides of the wafers.

[0136] 3. After the flipping is completed, the transfer device 300 can transfer the engaged loading tray and the empty tray to the tray separation device 500a located at the first transfer position P6, and then take away the original loading tray (for example, placed on the third conveying device 400c and finally stored in the fourth silo device 600d), and the detection device 200 can be controllably moved to the first transfer position P6 to detect the back side of the wafer; or the transfer device 300 can transfer the engaged loading tray and the empty tray to the first conveying device 400a located at the detection position P5, and then take away the original loading tray, and then the detection device 200 can be controllably moved to the detection position P5 to detect the back side of the wafer.

[0137] 4. After the double-sided inspection is completed, the sorting process of OK products and NG products is carried out.

[0138] It can be understood that in an embodiment in which functional devices such as the tray dividing device 500a, the sorting device 500c and the tray replenishing device 500b are omitted, when the tested piece is judged to be unqualified after single-sided inspection, the tested piece can be directly transferred to the third conveying device 400c by the transfer device 300 for automatic unloading of NG products, without the need for double-sided inspection, which is beneficial to shorten the inspection cycle and improve the inspection efficiency.

[0139] In one embodiment, see Figure 7 , Fig.10 and Fig.11 The conveying device 400 (for example, one or more of the first conveying device 400a, the second conveying device 400b and the third conveying device 400c) includes a fifth translation module 410 and a lifting component 420; wherein, the fifth translation module 410 can refer to the first translation module 510 to adopt a suitable linear drive device, and the main body of the fifth translation module 410 is arranged on the machine 100, and the power end is coupled to the lifting component 420, which is mainly used to drive the lifting component 420 to move linearly along the first horizontal direction, so that the lifting component 420 can transport the supporting tray or the tested piece to the corresponding functional position (for example, transport the loading tray from the first loading position P1 to the detection position P5).

[0140] The lifting component 420 is configured to be controllably movable in a straight line along the vertical direction, so that when the lifting component 420 approaches the corresponding silo device 600, it can receive the material tray or the test piece at the bottom of the silo device 600, or push the material tray or the test piece it carries into the corresponding silo device 600; for example, when the lifting component 420 of the first conveying device 400a moves linearly toward the first silo device 600a at the first loading position P1, it can receive the loading material tray at the bottom of the first silo device 600a, and finally realize automatic loading of the wafer to be tested; for example, when the lifting component 420 of the second conveying device 400b moves toward the second silo device 600b at the first unloading position P2, it can push the OK material tray it carries into the second silo device 600b, thereby realizing automatic unloading and storage of OK products.

[0141] In some embodiments where the silo device 600 is omitted, the lifting assembly 420 can be configured to controllably move in a straight line along the vertical direction, and the lifting assembly 420 can also be a tray structure coupled to the power end of the fifth translation module 410; in this way, the operator can directly place the test piece or the material tray on the lifting assembly 420 to realize the manual loading operation of the test piece; or the operator can take the test piece, the material tray, etc. out of the lifting assembly 420 to realize the manual unloading operation of the test piece.

[0142] In one embodiment, see Fig.11 The lifting assembly 420 includes a second lifting module 421, a third opening and closing module 422, a loading platform 423 and two third clamps 424 arranged opposite to each other in the horizontal direction; wherein, the power end of the fifth translation module 410 is coupled to the loading platform 423, the two third clamps 424 are arranged to penetrate the loading platform 423 in the vertical direction, the power end of the third opening and closing module 422 is coupled to the two third clamps 424, the body of the third opening and closing module 422 is coupled to the power end of the second lifting module 421, and the body of the second lifting module 421 is set on the loading platform 423.

[0143] Thus, the fifth translation module 410 can drive the loading platform 423 to drive the second lifting module 421, the third opening and closing module 422 and the third clamping jaw 424 to move linearly along the first horizontal direction, so that the lifting component 420 can move between different functional positions; the second lifting module 421 can drive the third opening and closing module 422 to drive the two third clamping jaws 424 to move linearly up and down in the vertical direction relative to the loading platform 423, so that the two third clamping jaws 424 can approach and move away from the corresponding silo device in the vertical direction; and the third opening and closing module 422 can drive the two third clamping jaws 424 to approach or move away from each other, so as to clamp or release the material tray (or the measured object).

[0144] Taking the first conveying device 400a as an example, when the fifth translation module 410 drives the lifting component 420 to move to the first loading position P1, the second lifting module 421 drives the two third clamps 424 to move upward relative to the loading platform 423, so that the two third clamps 424 can be located on both sides of the loading tray at the bottom of the first silo device 600a (i.e., the two opposite sides in the horizontal direction); then the third opening and closing module 422 drives the two third clamps 424 to approach each other, so as to realize the grabbing operation of the loading tray; after the third clamps 424 grab the loading tray, the second lifting module 421 drives the two third clamps 424 to move downward until the loading tray falls on the loading tray, and the fifth translation module 410 drives the lifting component 420 to carry the loading tray to the detection position P5, thereby completing the automatic loading operation of the wafer to be tested.

[0145] In specific implementation, before the transfer device 300 takes out the loading tray, the third opening and closing module 422 can drive the two third clamping claws 424 to move away from each other, thereby releasing the loading tray on the loading platform 423, so that the transfer device 300 can take out the loading tray; in this way, when the first conveying device 400a conveys the loading tray, the two third clamping claws 424 are used to clamp the loading tray, which can prevent the loading tray from being separated from the lifting component 420 due to mechanical vibration. Of course, based on actual needs, when the third clamping claws 424 transfer the loading tray to the loading platform 423, the third opening and closing module 422 can also be used to prompt the two third clamping claws 424 to directly release the loading tray on the loading platform 423.

[0146] For some examples, see Fig.11 The stage 423 includes a first layer plate 432a, a second layer plate 423b, a third layer plate 423c and a plurality of connecting columns 423d; wherein the first layer plate 432a, the second layer plate 423b and the third layer plate 423c are arranged in a vertical direction from top to bottom, and the connecting column 423d is connected between two adjacent layers.

[0147] The second lifting module 421 includes a first motor 421a, a first screw rod 421b and a plurality of guide columns 421c; wherein, the first motor 421a is fixedly arranged between the second layer plate 423b and the third layer plate 423c, the first screw rod 421b passes through and is screwed to the second layer plate 423b, and the bottom end of the first screw rod 421b is connected to the power end of the first motor 421a, and the top end of the first screw rod 421b is rotatably connected to the main body of the third opening and closing module 422; and the guide column 421c slides through the second layer plate 423b and the top end of the guide column 421c is connected to the main body of the third opening and closing module 422.

[0148] The third opening and closing module 422 includes a second motor 422a, a second screw rod 422b, a synchronous belt 422c, a linear module 422d and a support seat 422e; wherein the support seat 422e is arranged between the second layer plate 423b and the first layer plate 423a, the top end of the first screw rod 421b is rotatably connected to the support seat 422e, the top end of the guide column 421c is fixed to the support seat 422e, the second motor 422a and the linear module 422d are both arranged on the support seat 422e, the second screw rod 422b adopts a two-stage screw rod structure with opposite thread directions, and the second screw rod 422b is rotatably mounted on the support seat 422e. The power end of the second motor 422a is connected to the second screw rod 422b through a synchronous belt 422c.

[0149] As for the third clamping jaw 424, the third clamping jaw 424 is arranged to penetrate the first layer plate 423a, the bottom end of the third clamping jaw 424 is connected to the linear module 422d, and the bottom ends of the two third clamping jaws 424 are respectively connected to the two sections of the threaded structure of the second screw rod 422b.

[0150] Therefore, by utilizing the screw transmission structure of the second lifting module 421, the third opening and closing module 422 can be more accurately driven to drive the two third clamping jaws 424 to move up and down relative to the first layer plate 423a, and by utilizing the screw transmission structure of the third opening and closing module 422, the two third clamping jaws 424 can be more accurately driven to move closer to or away from each other.

[0151] In other embodiments, the loading platform 421, the second lifting module 421, the third opening and closing module 422, etc. may also adopt other suitable structures, which will not be elaborated here.

[0152] In one embodiment, see Figure 5 , Figure 7 , Fig.19 and Fig. 20 A material port structure is provided at the first loading position P1, the first unloading position P2, the third unloading position P3 and the fourth unloading position P4. The material port structure is arranged to pass through the machine 100 in the vertical direction, and is mainly used to cooperate with the corresponding conveying device 400 and the silo device 600 to automatically load and unload the material tray or the measured part; wherein the silo device 600 includes a plurality of limit components, and the plurality of limit components are arranged at intervals around the corresponding material port structure. For example, the contour shape of the material port structure is set to a rectangle, and the limit components are set at the corners of the material port structure.

[0153] The limit assembly includes a limit member 610 and a first adjusting member 620; wherein the limit member 610 extends in the vertical direction and is arranged on the upper side of the machine 100, and is located at the corner of the corresponding material port structure, so that the limit members 610 of multiple limit assemblies together form a silo space; the end of the limit member 610 close to the machine 100 in the vertical direction (i.e.: the bottom end of the limit member 610) is connected to the machine 100 through the first adjusting member 620.

[0154] The first adjusting member 620 can be used to drive the stopper 610 to move toward or away from the geometric center of the material port structure in the horizontal direction, thereby adjusting the size of the silo space so that the silo device 600 can accommodate and store material trays or test pieces of corresponding specifications and sizes. At the same time, by utilizing the characteristic that the stopper 610 has a preset height in the vertical direction, the height dimension of the silo space in the vertical direction can be increased to provide support for stacking material trays or test pieces in the silo space.

[0155] In a specific implementation, the first adjusting member 620 may include a linear module 621 and a positioning lock 622; wherein the linear module 621 is arranged between the limit member 610 and the machine platform 100, and the positioning lock 622 is arranged on the linear module 621 in a form that it can move synchronously with the limit member 610; thereby, the linear module 621 can be used to drive the limit member 610 to move toward or away from the material port structure in a horizontal direction to adjust the relative position of the limit member 610 relative to the material port structure or between multiple limit members 610; and the positioning lock 622 can be used to lock the position of the limit member 610 by abutting against the machine platform 100, so that the size of the adjusted silo space remains stable.

[0156] Exemplarily, a plurality of lock hole structures 100e can be provided on the machine 100, and the plurality of lock hole structures 100e are arranged at intervals along the moving direction of the linear module 621 or the limit member 610, and the positioning lock member 622 can be inserted into a corresponding lock hole structure 100e, thereby forming a gear adjustment effect on the size of the silo space.

[0157] Based on this, a corresponding material bin space for storing material trays can be formed on the upper side of the machine 100 by using a plurality of position limiting components, and the conveying device 400 can receive the material tray at the bottom of the material bin space through the corresponding material opening structure, or push the carried material tray into the material bin space through the corresponding material opening structure. At the same time, by arranging a plurality of position limiting components around the corresponding material opening structure in intervals, it also provides an operating space for the operator to conveniently and quickly store or take out the stacked material trays (or the tested parts) in or out of the material bin device 600.

[0158] In one embodiment, see Fig. 20The silo device 600 (for example, the second silo device 600b and the third silo device 600c) also includes a plurality of stoppers 630, and the plurality of stoppers 630 are arranged one-to-one corresponding to the plurality of limit assemblies in the silo device 600 to cooperate with the corresponding conveying device 400 to realize automatic unloading and collection and storage of the material tray or the measured parts; specifically, for the convenience of distinction and description, the material port structure located at the first unloading position P2 and the second unloading position P3 is defined as the unloading port structure 100c.

[0159] Among them, the stopper 630 is rotatably arranged at the bottom end of the corresponding limit member 610 or the side of the first adjustment member 620 close to the discharge port structure 100c, and the stopper 630 is located within the contour range of the discharge port structure 100c; the stopper 630 is configured to be able to flip upward due to the resistance and push of the material tray or the measured object, so that the material tray or the measured object can enter the silo space through the discharge port structure 100c; at the same time, the stopper 630 can also flip downward due to its own gravity or the resistance and push of the material tray in the silo space, so as to support the material tray or the measured object located at the bottom of the silo space.

[0160] The following uses the cooperation of the second conveying device 400b and the second silo device 600b to realize the automatic unloading and storage operation of OK products as an example to explain the operating principle of the silo device 600 equipped with the stopper 630.

[0161] 1. After the second conveying device 400b conveys the OK material tray to the first unloading position P2, the lifting component 420 carries the OK material tray to move upward. In the process of the OK material tray entering the silo space through the unloading port structure 100c, the OK material tray or the lifting component 420 pushes the stopper 630 to flip upward until the OK material tray is located above the stopper 630. Then, the stopper 630 will separate from the OK material tray and flip downward due to gravity and return to a horizontal state.

[0162] 2. Then, the lifting component 420 carries the OK material tray and moves downward until the OK material tray contacts the stopper 630. The OK material tray is blocked by the stopper 630 and is separated from the lifting component 420. The stopper 630 supports the OK material tray in the material bin space. The lifting component 420 continues to move downward until the lifting component 420 moves to the lower side of the discharge port structure 100c, thereby completing the automatic discharge operation of the OK product.

[0163] 3. Repeat the above steps to stack multiple OK material trays one by one from bottom to top and store them in the second material bin device 600b, so that the operator can manually unload the stack of OK material trays in a timely manner.

[0164] In one embodiment, see Fig.19The silo device 600 also includes a plurality of tray assemblies, for example, two tray assemblies are arranged on opposite sides of the corresponding material port structure in the horizontal direction, and the limit assembly is arranged at the corner of the corresponding material port structure; the tray assemblies are configured to be controllably movable in the horizontal direction toward or away from the geometric center of the corresponding material port structure, so that the material tray or the test piece located at the bottom of the silo space can be separated from the silo space through the material port structure, thereby realizing automatic loading of the material tray or the test piece; or, in cooperation with the conveying device 400, the material trays or the test pieces are stacked one by one from bottom to top in the silo space, so as to realize automatic unloading and collection and storage of the material trays or the test pieces.

[0165] The following mainly takes the first silo device 600a equipped with a dividing plate assembly and a limiting assembly as an example to explain the specific structural structure and working principle of the dividing plate assembly; for the convenience of distinction and description, the material port structure located at the first loading position P1 is defined as the loading port structure 100d.

[0166] See also Fig.19 and Fig.21 The disc separation assembly includes a first translation driving member 640, a second translation driving member 650, a supporting member 660, a resisting member 670 and a second adjusting member 680; wherein, the power end of the first translation driving member 640 is coupled to the resisting member 670, the power end of the second translation driving member 650 is coupled to the resisting member supporting member 660, the body of the first translation driving member 640 is fixed above the second translation driving member 650 in the vertical direction, and the body of the second translation driving member 650 is connected to the machine 100 through the second adjusting member 680.

[0167] The first translation drive member 640 can be used to drive the supporting member 670 to move in the horizontal direction toward or away from the geometric center of the loading port structure 100d, so that when the supporting member 670 moves close to the loading port structure 100d, it can support the loading tray located in the silo space from the horizontal direction. For example, the supporting members 670 of the two tray assemblies can be used to clamp the entire stack of loading trays from opposite sides of the loading tray in the horizontal direction.

[0168] The second translation drive member 650 can be used to drive the supporting member 660 to move in the horizontal direction toward or away from the geometric center of the loading port structure 100d, so that when the supporting member 660 moves close to the loading port structure 100d, it can support the loading tray located at the bottom of the silo space in the vertical direction; thus, by switching the supporting member 670 and the supporting member 660 to move toward the loading port structure 100d, the entire stack of loading trays can be separated one by one from the silo space.

[0169] The second adjusting member 680 can drive the second translation driving member 650 to drive the first translation driving member 640, the supporting member 660 and the abutting member 670 to move in the horizontal direction close to or away from the geometric center of the loading port structure 100d, thereby adjusting the position of the entire scoring plate assembly on the machine 100, so that the scoring plate assembly can adapt to the size of the silo space surrounded by multiple limit assemblies.

[0170] In a specific implementation, the first translation drive member 640 and the second translation drive member 650 may include a power source such as a cylinder, and the second adjustment member 680 may be structurally configured with reference to the first adjustment member 620. For example, a plurality of lock hole structures 100e matching the second adjustment member 680 are arranged on the machine 100 to achieve gear adjustment of the split disk assembly.

[0171] Based on the structure and functional configuration of the tray separation assembly, the following process steps can be roughly followed or adopted in the process of automatically loading a whole stack of loading trays.

[0172] 1. The lifting assembly 420 of the first conveying device 400a moves upward at the first loading position P1. After the loading platform 423 and the third clamping jaw 424 enter the silo space through the loading port structure 100d, they will contact the loading tray located at the bottom of the silo space. As the lifting assembly 420 continues to move upward, it can drive the entire stack of loading trays to separate from the supporting member 660. Then, the second translation driving member 650 drives the supporting member 660 to move away from the loading port structure 100d, so that the supporting member 660 leaves the silo space. Thus, through the cooperation of the loading platform 423 and the third clamping jaw 424, the lifting assembly 420 completes the reception of the entire stack of loading trays.

[0173] 2. After the lifting component 420 receives the entire stack of loading trays, the third clamping claw 424 clamps the lowest loading tray (i.e. the last loading tray); then, the lifting component 420 drives the entire stack of loading trays to move downward, and when the last loading tray is located below the supporting member 660; the first translation drive member 640 drives the supporting member 670 to move toward the geometric center of the loading port structure 100d, clamping the entire stack of loading trays except the last loading tray; then, the lifting component 420 can continue to drive the last loading tray to continue to move downward, so that the last loading tray is separated from the second to last loading tray, thereby realizing the tray separation processing of the entire stack of loading trays; finally, the lifting component 420 carries the last loading tray through the loading port structure 100d to the lower side of the machine 100, and can automatically load the last loading tray.

[0174] 3. After completing the tray separation process for the penultimate loading tray, the second translation drive member 650 drives the supporting member 660 to move toward the geometric center of the loading port structure 100d, so that the supporting member 660 re-enters the silo space and is located below the original penultimate loading tray; then, the first translation drive member 650 drives the supporting member 670 to move away from the geometric center of the loading port structure 100d, thereby releasing the current stack of loading trays, so that the current stack of trays falls on the supporting member 660.

[0175] 4. Repeat the above steps to separate the entire stack of loading trays one by one, so as to automatically complete the loading operation of the loading trays.

[0176] Based on the structure and functional configuration of the tray separation component, when collecting and storing OK products, NG products or empty trays, the following process steps can be roughly followed, and the following is explained using the configuration of the tray separation component of the second silo device 600b as an example.

[0177] 1. When the lifting assembly 420 of the second conveying device 400b conveys the OK material tray to the first unloading position P2, the first translation driving member 640 drives the supporting member 670 to clamp the entire stack of trays in the silo space; then, the second translation driving member 650 drives the supporting member 660 to leave the silo space.

[0178] 2. The lifting assembly 420 carries the OK material tray and moves upward until the OK material tray contacts the bottom tray in the stack of trays; then, the first translation drive member 640 drives the supporting member 670 to release the stack of trays, thereby transferring the stack of trays including the OK material tray to the lifting assembly 420; then, the lifting assembly 420 carries the stack of trays and continues to move upward to a certain height to provide support for the supporting member 660 to re-enter the silo space.

[0179] 3. The second translation drive member 650 drives the supporting member 660 to re-enter the silo space; then, the lifting component 420 carries the entire stack of trays and moves downward, and finally the entire stack of trays is placed on the supporting member 660. After the lifting component 420 moves to the bottom of the machine 100 through the discharge port structure 100c, the automatic unloading and storage operation of an OK material tray is completed.

[0180] By repeating the above actions, the OK material trays can be stacked one by one from bottom to top and stored in the second material bin device 600b, so that the operator can take out the whole stack of OK material trays in time to realize the batch manual unloading operation of OK products.

[0181] It can be understood that, in some embodiments, the first bin device 600a, the second bin device 600b, the third bin device 600c and the fourth bin device 600d can all be constructed by combining multiple tray components and multiple limit components; specifically, the first bin device 600a can cooperate with the first conveying device 400a through the tray component to realize automatic loading of the tray or the tested parts; the second bin device 600b can cooperate with the second conveying device 400b through the tray component to realize automatic unloading and stacking storage of OK products; the third bin device 600c can cooperate with the third conveying device 400c through the tray component to realize automatic unloading and stacking storage of NG products; the fourth bin device 600d can cooperate with the third conveying device 400c through the tray component to realize automatic unloading and automatic recycling storage of empty trays at the second loading position P4, thereby replenishing or recycling empty trays (or replenishment trays) of the detection equipment to meet the requirements of automatic sorting of OK and NG products.

[0182] In other embodiments, the first silo device 600a and the fourth silo device 600d can be constructed by combining multiple limit components and multiple sub-disc components, while the second silo device 600b and the fourth silo device 600b can be constructed by combining multiple limit components and multiple stop members 630; in this way, the structural composition of the silo device 600d is selectively set according to the function of each silo device 600d, which is conducive to simplifying the structure of the detection equipment and reducing the configuration cost of the detection equipment.

[0183] The above specific examples are used to illustrate the present application, which is only used to help understand the present application and is not intended to limit the present application. For technicians in the technical field to which the present application belongs, they can also make some simple deductions, deformations or substitutions based on the ideas of the present application.

Claims

1. A detection device, characterized in that: The invention comprises a machine platform and a detection device, a transfer device and a plurality of conveying devices arranged on the machine platform, wherein the machine platform has a picking area and a detection area arranged side by side in a first horizontal direction, the detection device and the transfer device are arranged in the detection area, the conveying device is arranged across the detection area and the picking area along the first horizontal direction, and a plurality of the conveying devices are arranged side by side in a second horizontal direction perpendicular to the first horizontal direction; wherein: The plurality of conveying devices include a first conveying device, a second conveying device and a third conveying device, the picking area is defined with a first loading position, a first unloading position and a second unloading position arranged side by side in the second horizontal direction, and the detection area is defined with a detection position, a first transfer position and a second transfer position arranged side by side in the second horizontal direction; The first conveying device is used to convey the test piece received from the first loading position to the detection position; the detection device can be controlled to move to the detection position to detect the test piece; The transfer device is controllably movable between the detection position, the first transfer position and the second transfer position, and is used to transfer the tested piece with a qualified detection result to the first transfer position, and is used to transfer the tested piece with an unqualified detection result to the second transfer position; The second conveying device is used to convey the tested piece received from the first transfer position to the first unloading position, and the third conveying device is used to convey the tested piece received from the second transfer position to the second unloading position.

2. The detection device according to claim 1, characterized in that It also includes a tray separation device, a sorting device and a tray replenishing device arranged on the machine platform, and the detection area also defines a third transfer position and a fourth transfer position arranged side by side in the second horizontal direction; wherein: The tray separation device is controllably movable along the first horizontal direction between the first transfer position and the third transfer position, and is used for carrying and transferring the tray carrying the tested piece; The tray-replacing device is controllably movable along the first horizontal direction between the second transfer position and the fourth transfer position, and is used for carrying and transferring the tray carrying the tested piece; The sorting device is controllably movable between the third transfer position and the fourth transfer position, and is used to transfer the tested parts between the material tray carried by the tray separating device and the material tray carried by the tray replenishing device; The transfer device is used to transfer material trays between two cooperating ones of the first conveying device, the tray dividing device, the second conveying device, the tray replenishing device and the third conveying device.

3. The detection device according to claim 2, characterized in that The tray dividing device and / or the tray replenishing device include a first translation module and a tray carrier assembly for carrying material trays, wherein the first translation module is arranged on the machine platform; the power end of the first translation module is coupled to the tray carrier assembly so as to drive the tray carrier assembly to move linearly along the first horizontal direction; wherein the tray carrier assembly has one or more material tray placement areas, wherein the material tray placement areas are provided with multiple layers of material tray slots whose outline dimensions decrease gradually from top to bottom in the vertical direction, and the multiple layers of the material tray slots are used to accommodate material trays of different sizes.

4. The detection device according to claim 3, characterized in that The tray assembly includes a positioning module and a support tray and a carrier tray stacked in a vertical direction, the power end of the first translation module is coupled to the support tray, and the tray slot is arranged on a side of the carrier tray away from the support tray; The carrier plate is further provided with a reference avoidance opening, a positioning avoidance opening and a plurality of matching avoidance openings, wherein the reference avoidance opening and the matching avoidance opening are arranged on opposite sides of the tray slot in the horizontal direction, and the plurality of matching avoidance openings are connected with the multiple layers of the tray slot in a one-to-one correspondence, and the reference avoidance opening and the positioning avoidance opening are each arranged through the carrier plate in the vertical direction, and the reference avoidance opening and the positioning avoidance opening are each connected with the multiple layers of the tray slot; The reference avoidance opening and the matching avoidance opening cooperate with each other to avoid the clamping claws in the transfer device for clamping and releasing the tray; The main body of the positioning module is fixed to the supporting plate, and the power end of the positioning module is arranged to penetrate the positioning avoidance opening in the vertical direction; the power end of the positioning module can move along the positioning avoidance opening toward the geometric center of the tray slot, so as to position the tray within the tray slot by abutting against the tray.

5. The detection device according to claim 4, characterized in that The positioning module comprises a linear drive member, a positioning push member and an elastic reset member, wherein the body of the linear drive member is arranged on the support plate, the power end of the linear drive member is coupled to the positioning push member, and the elastic reset member is arranged on a side of the positioning push member away from the linear drive member; wherein the linear drive member is used to drive the positioning push member to move linearly along the positioning avoidance opening so that the positioning push member can abut against the material tray; the elastic reset member is used to provide an elastic pre-tightening force that causes the positioning push member to move close to the geometric center of the slot of the material tray; And / or the supporting plate is provided with a first positioning structure, and the carrying plate is provided with a second positioning structure; the first positioning structure and the second positioning structure are detachably connected to each other to position and restrict the carrying plate to the supporting plate.

6. The detection device according to claim 3, characterized in that: The plate dividing device and / or the plate replenishing device also includes a second translation module, which is coupled between the plate carrier assembly and a power end of the first translation module; the second translation module is used to drive the plate carrier assembly to move linearly along the second horizontal direction relative to the first translation module, so that the plate carrier assembly can stay at a position deviated from the first shift position or the second shift position.

7. The detection device according to claim 2, characterized in that: It also includes a first positioning device and / or a second positioning device disposed on the machine platform; wherein: The first positioning device is arranged in the detection area and is located in the space between the first transfer position and the third transfer position; the first positioning device is used to obtain the position information of the tested piece on the tray separation device, and the sorting device can take the tested piece out of the tray separation device in response to the position information; The second positioning device is arranged in the detection area and is located in the space between the second transfer position and the fourth transfer position; the second positioning device is used to obtain the position information of the tested piece on the replenishing device, and the sorting device can respond to the position information and take the tested piece out from the replenishing device.

8. The detection device according to claim 1, characterized in that: It also includes a flipping device, which is arranged on the machine and located in the picking area. The detection area also defines a flipping position arranged side by side with the detection position in the second horizontal direction; wherein the transfer device can carry the tested piece to the flipping position; the flipping device can be controllably moved along the first horizontal direction to the flipping position to cooperate with the transfer device to flip the tested piece 180 degrees at the flipping position.

9. The detection device according to claim 8, characterized in that The flipping device comprises a first opening and closing module, a rotation driving module, a third translation module and two first clamping jaws arranged opposite to each other; wherein: The power end of the first opening and closing module is coupled to the first clamping jaw, and is used to drive the two first clamping jaws to move closer to each other or farther away from each other, so as to clamp the object to be tested or the tray loaded with the object to be tested when the two first clamping jaws move closer to each other; The power end of the rotary drive module is coupled to the body of the first opening and closing module, and is used to drive the first opening and closing module to drive the two first clamping jaws to rotate with a period of 180 degrees; The body of the third translation module is arranged on the machine platform, the power end of the third translation module is coupled to the body of the rotation drive module, and the third translation module is used to drive the rotation drive module to drive the first opening and closing module and the first clamp to move linearly along the first horizontal direction.

10. The detection device according to claim 1, characterized in that: The transfer device comprises a second opening and closing module, a fourth translation module, a first lifting module and two second clamping claws arranged opposite to each other; wherein: The power end of the second opening and closing module is coupled to the second clamping jaws, and is used to drive the two second clamping jaws to move closer to each other or farther away from each other, so that the two second clamping jaws can clamp the test piece or the tray for loading the test piece when they move closer to each other; The power end of the first lifting module is coupled to the body of the second opening and closing module, and is used to drive the second opening and closing module to drive the two second clamping claws to move linearly in the vertical direction; The body of the fourth translation module is arranged on the machine platform, the power end of the fourth translation module is coupled to the body of the first lifting module, and the fourth translation module is used to drive the first lifting module to drive the second opening and closing module and the second clamp to move linearly along the second horizontal direction.

11. The detection device according to any one of claims 1 to 10, characterized in that: It also includes one or more silo devices arranged on the machine platform, and the silo device is used to store a plurality of trays stacked in a vertical direction; wherein: The silo device is arranged at the first loading position; the first conveying device can receive the tray loaded with the test piece located at the bottom of the silo device at the first loading position, and convey the received tray to the detection position; and / or the silo device is arranged at the first material unloading position; the second conveying device is capable of conveying the material trays received from the first transfer position and loaded with the test pieces to the first material unloading position, and stacking the received material trays one by one from bottom to top on the silo device at the first material unloading position; and / or the silo device is arranged at the second material unloading position; the third conveying device is capable of conveying the material trays received from the second transfer position and loaded with the test pieces to the second material unloading position, and stacking the received material trays one by one from bottom to top on the silo device at the second material unloading position; And / or a second loading position is also defined in the picking area, the second loading position and the second unloading position are arranged side by side in the first horizontal direction, and the silo device is arranged at the second loading position; the third conveying device can receive the empty material tray located at the bottom of the silo device at the second loading position, and convey the received empty material tray to the second transfer position; the third conveying device can also convey the empty material tray received from the second transfer position to the second loading position, and stack the received empty material trays one by one from bottom to top on the silo device at the second loading position.

12. The detection device according to claim 11, characterized in that The machine is provided with a material port structure at the first material loading position, the first material unloading position, the second material unloading position and the second material loading position, and the silo device comprises a plurality of limit assemblies arranged at intervals around the material port structure, and the limit assemblies comprise a limit member and a first adjusting member; wherein: The limit member extends in the vertical direction and is arranged on the upper side of the machine platform. The limit members of the plurality of limit assemblies enclose a silo space for storing material trays. One end of the limit member close to the machine platform in the vertical direction is connected to the machine platform through the first adjusting member; the first adjusting member is used to drive the limit member to move in the horizontal direction toward or away from the geometric center of the material port structure to adjust the size of the silo space.

13. The detection device according to claim 12, characterized in that The silo device further comprises a plurality of plate-dividing assemblies, which are arranged on two opposite sides of the material inlet structure in the horizontal direction, and the plate-dividing assemblies comprise a first translation driving member, a second translation driving member, a supporting member, a holding member, and a second adjusting member; The power end of the first translation driving member is coupled to the abutting member, and is used to drive the abutting member to move toward or away from the geometric center of the material opening structure in the horizontal direction, so that when the abutting member moves close to the material opening structure, it can abut the material tray in the silo space in the horizontal direction; The power end of the second translation driving member is coupled to the supporting member, and is used to drive the supporting member to move toward or away from the geometric center of the material inlet structure in the horizontal direction, so that when the supporting member moves close to the material inlet structure, it can support the material tray located at the bottom of the silo space in the vertical direction; The body of the first translational driving member is arranged above the body of the second translational driving member in the vertical direction, and the body of the second translational driving member is connected to the machine platform through the second adjusting member; the second adjusting member is used to drive the second translational driving member to drive the second translational driving member to move horizontally toward or away from the geometric center of the material inlet structure, so as to adjust the position of the plate separation assembly relative to the material inlet structure in the horizontal direction; Or the silo device further includes a plurality of stoppers, and the plurality of stoppers correspond to the plurality of limit assemblies one by one; the stoppers are arranged at one end of the limitpers close to the machine platform in the vertical direction, and the stoppers are rotatably connected to the limitpers or the first adjusting member; The stopper can be flipped upward by the pushing action of the material tray so that the material tray enters the silo space through the material opening structure; the stopper can also be flipped downward by its own gravity to support the material tray located at the bottom of the silo space.

14. The detection device according to claim 11, characterized in that: At least one of the first conveying device, the second conveying device and the third conveying device comprises a fifth translation module and a lifting assembly for receiving a material tray; wherein: The body of the fifth translation module is arranged on the machine platform, the power end of the fifth translation module is coupled to the lifting assembly, and the fifth translation module is used to drive the lifting assembly to move linearly along the first horizontal direction; The lifting assembly can be controllably moved in a straight line toward or away from the corresponding silo device in a vertical direction, so that when the lifting assembly approaches the silo device, it can receive the tray located at the bottom of the silo device or push the received tray into the silo device.

15. The detection device according to claim 14, characterized in that The lifting assembly includes a second lifting module, a third opening and closing module, a loading platform and two third clamping claws arranged opposite to each other; wherein: The third clamping jaws are arranged to penetrate the loading platform in a vertical direction; the power end of the third opening and closing module is coupled to the third clamping jaws, and is used to drive the two third clamping jaws to move closer to or away from each other, so as to clamp or release the tray; The body of the second lifting module is arranged on the loading platform, and the power end of the second lifting module is coupled to the body of the third opening and closing module; the second lifting module is used to drive the third opening and closing module to drive the two third clamping claws to move linearly relative to the loading platform in the vertical direction, so that the two third clamping claws can place the clamped material tray on the loading platform or clamp the material tray on the loading platform; The power end of the fifth translation module is coupled to the loading platform, and is used to drive the loading platform to drive the second lifting module, the third opening and closing module and the third clamp to move linearly along the first horizontal direction.

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