Dust removal device and laser etching system

By designing a dust removal device for laser etching of lithium-ion battery poles, the combination of negative pressure pipes and air outlets is used to solve the problem of low dust capture efficiency in the prior art, and more efficient dust collection and safety guarantees are achieved.

CN119159229APending Publication Date: 2024-12-20速博达(深圳)自动化有限公司
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Patent Information

Application Number
CN202411466093.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-18
Publication Date
2024-12-20

AI Technical Summary

Technical Problem

The existing lateral vacuum cleaner and dust removal mechanism cannot effectively capture the dust generated when laser etching the lithium-ion battery pole, resulting in reduced processing quality and safety risks.

Method used

A dust removal device is designed, including a dust removal mechanism, a negative pressure pipe and an air outlet, which captures dust particles by forming an adsorption channel and a negative pressure air flow, thereby improving the dust collection efficiency.

Benefits of technology

It significantly improves dust removal efficiency, meets the demand for laser-etched lithium-ion battery poles, and reduces the pollution and safety risks of dust on the equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a dust removal device and a laser etching system, and relates to the technical field of laser processing. The dust removal device comprises a dust removal mechanism, a negative pressure pipeline and an air outlet piece, the negative pressure pipeline is connected with the dust removal mechanism, a dust suction cavity is defined by the dust removal mechanism, the negative pressure pipeline is communicated with the dust suction cavity, the dust removal mechanism comprises a first plate, and a first dust suction opening is formed in the first plate; the first plate piece and the pole piece are arranged at an interval, an adsorption channel is formed between the first plate piece and the pole piece, and the adsorption channel is communicated with the dust collection cavity through the first dust collection opening; the air outlet piece is arranged on one side of the adsorption channel and can output airflow facing the first dust suction opening into the adsorption channel. The dust removal device can solve the problem that an existing dust removal mechanism for lateral dust collection cannot meet the requirement for laser etching of the lithium ion battery pole piece.
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Description

Technical Field

[0001] The present application relates to the field of laser processing technology, and in particular to a dust removal device and a laser etching system. Background Art

[0002] According to the study "The Impact of Laser Etched Negative Electrode Sheets on the Performance of Lithium-ion Batteries", thick electrode technology can effectively increase the proportion of positive and negative active materials in lithium-ion batteries, reduce the proportion of inactive materials in the diaphragm and current collector, and thus effectively increase the energy density of lithium-ion batteries. However, the increase in the thickness of lithium-ion battery electrodes will lead to an increase in the transmission distance and impedance of charges (such as electrons and ions), and the deterioration of the dynamics of the negative electrode sheet, which will seriously affect the cycle life of lithium-ion batteries. Through laser etching of lithium-ion battery pole sheets, the pores on the surface of the pole sheets can be increased, and the lithium ion deintercalation channels on the surface of graphite particles can be increased, effectively improving the dynamic performance of lithium-ion battery pole sheets. Compared with lithium-ion batteries made of lithium-ion battery pole sheets without laser etching, the cycle life of lithium-ion batteries made of laser-etched lithium-ion battery pole sheets at room temperature has increased by 87%, and the cycle life at 45°C has increased by 37%. Therefore, the technology of laser etching lithium-ion battery pole sheets is widely used due to its high precision and high efficiency, especially in the graphical processing stage of lithium-ion battery pole sheets.

[0003] Laser etching of lithium-ion battery pole pieces is to irradiate the laser onto the lithium-ion battery pole piece through the laser head, melt or sublimate the active material on the pole piece through the high temperature of the laser, and then control the optical path process to etch the active material on the pole piece into a gap with certain requirements, so as to form a groove shape on the pole piece. A large amount of dust will be generated in this process. If the dust is not removed in time, the dust will accumulate near the groove of the lithium-ion battery pole piece, which will affect the etching quality, such as inconsistent groove depth and width, exceeding the dimensional tolerance range, etc., which will directly affect the quality of the processed lithium-ion battery pole piece. In addition, the dust produced by laser etching is conductive graphite dust. When the graphite dust is adsorbed on other components in the equipment, it will cause abnormal internal power supply (such as short circuit, etc.), posing a safety hazard.

[0004] At present, in order to remove the dust generated during etching, a dust removal mechanism with lateral dust suction is usually set near the lithium-ion battery pole piece. The wind speed of the dust removal mechanism with lateral dust suction is mostly concentrated in the middle channel, and no wind duct in a specific direction is formed on the outside. When the laser etches the lithium-ion battery pole piece at high speed, the dust particles will explode in multiple directions with a certain initial speed. At this time, the dust removal mechanism with lateral dust suction can only capture dust in some directions. The dust suction amount of the dust removal mechanism with lateral dust suction is far less than the dust generated when the laser etches the lithium-ion battery pole piece at high speed. The dust removal mechanism with lateral dust suction cannot meet the needs of laser etching of lithium-ion battery pole pieces. Summary of the invention

[0005] In view of this, the present application provides a dust removal device and a laser etching system to solve the problem that the existing side dust removal mechanism cannot meet the needs of laser etching of lithium-ion battery pole pieces.

[0006] According to one aspect of the present application, a dust removal device is provided, the dust removal device is used to remove dust from a pole piece, the dust removal device comprises a dust removal mechanism, a negative pressure pipe and an air outlet, the negative pressure pipe is connected to the dust removal mechanism, the dust removal mechanism surrounds a dust suction chamber, the negative pressure pipe is connected to the dust suction chamber, the dust removal mechanism comprises a first plate, and a first dust suction port is opened on the first plate;

[0007] The first plate is spaced apart from the pole piece, an adsorption channel is formed between the first plate and the pole piece, and the adsorption channel is connected to the dust suction chamber through the first dust suction port;

[0008] The air outlet member is arranged at one side of the adsorption channel, and the air outlet member can output an airflow toward the first dust suction port into the adsorption channel.

[0009] Preferably, the dust removal mechanism is located on one side of the pole piece in the first direction, and a side of the first plate member facing the pole piece in the first direction is in an arc-like shape.

[0010] Preferably, the dust removal device includes two air outlet pieces, which are respectively located on both sides of the adsorption channel in the second direction, and the first dust suction port is located in the middle of the first plate in the second direction, and the second direction intersects with the first direction.

[0011] Preferably, the dust removal mechanism also includes a second plate, the first plate and the second plate are arranged at intervals along the first direction, the second plate is provided with a second dust suction port facing the first dust suction port, and the second dust suction port is connected to the dust suction chamber.

[0012] Preferably, the dust removal mechanism further comprises two guide plates, both of which are fixed on a side of the second plate member facing away from the first plate member, and the two guide plates are located on both sides of the second dust suction port in the second direction;

[0013] In a direction from the second plate member to the first plate member, a distance between the two guide plates gradually decreases.

[0014] Preferably, the dust removal device also includes a spoiler, which is arranged inside the dust suction chamber, and the spoiler is located on the side of the first dust suction port in the second direction, and the distance between the spoiler and the first dust suction port in the first direction is greater than the distance between the spoiler and the second dust suction port in the first direction.

[0015] Preferably, the dust removal device also includes a first fixing member and a second fixing member, the dust removal mechanism is fixed on the first fixing member, the first fixing member is slidably connected to the second fixing member, the first fixing member can slide relative to the second fixing member along the first direction, and is fixed at multiple positions of the second fixing member in the first direction.

[0016] Preferably, the dust removal device further comprises a dust concentration detector and an electrostatic eliminator, and both the dust concentration detector and the electrostatic eliminator are fixed on the first fixing member.

[0017] Preferably, the dust removal device further comprises a positive pressure pipe, the positive pressure pipe and the negative pressure pipe are fixed at two ends of the dust removal mechanism in the second direction, and the positive pressure pipe is connected to the dust suction chamber.

[0018] Preferably, the negative pressure pipe is fixed to one end of the dust removal mechanism in the second direction, and the dust removal mechanism is provided with an air inlet on the side opposite to the negative pressure pipe in the second direction, and the air inlet is connected to the dust suction chamber.

[0019] According to another aspect of the present application, a laser etching system is provided, which includes an etching roller, a laser device and the above-mentioned dust removal device, wherein the etching roller, the dust removal device and the laser device are arranged in sequence, and the etching roller is used to support the pole piece.

[0020] Preferably, the laser etching system also includes a shell and a partition, the etching roller, the dust removal device, the laser device and the partition are all arranged inside the shell, the dust removal device and the laser device are respectively located on both sides of the partition, and the etching roller and the dust removal device are located on the same side of the partition.

[0021] In the dust removal device of the present application, the dust removal device includes a dust removal mechanism, a negative pressure pipe and an air outlet, the negative pressure pipe is connected to the dust removal mechanism, the dust removal mechanism encloses a dust suction chamber, the negative pressure pipe is connected to the dust suction chamber, the dust removal mechanism includes a first plate, and a first dust suction port is opened on the first plate; the first plate is spaced apart from the pole piece, the first plate and the pole piece enclose an adsorption channel, the adsorption channel is connected to the dust suction chamber through the first dust suction port, and the air outlet is arranged on one side of the adsorption channel, and the air outlet can output an airflow toward the first dust suction port into the adsorption channel. After the pole piece is laser-etched, the dust particles explode from the pole piece to the surroundings at a certain speed under the influence of the high-power laser strike, and most of the dust particles will be entered into the dust suction chamber. In addition, some dust particles will escape into the adsorption channel, and the airflow toward the first dust suction port is output into the adsorption channel through the air outlet, so that the dust particles enter the dust suction chamber through the first dust suction port. The negative pressure pipe is connected to the negative pressure device, so that an airflow toward the negative pressure pipe is formed in the dust suction chamber, thereby collecting dust. In this way, the dust removal device can capture more dust through the adsorption channel and the air outlet, so that the dust removal device can meet the needs of laser etching of lithium-ion battery pole pieces. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 A schematic diagram showing the three-dimensional structure of a dust removal device according to a first embodiment of the present invention;

[0024] Figure 2 A cross-sectional view showing a dust removal device according to a first embodiment of the present invention;

[0025] Figure 3 A gas flow diagram of a dust removal device according to a first embodiment of the present invention is shown;

[0026] Figure 4 A schematic diagram showing the three-dimensional structure of a dust removal device according to a second embodiment of the present invention;

[0027] Figure 5 A cross-sectional view showing a dust removal device according to a second embodiment of the present invention;

[0028] Figure 6 A gas flow diagram of a dust removal device according to a second embodiment of the present invention is shown;

[0029] Figure 7 A simulation diagram showing the flow of dust particles from one perspective of the dust removal device according to the first embodiment of the present invention;

[0030] Figure 8 A simulation diagram showing the flow of dust particles from another perspective of the dust removal device of the first embodiment of the present invention;

[0031] Fig. 9 A simulation diagram showing the flow of dust particles from one perspective of the dust removal device of the second embodiment of the present invention;

[0032] Fig.10 Shown is a schematic structural diagram of a laser etching system.

[0033] Icons: 1-shell; 2-partition; 21-through opening; 3-laser device; 4-dust removal device; 41-dust removal mechanism; 411-first plate; 4111-first dust suction port; 412-second plate; 4121-second dust suction port; 413-enclosure; 4131-air inlet; 414-adsorption channel; 415-dust suction chamber; 42-negative pressure pipe; 43-air outlet; 44-positive pressure pipe; 451-guide plate; 452-mounting plate; 453-guide channel; 46-spoiler; 471-first fixing member; 472-second fixing member; 473-slide rail; 474-slider; 475-locking plate; 476-extension hole; 477-locking block; 478-locking bolt; 48-dust concentration detector; 49-static eliminator; 5-etching roller; 6-pole piece; L1-first direction; L2-second direction; L3-third direction. DETAILED DESCRIPTION

[0034] The following specific embodiments are provided to help the reader obtain a comprehensive understanding of the methods, devices and / or systems described herein. However, after understanding the disclosure of the present application, various changes, modifications and equivalents of the methods, devices and / or systems described herein will be apparent. For example, the order of operations described herein is merely an example, and is not limited to the order set forth herein, but in addition to the operations that must occur in a particular order, changes that will be apparent after understanding the disclosure of the present application may be made. In addition, in order to improve clarity and brevity, descriptions of features known in the art may be omitted.

[0035] The features described herein may be implemented in different forms and should not be interpreted as being limited to the examples described herein. Rather, the examples described herein have been provided only to illustrate some of the many possible ways of implementing the methods, devices and / or systems described herein that will be apparent after understanding the disclosure of the present application.

[0036] Throughout the specification, when an element (such as a layer, a region, or a substrate) is described as being “on”, “connected to”, “bound to”, “over”, or “covering” another element, it may be directly “on”, “connected to”, “bound to”, “over”, or “covering” another element, or one or more other elements may be present between them. In contrast, when an element is described as being “directly on”, “directly connected to”, “directly bound to”, “directly over”, or “directly covering” another element, there may be no other elements present between them.

[0037] As used herein, the term "and / or" includes any one of the associated listed items and any combination of any two or more items.

[0038] Although terms such as "first," "second," and "third" may be used herein to describe various members, components, regions, layers, or portions, these members, components, regions, layers, or portions are not limited by these terms. Rather, these terms are only used to distinguish one member, component, region, layer, or portion from another member, component, region, layer, or portion. Therefore, without departing from the teachings of the examples described herein, the first member, component, region, layer, or portion referred to may also be referred to as the second member, component, region, layer, or portion.

[0039] For ease of description, spatial relational terms such as "above", "upper", "below", and "lower" may be used herein to describe the relationship of one element to another element as shown in the accompanying drawings. Such spatial relational terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is turned over, an element described as being "above" or "upper" relative to another element will subsequently be "below" or "lower" relative to the other element. Therefore, the term "above" includes both "above" and "below" orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relational terms used herein will be interpreted accordingly.

[0040] The terms used herein are only used to describe various examples and are not used to limit the present disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms "include", "comprise" and "have" list the stated features, quantities, operations, components, elements and / or their combinations that exist, but do not exclude the existence or addition of one or more other features, quantities, operations, components, elements and / or their combinations.

[0041] Variations in the shapes shown in the drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the drawings but include variations in shapes that occur during manufacturing.

[0042] The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have various configurations, other configurations are possible as will be apparent after understanding the disclosure of the present application.

[0043] The following will be combined Figures 1 to 6 as well as Fig.10 The dust removal device 4 and the laser etching system of the present application are described. Figures 1 to 6 as well as Fig.10 In the embodiment, the first direction L1 intersects with the second direction L2, and the third direction L3 intersects with the plane defined by the first direction L1 and the second direction L2. Preferably, the first direction L1, the second direction L2 and the third direction L3 are perpendicular to each other.

[0044] According to one aspect of the present application, a dust removal device 4 is provided, such as Figures 1 to 6As shown, the dust removal device 4 includes a dust removal mechanism 41, a negative pressure pipe 42 and an air outlet 43, the negative pressure pipe 42 is connected to the dust removal mechanism 41, the dust removal mechanism 41 surrounds a dust suction chamber 415, the negative pressure pipe 42 is connected to the dust suction chamber 415, the dust removal mechanism 41 includes a first plate 411, and a first dust suction port 4111 is provided on the first plate 411; the first plate 411 is spaced apart from the pole piece 6, the first plate 411 and the pole piece 6 surround an adsorption channel 414, the adsorption channel 414 is connected to the dust suction chamber 415 through the first dust suction port 4111, and the air outlet 43 is arranged on one side of the adsorption channel 414, and the air outlet 43 can output an airflow toward the first dust suction port 4111 into the adsorption channel 414. After the pole piece 6 is laser-etched, the dust particles explode from the pole piece 6 to the surroundings at a certain speed under the influence of the high-power laser strike, and most of the dust particles will enter the dust suction chamber 415. In addition, some dust particles will escape into the adsorption channel 414, and the airflow toward the first dust suction port 4111 is output into the adsorption channel 414 through the air outlet 43, so that the dust particles enter the dust suction chamber 415 through the first dust suction port 4111. The negative pressure pipe 42 is connected to the negative pressure device, so that an airflow toward the negative pressure pipe 42 is formed in the dust suction chamber 415, thereby realizing the collection of dust. In this way, the dust removal device 4 can capture more dust through the adsorption channel 414 and the air outlet 43, so that the dust removal device 4 can meet the dust removal requirements of the laser etched pole piece 6.

[0045] Preferably, the negative pressure device is an explosion-proof dust collector, which can generate a stable negative pressure environment. The explosion-proof dust collector is connected to the negative pressure pipe 42 to ensure that the flow rate of the airflow in the entire dust removal device 4 is relatively stable.

[0046] Furthermore, if Figure 1 and Figure 4 As shown, the dust removal mechanism 41 also includes a surrounding plate 413 and a second plate 412, the surrounding plate 413 is arranged around to form two openings facing each other in the first direction L1, the first plate 411 and the second plate 412 are respectively arranged on the two openings, the first plate 411 and the second plate 412 are both perpendicular to the first direction L1, and the surrounding plate 413, the first plate 411 and the second plate 412 jointly surround the above-mentioned dust suction chamber 415. Preferably, the surfaces of the surrounding plate 413, the first plate 411 and the second plate 412 facing the dust suction chamber 415 are brightly polished to prevent dust particles from accumulating in uneven places.

[0047] like Figures 1 to 6As shown, the pole piece 6 is arranged on the etching roller 5, and there is a gap between the first plate 411 and the pole piece 6, thereby enclosing an adsorption channel 414. The first plate 411 is in an arc-like shape on one side facing the pole piece 6 in the first direction L1, which makes the first plate 411 a contoured structure adapted to the etching roller 5. In this way, the first dust suction port 4111 on the first plate 411 can better adapt to the etching roller 5, and the distance between the surface of the first plate 411 facing the etching roller 5 and the etching roller 5 is a predetermined value, thereby forming a uniform adsorption channel 414. At the same time, the first plate 411 semi-surrounds the etching roller 5 and the pole piece 6 on the etching roller 5, so that the area covering the pole piece 6 is increased, thereby improving the dust removal effect. In addition, when dust particles explode in the adsorption channel 414, the first plate 411 can limit the explosion direction of the dust particles to ensure that the exploded dust particles can be captured.

[0048] In addition, there are two air outlet pieces 43, which are spaced apart on both sides of the adsorption channel 414 along the second direction L2. The first dust suction port 4111 is located in the middle of the first plate 411 in the second direction L2. The adsorption channel 414 has openings at both ends in the second direction L2. The air outlets of the two air outlet pieces 43 face the two openings, thereby outputting airflow from both sides of the adsorption channel 414 in the second direction L2 into the adsorption channel 414.

[0049] Preferably, the air outlet member 43 is a plasma air knife, which can output non-charged airflow, and one end of the air outlet member 43 in the third direction L3 can be fixed on the inner wall of the shell 1 where the dust removal device 4 is located.

[0050] like Figure 2 and Figure 5 As shown, the second plate 412 is provided with a second dust suction port 4121 facing the first dust suction port 4111, and the second dust suction port 4121 is connected to the dust suction chamber 415. When the dust removal device 4 is in use, the laser device 3 is arranged on the side of the dust removal mechanism 41 facing away from the pole piece 6 in the first direction L1, so that the laser can pass through the first dust suction port 4111, the dust suction chamber 415 and the second dust suction port 4121 to etch the pole piece 6. At the same time, during laser etching, dust particles may explode and disperse to the side of the dust removal structure facing away from the pole piece 6, and an airflow is formed in the dust suction chamber 415 to flow to the negative pressure pipe 42, so that the dust particles on the side of the dust removal structure facing away from the pole piece 6 can enter the dust suction chamber 415 through the second dust suction port 4121, and then the dust particles are collected through the negative pressure pipe 42.

[0051] Furthermore, the dust removal device 4 further includes two guide plates 451, both of which are fixed on the side of the second plate 412 facing away from the first plate 411, and the two guide plates 451 are located on both sides of the second dust suction port 4121 in the second direction L2, and the two guide plates 451 surround a guide channel 453; in the direction from the second plate 412 to the first plate 411, the distance between the two guide plates 451 gradually decreases. The suction force can be extended to the outside of the second dust suction port 4121 through the guide channel 453, thereby improving the collection effect of the escaping dust particles on the side of the dust removal structure facing away from the pole piece 6.

[0052] In addition, the dust removal device 4 also includes two mounting plates 452, which correspond to the two guide plates 451 respectively. The mounting plates 452 and the corresponding guide plates 451 can be integrally formed, and the mounting plates 452 can be fixed to the dust removal mechanism 41 by bolts, thereby fixing the guide plates 451.

[0053] like Figure 1 , Figure 2 , Figure 4 and Figure 5 As shown, the dust removal device 4 also includes a spoiler 46, which is arranged inside the dust suction chamber 415, and the spoiler 46 can be perpendicular to the first direction L1. The spoiler 46 is located on one side of the first dust suction port 4111 in the second direction L2, and the distance between the spoiler 46 and the first dust suction port 4111 in the first direction L1 is greater than the distance between the spoiler 46 and the second dust suction port 4121 in the first direction L1. When the spoiler 46 is not provided, the flow velocity of the airflow at the lower part of the dust suction chamber 415 is relatively large. By providing the spoiler 46, the flow velocity of the airflow in the dust suction chamber 415 can be made more uniform, thereby achieving a better collection effect. Preferably, an installation port is provided on the enclosure 413, and the spoiler 46 can be inserted into the dust suction chamber 415 through the installation port. The spoiler 46 adopts this pull-out fixing method, which can facilitate the installation and removal of the spoiler 46. When the dust removal mechanism 41 needs to be cleaned, the spoiler 46 can be pulled out to clean the dust on the spoiler 46 .

[0054] Optionally, the number of spoilers 46 can be one or two. When the number of spoilers 46 is one, the spoiler 46 is located on the side of the second dust suction port 4121 close to the negative pressure pipe 42; when the number of spoilers 46 is two, the two spoilers 46 are respectively located on both sides of the second dust suction port 4121 in the second direction L2.

[0055] like Figure 1 , Figure 2 , Figure 4 and Figure 5As shown, the dust removal device 4 also includes a first fixing member 471 and a second fixing member 472. The dust removal mechanism 41 is fixed on the first fixing member 471. The first fixing member 471 is slidably connected to the second fixing member 472. The first fixing member 471 can slide relative to the second fixing member 472 along the first direction L1, and is fixed to the second fixing member 472 at multiple positions in the first direction L1. The distance between the first plate 411 and the etching roller 5 can be adjusted by sliding the first fixing member 471 relative to the second fixing member 472. When the pole piece 6 is installed on the etching roller 5, the first fixing member 471 can be moved so that the distance between the first plate 411 and the etching roller 5 is increased to facilitate the installation of the pole piece 6.

[0056] Further, the first fixing member 471 and the second fixing member 472 can both be plate-shaped, the first fixing member 471 is perpendicular to the first direction L1, the second fixing member 472 is perpendicular to the second direction L2, and the second fixing member 472 can be fixed to the inner wall of the housing 1 of the laser etching system by bolts. A slide rail 473 extending along the first direction L1 is fixed to the second fixing member 472, and a slider 474 is fixed to the first fixing member 471. The slider 474 is arranged on the slide rail 473, and the slider 474 can move along the slide rail 473, so as to adjust the position of the first fixing member 471. A locking plate 475 is arranged on the second fixing member 472, and an extension hole 476 is opened on the locking plate 475, and the extension hole 476 extends along the first direction L1. A locking block 477 is arranged on the first fixing member 471, and a locking bolt 478 passes through the extension hole 476 and is threadedly connected to the locking block 477. When adjusting the position of the first fixing member 471, the locking bolt 478 is loosened, and the locking bolt 478 moves in the extension hole 476. After the position adjustment is completed, the locking bolt 478 is tightened, and the locking bolt 478 can no longer move in the extension hole 476, thereby achieving the fixation between the first fixing member 471 and the second fixing member 472.

[0057] Optionally, the connection method between the second fixing member 472 and the first fixing member 471 is not limited to the above-mentioned form. The second fixing member 472 can be connected to the first fixing member 471 through a sliding cylinder, and the sliding cylinder can be extended and retracted along the first direction L1, thereby driving the first fixing member 471 to move and keeping the first fixing member 471 at any position.

[0058] In addition, the dust removal device 4 also includes a dust concentration detector 48 and an electrostatic eliminator 49, and the dust concentration detector 48 and the electrostatic eliminator 49 are both fixed on the first fixing member 471. The dust concentration detector 48 can monitor the dust concentration in the housing 1 in real time, thereby adjusting the flow rate of the airflow in the negative pressure duct 42, the air outlet 43 and the positive pressure duct 44 described below, and then changing the flow rate of the airflow in the dust suction chamber 415 and the guide channel 453, so as to maximize the absorption of dust particles. At the same time, the dust particles generated during etching will have a certain temperature and will be charged. Therefore, the dust removal device 4 adopts a metal material with excellent anti-static performance, which can prevent spark generation and static electricity accumulation, and has good wear resistance and impact resistance, such as a mirror stainless steel plate. At the same time, the electrostatic eliminator 49 is set to ensure that the dust removal device 4 will not be charged by dust particles and cause dust accumulation. At the same time, the electrical components will not be abnormal due to static electricity, thereby ensuring the safety of the operator.

[0059] Optionally, the dust removal device 4 further includes a structure capable of providing airflow into the dust suction chamber 415 . The structure for providing airflow into the dust suction chamber 415 will be described below in combination with Embodiment 1 and Embodiment 2.

[0060] Embodiment 1

[0061] like Figures 1 to 3 As shown, the dust removal device 4 also includes a positive pressure pipe 44, the positive pressure pipe 44 and the negative pressure pipe 42 are fixed at both ends of the dust removal mechanism 41 in the second direction L2, the positive pressure pipe 44 is connected to the dust suction chamber 415, and the positive pressure pipe 44 can be connected to the air source, so that the airflow enters the dust suction chamber 415, so as to meet the air volume required by the negative pressure pipe 42 when sucking. Optionally, plasma wind can be introduced into the positive pressure pipe 44.

[0062] In the first embodiment, the dust removal device 4 includes two spoilers 46, and the two spoilers 46 are located on both sides of the second dust suction port 4121 in the second direction L2. When the dust removal device 4 in this embodiment is used, plasma wind is introduced into the positive pressure pipe 44, and the negative pressure pipe 42 is connected to the explosion-proof dust collector. After the pole piece 6 is laser-etched, the dust particles explode from the pole piece 6 to the surroundings at a certain speed under the influence of the high-power laser strike, such as Figure 3 As shown, most dust particles will enter the dust collection chamber 415 through the first dust collection port 4111. In addition, some dust particles will escape into the adsorption channel 414, and the air flow toward the first dust collection port 4111 is output to the adsorption channel 414 through the air outlet 43, so that the dust particles can enter the dust collection chamber 415 through the first dust collection port 4111. Under the action of the explosion-proof dust collector, the dust collection chamber 415 is collected in the explosion-proof dust collector.

[0063] The dust removal device 4 in the first embodiment is analyzed by a fluid dynamics analysis system (CFD), taking the case where the plasma wind is introduced into the positive pressure pipe 44 at a flow rate of about 10 m / s, the flow rate in the negative pressure pipe 42 is about 28 m / s, and the air outlet 43 outputs the plasma wind at a flow rate of about 5 m / s as an example. Figure 7 and Figure 8 As shown, the red area near the negative pressure pipe 42 is the area with the highest flow rate, the parts near the first dust suction port 4111 and the second dust suction port 4121 in the dust suction chamber 415 are all green areas, and the other areas from the first dust suction port 4111 and the second dust suction port 4121 to the negative pressure pipe 42 are yellow areas. The flow rate of the airflow in the dust suction chamber 415 is relatively uniform, which can achieve a better dust removal effect. In addition, when the fluid mechanics analysis system is used for calculation and analysis, if there are 1,000 dust particles in the etching groove of the pole piece 6, about 1,000 particles are absorbed by the dust removal device 4 of Example 1 and reach the explosion-proof dust collector, and the dust removal rate is about 100%. Compared with the lateral dust suction structure, the dust removal rate is increased by about 10%.

[0064] Embodiment 2

[0065] like Figure 4 and Figure 5 As shown, the negative pressure pipe 42 is fixed at one end of the dust removal mechanism 41 in the second direction L2, and the dust removal mechanism 41 is provided with an air inlet 4131 on the side opposite to the negative pressure pipe 42 in the second direction L2, and the air inlet 4131 is connected to the dust suction chamber 415. The airflow in the shell 1 where the dust removal device 4 is located can enter the dust suction chamber 415 through the air inlet 4131, thereby meeting the air volume required for suction by the negative pressure pipe 42.

[0066] In the second embodiment, the dust removal device 4 includes a spoiler 46, and the spoiler 46 is located on one side of the second dust suction port 4121 close to the negative pressure pipe 42 in the second direction L2. When the dust removal device 4 in this embodiment is used, the negative pressure pipe 42 is connected to the explosion-proof dust collector. Figure 6 As shown, most dust particles will enter the dust suction chamber 415 through the first dust suction port 4111, and some dust particles will escape into the adsorption channel 414. The airflow toward the first dust suction port 4111 is output into the adsorption channel 414 through the air outlet 43, and the dust particles can be blown into the dust suction chamber 415 through the first dust suction port 4111. Under the action of the explosion-proof dust collector, the dust suction chamber 415 is collected in the explosion-proof dust collector.

[0067] The dust removal device 4 in the second embodiment is analyzed by a fluid mechanics analysis system. The flow rate in the negative pressure pipe 42 is about 28 m / s, and the air outlet 43 outputs plasma wind with a flow rate of about 5 m / s. Fig. 9As shown, the red area near the negative pressure pipe 42 is the area with the largest flow rate, and the parts near the first dust suction port 4111 and the second dust suction port 4121 are all green areas. The flow rate of the airflow in the dust suction chamber 415 is relatively uniform, which can achieve a better dust removal effect. In addition, when the fluid mechanics analysis system is used for calculation and analysis, if there are 1,000 dust particles in the etching groove of the pole piece 6, about 1,000 particles are absorbed by the dust removal device 4 of Example 2 and reach the explosion-proof dust collector, and the dust removal rate is about 100%. Compared with the lateral dust suction structure, the dust removal rate is increased by about 10%.

[0068] According to another aspect of the present application, a laser etching system is provided, such as Fig.10 As shown, the laser etching system includes an etching roller 5, a laser device 3 and the above-mentioned dust removal device 4, which are arranged in sequence, and the etching roller 5 is used to support the pole piece 6. The laser emitted by the laser device 3 can pass through the first dust suction port 4111, the dust suction chamber 415 and the second dust suction port 4121 to shoot toward the pole piece 6, thereby realizing laser etching.

[0069] Optionally, the laser etching system further includes a housing 1 and a partition 2, wherein the etching roller 5, the dust removal device 4, the laser device 3 and the partition 2 are all arranged inside the housing 1, the dust removal device 4 and the laser device 3 are respectively located on both sides of the partition 2, and the etching roller 5 and the dust removal device 4 are located on the same side of the partition 2. The partition 2 can separate the dust removal device 4 from the laser device 3, and can better protect the laser device 3 from dust pollution and prevent dust particles from being adsorbed on the lens of the laser device 3. A through hole 21 is provided on the partition 2, so that the laser emitted by the laser device 3 can pass through the partition 2.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dust removal device, the dust removal device is used to remove dust from the pole piece, It is characterized in that The dust removal device comprises a dust removal mechanism, a negative pressure pipe and an air outlet, the negative pressure pipe is connected to the dust removal mechanism, the dust removal mechanism surrounds a dust suction chamber, the negative pressure pipe is connected to the dust suction chamber, the dust removal mechanism comprises a first plate, and a first dust suction port is opened on the first plate; The first plate is spaced apart from the pole piece, an adsorption channel is formed between the first plate and the pole piece, and the adsorption channel is connected to the dust suction chamber through the first dust suction port; The air outlet member is arranged at one side of the adsorption channel, and the air outlet member can output an airflow toward the first dust suction port into the adsorption channel.

2. The dust removal device according to claim 1, It is characterized in that The dust removal mechanism is located on one side of the pole piece in the first direction, and a side of the first plate member facing the pole piece in the first direction is in an arc-like shape.

3. The dust removal device according to claim 2, It is characterized in that The dust removal device includes two air outlet members, which are respectively located on both sides of the adsorption channel in the second direction, and the first dust suction port is located in the middle of the first plate in the second direction, and the second direction intersects with the first direction.

4. The dust removal device according to claim 3, It is characterized in that The dust removal mechanism also includes a second plate, the first plate and the second plate are arranged at intervals along the first direction, the second plate is provided with a second dust suction port facing the first dust suction port, and the second dust suction port is connected to the dust suction chamber.

5. The dust removal device according to claim 4, It is characterized in that The dust removal mechanism further includes two guide plates, both of which are fixed on a side of the second plate member facing away from the first plate member, and the two guide plates are located on both sides of the second dust suction port in the second direction; In a direction where the second plate member points toward the first plate member, a distance between the two guide plates gradually decreases.

6. The dust removal device according to claim 4, It is characterized in that The dust removal device also includes a spoiler, which is arranged inside the dust suction chamber, and the spoiler is located on the side of the first dust suction port in the second direction, and the distance between the spoiler and the first dust suction port in the first direction is greater than the distance between the spoiler and the second dust suction port in the first direction.

7. The dust removal device according to claim 3, It is characterized in that The dust removal device also includes a first fixing member and a second fixing member, the dust removal mechanism is fixed on the first fixing member, the first fixing member is slidably connected to the second fixing member, the first fixing member can slide along the first direction relative to the second fixing member, and is fixed at multiple positions of the second fixing member in the first direction.

8. The dust removal device according to claim 7, It is characterized in that The dust removal device further includes a dust concentration detector and an electrostatic eliminator, and both the dust concentration detector and the electrostatic eliminator are fixed on the first fixing member.

9. The dust removal device according to any one of claims 3 to 6, It is characterized in that The dust removal device further comprises a positive pressure pipe, wherein the positive pressure pipe and the negative pressure pipe are fixed at two ends of the dust removal mechanism in the second direction, and the positive pressure pipe is communicated with the dust suction chamber.

10. The dust removal device according to any one of claims 3 to 6, It is characterized in that The negative pressure pipe is fixed to one end of the dust removal mechanism in the second direction, and an air inlet is provided on a side of the dust removal mechanism opposite to the negative pressure pipe in the second direction, and the air inlet is communicated with the dust suction chamber.

11. A laser etching system, It is characterized in that The laser etching system comprises an etching roller, a laser device and a dust removal device according to any one of claims 1 to 10, wherein the etching roller, the dust removal device and the laser device are arranged in sequence, and the etching roller is used to support the pole piece.

12. The laser etching system according to claim 11, It is characterized in that The laser etching system also includes a shell and a partition. The etching roller, the dust removal device, the laser device and the partition are all arranged inside the shell. The dust removal device and the laser device are respectively located on both sides of the partition, and the etching roller and the dust removal device are located on the same side of the partition.