Cam transmission force control compensation polishing mechanism

Abstract

The invention discloses a cam transmission force control compensation polishing mechanism which comprises a workpiece shaft assembly and a force control compensation assembly used for driving the workpiece shaft assembly to move to achieve force control compensation, and the force control compensation assembly comprises a force control driving mechanism, a cam transmission mechanism and a connecting mechanism. The force control driving mechanism drives the connecting mechanism to move through the cam transmission mechanism, and the connecting mechanism is connected with the workpiece shaft assembly. According to the cam transmission force control compensation polishing mechanism, lead screw transmission is replaced with cam transmission, so that the overall structure is more compact, rigidity is enhanced, the mechanism is greatly simplified, precision and precision retentivity are better, disassembly, assembly and maintenance are convenient, the problem of too high cost is solved, the cost performance is higher, and the market acceptance is high.

Description

Technical Field

[0001] The invention belongs to the field of grinding and polishing, and in particular relates to a force-controlled compensation polishing mechanism. Background Art

[0002] In the 3D surface grinding and polishing of various precision parts and components such as precision molds, electronic digital products, etc., in order to reduce manufacturing difficulty and cost, and to obtain good consistency in multiple stations, the force control compensation function is often used to perform polishing operations during operation and work. That is, according to the polishing pressure of the actual contact between the consumables and the workpiece, the pressure sensor provides real-time feedback on these grinding and polishing pressures, and the CNC system compensates according to the feedback data, thereby maintaining the established grinding and polishing pressure and realizing the force control function.

[0003] Traditional force control compensation mechanisms all use guide rails and screws for transmission and servo motors for drive. When designing a force control compensation mechanism in one direction, the cost and size are acceptable. However, when it comes to force control compensation in two or three directions, or multi-dimensional force feedback, it is difficult for a mechanism based on guide rails and screws to achieve satisfactory results. This will cause the entire device to be very large and even unable to be arranged in a limited space. The mechanical structure is too complicated, making it difficult to disassemble and assemble the mechanism and inconvenient to repair. At the same time, the mechanism based on guide rails and screws has poor rigidity, making it difficult to ensure accuracy and poor accuracy retention. In addition, the mechanism based on guide rails and screws is too complicated, resulting in excessively high costs, poor cost performance, and poor market acceptance. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies and defects mentioned in the above background technology and provide a cam-driven power-controlled compensating polishing mechanism with simple and compact structure, low cost, convenient disassembly and maintenance, and higher precision.

[0005] In order to solve the above technical problems, the technical solution proposed by the present invention is:

[0006] A cam-driven force-controlled compensation polishing mechanism comprises a workpiece shaft assembly and a force-controlled compensation assembly for driving the workpiece shaft assembly to move to achieve force-controlled compensation. The force-controlled compensation assembly comprises a force-controlled drive mechanism, a cam drive mechanism and a connecting mechanism. The force-controlled drive mechanism drives the connecting mechanism to move via the cam drive mechanism, and the connecting mechanism is connected to the workpiece shaft assembly.

[0007] In the above-mentioned cam-driven force-controlled compensation polishing mechanism, preferably, the force-controlled compensation component includes a Y-direction compensation component (along the Y-axis direction) and a Z-direction compensation component (along the Z-axis direction), the Y-direction compensation component includes a Y-direction force-controlled driving mechanism, a Y-direction cam transmission mechanism and a Y-direction connecting mechanism, the Z-direction compensation component includes a Z-direction force-controlled driving mechanism, a Z-direction cam transmission mechanism and a Z-direction connecting mechanism, the Z-direction connecting mechanism is slidably arranged on the Y-direction connecting mechanism, and the workpiece shaft component is connected to the Z-direction connecting mechanism. The Y-direction force-controlled driving mechanism drives the Y-direction connecting mechanism to move through the Y-direction cam transmission mechanism, and the Z-direction force-controlled driving mechanism drives the Z-direction connecting mechanism to move through the Z-direction cam transmission mechanism, and the movement of the Y-direction connecting mechanism and the movement of the Z-direction connecting mechanism can be used to drive the workpiece shaft component to move to achieve force-controlled compensation.

[0008] In the above-mentioned cam-driven power-controlled compensating polishing mechanism, preferably, the Y-direction connecting mechanism includes a Y-direction sliding table and a Y-direction guide pair, and the Z-direction connecting mechanism includes a Z-direction sliding table and a Z-direction guide pair. The Z-direction sliding table is slidably arranged on the Y-direction sliding table through the Z-direction guide pair, and the Z-direction sliding table is connected to the workpiece axis assembly. The Y-direction guide pair is used to limit the horizontal movement of the Y-direction sliding table along the Y direction, and the Z-direction guide pair is used to limit the upward and downward movement of the Z-direction sliding table along the Z direction.

[0009] In the above-mentioned cam-driven force-controlled compensating polishing mechanism, preferably, the Z-direction force-controlled driving mechanism is arranged on the Y-direction sliding table, the Z-direction cam driving mechanism includes a Z-direction cam and a Z-direction cam follower, the Z-direction cam and the Z-direction cam follower are supported against each other, the output end of the Z-direction force-controlled driving mechanism is connected to the Z-direction cam, and the Z-direction cam follower is fixedly connected to the Z-direction sliding table. The Z-direction cam driving mechanism can be a servo motor or other similar driving motor or driving cylinder, the Z-direction cam is mounted on the output shaft of the motor, the Z-direction cam follower is mounted on the Z-direction sliding table, the servo motor drives the Z-direction cam to rotate, thereby driving the Z-direction cam follower to move, so as to drive the Z-direction sliding table to move up and down.

[0010] In the above-mentioned cam-driven force-controlled compensation polishing mechanism, preferably, the output end of the Z-direction force-controlled driving mechanism is connected to the connecting end of the Z-direction cam through a Z-direction key shaft, and the Y-direction sliding table is provided with a Z-direction through hole, in which a Z-direction bearing is embedded, and the connecting end of the Z-direction cam is sleeved in the inner ring of the Z-direction bearing. The Z-direction force-controlled driving mechanism and the Z-direction cam are connected through the Z-direction key shaft, so that the rigidity is stronger. Since the Z-direction cam is installed in a cantilever manner, if deformation occurs, it cannot fit well with the Z-direction cam follower, and cannot truly reflect the shape of the Z-direction cam, which reduces the sensitivity of compensation. The present invention can be used to improve the stability of the device and improve the compensation sensitivity and accuracy by setting a Z-direction bearing and enhancing the rigidity through bearing support.

[0011] In the above-mentioned cam-driven force-controlled compensating polishing mechanism, preferably, a tension spring for making the Z-direction cam and the Z-direction cam follower bear closely against each other is provided between the Z-direction sliding table and the Y-direction sliding table. One end of the tension spring is fixed on the Z-direction sliding table, and the other end is fixed on the Y-direction sliding table. The spring force makes the Z-direction cam and the Z-direction cam follower bear closely against each other, ensuring that the Z-direction sliding table performs a predetermined up and down movement according to the shape guided by the Z-direction cam shape, and ensures smooth movement.

[0012] In the above-mentioned cam-driven force-controlled compensating polishing mechanism, preferably, the Y-direction sliding table is arranged on the workbench platen through a Y-direction guide rail pair, the Y-direction force-controlled driving mechanism is arranged on the Y-direction sliding table, the Y-direction cam transmission mechanism includes a Y-direction cam and a Y-direction cam follower, the Y-direction cam and the Y-direction cam follower are supported on each other, the output end of the Y-direction force-controlled driving mechanism is connected to the Y-direction cam, and the Y-direction cam follower is fixed on the workbench platen. The Y-direction cam transmission mechanism can be a servo motor or other similar drive motors or drive cylinders, the Y-direction cam is mounted on the output shaft of the motor, the Y-direction cam follower is mounted on the workbench platen, the servo motor drives the Y-direction cam to rotate, thereby driving the Y-direction cam follower to move, so as to drive the Y-direction sliding table to move horizontally along the Y-axis.

[0013] In the above-mentioned cam transmission force-controlled compensation polishing mechanism, preferably, the output end of the Y-direction force-controlled driving mechanism is connected to the connecting end of the Y-direction cam through a Y-direction key shaft, and a Y-direction through hole is provided on the Y-direction sliding table, and a Y-direction bearing is embedded in the Y-direction through hole, and the connecting end of the Y-direction cam is sleeved in the inner ring of the Y-direction bearing. The Y-direction force-controlled driving mechanism and the Y-direction cam are connected through the Y-direction key shaft, so that the rigidity is stronger. Since the Y-direction cam is installed in a cantilever manner, if deformation occurs, it cannot fit well with the Y-direction cam follower, and cannot truly reflect the shape of the Y-direction cam, which reduces the sensitivity of compensation. The present invention can be used to improve the stability of the device and improve the compensation sensitivity and accuracy by setting a Y-direction bearing and enhancing the rigidity through bearing support.

[0014] In the above-mentioned cam-driven power-controlled compensating polishing mechanism, preferably, a compression spring for making the Y-direction cam and the Y-direction cam follower bear closely against each other is provided between the Y-direction sliding table and the workbench platen. One end of the compression spring is fixed on the Y-direction sliding table, and the other end is fixed on the workbench platen. The elastic force of the compression spring makes the Y-direction cam and the Y-direction cam follower bear closely against each other, ensuring that the Y-direction sliding table moves in the shape guided by the shape of the Y-direction cam, so that the Y-direction sliding table moves horizontally along the Y-axis, and ensures smooth movement.

[0015] In the above-mentioned cam-driven power-controlled compensation polishing mechanism, preferably, the workpiece shaft assembly includes a workpiece fixture, a workpiece shaft, a reducer, a bidirectional pressure sensor and a workpiece shaft driving mechanism, the workpiece fixture is arranged at one end of the workpiece shaft, the other end of the workpiece shaft is connected to the reducer, the reducer is installed on the inner ring of the bidirectional pressure sensor, the workpiece shaft driving mechanism is fixed at the lower end of the reducer and is drivingly connected to the reducer, and the Z-direction connecting mechanism (i.e., the Z-direction slide) is connected to the outer ring of the bidirectional pressure sensor. The above-mentioned workpiece shaft driving mechanism can be a servo motor or other similar drive motor or drive cylinder, whose drive shaft is connected to the input end of the reducer and drives the workpiece shaft to rotate, so that the workpiece fixture can be rotated in 3D contour.

[0016] During the operation and working process of the cam-driven force-controlled compensation polishing mechanism of the present invention, the pressure sensor of the workpiece shaft assembly provides real-time feedback on the polishing pressure of the workpiece in two directions (Y and Z directions), and the system drives the Y-direction compensation assembly and the Z-direction compensation assembly according to the algorithm to fine-tune the actual contact distance between the consumable and the workpiece, thereby realizing the force-controlled compensation function in the Y direction and the Z direction. Since the force-controlled compensation in the Y direction and the Z direction are controlled separately, a more diverse process combination is provided for the process operator during the test proofing process to adapt to more target workpiece working conditions and requirements.

[0017] The cam-driven force-controlled compensating polishing mechanism of the present invention uses a cam direct drive method, allowing the Y-direction and Z-direction transmission components to be integrated on the Y-direction sliding table, so that the volume is greatly reduced. In a limited space, it is feasible to arrange three-dimensional force control or multi-dimensional force control.

[0018] In the operation and working process of the cam direct-driven dual force control mechanism of the present invention, the pressure sensor as a feedback device can provide real-time feedback on the polishing pressure of each workpiece, so the force control compensation of the Y-axis and the Z-axis can be achieved through the actual contact between the consumables and the workpiece and the polishing pressure of the workpiece, and the compensation range of the force control compensation is ±5mm. In the above process, the two sets of cams and cam followers are very critical parts pairs, and the cam curve is a "constant speed linear" motion according to the follower, that is, the cam follower. In the initial state after power-on, the force control in the Y-axis and Z-axis directions is in the zero state, and the initial zero point position can be adjusted according to the program setting.

[0019] The cam transmission force control compensation polishing mechanism of the present invention adopts cam transmission instead of screw transmission. Since the structure of the cam transmission component is simpler and more compact, it is easier to disassemble and maintain. At the same time, the volume space of the workbench end is further reduced, so more workstations can be accommodated at the same workbench end, and force control compensation in multiple directions can be achieved. And the force control floating is controlled by the cam transmission mechanism, and its control accuracy is further improved (due to the screw transmission, more parts are involved, and the transmission of the dual force control mechanism causes the rigidity to deteriorate, which is all indirect control and compensation, so the comprehensive display accuracy is worse than that of the cam transmission mechanism). At the same time, since no expensive screw transmission is used, the coupling, screw mounting seat, precision bearing, nut seat, etc. are omitted, the number of parts, volume and weight are greatly reduced, the structure is simpler, and the processing and maintenance are relatively simple. The mechanism has greater rigidity, has a simpler disassembly and assembly method, more accurate force control, and lower cost, which brings higher production efficiency and quality.

[0020] Of course, the cam-driven force-controlled compensation polishing mechanism of the present invention can also be applied to other compensation situations, such as XY and XZ two-way compensation, and XYZ three-way compensation. Three-dimensional force also includes XY around the Y axis, XY around the X axis, XZ around the X axis, XZ around the Z axis, YZ around the Y axis, YZ around the X axis, etc. Four-dimensional force also includes XY around X and Y, XZ around X and Z, YZ around Y and Z, etc. There are also extensions to five-dimensional and six-dimensional forces.

[0021] Compared with the prior art, the advantages of the present invention are:

[0022] The cam-driven power-controlled compensating polishing mechanism of the present invention adopts cam drive instead of screw drive, so that the overall structure is more compact, the rigidity is enhanced, the mechanism is greatly simplified, the accuracy and accuracy retention are better, the disassembly and maintenance are convenient, and the problem of excessive cost is solved. It has higher cost performance and high market acceptance. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a schematic diagram of the three-dimensional structure of the cam-driven force-controlled compensating polishing mechanism of this embodiment.

[0025] Figure 2 for Figure 1 Exploded diagram.

[0026] Figure 3 for Figure 1Front view of .

[0027] Figure 4 for Figure 1 Right view of .

[0028] Figure 5 for Figure 4 Sectional view of AA in the figure.

[0029] Legend

[0030] 1. Workpiece shaft assembly; 11. Workpiece fixture; 12. Reducer; 13. Bidirectional pressure sensor; 14. Workpiece shaft driving mechanism;

[0031] 2. Z-direction compensation assembly; 21. Z-direction sliding table; 22. Z-direction cam transmission mechanism; 221. Z-direction cam; 222. Z-direction cam follower; 23. Z-direction guide rail pair; 24. Z-direction force control drive mechanism; 25. Tension spring; 26. Z-direction key shaft; 27. Z-direction bearing;

[0032] 3. Y-axis compensation assembly; 31. Y-axis sliding table; 311. Z-axis through hole; 312. Y-axis through hole; 32. Y-axis force control drive mechanism; 33. Y-axis cam transmission mechanism; 331. Y-axis cam; 332. Y-axis cam follower; 34. Y-axis guide rail pair; 35. workbench table; 36. compression spring; 37. Y-axis key shaft; 38. Y-axis bearing. DETAILED DESCRIPTION

[0033] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively and meticulously below in conjunction with the accompanying drawings and preferred embodiments of the present invention, but the protection scope of the present invention is not limited to the following specific embodiments.

[0034] It should be noted that when an element is described as being "fixed, fixed, connected or connected to" another element, it can be directly fixed, fixed, connected or connected to the other element, or it can be indirectly fixed, fixed, connected or connected to the other element through other intermediate connectors.

[0035] Unless otherwise defined, all the professional terms used below have the same meanings as those generally understood by those skilled in the art. The professional terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the scope of protection of the present invention.

[0036] Unless otherwise specified, various raw materials, reagents, instruments and equipment used in the present invention can be purchased from the market or prepared by existing methods.

[0037] Example:

[0038] The cam-driven force-controlled compensation polishing mechanism of this embodiment includes a workpiece shaft assembly 1 and a force-controlled compensation assembly for driving the workpiece shaft assembly 1 to move to achieve force-controlled compensation. The force-controlled compensation assembly includes a force-controlled driving mechanism, a cam driving mechanism and a connecting mechanism. The force-controlled driving mechanism drives the connecting mechanism to move through the cam driving mechanism, and the connecting mechanism is connected to the workpiece shaft assembly 1.

[0039] like Figure 1-Figure 5 As shown, in this embodiment, the force control compensation component includes a Y-axis compensation component 3 and a Z-axis compensation component 2, the Y-axis compensation component 3 includes a Y-axis force control drive mechanism 32, a Y-axis cam transmission mechanism 33 and a Y-axis connecting mechanism, the Z-axis compensation component 2 includes a Z-axis force control drive mechanism 24, a Z-axis cam transmission mechanism 22 and a Z-axis connecting mechanism, the Z-axis connecting mechanism is slidably arranged on the Y-axis connecting mechanism, and the workpiece shaft component 1 is connected to the Z-axis connecting mechanism.

[0040] In this embodiment, the Y-axis connecting mechanism includes a Y-axis sliding table 31 and a Y-guide guide pair 34, and the Z-axis connecting mechanism includes a Z-axis sliding table 21 and a Z-guide guide pair 23. The Z-axis sliding table 21 is slidably arranged on the Y-axis sliding table 31 through the Z-guide guide pair 23, and the Z-axis sliding table 21 is connected to the workpiece axis assembly 1.

[0041] like Figure 2 As shown, in this embodiment, the Z-direction force control driving mechanism 24 is arranged on the Y-direction sliding table 31, and the Z-direction cam transmission mechanism 22 includes a Z-direction cam 221 and a Z-direction cam follower 222. The Z-direction cam 221 and the Z-direction cam follower 222 are supported by each other, and the output end of the Z-direction force control driving mechanism 24 is connected to the Z-direction cam 221, and the Z-direction cam follower 222 is fixedly connected to the Z-direction sliding table 21.

[0042] In this embodiment, the output end of the Z-direction force control drive mechanism 24 is connected to the connecting end of the Z-direction cam 221 through the Z-direction key shaft 26. A Z-direction through hole 311 is provided on the Y-direction sliding table 31. A Z-direction bearing 27 is embedded in the Z-direction through hole 311. The connecting end of the Z-direction cam 221 is sleeved in the inner ring of the Z-direction bearing 27.

[0043] In this embodiment, a tension spring 25 is provided between the Z-direction sliding table 21 and the Y-direction sliding table 31 for tightly supporting the Z-direction cam 221 and the Z-direction cam follower 222 .

[0044] like Figure 2As shown, in this embodiment, the Y-axis sliding table 31 is arranged on the workbench table plate 35 through the Y-axis guide rail pair 34, the Y-axis force control driving mechanism 32 is arranged on the Y-axis sliding table 31, and the Y-axis cam transmission mechanism 33 includes a Y-axis cam 331 and a Y-axis cam follower 332, the Y-axis cam 331 and the Y-axis cam follower 332 are supported by each other, the output end of the Y-axis force control driving mechanism 32 is connected to the Y-axis cam 331, and the Y-axis cam follower 332 is fixed on the workbench table plate 35.

[0045] In this embodiment, the output end of the Y-axis force control drive mechanism 32 is connected to the connecting end of the Y-axis cam 331 through a Y-axis key shaft 37. A Y-axis through hole 312 is provided on the Y-axis sliding table 31. A Y-axis bearing 38 is embedded in the Y-axis through hole 312. The connecting end of the Y-axis cam 331 is sleeved in the inner ring of the Y-axis bearing 38.

[0046] In this embodiment, a compression spring 36 is provided between the Y-direction sliding platform 31 and the workbench plate 35 for making the Y-direction cam 331 and the Y-direction cam follower 332 bear tightly against each other.

[0047] In this embodiment, the workpiece shaft assembly 1 includes a workpiece fixture 11, a workpiece shaft, a reducer 12, a bidirectional pressure sensor 13 and a workpiece shaft driving mechanism 14. The workpiece fixture 11 is arranged at one end of the workpiece shaft, and the other end of the workpiece shaft is connected to the reducer 12. The reducer 12 is mounted on the inner ring of the bidirectional pressure sensor 13. The workpiece shaft driving mechanism 14 is fixedly arranged at the lower end of the reducer 12 and is drivingly connected to the reducer 12. The Z-direction connecting mechanism is connected to the outer ring of the bidirectional pressure sensor 13.

[0048] The cam transmission force control compensation polishing mechanism of this embodiment adopts cam transmission instead of screw transmission. Since the structure of the cam transmission component is simpler and more compact, it is easier to disassemble and maintain. At the same time, the volume space of the workbench end is further reduced, so more workstations can be accommodated at the same workbench end, and force control compensation in multiple directions can be achieved. And the force control floating is controlled by the cam transmission mechanism, and its control accuracy is further improved (due to the screw transmission, more parts are involved, and the transmission of the dual force control mechanism leads to poor rigidity, which is indirect control and compensation, so the comprehensive display accuracy is worse than that of the cam transmission mechanism). At the same time, since no expensive screw transmission is used, the coupling, screw mounting seat, precision bearing, nut seat, etc. are omitted, the number of parts, volume and weight are greatly reduced, the structure is simpler, and the processing and maintenance are relatively simple. The mechanism has greater rigidity, has a simpler disassembly and assembly method, more accurate force control, and lower cost, which brings higher production efficiency and quality.

[0049] Of course, the above only shows a feasible cam-driven force-controlled compensation polishing mechanism. In other embodiments, the cam-driven force-controlled compensation polishing mechanism can also be applied to more other compensation situations, such as XY and XZ two-way compensation (the structure of the Y direction and the X direction can be the same), and XYZ three-way compensation. Three-dimensional forces also include XY around the Y axis, XY around the X axis, XZ around the X axis, XZ around the Z axis, YZ around the Y axis, and YZ around the X axis. Four-dimensional forces also include XY around X and Y, XZ around X and Z, YZ around Y and Z, and so on. There are also extensions to five dimensions, six dimensions, etc. The above-mentioned other compensation situations all belong to the protection scope of the present invention.

Claims

1. A cam-driven force-controlled compensation polishing mechanism, comprising a workpiece shaft assembly (1) and a force-controlled compensation assembly for driving the workpiece shaft assembly (1) to move to achieve force-controlled compensation, characterized in that: The force control compensation component comprises a force control driving mechanism, a cam transmission mechanism and a connecting mechanism. The force control driving mechanism drives the connecting mechanism to move through the cam transmission mechanism. The connecting mechanism is connected to the workpiece shaft component (1).

2. The cam-driven force-controlled compensating polishing mechanism according to claim 1, characterized in that: The force control compensation component comprises a Y-direction compensation component (3) and a Z-direction compensation component (2); the Y-direction compensation component (3) comprises a Y-direction force control drive mechanism (32), a Y-direction cam transmission mechanism (33) and a Y-direction connection mechanism; the Z-direction compensation component (2) comprises a Z-direction force control drive mechanism (24), a Z-direction cam transmission mechanism (22) and a Z-direction connection mechanism; the Z-direction connection mechanism is slidably arranged on the Y-direction connection mechanism; and the workpiece shaft component (1) is connected to the Z-direction connection mechanism.

3. The cam-driven force-controlled compensating polishing mechanism according to claim 2, characterized in that: The Y-direction connection mechanism comprises a Y-direction sliding table (31) and a Y-direction guide rail pair (34); the Z-direction connection mechanism comprises a Z-direction sliding table (21) and a Z-direction guide rail pair (23); the Z-direction sliding table (21) is slidably arranged on the Y-direction sliding table (31) via the Z-direction guide rail pair (23); and the Z-direction sliding table (21) is connected to the workpiece shaft assembly (1).

4. The cam-driven force-controlled compensating polishing mechanism according to claim 3, characterized in that: The Z-direction force control driving mechanism (24) is arranged on the Y-direction sliding platform (31); the Z-direction cam transmission mechanism (22) comprises a Z-direction cam (221) and a Z-direction cam follower (222); the Z-direction cam (221) and the Z-direction cam follower (222) are supported against each other; the output end of the Z-direction force control driving mechanism (24) is connected to the Z-direction cam (221); and the Z-direction cam follower (222) is fixedly connected to the Z-direction sliding platform (21).

5. The cam-driven force-controlled compensating polishing mechanism according to claim 4, characterized in that: The output end of the Z-direction force control driving mechanism (24) is connected to the connection end of the Z-direction cam (221) via a Z-direction key shaft (26); a Z-direction through hole (311) is provided on the Y-direction sliding table (31); a Z-direction bearing (27) is embedded in the Z-direction through hole (311); and the connection end of the Z-direction cam (221) is sleeved in the inner ring of the Z-direction bearing (27).

6. The cam-driven force-controlled compensating polishing mechanism according to claim 4, characterized in that: A tension spring (25) is provided between the Z-direction sliding platform (21) and the Y-direction sliding platform (31) for making the Z-direction cam (221) and the Z-direction cam follower (222) bear against each other tightly.

7. The cam-driven force-controlled compensating polishing mechanism according to claim 3, characterized in that: The Y-direction sliding platform (31) is arranged on a workbench plate (35) via a Y-direction guide rail pair (34); the Y-direction force control driving mechanism (32) is arranged on the Y-direction sliding platform (31); the Y-direction cam transmission mechanism (33) comprises a Y-direction cam (331) and a Y-direction cam follower (332); the Y-direction cam (331) and the Y-direction cam follower (332) are supported against each other; the output end of the Y-direction force control driving mechanism (32) is connected to the Y-direction cam (331); and the Y-direction cam follower (332) is fixedly arranged on the workbench plate (35).

8. The cam-driven force-controlled compensating polishing mechanism according to claim 7, characterized in that: The output end of the Y-direction force control driving mechanism (32) is connected to the connecting end of the Y-direction cam (331) via a Y-direction key shaft (37); a Y-direction through hole (312) is provided on the Y-direction sliding table (31); a Y-direction bearing (38) is embedded in the Y-direction through hole (312); and the connecting end of the Y-direction cam (331) is sleeved in the inner ring of the Y-direction bearing (38).

9. The cam-driven force-controlled compensating polishing mechanism according to claim 7, characterized in that: A compression spring (36) is provided between the Y-direction sliding platform (31) and the workbench plate (35) for tightly supporting the Y-direction cam (331) and the Y-direction cam follower (332).

10. The cam-driven force-controlled compensating polishing mechanism according to any one of claims 2 to 9, characterized in that: The workpiece shaft assembly (1) comprises a workpiece fixture (11), a workpiece shaft, a reducer (12), a bidirectional pressure sensor (13) and a workpiece shaft driving mechanism (14); the workpiece fixture (11) is arranged at one end of the workpiece shaft, the other end of the workpiece shaft is connected to the reducer (12), the reducer (12) is mounted on the inner ring of the bidirectional pressure sensor (13), the workpiece shaft driving mechanism (14) is fixedly arranged at the lower end of the reducer (12) and is drivingly connected to the reducer (12), and the Z-direction connecting mechanism is connected to the outer ring of the bidirectional pressure sensor (13).

Images