Clamp and coating equipment

Abstract

The present invention discloses a jig and a coating apparatus, the jig to be used in a coating apparatus configured to coat a workpiece to be coated with a thin film, the jig comprising: a placement surface on which the workpiece to be coated is to be placed; and a protrusion protruding from the placement surface, in which the protrusion protrudes relative to the placement surface to a position higher than the workpiece to be coated placed on the jig, when the film is in contact with the protrusion, the protrusion protrudes to a position higher than the workpiece to be coated placed on the jig. A sealed space surrounded by the film, the protrusion, the placement surface, and the workpiece to be coated is formed.

Description

Technical Field

[0001] The invention relates to a clamp and a coating device. Background Art

[0002] A molding method is known in which a workpiece to be coated having a three-dimensional shape is coated with a thin film. For example, Japanese Patent Laid-Open No. 2021-62625 discloses a method for coating an automobile or the like with a thin film stretched into a flat planar shape.

[0003] When a workpiece to be coated having a three-dimensional shape is coated with a film stretched into a flat planar shape, the distance between the workpiece to be coated and the film varies depending on the portion of the workpiece to be coated, whereby the stretching amount of the film varies, thereby generating wrinkles. Summary of the invention

[0004] An object of the present invention is to provide a technique for suppressing variation in the amount of film stretching depending on the portion of a workpiece to be coated.

[0005] According to the present invention, there is provided a fixture to be used in a coating device configured to coat a workpiece to be coated with a thin film, the fixture comprising: a placement surface on which the workpiece to be coated is to be placed; and a protrusion which protrudes from the placement surface, wherein the protrusion protrudes relative to the placement surface to a position higher than the workpiece to be coated placed on the fixture, When the film is in contact with the protrusion, a sealed space surrounded by the film, the protrusion, the placement surface, and the workpiece to be coated is formed. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Figure 1 A schematic diagram of a portion of a production line.

[0007] Figure 2 is a schematic diagram of a coating apparatus according to an embodiment of the present invention.

[0008] Figure 3 is a schematic diagram of a coating apparatus according to an embodiment of the present invention.

[0009] FIG. 4A to FIG. 4D is an explanatory diagram of the configuration of the gripping unit.

[0010] Figure 5 is an explanatory diagram of the operation of the coating apparatus.

[0011] Figure 6 is an explanatory diagram of the operation of the coating apparatus.

[0012] Figure 7is an explanatory diagram of the operation of the coating apparatus.

[0013] Figure 8 is an explanatory diagram of the operation of the coating apparatus.

[0014] Fig. 9 is an explanatory diagram of the operation of the coating apparatus.

[0015] Fig.10 is an explanatory diagram of the operation of the coating apparatus.

[0016] Fig.11 is an explanatory diagram of the operation of the coating apparatus.

[0017] Fig.12 is an explanatory diagram of the operation of the coating apparatus.

[0018] Fig.13 is an explanatory diagram of the operation of the coating apparatus.

[0019] Fig.14 is an explanatory diagram of the operation of the coating apparatus.

[0020] Fig.15 is an explanatory diagram of the operation of the coating apparatus.

[0021] Fig.16 is an explanatory diagram of a detailed configuration of a jig on which a workpiece to be coated is placed.

[0022] Fig.17 is an explanatory diagram of the operation of coating a jig on which a workpiece to be coated is placed with a thin film.

[0023] Fig.18 is an explanatory diagram of the operation of coating a jig on which a workpiece to be coated is placed with a thin film.

[0024] Fig.19 is a schematic diagram showing a modified example of a jig on which a workpiece to be coated is placed. DETAILED DESCRIPTION

[0025] The embodiments will be described in detail below with reference to the accompanying drawings. In addition, the following embodiments are not intended to limit the inventions involved in the claims, and do not limit the inventions that require the combination of all the features described in the embodiments. Two or more of the multiple features described in the embodiments may be appropriately combined. In addition, the same reference numerals are given to the same or similar structures, and their repeated descriptions are omitted.

[0026] Production line configuration Figure 11 is a schematic diagram showing a part of the configuration of a production line 100 to which a coating device 2 of the present invention can be applied. In each of the drawings, arrows X and Y indicate horizontal directions perpendicular to each other, and arrow Z indicates an up-down direction (the height direction of the coating device). In the present embodiment, the workpiece 5 to be coated is described as a component such as a front bumper or a rear bumper of a vehicle (e.g., a four-wheeled vehicle), but the workpiece 5 to be coated is not limited to these, and the present invention can be applied to various objects.

[0027] The production line 100 includes a conveying system 1 for conveying a workpiece 5 to be coated, a coating device 2 for coating the workpiece 5 to be coated with a film 4, and a control device 3 for overall control of the production line 100. Arrows in the drawings indicate conveying directions. Figure 1 A state is shown in which the workpiece 5 to be coated is conveyed from the conveying path 10 on the upstream side of the conveying system 1 and is coated with the film 4 inside the coating apparatus 2 and then conveyed to the conveying path 11 on the downstream side.

[0028] The conveying system 1 is, for example, a conveying device such as a belt conveyor. The workpiece 5 to be coated is conveyed by the conveying system 1 while being held by a fixture 7 such as a tray placed on a conveying platform 6. The conveying system 1 may also include, for example, a conveying position adjustment unit that adjusts the conveying position of the conveying platform 6. In addition, the conveying system 1 is not limited to the above-mentioned conveying device, and a robot arm or the like may also be used to convey the workpiece 5 to be coated.

[0029] The coating device 2 is a device that coats a workpiece 5 to be coated with a film 4 using a configuration described later. In the present embodiment, the workpiece 5 to be coated, which is a member such as a vehicle bumper, is coated with the film 4. This makes it possible to easily decorate the member of the vehicle by, for example, changing the color of the film 4 according to the color of the vehicle. In addition, for example, by using a film 4 having a printed pattern such as a wood grain pattern or a texture such as a metallic, matte or glass texture, design characteristics can be imparted to the member of the vehicle. Alternatively, by using a film 4 having functions such as waterproofness, weather resistance, heat shielding performance, and electromagnetic wave permeability, functions can be imparted to the member of the vehicle.

[0030] The control device 3 performs overall control of the production line 100. The control device 3 includes a processing unit, a storage unit, an input / output interface (I / O), a communication unit, and the like. The processing unit is a processor represented by a CPU, and controls each device on the production line 100 by executing a program stored in the storage unit. The storage unit is a storage device such as a ROM, a RAM, or a HDD, and stores various types of control information in addition to the program to be executed by the processing unit. The I / O interface is an interface for sending and receiving signals between the processing unit and an external device. The communication unit is a communication device that communicates with the above-mentioned devices or other control devices via a communication line.

[0031] The production line 100 is not limited to the above configuration, and may also include, for example, a robot device for replacing the workpiece 5 to be coated or the fixture 7, etc., a dust removal device for removing contaminants from the workpiece 5 to be coated, a light irradiation unit for irradiating the workpiece 5 to be coated and the film 4 with light such as ultraviolet light, a drying unit for drying the workpiece 5 to be coated and the film 4, and a trimming unit for partially removing the film 4 coating the workpiece 5 to be coated using a laser or a trimming cutter, etc.

[0032] Coating equipment like Figure 1 As shown, the coating device 2 in this embodiment includes a film support unit 20, a film conveying unit 21, a chamber 22 and an air pressure regulating unit 23. In the coating device 2, the film 4 supported by the film support unit 20 is conveyed into the chamber 22 by the film conveying unit 21. Figure 1 The dashed portion of the chamber 22 shown indicates the interior of the chamber 22. The coating apparatus 2 includes the configuration described below inside the chamber 22, and coats the workpiece 5 to be coated with the film 4. During coating, the air pressure inside the chamber 22 is regulated by the air pressure regulating unit 23.

[0033] The following will be Figure 1 In addition, reference Figure 2 and Figure 3 The configuration of the coating apparatus 2 will be described. Figure 2 1 is a schematic diagram showing a part of a cross section of the coating apparatus 2 in the conveying direction of the film 4 . Figure 3 2 is a schematic diagram showing a portion of a cross section of the coating apparatus 2 in the conveying direction of the workpiece 5 to be coated. In the following description, for convenience, the conveying direction of the film 4 is referred to as the X direction and the conveying direction of the workpiece 5 to be coated is referred to as the Y direction in some cases.

[0034] The film support unit 20 supports the film 4 coating the workpiece 5 to be coated. Figure 1 and Figure 2As shown, the film support unit 20 includes a support platform 200, a support shaft 201, a winding shaft 202, a guide shaft 203, a cutter 204, a winding shaft 205, etc. The support shaft 201 provided on the support platform 200 is a shaft that rotatably supports the rolled-up film 4. The winding shaft 202 and the winding shaft 205 are shafts for winding a release film, for example, when the front and back sides of the film 4 to be coated with the workpiece 5 are laminated with a release film, etc. The guide shaft 203 is a shaft that pulls out the film 4 supported by the support shaft 201 and horizontally feeds the film 4. The cutter 204 cuts the film 4 after the film 4 is conveyed by the film conveying unit 21 described later. The cutter 204 can cut the film 4 by, for example, sliding a trimming cutter, a laser, etc. in the width direction of the film 4. The width direction of the film 4 is the axial direction of the rolled-up film 4.

[0035] As the film 4, a film including a thermoplastic resin layer can be used. The thermoplastic resin layer can be formed by, for example, various types of thermoplastic resins. In addition, the thermoplastic resin layer can contain additives such as anti-blocking agents, lubricants, antioxidants, light stabilizers, pigments, dyes and inorganic substances. The film 4 can also include a vapor deposition layer, a printing layer, a peeling layer, etc. In addition, for example, a surface of the film 4 can be coated with an adhesive, etc. The film 4 can also be laminated with, for example, a peelable protective film. In addition, tiny patterns, grooves and protrusions, etc. can be formed on the surface of the film 4 by forming, laser processing, etc.

[0036] The film conveying unit 21 conveys the film 4 above the workpiece 5 to be coated, and the workpiece 5 to be coated is conveyed inside the chamber 22. Figure 2 As shown, the film conveying unit 21 includes a front end clamping portion 210 and a film moving mechanism 211. The front end clamping portion 210 clamps the front end of the rolled film 4, and the front end is pulled out in a direction perpendicular to the axial direction of the film 4. The front end clamping portion 210 can be switched between a clamping state of clamping the front end of the film 4 and a release state of not clamping but releasing the front end of the film 4.

[0037] like Figure 2 and Figure 3 As shown, the film conveying unit 21 is disposed in the upper chamber 220 described later, and is raised and lowered in the vertical direction of the coating device 2 together with the upper chamber 220. Figure 3 As shown, the film moving mechanism 211 includes a front end support member 211a that movably supports the front end clamping portion 210 and an actuator 211b disposed on both side walls of the upper chamber 220. Figure 2As shown, the actuator 211b is arranged horizontally along the conveying direction of the film 4. The conveying direction of the film 4 is a direction perpendicular to the axial direction of the rolled film 4. The actuator 211b can be, for example, an electric cylinder or an electric ball screw mechanism. This allows the front end clamping portion 210 supported by the front end support member 211a to pull out the film 4 horizontally. Figure 2 As shown, in the conveying direction of the film 4, the length of the actuator 211b is greater than the length of the upper chamber 220. This can prevent the front end clamping portion 210 from contacting the lower chamber 221 when the upper chamber 220 is lowered.

[0038] The chamber 22 is a box-shaped device, and a vacuum atmosphere can be maintained inside the chamber. Figure 2 and Figure 3 As shown, the chamber 22 includes an upper chamber 220 having an open bottom surface and a lower chamber 221 having an open top surface. The upper chamber 220 can be raised and lowered in the up and down directions of the coating device 2, and is raised and lowered by, for example, an actuator (not shown) such as an electric cylinder or an electric ball screw mechanism provided on the outer walls of the lower chamber 221 and the upper chamber 220. When the workpiece 5 or the film 4 to be coated is conveyed, the upper chamber 220 is raised to be spaced apart from the lower chamber 221, as shown in FIG. Figure 2 In addition, when the air pressure inside the chamber 22 is adjusted by the air pressure adjustment unit 23 described below, the upper chamber 220 is lowered to contact the lower chamber 221, thereby keeping the inside of the chamber 22 airtight (see Figures 10 to 13 ).

[0039] like Figure 1 As shown, the coating device 2 includes a plurality of first clamping units 24, a plurality of second clamping units 25, a plurality of first lifting units 26, a plurality of second lifting units 27 and a workpiece lifting unit 28 inside the chamber 22. Figure 2 and Figure 3 As shown, the coating apparatus 2 includes a plurality of heating units 29 inside the chamber 22 .

[0040] like Figure 1 As shown, a plurality of first clamping units 24 and a plurality of second clamping units 25 are aligned along the film conveying direction and clamp the film 4 conveyed by the film conveying unit 21. The plurality of first clamping units 24 and the plurality of second clamping units 25 are arranged at positions opposite to each other. The plurality of first clamping units 24 clamp one side of the film 4. The plurality of second clamping units 25 clamp one side of the film 4 opposite to the side clamped by the plurality of first clamping units 24.

[0041] like Figure 2 As shown, the plurality of first clamping units 24 are disposed on a plurality of first lifting units 26 described later, and can be raised and lowered in the up-and-down direction of the coating apparatus 2 . Figure 2An example of the configuration of a plurality of first clamping units 24 is shown, but Figure 3 As shown, the plurality of second clamping units 25 also have Figure 2 The configuration of the plurality of first clamping units 24 shown is similar to the configuration. In other words, the plurality of second clamping units 25 are provided on the plurality of second lifting units 27 and can be raised and lowered in the up-and-down direction of the coating apparatus 2.

[0042] Next, refer to FIG. 4A to FIG. 4D Each of the plurality of first clamping units 24 and the plurality of second clamping units 25 will be described. FIG. 4A to FIG. 4D , the first clamping unit 24 will be described, but the second clamping unit 25 has a similar configuration. Figure 4A is a schematic diagram of the clamping unit 24 viewed in the X direction, and corresponds to Figure 3 An enlarged view of one of the clamping units 24. FIG. 4B to FIG. 4D is a schematic diagram of the first clamping unit 24 viewed in the Y direction, and corresponds to Figure 2 An enlarged view of the first clamping unit 24.

[0043] like Figure 4A As shown, the first clamping unit 24 includes a clamping portion 240 and a supporting portion 241. In the present embodiment, the clamping portion 240 is a pair of plate-like elastic members that clamp the film 4. The elastic member may be, for example, a plate-like member made of a thermoplastic resin, a thermosetting resin, etc. By clamping the film 4 between the elastic members, even if the plurality of first clamping units 24 and the plurality of second clamping units 25 are raised and lowered and the film is bent, the film can be clamped along the bent shape of the film.

[0044] The clamping portion 240 in this embodiment can be Figure 4B The clamping state of the clamping film 4 shown and Figure 4C The film 4 is not clamped but released as shown. In other words, the clamped state is a state in which the clamping portion 240 is closed, and the released state is a state in which the clamping portion 240 is open. Figure 4A As shown, the switching between the clamping state and the release state of the clamping portion 240 can also be controlled by, for example, an actuator disposed inside the support portion 241. The actuator can be an electric cylinder, an electric ball screw mechanism, etc. By configuring the clamping portion 240 to be switchable between the clamping state and the release state, the shape of the film 4 can be easily adjusted by raising and lowering the plurality of first clamping units 24 and the plurality of second clamping units 25.

[0045] The clamping portion 240 in this embodiment can also be rotatable around the Y direction. The support portion 241 may include, for example, Figure 4AThe rotation axis shown. In addition, the rotation of the rotation axis can be controlled by an actuator provided in the support portion 241. Since the clamping portion 240 is rotatable, when the plurality of first clamping units 24 and the plurality of second clamping units 25 are raised and lowered, each of the clamping units 24 and the clamping units 25 can adjust the direction of clamping the film 4. In other words, the direction of clamping the film 4 is the angle of the clamping portion 240 relative to the X direction when clamping the film 4.

[0046] like Figure 1 As shown, a plurality of first lifting units 26 are aligned along the side of the film 4 that is transported into the chamber 22, and a plurality of second lifting units 27 are aligned along the side of the film 4 that is opposite to the side on the side of the plurality of first lifting units 26. The plurality of first lifting units 26 and the plurality of second lifting units 27 are arranged at positions opposite to each other.

[0047] like Figure 2 and Figure 3 As shown, the plurality of first lifting units 26 have a plurality of first supporting members 261 that individually support the plurality of first clamping units 24, and a plurality of first moving mechanisms 260 that individually move the plurality of first supporting members 261 in the up-down direction. Figure 2 The configuration of the plurality of first lifting units 26 is shown, but the plurality of second lifting units 27 also have a similar configuration. In other words, the plurality of second lifting units 27 have a plurality of second supporting members 271 that individually support the plurality of second clamping units 25, and a plurality of second moving mechanisms 270 that individually move the plurality of second supporting members 271 in the up-down direction (see Figure 3 ). The plurality of first moving mechanisms 260 and the plurality of second moving mechanisms 270 may also be, for example, actuators. In the present embodiment, the actuator is rod-shaped and may be an electric cylinder, an electric ball screw mechanism, or the like. In addition, the plurality of first moving mechanisms 260 and the plurality of second moving mechanisms 270 may be, for example, components that can be expanded and contracted in the up and down directions of the coating device 2.

[0048] like Figure 3 As shown, in the present embodiment, the plurality of first lifting units 26 and the plurality of second lifting units 27 lift and lower the groups of the first clamping units 24 and the second clamping units 25 arranged at positions opposite to each other among the plurality of first clamping units 24 and the second clamping units 25 aligned at positions opposite to each other to the same height as each other. This makes it possible to adjust the height of the film 4 in the conveying direction according to the shape of the workpiece 5 to be coated. Therefore, the coating apparatus 2 in the present embodiment can suppress the variation of the stretching amount of the film 4 depending on the portion of the workpiece 5 to be coated, compared with the case where the film 4 is stretched into a flat planar shape while coating the workpiece 5 to be coated with the film 4.

[0049] In addition, among the plurality of first clamping units 24 and the plurality of second clamping units 25 aligned at positions opposite to each other, the Figure 3 The set of first clamping units 24 and second clamping units 25 shown disposed at positions opposite to each other (at the same position in the X direction) is raised and lowered to different heights. This allows the shape of the film 4 to be adjusted to various shapes of the workpiece 5 to be coated.

[0050] The raising and lowering of the plurality of first lifting units 26 and the plurality of second lifting units 27 can be controlled by the control device 3, for example, by measuring the shape of the workpiece 5 to be coated in advance and storing the height of each portion of the workpiece 5 to be coated in the control device 3. Alternatively, a detection unit such as a sensor for detecting the shape of the workpiece 5 to be coated may be provided inside the chamber 22 or in each of the first lifting unit 26 and the second lifting unit 27, and the lifting unit 26 and the lifting unit 27 may be raised or lowered according to the detection result of the detection unit.

[0051] The workpiece lifting unit 28 includes a workpiece lifting part 280 and a workpiece conveying part 281 supported by the workpiece lifting part 280. The workpiece lifting part 280 can lift and lower the workpiece 5 to be coated that is conveyed into the chamber 22 in the up and down direction of the coating device 2 to adjust the position of the workpiece 5 to be coated or make the workpiece 5 to be coated contact with the film 4. The workpiece conveying part 281 conveys the workpiece 5 to be coated using a plurality of rotatable shafts. The workpiece lifting part 280 and the workpiece conveying part 281 can be actuators such as electric cylinders or electric ball screw mechanisms, for example.

[0052] The plurality of heating units 29 heat the film 4 transported inside the chamber 22. Figure 3 As shown, each heating unit 29 is arranged to correspond to a group of first clamping units 24 and second clamping units 25 arranged opposite to each other, movable up and down, and adjustable. By heating the film 4 with multiple heating units 29, the consistency of the film 4 and the workpiece 5 to be coated can be improved.

[0053] Each of the plurality of heating units 29 includes a heating element 290 and a support plate 291 supporting the heating element 290. The support plate 291 is disposed on a first moving mechanism 260 that raises and lowers the first clamping unit 24, and a second moving mechanism 270 that raises and lowers the second clamping unit 25, the first moving mechanism 260 and the second moving mechanism 270 being disposed at positions relative to each other, and the support plate 291 is raised and lowered synchronously with the corresponding groups of the first clamping unit 24 and the second clamping unit 25. Each heating unit 29 is raised and lowered synchronously with the corresponding first clamping unit 24 and the second clamping unit 25, thereby enabling the distance between each heating unit 29 and the film 4 to be kept constant.

[0054] In the present embodiment, a configuration is described in which each heating unit 29 is provided on the first moving mechanism 260 that raises and lowers the first clamping unit 24, and the second moving mechanism 270 that raises and lowers the second clamping unit 25, and the first moving mechanism 260 and the second moving mechanism 270 are provided at relative positions to each other, but there is no limitation to this. For example, each of the heating units 29 may be provided on the side surface, the top surface, etc. inside the upper chamber 220. In addition, the heating unit 29 may be configured to adjust the heating position according to the shape of the film 4 using, for example, a deformable sheet heater such as a ceramic heater. In addition, each heating unit 29 may be set to a different temperature.

[0055] The air pressure regulating unit 23 includes an air pressure regulating part 230, a pipe 231, a valve 232, etc., and regulates the air pressure inside the chamber 22. The air pressure regulating part 230 includes, for example, a vacuum pump that reduces the pressure inside the chamber 22 to create a vacuum state, and a compressor that increases the pressure inside the chamber 22 using compressed air, etc. In the present embodiment, the pipe 231 is connected to the lower chamber 221, and the pressure reduction or pressure increase by the air pressure regulating part 230 can be regulated by opening and closing the valve 232. The air pressure regulating unit 23 regulates the air pressure inside the chamber 22 while the plurality of first clamping units 24 and the plurality of second clamping units 25 are clamping the film 4, and the film 4 is coated with the workpiece 5 to be coated.

[0056] By the above configuration, in the present embodiment, the plurality of first clamping units 24 are raised and lowered by the plurality of first lifting units 26, and the plurality of second clamping units 25 are raised and lowered by the plurality of second lifting units 27. Therefore, the height of the film 4 clamped by the plurality of first clamping units 24 and the plurality of second clamping units 25 relative to the workpiece 5 to be coated can be adjusted according to the shape of the workpiece 5 to be coated. Therefore, compared with the case where the three-dimensional workpiece 5 to be coated is coated with the film 4 while the film 4 is stretched into a flat planar shape, the distance between the workpiece 5 to be coated and the film 4 can be suppressed from being different depending on the portion of the workpiece 5 to be coated, and the variation in the stretching amount of the film 4 can be suppressed. This makes it possible to suppress the formation of wrinkles in the film 4.

[0057] Example of operation of a coating device An example of the operation of the coating apparatus 2 to coat the workpiece 5 to be coated with the thin film 4 will be described. Figures 5 to 15 2 is a diagram for explaining the operation of the coating apparatus 2, and shows an example of the operation from the conveyance of the film 4 and the workpiece 5 to be coated into, to the coating and the conveyance out.

[0058] First, refer to Figure 5 and Figure 6 . Figure 5The state in which the workpiece 5 to be coated and the film 4 have been conveyed into the chamber 22 is shown. Figure 6 Shown in Figure 5 The interior of the chamber 22 in the X direction. Figure 5 and Figure 6 As shown, the workpiece 5 to be coated and the film 4 are conveyed while the upper chamber 220 is elevated, and the upper chamber 220 and the lower chamber 221 are spaced apart from each other.

[0059] The workpiece 5 to be coated is transported to the workpiece lifting unit 28 disposed in the lower chamber 221 by, for example, the above-mentioned conveying system 1. After the workpiece 5 to be coated is transported into the chamber 22, its position can be adjusted by the workpiece lifting unit 28. The film 4 is transported to the top of the workpiece 5 to be coated by the film transport unit 21.

[0060] like Figure 5 and Figure 6 As shown, the film conveying unit 21 conveys the film 4 so that one side of the film 4 being conveyed passes through a path that can be clamped by the plurality of first clamping units 24, and the side of the film 4 opposite to the side on the side of the plurality of first clamping units 24 passes through a path that can be clamped by the plurality of second clamping units 25. In the present embodiment, when conveying the film 4, the plurality of first clamping units 24 and the plurality of second clamping units 25 are horizontally aligned, and the film 4 is conveyed horizontally. This makes it possible to easily convey and clamp the film 4 even in a configuration in which the film 4 is clamped at a plurality of positions.

[0061] Next, refer to Figures 7 to 9 . Figure 7 and Figure 8 The film 4 conveyed in the chamber 22 is shown in a state where it is raised and lowered according to the shape of the workpiece 5 to be coated. Fig. 9 Shown in Figure 7 and Figure 8 The interior of the chamber in the X direction. Figure 7 As shown, the plurality of first lifting units 26 and the plurality of second lifting units 27 raise and lower the corresponding plurality of first clamping units 24 and the plurality of second clamping units 25 according to the shape of the workpiece 5 to be coated. In this embodiment, when the plurality of first clamping units 24 are raised and lowered by the plurality of first lifting units 26 and the plurality of second clamping units 25 are raised and lowered by the plurality of second lifting units 27, none of the first clamping units 24 and the second clamping units 25 clamp the film 4.

[0062] like Figure 7 and Fig. 9As shown, the plurality of first lifting units 26 and the plurality of second lifting units 27 each raise and lower a group of the plurality of first clamping units 24 and the plurality of second clamping units 25 that are aligned at positions relative to each other to the same height.

[0063] like Figure 8 As shown, in the present embodiment, after the plurality of first clamping units 24 and the plurality of second clamping units 25 are raised and lowered to a height corresponding to the shape of the workpiece 5 to be coated, the plurality of first clamping units 24 and the plurality of second clamping units 25 clamp the film 4. In the present embodiment, an example is described in which the plurality of first clamping units 24 and the plurality of second clamping units 25 are in an open state when raised and lowered and then in a clamping state, but there is no limitation to this. For example, when the plurality of first clamping units 24 and the plurality of second clamping units 25 are raised and lowered, some of the plurality of first clamping units 24 and the plurality of second clamping units 25 may be clamping the film 4.

[0064] like Figure 7 and Fig. 9 As shown, the heating unit 29 is raised and lowered to maintain a specific distance together with the movement of the corresponding groups of the first clamping unit 24 and the second clamping unit 25. This allows the distance between the plurality of heating units 29 and the film 4 to be kept constant, and can prevent a specific portion of the film 4 from being overheated or insufficiently heated when the plurality of heating units 29 heat the film 4 as described later.

[0065] Next, refer to Fig.10 and Fig.11 . Fig.10 Shows the adjustment Figure 7 The height of the first clamping unit 24 and the second clamping unit 25 in the upper chamber 220 is lowered. Fig.11 Shown in Fig.10 The interior of the chamber 22 in the X direction. When the upper chamber 220 is lowered, for example Fig.10 As shown, the film 4 may be cut by the cutter 204. Since the upper chamber 220 is lowered to contact the lower chamber 221, the inner space surrounded by the upper chamber 220 and the lower chamber 221 may be kept sealed.

[0066] like Fig.10 and Fig.11 As shown, the pressure inside the chamber 22 is controlled by the following formula while the chamber 22 remains sealed: Figure 1 The air pressure regulating unit 23 is shown lowered. When the pressure is lowered, the plurality of first clamping units 24 and the plurality of second clamping units 25 are located at a height where the film 4 and the workpiece 5 to be coated are separated from each other. This allows the pressure of the entire interior of the chamber 22 to be lowered.

[0067] exist Fig.10 and Fig.11 For example, after the pressure inside the chamber 22 is reduced, the film 4 is heated by the heating unit 29. The film 4 is softened by heating, so that the conformity with the workpiece 5 to be coated can be improved.

[0068] Next, refer to Fig.12 and Fig.13 . Fig.12 A state in which the plurality of first clamping units 24 and the plurality of second clamping units 25 are lowered is shown. Fig.13 Shown in Fig.12 The interior of the chamber 22 in the X direction. Fig.12 and 13 As shown, the plurality of first lifting units 26 lower the plurality of first clamping units 24. The plurality of second lifting units 27 lower the plurality of second clamping units 25. Fig.13 As shown, since the plurality of first clamping units 24 and the plurality of second clamping units 25 are lowered, the film 4 and the protrusions 70 provided on the jig 7 on which the workpiece 5 to be coated is placed contact each other. The protrusions 70 are portions formed to protrude in the conveying direction of the film 4, and are provided on both sides of the workpiece 5 to be coated. The height of the protrusions 70 is higher than the workpiece 5 to be coated placed on the jig. When the film 4 and the protrusions 70 contact each other, the area surrounded by the film 4, the protrusions 70, the jig 7, and the workpiece 5 to be coated is separated from the area outside the area. In other words, the area surrounded by the film 4 and the jig 7 on which the workpiece 5 to be coated is a sealed space.

[0069] Figure 1 The air pressure regulating unit 23 shown increases the pressure inside the chamber 22. On the other hand, Fig.13 The space sealed by the film 4 and the clamp 7 shown is sealed and thus maintained in a reduced pressure state. Therefore, a pressure difference is generated between the space sealed by the film 4 and the clamp 7 and the external space outside the sealed space. This difference causes the film 4 to coat the workpiece 5 to be coated.

[0070] Next, refer to Fig.14 and Fig.15 . Fig.14 and Fig.15 The state in which the workpiece 5 to be coated is coated with the film 4 is shown. Fig.15 Shown in Fig.14 The interior of the chamber 22 in the X direction. Fig.12 and Fig.13After the substrate 5 is coated with the film 4, the upper chamber 220 is raised. When the upper chamber 220 is raised, the front clamping part 210 releases the film 4. After the upper chamber 220 is raised, the workpiece 5 to be coated, which has been coated with the film 4, is transported out of the chamber 22. Through the above steps, the operation from transporting the film 4 and the workpiece 5 to be coated into, coating, and transporting out is completed.

[0071] Detailed configuration of the fixture and its operation before coating refer to Figures 16 to 18 , the detailed configuration of the jig according to the present embodiment and the operation before the jig on which the workpiece to be coated is placed is coated with a thin film will be described below. Fig.16 is a schematic diagram showing the detailed configuration of the clamp. Fig.16 A half of the jig 7 is shown from the center, but in reality, the opposite side has a similar configuration. The jig 7 is a jig to be used in the coating apparatus 2 for coating the workpiece 5 to be coated with the film 4. The jig 7 includes a placement surface 1601 on which the workpiece 5 to be coated is to be placed, and a protrusion 70 protruding from the placement surface 1601. The protrusion 70 includes a first protrusion 70a and a second protrusion 70b extending along the conveying direction (X direction) in which the film 4 is conveyed over the workpiece 5 to be coated.

[0072] Fig.17 A state is shown in which the film 4 has been conveyed over the jig 7, and the workpiece 5 to be coated has been placed on the jig 7. The film 4 has an adhesive layer 1701 in the region where the workpiece 5 to be coated is coated, and has no adhesive layer 1701 in the region in contact with the protrusions 70 (first protrusions 70a, second protrusions 70b). This allows the film 4 to slide over the protrusions 70, and thus wrinkles can be prevented from occurring. Fig.18 16 is a schematic diagram showing a state in which the film 4 that has been conveyed above the jig 7 has been lowered toward the workpiece 5 to be coated. In this state, the film 4 is in contact with the protrusion 70, thereby forming a sealed space surrounded by the film 4, the protrusion 70, the placement surface 1601, and the workpiece 5 to be coated. In this way, since the protrusion 70 is formed to protrude to a higher position than the workpiece 5 to be coated placed on the jig 7 relative to the placement surface 1601, it is easier to form a sealed space. Then, when the film 4 is formed as shown in FIG. Fig.18 When the sealed space is formed, the film 4 is kept in a non-contact state with the workpiece 5 to be coated. By the clamp according to this embodiment, the film and the workpiece to be coated can be kept close to each other before they come into contact with each other. Therefore, the film stretching amount can be suppressed from varying with the portion of the workpiece to be coated.

[0073] In addition, if Fig.16 As shown, the protrusion 70 may further include a third protrusion 70c that seals and connects the end of the first protrusion 70a and the end of the second protrusion 70b. Fig.16 A fourth protrusion similar to the third protrusion 70c is provided on the opposite side not shown in the figure. By providing the third protrusion 70c and the fourth protrusion, the area surrounded by the protrusion 70 is formed, so that the sealed space can be reliably formed due to the contact between the film 4 and the protrusion 70.

[0074] Furthermore, in the case of a film in which tension is applied in the Y direction due to residual stress during film manufacturing, such as Fig.17 As shown in FIG. 1 , relaxation occurs in the central portion of the film 4. On the other hand, in the case of a film that is not subjected to tension in the Y direction, as shown in FIG. Fig.18 As shown, when the film 4 is brought into contact with the protrusion 70, tension is applied in the Y direction, and the slack in the film 4 disappears. In the case of a configuration in which the adhesive layer 1701 is provided in the area in contact with the protrusion 70, the film 4 is not allowed to move in the Y direction, and the slack still exists. However, by adopting a configuration in which the adhesive layer 1701 is not provided in the area in contact with the protrusion 70 as in the present embodiment, it is easier to eliminate the slack. In addition, since the adhesive layer only needs to be provided in a partial area of ​​the film 4, the amount of the adhesive layer used can be reduced. This helps to reduce costs.

[0075] exist Figures 16 to 18 In the embodiment, the case where the workpiece 5 to be coated and the jig 7 have a curved shape is described, but the case where Fig.19 The box-shaped fixture 1900 shown. The protrusion 1901 protrudes from the placement surface 1902 in a peripheral shape to surround the workpiece 1903 to be coated, and protrudes to a position higher than the height of the workpiece 5 to be coated. When the film 4 contacts the protrusion 1901, a sealed space surrounded by the film 4, the placement surface 1902, the workpiece 1903 to be coated, and the protrusion 1901 can be formed.

[0076] Air pressure regulation operation Next, the air pressure adjustment operation will be described. Fig.13 As shown in the figure, the chamber 22 accommodates the workpiece 5 to be coated and defines a space (sealed space) sealed by the film 4 and the fixture 7, and an external space outside the sealed space, and the film 4 serves as a boundary. Before the space (sealed space) sealed by the film 4 and the fixture 7 is formed, the air pressure regulating unit 23 adjusts the inside of the chamber 22 to a vacuum state. After the space (sealed space) sealed by the film 4 and the fixture 7 is formed, the external space outside the sealed space is adjusted to an atmospheric pressure state or a compressed air state (i.e., the pressure is increased). Due to the pressure difference between the two spaces, coating is performed with the film 4.

[0077] In addition, with the jig according to the present embodiment, when the air pressure inside the chamber 22 is adjusted, there is no pressure difference between the upper and lower parts of the jig 7, and equal pressure is applied, so there is no need to reinforce the jig 7 itself. Therefore, by making the inside of the jig 7 hollow, etc., the weight of the jig 7 can be reduced. In addition, with the jig according to the present embodiment, there is no need to raise the jig 7 to bring the workpiece 5 to be coated and the film 4 into contact with each other, so there is no need to provide the workpiece lifting unit 28. This makes it possible to reduce the number of components and reduce costs.

[0078] Furthermore, in the present embodiment, an example is described in which the film 4 is conveyed according to the shape of the workpiece 5 to be coated using the plurality of first gripping units 24 and the plurality of second gripping units 25, but there is no limitation thereto. If the jig 7 is not provided with the protrusion 70, the film 4 can be conveyed according to the shape of the workpiece 5 to be coated, and if the jig 7 is provided with the protrusion 70, such conveying is not required. For example, if Figures 16 to 19 The fixture 7 (or fixture 1900) shown in FIG. 1 includes a protrusion 70 (or protrusion 1901), and then the protrusion 70 (or protrusion 1901) can be used. Figure 2 The film conveying unit 21 shown in FIG. 2 or the like is used instead of a plurality of first gripping units 24 and a plurality of second gripping units 25 to convey the film 4 in the horizontal direction (X direction) above the workpiece 5 to be coated in the chamber 22 .

[0079] In the above-described embodiment, an example is described in which the pressure inside the chamber 22 is reduced by the air pressure regulating unit 23 and then increased to coat the workpiece 5 to be coated with the film 4. The method of coating the workpiece 5 to be coated with the film 4 is not limited thereto. For example, the workpiece 5 to be coated with the film 4 may also be coated without heating. Alternatively, the pressure in the lower chamber 221 may be reduced via the film 4 while the upper chamber 220 is maintained at atmospheric pressure, and the workpiece 5 to be coated may be coated with the film 4 due to the pressure difference between the lower chamber 221 and the upper chamber 220. In addition, the workpiece 5 to be coated may be coated with the film 4 without reducing the pressure inside the chamber 220. For example, the workpiece 5 to be coated may also be coated with the film 4 by pressurizing the film 4 with compressed air or the like from the side of the film 4 opposite to the side of the workpiece 5 to be coated. Alternatively, the workpiece 5 to be coated may be coated by pressing the film 4 against the workpiece 5 to be coated using a mold or the like.

[0080] According to the present invention, the film and the workpiece to be coated can be kept close to each other before the film and the workpiece to be coated come into contact with each other. Therefore, the film stretching amount can be suppressed from varying with the portion of the workpiece to be coated.

[0081] The invention is not limited to the foregoing embodiments, and various changes / modifications may be made within the scope of the spirit of the invention.

Claims

1. A fixture to be used in a coating device configured to coat a workpiece to be coated with a thin film, the fixture comprising: placing a surface on which the workpiece to be coated will be placed; as well as a protrusion which protrudes from the placement surface, wherein the protrusion protrudes relative to the placement surface to a position higher than the workpiece to be coated placed on the fixture, When the film is in contact with the protrusion, a sealed space surrounded by the film, the protrusion, the placement surface, and the workpiece to be coated is formed.

2. The clamp according to claim 1, wherein: When the sealed space is formed, the film does not come into contact with the workpiece to be coated.

3. The clamp according to claim 1, wherein: The protrusions include a first protrusion and a second protrusion extending along a conveying direction in which the thin film is conveyed over the workpiece to be coated.

4. The clamp according to claim 3, wherein: The protrusion further includes a third protrusion connecting an end portion of the first protrusion and an end portion of the second protrusion.

5. The clamp according to claim 4, wherein: The protrusion protrudes from the placement surface in a peripheral shape.

6. The clamp according to claim 1, wherein: The film includes an adhesive layer in a region where the workpiece to be coated is to be coated, and does not include the adhesive layer in a region where it is to be in contact with the protrusion.

7. A coating device, comprising the fixture according to claim 1, wherein the coating device comprises: a chamber configured to form the sealed space and an external space outside the sealed space, the film serving as a boundary; a conveying unit configured to convey the film above the workpiece to be coated inside the chamber; an air pressure regulating unit configured to regulate the air pressures in the sealed space and the external space; as well as A workpiece lifting unit is configured to lift and lower the workpiece to be coated inside the chamber.

8. The coating device according to claim 7, wherein: Before forming the sealed space, the air pressure adjustment unit adjusts the interior of the chamber to a vacuum state.

9. The coating device according to claim 8, wherein: After the sealed space is formed, the air pressure adjusting unit increases the pressure in the external space.

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