Evaporation coating equipment

Abstract

The evaporation coating equipment comprises a vacuum chamber, an evaporation source and a to-be-coated body are arranged in the vacuum chamber, the to-be-coated body is located on the upper portion in the vacuum chamber, the evaporation source is located on the lower portion in the vacuum chamber and comprises a crucible, and the crucible comprises a crucible body and a crucible cover. The crucible cover is arranged on the crucible body in a covering mode, an opening is formed in the crucible cover, the opening vertically penetrates through the crucible cover, and the opening in the upper top face of the crucible cover is a long and narrow opening. The to-be-evaporated material is arranged in the evaporation source, when the evaporation source is heated, the internal air pressure is increased, the melted and evaporated to-be-evaporated material rushes out of the opening upwards in an accelerated mode under the action of pressure and is combined with a to-be-coated body passing through the upper portion of the evaporation source, and a firm coating can be formed.

Description

Technical Field

[0001] The invention relates to the field of evaporation coating, and in particular to an evaporation coating device. Background Art

[0002] Vacuum evaporation technology is widely used in the field of decorative coating on the surface of household appliances, clocks and watches, arts and crafts, toys, car lights, reflectors, instruments and meters, and functional coating of tools and molds. Through vacuum evaporation technology, various metal and non-metal films can be deposited on the surface of plastic parts to obtain very thin surface coatings with strong adhesion and good uniformity. Evaporation is a vapor deposition technology carried out under vacuum conditions. Its basic principle is: in a vacuum environment, a certain heating evaporation method is used to evaporate and gasify the coating material (or film material), and then these vaporized particles fly to the surface of the substrate and condense into a film. This process has the advantages of simple film formation method, high film purity and density, and unique film structure and performance. The evaporation source is the core component in vacuum evaporation, which is responsible for heating the film material and vaporizing it. Common evaporation source heating methods include resistance heating, electron beam heating, high-frequency induction heating, arc heating and laser heating. The evaporation source is used to perform evaporation operations to vaporize the coating material and deposit it on the surface of the substrate to form a thin film. However, in the current products obtained by evaporation, the bonding strength between the plated material and the polymer material is still prone to problems, so the existing technology needs to be improved and enhanced. Summary of the invention

[0003] In view of the above-mentioned deficiencies in the prior art, an object of the present invention is to provide an evaporation coating device.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0005] The present invention provides an evaporation coating device, comprising a vacuum chamber, wherein an evaporation source and a film-to-be-coated body are arranged in the vacuum chamber, wherein the film-to-be-coated body is located in the upper part of the vacuum chamber, and the evaporation source is located in the lower part of the vacuum chamber, wherein the evaporation source comprises a crucible, wherein the crucible comprises a crucible body and a crucible cover, wherein the crucible cover is arranged on the crucible body, wherein an opening is arranged on the crucible cover, wherein the opening passes through the crucible cover from top to bottom, and wherein the opening on the upper top surface of the crucible cover is a long and narrow opening.

[0006] In a preferred embodiment, in the evaporation coating equipment, the area of ​​the upper top surface of the crucible cover is larger than the area of ​​the lower bottom surface of the crucible cover, the opening passes through the upper top surface of the crucible cover and the lower bottom surface of the crucible cover, the opening is located in the middle of the upper top surface and the middle of the lower bottom surface, and the crucible cover is funnel-shaped from the upper top surface to the lower bottom surface.

[0007] In a preferred embodiment, in the evaporation coating equipment, the upper top surface of the crucible cover is elliptical, and the lower bottom surface of the crucible cover is circular.

[0008] In a preferred embodiment, the evaporation coating equipment, wherein the short axis length of the upper top surface of the crucible cover is not less than the diameter of the lower bottom surface of the crucible cover, and the crucible cover is provided with mutually attractive magnetic bodies on the front and rear sides of the long axis direction or the short axis direction of the upper top surface, and the opening is arranged along the short axis direction or the long axis direction of the upper top surface.

[0009] In a preferred embodiment, in the evaporation coating equipment, the outlet opening on the upper top surface of the crucible cover is smaller than the inlet opening on the lower bottom surface of the crucible cover, and the cross-section of the opening on the crucible cover is a trapezoid.

[0010] In a preferred embodiment, in the evaporation coating equipment, the upper top surface of the crucible cover is circular, the lower bottom surface of the crucible cover is circular, the upper top surface of the crucible cover and the lower bottom surface of the crucible cover are aligned up and down and have equal areas, and the longitudinal section of the opening is rectangular or trapezoidal.

[0011] In a preferred embodiment, in the evaporation coating equipment, a diverter plate is arranged in the opening, the lower surface of the diverter plate is a convex arc surface, the upper surface of the diverter plate is a flat surface, and the two ends of the diverter plate are respectively fixed on the side walls on both sides of the opening.

[0012] In a preferred embodiment, in the evaporation coating equipment, the crucible body is in a cylindrical shape, and the diameter of the lower bottom surface of the crucible cover is larger than the diameter of the crucible body.

[0013] In a preferred embodiment, in the evaporation coating equipment, the inner diameter of the crucible body is 100 mm to 120 mm, and the outer diameter of the crucible body is 120 mm to 140 mm.

[0014] In a preferred embodiment, in the evaporation coating equipment, the distance between the upper top surface of the crucible cover and the lower bottom surface of the crucible cover is 40 mm to 150 mm, the crucible body is a silicon nitride or silicon carbide crucible body, and the crucible cover is a graphite crucible cover.

[0015] Compared with the prior art, the present invention provides an evaporation coating device, including a vacuum chamber, wherein an evaporation source and a body to be coated are arranged in the vacuum chamber, wherein the body to be coated is located in the upper part of the vacuum chamber, wherein the evaporation source is located in the lower part of the vacuum chamber, wherein the evaporation source includes a crucible, wherein the crucible includes a crucible body and a crucible cover, wherein the crucible cover is arranged on the crucible body, wherein an opening is arranged on the crucible cover, wherein the opening passes through the crucible cover from top to bottom, and wherein the opening on the upper top surface of the crucible cover is a long and narrow opening. The evaporation source of the present invention is provided with a material to be evaporated, and when the evaporation source is heated, the internal air pressure increases, and the melted and evaporated material to be evaporated is accelerated to rush upward from the opening under the action of pressure, and is combined with the body to be coated passing through the upper part of the evaporation source, thereby forming a firm coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 This is a schematic structural diagram of the evaporation coating equipment provided by the present invention.

[0018] Figure 2 A schematic front view of the structure of a preferred embodiment of the evaporation coating equipment provided by the present invention.

[0019] Figure 3 A schematic top view of the structure of a preferred embodiment of the evaporation coating equipment provided by the present invention.

[0020] Figure 4 This is a front structural schematic diagram of another preferred embodiment of the evaporation coating equipment provided by the present invention.

[0021] Figure 5 A schematic top view of the structure of another preferred embodiment of the evaporation coating equipment provided by the present invention.

[0022] Figure 6 A schematic cross-sectional view of another preferred embodiment of the evaporation coating equipment provided by the present invention.

[0023] Description of Figure Numbers:

[0024] Vacuum Chamber 100

[0025] Evaporation source 200

[0026] Object to be coated 300

[0027] Crucible body 10

[0028] Crucible cover 20

[0029] Opening 30

[0030] Diverter plate 31

[0031] Magnetic body 40 DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0034] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0035] like Figure 1 , Figure 2 and Figure 3As shown, an evaporation coating device provided by the present invention includes a vacuum chamber 100, in which an evaporation source 200 and a body to be coated 300 are arranged, the body to be coated 300 is located in the upper part of the vacuum chamber 100, and the evaporation source 200 is located in the lower part of the vacuum chamber 100, the evaporation source 200 includes a crucible, and the crucible includes a crucible body 10 and a crucible cover 20, the crucible cover 20 is covered on the crucible body 10, and an opening 30 is provided on the crucible cover 20, the opening 30 passes through the crucible cover 20 from top to bottom, and the opening 30 on the upper top surface of the crucible cover 20 is a long and narrow opening 30. The evaporation source 200 of the present invention is provided with the material to be evaporated inside. When the evaporation source 200 is heated, the internal air pressure increases, and the melted and evaporated material to be evaporated is accelerated upward from the opening 30 under the action of pressure, and combines with the film body 300 to be plated passing through the upper part of the evaporation source 200 to form a solid coating.

[0036] In a preferred embodiment, the crucible body 10 of the crucible of the evaporation source 200 is a hollow cylinder, and the crucible cover 20 is covered on the crucible body 10 . The surface of the crucible cover 20 has strip-shaped holes.

[0037] like Figure 2 , Figure 3As shown, in a preferred embodiment provided by the present invention, the crucible comprises a crucible body 10 and a crucible cover 20, wherein the crucible cover 20 is disposed on the crucible body 10, and the crucible cover 20 has an upper top surface and a lower bottom surface, the area of ​​the upper top surface of the crucible cover 20 is larger than the area of ​​the lower bottom surface of the crucible cover 20, and the crucible cover 20 is provided with a narrow and long opening 30, wherein the opening 30 passes through the upper top surface of the crucible cover 20 and the lower bottom surface of the crucible cover 20, and the opening 30 is located in the middle of the upper top surface and the middle of the lower bottom surface, and the crucible cover 20 is funnel-shaped from the upper top surface to the lower bottom surface. The present application adopts a crucible as an evaporation source 200, and a crucible cover 20 is arranged on the crucible body 10. The crucible cover 20 is in the shape of a funnel. The material to be plated is placed inside the crucible body 10. After the material to be plated is heated and melted, steam is formed and rushes out from the opening 30 to form on the film. Since the opening 30 on the top of the crucible is narrow, the pressure of the material to be plated inside the crucible body 10 is large, and it rushes out of the opening 30, so that the material to be plated is firmly combined on the target film, thereby forming a firm coating. Further, in a preferred embodiment provided by the present invention, the crucible body 10 is in the shape of a cylinder, and the diameter of the lower bottom surface of the crucible cover 20 is larger than the diameter of the crucible body 10, so that the crucible cover 20 can be covered on the crucible body 10. Further, in a preferred embodiment provided by the present invention, the upper top surface of the crucible cover 20 is elliptical, and the lower bottom surface of the crucible cover 20 is circular. In the evaporation equipment, there are multiple crucibles arranged side by side. The top of the crucible cover 20 of the present application is elliptical. Since the upper top surface of the ellipse is elliptical, the side-by-side elliptical structure can fill the gap between the crucibles, thereby preventing uneven coating on the film.

[0038] Specifically, in a preferred embodiment provided by the present invention, the inner diameter of the crucible body 10 is 100 mm to 120 mm, and the outer diameter of the crucible body 10 is 120 mm to 140 mm. For example, the inner diameter of the crucible body 10 can be 100 mm, and the outer diameter of the crucible body 10 can be 120 mm. Such a design can ensure that the material to be plated placed in the crucible body 10 will not remain at the bottom of the crucible after plating, because if it remains at the bottom, after the evaporation is stopped and the crucible is cooled, the remaining material to be plated will cool and solidify, which is easy to damage the crucible. Further, in a preferred embodiment provided by the present invention, the distance between the upper top surface of the crucible cover 20 and the lower bottom surface of the crucible cover 20 is 40 mm to 150 mm. Such a height can be conducive to stabilizing the structure of the crucible cover 20 on the one hand, and at the same time prevent the crucible cover 20 from being pushed open by the pressure generated by the heating of the crucible. Further, in a preferred embodiment provided by the present invention, the length of the opening 30 is 30 mm to 100 mm, within which the evaporation coating efficiency can be improved, and on the other hand, the crucible structure can be stabilized. The width of the opening 30 is 20 mm to 50 mm, and such a range can maximize the bonding strength between the material to be plated and the film. Specifically, the length of the opening 30 can be 50 mm, and the width of the opening 30 can be 20 mm.

[0039] Further, in a preferred embodiment of the present invention, the minimum width of the upper top surface of the crucible cover 20 is not less than the diameter of the lower bottom surface of the crucible cover 20. Further, in a preferred embodiment of the present invention, the opening 30 is a rectangular opening 30. Further, in a preferred embodiment of the present invention, the crucible body 10 is a silicon nitride or silicon carbide crucible body, and the crucible cover 20 is a graphite crucible cover. Graphite is resistant to high temperatures, and its high temperature resistance reaches 1500°. It can be used on the crucible for a long time, thereby improving the life of the crucible cover. Further, in a preferred embodiment of the present invention, the short axis length of the upper top surface of the crucible cover 20 is not less than the diameter of the lower bottom surface of the crucible cover 20, and the crucible cover 20 is provided with mutually attractive magnetic bodies 40 on the front and rear sides of the long axis direction or the short axis direction of the upper top surface, and the opening 30 is provided along the short axis direction or the long axis direction of the upper top surface. The outlet length of the opening 30 on the top surface of the crucible cover 20 is greater than the inlet length of the opening 30 on the bottom surface of the crucible cover 20. In the evaporation source 200, multiple crucibles are arranged side by side, and adjacent crucible covers 20 can attract each other, so that the multiple openings 30 are arranged in a straight line or in parallel for evaporation.

[0040] like Figure 4 , Figure 5 and Figure 6As shown, in another preferred embodiment provided by the present invention, the crucible comprises a crucible body 10 and a crucible cover 20, the crucible cover 20 is arranged on the crucible body 10, the crucible cover 20 is provided with an opening 30 which passes through from top to bottom, the outlet of the opening 30 on the upper top surface of the crucible cover 20 is smaller than the inlet of the opening 30 on the lower bottom surface of the crucible cover 20, and the cross-section of the opening 30 on the crucible cover 20 is a trapezoid. The linear evaporation source 200 of the present application includes a crucible, and a crucible cover 20 is arranged above the crucible body 10, and the crucible cover 20 has a certain thickness. An upward opening 30 is formed on the crucible cover 20, and the opening 30 is responsible for allowing the material to be plated in the crucible body 10 to melt and vaporize and then spray out through the opening 30, and directly spray onto the target film that needs to be plated. Because the crucible body 10 only has the opening 30 of the crucible cover 20, the internal air pressure is large, and this narrow and long trapezoidal structure makes the evaporated gas output faster and more stable, which is conducive to making the obtained film have a higher bonding force with the material to be plated. Further, the crucible for the evaporation source 200 provided by the present invention, the upper top surface of the crucible cover 20 is circular, the lower bottom surface of the crucible cover 20 is circular, the upper top surface of the crucible cover 20 and the lower bottom surface of the crucible cover 20 are aligned up and down and have equal areas, and the longitudinal section of the opening 30 is rectangular or trapezoidal.

[0041] Furthermore, in another preferred embodiment provided by the present invention, the crucible body 10 is in the shape of a cylinder, and the diameter of the lower bottom surface of the crucible cover 20 is larger than the diameter of the crucible body 10, so that the crucible cover 20 can be covered on the crucible body 10. Further, in another preferred embodiment provided by the present invention, the inner diameter of the crucible body 10 is 100mm-120mm, and the outer diameter of the crucible body 10 is 120mm-140mm. For example, it can be adopted that the inner diameter of the crucible body 10 is 100mm, and the outer diameter of the crucible body 10 is 120mm. Such a design can ensure that the material to be plated placed in the crucible body 10 will not remain at the bottom of the crucible after plating, because if it remains at the bottom, after the evaporation is stopped and the crucible is cooled, the remaining material to be plated will cool and solidify, which is easy to damage the crucible. Further, in another preferred embodiment provided by the present invention, the distance between the upper top surface of the crucible cover 20 and the lower bottom surface of the crucible cover 20 is 40mm to 150mm. Such a height can be beneficial to stabilize the structure of the crucible cover 20 on the one hand, and can prevent the crucible cover 20 from being pushed open by the pressure generated by the heating of the crucible. Further, in another preferred embodiment provided by the present invention, the length of the opening 30 is 30mm to 100mm, within this range, the evaporation coating efficiency can be improved, and on the other hand, the crucible structure can be stabilized. The width of the opening 30 is 20mm to 50mm, and such a range can make the bonding force between the material to be plated and the film the highest. Specifically, the length of the opening 30 on the upper top surface can be 50mm, and the width of the opening 30 on the upper top surface can be 20mm. Further, in another preferred embodiment provided by the present invention, the opening 30 is a rectangular opening 30. Furthermore, in another preferred embodiment provided by the present invention, the crucible body 10 is a silicon nitride or silicon carbide crucible body, and the crucible cover 20 is a graphite crucible cover. Graphite is resistant to high temperatures, and its high temperature resistance reaches 1500°. It can be used on the crucible for a long time, thereby increasing the life of the crucible cover.

[0042] Further, in another preferred embodiment provided by the present invention, a diverter plate 31 is provided in the opening 30, the lower surface of the diverter plate 31 is a convex arc surface, the upper surface of the diverter plate 31 is a flat surface, and the two ends of the diverter plate 31 are respectively fixed to the side walls on both sides of the inside of the opening 30. The diverter plate 31 can be arranged at an angle of 45°, two can be arranged, the two can be arranged in parallel or crosswise, and of course, generally one is sufficient. The provision of the diverter plate 31 can reduce the quality requirements of the crucible cover 20. The crucible cover 20 is pressed on the crucible body 10 by gravity. In order to provide sufficient pressure, the crucible cover 20 is often set to be heavier. The design of the diverter plate 31 can increase the internal pressure due to heating during evaporation, forming evaporation gas to evaporate outward through the opening 30. When passing through the diverter plate 31, the flow rate through the upper surface is faster, and the flow rate through the lower surface is slower, forming a pressure difference, so that the crucible cover 20 is subjected to a downward pressure, thereby reducing materials and reducing production costs. The lighter crucible cover 20 is also more convenient to operate.

[0043] In summary, the present invention provides an evaporation coating device, including a vacuum chamber, wherein an evaporation source and a body to be coated are arranged in the vacuum chamber, wherein the body to be coated is located in the upper part of the vacuum chamber, wherein the evaporation source is located in the lower part of the vacuum chamber, wherein the evaporation source includes a crucible, wherein the crucible includes a crucible body and a crucible cover, wherein the crucible cover is arranged on the crucible body, wherein an opening is arranged on the crucible cover, wherein the opening passes through the crucible cover from top to bottom, and wherein the opening on the upper top surface of the crucible cover is a long and narrow opening. The evaporation source of the present invention is provided with a material to be evaporated inside, and when the evaporation source is heated, the internal air pressure increases, and the melted and evaporated material to be evaporated is accelerated to rush out of the opening upwards under the action of the pressure, and is combined with the body to be coated passing through the upper part of the evaporation source, thereby forming a firm coating.

[0044] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. An evaporation coating device, characterized in that: It includes a vacuum chamber, in which an evaporation source and a body to be coated are arranged, the body to be coated is located in the upper part of the vacuum chamber, the evaporation source is located in the lower part of the vacuum chamber, the evaporation source includes a crucible, the crucible includes a crucible body and a crucible cover, the crucible cover is arranged on the crucible body, an opening is arranged on the crucible cover, the opening passes through the crucible cover from top to bottom, and the opening on the upper top surface of the crucible cover is a long and narrow opening.

2. The evaporation coating equipment according to claim 1, characterized in that: The area of ​​the upper top surface of the crucible cover is larger than the area of ​​the lower bottom surface of the crucible cover, the opening passes through the upper top surface of the crucible cover and the lower bottom surface of the crucible cover, the opening is located in the middle of the upper top surface and the middle of the lower bottom surface, and the crucible cover is funnel-shaped from the upper top surface to the lower bottom surface.

3. The evaporation coating equipment according to claim 2, characterized in that: The upper top surface of the crucible cover is elliptical, and the lower bottom surface of the crucible cover is circular.

4. The evaporation coating equipment according to claim 3, characterized in that: The short axis length of the upper top surface of the crucible cover is not less than the diameter of the lower bottom surface of the crucible cover, and the crucible cover is provided with mutually attractive magnetic bodies on the front and rear sides of the long axis direction or the short axis direction of the upper top surface, and the opening is arranged along the short axis direction or the long axis direction of the upper top surface.

5. The evaporation coating equipment according to claim 1, characterized in that: The outlet opening on the upper top surface of the crucible cover is smaller than the inlet opening on the lower bottom surface of the crucible cover, and the cross section of the opening on the crucible cover is a trapezoid.

6. The evaporation coating equipment according to claim 5, characterized in that: The upper top surface of the crucible cover is circular, the lower bottom surface of the crucible cover is circular, the upper top surface of the crucible cover and the lower bottom surface of the crucible cover are aligned up and down and have equal areas, and the longitudinal section of the opening is rectangular or trapezoidal.

7. The evaporation coating equipment according to claim 6, characterized in that: A diverter plate is arranged in the opening, the lower surface of the diverter plate is a convex arc surface, the upper surface of the diverter plate is a flat surface, and the two ends of the diverter plate are respectively fixed on the side walls on both sides of the opening.

8. The evaporation coating equipment according to any one of claims 1 to 7, characterized in that: The crucible body is in a cylindrical shape, and the diameter of the lower bottom surface of the crucible cover is larger than the diameter of the crucible body.

9. The evaporation coating equipment according to claim 8, characterized in that: The inner diameter of the crucible body is 100 mm to 120 mm, and the outer diameter of the crucible body is 120 mm to 140 mm.

10. The evaporation coating equipment according to claim 9, characterized in that: The distance between the upper top surface of the crucible cover and the lower bottom surface of the crucible cover is 40 mm to 150 mm, the crucible body is a silicon nitride or silicon carbide body, and the crucible cover is a graphite cover.

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