Coating device and coating method for aluminum-based material
By removing the alumina film on the surface of the aluminum-based material and plating the aluminum nitride-titanium nitride-vana zirconium oxide composite film, the problem of insufficient binding force caused by the residue of the alumina film is solved, and the wear resistance and corrosion resistance of the workpiece are improved and insulation properties.
Patent Information
- Application Number
- CN202411298665.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-18
- Publication Date
- 2024-12-24
AI Technical Summary
The existing surface reinforcement methods of aluminum-based materials are prone to residual aluminum oxide film, resulting in insufficient bonding strength between the reinforcement film and the aluminum substrate.
Provide a coating device and method, including a coating power supply and a film removal power supply, remove the alumina film by a vacuum environment and argon bombardment, and pre-plating the aluminum nitride film on the surface of the aluminum-based material, followed by alumina nitride-titanium nitride -Vanadium nitride-zirconia composite film to ensure no residue of aluminum oxide film.
The bonding force between the workpiece and the reinforcement film is improved, the probability of bubbles and delamination is reduced, and the wear resistance, corrosion resistance and insulation properties of the workpiece are enhanced.
Smart Images

Figure CN119177425A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of film coating technology, and in particular to a film coating device and a film coating method for aluminum-based materials. Background Art
[0002] Aluminum is increasingly used in the fields of mobile phone frames, watch cases, etc. due to its advantages of low density, light weight, easy precision molding by die casting and other methods, and low cost. However, since aluminum-based materials are soft and have poor rust resistance, they must be surface-strengthened.
[0003] However, the currently commonly used aluminum surface strengthening method is likely to leave an aluminum oxide film between the strengthening film and the aluminum substrate, thereby resulting in insufficient bonding between the aluminum substrate and the strengthening film. Summary of the invention
[0004] The present application provides a coating device and a coating method for aluminum-based materials to enhance the bonding strength between a strengthening film and a workpiece surface.
[0005] The present application provides: a coating device for aluminum-based materials, comprising:
[0006] The furnace structure is provided with a closed accommodating cavity, and the accommodating cavity is used to provide a vacuum environment;
[0007] A workpiece rack is rotatably mounted on the furnace structure and is located in the accommodating cavity;
[0008] A first target material is mounted on the furnace structure and is located in the accommodating cavity, wherein the first target material is opposite to and coaxially arranged with the workpiece holder;
[0009] A plurality of second targets are mounted on the furnace structure and located in the accommodating cavity, and the plurality of second targets are arranged around the first target;
[0010] A coating power supply, comprising a first positive electrode and a first negative electrode, wherein the first positive electrode is respectively connected to the workpiece rack and the furnace structure, a first switch and a second switch are connected between the first positive electrode and the workpiece rack, a third switch is connected between the first positive electrode and the furnace structure, the first positive electrode is grounded, the first negative electrode is respectively connected to the workpiece rack, the first target material and the plurality of second target materials, a fourth switch is connected between the first negative electrode and the workpiece rack, and a corresponding switch is connected between the first negative electrode and each target material;
[0011] A film removal power supply, comprising a second positive electrode and a second negative electrode, wherein the second positive electrode is connected to the furnace structure, the second positive electrode is grounded, the second negative electrode is connected to the first target material, and a fifth switch is connected between the second negative electrode and the first target material;
[0012] The control unit is electrically connected to the coating power supply, the film removal power supply and each switch respectively.
[0013] In some possible embodiments, the coating device for aluminum-based materials also includes a lifting mechanism, the furnace body structure includes a first furnace body assembly and a second furnace body assembly that are relatively arranged, the lifting mechanism is connected to the second furnace body assembly, and the lifting mechanism is used to drive the second furnace body assembly to approach and move away from the first furnace body assembly, and when the first furnace body assembly is close to the second furnace body assembly, the first furnace body assembly and the second furnace body assembly cooperate to form the accommodating cavity.
[0014] In some possible embodiments, the first furnace body assembly includes a first outer shell, a first inner shell and a first heat insulation layer, the first outer shell is sleeved on a side of the first inner shell away from the accommodating cavity, the first outer shell and the first inner shell are spaced apart and cooperate to form a first cooling cavity for circulating a refrigerant, the first outer shell is further provided with a first liquid inlet and a first liquid outlet connected to the first cooling cavity, the first liquid inlet is located at an end of the first outer shell away from the second furnace body assembly, and the first liquid outlet is located at an end of the first outer shell close to the second furnace body assembly;
[0015] The first heat insulation layer is disposed on a side of the first inner shell close to the accommodating cavity;
[0016] The first furnace body assembly is further provided with a plurality of target material assembly tubes, the target material assembly tubes sequentially penetrate the first outer shell, the first inner shell and the first heat insulation layer, and are communicated with the accommodating cavity;
[0017] The first target material and the plurality of second target materials are inserted into the accommodating cavity through the plurality of target material assembly tubes in a one-to-one correspondence and connected to the first furnace body assembly.
[0018] In some possible implementations, the coating device for aluminum-based materials further includes a heating element, a temperature detection element, and a temperature controller, wherein the heating element is connected to the first furnace body assembly and is located in the accommodating cavity;
[0019] The temperature detection component is installed on the first furnace body assembly and is located in the accommodating cavity;
[0020] The temperature controller is connected to the temperature detecting element and the heating element respectively.
[0021] In some possible embodiments, the second furnace body assembly includes a second outer shell, a second inner shell and a second heat insulation layer, the second outer shell is sleeved on a side of the second inner shell away from the accommodating cavity, the second outer shell and the second inner shell are spaced apart and cooperate to form a second cooling cavity for circulating a refrigerant, the second outer shell is further provided with a second liquid inlet and a second liquid outlet, the second liquid inlet and the second liquid outlet are both connected to the second cooling cavity, and the second heat insulation layer is provided on a side of the second inner shell close to the accommodating cavity;
[0022] The coating device for aluminum-based materials also includes a vacuum regulating component and a first gas storage tank for storing argon gas, the vacuum regulating component includes a vacuum pump, a second gas storage tank, a first one-way valve, a second one-way valve and a first gas nozzle, the vacuum pump, the second gas storage tank, the second one-way valve and the first gas nozzle are connected in sequence, the first gas nozzle is penetrated by the second furnace body component and communicated with the accommodating cavity, the opening direction of the second one-way valve is from the first gas nozzle to the second gas storage tank, the air inlet end of the first one-way valve is communicated with the external environment, and the air outlet end of the first one-way valve is connected between the first gas nozzle and the second one-way valve;
[0023] The first gas storage tank is connected to a second gas nozzle, and the second gas nozzle is penetrated through the second furnace body assembly and connected to the accommodating cavity.
[0024] In some possible implementations, the workpiece rack includes a turntable and a plurality of workpiece rods, the turntable is rotatably mounted on the furnace structure, the plurality of workpiece rods are rotatably mounted on the turntable, the plurality of workpiece rods are arranged around a first rotation axis of the turntable, and a second rotation axis of each of the workpiece rods is parallel to the first rotation axis;
[0025] The coating device for aluminum-based materials further comprises a driving mechanism, which is respectively connected to the rotating disk and the workpiece rod in a transmission manner;
[0026] The driving mechanism is used to drive the turntable to rotate around the first rotation axis, and drive each of the workpiece rods to rotate around the second rotation axis.
[0027] In some possible implementations, the driving mechanism includes a first driving member, a first gear, and a plurality of second gears, the first driving member is fixedly mounted on a side of the furnace structure away from the accommodating cavity, the output shaft of the first driving member is transmission-connected to a first transmission rod, the first transmission rod is disposed along the first rotation axis through the furnace structure, and extends into the accommodating cavity to be fixedly connected to the turntable;
[0028] The first gear is fixedly sleeved on the first transmission rod, the plurality of second gears are fixedly connected to the plurality of workpiece rods in a one-to-one correspondence, and the plurality of second gears are all meshedly connected with the first gear.
[0029] In addition, the present application also provides a coating method for aluminum-based materials, which is implemented by the coating device for aluminum-based materials provided in the above embodiments. The coating method for aluminum-based materials includes:
[0030] Remove the aluminum oxide film on the workpiece surface and pre-coat the aluminum nitride film;
[0031] Aluminum nitride insulating film is plated;
[0032] Plating aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite wear-resistant film;
[0033] Colored film coating.
[0034] In some possible implementations, removing the aluminum oxide film on the surface of the workpiece and pre-plating an aluminum nitride film includes:
[0035] Preparation for coating: install the workpiece on the workpiece rack, and make the accommodating cavity in the furnace structure in a sealed state, start the liquid cooling cycle to cool the outer shell of the furnace structure, control the temperature in the furnace structure at 180℃-200℃, set the voltage of the film removal power supply to 600V-700V, set the voltage of the coating power supply to 700V-900V, evacuate the accommodating cavity to 80Pa-100Pa, and inject argon gas;
[0036] Removing aluminum oxide film: connecting the first negative electrode of the coating power supply and the workpiece rack, disconnecting the first positive electrode of the coating power supply and the workpiece rack, and grounding the first positive electrode and the furnace structure, grounding the second positive electrode of the coating removal power supply, and connecting the second negative electrode of the coating removal power supply to the first target material, which is an aluminum nitride target, and turning on the coating power supply and the coating removal power supply at the same time;
[0037] Pre-plating aluminum nitride film: connect the first positive electrode and the workpiece holder, connect the first negative electrode and the first target material, disconnect the second negative electrode and the first target material, and start the coating power supply;
[0038] The aluminum oxide film removal step and the aluminum nitride film pre-plating step are cycled at least twice.
[0039] In some possible implementations, the first target material includes an aluminum nitride target, and the plurality of second target materials include a titanium nitride target, a vanadium nitride target, and a zirconium oxide target;
[0040] The aluminum nitride insulating film deposition includes: controlling the temperature in the furnace structure at 180°C-200°C, evacuating the accommodating chamber to 1Pa-10Pa, turning off the film removal power supply, the first switch and the fourth switch are in a normally open state, the second switch and the third switch are in a normally closed state, connecting the first cathode and the first target material, turning on the film deposition power supply, and forming a 4mm-5mm aluminum nitride insulating film on the workpiece;
[0041] And / or, the coating of the aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite wear-resistant film includes: controlling the temperature in the furnace structure at 180°C-200°C, evacuating the accommodating chamber to 1Pa-10Pa, turning off the film removal power supply, the first switch and the fourth switch are in a normally open state, the second switch and the third switch are in a normally closed state, respectively connecting the first negative electrode with the aluminum nitride target, the titanium nitride target, the vanadium nitride target, and the zirconium oxide target, turning on the coating power supply, and obtaining an aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite film on the workpiece, the thickness of the composite film is 5mm-6mm, and the hardness of the composite film is greater than 1000Hv;
[0042] And / or, the coating of the color film includes: controlling the temperature inside the furnace structure at 180℃-200℃, evacuating the accommodating chamber to 1Pa-10Pa, turning off the film removal power supply, the first switch and the fourth switch are in a normally open state, the second switch and the third switch are in a normally closed state, so that the first negative electrode selectively connects to the aluminum nitride target, the titanium nitride target, the vanadium nitride target, and the zirconium oxide target, and turning on the coating power supply.
[0043] Beneficial effects of the present application: The coating device provided by the present application includes a coating power supply and a film removal power supply, and can be controlled by a control unit. Thus, it is possible to achieve a seamless connection between the operation of removing the aluminum oxide film on the surface of the workpiece and the operation of coating the workpiece surface, thereby avoiding the aluminum oxide film being oxidized on the surface of the workpiece before coating, ensuring that there is no residual aluminum oxide film between the workpiece surface and the strengthening film, thereby ensuring the performance of the strengthening film prepared on the workpiece surface, improving the bonding force between the workpiece and the strengthening film, and reducing the probability of bubbles and delamination of the strengthening film. BRIEF DESCRIPTION OF THE DRAWINGS
[0044] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0045] Figure 1A partial structural schematic diagram of a coating device in some embodiments is shown;
[0046] Figure 2 A schematic structural diagram of a first furnace assembly in some embodiments is shown;
[0047] Figure 3 Schematic diagrams of target material distribution structures in some embodiments are shown;
[0048] Figure 4 A schematic diagram of the structure of a macro second furnace body assembly in some embodiments is shown;
[0049] Figure 5 A schematic diagram of a top view of a workpiece rack in some embodiments is shown;
[0050] Figure 6 Shows a schematic diagram of the structure of the lifting mechanism in some embodiments;
[0051] Figure 7 Shows a schematic structural diagram of a coating device in some embodiments;
[0052] Figure 8 A schematic diagram of the process of coating methods in some embodiments is shown;
[0053] Fig. 9 A schematic flow chart of step S100 in some embodiments is shown.
[0054] Description of main component symbols:
[0055] 1000- coating device;
[0056] 100-furnace structure; 101-accommodating cavity; 110-first furnace assembly; 111-first outer shell; 1111-first liquid inlet; 1112-first liquid outlet; 112-first inner shell; 113-first cooling cavity; 114-first thermal insulation layer; 115-target assembly tube; 120-second furnace assembly; 121-second outer shell; 1211-second liquid inlet; 1212-second liquid outlet; 122-second inner shell; 123-second cooling cavity; 124-second thermal insulation layer;
[0057] 200-workpiece rack; 210-turntable; 220-workpiece rod;
[0058] 311-first target; 312-second target; 321-film coating power supply; 3211-first positive electrode; 3212-first negative electrode; 322-film removal power supply; 3221-second positive electrode; 3222-second negative electrode;
[0059] 400-driving mechanism; 410-first driving member; 420-first transmission rod; 430-second coupling; 441-first gear; 442-second gear; 450-mounting frame;
[0060] 511-first switch; 512-second switch; 513-third switch; 514-fourth switch; 515-fifth switch; 516-sixth switch; 517-seventh switch; 518-eighth switch; 519-ninth switch;
[0061] 610-lifting mechanism; 611-second driving member; 612-second transmission rod; 613-first coupling; 614-screw nut; 615-first support member; 616-second support member; 620-bracket;
[0062] 711-heating element; 712-temperature detection element; 713-heating element joint; 714-temperature controller; 720-vacuum adjustment assembly; 721-vacuum pump; 722-second gas storage tank; 723-first one-way valve; 724-second one-way valve; 725-third one-way valve; 726-pressure gauge; 727-first gas nozzle; 731-first gas storage tank; 732-second gas nozzle;
[0063] 810-sealing sleeve; 820-sealing ring. DETAILED DESCRIPTION
[0064] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.
[0065] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0066] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0067] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0068] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0069] like Figure 1 As shown, an embodiment provides a coating device 1000 for aluminum-based materials (hereinafter referred to as coating device 1000), which can be used to strengthen a workpiece made of aluminum-based materials, that is, to form a strengthening film layer on the surface of the workpiece to improve the wear resistance, corrosion resistance, insulation and bonding performance of the workpiece. The workpiece can be a structure such as a mobile phone frame, a watch case, etc. made of aluminum substrate.
[0070] like Figures 1 to 4 As shown, the coating device 1000 includes a furnace structure 100, a workpiece rack 200, a first target material 311, a plurality of second targets 312, a coating power supply 321, a film removal power supply 322 and a control unit. Among them, the furnace structure 100 is provided with a closed accommodating chamber 101, which can be used to provide a vacuum environment. The workpiece rack 200 is rotatably mounted on the furnace structure 100 and is located in the accommodating chamber 101. In an embodiment, the workpiece to be processed can be mounted on the workpiece rack 200, and the workpiece rack 200 drives the workpiece to rotate, so as to ensure that each workpiece of the workpiece rack 200 and each part on the workpiece can be coated, so as to achieve the consistency of the coating, and then ensure the coating effect.
[0071] The first target 311 and the plurality of second targets 312 are mounted on the furnace structure 100 and located in the accommodating cavity 101 . The first target 311 is opposite to and coaxially arranged with the workpiece holder 200 , and the plurality of second targets 312 are arranged around the first target 311 .
[0072] The coating power supply 321 may include a first positive electrode 3211 and a first negative electrode 3212. The first positive electrode 3211 is connected to the workpiece rack 200 and the furnace structure 100, respectively, and the first positive electrode 3211 is grounded. In addition, a first switch 511 and a second switch 512 are sequentially connected between the first positive electrode 3211 and the workpiece rack 200, and a third switch 513 is connected between the first positive electrode 3211 and the furnace structure 100. The first negative electrode 3212 is connected to the workpiece rack 200, the first target material 311 and a plurality of second target materials 312, respectively. Moreover, a fourth switch 514 is connected between the first negative electrode 3212 and the workpiece rack 200, and corresponding switches are connected between the first negative electrode 3212 and each target material.
[0073] The film removal power supply 322 includes a second positive electrode 3221 and a second negative electrode 3222. The second positive electrode 3221 is connected to the furnace structure 100 and grounded. The second negative electrode 3222 is connected to the first target 311, and a fifth switch 515 is connected between the second negative electrode 3222 and the first target 311.
[0074] In the embodiment, the control unit can be electrically connected to the coating power supply 321, the film removal power supply 322 and each switch respectively. Thus, the control unit can control the operation of the coating power supply 321, the film removal power supply 322 and each switch to achieve automatic control.
[0075] During use, the film removal power supply 322 can be turned on to remove the aluminum oxide film on the surface of the workpiece. After the aluminum oxide film is removed, the coating power supply 321 can be turned on to perform a coating operation on the surface of the workpiece to obtain the required strengthening film and improve the structural performance of the workpiece.
[0076] In the embodiment, the coating device 1000 includes a coating power supply 321 and a film removal power supply 322, and can be controlled by a control unit. Thus, the operation of removing the aluminum oxide film on the surface of the workpiece and the coating operation on the surface of the workpiece can be connected without time gap, avoiding the aluminum oxide film on the surface of the workpiece being oxidized before coating, ensuring that there is no residual aluminum oxide film between the surface of the workpiece and the strengthening film, thereby ensuring the performance of the strengthening film prepared on the surface of the workpiece, improving the bonding force between the workpiece and the strengthening film, and reducing the probability of bubbles and delamination of the strengthening film.
[0077] like Figure 1 , Figure 4 and Figure 6As shown, the coating device 1000 also includes a lifting mechanism 610. The furnace structure 100 may include a first furnace body assembly 110 and a second furnace body assembly 120 that are arranged opposite to each other, wherein the first furnace body assembly 110 and the second furnace body assembly 120 may both be in a shell-like structure. In some embodiments, the lifting mechanism 610 is connected to the second furnace body assembly 120, and the lifting mechanism 610 can be used to drive the second furnace body assembly 120 to approach and move away from the first furnace body assembly 110. When the lifting mechanism 610 drives the second furnace body assembly 120 to approach the first furnace body assembly 110, the first furnace body assembly 110 and the second furnace body assembly 120 cooperate to form a closed accommodating chamber 101. When the lifting mechanism 610 drives the second furnace body assembly 120 to move away from the first furnace body assembly 110, the accommodating chamber 101 can be opened, which can facilitate the operator to take and place the workpiece on the workpiece rack 200.
[0078] In some other embodiments, the lifting mechanism 610 may also be connected to the first furnace body assembly 110 to drive the first furnace body assembly 110 to move closer to and away from the second furnace body assembly 120 .
[0079] like Figures 1 to 3 As shown, in some embodiments, the first furnace body assembly 110 includes a first outer shell 111, a first inner shell 112 and a first heat insulation layer 114. The first outer shell 111 can be sleeved on the side of the first inner shell 112 away from the accommodating cavity 101, and the first outer shell 111 and the first inner shell 112 are spaced apart and cooperate to form a closed first cooling cavity 113, that is, the first furnace body assembly 110 presents a double-layer structure. In the embodiment, the first outer shell 111 and the first inner shell 112 can be sealed and fixedly connected by welding or other means. The first cooling cavity 113 can be used to circulate refrigerant, which can realize cooling and cooling of the first outer shell 111 to avoid scalding the operator. In some embodiments, the refrigerant can be selected from tap water or pure water.
[0080] In addition, the first shell 111 is also provided with a first liquid inlet 1111 and a first liquid outlet 1112 connected to the first cooling cavity 113, so that the refrigerant can flow in the first cooling cavity 113. In the embodiment, the first liquid inlet 1111 can be located at an end of the first shell 111 away from the second furnace body assembly 120, and the first liquid outlet 1112 is located at an end of the first shell 111 close to the second furnace body assembly 120. Therefore, when the refrigerant enters the first liquid inlet 1111, it can flow to the first liquid outlet 1112 under the action of gravity, so that the refrigerant can fully exchange heat with the first shell 111, and it can also ensure that the refrigerant contacts various parts of the first shell 111 for heat exchange.
[0081] In the embodiment, the first heat insulating layer 114 is disposed on a side of the first inner shell 112 close to the accommodating chamber 101, which can reduce the heat exchange between the first inner shell 112 and the accommodating chamber 101, reduce the heat loss in the accommodating chamber 101, and thus reduce the energy consumption of the coating device 1000. In some embodiments, the first heat insulating layer 114 can be made of heat insulating materials such as glass fiber or asbestos.
[0082] In some embodiments, the first target 311 may be an aluminum nitride target. The coating device 1000 may include three second targets 312, and the three second targets 312 may be arranged around the first target 311. The three second targets 312 may include a titanium nitride target, a vanadium nitride target, and a zirconium oxide target. In the embodiment, the target composition (volume fraction) of the aluminum nitride target is 98%-99% aluminum nitride and 1%-2% cerium oxide. The target composition (volume fraction) of the titanium nitride target is 98%-99% titanium nitride and 1%-2% cerium oxide. The target composition (volume fraction) of the vanadium nitride target is 98%-99% vanadium nitride and 1%-2% cerium oxide. The target composition (volume fraction) of the zirconium oxide target is 98%-99% zirconium oxide and 1%-2% cerium oxide. Among them, cerium oxide can enhance the conductivity of the target material and increase the coating speed.
[0083] In some other embodiments, the coating device 1000 may also include one, two, four, or other equal number of second targets 312 , which may be specifically configured according to needs.
[0084] In some embodiments, the first furnace body assembly 110 is further provided with a plurality of target assembly tubes 115, which may sequentially penetrate the first outer shell 111, the first inner shell 112 and the first heat insulation layer 114, and communicate with the accommodating cavity 101. In an embodiment, the target assembly tube 115 may be connected to the first furnace body structure 100 by welding or the like. The first target 311 and a plurality of second targets 312 may be inserted into the accommodating cavity 101 through a plurality of target assembly tubes 115 in a one-to-one correspondence, and connected to the first furnace body assembly 110. In some embodiments, the first furnace body assembly 110 may be provided with four target assembly tubes 115, and the first target 311 and three second targets 312 may be inserted into the accommodating cavity 101 through four target assembly tubes 115 in a one-to-one correspondence, and connected to the first furnace body assembly 110. In the embodiment, each target material can be relatively fixed to the corresponding target material assembly tube 115 by means of clamping or threaded connection, and each target material is sealed with the corresponding target material assembly tube 115 to avoid leakage.
[0085] like Figure 1 and Figure 4As shown, the second furnace body assembly 120 includes a second outer shell 121, a second inner shell 122 and a second heat insulation layer 124. The second outer shell 121 is sleeved on the side of the second inner shell 122 away from the accommodating chamber 101, and the second outer shell 121 and the second inner shell 122 are spaced apart and cooperate to form a closed second cooling chamber 123. The second cooling chamber 123 can be used to circulate refrigerant, which can achieve cooling of the second outer shell 121 to avoid scalding the operator. In the embodiment, the second outer shell 121 can be provided with a second liquid inlet 1211 and a second liquid outlet 1212, and the second liquid inlet 1211 and the second liquid outlet 1212 are both connected to the second cooling chamber 123, and the refrigerant can flow into the second cooling chamber 123 from the second liquid inlet 1211, and the refrigerant after heat exchange can be output through the second liquid outlet 1212.
[0086] The second heat insulating layer 124 is disposed on a side of the second inner shell 122 close to the accommodating chamber 101, which can reduce the heat exchange between the second inner shell 122 and the accommodating chamber 101, reduce the heat loss in the accommodating chamber 101, and further reduce the energy consumption of the coating device 1000. In some embodiments, the second heat insulating layer 124 can be made of heat insulating materials such as glass fiber or asbestos.
[0087] In some embodiments, a sealing ring 820 may be fixedly connected to the end surface of the second furnace body assembly 120 facing the first furnace body assembly 110 by gluing or clamping. When the second furnace body assembly 120 is connected to the first furnace body assembly 110, the sealing ring 820 can achieve sealing of the connection position between the first furnace body assembly 110 and the second furnace body assembly 120 to prevent air leakage.
[0088] Combined with Figure 6 In some embodiments, two sets of lifting mechanisms 610 may be provided, and the two sets of lifting mechanisms 610 may be symmetrically arranged on both sides of the furnace body structure 100, and the two sets of lifting mechanisms 610 are both connected to the second shell 121 in the second furnace body assembly 120, and can synchronously drive the second furnace body assembly 120 to be lifted and lowered to approach and move away from the first furnace body assembly 110. In the embodiment, the structures and installation methods of the two sets of lifting mechanisms 610 may be similar.
[0089] In some embodiments, the lifting mechanism 610 may include a second driving member 611 and a second transmission rod 612. In addition, the coating device 1000 also includes a bracket 620, and the bracket 620 may have a certain extension length along the height direction of the furnace structure 100. The first housing 111 in the first furnace assembly 110 may be fixedly connected to the end of the bracket 620 away from the ground by bolt connection or welding. The second driving member 611 may be fixedly installed at the end of the bracket 620 away from the ground. The second transmission rod 612 may extend along the lifting direction of the second furnace assembly 120. And the two ends of the second transmission rod 612 may be rotatably installed on the bracket 620 through the first support member 615 and the second support member 616 in a one-to-one correspondence, and may be connected to the output shaft of the second driving member 611 through the first coupling 613. In some embodiments, the second driving member 611 may be a motor, and the second transmission rod 612 may be a ball screw. The second housing 121 may be fixedly connected with a screw nut 614, and the screw nut 614 is screwed on the second transmission rod 612. Therefore, when the second driving member 611 drives the second transmission rod 612 to rotate, the lifting and lowering of the second furnace body assembly 120 can be achieved through the cooperation between the second transmission rod 612 and the screw nut 614 .
[0090] like Figure 4 and Figure 5 As shown, the workpiece rack 200 includes a turntable 210 and a plurality of workpiece rods 220. In some embodiments, the workpiece rack 200 may include six workpiece rods 220. The turntable 210 is rotatably mounted on the first furnace body assembly 110, and the first rotation axis of the turntable 210 may be coaxial with the first target material 311. The six workpiece rods 220 are all rotatably mounted on a side of the turntable 210 away from the first furnace body assembly 110. The six workpiece rods 220 are arranged around the circumference of the first rotation axis, and the second rotation axis of each workpiece rod 220 is parallel to the first rotation axis.
[0091] In other embodiments, the workpiece holder 200 may further include two, three, eight, or other workpiece rods 220 .
[0092] In the embodiment, the coating device 1000 further includes a driving mechanism 400, which is respectively connected to the turntable 210 and the workpiece rod 220 in a transmission manner. The driving mechanism 400 can be used to drive the turntable 210 to rotate around the first rotation axis, and drive each workpiece rod 220 to rotate around the second rotation axis. It can be understood that when the turntable 210 rotates around the first rotation axis, it can drive each workpiece rod 220 to revolve around the first rotation axis. That is, during the working process, the workpiece rod 220 can drive the workpiece to revolve and rotate at the same time, thereby ensuring that the workpieces on the workpiece rack 200 are coated uniformly and consistently, and ensuring that each part of the surface of the workpiece is coated uniformly and consistently.
[0093] In some embodiments, the driving mechanism 400 includes a first driving member 410, a first gear 441 and a plurality of second gears 442. The first driving member 410 can be fixedly mounted on the side of the second outer shell 121 away from the first inner shell 112 through a mounting bracket 450. The output shaft of the driving member can be connected to a first transmission rod 420 through a second coupling 430. The first transmission rod 420 is arranged along the first rotation axis through the second furnace body assembly 120, and extends into the accommodating cavity 101 and is fixedly connected to the turntable 210. The first transmission rod 420 is coaxially arranged with the turntable 210. In some embodiments, the first driving member 410 can be a motor.
[0094] The first gear 441 is fixedly sleeved on one end of the first transmission rod 420 close to the rotating disk 210, and can be located on a side of the rotating disk 210 close to the second heat insulation layer 124. A plurality of second gears 442 are fixedly connected to a plurality of workpiece rods 220 in a one-to-one correspondence, and the plurality of second gears 442 are all located on a side of the rotating disk 210 close to the second heat insulation layer 124, and the plurality of second gears 442 are all meshedly connected with the first gear 441. In the embodiment, the number of the second gears 442 can be consistent with the number of the workpiece rods 220.
[0095] When the first driving member 410 drives the first gear 441 to rotate through the first transmission rod 420 , the rotating disk 210 can be driven to rotate, and at the same time, each workpiece rod 220 can be driven to rotate through the second gear 442 .
[0096] In the embodiment, a sealing sleeve 810 may be disposed between the first transmission rod 420 and the second furnace body assembly 120 to achieve sealing of the assembly position of the first transmission rod 420 and the second furnace body assembly 120 to prevent air leakage.
[0097] like Figure 1 , Figure 2 and Figure 7 As shown, in some embodiments, the coating device 1000 further includes a heating element 711, a temperature detection element 712 and a temperature controller 714. The heating element 711 can be connected to the first furnace body assembly 110 and is located in the accommodating chamber 101. During use, the heating element 711 can be used to heat the accommodating chamber 101 to provide the environmental temperature required for film removal and coating.
[0098] In some embodiments, a heating element connector 713 is fixed and sealed to the first furnace body assembly 110 by welding or screwing, and the heating element 711 can be connected to one end of the heating element connector 713 close to the accommodating chamber 101. The end of the heating element connector 713 away from the heating element 711 can be exposed relative to the side of the first furnace body assembly 110 away from the accommodating chamber 101, so as to be electrically connected to the temperature controller 714 and other structures. In some embodiments, the heating element 711 can be a heating wire, a heating rod, a heating net or other structures.
[0099] In the embodiment, the temperature detection member 712 may be fixedly mounted on the first furnace body assembly 110, and the detection end of the temperature detection member 712 may be located in the accommodating cavity 101, so as to detect the temperature in the accommodating cavity 101 in real time. The connection end of the temperature detection member 712 may be exposed on the side of the first furnace body assembly 110 away from the accommodating cavity 101, and is electrically connected to the temperature controller 714. In some embodiments, the temperature detection member 712 may be a temperature sensor such as a thermistor or a thermocouple. The temperature controller 714 may also be electrically connected to the control unit.
[0100] During use, the temperature controller 714 , the heating element 711 and the temperature detection element 712 may cooperate to maintain the temperature in the accommodating cavity 101 within a desired temperature range.
[0101] like Figure 4 and Figure 7 As shown, the coating device 1000 further includes a vacuum adjustment component 720, which can be used to evacuate the accommodating chamber 101. In some embodiments, the vacuum adjustment component 720 includes a vacuum pump 721, a second gas storage tank 722, a first one-way valve 723, a second one-way valve 724, a third one-way valve 725 and a first gas nozzle 727. The vacuum pump 721, the third one-way valve 725, the second gas storage tank 722, the second one-way valve 724 and the first gas nozzle 727 are connected in sequence, and the first gas nozzle 727 is arranged in the second furnace body assembly 120 and communicates with the accommodating chamber 101. The opening direction of the third one-way valve 725 can be directed from the second gas storage tank 722 to the direction of the vacuum pump 721. The opening direction of the second one-way valve 724 is directed from the first gas nozzle 727 to the direction of the second gas storage tank 722. In the embodiment, the air inlet of the first one-way valve 723 is connected to the external environment, and the air outlet of the first one-way valve 723 is connected between the first air nozzle 727 and the second one-way valve 724. The pressure gauge 726 can be connected between the second one-way valve 724 and the first air nozzle 727, and can be used to detect the air pressure in the accommodating chamber 101.
[0102] When the accommodating chamber 101 needs to be evacuated, the second one-way valve 724 and the third one-way valve 725 can be opened to activate the vacuum pump 721 to evacuate the accommodating chamber 101. When pressure relief is required, the second one-way valve 724 and the third one-way valve 725 can be closed to activate the vacuum pump 721, and the first one-way valve 723 can be opened to connect the accommodating chamber 101 with the external environment and gradually restore to atmospheric pressure.
[0103] In some embodiments, the coating device 1000 further includes a first gas storage tank 731 for storing argon gas. The first gas storage tank 731 is connected to a second gas nozzle 732, which is disposed in the second furnace body assembly 120 and is connected to the accommodating chamber 101. In some embodiments, the second gas nozzle 732 and the first gas storage tank 731 may also be connected to a corresponding one-way valve, which may control the argon gas in the first gas storage tank 731 to be transported to the accommodating chamber 101 of the furnace body structure 100.
[0104] like Figure 7 As shown, in the embodiment, the first positive electrode 3211 of the coating power supply 321 can be connected in two lines, one of which is connected to the third switch 513, connected to the second positive electrode 3221 of the film removal power supply 322, grounded, and connected to the first housing 111. The other line can be connected to the first switch 511 and the second switch 512 in sequence and then connected to the workpiece rack 200.
[0105] The first negative electrode 3212 of the coating power supply 321 can be connected to five lines. Among them, the first line is connected to the fourth switch 514 and then connected to the workpiece holder 200. The second line is connected to the sixth switch 516 and then connected to the titanium nitride target. The third line is connected to the seventh switch 517 and then connected to the vanadium nitride target. The fourth line is connected to the eighth switch 518 and then connected to the zirconium oxide target. The fifth line is connected to the ninth switch 519 and then connected to the first target material 311 (i.e., the aluminum nitride target).
[0106] In some embodiments, the first switch 511 and the second switch 512 are normally closed switches, the third switch 513 and the fourth switch 514 are normally open switches, and the first switch 511 and the third switch 513 cooperate to form a linkage switch. The second switch 512 and the fourth switch 514 cooperate to form a linkage switch. In the linkage switch, when one switch is closed, the other switch is open.
[0107] The second positive electrode 3221 of the film removal power supply 322 is connected to the first housing 111 together with the first positive electrode 3211 of the film coating power supply 321, and is grounded. After the second negative electrode 3222 of the film removal power supply 322 is connected to the fifth switch 515, it is connected to the first target material 311 (i.e., aluminum nitride target). In the embodiment, the fifth switch 515 is a normally closed switch, the ninth switch 519 is a normally open switch, and the fifth switch 515 cooperates with the ninth switch 519 to form a linkage switch.
[0108] like Figure 8 As shown, the embodiment also provides a coating method for aluminum-based materials, which can be implemented by the coating device 1000 provided in the embodiment, and is used to coat a strengthening film on the surface of a workpiece made of aluminum-based materials.
[0109] In an embodiment, the coating method may include:
[0110] S100, removing the aluminum oxide film on the surface of the workpiece and pre-plating an aluminum nitride film.
[0111] like Fig. 9 As shown, in some embodiments, step S100 may include:
[0112] S110, coating preparation: install the workpiece on the workpiece rack 200, start the lifting mechanism 610, close the second furnace body assembly 120 and the first furnace body assembly 110, so that the accommodating chamber 101 is in a sealed state. Start the liquid cooling cycle to cool the outer shell of the furnace structure 100, specifically, circulate the refrigerant in the first cooling chamber 113 and the second cooling chamber 123 to take away the heat in the first outer shell 111, the first inner shell 112, the second outer shell 121 and the second inner shell 122. Start the thermostat 714, the heating element 711 and the temperature detection element 712 to control the temperature in the furnace structure 100 at 180℃-200℃. Start the driving mechanism 400 to make the workpiece rod 220 automatically revolve at the same time. Set the voltage of the film removal power supply 322 to 600V-700V, and set the voltage of the coating power supply 321 to 700V-900V. The vacuum pump 721 is started, the third one-way valve 725 and the second one-way valve 724 are opened, and the accommodating chamber 101 is evacuated to 80Pa-100Pa. Thereafter, the second one-way valve 724 is closed, and argon gas is injected into the accommodating chamber 101 .
[0113] S120, aluminum oxide film removal: turn on the fourth switch 514 and the third switch 513, turn off the first switch 511 and the second switch 512, connect the first negative electrode 3212 of the coating power supply 321 to the workpiece rack 200, disconnect the first positive electrode 3211 of the coating power supply 321 from the workpiece rack 200, and ground the first positive electrode 3211 and the furnace structure 100. The second positive electrode 3221 of the film removal power supply 322 is grounded, and the second negative electrode 3222 of the film removal power supply 322 is connected to the first target material 311, which is an aluminum nitride target. At the same time, the coating power supply 321 and the film removal power supply 322 are turned on. In this process, the argon gas in the furnace structure 100 is ionized, and the surface of the workpiece is strongly bombarded. The bombardment time is maintained for 10 minutes to remove the aluminum oxide film on the surface of the workpiece.
[0114] S130, pre-plating aluminum nitride film: disconnect the fourth switch 514, the third switch 513 and the fifth switch 515, connect the first switch 511, the second switch 512 and the ninth switch 519, connect the first positive electrode 3211 of the coating power supply 321 and the workpiece holder 200, connect the first negative electrode 3212 and the first target material 311, disconnect the film removal power supply 322, start the coating power supply 321, and pre-plating aluminum nitride film on the surface of the workpiece for 10 minutes.
[0115] S140, repeating step S120 and step S130. Thus, it can be ensured that the aluminum oxide film on the surface of the workpiece is completely removed, so that the bonding force between the pre-plated aluminum nitride film and the workpiece is optimal, and at the same time, the aluminum nitride film can isolate the workpiece surface to prevent the workpiece surface from being oxidized again.
[0116] In some other embodiments, step S120 and step S130 may also be cycled three or four times, etc. as needed.
[0117] S200, aluminum nitride insulating film.
[0118] In some embodiments, the aluminum nitride insulating film is plated, including: controlling the temperature in the furnace structure 100 at 180°C-200°C, evacuating the accommodating chamber 101 to 1Pa-10Pa, and turning off the film removal power supply 322. The first switch 511 and the fourth switch 514 are in a normally open state, the second switch 512 and the third switch 513 are in a normally closed state, and the ninth switch 519 is turned on to connect the first cathode 3212 to the first target 311. The voltage of the coating power supply 321 is maintained at 700V-900V, and the coating power supply 321 is turned on for 30 minutes to obtain a 4mm-5mm aluminum nitride insulating film on the workpiece, which may have good insulation properties.
[0119] S300, aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite wear-resistant film.
[0120] In some embodiments, coating the aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite wear-resistant film includes: controlling the temperature in the furnace structure 100 at 180°C-200°C, evacuating the accommodating chamber 101 to 1Pa-10Pa, and turning off the film removal power supply 322. The first switch 511 and the fourth switch 514 are in a normally open state, the second switch 512 and the third switch 513 are in a normally closed state, and the sixth switch 516 to the ninth switch 519 are all turned on, so that the first negative electrode 3212 is connected to the aluminum nitride target, the titanium nitride target, the vanadium nitride target, and the zirconium oxide target respectively. Turn on the coating power supply 321, and the voltage of the coating power supply 321 is maintained at 700V-900V for 30 minutes. Thus, a composite film of aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide can be obtained on the workpiece, the thickness of the composite film is 5mm-6mm, and the hardness of the composite film is greater than 1000Hv.
[0121] S400, color coating.
[0122] In some embodiments, coating the colored film includes: controlling the temperature in the furnace structure 100 at 180°C-200°C, evacuating the accommodating chamber 101 to 1Pa-10Pa, turning off the film removal power supply 322, the first switch 511 and the fourth switch 514 are in a normally open state, and the second switch 512 and the third switch 513 are in a normally closed state. Select one of the sixth switch 516, the seventh switch 517, the eighth switch 518 and the ninth switch 519 to connect the first negative electrode 3212 to one of the aluminum nitride target, the titanium nitride target, the vanadium nitride target, and the zirconium oxide target. Turn on the coating power supply 321, and the voltage of the coating power supply 321 is maintained at 700V-900V for 20 minutes. Among them, the corresponding target material can be selected according to the color of the colored film, wherein the aluminum nitride film is gray, the titanium nitride film is golden yellow, the zirconium oxide film is white, and the vanadium nitride film is black.
[0123] After the coating is completed, the driving mechanism 400 is stopped, the coating power supply 321, the temperature controller 714 and the heating element 711 are turned off, the vacuum pump 721 is turned off, the second check valve 724 and the third check valve 725 are closed, and the first check valve 723 is opened to restore the pressure in the accommodating chamber 101 to atmospheric pressure. The lifting mechanism 610 is started to separate the second furnace body assembly 120 from the first furnace body assembly 110. The workpiece is taken out and the coating of the workpiece is completed once to obtain a strengthening film on the surface of the workpiece.
[0124] In summary, the coating method provided by the present application may include the following advantages:
[0125] (1) By using a dual power supply of the coating power supply 321 and the film removal power supply 322, a gapless time conversion can be achieved between removing the aluminum oxide film and coating the aluminum nitride film. Among them, the argon gas bombardment has a good effect on removing the aluminum oxide film, so that there is no residual aluminum oxide film between the workpiece and the strengthening film, thereby effectively improving the bonding strength between the workpiece and the strengthening film.
[0126] (2) The use of multiple targets made of different materials facilitates the plating of different composite films and the seamless time conversion of different film layers, thereby improving the efficiency and quality of coating.
[0127] (3) The bottom aluminum nitride film has good insulation properties, which can make the insulation properties of the strengthening film excellent.
[0128] (4) The middle layer of the strengthening film is an aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite film layer, which has the advantages of high hardness and excellent wear resistance, among which the hardness can reach Hv1260.
[0129] (5) Since the aluminum oxide film is completely removed, the workpiece and the bottom aluminum nitride film can have good bonding performance. At the same time, due to the presence of a common aluminum nitride layer, the bottom aluminum nitride film and the middle aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite film can penetrate each other, so that the bonding strength between the film layers is good.
[0130] (6) The strengthening layer has excellent anti-corrosion properties.
[0131] Comparative experiment on performance of workpiece surface strengthening film:
[0132] Experimental methods
[0133] (1) Hardness test: SCTMC-HV-100(Z) Vickers microhardness tester measures the surface hardness of the sample film layer. The surface hardness is not less than HV800 and is qualified.
[0134] (2) Film wear resistance test: The sample was rubbed using a SFT-2M pin-on-disc friction and wear machine. The grinding material was GCr15, the test load was 5N, the rotation radius was 5mm, the rotation speed was 300r / min, and the friction time was 30min. The sample was qualified if the film layer did not peel off (the film layer did not separate from the workpiece) and the bottom was not exposed (the original color of the workpiece was not exposed).
[0135] (3) Anti-rust performance test: The samples were subjected to salt spray test using a PS-120 precision salt spray tester. The test chamber temperature was 35°C and the salt spray was 5% NaCl solution. The samples were qualified if the salt spray resistance time was greater than 72 hours.
[0136] (4) Strengthening membrane bonding strength: After the strengthening membrane is cut into 2mm*2mm grids, it is placed in a plastic bag containing 1.92ml lactic acid, 10g sodium chloride, 2g urea, and 1L water, sealed, and then placed in an 80℃ humidity chamber for 24 hours. After being taken out, wiped dry, and left for 4 hours, different tapes are used to stick and pull the same grid position 5 times. The film is qualified if no layer falls off.
[0137] (5) Insulation performance of the enhanced film: Use a multimeter to test the resistance of the enhanced film at a set voltage. The two poles of the multimeter move randomly within a range of 0.5 cm-2 cm on the enhanced film. The resistance value obtained by the test is not less than 3GΩ to be qualified.
[0138] Comparative experiment:
[0139] Sample No. 1: The workpiece surface is oxidized by oxygen.
[0140] Sample No. 2: The workpiece surface is electroplated with chrome, and the thickness of the chromium layer is 10 microns.
[0141] Sample No. 3: The workpiece surface is plated with conventional PVD titanium nitride film with a film thickness of 2 microns (due to process limitations, the film is not plated thickly).
[0142] Sample No. 4: a reinforced membrane prepared in an example of the present application.
[0143] Among them, the workpieces are all aluminum-based materials.
[0144] The experimental results are shown in Table 1:
[0145] Table 1
[0146]
[0147]
[0148] It can be concluded from Table 1 that in the prior art (samples 1, 2 and 3), all indicators of sample 1 fail to meet the product requirements, only the wear resistance of sample 2 meets the standard, and only the hardness of sample 3 meets the product requirements, while other indicators do not meet the product requirements. The workpiece strengthening film prepared by the coating method provided in the present application has the advantages of high hardness, good wear resistance, strong corrosion resistance, good bonding strength, strong insulation performance, etc., and can meet the strengthening needs of aluminum-based parts such as mobile phone frames and watch cases.
[0149] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.
[0150] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.
Claims
1. A coating device for aluminum-based materials, characterized in that: include: The furnace structure (100) is provided with a closed accommodating chamber (101), wherein the accommodating chamber (101) is used to provide a vacuum environment; A workpiece rack (200) is rotatably mounted on the furnace structure (100) and is located in the accommodating cavity (101); A first target material (311) is mounted on the furnace structure (100) and is located in the accommodating cavity (101); the first target material (311) is opposite to and coaxially arranged with the workpiece holder (200); A plurality of second targets (312) are mounted on the furnace structure (100) and are located in the accommodating cavity (101); the plurality of second targets (312) are arranged around the first target (311); A coating power supply (321), comprising a first positive electrode (3211) and a first negative electrode (3212), wherein the first positive electrode (3211) is connected to the workpiece rack (200) and the furnace structure (100) respectively, a first switch (511) and a second switch (512) are connected between the first positive electrode (3211) and the workpiece rack (200), a third switch (513) is connected between the first positive electrode (3211) and the furnace structure (100), the first positive electrode (3211) is grounded, the first negative electrode (3212) is connected to the workpiece rack (200), the first target material (311) and the plurality of second target materials (312) respectively, a fourth switch (514) is connected between the first negative electrode (3212) and the workpiece rack (200), and corresponding switches are connected between the first negative electrode (3212) and each target material; A film removal power supply (322), comprising a second positive electrode (3221) and a second negative electrode (3222), wherein the second positive electrode (3221) is connected to the furnace structure (100), the second positive electrode (3221) is grounded, the second negative electrode (3222) is connected to the first target material (311), and a fifth switch (515) is connected between the second negative electrode (3222) and the first target material (311); The control unit is electrically connected to the coating power supply (321), the film removal power supply (322) and each switch.
2. The coating device for aluminum-based materials according to claim 1, characterized in that: The coating device for aluminum-based materials also includes a lifting mechanism (610). The furnace body structure (100) includes a first furnace body component (110) and a second furnace body component (120) that are arranged opposite to each other. The lifting mechanism (610) is connected to the second furnace body component (120). The lifting mechanism (610) is used to drive the second furnace body component (120) to approach and move away from the first furnace body component (110). When the first furnace body component (110) approaches the second furnace body component (120), the first furnace body component (110) and the second furnace body component (120) cooperate to form the accommodating cavity (101).
3. The coating device for aluminum-based materials according to claim 2, characterized in that: The first furnace body assembly (110) comprises a first outer shell (111), a first inner shell (112) and a first heat insulation layer (114); the first outer shell (111) is sleeved on a side of the first inner shell (112) away from the accommodating cavity (101); the first outer shell (111) and the first inner shell (112) are spaced apart and cooperate to form a first cooling cavity (113) for circulating a refrigerant; the first outer shell (111) is also provided with a first liquid inlet (1111) and a first liquid outlet (1112) connected to the first cooling cavity (113); the first liquid inlet (1111) is located at an end of the first outer shell (111) away from the second furnace body assembly (120); and the first liquid outlet (1112) is located at an end of the first outer shell (111) close to the second furnace body assembly (120); The first heat insulation layer (114) is arranged on a side of the first inner shell (112) close to the accommodating cavity (101); The first furnace body assembly (110) is also provided with a plurality of target assembly tubes (115), the target assembly tubes (115) sequentially passing through the first outer shell (111), the first inner shell (112) and the first heat insulation layer (114), and communicating with the accommodating cavity (101); The first target material (311) and the plurality of second target materials (312) are inserted into the accommodating cavity (101) through the plurality of target material assembly tubes (115) in a one-to-one correspondence and are connected to the first furnace body assembly (110).
4. The coating device for aluminum-based materials according to claim 2 or 3, characterized in that: The coating device for aluminum-based materials further comprises a heating element (711), a temperature detection element (712) and a temperature controller (714); the heating element (711) is connected to the first furnace body assembly (110) and is located in the accommodating cavity (101); The temperature detection component (712) is installed on the first furnace body assembly (110) and is located in the accommodating cavity (101); The temperature controller (714) is connected to the temperature detection element (712) and the heating element (711) respectively.
5. The coating device for aluminum-based materials according to claim 2, characterized in that: The second furnace body assembly (120) comprises a second outer shell (121), a second inner shell (122) and a second heat insulating layer (124); the second outer shell (121) is sleeved on a side of the second inner shell (122) away from the accommodating cavity (101); the second outer shell (121) and the second inner shell (122) are spaced apart and cooperate to form a second cooling cavity (123) for circulating a refrigerant; the second outer shell (121) is also provided with a second liquid inlet (1211) and a second liquid outlet (1212); the second liquid inlet (1211) and the second liquid outlet (1212) are both connected to the second cooling cavity (123); the second heat insulating layer (124) is arranged on a side of the second inner shell (122) close to the accommodating cavity (101); The coating device for aluminum-based materials further comprises a vacuum regulating assembly (720) and a first gas storage tank (731) for storing argon gas. The vacuum regulating assembly (720) comprises a vacuum pump (721), a second gas storage tank (722), a first one-way valve (723), a second one-way valve (724) and a first gas nozzle (727). The vacuum pump (721), the second gas storage tank (722), the second one-way valve (724) and the first gas nozzle (727) are connected in sequence. The first gas nozzle (727) is arranged in the second furnace body assembly (120) and is in communication with the accommodating chamber (101). The opening direction of the second one-way valve (724) is from the first gas nozzle (727) to the second gas storage tank (722). The air inlet end of the first one-way valve (723) is in communication with the external environment. The air outlet end of the first one-way valve (723) is connected between the first gas nozzle (727) and the second one-way valve (724). The first gas storage tank (731) is connected to a second gas nozzle (732), and the second gas nozzle (732) is disposed through the second furnace body assembly (120) and is connected to the accommodating cavity (101).
6. The coating device for aluminum-based materials according to claim 1, characterized in that: The workpiece rack (200) comprises a turntable (210) and a plurality of workpiece rods (220), wherein the turntable (210) is rotatably mounted on the furnace structure (100), and the plurality of workpiece rods (220) are rotatably mounted on the turntable (210), and the plurality of workpiece rods (220) are arranged around a first rotation axis of the turntable (210), and a second rotation axis of each of the workpiece rods (220) is parallel to the first rotation axis; The coating device for aluminum-based materials further comprises a driving mechanism (400), wherein the driving mechanism (400) is respectively connected in transmission with the rotating disk (210) and the workpiece rod (220); The driving mechanism (400) is used to drive the rotating disk (210) to rotate around the first rotation axis, and to drive each of the workpiece rods (220) to rotate around the second rotation axis.
7. The coating device for aluminum-based materials according to claim 6, characterized in that: The driving mechanism (400) comprises a first driving member (410), a first gear (441) and a plurality of second gears (442); the first driving member (410) is fixedly mounted on a side of the furnace structure (100) away from the accommodating chamber (101); the output shaft of the first driving member (410) is drivingly connected to a first transmission rod (420); the first transmission rod (420) is disposed along the first rotation axis through the furnace structure (100) and extends into the accommodating chamber (101) to be fixedly connected to the turntable (210); The first gear (441) is fixedly sleeved on the first transmission rod (420), the plurality of second gears (442) are fixedly connected to the plurality of workpiece rods (220) in a one-to-one correspondence, and the plurality of second gears (442) are all meshedly connected with the first gear (441).
8. A coating method for aluminum-based materials, characterized in that: The coating method for aluminum-based materials is realized by the coating device for aluminum-based materials according to any one of claims 1 to 7, and the coating method for aluminum-based materials comprises: Remove the aluminum oxide film on the workpiece surface and pre-coat the aluminum nitride film; Aluminum nitride insulating film is plated; Plating aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite wear-resistant film; Colored film coating.
9. The coating method for aluminum-based materials according to claim 8, characterized in that: The method of removing the aluminum oxide film on the surface of the workpiece and pre-plating the aluminum nitride film comprises: Preparation for coating: installing the workpiece on the workpiece rack (200), and making the containing chamber (101) in the furnace structure (100) in a sealed state, starting the liquid cooling cycle to cool the outer shell of the furnace structure (100), controlling the temperature in the furnace structure (100) at 180°C-200°C, setting the voltage of the film removal power supply (322) to 600V-700V, setting the voltage of the coating power supply (321) to 700V-900V, evacuating the containing chamber (101) to 80Pa-100Pa, and injecting argon gas; Removing aluminum oxide film: connecting the first negative electrode (3212) of the coating power supply (321) and the workpiece rack (200), disconnecting the first positive electrode (3211) of the coating power supply (321) and the workpiece rack (200), and grounding the first positive electrode (3211) and the furnace structure (100); grounding the second positive electrode (3221) of the coating removal power supply (322); connecting the second negative electrode (3222) of the coating removal power supply (322) to the first target material (311), wherein the first target material (311) is an aluminum nitride target; and simultaneously turning on the coating power supply (321) and the coating removal power supply (322); Pre-plating aluminum nitride film: connecting the first positive electrode (3211) and the workpiece rack (200), connecting the first negative electrode (3212) and the first target material (311), disconnecting the second negative electrode (3222) and the first target material (311), and starting the film coating power supply (321); The aluminum oxide film removal step and the aluminum nitride film pre-plating step are cycled at least twice.
10. The coating method for aluminum-based materials according to claim 8, characterized in that: The first target material (311) includes an aluminum nitride target, and the plurality of second target materials (312) include a titanium nitride target, a vanadium nitride target, and a zirconium oxide target; The aluminum nitride insulating film coating comprises: controlling the temperature in the furnace structure (100) at 180°C-200°C, evacuating the containing chamber (101) to 1Pa-10Pa, closing the film removal power supply (322), the first switch (511) and the fourth switch (514) being in a normally open state, the second switch (512) and the third switch (513) being in a normally closed state, connecting the first cathode (3212) and the first target material (311), turning on the film coating power supply (321), and forming a 4mm-5mm aluminum nitride insulating film on the workpiece; And / or, the coating of the aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite wear-resistant film comprises: controlling the temperature in the furnace structure (100) to 180°C-200°C, evacuating the containing chamber (101) to 1Pa-10Pa, closing the film removal power supply (322), the first switch (511) and the fourth switch (514) being in a normally open state, the second switch (512) and the third switch (513) being in a normally closed state, respectively connecting the first negative electrode (3212) with the aluminum nitride target, the titanium nitride target, the vanadium nitride target, and the zirconium oxide target, turning on the coating power supply (321), and obtaining an aluminum nitride-titanium nitride-vanadium nitride-zirconium oxide composite film on the workpiece, the thickness of the composite film being 5mm-6mm, and the hardness of the composite film being greater than 1000Hv; And / or, the coating of the colored film includes: controlling the temperature in the furnace structure (100) to 180°C-200°C, evacuating the accommodating chamber (101) to 1Pa-10Pa, turning off the film removal power supply (322), the first switch (511) and the fourth switch (514) are in a normally open state, the second switch (512) and the third switch (513) are in a normally closed state, so that the first negative electrode (3212) selectively connects to the aluminum nitride target, the titanium nitride target, the vanadium nitride target, and the zirconium oxide target, and turning on the coating power supply (321).
Citation Information
Patent Citations
Multifunctional infiltration furnace and diffusion coating and coating integrated method
CN104674216A
Magnetron sputtering device and method for plating porous metal product with black coating through metal target material
CN105734514A
Coated part and preparation method thereof
CN117385336A
Multifunctional magnetron sputtering vacuum coating machine
CN217149295U
Cited By
Plastic mobile phone frame manufacturing method and plastic mobile phone frame
CN119928136A
