Heating wire spacing adjusting structure for filament thermal field furnace

Abstract

The invention relates to the field of filament thermal field furnaces, in particular to a heating wire spacing adjusting structure for a filament thermal field furnace. The technical problems that in the using process of an existing filament thermal field furnace, temperature change in the thermal field furnace can be affected along with entering of a silicon wafer, electric heating wire structures at different intervals need to be arranged in order to avoid time consumed by temperature adjustment, but existing electric heating wire arrangement often needs to be carried out in a shutdown state, and the electric heating wire arrangement time is shortened are solved. Therefore, the working efficiency of the whole thermal field furnace is influenced to a certain extent. According to the technical scheme, the heating wire spacing adjusting structure for the filament thermal field furnace comprises a scaling assembly; a plurality of scaling strips are connected to the inner side of the scaling frame in a sliding manner; and a plurality of connecting assemblies are mounted on the zooming assembly. According to the invention, the special scaling type adjusting structure is combined with the up-down adjusting structure, so that the heat change generated by the silicon wafer and the anti-collapse treatment of the heating wires can be met by adjusting the distance between the adjacent heating wires and the length of the whole heating wires.

Description

Technical Field

[0001] The invention relates to the field of thin-wire thermal field furnaces, and in particular to a heating wire spacing adjustment structure for thin-wire thermal field furnaces. Background Art

[0002] The full name of PE process is PECVD, and its purpose is to form a solid film on the surface of silicon wafers. The principle of the process is to place the product on the cathode of glow discharge under low pressure, use the heating body inside the filament thermal field furnace (PECVD reactor) to heat the product to a predetermined temperature, and then introduce an appropriate amount of reaction gas. The gas undergoes a series of chemical changes and plasma reactions to form a solid film on the surface of the product. Under high temperature conditions, the characteristics of the movement of substances from high concentration to low concentration are used to incorporate atoms into the semiconductor with a certain degree of controllability. After the product reaches the predetermined temperature, elements such as phosphorus and boron are diffused on the surface of the product. The existing PE process is mostly based on a horizontal hot field furnace. During the use of the horizontal hot field furnace, the silicon wafer will absorb heat when entering the furnace, causing the temperature field to float, so that the horizontal hot field furnace needs to spend a certain amount of time to restore the temperature inside the horizontal hot field furnace to the original temperature. Therefore, it is necessary to adjust the distribution spacing of the heating wires, so that the temperature can be quickly increased in a short time through dense heating wires through the adjusted heating wires, so that the temperature field in the furnace meets the process requirements. However, the existing heating wire spacing adjustment can often only be performed before heating, and it is often necessary to calculate the corresponding temperature change curve in advance to adjust the heating wire spacing. At the same time, the furnace chamber temperature opened when the silicon wafer enters will also be affected, thereby affecting the working efficiency of the entire hot field furnace. Summary of the invention

[0003] In order to overcome the problem that the temperature change inside the existing fine filament hot field furnace will be affected by the entry of silicon wafers during use, and in order to avoid the time consumed in adjusting the temperature, it is necessary to arrange a heating wire structure with different spacings. However, the existing heating wire arrangement often needs to be carried out in a shutdown state, which will affect the working efficiency of the entire hot field furnace to a certain extent.

[0004] The technical solution of the present invention is: a heating wire spacing adjustment structure for a filament hot field furnace, comprising a zoom assembly; the zoom assembly comprises a first meshing rotating wheel; a zoom frame is arranged at the lower end of the first meshing rotating wheel; a plurality of zoom bars are slidably connected to the inner side of the zoom frame; a plurality of connecting assemblies are installed on the zoom assembly; the connecting assembly comprises a top sliding frame; the top sliding frame is connected to the zoom bar by bolts; a plurality of top sliding blocks are slidably connected to the inner side of the top sliding frame; a heating filament is installed at the lower end of the top sliding block; a wire connecting plate is installed at the lower end of the heating filament; an adjusting sheet is fixed to the top sliding block; a top adjustment assembly is arranged at the upper end of the zoom assembly; the top adjustment assembly comprises a mounting frame; a second hydraulic push rod is installed on the mounting frame; a positioning bracket is arranged at one side of the second hydraulic push rod; a push rod block is arranged at the inner side of the positioning bracket; a sliding block is arranged at the front and rear ends of the push rod block; the sliding block and the push rod block are arranged to be slidably connected; the sliding block and the positioning bracket are arranged to be slidably connected; a clamping claw is installed at one side of the sliding block.

[0005] Preferably, a sliding groove is provided on the inner wall of the positioning bracket; a guide rod is slidably connected to the mounting frame; a connecting strip is provided on the outer side of the guide rod; a first hydraulic push rod is installed on the connecting strip; a push rod plate is installed on one side of the guide rod; and a stop plate is fixedly connected to the clamping claw.

[0006] Preferably, a limit rod is installed at the upper end of the zoom bar; a first meshing wheel is arranged on the outer side of the limit rod; a plurality of zoom grooves are opened on the first meshing wheel; a plurality of connecting sliders are fixedly connected to the outer side of the zoom bar; a connecting slide rail is slidably connected to the outer side of the connecting slider; the connecting slide rail is connected to the zoom frame by bolts; a motor plate is installed on the connecting slide rail on one side of the rear end; a fourth motor is installed at the lower end of the motor plate; the upper end of the fourth motor is rotatably connected to the second meshing wheel via a rotating shaft; a fixed shaft is installed at the upper end of the zoom frame; the fixed shaft and the first meshing wheel are arranged to be rotatably connected.

[0007] Preferably, a rotating assembly is installed at the upper end of the top adjustment assembly; the rotating assembly includes a positioning slider; the positioning slider is connected to the push rod sheet by bolts; a rotating sleeve is installed at the upper end of the positioning slider; a passive wheel is installed on the outer side of the rotating sleeve; a positioning ring is fixedly connected to the lower end of the passive wheel; the lower end of the positioning ring is rotatably connected to two positioning slides; a screw slider is installed at the upper end of the positioning slide; a screw rail is slidably connected to the screw slider.

[0008] Preferably, the screw guide rail is internally rotatably connected with a screw; and the front end of the screw at one side end is rotatably connected with a second motor via a coupling; the rear ends of the two screws are each equipped with a rotating wheel; the outer sides of the rotating wheels are rotatably connected with a rotating belt; the upper end of the positioning slide at one side end is equipped with a motor frame; the third motor is installed on the motor frame; the lower end of the third motor is rotatably connected to a driving wheel via a rotating shaft; the front and rear ends of the positioning slide are each equipped with a fixing plate; and the fixing plate is equipped with a mounting strip.

[0009] Preferably, a heating wire assembly is arranged on the outer side of the connecting assembly; the heating wire assembly includes a limiting slider; the limiting slider is connected to the wire connecting plate by bolts; a connecting inner ring is arranged on the outer side of the limiting slider; a limiting groove is provided on the connecting inner ring; and a fixing head is fixedly connected to the limiting slider.

[0010] Preferably, a connecting rod is installed on the inner side of the fixed head; a connecting plate is fixedly connected to the lower end of the connecting rod; a connecting magnetic block is installed on the lower end of the connecting plate; an anti-slip ring is fixedly connected to the outer side of the connecting rod; and a connecting arc strip is arranged at the lower end of the anti-slip ring.

[0011] Preferably, an outer cover assembly is arranged on the outer side of the heating wire assembly; the outer cover assembly includes a fixed outer cover; a fixed base is welded to the outer side of the fixed outer cover by manual arc welding; a contact ring is installed on the inner side of the fixed base; an engaging ring is welded to the upper end of the contact ring by argon arc welding; a fixed ring plate is arranged on the inner side of the fixed outer cover; a plurality of connecting seats are installed at the lower end of the fixed ring plate.

[0012] Preferably, a bottom adjustment component is provided on the inner side of the outer cover component; the bottom adjustment component includes a traveling wheel; the traveling wheel and the abutment ring are arranged in a sliding connection; the upper end of the traveling wheel is rotatably connected to a synchronous wheel via a rotating shaft; and a fixing bar is provided at the lower end of the traveling wheel.

[0013] Preferably, a first motor is installed at the lower end of the fixed bar; the first motor is rotatably connected to the traveling wheel through a rotating shaft; an electric push rod is installed on the fixed bar; a push piece is installed at the upper end of the electric push rod; and a connecting magnetic ring is installed at the upper end of the push piece.

[0014] Beneficial effects of the present invention: 1. By setting a special zoom-type adjustment structure in combination with the up-and-down adjustment structure, the heating wire can adjust the spacing between adjacent heating wires and the length of the entire heating wire during the heating process, so that the heating wire can meet the heat change generated by the silicon wafer and the anti-sagging treatment of the heating wire during use, thereby solving the problem that the existing thin-filament hot field furnace will affect the temperature change inside the hot field furnace due to the entry of the silicon wafer during use, and in order to avoid the time consumed in adjusting the temperature, it is necessary to arrange the heating wire structure with different spacings, but the existing heating wire arrangement often needs to be carried out in the shutdown state, which will affect the working efficiency of the entire hot field furnace to a certain extent; 2. The second meshing wheel is driven to rotate by the fourth motor, and the first meshing wheel is driven to rotate synchronously by the rotating second meshing wheel, and the plurality of limit rods are driven to slide inside the zoom groove by the rotating first meshing wheel, so that the zoom bar installed at the lower end of the limit rod can slide inside the zoom frame, and the sliding zoom frame is used to drive the plurality of connection components to move synchronously, so as to adjust the distance between the electric heating filament and the object to be heated, so as to adjust the working efficiency of the thermal field furnace, thereby improving the convenience of use of the entire thermal field furnace to a certain extent; 3. Drive the traveling wheel to rotate by driving the first motor, and synchronously drive the synchronous wheel to rotate on the inner side of the meshing ring through the rotating traveling wheel, and at the same time, the "T"-shaped ring groove opened at the lower end of the abutment ring ensures that the fixed strip can slide against the abutment ring, so that the electric push rod installed on the fixed strip can rotate synchronously, and then the electric push rod drives the pushing piece to move, so that the connecting magnetic ring on the pushing piece can be synchronously adjusted, and the connecting magnetic ring is controlled to move by the electric push rod, so that the connecting magnetic ring can be magnetically connected to the connecting magnetic block, so that the magnetically connected connecting magnetic block and the connecting magnetic ring can drive the bottom end of the electric heating filament to move, and at the same time, the driving wheel can be driven to rotate by the third motor, so as to drive the driven wheel to rotate, and the rotating sleeve can be synchronously driven to rotate by the rotating driven wheel, so as to synchronously drive the rotating sleeve to rotate synchronously. The whole top adjustment component is driven to rotate step by step. The top adjustment component is rotated 90 degrees to realize the top positioning adjustment of the electric heating filament. At the same time, the mounting frame can be driven to slide on the guide rod by the first hydraulic push rod, and the mounting frame drives the second hydraulic push rod to move. When it moves to the adjusting piece to be adjusted, the push rod block can be driven by the second hydraulic push rod to push the two sliding blocks to slide on the positioning bracket, so that the clamping claws installed on the two positioning brackets can clamp the adjusting piece, and then the positions of the two positioning slides are adjusted by the mutually cooperating screw slider and screw slide rail, so as to drive the whole top adjustment component to move through the positioning slide, so that the two clamping claws can be adjusted to different adjusting pieces in the corresponding directions to realize the top adjustment of the electric heating filament, and then the heating performance of the electric heating filament can be adjusted to a certain extent by adjusting the position of the electric heating filament. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The figure shows a three-dimensional structure schematic diagram of the first rotating assembly of the heating wire spacing adjustment structure of the present invention; Figure 2 The first three-dimensional structure schematic diagram of the heating wire spacing adjustment structure of the present invention is shown; Figure 3 The second three-dimensional structure schematic diagram of the heating wire spacing adjustment structure of the present invention is shown; Figure 4 Shown is a three-dimensional structural schematic diagram of the bottom adjustment component of the heating wire spacing adjustment structure of the present invention; Figure 5 Shown is a schematic diagram of the three-dimensional structure of the first top adjustment component of the heating wire spacing adjustment structure of the present invention; Figure 6 The figure shows a three-dimensional structure schematic diagram of the second rotating assembly of the heating wire spacing adjustment structure of the present invention; Figure 7 Shown is a schematic diagram of the three-dimensional structure of the second top adjustment component of the heating wire spacing adjustment structure of the present invention; Figure 8 The figure shows a partial enlarged view of the heating wire spacing adjustment structure A of the present invention; Fig. 9 The three-dimensional structure schematic diagram of the heating wire assembly of the heating wire spacing adjustment structure of the present invention is shown; Fig.10 The figure shows a three-dimensional structure schematic diagram of the first zoom component of the heating wire spacing adjustment structure of the present invention; Fig.11 What is shown is a schematic diagram of the three-dimensional structure of the second scaling component of the heating wire spacing adjustment structure of the present invention.

[0016] Description of reference numerals: 1, outer cover assembly; 2, bottom adjustment assembly; 3, rotating assembly; 4, top adjustment assembly; 5, heating wire assembly; 6, connecting assembly; 7, zoom assembly; 101, fixed outer cover; 102, fixed base; 103, abutting ring; 104, meshing ring; 105, fixed ring plate; 106, connecting seat; 201, traveling wheel; 202, synchronous wheel; 203, fixing bar; 204, electric push rod; 205, pushing piece; 206 , connecting magnetic ring; 207, first motor; 301, mounting strip; 302, fixing plate; 303, positioning slide plate; 304, screw slider; 305, screw slide rail; 306, second motor; 307, rotating wheel; 308, rotating belt; 309, motor frame; 310, third motor; 311, driving wheel; 312, driven wheel; 313, positioning ring; 314, rotating sleeve; 315, positioning slide plate; 401, push rod sheet; 402, First hydraulic push rod; 403, guide rod; 404, connecting bar; 405, mounting frame; 406, second hydraulic push rod; 407, positioning bracket; 408, push rod block; 409, sliding block; 410, sliding groove; 411, clamping claw; 412, blocking piece; 501, connecting inner ring; 502, connecting arc bar; 503, connecting rod; 504, anti-slip ring; 505, fixed head; 506, limit slider; 507, limit slide groove; 50 8. Connecting plate; 509. Connecting magnetic block; 601. Wire connecting plate; 602. Electric heating filament; 603. Top sliding block; 604. Adjusting plate; 605. Top sliding frame; 701. First meshing rotating wheel; 702. Fixed shaft; 703. Zooming frame; 704. Zooming bar; 705. Connecting sliding block; 706. Connecting slide rail; 707. Motor plate; 708. Fourth motor; 709. Second meshing rotating wheel; 710. Zooming slot; 711. Limiting rod. DETAILED DESCRIPTION

[0017] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0018] Example 1 A heating wire spacing adjustment structure for a thin wire hot field furnace, according to Figure 1-11As shown, it includes a zoom component 7; the zoom component 7 includes a first meshing wheel 701; a zoom frame 703 is arranged at the lower end of the first meshing wheel 701; a plurality of zoom bars 704 are slidably connected to the inner side of the zoom frame 703; a plurality of connecting components 6 are installed on the zoom component 7; the connecting component 6 includes a top slide 605; the top slide 605 is connected to the zoom bar 704 by bolts; a plurality of top sliders 603 are slidably connected to the inner side of the top slide 605; an electric heating filament 602 is installed at the lower end of the top slider 603; a wire connecting plate 601 is installed at the lower end of the electric heating filament 602; the top slide An adjusting piece 604 is fixedly connected to the block 603; a top adjusting component 4 is arranged at the upper end of the zoom component 7; the top adjusting component 4 includes a mounting frame 405; a second hydraulic push rod 406 is mounted on the mounting frame 405; a positioning bracket 407 is arranged on one side of the second hydraulic push rod 406; a push rod block 408 is arranged on the inner side of the positioning bracket 407; a sliding block 409 is arranged at the front and rear ends of the push rod block 408; the sliding block 409 and the push rod block 408 are arranged to be slidably connected; the sliding block 409 and the positioning bracket 407 are arranged to be slidably connected; a clamping claw 411 is installed on one side of the sliding block 409.

[0019] A sliding groove 410 is provided on the inner wall of the positioning bracket 407; a guide rod 403 is slidably connected to the mounting frame 405; a connecting strip 404 is provided on the outer side of the guide rod 403; a first hydraulic push rod 402 is installed on the connecting strip 404; a push rod sheet 401 is installed on one side of the guide rod 403; and a blocking sheet 412 is fixedly connected to the clamping claw 411.

[0020] A limit rod 711 is installed at the upper end of the zoom bar 704; a first meshing wheel 701 is arranged on the outer side of the limit rod 711; a plurality of zoom grooves 710 are opened on the first meshing wheel 701; a plurality of connecting sliders 705 are fixedly connected to the outer side of the zoom bar 704; a connecting slide rail 706 is slidably connected to the outer side of the connecting slider 705; the connecting slide rail 706 is connected to the zoom frame 703 by bolts; a motor plate 707 is installed on the connecting slide rail 706 on one side of the rear end; a fourth motor 708 is installed at the lower end of the motor plate 707; the upper end of the fourth motor 708 is rotatably connected to the second meshing wheel 709 via a rotating shaft; a fixed shaft 702 is installed at the upper end of the zoom frame 703; the fixed shaft 702 and the first meshing wheel 701 are arranged to be rotatably connected.

[0021] The upper end of the top adjustment component 4 is equipped with a rotating component 3; the rotating component 3 includes a positioning slider 315; the positioning slider 315 is connected to the push rod sheet 401 by bolts; the upper end of the positioning slider 315 is equipped with a rotating sleeve 314; the outer side of the rotating sleeve 314 is equipped with a passive wheel 312; the lower end of the passive wheel 312 is fixedly connected with a positioning ring 313; the lower end of the positioning ring 313 is rotatably connected to two positioning slides 303; the upper end of the positioning slide 303 is equipped with a screw slider 304; the screw slider 304 is slidably connected with a screw rail 305.

[0022] The screw guide rail 305 is internally rotatably connected to a screw; and the front end of the screw at one side end is rotatably connected to a second motor 306 through a coupling; a rotating wheel 307 is installed at the rear end of each of the two screws; a rotating belt 308 is rotatably connected to the outer side of the rotating wheel 307; a motor frame 309 is installed at the upper end of the positioning slide 303 at one side end; a third motor 310 is installed on the motor frame 309; the lower end of the third motor 310 is rotatably connected to a driving wheel 311 through a rotating shaft; a fixing plate 302 is installed at the front and rear ends of the positioning slide 303; and a mounting strip 301 is installed on the fixing plate 302.

[0023] A heating wire assembly 5 is arranged on the outer side of the connecting assembly 6; the heating wire assembly 5 includes a limiting slider 506; the limiting slider 506 is connected to the wire connecting plate 601 by bolts; a connecting inner ring 501 is arranged on the outer side of the limiting slider 506; a limiting sliding groove 507 is provided on the connecting inner ring 501; a fixing head 505 is fixedly connected to the limiting slider 506.

[0024] A connecting rod 503 is installed on the inner side of the fixed head 505; a connecting plate 508 is fixedly connected to the lower end of the connecting rod 503; a connecting magnetic block 509 is installed on the lower end of the connecting plate 508; an anti-slip ring 504 is fixedly connected to the outer side of the connecting rod 503; a connecting arc strip 502 is provided at the lower end of the anti-slip ring 504.

[0025] An outer cover assembly 1 is arranged on the outer side of the heating wire assembly 5; the outer cover assembly 1 includes a fixed outer cover 101; a fixed base 102 is welded to the outer side of the fixed outer cover 101 by manual arc welding; a contact ring 103 is installed on the inner side of the fixed base 102; an engaging ring 104 is welded to the upper end of the contact ring 103 by argon arc welding; a fixed ring plate 105 is arranged on the inner side of the fixed outer cover 101; a plurality of connecting seats 106 are installed at the lower end of the fixed ring plate 105.

[0026] A bottom adjustment component 2 is arranged on the inner side of the outer cover component 1; the bottom adjustment component 2 includes a traveling wheel 201; the traveling wheel 201 and the abutment ring 103 are arranged to be slidably connected; the upper end of the traveling wheel 201 is rotatably connected to a synchronous wheel 202 via a rotating shaft; and a fixing bar 203 is arranged at the lower end of the traveling wheel 201.

[0027] A first motor 207 is installed at the lower end of the fixing bar 203; the first motor 207 is rotatably connected to the traveling wheel 201 via a rotating shaft; an electric push rod 204 is installed on the fixing bar 203; a pushing piece 205 is installed at the upper end of the electric push rod 204; and a connecting magnetic ring 206 is installed at the upper end of the pushing piece 205.

[0028] When working, the second meshing wheel 709 is driven to rotate by the fourth motor 708, and the rotating second meshing wheel 709 drives the first meshing wheel 701 to rotate synchronously, and the rotating first meshing wheel 701 drives multiple limit rods 711 to slide inside the zoom groove 710, thereby forcing the zoom bar 704 installed at the lower end of the limit rod 711 to slide inside the zoom frame 703, and the sliding zoom frame 703 drives multiple connecting components 6 to move synchronously to adjust the distance between the electric heating filament 602 and the object to be heated, so as to achieve the adjustment of the working efficiency of the hot field furnace, and thus can improve the convenience of use of the entire hot field furnace to a certain extent.

[0029] Then, the first motor 207 is driven to drive the traveling wheel 201 to rotate, and the rotating traveling wheel 201 synchronously drives the synchronous wheel 202 to rotate on the inner side of the meshing ring 104. At the same time, the "T"-shaped ring groove opened at the lower end of the abutting ring 103 ensures that the fixing bar 203 can slide against the abutting ring 103, so that the electric push rod 204 installed on the fixing bar 203 can rotate synchronously, and then the electric push rod 204 drives the pushing piece 205 to move, so that the connecting magnetic ring 206 on the pushing piece 205 can be adjusted synchronously, and the connecting magnetic ring 206 can be controlled by the electric push rod 204. The connecting magnetic ring 206 can be magnetically connected to the connecting magnetic block 509, so that the magnetically connected connecting magnetic block 509 and the connecting magnetic ring 206 can drive the bottom end of the electric heating filament 602 to move. At the same time, the third motor 310 can also drive the driving wheel 311 to rotate, so that the driving wheel 311 drives the passive wheel 312 to rotate, and the rotating sleeve 314 is synchronously driven to rotate by the rotating passive wheel 312, so that the entire top adjustment component 4 is synchronously driven to rotate by the rotating sleeve 314. The top adjustment component 4 is rotated by 90 degrees to achieve the top positioning adjustment of the electric heating filament 602. Finally, the first hydraulic push rod 402 can also be used to drive the mounting frame 405 to slide on the guide rod 403, and the mounting frame 405 can drive the second hydraulic push rod 406 to move. When it moves to the adjusting piece 604 to be adjusted, the second hydraulic push rod 406 can drive the push rod block 408 to push the two sliding blocks 409 to slide on the positioning bracket 407, so that the clamping claws 411 installed on the two positioning brackets 407 can clamp the adjusting piece 604, and then adjust the position of the two positioning slides 303 through the mutually coordinated screw slider 304 and the screw slide rail 305, so as to drive the entire top adjustment component 4 to move through the positioning slide 303, so that the two clamping claws 411 can be adjusted to different adjusting pieces 604 in the corresponding direction, so as to realize the top end adjustment of the electric heating filament 602, and then the heating performance of the electric heating filament 602 can be adjusted to a certain extent by adjusting the position of the electric heating filament 602.

[0030] Through the above steps, a special zoom-type adjustment structure is set in combination with the up-and-down adjustment structure, and the heating wire can adjust the spacing between adjacent heating wires and the length of the entire heating wire during the heating process so that the heating wire can meet the heat changes generated by the silicon wafer and the anti-sagging treatment of the heating wire during use. This can, to a certain extent, solve the problem that the existing fine-filament hot field furnace will affect the temperature changes inside the hot field furnace due to the entry of the silicon wafer during use, and in order to avoid the time consumed in adjusting the temperature, it is necessary to arrange the heating wire structure with different spacings, but the existing heating wire arrangement often needs to be carried out in the shutdown state, which will affect the working efficiency of the entire hot field furnace to a certain extent.

[0031] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the spirit of the present invention.

Claims

1. A heating wire spacing adjustment structure for a thin wire thermal field furnace, comprising a zoom component (7); characterized in that: The zoom assembly (7) comprises a first meshing rotating wheel (701); a zoom frame (703) is arranged at the lower end of the first meshing rotating wheel (701); a plurality of zoom bars (704) are slidably connected to the inner side of the zoom frame (703); a plurality of connection assemblies (6) are installed on the zoom assembly (7); the connection assemblies (6) comprise a top slide frame (605); the top slide frame (605) is connected to the zoom bars (704) by bolts; a plurality of top sliders (603) are slidably connected to the inner side of the top slide frame (605); an electric heating filament (602) is installed at the lower end of the top slider (603); a wire connecting plate (601) is installed at the lower end of the electric heating filament (602); a top slider (603) is fixed An adjusting plate (604) is connected; a top adjusting component (4) is arranged at the upper end of the zoom component (7); the top adjusting component (4) includes a mounting frame (405); a second hydraulic push rod (406) is mounted on the mounting frame (405); a positioning bracket (407) is arranged on one side of the second hydraulic push rod (406); a push rod block (408) is arranged on the inner side of the positioning bracket (407); a sliding block (409) is arranged at the front and rear ends of the push rod block (408); the sliding block (409) and the push rod block (408) are arranged to be slidably connected; the sliding block (409) and the positioning bracket (407) are arranged to be slidably connected; a clamping claw (411) is installed on one side of the sliding block (409).

2. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 1, characterized in that: A sliding groove (410) is provided on the inner wall of the positioning bracket (407); a guide rod (403) is slidably connected to the mounting frame (405); a connecting strip (404) is provided on the outer side of the guide rod (403); a first hydraulic push rod (402) is installed on the connecting strip (404); a push rod sheet (401) is installed on one side of the guide rod (403); and a blocking sheet (412) is fixedly connected to the clamping claw (411).

3. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 1, characterized in that: A limit rod (711) is installed at the upper end of the zoom bar (704); a first meshing rotating wheel (701) is arranged on the outer side of the limit rod (711); a plurality of zoom grooves (710) are provided on the first meshing rotating wheel (701); a plurality of connecting sliders (705) are fixedly connected to the outer side of the zoom bar (704); a connecting slide rail (706) is slidably connected to the outer side of the connecting slide rail (705); the connecting slide rail (706) is connected to the zoom frame (703) by bolts; a motor plate (707) is installed on the connecting slide rail (706) at one side of the rear end; a fourth motor (708) is installed at the lower end of the motor plate (707); the upper end of the fourth motor (708) is rotatably connected to the second meshing rotating wheel (709) via a rotating shaft; a fixed shaft (702) is installed at the upper end of the zoom frame (703); the fixed shaft (702) and the first meshing rotating wheel (701) are arranged to be rotatably connected.

4. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 2, characterized in that: A rotating assembly (3) is mounted on the upper end of the top adjustment assembly (4); the rotating assembly (3) comprises a positioning slider (315); the positioning slider (315) is connected to the push rod sheet (401) by bolts; a rotating sleeve (314) is mounted on the upper end of the positioning slider (315); a passive wheel (312) is mounted on the outer side of the rotating sleeve (314); a positioning ring (313) is fixedly connected to the lower end of the passive wheel (312); two positioning slide plates (303) are rotatably connected to the lower end of the positioning ring (313); a screw slider (304) is mounted on the upper end of the positioning slide plate (303); a screw guide rail (305) is slidably connected to the screw slider (304).

5. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 4, characterized in that: The screw guide rail (305) is internally rotatably connected to a screw; and the front end of the screw at one end is rotatably connected to a second motor (306) via a coupling; a rotating wheel (307) is installed at the rear end of each of the two screws; the outer side of the rotating wheel (307) is rotatably connected to a rotating belt (308); a motor frame (309) is installed at the upper end of the positioning slide (303) at one end; a third motor (310) is installed on the motor frame (309); the lower end of the third motor (310) is rotatably connected to a driving wheel (311) via a rotating shaft; a fixing plate (302) is installed at the front and rear ends of the positioning slide (303); and a mounting strip (301) is installed on the fixing plate (302).

6. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 1, characterized in that: A heating wire assembly (5) is arranged on the outer side of the connection assembly (6); the heating wire assembly (5) comprises a limit slider (506); the limit slider (506) is connected to the wire connecting plate (601) by bolts; a connecting inner ring (501) is arranged on the outer side of the limit slider (506); a limit sliding groove (507) is provided on the connecting inner ring (501); and a fixing head (505) is fixedly connected to the limit slider (506).

7. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 6, characterized in that: A connecting rod (503) is installed on the inner side of the fixed head (505); a connecting plate (508) is fixedly connected to the lower end of the connecting rod (503); a connecting magnetic block (509) is installed on the lower end of the connecting plate (508); an anti-slip ring (504) is fixedly connected to the outer side of the connecting rod (503); and a connecting arc strip (502) is provided at the lower end of the anti-slip ring (504).

8. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 6, characterized in that: An outer cover assembly (1) is arranged on the outer side of the heating wire assembly (5); the outer cover assembly (1) comprises a fixed outer cover (101); a fixed base (102) is welded to the outer side of the fixed outer cover (101) by manual arc welding; a contact ring (103) is installed on the inner side of the fixed base (102); an engagement ring (104) is welded to the upper end of the contact ring (103) by argon arc welding; a fixed ring plate (105) is arranged on the inner side of the fixed outer cover (101); and a plurality of connection seats (106) are installed at the lower end of the fixed ring plate (105).

9. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 8, characterized in that: A bottom adjustment component (2) is arranged on the inner side of the outer cover component (1); the bottom adjustment component (2) comprises a traveling wheel (201); the traveling wheel (201) and the abutment ring (103) are arranged in sliding connection; the upper end of the traveling wheel (201) is rotatably connected to a synchronous wheel (202) via a rotating shaft; and a fixing bar (203) is arranged at the lower end of the traveling wheel (201).

10. The electric heating wire spacing adjustment structure for a thin wire thermal field furnace according to claim 9, characterized in that: A first motor (207) is mounted at the lower end of the fixing bar (203); the first motor (207) is rotatably connected to the traveling wheel (201) via a rotating shaft; an electric push rod (204) is mounted on the fixing bar (203); a pushing sheet (205) is mounted at the upper end of the electric push rod (204); and a connecting magnetic ring (206) is mounted at the upper end of the pushing sheet (205).

Images