High-stability crystal cooling device and cooling simulation analysis method thereof

Abstract

The invention relates to a cooling device of an optical device and a cooling simulation analysis method of the cooling device, and provides a high-stability crystal cooling device and a cooling simulation analysis method of the high-stability crystal cooling device in order to solve the problems that an existing crystal cooling device is poor in damping effect, low in rigidity of a cooling pipe and low in cooling efficiency. The invention provides a high-stability crystal cooling device. The high-stability crystal cooling device comprises a cooling pipe, a clamping piece arranged on the cooling pipe, a heat conduction module arranged on the cooling pipe, a heat insulation assembly and a light blocking assembly, the cooling pipe comprises a liquid inlet section, a liquid inlet avoiding section, a liquid inlet cooling section, a backflow section, a liquid outlet cooling section, a liquid outlet avoiding section and a liquid outlet section which are connected in sequence; the clamping pieces comprise the first clamping piece, the two second clamping pieces and the two third clamping pieces. The clamping pieces are used for installing the cooling pipe on the monochromator body and have the vibration reduction effect. The heat conduction module is used for enhancing the heat dissipation effect and clamping the crystal and the cooling pipe. And the vibration reduction effect and the heat dissipation effect of the whole device are good.

Description

Technical Field

[0001] The invention relates to an optical device cooling device and a cooling simulation analysis method thereof, and in particular to a high-stability crystal cooling device and a cooling simulation analysis method thereof. Background Art

[0002] Synchrotron radiation is a kind of complex light with a wavelength range from infrared to hard X-rays. It cannot be used directly. Technicians usually use various optical elements to process this complex light with a continuous spectrum into monochromatic light that meets the experimental requirements (energy, flux, monochromaticity, polarization, spot size, etc.), and transmit the monochromatic light to the experimental station safely, reliably and efficiently for use in different scientific experiments. The realization of these functions is completed through the beamline system. The monochromator is the core equipment of the beamline system. The function of the monochromator is to change the angle between the optical element and the synchrotron radiation to obtain monochromatic light of different wavelengths. Monochromators can be classified in different ways. For example, according to the type of optical element, they can be divided into grating monochromators, crystal monochromators and multilayer film monochromators; among them, crystal monochromators can be divided into Laue monochromators and Bragg monochromators according to the diffraction mode; according to the number of crystals, they can be divided into single crystal monochromators, double crystal monochromators and four crystal monochromators; according to the crystal cutting method, they can be divided into symmetrical monochromators and asymmetrical monochromators; according to the crystal arrangement method, they can be divided into dispersive monochromators and achromatic monochromators.

[0003] In a double-crystal monochromator, since the synchrotron radiation directly irradiates the monochromator crystal during propagation, the crystal has to bear a very high heat load. Part of the heat is absorbed by the crystal, the surface temperature of the crystal increases, and the internal temperature gradient increases, thereby generating thermal stress, which makes the crystal prone to negative deformations such as overall bending, local bulges on the crystal surface, and changes in the lattice constant. In the case of long-term overheating, the optical components will be damaged, eventually leading to a decrease in the spot quality and beam stability. Therefore, we need to cool the first crystal to reduce the impact of high heat load on the spot quality and beam stability. Cooling methods can be divided into water cooling and liquid nitrogen cooling.

[0004] The cooling liquid flows in the cooling system pipes in the form of turbulence. The turbulence is composed of vortices of different scales, and the flow field is extremely unstable. When the turbulent fluid flows through the pipe wall, it will alternately exert fluid force on its surface, causing the pipe to reciprocate. The reciprocating motion of the pipe will change the flow state of the fluid, and then change the fluid force acting on the pipe wall. This phenomenon of interaction between fluid and solid is called flow-induced vibration; fluid vibration will change the flow state of the liquid and cause vibration on the pipe surface. The pipe vibration will then cause the crystal to shake through the clamping copper block, thereby affecting the stability of the synchrotron radiation light. During the cooling cycle, the vortex of the liquid and the stimulated vibration of the pipeline will increase the amplitude of the crystal vibration, so measures need to be taken to reduce the vibration of the pipe cooling system and improve the stability of the monochromator crystal output beam.

[0005] Existing crystal cooling device see Figure 1 , including a cooling tube 01, a fixing device 02 arranged on the cooling tube 01 and a heat-conducting element 03 arranged on the cooling tube 01, but the problems existing in the prior art are: the influence of the vibration of the cooling tube 01 on the crystal stability is not taken into consideration, and the fixing device 02 only plays a simple fixing role, and the vibration reduction effect is poor; the cooling tube 01 adopts a hose connected in multiple sections, and the inner diameters of the pipes are inconsistent, and the interaction between the liquid and the wall of the pipe is more obvious, resulting in low stiffness of the cooling tube 01 and low cooling efficiency. Summary of the invention

[0006] The purpose of the present invention is to solve the problems of poor vibration reduction effect, low stiffness of cooling pipes and low cooling efficiency of existing crystal cooling devices, and to provide a high-stability crystal cooling device and a cooling simulation analysis method thereof.

[0007] The design idea of ​​the present invention is: based on the existing crystal cooling device, the present invention optimizes the layout, size parameters, inner diameter and bending angle of the cooling tube, and arranges a first clamping member, a second clamping member and a third clamping member on the cooling tube for vibration reduction, so that the vibration of the coolant during the flow has less impact on the crystal; the cooling tube of the present invention adopts the form of a combination of multiple sections of corrugated tubes and hard tubes and has a unified inner diameter and wall thickness, and has high overall rigidity.

[0008] In order to achieve the above-mentioned invention object, the technical solution provided by the present invention is:

[0009] A high-stability crystal cooling device is arranged on a crystal support assembly, the crystal support assembly includes a crystal table plate and a crystal bracket arranged on the side of the crystal table plate, and a crystal is arranged on the crystal bracket; the special features of the device are:

[0010] It includes a cooling pipe, a clamping piece arranged on the cooling pipe, a heat conduction module arranged on the cooling pipe, a heat insulation component and a light shielding component arranged between the crystal support and the crystal;

[0011] The cooling pipe comprises a liquid inlet section, a liquid inlet avoidance section, a liquid inlet cooling section, a reflux section, a liquid outlet cooling section, a liquid outlet avoidance section and a liquid outlet section which are connected in sequence; the liquid inlet section and the liquid outlet section are divided into a straight pipe section and a curved pipe section, and the two curved pipe sections are composed of two mutually connected bending parts, the bending surfaces of the two bending parts are perpendicular to each other and are circular arc transitions, and the two straight pipe sections and the two curved pipe sections are respectively arranged correspondingly; the liquid inlet avoidance section and the liquid outlet avoidance section are both U-shaped pipes, and are circular arc transitions and are correspondingly arranged, and one end of the two U-shaped pipes is respectively connected to the corresponding liquid inlet section The liquid inlet cooling section and the liquid outlet cooling section are divided into a straight section and a curved section, and the curved sections are respectively connected to the other end of the corresponding U-shaped tube; the reflux section is a U-shaped tube, and its two ends are respectively bent and connected to the liquid inlet cooling section and the liquid outlet cooling section, and are arc transitions; all the bent parts in the cooling tube are made of corrugated tubes; the clamping member includes a first clamping member, two second clamping members and two third clamping members; the first clamping member is clamped at the connection between the straight section and the curved section of the liquid inlet section and the liquid outlet section, and is connected to the crystal table The panel is connected; the two second clamping members are clamped on the liquid inlet avoidance section and the liquid outlet avoidance section, and are connected to the crystal table panel, one is set at a position close to the lower part of the crystal table panel, and the other is set at the connection between the liquid inlet section bend section and the liquid inlet avoidance section, and the liquid outlet section bend section and the liquid outlet avoidance section; the two third clamping members are clamped on one side close to the outlet of the liquid inlet avoidance section and close to the inlet of the liquid outlet avoidance section and are connected to the side of the crystal bracket, one third clamping member is connected to the upper part of the side of the crystal bracket, and the other is connected to the side of the crystal bracket The lower part; the two heat-conducting modules are symmetrically arranged on the liquid inlet cooling section and the liquid outlet cooling section, the heat-conducting modules are located on the crystal bracket, and a plurality of crystal clamping screws are arranged on the heat-conducting modules to clamp the crystal between the two heat-conducting modules; the heat-conducting module is a rectangular parallelepiped, and the upper part of the larger side thereof is provided with an arc-shaped groove for installing and fixing the liquid inlet cooling section or the liquid outlet cooling section; the light-blocking component is located on the outer side of the two end faces of the crystal and is connected to the heat-conducting module; the insulation component includes a crystal insulation plate and a crystal insulation pad arranged from bottom to top.

[0012] The crystal insulation board and the crystal insulation pad play a protective role, preventing the temperature transmitted by the crystal during operation from causing damage to other components.

[0013] Further, the first clamping member is formed by splicing a first rectangular module and a second rectangular module, and two first through holes for fixing the liquid inlet section and the liquid outlet section are arranged in the middle, one is an elongated strip, and the other is a circular one; the elongated first through hole is used to clamp the bent pipe section of the liquid outlet section, and the circular first through hole is used to clamp the liquid inlet section; two elongated second through holes for connecting the crystal table plate are respectively arranged at both ends of the first module; the connecting member passes through the two elongated second through holes to fix the first module on the crystal table plate; the second clamping member includes a clamping end and a connecting end, and its clamping end includes a third rectangular module, and its connecting end includes a right-angle fixture; one end of the right-angle fixture is connected to the third module, and the other end is provided with a second elongated through hole for connecting the crystal table plate; The third module is formed by splicing two small rectangular blocks, and a circular first through hole is set in the middle for fixing the liquid inlet avoidance section and the liquid outlet avoidance section; the connecting piece passes through the long second through hole to fix the right-angle fixer on the crystal table panel; the third clamping piece includes a clamping end and a connecting end, and its clamping end includes a rectangular fourth module, and its connecting end includes a rectangular fixer; the rectangular fixer is connected to the fourth module; the fourth module is formed by splicing two small rectangular blocks, and a circular first through hole is set in the middle for fixing the liquid inlet avoidance section and the liquid outlet avoidance section, or the liquid inlet cooling section and the liquid outlet cooling section; the bottom of the rectangular fixer is provided with a circular second through hole for connecting the crystal bracket; the connecting piece is set in the second through hole to fix the rectangular fixer on the crystal bracket.

[0014] Furthermore, four mounting holes for installing the light blocking component are symmetrically arranged on the two smaller sides of the thermal conductive module, a rectangular groove is arranged in the middle of the larger side, a row of third through holes for installing the crystal clamping screws are arranged in the rectangular groove, and the crystal clamping screws for clamping the crystal are arranged in the third through holes; at least two first protrusions are arranged on the outer side of the lower part of the thermal conductive module, and a fourth through hole for fixing the thermal conductive module is respectively arranged on the two first protrusions, and at least two second protrusions for fixing the crystal are arranged on the inner side of the lower part of the thermal conductive module.

[0015] Furthermore, the light shielding assembly includes a light shielding plate fixing block and a light shielding plate connected to the upper part of the light shielding plate fixing block; the light shielding plate fixing block is connected to the heat conduction module. The light shielding plate fixing block and the light shielding plate are used to shield light and protect other components, thereby preventing other components from being damaged by high temperature when incident light is offset.

[0016] Furthermore, the liquid inlet cooling section, the liquid outlet cooling section and the reflux section are made of oxygen-free copper, and the rest of the material is structural steel; the material of the heat conduction module is oxygen-free copper, and an indium foil is provided between the heat conduction module and the crystal. The advantage of using oxygen-free copper for the liquid inlet cooling section, the liquid outlet cooling section, the reflux section and the heat conduction module is good thermal conductivity; the purpose of providing the indium foil is to improve the heat exchange efficiency between the heat conduction module and the crystal.

[0017] Furthermore, the material of the crystal insulation board is aluminum alloy, and the material of the crystal insulation pad is fiberglass, which has the advantage of good insulation performance.

[0018] Furthermore, the liquid inlet avoidance section and the liquid outlet avoidance section located between the two second clamping members are each provided with a pipe joint; the inlet of the liquid inlet section and the outlet of the liquid outlet section are each provided with a pipe joint. The purpose of providing the pipe joint is to ensure the connection strength.

[0019] Furthermore, the wall thickness of the entire cooling pipe is 2 mm, and the inner diameter is 8 mm; the coolant introduced into the cooling pipe is liquid nitrogen.

[0020] The present invention also provides a cooling simulation analysis method for the above-mentioned high-stability crystal cooling device, which is special in that it includes the following steps:

[0021] Step 1: Use SOLIDWORKS to model a high-stability crystal cooling device, obtain a three-dimensional model diagram, and output it as a *.x_t file;

[0022] Step 2: Import the *.x_t file obtained in step 1 into the DM model processor in ANSYS Workbench, and use the filling and patching tools in DM to extract the flow channel model; then import the flow channel model into the Mesh mesh processor in Workbench, use the multi-zone meshing method to divide the flow channel model into meshes, and set the names of the inlets, outlets and walls of the model, and output it as a *.mesh file;

[0023] Step 3: Use ANSYS Fluent to load the *.mesh file obtained in step 2, set the simulation mathematical model, physical parameters, boundary conditions and select the calculation method, perform fluid simulation analysis and solid simulation analysis, and obtain the results of fluid simulation analysis and solid simulation analysis;

[0024] Step 4, perform fluid-solid coupling simulation analysis, set the mathematical model and boundary conditions of the contact surface between the cooling pipe and the coolant, and set eleven monitoring points on the outer wall of the cooling pipe to simulate the working environment, perform vibration simulation analysis, and obtain time domain displacement data at each monitoring point; the eleven monitoring points include two monitoring points respectively set in the middle of the liquid inlet cooling section and the middle of the liquid outlet cooling section, four monitoring points respectively set in the contact position between the liquid inlet avoidance section and the liquid outlet avoidance section and the second clamping member, four monitoring points respectively set in the contact position between the liquid inlet avoidance section and the liquid outlet avoidance section and the third clamping member, and one monitoring point set in the curved pipe section of the liquid outlet section passing through the first clamping member;

[0025] Step 5: Arrange the above fluid simulation analysis, solid state simulation analysis and fluid-solid coupling simulation analysis results to complete the cooling simulation analysis of the high-stability crystal cooling device.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] 1. The high-stability crystal cooling device provided by the present invention has a cooling pipe with an optimized inner diameter, bending angle and length, and adopts a combination of multiple sections of corrugated pipes and hard pipes. The entire section adopts a uniform inner diameter of 8mm and a wall thickness of 2mm, and the overall rigidity is high; a heat conduction module is provided on the liquid inlet cooling section and the liquid outlet cooling section, so that the overall cooling effect of the cooling device meets the requirements;

[0028] 2. The high-stability crystal cooling device provided by the present invention has a clamping member composed of a first clamping member, a second clamping member and a third clamping member, which are used together to fix the cooling pipe and weaken the vibration caused by the coolant in the cooling pipe, and the fixing is firm and the vibration reduction effect is good;

[0029] 3. The high-stability crystal cooling device provided by the present invention is provided with a heat conduction module, which functions to enhance the heat dissipation effect, clamp the crystal and the cooling tube, and has high heat exchange efficiency;

[0030] 4. The high-stability crystal cooling device provided by the present invention has a liquid inlet cooling section, a liquid outlet cooling section, a reflux section and a heat conduction module made of oxygen-free copper, and an indium foil is arranged between the heat conduction module and the crystal, so the heat conduction effect is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a structural schematic diagram of an existing crystal cooling device;

[0032] Figure 1 Description of reference numerals: 01-cooling pipe, 02-fixing device, 03-heat conducting element;

[0033] Figure 2 A schematic diagram of an actual working environment of an embodiment of a high-stability crystal cooling device provided by the present invention;

[0034] Figure 3 A schematic structural diagram of an embodiment of a high-stability crystal cooling device provided by the present invention;

[0035] Figure 4 A schematic structural diagram of a first clamping member in an embodiment of a high-stability crystal cooling device provided by the present invention;

[0036] Figure 5 A schematic structural diagram of a second clamping member in an embodiment of a high-stability crystal cooling device provided by the present invention;

[0037] Figure 6 A schematic structural diagram of a third clamping member in an embodiment of a high-stability crystal cooling device provided by the present invention;

[0038] Figure 7 A schematic diagram of the structure of a cooling tube in an embodiment of a high-stability crystal cooling device provided by the present invention;

[0039] Figure 8 A side view of a heat conduction module in an embodiment of a crystal cooling device with high stability provided by the present invention;

[0040] Fig. 9 A top view of a heat conduction module in an embodiment of a high-stability crystal cooling device provided by the present invention;

[0041] Fig.10 A flow chart of a cooling simulation analysis method for an embodiment of a high-stability crystal cooling device provided by the present invention;

[0042] Figures 2 to 9 Explanation of the reference numerals: 1-cooling pipe, 11-liquid inlet section, 12-liquid outlet section, 13-liquid inlet avoidance section, 14-liquid outlet avoidance section, 15-liquid inlet cooling section, 16-liquid outlet cooling section, 17-reflux section; 2-clamping member, 21-first clamping member, 211-first module, 212-second module, 22-second clamping member, 221-third module, 222-right angle fixer, 23-third clamping member, 231-fourth module, 232-rectangular fixer, 201-first through hole , 202-second through hole; 3-heat conduction module; 301-mounting hole, 302-third through hole, 303-fourth through hole, 304-arc-shaped groove, 305-rectangular groove, 306-first bump, 307-second bump; 4-pipe joint; 5-crystal table panel; 6-crystal bracket; 7-insulation assembly, 71-crystal insulation board, 72-crystal insulation pad; 8-crystal; 9-crystal clamping screw; 10-light blocking assembly, 101-light blocking board fixing block, 102-light blocking board. DETAILED DESCRIPTION

[0043] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0044] A high stability crystal cooling device, see Figures 2 to 9 A high-stability crystal cooling device is arranged on a crystal support assembly, the crystal support assembly includes a crystal table plate 5 and a crystal bracket 6 arranged on the side of the crystal table plate 5, and a crystal 8 is arranged on the crystal bracket 6; it includes a cooling pipe 1, a clamping member 2 arranged on the cooling pipe 1, a heat conduction module 3 arranged on the cooling pipe 1, a heat insulation component 7 arranged between the crystal bracket 6 and the crystal 8, and a light shielding component 10; the cooling pipe 1 includes a liquid inlet section 11, a liquid inlet avoidance section 13, a liquid inlet cooling section 15, a reflux section 17, a liquid outlet cooling section 16, a liquid outlet avoidance section 14 and a liquid outlet section 12 connected in sequence; the liquid inlet section 11 and the liquid outlet section 12 are divided into a straight pipe section and a curved pipe section, and the two curved pipe sections are respectively connected by The cooling tube 1 is composed of two interconnected bending sections, the bending surfaces of the two bending sections are perpendicular to each other and are in a circular arc transition, and two straight tube sections and two curved tube sections are respectively arranged correspondingly; the liquid inlet avoidance section 13 and the liquid outlet avoidance section 14 are both U-shaped tubes, and are in a circular arc transition and are correspondingly arranged, and one end of the two U-shaped tubes is respectively connected to the curved tube sections of the corresponding liquid inlet section 11 and the liquid outlet section 12; the liquid inlet cooling section 15 and the liquid outlet cooling section 16 are divided into a straight tube section and a curved tube section, and the curved tube sections are respectively connected to the other end of the corresponding U-shaped tube; the reflux section 17 is a U-shaped tube, and its two ends are respectively bent and connected to the liquid inlet cooling section 15 and the liquid outlet cooling section 16, and are in a circular arc transition; all the bent parts in the cooling tube 1 are made of corrugated tubes; the clamping member 2 includes a A first clamping member 21, two second clamping members 22 and two third clamping members 23; the first clamping member 21 is clamped at the connection between the straight pipe section and the curved pipe section of the liquid inlet section 11 and the liquid outlet section 12, and is connected to the crystal table panel 5; the two second clamping members 22 are clamped on the liquid inlet avoidance section 13 and the liquid outlet avoidance section 14, and are connected to the crystal table panel 5, one is arranged near the lower part of the crystal table panel 5, and the other is arranged at the connection between the curved pipe section of the liquid inlet section 11 and the liquid inlet avoidance section 13, the curved pipe section of the liquid outlet section 12 and the liquid outlet avoidance section 14; the two third clamping members 23 are clamped near the outlet of the liquid inlet avoidance section 13 and near the inlet of the liquid outlet avoidance section 14 and are connected to the side of the crystal bracket 6, one third clamping member 23 is clamped near the outlet of the liquid inlet avoidance section 13 and near the inlet of the liquid outlet avoidance section 14 and is connected to the side of the crystal bracket 6, one third clamping member 23 is clamped at the outlet of the liquid inlet avoidance section 13 and near the inlet of the liquid outlet avoidance section 14, ... Three clamping members 23 are connected to the upper side of the crystal support 6, and the other is connected to the lower side of the crystal support 6; the two heat-conducting modules 3 are symmetrically arranged on the liquid inlet cooling section 15 and the liquid outlet cooling section 16, the heat-conducting module 3 is located on the crystal support 6, and a plurality of crystal clamping screws 9 are arranged on the heat-conducting module 3 to clamp the crystal 8 between the two heat-conducting modules 3; the heat-conducting module 3 is a rectangular parallelepiped, and the upper part of the larger side thereof is provided with an arc-shaped groove 304 for installing and fixing the liquid inlet cooling section 15 or the liquid outlet cooling section 16; the light-blocking component 10 is located on the outer side of the two end surfaces of the crystal 8 and is connected to the heat-conducting module 3; the insulation component 7 includes a crystal insulation plate 71 and a crystal insulation pad 72 arranged from bottom to top.

[0045] The crystal insulation plate 71 and the crystal insulation pad 72 play a protective role, preventing the temperature transmitted by the crystal 8 during operation from causing damage to other components.

[0046] The first clamping member 21 is composed of a first rectangular module 211 and a second rectangular module 212, and is provided with two first through holes 201 for fixing the liquid inlet section 11 and the liquid outlet section 12 in the middle, one of which is elongated and the other is circular; the elongated first through hole 201 is used to clamp the curved pipe section of the liquid outlet section 12, and the circular first through hole 201 is used to clamp the liquid inlet section 11; two ends of the first module 211 are respectively provided with two elongated second through holes 202 for connecting the crystal table panel 5; the connecting member passes through the two elongated second through holes 202 to fix the first module 211 on the crystal table panel 5; the second clamping member 22 includes a clamping end and a connecting end, and its clamping end includes a third rectangular module 221, and its connecting end includes a right-angle fixer 222; one end of the right-angle fixer 222 is connected to the third module 221, and the other end is provided with a second elongated through hole 202 for connecting the crystal table panel 5; the third The module 221 is composed of two small rectangular blocks, and a circular first through hole 201 is provided in the middle for fixing the liquid inlet avoidance section 13 and the liquid outlet avoidance section 14; the connecting piece passes through the long second through hole 202 to fix the right-angle fixture 222 on the crystal table plate 5; the third clamping member 23 includes a clamping end and a connecting end, the clamping end includes a rectangular fourth module 231, and the connecting end includes a rectangular fixture 232; the rectangular fixture 232 and the fourth Module 231 is connected; the fourth module 231 is spliced ​​by two small rectangular blocks, and a circular first through hole 201 is provided in the middle for fixing the liquid inlet avoidance section 13 and the liquid outlet avoidance section 14, or the liquid inlet cooling section 15 and the liquid outlet cooling section 16; a circular second through hole 202 is provided at the bottom of the rectangular fixture 232 for connecting the crystal bracket 6; a connecting piece is provided in the second through hole 202 to fix the rectangular fixture 232 on the crystal bracket 6.

[0047] Four mounting holes 301 for mounting the light blocking component 10 are symmetrically arranged on the two smaller sides of the thermal conductive module 3, and a rectangular groove 305 is arranged in the middle of the larger side, and a row of third through holes 302 for mounting the crystal clamping screw 9 is arranged in the rectangular groove 305, and the crystal clamping screw 9 for clamping the crystal 8 is arranged in the third through hole 302; at least two first protrusions 306 are arranged on the outer side of the lower part of the thermal conductive module 3, and a fourth through hole 303 for fixing the thermal conductive module 3 is respectively arranged on the two first protrusions 306, and at least two second protrusions 307 for fixing the crystal 8 are arranged on the inner side of the lower part of the thermal conductive module 3.

[0048] The light shielding assembly 10 includes a light shielding plate fixing block 101 and a light shielding plate 102 connected to the upper part of the light shielding plate fixing block 101; the light shielding plate fixing block 101 is connected to the heat conduction module 3. The light shielding plate fixing block 101 and the light shielding plate 102 are used to shield light and protect other components to prevent high temperature damage to other components when the incident light is offset.

[0049] The liquid inlet cooling section 15, the liquid outlet cooling section 16 and the reflux section 17 are made of oxygen-free copper, and the rest of the material is structural steel; the material of the heat conduction module 3 is oxygen-free copper, and an indium foil is provided between the heat conduction module 3 and the crystal 8. The advantage of using oxygen-free copper in the liquid inlet cooling section 15, the liquid outlet cooling section 16, the reflux section 17 and the heat conduction module 3 is good thermal conductivity; the purpose of providing the indium foil is to improve the heat exchange efficiency between the heat conduction module 3 and the crystal 8. In actual application scenarios, the material of the heat conduction module 3 can also be replaced with other metal or non-metal materials with good thermal conductivity.

[0050] The material of the crystal insulation plate 71 is aluminum alloy, and the material of the crystal insulation pad 72 is glass fiber reinforced plastic, which has the advantage of good insulation performance.

[0051] The inlet and outlet sections 13 and 14 between the two second clamps 22 are each provided with a pipe joint 4; the inlet of the inlet section 11 and the outlet of the outlet section 12 are each provided with a pipe joint 4. The purpose of providing the pipe joint 4 is to ensure the connection strength.

[0052] The wall thickness of the entire cooling tube 1 is 2mm, and the inner diameter is 8mm; the coolant introduced into the cooling tube 1 is liquid nitrogen. From the simulation analysis, it can be seen that the thicker the wall of the cooling tube 1, the more obvious the vibration reduction effect. Selecting a thicker pipe can significantly reduce vibration and improve stability, but the thicker the wall, the worse the cooling effect of the crystal, so the pipe wall thickness is selected to be 2mm; the advantage of selecting liquid nitrogen as the coolant is that it is economical and practical, and the arrow in the figure indicates the flow direction of liquid nitrogen.

[0053] The embodiment of the present invention also provides a cooling simulation analysis method for the above-mentioned high-stability crystal cooling device, see Fig.10 , including the following steps:

[0054] Step 1: Use SOLIDWORKS to model a high-stability crystal cooling device, obtain a three-dimensional model diagram, and output it as a *.x_t file;

[0055] Step 2: Import the *.x_t file obtained in step 1 into the DM model processor in ANSYS Workbench, and use the filling and patching tools in DM to extract the flow channel model; then import the flow channel model into the Mesh mesh processor in Workbench, use the multi-zone meshing method to divide the flow channel model into meshes, and set the names of the inlets, outlets and walls of the model, and output it as a *.mesh file;

[0056] Step 3: Use ANSYS Fluent to load the *.mesh file obtained in step 2, set the simulation mathematical model, physical parameters, boundary conditions and select the calculation method, perform fluid simulation analysis and solid simulation analysis, and obtain the results of fluid simulation analysis and solid simulation analysis;

[0057] Step 4, perform fluid-solid coupling simulation analysis, set the mathematical model and boundary conditions of the contact surface between the cooling pipe 1 and the coolant, and set eleven monitoring points on the outer wall of the cooling pipe 1 to simulate the working environment, perform vibration simulation analysis, and obtain the time domain displacement data at each monitoring point; the eleven monitoring points include two monitoring points respectively set in the middle of the liquid inlet cooling section 15 and the middle of the liquid outlet cooling section 16, four monitoring points respectively set at the contact parts of the liquid inlet avoidance section 13 and the liquid outlet avoidance section 14 with the second clamping member 22, four monitoring points respectively set at the contact parts of the liquid inlet avoidance section 13 and the liquid outlet avoidance section 14 with the third clamping member 23, and one monitoring point set at the curved pipe section of the liquid outlet section 12 passing through the first clamping member 21;

[0058] Step 5: Arrange the above fluid simulation analysis, solid state simulation analysis and fluid-solid coupling simulation analysis results to complete the cooling simulation analysis of the high-stability crystal cooling device.

[0059] The embodiment of the present invention also performs the above simulation analysis, and the results are as follows: the maximum value of the displacement power spectrum amplitude of each monitoring point is less than 10 Hz, and the displacement spectrum density excitation amplitude is very obviously suppressed.

[0060] The embodiment of the present invention further provides a method for testing the above-mentioned high-stability crystal cooling device, comprising the following steps:

[0061] Step 1, assembling a high stability crystal cooling device;

[0062] Step 2: introduce liquid nitrogen into the cooling tube 1 and wait for the fluid to stabilize;

[0063] Step 3, test the vibration amplitude of the crystal 8 by an autocollimator or an interferometer; if the vibration amplitude meets the design requirements, the test is completed; if the vibration amplitude does not meet the test requirements, execute step 4;

[0064] Step 4, disassemble the high-stability crystal cooling device, change at least one of the bending radius of each bending part of the cooling tube 1, the length of each straight tube part of the cooling tube 1, the clamping position of each clamping member 2, and the thickness of the crystal insulation board 71 in the high-stability crystal cooling device, and then return to step 1 until the vibration amplitude of the crystal 8 meets the design requirements.

[0065] The cooling tube 1 of the embodiment of the present invention adopts an optimized inner diameter, bending angle and length. The liquid inlet cooling section 15 and the liquid outlet cooling section 16 of the cooling tube 1 are provided with a heat conduction module 3, so that the overall cooling effect of the cooling device meets the requirements; the clamping member 2 is composed of a first clamping member 21, a second clamping member 22 and a third clamping member 23, which are used together to fix the cooling tube 1 and weaken the vibration caused by the coolant in the cooling tube 1, and the fixation is firm and the vibration reduction effect is good; a heat conduction module 3 is provided, and the function of the heat conduction module 3 is to enhance the heat dissipation effect, clamp the crystal 8 and clamp the cooling tube 1, and the heat exchange efficiency is high; the liquid inlet cooling section 15, the liquid outlet cooling section 16 and the reflux section 17 of the cooling tube 1 and the heat conduction module 3 are made of oxygen-free copper, and an indium foil is provided between the heat conduction module 3 and the crystal 8, which has a good thermal conductivity effect.

Claims

1. A high-stability crystal cooling device, arranged on a crystal support assembly, the crystal support assembly comprising a crystal table plate (5) and a crystal support (6) arranged on the side of the crystal table plate (5), and a crystal (8) is arranged on the crystal support (6); characterized in that: It comprises a cooling tube (1), a clamping member (2) arranged on the cooling tube (1), a heat conduction module (3) arranged on the cooling tube (1), a heat insulation component (7) arranged between the crystal support (6) and the crystal (8), and a light shielding component (10); The cooling pipe (1) comprises a liquid inlet section (11), a liquid inlet avoidance section (13), a liquid inlet cooling section (15), a reflux section (17), a liquid outlet cooling section (16), a liquid outlet avoidance section (14) and a liquid outlet section (12) which are connected in sequence; the liquid inlet section (11) and the liquid outlet section (12) are divided into a straight pipe section and a curved pipe section, and the two curved pipe sections are each composed of two mutually connected bent parts, the bent surfaces of the two bent parts are perpendicular to each other and are in the form of circular arc transitions, and the two straight pipe sections and the two curved pipe sections are respectively arranged correspondingly; the liquid inlet avoidance section (13) and the liquid outlet avoidance section (16) are respectively arranged correspondingly to each other; The sections (14) are all U-shaped tubes, and are arranged in a circular arc transition, one end of the two U-shaped tubes is respectively connected to the corresponding curved tube sections of the liquid inlet section (11) and the liquid outlet section (12); the liquid inlet cooling section (15) and the liquid outlet cooling section (16) are divided into a straight tube section and a curved tube section, and the curved tube sections are respectively connected to the other end of the corresponding U-shaped tube; the reflux section (17) is a U-shaped tube, and its two ends are respectively connected to the liquid inlet cooling section (15) and the liquid outlet cooling section (16) by bending, and are in a circular arc transition; all the bent parts in the cooling tube (1) are made of corrugated tubes; The clamping member (2) comprises a first clamping member (21), two second clamping members (22) and two third clamping members (23); The first clamping member (21) is clamped at the connection between the straight pipe section and the curved pipe section of the liquid inlet section (11) and the liquid outlet section (12), and is connected to the crystal table panel (5); the two second clamping members (22) are clamped on the liquid inlet avoidance section (13) and the liquid outlet avoidance section (14), and are connected to the crystal table panel (5), one of which is arranged at a position close to the lower part of the crystal table panel (5), and the other is arranged at the connection between the curved pipe section of the liquid inlet section (11) and the liquid inlet avoidance section (13), and the curved pipe section of the liquid outlet section (12) and the liquid outlet avoidance section (14); the two third clamping members (23) are clamped at one side close to the outlet of the liquid inlet avoidance section (13) and close to the inlet of the liquid outlet avoidance section (14), and are connected to the side of the crystal support (6), one of the third clamping members (23) is connected to the upper part of the side of the crystal support (6), and the other is connected to the lower part of the side of the crystal support (6); The two heat-conducting modules (3) are symmetrically arranged on the liquid inlet cooling section (15) and the liquid outlet cooling section (16); the heat-conducting modules (3) are located on the crystal support (6); a plurality of crystal clamping screws (9) are arranged on the heat-conducting modules (3) to clamp the crystal (8) between the two heat-conducting modules (3); the heat-conducting modules (3) are rectangular parallelepiped, and the upper part of the larger side surface thereof is provided with an arc-shaped groove (304) for mounting and fixing the liquid inlet cooling section (15) or the liquid outlet cooling section (16); the light-shielding assembly (10) is located outside the two end surfaces of the crystal (8) and is connected to the heat-conducting modules (3); The thermal insulation component (7) comprises a crystal thermal insulation plate (71) and a crystal thermal insulation pad (72) arranged from bottom to top.

2. The high-stability crystal cooling device according to claim 1, characterized in that: The first clamping member (21) is formed by splicing a rectangular first module (211) and a rectangular second module (212), and is provided with two first through holes (201) in the middle for fixing the liquid inlet section (11) and the liquid outlet section (12), one of which is in an elongated shape and the other is in a circular shape; the elongated first through hole (201) is used to clamp the curved pipe section of the liquid outlet section (12), and the circular first through hole (201) is used to clamp the liquid inlet section (11); two elongated second through holes (202) for connecting to the crystal table panel (5) are respectively provided at both ends of the first module (211); the connecting member passes through the two elongated second through holes (202) to fix the first module (211) on the crystal table panel (5); The second clamping member (22) comprises a clamping end and a connecting end, wherein the clamping end comprises a third rectangular block (221), and the connecting end comprises a right-angle fixer (222); one end of the right-angle fixer (222) is connected to the third block (221), and the other end is provided with a second long strip through hole (202) for connecting to the crystal table panel (5); the third module (221) is formed by splicing two small rectangular blocks, and a circular first through hole (201) is provided in the middle for fixing the liquid inlet avoidance section (13) and the liquid outlet avoidance section (14); the connecting member passes through the second long strip through hole (202) to fix the right-angle fixer (222) on the crystal table panel (5); The third clamping member (23) comprises a clamping end and a connecting end, wherein the clamping end comprises a fourth rectangular block (231), and the connecting end comprises a rectangular fixer (232); the rectangular fixer (232) is connected to the fourth block (231); the fourth block (231) is formed by splicing two small rectangular blocks, and a circular first through hole (201) is arranged in the middle for fixing a liquid inlet avoidance section (13) and a liquid outlet avoidance section (14), or a liquid inlet cooling section (15) and a liquid outlet cooling section (16); a circular second through hole (202) is arranged at the bottom of the rectangular fixer (232) for connecting to a crystal bracket (6); a connecting member is arranged in the second through hole (202) to fix the rectangular fixer (232) on the crystal bracket (6).

3. The high stability crystal cooling device according to claim 1, characterized in that: Four mounting holes (301) for mounting a light shielding component (10) are symmetrically arranged on two smaller side surfaces of the heat conducting module (3); a rectangular groove (305) is arranged in the middle of the larger side surface; a row of third through holes (302) for mounting a crystal clamping screw (9) is arranged in the rectangular groove (305); a crystal clamping screw (9) for clamping a crystal (8) is arranged in the third through hole (302); at least two first protrusions (306) are arranged on the outer side of the lower part of the heat conducting module (3); a fourth through hole (303) for fixing the heat conducting module (3) is respectively arranged on the two first protrusions (306); and at least two second protrusions (307) for fixing the crystal (8) are arranged on the inner side of the lower part of the heat conducting module (3).

4. The high stability crystal cooling device according to claim 3, characterized in that: The light shielding assembly (10) comprises a light shielding plate fixing block (101) and a light shielding plate (102) connected to the upper part of the light shielding plate fixing block (101); the light shielding plate fixing block (101) is connected to the heat conduction module (3).

5. The high stability crystal cooling device according to claim 4, characterized in that: The liquid inlet cooling section (15), the liquid outlet cooling section (16) and the reflux section (14) are made of oxygen-free copper, and the remaining parts are made of structural steel; the heat conduction module (3) is made of oxygen-free copper, and an indium foil is provided between the heat conduction module (3) and the crystal (8).

6. The high stability crystal cooling device according to claim 1, characterized in that: The material of the crystal thermal insulation plate (71) is aluminum alloy, and the material of the crystal thermal insulation pad (72) is glass fiber reinforced plastic.

7. The high stability crystal cooling device according to claim 2, characterized in that: The portions of the liquid inlet avoidance section (13) and the liquid outlet avoidance section (14) located between the two second clamping members (22) are each provided with a pipe joint (4); and the inlet of the liquid inlet section (11) and the outlet of the liquid outlet section (12) are each provided with a pipe joint (4).

8. The high-stability crystal cooling device according to claim 7, characterized in that: The wall thickness of the entire cooling tube (1) is 2 mm, and the inner diameter is 8 mm; the cooling liquid introduced into the cooling tube (1) is liquid nitrogen.

9. A cooling simulation analysis method for a high-stability crystal cooling device according to any one of claims 1 to 8, characterized in that: The following steps are involved: Step 1: Use SOLIDWORKS to model a high-stability crystal cooling device, obtain a three-dimensional model diagram, and output it as a *.x_t file; Step 2: Import the *.x_t file obtained in step 1 into the DM model processor in ANSYS Workbench, and use the filling and patching tools in DM to extract the flow channel model; then import the flow channel model into the Mesh mesh processor in Workbench, use the multi-zone meshing method to divide the flow channel model into meshes, and set the names of the inlets, outlets and walls of the model, and output it as a *.mesh file; Step 3: Use ANSYS Fluent to load the *.mesh file obtained in step 2, set the simulation mathematical model, physical parameters, boundary conditions and select the calculation method, perform fluid simulation analysis and solid simulation analysis, and obtain the results of fluid simulation analysis and solid simulation analysis; Step 4, performing fluid-solid coupling simulation analysis, setting a mathematical model and boundary conditions of the contact surface between the cooling pipe (1) and the coolant, and setting eleven monitoring points on the outer wall of the cooling pipe (1), simulating the working environment, performing vibration simulation analysis, and obtaining time domain displacement data at each monitoring point; the eleven monitoring points include two monitoring points respectively set in the middle of the liquid inlet cooling section (15) and the middle of the liquid outlet cooling section (16), four monitoring points respectively set in the contact position between the liquid inlet avoidance section (13) and the liquid outlet avoidance section (14) and the second clamping member (22), four monitoring points respectively set in the contact position between the liquid inlet avoidance section (13) and the liquid outlet avoidance section (14) and the third clamping member (23), and one monitoring point set in the curved pipe section of the liquid outlet section (12) passing through the first clamping member (21); Step 5: Arrange the above fluid simulation analysis, solid state simulation analysis and fluid-solid coupling simulation analysis results to complete the cooling simulation analysis of the high-stability crystal cooling device.

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