Rotary mirror device and optical apparatus

Abstract

The invention relates to the technical field of optical equipment, and discloses a rotary reflector device and optical equipment, the rotary reflector device comprises a vacuum cavity, a reflector, a lens fixing seat, a fixing shaft, a transmission shaft, a heat dissipation assembly and a motor, one end of the transmission shaft extends into the vacuum cavity, and the other end of the transmission shaft is located outside the vacuum cavity; the vacuum pump is in transmission connection with a motor outside the vacuum cavity; the fixed shaft and the reflector are located in the vacuum cavity, the fixed shaft is in transmission connection with the transmission shaft, and the reflector is fixed to the fixed shaft; the lens fixing seat is fixedly arranged in the vacuum cavity; the heat dissipation assembly comprises a first heat dissipation part, the first heat dissipation part comprises a cooling flow channel and a cooling medium filled in the cooling flow channel, one end of the cooling flow channel is located in the fixed shaft, and the other end of the cooling flow channel extends to the portion, located outside the vacuum cavity, of the transmission shaft. According to the rotary reflecting mirror device, heat dissipation can be carried out on the reflecting mirror.

Description

Technical Field

[0001] The present application relates to the technical field of optical equipment, and in particular to a rotating reflector device and an optical equipment. Background Art

[0002] Precision optical equipment needs to be set up in an ultra-high vacuum environment, and the vacuum degree requirement can reach 10 -6 Pa, which puts forward many requirements for the optical component fixing structure inside the device, such as sealing and isolation, the absence of non-metallic materials in the device, etc. When the device is connected to a high-power light source, the strong light beam will input a high energy on the surface of the optical component, and the energy per square centimeter can reach millions. In this case, the optical component will generate more heat. If the heat cannot be dissipated in time, it will affect the service life of the optical component. Summary of the invention

[0003] The present application can provide a rotating reflector device and an optical device for dissipating heat from the reflector.

[0004] On the one hand, the present application may provide a rotating reflector device, which may include a vacuum chamber, a reflector, a lens fixing seat, a fixed shaft, a transmission shaft, a heat dissipation assembly and a motor. A through hole may be provided on the cavity wall of the vacuum chamber, one end of the transmission shaft passes through the through hole and extends into the vacuum chamber, and the other end is located outside the vacuum chamber and is transmission-connected to a motor located outside the vacuum chamber. The fixed shaft and the reflector are located in the vacuum chamber, the fixed shaft is transmission-connected to the transmission shaft, and the reflector is fixedly connected to one end of the fixed shaft away from the transmission shaft. The lens fixing seat is fixedly arranged in the vacuum chamber, and the lens fixing seat is arranged around the circumference of the fixed shaft. The heat dissipation assembly may include a first heat dissipation portion, and the first heat dissipation portion may include a cooling channel and a cooling medium. One end of the cooling channel is located in the fixed shaft, and the other end extends to the portion of the transmission shaft located outside the vacuum chamber. The cooling medium is filled in the cooling channel.

[0005] The rotating reflector device provided in the present application dissipates heat generated by the reflector through a cooling channel by setting a heat dissipation component in a vacuum cavity, and utilizes a cooling medium to transfer the heat generated by the reflector to the portion of the transmission shaft located outside the vacuum cavity. Since a portion of the transmission shaft is located in the atmospheric environment, the heat can be dissipated into the air, thereby completing the heat dissipation of the reflector.

[0006] In some possible implementations, the heat dissipation assembly may also envelop a second heat dissipation portion, and the second heat dissipation portion may include a water-cooled fixing seat and a liquid-cooled impeller, and the water-cooled fixing seat may be sleeved on the portion of the transmission shaft outside the vacuum chamber. A liquid-cooled cavity is provided in the water-cooled fixing seat, and the liquid-cooled cavity may be annular and sleeved on the surface of the transmission shaft. The liquid-cooled impeller may be located in the liquid-cooled cavity, which may be sleeved on the transmission shaft and remain relatively fixed with the transmission shaft. The liquid-cooled cavity may be connected to an external cold source, so that the liquid-cooled cavity is filled with coolant, and when the transmission shaft rotates, the liquid-cooled impeller may be driven to rotate, thereby taking away the coolant that has absorbed the heat of the cooling medium, thereby completing the heat dissipation process.

[0007] In some possible implementations, a sealing cavity is provided between the water-cooled fixed seat and the transmission shaft, and the sealing cavity can be provided on the side of the liquid-cooled impeller facing the sealing cavity. The rotating reflector device can also include a sealing assembly, and the sealing assembly can be located in the sealing cavity. The sealing assembly can include a first sealing ring, a sealing friction material, and a second sealing ring. The first sealing ring is fixedly connected to the transmission shaft, the sealing landscape is fixedly connected to the water-cooled fixed seat, and the sealing friction material is located between the first sealing ring and the second sealing ring. The first sealing ring cooperates with the second sealing ring through the sealing friction material to achieve a dynamic seal between the second sealing ring and the water-cooled fixed seat.

[0008] In some possible implementation schemes, there may be two sealing assemblies and two corresponding sealing cavities. The two sealing cavities are respectively located on both sides of the liquid cooling cavity. The sealing assemblies are respectively located in the two sealing cavities, which can not only prevent the coolant from entering the vacuum cavity, but also prevent the coolant from entering the motor.

[0009] In some possible implementations, the sealing assembly may further include two sealing rings, one of which is located between the first sealing ring and the transmission shaft, and the other is located between the second sealing ring and the water-cooling fixing seat. By providing the sealing rings, static sealing between the water-cooling fixing seat and the second sealing ring, and static sealing between the first sealing ring and the transmission shaft can be achieved.

[0010] In some possible implementations, the water-cooling fixing seat may also be provided with a flushing port, one end of which is connected to the sealing cavity, and the other end is connected to the outside. The sealing flushing port can deliver flushing liquid to the sealing component, and flush the sealing component to flush away the debris generated by the sealing friction material, thereby ensuring the friction fit between the first sealing ring and the sealing friction material.

[0011] In some possible embodiments, the rotating reflector device may further include a magnetic suspension positioning component, which may be arranged between the fixed axis and the lens fixing seat. The magnetic suspension positioning component may include an axial magnetic suspension positioning device and a radial magnetic suspension positioning device, which can be used to position the fixed axis in the axial and radial directions.

[0012] In some possible implementations, the magnetic suspension positioning assembly may include an axial magnetic suspension positioning device, and the axial magnetic suspension positioning device may include an axial magnetic suspension rotor and an axial magnetic suspension stator. The axial magnetic suspension rotor is sleeved on the fixed shaft, and the axial magnetic suspension stator is fixedly installed on the lens fixing seat. The axial magnetic suspension stator and the axial magnetic suspension rotor are coaxially arranged, and the axial magnetic suspension stator and the axial magnetic suspension rotor are spaced apart in the axial direction. Since there is a magnetic suspension force between the axial magnetic suspension rotor and the axial magnetic suspension stator, and the axial magnetic suspension positioning remains fixed, when the fixed shaft rotates, the magnetic suspension force can play an axial positioning role on the fixed shaft.

[0013] In some possible embodiments, the fixed shaft may include a first side and a second side that are opposite to each other in the axial direction, and both the first side and the second side may be provided with axial magnetic suspension positioning devices, and the two axial magnetic suspension positioning devices may be symmetrically arranged so that the axial magnetic suspension positioning devices on both sides exert forces in opposite directions on the fixed shaft, thereby further accurately positioning the fixed shaft.

[0014] In some possible implementations, the magnetic suspension positioning assembly may include a radial magnetic suspension positioning device, and the radial magnetic suspension positioning device may include a radial magnetic suspension rotor and a radial magnetic suspension stator, wherein the radial magnetic suspension rotor is sleeved on a fixed shaft, and the radial magnetic suspension stator is fixedly mounted on a lens fixing seat. The radial magnetic suspension stator is sleeved on the surface of the radial magnetic suspension rotor and is spaced apart from the radial magnetic suspension rotor. Since there is a magnetic suspension force between the radial magnetic suspension rotor and the radial magnetic suspension stator, and the radial magnetic suspension positioning remains fixed, when the fixed shaft rotates, the magnetic suspension force can play a radial positioning role on the fixed shaft.

[0015] In some possible implementation schemes, radial magnetic suspension positioning devices may be provided on both sides of the fixed shaft that are opposite to each other in the axial direction. By providing two sets of radial magnetic suspension positioning devices, the fixed shaft may be further accurately positioned.

[0016] In some possible embodiments, the transmission shaft may include a first shaft section and a second shaft section. The first shaft section is located in the vacuum chamber, and one end of the first shaft section is connected to the fixed shaft by transmission. One end of the second shaft section extends into the vacuum chamber and is connected to the first shaft section through an elastic coupling, and the other end of the second shaft section is connected to the motor by transmission. By setting an elastic coupling to connect the first shaft section and the second shaft section, when the second shaft section vibrates and transmits power to the first shaft section, the elastic coupling can absorb the vibration, so that when the first shaft section transmits power to the fixed shaft, no vibration is generated.

[0017] In some possible implementations, an elastic damping structure is provided in the elastic coupling, and the elastic damping force of the elastic damping structure in the axial direction is smaller than the magnetic levitation force of the axial magnetic levitation positioning device, and the elastic damping force of the elastic damping structure in the radial direction is smaller than the magnetic levitation force of the radial magnetic levitation positioning device. When the second shaft segment transmits power to the first shaft segment, the axial vibration and radial vibration of the second shaft segment will be absorbed by the metal elastic damping structure, and will not affect the positioning effect of the radial magnetic levitation positioning device and the axial magnetic levitation positioning device on the reflector, thereby ensuring the stability of the reflector when rotating.

[0018] In some possible implementations, the rotating reflector device may further include a magnetic fluid sealing assembly, which may be located between the through hole of the cavity wall and the transmission shaft. The magnetic fluid sealing assembly may include a sealing shell, a sealing base, and a magnetic fluid, wherein the sealing shell is sleeved on the second shaft section and fixed to the inner wall of the through hole by screws. A receiving cavity is formed between the sealing shell and the second shaft section, and the magnetic fluid is located in the receiving cavity. The sealing base is located on the side of the cavity wall away from the reflector, and is sleeved on the surface of the transmission shaft and fixedly connected to the cavity wall. The magnetic fluid sealing assembly forms a double seal by the sealing base and the magnetic fluid, so that there is no non-metallic outgassing and no friction in the vacuum cavity, thereby ensuring a clean environment in the vacuum cavity.

[0019] On the other hand, the present application may provide an optical device, which may include a device body and a rotating reflector device as in any of the above embodiments, wherein the rotating reflector is located in the device body. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the structure of an optical device in an embodiment of the present application;

[0021] Figure 2 for Figure 1 Axonometric view of the main body of the middle transmission shaft;

[0022] Figure 3 for Figure 1 A schematic cross-sectional structure diagram of a rotating reflector device;

[0023] Figure 4 for Figure 3 A schematic diagram of a cross-sectional structure of a magnetic fluid sealing component;

[0024] Figure 5 for Figure 3 An enlarged view of the structure at the water-cooling fixing seat.

[0025] Reference numerals:

[0026] 1-equipment body; 2-rotating reflector device; 3-light source; 10-reflector; 20-motor; 30-transmission shaft; 31-first shaft section; 32-second shaft section; 321-first step structure; 322-second step structure; 40-lens fixing seat; 41-first fixing part; 42-second fixing part; 50-fixed shaft; 60-radial magnetic suspension positioning device; 61-radial magnetic suspension rotor; 62-radial magnetic suspension stator; 70-axial magnetic suspension positioning device; 71-axial magnetic suspension rotor; 72-axial magnetic suspension stator; 80-vacuum cavity; 81-cavity wall; 90-magnetic fluid sealing assembly; 91-seal Housing; 92-sealing base; 93-bearing; 931-inner ring; 932-outer ring; 94-magnetic fluid; 100-elastic coupling; 101-elastic damping structure; 110-first heat dissipation part; 111-flow channel; 1111-first sub-flow channel; 1112-second sub-flow channel; 120-second heat dissipation part; 121-water-cooled fixing seat; 1211-liquid-cooled cavity; 1212-flushing port; 122-liquid-cooled impeller; 1221-blade; 123-sealing assembly; 1231-first sealing ring; 1232-sealing friction material; 1233-second sealing ring; 1234-sealing ring; 112-phase change metal. DETAILED DESCRIPTION

[0027] The terms used in the following embodiments are only for the purpose of describing specific embodiments and are not intended to be limiting of the present application. As used in the specification and appended claims of the present application, the singular expressions "a", "an", "said", "above", "the" and "this" are intended to also include expressions such as "one or more", unless there is a clear contrary indication in the context.

[0028] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present application. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear at different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0029] Precision optical equipment needs to be set up in an ultra-high vacuum environment, and the vacuum degree required can reach 10 -6Pa, which puts forward many requirements for the fixed structure of optical components inside the equipment, such as sealing and isolation, non-metallic materials are not allowed inside the equipment, etc. In addition, the high vacuum clean environment also has high restrictions on the molecular content of water molecules and hydrocarbons. When the optical equipment is connected to a high-power light source, the strong light beam will input a high energy on the surface of the optical component, and the energy per square centimeter can reach millions. In order to receive the high-power strong light beam, it is necessary to increase the receiving area of ​​the optical component. Therefore, the diameter of large-sized optical lenses is usually more than 100mm, and the maximum can even reach 4m. Due to the high surface precision of optical components, they are more sensitive to temperature changes. Under such a high intensity light beam, if the optical components cannot be cooled in time, the surface shape of the optical components will change.

[0030] In the process of beam shaping, it is usually necessary to use rotating optical elements. When the rotation axis is perpendicular to the optical surface, the surface structure of the optical element can be used to modulate the light emitted by the light source. In order to adapt to the increasingly high repetition frequency of the light source and the increasingly shorter beam exposure time, the rotation speed of the rotating optical element needs to reach more than 1000rpm, which puts higher requirements on the vibration and precision positioning of the optical equipment.

[0031] In summary, current optical equipment cannot be adapted to high vacuum scenarios due to the lack of sealing and isolation, and cannot meet the requirements of vacuum cleanliness inside the equipment. In addition, since the reflector cannot effectively dissipate heat, the lens is prone to damage such as surface shape changes. In addition, due to the low positioning accuracy of the reflector, the high-speed rotation vibration amplitude of large-size lenses is large, and the positioning accuracy is difficult to control.

[0032] Based on this, the embodiments of the present application can provide a rotating mirror device and an optical device, which can simultaneously meet the requirements of sealing isolation, vacuum cleaning, heat dissipation, and precise positioning. The rotating mirror device and the optical device will be described below in conjunction with specific embodiments.

[0033] refer to Figure 1 , Figure 1 1 is a schematic diagram of the structure of an optical device in an embodiment of the present application. The optical device may include a device body 1, a rotating reflector device 2 and a light source 3, wherein the rotating reflector device 2 and the light source 3 are both located in the device body 1. The rotating reflector device 2 may include a reflector 10, a motor 20 and a transmission shaft 30, wherein the reflector 10 may be connected to the transmission shaft 30 in a transmission manner, and the transmission shaft 30 is connected to the motor 20, so that the power output by the motor 20 can be transmitted to the reflector 10 through the transmission shaft 30, thereby driving the reflector 10 to rotate. The light source 3 is located on the side of the reflector 10 away from the motor 20, and is used to provide a light source for the reflector 10.

[0034] refer to Figure 2 and Figure 3 , Figure 2 for Figure 1 The main axonometric drawing of the transmission shaft. Figure 3 for Figure 1 The rotating mirror device in the embodiment of the present application may include a vacuum chamber 80, a lens fixing seat 40, a fixing shaft 50, a magnetic suspension positioning assembly (see Figure 3 60 and 70), magnetic fluid sealing assembly 90 and heat dissipation assembly (refer to Figure 3 110 and 120 in the figure).

[0035] The fixed shaft 50 is located in the vacuum chamber 80, and the reflector 10 is fixedly mounted on one end of the fixed shaft 50. A through hole may be provided in the cavity wall 81 of the vacuum chamber 80, and one end of the transmission shaft 30 may pass through the through hole and extend into the vacuum chamber 80, and be transmission-connected with one end of the fixed shaft 50 away from the reflector 10, and the axis of the fixed shaft 50 may be consistent with the axis of the transmission shaft 30, so as to improve the stability of the power transmission between the transmission shaft 30 and the fixed shaft 50. The other end of the transmission shaft 30 is located outside the vacuum chamber 80 and is transmission-connected with the motor. In this way, the power output by the motor is transmitted to the transmission shaft 30, and further transmitted to the fixed shaft 50 through the transmission shaft 30, so that the fixed shaft 50 and the reflector 10 arranged on the fixed shaft rotate under the drive of the transmission shaft 30.

[0036] The transmission shaft 30 may include a first shaft section 31 and a second shaft section 32, wherein the first shaft section 31 may be located in the vacuum chamber 80 and is in transmission connection with the fixed shaft 50. One end of the second shaft section 32 is located outside the vacuum chamber 80 and is in transmission connection with the motor, and the other end extends into the vacuum chamber 80 after passing through the chamber wall 81, and is connected to the first shaft section 31 through an elastic coupling 100. After the output power of the motor is transmitted to the second shaft section 32, it can be transmitted from the second shaft section 32 to the first shaft section 31 through the elastic coupling 100, and then to the fixed shaft 50. An elastic damping structure 101 is arranged inside the elastic coupling 100, and the material of the elastic damping structure can be metal, silicone, rubber, etc. When the second shaft section 32 vibrates during the rotation process, the vibration can be absorbed by the elastic damping structure 101, so that the vibration will not be transmitted to the first shaft section 31, thereby reducing the risk of vibration of the reflector 10 during the rotation process.

[0037] The magnetic fluid sealing assembly 90 is arranged in the through hole of the cavity wall 81, and is used to isolate the vacuum cavity 80 from the outside, so as to ensure the sealing of the vacuum cavity 80. The magnetic fluid sealing assembly 90 may include a sealing shell 91, a sealing base 92 and a magnetic fluid 94. In the radial direction, the sealing shell 91 may be sleeved on the surface of the second shaft section 32 and fixed to the inner wall of the through hole of the cavity wall 81 by screws. The sealing shell 91 and the second shaft section 32 may be spaced apart, and an annular accommodating cavity may be formed between the two, and the sealing base 92 and the magnetic fluid 94 may be located in the accommodating cavity.

[0038] The sealing base 92 is located on the side of the sealing housing 91 away from the reflector 10. The sealing base 92 is sleeved on the surface of the second shaft segment 32 and can be fixedly connected to the sealing housing 91 by screws to form a seal between the vacuum chamber 80 and the outside. In addition, a bearing assembly can be provided. The bearing assembly can include two bearings 93. The two bearings 93 can be arranged along the axial direction of the second shaft segment 32. In specific implementation, the sealing base 92 is provided on the surface of the second shaft segment 32 and can be fixedly connected to the sealing housing 91 by screws to form a seal between the vacuum chamber 80 and the outside. Figure 3 and Figure 4 The bearing 93 may be a cylindrical roller bearing, the inner ring 931 of the bearing may be fixed to the second shaft section 32, and the outer ring 932 may be fixedly connected to the sealing housing 91. The second shaft section 32 may have a protruding structure at a position between the two bearings 93, and the protruding structure may extend between the two bearings 93, and there may be a certain interval between the protruding structure and the sealing housing 91. At this time, the two bearings 93, the sealing housing 91 and the protruding structure may enclose a relatively closed space, and the magnetic fluid 94 is located in the space, thereby forming a dynamic seal with the second shaft section 32. In this embodiment, the magnetic fluid sealing assembly 90 can form a double seal through the sealing base 92 and the magnetic fluid 94. Compared with traditional sealing structures such as sealing rings, when the sealing ring is in the vacuum cavity 80, outgassing will occur, resulting in the destruction of the clean environment inside the vacuum cavity 80. In the embodiment of the present application, by setting the magnetic fluid sealing assembly 90, there is no non-metallic outgassing in the vacuum cavity 80, and the friction between the sealing ring and the transmission shaft 30 can also be avoided, thereby ensuring the clean environment inside the vacuum cavity 80.

[0039] The lens holder 40 is fixedly installed in the vacuum chamber 80 and can be arranged around the circumference of the fixed shaft 50. There can be a certain space between the lens holder 40 and the surface of the fixed shaft 50, and the magnetic suspension positioning assembly can be located in the space. The magnetic suspension positioning assembly can include a radial magnetic suspension positioning device 60 and an axial magnetic suspension positioning device 70. The radial magnetic suspension positioning device 60 and the axial magnetic suspension positioning device 70 can be used to position the fixed shaft 50.

[0040] The lens holder 40 may be a split structure, and the fixed shaft 50 includes a first side and a second side opposite to each other along the axial direction, the first side may also be understood as a low beam side, which is the side close to the light source, and the second side may be understood as a high beam side, which is the side far from the light source. The lens holder 40 may include a first fixing portion 41 disposed on the low beam side and a second fixing portion 42 disposed on the high beam side, which are arranged along the axial direction of the fixed shaft 50, a certain space may be formed between the first fixing portion 41 and the fixed shaft 50, and a certain space may also be formed between the second fixing portion 42 and the fixed shaft 50. At this time, an axial magnetic suspension positioning device 70 and a radial magnetic suspension positioning device 60 may be respectively disposed between the first fixing portion 41 and the fixed shaft 50 and between the second fixing portion 42 and the fixed shaft 50 to improve the positioning accuracy of the fixed shaft 50.

[0041] Taking the low beam side as an example, along the axial direction, the radial magnetic suspension positioning device 60 can be located between the axial magnetic suspension positioning device 70 and the reflector 10, that is, the radial magnetic suspension positioning device 60 is closer to the reflector 10. The radial magnetic suspension positioning device 60 includes a radial magnetic suspension rotor 61 and a radial magnetic suspension stator 62, wherein the radial magnetic suspension rotor 61 can be an annular structure, which is sleeved on the fixed shaft 50 and keeps a relatively fixed state with the fixed shaft 50, so that when the fixed shaft 50 rotates, the radial magnetic suspension rotor 61 can be driven to rotate. The radial magnetic suspension stator 62 can be fixedly installed on the lens fixing seat 40 by screws, and the radial magnetic suspension stator 62 can also be an annular structure, and is sleeved on the surface of the radial magnetic suspension rotor 61, and the two can be arranged at intervals. It can also be understood that the radial magnetic suspension rotor 61 and the radial magnetic suspension stator 62 are concentrically arranged, and the radial magnetic suspension rotor 61 has a repulsive force on the radial magnetic suspension stator 62 to make the radial magnetic suspension stator 62 move away from the radial magnetic suspension rotor 61. Correspondingly, the radial magnetic suspension stator 62 also has a repulsive force on the radial magnetic suspension rotor 61 to make the radial magnetic suspension rotor 61 move away from the radial magnetic suspension stator 62. It can be understood that the repulsive forces on the radial magnetic suspension rotor 61 and the radial magnetic suspension stator 62 are equal in magnitude and opposite in direction. At this time, the repulsive force between the radial magnetic suspension rotor 61 and the radial magnetic suspension stator 62 is the magnetic suspension force of the radial magnetic suspension positioning device 60. Since the position of the radial magnetic suspension stator 62 remains fixed, when the radial magnetic suspension rotor 61 rotates with the fixed shaft 50, under the magnetic suspension force, a fixed radial gap can always be maintained between the radial magnetic suspension rotor 61 and the radial magnetic suspension stator 62, thereby positioning the fixed shaft 50 in the radial direction.

[0042] For the radial magnetic levitation positioning device 60 and the axial magnetic levitation positioning device 70 arranged between the second fixed portion 42 and the fixed shaft 50, the radial magnetic levitation positioning device 60 can be located on the side of the axial magnetic levitation positioning device 70 away from the reflector 10, and the specific structure of the radial magnetic levitation positioning device 60 on the high beam side is similar to that of the radial magnetic levitation positioning device 60 on the low beam side, which will not be repeated here.

[0043] The axial magnetic suspension positioning device 70 may include an axial magnetic suspension rotor 71 and an axial magnetic suspension stator 72, wherein the axial magnetic suspension rotor 71 may be an annular structure, which is sleeved on the fixed shaft 50 and remains relatively fixed with the fixed shaft 50, so that when the fixed shaft 50 rotates, the axial magnetic suspension rotor 71 can be driven to rotate. The axial magnetic suspension stator 72 can be fixedly mounted on the lens fixing seat 40 by screws, and the axial magnetic suspension stator 72 may also be an annular structure and is coaxially arranged with the axial magnetic suspension rotor 71. It can also be understood that the axial magnetic suspension rotor 71 and the axial magnetic suspension stator 72 are arranged along the axial direction of the fixed shaft 50. The axial magnetic suspension rotor 71 has a repulsive force on the axial magnetic suspension stator 72, which makes the axial magnetic suspension stator 72 move away from the axial magnetic suspension rotor 71. Correspondingly, the axial magnetic suspension stator 72 also has a repulsive force on the axial magnetic suspension rotor 71, which makes the axial magnetic suspension rotor 71 move away from the axial magnetic suspension stator 72. The repulsive forces on the axial magnetic suspension rotor 71 and the axial magnetic suspension stator 72 are equal in magnitude and opposite in direction. At this time, the repulsive force between the axial magnetic suspension rotor 71 and the axial magnetic suspension stator 72 is the magnetic suspension force of the axial magnetic suspension positioning device 70. Under the magnetic suspension force, a fixed axial gap can always be maintained between the axial magnetic suspension rotor 71 and the axial magnetic suspension stator 72.

[0044] For the axial magnetic suspension positioning device 70 on the low beam side, the axial magnetic suspension rotor 71 may be located on the side of the axial magnetic suspension stator 72 away from the reflector 10. Since the axial magnetic suspension stator 72 is fixed on the lens fixing seat 40, when the axial magnetic suspension rotor 71 on the low beam side rotates along with the fixed shaft 50, the axial magnetic suspension rotor 71 is subjected to the axial force of the axial magnetic suspension stator 72 and has a tendency to move away from the reflector. For the axial magnetic suspension positioning device 70 on the high beam side, the axial magnetic suspension rotor 71 may be located between the axial magnetic suspension stator 72 and the reflector 10. When the axial magnetic suspension rotor 71 on the high beam side rotates, the axial magnetic suspension rotor 71 is subjected to the axial force of the axial magnetic suspension stator 72 and has a tendency to move toward the reflector. The two axial magnetic suspension positioning devices 70 can be symmetrically arranged so that the magnetic suspension forces of the two pairs of axial magnetic suspension positioning devices 70 are opposite and equal in magnitude. In this way, under the joint action of the axial magnetic suspension positioning device 70 on the low beam side and the axial magnetic suspension positioning device 70 on the high beam side, the fixed shaft 50 can be positioned in the axial direction.

[0045] In addition, after the first fixing part 41 and the second fixing part 42 are assembled, the radial magnetic suspension positioning devices 60 on both sides can also be in a symmetrical state. In this way, by providing two radial magnetic suspension positioning devices 60 and two axial magnetic suspension positioning devices 70, the fixed shaft 50 can only rotate around the axial direction, and the other five degrees of freedom of the fixed shaft 50 are constrained, thereby achieving high-precision positioning of the fixed shaft 50 and the reflector 10 arranged on the fixed shaft, and reducing the risk of cracking of the reflector 10 due to uneven force.

[0046] It should be noted that, for the elastic coupling 100, the elastic damping force of the elastic damping structure 101 inside it in the axial direction may be smaller than the magnetic levitation force of the axial magnetic levitation positioning device 70, and the elastic damping force in the radial direction may be smaller than the magnetic levitation force of the radial magnetic levitation positioning device 60. In this way, when the second shaft segment 32 transmits power to the first shaft segment 31, the axial vibration and radial vibration of the second shaft segment 32 will be absorbed by the elastic damping structure 101, and will not affect the positioning effect of the radial magnetic levitation positioning device 60 and the axial magnetic levitation positioning device 70 on the reflector 10, thereby ensuring the stability of the reflector 10 when rotating.

[0047] Please continue to refer to Figure 2 and Figure 3 Since the reflector 10 generates heat when receiving a strong light beam, the heat dissipation component can be used to transfer the heat generated by the reflector from the fixed shaft 50 to the portion of the second shaft segment 32 located outside the vacuum chamber 80. Since the portion of the second shaft segment 32 located outside the vacuum chamber 80 is in a normal atmospheric environment, the heat can be dissipated with the help of the second shaft segment 32.

[0048] In some embodiments, the heat dissipation assembly may include a first heat dissipation portion 110, and the first heat dissipation portion 110 may include a cooling channel 111 and a cooling medium. For example, the cooling medium may be a phase change metal 112. One end of the cooling channel 111 is located in the fixed shaft 50, and the other end extends to the portion of the second shaft segment 32 located outside the vacuum chamber 80, and the phase change metal 112 is filled in the cooling channel 111. Since the phase change metal 112 is in a paste state at a low temperature, when the phase change metal 112 located in the fixed shaft 50 receives heat from the reflector 10, the temperature rises, and its state may change to a liquid state, and it may flow from the fixed shaft 50 to the second shaft segment 32, and dissipate the heat to the air through the second shaft segment 32. After the heat is dissipated, the temperature of the phase change metal 112 decreases, and it flows back to the fixed shaft 50 through the cooling channel 111, and continues to absorb the heat of the reflector 10, thereby forming a heat dissipation cycle.

[0049] The portion of the cooling channel 111 located in the fixed shaft 50 may be composed of a plurality of first sub-channels 1111 and a second sub-channel 1112. The plurality of first sub-channels 1111 may be arranged in parallel and extend along the axial direction of the fixed shaft 50, and the second sub-channel 1112 may extend along the radial direction of the fixed shaft 50. The second sub-channel 1112 is located on the side of the fixed shaft 50 away from the reflector 10 and is connected to the cooling channel 111 in the transmission shaft 30. One end of the plurality of first sub-channels 1111 may be respectively connected to the second sub-channel 1112, and the other end extends toward the direction close to the reflector 10. By arranging a plurality of first sub-channels 1111 in the fixed shaft 50, the area of ​​the cooling channel 111 may be increased to fill more phase change metal 112, thereby improving the heat dissipation effect on the reflector 10.

[0050] In addition, the heat dissipation assembly may also include a second heat dissipation part 120, and the second heat dissipation part 120 may include a water-cooled fixed seat 121 and a liquid-cooled impeller 122. The water-cooled fixed seat 121 may be sleeved on the portion of the second shaft section 32 located outside the vacuum chamber 80, and may be fixed to the device body through a fixed support. A liquid-cooled chamber 1211 is provided in the water-cooled fixed seat 121, and the liquid-cooled chamber 1211 may be an annular structure. The liquid-cooled chamber 1211 may also be connected to an external cold source, and the external cold source may be used to provide cooling liquid for the liquid-cooled chamber 1211. The liquid-cooled impeller 122 may be located in the liquid-cooled chamber 1211, and may be sleeved on the second shaft section 32, and remain relatively fixed with the second shaft section 32. It can also be understood that when the second shaft section 32 rotates, it can drive the liquid-cooled impeller 122 to rotate together.

[0051] The liquid-cooled impeller 122 is provided with a plurality of blades 1221, and the plurality of blades 1221 can be evenly distributed around the circumference of the second shaft segment 32. In the initial state, the coolant in the liquid-cooled cavity 1211 near the second shaft segment 32 can absorb heat from the phase-change metal 112. Driven by the liquid-cooled impeller 122, the heated coolant near the second shaft segment 32 can flow in a direction away from the second shaft segment 32, while the low-temperature coolant far from the second shaft segment 32 can flow in a direction close to the second shaft segment 32 at the same time. In this reciprocating cycle, the phase-change metal 112 can be continuously cooled. In this embodiment, the phase-change metal 112 and the liquid-cooled impeller 122 can form a two-stage heat dissipation structure, thereby realizing rapid uniform temperature heat transfer and rapid heat dissipation. It has been verified that the heat dissipation energy of the heat dissipation component provided in the embodiment of the present application for the reflector 10 can reach millions per square centimeter.

[0052] Along the axial direction of the second shaft segment 32, sealing components 123 may be respectively provided on both sides of the liquid cooling cavity 1211, and the sealing components 123 may be located in the water cooling fixed seat 121 to achieve sealing between the second shaft segment 32 and the liquid cooling impeller 122 to prevent leakage of the coolant and prevent the coolant from entering the vacuum cavity 80 or the inside of the motor through the transmission of the transmission shaft 30, thereby ensuring a high vacuum and a clean environment in the vacuum cavity 80.

[0053] Take the sealing assembly disposed between the liquid cooling impeller 122 and the vacuum chamber 80 as an example, and combine Figure 3 and Figure 5 A sealed cavity can be formed between the water-cooled fixed seat 121 and the second shaft segment 32, and the sealing assembly 123 is disposed in the sealed cavity. The sealing assembly 123 may include a first sealing ring 1231, a sealing friction material 1232, a second sealing ring 1233, and a sealing ring 1234. The first sealing ring 1231 is sleeved on the second shaft segment 32, and the first sealing ring 1231 can rotate with the rotation of the second shaft segment 32. The second sealing ring 1233 is located on the side of the first sealing ring 1231 away from the vacuum chamber 80, can be sleeved on the surface of the second shaft segment 32, and fixed on the water-cooled fixed seat 121. The sealing friction material 1232 is located between the first sealing ring 1231 and the second sealing ring 1233, which can be sleeved on the outside of the second shaft segment 32, and has a certain gap between the second shaft segment 32. When the second shaft section 32 rotates, the first sealing ring 1231 is driven to rotate, and the first sealing ring 1231 and the sealing friction material 1232 rub against each other, and the sealing friction material 1232 and the second sealing ring 1233 abut against each other, thereby realizing dynamic sealing between the second shaft section 32 and the water-cooled fixed seat 121, thereby preventing the coolant in the liquid-cooled cavity 1211 from entering the vacuum cavity 80.

[0054] In some embodiments, the second shaft section 32 has a first step structure 321 at a position between the liquid-cooled impeller 122 and the vacuum chamber 80, and the first step structure 321 may include a first step surface. The sealing assembly 123 may also be provided with a fixing portion, which may be fixedly mounted on the first step surface by a screw, and the first sealing ring may be connected to the fixing portion by an elastic member. In the initial state, the elastic member is in a compressed state. As the sealing friction material 1232 wears, the elastic member may push the first sealing ring 1231 to move toward the sealing friction material 1232, so that the first sealing ring 1231 always keeps in contact with the sealing friction material 1232, thereby ensuring the dynamic seal between the second shaft section 32 and the water-cooled fixed seat 121.

[0055] There may be two sealing rings 1234, one of which may be sleeved on the second shaft section 32 and located between the second shaft section 32 and the first sealing ring 1231 to achieve static sealing between the second shaft section 32 and the first sealing ring 1231. The other sealing ring 1234 may be sleeved on the second sealing ring 1233 and located between the second sealing ring 1233 and the water-cooled fixing seat 121 to achieve static sealing between the second sealing ring 1233 and the water-cooled fixing seat 121.

[0056] The second shaft section 32 is located on the side of the liquid-cooled impeller 122 away from the vacuum chamber 80 to form a second step structure 322, and the second step structure 322 may include a second step surface. The sealing assembly 123 located on the side of the liquid-cooled impeller 122 away from the vacuum chamber 80 may be assembled with the water-cooled fixing seat 121 through the second step surface. The structure of the sealing assembly 123 here may be the same as the sealing assembly 123 connected to the first side wall, and will not be repeated here.

[0057] A flushing port 1212 may also be provided on the water-cooled fixed seat 121. The flushing port 1212 may be one or more. When the flushing port 1212 is more than one, the flushing ports 1212 may be provided on the water-cooled fixed seat 121 along the circumference of the water-cooled fixed seat 121. One end of the flushing port 1212 is communicated with the outside, and the other end is communicated with the sealing cavity. External flushing liquid may enter the sealing cavity through the sealing flushing port 1212, and flush the sealing assembly 123, flushing away the debris generated by the sealing friction material 1232, so as to ensure the friction fit between the sealing friction material 1232 and the first sealing ring 1231.

[0058] Compared with the traditional rotating reflector device, the rotating reflector device in the embodiment of the present application can ensure the real-time position of the reflector by setting an axial magnetic suspension positioning device and a radial magnetic suspension positioning device, thereby ensuring the precise positioning of the reflector. By setting an elastic coupling, the vibration of the transmission shaft can be prevented from being transmitted to the reflector, thereby realizing the vibration reduction and isolation function of the reflector. By setting a magnetic fluid sealing component to isolate the inside and outside of the vacuum chamber, a clean environment inside the vacuum chamber is ensured. By setting a phase change metal and a liquid-cooled impeller to form a two-stage heat dissipation structure, rapid heat dissipation of the reflector is achieved.

[0059] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A rotating reflector device, characterized in that: It includes a vacuum chamber, a reflector, a lens fixing seat, a fixing shaft, a transmission shaft, a heat dissipation component and a motor, wherein: The fixed shaft, the reflector and the lens fixing seat are located in the vacuum chamber, the reflector is fixed to one end of the fixed shaft, and the lens fixing seat is arranged around the circumference of the fixed shaft; The cavity wall of the vacuum cavity is provided with a through hole, one end of the transmission shaft passes through the through hole and extends into the vacuum cavity, and is transmission-connected with the fixed shaft, and the other end of the transmission shaft is located outside the vacuum cavity, and is transmission-connected with the motor located outside the vacuum cavity; The heat dissipation assembly includes a first heat dissipation part, which includes a cooling channel and a cooling medium. One end of the cooling channel is located in the fixed shaft, and the other end extends to the position of the transmission shaft outside the vacuum chamber. The cooling medium is filled in the cooling channel.

2. The rotating mirror device according to claim 1, characterized in that: The heat dissipation assembly further includes a second heat dissipation portion, the second heat dissipation portion includes a water-cooling fixing seat and a liquid-cooling impeller, wherein: The water-cooling fixing seat is sleeved on the portion of the transmission shaft outside the vacuum chamber, and the water-cooling fixing seat is provided with a liquid cooling cavity, the liquid cooling cavity is annular, and the liquid cooling cavity is filled with cooling liquid; The liquid cooling impeller is located in the liquid cooling cavity, and the liquid cooling impeller is sleeved on the transmission shaft.

3. The rotating mirror device according to claim 2, characterized in that: It also includes a sealing assembly, wherein the water-cooling fixing seat and the surface of the transmission shaft are spaced apart to form an annular sealing cavity, the sealing cavity is located on the side of the liquid-cooling impeller facing the vacuum cavity, and the sealing assembly is arranged in the sealing cavity; the sealing assembly includes a first sealing ring, a sealing friction material and a second sealing ring, wherein: The first sealing ring is fixedly connected to the transmission shaft, and the second sealing ring is fixedly connected to the water-cooling fixing seat; The sealing friction material is disposed between the first sealing ring and the second sealing ring.

4. The rotating mirror device according to claim 3, characterized in that: The number of the sealing components is two; The number of the sealed cavities is two, the two sealed cavities are respectively located on both sides of the liquid cooling cavity, and the two sealing assemblies are respectively arranged in the two sealed cavities.

5. The rotating mirror device according to claim 3 or 4, characterized in that: The sealing assembly further comprises two sealing rings, one of which is arranged between the first sealing ring and the transmission shaft, and the other sealing ring is arranged between the second sealing ring and the water-cooling fixing seat.

6. The rotating reflector device according to any one of claims 3 to 5, characterized in that: The water-cooling fixing seat is provided with a flushing port, one end of which is communicated with the sealing cavity, and the other end of which is communicated with the outside.

7. The rotating reflector device according to any one of claims 1 to 6, characterized in that: It also includes a magnetic suspension positioning component, which is arranged between the fixed shaft and the lens fixing seat, and includes an axial magnetic suspension positioning device and a radial magnetic suspension positioning device.

8. The rotating mirror device according to claim 7, characterized in that: The axial magnetic suspension positioning device includes an axial magnetic suspension rotor and an axial magnetic suspension stator. The axial magnetic suspension rotor is sleeved on the fixed shaft, and the axial magnetic suspension stator is fixedly installed on the lens fixing seat. The axial magnetic suspension stator and the axial magnetic suspension rotor are coaxially arranged, and along the axial direction of the fixed shaft, the axial magnetic suspension stator and the axial magnetic suspension rotor are spaced apart.

9. The rotating mirror device according to claim 8, characterized in that: The number of the axial magnetic suspension positioning devices is two, and the two axial magnetic suspension positioning devices are respectively arranged close to the fixed axis on two opposite sides along the axial direction, and the two axial magnetic suspension positioning devices are symmetrical to each other.

10. The rotating mirror device according to claim 7, characterized in that: The radial magnetic suspension positioning device includes a radial magnetic suspension rotor and a radial magnetic suspension stator. The radial magnetic suspension rotor is sleeved on the fixed shaft, and the radial magnetic suspension stator is fixedly installed on the lens fixing seat. The radial magnetic suspension stator is arranged around the circumference of the radial magnetic suspension rotor and is spaced apart from the radial magnetic suspension rotor.

11. The rotating mirror device according to claim 10, characterized in that: The number of the radial magnetic suspension positioning devices is two, and the two radial magnetic suspension positioning devices are respectively arranged close to the fixed shaft on two opposite sides along the axial direction.

12. The rotating reflector device according to any one of claims 1 to 11, characterized in that: The transmission shaft comprises a first shaft section and a second shaft section, wherein: The first shaft segment is located in the vacuum chamber, and one end of the first shaft segment is drivingly connected to the fixed shaft; One end of the second shaft segment is transmission-connected to the motor, and the other end extends into the vacuum chamber and is transmission-connected to the other end of the first shaft segment via an elastic coupling.

13. The rotating reflector device according to any one of claims 1 to 12, characterized in that: Also included is a magnetic fluid sealing assembly, which includes a sealing housing, a sealing base and a magnetic fluid, wherein: The sealing shell is sleeved on the transmission shaft, and the sealing shell is fixedly connected to the inner wall of the through hole, the sealing shell is spaced apart from the surface of the transmission shaft and forms a receiving cavity with the transmission shaft; The sealing base is sleeved on the transmission shaft, and the sealing base is arranged on a side of the sealing shell away from the inside of the vacuum chamber to seal the accommodating chamber; The magnetic fluid is located in the accommodating cavity.

14. An optical device, characterized in that: It comprises a device body and a rotating reflector device as described in any one of claims 1 to 13, wherein the rotating reflector device is located inside the device body.

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