ALD (Atomic Layer Deposition) reaction chamber structure with multidirectional air flow uniformly distributed

Abstract

The invention relates to the technical field of semiconductors, in particular to an ALD (Atomic Layer Deposition) reaction chamber structure with multidirectional airflow balanced distribution, which comprises a reaction chamber body, one end of the stand column is fixed at the bottom of the reaction cavity body; the other end of the stand column is fixed to the bottom of the containing table. The middle shell is arranged on the reaction cavity body, and a driving mechanism for enabling the shell to rotate is arranged on the outer side of the reaction cavity body; the two guide plates are concave plates, the two ends of each guide plate are fixed to the top of the middle shell, two parallel guide grooves with concave contour tracks are formed in one side of each guide plate, and the corner ends of the guide grooves are in arc transition; according to the device, the circular pipe can move around the placing table, and meanwhile, the circular pipe can move on the guide plate along a concave track, namely, the circular pipe can move around the upper part of the placing table, so that gas can be in uniform contact with reactants on the placing table better.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to an ALD reaction chamber structure with multi-directional gas flow balanced distribution. Background Art

[0002] Atomic layer deposition (ALD) was first proposed by Finnish scientists in 1974. It has the advantages of sequential deposition of single atomic layers, extremely uniform thickness of the deposited layer, and high three-dimensional conformality. It has become a key link in the development of advanced semiconductor process technology. In the atomic layer deposition process, the chemical reaction of the new atomic layer is directly related to the previous layer. Atomic layer deposition forms a deposited film by alternately passing two or more gas-phase precursor sources into the reactor and performing chemical adsorption reactions on the surface of the deposition substrate. The two substances A and B are alternately adsorbed by chemical bonds to achieve surface reaction growth, and the appropriate process temperature can hinder the physical adsorption of molecules on the surface. Atomic layer deposition has the characteristics of self-limitation, that is, in each pulse cycle, the gas-phase precursor can only react at the atomic bonding site on the surface of the deposition substrate, and just cover the village surface with a saturated amount, and can grow repeatedly atomically layer by atomic layer in a very wide process window.

[0003] After searching, the Chinese patent with the authorization announcement number CN109321895B discloses a gas transmission device for ALD process. In the process of transmitting precursor A, the carrier gas enters the storage A through the carrier flow meter A and the three-way pulse valve A, and carries the precursor A through the supply pipeline A to enter the ALD reaction chamber. The carrier gas enters the ALD reaction chamber through the carrier flow meter B, the three-way pulse valve B, the bypass B and the supply pipeline B. In the process of transmitting precursor B, the carrier gas enters the storage B through the carrier flow meter B and the three-way pulse valve B, and carries the precursor B through the supply pipeline B to enter the ALD reaction chamber. The carrier gas enters the ALD reaction chamber through the carrier flow meter A, the three-way pulse valve A, the bypass A and the supply pipeline A. The patent discloses a gas transmission device for ALD process and its gas intake method, which has the excellent characteristics of high precursor utilization, full diffusion, small fluctuation of total chamber gas flow, and stable gas flow.

[0004] The gas distributor mentioned above delivers the gas flow from the top of the reaction chamber. The delivery direction of the gas flow is fixed, and the top of the reactant contacts the gas flow first. At the same time, the gas flow in the central area is large and gradually decreases outward, resulting in uneven gas distribution. Summary of the invention

[0005] The object of the present invention is to provide an ALD reaction chamber structure with a multi-directional gas flow evenly distributed, so as to solve the problems raised in the above-mentioned background technology.

[0006] The technical solution of the present invention is: an ALD reaction chamber structure with balanced multi-directional airflow distribution, comprising: Reaction chamber body; A column, one end of which is fixed to the bottom of the reaction chamber body; A placing table, wherein the other end of the column is fixed to the bottom of the placing table; An intermediate shell, wherein the intermediate shell is arranged on the reaction chamber body, and a driving mechanism for rotating the outer shell is arranged on the outer side of the reaction chamber body; Two guide plates, the guide plates are concave plates, and both ends of the guide plates are fixed to the top of the intermediate shell, one side of the guide plate is provided with two guide grooves which are parallel to each other and have a concave contour track, and the corner ends of the guide grooves are arc transitions, and a cylinder is slidably arranged inside the guide groove, and a moving block is rotatably installed at one end of the two cylinders; A circular tube, wherein the middle position of the outer side of the circular tube is fixed on the moving block, and a plurality of spray heads connected to the circular tube are fixed on the outer side of the circular tube; Wherein, a reciprocating assembly is arranged on the outer side of the intermediate shell to enable one of the cylinders to reciprocate along the guide groove.

[0007] Preferably, the driving mechanism comprises: A first servo motor, wherein a housing of the first servo motor is fixed outside the reaction chamber body, and an output shaft of the first servo motor is located inside the reaction chamber body; A rotating cylinder, wherein the rotating cylinder is coaxially arranged with the column, one end of the rotating cylinder is rotatably mounted on the bottom of the reaction chamber body and the other end is fixed to the bottom of the shell; A gantry, the bottom ends of which are fixed to the top of the intermediate shell; Wherein, a transmission group is arranged between the output shaft of the first servo motor and the gantry.

[0008] Preferably, the transmission group comprises: A first bevel gear, wherein the first bevel gear is fixed at a top middle position of the gantry; An output rod, wherein the output shaft of the first servo motor is coaxially fixed with the output rod; The second bevel gear is coaxially fixed with the output rod and meshes with the first bevel gear and the second bevel gear.

[0009] Preferably, the reciprocating assembly comprises: Four synchronous wheels, wherein one end of the wheel axles of two of the synchronous wheels are rotatably mounted at the top two end positions of the guide plate respectively; Two fixed plates, the outer sides of the two fixed plates are respectively fixed at two end positions in the shell, and one end of the wheel axles of the other two synchronous wheels are rotatably mounted on the two fixed plates; A synchronous belt, wherein the synchronous belt is sleeved on each synchronous wheel; A fixed block, the outer side of which is fixed on the synchronous belt, and the fixed block forms a rotational fit with one of the cylinders; A second servo motor, wherein the housing of the second servo motor is fixed in the middle housing, and a transmission rod is fixed together with the output shaft of the second servo motor and the axle of one of the synchronous wheels.

[0010] Preferably, it also includes an identification component, and the identification component includes: A synchronous shaft, wherein the axle of one of the synchronous wheels is coaxially fixed to the synchronous shaft; A third bevel gear, the synchronizing shaft is coaxially fixed with the third bevel gear; A vertical rod, one end of which is rotatably mounted at the top of the intermediate shell; A fourth bevel gear, the vertical rod and the fourth bevel gear are coaxially fixed, and the third bevel gear is meshed with the fourth bevel gear; A light shielding plate, wherein the light shielding plate is fixed to the fourth bevel gear; A first L-shaped plate, one end of which is fixed at the top of the middle shell; A photoelectric sensor is installed on the other end of the first L-shaped plate.

[0011] Preferably, it also includes a winding mechanism, and the winding mechanism includes: A rotating joint, wherein a first circular hole is formed on the top of the reaction chamber body, and one end of the rotating joint is fixed in the circular hole; A hollow cylinder, wherein a hole slot coaxially arranged with the first bevel gear is formed on the top of the gantry, a second circular hole coaxially arranged with the first bevel gear is formed on the bottom of the hole slot, the outer side of the hollow cylinder is rotatably mounted in the second circular hole, and a second hose is provided between one end of the hollow cylinder and the rotating end of the rotary joint to connect the two; A coil spring, the two ends of which are respectively fixed on the outer side of the hollow cylinder and the inner wall of the hole groove; A cylinder, one end of which is provided with a third circular hole coaxial with the cylinder, one end of the hollow cylinder is fixed in the third circular hole, a first hose is provided between the hollow cylinder and the circular tube to connect the two, a strip opening is provided on the outer side of the cylinder, and the first hose passes through the strip opening.

[0012] Preferably, a double-section telescopic cylinder is fixed at one end inside the circular tube, one end of the double-section telescopic cylinder is fixed to the second L-shaped plate, a spring is sleeved on the outer side of the double-section telescopic cylinder, a plurality of through openings are opened on one side of the second L-shaped plate, and a plurality of diverter plates are fixed inside the circular tube.

[0013] The present invention improves the ALD reaction chamber structure that provides a multi-directional gas flow with balanced distribution, and has the following improvements and advantages compared to the prior art: First, in the present invention, the round tube can perform a circular motion around the placement table, and at the same time, the round tube can move in a concave trajectory on the guide plate, that is, a circular motion above the placement table, so that the gas can better contact the reactants on the placement table evenly; Secondly, in the present invention, when the gas fills the entire area of ​​the second L-shaped plate and the air pressure reaches a certain level, the second L-shaped plate is pushed upward, the double-section telescopic end is shortened, the spring is compressed, the through hole on the second L-shaped plate and the diverter plate are staggered, and the gas is transformed from turbulent flow to laminar flow, so that the airflow can be evenly ejected from the ejection head, so that the gas can be ejected evenly. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The present invention will be further explained below in conjunction with the accompanying drawings and embodiments: Figure 1 is a schematic diagram of the three-dimensional structure of the present invention (the reaction chamber body is a cross-sectional structure); Figure 2 The present invention Figure 2 Look at the structural diagram; Figure 3 It is a schematic diagram of the three-dimensional structure of the gantry and the guide plate of the present invention; Figure 4 The present invention Figure 3 A schematic diagram of the partially enlarged structure at center A; Figure 5 It is a schematic diagram of the internal structure of the intermediate shell of the present invention; Figure 6 The present invention Figure 5 Side view of the structure; Figure 7 The present invention Figure 6 A schematic diagram of the partially enlarged structure at B in the middle; Figure 8 It is a structural schematic diagram of the winding mechanism of the present invention; Fig. 9 It is a schematic diagram of the partial cross-sectional structure of a circular tube of the present invention.

[0015] Description of reference numerals: 1. Reaction chamber body; 2. Intermediate shell; 3. Gantry; 4. Fixed block; 5. First hose; 6. First bevel gear; 7. Winding mechanism; 8. Second bevel gear; 9. Rotary joint; 10. Second hose; 11. Output rod; 12. First servo motor; 13. Placement table; 14. Column; 15. Cylinder; 16. Guide plate; 17. Guide groove; 18. Round tube; 19. Spray head; 20. Moving block; 21. Cylinder; 22 , synchronous belt; 23, synchronous wheel; 24, fixed plate; 25, second servo motor; 26, transmission rod; 27, synchronous shaft; 28, third bevel gear; 29, fourth bevel gear; 30, identification component; 31, first L-shaped plate; 32, photoelectric sensor; 33, light shielding plate; 34, hollow cylinder; 35, coil spring; 36, vertical pole; 37, second L-shaped plate; 38, double-section telescopic cylinder; 39, spring; 40, diverter plate; 41, through port. DETAILED DESCRIPTION

[0016] The present invention is described in detail below, and the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] The present invention improves the ALD reaction chamber structure that provides a multi-directional gas flow with balanced distribution. The technical solution of the present invention is: like Figure 1-Figure 9 As shown, the ALD reaction chamber structure with balanced multi-directional gas flow distribution includes: The reaction chamber body 1 is an existing structure, and its specific structure is not described in detail here. The reaction chamber body 1 is shown in a cross-sectional state in the figure to better show the internal structure; A column 14, one end of which is fixed to the bottom of the reaction chamber body 1; A placement table 13 for placing reactants, the other end of the column 14 is fixed to the bottom of the placement table 13, and the placement table 13 is erected inside the reaction chamber body 1 through the vertical rod 36; The intermediate shell 2 is arranged on the reaction chamber body 1. A driving mechanism for rotating the outer shell is arranged outside the reaction chamber body 1. The intermediate shell 2 is used to protect some parts of the driving mechanism. Two guide plates 16 are concave plates, and both ends of the guide plates 16 are fixed to the top of the intermediate shell 2. One side of the guide plate 16 is provided with two guide grooves 17 (such as Figure 3 and Figure 4As shown), the corner end of the guide groove 17 is an arc transition, a cylinder 21 is slidably provided inside the guide groove 17, and a moving block 20 is rotatably installed at one end of the two cylinders 21, and the moving block 20 slides along the guide groove 17 through the cylinder 21. Since the guide grooves 17 are parallel to each other, the moving block 20 always moves while being perpendicular to the guide groove 17; The circular tube 18, the external gas is sent into the circular tube 18, the middle position of the outer side of the circular tube 18 is fixed on the moving block 20, and a plurality of spray heads 19 connected to the circular tube 18 are fixed on the outer side of the circular tube 18, and the gas in the circular tube 18 is sprayed out from each spray head 19; The outer side of the intermediate shell 2 is provided with a reciprocating assembly for making one of the cylinders 21 reciprocate along the guide groove 17; Through the above-mentioned connection relationships, it can be known that the technical solution of the present invention is to place the reactant at the middle position of the placement table 13, and the reciprocating assembly drives the cylinder 21 connected thereto to move along the guide groove 17, and the moving block 20 slides along the guide groove 17 through the cylinder 21. Since the guide grooves 17 are parallel to each other, the moving block 20 always keeps reciprocating movement while being perpendicular to the guide groove 17. The circular tube 18 on the moving block 20 moves around above the placement table 13, so that the gas can better contact the reactant on the placement table 13 evenly. Each time it reciprocates, the driving mechanism rotates the intermediate shell 2 at a certain angle, so that the gas can contact the reactant evenly.

[0018] Furthermore, combined with Figure 1 and Figure 2 , the driving mechanism includes: A first servo motor 12, which is a prior art stepping servo motor. The housing of the first servo motor 12 is fixed outside the reaction chamber body 1, and the output shaft of the first servo motor 12 is located inside the reaction chamber body 1; A rotating cylinder, which is coaxially arranged with the column 14, one end of which is rotatably mounted on the bottom of the reaction chamber body 1 and the other end is fixed to the bottom of the outer shell, and the intermediate shell 2 is rotated in the reaction chamber body 1 through the rotating cylinder; A gantry 3, the bottom ends of which are fixed to the top of the intermediate shell 2; A transmission group is arranged between the output shaft of the first servo motor 12 and the gantry 3 .

[0019] Furthermore, combined with Figure 1 , the transmission group includes: A first bevel gear 6, which is fixed at the top middle position of the gantry 3; An output rod 11, an output shaft of a first servo motor 12 is coaxially fixed with the output rod 11, and the first servo motor 12 causes the output rod 11 to axially rotate through the output shaft; The second bevel gear 8 is coaxially fixed with the output rod 11, and the first bevel gear 6 is meshed with the second bevel gear 8. The output rod 11 drives the second bevel gear 8 to rotate, and the second bevel gear 8 rotates the gantry 3 through the first bevel gear 6 meshed with it, and the gantry 3 drives the intermediate shell 2 to rotate.

[0020] Furthermore, combined with Figure 5 , the reciprocating assembly includes: Four synchronous wheels 23, wherein one end of the wheel axles of two synchronous wheels 23 are rotatably mounted at the top two ends of the guide plate 16 respectively; Two fixed plates 24, the outer sides of the two fixed plates 24 are respectively fixed at the two end positions in the housing, and one end of the wheel axles of the other two synchronous wheels 23 are rotatably mounted on the two fixed plates 24; Combined with the above, the description of the synchronous wheel 23, from Figure 5 It can be seen that the four synchronous wheels 23 are distributed in a rectangular shape; A synchronous belt 22, which is sleeved on each synchronous wheel 23, and the four synchronous wheels 23 rotate synchronously through the synchronous belt 22; The fixed block 4, the outer side of the fixed block 4 is fixed on the synchronous belt 22, and the fixed block 4 forms a rotational fit with one of the cylinders 21. When the synchronous belt 22 performs transmission motion, the fixed block 4 on the synchronous belt 22 moves, and the fixed block 4 drives the cylindrical block that forms a rotational fit with it to rotate; The second servo motor 25 has a housing fixed in the middle housing 2. The output shaft of the second servo motor 25 and the axle of one of the synchronous wheels 23 are fixed with a transmission rod 26. The output shaft of the second servo motor 25 drives the transmission rod 26 to rotate, and the rotating rod drives the synchronous wheel 23 fixed thereto to rotate.

[0021] Furthermore, combined with Figure 7 , the ALD reaction chamber structure with balanced multi-directional gas flow distribution also includes an identification component 30, and the identification component 30 includes: A synchronization shaft 27, wherein the axle of one synchronization wheel 23 is coaxially fixed with the synchronization shaft 27, and when the synchronization wheel 23 rotates, the synchronization shaft 27 on the synchronization wheel 23 rotates; A third bevel gear 28, a synchronizing shaft 27 is coaxially fixed with the third bevel gear 28, and the synchronizing shaft 27 drives the third bevel gear 28 to rotate; A vertical rod 36, one end of which is rotatably mounted at the top of the intermediate shell 2; The fourth bevel gear 29, the vertical rod 36 and the fourth bevel gear 29 are coaxially fixed, the third bevel gear 28 is meshed with the fourth bevel gear 29, and when the third bevel gear 28 rotates, the third bevel gear 28 drives the fourth bevel gear 29 meshed therewith to rotate; Supplementary explanation is given to the third bevel gear 28 and the fourth bevel gear 29. When the round tube 18 moves from one side to the other side, the third bevel gear 28 on the synchronous wheel 23 causes the fourth bevel gear 29 to rotate half a circle; A light shielding plate 33, the light shielding plate 33 is fixed to the fourth bevel gear 29; A first L-shaped plate 31, one end of which is fixed at the top of the middle shell 2; The photoelectric sensor 32 is installed on the other end of the first L-shaped plate 31 , and the receiving end and the transmitting end of the photoelectric sensor 32 are respectively located on both sides of the light shielding plate 33 .

[0022] Furthermore, the ALD reaction chamber structure with balanced multi-directional airflow distribution further includes a winding mechanism 7, which includes: The rotary joint 9 is a prior art, and its specific structure and working principle are not described in detail here. A first circular hole is opened on the top of the reaction chamber body 1, and one end of the rotary joint 9 is fixed in the circular hole; A hollow cylinder 34, a hole slot coaxially arranged with the first bevel gear 6 is opened on the top of the gantry 3, a second circular hole coaxially arranged with the first bevel gear 6 is opened at the bottom of the hole slot, the outer side of the hollow cylinder 34 is rotatably mounted in the second circular hole, and a second hose 10 is arranged between one end of the hollow cylinder 34 and the rotating end of the rotary joint 9 to connect the two; A coil spring 35, the two ends of which are respectively fixed to the outer side of the hollow tube 34 and the inner wall of the hole groove, and the coil spring 35 enables the hollow tube 34 to have a self-winding function; The cylinder 15 has a third circular hole coaxial with the cylinder 15 at one end, one end of the hollow cylinder 34 is fixed in the third circular hole, a first hose 5 is provided between the hollow cylinder 34 and the circular tube 18 to connect the two, a strip opening is provided on the outer side of the cylinder 15, and the first hose 5 passes through the strip opening, when the cylinder 15 rolls up, the cylinder 15 rolls up the first hose 5, thereby preventing the first hose 5 from being wound.

[0023] Furthermore, combined with Fig. 9A double-section telescopic cylinder 38 is fixed at one end of the inside of the circular tube 18, one end of the double-section telescopic cylinder 38 is fixed to the second L-shaped plate 37, a spring 39 is sleeved on the outside of the double-section telescopic cylinder 38, and a plurality of through openings 41 are opened on one side of the second L-shaped plate 37. A plurality of diverter plates 40 are fixed inside the circular tube 18. When the gas fills the entire area of ​​the second L-shaped plate 37 and the air pressure reaches a certain level, the second L-shaped plate 37 is pushed upward, the double-section telescopic end is shortened, the spring 39 is compressed, the through opening 41 on the second L-shaped plate 37 and the diverter plate 40 are staggered with each other, and the gas is transformed from turbulent flow to laminar flow, so that the airflow can be evenly ejected from the ejection head 19, so that the gas can be ejected evenly.

[0024] Specifically, the working principle: The reactant is placed at the middle position of the placement table 13, and the reaction gas is sent into the circular tube 18. When the gas fills the entire area of ​​the second L-shaped plate 37 and the gas pressure reaches a certain level, the second L-shaped plate 37 is pushed up, the double-section telescopic end is shortened, the spring 39 is compressed, and the opening 41 on the second L-shaped plate 37 and the diverter plate 40 are staggered. The gas changes from turbulent flow to laminar flow, so that the gas flow can be evenly ejected from the ejection head 19, so that the gas can be ejected evenly; The second servo motor 25 is started, and the output shaft of the second servo motor 25 drives the transmission rod 26 to rotate, and the rotating rod drives the synchronous wheel 23 fixed thereto to rotate, and the four synchronous wheels 23 rotate synchronously through the synchronous belt 22. When the synchronous belt 22 performs transmission motion, the fixed block 4 on the synchronous belt 22 moves, and the fixed block 4 drives the cylindrical block that forms a rotational match with it to rotate, and the moving block 20 slides along the guide groove 17 through the cylindrical body 21. Since the guide grooves 17 are parallel to each other, the moving block 20 always moves while being perpendicular to the guide groove 17; During the above process, when the synchronous wheel 23 fixed with the synchronous shaft 27 rotates, the synchronous shaft 27 drives the third bevel gear 28 to rotate. When the third bevel gear 28 rotates, the third bevel gear 28 drives the fourth bevel gear 29 meshing therewith to rotate. When the circular tube 18 moves from one side to the other, the light blocking plate 33 on the fourth bevel gear 29 blocks the photoelectric sensor 32. At this time, the first servo motor 12 causes the output rod 11 to rotate axially through the output shaft, and the output rod 11 drives the second bevel gear 8 to rotate. The second bevel gear 8 rotates the gantry 3 through the first bevel gear 6 meshing therewith. The gantry 3 drives the intermediate shell 2 to rotate, and the intermediate shell 2 rotates at a certain angle. At this time, the circular tube 18 is reset, the light blocking plate 33 is reversed, and then the light blocking plate 33 blocks the photoelectric sensor 32 again, and the intermediate shell 2 rotates at a certain angle again, and this reciprocating process allows the gas to evenly contact the reactant.

Claims

1. ALD reaction chamber structure with balanced multi-directional airflow distribution, characterized in that: include: Reaction chamber body (1); A column (14), one end of the column (14) being fixed to the bottom of the reaction chamber body (1); A placement platform (13), wherein the other end of the column (14) is fixed to the bottom of the placement platform (13); An intermediate shell (2), the intermediate shell (2) being arranged on the reaction chamber body (1), and a driving mechanism for rotating the outer shell being arranged on the outer side of the reaction chamber body (1); Two guide plates (16), the guide plates (16) being concave plates, and both ends of the guide plates (16) being fixed to the top of the intermediate shell (2), one side of the guide plate (16) being provided with two guide grooves (17) which are parallel to each other and have a concave contour trajectory, and the corner ends of the guide grooves (17) are arc transitions, a cylinder (21) is slidably arranged inside the guide groove (17), and a moving block (20) is rotatably mounted on one end of the two cylinders (21); A circular tube (18), wherein the middle position of the outer side of the circular tube (18) is fixed on the moving block (20), and a plurality of spray heads (19) connected to the circular tube (18) are fixed on the outer side of the circular tube (18); Wherein, a reciprocating assembly is provided on the outer side of the intermediate shell (2) to enable one of the cylinders (21) to reciprocate along the guide groove (17) in which it is located.

2. The ALD reaction chamber structure with balanced multi-directional gas flow distribution according to claim 1, characterized in that: The driving mechanism includes: A first servo motor (12), wherein a housing of the first servo motor (12) is fixed outside the reaction chamber body (1), and an output shaft of the first servo motor (12) is located inside the reaction chamber body (1); A rotating cylinder, the rotating cylinder being coaxially arranged with the column (14), one end of the rotating cylinder being rotatably mounted on the bottom of the reaction chamber body (1) and the other end being fixed to the bottom of the outer shell; A gantry (3), wherein both ends of the bottom of the gantry (3) are fixed to the top of the intermediate shell (2); Wherein, a transmission group is arranged between the output shaft of the first servo motor (12) and the gantry (3).

3. The ALD reaction chamber structure with balanced multi-directional gas flow distribution according to claim 2, characterized in that: The transmission group comprises: A first bevel gear (6), the first bevel gear (6) being fixed at a top middle position of the gantry (3); An output rod (11), wherein an output shaft of the first servo motor (12) is coaxially fixed to the output rod (11); A second bevel gear (8), the second bevel gear (8) is coaxially fixed with the output rod (11), and meshes with the first bevel gear (6) and the second bevel gear (8).

4. The ALD reaction chamber structure with balanced multi-directional gas flow distribution according to claim 1, characterized in that: The reciprocating assembly comprises: Four synchronous wheels (23), wherein one end of the wheel axles of two of the synchronous wheels (23) are rotatably mounted at the top two end positions of the guide plate (16); Two fixed plates (24), the outer sides of the two fixed plates (24) are respectively fixed at two end positions in the housing, and one end of the wheel axles of the other two synchronous wheels (23) are respectively rotatably mounted on the two fixed plates (24); A synchronous belt (22), wherein the synchronous belt (22) is sleeved on each synchronous wheel (23); A fixed block (4), the outer side of the fixed block (4) being fixed on the synchronous belt (22), and the fixed block (4) being in rotational cooperation with one of the cylinders (21); A second servo motor (25), the housing of the second servo motor (25) is fixed in the middle housing (2), and the output shaft of the second servo motor (25) and the axle of one of the synchronous wheels (23) are jointly fixed with a transmission rod (26).

5. The ALD reaction chamber structure with balanced multi-directional gas flow distribution according to claim 4, characterized in that: It also includes an identification component (30), wherein the identification component (30) includes: A synchronous shaft (27), wherein the axle of one of the synchronous wheels (23) is coaxially fixed to the synchronous shaft (27); A third bevel gear (28), wherein the synchronizing shaft (27) is coaxially fixed with the third bevel gear (28); A vertical rod (36), one end of which is rotatably mounted at the top of the intermediate shell (2); A fourth bevel gear (29), the vertical rod (36) and the fourth bevel gear (29) are coaxially fixed, and the third bevel gear (28) is meshed with the fourth bevel gear (29); a light blocking plate (33), wherein the light blocking plate (33) is fixed to the fourth bevel gear (29); A first L-shaped plate (31), one end of the first L-shaped plate (31) being fixed at the top of the middle shell (2); A photoelectric sensor (32) is installed on the other end of the first L-shaped plate (31).

6. The ALD reaction chamber structure with balanced multi-directional gas flow distribution according to claim 2, characterized in that: It also includes a winding mechanism (7), wherein the winding mechanism (7) includes: A rotating joint (9), wherein a first circular hole is provided on the top of the reaction chamber body (1), and one end of the rotating joint (9) is fixed in the circular hole; A hollow cylinder (34), wherein a hole slot coaxially arranged with the first bevel gear (6) is formed at the top of the gantry (3), a second circular hole coaxially arranged with the first bevel gear (6) is formed at the bottom of the hole slot, the outer side of the hollow cylinder (34) is rotatably mounted in the second circular hole, and a second hose (10) is provided between one end of the hollow cylinder (34) and the rotating end of the rotating joint (9) to connect the two; A coil spring (35), wherein two ends of the coil spring (35) are respectively fixed to the outer side of the hollow cylinder (34) and the inner wall of the hole groove; A cylinder (15), one end of the cylinder (15) is provided with a third circular hole coaxial with the cylinder (15), one end of the hollow cylinder (34) is fixed in the third circular hole, a first hose (5) is provided between the hollow cylinder (34) and the circular tube (18) to connect the two, and a strip-shaped opening is provided on the outer side of the cylinder (15), and the first hose (5) passes through the strip-shaped opening.

7. The ALD reaction chamber structure with balanced multi-directional gas flow distribution according to claim 1, characterized in that: A double-section telescopic cylinder (38) is fixed to one end of the circular tube (18), one end of the double-section telescopic cylinder (38) is fixed to a second L-shaped plate (37), a spring (39) is sleeved on the outer side of the double-section telescopic cylinder (38), a plurality of through openings (41) are formed on one side of the second L-shaped plate (37), and a plurality of diverter plates (40) are fixed to the inside of the circular tube (18).

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