A type II superlattice flatness detection tool

Abstract

The present invention discloses a type-II superlattice flatness detection tool, and relates to the technical field of flatness detection. The present invention comprises a machine platform, a crystal placing plate is fixed on the top surface of the machine platform, a slide groove is provided on the top surface of the machine platform, the slide groove of the machine platform is located on the back of the crystal placing plate, a laser detection component is arranged on the inner wall of the machine platform, the laser detection component comprises a screw rod, the screw rod penetrates and is rotatably installed on the left and right sides of the inner wall of the machine platform, a driving module is fixedly installed on the left side of the machine platform, the right side of the rotating shaft of the driving module is fixedly connected with the left side of the screw rod, and a sliding tube block is slidably installed on the outer wall of the screw rod. The present invention receives the laser emitted by the laser through the photosensitive plate, so that the equipment can quickly detect multiple type-II superlattices, thereby avoiding the problem that the detection tool is difficult to detect and monitor multiple type-II superlattices at the same time, resulting in poor equipment detection efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of flatness detection, in particular to a second-class superlattice flatness detection tool. Background Art

[0002] With the continuous development of semiconductor technology, Class II superlattice chips are increasingly used in infrared detectors, lasers, modulators and other fields. In semiconductor processing and production, as the process proceeds, the front side of the chip often has poor flatness and offset after the process. The Class II superlattice flatness detection tool is a device used to detect the surface flatness of Class II superlattice materials. The Class II superlattice with flat lattice will be retained, and the Class II superlattice with unqualified flatness needs secondary processing to improve the quality of the Class II superlattice.

[0003] Patent No. CN218723945U discloses a chip flatness detection tool, including a base, a card holder is fixedly connected to the top of the base, a chip slot is opened on the top of the card holder, an empty slot is opened inside the chip slot, and evenly distributed through holes are opened inside the chip slot, and the top and bottom of the through holes are respectively connected to the chip slot and the empty slot. The patent supports the device through the base, horizontally clamps the chip to the inside of the chip slot, and then starts the vacuum assembly to cooperate with the air intake pipe to drive the air inside the empty slot to flow horizontally rapidly. The high-speed flowing air reduces the pressure inside the empty slot, and the adsorption pressure transfer mechanism moves downward along the inside of the empty slot, thereby realizing that the device has the advantages of good positioning effect on the chip, good chip compression and exhaust effect, no need for manual operation, precise and stable, and avoiding chip damage.

[0004] However, the current chip flatness detection tooling has the following problems: when the chip flatness detection tooling is in use, since the flatness of the two types of superlattices are different during flatness detection, it is difficult for the equipment to simultaneously detect multiple type-II superlattices, resulting in poor equipment detection efficiency. Therefore, we propose a type-II superlattice flatness detection tooling. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a second type of superlattice flatness detection tooling, which solves the problems raised in the above background technology.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a second-class superlattice flatness detection tool, including a machine platform, a crystal placing plate is fixed on the top surface of the machine platform, a slide groove is opened on the top surface of the machine platform, the slide groove of the machine platform is located on the back of the crystal placing plate, and a laser detection component is arranged on the inner wall of the machine platform;

[0007] The laser detection component includes a screw rod, which penetrates and is rotatably installed on the left and right sides of the inner wall of the machine platform. A driving module is fixedly installed on the left side of the machine platform. The driving module includes a round shell and a servo motor. The round shell is fixed on the left side of the machine platform. The servo motor is fixedly installed on the right side of the inner wall of the round shell. The right side of the servo motor shaft of the driving module is fixedly connected to the left side of the screw rod. A sliding tube block is slidably installed on the outer wall of the screw rod. The inner wall of the sliding tube block is meshed with the spiral groove of the screw rod. The outer wall of the sliding tube block is in sliding contact with the inner wall of the slide groove of the machine platform. A laser is fixedly installed on the top surface of the sliding tube block. The laser emitting head of the laser is arranged at the bottom of the front of the laser. The left A straight rod is fixedly installed on the side, a groove block is fixed on the outer wall of the straight rod, the groove block is located in front of the crystal placing plate, a roller is rotatably installed on the inner wall of the groove block, an L-shaped frame is fixed on the front of the groove block, a photosensitive plate is fixed on the back of the L-shaped frame, the photosensitive plate is located directly opposite the laser, when the laser moves to the right, the laser emission head of the laser emits laser, the laser is irradiated to the photosensitive plate, when the second type superlattice on the crystal placing plate is uneven, the laser emitted by the laser is blocked by the uneven surface of the second type superlattice, the photosensitive plate cannot receive the laser emitted by the laser, so that the equipment can quickly detect multiple second type superlattices, and an anti-stuck component is arranged on the right side of the sliding tube block;

[0008] The anti-stuck component includes a circular shell, which is fixed to the top right side of the slide tube block, and is located inside the slide groove of the machine. Two slide plates are slidably installed on the inner wall of the circular shell, and a spring is fixed in the middle of the two slide plates directly opposite to each other. Sponge blocks are respectively fixed on the sides of the two slide plates away from each other. Under the elastic force of the spring, the sponge block slides to the right against the slide groove of the machine, and the sponge block evenly applies lubricating oil to the slide groove of the machine.

[0009] An anti-blocking device is arranged in the middle of the top surface of the circular shell, and a fill-in light device is arranged in the middle of the front surface of the anti-blocking device.

[0010] According to the above technical solution, a plurality of placement grooves are provided on the top surface of the crystal placing plate, the roller is located on the top surface of the machine, and the sides of the two sponge blocks that are away from each other are in sliding contact with the inner wall of the slide groove of the machine.

[0011] According to the above technical solution, the anti-obstruction device includes an L-shaped rod, a double-ring plate, two vertical rings, four short columns and two chamfered plates. The L-shaped rod is fixed in the middle of the top surface of the circular shell, the double-ring plate is fixed on the outer wall of the L-shaped rod, the inner wall of the double-ring plate is fixedly connected to the outer wall of the straight rod, the double-ring plate is located on the side close to the back of the groove block, the two vertical rings are fixed on the outer wall of the L-shaped rod, the four short columns are respectively fixed in groups of two at the bottom of the right side of the two vertical rings, and the two chamfered plates are respectively fixed on the right sides of the four short columns. When the chamfered plate moves to the right, the chamfered plate shovels out foreign matter on the crystal placing plate, so that no foreign matter on the crystal placing plate will block the laser irradiation.

[0012] According to the above technical solution, the anti-obstruction device also includes two connecting columns, an arc bar block, a circular frame and a three-dimensional scanner. The two connecting columns are respectively fixed in the middle of the top surfaces of the two vertical rings, the arc bar block is fixed on the top surfaces of the two connecting columns, the circular frame is fixed on the top surface of the arc bar block, and the three-dimensional scanner is fixedly installed on the inner wall of the circular frame. When the three-dimensional scanner moves to the right, the micro camera of the three-dimensional scanner scans and photographs the type II superlattice in the crystal plate, so that the staff can observe the damaged type II superlattice in time.

[0013] According to the above technical solution, the top surface of the crystal placing plate is on the movement trajectory of the two chamfered plates, the two chamfered plates are respectively located on the front and back sides of several placement grooves of the chamfered plates, and a miniature camera is arranged in the middle of the bottom surface of the three-dimensional scanner.

[0014] According to the above technical solution, the fill light device includes an L-shaped thin rod, two connecting rings, a square shell and an LED lamp. The L-shaped thin rod is fixed in the middle of the front side of the circular frame, the two connecting rings are fixed at the bottom of the outer wall of the L-shaped thin rod, the square shell is fixed on the back side of the two connecting rings, and the LED lamp is fixed on the inner wall of the square shell. When the LED lamp moves to the right, the LED lamp illuminates the second type of superlattice surface, allowing the three-dimensional scanner to better scan the superlattice surface.

[0015] According to the above technical solution, the fill light device also includes a transverse ring plate, a vertical rod and an inclined plate. The transverse ring plate passes through and is fixed on the top left side of the L-shaped thin rod. The transverse ring plate is located above the square shell. A circular hole is opened on the left side of the top surface of the transverse ring plate. The vertical rod is fixed on the inner wall of the transverse ring plate. The inclined plate is fixed on the left side of the outer wall of the vertical rod. When the inclined plate moves to the right, the inclined plate blocks the light source of the LED lamp from irradiating the photosensitive plate, so that the photosensitive plate will not be disturbed by the light source of the LED lamp.

[0016] According to the above technical solution, the LED lamp is located in front of the circular frame, and the inclined plate is located on the left side of the square shell.

[0017] The present invention provides a second type of superlattice flatness detection tooling, which has the following beneficial effects:

[0018] (1) The present invention uses a screw rod, a driving module, a slide tube block, a laser, a straight rod, a groove block, a roller, an L-shaped frame, a photosensitive plate, a circular shell, a slide plate and a spring in conjunction with a sponge block. When the laser moves to the right, the laser emission head of the laser emits a laser, and the laser is irradiated onto the photosensitive plate. When the type II superlattice on the crystal plate is uneven, the laser emitted by the laser is blocked by the uneven surface of the type II superlattice, and the photosensitive plate cannot receive the laser emitted by the laser, so that the equipment can quickly detect multiple type II superlattices, preventing the detection tool from being unable to detect and monitor multiple type II superlattices at the same time, resulting in poor equipment detection efficiency. In addition, under the elastic force of the spring, the sponge block slides to the right against the slide groove of the machine, and the sponge block evenly applies lubricating oil in the slide groove of the machine, preventing the equipment from running smoothly and causing the equipment to jam when detecting the flatness of the type II superlattice.

[0019] (2) The present invention sets an anti-obstruction device so that the L-shaped rod, double-ring plate, vertical ring, short column, chamfered plate, connecting column, arc strip block and circular frame cooperate with the three-dimensional scanner. When the chamfered plate moves to the right, the chamfered plate will shovel out foreign matter on the crystal placing plate, so that there will be no foreign matter on the crystal placing plate blocking the laser irradiation, thereby preventing the foreign matter on the crystal placing plate from blocking the laser irradiation and causing inaccurate equipment detection. In addition, when the three-dimensional scanner moves to the right, the micro camera of the three-dimensional scanner scans and photographs the type II superlattice in the crystal placing plate, so that the staff can observe the damaged type II superlattice in time, thereby preventing the damaged type II superlattice from being difficult to detect and causing poor equipment detection effect.

[0020] (3) The present invention arranges a fill light device so that the L-shaped thin rod, the connecting ring, the square shell, the LED lamp, the horizontal ring plate and the vertical rod cooperate with the inclined plate. When the LED lamp moves to the right, the LED lamp illuminates the surface of the second type superlattice, allowing the three-dimensional scanner to better scan the surface of the second type superlattice, thereby preventing the surface of the second type superlattice from being too dark and causing unclear scanning by the three-dimensional scanner. In addition, when the inclined plate moves to the right, the inclined plate blocks the light source of the LED lamp from irradiating the photosensitive plate, so that the photosensitive plate will not be disturbed by the light source of the LED lamp, thereby preventing the photosensitive plate from being disturbed by the light source of the LED lamp and causing inaccurate detection data of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the present invention as a whole;

[0022] Figure 2 It is a schematic cross-sectional view of the back side of the present invention as a whole;

[0023] Figure 3 It is a schematic cross-sectional view of the back of the machine platform of the present invention;

[0024] Figure 4 For the present invention Figure 3A local enlarged schematic diagram of the middle A;

[0025] Figure 5 is a schematic diagram of the anti-blocking device of the present invention;

[0026] Figure 6 is a schematic diagram of a fill light device of the present invention;

[0027] Figure 7 For the present invention Figure 6 A local enlarged schematic diagram of point B in the middle.

[0028] In the figure: 1. machine; 2. crystal plate; 11. laser detection component; 111. screw; 112. drive module; 113. slide tube block; 114. laser; 115. straight rod; 116. groove block; 117. roller; 118. L-shaped frame; 119. photosensitive plate; 12. anti-stuck component; 121. circular shell; 122. slide plate; 123. spring; 124. sponge block; 3. anti-obstruction device; 31. L-shaped rod; 32. double ring plate; 33. vertical ring; 34. short column; 35. chamfered plate; 36. connecting column; 37. arc strip block; 38. circular frame; 39. three-dimensional scanner; 4. fill light device; 41. L-shaped thin rod; 42. connecting ring; 43. square shell; 44. LED lamp; 45. horizontal ring plate; 46. vertical rod; 47. inclined plate. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0030] See also Figure 1-Figure 7 , one embodiment of the present invention is: a second-class superlattice flatness detection tool, comprising a machine table 1, a crystal placing plate 2 is fixed on the top surface of the machine table 1, a slide groove is provided on the top surface of the machine table 1, the slide groove of the machine table 1 is located on the back of the crystal placing plate 2, and a plurality of placement grooves are provided on the top surface of the crystal placing plate 2;

[0031] A laser detection component 11 is arranged on the inner wall of the machine 1. The laser detection component 11 includes a screw 111. The screw 111 penetrates and is rotatably installed on the left and right sides of the inner wall of the machine 1. A driving module 112 is fixedly installed on the left side of the machine 1. The driving module 112 includes a round shell and a servo motor. The round shell is fixed on the left side of the machine 1. The servo motor is fixedly installed on the right side of the inner wall of the round shell. The right side of the servo motor shaft of the driving module 112 is fixedly connected with the left side of the screw 111. A sliding tube block 113 is slidably installed on the outer wall of the screw 111. The inner wall of the sliding tube block 113 is meshed with the spiral groove of the screw 111. The outer wall of the sliding tube block 113 is in sliding contact with the inner wall of the slide groove of the machine 1. A laser 114 is fixedly installed on the top surface of the sliding tube block 113. The laser emitting head of the laser 114 is arranged at the front bottom of the laser 114. A straight rod 115 is fixedly installed on the left side of the laser 114. The straight rod 11 A groove block 116 is fixed on the outer wall, and the groove block 116 is located on the front of the crystal placing plate 2. A roller 117 is rotatably installed on the inner wall of the groove block 116. An L-shaped frame 118 is fixed on the front of the groove block 116, and a photosensitive plate 119 is fixed on the back of the L-shaped frame 118. The photosensitive plate 119 is located directly opposite to the laser 114, and the roller 117 is located on the top surface of the machine table 1. When the laser 114 moves to the right, the laser emission head of the laser 114 emits laser, and the laser is irradiated on the photosensitive plate 119. When the second type superlattice on the crystal placing plate 2 is uneven, the laser emitted by the laser 114 is blocked by the uneven surface of the second type superlattice, and the photosensitive plate 119 cannot receive the laser emitted by the laser 114, so that the equipment can quickly detect multiple second type superlattices, avoiding the difficulty of the detection tooling to detect and monitor multiple second type superlattices at the same time, resulting in poor equipment detection efficiency;

[0032] An anti-stuck component 12 is provided on the right side of the sliding tube block 113, and the anti-stuck component 12 includes a circular shell 121, which is fixed to the top right side of the sliding tube block 113, and the circular shell 121 is located inside the slide groove of the machine 1. Two slide plates 122 are slidably installed on the inner wall of the circular shell 121, and a spring 123 is fixed in the middle opposite to the two slide plates 122. Sponge blocks 124 are respectively fixed on the sides of the two slide plates 122 away from each other, and the sides of the two sponge blocks 124 away from each other are in sliding contact with the inner wall of the slide groove of the machine 1. Under the elastic force of the spring 123, the sponge block 124 slides to the right against the slide groove of the machine 1, and the sponge block 124 evenly applies the lubricating oil in the slide groove of the machine 1 to avoid jamming of the equipment when the detection tooling is working and the equipment is not running smoothly, causing the equipment to detect the flatness of the type II superlattice.

[0033] When in use, the second type superlattice chip is coated with photoresist on the front side during the dicing and cutting process. Therefore, after the dicing process is completed, the photoresist on the front side of the chip is first cleaned. After cleaning, the front side of the chip is bonded to the ground glass plate using white wax according to the conventional back thinning process. The white wax on the front side is flattened using a tablet press. The front side of the chip is bonded as the reference plane. At this time, the uneven surface is the back side of the chip. After the chip is bonded, the back side of the chip is evenly coated with photoresist. After the photoresist is completely cured, the thick photoresist is ground and thinned using the traditional back thinning method. The back of the chip and the photoresist are treated as a whole and ground flat. At this time, the bonded white wax is melted and the front side of the chip is bonded using petroleum ether. The chip is cleaned with white wax, and then the chip and the circuit are completely interconnected. After the complete interconnection process is completed, the chip and the circuit are completely connected. At this time, acetone, alcohol and other reagents are used to remove the photoresist of the chip circuit as a whole. At this time, the chip and the circuit are interconnected in parallel planes, and the interconnection effect is significantly improved. The interconnection process problem caused by the unqualified chip flatness is effectively solved, and the unevenness of the front of the chip is converted into the unevenness of the back of the chip. The staff performs a flatness test on the chip. When the chip is detected to be uneven, the subsequent back thinning process only needs to be performed normally to solve the problem of unevenness on the back of the chip while thinning the chip thickness. (The hardness of the photoresist is 3H-9H after it is fully cured, which is similar to the hardness of the chip, so Can be removed by thinning), because the flatness of the two types of superlattices is different when the flatness is detected, it is difficult for the equipment to detect multiple type II superlattices at the same time. At this time, the machine 1 supports the crystal plate 2, and the staff places multiple type II superlattices into the placement slot of the crystal plate 2. The staff starts the servo motor in the drive module 112, and the shaft of the servo motor starts to rotate. The shaft of the servo motor drives the screw 111, and the screw 111 rotates forward in the machine 1. Under the limitation of the slide slot of the machine 1, the spiral groove of the screw 111 drives the slide tube block 113 to move right, and the slide tube block 113 slides to the right in the slide slot of the machine 1. The slide tube block 113 drives the laser 114 to move right, and the laser 114 drives the straight rod 115 to move right. 115 drives the groove block 116 to move rightward, and the groove block 116 drives the roller 117 to move rightward. Under the action of friction, the roller 117 rolls rightward on the machine table 1. At the same time, the groove block 116 drives the L-shaped frame 118 to move rightward, and the L-shaped frame 118 drives the photosensitive plate 119 to move rightward. At the same time, the laser 114 is started in the process of moving to the right. The laser emission head of the laser 114 emits a laser, and the laser is irradiated onto the photosensitive plate 119. When the second type superlattice on the crystal plate 2 is uneven, the laser emitted by the laser 114 is blocked by the uneven surface of the second type superlattice, and the photosensitive plate 119 cannot receive the laser emitted by the laser 114, so that the equipment can quickly detect multiple second type superlattices to prevent the equipment from being used.It is difficult to detect multiple Class II superlattices at the same time, thus avoiding the problem of poor equipment detection efficiency caused by the difficulty of detection tooling to detect and monitor multiple Class II superlattices at the same time.

[0034] When the slide tube block 113 slides to the right in the slide groove of the machine 1, the slide tube block 113 drives the circular shell 121 to move to the right, the circular shell 121 drives the slide plate 122 to move to the right, the slide plate 122 drives the spring 123 to move to the right, and at the same time, the slide plate 122 drives the sponge block 124 to move to the right. Under the elastic force of the spring 123, the sponge block 124 slides to the right against the slide groove of the machine 1, and the sponge block 124 evenly spreads the lubricating oil in the slide groove of the machine 1 to prevent the slide groove of the machine 1 from aging and roughening when the equipment is in use, thereby avoiding the problem of the equipment running smoothly when the detection tooling is working, causing the equipment to jam when detecting the flatness of the type II superlattice.

[0035] See also Figure 1-Figure 7 On the basis of the above embodiment, another embodiment of the present invention further includes an anti-blocking device 3 and a fill light device 4, wherein an anti-blocking device 3 is provided in the middle of the top surface of the circular shell 121, and the anti-blocking device 3 includes an L-shaped rod 31, a double ring plate 32, two vertical rings 33, four short columns 34 and two chamfered plates 35, the L-shaped rod 31 is fixed in the middle of the top surface of the circular shell 121, the double ring plate 32 is fixed on the outer wall of the L-shaped rod 31, the inner wall of the double ring plate 32 is fixedly connected to the outer wall of the straight rod 115, the double ring plate 32 is located on one side close to the back of the groove block 116, and the two vertical rings 33 are fixed on the L-shaped rod On the outer wall 31, four short columns 34 are fixed in groups of two at the bottom of the right side of the two vertical rings 33, and two chamfered plates 35 are fixed on the right sides of the four short columns 34. The top surface of the crystal placing plate 2 is on the movement trajectory of the two chamfered plates 35. The two chamfered plates 35 are respectively located on the front and back sides of several placement grooves of the chamfered plates 35. When the chamfered plates 35 move to the right, the chamfered plates 35 shovel out foreign matter on the crystal placing plate 2, so that there will be no foreign matter on the crystal placing plate 2 blocking the laser irradiation, so as to avoid foreign matter on the crystal placing plate 2 blocking the laser irradiation when the detection tooling is in use, resulting in inaccurate equipment detection.

[0036] The anti-obstruction device 3 also includes two connecting columns 36, an arc block 37, a circular frame 38 and a three-dimensional scanner 39. The two connecting columns 36 are respectively fixed in the middle of the top surfaces of the two vertical rings 33, the arc block 37 is fixed on the top surfaces of the two connecting columns 36, the circular frame 38 is fixed on the top surface of the arc block 37, and the three-dimensional scanner 39 is fixedly installed on the inner wall of the circular frame 38. A miniature camera is arranged in the middle of the bottom surface of the three-dimensional scanner 39. When the three-dimensional scanner 39 moves to the right, the miniature camera of the three-dimensional scanner 39 scans and photographs the type II superlattice in the crystal plate 2, so that the staff can observe the damaged type II superlattice in time, so as to avoid the damaged type II superlattice being difficult to detect when the detection tooling is in use, resulting in poor equipment detection effect.

[0037] A fill light device 4 is provided in the middle of the front side of the anti-obstruction device 3, and the fill light device 4 comprises an L-shaped thin rod 41, two connecting rings 42, a square shell 43 and an LED lamp 44. The L-shaped thin rod 41 is fixed in the middle of the front side of the circular frame 38, the two connecting rings 42 are fixed to the bottom of the outer wall of the L-shaped thin rod 41, the square shell 43 is fixed to the back side of the two connecting rings 42, and the LED lamp 44 is fixed on the inner wall of the square shell 43. The LED lamp 44 is located directly in front of the circular frame 38. When the LED lamp 44 moves to the right, the LED lamp 44 illuminates the surface of the second type superlattice, so that the three-dimensional scanner 39 can better scan the surface of the second type superlattice, so as to avoid the situation that the surface of the second type superlattice is too dark when the detection tooling is in use, causing the three-dimensional scanner 39 to scan unclearly.

[0038] The fill light device 4 also includes a transverse ring plate 45, a vertical rod 46 and an inclined plate 47. The transverse ring plate 45 passes through and is fixed on the top left side of the L-shaped thin rod 41. The transverse ring plate 45 is located above the square shell 43. A circular hole is opened on the left side of the top surface of the transverse ring plate 45. The vertical rod 46 is fixed on the inner wall of the transverse ring plate 45. The inclined plate 47 is fixed on the left side of the outer wall of the vertical rod 46. The inclined plate 47 is located on the left side of the square shell 43. When the inclined plate 47 moves to the right, the inclined plate 47 blocks the light source of the LED lamp 44 from irradiating the photosensitive plate 119, so that the photosensitive plate 119 will not be disturbed by the light source of the LED lamp 44, so as to avoid the interference of the light source of the LED lamp 44 on the photosensitive plate 119 when the detection tooling is in use, resulting in inaccurate equipment detection data.

[0039] While the sliding tube block 113 drives the circular shell 121 to move to the right, the circular shell 121 drives the L-shaped rod 31 to move to the right, and the L-shaped rod 31 drives the double ring plate 32 to move to the right. At the same time, the L-shaped rod 31 drives the vertical ring 33 to move to the right, the vertical ring 33 drives the short column 34 to move to the right, and the short column 34 drives the chamfered plate 35 to move to the right, so that in the process of the chamfered plate 35 moving to the right, the chamfered plate 35 will shovel out foreign matter on the crystal placing plate 2, so that there will be no foreign matter on the crystal placing plate 2 blocking the laser irradiation, thereby preventing foreign matter from blocking the laser irradiation when the equipment is in use, thereby avoiding the problem of inaccurate equipment detection caused by foreign matter on the crystal placing plate 2 blocking the laser irradiation when the detection tooling is in use.

[0040] While the L-shaped rod 31 drives the vertical ring 33 to move to the right, the vertical ring 33 drives the connecting column 36 to move to the right, the connecting column 36 drives the arc block 37 to move to the right, the arc block 37 drives the circular frame 38 to move to the right, and the circular frame 38 drives the three-dimensional scanner 39 to move to the right. In the process of the three-dimensional scanner 39 moving to the right, the micro camera of the three-dimensional scanner 39 scans and photographs the type II superlattice in the crystal plate 2, and the three-dimensional scanner 39 sends the scanned data to the staff computer via the wireless network. The data scanned by the three-dimensional scanner 39 forms a three-dimensional picture on the computer, so that the staff can observe the damaged type II superlattice in time to prevent the damaged type II superlattice from being difficult to detect when the equipment is in use, thereby avoiding the problem of poor equipment detection effect caused by the damaged type II superlattice being difficult to detect when the detection tooling is in use.

[0041] While the arc block 37 drives the circular frame 38 to move to the right, the circular frame 38 drives the L-shaped thin rod 41 to move to the right, the L-shaped thin rod 41 drives the connecting ring 42 to move to the right, the connecting ring 42 drives the square shell 43 to move to the right, and the square shell 43 drives the LED light 44 to move to the right. In the process of the LED light 44 moving to the right, the LED light 44 is turned on, and the LED light 44 illuminates the surface of the type-II superlattice, allowing the three-dimensional scanner 39 to better scan the surface of the type-II superlattice, preventing the surface of the type-II superlattice from being too dark when the equipment is in use, thereby avoiding the problem of unclear scanning caused by the type-II superlattice surface being too dark when the detection tooling is in use.

[0042] While the circular frame 38 drives the L-shaped thin rod 41 to move to the right, the L-shaped thin rod 41 drives the horizontal ring plate 45 to move to the right, the horizontal ring plate 45 drives the vertical rod 46 to move to the right, and the vertical rod 46 drives the inclined plate 47 to move to the right, so that when the inclined plate 47 moves to the right, the inclined plate 47 blocks the light source of the LED lamp 44 from irradiating the photosensitive plate 119, so that the photosensitive plate 119 will not be disturbed by the light source of the LED lamp 44, thereby preventing the photosensitive plate 119 from being disturbed by the light source of the LED lamp 44 when the equipment is in use, thereby avoiding the problem of inaccurate equipment detection data caused by the interference of the light source of the LED lamp 44 on the photosensitive plate 119 when the detection tooling is in use.

[0043] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A second-class superlattice flatness detection tool, comprising a machine platform (1), a crystal placement plate (2) being fixed on the top surface of the machine platform (1), characterized in that: The top surface of the machine platform (1) is provided with a slide groove, the slide groove of the machine platform (1) is located on the back side of the crystal placing plate (2), and the inner wall of the machine platform (1) is provided with a laser detection component (11); The laser detection component (11) comprises a screw (111), the screw (111) penetrates and is rotatably mounted on the left and right sides of the inner wall of the machine platform (1), a driving module (112) is fixedly mounted on the left side of the machine platform (1), the right side of the rotating shaft of the driving module (112) is fixedly connected to the left side of the screw (111), a sliding tube block (113) is slidably mounted on the outer wall of the screw (111), the inner wall of the sliding tube block (113) and the spiral groove of the screw (111) are mutually meshed, the outer wall of the sliding tube block (113) is in sliding contact with the inner wall of the sliding groove of the machine platform (1), and a laser (114) is fixedly mounted on the top surface of the sliding tube block (113), and the laser (1 14) is arranged at the bottom of the front side of the laser (114), a straight rod (115) is fixedly installed on the left side of the laser (114), a groove block (116) is fixed on the outer wall of the straight rod (115), the groove block (116) is located on the front side of the crystal placing plate (2), a roller (117) is rotatably installed on the inner wall of the groove block (116), an L-shaped frame (118) is fixed on the front side of the groove block (116), a photosensitive plate (119) is fixed on the back side of the L-shaped frame (118), the photosensitive plate (119) is located directly opposite to the laser (114), and an anti-stuck component (12) is arranged on the right side of the slide tube block (113); The anti-stuck component (12) comprises a circular shell (121), the circular shell (121) is fixed to the top right side of the slide tube block (113), the circular shell (121) is located inside the slide groove of the machine table (1), two slide plates (122) are slidably mounted on the inner wall of the circular shell (121), a spring (123) is fixed in the middle of the two slide plates (122) facing each other, and sponge blocks (124) are respectively fixed on the sides of the two slide plates (122) away from each other; An anti-blocking device (3) is arranged in the middle of the top surface of the circular shell (121), and a fill-light device (4) is arranged in the middle of the front surface of the anti-blocking device (3); The anti-blocking device (3) comprises an L-shaped rod (31), a double ring plate (32), two vertical rings (33), four short columns (34) and two chamfered plates (35); the L-shaped rod (31) is fixed to the middle of the top surface of the circular shell (121); the double ring plate (32) is fixed to the outer wall of the L-shaped rod (31); the inner wall of the double ring plate (32) is fixedly connected to the outer wall of the straight rod (115); the double ring plate (32) is located on a side close to the back of the groove block (116); the two vertical rings (33) are fixed to the outer wall of the L-shaped rod (31); the four short columns (34) are respectively fixed in pairs to the bottom of the right side of the two vertical rings (33); and the two chamfered plates (35) are respectively fixed to the right sides of the four short columns (34); The anti-blocking device (3) further comprises two connecting columns (36), an arc block (37), a circular frame (38) and a three-dimensional scanner (39), wherein the two connecting columns (36) are respectively fixed in the middle of the top surfaces of the two vertical rings (33), the arc block (37) is fixed on the top surfaces of the two connecting columns (36), the circular frame (38) is fixed on the top surfaces of the arc block (37), and the three-dimensional scanner (39) is fixedly mounted on the inner wall of the circular frame (38); The fill light device (4) comprises an L-shaped thin rod (41), two connecting rings (42), a square shell (43) and an LED lamp (44), wherein the L-shaped thin rod (41) is fixed to the middle of the front side of the circular frame (38), the two connecting rings (42) are fixed to the bottom of the outer wall of the L-shaped thin rod (41), the square shell (43) is fixed to the back side of the two connecting rings (42), and the LED lamp (44) is fixed to the inner wall of the square shell (43); The fill light device (4) further comprises a transverse ring plate (45), a vertical rod (46) and an inclined plate (47); the transverse ring plate (45) penetrates through and is fixed to the top left side of the L-shaped thin rod (41); the transverse ring plate (45) is located above the square shell (43); a circular hole is provided on the left side of the top surface of the transverse ring plate (45); the vertical rod (46) is fixed to the inner wall of the transverse ring plate (45); and the inclined plate (47) is fixed to the left side of the outer wall of the vertical rod (46).

2. The second type superlattice flatness detection tool according to claim 1, characterized in that: The top surface of the crystal placing plate (2) is provided with a plurality of placement grooves, the roller (117) is located on the top surface of the machine table (1), and the sides of the two sponge blocks (124) that are away from each other are in sliding contact with the inner wall of the slide groove of the machine table (1).

3. The second type superlattice flatness detection tool according to claim 2, characterized in that: The top surface of the crystal placing plate (2) is located on the movement trajectory of the two chamfered plates (35), the two chamfered plates (35) are respectively located on the front and back sides of a plurality of placement grooves of the chamfered plates (35), and a micro camera is arranged in the middle of the bottom surface of the three-dimensional scanner (39).

4. The second type superlattice flatness detection tool according to claim 3, characterized in that: The LED lamp (44) is located directly in front of the circular frame (38), and the inclined plate (47) is located on the left side of the square shell (43).

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