High-density gas-liquid phase change temperature field measurement sensor based on optical fiber array
By coating the Faper and V-shaped grooves on the optical fiber array sensor, the measurement of high-density gas-liquid phase change temperature field is achieved, solving the problems of measurement accuracy and application limitations in the prior art, and providing higher spatial resolution rate and temperature field information acquisition capability of industrial production.
Patent Information
- Application Number
- CN202411257887.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-09
- Publication Date
- 2024-12-27
AI Technical Summary
The existing evaporated gas-liquid interface temperature measurement technology has the problem of low spatial density and the inability to obtain high-density spatial temperature field information at the same time, and it is difficult to apply in industrial production.
Using a high-density gas-liquid phase change temperature field measurement sensor based on optical fiber array, the intensive arrangement of multiple optical fibers is achieved by coating the Faper on the end surface of the fiber, combining the design of V-shaped grooves and clamping frames, and the temperature field is obtained by using spectral interference. information.
The temperature measurement accuracy and spatial resolution are improved, and the detailed information of the evaporation interface temperature field can be obtained in real time in industrial production, solving the problems of measurement accuracy and application limitations in traditional technology.
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Figure CN119197803A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of evaporation interface temperature field testing, in particular to a high-density gas-liquid phase change temperature field measuring sensor based on an optical fiber array. Background Art
[0002] The evaporation, boiling and condensation processes occurring at the gas-liquid interface are widely present in nature and in various engineering fields such as petroleum, chemical industry, energy, machinery, materials, and environment. Under many extreme conditions, such as thin liquid film evaporation in microelectronic arrays, rapid evaporation by pulse heating, and spray cooling in a vacuum environment, the phase change at the gas-liquid interface becomes the main controlling factor of the process. Understanding and mastering the characteristics and mechanisms of phase change under various conditions is of great significance for optimizing related process and improving production efficiency.
[0003] Although many scholars have conducted extensive research on the phenomenon of evaporation gas-liquid interface, the mechanism of evaporation phase change is not completely clear so far. On the one hand, the evaporation process is a process in which high-energy molecules preferentially pass through the gas-liquid interface from the liquid phase to the gas phase, which is a typical non-equilibrium thermodynamic process. In the theoretical analysis process, there must be the setting of ideal working conditions and the simplification of the calculation process, which makes the theoretical model deviate from the actual evaporation process to varying degrees. On the other hand, it is difficult to ensure the consistency of evaporation conditions and the measurement accuracy of temperature sensors in experimental research. Since the non-equilibrium thermodynamic process of evaporation phase change is always accompanied by mass transfer and discontinuous changes in interface temperature, in order to master the evaporation phase change mechanism, it is necessary to obtain the data of the entire evaporation interface phase change temperature field. The experimental research on evaporation phase change reported so far mainly uses two test methods. One is to arrange multiple thermocouple measurement points on the test rake to form a multi-point test sensor. The thermocouple is composed of two wires connected into a measurement node, and it needs to be insulated. The number of wire shielding wires is large and the line is complex. Therefore, the number of measurement points is limited, and the spatial density of the measured temperature field data is low. Another method is to use a single-point filament thermocouple combined with a high-precision displacement stage to fix the filament thermocouple on the high-precision displacement stage, and control the displacement stage to move the thermocouple to obtain the entire phase change temperature field. The spatial resolution of the temperature field data measured by this method mainly depends on the displacement resolution of the high-precision displacement stage, and it is composed of temperature data at different times and positions, and it is impossible to obtain the instantaneous change of the temperature field. In addition, in industrial production, the evaporation interface phase change mechanism is mainly in a low-pressure closed tank. This temperature measurement method can only be used to study the phase change mechanism in the laboratory and cannot be used for actual measurement in industrial production. Summary of the invention
[0004] The object of the present invention is to provide a high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, comprising a V-groove, a thin film Fabry-Perot, a transmission optical fiber, a clamping frame, and a tail handle.
[0005] The transmission optical fiber passes through the tail handle and is arranged in the V-shaped groove.
[0006] The transmission optical fiber is an array structure, and the lengths of all optical fibers in the array extending out of the V-groove are increasing.
[0007] The thin film Fabry-Perot is located at the end of the transmission optical fiber.
[0008] The clamping frame is used for clamping the cover plate and the bottom plate of the V-shaped groove.
[0009] The method for making the evaporation interface temperature field measurement sensor is as follows:
[0010] 1) Remove the coating at one end of the optical fiber, grind and clean the end face, and coat the end face with a micrometer-level silicon film.
[0011] 2) Making optical fiber ribbon: Arrange multiple coated optical fibers in a row with their end faces flush.
[0012] 3) Place the V-groove base plate in the corresponding position of the clamping frame.
[0013] 4) Place the uncoated end of the optical fiber tape on the groove of the V-groove bottom plate and cover it with the V-groove cover plate.
[0014] 5) Tighten the clamping frame screws, clamp the V-groove bottom plate and cover plate, and make sure the optical fiber is located in the V-groove.
[0015] Furthermore, the evaporation interface temperature field measurement sensor is used to measure the temperature change of the evaporation interface in the closed cavity.
[0016] Furthermore, when the evaporation interface temperature field measurement sensor is working, the clamping frame is inserted into the closed cavity to be measured, and the thin film Fabry-Perot is facing the evaporation interface.
[0017] Broadband light is transmitted by the transmission optical fiber and passes through the contact interface between the transmission optical fiber and the thin film Fabry-Perot. At this time, part of the light is reflected, and part of the light is transmitted and reflected back at the interface between the thin film Fabry-Perot and the air. The interference of the two beams of light makes the spectrum carry the thin film Fabry-Perot optical thickness information that characterizes the temperature change.
[0018] Furthermore, thin film Fabry-Perot is produced by coating.
[0019] Furthermore, the material of the thin film Fabry-Perot includes silicon.
[0020] Furthermore, the material of the V-shaped groove includes quartz and high borosilicate, and the groove spacing ranges from 127 μm to 250 μm.
[0021] Furthermore, the material of the clamping frame and the tail handle includes stainless steel.
[0022] Furthermore, the V-shaped groove is used to support the optical fiber, to position the optical fiber, and to ensure that the optical fiber is vertical.
[0023] Furthermore, the tail handle is screwed into the clamping frame through an outer spiral at one end, thereby placing the transmission optical fiber.
[0024] Furthermore, the inclination angle between the V-shaped groove and the clamping frame is adjustable.
[0025] The technical effect of the present invention is unquestionable, and the present invention is applied to the measurement of the temperature field of the evaporation interface.
[0026] The beneficial effects of the present invention are as follows:
[0027] 1) Thin-film Fabry-Perot is used as a temperature sensing element. The thin-film Fabry-Perot is at the end of the sensor, which can sense temperature faster;
[0028] 2) Fabry-Perot is formed by coating the end face of the optical fiber. The size of the temperature sensing element can be nanometer-level (generally plated to micrometer-level for easy demodulation), with better temperature measurement positioning accuracy and higher temperature measurement accuracy.
[0029] 3) With the help of V-grooves, multiple coated Fabry-Perot sensors are combined into a distributed temperature measurement sensor with high spatial resolution, making it easier to obtain detailed information on the temperature field.
[0030] 4) Temperature sensing transmission is completed in the optical fiber, light is used as the transmission signal, there is no need to insulate the sensor, and the signal transmission line is simple.
[0031] 5) The coating material is made of silicon, which has a higher thermo-optical coefficient.
[0032] In summary, in view of the problem that the thermocouple testing technology has low spatial density and cannot simultaneously obtain high-density spatial temperature field information, the present invention provides a high-density measurement device for the gas-liquid phase change temperature field based on an optical fiber array. The device uses a coated Fabry-Perot as a temperature sensing element, and the size of the temperature sensing element is only in the micron order. With the help of V-grooves to densely arrange the optical fibers, the distance between the measuring points can be shortened to hundreds of microns or even tens of microns, so as to obtain more comprehensive temperature field information. BRIEF DESCRIPTION OF THE DRAWINGS
[0033] Figure 1 This is a structural diagram of a high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array;
[0034] Figure 2 This is the principle diagram of thin film Fabry-Perot temperature measurement;
[0035] Figure 3 Create a flow chart for a high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array;
[0036] Figure 4 Schematic diagram of the evaporation interface temperature field measurement sensor of the present invention used for evaporation interface temperature field measurement
[0037] Figure 5 The sensor structure described in the embodiment;
[0038] In the figure, 1-V-groove, 2-thin film Fabry-Perot, 3-clamping frame, 4-transmission optical fiber, 5-tail handle. DETAILED DESCRIPTION
[0039] The present invention is further described below in conjunction with the embodiments, but it should not be understood that the above subject matter of the present invention is limited to the following embodiments. Without departing from the above technical ideas of the present invention, various substitutions and changes are made according to the common technical knowledge and customary means in the art, which should all be included in the protection scope of the present invention.
[0040] Embodiment 1:
[0041] See also Figures 1 to 4 A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array includes a V-groove 1, a thin film Fabry-Perot 2, a transmission optical fiber 4, a clamping frame 3, and a tail handle 5.
[0042] The transmission optical fiber 4 passes through the tail handle 5 and is arranged in the V-shaped groove 1 .
[0043] The transmission optical fiber 4 is an array structure, and the lengths of all optical fibers in the array extending out of the V-groove 1 are increasing.
[0044] The thin film Fabry-Perot 2 is located at the end of the transmission optical fiber 4 .
[0045] The clamping frame 3 is used to clamp the cover plate and the bottom plate of the V-shaped groove 1 .
[0046] The method for making the evaporation interface temperature field measurement sensor is as follows:
[0047] 1) Remove the coating at one end of the optical fiber, grind and clean the end face, and coat the end face with a micrometer-level silicon film.
[0048] 2) Making optical fiber ribbon: Arrange multiple coated optical fibers in a row with their end faces flush.
[0049] 3) Place the bottom plate of the V-groove 1 on the corresponding position of the clamping frame 3.
[0050] 4) Place the uncoated end of the optical fiber tape on the groove of the V-groove bottom plate and cover it with the V-groove cover plate.
[0051] 5) Tighten the screws of the clamping frame 3, clamp the V-groove bottom plate and cover plate, and make sure that the optical fiber is located in the V-groove 1.
[0052] The evaporation interface temperature field measurement sensor is used to measure the temperature change of the evaporation interface in a closed cavity.
[0053] When the evaporation interface temperature field measurement sensor is working, the clamping frame 3 is inserted into the closed cavity to be measured, and the thin film Fabry-Perot 2 faces the evaporation interface.
[0054] The broadband light is transmitted by the transmission optical fiber 6 and passes through the contact interface between the transmission optical fiber 6 and the thin film Fabry-Perot 2. At this time, part of the light is reflected, and part of the light is transmitted and reflected back at the interface between the thin film Fabry-Perot 2 and the air. The interference of the two beams of light makes the spectrum carry the optical thickness information of the thin film Fabry-Perot 2 that characterizes the temperature change.
[0055] Thin film Fabry-Perot 2 is produced by coating.
[0056] The material of the thin film Fabry-Perot 2 includes silicon.
[0057] The material of the V-shaped groove 1 includes quartz and high borosilicate, and the groove spacing ranges from 127 μm to 250 μm.
[0058] The material of the clamping frame 3 and the tail handle 5 includes stainless steel.
[0059] The V-shaped groove 1 is used to support the optical fiber, to position the optical fiber, and to ensure that the optical fiber is vertical.
[0060] The tail handle 5 is screwed into the clamping frame 3 through an outer spiral at one end, thereby placing the transmission optical fiber 4.
[0061] The inclination angle between the V-shaped groove 1 and the clamping frame 3 is adjustable.
[0062] Embodiment 2:
[0063] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array comprises a V-groove 1, a thin film Fabry-Perot 2, a transmission optical fiber 4, a clamping frame 3, and a tail handle 5.
[0064] The transmission optical fiber 4 passes through the tail handle 5 and is arranged in the V-shaped groove 1 .
[0065] The transmission optical fiber 4 is an array structure, and the lengths of all optical fibers in the array extending out of the V-groove 1 are increasing.
[0066] The thin film Fabry-Perot 2 is located at the end of the transmission optical fiber 4 .
[0067] The clamping frame 3 is used to clamp the cover plate and the bottom plate of the V-shaped groove 1 .
[0068] The method for making the evaporation interface temperature field measurement sensor is as follows:
[0069] 1) Remove the coating at one end of the optical fiber, grind and clean the end face, and coat the end face with a micrometer-level silicon film.
[0070] 2) Making optical fiber ribbon: Arrange multiple coated optical fibers in a row with their end faces flush.
[0071] 3) Place the bottom plate of the V-groove 1 on the corresponding position of the clamping frame 3.
[0072] 4) Place the uncoated end of the optical fiber tape on the groove of the V-groove bottom plate and cover it with the V-groove cover plate.
[0073] 5) Tighten the screws of the clamping frame 3, clamp the V-groove bottom plate and cover plate, and make sure that the optical fiber is located in the V-groove 1.
[0074] Embodiment 3:
[0075] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as that of Example 2. Furthermore, the evaporation interface temperature field measurement sensor is used to measure the temperature change of the evaporation interface in a closed cavity.
[0076] Embodiment 4:
[0077] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as any one of Examples 2-3. Furthermore, when the evaporation interface temperature field measurement sensor is working, the clamping frame 3 is inserted into the closed cavity to be measured, and the thin film Fabry-Perot 2 faces the evaporation interface.
[0078] The broadband light is transmitted by the transmission optical fiber 6 and passes through the contact interface between the transmission optical fiber 6 and the thin film Fabry-Perot 2. At this time, part of the light is reflected, and part of the light is transmitted and reflected back at the interface between the thin film Fabry-Perot 2 and the air. The interference of the two beams of light makes the spectrum carry the optical thickness information of the thin film Fabry-Perot 2 that characterizes the temperature change.
[0079] Embodiment 5:
[0080] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as any one of Examples 2-4, and further, the thin film Fabry-Perot 2 is manufactured by coating.
[0081] Embodiment 6:
[0082] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as any one of Examples 2-5, and further, the material of the thin film Fabry-Perot 2 includes silicon.
[0083] Embodiment 7:
[0084] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as any one of Examples 2-6, further, the material of the V-groove 1 includes quartz and high borosilicate, and the spacing range of the groove is 127μm to 250μm.
[0085] Embodiment 8:
[0086] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as any one of embodiments 2-7, and further, the material of the clamping frame 3 and the tail handle 5 includes stainless steel.
[0087] Embodiment 9:
[0088] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as any one of Examples 2-8, and further, the V-groove 1 is used to support the optical fiber, to position the optical fiber, and to ensure that the optical fiber is vertical.
[0089] Embodiment 10:
[0090] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as any one of embodiments 2-9, and further, the tail handle 5 is screwed into the clamping frame 3 through an external spiral at one end, and then the transmission optical fiber 4 is placed.
[0091] Embodiment 11:
[0092] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content of which is the same as any one of embodiments 2-10, and further, the inclination angle between the V-groove 1 and the clamping frame 3 is adjustable.
[0093] Embodiment 12:
[0094] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array comprises a V-groove, a thin film Fabry-Perot, a transmission optical fiber, a clamping frame, and a tail handle.
[0095] Multiple single-mode optical fibers with end-face coating are placed in the V-groove, and the optical fiber protruding ends are increased in sequence. The clamping frame clamps the V-groove cover plate and the bottom plate, so that the optical fiber is arranged in the V-groove. The tail handle is connected to the clamping frame for placing the transmission optical fiber and facilitating the installation of the sensor during measurement.
[0096] The material of thin film Fabry-Perot is silicon. The larger thermo-optic coefficient of silicon material can make the temperature sensing element have higher temperature measurement sensitivity.
[0097] The thin film Fabry-Perot is placed at the top of the optical fiber, which can sense temperature the fastest; the end Fabry-Perot made by coating can make the temperature sensing element size reach the nanometer level, and the temperature measurement positioning accuracy is higher. 4. The V-groove material can be quartz or high borosilicate. The spacing of the upper groove of the V-groove is 127μm~250μm or 127μm.
[0098] The material of the support frame and the tail handle can be stainless steel.
[0099] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array includes but is not limited to the structure composed of the above-mentioned structure and materials. Evaporation interface temperature field measurement sensors composed of other thin film Fabry-Perot arrays, other optical fiber structures, and other material supports are still within the scope of the present invention.
[0100] The function of each component in the present invention
[0101] The thin film Fabry-Perot is a temperature sensing element. Broadband light is transmitted by the transmission fiber. When passing through the interface between the fiber and the thin film Fabry-Perot, part of the light is reflected, and part of the light is transmitted and reflected back at the interface between the film and the air. The interference of the two beams of light makes the spectrum carry the optical thickness information of the thin film. When the temperature changes, the optical thickness of the film changes, causing the spectrum to shift. By demodulating the spectrum shift with a spectrometer, the corresponding temperature change can be obtained, thereby obtaining the ambient temperature.
[0102] The V-shaped groove supports the optical fiber, and the optical fiber is positioned with the help of the V-groove to ensure that the optical fiber is vertical;
[0103] The clamping frame clamps the V-groove and clamps the optical fiber by squeezing the V-groove bottom plate and the cover plate;
[0104] The tail handle is screwed into the clamping frame through an external spiral at one end to place the transmission optical fiber and provide a sensor installation position during measurement.
[0105] Embodiment 13:
[0106] The method for manufacturing a high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array as described in any one of Examples 1 to 12 comprises the following steps:
[0107] 1) Prepare materials (including single-mode optical fiber, V-groove, clamping frame, tail handle, and silicon target).
[0108] 2) Remove the coating at one end of the optical fiber, with a length of 1 cm, grind and clean the end face, and coat the end face with a micrometer-level silicon film.
[0109] 3) Make a fiber ribbon: Arrange multiple coated optical fibers in a row with the end faces flush. Observe the end face position under a microscope, and use a translation stage to move the optical fibers one by one toward the other end. The moving distance is the product of the spatial resolution and the serial number. After determining the position, use tape to make it into a fiber ribbon.
[0110] 4) Observe the operation under a microscope and place the V-groove base plate in the corresponding position of the clamping frame.
[0111] 5) Observe the operation under a microscope, place the uncoated end of the optical fiber tape on the groove of the V-groove bottom plate, and cover it with the V-groove cover plate.
[0112] 6) Tighten the clamping frame screws, clamp the V-groove bottom plate and cover plate, and confirm under a microscope that the optical fiber is located in the V-groove.
[0113] Embodiment 14:
[0114] The working principle of the high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array described in any one of Examples 1-12 is as follows:
[0115] 1. Principle of Thin Film Fabry-Perot Temperature Measurement
[0116] join Figure 2 The Fabry-Perot structure of the optical fiber end can be formed by coating a certain thickness of silicon film material on the end face of the optical fiber. As shown in the figure, when a beam of broadband light is transmitted through the optical fiber to the interface between the optical fiber and the film, part of the light will be reflected and part of the light will be transmitted. When the transmitted light passes through the film and reaches the contact surface with the air, it will be reflected back again, and the light reflected back at the two interfaces will interfere.
[0117] According to the Fabry-Perot double-beam interference theory, the intensity of the reflected spectrum is
[0118]
[0119] Among them, I 1 (λ), I 2 (λ) are the reflected light intensities of the two interfaces;
[0120] D is the optical path difference between the two reflected lights;
[0121] is the initial phase.
[0122] It can be seen from formula (1) that the frequency of the interference fringes of the reflection spectrum depends on the optical path difference of the two reflected light beams, and the optical path difference is related to the material and thickness of the film:
[0123] D=2nd (2)
[0124] Where n is the refractive index of the film material and d is the physical thickness of the film.
[0125] When the temperature of the film changes, the refractive index and thickness of the film will change due to the photothermal effect and thermal expansion effect, resulting in a change in the spectral frequency.
[0126] 2. Thin-film Fabry-Perot demodulation method
[0127] Usually the thickness of thin film Fabry-Perot is between 100nm and 10μm, the optical path difference is small, the spectral frequency is small, and the bandwidth of conventional spectral testing system is not enough to solve the spectral frequency. At this time, we can track the minimum or maximum of spectral interference to obtain the film temperature.
[0128] For the mth interference minimum of the film reflection spectrum, we have:
[0129]
[0130] So we have:
[0131]
[0132] and
[0133] D(T)=2n(T)d(T) (5)
[0134] When the ambient temperature changes (from T 0 When it changes to T), the mth interference minimum of the reflection spectrum will change:
[0135]
[0136] By measuring the offset of the mth interference minimum in the reflection spectrum, the temperature offset can be inferred.
[0137] Embodiment 15:
[0138] The application of a high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array as described in any one of Examples 1-12 is as follows:
[0139] See also Figure 4 The measurement process of a high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array and applied to the phase change temperature field of the liquid evaporation interface in a closed cavity is as follows:
[0140] First, a high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array is installed on a bracket, and then the bracket is inserted into the closed cavity to be measured so that the film is facing the liquid surface. The tail end transmission optical fiber is connected to a multi-channel high-speed demodulator, and the demodulator and computer are connected via a network cable.
[0141] During measurement, adjust the height of the bracket so that the film Fabry-Perot reaches the position to be measured. The film Fabry-Perot and the environment quickly reach a heat exchange balance. At this time, the film Fabry-Perot temperature is consistent with the ambient temperature. The broadband light provided by the demodulator is transmitted to the film Fabry-Perot through the transmission optical fiber, and the interference light containing temperature information is reflected back. The demodulator reads the reflected light signal and transmits it to the computer through the network cable. The computer demodulates the spectral signal, calculates the interference peak position, and obtains the corresponding temperature value.
[0142] Embodiment 16:
[0143] A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, the technical content is the same as any one of embodiments 1-12, further, see Figure 5 When a high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array is applied to the measurement of the phase change temperature field of the liquid evaporation interface in a closed cavity, multiple thin film Fabry-Perot sensors can be directly aligned horizontally, and temperature field measurements with different spatial resolutions in the longitudinal direction can be obtained by adjusting the inclination angle of the V-groove and the clamping frame.
Claims
1. A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array, characterized in that: It comprises a V-shaped groove (1), a thin film Fabry-Perot (2), a transmission optical fiber (4), a clamping frame (3), and a tail handle (5). The transmission optical fiber (4) passes through the tail handle (5) and is arranged in the V-shaped groove (1); The transmission optical fiber (4) is an array structure, and the lengths of all optical fibers in the array extending out of the V-shaped groove (1) are increasing. The thin film Fabry-Perot (2) is located at the end of the transmission optical fiber (4); The clamping frame (3) is used to clamp the cover plate and the bottom plate of the V-shaped groove (1); The method for making the evaporation interface temperature field measurement sensor is as follows: 1) Remove the coating at one end of the optical fiber, grind and clean the end face, and coat the end face with a micrometer-level silicon film. 2) Making optical fiber ribbon: Arrange multiple coated optical fibers in a row with their end faces flush; 3) Place the V-groove (1) bottom plate at the corresponding position of the clamping frame (3). 4) Place the uncoated end of the optical fiber tape on the groove of the V-groove bottom plate and cover it with the V-groove cover plate. 5) Tighten the screws of the clamping frame (3), clamp the V-groove bottom plate and cover plate, and make sure that the optical fiber is located in the V-groove (1).
2. A high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: The evaporation interface temperature field measurement sensor is used to measure the temperature change of the evaporation interface in a closed cavity.
3. The high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: When the evaporation interface temperature field measurement sensor is working, the clamping frame (3) is inserted into the closed cavity to be measured, and the thin film Fabry-Perot (2) faces the evaporation interface; Broadband light is transmitted by a transmission optical fiber (6) and passes through the contact interface between the transmission optical fiber (6) and the thin film Fabry-Perot (2). At this time, part of the light is reflected, and part of the light is transmitted and reflected back at the interface between the thin film Fabry-Perot (2) and the air. The two beams of light interfere with each other so that the spectrum carries information on the optical thickness of the thin film Fabry-Perot (2) that characterizes temperature changes.
4. The high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: The thin film Fabry-Perot (2) is produced by coating.
5. The high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: The material of the thin film Fabry-Perot (2) includes silicon.
6. The high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: The material of the V-shaped groove (1) includes quartz and high borosilicate, and the groove spacing ranges from 127 μm to 250 μm.
7. The high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: The material of the clamping frame (3) and the tail handle (5) includes stainless steel.
8. The high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: The V-shaped groove (1) is used to support the optical fiber, to position the optical fiber, and to ensure that the optical fiber is vertical.
9. The high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: The tail handle (5) is screwed into the clamping frame (3) through an outer spiral at one end, thereby placing the transmission optical fiber (4).
10. The high-density gas-liquid phase change temperature field measurement sensor based on an optical fiber array according to claim 1, characterized in that: The inclination angle between the V-shaped groove (1) and the clamping frame (3) is adjustable.
