High-sensitivity pressure sensor based on singular point and pressure information acquisition method

Abstract

The invention relates to a singular point-based high-sensitivity pressure sensor and a pressure information acquisition method. The sensor comprises a substrate, a coupled resonator, a rigidity adjusting electrode and an external feedback control circuit, and the coupled resonator is arranged on the substrate; the coupled resonator comprises a gain resonator and a loss resonator; the gain resonator and the loss resonator are connected with bias electrodes through electrostatic coupling. The bias electrode is used for controlling the initial bias of the sensor at a singular point; the rigidity adjusting electrode is used for applying bias voltage to the resonant beam of the gain resonator and the resonant beam of the loss resonator; a first external feedback control circuit in the external feedback control circuits is electrically connected with the gain resonator; and a second external feedback control circuit in the external feedback control circuits is electrically connected with the loss resonator. By adopting the sensor, the change condition of the resonant frequency can be analyzed, the accurate measurement of the pressure is realized, and the accuracy of the pressure measurement is improved.

Description

Technical Field

[0001] The present application relates to the technical field of pressure sensors, and in particular to a high-sensitivity pressure sensor based on singular points and a method, device, computer equipment, computer-readable storage medium and computer program product for acquiring pressure information. Background Art

[0002] In the engineering field, pressure is an important parameter that reflects the state of a structure. Whether the structural pressure can be accurately and reliably measured is crucial to scientific experiments and engineering safety. Pressure sensors can sense pressure signals and convert them into usable electrical signals according to certain rules. Therefore, pressure sensors are widely used in various pressure measurement scenarios to achieve efficient pressure monitoring.

[0003] Traditional technology mainly uses MEMS pressure sensors for pressure measurement and monitoring. However, the pressure sensors used in traditional technology have the problem of low detection accuracy. Low detection accuracy will lead to inaccurate pressure measurement, affect the accuracy of pressure measurement results, and cannot meet the application needs in today's scientific research and production, which is not conducive to improving the accuracy of pressure measurement. Summary of the invention

[0004] Based on this, it is necessary to provide a high-sensitivity pressure sensor based on singular points and a pressure information acquisition method, device, computer equipment, computer-readable storage medium and computer program product that can improve the accuracy of pressure measurement in order to address the above technical problems.

[0005] In a first aspect, the present application provides a high-sensitivity pressure sensor based on a singular point, comprising: a substrate, a coupled resonator, a stiffness adjustment electrode, and an external feedback control circuit, wherein:

[0006] The coupled resonator is placed on the substrate; the coupled resonator includes a gain resonator and a loss resonator; the gain resonator and the loss resonator are coupled by electrostatics; the gain resonator and the loss resonator have the same mass and the same stiffness; the damping of the gain resonator is equal to the damping of the loss resonator but opposite in direction; the gain resonator and the loss resonator are both connected to bias electrodes; the bias electrodes are used to control the initial bias of the sensor at the singular point; both ends of the resonance beam of the gain resonator and both ends of the resonance beam of the loss resonator are connected to the anchor area by a symmetrical pressure amplification structure;

[0007] The stiffness adjustment electrode is used to apply a bias voltage to the resonance beam of the gain resonator and the resonance beam of the loss resonator, so that the gain resonator and the loss resonator have the same stiffness and eigenfrequency;

[0008] The external feedback control circuit includes a first external feedback control circuit and a second external feedback control circuit; the first external feedback control circuit is electrically connected to the gain resonator, and is used to pump energy into the gain resonator with a motion speed phase that is the same as that of the gain resonator and a magnitude that is the same as the motion loss of the loss resonator; the second external feedback control circuit is electrically connected to the loss resonator, and is used to detect the motion loss of the loss resonator.

[0009] In one of the embodiments, the top of the gain resonator is fixed to the substrate through an anchor region electrode, and the end of the gain resonator is fixed to the substrate through an anchor region and is grounded; the driving electrode of the gain resonator is arranged on a side of the gain resonator away from the coupling beam between the gain resonator and the loss resonator, and the driving electrode of the gain resonator is placed close to and opposite to the gain resonator.

[0010] In one of the embodiments, the stiffness adjustment electrode of the gain resonator is arranged on a side of the gain resonator close to a central clamped beam of the gain resonator, and the stiffness adjustment electrode of the gain resonator is placed close to the adjustment beam of the gain resonator.

[0011] In one of the embodiments, the top of the loss resonator is fixed to the substrate through an anchor region electrode, and the end of the loss resonator is fixed to the substrate through an anchor region and is grounded; the driving electrode of the loss resonator is arranged on a side of the loss resonator away from the coupling beam between the gain resonators, and the driving electrode of the loss resonator is placed close to and opposite to the loss resonator.

[0012] In one of the embodiments, the stiffness adjustment electrode of the loss resonator is arranged on a side of the loss resonator close to the central clamped beam of the loss resonator, and the stiffness adjustment electrode of the loss resonator is placed close to the adjustment beam of the loss resonator.

[0013] In one embodiment, a voltage difference between a resonant beam of the gain resonator and a resonant beam of the loss resonator is used to determine a coupling coefficient between the gain resonator and the loss resonator.

[0014] In one embodiment, an input end of the first external feedback control circuit is electrically connected to a detection electrode of the gain resonator, and an output end of the first external feedback control circuit is electrically connected to a driving electrode of the gain resonator.

[0015] In one embodiment, the input end of the second external feedback control circuit is electrically connected to the detection electrode of the lossy resonator, and the output end of the second external feedback control circuit is electrically connected to the driving electrode of the lossy resonator.

[0016] In one embodiment, the first external feedback control circuit and the second external feedback control circuit each include an input terminal, a transimpedance amplifier, a bandpass filter, a voltage-controlled amplifier, a phase shifter and an output terminal.

[0017] In a second aspect, the present application further provides a method for obtaining pressure information applied to the above-mentioned high-sensitivity pressure sensor based on singular points, comprising:

[0018] When the substrate is adhered to the object to be measured and pressure is applied to the object to be measured, obtaining resonance frequency information corresponding to the object to be measured;

[0019] Preset initial resonant frequency information is acquired, and pressure information corresponding to the object to be measured is determined according to a difference between the initial resonant frequency information and the resonant frequency information.

[0020] In a third aspect, the present application also provides a pressure information acquisition device, comprising:

[0021] An acquisition module, used for acquiring the resonance frequency information corresponding to the object to be measured when the substrate is adhered to the object to be measured and pressure is applied to the object to be measured;

[0022] The determination module is used to obtain preset initial resonant frequency information, and determine the pressure information corresponding to the object to be measured according to the difference between the initial resonant frequency information and the resonant frequency information.

[0023] In a fourth aspect, the present application further provides a computer device, wherein the computer device comprises a memory and a processor, wherein the memory stores a computer program, and when the computer program is executed by the processor, the steps of the above method are implemented.

[0024] In a fifth aspect, the present application further provides a computer-readable storage medium having a computer program stored thereon, and the computer program implements the steps of the above method when executed by a processor.

[0025] In a sixth aspect, the present application further provides a computer program product, wherein the computer program product comprises a computer program, and when the computer program is executed by a processor, the steps of the above method are implemented.

[0026] The above-mentioned high-sensitivity pressure sensor based on singularity point and pressure information acquisition method, device, computer equipment, computer-readable storage medium and computer program product, since the initial bias of the sensor is at the singularity point, the sensor has only one resonant frequency at this time, and when the sensor is adhered to the object to be measured through the substrate and pressure is applied to the object to be measured, the pressure sensor is disturbed and deviates from the initial resonant frequency and splits into two resonant frequencies, and the resonant frequency information corresponding to the object to be measured at this time is obtained, and combined with the preset initial resonant frequency information, the difference between the initial resonant frequency information and the resonant frequency information is analyzed to determine the pressure information corresponding to the object to be measured. When the pressure sensor works near the singularity point, the intrinsic frequency splitting amount has the characteristic of ultra-high sensitivity to tiny pressure changes, and the splitting amount of the resonant frequency after the pressure sensor is disturbed is detected and analyzed to determine the pressure size, which can achieve accurate measurement of pressure and improve the accuracy of pressure measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the drawings required for use in the embodiments of the present application or related technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 is a schematic structural diagram of a high-sensitivity pressure sensor based on a singular point in one embodiment;

[0029] Figure 2 is a schematic structural diagram of an external feedback control circuit in one embodiment;

[0030] Figure 3 is a flow chart of a method for obtaining pressure information in an embodiment;

[0031] Figure 4 is a structural block diagram of a pressure information acquisition device in an embodiment;

[0032] Figure 5 The figure is a diagram of the internal structure of a computer device in one embodiment.

[0033] The reference numerals and their meanings are as follows:

[0034] 101. Gain resonator; 102. Loss resonator; 103. Pressure amplification structure; 104. Stiffness adjustment electrode; 105. External feedback control circuit; 106. Anchor region electrode; 107. Drive electrode; 108. Detection electrode. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0036] In the description of the present application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present application, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0037] In the description of the present application, it should be understood that when an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be intermediate elements at the same time. On the contrary, when an element is said to be "directly" connected to another element, there are no intermediate elements.

[0038] In an exemplary embodiment, Figure 1 As shown, a structural schematic diagram of a high-sensitivity pressure sensor based on a singular point is provided, the sensor comprising: a substrate, a coupled resonator, a stiffness adjustment electrode and an external feedback control circuit, wherein:

[0039] The coupled resonator is placed on the substrate; the coupled resonator includes a gain resonator 101 and a loss resonator 102; the gain resonator 101 and the loss resonator 102 are coupled by electrostatics; the gain resonator 101 and the loss resonator 102 have the same mass and the same stiffness; the damping of the gain resonator 101 is equal to the damping of the loss resonator 102 but in opposite directions; the gain resonator 101 and the loss resonator 102 are both connected to bias electrodes; the bias electrodes are used to control the initial bias of the sensor at the singular point; both ends of the resonant beam of the gain resonator 101 and the two ends of the resonant beam of the loss resonator 102 are connected to the anchor area by a symmetrical pressure amplification structure 103.

[0040] The coupled resonator may include two resonators, one of which is a gain resonator 101 and the other is a loss resonator 102 . The gain resonator 101 and the loss resonator 102 may be placed side by side.

[0041] The bias voltage can be adjusted by the bias electrode so that the initial bias of the pressure sensor is at a singular point. At this time, the pressure sensor has only one resonant frequency.

[0042] The stiffness adjustment electrode 104 is used to apply a bias voltage to the resonance beam of the gain resonator 101 and the resonance beam of the loss resonator 102 , so that the gain resonator 101 and the loss resonator 102 have the same stiffness and eigenfrequency.

[0043] In a specific implementation, the stiffness adjustment electrode 104 can be used to apply a bias voltage to the resonant beams of the gain resonator 101 and the loss resonator 102 to adjust the stiffness of the resonator so that the stiffness and the eigenfrequency of the gain resonator 101 and the loss resonator 102 are the same, thereby compensating for process errors.

[0044] The external feedback control circuit 105 includes a first external feedback control circuit and a second external feedback control circuit; the first external feedback control circuit is electrically connected to the gain resonator 101, and is used to pump energy into the gain resonator 101 with a motion speed phase that is the same as that of the gain resonator 101 and a magnitude that is the same as the motion loss of the loss resonator 102; the second external feedback control circuit is electrically connected to the loss resonator 102, and is used to detect the motion loss of the loss resonator 102.

[0045] In a specific implementation, the movement of the gain resonator can be promoted by pumping energy having the same movement speed and phase as the gain resonator and the same magnitude as the movement loss of the loss resonator into the gain resonator through the first external feedback control circuit.

[0046] As an example, a singular point is a point where the eigenvalue and the corresponding eigenstate in a non-Hermitian system are simultaneously merged. The sensitivity of the singular point to the very small has important applications in ultra-high precision sensors, which is conducive to high-precision pressure measurement and monitoring. Specifically, when the pressure sensor works near the singular point, the eigenfrequency splitting amount has ultra-high sensitivity to the change of tiny pressure. During the operation of the above-mentioned high-sensitivity pressure sensor based on the singular point, since the initial bias of the sensor is at the singular point, the sensor has only one resonant frequency at this time. When the sensor is attached to the object to be measured through the substrate and pressure is applied to the object to be measured, the pressure sensor is disturbed and deviates from the initial resonant frequency and splits into two resonant frequencies. Detecting and analyzing the splitting amount of the resonant frequency of the pressure sensor after the disturbance and the initial resonant frequency can determine the pressure and achieve accurate measurement of the pressure.

[0047] In the present embodiment, since the initial bias of the sensor is at the singularity point, the sensor has only one resonant frequency at this time. When the sensor is adhered to the object to be measured through the substrate and pressure is applied to the object to be measured, the pressure sensor is disturbed and deviates from the initial resonant frequency and splits into two resonant frequencies. The resonant frequency information corresponding to the object to be measured at this time is obtained, and combined with the preset initial resonant frequency information, the difference between the initial resonant frequency information and the resonant frequency information is analyzed to determine the pressure information corresponding to the object to be measured. When the pressure sensor works near the singularity point, the intrinsic frequency splitting amount has the characteristic of ultra-high sensitivity to tiny pressure changes. The splitting amount of the resonant frequency of the pressure sensor after being disturbed is detected and analyzed to determine the pressure. Accurate measurement of pressure can be achieved, thereby improving the accuracy of pressure measurement.

[0048] In an exemplary embodiment, the top of the gain resonator 101 is fixed on the substrate through the anchor region electrode 106, and the end of the gain resonator 101 is fixed on the substrate through the anchor region and is grounded; the driving electrode 107 of the gain resonator 101 is arranged on a side of the gain resonator 101 away from the coupling beam between the gain resonator 101 and the loss resonator 102, and the driving electrode 107 of the gain resonator 101 is placed close to the gain resonator 101.

[0049] Among them, the gain resonator is fixed on the substrate through the anchor region / anchor region electrode, which can improve the mechanical stability of the pressure sensor and ensure the stability and reliability of the pressure sensor during operation.

[0050] The driving electrode of the gain resonator is arranged on a side of the gain resonator away from the coupling beam and is placed close to the gain resonator, which can avoid unnecessary interference to the coupling beam and enable the coupling beam to accurately transmit / receive signals for accurate pressure measurement.

[0051] In this embodiment, the gain resonator is fixed on the substrate to ensure that the pressure sensor has a stable mechanical structure, which is conducive to stable pressure measurement. The driving electrode of the gain resonator is arranged on the side of the gain resonator away from the coupling beam and is placed close to the gain resonator. This can avoid the interference of irrelevant signals on the pressure measurement and improve the accuracy of pressure measurement.

[0052] In an exemplary embodiment, the stiffness adjustment electrode 104 of the gain resonator 101 is disposed on one side of the gain resonator 101 close to the central clamped beam of the gain resonator 101 , and the stiffness adjustment electrode 104 of the gain resonator 101 is placed close to the adjustment beam of the gain resonator 101 .

[0053] Among them, the stiffness adjustment electrode 104 is close to the central fixed beam, and the stiffness of the resonator can be adjusted by changing the voltage on the electrode; the stiffness adjustment electrode 104 is placed close to the adjustment beam, and the stiffness of the resonator can be accurately controlled in a local range, thereby achieving fine adjustment of the resonant frequency.

[0054] In a specific implementation, the stiffness adjustment electrode 104 and the driving electrode 107 are separately provided, so as to avoid mutual interference between the stiffness adjustment electrode 104 and the driving electrode 107 , and ensure that the function of each electrode is independent and efficient.

[0055] In this embodiment, the stiffness adjustment electrode of the gain resonator is arranged on one side of the gain resonator close to the central fixed beam of the gain resonator, and is placed close to the adjustment beam of the gain resonator, which is beneficial to optimizing the performance and reliability of the pressure sensor to achieve accurate pressure measurement.

[0056] In an exemplary embodiment, the top of the loss resonator 102 is fixed to the substrate through an anchor region electrode 106, and the end of the loss resonator 102 is fixed to the substrate through an anchor region and is grounded; the driving electrode 107 of the loss resonator 102 is arranged on a side of the loss resonator 102 away from the coupling beam between the gain resonator 101, and the driving electrode 107 of the loss resonator 102 is placed directly opposite to the loss resonator 102.

[0057] The lossy resonator 102 is fixed on the substrate via the anchor region / anchor region electrode 106, which can improve the mechanical stability of the pressure sensor and ensure the stability and reliability of the pressure sensor during operation.

[0058] Among them, the driving electrode 107 of the loss resonator 102 is set on the side of the loss resonator 102 away from the coupling beam, and is placed close to the loss resonator 102, which can avoid unnecessary interference to the coupling beam and enable the coupling beam to accurately transmit / receive signals for accurate pressure measurement.

[0059] In this embodiment, the loss resonator is fixed on the substrate to ensure that the pressure sensor has a stable mechanical structure, which is conducive to stable pressure measurement. The driving electrode of the loss resonator is arranged on the side of the loss resonator away from the coupling beam and is placed directly opposite to the loss resonator. This can avoid the interference of irrelevant signals on the pressure measurement and improve the accuracy of the pressure measurement.

[0060] In an exemplary embodiment, the stiffness adjustment electrode 104 of the loss resonator 102 is disposed on one side of the loss resonator 102 close to the central clamped beam of the loss resonator 102 , and the stiffness adjustment electrode 104 of the loss resonator 102 is placed close to the adjustment beam of the loss resonator 102 .

[0061] Among them, the stiffness adjustment electrode 104 is close to the central fixed beam, and the stiffness of the resonator can be adjusted by changing the voltage on the electrode; the stiffness adjustment electrode 104 is placed close to the adjustment beam, and the stiffness of the resonator can be accurately controlled in a local range, thereby achieving fine adjustment of the resonant frequency.

[0062] In a specific implementation, the stiffness adjustment electrode 104 and the driving electrode 107 are separately provided, so as to avoid mutual interference between the stiffness adjustment electrode 104 and the driving electrode 107 , and ensure that the function of each electrode is independent and efficient.

[0063] In this embodiment, the stiffness adjustment electrode of the loss resonator is arranged on one side of the loss resonator close to the central fixed beam of the loss resonator, and is placed close to the adjustment beam of the loss resonator, which is beneficial to optimizing the performance and reliability of the pressure sensor to achieve accurate pressure measurement.

[0064] In one exemplary embodiment, a voltage difference between a resonant beam of the gain resonator 101 and a resonant beam of the loss resonator 102 is used to determine a coupling coefficient between the gain resonator 101 and the loss resonator 102 .

[0065] In a specific implementation, the coupling coefficient between the gain resonator 101 and the loss resonator 102 is adjusted by adding different potentials between the anchor region electrodes 106, and the electrostatic force generated by the potential difference between the gain resonator 101 and the loss resonator 102. By changing the voltage difference between the resonant beams, the coupling coefficient can be adjusted in real time, so that the coupling strength of the resonator can be dynamically adjusted according to actual needs to adapt to different working conditions and application scenarios.

[0066] In this embodiment, the coupling coefficient between the gain resonator and the loss resonator is determined by using the voltage difference, which is beneficial to accurately control the resonant frequency of the resonator, thereby optimizing the performance of the pressure sensor for accurate pressure measurement.

[0067] In an exemplary embodiment, an input terminal of the first external feedback control circuit is electrically connected to the detection electrode 108 of the gain resonator 101 , and an output terminal of the first external feedback control circuit is electrically connected to the driving electrode 107 of the gain resonator 101 .

[0068] In a specific implementation, the input end of the first external feedback control circuit is electrically connected to the detection electrode 108 of the gain resonator 101, and the output end is electrically connected to the driving electrode 107 of the gain resonator 101. The actual vibration frequency of the resonator can be monitored, and the driving signal can be adjusted to make the resonator always operate at its resonant frequency, which is beneficial to maintaining the frequency stability of the resonator and realizing real-time monitoring and precise control of the resonator.

[0069] In this embodiment, the input end of the first external feedback control circuit is electrically connected to the detection electrode of the gain resonator, and the output end is electrically connected to the driving electrode of the gain resonator, which is conducive to monitoring and adjusting the working state of the resonator so as to promote the movement of the gain resonator, thereby improving the performance of the pressure sensor and improving the accuracy of pressure measurement.

[0070] In an exemplary embodiment, an input end of the second external feedback control circuit is electrically connected to the detection electrode 108 of the lossy resonator 102 , and an output end of the second external feedback control circuit is electrically connected to the driving electrode 107 of the lossy resonator 102 .

[0071] In a specific implementation, the input end of the second external feedback control circuit is electrically connected to the detection electrode 108 of the loss resonator 102, and the output end is electrically connected to the driving electrode 107 of the loss resonator 102, which is conducive to accurately monitoring the size of the motion loss of the loss resonator 102, so as to pump energy with the same motion speed phase as that of the gain resonator 101 and the same size as the motion loss of the loss resonator 102 into the gain resonator 101 through the first external feedback control circuit, thereby promoting the movement of the gain resonator 101.

[0072] In this embodiment, the input end of the second external feedback control circuit is electrically connected to the detection electrode of the loss resonator, and the output end is electrically connected to the driving electrode of the loss resonator, which can provide a data basis for determining the energy input of the gain resonator, so as to compensate for energy loss, improve the performance of the pressure sensor, and thus improve the accuracy of pressure measurement.

[0073] In an exemplary embodiment, the first external feedback control circuit and the second external feedback control circuit each include an input terminal, a transimpedance amplifier, a bandpass filter, a voltage-controlled amplifier, a phase shifter, and an output terminal.

[0074] Among them, a trans-impedance amplifier (TIA) may refer to an operational amplifier circuit, and the trans-impedance amplifier may convert an input current into an output voltage.

[0075] Among them, a band-pass filter (BPF) may refer to a device that allows waves of a specific frequency band to pass through while shielding other frequency bands.

[0076] A voltage-controlled amplifier (VCA) may refer to an amplifier whose gain can be adjusted by an external control voltage.

[0077] Among them, a phase shifter may refer to a device that can adjust the phase of a wave.

[0078] As an example, Figure 2 As shown, a structural schematic diagram of an external feedback control circuit is provided, wherein the first external feedback control circuit includes an input end, a transimpedance amplifier, a bandpass filter, a voltage-controlled amplifier, a phase shifter, and an output end connected in sequence. Similarly, the second external feedback control circuit also includes an input end, a transimpedance amplifier, a bandpass filter, a voltage-controlled amplifier, a phase shifter, and an output end connected in sequence.

[0079] In this embodiment, the external feedback control circuit includes an input end, a transimpedance amplifier, a bandpass filter, a voltage-controlled amplifier, a phase shifter and an output end, so that the motion signal of the resonator is converted into an electrical signal through the external feedback control circuit. The phase of the generated electrical signal can be adjusted through the phase shifter so that the phase of the electrical signal generated by the external feedback control circuit and the motion speed of the resonator are the same, so as to perform accurate pressure measurement.

[0080] In an exemplary embodiment, Figure 3 As shown, a method for obtaining pressure information of the high-sensitivity pressure sensor based on singular points is provided, comprising the following steps S302 to S304. Among them:

[0081] Step S302 : When the substrate is adhered to the object to be measured and pressure is applied to the object to be measured, resonant frequency information corresponding to the object to be measured is obtained.

[0082] The object to be measured may refer to an object to which pressure is applied.

[0083] The resonant frequency information may refer to the resonant frequency of the resonator when the physical characteristics of the coupled resonator of the pressure sensor change after pressure is applied to the object to be measured. In practical applications, the resonant frequency information may be determined by measuring the capacitance change caused by the vibration of the resonator.

[0084] As an example, when the substrate is adhered to the object to be measured and pressure is applied to the object to be measured, the physical characteristics of the coupled resonator of the pressure sensor will change. The terminal can obtain the capacitance change caused by the vibration of the resonator detected by the pressure sensor and determine the resonant frequency information corresponding to the object to be measured.

[0085] Step S304: obtaining preset initial resonant frequency information, and determining pressure information corresponding to the object to be measured according to the difference between the initial resonant frequency information and the resonant frequency information.

[0086] The initial resonance frequency information may refer to the resonance frequency of the pressure sensor under preset conditions. In practical applications, the preset conditions may include that no pressure is applied to the pressure sensor.

[0087] As an example, the terminal can use the resonant frequency of the pressure sensor under preset conditions as the preset initial resonant frequency information, and then determine the splitting amount of the resonant frequency based on the difference between the initial resonant frequency information and the resonant frequency information, and then calculate the pressure information corresponding to the object to be measured based on the splitting amount of the resonant frequency and the preset pressure calculation expression.

[0088] In the above-mentioned pressure information acquisition method, since the initial bias of the sensor is at the singularity point, the sensor has only one resonant frequency at this time. When the sensor is adhered to the object to be measured through the substrate and pressure is applied to the object to be measured, the pressure sensor is disturbed and deviates from the initial resonant frequency and splits into two resonant frequencies. The resonant frequency information corresponding to the object to be measured at this time is obtained, and combined with the preset initial resonant frequency information, the difference between the initial resonant frequency information and the resonant frequency information is analyzed to determine the pressure information corresponding to the object to be measured. When the pressure sensor works near the singularity point, the intrinsic frequency splitting amount has the characteristic of ultra-high sensitivity to tiny pressure changes. The splitting amount of the resonant frequency after the pressure sensor is disturbed is detected and analyzed to determine the pressure. Accurate measurement of pressure can be achieved, thereby improving the accuracy of pressure measurement.

[0089] In one exemplary embodiment, the gain resonator and the loss resonator are placed side by side and are coupled electrostatically. The gain resonator and the loss resonator have the same mass m, the same stiffness k, and damping c of equal magnitude but opposite direction. The gain resonator is fixed to the substrate through a first fixed anchor region electrode, the first drive electrode is arranged on the left side of the gain resonator and is placed close to the gain resonator, the first detection electrode is arranged on the left side of the gain resonator adjustment beam, and the stiffness adjustment electrode is arranged on the right side of the gain resonator adjustment beam; the loss resonator is implemented by connecting the input end of the positive external feedback control circuit to the first detection electrode, and connecting the output end of the positive external feedback control circuit to the first drive electrode. The key is to pump energy with the same phase as the resonator movement speed into the resonator to promote the movement of the resonator. The loss resonator is fixed on the substrate through the first fixed anchor area electrode, the second driving electrode is arranged on the right side of the loss resonator and is placed close to the loss resonator, the second detection electrode is arranged on the right side of the loss resonator adjustment beam, and the stiffness adjustment electrode is arranged on the left side of the gain resonator adjustment beam; the implementation method of the loss resonator is to connect the input end of the reverse external feedback control circuit to the second detection electrode, and connect the output end of the reverse external feedback control circuit to the second driving electrode, and the key is to detect the damping loss of the loss resonator in the working environment.

[0090] The coupling coefficient between the gain resonator and the loss resonator is adjusted by adding different potentials between the first fixed anchor region electrode and the second fixed anchor region electrode, and the electrostatic force generated by the potential difference between the gain resonator and the loss resonator. The external feedback control circuit includes an input end, a transimpedance amplifier, a bandpass filter, a voltage-controlled amplifier, a phase shifter and an output end connected in sequence. The external feedback control circuit converts the motion signal of the resonator into an electrical signal, and the generated electrical signal can adjust the phase through the phase shifter. The electrical signal generated by the external feedback control circuit has the same phase as the motion speed of the resonator.

[0091] The working principle of the pressure sensor based on the singular point is: adjust the parameters of the charge sensor so that the charge sensor is initially biased at the singular point, at which time the charge sensor has only one resonant frequency ω; when pressure occurs on the surface of the object to be tested, the pressure sensor is disturbed and deviates from the initial resonant frequency and splits into two resonant frequencies, and the magnitude of the pressure can be deduced by detecting the splitting amount of the resonant frequency. The test method (pressure information acquisition method) of the pressure sensor based on the singular point may include the following steps: adhere the substrate of the sensor to the surface of the object to be tested, adjust the external feedback control circuit of the pressure sensor so that the initial state of the pressure sensor is biased at the singular point, and when pressure occurs on the surface of the object to be tested, the resonant frequency of the pressure sensor will be split from one to two due to the disturbance, and the magnitude of the disturbance pressure can be deduced by detecting the splitting amount of the two frequencies.

[0092] In this embodiment, by using a high-sensitivity pressure sensor based on a singular point to measure and monitor pressure, it is possible to achieve higher test accuracy and higher sensitivity in measuring tiny pressures than using a traditional charge sensor to measure pressure. This makes it more suitable for precision measurement and helps to improve the accuracy of pressure measurement.

[0093] It should be understood that, although the various steps in the flowcharts involved in the above-mentioned embodiments are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear explanation in this article, the execution of these steps does not have a strict order restriction, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above-mentioned embodiments can include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily to be carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.

[0094] Based on the same inventive concept, the embodiment of the present application also provides a pressure information acquisition device for implementing the pressure information acquisition method involved above. The implementation solution provided by the device to solve the problem is similar to the implementation solution recorded in the above method, so the specific limitations in one or more pressure information acquisition device embodiments provided below can refer to the limitations of the pressure information acquisition method above, and will not be repeated here.

[0095] In an exemplary embodiment, Figure 4 As shown, a pressure information acquisition device is provided, including: an acquisition module 402 and a determination module 404, wherein:

[0096] The acquisition module 402 is used to acquire the resonance frequency information corresponding to the object to be measured when the substrate is adhered to the object to be measured and pressure is applied to the object to be measured.

[0097] The determination module 404 is used to obtain preset initial resonant frequency information, and determine the pressure information corresponding to the object to be measured according to the difference between the initial resonant frequency information and the resonant frequency information.

[0098] Each module in the above pressure information acquisition device can be implemented in whole or in part by software, hardware, or a combination thereof. Each module can be embedded in or independent of a processor in a computer device in the form of hardware, or can be stored in a memory in a computer device in the form of software, so that the processor can call and execute operations corresponding to each module.

[0099] In an exemplary embodiment, a computer device is provided. The computer device may be a terminal, and its internal structure diagram may be as shown in FIG. Figure 5As shown. The computer device includes a processor, a memory, an input / output interface, a communication interface, a display unit and an input device. Among them, the processor, the memory and the input / output interface are connected through a system bus, and the communication interface, the display unit and the input device are connected to the system bus through the input / output interface. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The input / output interface of the computer device is used to exchange information between the processor and the external device. The communication interface of the computer device is used to communicate with an external terminal in a wired or wireless manner, and the wireless manner can be implemented through WIFI, a mobile cellular network, near field communication (Near Field Communication, NFC) or other technologies. When the computer program is executed by the processor, a method for obtaining pressure information is implemented. The display unit of the computer device is used to form a visually visible picture, which can be a display screen, a projection device or a virtual reality imaging device. The display screen can be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer device can be a touch layer covering the display screen, or a button, trackball or touchpad set on the computer device shell, or an external keyboard, touchpad or mouse.

[0100] Those skilled in the art will understand that Figure 5 The structure shown in the figure is only a block diagram of a part of the structure related to the solution of the present application, and does not constitute a limitation on the computer device to which the solution of the present application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0101] In one embodiment, a computer device is further provided, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above method embodiments when executing the computer program.

[0102] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0103] In one embodiment, a computer program product is provided, including a computer program, which implements the steps in the above method embodiments when executed by a processor.

[0104] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of relevant data must comply with relevant regulations.

[0105] A person of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment method can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in the present application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM). The database involved in each embodiment provided in this application may include at least one of a relational database and a non-relational database. Non-relational databases may include distributed databases based on blockchains, etc., but are not limited to this. The processor involved in each embodiment provided in this application may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, an artificial intelligence (AI) processor, etc., but are not limited to this.

[0106] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this application.

[0107] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the present application. It should be noted that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A high-sensitivity pressure sensor based on a singular point, characterized in that: The sensor comprises: a substrate, a coupled resonator, a stiffness adjustment electrode and an external feedback control circuit, wherein: The coupled resonator is placed on the substrate; the coupled resonator includes a gain resonator and a loss resonator; the gain resonator and the loss resonator are coupled by electrostatics; the gain resonator and the loss resonator have the same mass and the same stiffness; the damping of the gain resonator is equal to the damping of the loss resonator but opposite in direction; the gain resonator and the loss resonator are both connected to bias electrodes; the bias electrodes are used to control the initial bias of the sensor at the singular point; both ends of the resonance beam of the gain resonator and the two ends of the resonance beam of the loss resonator are connected to the anchor area by a symmetrical pressure amplification structure; The stiffness adjustment electrode is used to apply a bias voltage to the resonance beam of the gain resonator and the resonance beam of the loss resonator, so that the gain resonator and the loss resonator have the same stiffness and eigenfrequency; The external feedback control circuit includes a first external feedback control circuit and a second external feedback control circuit; the first external feedback control circuit is electrically connected to the gain resonator, and is used to pump energy into the gain resonator with a motion speed phase that is the same as that of the gain resonator and a magnitude that is the same as the motion loss of the loss resonator; the second external feedback control circuit is electrically connected to the loss resonator, and is used to detect the motion loss of the loss resonator.

2. The sensor according to claim 1, characterized in that The top of the gain resonator is fixed on the substrate through an anchor region electrode, and the end of the gain resonator is fixed on the substrate through an anchor region and is grounded; the driving electrode of the gain resonator is arranged on a side of the gain resonator away from the coupling beam between the gain resonator and the loss resonator, and the driving electrode of the gain resonator is placed close to and opposite to the gain resonator.

3. The sensor according to claim 1, characterized in that The stiffness adjustment electrode of the gain resonator is arranged on one side of the gain resonator close to the central clamped beam of the gain resonator, and the stiffness adjustment electrode of the gain resonator is placed close to the adjustment beam of the gain resonator.

4. The sensor according to claim 1, characterized in that The top of the loss resonator is fixed on the substrate through an anchor region electrode, and the end of the loss resonator is fixed on the substrate through an anchor region and is grounded; the driving electrode of the loss resonator is arranged on a side of the loss resonator away from the coupling beam between the gain resonators, and the driving electrode of the loss resonator is placed close to and opposite to the loss resonator.

5. The sensor according to claim 1, characterized in that The stiffness adjustment electrode of the loss resonator is arranged on one side of the loss resonator close to the central clamped beam of the loss resonator, and the stiffness adjustment electrode of the loss resonator is placed close to the adjustment beam of the loss resonator.

6. The sensor according to claim 1, characterized in that The voltage difference between the resonant beam of the gain resonator and the resonant beam of the loss resonator is used to determine the coupling coefficient between the gain resonator and the loss resonator.

7. The sensor according to claim 1, characterized in that An input end of the first external feedback control circuit is electrically connected to a detection electrode of the gain resonator, and an output end of the first external feedback control circuit is electrically connected to a driving electrode of the gain resonator.

8. The sensor according to claim 1, characterized in that An input end of the second external feedback control circuit is electrically connected to a detection electrode of the lossy resonator, and an output end of the second external feedback control circuit is electrically connected to a driving electrode of the lossy resonator.

9. The sensor according to claim 1, characterized in that The first external feedback control circuit and the second external feedback control circuit each include an input terminal, a transimpedance amplifier, a bandpass filter, a voltage-controlled amplifier, a phase shifter and an output terminal.

10. A method for acquiring pressure information of a high-sensitivity pressure sensor based on a singular point according to any one of claims 1 to 9, characterized in that: The method comprises: When the substrate is adhered to the object to be measured and pressure is applied to the object to be measured, obtaining resonance frequency information corresponding to the object to be measured; Preset initial resonant frequency information is acquired, and pressure information corresponding to the object to be measured is determined according to a difference between the initial resonant frequency information and the resonant frequency information.

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