Full-automatic sample loading and unloading system and method suitable for photoetching machine

Abstract

The invention provides a full-automatic sample loading and unloading system and method suitable for a photoetching machine, and the system comprises a base which comprises a cabinet body and a bearing platform located on the cabinet body; the one or more sample wafer temporary storage devices are located on the bearing platform, each sample wafer temporary storage device comprises one or more sample wafer fixing supports, and each sample wafer fixing support is used for bearing a sample wafer to be processed; the sample wafer conveying device is located on the bearing platform, the sample wafer conveying device comprises an extensible mechanical arm and a sample wafer clamp located at the end of the mechanical arm, and the sample wafer conveying device is configured to enable the sample wafer to be processed to move between the sample wafer temporary storage device and the photoetching machine through the mechanical arm after the sample wafer clamp clamps the sample wafer to be processed. The full-automatic sample loading and unloading system and method suitable for the photoetching machine have the advantages of low cost and high precision.

Description

Technical Field

[0001] The present application mainly relates to the field of photolithography machines, and in particular to a fully automatic sample loading and unloading system and method suitable for photolithography machines. Background Art

[0002] Existing lithography equipment often needs to meet the exposure requirements of different types of samples of various sizes and thicknesses. There are some defects in the loading and unloading methods of lithography equipment currently used in semiconductor-related testing and preparation fields. First, the compatibility with samples of different sizes is poor, and it is usually only compatible with the transfer of two sizes of wafers, which cannot meet the requirements of sample diversity. On this basis, laser direct writing lithography equipment that needs to be compatible with different size requirements still relies on manual placement and removal of samples, and its placement accuracy depends to a large extent on the proficiency of the operator. In addition, for the automatic placement and placement of samples, it is difficult to carry out high-cost structural modifications inside the lithography machine to achieve automatic loading and unloading due to the structural limitations of the internal structure of the lithography machine and the cleanliness requirements for the samples. Summary of the invention

[0003] The technical problem to be solved by the present application is to provide a fully automatic sample loading and unloading system and method suitable for a photolithography machine, which has the advantages of low cost and high precision.

[0004] To solve the above technical problems, the present application provides a fully automatic sample loading and unloading system suitable for a photolithography machine, comprising: a base, including a cabinet and a carrying platform located on the cabinet; one or more sample temporary storage devices, located on the carrying platform, the sample temporary storage device including one or more sample fixing trays, each of the sample fixing trays being used to support a sample to be processed; and a sample conveying device, located on the carrying platform, the sample conveying device including an extendable robotic arm and a sample clamp located at the end of the robotic arm, the sample conveying device being configured to move the sample to be processed between the sample temporary storage device and the photolithography machine through the robotic arm after the sample to be processed is clamped by the sample clamp.

[0005] Optionally, the sample fixing tray includes an operating contact portion and a sample supporting portion surrounded by the operating contact portion, and the sample supporting portion includes a hollow area.

[0006] Optionally, the samples to be processed include general samples to be processed and special samples to be processed. When the sample fixing tray is used to carry the special samples to be processed, the fully automatic sample loading and unloading system also includes a compatible carrier sheet, which is suitable for carrying the special samples to be processed. The sample fixing tray is suitable for supporting the compatible carrier sheet and thus supporting the sample to be processed located in the compatible carrier sheet.

[0007] Optionally, the compatible carrier sheet includes a carrier portion recessed in an upper surface of the compatible carrier sheet, and the carrier portion includes one or more through holes extending therethrough.

[0008] Optionally, the general sample to be processed and the compatible carrier sheet are square shapes that conform to standard sizes, and the special sample to be processed includes other shapes besides the square shape or a square shape that does not conform to the standard size.

[0009] Optionally, the sample clamp comprises a motor and at least one clamping jaw connected to the motor, and the motor is suitable for driving the clamping jaw to contract or open so as to clamp the sample to be processed.

[0010] Optionally, the clamping jaw comprises a first clamping jaw and a second clamping jaw opposite to the first clamping jaw, wherein the stroke range of the first clamping jaw is 43 mm to 123 mm, and the stroke range of the second clamping jaw is 124.5 mm to 204.5 mm.

[0011] Optionally, the system further comprises a control system located in the cabinet of the base, wherein the control system is configured to communicate with the sample temporary storage device and the sample conveying device.

[0012] Optionally, the system further comprises a display screen, wherein the display screen is adapted to receive a display screen communication signal from the control system so as to display system information of the sample temporary storage device.

[0013] Optionally, the system also includes a visual recognition device, located on the carrying platform and placed opposite to the sample temporary storage device, the visual recognition device is suitable for acquiring a system image of the sample temporary storage device, generating module information according to the system image, and transmitting the module information to the control system.

[0014] Optionally, the system further comprises a fill light module placed on the carrying platform adjacent to the visual recognition device, wherein the fill light module is configured to provide fill light to the sample temporary storage device when the visual recognition device acquires an image of the sample temporary storage device.

[0015] Another aspect of the present application further proposes a fully automatic sample loading and unloading method applicable to a photolithography machine, and a fully automatic sample loading and unloading system applicable to any embodiment of the present application, wherein the fully automatic sample loading and unloading method comprises the following steps: assembling a sample temporary storage device, and placing the sample temporary storage device on a supporting platform of a base; the fully automatic loading and unloading system communicates with the sample temporary storage device and the sample conveying device, so that the sample conveying device clamps the sample to be processed through a sample clamp, and then moves the sample to be processed between the sample temporary storage device and the photolithography machine through a robotic arm. Specifically, after the photolithography is completed, the photolithography machine layout door automatically opens, and sends a material unloading signal to the fully automatic loading and unloading system. After confirming that its own status is normal, the fully automatic loading and unloading system takes out the exposed sample from the sample stage of the photolithography machine.

[0016] Compared with the prior art, the present application has the following advantages: the fully automatic sample loading and unloading system and method for the lithography machine of the present application can realize the fully automatic loading and unloading of samples without modifying the internal structure of the lithography machine. Furthermore, in some preferred embodiments, a solution compatible with multi-size samples is also provided, and the contamination of samples can be effectively reduced. On the whole, the fully automatic sample loading and unloading system and method for the lithography machine of the present application is conducive to improving the repeatability of the lithography process experiment during sample preparation, improving the accuracy of sample placement, reducing equipment damage caused by human operating errors, and improving the utilization rate of direct-write lithography equipment, thereby improving the application efficiency of the lithography machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are included to provide a further understanding of the present application. They are included and constitute a part of the present application. The accompanying drawings illustrate embodiments of the present application and together with the present specification serve to explain the principles of the present application. In the accompanying drawings:

[0018] Figure 1 It is a structural schematic diagram of a fully automatic sample loading and unloading system applicable to a photolithography machine according to an embodiment of the present application;

[0019] Figure 2 Yes Figure 1 A schematic diagram of the structure of a sample temporary storage device in a fully automatic sample loading and unloading system suitable for a photolithography machine in the illustrated embodiment;

[0020] Figure 3 Yes Figure 1 A schematic diagram of the structure of a sample fixing support in a fully automatic sample loading and unloading system suitable for a photolithography machine in the illustrated embodiment;

[0021] Figure 4 Yes Figure 1 A schematic structural diagram of a compatible carrier sheet in a fully automatic sample loading and unloading system suitable for a photolithography machine in the illustrated embodiment;

[0022] Figure 5 Yes Figure 1 A schematic diagram of the structure of a sample fixture in a fully automatic sample loading and unloading system suitable for a photolithography machine in the illustrated embodiment;

[0023] Figure 6 is a flow chart of a fully automatic sample loading and unloading method applicable to a photolithography machine according to an embodiment of the present application; and

[0024] Figure 7 Yes Figure 6 A schematic diagram of the inter-system communication flow of a fully automatic sample loading and unloading method suitable for a photolithography machine in the illustrated embodiment. DETAILED DESCRIPTION

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for the description of the embodiments. Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. Unless it is obvious from the language environment or otherwise explained, the same reference numerals in the figures represent the same structure or operation.

[0026] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0027] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to those of ordinary skill in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so that once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0028] In the description of the present application, it should be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present application; the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0029] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0030] In addition, it should be noted that the use of words such as "first" and "second" to define components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above words have no special meaning and cannot be understood as limiting the scope of protection of this application. In addition, although the terms used in this application are selected from well-known and commonly used terms, some terms mentioned in the specification of this application may be selected by the applicant at his or her discretion, and their detailed meanings are explained in the relevant parts of the description of this article. In addition, it is required to understand this application not only by the actual terms used, but also by the meaning implied by each term.

[0031] It should be understood that when a component is referred to as being "on another component," "connected to another component," "coupled to another component," or "contacting another component," it may be directly on, connected to, coupled to, or contacting the other component, or there may be intervening components. In contrast, when a component is referred to as being "directly on another component," "directly connected to," "directly coupled to," or "directly contacting" another component, there are no intervening components. Similarly, when a first component is referred to as being "electrically in contact with" or "electrically coupled to" a second component, there is an electrical path between the first component and the second component that allows current to flow. The electrical path may include capacitors, coupled inductors, and / or other components that allow current to flow, even without direct contact between conductive components.

[0032] Reference Figure 1 The present application proposes a fully automatic sample loading and unloading system 10 suitable for a photolithography machine (not shown). Figure 1 , the fully automatic sample loading and unloading system 10 includes a base 11, a plurality of sample temporary storage devices 12, and a sample conveying device 13. Specifically, the base 11 includes a cabinet 110 and a supporting platform 111 located on the cabinet. Exemplarily, the base 11 may adopt a movable base or an automatic guided vehicle (AGV body) to achieve the movement of the fully automatic loading and unloading system 10, for example, it can be moved outside the work area during non-working hours. Furthermore, the sample temporary storage device 12 is located on the supporting platform 111, and each sample temporary storage device 12 includes a plurality of sample fixing trays 121, and each sample fixing tray 121 is used to support the sample to be processed. On the other hand, Figure 1 The sample conveying device 13 is also shown, which is located on the carrying platform 111. The sample conveying device 13 includes an extendable mechanical arm 131 and a sample clamp 130 located at the end of the mechanical arm 131. The sample conveying device 13 is configured to move the sample to be processed between the sample temporary storage device 12 and the photolithography machine through the mechanical arm 131 after the sample to be processed is clamped by the sample clamp 130.

[0033] It should be noted that the fully automatic loading and unloading system 10 in this embodiment is completely located outside the lithography machine. When operating, it is only necessary to clamp the sample to be processed by the sample clamp 130 and transfer it to the working platform of the lithography machine by the mechanical arm 131. There is no need to make high-cost structural improvements inside the lithography machine, and the fully automatic loading and unloading operation of the lithography machine can be achieved at a relatively low cost. Exemplarily, the sample to be processed may include a sample to be exposed with a photoresist coated on the surface or an exposed sample that has been exposed by the lithography machine.

[0034] Further reference Figure 2 and Figure 3 , Figure 2 Shown as Figure 1The embodiment shown is a partially enlarged schematic diagram of one of the sample temporary storage devices 12. Figure 3 A partial enlarged schematic diagram of the sample fixing support 121 is further shown. In this embodiment, Figure 1 Two sample temporary storage devices 12 are shown, combined with Figure 2 , each sample temporary storage device 12 is exemplarily shown to include 5 sample temporary storage modules 120, but the present application is not limited to this. In other embodiments, the number of sample temporary storage modules 120 can be adjusted according to actual needs, for example, increased to 10. Each sample temporary storage module 120 is suitable for storing and carrying samples 20 to be processed of different sizes through a sample fixing tray 121. Exemplarily, the sizes of these samples 20 to be processed can be 2 inches, 3 inches, 5 inches, 6 inches, 7 inches, 8 inches, etc. In addition, according to the different sizes of the samples 20 to be processed that need to be processed, the number of sample temporary storage modules 120 in each sample temporary storage device 12 and the size of the corresponding sample fixing tray 21 can be adjusted accordingly according to actual conditions. The present application is not limited to the examples of the number and size of each component shown in the drawings.

[0035] according to Figure 2 , the sample fixing support 121 in each sample temporary storage module 120 can be fixedly installed in the sample temporary storage module 120 by a first fastener 124 (such as a screw, etc.) and can be removed at any time; further, each sample temporary storage module 120 as a whole can also be fixedly installed in the sample temporary storage device 12 by a second fastener 123 (such as a rotating screw, etc.) and can be removed at any time. Exemplarily, if a rotating screw is used, the rotating screw will tighten the sample temporary storage module 120 when it is rotated in one direction, and when it is rotated in the other direction, the sample temporary storage module 120 and the sample temporary storage device 12 as a whole are loosened from each other, so that it can be removed. However, the present application is not limited to this, and the structure of the rotating screw can also be replaced by other forms of quick-plug structures, so that the sample temporary storage module 120 can be installed and removed by simple plug-in operations, and the present application does not limit this. For example, before each loading and unloading operation is performed by the fully automatic loading and unloading system 10, the sample temporary storage modules 120 of appropriate sizes and quantities can be selected in advance according to the requirements of the loading and unloading operation, and the adaptive sample temporary storage device 12 can be assembled. Since each sample temporary storage module 120 is easy to disassemble and install, the sample temporary storage device 12 has higher compatibility and wider adaptability.

[0036] When it is necessary to replace the samples 20 of different sizes that the sample temporary storage device 12 can adapt to, the sample fixing tray 121 in the individual sample temporary storage module 120 can be individually disassembled only by the first fastener 124. In some cases, when it is necessary to increase or decrease the sample temporary storage modules 120 in the same sample temporary storage device 12, the individual sample temporary storage modules 120 can be individually disassembled by the second fastener 123.

[0037] It should be noted that in this embodiment Figure 1-2 In order to demonstrate the compatibility of the sample temporary storage device 12 with different samples 20 to be processed, the sample fixing trays 121 with increasing sizes are shown in order from top to bottom, but the present application is not limited to this. In some other embodiments, according to the needs of actual conditions, the sizes of the sample fixing trays 121 in multiple sample temporary storage modules 120 in the same sample temporary storage device 12 can be freely matched, for example, the sizes can be the same or partially the same. And through the second fastener 123 or the first fastener 124, the sample temporary storage modules 120 with different sizes of sample fixing trays 121 can be freely disassembled and replaced when necessary, expanding the compatibility of the sample temporary storage device 12.

[0038] Further references Figure 3 The sample holder 121 is used to carry the sample 20 to be processed of any size, wherein the sample holder 121 includes an operation contact portion 1211 and a sample support portion 1212 surrounded by the operation contact portion 1211, wherein the sample support portion 1212 includes a hollow area 1210. Specifically, according to Figure 3 In the example shown, the operating contact portion 1211 can be understood as the portion in contact with the side edge of the sample to be processed 20, and the operating contact portion 1211 plays a role in fixing and limiting the sample to be processed 20 in the circumferential direction. On the other hand, the sample support portion 1212 specifically supports the sample to be processed 20 from the bottom surface, and the operating contact portion 1211 is considered to surround the sample support portion 1212 in space; in particular, in order to reduce the contamination of the sample to be processed 20, that is, to minimize the contact area between the sample fixing support 121 and the sample to be processed 20, the sample support portion 1212 in this embodiment is provided with a plurality of hollow areas 1210. It should be noted that this application is not based on Figure 3 The examples shown are limitations. In some other embodiments, the number, position and specific size of the hollow areas 1210 can be further adjusted according to actual needs, such as considering factors such as the weight and size of the sample 20 to be processed, and the present application does not impose any limitations on this.

[0039] In this embodiment, the fully automatic loading and unloading system 10 is preferably suitable for processing samples to be processed including general samples to be processed and special samples to be processed. Specifically, the general samples to be processed can be square samples of standard size, such as the square samples of standard sizes such as 2 inches, 3 inches, 5 inches, 6 inches, 7 inches, and 8 inches mentioned above. Such samples can be referred to as having a uniform standard size. Figure 2 is placed on the corresponding sample fixing tray 121. On the other hand, in order to accommodate the diversity of sizes and shapes of the processed samples, the fully automatic loading and unloading system 10 in this embodiment can preferably process special samples to be processed, and such samples can be understood as including other shapes besides square shapes or square shapes that do not meet standard sizes.

[0040] Further references Figure 4 When the sample holder 121 is used to carry special samples to be processed, the fully automatic sample loading and unloading system 10 is also configured to have a compatible carrier sheet 40, which is suitable for carrying the special samples to be processed. Figure 2 and Figure 3 The sample holder 121 shown is suitable for supporting the compatible carrier sheet 40 and thus supporting the sample to be processed located in the compatible carrier sheet 40. Specifically, the compatible carrier sheet 40 can be a square shape that conforms to the standard size, so that like the general sample to be processed, it can be directly mounted on the compatible carrier sheet 40. Figure 2 and Figure 3 The sample fixing bracket 121 shown is used for support. Figure 4 As shown, the compatible carrier sheet 40 further includes a carrier portion 41 recessed in the upper surface of the compatible carrier sheet 40, and the carrier portion 41 is used to carry a special sample to be processed. Figure 4 The circular shape shown in FIG. In this embodiment, preferably, the bearing portion 41 of the compatible carrier sheet 40 further includes a through-hole 42. The function of the through-hole 42 is: when the compatible carrier sheet 40 carries the corresponding special sample to be processed and is placed together in the lithography machine, the special sample to be processed can be fixed on the working platform of the compatible carrier sheet 40 inside the lithography machine by vacuum adsorption by relying on the through-hole 42. It should be noted that Figure 4 Only an example with one through hole 42 is schematically shown, but the present application is not limited to this. In other embodiments of the present application, more through holes 42 can be set according to the different sizes of special samples to be processed (for example, for larger special samples to be processed), so that the vacuum suction is uniform and the sample is adsorbed more firmly when placed on the sample table of the lithography machine.

[0041] Exemplarily, the compatible carrier sheet 40 can be processed from a low thermal expansion coefficient material - Invar 36. Further, a metal material with a lower thermal expansion coefficient than Invar (so as to avoid greater expansion after entering the lithography machine), a lower weight density and a lower thermal conductivity can also be used to reduce the effect of expansion or contraction caused by temperature changes caused by laser irradiation after carrying the sample to be processed into the lithography machine on the quality of lithography. The surface flatness of the processed compatible carrier sheet 40 can be controlled between 5-10μm. The overall thickness of the square sheet shape of the compatible carrier sheet 40 is 6mm; and the four sides are chamfered, and the chamfer can be C0.5 mm. Further, the bearing portion 41 in the central area of ​​the compatible carrier sheet 40 is a groove structure, and the size of the groove is customized according to the size of the special sample to be processed that needs to be compatible. Consistent with the size specifications of the general sample to be processed 20 described above, the side lengths of the compatible carrier sheet 40 are 2 inches, 3 inches, 5 inches, 6 inches, 7 inches, 8 inches, etc. Exemplarily, the depth of the bearing portion 41 is consistent with or similar to the thickness of the sample to be compatible; preferably, the side length or diameter of the bearing portion 41 is 0.5 mm larger than the side length or diameter of the special sample to be processed that needs to be compatible. Taking a 6-inch wafer with a thickness of 0.6 mm as an example, the side length of the customized compatible bearing sheet 40 can be designed to be 7 inches, the bearing portion 41 is designed as a circular groove, the diameter of the bearing portion 41 is set to 150.5 mm, and the depth of the bearing portion 41 is set to 0.5 to 0.6 mm. The 6-inch wafer is placed in the bearing portion 41 as a special sample to be processed, forming a whole with the compatible bearing sheet 40, and placed on the sample temporary storage device 12, so as to realize fully automatic loading and unloading of special samples to be processed with a thickness of less than 1 mm.

[0042] As described above, the sample conveying device 13 in this embodiment includes an extendable robotic arm 131 and a sample fixture 130 located at the end of the robotic arm 131. Exemplarily, the robotic arm 131 can adopt a six-axis robotic arm or a five-axis, seven-axis or other robotic arm with high positioning accuracy. In such an embodiment, the six-axis robotic arm itself can have a sensor device light so that it automatically stops working when encountering an operator. On the other hand, the robotic arm 131 meets the clean design requirements of a Class 100 clean room so as to better work in the equipment operation scenario of the lithography machine.

[0043] Further references Figure 5 , Figure 5 It shows that Figure 1 The enlarged schematic diagram of the sample clamp 130 in the sample conveying device 13 in the embodiment shown in FIG. The sample clamp 130 in this embodiment includes a motor 1300 and two clamps connected to the motor 1300, including a first clamp 1301 and a second clamp 1302. The motor 1300 is suitable for driving the first clamp 1301 and the second clamp 1302 to move along the Figure 5The x-direction shown in the figure shrinks or opens to respectively clamp the first sample 201 to be processed and the second sample 202 to be processed of different sizes. Preferably, the stroke range of the first clamping jaw 1301 is 43mm to 123mm, and the stroke range of the second clamping jaw 1302 is 124.5mm to 204.5mm. Under such a configuration, the motor 1300 itself has a stroke of 0 to 80mm, so that the first clamping jaw 1301 and the second clamping jaw 1302 can be controlled to have different stroke ranges with a stroke difference of 80mm. Specifically, after adopting the above stroke range, the first clamping jaw 1301 is suitable for clamping 2-inch, 3-inch square sample 20 to be processed or compatible carrier 40; the second clamping jaw 1302 is suitable for clamping 5-inch, 6-inch, 7-inch, 8-inch square sample 20 or compatible carrier 40. It can be understood that the present application is not limited to the above-mentioned motor formation and the stroke range of the first jaw 1301 and the second jaw 1302. In other embodiments of the present application, the motor stroke can be larger than the range of 0 to 80 mm, and the jaw formation range can be increased to 43 mm to 220 mm or larger, thereby being compatible with more sizes of samples to be processed.

[0044] Further references Figure 5 The first clamping jaw 1301 and the second clamping jaw 1302 each have a clamping jaw protrusion 1304, which is used to protect the edge of the sample 20 to be processed or the compatible carrier sheet 40, and play a better role in fixing and supporting. Exemplarily, the material of the compatible carrier sheet can be selected from 304 stainless steel, carbon fiber, Invar, aluminum alloy, titanium alloy and other lightweight, high-strength metal materials with low thermal expansion coefficient. The main body material of the sample fixture 130 can be selected from 304 stainless steel, carbon fiber, Invar, aluminum alloy, titanium alloy and other alloy metal materials, or the material of the clamping jaw protrusion 1304 is Teflon, polyurethane, polyamide, polypropylene and other plastic materials, which are usually softer than the main body material, so as to protect the sample 20 to be processed.

[0045] Furthermore, the sample fixture 130 includes a flange portion 1303, and the sample fixture 130 can be connected to the end of the mechanical arm 131 through the flange portion 1303 and some fasteners (such as screws). Figure 1 and Figure 5 The robot arm 131 can control the sample clamp 130 at its end to rotate 180 degrees in the horizontal direction, so that the first clamp 1301 and the second clamp 1302 of the corresponding travel range face the sample temporary storage device 12 to complete the clamping of the to-be-processed samples 20 or the compatible carrier 40 of different sizes.

[0046] Continue to refer to Figure 1The fully automatic sample loading and unloading system 10 in this embodiment also includes a control system located in the cabinet 110, and the control system is configured to communicate with the sample temporary storage device 12 and the sample conveying device 13. Preferably, a sensor can be installed inside each sample temporary storage device 12 to detect whether there are samples to be processed in each sample temporary storage module 120, and this information can be fed back to the control system through communication. Figure 3 , Figure 3 The sample holder 121 is shown to have a sensor probe 122, which is suitable for sending infrared signals to detect the in-position information of the sample 20 to be processed and feeding the in-position information back to the control system through the sensor. Optionally, the sensor probe 122 can also be replaced with a pressure probe or other structure, so as to confirm the in-position information of the sample 20 to be processed by pressure sensing. Further exemplary, Figure 1 A connection harness 125 between the sample temporary storage device 12 and the control system is also shown, but the present application is not limited thereto. In some other embodiments, the connection harness 125 can be omitted, so that wireless transmission is performed between the sample temporary storage device 12 and the control system.

[0047] In some embodiments of the present application, preferably, Figure 1 On the basis of the system structure shown, the fully automatic loading and unloading system 10 may further include a display screen, which is suitable for receiving display screen communication signals from the control system to display system information of the sample temporary storage device 12. Exemplarily, the system information may include the number of sample temporary storage devices 12, the number of sample temporary storage modules 120 contained in each sample temporary storage device 12, and the number, position and size information of the corresponding sample fixing trays 121, etc. Further preferably, the display screen may also be specifically implemented as an operable touch display screen to facilitate human-computer interaction. Exemplarily, after prompting the system information of the sample temporary storage transposition 12, the display screen may respond to the manual operation instruction and receive the transmission order of multiple sample temporary storage modules 120 in the sample temporary storage device 12, etc.

[0048] Reference Figure 1In this embodiment, preferably, the fully automatic loading and unloading system 10 further includes a visual recognition device 14, which is located on the carrying platform 111 and is placed opposite to the sample temporary storage device 12. The visual recognition device 14 is suitable for acquiring the system image of the sample temporary storage device 12 and transmitting the system image to the control system located in the cabinet 110. Exemplarily, the visual recognition device 14 may include a camera (for example, a camera with a pixel of more than 2000W and a focal length of 12mm, or other more preferred binocular cameras, etc.); further preferably, the visual recognition device 14 may also include a camera processor and a camera memory, so that after acquiring the system image of the sample temporary storage device 12, the system image is temporarily stored, and the system image is further analyzed to obtain the module information of the sample temporary storage device 12 corresponding to the system image (for example, the number of corresponding sample temporary storage modules 120 in the sample temporary storage device 12, the size and morphology information of the samples 20 to be processed carried by the corresponding sample fixing trays 121 in each sample temporary storage module 120, etc.), and further transmit the module information to the control system.

[0049] On this basis, after the control system obtains the module information, it can further communicate with the sample conveying device 13, so that it can select the first clamping jaw 1301 or the second clamping jaw 1302 of a suitable size through the mechanical arm 131 to clamp the sample 20 to be processed located on the corresponding sample fixing tray 121. Further preferably, a camera device can also be added at the end position of the sample conveying device 13 (for example, in the sample clamp 130), so that before the sample conveying device 13 clamps the sample 20 to be processed through the sample clamp 130, the camera device can obtain the position of the sample 20 to be processed and other related sample information, thereby improving the accuracy and reliability of clamping.

[0050] In the present embodiment, preferably, a fill light module can also be placed on the carrier platform 111 near the visual recognition device 14, and the fill light module is configured to fill light to the sample temporary storage device 12 when the visual recognition device 14 obtains the image of the sample temporary storage device 12. Specifically, due to the operating environment limitations of the lithography machine, when the fully automatic loading and unloading system 10 is located near the lithography machine for loading and unloading operations, it also needs to be in, for example, yellow light. In order to better enable the visual recognition device 14 to capture the system image of the sample temporary storage device 12, the present embodiment preferably uses a fill light module to fill light to the sample temporary storage device 12 captured by the visual recognition device 14 when it is capturing. Preferably, the fill light module can use a monochromatic LED lamp (for example, red) with a wavelength longer than 550nm as a fill light, so as to improve the shooting effect of the visual recognition device 14 while avoiding the fill light module from exposing the sample to be processed coated with photosensitive material.

[0051] Of course, as a preferred embodiment, in order to avoid the situation where a fill light module is used for fill light due to poor lighting conditions, the visual recognition device 14 can also be implemented by adding an infrared camera, and by means of infrared recognition and polarized light analysis, an accurate and clear system image of the sample temporary storage device 12 can be directly obtained. Such an embodiment can avoid the potential impact of adding a fill light module on the samples to be processed.

[0052] On the other hand, the present application refers to Figure 6 A fully automatic sample loading and unloading method suitable for a photolithography machine is proposed 60. This application includes Figure 6 Flowcharts are used to illustrate the operations performed by the system according to the embodiments of the present application. It should be understood that the preceding or following operations are not necessarily performed precisely in order. Instead, various steps may be processed in reverse order or simultaneously. At the same time, other operations may be added to these processes, or one or more operations may be removed from these processes.

[0053] according to Figure 6 The fully automatic sample loading and unloading method 60 includes the following steps: Step 61 is to assemble the sample temporary storage device and place the sample temporary storage device on the supporting platform of the base. Step 62 is for the fully automatic loading and unloading system to communicate with the sample temporary storage device and the sample conveying device, so that the sample conveying device clamps the sample to be processed through the sample clamp and then moves the sample to be processed between the sample temporary storage device and the photolithography machine through the mechanical arm.

[0054] More specific reference Figure 7 , Figure 7 Shown based on Figure 6 A specific implementation of the fully automatic sample loading and unloading method 60 is shown, and the communication data flow required between the operator, the control system (PLC) in the fully automatic loading and unloading system and the photolithography machine in this implementation is specifically shown. The fully automatic loading and unloading system is specifically configured as the preferred implementation schemes described above. According to Figure 7 , first, the operator assembles the jig (i.e., the sample temporary storage device) and inputs the "assembly end" command on the touch screen connected to the control system. Further, the number of layers and specifications of the sample temporary storage module are identified by a visual recognition device; preferably, a thickness threshold can be set here, such as 6mm, and when the thickness is less than or equal to 6mm and the visual recognition device cannot detect it, it is switched to manual information input of the sample temporary storage device; this step finally displays the corresponding sample temporary storage device information on the display screen connected to the control system. Further, the operator inputs information such as the grabbing and loading sequence of the sample temporary storage module through the display screen, and transmits it to the control system, and then the control system further displays the processing sequence through the display screen.

[0055] Furthermore, the control system controls the sample conveying device to transport the sample to be processed or the compatible carrier into the photolithography machine. At this time, a step of manual observation can be added to determine whether the loading is successful; in addition, if there is a sample in the photolithography machine at this time, the loading process is interrupted. If the loading conditions are met, the photolithography machine generates and sends a door opening signal, and sends a loading permission signal to the fully automatic loading and unloading system. At this time, the system loads the materials in the set order, and feeds back the loading signal to the photolithography machine so that it waits for all the loading to be completed before starting the processing. When the loading is completed, the fully automatic loading and unloading system sends a loading end signal to the photolithography machine. The photolithography machine generates a door closing signal after the electric door is closed, and provides a processing signal to the fully automatic loading and unloading system after the formal start of the processing. After the processing is completed, the photolithography machine generates a door opening signal and a material unloading permission signal and transmits them to the fully automatic loading and unloading system. Similar to the loading process, the fully automatic loading and unloading system sends a material unloading end signal to the photolithography machine at this time. After receiving the material unloading end signal, the photolithography machine automatically closes the electric door and returns to the standby state. When all samples to be processed in this process have been processed, the operator can determine whether processing is required. If necessary, the above process is repeated; if not, the processing is completed. In this embodiment, the fully automatic loading and unloading system and the lithography machine itself can have an alarm function. If the fully automatic loading and unloading system generates a loading and unloading alarm, the test sample conveyor controls its mechanical arm to return to the original path; if the lithography machine generates an alarm signal, loading and unloading is performed manually, so that when a system error occurs, it can be stopped in time or manual intervention can be performed without affecting the smoothness of the overall loading and unloading process.

[0056] In order to better understand the fully automatic loading and unloading system and method of the present application, the loading and unloading process of the fully automatic loading and unloading system is systematically described below. First, the fully automatic placement and loading process is as follows: 1. The operator selects the sample temporary storage module to assemble the sample temporary storage device according to the size and number of the samples to be processed. 2. Confirm the size of the samples to be processed, and place the square general samples to be processed of standard general samples to be processed (2 inches, 3 inches, 5 inches, 6 inches, 7 inches or 8 inches) or compatible carrier sheets loaded with special samples to be processed in the sample temporary storage device, with a maximum of 10 samples placed at a time (two sample temporary storage devices, each sample temporary storage device is composed of 5 sample temporary storage modules, for example). 3. The visual recognition module will identify the number and type of modules on the sample temporary storage device. The in-situ sensor on the sample temporary storage module automatically identifies the sample temporary storage module with the samples to be processed, and displays the status information of the sample temporary storage device on the display screen; 4. The operator confirms the sample placement order on the touch screen; 5. After the laser direct writing lithography machine completes the placement preparation, it sends a placement signal to the fully automatic loading and unloading system. After receiving the placement signal, the sample conveying mechanism will confirm the size of the sample to be processed according to the warehouse information of the sample temporary storage device, and automatically use the corresponding clamp to clamp the sample on the sample fixed support in the sample temporary storage module. 6. The sample conveying mechanism automatically transfers the sample to be processed to 0.5mm above the sample stage of the laser direct writing lithography machine. The transmission path completely avoids the internal structure of the lithography machine to ensure that the conveying mechanism and sample fixture will not touch the inside of the laser direct writing lithography machine during the sample transmission process to ensure the safety of the equipment. There is a distance sensor under the clamp to measure the distance between the bottom of the clamp and the sample stage of the laser direct writing lithography equipment, so that the clamp will not collide with the sample stage of the laser direct writing lithography equipment when it moves downward; 7. The clamp is released, the sample is left on the sample stage of the lithography machine, the sample conveyor leaves the space of the lithography machine, returns to the standby position, and transmits a signal to the lithography machine that the sample is completed. 8. After receiving the signal, the laser direct writing lithography equipment starts to work.

[0057] Furthermore, the implementation process of fully automatic sampling is as follows: 1. Automatically match the clamps, and move the clamps to the location of the sample to be processed (or the sample considered to have been exposed). After the fully automatic loading and unloading system receives the signal representing "sampling is available" sent by the laser direct writing lithography equipment, the six-axis robotic arm drives the sample fixture to move to the location of the last sample. The control system will automatically match the clamps on the fixture according to the size of the last sample. 2. The clamps pick up the sample. The motor drives the clamps to close until the exposed sample is completely clamped. During the clamping process, the distance sensor monitors the position of the clamps and the equipment sample stage in real time to ensure that the clamps do not scratch the equipment's sample stage. 3. The exposed sample is transferred to the sample temporary storage module corresponding to the original loading sample storage device to complete the sampling process. And mark the sample in the system as having completed the lithography process.

[0058] The present application provides a highly compatible fully automatic sample taking and placing system external to a laser direct writing lithography machine and its implementation scheme. The sample taking and placing system can be directly connected to the external device without the need for redesign and modification of the original equipment, which has the advantage of low cost. The fully automatic sample taking and placing loading and unloading system can automatically move samples of various sizes (2 inches, 3 inches, 5 inches, 6 inches, 7 inches, 8 inches) with a thickness of no more than 6mm to the inside of the lithography machine and automatically take them out. Through the compatible carrier design, it meets the compatibility of samples from 1mm to 8 inches. The design provides a new idea for the automatic taking and placing of samples by lithography equipment, and also provides a low-cost loading and unloading system design scheme external to the equipment. The introduction of the automatic sample taking and placing system reduces the difficulty of operator training and improves the utilization rate and efficiency of the equipment. Compared with manual work, the sample placement accuracy is greatly improved (accuracy is ±0.1mm), providing a high-precision layout solution for high-precision lithography equipment. At the same time, it reduces the risk of equipment damage caused by human operation, avoids the possibility of accidental injury to personnel due to errors in layout operations, improves the safety of lithography equipment and operators, and reduces equipment maintenance costs.

[0059] The basic concepts have been described above. Obviously, for those skilled in the art, the above application disclosure is only an example and does not constitute a limitation of the present application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements and amendments to the present application. Such modifications, improvements and amendments are suggested in the present application, so such modifications, improvements and amendments still belong to the spirit and scope of the exemplary embodiments of the present application.

[0060] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0061] Some aspects of the present application may be performed entirely by hardware, entirely by software (including firmware, resident software, microcode, etc.), or by a combination of hardware and software. The above hardware or software may be referred to as "data blocks", "modules", "engines", "units", "components" or "systems". The processor may be one or more application specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DAPDs), programmable logic devices (PLDs), field programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, or combinations thereof. In addition, various aspects of the present application may be expressed as computer products located in one or more computer-readable media, which include computer-readable program codes. For example, computer-readable media may include, but are not limited to, magnetic storage devices (e.g., hard disks, floppy disks, tapes ...), optical disks (e.g., compact disks CDs, digital versatile disks DVDs ...), smart cards, and flash memory devices (e.g., cards, sticks, key drives ...).

[0062] A computer-readable medium may include a propagated data signal containing computer program code, such as in baseband or as part of a carrier wave. The propagated signal may have a variety of manifestations, including electromagnetic, optical, etc., or a suitable combination. A computer-readable medium may be any computer-readable medium other than a computer-readable storage medium, which may be connected to an instruction execution system, device or apparatus to communicate, propagate or transmit a program for use. The program code on the computer-readable medium may be propagated via any suitable medium, including radio, cable, fiber optic cable, radio frequency signal, or similar medium, or any combination of the above mediums.

[0063] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more application embodiments, in the above description of the embodiments of this application, multiple features are sometimes merged into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0064] In some embodiments, numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the setting of such numerical values ​​is as accurate as possible within the feasible range.

[0065] Although the present application has been described with reference to the current specific embodiments, ordinary technicians in this technical field should recognize that the above embodiments are only used to illustrate the present application, and various equivalent changes or substitutions may be made without departing from the spirit of the present application. Therefore, as long as the changes and modifications to the above embodiments are within the essential spirit of the present application, they will fall within the scope of the claims of the present application.

Claims

1. A fully automatic sample loading and unloading system suitable for a photolithography machine, characterized in that: include: A base, comprising a cabinet and a bearing platform located on the cabinet; One or more sample temporary storage devices are located on the carrying platform, and the sample temporary storage devices include one or more sample fixing trays, each of which is used to support the sample to be processed; as well as A sample conveying device is located on the supporting platform, and includes an extendable robotic arm and a sample clamp located at the end of the robotic arm. The sample conveying device is configured to move the sample to be processed between the sample temporary storage device and the photolithography machine through the robotic arm after the sample clamp clamps the sample to be processed.

2. The fully automatic sample loading and unloading system according to claim 1, characterized in that: The sample fixing tray includes an operation contact portion and a sample supporting portion surrounded by the operation contact portion, and the sample supporting portion includes a hollow area.

3. The fully automatic sample loading and unloading system according to claim 1, characterized in that: The samples to be processed include general samples to be processed and special samples to be processed. When the sample fixing tray is used to carry the special samples to be processed, the fully automatic sample loading and unloading system also includes a compatible carrier sheet, which is suitable for carrying the special samples to be processed. The sample fixing tray is suitable for supporting the compatible carrier sheet and thus supporting the samples to be processed located in the compatible carrier sheet.

4. The fully automatic sample loading and unloading system according to claim 3, characterized in that: The compatible carrier sheet includes a carrier portion recessed in the upper surface of the compatible carrier sheet, and the carrier portion includes one or more through holes extending therethrough.

5. The fully automatic sample loading and unloading system according to claim 3 or 4, characterized in that: The general sample to be processed and the compatible carrier sheet are square shapes that conform to standard sizes, and the special sample to be processed includes other shapes besides the square shape or a square shape that does not conform to the standard size.

6. The fully automatic sample loading and unloading system according to claim 1, characterized in that: The sample clamp comprises a motor and at least one clamping jaw connected to the motor, and the motor is suitable for driving the clamping jaw to contract or open so as to clamp the sample to be processed.

7. The fully automatic sample loading and unloading system according to claim 6, characterized in that: The clamping jaw comprises a first clamping jaw and a second clamping jaw opposite to the first clamping jaw, wherein the stroke range of the first clamping jaw is 43 mm to 123 mm, and the stroke range of the second clamping jaw is 124.5 mm to 204.5 mm.

8. The fully automatic sample loading and unloading system according to claim 1, characterized in that: It also includes a control system, which is located in the cabinet of the base, and the control system is configured to communicate with the sample temporary storage device, the sample conveying device and / or the photolithography machine.

9. The fully automatic sample loading and unloading system according to claim 8, characterized in that: It also includes a display screen, which is suitable for receiving a display screen communication signal from the control system to display system information of the sample temporary storage device.

10. The fully automatic sample loading and unloading system according to claim 8, characterized in that: It also includes a visual recognition device, which is located on the supporting platform and placed opposite to the sample temporary storage device. The visual recognition device is suitable for acquiring a system image of the sample temporary storage device, generating module information according to the system image, and transmitting the module information to the control system.

11. The fully automatic sample loading and unloading system according to claim 10, characterized in that: It also includes a fill light module placed on the carrying platform adjacent to the visual recognition device, and the fill light module is configured to provide fill light to the sample temporary storage device when the visual recognition device acquires an image of the sample temporary storage device.

12. A fully automatic sample loading and unloading method applicable to a photolithography machine, applicable to the fully automatic sample loading and unloading system according to any one of claims 1 to 11, characterized in that: The fully automatic sample loading and unloading method comprises the following steps: Assemble the sample temporary storage device and place the sample temporary storage device on the carrying platform of the base; The fully automatic loading and unloading system communicates with the sample temporary storage device and the sample conveying device, so that the sample conveying device clamps the sample to be processed through the sample clamp and then moves the sample to be processed between the sample temporary storage device and the photolithography machine through the robotic arm.

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