Semiconductor real-time abnormal single processing production control system

Abstract

The invention provides a semiconductor real-time abnormal list processing production control system, which is characterized by comprising an equipment alarm signal acquisition unit, an abnormal list creation unit, a sign-off management and control unit, an abnormal list execution processing unit and an abnormal list closing unit, and is characterized in that the equipment alarm signal acquisition unit is used for acquiring an alarm signal sent by a processing equipment fault; the abnormal list creating unit creates a batch abnormal list according to the alarm signal; the sign-off management and control unit is used for realizing an online sign-off process between each part and personnel; the abnormal single execution processing unit executes batching, reworking processes and blending according to the batch abnormal single; and the exception order closing unit closes the batch exception order after the batch exception order finishes the processing flow. According to the semiconductor real-time abnormal single processing production control system, misoperation can be effectively prevented, and the effects of saving the cost, improving the product yield and improving the production efficiency are achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer production, and in particular to a production control system for semiconductor real-time abnormal single processing. Background Art

[0002] In the semiconductor wafer production process, when the batch is being processed by the equipment, sometimes equipment failures may occur, resulting in some wafers in the batch having completed the equipment processing, some wafers being processed, and some wafers not being processed. In order to ensure that all wafers in the batch have completed the equipment processing, when the above situation occurs, the equipment engineer (EE) needs to inform the process engineer (PE) of the wafer equipment processing status, and then the process engineer specifies different subsequent processing procedures for wafers with different equipment processing conditions. In this processing process, information transmission between different departments, personnel, and links is involved, which is prone to untimely and inaccurate information transmission, and then some unreasonable processing situations occur: for example, the batch that should have opened an abnormal order continues to be processed according to the original process; the processed wafers are repeatedly processed; the unprocessed wafers have not yet been processed; the wafers being processed are put into the subsequent process without rework, etc. As a result, production costs rise, product yields decrease, and production efficiency is low. Summary of the invention

[0003] In order to solve the above-mentioned problem, the present invention aims to provide a production control system for real-time abnormal order processing of semiconductors, so as to realize the management and control of the production status of the abnormal orders of the batch.

[0004] To achieve the above object, the present invention adopts the following technical solution:

[0005] The present invention provides a production control system for real-time exception order processing of semiconductors, which is characterized by comprising an equipment alarm signal acquisition unit, an exception order creation unit, a sign-off control unit, an exception order execution processing unit, and an exception order closing unit, wherein the equipment alarm signal acquisition unit is used to collect alarm signals issued by processing equipment failures; the exception order creation unit creates batch exception orders according to the alarm signals; the sign-off control unit is used to realize an online sign-off process between various parts and personnel; the exception order execution processing unit executes batching, rework processes, and batch consolidation according to the batch exception orders; and the exception order closing unit closes the batch exception orders after the batch exception orders complete the processing process.

[0006] Furthermore, in the semiconductor real-time exception order processing production control system provided by the present invention, there may also be such a feature: wherein the specific process of the exception order creation unit creating a batch exception order according to the alarm signal is as follows:

[0007] 1) Create an abnormal single alarm code based on the alarm signal;

[0008] 2) Lock the batch according to the abnormality single alarm code;

[0009] 3) After the batch is successfully locked, determine whether the batch is in process. If the batch is in process, proceed to step 4). If the batch is not in process, unlock the batch.

[0010] 4) Call the special pause code for abnormal orders to temporarily schedule the batch;

[0011] 5) Create a batch exception order and unlock the batch.

[0012] Furthermore, in the semiconductor real-time exception order processing production control system provided by the present invention, there may also be such a feature: wherein, while the equipment continues to send out alarm signals until human intervention occurs, only one exception order for a batch can be created.

[0013] Furthermore, in the semiconductor real-time exception order processing production control system provided by the present invention, it can also have the following characteristics: wherein, the exception order creation unit is also provided with a manual creation module for manually creating batch exception orders.

[0014] Furthermore, in the production control system for semiconductor real-time exception order processing provided by the present invention, it can also have the following features: wherein, the approval control unit includes a Created module, a WaitingEESign module, a WaitingEEApprove module, a WaitingPESign module, a WaitingPEApprove module, a WaitingReview module, and an Approved module; the Created module receives the created batch exception order and displays it as a created state, and has a cancel control for canceling the exception order and a submit control for submitting the exception order to the WaitingEESign module; the WaitingEESign module is used for equipment engineers to confirm the exception order, and has a cancel control for canceling the exception order, a sign-up approval control for sign-up approval, and a sign-up rejection control for sign-up rejection; when the sign-up approval control of the WaitingEESign module is triggered, the WaitingEEApprove module provides a submission control for the equipment engineer to submit the exception order to the WaitingPESign module. module; or when the approval rejection control of the WaitingPESign module is triggered, the equipment engineer cancels the exception order through the cancel control; the WaitingPESign module is used for process engineers to confirm the exception order, and has a cancel control for canceling the exception order, a approval control for approval, and a approval rejection control for approval rejection; when the approval approval control of the WaitingPESign module is triggered, the WaitingPEApprove module allows the process engineer to submit the exception order to the WaitingReview module through the submit control; or when the approval rejection control of the WaitingReview module is triggered, the process engineer cancels the exception order through the cancel control; the WaitingReview module is used for process leaders to review the exception order, and has a cancel control for canceling the exception order, a approval control for approval, and a approval rejection control for approval rejection; when the approval approval control of the WaitingReview module is triggered, the Approved module is displayed as submitted, as the triggering state of the execution process of the triggering exception order execution processing unit.

[0015] Furthermore, in the production control system for real-time exception order processing of semiconductors provided by the present invention, there may also be such a feature: wherein the sign-off control process of the sign-off control unit is executed by the factory office system.

[0016] Furthermore, in the semiconductor real-time exception order processing production control system provided by the present invention, it can also have the following feature: wherein, the exception order closing unit also closes the batch of exception orders after the cancel control in the approval control unit is triggered.

[0017] Furthermore, in the semiconductor real-time exception order processing production control system provided by the present invention, there may also be such a feature: wherein the processing flow of the exception order execution processing unit is specifically as follows:

[0018] 1)Remove the batch suspension;

[0019] 2) Divide wafers into batches according to their processing status, including completed sub-batches, sub-batches being processed, and sub-batches not yet processed;

[0020] 3) The sub-batches are processed according to the corresponding processing flow: the sub-batches that have been processed are shipped out in batches, the sub-batches that are being processed enter the rework process, and the sub-batches that have not been processed are cancelled;

[0021] 4) After the sub-batches have completed the processing flow, they are combined into a batch;

[0022] 5) When all sub-batches are merged, the batch exception order control is released or the parent exception order is used for control.

[0023] Furthermore, in the production control system for semiconductor real-time exception order processing provided by the present invention, it can also have the following characteristics: wherein, the rework process is controlled by a temporary engineering change control module, and the temporary engineering change control module controls the process parameters in the rework process, and the process parameters include: equipment parameters, product process formula, equipment process formula, and photolithography board parameters.

[0024] Furthermore, in the production control system for real-time abnormal order processing of semiconductors provided by the present invention, there may also be such a feature: wherein the rework process includes the following steps:

[0025] a) Abnormal orders are sorted by designated pickers;

[0026] b) Create a chip picking machine task;

[0027] c) Create a future pause in the batching step for each sub-batch according to the picker task;

[0028] d) The sub-batch undergoes the process flow.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] 1. The semiconductor real-time exception order processing production control system of the present invention generates batch exception orders according to the designated equipment alarm signal codes issued by the equipment, thereby preventing human errors from causing batches that should be processed for exceptions to be omitted from the original process, thereby resulting in low product yield.

[0031] 2. In the production control system for semiconductor real-time exception order processing of the present invention, once an exception order is generated for a batch, it is immediately paused (Hold) in the original process, and the control of the batch is transferred to the exception order control. The relevant departments and personnel involved in the exception order report the batch processing failure and subsequent processing information and push them in time through signing and approval to ensure the accuracy and timeliness of information transmission, prevent batch omissions and extend the batch process time, and improve production efficiency.

[0032] 3. In the production control system for real-time semiconductor abnormality order processing of the present invention, a double check (Double Check) is implemented on the key information of the batch abnormality order (wafer processing status and wafer processing) to prevent single-person mistakes and improve information accuracy.

[0033] 4. In the production control system for semiconductor real-time exception order processing of the present invention, a batch hold is implemented for batch exception orders during their life cycle and at the end to achieve real-time confirmation and final confirmation, thereby ensuring that the batch is strictly executed in accordance with the exception order process, preventing the occurrence of misidentification and thereby improving product yield and production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a block diagram of a production control system for semiconductor real-time abnormal order processing in an embodiment of the present invention;

[0035] Figure 2 is a flow chart of a device alarm in an embodiment of the present invention;

[0036] Figure 3 is a workflow diagram of an exception order creation unit in an embodiment of the present invention;

[0037] Figure 4 is a workflow diagram of the sign-off control unit in an embodiment of the present invention;

[0038] Figure 5 is a workflow diagram of an abnormal single execution processing unit in an embodiment of the present invention;

[0039] Figure 6 It is a flow chart of closing a batch exception order after the batch exception order is processed in an embodiment of the present invention. DETAILED DESCRIPTION

[0040] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the following embodiments are combined with the accompanying drawings to specifically illustrate the technical solutions of the present invention.

[0041] See also Figure 1An embodiment of the present invention provides a production control system for real-time exception order processing of semiconductors, which includes an equipment alarm signal acquisition unit, an exception order creation unit, a sign-off control unit, an exception order execution processing unit, and an exception order closing unit.

[0042] The equipment alarm signal collection unit is used to collect the alarm signals issued by the processing equipment failure. Figure 2 , semiconductor wafer batches are processed, and the equipment alarm signal collection unit collects equipment alarm signals of the processing equipment of the batch wafers that have not completed the processing in real time.

[0043] After collecting the alarm signal, the exception order creation unit automatically creates a batch exception order according to the alarm signal. In addition, the exception order creation unit is also provided with a manual creation module for manually creating batch exception orders. The automatic creation of batch exception orders requires the equipment to be in online mode. In actual production, sometimes equipment failures cause the equipment to be in offline mode. At this time, the production assistant can manually create a batch exception order through the manual creation module.

[0044] See also Figure 3 The specific workflow of the abnormal order creation unit to automatically create a batch abnormal order according to the alarm signal is as follows:

[0045] 1) Create an abnormal single alarm code based on the alarm signal.

[0046] 2) Lock the batch according to the abnormal order alarm code.

[0047] 3) After the batch is successfully locked, determine whether the batch is in process. If the batch is in process, proceed to step 4); if the batch is not in process, unlock the batch.

[0048] 4) Call the special pause code for abnormal orders to temporarily schedule the batch.

[0049] 5) Create a batch exception order and unlock the batch.

[0050] In the above process, when the equipment continues to send out alarm signals until human intervention, only one batch exception order can be created. By locking the batch and checking the batch operation status, duplicate batch exception orders can be prevented from being created. In addition, once a batch exception order is created, the batch is controlled by the exception order management process, and a specific pause code is used to pause the batch, which can only be released by the exception order management process.

[0051] After creating an exception ticket, the online approval process between various departments and personnel is implemented through the approval control unit. Figure 4The approval control unit includes the Created module, WaitingEESign module, WaitingEEApprove module, WaitingPESign module, WaitingPEApprove module, WaitingReview module, and Approved module.

[0052] The created batch exception order received by the Created module is displayed as created, and has a cancel control for canceling the exception order and a submit control for submitting the exception order to the WaitingEESign module.

[0053] The WaitingEESign module is used by the equipment engineer (EE) to confirm the exception order, that is, to confirm the exception order information and determine the processing status of the batch of wafers. The WaitingEESign module has a cancel control for canceling the exception order, a sign-off control for signing and approving, and a sign-off reject control for signing and rejecting.

[0054] When the approval control of the WaitingEESign module is triggered, the WaitingEEApprove module allows the equipment engineer to submit an exception form with the batch processing wafer status filled in to the WaitingPESign module through the Submit control; or when the approval rejection control of the WaitingPESign module is triggered, the equipment engineer can cancel the exception form through the Cancel control.

[0055] The WaitingPESign module is used by the process engineer (PE) to confirm the exception order, that is, to confirm the exception order information submitted by the equipment engineer. The WaitingPESign module has a cancel control for canceling the exception order, a sign-on control for signing and approving, and a sign-on reject control for signing and rejecting.

[0056] When the approval control of the WaitingPESign module is triggered, the WaitingPEApprove module allows the process engineer to submit the exception form with the processing information filled in to the WaitingReview module through the Submit control; or when the approval rejection control of the WaitingReview module is triggered, the process engineer can cancel the exception form through the Cancel control.

[0057] The WaitingReview module is used by the process leader to review the exception order, that is, to confirm the batch wafer processing status and processing flow. The WaitingReview module has a cancel control for canceling the exception order, a sign-off control for signing and approving, and a sign-off reject control for signing and rejecting.

[0058] When the approval control of the WaitingReview module is triggered, the Approved module is displayed as submitted, which serves as the triggering status for the execution process of the exception order execution processing unit.

[0059] The approval control process executed by the approval control unit is completed in sequence by multiple departments and personnel. The approval control process is executed by a predetermined approval program built into the system, and can also be executed by the factory office (OA) system.

[0060] Once the batch is actually processed by the exception order (i.e. after the process leader signs and agrees), the batch exception order will enter the processing flow and cannot be cancelled. When the batch exception order is cancelled, the exception order closing unit closes the batch exception order, and the batch will be separated from the control flow of the exception order, and will be controlled by the parent exception order management flow or the production process flow in the future.

[0061] During the above-mentioned approval control process, when the batch exception order is cancelled or the approval is rejected, resulting in the closure of the processing order, the equipment management module (RAS) and the work in progress management module (WIP) of the MES system will assist in pausing (Hold) the batch for confirmation.

[0062] See also Figure 5 The exception order execution processing unit executes batching, rework process, and batch combination according to the batch exception order. The specific processing flow executed by the exception order execution processing unit is as follows:

[0063] 1)Remove the batch hold.

[0064] 2) Divide the wafers into batches according to their processing status, including completed sub-batches, sub-batches being processed, and sub-batches not yet processed.

[0065] 3) The sub-batches are processed according to the corresponding processing flow: the sub-batches that have completed processing are shipped out in batches, the sub-batches being processed enter the rework process, and the sub-batches that have not yet been processed are cancelled from shipping.

[0066] 4) The sub-batches are merged after completing the processing flow. The batches are merged according to the principle of merging when possible, external division and external combination, and internal division and internal combination. "Merge when possible" means that if there are two unmerged sub-batches in the same abnormal batch, they need to be merged. "External division and external combination" and "internal division and internal combination" mean that the sub-batches of this abnormal batch are merged in this batch, the sub-batches of the parent abnormal batch are merged in the parent abnormal batch, and the sub-batches of the sub-batches are merged in the sub-batches.

[0067] 5) When all sub-batches are merged, the batch exception order control is released or the parent exception order is used for control.

[0068] See also Figure 5 The rework process specifically includes the following steps:

[0069] a) Exception orders are sorted by designated picking machines.

[0070] b) Create a picker task.

[0071] c) Create a future pause in the batching step for each sub-batch according to the picker task.

[0072] d) The sub-batch undergoes the process flow.

[0073] The rework process is controlled by the temporary engineering change control module, which controls the process parameters in the rework process, including equipment parameters, product process formula, equipment process formula, photolithography board parameters, data collection items, etc.

[0074] The Temporary Engineering Change Control module operates on the following data model:

[0075] Abnormal single data model:

[0076] Field Name Type Not empty default Notes RUNCARD_ID VARCHAR2(32) FALSE [NULL] Abnormal order number LOT_ID VARCHAR2(32) FALSE [NULL] Batch Coding IS_SPLIT_SORTER VARCHAR2(1) FALSE [NULL] Whether the sorting is performed by the picker (Y-Yes, N-No) SPLIT_SORTER_EQP VARCHAR2(32) FALSE [NULL] Picker equipment coding MERGE_PROCEDURE_NAME VARCHAR2(64) FALSE LNULL] Batch process name MERGE_PROCEDURE_VERSION NUMBER(19,0) FALSE [NULL] Batch process version MERGE_STEP_STATE_NAME VARCHAR2(32) FALSE [NULL] Name of batching process STATE VARCHAR2(32) FALSE [NULL] Abnormal single state, see state model RUNCARD_TYPE VARCHAR2(32) FALSE [NULL] Abnormal order type (RC-real-time abnormal order) DESCRIPTION VARCHAR2(32) FALSE [NULL] Exception order description PARENT_RUNCARD_RRN NUMBER(19,0) FALSE [NULL] Parent exception single primary key RRC_PROCESS_TYPE VARCHAR2(32) FALSE [NULL] Abnormal order processing type (SPLIT- batch, FULL- whole batch) RUNCARD_DEPTH VARCHAR2(32) FALSE [NULL] Exception single nesting depth RUNCARD_OASIGN_ID VARCHAR2(32) FALSE [NULL] Factory office system approval process identification code ROOT_RUNCARD_RRN NUMBER(19,0) FALSE [NULL] Root abnormal single primary key SORTER_RECIPE VARCHAR2(32) FALSE [NULL] Process formula name of chip picking machine

[0077] Basic information of data record exception list:

[0078] Basic information (RUNCARD_ID, LOT_ID, STATE, RUNCARD_TYPE, DESCRIPTION); inheritance relationship (PARENT_RUNCARD_RRN, RUNCARD_DEPTH, ROOT_RUNCARD_RRN); batch splitting and merging information (IS_SPLIT_SORTER, SPLIT_SORTER_EQP, SORTER_RECIPE, MERGE_PROCEDURE_NAME, MERGE_PROCEDURE_VERSION, MERGE_STEP_STATE_NAME); processing method (RRC_PROCESS_TYPE); integrated office system (RUNCARD_OASIGN_ID).

[0079] Abnormal single batch data model

[0080]

[0081] Data records the sub-batch information generated during the abnormal handling of an abnormal single batch:

[0082] Basic information (RUNCARD_RRN, LOT_ID, SUB_LOT_ID, IS_MAIN, PART_NAME, DURABLE_ID, COMPONENT_LIST); process control information (START_STEP_STATE_NAME, END_STEP_STATE_NAME, RETURN_STEP_NAME); action type (ACTION_TYPE).

[0083] Abnormal single batch process step data model

[0084] Field Name Type Not empty default Notes RUNCARD_SUBLOT_RRN NUMBER(19,0) FALSE [NULL] Exception handling single batch primary key STEP_NAME VARCHAR2(32) FALSE [NULL] Step name EQUIPMENT_ID VARCHAR2(32) FALSE [NULL] Step-specific equipment code STEP_STATE_NAME VARCHAR2(32) FALSE [NULL] Step status name STEP_VERSION NUMBER(19,0) FALSE [NULL] Step version SEQ_NO NUMBER(19,0) FALSE [NULL] Process step number (order: from small to large) LOGIC_RECIPE_NAME VARCHAR2(64) FALSE [NULL] Recipe Name EQUIPMENT_RECIPE_NAME VARCHAR2(64) FALSE [NULL] Equipment recipe name RETICLE_ID VARCHAR2(64) FALSE [NULL] Photolithography coding EDC_NAME VARCHAR2(64) FALSE [NULL] Data collection item set IS_TRACKOUT_HOLD VARCHAR2(1) FALSE [NULL] Whether to suspend the batch when leaving the station (Y-Yes, N-No) HOLD_OWNER VARCHAR2(32) FALSE [NULL] Who lifts the batch suspension? IS_SENDTO_SPC VARCHAR2(1) FALSE [NULL] Whether the engineering data is sent to statistical process control (Y-Yes, N-No)

[0085] Data record abnormal order batch rework process information:

[0086] Relationship information (RUNCARD_SUBLOT_RRN); rework process information (STEP_NAME, STEP_STATE_NAME, STEP_VERSION, SEQ_NO); temporary engineering change information (EQUIPMENT_ID, LOGIC_RECIPE_NAME, EQUIPMENT_RECIPE_NAME, RETICLE_ID, EDC_NAME); control information (IS_TRACKOUT_HOLD, HOLD_OWNER, IS_SENDTO_SPC).

[0087] In addition to the temporary engineering change control parameters, the batch exception order processing flow has specific control parameters: (1) whether to suspend the batch when leaving the station (IS_TrackOnHold), which is to suspend the batch for confirmation when leaving the station for a specific process step; (2) whether to send the collected engineering data to statistical process control (SPC) (IS_SendTo_SPC), which is to close the sending of engineering data to statistical process control (SPC) for a specific process step.

[0088] When a batch generates a new exception order during exception order processing, the exception order becomes the parent exception order of the newly created exception order. The batch is controlled by the new exception order. After the batch completes the new exception order, it is controlled by the parent exception order again.

[0089] The exception order closing unit closes the batch exception order after the batch exception order has completed the processing flow. Figure 6 When the last two sub-batches are combined internally or externally (the picker task has been created), the batch exception order is automatically closed. When the batch exception order is closed, the batch is controlled by the parent exception order or the production process flow. When the exception order is closed, the batch is automatically paused for final confirmation.

[0090] The following production control method can be implemented by the semiconductor real-time abnormal order processing production control system of the present invention:

[0091] 1. Generate batch exception orders based on the specified equipment alarm signal codes issued by the equipment to prevent human errors from causing batches that should be handled abnormally to be omitted from the original process, thereby resulting in low product yield.

[0092] 2. Once an exception order is generated for a batch, it will be immediately paused (Hold) in the original process, and the control of the batch will be transferred to the exception order control. The relevant departments and personnel involved in the exception order will report the batch processing failure and subsequent processing information and push it in time through sign-off to ensure the accuracy and timeliness of information transmission, prevent batch omissions and extend the batch process time, and improve production efficiency.

[0093] 3. Double-check the key information of batch abnormalities (wafer processing status and wafer handling) to prevent single-person errors and improve information accuracy.

[0094] 4. The batch exception order provides a batch hold during the life cycle and at the end to achieve real-time confirmation and final confirmation, thereby ensuring that the batch is strictly executed according to the exception order process, preventing the occurrence of misplaced orders and thus improving product yield and production efficiency.

[0095] The above embodiments are only preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the scope of protection of the present invention.

Claims

1. A production control system for real-time abnormal order processing of semiconductors, characterized by: It includes equipment alarm signal collection unit, exception form creation unit, approval control unit, exception form execution processing unit, and exception form closing unit. Wherein, the equipment alarm signal collection unit is used to collect alarm signals issued by processing equipment failures; The exception order creation unit creates a batch exception order according to the alarm signal; The approval control unit is used to implement the online approval process between various departments and personnel; The abnormal order execution processing unit executes batching, rework process, and batch combination according to the batch abnormal order; The abnormal order closing unit closes the batch abnormal order after the batch abnormal order completes the processing flow.

2. The semiconductor real-time abnormal order processing production control system according to claim 1, characterized in that: in, The specific process of the abnormal order creation unit creating a batch abnormal order according to the alarm signal is as follows: 1) Creating an abnormal single alarm code according to the alarm signal; 2) Lock the batch according to the abnormality single alarm code; 3) After the batch is successfully locked, determine whether the batch is in process. If the batch is in process, proceed to step 4). If the batch is not in process, unlock the batch. 4) Call the special pause code for abnormal orders to temporarily schedule the batch; 5) Create a batch exception order and unlock the batch.

3. The semiconductor real-time abnormal order processing production control system according to claim 2, characterized in that: in, When the equipment continues to send out alarm signals until human intervention occurs, only one exception order can be created for the batch.

4. The semiconductor real-time abnormal order processing production control system according to claim 1 or 2, characterized in that: in, The exception order creation unit is also provided with a manual creation module for manually creating batch exception orders.

5. The semiconductor real-time abnormal order processing production control system according to claim 1, characterized in that: in, The approval control unit includes a Created module, a WaitingEESign module, a WaitingEEApprove module, a WaitingPESign module, a WaitingPEApprove module, a WaitingReview module, and an Approved module; The Created module receives the created batch exception order and displays it as created, and has a cancel control for canceling the exception order and a submit control for submitting the exception order to the WaitingEESign module; The WaitingEESign module is used by the equipment engineer to confirm the exception order, and has a cancel control for canceling the exception order, a sign-off control for signing and approving, and a sign-off reject control for signing and rejecting; When the approval control of the WaitingEESign module is triggered, the WaitingEEApprove module allows the equipment engineer to submit the exception form to the WaitingPESign module through the Submit control; or when the approval rejection control of the WaitingPESign module is triggered, the WaitingEEApprove module allows the equipment engineer to cancel the exception form through the Cancel control; The WaitingPESign module is used for process engineers to confirm the exception order, and has a cancel control for canceling the exception order, a sign-off control for signing and approving, and a sign-off reject control for signing and rejecting; When the approval control of the WaitingPESign module is triggered, the WaitingPEApprove module allows the process engineer to submit the exception form to the WaitingReview module through the Submit control; or when the approval rejection control of the WaitingReview module is triggered, the process engineer can cancel the exception form through the Cancel control; The WaitingReview module is used for the process leader to review the exception order, and has a cancel control for canceling the exception order, a sign-off control for signing and approving, and a sign-off reject control for signing and rejecting; When the approval control of the WaitingReview module is triggered, the Approved module is displayed as submitted, which serves as the triggering status for triggering the execution process of the exception order execution processing unit.

6. The semiconductor real-time abnormal order processing production control system according to claim 5, characterized in that: in, The approval control process of the approval control unit is executed by the factory office system.

7. The semiconductor real-time abnormal order processing production control system according to claim 5, characterized in that: in, The abnormal order closing unit also closes the batch of abnormal orders after the cancel control in the approval control unit is triggered.

8. The semiconductor real-time abnormal order processing production control system according to claim 1, characterized in that: in, The processing flow of the abnormal order execution processing unit is as follows: 1)Remove the batch suspension; 2) Divide wafers into batches according to their processing status, including completed sub-batches, sub-batches being processed, and sub-batches not yet processed; 3) The sub-batches are processed according to the corresponding processing flow: the sub-batches that have been processed are shipped out in batches, the sub-batches that are being processed enter the rework process, and the sub-batches that have not been processed are cancelled; 4) After the sub-batches have completed the processing flow, they are batched together; 5) When all sub-batches are merged, the batch exception order control is released or the parent exception order is used for control.

9. The semiconductor real-time abnormal order processing production control system according to claim 8, characterized in that: in, The rework process is controlled by a temporary engineering change control module, and the temporary engineering change control module controls the process parameters in the rework process, and the process parameters include: equipment parameters, product process formula, equipment process formula, and photolithography board parameters.

10. The semiconductor real-time abnormal order processing production control system according to claim 9, characterized in that: in, The rework process includes the following steps: a) Abnormal orders are sorted by designated pickers; b) Create a chip picking machine task; c) Create a future pause in the batching step for each sub-batch according to the picker task; d) The sub-batch undergoes the process flow.

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