Spectrometer structure optimization method, device and spectrometer based on fluid model analysis

Abstract

The method, device and spectrometer for spectrometer structure optimization based on fluid model analysis belong to the technical field of echelle grating spectrometers, and particularly to the structural optimization of echelle grating spectrometers; the method solves the problem that the existing echelle grating spectrometer structure optimization method does not optimize the influence of internal gas filling (argon gas), and cannot analyze the influence of mechanical pressure, temperature and refractive index change of optical medium caused by gas filling turbulence on the optical path, thereby generating errors; the method includes: a step of determining the final optimal position of the gas inlet and outlet from the alternative positions of the gas inlet and outlet in the Y direction of the side wall based on the uniformity judgment method of the light transmission medium by using the optimal position selection method. The method, device and spectrometer for spectrometer structure optimization based on fluid model analysis are suitable for structural optimization of echelle grating spectrometers to detect far ultraviolet spectra.

Description

Technical Field

[0001] The invention relates to the technical field of echelle grating spectrometers, and in particular to the structural optimization of echelle grating spectrometers. Background Art

[0002] Gasoline is the most important power fuel in industrial society. Gasoline products can be divided into three categories according to their uses: aviation gasoline, automotive gasoline, and solvent gasoline. As the main fuel for vehicles, the quality of automotive gasoline directly affects the performance of the vehicle. Poor-quality gasoline can cause traffic accidents and accidents: such as continuous shaking of the vehicle engine, residual powder in the engine cylinder, black smoke, and frequent vehicle stalling. Such safety accidents caused by gasoline quality problems have occurred many times, making people pay more attention to gasoline production technology and oil quality. Therefore, the quality inspection of automotive gasoline is of great significance to ensure the safety of oil circulation and traffic road safety. The existing inspection indicators and single inspection methods for gasoline components are generally laboratory detection methods, which have long detection time, single detection items, complex methods, low detection efficiency, and cannot detect many components that affect gasoline quality. Therefore, it is urgent to seek a method or instrument that can quickly, multi-parameter, and highly accurate detection of gasoline components.

[0003] By comparing the detection methods of various indicators, such as motor method, gas chromatography, research method (engine combustion method) and injection method, it is found that the spectral detection method can be a better method to achieve fast, accurate and efficient detection of gasoline components. The echelle grating spectrometer has the advantages of compact structure, stable performance, wide band, high resolution, transient direct reading (fast detection speed, real-time measurement on site), etc. It can be used in aerospace, chemical industry, petroleum, metallurgy, medical treatment, biology, food, agriculture and resource exploration. In order to achieve the goal of accurate detection of multiple parameters of gasoline components in industrial sites, the echelle grating spectrometer can be used for gasoline component detection according to the requirements of wide spectral range and high resolution. However, due to the absorption of far ultraviolet spectrum by air, the current echelle grating spectrometer can only detect the spectrum above 200nm, and cannot actually measure the spectrum of the vacuum ultraviolet band required for gasoline component detection.

[0004] By filling inert gas, the absorption of the spectrum by air can be reduced, thereby increasing the range of the spectrometer's detection spectrum. For example, argon is a rare gas with high stability and inertness, which can prevent the absorption of characteristic spectra in the ultraviolet region. In order to meet the use requirements of gasoline component detection in industrial sites, it is necessary to expand the detection range of the echelle grating spectrometer to the far ultraviolet band. At this time, the entire optical path must be in an inert gas, that is, the inside of the echelle grating spectrometer is filled with argon (of course, the position from the external signal source to the reception of the spectrometer also needs to be in argon).

[0005] However, unlike the spectrometer in the traditional atmospheric environment system, when the high-pressure argon is filled into the step grating spectrometer, the medium inside the instrument is no longer evenly and stably distributed. The argon will fluctuate in different spaces and times inside the instrument, which will cause several problems to the performance of the instrument:

[0006] (1) Inflation will cause the argon gas turbulence to directly hit the surface of optical components, causing ghost spots to appear on the components.

[0007] (2) Inflation will cause the density of the light transmission medium inside the spectrometer to change and the change is non-uniform, thereby changing the light transmission path and causing deviations from the optical design.

[0008] (3) Inflation will cause pressure differences in different areas of the instrument (the pressure on the optomechanical structure inside the spectrometer is uneven), which in turn affects the optical path and causes measurement errors.

[0009] In short, in order to expand the spectral detection range of the existing echelle grating spectrometer, structural optimization is required. It should be noted that there are many technical solutions for structural optimization of spectrometers, but none of them optimizes the influence of internal gas filling (argon).

[0010] In summary, there is an urgent need for a method for structural optimization of a chelle grating spectrometer in terms of the influence of internal filling, and an inert gas-filled wide-band chelle grating spectrometer obtained according to the structural optimization. Summary of the invention

[0011] The present invention proposes a spectrometer structure optimization method, device and spectrometer based on fluid model analysis, which solves the problem that the existing medium-step grating spectrometer structure optimization method does not optimize the influence of internal inflation (argon gas), and cannot analyze the influence of mechanical pressure, temperature and refractive index change of optical medium caused by inflation turbulence generated by inflation on the optical path, thereby causing errors.

[0012] The technical solution of the spectrometer structure optimization method based on fluid model analysis described in the present invention is as follows:

[0013] The spectrometer is an echelle grating spectrometer, and the method comprises the following steps:

[0014] Steps for obtaining a model of an echelle spectrometer;

[0015] The model of the echelle grating spectrometer includes the optical model, the mechanical model and the model of the fluid inside the instrument;

[0016] A step for selecting candidate positions of gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument;

[0017] A step for determining the best position of the gas inlet and outlet holes in the XZ direction of the side wall from the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall using the best position selection method based on the uniformity judgment method of the light transmission medium;

[0018] A step for maintaining the optimal position of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument and selecting an alternative position of the gas inlet and outlet holes in the Y direction of the side wall;

[0019] A step for determining the final optimal position of the gas inlet and outlet hole from the candidate positions of the gas inlet and outlet hole in the Y direction of the side wall using an optimal position selection method based on the uniformity judgment method of the light transmission medium;

[0020] A step for simulating the change in optical imaging quality caused by changes in pressure, medium density and temperature inside the echelle grating spectrometer due to the inflation conditions based on the final optimal position of the gas inlet and outlet holes, the mechanical model and the optical model, and performing structural optimization simulation according to the change in optical imaging quality to obtain structural optimization parameters;

[0021] The final optimal position and structural optimization parameters of the gas inlet and outlet holes are used to perform structural optimization on the echelle grating spectrometer; after the structural optimization, an inert gas-filled wide-band echelle grating spectrometer is obtained.

[0022] Further, a preferred embodiment is provided, wherein the optimal position selection method comprises the following steps:

[0023] An iterative analysis is performed on each candidate position of the gas inlet and outlet, and the candidate position of the gas inlet and outlet with the highest uniformity of the light transmission medium is used as the optimal position of the gas inlet and outlet; wherein the process of each iterative analysis is as follows;

[0024] Select any candidate position of a gas inlet and outlet hole, open the gas inlet and outlet hole in the internal fluid model of the instrument, and obtain the internal fluid model of the instrument after the hole is opened;

[0025] Meshing the fluid model inside the instrument after the hole is opened to obtain the fluid model after meshing;

[0026] The fluid model after meshing is analyzed, and based on the uniformity judgment method of the light transmission medium, the uniformity of the light transmission medium corresponding to any candidate position of the gas inlet and outlet is judged.

[0027] Further, a preferred embodiment is provided, wherein the meshing of the fluid model inside the instrument after the hole is opened and the meshing of the fluid model after the meshing are obtained include a mesh dependence test step, as follows:

[0028] Perform surface meshing on the fluid model inside the instrument after the hole is opened;

[0029] When dividing the surface mesh, a minimum surface mesh size is given, and multiple maximum mesh sizes to be selected are set accordingly;

[0030] According to different maximum grid sizes to be selected, the changes in the argon distribution in the principal light plane of the internal fluid model of the instrument after the hole is opened are analyzed;

[0031] According to the argon inflow in the main light plane of the internal fluid model of the instrument after the hole is opened, the argon content at different times is obtained; under different grid sizes, if the cumulative content change rate at the same time is less than 3%, it is considered that the current grid quality does not affect the analysis accuracy, and the current grid size does not need to be reduced;

[0032] After weighing the mesh size and model calculation quality, the final maximum mesh size is obtained.

[0033] Further, a preferred embodiment is provided, wherein the method for determining the uniformity of the light transmission medium is as follows:

[0034] The uniformity of the light transmission medium is judged by the relative standard deviation;

[0035]

[0036]

[0037] In the formula, CV is the relative standard deviation; S is the standard deviation; is the density value of the jth sampling point; is the average density of all sampling points; n is the number of sampling points;

[0038] The uniformity of the fluid is judged by comparing the CV values ​​under different conditions. The smaller the CV value, the higher the uniformity of the fluid.

[0039] Further, a preferred embodiment is provided, wherein the steps for simulating the optical imaging quality changes caused by the pressure, medium density, and temperature changes inside the echelle grating spectrometer due to the inflation conditions based on the final optimal position of the gas inlet and outlet holes, the mechanical model, and the optical model, and performing structural optimization simulation according to the optical imaging quality changes, and obtaining the structural optimization parameters are as follows:

[0040] According to the final optimal position of the gas inlet and outlet holes, the pressure, medium density and temperature changes caused by the filling conditions inside the echelle grating spectrometer are simulated to obtain the simulation results of pressure, medium density and temperature changes;

[0041] The simulation results of pressure and temperature changes are coupled to the static analysis module to analyze the deformation of the mechanical system and optical elements of the echelle grating spectrometer; based on the deformation of the mechanical system and optical elements, the optical imaging quality of the optical system of the echelle grating spectrometer is analyzed;

[0042] According to the medium density simulation results, the refractive index change caused by the medium density change is analyzed, and the optical imaging quality of the optical system of the echelle grating spectrometer is analyzed;

[0043] Determine whether the difference between the optical imaging quality and the given optical imaging quality requirement is within a threshold range:

[0044] If it is within the threshold range, the echelle grating spectrometer does not require structural optimization;

[0045] Otherwise, the structure of the medium-step grating spectrometer is optimized based on the mechanical model and the optical model until the difference between the optical imaging quality and the given optical imaging quality requirement is within a threshold range, and the structural optimization parameters are obtained.

[0046] The present invention also proposes a spectrometer structure optimization device based on fluid model analysis, and its technical solution is as follows:

[0047] The spectrometer is an echelle grating spectrometer, and the device comprises the following modules:

[0048] Module for obtaining models of echelle spectrometers;

[0049] The model of the echelle grating spectrometer includes the optical model, the mechanical model and the model of the fluid inside the instrument;

[0050] A module for selecting the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument;

[0051] A module for determining the best position of the gas inlet and outlet holes in the XZ direction of the side wall from the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall by using the best position selection method based on the uniformity judgment method of the light transmission medium;

[0052] A module for maintaining the optimal position of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument and selecting the alternative position of the gas inlet and outlet holes in the Y direction of the side wall;

[0053] A module for determining the final optimal position of the gas inlet and outlet holes from the candidate positions of the gas inlet and outlet holes in the Y direction of the side wall using the optimal position selection method based on the uniformity judgment method of the light transmission medium;

[0054] A module used to simulate the changes in optical imaging quality caused by changes in pressure, medium density, and temperature inside the echelle spectrometer due to the inflation conditions based on the final optimal position of the gas inlet and outlet holes, the mechanical model, and the optical model, and to perform structural optimization simulation according to the changes in optical imaging quality to obtain structural optimization parameters;

[0055] The final optimal position and structural optimization parameters of the gas inlet and outlet holes are used to perform structural optimization on the echelle grating spectrometer; after the structural optimization, an inert gas-filled wide-band echelle grating spectrometer is obtained.

[0056] The present invention also proposes a spectrometer, and its technical solution is as follows:

[0057] The spectrometer is an inert gas-filled wide-band echelle grating spectrometer; the inert gas-filled wide-band echelle grating spectrometer is obtained by optimizing the structure of the echelle grating spectrometer using the above-mentioned spectrometer structure optimization method based on fluid model analysis.

[0058] The present invention also proposes a computer device, and its technical solution is as follows:

[0059] A computer device comprises: a processor and a memory, wherein the memory is used to store executable instructions of the processor, and the processor is configured to execute the above-mentioned spectrometer structure optimization method based on fluid model analysis by executing the executable instructions.

[0060] The present invention also proposes a computer storage medium, and its technical solution is as follows:

[0061] A computer storage medium stores a computer program, and when the computer program is run, the above-mentioned spectrometer structure optimization method based on fluid model analysis is executed.

[0062] The present invention also proposes a computer program product, and its technical solution is as follows:

[0063] A computer program product includes a computer program / instruction, which implements the steps of the above-mentioned spectrometer structure optimization method based on fluid model analysis when executed by a processor.

[0064] The present invention has the following beneficial effects:

[0065] 1. The spectrometer structure optimization method based on fluid model analysis described in the present invention can clearly and accurately set the positions of gas inlet and outlet holes of the gas-filled spectrometer, thereby reducing the impact of argon gas filling turbulence on components.

[0066] 2. The present invention discloses a method for optimizing the structure of a spectrometer based on fluid model analysis, and uses a fluid analysis method to clarify the changes in pressure, medium density, and temperature inside the spectrometer due to inflation, thereby clarifying the impact of errors on the optomechanical system, and can guide the optimization and compensation of the optical and mechanical systems, thereby improving the measurement accuracy and stability of the medium-step grating spectrometer.

[0067] 3. The spectrometer structure optimization method based on fluid model analysis described in the present invention, the inert gas-filled wide-band medium-step grating spectrometer obtained after the structure optimization, can reduce the extreme ultraviolet spectrum absorption and expand the detection spectrum range by filling the instrument with inert gas.

[0068] 4. The spectrometer structure optimization method based on fluid model analysis described in the present invention, the inert gas-filled wide-band medium-step grating spectrometer obtained after structure optimization can be used for online multi-index detection of gasoline components in industrial sites, and can also be used in other situations where the spectral detection range needs to be expanded, such as molten steel composition detection in steel mills, production process control in metallurgy, casting, machinery and metal processing, etc. It is the preferred spectrometer for advanced analysis systems such as laser induced plasma spectroscopy, microwave plasma torch, inductively coupled plasma atomic emission spectroscopy, etc.

[0069] The spectrometer structure optimization method, device and spectrometer based on fluid model analysis described in the present invention are suitable for structural optimization of a medium-step grating spectrometer to detect far-ultraviolet spectra. BRIEF DESCRIPTION OF THE DRAWINGS

[0070] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0071] Figure 1 A schematic flow chart of a method for optimizing a spectrometer structure based on fluid model analysis in one embodiment of the present invention;

[0072] Figure 2 A schematic diagram of the structure of an echelle grating spectrometer in one embodiment of the present invention;

[0073] Figure numerals: 1. adjustment mechanism; 2. focusing lens; 3. middle-step grating; 4. incident hole; 5. collimating lens; 6. reflecting prism; 7. CCD. DETAILED DESCRIPTION

[0074] In order to make the technical solutions and advantages of the present invention more clearly described, the specific implementation methods of the present invention will be further described in detail and completely in conjunction with the accompanying drawings. The various implementation methods described below are only part of the preferred solutions of the present invention, rather than all implementation methods; the various implementation methods described below are intended to explain the present invention and cannot be understood as limitations on the present invention; the reasonable combination of technical features defined in the various implementation methods of the present invention, and all other implementation methods obtained by ordinary technicians in the field without creative work based on the implementation methods of the present invention, are within the scope of protection of the present invention.

[0075] In one embodiment, a method for optimizing the structure of a spectrometer based on fluid model analysis is provided, wherein the spectrometer is an echelle grating spectrometer, and the method comprises the following steps:

[0076] Steps for obtaining a model of an echelle spectrometer;

[0077] The model of the echelle grating spectrometer includes the optical model, the mechanical model and the model of the fluid inside the instrument;

[0078] A step for selecting candidate positions of gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument;

[0079] A step for determining the best position of the gas inlet and outlet holes in the XZ direction of the side wall from the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall using the best position selection method based on the uniformity judgment method of the light transmission medium;

[0080] A step for maintaining the optimal position of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument and selecting an alternative position of the gas inlet and outlet holes in the Y direction of the side wall;

[0081] A step for determining the final optimal position of the gas inlet and outlet hole from the candidate positions of the gas inlet and outlet hole in the Y direction of the side wall using an optimal position selection method based on the uniformity judgment method of the light transmission medium;

[0082] A step for simulating the change in optical imaging quality caused by changes in pressure, medium density and temperature inside the echelle grating spectrometer due to the inflation conditions based on the final optimal position of the gas inlet and outlet holes, the mechanical model and the optical model, and performing structural optimization simulation according to the change in optical imaging quality to obtain structural optimization parameters;

[0083] The final optimal position and structural optimization parameters of the gas inlet and outlet holes are used to perform structural optimization on the echelle grating spectrometer; after the structural optimization, an inert gas-filled wide-band echelle grating spectrometer is obtained.

[0084] In this embodiment, the optimal positions of the gas inlet and outlet holes in the XZ direction and the Y direction of the side wall are determined respectively to obtain the final optimal positions of the gas inlet and outlet holes on the three-dimensional model, so that the influence of the positions of the gas inlet and outlet holes on the changes of the internal argon gas (inert gas) is minimized and the uniformity of the argon gas fluid is optimal.

[0085] In this embodiment, the internal fluid model of the echelle grating spectrometer can be constructed using a 3D solid direct modeling software (such as Space Claim). For example, the mechanical system of the spectrometer is imported into Space Claim to construct the internal fluid model of the instrument.

[0086] In this embodiment, the structure optimization method can be performed on the basis of an existing actual echelle grating spectrometer, or a wide-band echelle grating spectrometer filled with inert gas can be directly designed:

[0087] If the structure optimization is based on the existing actual mid-step grating spectrometer:

[0088] The model of the echelle grating spectrometer is obtained by modeling the existing actual echelle grating spectrometer using modeling software;

[0089] If you are directly designing an inert gas filled wide band mid-step grating spectrometer:

[0090] The model of the echelle grating spectrometer is directly designed using modeling design software, and its design method is as follows:

[0091] Firstly, the optical system design of the echelle grating spectrometer is carried out according to the spectrometer indicators to obtain the optical model;

[0092] Cooperate with the optical system design to design the mechanical structure of the echelle grating spectrometer (fix the optical device) and obtain the mechanical model;

[0093] According to the mechanical model, the internal gas part is filled to obtain the fluid model.

[0094] It should be noted that the ideal method for measuring the extreme ultraviolet band with an echelle grating spectrometer is a vacuum state, but the vacuum pump and other devices that provide a vacuum environment are relatively complex, have large noise interference, and often do not meet the explosion-proof and vibration requirements of industrial sites. The method of filling with inert gas (such as argon) is lower in cost and can meet the explosion-proof and vibration requirements of industrial sites.

[0095] In addition, in one embodiment, the selection conditions of the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall of the fluid model inside the instrument are as follows:

[0096] Selection condition 1: The uniformity of the light transmission medium should be ensured as much as possible;

[0097] Selection condition 2: Try to ensure that the gas (such as argon) inside the instrument is quickly filled and evenly and stably;

[0098] Selection condition 3: It should be as far away as possible from the location where optical precision components are placed to avoid interference caused by vibration during the inflation process that affects the precision of the optical system;

[0099] Selection condition 4: Avoid direct exposure of the turbulence generated by inflation to the surface of optical components to prevent ghost spots from appearing on the components.

[0100] In addition, in one embodiment, the optimal position selection method includes the following steps:

[0101] An iterative analysis is performed on each candidate position of the gas inlet and outlet, and the candidate position of the gas inlet and outlet with the highest uniformity of the light transmission medium is used as the optimal position of the gas inlet and outlet; wherein the process of each iterative analysis is as follows;

[0102] Select any candidate position of a gas inlet and outlet hole, open the gas inlet and outlet hole in the internal fluid model of the instrument, and obtain the internal fluid model of the instrument after the hole is opened;

[0103] Meshing the fluid model inside the instrument after the hole is opened to obtain the fluid model after meshing;

[0104] The fluid model after meshing is analyzed, and based on the uniformity judgment method of the light transmission medium, the uniformity of the light transmission medium corresponding to any candidate position of the gas inlet and outlet is judged.

[0105] In this implementation, Mesh can be used for grid division.

[0106] In this implementation, when performing grid division, the grid can be encrypted to improve the analysis accuracy.

[0107] In this implementation, fluent simulation can be used to perform fluid model analysis.

[0108] In addition, in one embodiment: a fluid model analysis is performed on the meshed fluid model, and based on the uniformity judgment method of the light transmission medium, the uniformity of the light transmission medium corresponding to any candidate position of the gas inlet and outlet is judged as follows:

[0109] Import the meshed fluid model into the Fluent simulation software;

[0110] Set up the simulation environment, including inflation environment setting and fluid dynamics model parameter setting; fluid dynamics model parameter setting includes material properties, operating conditions, boundary conditions and turbulence model;

[0111] Set the solution algorithm, convergence factor and residual value;

[0112] After initialization, the Fluent simulation software is started for iterative analysis. When the iterative residual value is less than the set value, the system is considered to have converged and reached a stable state. The fluid model analysis results are obtained to determine the uniformity of the light transmission medium corresponding to the alternative position of any gas inlet and outlet hole.

[0113] In addition, in one embodiment, the meshing of the fluid model inside the instrument after the hole is opened to obtain the fluid model after meshing includes a mesh dependence test step, as follows:

[0114] Perform surface meshing on the fluid model inside the instrument after the hole is opened;

[0115] When dividing the surface mesh, a minimum surface mesh size is given, and multiple maximum mesh sizes to be selected are set accordingly;

[0116] According to different maximum grid sizes to be selected, the changes in the argon distribution in the principal light plane of the internal fluid model of the instrument after the hole is opened are analyzed;

[0117] According to the argon inflow in the main light plane of the internal fluid model of the instrument after the hole is opened, the argon content at different times is obtained; under different grid sizes, if the cumulative content change rate at the same time is less than 3%, it is considered that the current grid quality does not affect the analysis accuracy, and the current grid size does not need to be reduced;

[0118] After weighing the mesh size and model calculation quality, the final maximum mesh size is obtained.

[0119] It should be noted that using fluid model analysis software (such as Fluent simulation software) to analyze and simulate such a complex and sophisticated model is a great challenge to the existing instrument design and computing power, so it is necessary to strike a balance between mesh quality and computing power. Meshing is the key to fluid dynamics analysis and simulation. The degree of matching between meshing and calculation targets and the quality of meshes directly determine the accuracy of simulation.

[0120] In this embodiment, when performing mesh division, a mesh dependency test step is used to determine the optimal number of cells (maximum mesh size) selected for modeling the internal fluid model (gas model) of the spectrometer, so as to achieve a balance between mesh quality and computing power.

[0121] In addition, in one embodiment, the minimum surface grid size is set to 0.001m; the maximum grid sizes to be selected are set to 0.256m, 0.128m, 0.064m, 0.032m, 0.016m, 0.008m, 0.004m, and 0.002m respectively; and the final maximum grid size is 0.008m.

[0122] In addition, in one embodiment, the uniformity determination method of the light transmission medium is as follows:

[0123] The uniformity of the light transmission medium is judged by the relative standard deviation;

[0124]

[0125]

[0126] In the formula, CV is the relative standard deviation; S is the standard deviation; is the density value of the jth sampling point; is the average density of all sampling points; n is the number of sampling points;

[0127] The uniformity of the fluid is judged by comparing the CV values ​​under different conditions. The smaller the CV value, the higher the uniformity of the fluid.

[0128] In this embodiment, the relative standard deviation CV represents a measure of relative variation and is a dimensionless value that can be used to compare population discreteness with significantly different means, and can also be used to compare the degree of improvement in flow field uniformity.

[0129] In addition, in one embodiment, the method is used to simulate the optical imaging quality changes caused by the pressure, medium density, and temperature changes inside the echelle grating spectrometer due to the inflation conditions based on the final optimal position of the gas inlet and outlet holes, the mechanical model, and the optical model, and perform structural optimization simulation according to the optical imaging quality changes to obtain the steps of structural optimization parameters as follows:

[0130] According to the final optimal position of the gas inlet and outlet holes, the pressure, medium density and temperature changes caused by the filling conditions inside the echelle grating spectrometer are simulated to obtain the simulation results of pressure, medium density and temperature changes;

[0131] The simulation results of pressure and temperature changes are coupled to the static analysis module to analyze the deformation of the mechanical system and optical elements of the echelle grating spectrometer; based on the deformation of the mechanical system and optical elements, the optical imaging quality of the optical system of the echelle grating spectrometer is analyzed;

[0132] According to the medium density simulation results, the refractive index change caused by the medium density change is analyzed, and the optical imaging quality of the optical system of the echelle grating spectrometer is analyzed;

[0133] Determine whether the difference between the optical imaging quality and the given optical imaging quality requirement is within a threshold range:

[0134] If it is within the threshold range, the echelle grating spectrometer does not require structural optimization;

[0135] Otherwise, the structure of the medium-step grating spectrometer is optimized based on the mechanical model and the optical model until the difference between the optical imaging quality and the given optical imaging quality requirement is within a threshold range, and the structural optimization parameters are obtained.

[0136] In this embodiment, the fluent simulation software can be used to simulate the pressure, medium density and temperature changes.

[0137] In this implementation manner, the static analysis module may adopt the Ansys static analysis module.

[0138] In this implementation, optical design software CODE V or Zemax may be used to analyze the optical imaging quality.

[0139] In this embodiment, the structure optimization of the spectrometer is considered from two aspects: mechanical and optical:

[0140] Mechanical part optimization is to reflect the simulation results to the force analysis:

[0141] Inflation causes uneven force inside the spectrometer, which causes deformation of the mechanical structure, changes in the optical device (angle, surface shape, etc.), which causes the light to not propagate along the original path, which causes the position received by the detector to change, which causes the data to change when restored to the wavelength;

[0142] It should be noted that (there is also the influence of temperature change here. The temperature of argon gas decreases during the gasification process from liquid to gas. The temperature decrease will also cause the surface shape of optical and mechanical components to change);

[0143] The optimization of the optical part is mainly to optimize the optical parameters. The simulation results need to be reflected in the optical parameters, mainly:

[0144] The density of the medium changes, which causes the refractive index to change, causing the light to not propagate along the original path, which causes the position received by the detector to change, which causes the data to change when restored to wavelength.

[0145] It should be noted that the deformation of the mechanical structure will affect the change of optical parameters and ultimately affect the optical imaging quality. The optical imaging quality is used as a criterion for judging the structural optimization results. The deformation of the mechanical structure is caused by inflation, which is charged from the final optimal position of the gas inlet and outlet. The overall process is as follows:

[0146] First, the final optimal position of the gas inlet and outlet holes is obtained;

[0147] Secondly, fill argon (inert gas) from the final optimal position of the gas inlet and outlet holes, and simulate the pressure, medium density and temperature changes after filling;

[0148] Thirdly, the deformation of the mechanical model (i.e., the mechanical system of the spectrometer) is determined based on the simulation results of pressure, medium density, and temperature changes;

[0149] Thirdly, according to the deformation of the mechanical model, determine its influence on the optical parameters of the optical model and analyze the optical imaging quality;

[0150] Thirdly, based on the simulation results of medium density, the refractive index change caused by the medium density change is analyzed, and the optical imaging quality is further analyzed;

[0151] Finally, based on the optical imaging quality, determine whether to perform structural optimization; if structural optimization is required, adjust the structure of the optical model (such as optical parameters such as lens thickness) and the structure of the mechanical model, and optimize iteratively step by step until the difference between the optical imaging quality and the given optical imaging quality requirement is within a threshold range. At this time, the adjustment parameters of the structures of the optical model and the mechanical model are used as structural optimization parameters, which are used as a reference for the structural optimization of the actual medium-step grating spectrometer.

[0152] In addition, in one embodiment, a specific example is provided to analyze the relationship between gas density (medium density) and refractive index:

[0153] The relationship between gas density and refractive index is established based on the Lorentz-Lorenz equation, and the state equation is expressed by the Clausius-Mossotti relationship:

[0154]

[0155] in, is the molecular polarizability, is the relative permittivity, is the number of molecules per unit area;

[0156] Since the refractive index n of the dielectric is:

[0157]

[0158] in, is the relative permeability; for most dielectrics, ;

[0159] Therefore, the refractive index is approximately:

[0160] Substituting the refractive index into the Clausius-Mossotti equation, the relationship between gas density and refractive index is established through the Lorentz-Lorentz equation:

[0161]

[0162] After expanding and correcting the Lorentz-Lorentz equation, the relationship between the high-pressure state equation and the refractive index is expressed as:

[0163]

[0164] in, is the molar density in ;

[0165] The parameters a, b, c, and d are measured and fitted through Fabry-Perot interferometry experiments.

[0166] Specifically, if high-pressure argon gas is filled, the fitting coefficients are a=4.196, b=1.74, c=-85.9, and d=-350.

[0167] Furthermore, combined with the structure of the echelle spectrometer and the conditions such as the filling pressure and temperature, after molar density conversion, when the argon density is 4.097 At this time, the refractive index of the argon fluid is 1.000646.

[0168] In addition, in one embodiment, a specific example is provided to analyze the effect of gas filling on the deflection of the mid-step grating spectrometer:

[0169] (a) Analysis of the impact of mid-step grating:

[0170] Focus on analyzing the angle deviation of the cross-dispersion beam splitter, according to the diffraction equation of the echelle grating:

[0171]

[0172]

[0173] Where m is the spectral diffraction order, λ is the wavelength, is the refractive index of argon fluid, d is the grating constant, is the incident angle, is the exit angle, γ is the offset angle of the echelle grating;

[0174] when When it changes from 1 to 1.000646, the incident angle θ of the incident light with a wavelength of 165nm changes from 28.375 to 28.324 after diffraction by the medium-step grating, and the angle change Δθ=0.051°.

[0175] (b) Analysis of the impact on dispersion prism:

[0176] Similarly, according to the dispersion and spectroscopic process of the prism in the optical system of the echelle grating spectrometer, we have

[0177] ;

[0178] in, is the refractive index of argon fluid, is the refractive index of the prism material, is the incident angle, is the exit angle, σ is the prism vertex angle, when When it changes from 1 to 1.000646, the incident light is split by the prism and the angle of incidence is It changes from 78.522° to 78.408°, and the angle change Δθ=0.114°.

[0179] In addition, in one embodiment, a spectrometer structure optimization device based on fluid model analysis is provided, wherein the spectrometer is an echelle grating spectrometer, and the device includes the following modules:

[0180] Module for obtaining models of echelle spectrometers;

[0181] The model of the echelle grating spectrometer includes the optical model, the mechanical model and the model of the fluid inside the instrument;

[0182] A module for selecting the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument;

[0183] A module for determining the best position of the gas inlet and outlet holes in the XZ direction of the side wall from the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall by using the best position selection method based on the uniformity judgment method of the light transmission medium;

[0184] A module for maintaining the optimal position of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument and selecting the alternative position of the gas inlet and outlet holes in the Y direction of the side wall;

[0185] A module for determining the final optimal position of the gas inlet and outlet holes from the candidate positions of the gas inlet and outlet holes in the Y direction of the side wall using the optimal position selection method based on the uniformity judgment method of the light transmission medium;

[0186] A module used to simulate the changes in optical imaging quality caused by changes in pressure, medium density, and temperature inside the echelle spectrometer due to the inflation conditions based on the final optimal position of the gas inlet and outlet holes, the mechanical model, and the optical model, and to perform structural optimization simulation according to the changes in optical imaging quality to obtain structural optimization parameters;

[0187] The final optimal position and structural optimization parameters of the gas inlet and outlet holes are used to perform structural optimization on the echelle grating spectrometer; after the structural optimization, an inert gas-filled wide-band echelle grating spectrometer is obtained.

[0188] In addition, in one embodiment, a spectrometer is provided, which is an inert gas-filled wide-band echelle grating spectrometer; the inert gas-filled wide-band echelle grating spectrometer adopts the above-mentioned spectrometer structure optimization method based on fluid model analysis to optimize the structure of the echelle grating spectrometer.

[0189] In this embodiment, the inert gas-filled wide-band mid-step grating spectrometer is used to detect far-ultraviolet spectra.

[0190] The technical solution provided by the present invention is further described in detail above through several specific implementation modes in order to highlight the advantages and benefits of the technical solution provided by the present invention. However, the several specific implementation modes described above are not intended to be used as limitations on the present invention. Any reasonable changes and improvements to the present invention, reasonable combinations of implementation modes and equivalent substitutions based on the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A spectrometer structure optimization method based on fluid model analysis, wherein the spectrometer is an echelle grating spectrometer, characterized in that: The method comprises the following steps: Steps for obtaining a model of an echelle spectrometer; The model of the echelle grating spectrometer includes the optical model, the mechanical model and the model of the fluid inside the instrument; A step for selecting candidate positions of gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument; A step for determining the best position of the gas inlet and outlet holes in the XZ direction of the side wall from the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall using the best position selection method based on the uniformity judgment method of the light transmission medium; A step for maintaining the optimal position of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument and selecting an alternative position of the gas inlet and outlet holes in the Y direction of the side wall; A step for determining the final optimal position of the gas inlet and outlet hole from the candidate positions of the gas inlet and outlet hole in the Y direction of the side wall using an optimal position selection method based on the uniformity judgment method of the light transmission medium; A step for simulating the change in optical imaging quality caused by changes in pressure, medium density and temperature inside the echelle grating spectrometer due to the inflation conditions based on the final optimal position of the gas inlet and outlet holes, the mechanical model and the optical model, and performing structural optimization simulation according to the change in optical imaging quality to obtain structural optimization parameters; The final optimal position and structural optimization parameters of the gas inlet and outlet holes are used to perform structural optimization on the echelle grating spectrometer; after the structural optimization, an inert gas-filled wide-band echelle grating spectrometer is obtained.

2. The method for optimizing the structure of a spectrometer based on fluid model analysis according to claim 1, characterized in that: The optimal location selection method comprises the following steps: An iterative analysis is performed on each candidate position of the gas inlet and outlet, and the candidate position of the gas inlet and outlet with the highest uniformity of the light transmission medium is used as the optimal position of the gas inlet and outlet; wherein the process of each iterative analysis is as follows; Select any candidate position of a gas inlet and outlet hole, open the gas inlet and outlet hole in the internal fluid model of the instrument, and obtain the internal fluid model of the instrument after the hole is opened; Meshing the fluid model inside the instrument after the hole is opened to obtain the fluid model after meshing; The fluid model after meshing is analyzed, and based on the uniformity judgment method of the light transmission medium, the uniformity of the light transmission medium corresponding to any candidate position of the gas inlet and outlet is judged.

3. The spectrometer structure optimization method based on fluid model analysis according to claim 2, characterized in that: The meshing of the fluid model inside the instrument after the hole is opened to obtain the fluid model after meshing includes a mesh dependence test step, as follows: Perform surface meshing on the fluid model inside the instrument after the hole is opened; When dividing the surface mesh, a minimum surface mesh size is given, and multiple maximum mesh sizes to be selected are set accordingly; According to different maximum grid sizes to be selected, the changes in the argon distribution in the principal light plane of the internal fluid model of the instrument after the hole is opened are analyzed; According to the argon inflow in the main light plane of the internal fluid model of the instrument after the hole is opened, the argon content at different times is obtained; under different grid sizes, if the cumulative content change rate at the same time is less than 3%, it is considered that the current grid quality does not affect the analysis accuracy, and the current grid size does not need to be reduced; After weighing the mesh size and model calculation quality, the final maximum mesh size is obtained.

4. The method for optimizing the structure of a spectrometer based on fluid model analysis according to claim 2, characterized in that: The method for determining the uniformity of the light transmission medium is as follows: The uniformity of the light transmission medium is judged by the relative standard deviation; In the formula, CV is the relative standard deviation; S is the standard deviation; is the density value of the jth sampling point; is the average density of all sampling points; n is the number of sampling points; The uniformity of the fluid is judged by comparing the CV values ​​under different conditions. The smaller the CV value, the higher the uniformity of the fluid.

5. The method for optimizing the structure of a spectrometer based on fluid model analysis according to claim 1, characterized in that: The method is used to simulate the change in optical imaging quality caused by the pressure, medium density and temperature changes caused by the filling conditions inside the echelle grating spectrometer based on the final optimal position of the gas inlet and outlet holes, the mechanical model and the optical model, and perform structural optimization simulation according to the change in optical imaging quality to obtain the steps of structural optimization parameters as follows: According to the final optimal position of the gas inlet and outlet holes, the pressure, medium density and temperature changes caused by the filling conditions inside the echelle grating spectrometer are simulated to obtain the simulation results of pressure, medium density and temperature changes; The simulation results of pressure and temperature changes are coupled to the static analysis module to analyze the deformation of the mechanical system and optical elements of the echelle grating spectrometer; based on the deformation of the mechanical system and optical elements, the optical imaging quality of the optical system of the echelle grating spectrometer is analyzed; According to the medium density simulation results, the refractive index change caused by the medium density change is analyzed, and the optical imaging quality of the optical system of the echelle grating spectrometer is analyzed; Determine whether the difference between the optical imaging quality and the given optical imaging quality requirement is within a threshold range: If it is within the threshold range, the echelle grating spectrometer does not require structural optimization; Otherwise, the structure of the medium-step grating spectrometer is optimized based on the mechanical model and the optical model until the difference between the optical imaging quality and the given optical imaging quality requirement is within a threshold range, and the structural optimization parameters are obtained.

6. A spectrometer structure optimization device based on fluid model analysis, wherein the spectrometer is a medium-step grating spectrometer, characterized in that: The device comprises the following modules: Module for obtaining models of echelle spectrometers; The model of the echelle grating spectrometer includes the optical model, the mechanical model and the model of the fluid inside the instrument; A module for selecting the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument; A module for determining the best position of the gas inlet and outlet holes in the XZ direction of the side wall from the candidate positions of the gas inlet and outlet holes in the XZ direction of the side wall by using the best position selection method based on the uniformity judgment method of the light transmission medium; A module for maintaining the optimal position of the gas inlet and outlet holes in the XZ direction of the side wall on the internal fluid model of the instrument and selecting the alternative position of the gas inlet and outlet holes in the Y direction of the side wall; A module for determining the final optimal position of the gas inlet and outlet holes from the candidate positions of the gas inlet and outlet holes in the Y direction of the side wall using the optimal position selection method based on the uniformity judgment method of the light transmission medium; A module used to simulate the changes in optical imaging quality caused by changes in pressure, medium density, and temperature inside the echelle spectrometer due to the inflation conditions based on the final optimal position of the gas inlet and outlet holes, the mechanical model, and the optical model, and to perform structural optimization simulation according to the changes in optical imaging quality to obtain structural optimization parameters; The final optimal position and structural optimization parameters of the gas inlet and outlet holes are used to perform structural optimization on the echelle grating spectrometer; after the structural optimization, an inert gas-filled wide-band echelle grating spectrometer is obtained.

7. A spectrometer, characterized in that The spectrometer is an inert gas-filled wide-band echelle grating spectrometer; the inert gas-filled wide-band echelle grating spectrometer is obtained by optimizing the structure of the echelle grating spectrometer using the spectrometer structure optimization method based on fluid model analysis described in any one of claims 1 to 5.

8. A computer device comprising: A processor and a memory, characterized in that the memory is used to store executable instructions of the processor, and the processor is configured to execute the spectrometer structure optimization method based on fluid model analysis as described in any one of claims 1 to 5 by executing the executable instructions.

9. A computer storage medium, characterized in that The storage medium stores a computer program, and when the computer program is run, the method for optimizing the structure of a spectrometer based on fluid model analysis according to any one of claims 1 to 5 is executed.

10. A computer program product comprising a computer program / instructions, characterized in that When the computer program / instructions are executed by a processor, the steps of the spectrometer structure optimization method based on fluid model analysis described in any one of claims 1 to 5 are implemented.

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