Chip transfer handover device
By adopting the transfer base, vertical plate, rotating rod, transverse plate and suction cup structure in the chip transfer equipment, the problem of position deviation caused by external collision during the transmission process is solved, and the stable directional transfer and high precision of the chip are achieved Handover.
Patent Information
- Application Number
- CN202411292062.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-14
- Publication Date
- 2024-12-27
AI Technical Summary
The existing chip transfer equipment deviates from the chip position due to external collision during transmission, and cannot be stable to the designated position, reducing the stability of the transfer and handover process.
A chip transfer and transfer equipment is designed, using a transfer base, vertical plate, rotary rod, horizontal plate, guide hole, guide rod, suction cup and suction adsorption mechanism. Through the stable adsorption of the suction cup and the reciprocating swing of the transverse plate, the chip is ensured. Accuracy and stability during transfer.
It effectively prevents the chip from deviating due to external influences during lateral transfer, ensures the accuracy and stability of chip transfer, and improves the transfer effect.
Smart Images
Figure CN119208221A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of chip production and processing, in particular to chip transfer and handover equipment. Background Art
[0002] Chip transfer and handover equipment is mainly used to transfer chips from one workstation or equipment to another and complete the handover process during semiconductor manufacturing and packaging.
[0003] After searching, the patent document with the announcement number CN216749838U discloses a chip transfer device. The chip transfer device Z provided by the transfer device can improve the efficiency and speed of chip transfer through the technical scheme of "providing module for providing at least one chip C; carrying module for carrying at least one substrate S for placing chip C; driving module located between the providing module and the carrying module, for driving the conveying film F carrying chip C"; can improve the efficiency and speed of chip transfer through the technical scheme of "carrying at least one chip C by means of conveying film F; using the driving module to drive the conveying film F, so that the chip C on the conveying film F is displaced to the position corresponding to the carrying module; and displacing by means of the carrying module or the driving module, so that the chip C on the conveying film F is transferred to the substrate S". However, the above-mentioned transfer equipment supports and transports the chip through a conveying film during the chip transfer process. The conveying film body is relatively soft and is easily shaken by external collision during the transmission process, causing the chip on the conveying film to slide along the film body, causing the chip to deviate from its position. As a result, the chip cannot be moved to the specified position as required by the conveying requirements, reducing the stability of the chip transfer process and requiring manual intervention for position adjustment. Summary of the invention
[0004] 1. Technical issues to be resolved In view of the deficiencies in the prior art, the present invention provides a chip transfer and handover device that has the advantage of being able to transfer and handover chips in a directional and stable manner, ensuring the stability of the chip during the transfer process, and enabling the chip to be transferred to a designated processing position. This solves the problem that the conveying film body is relatively soft and is easily shaken by external collisions during the transmission process, causing the chip on the conveying film to slide along with the film body, causing the chip to deviate from its position, and resulting in the chip being unable to be moved to the designated position as required by the conveying.
[0005] (II) Technical solution To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a chip transfer and handover device comprises a transfer base, a vertical plate is fixedly provided at the middle end of the back side of the transfer base, a rotating rod is rotatably penetrated inside the upper end of the vertical plate, a horizontal plate is fixedly sleeved at the front end of the rotating rod, the horizontal plate is in contact with the vertical plate, a guide hole is opened inside the horizontal plate, the guide hole is a strip hole, a guide rod is slidably penetrated inside the guide hole, a first connecting plate is rotatably sleeved at the front end of the guide rod, a pressure tube is fixedly provided at the bottom of the first connecting plate, a syringe is provided at the lower end of the pressure tube, a suction cup is connected to the bottom of the syringe, and an air suction adsorption mechanism for driving the syringe to draw air is provided between the inner side wall of the pressure tube and the pressing head of the syringe; A first spring is sleeved on the upper end of the piston rod of the syringe, and two ends of the first spring are fixedly connected to the syringe and the pressing head of the syringe respectively; A positioning ring is fixedly provided on the top of the pressing head of the syringe, and a positioning mechanism for limiting the position of the positioning ring is provided between the positioning ring and the inner wall of the pressing tube; A transfer and handover mechanism for driving the horizontal plate to swing back and forth is arranged between the rear end of the rotating rod and the back side of the vertical plate.
[0006] Preferably, the suction adsorption mechanism includes a pressure plate, which is fixedly arranged on the upper end of the inner wall of the pressure tube, and a fixing rod is rotatably provided on the inner wall of the pressure tube, and a push plate is rotatably sleeved on the rod wall of the fixing rod, and the two ends of the push plate are respectively in contact and cooperate with the pressure plate and the pressing head of the syringe.
[0007] Preferably, the inner wall of the pressure tube is provided with slide grooves on both the front and rear sides, and the outer wall of the syringe is fixed with two symmetrically arranged slide plates, and the two slide plates are slidably arranged in the two slide grooves at ends away from each other.
[0008] Preferably, the positioning mechanism includes a magnetic column, which is slidably inserted into the back side of the pressing tube. A positioning rod is fixedly provided at one end of the magnetic column close to the syringe, and the positioning rod is plugged into a positioning ring. A second spring is sleeved on the outer wall of the magnetic column, and the two ends of the second spring are respectively fixedly connected to the magnetic column and the inner wall of the pressing tube.
[0009] Preferably, a mounting plate is fixedly provided on the top of the transfer base, an adsorption magnet is fixedly embedded on the side wall of the mounting plate, and the magnetic column is magnetically matched with the adsorption magnet.
[0010] Preferably, the transfer and handover mechanism includes a gear and a rack, a fixed plate is fixedly provided on the upper end of the back side of the vertical plate, a motor is fixedly provided on the bottom of the fixed plate, the output shaft of the motor passes through the fixed plate and is fixedly provided with a reciprocating screw, the rack is threadedly sleeved on the outside of the reciprocating screw, the rack is in contact with and cooperates with the vertical plate and is meshed with the gear, and the gear is fixedly sleeved on the rear end of the rotating rod.
[0011] Preferably, the rear end rotating sleeve of the guide rod is provided with a second connecting plate, the bottom of the second connecting plate is fixedly provided with a telescopic rod, the back side of the transfer base is fixedly provided with a limit rod, the limit rod is a U-shaped rod, and the rod wall sliding sleeve is provided with a slider, and the telescopic rod is fixedly connected to the slider.
[0012] Preferably, two symmetrically arranged transfer grooves are provided on the top of the transfer base.
[0013] Preferably, a push slope is provided on the lower side of one end of the positioning rod close to the syringe.
[0014] (III) Beneficial effects Compared with the prior art, the present invention provides a chip transfer and handover device, which has the following beneficial effects: 1. The chip transfer and handover equipment can stably adsorb the chip on the surface of the transfer base through the transfer base, vertical plate, rotating rod, horizontal plate, guide hole, guide rod, first connecting plate, pressing tube, syringe, suction cup and suction adsorption mechanism and positioning mechanism, so that the suction cup will not deviate from the position due to external influence during the lateral transfer process, thereby ensuring the chip transfer accuracy and stability.
[0015] 2. The chip transfer and handover equipment is equipped with a transfer base, a vertical plate, a rotating rod, a horizontal plate, a guide hole, a guide rod and a transfer and handover mechanism. After the chip is adsorbed, the horizontal plate can reciprocate to move the suction cup back and forth between the two transfer grooves on the transfer base, thereby facilitating stable and directional transfer of the chip and improving the transfer effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 This is a schematic diagram of the chip transfer and handover equipment structure proposed by the present invention; Figure 2 for Figure 1 Rear view of Figure 3 for Figure 1 A magnified view of the structure of the local A part; Figure 4 for Figure 3 The structure enlarged diagram of the local B part; Figure 5 for Figure 2 The structure of the local C part is enlarged; Figure 6 for Figure 4 Schematic diagram of the three-dimensional structure of the central magnetic column and positioning rod.
[0017] In the figure: 1 transfer base, 2 vertical plate, 3 rotating rod, 4 horizontal plate, 5 guide hole, 6 guide rod, 7 first connecting plate, 8 pressure tube, 9 syringe, 10 suction cup, 11 first spring, 12 positioning ring, 13 pressure plate, 14 fixing rod, 15 push plate, 16 slide plate, 17 magnetic column, 18 positioning rod, 19 second spring, 20 mounting plate, 21 adsorption magnet, 22 gear, 23 rack, 24 fixing plate, 25 motor, 26 reciprocating screw, 27 second connecting plate, 28 telescopic rod, 29 limit rod, 30 slider, 31 transfer groove. DETAILED DESCRIPTION
[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, other embodiments obtained by ordinary technicians in this field without creative work are all within the scope of protection of the present invention.
[0019] See also Figure 1-6 , the chip transfer and handover equipment comprises a transfer base 1, the top of the transfer base 1 is provided with two symmetrically arranged transfer grooves 31, a vertical plate 2 is fixedly arranged at the middle end of the back side of the transfer base 1, a rotating rod 3 is rotatably penetrated inside the upper end of the vertical plate 2, a front end of the rotating rod 3 is fixedly sleeved with a horizontal plate 4, the horizontal plate 4 is in contact with the vertical plate 2, a guide hole 5 is arranged inside the horizontal plate 4, the guide hole 5 is a strip hole, a guide rod 6 is slidably penetrated inside the guide hole 5, a first connecting plate 7 is rotatably sleeved at the front end of the guide rod 6, a pressing tube 8 is fixedly arranged at the bottom of the first connecting plate 7, a syringe 9 is arranged at the lower end of the pressing tube 8, a suction cup 10 is connected to the bottom of the syringe 9, a first spring 11 is sleeved at the upper end of the piston rod of the syringe 9, two ends of the first spring 11 are respectively fixedly connected to the syringe 9 and the pressing head of the syringe 9, and an air suction adsorption mechanism for driving the syringe 9 to draw is arranged between the inner side wall of the pressing tube 8 and the pressing head of the syringe 9; Slide grooves are provided on the front and back sides of the inner wall of the pressing tube 8. Two symmetrically arranged slide plates 16 are fixedly provided on the outer wall of the syringe 9. The two slide plates 16 are slidably arranged in the two slide grooves at one end away from each other. The air suction adsorption mechanism includes a pressing plate 13. The pressing plate 13 is fixedly arranged on the upper end of the inner wall of the pressing tube 8. A fixing rod 14 is rotatably provided on the inner wall of the pressing tube 8. A push plate 15 is rotatably sleeved on the rod wall of the fixing rod 14. The two ends of the push plate 15 are respectively in contact and cooperate with the pressing plate 13 and the pressing head of the syringe 9.
[0020] Before transferring the chip, place the chip in the transfer groove 31 on the right side of the top of the mobile base 1, and then drive the rotating rod 3 to rotate, so that the cross plate 4 rotates around the rotating rod 3. At this time, the guide rod 6 slides in the guide hole 5 and moves to the right. When the guide rod 6 is continuously pushed by the cross plate 4, the right side movement position of the guide rod 6 is fixed. At this time, the cross plate 4 continues to rotate and squeezes the guide rod 6, so that the guide rod 6 squeezes the pressure tube 8 through the first connecting plate 7, so that the suction cup 10 at the bottom of the syringe 9 can contact the surface of the chip. As the pressure tube 8 continues to be pressed, the pressure plate 13 begins to The push plate 15 pushes, so that the push plate 15 starts to rotate under the support of the fixed rod 14. At this time, the other end of the push plate 15 is tilted and pushes the pressing head of the syringe 9, so that the syringe 9 can perform the vacuum work and the suction cup 10 can stably adsorb the chip. As the push plate 15 continues to rotate, the pressing head of the syringe 9 stretches the first spring 11 and fixes the position of the pressing head of the syringe 9. At this time, the position of the chip is fixed, and the rotating rod 3 can be flipped to make the cross plate 4 flip. At this time, the guide rod 6 slides to the inner left side of the guide hole 5, so that the chip can be quickly transferred and handed over.
[0021] In order to determine the position of the syringe 9 after the syringe 9 is pushed, the chip can be transferred and placed at the handover position, such as Figure 1 and Figure 3-4 as well as Figure 6 As shown, a positioning ring 12 is fixedly provided on the top of the pressing head of the syringe 9, and a positioning mechanism for limiting the position of the positioning ring 12 is provided between the positioning ring 12 and the inner wall of the pressing tube 8, the positioning mechanism includes a magnetic column 17, and the magnetic column 17 is slidably penetrated into the back side of the pressing tube 8, and a positioning rod 18 is fixedly provided on the end of the magnetic column 17 close to the syringe 9, and the positioning rod 18 is plugged into the positioning ring 12, and a pushing slope is provided on the lower side of the end of the positioning rod 18 close to the syringe 9, and a second spring 19 is sleeved on the outer wall of the magnetic column 17, and the two ends of the second spring 19 are respectively fixedly connected to the magnetic column 17 and the inner wall of the pressing tube 8, and a mounting plate 20 is fixedly provided on the top of the transfer base 1, and an adsorption magnet 21 is fixedly embedded on the side wall of the mounting plate 20, and the magnetic column 17 and the adsorption magnet 21 are magnetically matched.
[0022] When the pressing head of the syringe 9 is continuously pushed, the positioning rod 12 begins to contact the pushing inclined surface of the positioning rod 18 and squeeze the positioning rod 18, so that the positioning rod 18 drives the magnetic column 17 to move and squeeze the second spring 19. As the pressing head of the syringe 9 continues to move upward, the positioning rod 18 can be inserted into the positioning ring 12 under the elastic force recovery of the second spring 19. At this time, the position of the syringe 9 is fixed. When the cross plate 4 is reversed and the chip is transferred, as the guide rod 6 continues to move, the magnetic column 17 and the outer wall adsorption magnet 21 of the mounting plate 20 are magnetically matched, so that the magnetic column 17 is adsorbed and drives the positioning rod 18 to be pulled out of the positioning ring 12. At this time, under the elastic force recovery of the first spring 11, the pressing head of the syringe 9 rebounds quickly and pushes the adsorbed air in the syringe 9 to between the suction cup 10 and the chip, so that the suction cup 10 cannot adsorb the chip and the chip is away from the suction cup and set in the left transfer groove 31, thereby completing the transfer and handover of the chip.
[0023] In order to enable the horizontal plate 4 to swing back and forth and continuously transfer the chips, Figure 2 So and Figure 5 As shown, a transfer and handover mechanism for driving the horizontal plate 4 to swing back and forth is provided between the rear end of the rotating rod 3 and the back side of the vertical plate 2, and the transfer and handover mechanism includes a gear 22 and a rack 23. A fixed plate 24 is fixedly provided at the upper end of the back side of the vertical plate 2, and a motor 25 is fixedly provided at the bottom of the fixed plate 24. The output shaft of the motor 25 passes through the fixed plate 24 and is fixedly provided with a reciprocating screw rod 26. The rack 23 is threadedly sleeved on the outer side of the reciprocating screw rod 26. The rack 23 contacts and cooperates with the vertical plate 2 and is meshed with the gear 22. The gear 22 is fixedly sleeved with the rear end of the rotating rod 3. A second connecting plate 27 is rotatably sleeved at the rear end of the guide rod 6, a telescopic rod 28 is fixedly provided at the bottom of the second connecting plate 27, a limiting rod 29 is fixedly provided on the back side of the transfer base 1, the limiting rod 29 is a U-shaped rod, and a sliding block 30 is provided on the rod wall sliding sleeve, and the telescopic rod 28 is fixedly connected to the sliding block 30.
[0024] In order to be able to continuously transfer and hand over the chips, the reciprocating screw 26 can be rotated by controlling the motor 25. At this time, the rack 23 moves back and forth under the drive of the reciprocating screw 26, and through the cooperation of the rack 23 and the gear 22, the rotating rod 3 can drive the cross plate 4 to rotate back and forth, so that the guide rod 6 swings back and forth in the guide hole 5 to adsorb and transfer the chip. During the sliding process of the guide rod 6, under the connection of the second connecting plate 27 and the telescopic rod 28, and in conjunction with the sliding of the limit rod 29 and the slider 30, the guide rod 6 drives the pressure tube 8 and the syringe 9 to always remain in a vertical setting, so that the chip can be stably transported, thereby improving the transportation accuracy and stability.
[0025] It should be noted that the term "comprises" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also includes other elements that are not explicitly listed, or also includes elements inherent to such process, method, article, or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article, or device that includes the element.
[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A chip transfer and handover device, comprising a transfer base (1), characterized in that: A vertical plate (2) is fixedly provided at the middle end of the back side of the transfer base (1), a rotating rod (3) is rotatably penetrated inside the upper end of the vertical plate (2), a horizontal plate (4) is fixedly sleeved at the front end of the rotating rod (3), the horizontal plate (4) is in contact with and cooperates with the vertical plate (2), a guide hole (5) is opened inside the horizontal plate (4), the guide hole (5) is a strip hole, a guide rod (6) is slidably penetrated inside the guide hole (5), a first connecting plate (7) is rotatably sleeved at the front end of the guide rod (6), a pressing tube (8) is fixedly provided at the bottom of the first connecting plate (7), a syringe (9) is provided at the lower end of the pressing tube (8), a suction cup (10) is connected to the bottom of the syringe (9), and an air suction adsorption mechanism for driving the syringe (9) to suck is provided between the inner side wall of the pressing tube (8) and the pressing head of the syringe (9); A first spring (11) is sleeved on the upper end of the piston rod of the syringe (9), and two ends of the first spring (11) are respectively fixedly connected to the syringe (9) and the pressing head of the syringe (9); A positioning ring (12) is fixedly provided on the top of the pressing head of the syringe (9), and a positioning mechanism for limiting the position of the positioning ring (12) is provided between the positioning ring (12) and the inner wall of the pressing tube (8); A transfer and handover mechanism for driving the horizontal plate (4) to swing back and forth is provided between the rear end of the rotating rod (3) and the back side of the vertical plate (2).
2. The chip transfer and handover equipment according to claim 1, characterized in that: The air suction adsorption mechanism comprises a pressing plate (13), wherein the pressing plate (13) is fixedly arranged at the upper end of the inner wall of the pressing tube (8), a fixing rod (14) is rotatably arranged on the inner wall of the pressing tube (8), a push plate (15) is rotatably sleeved on the rod wall of the fixing rod (14), and two ends of the push plate (15) are respectively in contact with and cooperate with the pressing plate (13) and the pressing head of the syringe (9).
3. The chip transfer and handover equipment according to claim 1, characterized in that: The inner wall of the pressure tube (8) is provided with sliding grooves on both the front and rear sides, and the outer wall of the syringe (9) is fixed with two symmetrically arranged slide plates (16), and the two slide plates (16) are slidably arranged in the two sliding grooves at ends away from each other.
4. The chip transfer and handover equipment according to claim 1, characterized in that: The positioning mechanism comprises a magnetic column (17), the magnetic column (17) is slidably arranged inside the back side of the pressure tube (8), a positioning rod (18) is fixedly arranged at one end of the magnetic column (17) close to the syringe (9), the positioning rod (18) is plug-fitted with the positioning ring (12), and a second spring (19) is sleeved on the outer wall of the magnetic column (17), and the two ends of the second spring (19) are respectively fixedly connected to the magnetic column (17) and the inner wall of the pressure tube (8).
5. The chip transfer and handover equipment according to claim 4, characterized in that: A mounting plate (20) is fixedly provided on the top of the transfer base (1), an adsorption magnet (21) is fixedly embedded on the side wall of the mounting plate (20), and the magnetic column (17) and the adsorption magnet (21) are arranged in magnetic cooperation.
6. The chip transfer and handover equipment according to claim 1, characterized in that: The transfer and handover mechanism comprises a gear (22) and a rack (23); a fixed plate (24) is fixedly provided at the upper end of the back side of the vertical plate (2); a motor (25) is fixedly provided at the bottom of the fixed plate (24); an output shaft of the motor (25) passes through the fixed plate (24) and is fixedly provided with a reciprocating screw rod (26); the rack (23) is threadedly sleeved on the outer side of the reciprocating screw rod (26); the rack (23) is in contact with and matched with the vertical plate (2) and is meshed with the gear (22); and the gear (22) is fixedly sleeved with the rear end of the rotating rod (3).
7. The chip transfer and handover equipment according to claim 1, characterized in that: A second connecting plate (27) is rotatably sleeved at the rear end of the guide rod (6), a telescopic rod (28) is fixedly mounted at the bottom of the second connecting plate (27), a limiting rod (29) is fixedly mounted on the back side of the transfer base (1), the limiting rod (29) is a U-shaped rod, and a sliding block (30) is slidably sleeved on the rod wall, and the telescopic rod (28) is fixedly connected to the sliding block (30).
8. The chip transfer and handover equipment according to claim 1, characterized in that: The top of the transfer base (1) is provided with two symmetrically arranged transfer grooves (31).
9. The chip transfer and handover equipment according to claim 4, characterized in that: A pushing slope is formed on the lower side of one end of the positioning rod (18) close to the syringe (9).