Low temperature plasma jet generating device

Abstract

The application discloses a low-temperature plasma jet generating device, which is applied to the field of plasma application and comprises a jet generating device main body; the jet generating device main body is a multilayer sleeve structure formed by a plurality of hollow dielectric tubes with different diameters, and gaps exist between adjacent hollow dielectric tubes; a conductive electrode is arranged at each hollow dielectric tube, so that a potential difference exists between adjacent conductive electrodes along the radial direction of the hollow dielectric tube; a hollow dielectric tube exists between adjacent two conductive electrodes and insulates and separates the conductive electrodes; the jet generating device main body comprises a jet outlet and a gas inlet; the gas inlet is in communication with the jet outlet, and an electric field generated due to the potential difference between adjacent conductive electrodes exists in the communication path of the gas inlet and the jet outlet, and the hollow dielectric tube has the penetrability to the electric field. The application separates the structure for generating plasma and emitting plasma into a plurality of separated structures, so that the overall cross-sectional area of the plasma jet can be increased.

Description

Technical Field

[0001] This invention relates to the field of plasma applications, and in particular to a low-temperature plasma jet generator. Background Technology

[0002] Atmospheric pressure cryogenic plasma jets are currently the primary method of application. These jets are generated under atmospheric pressure through airflow and specific gas discharge mechanisms, such as corona discharge, dielectric barrier discharge, and radio frequency discharge. Existing atmospheric pressure cryogenic plasma jets typically have cross-sectional diameters ranging from 1 mm to 8 mm, resulting in insufficient processing area and consequently limiting their large-scale application. A common method to increase the cross-sectional area of ​​cryogenic plasma jets is to arrange multiple jets into an array. However, this method involves interactions between adjacent jet units, causing jet deflection and leaving noticeable gaps, leading to uneven application of the cryogenic plasma jet to the object surface.

[0003] Therefore, how to increase the cross-sectional area of ​​the jet generated by the low-temperature plasma jet generating unit is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a low-temperature plasma jet generator, which solves the problem that the cross-sectional diameter of atmospheric pressure low-temperature plasma jets is generally in the range of 1 mm to 8 mm, resulting in a small processing area, which leads to insufficient processing efficiency and thus limits the large-scale application of low-temperature plasma jets.

[0005] To solve the above-mentioned technical problems, the present invention provides a low-temperature plasma jet generator, including a jet generator body;

[0006] The main body of the jet generating device includes a multi-layer sleeve structure formed by multiple hollow medium tubes of different diameters, and there are gaps between adjacent hollow medium tubes;

[0007] Each of the hollow dielectric tubes is provided with a corresponding conductive electrode, so that there is a potential difference between adjacent conductive electrodes along the radial direction of the hollow dielectric tube; and there is a hollow dielectric tube that insulates and isolates the conductive electrodes between two adjacent conductive electrodes.

[0008] The main body of the jet generating device includes a jet outlet disposed at at least one end along the axial direction of a plurality of hollow dielectric tubes, and a gas inlet for introducing reactive gas into the gap; the gas inlet is connected to the jet outlet, and there is an electric field generated by the potential difference between adjacent conductive electrodes in the conductive path between the gas inlet and the jet outlet, and the hollow dielectric tubes are permeable to the electric field.

[0009] Optionally, the conductive electrode is disposed on the side surface of the corresponding hollow dielectric tube.

[0010] Optionally, in the hollow dielectric tube, a central conductive electrode is arranged axially inside the innermost hollow dielectric tube;

[0011] The conductive electrodes are all disposed on the outer surface of the corresponding hollow dielectric tube.

[0012] Optionally, the potential difference between all adjacent conductive electrodes is the same along the radial direction of the hollow dielectric tube.

[0013] Optionally, each pair of conductive electrodes located at the hollow dielectric tubes is provided with a grounded conductive electrode and a conductive electrode that forms a potential difference with the grounded conductive electrode.

[0014] Optionally, the gaps between all adjacent hollow medium tubes are the same.

[0015] Optionally, the hollow medium tube is a coaxial hollow medium tube.

[0016] Optionally, one end of the hollow medium tube is open along the axial direction, serving as the jet outlet.

[0017] Optionally, the hollow medium tube is fixed by an insulating fixing plug disposed at one end facing away from the jet outlet along the axial direction;

[0018] The gas inlet is located on the side of the hollow medium tube.

[0019] Optionally, the hollow dielectric tube is a structure integrally manufactured;

[0020] The gas inlet is located at one end of the hollow medium tube facing away from the jet outlet along the axial direction.

[0021] As can be seen, the low-temperature plasma jet generator provided by the present invention includes a jet generator body; the jet generator body is a multi-layer sleeve structure formed by multiple hollow dielectric tubes of different diameters, and there is a gap between adjacent hollow dielectric tubes; each hollow dielectric tube is provided with a conductive electrode, so that there is a potential difference between adjacent conductive electrodes along the radial direction of the hollow dielectric tube, and there is an insulating hollow dielectric tube between two adjacent conductive electrodes; the jet generator body includes a jet outlet disposed at at least one end along the axial direction of multiple hollow dielectric tubes, and a gas inlet for introducing reaction gas into the gap, the gas inlet and the jet outlet are connected, and there is an electric field generated by the potential difference between adjacent conductive electrodes in the connection path between the gas inlet and the jet outlet, and the hollow dielectric tube is penetrable to the electric field. The present invention introduces a reactive gas into an electric field region, causing the reactive gas to discharge and generate plasma, which is then ejected. The structure is configured as multiple separate structures separated by a multi-layered sleeve structure. The independent plasma formed in the gap between each pair of adjacent hollow dielectric tubes is ejected through the jet outlet. This enables more precise control of the formed plasma jet, improves the uniformity of plasma jet formation, and increases the overall cross-sectional area of ​​the plasma jet. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of a low-temperature plasma jet generator provided in an embodiment of the present invention;

[0024] Figure 2 A schematic diagram of another low-temperature plasma jet generator provided in an embodiment of the present invention;

[0025] Figure 3 A top view of another cryogenic plasma jet generator provided in an embodiment of the present invention;

[0026] Figure 4 A front view example of another low-temperature plasma jet generator provided in an embodiment of the present invention;

[0027] Figures 1 to 4 The reference numerals in the attached figures are explained as follows:

[0028] 10-Hollow medium tube;

[0029] 20 - Conductive electrode, 21 - Center conductive electrode;

[0030] 31-Jet outlet, 32-Gas inlet;

[0031] 40 - Insulating fixing plug. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] Example 1:

[0034] Please refer to Figure 1 , Figure 1 A schematic diagram of a low-temperature plasma jet generator provided in an embodiment of the present invention. The device may include a main body for the jet generator;

[0035] The main body of the jet generating device includes a multi-layer sleeve structure formed by multiple hollow medium tubes 10 of different diameters, and there are gaps between adjacent hollow medium tubes 10.

[0036] Each hollow dielectric tube 10 is provided with a corresponding conductive electrode 20 so that there is a potential difference between adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10; there is a hollow dielectric tube 10 that insulates and isolates the conductive electrodes 20 between two adjacent conductive electrodes 20.

[0037] The main body of the jet generating device includes a jet outlet 31 disposed at at least one end along the axial direction of a plurality of hollow dielectric tubes 10, and a gas inlet 32 ​​for introducing reactive gas into the gap; the gas inlet 32 ​​is connected to the jet outlet 31, and there is an electric field generated by the potential difference between adjacent conductive electrodes 20 in the conductive path between the gas inlet 32 ​​and the jet outlet 31, and the hollow dielectric tubes 10 are permeable to the electric field.

[0038] It should be noted that in this embodiment... Figure 1This is a cross-sectional schematic diagram of the device. Its two symmetrically arranged parts are integrally formed, creating a single hollow medium tube. In this embodiment, the main body of the jet generating device comprises a multi-layered sleeve structure formed by multiple hollow medium tubes 10 of different diameters. In this multi-layered sleeve structure, the larger diameter hollow medium tube 10 is sleeved on the outside of the smaller diameter hollow medium tube 10, i.e., the larger diameter hollow medium tube 10 is sequentially sleeved on the outside of the smaller diameter hollow medium tube 10 to obtain this multi-layered sleeve structure. It should be further noted that in this embodiment, the hollow medium tubes 10 have different diameters. When the wall thickness of the hollow medium tube 10 is small, the influence of the wall thickness can be ignored. However, when the wall thickness of the hollow medium tube 10 is thick, it is necessary to ensure that the inner diameter of the hollow medium tube 10 located on the outer side is larger than the outer diameter of the hollow medium tube 10 located on the inner side, so as to ensure that the larger diameter hollow medium tube 10 is sleeved on the outside of the smaller diameter hollow medium tube 10. In this embodiment, a conductive electrode 20 is correspondingly provided at each hollow dielectric tube 10, and a potential difference exists between adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10, so that an electric field is formed between two adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10. This electric field is formed on the conductive path between the jet outlet 31 and the gas inlet 32. Gas entering the gap between adjacent hollow dielectric tubes 10 through the gas inlet 32 ​​discharges at the formed electric field to form plasma, and the plasma is ejected through the jet outlet 31. In this embodiment, the conductive electrode 20 provided at the hollow dielectric tube 10 can be set as annular conductive electrode 20 arranged circumferentially along the hollow dielectric tube 10. The conductive electrode 20 can be fixed at the hollow dielectric tube 10 by bonding or spraying. The hollow dielectric tube 10 can be a quartz hollow tube, a glass hollow tube, or a nylon hollow tube. In this embodiment, the gas introduced into the device through the gas inlet 32 ​​can be helium, argon, air, or a mixed gas, etc., which can discharge to generate plasma under the action of an electric field. The length and discharge intensity of the plasma jet formed above can be adjusted by controlling the driving power supply parameters and the airflow rate.

[0039] This embodiment does not limit the specific number of hollow dielectric tubes 10, as long as multiple partitions capable of generating plasma are formed. Specifically, when there is no central conductive electrode 20 at the center of the multi-layered sleeve structure, the number of hollow dielectric tubes 10 should be greater than two to form at least two partitioned structures for generating plasma jets. When there is a central conductive electrode 20 at the center of the multi-layered sleeve structure, the number of hollow dielectric tubes 10 only needs to be greater than one to form at least two partitioned structures for generating plasma jets. This embodiment does not limit the specific placement of the conductive electrode 20 at each hollow dielectric tube 10, as long as it can isolate adjacent conductive electrodes 20 arranged radially along the hollow dielectric tube 10 by at least a portion of the thickness of the hollow dielectric tube 10. For example, each conductive electrode 20 can be disposed on the radial side surface of the corresponding hollow dielectric tube 10, or theoretically, each conductive electrode 20 can be disposed inside the corresponding hollow dielectric tube 10. Furthermore, this embodiment does not limit the specific parameters of the potential difference formed between adjacent conductive electrodes 20, as long as the formed electric field can cause the passing gas to discharge and form plasma. Furthermore, among the three conductive electrodes 20 laid in sequence, it is necessary to ensure that no electric field is formed between the conductive electrodes 20 located on both sides, or that the formed electric field does not affect the formation of plasma. In this embodiment, the specific location of the gas inlet 32 ​​in the main body of the jet generator is not limited. It is only necessary to ensure that there is a certain conductive path between the gas inlet 32 ​​and the jet outlet 31, so that the aforementioned electric field can be formed in a certain area on the conductive path.

[0040] Finally, it should be noted that in this embodiment, since there is at least a portion of the thickness of the hollow dielectric tube 10 between adjacent conductive electrodes 20 arranged radially along the hollow dielectric tube 10, it is necessary to ensure that the hollow dielectric tube 10 is permeable to the electric field to ensure that an electric field is generated between adjacent conductive electrodes 20 arranged radially along the hollow dielectric tube 10. This embodiment does not limit the specific number of jet outlets 31; for example, jet outlets 31 can be provided at both ends of the hollow dielectric tube 10 along the axial direction so that plasma jets can be emitted from both ends.

[0041] Furthermore, in order to improve the uniformity of the electric field generated between each group of adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10, the potential difference between all adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 can be set to be the same.

[0042] It should be noted that in this embodiment, by setting the potential difference between all adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 to be the same, that is, the electric field formed between each group of adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 is the same, so as to ensure the uniformity of the formed electric field.

[0043] Furthermore, in order to avoid the problem of potential difference between conductive electrodes 20 located on both sides or between non-adjacent conductive electrodes 20 affecting plasma formation when the number of conductive electrodes 20 arranged sequentially is more than 2, and to reduce the complexity of the device, the conductive electrodes 20 arranged at each of the above-mentioned two adjacent hollow dielectric tubes 10 can be respectively set as a grounded conductive electrode 20 and a conductive electrode 20 that forms a potential difference with the grounded conductive electrode 20.

[0044] It should be noted that in this embodiment, in every three conductive electrodes 20 arranged radially along the hollow dielectric tube 10, the potentials of the conductive electrodes 20 located on both sides are set to be the same. This is to avoid the formation of a potential difference between the conductive electrodes 20 on both sides, which would affect the potential difference between adjacent conductive electrodes 20 in the three sequentially arranged conductive electrodes 20, thus reducing the complexity of the device. In this embodiment, three conductive electrodes 20 arranged radially along the hollow dielectric tube 10 are selected. They can be arranged in sequence as ground conductive electrode 20-high voltage conductive electrode 20-ground conductive electrode 20, or they can be arranged as high voltage conductive electrode 20-ground conductive electrode 20-high voltage conductive electrode 20. The high voltage conductive electrode 20 is the conductive electrode 20 that forms a potential difference with the ground conductive electrode 20, and the potential of each high voltage conductive electrode 20 is the same. In this embodiment, the conductive electrode 20 that forms a potential difference with the ground conductive electrode 20 can be connected to a discharge driving source, and the discharge driving source can be an AC type driving source, a radio frequency type driving source, or a pulse type driving source.

[0045] Furthermore, in order to improve the uniformity of the plasma jet formed in the device, the gaps between all adjacent hollow dielectric tubes 10 can be set to be the same.

[0046] It should be noted that in this embodiment, the uniformity of the final plasma jet is improved by setting the gap between all adjacent hollow dielectric tubes 10 to be the same, that is, the size of each plasma-forming partition is the same, and the outlet size of each ejected plasma jet is the same.

[0047] Furthermore, in order to improve the uniformity of the plasma jet and the regularity of the assembly of multiple hollow dielectric tubes 10 in the device, the hollow dielectric tubes 10 can be configured as coaxial hollow dielectric tubes 10.

[0048] It should be noted that, in this embodiment, by setting multiple hollow dielectric tubes 10 as coaxial hollow dielectric tubes 10, the gap between adjacent dielectric tubes can be made uniform in the circumferential direction, thereby ensuring the uniformity of the final plasma jet and the regularity of the arrangement of the hollow dielectric tubes 10.

[0049] Furthermore, in order to ensure the simplicity of the device, the hollow medium tube 10 can be set to be open at one end along the axial direction as the jet outlet 31.

[0050] It should be noted that in this embodiment, one end of the hollow dielectric tube 10 along the axial direction is set as the jet outlet 31 to reduce the complexity of the device. The open setting of the jet outlet 31 can ensure that the formed plasma jet is ejected smoothly.

[0051] Furthermore, in order to ensure the flexibility of disassembly of the device and to ensure that the device can generate plasma jet smoothly, the hollow medium tube 10 can be fixed by an insulating fixing plug 40 provided at one end facing away from the jet outlet 31 along the axial direction.

[0052] The gas inlet 32 ​​is located on the side of the hollow medium tube 10.

[0053] It should be noted that in this embodiment, the hollow dielectric tube 10 is fixed along its axial direction away from the jet outlet 31 by an insulating plug 40 to ensure that the relative positions of all hollow dielectric tubes 10 are fixed. The insulating plug 40 is also positioned to block the side of the hollow dielectric tube 10 away from the jet outlet 31 to prevent gas leakage from this side, thus ensuring successful plasma jet preparation. This embodiment does not limit the specific location of the gas inlet 32 ​​on the side of the hollow dielectric tube 10, as long as it can form an electric field along the conductive path between the gas inlet 32 ​​and the jet outlet 31.

[0054] Furthermore, in order to reduce the complexity of the device, the hollow dielectric tube 10 can be designed as a single integral structure;

[0055] The gas inlet 32 ​​is located at one end of the hollow medium tube 10 opposite to the jet outlet 31 along the axial direction.

[0056] It should be noted that in this embodiment, the hollow dielectric tube 10 is integrally prepared. At this time, the end of the hollow dielectric tube 10 facing away from the jet outlet 31 is integrally sintered to form a baffle. At this time, a gas inlet 32 ​​is provided on the baffle, which can ensure that the gas flows directly towards the jet outlet 31 after entering through the gas inlet 32. That is, the direction of gas injection is consistent with the direction of flow after entering, ensuring that the plasma jet formed by the gas flows smoothly.

[0057] The cryogenic plasma jet generator provided in this embodiment of the invention includes a jet generator body. The jet generator body is a multi-layered sleeve structure formed by multiple hollow dielectric tubes 10 of different diameters, and there is a gap between adjacent hollow dielectric tubes 10. Each hollow dielectric tube 10 is provided with a corresponding conductive electrode 20, so that there is a potential difference between adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10, and there is an insulating hollow dielectric tube 10 between two adjacent conductive electrodes 20. The jet generator body includes a jet outlet 31 disposed at at least one end along the axial direction of multiple hollow dielectric tubes 10, and a gas inlet 32 ​​for introducing reaction gas into the gap. The gas inlet 32 ​​is connected to the jet outlet 31, and there is an electric field generated by the potential difference between adjacent conductive electrodes 20 in the conductive path between the gas inlet 32 ​​and the jet outlet 31. The hollow dielectric tube 10 is penetrable to the electric field. The present invention introduces a reactive gas into an electric field region, causing the reactive gas to discharge and generate plasma, which is then ejected. The structure is configured as multiple separate structures separated by a multi-layered sleeve structure. The independent plasma formed in the gap between each pair of adjacent hollow dielectric tubes 10 is ejected through the jet outlet 31. This enables more precise control of the formed plasma jet, improves the uniformity of plasma jet formation, and increases the overall cross-sectional area of ​​the plasma jet.

[0058] Furthermore, this embodiment of the invention ensures the uniformity of the formed electric field by ensuring that the potential difference between all adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 is the same; by setting each pair of adjacent conductive electrodes 20 to a grounded conductive electrode 20 and a conductive electrode 20 that forms a potential difference with the grounded conductive electrode 20, the complexity of the device is reduced, and the potential difference between non-adjacent conductive electrodes 20 along the radial direction of the hollow dielectric tube 10 is avoided from affecting plasma formation; by ensuring that the gap between all adjacent hollow dielectric tubes 10 is the same, and that the exit size of each ejected plasma jet is the same, the uniformity of the final plasma jet can be improved; by setting multiple hollow dielectric tubes 10 as coaxial hollow dielectric tubes 10, the gap between adjacent dielectric tubes can be ensured to be uniform throughout the circumferential direction, thereby ensuring the uniformity of the final plasma jet and the regularity of the hollow dielectric tubes 10 arrangement; One end of the hollow dielectric tube 10 along the axial direction is set as the jet outlet 31 to reduce the complexity of the device. Setting the jet outlet 31 as an open opening can ensure that the formed plasma jet is ejected smoothly. By setting the end of the hollow dielectric tube 10 along the axial direction away from the jet outlet 31 to be fixed by an insulating fixing plug 40, the relative positions of all hollow dielectric tubes 10 are fixed. The insulating fixing plug 40 is set to block the side of the hollow dielectric tube 10 away from the jet outlet 31 to prevent gas leakage through the side of the hollow dielectric tube 10 away from the jet outlet 31, ensuring that the plasma jet is successfully prepared. By making the hollow dielectric tube 10 into a single structure, that is, the end of the hollow dielectric tube 10 away from the jet outlet 31 is formed into a baffle that is sintered and integrally prepared. At this time, a gas inlet 32 ​​is set on the baffle, which can ensure that the gas flows directly towards the jet outlet 31 after entering through the gas inlet 32. That is, the direction of gas injection is consistent with the direction of flow after entering, ensuring that the gas and the formed plasma jet flow smoothly.

[0059] Example 2:

[0060] Please refer to Figure 2 , Figure 2 A schematic diagram of another low-temperature plasma jet generator provided in this embodiment of the invention. The difference between this device and Embodiment 1 described above is that:

[0061] The conductive electrode 20 is disposed on the side surface of the corresponding hollow dielectric tube 10.

[0062] It should be noted that in this embodiment... Figure 2This is a cross-sectional schematic diagram of the device, in which the left and right parts, arranged symmetrically in the horizontal direction, are integrally formed into the same hollow dielectric tube. In this embodiment, the conductive electrode 20 is disposed on the side surface of the corresponding hollow dielectric tube 10. While ensuring that an electric field is formed along the radial direction of the hollow dielectric tube 10, the efficiency of fabricating the conductive electrode 20 can be improved, thereby reducing the complexity of device fabrication.

[0063] Furthermore, in order to increase the diameter of the jet cross section in the jet generator, a central conductive electrode 21 can be provided axially inside the innermost hollow medium tube 10.

[0064] The conductive electrodes 20 are all disposed on the outer surface of the corresponding hollow dielectric tube 10.

[0065] It should be noted that the specific structure of the device in this embodiment can be referred to as well. Figure 3 and Figure 4 , Figure 3 A top view of another cryogenic plasma jet generator provided in an embodiment of the present invention; Figure 4 This is a front view example of another low-temperature plasma jet generator provided in an embodiment of the present invention. In this embodiment, a central conductive electrode 21 is arranged axially inside the innermost hollow dielectric tube 10. A potential difference exists between this central conductive electrode 21 and the adjacent conductive electrode 20 arranged on the outer surface of the hollow dielectric tube 10 to form an electric field as described above, used for plasma generation. Preferably, the central conductive electrode 21 can be arranged in a columnar shape, specifically on the central axis of the innermost hollow dielectric tube 10, to ensure the uniformity of plasma generation and the regularity of the device.

[0066] By applying the low-temperature plasma jet generator provided in this embodiment of the invention, and by placing the conductive electrode 20 on the side surface of the corresponding hollow dielectric tube 10, the efficiency of fabricating the conductive electrode 20 can be improved while ensuring that an electric field is formed along the radial direction of the hollow dielectric tube 10, thereby reducing the complexity of device fabrication. Furthermore, this embodiment of the invention further improves the fabrication efficiency of the plasma jet generator by placing a central conductive electrode 21 axially inside the innermost hollow dielectric tube 10. A potential difference exists between this central conductive electrode 21 and the adjacent conductive electrode 20 disposed on the outer surface of the hollow dielectric tube 10 to form the electric field described above.

[0067] In one feasible embodiment, the above-mentioned low-temperature plasma jet generating device may specifically include a jet generating device body;

[0068] The main body of the jet generating device includes a multi-layer coaxial sleeve structure formed by multiple hollow dielectric tubes of different diameters, and there are gaps between adjacent hollow dielectric tubes; a central conductive electrode is arranged axially on the internal central axis of the innermost hollow dielectric tube.

[0069] Each hollow dielectric tube has a corresponding conductive electrode on its outer surface, so that there is a potential difference between adjacent conductive electrodes along the radial direction of the hollow dielectric tube, and there is a potential difference between the central conductive electrode and the adjacent conductive electrode along the radial direction of the hollow dielectric tube; there is a hollow dielectric tube that insulates and isolates the conductive electrodes between two adjacent conductive electrodes.

[0070] The main body of the jet generator includes multiple hollow dielectric tubes, one end of which is open along the axial direction and serves as the jet outlet. The multiple hollow dielectric tubes are fixed by insulating plugs located at the ends facing away from the jet outlet along the axial direction. The gas inlet is located on the side of the hollow dielectric tube. The gas inlet is connected to the jet outlet, and there is an electric field generated by the potential difference between adjacent conductive electrodes and an electric field generated between the central conductive electrode and the adjacent conductive electrodes along the radial direction of the hollow dielectric tube in the conductive path between the gas inlet and the jet outlet. The hollow dielectric tube is permeable to the electric field.

[0071] Along the radial direction of the hollow dielectric tube, the potential difference between all adjacent conductive electrodes and the potential difference between the central conductive electrode and adjacent conductive electrodes are the same, and the gap between all adjacent hollow dielectric tubes and the gap between the central conductive electrode and adjacent hollow dielectric tubes are the same.

[0072] Along the radial direction of the hollow dielectric tube, each pair of adjacent conductive electrodes, as well as the central conductive electrode and its adjacent conductive electrodes, is provided with a grounded conductive electrode and a conductive electrode that forms a potential difference with the grounded conductive electrode.

[0073] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0074] Furthermore, it should be noted that in this document, relationships such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprising," "including," or any other variations are intended to cover non-exclusive inclusion.

[0075] The above provides a detailed description of a low-temperature plasma jet generator provided by the present invention. Specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only for the purpose of helping to understand the structure and core idea of ​​the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A low-temperature plasma jet generating apparatus characterized by comprising: The jet flow generating device body comprises a multi-layer sleeve structure formed by a plurality of hollow dielectric tubes with different diameters, and gaps exist between adjacent hollow dielectric tubes. Each of the hollow dielectric tubes is provided with a conductive electrode corresponding to each of the hollow dielectric tubes, so that there is a potential difference between adjacent conductive electrodes along the radial direction of the hollow dielectric tube; and there is a hollow dielectric tube between two adjacent conductive electrodes for insulating and isolating the conductive electrodes. The jet flow generating device body comprises a jet flow outlet provided at at least one end of the plurality of hollow dielectric tubes in the axial direction, and a gas inlet for introducing reaction gas into the gaps; the gas inlet is in communication with the jet flow outlet, and in the communication path between the gas inlet and the jet flow outlet, there is an electric field generated by the potential difference between adjacent conductive electrodes, and the hollow dielectric tube has a penetrating property to the electric field. The conductive electrodes are arranged on the side surface of the corresponding hollow dielectric tube. The potential difference between all adjacent conductive electrodes along the radial direction of the hollow dielectric tube is the same. The gaps between all adjacent hollow dielectric tubes are the same. The innermost hollow dielectric tube in the hollow dielectric tube is provided with a central conductive electrode in the axial direction.

2. The low-temperature plasma jet generating apparatus according to claim 1, wherein The conductive electrodes are arranged on the outer side surface of the corresponding hollow dielectric tube. The conductive electrodes arranged at each adjacent two hollow dielectric tubes are correspondingly arranged as one ground conductive electrode and one conductive electrode with a potential difference from the ground conductive electrode.

3. The low-temperature plasma jet generating apparatus according to claim 1, wherein The hollow dielectric tube is a coaxial hollow dielectric tube.

4. The low-temperature plasma jet generating apparatus according to claim 1, wherein The hollow dielectric tube is open at one end in the axial direction as the jet flow outlet.

5. The low-temperature plasma jet generating apparatus according to claim 1, wherein The hollow dielectric tube is fixed by an insulating fixing plug arranged at one end of the hollow dielectric tube in the axial direction away from the jet flow outlet.

6. The low-temperature plasma jet generating apparatus according to claim 5, wherein The gas inlet is arranged on the side surface of the hollow dielectric tube. The hollow dielectric tube is an integral structure.

7. The low-temperature plasma jet generating apparatus according to claim 1, wherein The gas inlet is arranged at one end of the hollow dielectric tube in the axial direction away from the jet flow outlet. ​

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