Air spindle and its adjustment method

By introducing magnetic parts and elastic parts into the air spindle, the state of the air float bearing is adjusted by using magnetic repulsion force, the friction problem caused by the inclination of the air float bearing is solved, the rotation accuracy of the air spindle is improved and the automatic correction function is realized.

CN119216616BActive Publication Date: 2025-03-07ZHEJIANG QIUSHI SEMICON EQUIP CO LTD +2
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Patent Information

Application Number
CN202411755559.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2024-09-20
Filing Date
2024-12-02
Publication Date
2025-03-07
Estimated Expiration
2044-12-02

AI Technical Summary

Technical Problem

In the prior art, the air-floating bearing is prone to incline after installation, resulting in greater rotational friction between the spindle and the air-floating bearing, thereby reducing the rotational accuracy of the air-spindle, and the state of the air-floating bearing cannot be adjusted to reduce friction.

Method used

An air spindle is designed, including a housing, a spindle, a rotor, a stator, an air-floating bearing, a first magnetic member, a second magnetic member and an elastic member. Through the magnetic repulsion force between the first magnetic member and the second magnetic member, the distance between the second magnetic member and the inner wall of the housing is adjusted, thereby driving the deflection of the air-floating bearing, correcting its inclined state, and ensuring that the axis of the air-floating bearing coincides with the axis of the main shaft.

Benefits of technology

By adjusting the state of the airfloating bearing, the friction between the spindle and the airfloating bearing is reduced, the rotation accuracy of the air spindle is improved, and automatic correction of the inclined state of the airfloating bearing is achieved.

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Abstract

The present application discloses an air spindle and an adjustment method thereof, wherein the air spindle comprises a housing, a spindle, a rotor, a stator, an air bearing, a first magnetic component, a second magnetic component and an elastic component, wherein the first magnetic component is mounted outside the housing, the second magnetic component is located between the inner wall of the housing and the air bearing, and the second magnetic component is configured to be repelled by the first magnetic component to adjust the distance between the second magnetic component and the inner wall of the housing. Through the above arrangement, the tilted air bearing can be returned to the correct position to improve the rotation accuracy of the air spindle.
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Description

Technical Field

[0001] The present application relates to the technical field of spindles, and in particular to an air spindle and an adjustment method thereof. Background Art

[0002] The air spindle is a high-precision rotary device with the characteristics of high-speed rotation, precise control and low inertia. It is particularly suitable for high-precision and high-speed machining occasions.

[0003] An air spindle usually includes a housing, a spindle, a rotor, a stator and an air bearing. The air bearing is a bearing that uses gas as a lubricating medium to form an air film between the bearing and the spindle, thereby achieving non-contact operation with the spindle, thereby enabling the air bearing to help improve the rotation accuracy of the spindle.

[0004] However, in the prior art, the air bearing will tilt after installation so that the axis of the air bearing does not coincide with the axis of the main shaft. In addition, in the prior art, it is impossible to adjust the state of the air bearing after installation, resulting in greater rotational friction between the main shaft and the air bearing, and the air bearing cannot reduce the rotational friction of the main shaft, thereby reducing the rotation accuracy of the air spindle.

[0005] Therefore, when the air bearing is tilted, how to adjust the state of the air bearing to improve the rotation accuracy of the air spindle is a technical problem that needs to be solved urgently in this field. Summary of the invention

[0006] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide an air spindle, which can adjust the state of the air bearing to improve the rotation accuracy of the air spindle when the air bearing is tilted.

[0007] To achieve the above objectives, this application adopts the following technical solutions:

[0008] An air spindle, comprising a shell, a spindle, a rotor, a stator, an air bearing, a first magnetic part, a second magnetic part and an elastic part. The spindle is at least partially located in the shell and is rotatably connected to the shell, the rotor is located in the shell and is connected to the spindle, the stator is located in the shell and is at least partially arranged around the rotor, the air bearing is at least partially installed in the shell and rotatably connects the spindle to the shell, the first magnetic part is installed outside the shell, the second magnetic part is located between the inner wall of the shell and the air bearing, and the second magnetic part is configured to be repelled by the first magnetic part to adjust the distance between the second magnetic part and the inner wall of the shell. The second magnetic part deviates from the middle position of the air bearing along its axial direction. The elastic part is located between the inner wall of the shell and the second magnetic part, and the elastic part has a deformable margin, which is configured to be deformed when the first magnetic part repels the second magnetic part, so that the distance between the second magnetic part and the inner wall of the shell is increased, and the deformation of the deformable margin makes the deformable margin have a force on the second magnetic part, and the force makes the second magnetic part have a tendency to move toward the inner wall of the shell.

[0009] Furthermore, at least two of the first magnetic component, the second magnetic component and the elastic component are provided, at least two first magnetic components are distributed on the outside of the shell along the axial direction of the main shaft, at least two second magnetic components are distributed on the outer peripheral surface of the air bearing along the axial direction of the air bearing, each elastic component corresponds to a second magnetic component, and each first magnetic component corresponds to a second magnetic component.

[0010] Furthermore, the air spindle further comprises a plurality of insulating isolation layers, at least one insulating isolation layer is located between two adjacent first magnetic members, and at least one insulating isolation layer is located between two adjacent second magnetic members.

[0011] Furthermore, the first magnetic component or the second magnetic component is an electromagnet.

[0012] Furthermore, the second magnetic member is configured as a flat arc-shaped sheet structure or a block structure.

[0013] Furthermore, the air spindle also includes a detection mechanism, which is located on the spindle or the housing, and is configured to detect the rotation speed of the spindle.

[0014] Furthermore, an annular groove for fixing the air bearing is provided in the housing, the air bearing is at least partially located in the annular groove, and the second magnetic member is located between the bottom of the annular groove and the air bearing. A limiting protrusion is formed on the main shaft, a limiting groove is provided on the limiting protrusion, the air bearing is at least partially located in the limiting groove, and there is a gap between the air bearing and the limiting groove.

[0015] Furthermore, the air spindle further comprises an elastic layer and / or a lubricating layer, and the elastic layer and / or the lubricating layer are located on both sides of the side walls of the air bearing close to the limiting groove.

[0016] To achieve the above objectives, this application adopts the following technical solutions:

[0017] A method for adjusting an air spindle comprises: when an air bearing is tilted, a first magnetic component repels a second magnetic component located between the air bearing and an inner wall of a shell; the second magnetic component moves in a direction away from the inner wall of the shell, so that the distance between a side of the air bearing corresponding to the second magnetic component and the inner wall of the shell increases until the axis of the air bearing is parallel to the axis of the spindle.

[0018] Furthermore, the air spindle also includes an elastic member located between the air bearing and the inner wall of the shell and a detection mechanism capable of detecting the spindle speed. Two first magnetic members, two second magnetic members and two elastic members are provided. The two first magnetic members are distributed on the outside of the shell along the axial direction of the spindle, and the two second magnetic members are distributed on the outer peripheral surface of the air bearing along the axial direction of the air bearing. Each elastic member corresponds to a second magnetic member, and each first magnetic member corresponds to a second magnetic member. The two first magnetic members are defined as the first magnetic member and the second magnetic member, respectively. The second magnetic member that cooperates with the first magnetic member is defined as the third magnetic member, and the second magnetic member that cooperates with the second magnetic member is defined as the fourth magnetic member. The adjustment method includes: a detection mechanism detects that the rotation speed of the main shaft is less than a preset rotation speed, and the air bearing tilts; the first magnetic member repels the third magnetic member, so that the distance between the side of the air bearing corresponding to the third magnetic member and the inner wall of the shell increases; the detection mechanism detects whether the rotation speed of the main shaft increases, and if the detection mechanism detects that the rotation speed of the main shaft increases, the first magnetic member continues to repel the corresponding third magnetic member until the axis of the air bearing is parallel to the axis of the main shaft; if the detection mechanism detects that the rotation speed of the main shaft decreases, the first magnetic member stops repelling the corresponding third magnetic member, and the second magnetic member repels the fourth magnetic member, so that the distance between the side of the air bearing corresponding to the fourth magnetic member and the inner wall of the shell increases until the axis of the air bearing is parallel to the axis of the main shaft.

[0019] In the present application, the repulsive force between the first magnetic member and the second magnetic member can adjust the position of the air bearing to correct the tilted air bearing, thereby aligning the axis of the air bearing with the axis of the spindle to improve the rotation accuracy of the air spindle. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the overall cross-sectional structure of the air spindle of the present application;

[0021] Figure 2 For this application Figure 1 The enlarged schematic diagram of point A in the middle;

[0022] Figure 3 For this application Figure 1 The enlarged schematic diagram of point B in the middle;

[0023] Figure 4 A schematic diagram of a flow chart of an adjustment method of an air spindle of the present application;

[0024] Figure 5 A schematic diagram of a specific process of adjusting the air spindle of the present application;

[0025] Figure 6 A schematic flow chart of another air spindle adjustment method of the present application;

[0026] Figure 7 This is a schematic diagram of a specific process of another air spindle adjustment method of the present application.

[0027] Among them, 100, air spindle; 11, shell; 111, annular groove; 12, spindle; 121, limiting protrusion; 122, limiting groove; 13, rotor; 14, stator; 15, air bearing; 16, first magnetic component; 161, first magnetic component; 162, second magnetic component; 17, second magnetic component; 171, third magnetic component; 172, fourth magnetic component; 18, elastic component; 19, elastic layer; 20, lubricating layer. DETAILED DESCRIPTION

[0028] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0029] It should be noted that the words "first", "second" and similar words used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "a" do not indicate a quantitative limitation, but indicate the existence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are only for the convenience of description and are not limited to one position or one spatial orientation. Words such as "include" or "comprise" mean that the elements or objects appearing before "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, and do not exclude other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0030] The singular forms "a", "said" and "the" used in this specification and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0031] In order to clearly illustrate the technical solution of this application, the following is also defined: Figure 1 Up, down, left and right directions shown.

[0032] like Figure 1 As shown, as an embodiment, the present application provides an air spindle 100, which includes a housing 11, a spindle 12, a rotor 13, a stator 14 and an air bearing 15. The spindle 12 is used to transmit and output torque, and the spindle 12 is at least partially located in the housing 11 and is rotatably connected to the housing 11. The rotor 13 is located in the housing 11 and is connected to the spindle 12. The stator 14 is located in the housing 11 and is at least partially arranged around the rotor 13. The rotor 13 can cooperate with the stator 14 to generate magnetic induction force and drive the spindle 12 to rotate. The air bearing 15 is used to support the spindle 12, and the air bearing 15 is at least partially installed in the housing 11. The air bearing 15 can rotatably connect the spindle 12 to the housing 11. In this way, the friction force on the spindle 12 can be reduced by the air bearing 15, which is conducive to the rotation of the air spindle 100 to increase the rotation speed of the air spindle 100.

[0033] Specifically, the air spindle 100 further includes a first magnetic member 16 and a second magnetic member 17. The first magnetic member 16 is mounted outside the housing 11, and the second magnetic member 17 is located between the inner wall of the housing 11 and the air bearing 15. The second magnetic member 17 is configured to be attracted by the first magnetic member 16 to adjust the distance between the second magnetic member 17 and the inner wall of the housing 11. In this way, the attraction of the first magnetic member 16 to the second magnetic member 17 is increased so that the second magnetic member 17 can move toward the inner wall of the housing 11. In addition, in this embodiment, the second magnetic member 17 is connected to the air bearing 15, so that the second magnetic member 17 can drive the corresponding side of the air bearing 15 to deflect, so as to correct the tilted air bearing 15, thereby adjusting the position of the air bearing 15 so that the axis of the air bearing 15 coincides with the axis of the spindle 12, which is conducive to reducing the friction between the air bearing 15 and the spindle 12, thereby improving the rotation accuracy of the air spindle 100.

[0034] It should be noted that, in the present application, the first magnetic member 16 may be configured to be attracted by the second magnetic member 17, and the present application does not limit this, as long as the first magnetic member 16 and the second magnetic member 17 can form an attraction force on each other. The present application takes the second magnetic member 17 being configured to be attracted by the first magnetic member 16 as an example for explanation.

[0035] In addition, the second magnetic member 17 deviates from the middle position of the air bearing 15 along its axial direction. Such a configuration can prevent the second magnetic member 17 from acting on the above-mentioned middle position, which causes the second magnetic member 17 to be unable to drive the air bearing 15 to deflect, thereby facilitating the second magnetic member 17 to accurately adjust the state of the air bearing 15 so that the air bearing 15 returns to the normal position.

[0036] In the present application, the alignment of the air bearing 15 refers to the working process in which the air bearing 15 is adjusted so that the axis of the air bearing 15 coincides with the axis of the main shaft 12 .

[0037] More specifically, the air spindle 100 further includes an elastic member 18, which is located between the inner wall of the housing 11 and the second magnetic member 17. The elastic member 18 has a deformable margin, which is configured to be deformed when the first magnetic member 16 attracts the second magnetic member 17, so that the distance between the second magnetic member 17 and the inner wall of the housing 11 is reduced. Moreover, the deformation of the deformable margin causes the deformable margin to have a force on the second magnetic member 17, and the force causes the second magnetic member 17 to have a tendency to move away from the inner wall of the housing 11. In this way, the elastic member 18 can provide space for the displacement of the second magnetic member 17, thereby facilitating the second magnetic member 17 to move between the inner wall of the housing 11 and the spindle 12. Furthermore, in the present application, when the attraction force on the second magnetic member 17 increases, the force of the elastic member 18 on the second magnetic member 17 can be offset, so that the second magnetic member 17 moves after being acted upon by the attraction force; when the attraction force on the second magnetic member 17 decreases, the force of the elastic member 18 on the second magnetic member 17 is greater than the attraction force on the second magnetic member 17, so that the second magnetic member 17 moves after being acted upon by the elastic member 18. In addition, when the air bearing 15 does not need to be corrected, the attraction force on the second magnetic member 17 and the force of the elastic member 18 on the second magnetic member 17 maintain a balance, so that the second magnetic member 17 does not move, which is beneficial to improve the stability of the second magnetic member 17 in the air main shaft 100, and further beneficial to improve the stability of the air bearing 15 in the air main shaft 100.

[0038] Exemplarily, in the present application, by increasing the attraction of the first magnetic member 16 to the second magnetic member 17, the attraction of the second magnetic member 17 is greater than the force of the elastic member 18 on the second magnetic member 17, so that the second magnetic member 17 is moved toward the inner wall of the housing 11 after being acted upon by the attraction, and then the corresponding side of the air bearing 15 is driven by the second magnetic member 17 to deflect toward the inner wall of the housing 11, so that the tilted air bearing 15 is returned to the normal position, which is beneficial to improving the rotation accuracy of the air spindle 100;

[0039] By reducing the attraction of the first magnetic member 16 to the second magnetic member 17, the attraction of the second magnetic member 17 is made smaller than the force of the elastic member 18 on the second magnetic member 17, so that the second magnetic member 17 is moved toward the inner wall away from the shell 11 after being acted upon by the elastic member 18, that is, the second magnetic member 17 moves toward the main shaft 12, and then the corresponding side of the air bearing 15 is driven by the second magnetic member 17 to deflect toward the main shaft 12, so that the tilted air bearing 15 is returned to the normal position.

[0040] Therefore, through the above two operation modes, the distance between the second magnetic member 17 and the inner wall of the housing 11 can be adjusted so that the second magnetic member 17 drives the air bearing 15 to deflect, thereby returning the air bearing 15 to the normal position. This application takes increasing the attraction of the first magnetic member 16 to the second magnetic member 17 as an example for explanation, and the method of reducing the attraction of the first magnetic member 16 to the second magnetic member 17 is not repeated.

[0041] like Figure 1 and Figure 2 As shown, as an embodiment, at least two first magnetic members 16, second magnetic members 17 and elastic members 18 are provided, at least two first magnetic members 16 are distributed on the outside of the housing 11 along the axial direction of the main shaft 12, at least two second magnetic members 17 are distributed on the outer peripheral surface of the air bearing 15 along the axial direction of the air bearing 15, each elastic member 18 corresponds to a second magnetic member 17, and each first magnetic member 16 corresponds to a second magnetic member 17. In this embodiment, the first magnetic member 16, the second magnetic member 17 and the elastic member 18 are respectively arranged on both sides of the middle position of the air bearing 15 along its axial direction. With such an arrangement, the two second magnetic members 17 can respectively adjust the two sides of the middle position of the air bearing 15 along its axial direction, so that the air bearing 15 can be flexibly adjusted according to the tilt direction of the air bearing 15, which is conducive to improving the comprehensiveness of the second magnetic member 17 in correcting the tilted air bearing 15.

[0042] Exemplarily, the first magnetic component 16, the second magnetic component 17 and the elastic component 18 are respectively arranged on the left and right sides of the middle position along the axial direction of the air bearing 15. That is, the axis of the air bearing 15 extends along the left and right directions of the air main shaft 100. Along the axial direction of the air bearing 15, when the left side of the air bearing 15 is tilted toward the axis of the main shaft 12, the attraction of the first magnetic component 16 arranged on the left side to the second magnetic component 17 on the left side is increased, so that the attraction exerted on the second magnetic component 17 on the left side is greater than the force exerted on the second magnetic component 17 on the left side by the elastic component 18 on the left side, so that the second magnetic component 17 on the left side is acted upon by the attraction and moves toward the inner wall of the shell 11, and the second magnetic component 17 on the left side can drive the left side of the air bearing 15 to deflect toward the inner wall of the shell 11, so as to correct the deviation of the air bearing 15, thereby making the inclined air bearing 15 The bearing 15 is returned to the center; when the right side of the air bearing 15 is tilted toward the axis of the main shaft 12, the attraction of the first magnetic member 16 on the right side to the second magnetic member 17 on the right side is increased, so that the attraction exerted on the second magnetic member 17 on the right side is greater than the force exerted on the second magnetic member 17 on the right side by the elastic member 18 on the right side, so that the second magnetic member 17 on the right side is moved toward the inner wall of the shell 11 after being acted upon by the attraction, and the second magnetic member 17 on the right side can drive the right side of the air bearing 15 to deflect toward the inner wall of the shell 11, so as to correct the deviation of the air bearing 15, and then the tilted air bearing 15 is returned to the center.

[0043] It should be noted that in the present application, the number of the first magnetic member 16, the second magnetic member 17 and the elastic member 18 can be set to one, and the first magnetic member 16, the second magnetic member 17 and the elastic member 18 only need to be set on the side of the air bearing 15 that is inclined toward the axis of the main shaft 12; or, the number of the first magnetic member 16, the second magnetic member 17 and the elastic member 18 set on the left and right sides of the middle position along the axial direction of the air bearing 15 can be multiple, for example, the number of the first magnetic member 16, the second magnetic member 17 and the elastic member 18 set on the left and right sides of the middle position along the axial direction of the air bearing 15 is two. Such a setting can increase the force on the air bearing 15 of the second magnetic member 17, which is conducive to adjusting the state of the air bearing 15 so that the air bearing 15 is returned to the right position. In addition, through the above setting, the left and right sides of the air bearing 15 can be adjusted so that the second magnetic member 17 adjusts the state of the air bearing 15 more accurately, which is conducive to improving the accuracy of the return of the air bearing 15. Therefore, the present application does not limit the number of the first magnetic member 16 , the second magnetic member 17 and the elastic member 18 .

[0044] As an embodiment, the air spindle 100 further includes a plurality of insulating isolation layers (not shown). Among them, at least one insulating isolation layer is located between two adjacent first magnetic members 16, and at least one insulating isolation layer is located between two adjacent second magnetic members 17. In this configuration, the adjacent first magnetic members 16 and the adjacent second magnetic members 17 can be isolated by the insulating isolation layers, so that the magnetic fields of the adjacent first magnetic members 16 will not be magnetically coupled, and the magnetic fields of the adjacent second magnetic members 17 will not be magnetically coupled, so as to avoid mutual interference between the adjacent first magnetic members 16 and the adjacent second magnetic members 17, thereby facilitating the normal operation of the first magnetic members 16 and the second magnetic members 17.

[0045] In some embodiments, the insulating isolation layer is epoxy resin. It can be understood that epoxy resin has good bonding properties and electrical insulation properties, which is conducive to fixing and insulating the first magnetic member 16 and the second magnetic member 17. It should be noted that the insulating isolation layer can also be other materials with insulating properties, and this application does not limit this.

[0046] As an embodiment, the first magnetic member 16 or the second magnetic member 17 is an electromagnet. With such a configuration, the electromagnet can change the strength of the magnetic field by changing the magnitude of the current or voltage, thereby changing the attraction between the first magnetic member 16 and the second magnetic member 17, which is conducive to driving the second magnetic member 17 to move, so that the second magnetic member 17 can drive the corresponding side of the air bearing 15 to deflect, so as to adjust the state of the air bearing 15.

[0047] Exemplarily, taking the first magnetic component 16 as an electromagnet as an example, increasing the current passed through the first magnetic component 16 can increase the magnetic field force of the first magnetic component 16, and then increase the attraction of the first magnetic component 16 to the second magnetic component 17, so that the attraction exerted on the second magnetic component 17 is greater than the force exerted by the elastic component 18 on the second magnetic component 17, and then the attraction can drive the second magnetic component 17 to move toward the inner wall of the shell 11, so that the second magnetic component 17 can adjust the state of the air bearing 15.

[0048] As an embodiment, the second magnetic member 17 is configured as a flat arc-shaped sheet structure or a block structure. It can be understood that in the present application, the air bearing 15 is a cylindrical structure. Therefore, through the above-mentioned arrangement, the contact area between the second magnetic member 17 and the air bearing 15 can be increased, which is conducive to the second magnetic member 17 driving the air bearing 15 to move and return the air bearing 15 to the center. In addition, by increasing the contact area between the second magnetic member 17 and the air bearing 15, the force of the second magnetic member 17 on the air bearing 15 can be made more uniform, which is conducive to improving the return accuracy of the air bearing 15.

[0049] As an embodiment, the air spindle 100 further includes a detection mechanism (not shown), which is located on the spindle 12 or the housing 11, and is configured to detect the rotation speed of the spindle 12. In the present application, when the axis of the air bearing 15 coincides with the axis of the spindle 12, the friction between the air bearing 15 and the spindle 12 is minimum, so that the rotation speed of the spindle 12 is maximum. When the air bearing 15 is in a tilted state, the friction between the air bearing 15 and the spindle 12 increases, thereby reducing the rotation speed of the spindle 12. It can be understood that by detecting the rotation speed of the spindle 12 by the detection mechanism, it can be determined whether the air bearing 15 is in a tilted state, which is conducive to detecting the state of the air bearing 15 in the housing 11.

[0050] Exemplarily, the attraction between the first magnetic member 16 and the second magnetic member 17 is increased so that the second magnetic member 17 drives the air bearing 15 to deflect. At this time, the detection mechanism can detect the rotation speed of the spindle 12 in real time. When the rotation speed of the spindle 12 is at the maximum value, the attraction between the first magnetic member 16 and the second magnetic member 17 is stopped from being increased, so that the second magnetic member 17 stops moving and the air bearing 15 stops deflecting, so as to avoid the second magnetic member 17 driving the air bearing 15 to deflect excessively and causing the air bearing 15 to tilt toward the other side, which is conducive to the accuracy of the second magnetic member 17 adjusting the state of the air bearing 15.

[0051] In some embodiments, the detection mechanism may be a speed sensor, which can detect the speed of the spindle 12 , thereby facilitating the determination of the speed of the spindle 12 and determining whether the air bearing 15 is tilted according to the actual speed of the spindle 12 .

[0052] like Figure 1 and Figure 3 As shown, as an embodiment, an annular groove 111 for fixing the air bearing 15 is provided in the housing 11, the air bearing 15 is at least partially located in the annular groove 111, and the second magnetic member 17 is located between the groove bottom of the annular groove 111 and the air bearing 15. In addition, a limiting protrusion 121 is formed on the main shaft 12, and a limiting groove 122 is provided on the limiting protrusion 121, and the air bearing 15 is at least partially located in the limiting groove 122. In this way, the air bearing 15 can be limited by the annular groove 111 and the limiting groove 122, which is beneficial to the installation and limiting of the air bearing 15 in the air main shaft 100, and further beneficial to improving the stability of the air bearing 15 in the air main shaft 100. In addition, there is a gap between the air bearing 15 and the limiting groove 122. With such arrangement, air can be introduced into the gap to form a gas film between the air bearing 15 and the spindle 12 , thereby facilitating reduction of friction between the air bearing 15 and the spindle 12 , and further facilitating increase of the rotation speed of the spindle 12 .

[0053] As an optional implementation, the air spindle 100 further includes an elastic layer 19 and / or a lubricating layer 20, which are located on both sides of the side wall of the air bearing 15 near the limiting groove 122. In this way, the elastic layer 19 and the lubricating layer 20 can prevent the air bearing 15 from directly colliding with the limiting groove 122 when the second magnetic member 17 drives the air bearing 15 to deflect in the wrong direction or deflect excessively, thereby avoiding damage to the air bearing 15, which is beneficial to the protection of the air bearing 15. In addition, the lubricity between the air bearing 15 and the side wall of the limiting groove 122 can be improved by the lubricating layer 20, which is beneficial to increase the rotation speed of the spindle 12. It should be noted that there is a gap between the side wall of the limiting groove 122 and the air bearing 15, so that the air between the spindle 12 and the air bearing 15 can pass through the above gap and communicate with the outside.

[0054] In some embodiments, the elastic layer 19 may be an airbag disposed between the air bearing 15 and the side wall of the limiting groove 122, and the airbag can buffer the air bearing 15 and the side wall of the limiting groove 122, thereby facilitating the protection of the air bearing 15. The lubricating layer 20 is a graphite layer disposed between the airbag and the air bearing 15, and the graphite layer can improve the lubricity between the airbag and the air bearing 15, thereby facilitating the reduction of the friction force on the air bearing 15, and further facilitating the increase of the rotation speed of the spindle 12. In addition, the graphite layer can also be used for buffering between the air bearing 15 and the side wall of the limiting groove 122, thereby further improving the buffering effect between the air bearing 15 and the side wall of the limiting groove 122.

[0055] It should be noted that, in the present application, the elastic layer 19 can be made of other materials that can play a buffering role, and the lubricating layer 20 can be made of other materials that can play a lubricating role. The present application does not limit the materials of the elastic layer 19 and the lubricating layer 20.

[0056] like Figure 4 As shown, as an embodiment, the present application also provides an adjustment method of the air spindle 100, and the adjustment method comprises the following steps:

[0057] S1: When the air bearing 15 is tilted, the first magnetic member 16 attracts the second magnetic member 17 located between the air bearing 15 and the inner wall of the housing 11;

[0058] S2: the second magnetic member 17 moves toward the inner wall of the housing 11 to reduce the distance between the side of the air bearing 15 corresponding to the second magnetic member 17 and the inner wall of the housing 11 until the axis of the air bearing 15 coincides with the axis of the main shaft 12 .

[0059] Specifically, in step S1 , the magnetic field force of the first magnetic member 16 or the second magnetic member 17 is increased, thereby increasing the attraction between the first magnetic member 16 and the second magnetic member 17 , so that the attraction exerted on the second magnetic member 17 is greater than the force exerted on the second magnetic member 17 by the elastic member 18 .

[0060] In step S2, the enlarged attraction exerted on the second magnetic component 17 can drive the second magnetic component 17 to move toward the inner wall of the shell 11, so that the second magnetic component 17 can drive the corresponding side of the air bearing 15 to deflect toward the inner wall of the shell 11, thereby realizing the correction adjustment of the tilted air bearing 15 until the axis of the air bearing 15 coincides with the axis of the main shaft 12.

[0061] like Figure 2 and Figure 5 As shown, as an implementation mode, two first magnetic members 16, two second magnetic members 17 and two elastic members 18 are provided, the two first magnetic members 16 are distributed outside the housing 11 along the axial direction of the main shaft 12, and the two second magnetic members 17 are distributed on the outer peripheral surface of the air bearing 15 along the axial direction of the air bearing 15. Moreover, each elastic member 18 corresponds to one second magnetic member 17, and each first magnetic member 16 corresponds to one second magnetic member 17.

[0062] Specifically, the two first magnetic members 16 are defined as the first magnetic member 161 and the second magnetic member 162, the second magnetic member 17 matched with the first magnetic member 161 is defined as the third magnetic member 171, and the second magnetic member 17 matched with the second magnetic member 162 is defined as the fourth magnetic member 172. The adjustment method includes the following steps:

[0063] S1: The detection mechanism detects that the rotation speed of the main shaft 12 is less than the preset rotation speed, and the air bearing 15 tilts;

[0064] S2: The first magnetic member 161 attracts the third magnetic member 171 , so that the distance between the side of the air bearing 15 corresponding to the third magnetic member 171 and the inner wall of the housing 11 is reduced.

[0065] S3: The detection mechanism detects whether the rotation speed of the main shaft 12 increases. If the detection mechanism detects that the rotation speed of the main shaft 12 increases, the first magnetic member 161 continues to attract the corresponding third magnetic member 171 until the axis of the air bearing 15 coincides with the axis of the main shaft 12; if the detection mechanism detects that the rotation speed of the main shaft 12 decreases, the first magnetic member 161 stops attracting the corresponding third magnetic member 171, and the second magnetic member 162 attracts the fourth magnetic member 172, so that the distance between the side of the air bearing 15 corresponding to the fourth magnetic member 172 and the inner wall of the shell 11 is reduced until the axis of the air bearing 15 coincides with the axis of the main shaft 12.

[0066] Specifically, in step S1, the preset speed is the speed of the spindle 12 when the axis of the air bearing 15 coincides with the axis of the spindle 12. Therefore, when the actual speed of the spindle 12 is less than the preset speed, it can be determined that the air bearing 15 is tilted.

[0067] In step S2, the attraction between the first magnetic component 161 and the third magnetic component 171 is increased so that the attraction exerted on the third magnetic component 171 is greater than the force exerted on the third magnetic component 171 by the elastic component 18, thereby enabling the above-mentioned attraction to drive the third magnetic component 171 to move toward the inner wall of the shell 11, and drive one side of the corresponding air bearing 15 to deflect toward the inner wall of the shell 11 through the third magnetic component 171.

[0068] In step S3, while the third magnetic member 171 drives the air bearing 15 to deflect, the detection mechanism monitors the rotation speed of the main shaft 12 in real time. When the rotation speed of the main shaft 12 detected by the detection mechanism gradually increases, it can be determined that the axis of the air bearing 15 gradually coincides with the axis of the main shaft 12, that is, the actual tilt direction of the air bearing 15 is that the side of the air bearing 15 corresponding to the third magnetic member 171 is tilted toward the axis of the main shaft 12, so the attraction between the first magnetic member 161 and the third magnetic member 171 can be continued to increase, so that the air bearing 15 continues to deflect, until the detection mechanism detects that the rotation speed of the main shaft 12 reaches the preset speed, and then stops increasing the attraction between the first magnetic member 161 and the third magnetic member 171, so that the attraction to the third magnetic member 171 can be balanced with the force of the corresponding elastic member 18 on the third magnetic member 171, thereby stabilizing the position of the third magnetic member 171, and then making the axis of the air bearing 15 coincide with the axis of the main shaft 12, and completing the correction of the air bearing 15. When the rotation speed of the main shaft 12 detected by the detection mechanism gradually decreases, it can be determined that the degree of deviation between the axis of the air bearing 15 and the axis of the main shaft 12 is gradually increasing. Therefore, it can be determined that the actual tilt direction of the air bearing 15 is that the side of the air bearing 15 corresponding to the fourth magnetic component 172 is tilted toward the axis of the main shaft 12. Therefore, the first magnetic member 161 stops attracting the corresponding third magnetic member 171, and increases the attraction between the second magnetic member 162 and the fourth magnetic member 172, so that the fourth magnetic member 172 moves toward the inner wall of the shell 11 after being attracted, so that the fourth magnetic member 172 drives one side of the corresponding air bearing 15 to deflect toward the inner wall of the shell 11, until the rotation speed of the main shaft 12 detected by the detection mechanism reaches the preset rotation speed, and then stops increasing the attraction between the second magnetic member 162 and the fourth magnetic member 172, so that the attraction received by the fourth magnetic member 172 is balanced with the force of the corresponding elastic member 18 on the fourth magnetic member 172, thereby stabilizing the position of the fourth magnetic member 172, and then making the axis of the air bearing 15 coincide with the axis of the main shaft 12, and completing the deviation correction of the air bearing 15.

[0069] As an embodiment, the present application also provides an air spindle 100 in which a first magnetic part 16 and a second magnetic part 17 repel each other, and the air spindle 100 includes a housing 11, a spindle 12, a rotor 13, a stator 14 and an air bearing 15. It should be noted that the above structure has been described in the previous text and will not be repeated here.

[0070] Specifically, the air spindle 100 further includes a first magnetic member 16 and a second magnetic member 17, wherein the first magnetic member 16 is mounted outside the housing 11, and the second magnetic member 17 is located between the inner wall of the housing 11 and the air bearing 15. The second magnetic member 17 is configured to be repelled by the first magnetic member 16 to adjust the distance between the second magnetic member 17 and the inner wall of the housing 11. In this way, the repulsive force of the first magnetic member 16 on the second magnetic member 17 is increased so that the second magnetic member 17 can move toward the spindle 12. In addition, in this embodiment, the second magnetic member 17 is connected to the air bearing 15, so that the second magnetic member 17 can drive the corresponding side of the air bearing 15 to deflect, so as to correct the tilted air bearing 15, thereby adjusting the position of the air bearing 15 so that the axis of the air bearing 15 coincides with the axis of the spindle 12, which is conducive to reducing the friction between the air bearing 15 and the spindle 12, thereby improving the rotation accuracy of the air spindle 100.

[0071] It should be noted that, in the present application, the first magnetic member 16 may be configured to be repelled by the second magnetic member 17, and the present application does not limit this, as long as the first magnetic member 16 and the second magnetic member 17 can form a repulsive force with each other. The present application takes the second magnetic member 17 being configured to be repelled by the first magnetic member 16 as an example for explanation.

[0072] In addition, the second magnetic member 17 deviates from the middle position of the air bearing 15 along its axial direction. Such a configuration can prevent the second magnetic member 17 from acting on the above-mentioned middle position, which causes the second magnetic member 17 to be unable to drive the air bearing 15 to deflect, thereby facilitating the second magnetic member 17 to accurately adjust the state of the air bearing 15 so that the air bearing 15 returns to the normal position.

[0073] More specifically, the air spindle 100 further includes an elastic member 18, which is located between the inner wall of the housing 11 and the second magnetic member 17. The elastic member 18 has a deformable margin, which is configured to be deformed when the first magnetic member 16 repels the second magnetic member 17, so that the distance between the second magnetic member 17 and the inner wall of the housing 11 increases. The deformation of the deformable margin causes the deformable margin to have a force on the second magnetic member 17, and the force causes the second magnetic member 17 to have a tendency to move toward the inner wall of the housing 11. In this way, the elastic member 18 can provide space for the displacement of the second magnetic member 17, thereby facilitating the second magnetic member 17 to move between the inner wall of the housing 11 and the spindle 12. Furthermore, in the present application, when the repulsive force on the second magnetic member 17 increases, the force of the elastic member 18 on the second magnetic member 17 can be offset, so that the second magnetic member 17 moves after being acted upon by the repulsive force; when the repulsive force on the second magnetic member 17 decreases, the force of the elastic member 18 on the second magnetic member 17 is greater than the repulsive force on the second magnetic member 17, so that the second magnetic member 17 moves after being acted upon by the elastic member 18. In addition, when the air bearing 15 does not need to be corrected, the repulsive force on the second magnetic member 17 and the force of the elastic member 18 on the second magnetic member 17 maintain a balance, so that the second magnetic member 17 does not move, which is beneficial to improve the stability of the second magnetic member 17 in the air main shaft 100, and further beneficial to improve the stability of the air bearing 15 in the air main shaft 100.

[0074] Illustratively, in the present application, the repulsive force of the first magnetic component 16 on the second magnetic component 17 is increased so that the repulsive force on the second magnetic component 17 is greater than the force exerted by the elastic component 18 on the second magnetic component 17. As a result, the second magnetic component 17 is acted upon by the repulsive force and moves toward the main shaft 12. Then, the corresponding side of the air bearing 15 is driven by the second magnetic component 17 to deflect toward the main shaft 12, so that the tilted air bearing 15 is returned to the normal position, which is beneficial to improving the rotation accuracy of the air main shaft 100.

[0075] By reducing the repulsive force of the first magnetic component 16 on the second magnetic component 17, so that the repulsive force on the second magnetic component 17 is smaller than the force of the elastic component 18 on the second magnetic component 17, the second magnetic component 17 is moved toward the inner wall of the shell 11 after being acted upon by the elastic component 18, and then the corresponding side of the air bearing 15 is driven by the second magnetic component 17 to deflect toward the inner wall of the shell 11, so that the tilted air bearing 15 is returned to the normal state. Therefore, through the above two operation methods, the distance between the second magnetic component 17 and the inner wall of the shell 11 can be adjusted, so that the second magnetic component 17 drives the air bearing 15 to deflect, so that the air bearing 15 is returned to the normal state. This application takes increasing the repulsive force of the first magnetic component 16 on the second magnetic component 17 as an example for explanation, and the method of reducing the attraction of the first magnetic component 16 to the second magnetic component 17 is not repeated.

[0076] like Figure 6 As shown, as an embodiment, the present application provides an adjustment method for an air spindle 100 in which a first magnetic member 16 and a second magnetic member 17 repel each other, and the adjustment method comprises the following steps:

[0077] S1: When the air bearing 15 is tilted, the first magnetic member 16 repels the second magnetic member 17 located between the air bearing 15 and the inner wall of the housing 11;

[0078] S2: The second magnetic member 17 moves away from the inner wall of the housing 11 , so that the distance between the side of the air bearing 15 corresponding to the second magnetic member 17 and the inner wall of the housing 11 increases, until the axis of the air bearing 15 coincides with the axis of the main shaft 12 .

[0079] Specifically, in step S1, the magnetic field force of the first magnetic member 16 or the second magnetic member 17 is increased, thereby increasing the repulsive force between the first magnetic member 16 and the second magnetic member 17, so that the repulsive force on the second magnetic member 17 is greater than the force exerted by the elastic member 18 on the second magnetic member 17.

[0080] In step S2, the increased repulsive force exerted on the second magnetic component 17 can drive the second magnetic component 17 to move in the direction away from the inner wall of the shell 11, that is, the second magnetic component 17 moves toward the main shaft 12, so that the second magnetic component 17 can drive the corresponding side of the air bearing 15 to deflect toward the main shaft 12, thereby realizing the correction adjustment of the tilted air bearing 15 until the axis of the air bearing 15 coincides with the axis of the main shaft 12.

[0081] like Figure 2 and Figure 7As shown, as an implementation mode, two first magnetic members 16, two second magnetic members 17 and two elastic members 18 are provided, the two first magnetic members 16 are distributed outside the housing 11 along the axial direction of the main shaft 12, and the two second magnetic members 17 are distributed on the outer peripheral surface of the air bearing 15 along the axial direction of the air bearing 15. Moreover, each elastic member 18 corresponds to one second magnetic member 17, and each first magnetic member 16 corresponds to one second magnetic member 17.

[0082] Specifically, the two first magnetic members 16 are defined as the first magnetic member 161 and the second magnetic member 162, the second magnetic member 17 matched with the first magnetic member 161 is defined as the third magnetic member 171, and the second magnetic member 17 matched with the second magnetic member 162 is defined as the fourth magnetic member 172. The adjustment method includes the following steps:

[0083] S1: The detection mechanism detects that the rotation speed of the main shaft 12 is less than the preset rotation speed, and the air bearing 15 tilts;

[0084] S2: the first magnetic member 161 repels the third magnetic member 171 , so that the distance between the side of the air bearing 15 corresponding to the third magnetic member 171 and the inner wall of the housing 11 increases;

[0085] S3: The detection mechanism detects whether the rotation speed of the main shaft 12 increases. If the detection mechanism detects that the rotation speed of the main shaft 12 increases, the first magnetic component 161 continues to repel the corresponding third magnetic component 171 until the axis of the air bearing 15 coincides with the axis of the main shaft 12; if the detection mechanism detects that the rotation speed of the main shaft 12 decreases, the first magnetic component 161 stops repelling the corresponding third magnetic component 171, and the second magnetic component 162 repels the fourth magnetic component 172, so that the distance between the side of the air bearing 15 corresponding to the fourth magnetic component 172 and the inner wall of the shell 11 increases until the axis of the air bearing 15 coincides with the axis of the main shaft 12.

[0086] Specifically, in step S1, the preset speed is the speed of the spindle 12 when the axis of the air bearing 15 coincides with the axis of the spindle 12. Therefore, when the actual speed of the spindle 12 is less than the preset speed, it can be determined that the air bearing 15 is tilted.

[0087] In step S2, the repulsive force between the first magnetic component 161 and the third magnetic component 171 is increased so that the repulsive force on the third magnetic component 171 is greater than the force exerted by the elastic component 18 on the third magnetic component 171, thereby enabling the above-mentioned repulsive force to drive the third magnetic component 171 to move in a direction away from the inner wall of the shell 11, that is, the third magnetic component 171 moves toward the main shaft 12, and drives one side of the corresponding air bearing 15 to deflect toward the main shaft 12 through the third magnetic component 171.

[0088] In step S3, while the third magnetic member 171 drives the air bearing 15 to deflect, the detection mechanism monitors the rotation speed of the main shaft 12 in real time. When the rotation speed of the main shaft 12 detected by the detection mechanism gradually increases, it can be determined that the axis of the air bearing 15 gradually coincides with the axis of the main shaft 12, that is, the actual tilt direction of the air bearing 15 is that the side of the air bearing 15 corresponding to the third magnetic member 171 is tilted toward the inner wall of the housing 11, so the repulsive force between the first magnetic member 161 and the third magnetic member 171 can be continued to increase, so that the air bearing 15 continues to deflect, until the detection mechanism detects that the rotation speed of the main shaft 12 reaches the preset speed, and then stops increasing the repulsive force between the first magnetic member 161 and the third magnetic member 171, so that the repulsive force on the third magnetic member 171 can be balanced with the force of the corresponding elastic member 18 on the third magnetic member 171, thereby stabilizing the position of the third magnetic member 171, and then making the axis of the air bearing 15 coincide with the axis of the main shaft 12, and completing the correction of the air bearing 15. When the rotation speed of the main shaft 12 detected by the detection mechanism gradually decreases, it can be determined that the degree of deviation between the axis of the air bearing 15 and the axis of the main shaft 12 is gradually increasing. Therefore, it can be determined that the actual tilt direction of the air bearing 15 is that the side of the air bearing 15 corresponding to the fourth magnetic component 172 is tilted toward the inner wall of the shell 11. Therefore, the first magnetic member 161 stops repelling the corresponding third magnetic member 171, and increases the repulsive force between the second magnetic member 162 and the fourth magnetic member 172, so that the fourth magnetic member 172 moves in the direction away from the inner wall of the shell 11, that is, the fourth magnetic member 172 moves toward the main shaft 12, so that the fourth magnetic member 172 drives one side of the corresponding air bearing 15 to deflect toward the main shaft 12, until the rotation speed of the main shaft 12 detected by the detection mechanism reaches the preset rotation speed, and then stops increasing the repulsive force between the second magnetic member 162 and the fourth magnetic member 172, so that the repulsive force on the fourth magnetic member 172 is balanced with the force of the corresponding elastic member 18 on the fourth magnetic member 172, so as to stabilize the position of the fourth magnetic member 172, and then make the axis of the air bearing 15 coincide with the axis of the main shaft 12, and complete the deviation correction of the air bearing 15.

[0089] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. An air spindle, comprising: Housing (11); a main shaft (12), wherein at least a portion of the main shaft (12) is located inside the housing (11) and is rotationally connected to the housing (11); a rotor (13), the rotor (13) being located in the housing (11) and connected to the main shaft (12); a stator (14), the stator (14) being located in the housing (11) and at least partially arranged around the rotor (13); An air bearing (15), the air bearing (15) being at least partially mounted in the housing (11) and rotatably connecting the main shaft (12) to the housing (11); It is characterized in that The air spindle also includes: A first magnetic component (16), wherein the first magnetic component (16) is installed outside the housing (11); a second magnetic member (17), the second magnetic member (17) being located between the inner wall of the shell (11) and the air bearing (15), the second magnetic member (17) being configured to be repelled by the first magnetic member (16) so as to adjust the distance between the second magnetic member (17) and the inner wall of the shell (11); wherein the second magnetic member (17) deviates from the middle position of the air bearing (15) along its axial direction; an elastic member (18), the elastic member (18) being located between an inner wall of the housing (11) and the second magnetic member (17); The elastic member (18) has a deformable margin, and the deformable margin is configured to be deformed when the first magnetic member (16) repels the second magnetic member (17), so that the distance between the second magnetic member (17) and the inner wall of the shell (11) increases. The deformation of the deformable margin causes the deformable margin to exert a force on the second magnetic member (17), and the force causes the second magnetic member (17) to have a tendency to move toward the inner wall of the shell (11).

2. The air spindle according to claim 1, characterized in that: At least two of the first magnetic member (16), the second magnetic member (17) and the elastic member (18) are provided, at least two of the first magnetic members (16) are distributed on the outside of the shell (11) along the axial direction of the main shaft (12), at least two of the second magnetic members (17) are distributed on the outer peripheral surface of the air bearing (15) along the axial direction of the air bearing (15), each of the elastic members (18) corresponds to one of the second magnetic members (17), and each of the first magnetic members (16) corresponds to one of the second magnetic members (17).

3. The air spindle according to claim 2, characterized in that: The air spindle further comprises a plurality of insulating isolation layers, at least one of the insulating isolation layers being located between two adjacent first magnetic members (16), and at least one of the insulating isolation layers being located between two adjacent second magnetic members (17).

4. The air spindle according to claim 1, characterized in that: The first magnetic component (16) or the second magnetic component (17) is an electromagnet.

5. The air spindle according to claim 1, characterized in that: The second magnetic member (17) is configured as a flat arc-shaped sheet structure or a block structure.

6. The air spindle according to claim 1, characterized in that: The air spindle further comprises a detection mechanism, which is located on the spindle (12) or the housing (11), and is configured to detect the rotation speed of the spindle (12).

7. The air spindle according to claim 1, characterized in that: An annular groove (111) for fixing the air bearing (15) is provided in the housing (11); the air bearing (15) is at least partially located in the annular groove (111); and the second magnetic member (17) is located between the bottom of the annular groove (111) and the air bearing (15); A limiting protrusion (121) is formed on the main shaft (12), a limiting groove (122) is provided on the limiting protrusion (121), the air bearing (15) is at least partially located in the limiting groove (122), and a gap exists between the air bearing (15) and the limiting groove (122).

8. The air spindle according to claim 7, characterized in that: The air spindle further comprises an elastic layer (19) and / or a lubricating layer (20), and the elastic layer (19) and / or the lubricating layer (20) are located on both sides of the side wall of the air bearing (15) close to the limiting groove (122).

9. A method for adjusting an air spindle, applicable to the air spindle according to any one of claims 1 to 8, characterized in that: The adjustment method comprises: When the air bearing (15) tilts, the first magnetic member (16) repels the second magnetic member (17) located between the air bearing (15) and the inner wall of the housing (11); The second magnetic member (17) moves in a direction away from the inner wall of the shell (11), so that the distance between the side of the air bearing (15) corresponding to the second magnetic member (17) and the inner wall of the shell (11) increases, until the axis of the air bearing (15) is parallel to the axis of the main shaft (12).

10. The method for adjusting an air spindle according to claim 9, characterized in that: The air spindle further comprises an elastic member (18) located between the air bearing (15) and the inner wall of the shell (11) and a detection mechanism capable of detecting the rotation speed of the spindle (12); two of each of the first magnetic member (16), the second magnetic member (17) and the elastic member (18) are provided; the two first magnetic members (16) are distributed on the outside of the shell (11) along the axial direction of the spindle (12); the two second magnetic members (17) are distributed on the outer peripheral surface of the air bearing (15) along the axial direction of the air bearing (15); each of the elastic members (18) corresponds to one of the second magnetic members (17); and each of the first magnetic members (16) corresponds to one of the second magnetic members (17); The two first magnetic components (16) are defined as a first magnetic component (161) and a second magnetic component (162), the second magnetic component (17) matched with the first magnetic component (161) is defined as a third magnetic component (171), and the second magnetic component (17) matched with the second magnetic component (162) is defined as a fourth magnetic component (172); The adjustment method comprises: The detection mechanism detects that the rotation speed of the main shaft (12) is less than a preset rotation speed, and the air bearing (15) tilts; The first magnetic component (161) repels the third magnetic component (171), so that the distance between a side of the air bearing (15) corresponding to the third magnetic component (171) and the inner wall of the housing (11) increases; The detection mechanism detects whether the rotation speed of the main shaft (12) increases. If the detection mechanism detects that the rotation speed of the main shaft (12) increases, the first magnetic component (161) continues to repel the corresponding third magnetic component (171) until the axis of the air bearing (15) is parallel to the axis of the main shaft (12); if the detection mechanism detects that the rotation speed of the main shaft (12) decreases, the first magnetic component (161) stops repelling the corresponding third magnetic component (171), and the second magnetic component (162) repels the fourth magnetic component (172), so that the distance between the side of the air bearing (15) corresponding to the fourth magnetic component (172) and the inner wall of the shell (11) increases until the axis of the air bearing (15) is parallel to the axis of the main shaft (12).

Citation Information

Patent Citations

  • High-speed precise main shaft supported by spherical gas magnetic bearing

    CN117340294A