Air spindle

Abstract

The invention discloses an air spindle. The air spindle comprises a shell, a spindle body, a rotor, a stator and an air bearing. The air bearing is at least partially located in the limiting groove, a gap exists between the air bearing and the limiting groove, the air bearing is provided with an air inlet channel, a first auxiliary gas channel and a second auxiliary gas channel, the first auxiliary gas channel is provided with a first through groove, the second auxiliary gas channel is provided with a second through groove, and the gap comprises a first gap and a second gap; the limiting groove comprises a first side wall and a second side wall which are distributed in the axial direction of the air bearing, a first push plate is arranged in the first through groove, a second push plate is arranged in the second through groove, and under the condition that the air bearing is inclined, the first push plate can at least partially move into the first gap and has acting force on the first side wall, or the first push plate can at least partially move into the second gap and has acting force on the second side wall. The second push plate can at least partially move into the second gap and has acting force on the second side wall. Through the arrangement, the air bearing can automatically reset, and the stability of the air bearing is enhanced.

Description

Technical Field

[0001] The present application relates to the technical field of spindles, and in particular to an air spindle. Background Art

[0002] The air spindle uses an air bearing to rotate and support the spindle. The air bearing is a common non-contact bearing that supports and reduces friction by generating an air film between the spindle and the bearing. When the spindle rotates, the gas inside the air bearing forms a high-speed air film due to the centrifugal force. This air film separates the spindle from the air bearing, allowing the spindle to rotate freely, reducing friction and wear. During the operation of the air bearing, due to the poor stability of the air film, the air bearing will be skewed, resulting in greater rotational friction between the spindle and the air bearing, and the air bearing cannot reduce the rotational friction of the spindle, thereby reducing the rotation accuracy of the air spindle.

[0003] Therefore, when the air bearing is tilted, how to adjust the state of the air bearing to improve the rotation accuracy of the air spindle is a technical problem that needs to be solved urgently in the art. Summary of the invention

[0004] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide an air spindle, which can solve the eccentricity problem generated during the operation of the spindle, so that the operation of the spindle remains balanced.

[0005] To achieve the above objectives, this application adopts the following technical solutions: An air spindle, comprising: a shell, a spindle, a rotor, a stator and an air bearing; the spindle is at least partially located in the shell and rotatably connected to the shell, and the spindle is provided with a limiting groove; the rotor is located in the shell and connected to the spindle; the stator is located in the shell and is at least partially arranged around the rotor; the air bearing is at least partially installed in the shell and rotatably connects the spindle to the shell, the air bearing is at least partially located in the limiting groove and there is a gap between the limiting groove, the air bearing is provided with an air inlet channel for conveying gas to the gap; the air bearing is provided with a first auxiliary gas channel and a second auxiliary gas channel, the first auxiliary gas channel has a first through groove connected to one axial end of the air bearing, and the second auxiliary gas channel has A second through groove connected to the other axial end of the air-floating bearing, the gap includes a first gap and a second gap, the limiting groove includes a first side wall and a second side wall distributed along the axial direction of the air-floating bearing, the first gap is located between the air-floating bearing and the first side wall, the second gap is located between the air-floating bearing and the second side wall, the first through groove connects the first gap, the second through groove connects the second gap, a movable first push plate is arranged in the first through groove, and a movable second push plate is arranged in the second through groove, when the air-floating bearing is tilted, the first push plate can at least partially move into the first gap and have a force on the first side wall, or the second push plate can at least partially move into the second gap and have a force on the second side wall.

[0006] As a preferred technical solution, when the air bearing is tilted, the first push plate can be affected by the pressure difference to at least partially move into the first gap, or the second push plate can be affected by the pressure difference to at least partially move into the second gap; when the air bearing is in normal working state, the first push plate is reset to the first through groove, or the second push plate is reset to the second through groove.

[0007] As a preferred technical solution, when the air bearing is tilted, the first auxiliary gas channel supplies gas to the first through groove so that the first push plate is at least partially moved into the first gap, or the second auxiliary gas channel supplies gas to the second through groove so that the second push plate is at least partially moved into the second gap.

[0008] As a preferred technical solution, when the air bearing is in a normal working state, the first auxiliary gas channel sucks air into the first groove to move the first push plate into the first groove, or the second auxiliary gas channel sucks air into the second groove to move the second push plate into the second groove.

[0009] As a preferred technical solution, the air spindle includes a third push plate, a fourth push plate, a first connecting member and a second connecting member. The third push plate is located in the first through groove and is connected to the first push plate through the first connecting member. The fourth push plate is located in the second through groove and is connected to the second push plate through the second connecting member. The first connecting member and the second connecting member are elastic.

[0010] As a preferred technical solution, the first push plate and the second push plate are magnetic parts, a first electromagnetic part is arranged in the first through groove, and a second electromagnetic part is arranged in the second through groove. When the air bearing is in normal working state, the first electromagnetic part attracts the first push plate so that the first push plate moves into the first through groove, or the second electromagnetic part attracts the second push plate so that the second push plate moves into the second through groove.

[0011] As a preferred technical solution, the first through groove is provided with a first track and a first slider slidably connected to the first track, one end of the first push plate is fixedly connected to the first slider, and the end of the first push plate facing away from the first slider is arranged closer to the first side wall than the end of the first push plate close to the first slider; the second through groove is provided with a second track and a second slider slidably connected to the second track, one end of the second push plate is fixedly connected to the second slider, and the end of the second push plate facing away from the second slider is arranged closer to the second side wall than the end of the second push plate close to the second slider.

[0012] As a preferred technical solution, the first through groove is provided with a first track and a first slider slidably connected to the first track, and one end of the first push plate is rotatably connected to the first slider; The second through groove is provided with a second track and a second slider slidably connected to the second track, and one end of the second push plate is rotatably connected to the second slider.

[0013] As a preferred technical solution, the air spindle includes a first air pressure sensing module and a second air pressure sensing module; the first air pressure sensing module is configured to detect the air pressure of the first gap close to the bottom of the limiting groove, and the second air pressure sensing module is configured to detect the air pressure of the first gap close to the mouth of the limiting groove; or, the first air pressure sensing module is configured to detect the air pressure of the second gap close to the bottom of the limiting groove, and the second air pressure sensing module is configured to detect the air pressure of the second gap close to the mouth of the limiting groove.

[0014] As a preferred technical solution, the first auxiliary gas channel and the second auxiliary gas channel are distributed on both sides of the air inlet channel along the axial direction of the air bearing.

[0015] Compared with the prior art, the beneficial effects of this application are: The present application provides an air spindle. When the air bearing is tilted, the first push plate at least partially moves to the first gap and generates a force on the first side wall, so that the air bearing returns to the center; or the second push plate at least partially moves to the second gap and generates a force on the second side wall, so that the air bearing returns to the center, thereby making the axis of the air bearing coincide with the axis of the spindle to improve the rotation accuracy of the air spindle. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of the air spindle of this application; Figure 2 It is a partial structural schematic diagram of the air spindle of Example 1 of the present application; Figure 3 for Figure 2 A partial enlarged view of the middle A; Figure 4 This is a schematic structural diagram of the air bearing in Example 1 of the present application in a normal working state; Figure 5 This is a partial structural schematic diagram of the air spindle of Example 2 of the present application; Figure 6 for Figure 5 A partial enlarged view of point B in the middle; Figure 7 This is a schematic structural diagram of the air bearing in Example 2 of the present application in a normal working state; Figure 8 This is a partial structural schematic diagram of the air spindle of Example 3 of the present application; Fig. 9 for Figure 8 A partial enlarged view of point C in the middle; Fig.10 This is a schematic structural diagram of the air bearing in Example 3 of the present application in a normal working state; Among them: 100, air spindle; 11, shell; 12, spindle; 121, limit groove; 1211, first side wall; 1212, second side wall; 13, rotor; 14, stator; 15, air bearing; 151, air inlet channel; 152, first auxiliary gas channel; 1521, first through groove; 153, second auxiliary gas channel; 1531, second through groove; 16, gap; 161, first gap; 162, second gap; 17, first push plate; 18, second push plate; 19, first air pressure sensor module; 110, second air pressure sensor module; 111, first track; 112, first slider; 113, second track; 114, second slider; 115, first electromagnetic component; 116, second electromagnetic component; 117, third push plate; 118, fourth push plate; 119, first connecting member; 120, second connecting member. DETAILED DESCRIPTION

[0017] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0018] like Figure 1 As shown, the present application provides an air spindle 100 , which includes: a housing 11 , a spindle 12 , a rotor 13 , a stator 14 and an air bearing 15 .

[0019] The main shaft 12 is at least partially located in the housing 11 and is rotatably connected to the housing 11. The rotor 13 is located in the housing 11 and is fixedly connected to the main shaft 12. The stator 14 is located in the housing 11 and is at least partially arranged around the rotor 13. The rotor 13 can drive the main shaft to rotate relative to the housing 11 under the action of the stator 14. The air bearing 15 is at least partially installed in the housing 11 and rotatably connects the main shaft 12 to the housing 11.

[0020] like Figure 1 , Figure 2 and Figure 3 As shown, the main shaft 12 is provided with a limiting groove 121, and the air bearing 15 is at least partially located in the limiting groove 121 and there is a gap 16 between the limiting groove 121. The gap 16 includes a gap between the inner peripheral wall of the air bearing 15 and the bottom of the limiting groove 121, and a gap between the axial end face of the air bearing 15 and the side wall of the limiting groove 121. The gap between the axial end face of the air bearing 15 and the side wall of the limiting groove 121 includes a first gap 161 and a second gap 162. The limiting groove 121 includes a first side wall 1211 and a second side wall 1212 distributed along the axial direction of the air bearing 15, the first gap 161 is located between the air bearing 15 and the first side wall 1211, and the second gap 162 is located between the air bearing 15 and the second side wall 1212.

[0021] The limiting groove 121 is an annular groove opened on the outer peripheral wall of the main shaft 12 and arranged circumferentially along the outer peripheral wall of the main shaft 12. The air bearing 15 is at least partially located in the limiting groove 121 to realize the axial displacement constraint and radial displacement constraint of the air bearing 15 and the main shaft 12. The gap 16 between the air bearing 15 and the limiting groove 121 allows the air film to be generated between the air bearing 15 and the limiting groove 121 after the air bearing 15 is ventilated. This air film separates the main shaft 12 from the air bearing 15, so that the main shaft 12 can rotate freely, reducing the friction and wear of the main shaft 12.

[0022] The air bearing 15 is provided with an air inlet channel 151, a first auxiliary gas channel 152 and a second auxiliary gas channel 153. The air inlet channel 151 is used to transport gas to the gap between the inner peripheral wall of the air bearing 15 and the bottom of the limiting groove 121. The first auxiliary gas channel 152 has a first through groove 1521, and the second auxiliary gas channel 153 has a second through groove 1531. The first through groove 1521 is connected to one axial end of the air bearing 15, and the second through groove 1531 is connected to the other axial end of the air bearing 15. The first through groove 1521 is connected to the first gap 161, and the second through groove 1531 is connected to the second gap 162.

[0023] A movable first push plate 17 is disposed in the first through slot 1521, and a movable second push plate 18 is disposed in the second through slot 1531. When the air bearing 15 is tilted, the first push plate 17 can at least partially move into the first gap 161 and exert a force on the first side wall 1211, or the second push plate 18 can at least partially move into the second gap 162 and exert a force on the second side wall 1212.

[0024] When the air bearing 15 is tilted, the first gap 161 and the second gap 162 will be in a shape where the thickness gradually widens or narrows from the bottom of the limiting groove 121 to the groove opening. When the first gap 161 is in a shape where the thickness gradually widens from the bottom of the limiting groove 121 to the groove opening, the second gap 162 is in a shape where the thickness gradually narrows from the bottom of the limiting groove 121 to the groove opening; when the first gap 161 is in a shape where the thickness gradually narrows from the bottom of the limiting groove 121 to the groove opening, the second gap 162 is in a shape where the thickness gradually widens from the bottom of the limiting groove 121 to the groove opening.

[0025] When the thickness of the first gap 161 at the notch of the first through slot 1521 decreases, the first push plate 17 at least partially moves to the first gap 161 and generates a force on the first side wall 1211, so that the air bearing 15 returns to the center; when the thickness of the second gap 162 at the notch of the second through slot 1531 decreases, the second push plate 18 at least partially moves to the second gap 162 and generates a force on the second side wall 1212, so that the air bearing 15 returns to the center. In this way, the axis of the air bearing 15 can be made to coincide with the axis of the main shaft 12, so as to improve the rotation accuracy of the air main shaft 100.

[0026] Specifically, the first auxiliary gas channel 152 and the second auxiliary gas channel 153 are distributed on both sides of the air inlet channel 151 along the axial direction of the air bearing 15. On the one hand, the masses on both sides of the air inlet channel 151 of the air bearing 15 are made consistent, so that the air bearing 15 is not easy to tilt during operation; on the other hand, the first push plate 17 and the second push plate 18 are arranged so that the force of the first push plate 17 on the first side wall 1211 and the force of the second push plate 18 on the second side wall 1212 are opposite in direction.

[0027] As an implementation, the air spindle 100 includes a first air pressure sensing module 19 and a second air pressure sensing module 110. The first air pressure sensing module 19 is configured to detect the air pressure of the first gap 161 near the bottom of the limiting groove 121, and the second air pressure sensing module 110 is configured to detect the air pressure of the first gap 161 near the notch of the limiting groove 121; or, the first air pressure sensing module 19 is configured to detect the air pressure of the second gap 162 near the bottom of the limiting groove 121, and the second air pressure sensing module 110 is configured to detect the air pressure of the second gap 162 near the notch of the limiting groove 121. By comparing the air pressure detection results of the first air pressure sensor module 19 and the second air pressure sensor module 110, it is determined whether the air bearing 15 is in a tilted state or in a normal working state: if the air pressure measured by the first air pressure sensor module 19 is greater than the air pressure measured by the second air pressure sensor module 110, or the air pressure measured by the second air pressure sensor module 110 is greater than the air pressure measured by the first air pressure sensor module 19, then the air bearing 15 is in a tilted state; if the air pressure measured by the first air pressure sensor module 19 is equal to the air pressure measured by the second air pressure sensor module 110, then the air bearing 15 is in a normal working state.

[0028] The return method of the air bearing 15 is described below through Example 1, Example 2 and Example 3.

[0029] Example 1 like Figure 2 and Figure 3As shown, in Embodiment 1, when the air bearing 15 is tilted, the first push plate 17 can be acted upon by the pressure difference to at least partially move into the first gap 161 , or the second push plate 18 can be acted upon by the pressure difference to at least partially move into the second gap 162 .

[0030] After the gas is delivered to the gap between the inner wall of the air-floating bearing 15 and the bottom of the limiting groove 121, it will leave the limiting groove 121 through the first gap 161 and the second gap 162. Therefore, the thickness of the first gap 161 and the second gap 162 determines the flow rate of the gas flowing through the first gap 161 and the second gap 162. The smaller the thickness of the first gap 161 and the second gap 162, the greater the flow rate of the gas flowing through the first gap 161 and the second gap 162, and the smaller the pressure; on the contrary, the greater the thickness of the first gap 161 and the second gap 162, the smaller the flow rate of the gas flowing through the first gap 161 and the second gap 162, and the greater the pressure. When the pressure of the gas flowing through the first gap 161 at the notch of the first through groove 1521 close to the first gap 161 is less than the pressure of the gas inside the first auxiliary gas channel 152, the first push plate 17 is at least partially moved into the first gap 161 by the pressure difference, generating a force on the first side wall 1211, so that the air-floating bearing 15 returns to the normal position. Figure 4 Similarly, when the pressure of the gas flowing through the second gap 162 at the notch of the second through groove 1531 near the second gap 162 is less than the pressure of the gas inside the second auxiliary gas channel 153, the second push plate 18 is at least partially moved into the second gap 162 by the pressure difference, generating a force on the second side wall 1212, so that the air bearing 15 returns to the normal position. Figure 4 Status shown.

[0031] The first auxiliary gas channel 152 and the second auxiliary gas channel 153 are both connected to the outside of the air bearing 15. Therefore, the pressure of the gas inside the first auxiliary gas channel 152 and the second auxiliary gas channel 153 is equal, so that the gas pressure of the first gap 161 near the first through groove 1521 is also equal to the gas pressure of the second gap 162 near the second through groove 1531, thereby ensuring that the thickness of the first gap 161 near the first through groove 1521 is equal to the thickness of the second gap 162 near the second through groove 1531.

[0032] like Figure 4 As shown, when the air bearing 15 is in a normal working state, the first push plate 17 is reset to the first through groove 1521 , or the second push plate 18 is reset to the second through groove 1531 .

[0033] As a way to achieve this, Figure 2 and Figure 3As shown, the first through slot 1521 is provided with a first track 111 and a first slider 112 slidably connected to the first track 111, one end of the first push plate 17 is fixedly connected to the first slider 112, and the end of the first push plate 17 away from the first slider 112 is arranged closer to the first side wall 1211 than the end of the first push plate 17 close to the first slider 112. The second through slot 1531 is provided with a second track 113 and a second slider 114 slidably connected to the second track 113, one end of the second push plate 18 is fixedly connected to the second slider 114, and the end of the second push plate 18 away from the second slider 114 is arranged closer to the second side wall 1212 than the end of the second push plate 18 close to the second slider 114.

[0034] Specifically, the first slider 112 is connected to the groove wall of the first through groove 1521 through a spring, so that the first slider 112 has a tendency to drive the first push plate 17 to move into the first through groove 1521, so that when the air bearing 15 is in a normal working state, the first push plate 17 automatically resets to the first through groove 1521; the second slider 114 is connected to the groove wall of the second through groove 1531 through a spring, so that the second slider 114 has a tendency to drive the second push plate 18 to move into the second through groove 1531, so that when the air bearing 15 is in a normal working state, the second push plate 18 automatically resets to the second through groove 1531.

[0035] As another implementation method, the first through groove 1521 is provided with a first rail 111 and a first slider 112 slidably connected to the first rail 111, and one end of the first push plate 17 is rotatably connected to the first slider 112; the second through groove 1531 is provided with a second rail 113 and a second slider 114 slidably connected to the second rail 113, and one end of the second push plate 18 is rotatably connected to the second slider 114.

[0036] Specifically, the first push plate 17 is provided with a torsion spring at the rotation connection with the first slider 112, so that the first push plate 17 has a tendency to rotate into the first through groove 1521, so that when the air bearing 15 is in a normal working state, the first push plate 17 automatically resets to the first through groove 1521; the second push plate 18 is provided with a torsion spring at the rotation connection with the second slider 114, so that the second push plate 18 has a tendency to rotate into the second through groove 1531, so that when the air bearing 15 is in a normal working state, the second push plate 18 automatically resets to the second through groove 1531.

[0037] It should be noted that the first rail 111 is provided with a first limiter at one end close to the first gap 161 to prevent the first slider 112 from escaping from the first rail 111 ; the second rail 113 is provided with a second limiter at one end close to the second gap 162 to prevent the second slider 114 from escaping from the second rail 113 .

[0038] Example 2 like Figure 5 and Figure 6 As shown, in Example 2, when the air bearing 15 is tilted, the first auxiliary gas channel 152 supplies gas to the first through groove 1521 so that the first push plate 17 is at least partially moved into the first gap 161, or the second auxiliary gas channel 153 supplies gas to the second through groove 1531 so that the second push plate 18 is at least partially moved into the second gap 162.

[0039] After the first auxiliary gas channel 152 supplies gas to the first through groove 1521, the first push plate 17 is at least partially moved into the first gap 161 by the pressure of the gas inside the first auxiliary gas channel 152, generating a force on the first side wall 1211, so that the air bearing 15 returns to the center; similarly, after the second auxiliary gas channel 153 supplies gas to the second through groove 1531, the second push plate 18 is at least partially moved into the second gap 162 by the pressure of the gas inside the second auxiliary gas channel 153, generating a force on the second side wall 1212, so that the air bearing 15 returns to the center.

[0040] When the air bearing 15 is in a normal working state, the first push plate 17 is reset to the first through groove 1521 , or the second push plate 18 is reset to the second through groove 1531 .

[0041] As a way to achieve this, Figure 7 As shown, when the air bearing 15 is in a normal working state, the first auxiliary gas channel 152 sucks air into the first through groove 1521 so that the first push plate 17 moves into the first through groove 1521, or the second auxiliary gas channel 153 sucks air into the second through groove 1531 so that the second push plate 18 moves into the second through groove 1531. After the first auxiliary gas channel 152 sucks air into the first through groove 1521, the pressure on the side of the first push plate 17 close to the first through groove 1521 is less than the pressure on the side of the first push plate 17 close to the first gap 161, so that the first push plate 17 moves into the first through groove 1521, that is, the first push plate 17 is reset to the first through groove 1521. After the second auxiliary gas channel 153 draws air into the second through groove 1531, the pressure on the side of the second push plate 18 close to the second through groove 1531 is less than the pressure on the side of the second push plate 18 close to the second gap 162, so that the second push plate 18 moves into the second through groove 1531, that is, the second push plate 18 is reset to the second through groove 1531.

[0042] Specifically, ventilation or suction to the first auxiliary gas channel 152 and ventilation or suction to the second auxiliary gas channel 153 are realized through the air source control component. The air source control component is connected to the first air pressure sensing module 19 and the second air pressure sensing module 110 for communication. If the first air pressure sensing module 19 and the second air pressure sensing module 110 detect that the air floating bearing 15 is in a tilted state, the air source control component controls ventilation to the first auxiliary gas channel 152 or the second auxiliary gas channel 153; if the first air pressure sensing module 19 and the second air pressure sensing module 110 detect that the air floating bearing 15 is in a normal working state, the air source control component controls suction to the first auxiliary gas channel 152 or the second auxiliary gas channel 153, so that the first push plate 17 or the second push plate 18 is reset. It should be noted that the air source control component can be a pressure control valve, etc. Among them, the air source control component is connected to an external gas transmission device, so that the air source control component can control the gas transmission and suction of the external gas transmission device.

[0043] As an implementation, the first through slot 1521 is provided with a first track 111 and a first slider 112 slidably connected to the first track 111, one end of the first push plate 17 is fixedly connected to the first slider 112, and the end of the first push plate 17 away from the first slider 112 is arranged closer to the first side wall 1211 than the end of the first push plate 17 close to the first slider 112. The second through slot 1531 is provided with a second track 113 and a second slider 114 slidably connected to the second track 113, one end of the second push plate 18 is fixedly connected to the second slider 114, and the end of the second push plate 18 away from the second slider 114 is arranged closer to the second side wall 1212 than the end of the second push plate 18 close to the second slider 114.

[0044] As another implementation method, the first through groove 1521 is provided with a first rail 111 and a first slider 112 slidably connected to the first rail 111, and one end of the first push plate 17 is rotatably connected to the first slider 112; the second through groove 1531 is provided with a second rail 113 and a second slider 114 slidably connected to the second rail 113, and one end of the second push plate 18 is rotatably connected to the second slider 114.

[0045] It should be noted that the first rail 111 is provided with a first limiter at one end close to the first gap 161 to prevent the first slider 112 from escaping from the first rail 111 ; the second rail 113 is provided with a second limiter at one end close to the second gap 162 to prevent the second slider 114 from escaping from the second rail 113 .

[0046] As a way to achieve this, Figure 5 and Figure 6As shown, the first push plate 17 and the second push plate 18 are magnetic parts, the first electromagnetic part 115 is arranged in the first through groove 1521, and the second electromagnetic part 116 is arranged in the second through groove 1531. When the air bearing 15 is in a normal working state, the first electromagnetic part 115 attracts the first push plate 17 so that the first push plate 17 moves into the first through groove 1521, or the second electromagnetic part 116 attracts the second push plate 18 so that the second push plate 18 moves into the second through groove 1531. In this embodiment, the magnetic part is a component made of materials such as iron, nickel, cobalt or alloy steel. The first electromagnetic part 115 and the second electromagnetic part 116 are electromagnets, etc.

[0047] Specifically, the first through groove 1521 is provided with a first rail 111 and a first slider 112 slidably connected to the first rail 111, and one end of the first push plate 17 is rotatably connected to the first slider 112; the second through groove 1531 is provided with a second rail 113 and a second slider 114 slidably connected to the second rail 113, and one end of the second push plate 18 is rotatably connected to the second slider 114.

[0048] It should be noted that the first rail 111 is provided with a first limiter at one end close to the first gap 161 to prevent the first slider 112 from escaping from the first rail 111 ; the second rail 113 is provided with a second limiter at one end close to the second gap 162 to prevent the second slider 114 from escaping from the second rail 113 .

[0049] Specifically, the first electromagnetic component 115 is connected to the first air pressure sensing module 19 and the second air pressure sensing module 110 for communication; the second electromagnetic component 116 is connected to the first air pressure sensing module 19 and the second air pressure sensing module 110 for communication. If the first air pressure sensing module 19 and the second air pressure sensing module 110 detect that the air bearing 15 is in a normal working state, the first electromagnetic component 115 adsorbs the first push plate 17 or the second electromagnetic component 116 adsorbs the second push plate 18, so that the first push plate 17 or the second push plate 18 is reset.

[0050] Example 3 In Example 3, Figure 8 and Fig. 9As shown, the air spindle 100 includes a third push plate 117, a fourth push plate 118, a first connecting member 119 and a second connecting member 120. The third push plate 117 is located in the first through groove 1521 and is connected to the first push plate 17 through the first connecting member 119, and the fourth push plate 118 is located in the second through groove 1531 and is connected to the second push plate 18 through the second connecting member 120; the first connecting member 119 and the second connecting member 120 are elastic. The first push plate 17 is located at a side close to the first gap 161 relative to the third push plate 117, and the second push plate 18 is located at a side close to the second gap 162 relative to the fourth push plate 118. In this embodiment, the first connecting member 119 and the second connecting member 120 are springs or the like.

[0051] When the air bearing 15 is tilted, the first auxiliary gas channel 152 delivers gas to the first through slot 1521 so that the third push plate 117 pushes the first push plate 17 out of the first through slot 1521, or the second auxiliary gas channel 153 delivers gas to the second through slot 1531 so that the fourth push plate 118 pushes the second push plate 18 out of the second through slot 1531. In addition, the first push plate 17 can be at least partially moved into the first gap 161 by the pressure difference, or the second push plate 18 can be at least partially moved into the second gap 162 by the pressure difference.

[0052] like Fig.10 As shown, when the air bearing 15 is in a normal working state, the first push plate 17 is reset to the first through groove 1521 , or the second push plate 18 is reset to the second through groove 1531 .

[0053] Specifically, when the air bearing 15 is in normal working state, the first auxiliary gas channel 152 draws air into the first slot 1521 to move the first push plate 17 into the first slot 1521 , or the second auxiliary gas channel 153 draws air into the second slot 1531 to move the second push plate 18 into the second slot 1531 .

[0054] When the air bearing 15 is in a normal working state, the pressure difference between the two sides of the first push plate 17 is reduced, so the first push plate 17 is reset under the elastic force of the first connecting member 119, or the pressure difference between the two sides of the second push plate 18 is reduced, so the second push plate 18 is reset under the elastic force of the second connecting member 120. At the same time, the first auxiliary gas channel 152 sucks air into the first through groove 1521 so that the third push plate 117 drives the first push plate 17 to move into the first through groove 1521, or the second auxiliary gas channel 153 sucks air into the second through groove 1531 so that the fourth push plate 118 drives the second push plate 18 to move into the second through groove 1531.

[0055] As a way to achieve this, Figure 8 and Fig. 9As shown, the first through slot 1521 is provided with a first track 111 and a first slider 112 slidably connected to the first track 111, and an end of the first push plate 17 away from the first slider 112 is arranged closer to the first side wall 1211 than an end of the first push plate 17 close to the first slider 112. One end of the third push plate 117 is fixedly connected to the first slider 112. The second through slot 1531 is provided with a second track 113 and a second slider 114 slidably connected to the second track 113, and an end of the second push plate 18 away from the second slider 114 is arranged closer to the second side wall 1212 than an end of the second push plate 18 close to the second slider 114. One end of the fourth push plate 118 is fixedly connected to the second slider 114.

[0056] It should be noted that the first rail 111 is provided with a first limiter at one end close to the first gap 161 to prevent the first slider 112 from escaping from the first rail 111 ; the second rail 113 is provided with a second limiter at one end close to the second gap 162 to prevent the second slider 114 from escaping from the second rail 113 .

[0057] It should be noted that Figure 2 , Figure 4 , Figure 5 , Figure 7 , Figure 8 , Fig.10 In the figure, the arrowed line segments in the air inlet channel 151, the first auxiliary gas channel 152, the second auxiliary gas channel 153 and the gap 16 indicate the flow direction of the gas.

[0058] It should be noted that the words "first", "second" and similar words used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "a" do not indicate a quantitative limitation, but indicate the existence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are only for the convenience of description and are not limited to one position or one spatial orientation. Words such as "include" or "comprise" mean that the elements or objects appearing before "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, and do not exclude other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0059] The singular forms "a", "said" and "the" used in this specification and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0060] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. An air spindle (100), comprising: Housing (11); A main shaft (12), wherein at least a portion of the main shaft (12) is located inside the housing (11) and is rotatably connected to the housing (11), and a limiting groove (121) is provided on the main shaft (12); a rotor (13), the rotor (13) being located in the housing (11) and connected to the main shaft (12); a stator (14), the stator (14) being located in the housing (11) and at least partially arranged around the rotor (13); an air bearing (15), wherein the air bearing (15) is at least partially installed in the housing (11) and rotatably connects the main shaft (12) to the housing (11); the air bearing (15) is at least partially located in the limiting groove (121) and a gap (16) exists between the air bearing (15) and the limiting groove (121); and the air bearing (15) is provided with an air inlet channel (151) for conveying gas to the gap (16); It is characterized in that The air-floating bearing (15) is provided with a first auxiliary gas channel (152) and a second auxiliary gas channel (153); the first auxiliary gas channel (152) has a first through groove (1521) connected to one axial end of the air-floating bearing (15); the second auxiliary gas channel (153) has a second through groove (1531) connected to the other axial end of the air-floating bearing (15); the gap (16) includes a first gap (161) and a second gap (162); the limiting groove (121) includes a first side wall (1211) and a second side wall (1212) distributed along the axial direction of the air-floating bearing (15); the first gap (161) is located between the air-floating bearing (15) and the first side wall (1211); the second gap (162) is located Between the air bearing (15) and the second side wall (1212), the first through groove (1521) is connected to the first gap (161), and the second through groove (1531) is connected to the second gap (162). A movable first push plate (17) is arranged in the first through groove (1521), and a movable second push plate (18) is arranged in the second through groove (1531). When the air bearing (15) is tilted, the first push plate (17) can at least partially move into the first gap (161) and exert a force on the first side wall (1211), or the second push plate (18) can at least partially move into the second gap (162) and exert a force on the second side wall (1212).

2. The air spindle (100) according to claim 1, characterized in that: When the air bearing (15) is tilted, the first push plate (17) can be affected by the pressure difference to at least partially move into the first gap (161), or the second push plate (18) can be affected by the pressure difference to at least partially move into the second gap (162); When the air bearing (15) is in a normal working state, the first push plate (17) is reset into the first through groove (1521), or the second push plate (18) is reset into the second through groove (1531).

3. The air spindle (100) according to claim 1, characterized in that: When the air bearing (15) is tilted, the first auxiliary gas channel (152) supplies gas to the first through groove (1521) so that the first push plate (17) is at least partially moved into the first gap (161), or the second auxiliary gas channel (153) supplies gas to the second through groove (1531) so that the second push plate (18) is at least partially moved into the second gap (162).

4. The air spindle (100) according to claim 3, characterized in that: When the air bearing (15) is in a normal working state, the first auxiliary gas channel (152) draws air into the first through groove (1521) so that the first push plate (17) moves into the first through groove (1521), or the second auxiliary gas channel (153) draws air into the second through groove (1531) so that the second push plate (18) moves into the second through groove (1531).

5. The air spindle (100) according to claim 4, characterized in that: The air spindle (100) comprises a third push plate (117), a fourth push plate (118), a first connecting member (119) and a second connecting member (120); the third push plate (117) is located in the first through groove (1521) and is connected to the first push plate (17) through the first connecting member (119); the fourth push plate (118) is located in the second through groove (1531) and is connected to the second push plate (18) through the second connecting member (120); The first connecting member (119) and the second connecting member (120) are elastic.

6. The air spindle (100) according to claim 3, characterized in that: The first push plate (17) and the second push plate (18) are magnetic parts. A first electromagnetic part (115) is arranged in the first through groove (1521), and a second electromagnetic part (116) is arranged in the second through groove (1531). When the air bearing (15) is in a normal working state, the first electromagnetic part (115) attracts the first push plate (17) so that the first push plate (17) moves into the first through groove (1521), or the second electromagnetic part (116) attracts the second push plate (18) so that the second push plate (18) moves into the second through groove (1531).

7. The air spindle (100) according to any one of claims 1 to 5, characterized in that: The first through groove (1521) is provided with a first track (111) and a first slider (112) slidably connected to the first track (111); one end of the first push plate (17) is fixedly connected to the first slider (112); and an end of the first push plate (17) facing away from the first slider (112) is arranged closer to the first side wall (1211) than an end of the first push plate (17) close to the first slider (112); The second through groove (1531) is provided with a second track (113) and a second slider (114) slidably connected to the second track (113); one end of the second push plate (18) is fixedly connected to the second slider (114); and an end of the second push plate (18) facing away from the second slider (114) is arranged closer to the second side wall (1212) than an end of the second push plate (18) close to the second slider (114).

8. The air spindle (100) according to any one of claims 1 to 6, characterized in that: The first through groove (1521) is provided with a first track (111) and a first slider (112) slidably connected to the first track (111), and one end of the first push plate (17) is rotatably connected to the first slider (112); The second through groove (1531) is provided with a second track (113) and a second slider (114) slidably connected to the second track (113), and one end of the second push plate (18) is rotatably connected to the second slider (114).

9. The air spindle (100) according to any one of claims 1 to 6, characterized in that: The air spindle (100) comprises a first air pressure sensing module (19) and a second air pressure sensing module (110); The first air pressure sensing module (19) is configured to detect the air pressure of the first gap (161) close to the bottom of the limiting groove (121), and the second air pressure sensing module (110) is configured to detect the air pressure of the first gap (161) close to the notch of the limiting groove (121); Alternatively, the first air pressure sensing module (19) is configured to be able to detect the air pressure of the second gap (162) near the bottom of the limiting groove (121), and the second air pressure sensing module (110) is configured to be able to detect the air pressure of the second gap (162) near the notch of the limiting groove (121).

10. The air spindle (100) according to any one of claims 1 to 6, characterized in that: The first auxiliary gas channel (152) and the second auxiliary gas channel (153) are distributed on both sides of the air inlet channel (151) along the axial direction of the air bearing (15).

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